Silicon Carbide Seed Crystal and Graphite Paper Bonding Equipment and Method

Abstract

The present invention provides a bonding device and method for a silicon carbide seed crystal and a graphite paper, belonging to the technical field of crystal bonding. It includes a carrying device for carrying the seed crystal, a limiting device for limiting the graphite paper, and further includes a pressing device. The pressing device is located on the side of the graphite paper away from the seed crystal. The pressing device includes a pressing platform, the lower end of the pressing platform is rotatably connected to a pressing mounting frame, the lower end of the pressing mounting frame is provided with a pressing assembly, a pressing line is formed at the bottom of the pressing assembly, and further includes a driving device for driving the pressing assembly to rotate around a predetermined axis. During the directional rotation of the pressing assembly, it is in tight contact with the outer surface of the graphite paper, and the pressing line moves within a virtual pressing plane. This invention avoids the situation where air bubbles cannot be discharged due to direct full pressing, has a short pressing and bonding preparation time, high pressing and bonding efficiency, improves the uniformity of the glue distribution in the bonding layer, and improves the effect and quality of the subsequent bonding of the silicon carbide seed crystal.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal bonding, and particularly to a bonding device and method for a silicon carbide seed crystal and a graphite paper. Background Art

[0002] After the silicon carbide seed crystal and the graphite paper are bonded and then heat-treated, a stable Si-C structure can be formed on the connecting surface between the two, ensuring the stability of the silicon carbide crystal during the high-temperature growth process.

[0003] Before high-temperature hot pressing, the silicon carbide seed crystal and the graphite paper need to be bonded through a high-temperature-resistant inorganic glue. Common glues include, but are not limited to, ceramic glue, sulfate glue, etc.; during the bonding process using inorganic glue, due to improper glue coating methods, surface roughness of materials, etc., a small amount of air bubbles will exist in the bonding layer.

[0004] In the prior art, a large number of air bubbles in the bonding layer can be discharged through methods such as gradient batch pressing and bonding, single-sided or double-sided extrusion bonding, etc.; however, the above bonding methods have problems including, but not limited to, a relatively long preparation process for pressing and bonding, a short process for discharging air bubbles, and poor uniformity of glue distribution in the bonding layer. Summary of the Invention

[0005] In view of the above problems, the present invention provides a bonding device and method for a silicon carbide seed crystal and a graphite paper, which avoid the situation that air bubbles cannot be discharged due to direct overall pressing, have a short preparation time for pressing and bonding, high pressing and bonding efficiency, improve the uniformity of glue distribution in the bonding layer, and improve the bonding effect and quality of the subsequent silicon carbide seed crystal.

[0006] To solve the above problems, the technical solution adopted by the present invention is as follows:

[0007] A bonding device for a silicon carbide seed crystal and a graphite paper includes a carrying device for carrying the seed crystal, a limiting device for limiting the graphite paper, and further includes a pressing device. The pressing device is located on the side of the graphite paper away from the seed crystal. The pressing device includes a pressing platform. The lower end of the pressing platform is rotatably connected to a pressing mounting frame. The lower end of the pressing mounting frame is provided with a pressing assembly. A pressing line is formed at the bottom of the pressing assembly. It further includes a driving device for driving the pressing assembly to rotate around a predetermined axis. During the directional rotation of the pressing assembly, it abuts against the outer surface of the graphite paper, and the pressing line moves in a virtual pressing plane, and the virtual pressing plane is parallel to the bonding surface of the seed crystal.

[0008] Preferably, the pressing assembly includes a pressing positioning rod, and a cylindrical pressing part is sleeved outside the pressing positioning rod. The pressing line is located at the bottommost part of the pressing part and is parallel to the axis of the pressing part.

[0009] Preferably, the pressing part includes a first pressing cylinder sleeved outside the pressing positioning rod, a second pressing cylinder is sleeved outside the first pressing cylinder, and a driving component is arranged between the first pressing cylinder and the second pressing cylinder for controlling the directional movement of the second pressing cylinder.

[0010] When the second pressing cylinder is located inside, a virtual circle can be formed inside. When the second pressing cylinder is on the outside, a virtual ring can be formed on the outside. By controlling the size relationship between the virtual circle and the ring, large-sized silicon carbide seeds can be fully covered, and the pressing and bonding of large-sized silicon carbide seeds can be achieved without replacing the pressing part.

[0011] Preferably, two sets of pressing parts are sleeved outside the pressing positioning rod, and the two sets of pressing parts are symmetrically arranged.

[0012] The vertical axes of rotation of the two sets of pressing parts are located on the vertical planes where the two pressing parts are symmetric. Through the above structural settings, by setting two sets of pressing parts, the deflection angle of the pressing part can be shortened, and the pressing and bonding efficiency is doubled.

[0013] Preferably, the first pressing cylinder includes a large head end and a guiding end. A guiding rod is fixed on the side wall of the large head end. A guiding groove matching with the guiding rod is opened inside the second pressing cylinder. The end of the guiding rod is hermetically slidably connected with the guiding groove to form a control chamber. The driving component is a hydraulic driving mechanism, and the hydraulic driving mechanism is communicated with the control chamber.

[0014] Preferably, a first hollow channel is opened inside the guiding rod and communicated with the control chamber. A second hollow channel is opened inside the pressing positioning rod and communicated with the first hollow channel. The second hollow channel is communicated with the hydraulic driving structure.

[0015] Through the above structural design, the channel for conveying the control oil can be arranged inside the pressing assembly. Through the above structural settings, only the outside of the pressing positioning rod needs to be connected with the hydraulic driving mechanism, and no corresponding control pipes need to be arranged outside the first pressing cylinder and the second pressing cylinder, which ensures the simplicity of the external structure of the relevant components, avoids the introduction of pollution components, and through the above-designed first pressing cylinder and second pressing cylinder, more degrees of freedom of movement can be obtained, improving the effect and efficiency of pressing and bonding.

[0016] Preferably, the first pressing cylinder is rotationally connected with the pressing positioning rod. An annular distribution groove communicated with the first hollow channel is opened inside the large head end, and a liquid pumping opening is also opened inside the pressing positioning rod.

[0017] Preferably, the carrying device includes a relatively fixed first carrying part and a relatively movable second carrying part, and a lifting component is arranged between the first carrying part and the second carrying part.

[0018] Preferably, the limiting device includes a clamping assembly for clamping the graphite paper, and further includes a limiting rope bolted to the side wall of the clamping assembly and an adjusting column for adjusting the tightness of the limiting rope.

[0019] A method for bonding a silicon carbide seed crystal to graphite paper, using the above-mentioned bonding equipment for a silicon carbide seed crystal and graphite paper, includes the following steps: S1. Prepare a silicon carbide seed crystal and graphite paper and apply glue to the surface of the silicon carbide seed crystal and / or graphite paper; S2. Limit the silicon carbide seed crystal through a bearing device and limit the graphite paper through a limiting device; S3. Position the pressing device according to the positions of the silicon carbide seed crystal and the graphite paper, control the pressing assembly of the pressing device to abut against the outer surface of the graphite paper, and after abutting, drive the pressing assembly to rotate around a predetermined axis. After the pressing assembly rotates a predetermined angle, the bonding of the silicon carbide seed crystal and the graphite paper is completed.

[0020] The beneficial effects of the present invention are as follows:

[0021] Compared with traditional bonding methods and the like in the above-mentioned manner, during the process of the pressing assembly rotating directionally around the vertical axis, the bottom pressing line can gradually press the graphite paper onto the surface of the seed crystal, and the bubble discharge time is long, avoiding the situation that bubbles cannot be discharged due to direct full pressing; at the same time, after the pressing assembly rotates one circle, the all-round pressing of the seed crystal and the graphite paper can be completed, the pressing and bonding preparation time is short, the pressing and bonding efficiency is high, and moreover, the pressing assembly can rotate multiple circles to re-level the glue, improving the uniformity of the glue distribution in the bonding layer and the bonding effect and quality of the subsequent silicon carbide seed crystal bonding. Description of the Drawings

[0022] Figure 1 It is a three-dimensional structure schematic diagram of the present invention.

[0023] Figure 2 For the present invention Figure 1 The top view structure schematic diagram.

[0024] Figure 3 For the present invention Figure 1 The front view structure schematic diagram.

[0025] Figure 4 For the present invention Figure 3 The sectional view structure schematic diagram in the A-A direction.

[0026] Figure 5 For the present invention Figure 3 The enlarged structure schematic diagram at position B.

[0027] Figure 6 It is the schematic diagram of the first state of the pressing assembly of the present invention in Embodiment 1.

[0028] Figure 7Schematic diagram of the second state of Embodiment 1 of the lamination assembly of the present invention.

[0029] Figure 8 Of the present invention Figure 6 Schematic side view structure diagram.

[0030] Figure 9 Of the present invention Figure 8 Schematic cross-sectional structure diagram taken along the C-C direction.

[0031] Figure 10 Of the present invention Figure 9 Schematic enlarged structure diagram at D of the present invention.

[0032] Figure 11 Of the present invention Figure 9 Schematic enlarged structure diagram at E of the present invention.

[0033] Figure 12 Schematic diagram of the first state of Embodiment 2 of the lamination assembly of the present invention.

[0034] Figure 13 Schematic diagram of the second state of Embodiment 2 of the lamination assembly of the present invention.

[0035] In the figure: 100, seed crystal; 200, graphite paper; 300, carrying device; 310, second carrying part; 320, first carrying part; 330, lifting assembly; 400, limiting device; 410, adjusting column; 420, limiting rope; 430, clamping assembly; 431, clamping seat; 432, clamping part; 500, lamination device; 510, lamination platform; 520, driving device; 530, lamination assembly; 531, lamination positioning rod; 5311, liquid pumping opening; 5312, second hollow channel; 532, first lamination cylinder; 5321, annular distribution groove; 5322, guide rod; 5323, first hollow channel; 5324, large head end; 5325, guiding end; 533, second lamination cylinder; 5331, guide groove; 5332, accommodation gap; 540, lamination mounting frame. Detailed implementation manners

[0036] The present invention will be further described below with reference to the drawings and embodiments.

[0037] To solve the technical problems existing in the background art, referring to Attached Figure 1 - Attached Figure 13 , a silicon carbide seed crystal and graphite paper bonding device includes a carrying device 300 for carrying the seed crystal 100, a limiting device 400 for limiting the graphite paper 200, and further includes a lamination device 500. After applying a bonding glue between the seed crystal 100 and the graphite paper 200, the seed crystal 100 and the graphite paper 200 are laminated tightly through the lamination device 500, facilitating subsequent hot pressing treatment.

[0038] Specifically, the pressing device 500 is located on the side of the graphite paper 200 away from the seed crystal 100. The pressing device 500 includes a pressing platform 510. The lower end of the pressing platform 510 is rotatably connected to a pressing mounting frame 540. A pressing assembly 530 is provided at the lower end of the pressing mounting frame 540. A pressing line is formed at the bottom of the pressing assembly 530. During the pressing and bonding process, the pressing line contacts and presses against the surface of the graphite paper 200, completing the pressing and bonding fixation of the seed crystal 100 and the graphite paper 200.

[0039] It further includes a driving device 520 for driving the pressing assembly 530 to rotate around a predetermined axis. When the seed crystal 100 and the graphite paper 200 are horizontally placed here, the predetermined axis is selected as a vertical axis, and the predetermined axis is perpendicular to the plane where the seed crystal 100 is located; during the directional rotation of the pressing assembly 530, it presses against the outer surface of the graphite paper 200, and the pressing line moves within a virtual pressing plane. The virtual pressing plane is parallel to the bonding surface of the seed crystal 100; the pressing line forms a circular virtual pressing plane during the directional rotation, and the virtual pressing plane can correspond to the lower seed crystal 100 and the graphite paper 200. During the process of the pressing assembly 530 rotating around the vertical axis, the pressing and bonding of the seed crystal 100 and the graphite paper 200 is gradually completed.

[0040] Compared with traditional bonding methods and other methods in the above-mentioned manner, during the process of the pressing assembly 530 rotating around the vertical axis, the pressing line at the bottom can gradually press the graphite paper 200 onto the surface of the seed crystal 100. The bubble discharge time is long, avoiding the situation where bubbles cannot be discharged due to direct full pressing; at the same time, after the pressing assembly 530 rotates one circle, the all-round pressing of the seed crystal 100 and the graphite paper 200 can be completed. The pressing and bonding preparation time is short, and the pressing and bonding efficiency is high. Moreover, the pressing assembly 530 can rotate multiple circles to re-level the glue, improving the uniformity of the glue distribution in the bonding layer and the effect and quality of the subsequent bonding of the silicon carbide seed crystal.

[0041] It should be noted that the bonding process of the seed crystal 100 and the graphite paper 200 can be carried out in a vacuum negative pressure environment. During the process of the pressing assembly 530 rotating and gradually pressing, the bubble discharge efficiency is higher and there are fewer residual bubbles in the bonding layer.

[0042] As Embodiment 1 of the pressing assembly 530, the pressing assembly 530 includes a pressing positioning rod 531. A cylindrical pressing part is sleeved outside the pressing positioning rod 531. The pressing line is located at the bottom of the pressing part and is parallel to the axis of the pressing part. Here, the pressing positioning rod 531 is in a relatively fixed state with respect to the pressing part. The pressing part can linearly move and deflect on the pressing positioning rod 531. During the process of the pressing assembly 530 rotating around the vertical axis, the pressing line at the bottom of the pressing assembly 530 can press against the surface of the graphite paper 200, gradually completing efficient pressing.

[0043] During the rotation, the pressing positioning rod 531 rotates in a directional manner with the first end of the pressing positioning rod 531 as the axis. The pressing line can be used as the radius of the virtual circle. During the rotation of the pressing line, the graphite paper 200 and the seed crystal 100 below can be pressed and bonded. After the pressing line rotates one circle, the seed crystal 100 and the graphite paper 200 can be fully pressed.

[0044] For a small-sized silicon carbide seed crystal, the pressing line at the lower end of the pressing part can be larger than the radius of the silicon carbide seed crystal, and the seed crystal 100 and the graphite paper 200 can be fully pressed after the pressing line rotates one circle.

[0045] Large-sized silicon carbide seed crystals can be pressed and bonded without replacing the pressing part; the pressing part includes a first pressing cylinder 532 which is sleeved on the outside of the pressing positioning rod 531, and a second pressing cylinder 533 is sleeved on the outside of the first pressing cylinder 532. A driving component is arranged between the first pressing cylinder 532 and the second pressing cylinder 533 to control the directional movement of the second pressing cylinder 533. The driving component can push the second pressing cylinder 533 to move along the axial direction of the first pressing cylinder 532. When the second pressing cylinder 533 is located on the inner side, a virtual circle can be formed on the inner side. When the second pressing cylinder 533 is located on the outer side, a virtual ring can be formed on the outer side. The size relationship between the virtual circle and the ring can be controlled to fully cover large-sized silicon carbide seed crystals, thereby realizing the pressing and bonding of large-sized silicon carbide seed crystals without replacing the pressing part.

[0046] It should be noted that in the process of the second pressing cylinder 533 moving linearly along the first pressing cylinder 532, the second pressing cylinder 533 can be controlled to move away from the graphite paper 200 first, and after the second pressing cylinder 533 moves to the predetermined position, the second pressing cylinder 533 is controlled to be pressed against the graphite paper 200, and then the second pressing cylinder 533 is deflected along the vertical axis to achieve pressing and bonding of the seed crystal 100 and the outer area of ​​the graphite paper 200.

[0047] The small-sized second pressing cylinder 533 can reduce the size of the pressing line, and the batch rotation pressing can also accelerate the discharge of bubbles in the center of the large-sized seed crystal 100, further reducing the residual bubbles in the bonding layer and improving the quality of the final product.

[0048] As Example 2 of the pressing assembly 530, two groups of pressing parts are provided on the outer side of the pressing positioning rod 531, and the two groups of pressing parts are symmetrically arranged. The vertical axes of rotation of the two groups of pressing parts are located on the vertical planes of symmetry of the two pressing parts. Through the above-mentioned structural setting, by setting two groups of pressing parts, the deflection angle of the pressing part can be shortened, and the efficiency of the pressing and bonding is doubled.

[0049] Meanwhile, the pressing parts on both sides are always in a symmetrical state during the bonding and pressing process. The forces exerted on the seed crystal 100 and the graphite paper 200 during the bonding process are more uniform, which also improves the final bonding effect.

[0050] It should also be noted that during the bonding process, the seed crystal 100 and the graphite paper 200 are in a very stable state under the limitation of the bearing device 300 and the limiting device 400 respectively. The frictional force generated by the pressing assembly 530 on the graphite paper 200 during the moving process will not have any impact on the position of the graphite paper 200, ensuring the stability of the subsequent bonding state of the seed crystal 100 and the graphite paper 200.

[0051] As the same part of the pressing assembly 530 in Embodiment 1 and Embodiment 2, the first pressing cylinder 532 includes a large head end 5324 and a guiding end 5325, and the outer diameter of the large head end 5324 is larger than that of the guiding end 5325; a guiding rod 5322 is fixed on the side wall of the large head end 5324, and a guiding groove 5331 matching with the guiding rod 5322 is opened inside the second pressing cylinder 533. The second pressing cylinder 533 can be guided by the guiding rod 5322 to control the second pressing cylinder 533 to linearly move along the axis of the first pressing cylinder 532; a control chamber is formed by the sealed sliding connection between the end of the guiding rod 5322 and the guiding groove 5331, and the driving assembly is a hydraulic driving mechanism, and the hydraulic driving mechanism is communicated with the control chamber.

[0052] An accommodating gap 5332 matching with the large head end 5324 is opened inside the second pressing cylinder 533. Through the above structural design, the large head end 5324 can be completely accommodated inside. For the two pressing parts, they can be completely abutted against each other, avoiding the existence of a gap in the middle that may lead to an area where the pressing cannot cover, and improving the pressing range.

[0053] The linear movement of the second pressing cylinder 533 can be controlled by the hydraulic driving mechanism. Specifically, squeezing the control oil into the control chamber can increase the pressure in the control chamber. Here, the first pressing cylinder 532 is in a relatively fixed state in the axial direction. After being pressured, the second pressing cylinder 533 moves outward along the axis of the first pressing cylinder 532; discharging the control oil in the control chamber through the hydraulic driving mechanism can reduce the pressure in the control chamber. At this time, the second pressing cylinder 533 is pressured and moves inward along the axis of the first pressing cylinder 532; the position of the second pressing cylinder 533 is efficiently and accurately controlled through the above method.

[0054] A first hollow channel 5323 communicating with the control chamber is opened inside the guiding rod 5322, a second hollow channel 5312 communicating with the first hollow channel 5323 is opened inside the pressing positioning rod 531, and the second hollow channel 5312 is communicated with the hydraulic driving structure.

[0055] Through the above structural design, the channel for controlling the oil fluid transportation can be arranged inside the pressing assembly 530. With the above structural arrangement, it is only necessary to connect the outside of the pressing positioning rod 531 with the hydraulic driving mechanism, and there is no need to arrange corresponding control pipelines outside the first pressing cylinder 532 and the second pressing cylinder 533, which ensures the simplicity of the external related structures, avoids the introduction of pollution components, and through the first pressing cylinder 532 and the second pressing cylinder 533 designed as above, they can have more degrees of freedom of movement, improving the effect and efficiency of pressing and bonding.

[0056] Preferably, the first pressing cylinder 532 is rotationally connected to the pressing positioning rod 531. The rotationally connected first pressing cylinder 532 has less friction and exerts less reaction force on the graphite paper 200. An annular distribution groove 5321 communicating with the first hollow channel 5323 is opened inside the large head end 5324, and a pump liquid opening 5311 is also opened inside the pressing positioning rod 531. Through the cooperation of the annular distribution groove 5321 and the pump liquid opening 5311, the first pressing cylinder 532 here can deflect around the axis at a constant position. No matter where the first pressing cylinder 532 rotates to, the pump liquid opening 5311 here can pump the control oil fluid into the annular distribution groove 5321 to ensure the stability of the control oil fluid transportation.

[0057] By controlling the rotation of the first pressing cylinder 532 and the second pressing cylinder 533, the friction on the graphite paper 200 can be reduced. It can be expected that the second pressing cylinder 533 here can be a cylindrical integral design or can be selected as a design of multiple coaxial rings. The mutual influence of the rotation between the multiple rings is small, meeting the needs of bonding the large-span seed crystal 100 and the graphite paper 200.

[0058] Specifically, the carrying device 300 includes a relatively fixed first carrying part 320 and a relatively movable second carrying part 310. A lifting assembly 330 is arranged between the first carrying part 320 and the second carrying part 310. Through the lifting assembly 330, the height positions of the seed crystal 100 and the graphite paper 200 can be adjusted, and finally the gap between the graphite paper 200 and the pressing assembly 530 can be adjusted to ensure a predetermined pressing effect between the pressing assembly 530 and the graphite paper 200, avoiding the complete extrusion of the glue due to excessive pressing pressure, and at the same time avoiding the inability to generate a predetermined pressure due to too small pressing pressure, affecting the bubble discharge and the final bonding effect.

[0059] The pressing device 500 here is also height-controlled through a lifting structure or a manipulator, and its control range is large. Controlling the pressing device 500 to be away from the graphite paper 200 is convenient for loading and unloading the seed crystal 100 and the graphite paper 200; controlling the pressing assembly 530 to approach the graphite paper 200, and then cooperating with the lifting assembly 330 to adjust the extrusion gap.

[0060] Specifically, the limiting device 400 includes a clamping assembly 430 for clamping the graphite paper 200, a limiting rope 420 bolted to the side wall of the clamping assembly 430, and an adjusting column 410 for adjusting the tightness of the limiting rope 420. The size of the graphite paper 200 here is reserved to be relatively large, with a blank area formed on the outside that can cooperate with the clamping assembly 430. A plurality of the limiting devices 400 are arranged circumferentially around the graphite paper 200, which can limit the graphite paper 200 from different directions, ensuring the stability during the bonding process of the graphite paper 200 and avoiding the offset between the seed crystal 100 and the graphite paper 200.

[0061] The clamping assembly 430 here includes a U-shaped clamping seat 431 and a clamping part 432 arranged inside the clamping seat 431. By controlling the expansion or position of the clamping part 432, the edges of the graphite paper 200 can be clamped from both sides.

[0062] After the clamping assembly 430 clamps, the tightness and height position of the limiting rope 420 can be adjusted through the adjusting column 410, controlling the graphite paper 200 to be in a relatively horizontal position at the upper end of the seed crystal 100, ensuring the efficiency and stability of the subsequent rotary pressing of the pressing assembly 530.

[0063] The bonding method of the silicon carbide seed crystal and the graphite paper uses the above-mentioned bonding equipment for the silicon carbide seed crystal and the graphite paper, and includes the following steps:

[0064] S1. Prepare the silicon carbide seed crystal 100 and the graphite paper 200 and apply glue on the surface of the silicon carbide seed crystal 100 and / or the graphite paper 200; apply glue on the bonding surface of the silicon carbide seed crystal 100 and the graphite paper 200, and the area of the applied glue should not be less than the surface area of the seed crystal 100.

[0065] S2. Limit the silicon carbide seed crystal 100 through the carrying device 300 and limit the graphite paper 200 through the limiting device 400; after the seed crystal 100 and the graphite paper 200 are limited, they are in a relatively horizontal state, and there is a pre-fitting state between the seed crystal 100 and the graphite paper 200, with a small gap between them, which can realize the subsequent pressing while ensuring that air bubbles can be discharged from the small gap during the rotary pressing process.

[0066] S3. Position the pressing device 500 according to the positions of the silicon carbide seed crystal 100 and the graphite paper 200, control the pressing assembly 530 of the pressing device 500 to be in tight contact with the outer surface of the graphite paper 200, and after being in tight contact, drive the pressing assembly 530 to rotate around a predetermined axis. After the pressing assembly 530 rotates a predetermined angle, the bonding of the silicon carbide seed crystal 100 and the graphite paper 200 is completed.

[0067] Control the above-mentioned predetermined axis to be consistent with the axis of the seed crystal 100. During rotation, one end of the pressing line here coincides with the center of the surface of the seed crystal 100. The pressing line can rotate directionally as the radius of a virtual circle. One full rotation can complete all the pressing. Rotating multiple circles can further improve the pressing effect and can also even out the glue, ensuring the stability of the bonding layer and improving the final bonding effect between the seed crystal 100 and the graphite paper 200.

[0068] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A device for bonding a silicon carbide seed crystal to graphite paper, comprising a carrying device (300) for carrying a seed crystal (100) and a limiting device (400) for limiting a graphite paper (200), characterized in that: The invention also includes a pressing device (500), the pressing device (500) being located on a side of the graphite paper (200) away from the seed crystal (100), the pressing device (500) comprising a pressing platform (510), the lower end of the pressing platform (510) being rotatably connected to a pressing mounting frame (540), the lower end of the pressing mounting frame (540) being provided with a pressing assembly (530), a pressing line being formed at the bottom of the pressing assembly (530), and a driving device (520) for driving the pressing assembly (530) to rotate around a predetermined axis; The pressing assembly (530) is pressed against the outer surface of the graphite paper (200) during the directional rotation, and the pressing line moves in a virtual pressing plane, and the virtual pressing plane is parallel to the bonding surface of the seed crystal (100); The pressing assembly (530) comprises a pressing positioning rod (531), a cylindrical pressing portion is sleeved on the outer side of the pressing positioning rod (531), and the pressing line is located at the bottom of the pressing portion and is parallel to the axis of the pressing portion; The pressing part comprises a first pressing cylinder (532) sleeved on the outside of the pressing positioning rod (531), a second pressing cylinder (533) sleeved on the outside of the first pressing cylinder (532), and a driving component is arranged between the first pressing cylinder (532) and the second pressing cylinder (533) for controlling the directional movement of the second pressing cylinder (533); The first pressing cylinder (532) comprises a large head end (5324) and a guide end (5325), a guide rod (5322) being fixed to the side wall of the large head end (5324), a guide groove (5331) matching with the guide rod (5322) being opened inside the second pressing cylinder (533), the end of the guide rod (5322) being sealingly and slidingly connected with the guide groove (5331) to form a control chamber, and the driving assembly is a hydraulic driving mechanism, which is connected with the control chamber.

2. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: Two groups of pressing parts are sleeved on the outer side of the pressing and positioning rod (531), and the two groups of pressing parts are symmetrically arranged.

3. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: The guide rod (5322) has a first hollow channel (5323) inside, which is connected to the control chamber; the press-fit positioning rod (531) has a second hollow channel (5312) inside, which is connected to the first hollow channel (5323); and the second hollow channel (5312) is connected to the hydraulic drive structure.

4. The device for bonding silicon carbide seed crystals and graphite paper according to claim 3, characterized in that: The first pressing cylinder (532) is rotatably connected to the pressing positioning rod (531); an annular distribution groove (5321) communicating with the first hollow channel (5323) is formed inside the large end (5324); and a pumping opening (5311) is also formed inside the pressing positioning rod (531).

5. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: The bearing device (300) comprises a relatively fixed first bearing part (320) and a relatively movable second bearing part (310), and a lifting assembly (330) is arranged between the first bearing part (320) and the second bearing part (310).

6. The device for bonding silicon carbide seed crystals and graphite paper according to claim 1, characterized in that: The limiting device (400) comprises a clamping assembly (430) for clamping the graphite paper (200), a limiting rope (420) bolted to a side wall of the clamping assembly (430), and an adjusting column (410) for adjusting the tightness of the limiting rope (420).

7. A method for bonding silicon carbide seed crystals to graphite paper, characterized in that: The device for bonding silicon carbide seed crystals and graphite paper according to any one of claims 1 to 6 comprises the following steps: S1, preparing a silicon carbide seed crystal (100) and a graphite paper (200) and applying glue on the surface of the silicon carbide seed crystal (100) and / or the graphite paper (200); S2, limiting the position of the silicon carbide seed crystal (100) by means of a carrying device (300), and limiting the position of the graphite paper (200) by means of a limiting device (400); S3, positioning the pressing device (500) according to the positions of the silicon carbide seed crystal (100) and the graphite paper (200), controlling the pressing component (530) of the pressing device (500) to press against the outer surface of the graphite paper (200), and driving the pressing component (530) to rotate around a predetermined axis after pressing against each other, and completing the bonding of the silicon carbide seed crystal (100) and the graphite paper (200) after the pressing component (530) rotates by a predetermined angle.

Images