Crossing type accompanying revolution and rotation workpiece frame

Abstract

The invention discloses a traversing type accompanying revolution and rotation workpiece frame which is provided with a revolution assembly, a rotation assembly and an upper driving mechanism, the rotation assembly loaded with workpieces is arranged on the edge of a main rotating plate of the revolution assembly, and an upper coupling piece of the upper driving mechanism can be combined with a lower coupling piece on the main rotating plate. The revolution assembly is driven to rotate through the rotating assembly of the upper driving mechanism, then the rotation assembly is driven to rotate through cooperation of an outer gear ring and a driven gear, the purpose of revolution and rotation of a workpiece is achieved, and the workpiece can be better matched with the coating procedure conveniently; when the upper coupling piece and the lower coupling piece are matched, opening deflection treatment is adopted to form the driving inclined face and the driven inclined face, in the contact process, the upper coupling piece is in a slow rotation state all the time, rigid collision cannot occur between the driving connecting column and the driven connecting column at the moment of contact, and therefore the stability during combination is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum continuous coating, and in particular to a traveling and rotating workpiece rack. Background Art

[0002] With the continuous progress and development of domestic science and technology, a high-power laser light source in a vacuum environment is a key component of the national aerospace and laser industry. Therefore, intelligent manufacturing equipment is particularly important. In the past, all equipment was single equipment, each completing different processes. The light source device was circulated in the atmosphere, causing varying degrees of pollution, resulting in unstable final effects. Moreover, the output was extremely low. Based on the above reasons, a composite coating optical device equipment with continuous overall vacuum environment was developed;

[0003] However, the field of vacuum continuous coating technology requires the workpiece to move in a smooth linear motion, as well as to rotate steadily to cooperate with the corresponding coating process. Therefore, it is necessary to design a device for loading workpieces to adapt to the vacuum continuous coating process. Summary of the invention

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide a through-type accompanying rotating workpiece frame.

[0005] The present invention provides a traveling and rotating workpiece rack, which is used to load workpieces into a vacuum chamber for processing. The rotating workpiece rack can travel from one vacuum chamber to another vacuum chamber. The rotating workpiece rack includes:

[0006] The workpiece rack body includes a moving mechanism and a rotating mechanism arranged on the moving mechanism, wherein the rotating mechanism includes a main rotating plate, the main rotating plate has a first axis, a plurality of self-rotating components are evenly distributed on the edge of the main rotating plate with the first axis as the center, the self-rotating components have a second axis, and the extension directions of the second axis and the first axis are both in the first direction, and the workpiece is mounted on the self-rotating component;

[0007] A lower driving mechanism, disposed at the bottom of the vacuum chamber, for driving the moving mechanism to move along a second direction, driving the rotary mechanism, each of the rotating components and the workpiece to move synchronously, wherein the second direction is perpendicular to the first direction;

[0008] The upper driving mechanism is arranged on the top of the vacuum chamber and is used to drive the main rotating plate to rotate around the first axis, thereby driving each of the rotating components and the workpiece to rotate around the second axis.

[0009] According to the technical solution provided in the embodiment of the present application, the lower driving mechanism includes a mounting chamber provided at the bottom of the vacuum chamber, at least two driving gears arranged along the second direction are provided inside the mounting chamber, the axis of each driving gear extends in a third direction, the third direction, the second direction and the first direction are perpendicular to each other, and the lower driving mechanism also includes a first driving part, which is used to drive each driving gear to rotate;

[0010] The moving mechanism includes a main bearing plate arranged below the main rotating plate, a floating rack is provided at the bottom end of the main bearing plate, the extension direction of the floating rack is the second direction, a plurality of floating springs connected to the main bearing plate are provided at the top end of the floating rack along the second direction, and the elastic stress direction of the floating spring is the first direction.

[0011] According to the technical solution provided in the embodiment of the present application, a mounting strip is provided at the center position of the bottom end of the main bearing plate, and a first limiting groove is provided at the bottom end of the mounting strip, which matches with the floating rack. A plurality of positioning columns are provided inside the first limiting groove, and the axis of the positioning column extends in a third direction, and both ends are respectively connected to the first limiting groove, and a plurality of second limiting grooves are provided in the middle part of the floating rack for the positioning columns to pass through, and the extension direction of the second limiting groove is the first direction.

[0012] According to the technical solution provided in the embodiment of the present application, the first driving part includes a driving motor, a driving shaft is provided inside each driving gear, the axis extension direction of each driving shaft is a third direction, each driving shaft has a first end and a second end along the third direction, the first end of one driving shaft is connected to the output shaft of the driving motor through a first magnetic fluid, the second end of each driving shaft is connected to a steering gear through the first magnetic fluid, and a diaphragm coupling is connected between adjacent steering gears.

[0013] According to the technical solution provided in the embodiment of the present application, side mounting plates are provided at both ends of the main bearing plate along the third direction, and the two side mounting plates are provided with a plurality of travel guide wheels arranged along the second direction at end surfaces away from each other, and the axis extension direction of each travel guide wheel is the third direction, and two guide wheel tracks arranged along the third direction are provided at the bottom of the inner part of the vacuum chamber, and the extension direction of the guide wheel tracks is the second direction, and each travel guide wheel is matched with the corresponding guide wheel track.

[0014] According to the technical solution provided in the embodiment of the present application, a supporting frame is provided at both ends of the vacuum chamber along the second direction, and two guide wheel tracks arranged along the third direction are provided at the top of the supporting frame. An inverted L-shaped baffle bar is provided at the end of the supporting frame away from the vacuum chamber, and the top of the inverted L-shaped baffle bar is located above the guide wheel track.

[0015] According to the technical solution provided in the embodiment of the present application, a revolution component is provided at the center position of the main rotating plate, the revolution component includes a lower coupling shaft provided at the center position of the top end of the main rotating plate, the upper driving mechanism includes an upper coupling shaft provided inside the vacuum box, a linear driving module provided at the top end outside the vacuum box, and a rotation component provided on the linear driving module, the bottom of the rotation component extends into the vacuum box and is connected to the upper coupling shaft, the linear driving module is used to drive the rotation component and the upper coupling shaft to move downward, drive the upper coupling shaft and the lower coupling shaft to form a combined coupling, the rotation component is used to drive the upper coupling shaft to rotate, drive the lower coupling shaft and the main rotating plate to rotate around the first axis;

[0016] The upper driving mechanism further includes a sealing member, which is used for sealing a gap between the bottom of the rotating assembly and the vacuum box.

[0017] According to the technical solution provided in the embodiment of the present application, the lower coupling shaft comprises the revolution shaft body arranged at the top center of the main rotating plate, a positioning slot is arranged at the top center of the revolution shaft body, and a plurality of driven connecting columns are arranged around the top of the revolution shaft body;

[0018] The upper connecting shaft comprises a positioning pin connected to the rotating assembly, the top end of the positioning pin fits in with the positioning slot, a plurality of driving connecting pins are arranged around the top end of the positioning pin, and the driving connecting pins are adapted to the driven connecting pins.

[0019] According to the technical solution provided in the embodiment of the present application, each of the driving connecting columns has a driving bevel in a clockwise direction or a counterclockwise direction, and each of the driven connecting columns has a driven bevel near the driving bevel end, and the driven bevel is adapted to the driving bevel.

[0020] According to the technical solution provided in the embodiment of the present application, an outer gear ring is provided at the top of the main bearing plate, and each of the rotation components includes a rotation shaft body which is rotatable and is arranged on the edge of the main rotating plate, and the axis of the rotation shaft body is the second axis line. A mounting sleeve is provided at the top of the rotation shaft body, and the workpiece is installed in the mounting sleeve. A driven gear is mounted on the bottom end of the rotation shaft body, and the driven gear is meshingly and transmission-connected with the outer gear ring.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] 1. A revolution assembly, a rotation assembly and an upper driving mechanism are provided, wherein the rotation assembly loaded with the workpiece is provided at the edge of the main rotating plate of the revolution assembly, and the upper coupling shaft of the upper driving mechanism can be combined with the lower coupling shaft on the main rotating plate, and the revolution assembly is driven to rotate by the rotating assembly of the upper driving mechanism, and then the rotation assembly is driven to rotate by the cooperation of the outer gear ring and the driven gear, so as to realize the purpose of the revolution and rotation of the workpiece, and facilitate the better cooperation of the workpiece with the coating process;

[0023] 2. When the upper coupling shaft and the lower coupling shaft are matched, the offset treatment is adopted to form the driving inclined plane and the driven inclined plane. During the contact process, the upper coupling shaft is always in a slow rotation state, so that at the moment of contact, there will be no rigid collision between the driving connecting column and the driven connecting column, thereby improving the stability during the connection;

[0024] 3. By driving the gear to rotate, the floating rack is driven to move left and right to achieve the purpose of transporting the workpiece rack body. The tooth meshing transmission mode has lower backlash and higher rigidity, which can achieve more precise position control, facilitate the precise positioning of the workpiece rack body, and ensure the accurate positioning of the upper and lower coupling shafts;

[0025] 4. On the basis of tooth transmission, a sealing rubber ring is set between the installation bin and the vacuum chamber to maintain the vacuum environment. However, when the sealing rubber ring is compressed for a long time, the distance between the installation bin and the vacuum chamber will be slightly reduced. Therefore, a floating rack that can move in the up and down directions is set, and a floating spring is set for auxiliary adjustment, which effectively avoids the problem of excessive stress concentration at the meshing point of the driving gear and the floating rack, resulting in tooth skipping, thereby reducing the positioning accuracy of the workpiece frame and affecting the product quality, thereby ensuring a higher positioning accuracy after movement;

[0026] 5. On the basis of point 4, a first limiting groove and a mounting bar are provided on the main bearing plate to preliminarily reduce the forward and backward shaking of the floating rack. A second limiting groove and a positioning column penetrating the second limiting groove are also provided, so that when the floating rack moves, the mounting bar and the main bearing plate can be driven to move synchronously through the positioning column, and the second limiting groove also extends in an upper and lower square shape, which will not interfere with the up and down movement of the floating rack, further improving the stability of the up and down movement of the floating rack;

[0027] 6. The driving gear is connected to the driving motor through the first magnetic fluid, and is transmitted through the combination of the first magnetic fluid, the steering gear and the diaphragm coupling to achieve synchronous movement of all driving gears. The first magnetic fluid is a magnetic fluid sealing transmission component. Transmission through magnetic fluid can improve the stability of transmission. In addition, when the compression of the sealing rubber ring increases due to long-term work and the distance between the installation bin and the vacuum chamber decreases slightly, the differential transmission of the diaphragm coupling compensates for the change in the distance between the two driving gears, thereby improving the stability of the workpiece rack transmission;

[0028] To summarize, the revolving workpiece rack can move from one vacuum chamber to another vacuum chamber, driving the workpiece to move synchronously. The use of rack and pinion not only has high positioning accuracy, but also when the workpiece rack body passes between the two vacuum chambers, the floating rack will always be driven by the corresponding driving gear, thereby overcoming the problem that the vacuum chambers use independent sealing valve bodies, and ordinary chain or belt transmissions require an integral transmission chain or transmission belt, which cannot be adapted for use; further, an independent upper driving mechanism is provided on the outer wall of the top of each vacuum chamber, which is driven by the combination of the upper coupling shaft and the lower coupling shaft, and there is no need to install the upper driving mechanism on the workpiece rack body, thereby avoiding the lubricating oil or powder in the driving structure from entering the vacuum chamber, thereby reducing the coating process failure and equipment damage caused thereby.

[0029] It should be understood that the contents described in the summary of the invention are not intended to limit the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0031] Figure 1 A schematic diagram of the structure of a traveling and rotating workpiece rack provided in an embodiment of the present application;

[0032] Figure 2 A schematic diagram of the installation structure of a guide wheel track in a traveling accompanying rotating workpiece rack provided in an embodiment of the present application;

[0033] Figure 3 A schematic cross-sectional structure diagram of a workpiece rack body and an upper driving mechanism in a traveling accompanying revolving and self-rotating workpiece rack provided in an embodiment of the present application;

[0034] Figure 4 A schematic cross-sectional structure diagram of a workpiece rack body and a lower driving mechanism in a traveling accompanying revolving workpiece rack provided in an embodiment of the present application;

[0035] Figure 5 A schematic structural diagram of a workpiece rack body in a traveling, rotating workpiece rack provided in an embodiment of the present application;

[0036] Figure 6 A bottom view of a middle and lower driving mechanism of a traveling accompanying rotating workpiece rack provided in an embodiment of the present application;

[0037] Figure 7 A schematic cross-sectional structure diagram of a rotation component in a traveling accompanying rotating workpiece frame provided in an embodiment of the present application;

[0038] Figure 8 for Figure 3 A schematic diagram of the local enlarged structure of the middle A area;

[0039] Fig. 9 for Figure 1 Schematic diagram of the local enlarged structure of area B in the middle.

[0040] Numbers in the figure:

[0041] 1. Vacuum chamber; 11. Upper wall of the box; 12. Lower wall of the box;

[0042] 2. Workpiece rack body;

[0043] 3. Moving mechanism; 31. Main bearing plate; 32. Side mounting plate; 33. Traveling guide wheel; 34. Mounting bar; 35. First limiting groove; 36. Positioning column; 37. Floating rack; 38. Second limiting groove; 39. Limiting mounting hole; 310. Floating spring; 311. Shielding plate; 312. Guide wheel track;

[0044] 4. Rotation mechanism; 41. Main rotating plate; 42. Compensation ring; 43. External gear ring; 44. Rotation assembly; 45. Revolution assembly;

[0045] 441, first shaft seat; 442, first bearing group; 443, self-rotating shaft body; 444, driven gear; 445, mounting sleeve;

[0046] 451, revolving shaft body; 452, positioning slot; 453, driven connecting column; 454, supporting column; 455, second shaft seat; 456, second bearing group;

[0047] 5. Lower driving mechanism; 51. Mounting chamber; 52. Driving gear; 53. Driving shaft; 54. First magnetic fluid; 55. Steering gear; 56. Speed ​​reducer; 57. Driving motor; 58. Diaphragm coupling;

[0048] 6. Upper drive mechanism; 61. L-shaped mounting plate; 62. Linear drive module; 63. Rotating assembly; 64. Sealing flange; 65. Upper coupling shaft; 651. Positioning plug column; 652. Drive connecting column;

[0049] 621, module track; 622, module motor; 623, module slider;

[0050] 631, pipe clamp; 632, second magnetic fluid; 633, rotating motor; 634, bellows; 635, connecting shaft;

[0051] 7. Workpiece;

[0052] 8. Carrying frame; 81. Inverted L-shaped stop bar. DETAILED DESCRIPTION

[0053] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant invention, rather than to limit the invention. It should also be noted that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0054] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0055] Please refer to Figures 1 to 9 The embodiment of the present invention provides a traveling revolving workpiece rack for loading a workpiece 7 into a vacuum chamber 1 for processing. The revolving workpiece rack can travel from one vacuum chamber 1 to another vacuum chamber 1. Figure 1 As shown, a sealing valve body 9 is provided between each vacuum chamber 1, and each vacuum chamber 1 is separated by the sealing valve body 9, so that each vacuum chamber 1 is independent of each other, and each vacuum chamber 1 is evacuated inside, and a coating process is performed on each vacuum chamber 1, and the workpiece 7 is carried through each vacuum chamber 1 by the revolving workpiece rack, so that each coating process is ensured to be carried out independently without interfering with each other, and the orderly transmission of the workpiece 7 is realized, thereby improving the processing efficiency;

[0056] The revolving workpiece frame comprises:

[0057] The workpiece rack body 2 includes a moving mechanism 3 and a slewing mechanism 4 arranged on the moving mechanism 3. The slewing mechanism 4 includes a main rotating plate 41. The main rotating plate 41 has a first axis. A plurality of self-rotating components 44 are evenly distributed on the edge of the main rotating plate 41 with the first axis as the center. The self-rotating components 44 have a second axis. The extension directions of the second axis and the first axis are both the first direction. The workpiece 7 is mounted on the self-rotating component 44.

[0058] The lower driving mechanism 5 is disposed at the bottom of the vacuum chamber 1 and is used to drive the moving mechanism 3 to move along the second direction, driving the rotary mechanism 4, the respective rotating components 44 and the workpiece 7 to move synchronously, and the second direction is perpendicular to the first direction;

[0059] The upper driving mechanism 6 is disposed on the top of the vacuum chamber 1 and is used to drive the main rotating plate 41 to rotate around the first axis, thereby driving the respective rotating components 44 and the workpiece 7 to rotate around the second axis.

[0060] Among them, Figure 1 and Figure 3 As shown, the first direction is Figure 1 The up and down directions in the second method are Figure 3In the left and right directions, the workpiece holder body 2 is driven to move left and right in the vacuum chamber 1 by the lower driving mechanism 5, and then the main rotating plate 41 is driven to rotate by the upper driving mechanism 6, and the rotation assembly 44 and the workpiece 7 rotate, thereby achieving the purpose of orbital rotation, thereby not only ensuring the stable left and right movement of the workpiece 7 in the vacuum chamber 1, but also ensuring that the workpiece 7 can rotate in the orbit and in the self-rotation to better cooperate with the coating process.

[0061] In some embodiments, a revolution assembly 45 is provided at the center of the main rotating plate 41, and the revolution assembly 45 includes a lower coupling shaft provided at the center of the top end of the main rotating plate 41, and the upper driving mechanism 6 includes an upper coupling shaft 65 located inside the vacuum box 1, a linear driving module 62 provided at the top end of the outside of the vacuum box 1, and a rotation assembly 63 provided on the linear driving module 62, the bottom of the rotation assembly 63 extends into the vacuum box 1 and is connected to the upper coupling shaft 65, the linear driving module 62 is used to drive the rotation assembly 63 and the upper coupling shaft 65 to move downward, driving the upper coupling shaft 65 and the lower coupling shaft to form a combined coupling, and the rotation assembly 63 is used to drive the upper coupling shaft 65 to rotate, driving the lower coupling shaft and the main rotating plate 41 to rotate around the first axis;

[0062] The upper driving mechanism 6 also includes a seal, which is used to seal the gap between the bottom of the rotating assembly 63 and the vacuum box 1;

[0063] like Figure 3 As shown, the linear drive module 62 is a common linear drive structure on the market, which includes a module rail 621, a module motor 622 and a module slider 623. The module rail 621 is installed on the vacuum chamber 1 through an L-shaped mounting plate 61, and the rotating assembly 63 is installed on the module slider 623, so that the linear drive module 62 drives the upper coupling shaft 65 to move downward, and drives the upper coupling shaft 65 and the lower coupling shaft to form a combined coupling. Furthermore, the rotating assembly 63 includes a pipe clamp 631 arranged on the module slider 623, and a second magnetic fluid 632 is installed inside the pipe clamp 631. The second magnetic fluid 632 is a A magnetic fluid sealed transmission component, comprising a housing, a magnetic fluid loaded in the housing, and transmission shafts arranged at both ends of the magnetic fluid, is a transmission device with large buffer and stable transmission, a rotating motor 633 is arranged at the top of the housing of the second magnetic fluid 632, the output shaft of the rotating motor 633 is connected to a transmission shaft of the second magnetic fluid 632, the other transmission shaft of the second magnetic fluid 632 is connected to a connecting shaft 635, the bottom of the connecting shaft 635 extends into the vacuum box 1 and is connected to the upper coupling shaft 65, so as to realize the purpose of the rotating component 63 driving the upper coupling shaft 65 to rotate, and driving the lower coupling shaft and the main rotating plate 41 to rotate around the first axis;

[0064] Furthermore, the seal includes a bellows 634 which is sleeved on the outside of the connecting shaft 635. The top of the bellows 634 is connected to the outer shell of the second magnetic fluid 632, and the bottom is connected to a sealing flange 64. The sealing flange 64 is connected to the upper wall 11 of the box body to play a sealing role. The bellows 634 has a certain telescopic performance and will not interfere with the downward movement of the connecting shaft 635, ultimately ensuring the vacuum degree of the vacuum chamber 1. The lubricating oil used by the linear drive module 62 or the rotating component 63 or the powder formed will not enter the vacuum chamber 1, ensuring the stable progress of the coating process.

[0065] In some embodiments, the lower coupling shaft comprises a revolution shaft body 451 disposed at the top center of the main rotating plate 41, a positioning slot 452 is disposed at the top center of the revolution shaft body 451, and a plurality of driven connecting columns 453 are disposed around the top of the revolution shaft body 451;

[0066] The upper coupling shaft 65 includes a positioning plug 651 connected to the rotating assembly 63, the top of the positioning plug 651 fits in the positioning slot 452, and a plurality of driving connection columns 652 are arranged around the top of the positioning plug 651, and the driving connection columns 652 are adapted to the driven connection columns 453;

[0067] like Figure 3 and Figure 4 As shown, when the upper coupling shaft 65 and the lower coupling shaft cooperate, the positioning plug 651 is inserted into the positioning slot 452, and the driving connecting column 652 and the driven connecting column 453 are staggered and connected. Then, after the upper coupling shaft 65 rotates, the driven connecting column 453 is pushed by the driving connecting column 652, thereby achieving the purpose of combined transmission.

[0068] In some embodiments, each driving connecting column 652 has a driving inclined surface in the clockwise direction or the counterclockwise direction, and each driven connecting column 453 has a driven inclined surface near the driving inclined surface end, and the driven inclined surface and the driving inclined surface are adapted, wherein, Figure 3 and Figure 4 As shown, during the contact process, the upper coupling shaft 65 is always in a slow rotation state, so that at the moment of contact, the driving inclined surface of the driving connecting column 652 and the driven inclined surface of the driven connecting column 453 are in contact, so that no rigid collision occurs between the two, thereby improving the stability during the connection.

[0069] In some embodiments, an outer gear ring 43 is provided at the top of the main bearing plate 31, and each rotating assembly 44 includes a self-rotating shaft 443 which is provided at the edge of the main rotating plate 41 and can rotate. The axis of the self-rotating shaft 443 is the second axis. A mounting sleeve 445 is provided at the top of the self-rotating shaft 443, and the workpiece 7 is mounted in the mounting sleeve 445. A driven gear 444 is sleeved at the bottom of the self-rotating shaft 443, and the driven gear 444 is meshed and transmission-connected with the outer gear ring 43.

[0070] like Figure 4 and Figure 7 As shown, the outer gear ring 43 is connected to the main bearing plate 31 and will not rotate, while the driven gear 444 will revolve with the main rotating plate 41 around the first axis. During the revolution, the driven gear 444 is meshed with the outer gear ring 43, and the driven gear 444 rolls along the outer surface of the outer gear ring 43 to realize the self-rotation of the driven gear 444 and the self-rotation shaft 443, thereby achieving the purpose of self-rotation and revolving.

[0071] Further preferably, in order to ensure the stability of rotation, a first shaft seat 441 is installed at the edge of the main rotating plate 41, a first bearing group 442 is installed inside the first shaft seat 441, and the rotation shaft body 443 is clamped inside the first bearing group 442, thereby realizing the stable rotation of the rotation shaft body 443; and a second shaft seat 455 is installed at the center of the main bearing plate 31, a second bearing group 456 is installed inside the second shaft seat 455, a support column 454 is installed inside the second bearing group 456, and the top of the support column 454 is connected to the main rotating plate 41, thereby ensuring the stable revolution of the main rotating plate 41, and further, in order to facilitate the driven gear 444 and the outer gear ring 43, a compensation ring 42 connected to the main bearing plate 31 is provided at the bottom end of the outer gear ring 43 to ensure that the driven gear 444 and the outer gear ring 43 are consistent in vertical height.

[0072] In some embodiments, the lower driving mechanism 5 includes a mounting chamber 51 disposed at the bottom of the vacuum chamber 1, and at least two driving gears 52 arranged along the second direction are disposed inside the mounting chamber 51, and the axis of each driving gear 52 extends in a third direction, and the third direction, the second direction and the first direction are perpendicular to each other, and the lower driving mechanism 5 also includes a first driving part, and the first driving part is used to drive each driving gear 52 to rotate;

[0073] The moving mechanism 3 includes a main bearing plate 31 arranged below the main rotating plate 41, a floating rack 37 is provided at the bottom end of the main bearing plate 31, the extension direction of the floating rack 37 is the second direction, and a plurality of floating springs 310 connected to the main bearing plate 31 are provided at the top end of the floating rack 37 along the second direction, and the elastic stress direction of the floating spring 310 is the first direction.

[0074] like Figure 3 , Figure 4 , Figure 5 and Figure 8 , where the third direction is Figure 3In the front and rear directions, the floating rack 37 is driven to move left and right by rotating the driving gear 52, so as to realize the purpose of transporting the workpiece rack body 2. The tooth-meshing transmission mode has lower reverse clearance and higher rigidity, which can realize more precise position control, facilitate the precise positioning of the workpiece rack body 2, and ensure the accurate positioning of the upper coupling shaft 65 and the lower coupling shaft; on the basis of tooth transmission, a sealing rubber ring is arranged between the mounting bin 51 and the lower wall 12 of the box body to maintain the vacuum environment. However, when the sealing rubber ring is compressed for a long time, the distance between the mounting bin 51 and the lower wall 12 of the box body will be slightly reduced. Therefore, a floating rack 37 movable in the up and down directions is arranged, and a floating spring 310 is arranged for auxiliary adjustment, so that the floating rack 37 can always be in contact with the driving gear 52, effectively avoiding the problem of excessive stress concentration at the meshing point of the driving gear 52 and the floating rack 37 and causing tooth jumping, thereby reducing the positioning accuracy of the workpiece rack and affecting the product quality, thereby ensuring a higher positioning accuracy after movement.

[0075] In some embodiments, a mounting bar 34 is provided at the center of the bottom end of the main bearing plate 31, a first limiting groove 35 is provided at the bottom end of the mounting bar 34 to fit with the floating rack 37, a plurality of positioning posts 36 are provided inside the first limiting groove 35, the axis of the positioning posts 36 extends in the third direction, and both ends are respectively connected to the first limiting groove 35, a plurality of second limiting grooves 38 are provided in the middle of the floating rack 37 for the positioning posts 36 to pass through, and the extension direction of the second limiting grooves 38 is the first direction;

[0076] like Figure 5 and Figure 8 As shown, when the floating rack 37 moves left and right as the driving gear 52 rolls, it will drive the mounting bar 34 and the main bearing plate 31 to move left and right synchronously through the positioning column 36 inside the second limiting groove 38, thereby achieving the purpose of precise movement. The first limiting groove 35 is fitted with the side surface of the floating rack 37, and the positioning column 36 runs through the second limiting groove 38, ensuring the stable movement of the floating rack 37. In addition, a plurality of limiting mounting holes 39 are provided at the top of the first limiting groove 35, and the floating spring 310 is installed inside the limiting mounting hole 39, which ensures the auxiliary adjustment function of the floating spring 310 and avoids the bending and damage of the floating spring 310.

[0077] In some embodiments, the first driving unit includes a driving motor 57, each driving gear 52 is provided with a driving shaft 53, the axis of each driving shaft 53 extends in a third direction, each driving shaft 53 has a first end and a second end along the third direction, the first end of a driving shaft 53 is connected to the output shaft of the driving motor 57 through a first magnetic fluid 54, the second end of each driving shaft 53 is connected to a steering gear 55 through the first magnetic fluid 54, and a diaphragm coupling 58 is connected between adjacent steering gears 55;

[0078] Among them, Figure 4 and Figure 6 As shown, the driving gear 52 is connected to the driving motor 57 through the first magnetic fluid 54, and is transmitted through the combination of the first magnetic fluid 54, the steering gear 55 and the diaphragm coupling 58 to realize the synchronous movement of all the driving gears 52, wherein the first magnetic fluid 54 is a magnetic fluid sealing transmission member, including a shell, a magnetic fluid loaded in the shell, and a transmission shaft arranged at both ends of the magnetic fluid. It is a transmission device with large buffering and stable transmission. In addition, when the compression of the sealing rubber ring increases due to long-term work, and the spacing between the mounting bin 51 and the lower wall 12 of the box body is slightly reduced, the differential transmission of the diaphragm coupling 58 compensates for the change in the spacing between the two driving gears 52, thereby improving the transmission stability of the workpiece rack body 2. Further preferably, in order to avoid the driving motor 57 being directly connected to the transmission shaft of the first magnetic fluid 54, resulting in insufficient torque or excessive speed, a reducer 56 is provided between the driving motor 57 and the first magnetic fluid 54, and the input end of the reducer 56 is connected to the output shaft of the driving motor 57, and the output shaft of the reducer 56 is connected to the transmission shaft of the first magnetic fluid 54, thereby achieving the purpose of increasing the torque.

[0079] In some embodiments, both ends of the main bearing plate 31 along the third direction are provided with side mounting plates 32, and the two side mounting plates 32 are provided with a plurality of travel guide wheels 33 arranged along the second direction at the end surfaces away from each other, and the axis extension direction of each travel guide wheel 33 is the third direction, and the bottom of the vacuum chamber 1 is provided with two guide wheel tracks 312 arranged along the third direction, and the extension direction of the guide wheel tracks 312 is the second direction, and each travel guide wheel 33 is matched with the corresponding guide wheel track 312;

[0080] like Figure 2 and Figure 5 As shown, in order to improve the stability of the movement of the main bearing plate 31, the corresponding walking guide wheel 33 is supported by the guide wheel track 312 to improve the stability of the movement. In addition, on the basis of the guide wheel track 312 supporting the corresponding walking guide wheel 33, the floating rack 37 is always engaged with the driving gear 52 under the action of the floating spring 310. Preferably, the walking guide wheel 33 uses a V-shaped wheel, and the guide wheel track 312 is a track matching the V-shaped wheel. The V-shaped wheel can provide good position limitation, further improving the stability of the movement of the main bearing plate 31. Furthermore, a baffle plate 311 is provided on the top of the side mounting plate 32 to reduce impurities falling between the walking guide wheel 33 and the guide wheel track 312 during the coating process or other states, thereby reducing interference during the movement.

[0081] In some embodiments, a carrier body 8 is provided at both ends of the vacuum chamber 1 along the second direction, two guide wheel tracks 312 arranged along the third direction are provided at the top of the carrier body 8, and an inverted L-shaped blocking rod 81 is provided at the end of the carrier body 8 away from the vacuum chamber 1, and the top of the inverted L-shaped blocking rod 81 is located above the guide wheel track 312;

[0082] like Figure 1 and Fig. 9 As shown, the travel guide wheel 33 can be switched and moved between the guide wheel track 312 in the vacuum chamber 1 and the guide wheel track 312 at the top of the carrier body 8, so as to facilitate the workpiece rack body 2 to deliver the workpiece 7 into the vacuum chamber 1 or to deliver the workpiece 7 out of the vacuum chamber 1; in addition, the inverted L-shaped baffle bar 81 can limit the movement of the travel guide wheel 33 to prevent the travel guide wheel 33 from detaching from the guide wheel track 312 and causing the workpiece rack body 2 to fall.

[0083] In the description of this specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0084] In the description of this specification, the description of the terms "one embodiment", "some embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0085] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A traveling and rotating workpiece rack, used for loading a workpiece (7) into a vacuum chamber (1) for processing, characterized in that: The reciprocating workpiece rack can pass from one vacuum chamber (1) to another vacuum chamber (1), and the reciprocating workpiece rack comprises: A workpiece rack body (2) comprises a moving mechanism (3) and a rotating mechanism (4) arranged on the moving mechanism (3), wherein the rotating mechanism (4) comprises a main rotating plate (41), wherein the main rotating plate (41) has a first axis, and a plurality of self-rotating components (44) are evenly distributed at the edge of the main rotating plate (41) with the first axis as the center, wherein the self-rotating components (44) have a second axis, and the extension directions of the second axis and the first axis are both in a first direction, and the workpiece (7) is mounted on the self-rotating component (44); a lower driving mechanism (5) disposed at the bottom of the vacuum chamber (1) and used for driving the moving mechanism (3) to move along a second direction, thereby driving the rotating mechanism (4), each of the rotating components (44) and the workpiece (7) to move synchronously, wherein the second direction is perpendicular to the first direction; The upper driving mechanism (6) is arranged on the top of the vacuum chamber (1) and is used to drive the main rotating plate (41) to rotate around the first axis, thereby driving each of the rotating components (44) and the workpiece (7) to rotate around the second axis.

2. The through-type accompanying rotating workpiece support according to claim 1 is characterized in that: The lower driving mechanism (5) comprises a mounting chamber (51) arranged at the bottom of the vacuum chamber (1); at least two driving gears (52) arranged along a second direction are arranged inside the mounting chamber (51); the axis of each driving gear (52) extends in a third direction; the third direction, the second direction and the first direction are perpendicular to each other; the lower driving mechanism (5) further comprises a first driving unit, the first driving unit being used to drive each driving gear (52) to rotate; The moving mechanism (3) includes a main bearing plate (31) arranged below the main rotating plate (41), a floating rack (37) is provided at the bottom end of the main bearing plate (31), the extension direction of the floating rack (37) is the second direction, and a plurality of floating springs (310) connected to the main bearing plate (31) are provided at the top end of the floating rack (37) along the second direction, and the elastic stress direction of the floating spring (310) is the first direction.

3. The through-type accompanying rotating workpiece support according to claim 2 is characterized in that: A mounting strip (34) is provided at the center of the bottom end of the main bearing plate (31); a first limiting groove (35) is provided at the bottom end of the mounting strip (34) and is matched with the floating rack (37); a plurality of positioning columns (36) are provided inside the first limiting groove (35); the axis of the positioning columns (36) extends in a third direction, and both ends are respectively connected to the first limiting groove (35); a plurality of second limiting grooves (38) are provided in the middle of the floating rack (37) for the positioning columns (36) to pass through; the extension direction of the second limiting grooves (38) is the first direction.

4. The through-type accompanying rotating workpiece support according to claim 2 is characterized in that: The first driving unit comprises a driving motor (57), each driving gear (52) is provided with a driving shaft (53) inside, the axis of each driving shaft (53) extends in a third direction, each driving shaft (53) has a first end and a second end along the third direction, the first end of one driving shaft (53) is connected to the output shaft of the driving motor (57) via a first magnetic fluid (54), the second end of each driving shaft (53) is connected to a steering gear (55) via the first magnetic fluid (54), and a diaphragm coupling (58) is connected between adjacent steering gears (55).

5. The through-type accompanying rotating workpiece support according to claim 2 is characterized in that: The main bearing plate (31) is provided with side mounting plates (32) at both ends along the third direction; the two side mounting plates (32) are provided with a plurality of travel guide wheels (33) arranged along the second direction at end surfaces away from each other; the axis of each travel guide wheel (33) extends in the third direction; the bottom of the vacuum chamber (1) is provided with two guide wheel tracks (312) arranged along the third direction; the guide wheel tracks (312) extend in the second direction; and each travel guide wheel (33) is matched with the corresponding guide wheel track (312).

6. The through-type accompanying rotating workpiece support according to claim 5 is characterized in that: The vacuum chamber (1) is provided with a carrier body (8) at both ends along the second direction, the top of the carrier body (8) is provided with two guide wheel tracks (312) arranged along the third direction, and the end of the carrier body (8) away from the vacuum chamber (1) is provided with an inverted L-shaped blocking rod (81), and the top of the inverted L-shaped blocking rod (81) is located above the guide wheel track (312).

7. The through-type accompanying rotating workpiece support according to claim 2 is characterized in that: A revolution assembly (45) is provided at the center of the main rotating plate (41), and the revolution assembly (45) includes a lower coupling shaft provided at the center of the top end of the main rotating plate (41); the upper driving mechanism (6) includes an upper coupling shaft (65) located inside the vacuum box (1), a linear driving module (62) provided at the top end of the outside of the vacuum box (1), and a rotation assembly (63) provided on the linear driving module (62); the bottom of the rotation assembly (63) extends into the vacuum box (1) and is connected to the upper coupling shaft (65); the linear driving module (62) is used to drive the rotation assembly (63) and the upper coupling shaft (65) to move downward, driving the upper coupling shaft (65) and the lower coupling shaft to form a combined coupling; the rotation assembly (63) is used to drive the upper coupling shaft (65) to rotate, driving the lower coupling shaft and the main rotating plate (41) to rotate around the first axis; The upper driving mechanism (6) further comprises a sealing member, which is used to seal the gap between the bottom of the rotating assembly (63) and the vacuum box (1).

8. The through-type accompanying rotating workpiece support according to claim 7 is characterized in that: The lower coupling shaft comprises the revolving shaft body (451) arranged at the top center of the main rotating plate (41), a positioning slot (452) is arranged at the top center of the revolving shaft body (451), and a plurality of driven connecting columns (453) are arranged around the top of the revolving shaft body (451); The upper connecting shaft (65) includes a positioning column (651) connected to the rotating component (63), the top of the positioning column (651) fits in the positioning slot (452), and a plurality of driving connecting columns (652) are arranged around the top of the positioning column (651), and the driving connecting columns (652) are adapted to the driven connecting columns (453).

9. The through-type accompanying rotating workpiece support according to claim 8 is characterized in that: Each of the driving connection pillars (652) has a driving inclined surface in a clockwise direction or a counterclockwise direction, and each of the driven connection pillars (453) has a driven inclined surface near the driving inclined surface end, and the driven inclined surface is matched with the driving inclined surface.

10. The through-type accompanying rotating workpiece support according to claim 1 is characterized in that: An outer gear ring (43) is provided at the top of the main bearing plate (31), and each of the rotation components (44) includes a rotation shaft (443) which is arranged on the edge of the main rotating plate (41) and can rotate. The axis of the rotation shaft (443) is the second axis. A mounting sleeve (445) is provided at the top of the rotation shaft (443), and the workpiece (7) is installed in the mounting sleeve (445). A driven gear (444) is mounted at the bottom of the rotation shaft (443), and the driven gear (444) is meshed and transmission-connected with the outer gear ring (43).

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