Real-time on-line measurement method, device, equipment and medium for crystal growth thickness

Abstract

The present invention relates to a method, device, equipment and medium for real-time on-line measurement of crystal growth thickness, including obtaining a first image captured in each growth cycle during crystal growth; constructing a first calibration frame with the target of covering all crystals in the first viewing direction in the first first image of the growth cycle, and calibrating the central position of any crystal in the first calibration frame as the first crystal center position; determining the primary color value range of each primary color according to the three primary color information of the pixels at the first crystal center position; determining the parameter value of the image visual attribute according to the first calibration frame and the primary color value range to obtain the target parameter value, and adjusting the image visual attribute according to the target parameter value to obtain the first target image; obtaining the first on-line measurement thickness according to the preset thickness of the molybdenum stage, the target region image in the preset fixed search region in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of crystals in the crystals within the first calibration frame.

Description

Technical Field

[0001] The present disclosure relates to the field of crystal growth technology, and in particular, to a method, device, equipment and medium for real-time online measurement of crystal growth thickness. Background Art

[0002] Crystal growth is a key process in the manufacturing of semiconductors, optics and laser devices, and its thickness control directly affects the performance of the final product. However, the existing measurement of crystal growth thickness cannot be carried out in real-time online, and mostly adopts the off-line measurement method, which requires interrupting the growth process for sampling and detection, resulting in low process efficiency and inability to adjust the growth parameters in real-time. The efficiency of crystal production is reduced. Summary of the Invention

[0003] The object of the present invention is to provide a method, device, equipment and medium for real-time online measurement of crystal growth thickness, aiming to solve the problem that in the process of crystal growth in related scenarios, the crystal growth thickness cannot be measured in real-time online, resulting in low crystal production efficiency.

[0004] To achieve the above object, in the first aspect of the embodiments of the present disclosure, a method for real-time online measurement of crystal growth thickness is provided, and the method includes:

[0005] Obtain a first image captured by a first camera in each growth cycle during the crystal growth process, where the first camera is correspondingly arranged with a first observation window in the first viewing direction of the vacuum reaction chamber;

[0006] In the first image of each growth cycle, taking at least covering all the crystals in the first viewing direction as the target, construct a first calibration frame, and calibrate the central position of any crystal within the first calibration frame in the first viewing direction as the first crystal center position;

[0007] Obtain the tricolor information of the pixels at the first crystal center position corresponding to each growth cycle during the crystal growth process, and determine the original color value range of each primary color according to the tricolor information of the pixels at the first crystal center position;

[0008] According to the first calibration frame and the original color value range of each primary color, determine the parameter value of the image visual attribute corresponding to the first image, obtain the target parameter value of the image visual attribute, and adjust the image visual attribute of all the first images in the corresponding growth cycle according to the target parameter value to obtain a first target image;

[0009] Based on the preset thickness of the molybdenum stage, the target region image in the preset fixed search region in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of the crystal within the first calibration frame in the first target image, the first online measurement thickness of each crystal measured online in the first viewing direction is obtained.

[0010] In a possible implementation manner, the obtaining of the first online measurement thickness of each crystal in the first viewing direction based on the preset thickness of the molybdenum stage, the target region image in the preset fixed search region in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of the crystal within the first calibration frame in the first target image includes:

[0011] Based on the preset thickness of the molybdenum stage and the target region image in the preset fixed search region in the first target image, a vertical pixel size is determined, and the vertical pixel size is used to represent the size represented by 1 pixel in the vertical direction;

[0012] Calculate the number of crystal pixels between the upper edge and the lower edge of each column of the crystal constructed by consecutive pixels within the first calibration frame in the first target image;

[0013] Based on the number of crystal pixels and the vertical pixel size, the first online measurement thickness of each crystal in the first viewing direction is obtained.

[0014] In a possible implementation manner, the determining of the vertical pixel size based on the preset thickness of the molybdenum stage and the target region image in the preset fixed search region in the first target image includes:

[0015] From top to bottom, traverse and calculate the pixel value difference between adjacent pixels in the vertical direction in the target region image to obtain a first pixel value difference, and determine the first pixel whose first pixel value difference exceeds the preset difference range as the upper edge pixel belonging to the upper edge of the molybdenum stage;

[0016] From bottom to top, traverse and calculate the pixel value difference between adjacent pixels in the vertical direction in the target region image to obtain a second pixel value difference, and determine the second pixel whose second pixel value difference exceeds the preset difference range as the lower edge pixel belonging to the lower edge of the molybdenum stage;

[0017] Based on the number of pixels between the upper edge pixel and the lower edge pixel, determine the number of pixels in the vertical direction;

[0018] Based on the ratio between the preset thickness of the molybdenum stage and the vertical pixel size, determine the vertical pixel size.

[0019] In a possible implementation manner, determining the parameter value of the image visual attribute corresponding to the first image according to the first calibration frame and the primary color value range of each primary color, and obtaining the target parameter value of the image visual attribute includes:

[0020] Starting from the preset initial value of the image visual attribute, adjusting the parameter value of the image visual attribute step by step according to the preset step size;

[0021] After each adjustment of the parameter value, counting the number of pixels of the three primary colors within the primary color value range of each primary color covered by the first calibration frame;

[0022] Determining the parameter value corresponding to the largest number as the target parameter value of the image visual attribute.

[0023] In a possible implementation manner, the image visual attribute includes at least one of the following: brightness, contrast, saturation, clarity, sharpness, color temperature.

[0024] In a possible implementation manner, determining the primary color value range of each primary color according to the three primary color information of the pixels at the first crystal center position includes:

[0025] According to the value of each primary color represented in the three primary color information of the pixels at the first crystal center position and the preset extension value, determining the primary color limit value of each primary color, wherein, adding the preset extension value to the value of each primary color to obtain the upper limit value of the primary color limit value, and subtracting the preset extension value from the value of each primary color to obtain the lower limit value of the primary color limit value;

[0026] According to the upper limit value and the lower limit value of each primary color, determining the primary color value range of each primary color.

[0027] In the second aspect of the embodiments of the present disclosure, a crystal growth device is provided, and the crystal growth device includes: a control terminal, a vacuum reaction chamber, a microwave energy providing unit, a process gas providing unit, an electric proportional valve, a vacuum pump, and a first camera;

[0028] The vacuum reaction chamber is used to provide a crystal growth environment, a molybdenum table is arranged in the vacuum reaction chamber, the molybdenum table is used to carry the grown crystal, a first observation window is arranged on the vacuum reaction chamber, and the first camera is arranged at the first observation window;

[0029] The first camera takes a first image of the inside of the vacuum reaction chamber from the first viewing angle direction through the first observation window;

[0030] The microwave energy supply unit and the process gas supply unit are respectively connected to the vacuum reaction chamber through pipelines. The vacuum pump is connected to the vacuum reaction chamber through a pipeline, and an electric proportional valve is provided on the pipeline connecting the vacuum pump and the vacuum reaction chamber;

[0031] The control terminal is respectively communicatively connected to the vacuum reaction chamber, the microwave energy supply unit, the process gas supply unit, the electric proportional valve, the vacuum pump, and the first camera, and is used for controlling the growth of the crystal, obtaining the first image, and executing the method according to any one of the first aspects.

[0032] In a possible implementation manner, a molybdenum stage is arranged in the vacuum reaction chamber, and the molybdenum stage is used for carrying the grown crystal.

[0033] In a third aspect of the embodiments of the present disclosure, an electronic device is provided, including:

[0034] A memory, on which a computer program is stored;

[0035] A processor, configured to execute the computer program in the memory to implement the steps of the method according to any one of the first aspects.

[0036] In a fourth aspect of the embodiments of the present disclosure, a computer-readable storage medium is provided, on which a computer program is stored, and when the program is executed by a processor, the steps of the method according to any one of the first aspects are implemented.

[0037] The present invention provides a method, device, equipment, and medium for real-time online measurement of crystal growth thickness. Compared with the prior art, the following beneficial effects are achieved:

[0038] By constructing the first calibration frame and calibrating the position of the center of the first crystal, the accuracy and comprehensiveness of the measurement area are ensured. At the same time, by analyzing the three primary color information of the pixels at the position of the center of the first crystal, the influence of image noise and illumination changes is eliminated, and the image quality is improved. According to the values of the target parameters, the visual attributes of the image are adjusted to further optimize the image clarity and contrast, ensuring the accuracy of crystal edge detection. By analyzing the three primary color information and adjusting the visual attributes of the image, it adapts to the complex illumination conditions in the vacuum reaction chamber and the reflection characteristics of the crystal surface. By adjusting the visual attributes of the image, the clarity, contrast and color balance of the image are optimized, ensuring that the crystal edges and details are clearly visible, effectively overcoming the problem of image quality degradation in high-temperature and high-pressure environments. Not only is the measurement accuracy of the crystal growth thickness significantly improved, with the error controlled at the sub-micron level, meeting the requirements of high-precision crystal growth, but also the first image is obtained in real time during each growth cycle, and through automated image processing and data calculation, the real-time online measurement of the crystal thickness is realized. Without interrupting the crystal growth process, the growth parameters can be dynamically adjusted to improve the process efficiency. Thus, the crystal growth process can be monitored in real time, and the growth parameters can be dynamically adjusted, significantly improving the process efficiency.

[0039] Other features and advantages of the present disclosure will be described in detail in the following specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] The drawings are used to provide a further understanding of the present disclosure, and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure, but do not constitute a limitation to the present disclosure. In the drawings:

[0041] Figure 1 A flowchart of a method for real-time online measurement of crystal growth thickness shown according to an embodiment of the specification.

[0042] Figure 2 A schematic diagram of a crystal growth apparatus shown according to an embodiment of the specification.

[0043] Figure 3 A schematic diagram of a first calibration frame and the position of the center of the first crystal shown according to an embodiment of the specification.

[0044] Figure 4 A schematic diagram of a preset fixed search area and a crystal in the molybdenum stage shown according to an embodiment of the specification.

[0045] Figure 5 A block diagram of a control terminal shown according to an embodiment of the specification. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0047] The following will detail the specific embodiments of the present disclosure in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only for the purpose of illustration and explanation, and are not intended to limit the present disclosure.

[0048] The present disclosure provides a method for real-time on-line measurement of crystal growth thickness. Figure 1 It is a flowchart of a method for real-time on-line measurement of crystal growth thickness shown according to an embodiment. Specifically, the method includes:

[0049] In step S11, a first image captured by a first camera during each growth cycle in the process of crystal growth is obtained, and the first camera is correspondingly arranged with a first observation window in the first viewing direction of the vacuum reaction chamber.

[0050] Among them, crystal growth: refers to the process of transforming a substance from a gaseous, liquid or solid state into a solid crystal through physical or chemical methods. Growth cycle: In the process of crystal growth, a manually divided time period used to monitor and record the growth state of the crystal. First camera: A device used to capture images during the crystal growth process, usually having high resolution and sensitivity. Vacuum reaction chamber: A closed space for conducting crystal growth experiments, maintaining a vacuum state inside to exclude interference factors. First viewing direction: The viewing angle of the camera relative to the crystal in the vacuum reaction chamber. First observation window: A transparent window on the wall of the vacuum reaction chamber used to allow the camera to observe.

[0051] In one embodiment, as shown in Figure 2 the first observation window can be horizontally arranged. Therefore, the first viewing direction can be the horizontal direction, and further, the first camera can capture the first image during each growth cycle of the crystal growth process from the horizontal direction.

[0052] In the embodiments of the present disclosure, in the crystal growth experiment, by precisely controlling the reaction conditions (such as temperature, pressure, gas composition, etc.) in the vacuum reaction chamber, the raw materials are gradually crystallized in the vacuum reaction chamber. The first camera continuously monitors this process through the first observation window and captures images at the end of each growth cycle.

[0053] Among them, the distance between the camera and the observation window can be determined according to the camera focal length, the size of the observation window, and the required image resolution, usually ensuring that the camera can clearly capture the entire crystal area. The distance between the observation window and the crystal is determined by the design of the vacuum reaction chamber to ensure that the camera's field of view can cover the entire crystal growth area.

[0054] In step S12, in the first of each said growth cycle of the first said first image, with the goal of at least covering all the crystals in the first viewing direction, a first calibration box is constructed, and the center position of any crystal within the first calibration box in the first viewing direction is calibrated as the first crystal center position;

[0055] Among them, the calibration box is a rectangular or circular area artificially set in the image for positioning and analyzing the target object. The first crystal center position is the geometric center of any crystal determined by image processing algorithms within the calibration box.

[0056] In the embodiments of the present disclosure, in the first image of each growth cycle, an image processing software or algorithm is used to automatically identify and construct a calibration box covering all the crystals. Then, through image processing techniques such as edge detection and centroid calculation, the center position of any crystal within the calibration box is determined.

[0057] Among them, the size of the calibration box is dynamically adjusted according to the distribution and size of the crystals in the image to ensure that all the crystals are covered. The distance between the crystal center position and the edge of the calibration box is automatically calculated by the image processing algorithm for subsequent analysis and monitoring.

[0058] See Figure 3 As shown, in the first long first image, all the grown crystals are framed by the calibration box of the gray rectangle, and the center position of the crystal on the left within the first calibration box is calibrated as the first crystal center position ( Figure 3 represented by the black "cross" in). Among them, the crystal area that needs to be measured by manual positioning, the first calibration box is calibrated, and a crystal center position is calibrated so that the crystal is more prominent (only manual operation is required for the first picture within one growth cycle, and no further calibration is needed later).

[0059] In step S13, the three-primary color information of the pixels at the first crystal center position corresponding to each growth cycle during the crystal growth process is obtained, and according to the three-primary color information of the pixels at the first crystal center position, the primary color value range of each primary color is determined;

[0060] Among them, the three-primary color information refers to the intensity values of the three basic colors, red (R), green (G), and blue (B), of the pixels at the first crystal center position in the first image. The primary color value range is the value range of the intensity of each primary color.

[0061] In the embodiments of the present disclosure, for the pixels at the center position of the first crystal in each growth cycle, their three-primary color information is obtained. Then, based on this information, the value range of each primary color is determined. At the determined crystal center position, the RGB value of this pixel is read, and the RGB values of all pixels at the center positions throughout the growth cycle are statistically analyzed, so as to determine the value range of each primary color.

[0062] In step S14, according to the first calibration frame and the value ranges of the primary colors, the parameter values of the image visual attributes corresponding to the first image are determined to obtain the target parameter values of the image visual attributes. According to the target parameter values, the image visual attributes of all the first images in the corresponding growth cycle are adjusted to obtain the first target image;

[0063] Among them, the image visual attributes refer to the attributes of the image such as brightness, contrast, saturation, etc., and these attributes affect the visual effect of the image. The target parameter values are the ideal values of the image visual attributes determined according to specific requirements or standards.

[0064] In the embodiments of the present disclosure, according to the calibration frame and the value ranges of the primary colors, the parameter values of the image visual attributes (such as brightness, contrast, etc.) are determined, and then the attributes of all images in the corresponding growth cycle are adjusted to obtain the target image. According to the determined value ranges of the primary colors, the attributes such as brightness and contrast of the image are adjusted to make the crystal clearer and more prominent in the image.

[0065] In step S15, according to the preset thickness of the molybdenum stage, the target area image in the preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of the crystal within the first calibration frame in the first target image, the first online measurement thickness of each crystal measured online in the first viewing direction is obtained.

[0066] Among them, the molybdenum stage is a platform used to support the crystal during crystal growth, usually made of high-temperature-resistant materials such as molybdenum. The target area image is a specific area specified in the image for analysis or measurement. The number of crystal pixels represents the number of pixels of the crystal height in the image. The first online measurement thickness is the thickness of the crystal measured in real time by image processing technology during crystal growth.

[0067] In the embodiments of the present disclosure, the on-line measured thickness of the crystal is calculated through a proportional relationship by using the known thickness of the molybdenum stage, the target area image, and the number of pixels between the upper edge and the lower edge of the crystal. For example, before the crystal growth starts, a measuring tool (caliper) is used to measure the thickness St (unit: mm) of the molybdenum stage. For example, it is assumed that the thickness of the molybdenum stage is 1 mm. In the target area image, 500 pixels are measured between the upper edge and the lower edge of a certain crystal. At the same time, the actual size represented by each pixel in the image is known. Through proportional calculation, the on-line measured thickness of the crystal can be obtained.

[0068] The above technical solution ensures the accuracy and comprehensiveness of the measurement area by constructing the first calibration frame and calibrating the center position of the first crystal. At the same time, by analyzing the three primary color information of the pixels at the center position of the first crystal, the influence of image noise and light change is eliminated, and the image quality is improved. According to the target parameter values, the image visual attributes are adjusted to further optimize the image clarity and contrast, ensuring the accuracy of crystal edge detection. By analyzing the three primary color information and adjusting the image visual attributes, it adapts to the complex lighting conditions in the vacuum reaction chamber and the reflection characteristics of the crystal surface. By adjusting the image visual attributes, the clarity, contrast, and color balance of the image are optimized, ensuring that the crystal edges and details are clearly visible, effectively overcoming the problem of image quality degradation in high-temperature and high-pressure environments. Not only is the measurement accuracy of the crystal growth thickness significantly improved, with the error controlled at the sub-micron level, meeting the requirements of high-precision crystal growth, but also the first image is obtained in real time during each growth cycle, and through automated image processing and data calculation, the real-time on-line measurement of the crystal thickness is realized. There is no need to interrupt the crystal growth process, and the growth parameters can be dynamically adjusted to improve the process efficiency. Thus, the crystal growth process can be monitored in real time, and the growth parameters can be dynamically adjusted, significantly improving the process efficiency.

[0069] In a possible implementation manner, in step S15, the obtaining of the first on-line measured thickness of each crystal in the first viewing direction according to the preset thickness of the molybdenum stage, the target area image in the preset fixed search area in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of the crystal in the first calibration frame in the first target image includes:

[0070] In step S151, according to the preset thickness of the molybdenum stage and the target area image in the preset fixed search area in the first target image, a vertical pixel size is determined, and the vertical pixel size is used to represent the size represented by 1 pixel in the vertical direction;

[0071] Wherein, the vertical pixel size: In the image, the actual physical size represented by each pixel in the vertical direction. This size usually needs to be determined through calibration or known physical sizes.

[0072] In the embodiments of the present disclosure, using the known thickness of the molybdenum stage and its pixel representation in the first target image, the actual size represented by each pixel in the vertical direction can be calculated. This calculation process generally involves a proportional relationship, that is, the ratio of the actual thickness of the molybdenum stage to the number of pixels in the image.

[0073] For example, assume that the actual thickness of the molybdenum stage is 1 millimeter, and in the first target image, the height of the molybdenum stage occupies 100 pixels. Then, the vertical pixel size can be calculated as 1 millimeter / 100 pixels = 0.01 millimeter / pixel. This means that in the first target image, each pixel in the vertical direction represents an actual size of 0.01 millimeter.

[0074] In step S152, calculate the number of crystal pixels between the upper edge and the lower edge of each column of the crystal constructed by consecutive pixels within the first calibration frame in the first target image;

[0075] Among them, the number of crystal pixels: the number of pixels representing the height of the crystal in the image. This quantity can be measured through image processing techniques, which generally involve steps such as edge detection and contour extraction.

[0076] In the embodiments of the present disclosure, in the first target image, for each column of crystals within the first calibration frame, the upper edge and the lower edge of the crystal are determined through image processing techniques (such as edge detection algorithms). Then, calculate the number of pixels between these two edges, which is the number of crystal pixels.

[0077] For example, in the first target image, select a column of clear crystals for analysis. Use the edge detection algorithm to identify the upper edge and the lower edge of the crystal, and calculate the number of pixels between these two edges. Suppose the calculation result is 200 pixels, then the number of pixels of this column of crystals is 200.

[0078] In step S153, according to the number of crystal pixels and the vertical pixel size, obtain the first on-line measurement thickness of each crystal in the first viewing direction.

[0079] Among them, the first on-line measurement thickness: the thickness of the crystal measured in real time through image processing techniques during the crystal growth process. This thickness is calculated based on the number of pixels in the image and the vertical pixel size.

[0080] In the embodiments of the present disclosure, using the determined vertical pixel size and the calculated number of crystal pixels, the first on-line measurement thickness of the crystal can be calculated through a simple multiplication operation. That is, multiply the number of crystal pixels by the vertical pixel size to obtain the actual thickness of the crystal.

[0081] For example, assume that the determined vertical pixel size is 0.01 mm / pixel and the calculated number of crystal pixels is 200. Then, the first on-line measured thickness of the crystal can be calculated as 200 pixels * 0.01 mm / pixel = 2 mm. This means that in the first viewing direction, the thickness of this column of crystals is approximately 2 mm.

[0082] The above technical solution can realize the on-line measurement of the crystal thickness during the crystal growth process. This method has the advantages of non-contact, real-time, accuracy, etc.

[0083] In a possible implementation manner, in step S151, the determining the vertical pixel size according to the preset thickness of the molybdenum stage and the target region image in the preset fixed search region in the first target image includes:

[0084] In step S1511, from top to bottom, traverse and calculate the pixel value difference between adjacent pixels in the vertical direction in the target region image to obtain a first pixel value difference, and determine the first pixel whose first pixel value difference exceeds the preset difference range as the upper edge pixel belonging to the upper edge of the molybdenum stage;

[0085] Among them, the pixel value difference is the pixel value difference between adjacent pixels in the image. This difference can be used to detect edges or mutation points in the image. The preset difference range is a threshold range set when calculating the pixel value difference. When the difference exceeds this range, it is considered that there is a significant edge or mutation between adjacent pixels. The upper edge pixel is the pixel in the image that represents the upper edge of the object. This pixel is usually located in the transition region between the object and the background, and its pixel value difference will exceed the preset difference range.

[0086] In the embodiments of the present disclosure, traverse the pixels in the target region image from top to bottom, and calculate the pixel value difference between each pixel and its adjacent pixel below. When this difference first exceeds the preset difference range, it is considered that this pixel belongs to the upper edge of the molybdenum stage, that is, the upper edge pixel.

[0087] For example, assume that there is an obvious brightness difference between the upper edge of the molybdenum stage and the background in the target region image. Traverse the image from top to bottom. When the brightness difference between a certain pixel and its adjacent pixel below is first calculated to exceed the preset brightness difference range, it can be considered that this pixel is the upper edge pixel of the molybdenum stage.

[0088] In step S1512, from bottom to top, traverse and calculate the pixel value difference between adjacent pixels in the vertical direction in the target region image to obtain a second pixel value difference, and determine the second pixel whose first second pixel value difference exceeds the preset difference range as the lower edge pixel belonging to the lower edge of the molybdenum stage;

[0089] Among them, the lower-edge pixel is a pixel in the image that represents the lower edge of the object. Similar to the upper-edge pixel, this pixel is also located in the transition region between the object and the background, but its position is below the object.

[0090] In the embodiments of the present disclosure, pixels in the target region image are traversed from bottom to top, and the pixel value difference between each pixel and its adjacent pixel above it is calculated. When this difference first exceeds the preset difference range, it is considered that this pixel belongs to the lower edge of the molybdenum stage, that is, the lower-edge pixel.

[0091] For example, it is similar to step S1511 but in the opposite direction. Traverse the image from bottom to top. When the brightness difference between a certain pixel and its adjacent pixel above it is first calculated to exceed the preset brightness difference range, it can be considered that this pixel is the lower-edge pixel of the molybdenum stage.

[0092] In step S1513, the number of pixels in the vertical direction is determined according to the number of pixels between the upper-edge pixel and the lower-edge pixel;

[0093] In the embodiments of the present disclosure, the number of pixels in the vertical direction is the number of pixels in the image that represents the height of the object. This number can be obtained by calculating the number of pixels between the upper-edge pixel and the lower-edge pixel. After determining the upper-edge pixel and the lower-edge pixel, by calculating the number of pixels between these two pixels, the number of pixels in the vertical direction of the molybdenum stage in the image can be obtained. For example, assume that the index of the upper-edge pixel is i and the index of the lower-edge pixel is j (and i < j). Then, the number of pixels in the vertical direction of the molybdenum stage is j - i.

[0094] In step S1514, the vertical pixel size is determined according to the ratio between the preset thickness of the molybdenum stage and the vertical pixel size.

[0095] In the embodiments of the present disclosure, using the known thickness (preset thickness) of the molybdenum stage and its number of pixels in the vertical direction in the image, the vertical pixel size can be calculated through a proportional relationship. That is, divide the thickness of the molybdenum stage by the number of pixels in the vertical direction to obtain the actual physical size represented by each pixel.

[0096] See Figure 4 As shown, the A frame area is a fixed search area. In this area, the RGB values of all pixels are compared; compare them pairwise from top to bottom. A group of pixels with a difference greater than the set value (range 50 - 200) and in the same vertical position are determined as the upper edge of the molybdenum stage; (such as Figure 4 the upper edge of the B area in); compare them pairwise from bottom to top. A group of pixels with a difference greater than the set value (range 50 - 200) and in the same vertical position are determined as the lower edge of the molybdenum stage; (such as Figure 4 the lower edge of the B area in).

[0097] Calculation of the number of pixels in the vertical direction of the molybdenum stage: Accumulate the number of pixels between the upper edge and the lower edge of a single column on the molybdenum stage, which is the number of pixels Sm in the vertical direction of the molybdenum stage; Input of the true thickness dimension of the molybdenum stage: Before the start of crystal growth, use a measuring tool (caliper) to measure the thickness dimension St (unit: mm) of the molybdenum stage; Calculation of the vertical pixel size: The vertical pixel size (unit: mm) Sz = St / Sm.

[0098] Within the calibration area ( Figure 3 medium gray box), pixels that meet the RGB upper and lower limit ranges and are connected are determined as crystals (such as Figure 4 regions C and D in are crystals): Calculation of the number of vertical pixels of the crystal: For the same crystal, calculate the number of pixels between the upper edge and the lower edge of each column of the crystal separately, and the maximum number of pixels is the number of pixels Sc in the vertical direction of this crystal. Calculation of the crystal thickness: The crystal thickness in the horizontal direction (unit: mm) Sh = Sc x Sz.

[0099] The above technical solution can accurately determine the vertical pixel size. This size is the basis for subsequent calculation of parameters such as crystal thickness, improving the accuracy of measurement.

[0100] In a possible implementation manner, in step S14, the determining the parameter value of the image visual attribute corresponding to the first image according to the first calibration frame and the primary color value ranges of each primary color, and obtaining the target parameter value of the image visual attribute includes:

[0101] In step S141, starting from the preset initial value of the image visual attribute, adjust the parameter value of the image visual attribute step by step according to the preset step size;

[0102] Among them, the preset initial value is the initial setting value of the image visual attribute parameter before the start of adjustment. The preset step size is the change amount of the parameter value each time the image visual attribute parameter is adjusted.

[0103] In the embodiments of the present disclosure, starting from the preset initial value of the image visual attribute, increase or decrease the parameter value of this attribute step by step according to the preset step size. This process is usually implemented through image processing algorithms or software and can be automated.

[0104] For example, assume that it is necessary to adjust the brightness attribute of an image, the preset initial value is 100 (representing a certain intermediate value of the brightness level), and the preset step size is 5. Then, starting from 100, increase or decrease by 5 each time, and try different brightness values in turn.

[0105] In step S142, after each adjustment of the parameter value, count the number of pixels of the three primary colors within the range covered by the first calibration frame that are in the primary color value ranges of each primary color;

[0106] In the embodiments of the present disclosure, after each adjustment of the value of the image visual attribute parameter, the tristimulus values of each pixel within the coverage of the first calibration box are recalculated, and the number of pixels whose values fall within their respective primary color value ranges is counted. This process generally involves steps such as image segmentation, color space conversion, and pixel counting.

[0107] For example, assume that the primary color value range of red is set as [100, 150], that of green is [50, 100], and that of blue is [75, 125]. After each adjustment of the brightness, the RGB values of each pixel within the first calibration box are calculated, and the number of pixels that satisfy the above red, green, and blue value ranges is counted.

[0108] In step S143, the value of the parameter corresponding to the largest number is determined as the target parameter value of the image visual attribute.

[0109] Among them, the target parameter value is the parameter value that, in a series of parameter value attempts, makes the number of pixels satisfying specific conditions (such as the number of pixels with the tristimulus values within the primary color value ranges being the largest).

[0110] In the embodiments of the present disclosure, after counting the number of pixels with the tristimulus values within their respective primary color value ranges under all attempted parameter values, the parameter value with the largest number is selected as the target parameter value of the image visual attribute. This process generally involves comparison and selection operations.

[0111] For example, the brightness is cyclically adjusted from 0% to 100% (incrementing by 1% each time). Each time the adjustment is made, the number of pixels within the calibration area that meet the RGB upper and lower limit ranges is calculated. The brightness value with the largest number is the optimal brightness. After the calculation is completed, the brightness is adjusted to the optimal brightness. According to the method of brightness adjustment, the contrast, saturation, clarity, sharpness, and color temperature are adjusted to the optimal values to obtain the first target image.

[0112] It is possible to determine the value of the image visual attribute parameter that makes the number of pixels with the tristimulus values within their respective primary color value ranges within the coverage of the first calibration box the largest, that is, the target parameter value of the image visual attribute, so as to facilitate the identification of the grown crystal from the image, thereby improving the accuracy of online thickness measurement.

[0113] In a possible implementation manner, the image visual attribute includes at least one of the following: brightness, contrast, saturation, clarity, sharpness, color temperature.

[0114] In a possible implementation manner, in step S13, the determining of the primary color value range of each primary color according to the tristimulus information of the pixels at the center position of the first crystal includes:

[0115] In step S131, according to the values of each primary color represented in the three - primary - color information of the pixels at the first crystal center position and a preset expansion value, determine the limit values of each primary color. Specifically, add the preset expansion value to the value of each primary color to obtain the upper limit value of the limit value of the primary color, and subtract the preset expansion value from the value of each primary color to obtain the lower limit value of the limit value of the primary color;

[0116] Among them, in an image, red, green, and blue (RGB) are the three basic colors that make up the image color, and each color has a value range (usually 0 - 255). The preset expansion value is to ensure the accuracy and robustness of color recognition. When calculating the value range of the primary colors, usually according to the color characteristics of the target object, an extended range is set for its three - primary - color values, and the size of this range is the preset expansion value. The limit values of the primary colors are the color values obtained by adding or subtracting the preset expansion value based on the three - primary - color information, which are respectively called the upper limit value and the lower limit value.

[0117] In the embodiments of the present disclosure, for each pixel at the first crystal center position, extract its RGB value. Then, based on these RGB values, add and subtract the preset expansion value respectively to obtain the upper limit value and the lower limit value of each primary color. This process helps to consider the error range of color recognition and improve the recognition accuracy.

[0118] For example, assume that the RGB value of the pixel at the first crystal center position is (100, 150, 200) and the preset expansion value is 20. Then, the upper limit value of red is 120 (100 + 20), and the lower limit value is 80 (100 - 20); the upper limit value of green is 170 (150 + 20), and the lower limit value is 130 (150 - 20); the upper limit value of blue is 220 (200 + 20), and the lower limit value is 180 (200 - 20).

[0119] In step S132, according to the upper limit value and the lower limit value of each primary color, determine the value range of each primary color.

[0120] In the embodiments of the present disclosure, according to the calculated upper limit value and lower limit value of each primary color, the value range of each primary color can be determined. This range will be used for subsequent color matching to identify pixels or regions similar to the color of the first crystal. For example, continuing the above example, the value range of red is [80, 120], the value range of green is [130, 170], and the value range of blue is [180, 220]. These ranges will be used to find regions similar to the color of the first crystal in the image.

[0121] In summary, according to the three primary color information of the pixels at the center position of the first crystal and in combination with a preset expansion value, the value range of each primary color can be determined. This process has wide application value in the fields of image processing, machine vision, color recognition, etc., especially when it is necessary to accurately identify specific color objects.

[0122] For example, in the first first image, taking the values of each primary color of the three primary color information represented by the image at the calibrated center position of the first crystal, that is, the RGB values of the pixels as a reference, calculate the upper and lower limits of RGB:

[0123] R += Ra + A; R -= Ra - A;

[0124] G += Ga + A; G -= Ga - A;

[0125] B += Ba + A; B -= Ba - A;

[0126] A is the preset expansion value. R+: the upper limit value of the red primary color, R-: the lower limit value of the red primary color, and the primary color value range of the red primary color is: [Ra - A, Ra + A]. Similarly, G+: the upper limit value of the green primary color, G-: the lower limit value of the green primary color, and the primary color value range of the green primary color is: [Ga - A, Ga + A]; B+: the upper limit value of the blue primary color, B-: the lower limit value of the blue primary color, and the primary color value range of the blue - red primary color is: [Ba - A, Ba + A].

[0127] The embodiment of the present disclosure also provides a crystal growth device. Continuing to refer to Figure 2 as shown, the crystal growth device includes: a control terminal, a vacuum reaction chamber, a microwave energy providing unit, a process gas providing unit, an electric proportional valve, a vacuum pump, and a first camera;

[0128] The vacuum reaction chamber is used to provide a crystal growth environment. A molybdenum table is arranged in the vacuum reaction chamber, and the molybdenum table is used to carry the grown crystal. A first observation window is arranged on the vacuum reaction chamber, and the first camera is arranged at the first observation window;

[0129] The first camera takes a first image of the inside of the vacuum reaction chamber from the first viewing angle direction through the first observation window;

[0130] The microwave energy providing unit and the process gas providing unit are respectively connected to the vacuum reaction chamber through pipelines. The vacuum pump is connected to the vacuum reaction chamber through a pipeline, and the electric proportional valve is arranged on the pipeline connecting the vacuum pump and the vacuum reaction chamber;

[0131] The control terminal is respectively communicatively connected to the vacuum reaction chamber, the microwave energy providing unit, the process gas providing unit, the electric proportional valve, the vacuum pump, and the first camera, and is configured to control the growth of the crystal, obtain the first image, and execute the method described in any one of the first aspect.

[0132] In the embodiments of the present disclosure, the vacuum reaction chamber provides a specific environment for crystal growth. By controlling the internal air pressure, temperature, and temperature, the growth conditions of the crystal can be precisely adjusted. This generally involves using a vacuum pump to reduce the air pressure inside the chamber and precisely controlling the introduction of process gas through an electric proportional valve to maintain the required growth environment.

[0133] Microwave energy heating: The microwave energy providing unit heats the substances in the vacuum reaction chamber through microwave radiation. Microwave heating has the characteristics of high efficiency and uniformity, and can quickly and precisely control the temperature in the reaction chamber, which is crucial for crystal growth.

[0134] Growth process monitoring: The first camera takes images of the inside of the vacuum reaction chamber from a specific perspective through the first observation window, enabling the control terminal to monitor the growth state of the crystal in real time. This monitoring is crucial for timely adjusting the growth parameters, ensuring crystal quality and growth efficiency.

[0135] Automated control: The control terminal, as the "brain" of the entire system, is communicatively connected to various components (such as the vacuum reaction chamber, the microwave energy providing unit, the process gas providing unit, the electric proportional valve, the vacuum pump, and the first camera). It is responsible for receiving image data from the camera, analyzing the growth state of the crystal, and adjusting the working parameters of each component according to preset algorithms or user instructions to achieve automated control of crystal growth.

[0136] In summary, the crystal growth device ensures high-quality crystal growth and improves process efficiency by precisely controlling the environmental parameters (such as air pressure, temperature, and temperature) inside the vacuum reaction chamber, using microwave energy for efficient heating, monitoring the growth state of the crystal in real time, and realizing automated control of the system.

[0137] In a possible implementation manner, a molybdenum stage is provided inside the vacuum reaction chamber, and the molybdenum stage is used to carry the grown crystal.

[0138] The embodiments of the present disclosure further provide a computer-readable storage medium, on which a computer program is stored, and when the program is executed by a processor, the steps of the method described in any one of the foregoing embodiments are implemented.

[0139] The embodiments of the present disclosure further provide an electronic device, including:

[0140] A memory, on which a computer program is stored;

[0141] A processor for executing the computer program in the memory to implement the steps of the method according to any one of the foregoing embodiments.

[0142] Figure 5 The control terminal 100 shown includes a processor 1001 and a memory 1003. Among them, the processor 1001 and the memory 1003 are connected, such as being connected through a bus 1002. Optionally, the control terminal 100 may further include a communication component 1004, and the communication component 1004 may be used for data interaction between the device 100 and other devices, such as sending and / or receiving data, etc. It should be noted that in actual scheduling, the communication component 1004 is not limited to one, and the structure of the control terminal 100 does not constitute a limitation to the embodiments of the present application.

[0143] The processor 1001 may be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It can implement or execute various exemplary logic blocks, modules, and circuits described in combination with the disclosure of the present application. The processor 1001 may also be a combination for implementing computing functions, such as a combination including one or more microprocessors, a combination of a DSP and a microprocessor, etc.

[0144] The bus 1002 may include a path for transmitting information between the above components. The bus 1002 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. The bus 1002 may be divided into an address bus, a data bus, a control bus, etc. For the sake of representation, Figure 5 only a thick line is used to represent it in the figure, but it does not mean that there is only one bus or one type of bus.

[0145] The memory 1003 may be a ROM (Read Only Memory) or other type of static storage device that can store static information and instructions, a RAM (Random Access Memory) or other type of dynamic storage device that can store information and instructions, or an EEPROM (Electrically Erasable Programmable Read Only Memory), a CD-ROM (Compact Disc Read Only Memory) or other optical disk storage, optical disk storage (including compact discs, laser discs, optical discs, digital versatile discs, Blu-ray discs, etc.), magnetic disk storage media, other magnetic storage devices, or any other medium that can be used to carry or store program code and can be read by a computer, without limitation herein.

[0146] The memory 1003 is used to store program codes for executing the embodiments of the present disclosure, and the execution is controlled by the processor 1001. The processor 1001 is used to execute the program codes stored in the memory 1003 to implement the steps shown in the embodiment of the real-time online measurement method of crystal growth thickness.

[0147] The embodiment of the present disclosure further provides a computer-readable storage medium having program code stored thereon. When the program code is executed by a processor, the steps and corresponding contents of the embodiment of the above-mentioned method for real-time online measurement of crystal growth thickness can be implemented.

[0148] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings. However, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, various changes, modifications, replacements and variations can be made to these embodiments, and these changes, modifications, replacements and variations all fall within the scope of protection of the present disclosure.

[0149] It should also be noted that the various specific technical features described in the above specific embodiments may be combined in any suitable manner, unless there is any contradiction, and these combinations shall also be considered as the contents disclosed in this disclosure. To avoid unnecessary repetition, this disclosure will not further describe various possible combinations. The technical scope of this application is not limited to the contents of the specification and must be determined based on the scope of the claims.

Claims

1. A real-time on-line measurement method for crystal thickness, characterized in that The method includes: Obtaining a first image captured by a first camera in each growth cycle during crystal growth, where the first camera is correspondingly arranged with a first observation window in the first viewing direction of a vacuum reaction chamber; In the first image of each of the growth cycles, with the target of covering at least all the crystals in the first viewing direction, constructing a first calibration box, and calibrating the central position of any crystal within the first calibration box in the first viewing direction as the first crystal central position; Obtaining the three-primary color information of the pixels at the first crystal central position corresponding to each growth cycle during the crystal growth, and determining the primary color value ranges of each primary color according to the three-primary color information of the pixels at the first crystal central position; According to the first calibration box and the primary color value ranges of each primary color, determining the parameter values of the image visual attributes corresponding to the first image to obtain the target parameter values of the image visual attributes, and adjusting the image visual attributes of all the first images in the corresponding growth cycle according to the target parameter values to obtain a first target image; Obtaining the first online measurement thickness of each crystal measured online in the first viewing direction according to the preset thickness of a molybdenum stage, the target region image in a preset fixed search region in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of crystals within the first calibration box in the first target image; Among them, the determining the parameter values of the image visual attributes corresponding to the first image to obtain the target parameter values of the image visual attributes according to the first calibration box and the primary color value ranges of each primary color includes: Starting from the preset initial value of the image visual attributes, adjusting the parameter values of the image visual attributes step by step according to a preset step size; After each adjustment of the parameter values, counting the number of pixels whose three primary colors are within the primary color value ranges of each primary color within the coverage range of the first calibration box; Determining the parameter value corresponding to the largest number as the target parameter value of the image visual attributes.

2. The method according to claim 1, wherein The obtaining the first online measurement thickness of each crystal in the first viewing direction according to the preset thickness of the molybdenum stage, the target region image in the preset fixed search region in the first target image, and the number of crystal pixels between the upper edge and the lower edge of each column of crystals within the first calibration box in the first target image includes: Determining a vertical pixel size according to the preset thickness of the molybdenum stage and the target region image in the preset fixed search region in the first target image, where the vertical pixel size is used to represent the size represented by 1 pixel in the vertical direction; Calculating the number of crystal pixels between the upper edge and the lower edge of each column of crystals constructed by continuous pixels within the first calibration box in the first target image; Obtaining the first online measurement thickness of each crystal in the first viewing direction according to the number of crystal pixels and the vertical pixel size.

3. The method according to claim 2, wherein Determining a vertical pixel size according to a preset thickness of a molybdenum stage and a target region image in a preset fixed search region in the first target image includes: Traversing and calculating the pixel value differences between adjacent pixels in the vertical direction in the target region image from top to bottom to obtain a first pixel value difference, and determining a first pixel whose first pixel value difference first exceeds a preset difference range as an upper edge pixel belonging to the upper edge of the molybdenum stage; Traversing and calculating the pixel value differences between adjacent pixels in the vertical direction in the target region image from bottom to top to obtain a second pixel value difference, and determining a second pixel whose second pixel value difference first exceeds the preset difference range as a lower edge pixel belonging to the lower edge of the molybdenum stage; Determining the number of pixels in the vertical direction according to the number of pixels between the upper edge pixel and the lower edge pixel; Determining the vertical pixel size according to the ratio between the preset thickness of the molybdenum stage and the vertical pixel size.

4. The method according to claim 1, wherein The image visual attributes include at least one of the following: brightness, contrast, saturation, clarity, sharpness, color temperature.

5. The method according to any one of claims 1-4, characterized in that, Determining a primary color value range for each primary color according to the three-primary color information of the pixels at the first crystal center position includes: Determining the extreme value of each primary color according to the value of each primary color represented in the three-primary color information of the pixels at the first crystal center position and a preset expansion value, wherein adding the preset expansion value to the value of each primary color to obtain the upper limit value of the extreme value of the primary color, and subtracting the preset expansion value from the value of each primary color to obtain the lower limit value of the extreme value of the primary color; Determining the primary color value range for each primary color according to the upper limit value and the lower limit value of each primary color.

6. A crystal growth apparatus, characterized in that, The crystal growth apparatus includes: a control terminal, a vacuum reaction chamber, a microwave energy providing unit, a process gas providing unit, an electric proportional valve, a vacuum pump, and a first camera; The vacuum reaction chamber is used to provide a crystal growth environment, a molybdenum stage is arranged in the vacuum reaction chamber, the molybdenum stage is used to carry the grown crystal, a first observation window is arranged on the vacuum reaction chamber, and the first camera is arranged at the first observation window; The first camera takes a first image in the vacuum reaction chamber from a first viewing angle direction through the first observation window; The microwave energy providing unit and the process gas providing unit are respectively connected to the vacuum reaction chamber through pipelines, the vacuum pump is connected to the vacuum reaction chamber through a pipeline, and the electric proportional valve is arranged on the pipeline connecting the vacuum pump and the vacuum reaction chamber; The control terminal is respectively communicatively connected to the vacuum reaction chamber, the microwave energy providing unit, the process gas providing unit, the electric proportional valve, the vacuum pump, and the first camera, and is used to control the growth of the crystal and obtain the first image, and execute the method according to any one of claims 1-5.

7. The device according to claim 6, wherein A molybdenum stage is arranged in the vacuum reaction chamber, and the molybdenum stage is used to carry the grown crystal.

8. An electronic device, characterized in that, Including: A memory having a computer program stored thereon; A processor for executing the computer program in the memory to implement the steps of the method according to any one of claims 1-5.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the program is executed by the processor, it implements the steps of the method according to any one of claims 1-5.

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