Antistatic ceramic chopper and preparation method thereof

By using specific formula binders and TiO2 additives, ceramic splitting knives are prepared, which solves the problems of poor fluidity and electrostatic pollution during degreasing, and achieves an efficient and environmentally friendly production process and good performance of the product.

CN119930304AInactive Publication Date: 2025-05-06苏州芯合半导体材料有限公司
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Patent Information

Application Number
CN202510422122.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-07
Publication Date
2025-05-06
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Existing ceramic splitters have poor fluidity and long production cycles during degreasing, and are prone to static electricity during semiconductor chip bonding, resulting in dust adsorption and material surface contamination, affecting processing accuracy and product quality.

Method used

Antistatic ceramic choppers are prepared by intensive refining and injection molding processes using binders composed of paraffin, polyethylene, ethylene-vinyl acetate copolymer, stearic acid and plasticizer.

Benefits of technology

It improves the flowability and injection molding consistency of ceramic choppers, enhances antistatic properties, reduces production costs, and avoids environmental pollution caused by solvent degreasing.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses an antistatic ceramic chopper and a preparation method thereof, and belongs to the technical field of material preparation. The antistatic ceramic chopper is prepared from the following raw materials in percentage by weight: 75 to 85 percent of ceramic powder, 0.05 to 2 percent of ceramic additive and 14 to 24 percent of binder, the binder is composed of paraffin, polyethylene, an ethylene-vinyl acetate copolymer, stearic acid and a plasticizer; the ceramic auxiliary agent is TiO2; the antistatic ceramic chopper provided by the invention has good antistatic property.
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Description

Technical Field

[0001] The invention belongs to the technical field of material preparation, and in particular relates to an antistatic ceramic splitting knife and a preparation method thereof. Background Art

[0002] At present, the main molding methods of ceramic splitters are dry pressing and injection molding. After dry pressing, the product needs to be processed by rough grinding and fine grinding, while ceramic injection molding has the advantages of fast speed and suitability for mass production. However, the traditional injection molding feed formula is mainly divided into three categories according to different degreasing methods: thermal degreasing system, solvent degreasing system, and catalytic degreasing system; the solvent degreasing system is further divided into oil degreasing and water degreasing; at present, ceramic splitters mainly use water degreasing binder system, and the degreasing product is a biodegradable component, but the binder used has poor fluidity, the degreasing production cycle is long, and the number of times the raw material gate is reused is small, the raw material utilization rate is not high, and the production cost is high. The organic system solvent degreasing and catalytic degreasing contain organic matter that causes certain pollution to the environment. In addition, ceramic splitters need to achieve effective metal connection during the semiconductor chip bonding process. In the high-speed bonding process, static charge is easily accumulated due to friction, resulting in dust adsorption, material surface pollution and other problems, affecting the processing accuracy and product quality, and causing certain harm to semiconductor applications. Although there have been attempts to improve antistatic properties through methods such as surface modification, these methods often have problems such as complex processes, high costs, or insufficient stability.

[0003] Therefore, it is very necessary to develop a ceramic splitting knife that avoids environmental pollution of solvent degreasing, changes the deformation problem of traditional thermal degreasing, and improves antistatic properties. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the defects of the prior art and provide a pollution-free, non-deformable antistatic ceramic splitting knife and a preparation method thereof by adding an antistatic ceramic additive.

[0005] In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme: an antistatic ceramic splitting knife, which is composed of the following raw materials in weight percentage: 75-85% ceramic powder, 0.05-2% ceramic additive and 14-24% binder; the binder is composed of paraffin, polyethylene, ethylene-vinyl acetate copolymer, stearic acid and plasticizer; the ceramic additive is TiO 2 .

[0006] Furthermore, the paraffin wax is composed of the following weight percentages: 40%-80% of No. 60 fully refined granular wax, 10-30% of beeswax and 10-30% of No. 80 microcrystalline wax.

[0007] Furthermore, the mass fraction of the paraffin wax in the binder is 40-60%.

[0008] Furthermore, the polyethylene is composed of low-density polyethylene and high-density polyethylene in a mass ratio of 1:1; the low-density polyethylene, model: LDPE N150, is purchased from Shanghai Petrochemical; the high-density polyethylene, model: HDPE TR480, is purchased from Beite New Materials Research and Development (Qingdao) Co., Ltd.

[0009] Furthermore, the mass fraction of the polyethylene in the binder is 10-30%.

[0010] Furthermore, the mass fraction of the ethylene-vinyl acetate copolymer in the binder is 8-15%, wherein the ethylene-vinyl acetate copolymer, model: EVA UE630, is purchased from Beite New Materials Research and Development (Qingdao) Co., Ltd.

[0011] Furthermore, the mass fraction of stearic acid in the binder is 10-30%.

[0012] Furthermore, the plasticizer is dioctyl phthalate and / or dibutyl phthalate.

[0013] Furthermore, the mass fraction of the plasticizer in the binder is 5-20%.

[0014] The present invention also provides a method for preparing an antistatic ceramic splitting knife, comprising the following steps:

[0015] (1) Put paraffin wax and 50% ceramic powder into an internal mixer and mix for 30 min-2 h at a temperature of 160-200 °C;

[0016] (2) Add polyethylene, ethylene-vinyl acetate copolymer (EVA), stearic acid (SA) and plasticizer into an internal mixer and mix for 30 minutes to 2 hours at a temperature of 160-200°C;

[0017] (3) Finally, the remaining 50% of the ceramic powder and ceramic additives are added to the internal mixer and mixed for 1-3 hours at a temperature of 160-200°C to obtain ceramic feed;

[0018] (4) Add the ceramic feed material of step (3) to an injection molding machine for injection molding, with an injection pressure of 60-80 MPa, a holding pressure of 30-60 MPa, and an injection temperature of 180-200° C. to obtain an injection molded sample;

[0019] (5) The injection molded sample of step (4) is placed in a degreasing furnace and buried in alumina sand for degreasing. The degreasing curve is as follows: the temperature is raised from room temperature to 200°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the temperature is raised from 200°C to 380°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the temperature is raised from 380°C to 500°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the temperature is raised from 500°C to 600°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the sample is naturally cooled to room temperature, the degreased product is taken out from the alumina sand, the temperature is raised to 1500-1700°C at a rate of 1-5°C / min, and the temperature is kept for 2-4h, and the sample is naturally cooled to room temperature to obtain an antistatic ceramic splitting knife.

[0020] Furthermore, the alumina sand is composed of 20%-40% of 20 mesh alumina sand and 60%-80% of 100 mesh alumina sand.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. The present invention adds TiO 2 As a sintering aid, TiO 2 Existence Ti 4+ To Ti 3+ The lattice distortion of the transformation refines the ceramic grains. In addition, TiO 2 The antistatic property is good, so that the antistatic ceramic splitting knife of the invention has consistent grains and antistatic property.

[0023] 2. The present invention makes the antistatic ceramic splitter injection molding feed have good fluidity and good injection molding consistency through formula compounding, which greatly improves the utilization rate of raw materials. The one-time buried hot degreasing process and the binder adopt a compound system, and the degreasing is removed in sections, which improves production efficiency and avoids the product deformation problem caused by degreasing such as paraffin.

[0024] 3. The feeding flowability of the antistatic ceramic splitter injection molding of the present invention can meet the performance requirements of high-performance ceramic splitter injection molding. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which:

[0026] Figure 1 It is the TG-DSC curve of the ceramic feed material of Example 1 of the present invention. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0028] Embodiment 1, the embodiment of the present invention provides a method for preparing an antistatic ceramic splitting knife, comprising the following steps:

[0029] (1) According to the formula in Table 1, paraffin wax and 50% ceramic powder were mixed for 1.5 hours at a mixing temperature of 180°C.

[0030] (2) Add polyethylene, EVA, SA and plasticizer into an internal mixer and mix them for 1.5 hours at a mixing temperature of 180°C.

[0031] (3) Finally, the remaining 50% ceramic powder and sintering aid were added to the internal mixer and mixed for 2 hours at a temperature of 180°C to obtain ceramic feed (see Figure 1 ).

[0032] (4) After weighing a certain mass of feed, test the melt index of the product at an experimental temperature of 200°C;

[0033] (5) The ceramic feed is added into a FANUC α-S50iA injection molding machine and injected into a ceramic splitter. The injection molding parameters are as follows: injection pressure 70 MPa, holding pressure 50 MPa, and injection temperature 190 °C.

[0034] (6) The prepared samples were placed in a degreasing furnace and buried in 20-mesh 30% and 100-mesh 70% alumina sand for degreasing. The degreasing rate was 0.2°C / min. The temperature was kept at 200°C, 380°C, 500°C, and 600°C for 2 h respectively. The mass change rate before and after degreasing was measured by an analytical balance. The temperature was raised to 1600°C at a rate of 2°C / min and kept at this temperature for 3 h.

[0035] Embodiment 2, the embodiment of the present invention provides a method for preparing an antistatic ceramic splitting knife, comprising the following steps:

[0036] (1) According to the formula in Table 1, paraffin wax and 50% ceramic powder were mixed for 30 minutes at a mixing temperature of 200°C.

[0037] (2) Add polyethylene, EVA, SA and plasticizer into an internal mixer and mix them for 30 minutes at a mixing temperature of 200°C.

[0038] (3) Finally, the remaining 50% ceramic powder and sintering aid are added into an internal mixer and kneaded for 1 hour at a temperature of 200°C to prepare a ceramic feed.

[0039] (4) After weighing a certain mass of feed, test the melt index of the product at an experimental temperature of 200°C;

[0040] (5) The ceramic feed is added into a FANUC α-S50iA injection molding machine and injected into a ceramic splitter. The injection molding parameters are as follows: injection pressure 60 MPa, holding pressure 30 MPa, and injection temperature 200 °C.

[0041] (6) The prepared samples were placed in a degreasing furnace and buried in 20 mesh 20% and 100 mesh 80% alumina sand for degreasing. The degreasing rate was 0.1°C / min. The temperature was kept at 200°C, 380°C, 500°C, and 600°C for 4 h respectively. The mass change rate before and after degreasing was measured by an analytical balance. The temperature was raised to 1600°C at 2°C / min and kept at this temperature for 4 h.

[0042] Embodiment 3, the embodiment of the present invention provides a method for preparing an antistatic ceramic splitting knife, comprising the following steps:

[0043] (1) According to the formula in Table 1, paraffin wax and 50% ceramic powder were mixed for 2 h at a mixing temperature of 160 °C.

[0044] (2) Add polyethylene, EVA, SA and plasticizer into an internal mixer and mix them for 2 hours at a mixing temperature of 160°C.

[0045] (3) Finally, the remaining 50% of the ceramic powder and the sintering aid were added into an internal mixer and mixed for 3 h at a mixing temperature of 160 °C to obtain a ceramic feed.

[0046] (4) After weighing a certain mass of feed, test the melt index of the product at an experimental temperature of 200°C;

[0047] (5) The ceramic feed is added into a FANUC α-S50iA injection molding machine and injected into a ceramic splitter. The injection molding parameters are as follows: injection pressure 80 MPa, holding pressure 60 MPa, and injection temperature 180 °C.

[0048] (6) The prepared samples were placed in a degreasing furnace and buried in 20 mesh 20%-40% and 100 mesh 60%-80% alumina sand for degreasing. The degreasing rate was 1°C / min. The temperature was kept at 200°C, 380°C, 500°C, and 600°C for 1 h respectively. The mass change rate before and after degreasing was tested by an analytical balance. The temperature was raised to 1600-1700°C at 2°C / min and kept at this temperature for 2 h.

[0049] Comparative Example 1 is different from Example 1 in that the formula and dosage are different, see Table 1 for details.

[0050] Comparative Example 2 is different from Example 2 in that the formulation dosage is different and no sand is buried. Please see Table 1 for details.

[0051] Comparative Example 3 is different from Example 3 in that no sintering aid is used and the dosage of the formulation is different. Please see Table 1 for details.

[0052]

[0053] Performance Testing

[0054] After sintering, the 3PB of the products of Examples 1-3 and Comparative Examples 1-3 were tested by a universal mechanical testing machine, the hardness of the products was tested by an indentation method, and the grain size of the products was tested by an electron microscope after thermal corrosion. The results are shown in Table 2.

[0055]

[0056] As can be seen from Table 2, by comparing and analyzing Example 1 and Comparative Example 1, it can be seen that the degreasing stage using paraffin, polyethylene, and plasticizer materials with different proportions can achieve different segmented degreasing, the product melt index is higher, the product fluidity is better, and the flexural strength and hardness of the product are greatly improved.

[0057] As can be seen from Table 2, by comparing and analyzing Example 2 and Comparative Example 2, the EVA and stearic acid contents in Comparative Example 2 are relatively low, the product does not use sand burial degreasing, the product has a low melt index, poor fluidity, and the strength and hardness of the injection product are relatively low.

[0058] As shown in Table 2, the comparative analysis of Example 3 and Comparative Example 3 shows that TiO 2 When the Eva content of the product is high, the product is not easy to form, and no sintering aid is added, the grain consistency is poor, and it does not have antistatic properties.

[0059] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modification, equivalent substitution or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An antistatic ceramic splitting knife, characterized in that: The invention is composed of the following raw materials in weight percentage: 75-85% ceramic powder, 0.05-2% ceramic auxiliary agent and 14-24% binder; the binder is composed of paraffin, polyethylene, ethylene-vinyl acetate copolymer, stearic acid and plasticizer; the ceramic auxiliary agent is TiO2.

2. The antistatic ceramic splitting knife according to claim 1, characterized in that: The paraffin wax is composed of the following weight percentages: 40%-80% of No. 60 fully refined granular wax, 10-30% of beeswax and 10-30% of No. 80 microcrystalline wax; the mass fraction of the paraffin wax in the binder is 40-60%.

3. The antistatic ceramic splitting knife according to claim 1, characterized in that: The polyethylene consists of low-density polyethylene and high-density polyethylene in a mass ratio of 1:

1.

4. The antistatic ceramic splitting knife according to claim 1, characterized in that: The mass fraction of the polyethylene in the binder is 10-30%.

5. The antistatic ceramic splitting knife according to claim 1, characterized in that: The mass fraction of the ethylene-vinyl acetate copolymer in the binder is 8-15%.

6. The antistatic ceramic splitting knife according to claim 1, characterized in that: The mass fraction of the stearic acid in the binder is 10-30%.

7. The antistatic ceramic splitting knife according to claim 1, characterized in that: The plasticizer is dioctyl phthalate and / or dibutyl phthalate.

8. The antistatic ceramic splitting knife according to claim 1, characterized in that: The mass fraction of the plasticizer in the binder is 5-20%.

9. The antistatic ceramic splitting knife according to any one of claims 1 to 8, characterized in that: The method for preparing the antistatic ceramic splitting knife comprises the following steps: (1) Put paraffin wax and 50% ceramic powder into an internal mixer and mix for 30 min-2 h at a temperature of 160-200 °C; (2) Add polyethylene, ethylene-vinyl acetate copolymer, stearic acid and plasticizer into an internal mixer and mix for 30 min-2 h at a temperature of 160-200 °C; (3) Finally, the remaining 50% of the ceramic powder and ceramic additives are added to the internal mixer and mixed for 1-3 hours at a temperature of 160-200°C to obtain ceramic feed; (4) Add the ceramic feed material of step (3) to an injection molding machine for injection molding, with an injection pressure of 60-80 MPa, a holding pressure of 30-60 MPa, and an injection temperature of 180-200° C. to obtain an injection molded sample; (5) The injection molded sample of step (4) is placed in a degreasing furnace and buried in alumina sand for degreasing. The degreasing curve is as follows: the temperature is raised from room temperature to 200°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the temperature is raised from 200°C to 380°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the temperature is raised from 380°C to 500°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the temperature is raised from 500°C to 600°C at a heating rate of 0.1-1°C / min, and the temperature is kept for 2h-8h; the sample is naturally cooled to room temperature, the degreased product is taken out from the alumina sand, the temperature is raised to 1500-1700°C at a rate of 1-5°C / min, and the temperature is kept for 2-4h, and the sample is naturally cooled to room temperature to obtain an antistatic ceramic splitting knife.

10. The antistatic ceramic splitting knife according to claim 9, characterized in that: The alumina sand is composed of 20%-40% of 20-mesh alumina sand and 60%-80% of 100-mesh alumina sand.

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