Gas distributor and its application

Abstract

The present invention provides a gas distributor and its application. The gas distributor of the present application includes a distributor body, the distributor body having a concave curved surface, a second airflow opening provided at the center of the curved surface, a first airflow opening provided on the outside of the second airflow opening, the second airflow opening being arranged radially with respect to the distributor body, and the first airflow opening being arranged at an angle to the curved surface; a rotatable blade is provided in the curved surface, and a gap is provided between the blade and the curved surface. The gas distributor of the present application can help an upright chemical vapor deposition reactor to process microporous carbon scaffold particles with a particle size of 50 nanometers to 30 micrometers, or other similar carbon or non-carbon material microparticles, by chemical vapor deposition (CVD), and deposit silicon or other single substances or ceramics or metal or non-metallic materials on the surface and micropore inner surface of such microparticles; the inner diameter of the micropores of such microporous scaffold particles can be less than 2 nanometers.

Description

Technical Field

[0001] The invention belongs to the technical field of chemical vapor infiltration, and in particular relates to a gas distributor and application thereof. Background Art

[0002] The method of gas injection into a vertical reaction chamber can significantly impact the fluidization between the gas and micro-solids within the chamber, as well as the effectiveness of the reactions and surface treatments being performed. Commonly used perforated gas distributors produce an upward jet flow, creating unstable, large bubble turbulence, which in turn leads to channeling and even side-flow. This makes it difficult to establish and maintain long-range, large-area fluidization between the gas and micro-solids, making it difficult to perform stable, long-term chemical reactions on nano- or sub-micron particles. Consequently, bubble caps and other gas distributors (such as nozzles, inclined injection distributors, annular inclined blade distributors, and helix tube distributors with nozzles) have emerged to improve the fluidization performance and operation of the gas-micro-solids within vertical gas-phase chemical reaction chambers.

[0003] Although they have some or partial improvements, they are often limited to processing coarser particles. Generally speaking, they can only process batches of particles with a size of 30 microns or less. It is still inconvenient to use them for industrial-scale production processing of nanoparticles or solid particles with a size of about 30 microns or less. Summary of the Invention

[0004] In response to the above technical problems, this application proposes a gas distributor and its application. The specific technical solutions are as follows:

[0005] First of all, it needs to be emphasized that the contents recorded in the background technology do not completely fall within the scope of the prior art, but are selectively recorded in the background technology by the inventor in order to better illustrate the technical improvement basis of this application and the relationship between this application and the prior art contents. The contents recorded therein that are closely related to this application will also be recorded or explained in the subsequent contents of this application. In particular, the contents recorded in this part that are closely related to this case should not be considered as prior art and thus generate technical inspiration for this application.

[0006] The gas distributor of the present application includes a distributor body, the distributor body having an inwardly concave curved surface, a second airflow opening provided at the center of the curved surface, a first airflow opening provided outside the second airflow opening, the second airflow opening being arranged radially of the distributor body, and the first airflow opening being arranged at a tangential angle to the curved surface;

[0007] A rotatable blade is provided in the curved surface, and a gap is provided between the blade and the curved surface.

[0008] In an embodiment, the curved surface is a surface of revolution having an axis of revolution.

[0009] In a preferred embodiment, the opening direction of the airflow opening 1 on the reference surface 1 is located between the tangential direction and the radial direction of the airflow opening 1, and the reference surface 1 is perpendicular to the axial direction of the distributor body;

[0010] On the second reference plane, the opening direction of the first airflow opening is between the tangent direction and the axial direction of the first airflow opening. The second reference plane is parallel to the axial direction of the distributor body and the opening direction of the first airflow opening.

[0011] In the embodiment, the number of the airflow opening 1 is set to one, and the number of the airflow opening 2 is set to one;

[0012] Or the air flow opening 1 is set to one, and the number of the air flow opening 2 is set to multiple;

[0013] Or the number of the airflow openings 1 is set to be multiple, and the number of the airflow opening 2 is set to be one;

[0014] Or the number of the air flow openings 1 is set to be multiple, and the number of the air flow openings 2 is set to be multiple.

[0015] In the embodiment, a through hole is provided on the distributor body, the through hole is sealed and connected to the first sleeve, and the second air flow opening is provided on the first sleeve.

[0016] In a preferred solution, an air gap adjustment sleeve is provided on the first sleeve, the air gap adjustment sleeve shields the outside of the second air flow opening, and a gap is provided between the air gap adjustment sleeve and the first sleeve.

[0017] In a preferred solution, the air gap adjustment sleeve is threadedly connected to the sleeve, and the height of the gap between the air gap adjustment sleeve and the curved surface can be adjusted when the air gap adjustment sleeve is rotated.

[0018] In the embodiment, the blades are fixed to the shaft, the shaft passes through the center of the sleeve one and maintains a gap between the shaft and the inner wall of the sleeve one, and a sealing sleeve is provided between the shaft and the sleeve one for axial sealing.

[0019] In the embodiment, the rotation direction of the blade during operation is the same as the opening direction of the first air flow opening.

[0020] In an embodiment, the vertical gap between the blade and the curved surface is greater than or equal to 1 mm.

[0021] In a preferred embodiment, a sleeve 2 is further provided outside the shaft rod, and the sleeve 2 is sealedly connected to the sleeve 1. A cavity for cooling water circulation is provided between the sleeve 2 and the shaft rod, and sealing sleeves are provided at both ends of the cavity for axial sealing. The sleeve 2 is provided with an interface 2 and an interface 3 that are connected to the cavity.

[0022] In the embodiment, the first sleeve is provided with a first gas input interface, or the second sleeve is provided with a first gas input interface.

[0023] In an embodiment, a discharge port is provided on the distributor body.

[0024] The gas distributor of the present application is applied to chemical vapor infiltration / deposition reaction, and the gas distributor is installed at the lower end of a vertical reactor.

[0025] In a preferred embodiment, the gas distributor is installed at the small opening end of the cone at the lower end of the vertical reactor, and the angle between the generatrix of the cone and the central axis is 15-30°.

[0026] The beneficial effects of the present invention are as follows: the gas distributor of the present application can help a vertical chemical vapor deposition reactor process microporous carbon scaffold particles with a particle size of 50 nanometers to 30 micrometers, or other similar carbon or non-carbon material microparticles, by chemical vapor deposition (CVD), and deposit silicon or other elemental substances or ceramics or metal or non-metal materials on the surface of such microparticles and the inner surface of the micropores; the inner diameter of the micropores of such microporous scaffold particles can be less than 2 nanometers;

[0027] At the same time, it can improve the long-term stability of the fluidization between the gas and micro-solid particles in the vertical chemical vapor deposition reactor, thereby facilitating the large-scale processing and production of chemical vapor deposition of uniform amorphous and / or microcrystalline carbon-coated silicon on nano- to submicron-sized porous carbon scaffold solid particles, thereby solving the industry's mass production problem of CVI silicon deposition on submicron / nano-sized porous carbon scaffold solid particles, and further assisting the lithium battery industry in developing and supplying a key raw material for the negative electrode required. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Shown is a schematic structural diagram of a vertical reactor;

[0029] Figure 2 Shown is a schematic structural diagram of a gas distributor;

[0030] Figure 3 Shown is a schematic diagram of the top surface state of the gas distributor;

[0031] Figure 4 Shown is Figure 3 Cross-sectional view of CC;

[0032] Figure 5 Shown is a schematic structural diagram of a casing;

[0033] Figure 6 Shown is Figure 3 Cross-sectional view of the middle DD;

[0034] Figure 7 Shown is a schematic structural diagram of the casing 2. DETAILED DESCRIPTION

[0035] In the following description, certain specific details are set forth in order to provide a thorough understanding of the various embodiments. However, it will be understood by those skilled in the art that the present invention can be practiced without these details. In other cases, well-known structures are not shown or described in detail to avoid unnecessarily obscuring the description of the embodiments. Unless the context requires otherwise, throughout the specification and the appended claims, the word "comprising" should be interpreted in an open, inclusive sense, that is, as in "including but not limited to."

[0036] References throughout this specification to "one embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic associated with that embodiment is included in at least one embodiment. Thus, appearances of the phrases "in one embodiment" or "in an embodiment" throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. Furthermore, as used in this specification and the appended claims, the singular forms "a / kind," and "the" include plural referents unless the context clearly dictates otherwise. It should also be noted that the term "or" is generally used in its sense including "and / or" unless the context clearly dictates otherwise.

[0037] For the purpose of illustration and explanation, the gas distributor described in this application is for a vertical reactor, which can be used to prepare composite materials of chemical vapor infiltration and chemical vapor deposition. By introducing substrate particles and reaction gas into the interior of the vertical reactor and controlling the internal conditions of the vertical reactor, the reaction gas reacts and deposits on the surface of the substrate particles or penetrates into the internal micropores of the substrate particles.

[0038] Among them, the vertical reactor that has made technical contributions to the prior art has passed the relevant patent application. Figure 1 The reactor is described as an example. Figure 1The reactor includes a shell 100, the top of the shell 100 is provided with a raw material inlet 101, an exhaust port 102 and a pressure sensor 103, the bottom of the shell 100 is provided with an input interface 1 104 and an input interface 2 105, wherein the input interface 104 is arranged on the central axis straight line of the shell, the input interface 2 105 is arranged on the outside of the input interface 1 104, and the input interface 2 105 is arranged in an oblique insertion state, the middle of the shell 100 is provided with an input interface 3 106, and three thermocouple sensors 107 are arranged inside the shell 100.

[0039] The outside of the shell 100 is provided with a heating zone 1 210 and a heating zone 2 220. The heating zone 1 210 is located at the top. Three groups of parallel electric heating wires 1 211 are provided in the heating zone 1 210. Three independent groups of electric heating wires 2 221, electric heating wires 3 222 and electric heating wires 4 223 are provided in the heating zone 2 220.

[0040] The shell 100 is made of high-temperature and corrosion-resistant stainless steel, with an inner diameter of approximately 43 cm and a length of 368 cm. The reactor can accommodate 30 kg to 150 kg of granular porous carbon supports, which is much higher than the current single-batch processing capacity of 20 kg of horizontal CVI reactors in the industry.

[0041] The outside of electric heating wire 1 211, electric heating wire 221, electric heating wire 3 222 and electric heating wire 4 223 are all provided with insulation materials to form an insulation layer to ensure that heat loss is reduced, the furnace heating efficiency is increased, and the furnace temperature, the temperature inside the reaction chamber and the temperature gradient are kept stable.

[0042] The bottom thermocouple sensor 107 and the temperature monitoring thermocouple of the electric heating wire 223 can be shared to simplify the complexity of the equipment components.

[0043] A conical cylinder 108 is further provided at the bottom of the shell 100 , and the angle between the busbar forming the conical cylinder 108 and the central axis of the shell 100 is set to 15° to prevent material from piling up at the bottom of the shell 100 .

[0044] Based on the reactor described above, the present application further makes a technical contribution in that it provides a gas distributor 300 disposed at the small opening end of the cone 108. With the assistance of the gas distributor 300, the contact between the nano-scale / micro-scale particles in the reactor and the reaction gas and the fluidization behavior between the gas and micro-solid particles after mixing are more stable and uniform, and the dead material area at the bottom of the reactor is eliminated, so that the chemical vapor infiltration reaction can be completed uniformly on each nano-scale / or submicron particle. Figure 2 Shown is a schematic diagram of an exemplary structure of a gas distributor 300 .

[0045] In this embodiment, the gas distributor 300 utilizes two gas streams, radially aligned with the gas distributor 300. These two gas streams are introduced into the reactor at the bottom of the reactor in mutually perpendicular directions. The vortex flow, formed by the mixing of these two gas streams, propels the material within the reaction chamber upward along the reactor's axial direction. In practice, this vortex flow effectively and uniformly mixes nano- and / or submicron-sized micro-solid particles with the reaction gas and carrier gas within the reaction chamber, fluidizing them for elutriation. It also maintains long-term fluidization stability between the gas and micro-solid particles, ensuring uniform temperature and chemical reactions throughout the reactor.

[0046] In the embodiment, the gas distributor 300 has a distributor body 310, which is directly or indirectly connected to the reactor. The distributor body 310 has a concave curved surface 311, which is arranged inside the reactor, and a gas flow opening 312 is provided on the curved surface 311. The other end opening of the gas flow opening 312 is arranged outside the reactor, so that the carrier gas is transported to the interior of the reactor through the gas flow opening 312, forming one of the two gas flows.

[0047] In an embodiment, the curved surface 311 formed on the distributor body 310 should be set as a surface of revolution, that is, a surface formed by intersecting and cutting on the distributor body 310 after a curve rotates around a rotation axis; in some embodiments, the curved surface 311 is a surface of revolution formed by an arc; in some embodiments, the curved surface 311 is a surface of revolution formed by an elliptical arc; in some embodiments, the curved surface 311 is a surface of revolution formed by a polyline, and the polyline is an arc and a straight line connected to each other, and the arc and the straight line are tangent; in some embodiments, the curved surface 311 is a surface of revolution formed by an irregular curve.

[0048] In the embodiments, see Figure 3 The air flow opening 1 312 provided on the curved surface 311 has an opening direction P provided at an angle, and a reference plane (ie Figure 3 As shown in the plane, the reference plane is any plane perpendicular to the axis of rotation of the curved surface 311. On the projection of the reference plane, the air flow opening 1 312 has a tangent direction A and a radial direction B on the curved surface 311. The opening direction P of the air flow opening 1 312 is located between the tangent direction A and the radial direction B.

[0049] In some embodiments, the angle between the opening direction P of the air flow opening 312 and the radial direction B is 45~90°, for example, 45°, for example, 55°, for example, 65°, for example, 75°, for example, 85°, for example, 90°; in some embodiments, the angle between the opening direction P of the air flow opening 312 and the radial direction B is 90°, which has the best effect of forming a vortex airflow, and the swirl effect outside the range of 45-90° will gradually weaken or disappear.

[0050] In an embodiment, the number of airflow openings 1 312 is not limited to one. In some embodiments, the number of airflow openings 1 312 is one; in some embodiments, the number of airflow openings 1 312 is one; in some embodiments, the number of airflow openings 1 312 is two; in some embodiments, the number of airflow openings 1 312 is three; and in some embodiments, the number of airflow openings 1 312 is four.

[0051] In some embodiments, the number of air flow openings 312 is set to be large, for example, four, five, six, seven, or eight. These air flow openings 312 are symmetrically distributed about the center of rotation of the curved surface 311, which can uniformly stabilize the air flow direction and is conducive to long-term stable gas-particle fluidization.

[0052] In some embodiments, the heights of the air flow openings 1 312 on the curved surface 311 are set to be the same, that is, there is a reference plane perpendicular to the rotation axis of the curved surface 311, and the reference plane intersects with all the air flow openings 1 312; in some embodiments, the heights of the air flow openings 1 312 on the curved surface 311 are not set to be exactly the same, that is, with the rotation axis of the curved surface 311 as a reference, the air flow openings 1 312 are staggered in the direction of the rotation axis of the curved surface 311, that is, it is impossible to set a reference plane perpendicular to the rotation axis of the curved surface 311, and the reference plane intersects with all the air flow openings 1 312.

[0053] In some embodiments, the number of air flow openings 1 312 is set to multiple, and the spacing between any two adjacent air flow openings 1 312 is the same, that is, the air flow openings 1 312 are evenly distributed on the curved surface 311 at equal intervals; in some embodiments, the number of air flow openings 1 312 is set to multiple, and the spacing between adjacent air flow openings 1 312 is a non-fixed value, that is, among three consecutive adjacent air flow openings 1 312, the spacing between the middle air flow opening 1 312 and the air flow openings 1 312 on both sides thereof will be different.

[0054] In an embodiment, Figure 4 Shown is Figure 3The cross-sectional view of CC in FIG. 3 mainly shows a schematic diagram of the state of the air flow opening 1 312, setting a reference plane (ie Figure 4 As shown in the plane, the reference plane is a rotation axis passing through the air flow opening 1 312 and parallel to the curved surface 311. In the projection of the reference plane, the air flow opening 1 312 has a tangent direction M on the curved surface 311, and an axial direction N of the air flow opening 1 312. The opening direction P of the air flow opening 1 312 is located between the tangent direction M and the axial direction N.

[0055] In some embodiments, the angle between the opening direction P of the air flow opening 312 and the axial direction N is 5~60°, for example, 5°, for example, 10°, for example, 20°, for example, 30°, for example, 40°, for example, 50°, for example, 60°; in some embodiments, the angle between the opening direction P of the air flow opening 312 and the axial direction N is 45~90°, for example, 45°, for example, 55°, for example, 65°, for example, 75°, for example, 85°, for example, 90°; in some embodiments, the angle between the opening direction P of the air flow opening 312 and the axial direction N is 70~100°, for example, 70°, for example, 80°, for example, 90°, for example, 100°.

[0056] In the aforementioned angle setting between the opening direction P of the airflow opening 1 312 and the axial direction N, 40° to 50° is a preferred choice.

[0057] In some embodiments, the number of air flow openings 312 is set to be large, for example, four, five, six, seven, or eight. These air flow openings 312 are symmetrically distributed about the center of rotation of the curved surface 311, which can uniformly stabilize the air flow direction and is conducive to long-term stable gas-particle fluidization.

[0058] In the embodiment, the cross-sectional shape of the air flow opening 1 312 may not be limited, such as a circle, a square, a triangle, or other polygonal or other regular or irregular shapes, among which a circle is the best choice.

[0059] In the implementation scheme, a through hole is provided on the distributor body 310, and the through hole is arranged to be coaxial with the rotation axis of the curved surface 311. A sleeve 1 320 is fixed in the through hole, and one end of the sleeve 1 320 extends into the curved surface 311 (that is, the interior of the reactor), and the end of the sleeve 1 320 extending into the curved surface 311 is provided with a radially arranged airflow opening 2 321, through which the carrier gas is transported from the outside to the inside of the reactor, forming the other of the two airflows.

[0060] The reaction gas formed by the mixture of the reaction precursor and the carrier gas is blown radially into the distributor body 310 from the air flow opening 2 321 after being input through the bottom of the sleeve 1 320, while the carrier gas is blown into the distributor body 310 from the air flow opening 1 312 at a tangential direction. The reaction gas injected into the distributor body 310 and the carrier gas injected into the distributor body 310 meet to form a vortex airflow, which then rises along the long axis of the reactor and is blown into the gas-micro-solid fluidized fluid suspended above the reactor for washing, heat exchange, thermal decomposition and deposition of the reaction precursor gas. The residual gas and carrier gas after the reaction are then gradually moved to the exhaust port 102 at the top of the reactor for discharge.

[0061] In some embodiments, the heights of the second air flow openings 321 in the axial direction of the sleeve 1 320 are set to be the same, that is, there is a reference plane perpendicular to the axial direction of the sleeve 1 320, and the reference plane intersects with all the air flow openings 1 312; in some embodiments, the heights of the second air flow openings 321 in the axial direction of the sleeve 1 320 are not completely the same.

[0062] In some embodiments, when the number of air flow openings 2 321 is set to more than one, these air flow openings 2 321 are arranged in an equidistant and uniform manner in the axial direction of the sleeve 1 320, that is, the distance between adjacent air flow openings 2 321 is equal, and this arrangement is the optimal choice, which is conducive to long-term stable gas-particle fluidization; in some embodiments, when the number of air flow openings 2 321 is set to more than one, these air flow openings 2 321 are arranged in an unequal and uniform manner in the axial direction of the sleeve 1 320.

[0063] In the embodiment, the cross-sectional shape of the second air flow opening 321 is not limited, and may be, for example, circular, square, triangular, or other polygonal or other regular or irregular shapes, with circular being the best choice.

[0064] In the implementation scheme, an air gap adjustment sleeve 340 is also provided on the sleeve 1 320. The air gap adjustment sleeve 340 is adjustably connected to the sleeve 1 320 through a threaded connection. By rotating the degree of screw connection between the air gap adjustment sleeve 340 and the sleeve 1 320, the gap height between the air gap adjustment sleeve 340 and the curved surface 311 is adjusted to adjust the input reaction gas flow rate.

[0065] There is no other contact between the air gap adjustment sleeve 340 and the sleeve 1 320 except for the threaded connection, and there is a gap between the main part of the air gap adjustment sleeve 340 and the sleeve 1 320, which can guide the gas output from the air flow opening 2 321 to change its direction vertically downward, and then change the downward airflow into a radial airflow again through the gap between the air gap adjustment sleeve 340 and the curved surface 311, and blow it radially toward the surface of the curved surface 311 to mix with the swirling air to form an ascending vortex.

[0066] In the embodiment, a discharge port 313 is provided on the distributor body 310, and the discharge port 313 is connected to a discharge valve. The discharge valve can be controlled to open and close, and the granular material inside the reactor is discharged through the discharge port 313 after the reaction is completed.

[0067] In the embodiment, a paddle 330 is further provided in the curved surface 311 of the distributor body 310 . The paddle 330 has a rotation axis, and the rotation axis coincides with the rotation axis of the curved surface 311 , so that the paddle 330 can rotate in the curved surface 311 .

[0068] When the chemical vapor deposition / infiltration reaction is carried out in the reactor, some micro-solid particles will occasionally settle to the bottom of the reactor due to the slowdown of the velocity of the rising vortex airflow near the inner wall of the reactor and the surrounding area, and then flow into the curved surface 311 of the distributor body 310 and accumulate. At this time, through the rotation, sweeping and stirring of the blades 330, these micro-solid particles are mixed with the rising vortex airflow formed in the distributor body 310 and move upward, and are blown into the gas-micro-solid particle fluidized body suspended above again, and the above-mentioned reaction treatment procedure is repeated. The gas distributor 300 can thereby recover the blown-up and deposited solid micro-particles.

[0069] On the other hand, by adjusting the rotation speed of the blade 330 and the flow rate or velocity of the rising vortex airflow, as well as the flow ratio of the carrier gas to the reaction gas, the continuous air channels and grooves formed by the airflow in the material and near the inner wall of the reactor are cut off from time to time, thereby eliminating the phenomenon of airflow short-circuiting. The flow rate and bubble size of the gas when entering the gas-micro-solid particle fluidization body can be appropriately adjusted, thereby helping to stabilize the fluid of the gas-micro-solid particle fluidization and thus eliminating or reducing the formation of unstable short-circuit air channels.

[0070] On the other hand, the paddles 330 can also help to discharge the material.

[0071] In this embodiment, blade 330 has an edge shape that matches curved surface 311, ensuring that when blade 330 rotates about its axis, the edge of blade 330 maintains a vertical clearance of 1 mm or greater from curved surface 311. Rotating blade 330 within this clearance is sufficient to stir the airflow and lift nanometer / submicron particles, reducing wear and contamination caused by contact between the blade and particles. This also allows for economical manufacturing of the blade, eliminating the need for expensive precision machining processes. The vertical clearance between any point on blade 330 and curved surface 311 can be equal or unequal; the top of blade 330 can extend beyond the edge of curved surface 311 or not.

[0072] In some embodiments, the paddle 330 is provided as one piece; in some embodiments, the paddle 330 is provided as multiple pieces, and the multiple blades 330 are arranged in a symmetrical manner about the center of their rotation axis, that is, the angles between adjacent blades 330 are the same, and when the number of blades 330 is set between 3 and 6 pieces, the efficiency of recovering accumulated particles can be maximized; in some embodiments, the paddle 330 is provided as multiple pieces, and the multiple blades 330 are arranged in an asymmetrical manner about the center of their rotation axis, that is, the angles between any two adjacent blades 330 are not exactly the same.

[0073] In the embodiment, the blade 330 should be driven to rotate in the same direction as the opening direction of the air flow opening 1 312 to Figure 3 For example, when the opening direction of the first airflow opening 312 is clockwise, the blade 330 should also be driven to rotate in the clockwise direction.

[0074] In the embodiment, the blade 330 is fixedly connected by the shaft 331 and has the function of rotating in the curved surface 311. The shaft 331 is set in the center of the sleeve 320 and maintains a gap with the inner wall of the sleeve 320 for inputting gas. The connection state can be referred to Figure 6 , Figure 6 Shown is Figure 3 In the cross-sectional view of the middle DD, the blade 330 is connected to the end of the shaft 331 through a nut 332, and the other end of the shaft 331 is connected to an external driving device through a coupling, and the shaft 331 is driven by the external driving device to drive the blade 330 to rotate.

[0075] In the embodiment, the tightening direction of the blade 330 and the shaft 331 when threaded connection is opposite to the rotation direction of the blade 330. Figure 3 For example, when the blade 330 should be driven to rotate in a clockwise direction, the blade 330 needs to be rotated in a counterclockwise direction in order to be tightened with the shaft 331 .

[0076] Of course, the blades 330 and the shaft 331 may also be connected in other forms, such as welding, bolt-assisted fixation, or a combination of multiple forms of fixed connection.

[0077] In the implementation scheme, the part of the shaft 331 exposed outside the distributor body 310 is also provided with a matching sleeve 2 333, and the shaft 331 is also arranged inside the sleeve 2 333, and the sleeve 2 333 is provided with a bearing seal and a bearing sleeve to serve the purpose of positioning and sealing the shaft 331; the sleeve 2 333 should also be directly or indirectly sealed with the sleeve 1 320, and its connection form is not limited to welding, threaded connection, flange connection, etc.

[0078] In the implementation scheme, high-temperature resistant sealing sleeves are also provided between the shaft 331 and the sleeve 1 320 and the sleeve 2 333 to meet the high-temperature sealing performance requirements under reaction conditions.

[0079] In some embodiments, the air inlet of the second air flow opening 321 is set on the sleeve 1 320, and accordingly, the sleeve 1 320 should have at least a portion exposed outside the distributor body 310; in some embodiments, the air inlet of the second air flow opening 321 is set on the sleeve 2 333, and in this case, there is no restriction that the sleeve 1 320 must have a portion exposed outside the distributor body 310.

[0080] Taking the air inlet of the second air flow opening 321 as an example, Figure 7 FIG. 3 shows an interface 1 333 a provided on the second sleeve 333 , wherein the interface 1 333 a is connected to the gap between the first sleeve 320 and the shaft 331 .

[0081] In an embodiment, the heat gained by the shaft 331 due to contact with the relatively high temperature reactor can be taken away by cooling water, and the cooling water can be circulated and replenished through the casing 2 333 to Figure 7 As an exemplary explanation of the structure, a second interface 333b and a third interface 333c are provided on the second sleeve 333. The second interface 333b and the third interface 333c are respectively used for the introduction and discharge of cooling water. The cooling water flows into the space between the second sleeve 333 and the shaft 331. The cooling water exchanges heat with the shaft 331 and cools it down. At the same time, it also protects the sealing ring that cooperates with the shaft 331 from being damaged prematurely due to excessive temperature.

[0082] Combine Figure 6 The cooling water circulation space and the reaction gas input space should be isolated from each other, so at least one high-temperature resistant sealing sleeve should be set in the sleeve 2 333, and the high-temperature resistant sealing sleeve is also correspondingly set between the interface 1 333a and the interface 2 333b.

[0083] In conjunction with the foregoing, in this embodiment, gas distributor 300 is connected to the small opening of cone 108. Cone 108 serves as a transitional connection. This cone 108 provides an appropriate pressure drop, helping to moderate the rising vortex and stabilize the gas-microsolid fluidization state within the reactor. Furthermore, arranging cone 108 so that the angle between its central axis and its generatrix is ​​between 15° and 30° can help the porous carbon scaffold particles settle from the reactor back into gas distributor 300 and reduce the accumulation of porous carbon scaffolds on the inverted cone slope, forming dead material.

[0084] The gas distributor 300 of the present application can help the upright chemical vapor deposition reactor to process microporous carbon support particles with a particle size of 50 nanometers to 30 microns, or other similar carbon or non-carbon material particles by chemical vapor deposition (CVD), and deposit silicon or other elements or ceramics or metals or non-metallic materials on the surface of such particles and the inner surface of the micropores; the inner diameter of the micropores of such microporous support particles can be less than 2 nanometers.

[0085] The gas distributor 300 of the present application can improve the long-term stability of fluidization between the gas and micro-solid particles in the upright chemical vapor deposition reactor, thereby facilitating the large-scale processing and production of chemical vapor deposition of uniform amorphous and / or microcrystalline carbon-coated silicon on nano- to submicron-sized porous carbon support solid particles, thereby solving the industry's mass production problem of CVI silicon deposition of submicron / nano-sized porous carbon support solid particles, and further assisting the lithium battery industry in developing and supplying a key raw material for the negative electrode required.

[0086] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same.

Claims

1. Gas distributor, characterized in that, The distributor comprises a main body having an inwardly concave curved surface, a second air flow opening being provided at the center of the curved surface, a first air flow opening being provided outside the second air flow opening, the second air flow opening being arranged in a radial direction of the distributor main body, and the first air flow opening being arranged at a tangential angle to the curved surface; A rotatable blade is provided in the curved surface, and a gap is formed between the blade and the curved surface; The opening direction of the air flow opening 1 on the reference surface 1 is located between the tangential direction and the radial direction passing through the air flow opening 1, and the reference surface 1 is perpendicular to the axial direction of the distributor body; On the second reference plane, the opening direction of the first airflow opening is between the tangent direction and the axial direction of the first airflow opening. The second reference plane is parallel to the axial direction of the distributor body and the opening direction of the first airflow opening.

2. The gas distributor according to claim 1, characterized in that On the first reference plane, the angle between the opening direction of the first airflow opening and the radial direction is 90°.

3. The gas distributor according to claim 1, characterized in that The number of the air flow opening 1 is set to one, and the number of the air flow opening 2 is set to one; Or the air flow opening 1 is set to one, and the number of the air flow opening 2 is set to multiple; Or the number of the airflow openings 1 is set to be multiple, and the number of the airflow opening 2 is set to be one; Or the number of the air flow openings 1 is set to be multiple, and the number of the air flow openings 2 is set to be multiple.

4. The gas distributor according to claim 1, characterized in that The distributor body is provided with a through hole, the through hole is sealed and connected to the first sleeve, and the second air flow opening is provided on the first sleeve.

5. The gas distributor according to claim 4, characterized in that An air gap adjustment sleeve is provided on the first sleeve, the air gap adjustment sleeve shields the outside of the second air flow opening, and a gap is provided between the air gap adjustment sleeve and the first sleeve.

6. The gas distributor according to claim 5, characterized in that The air gap adjustment sleeve is threadedly connected to the sleeve, and the gap height between the air gap adjustment sleeve and the curved surface can be adjusted when the air gap adjustment sleeve is rotated.

7. The gas distributor according to claim 6, characterized in that The blades are fixed to the shaft, which passes through the center of the first sleeve and maintains a gap with the inner wall of the first sleeve. A sealing sleeve is provided between the shaft and the first sleeve for axial sealing.

8. The gas distributor according to claim 7, characterized in that A second sleeve is further provided outside the shaft, and the second sleeve is sealedly connected to the first sleeve. A cavity for cooling water circulation is provided between the second sleeve and the shaft, and sealing sleeves are provided at both ends of the cavity for axial sealing. The second sleeve is provided with a second interface and a third interface communicating with the cavity; The first sleeve is provided with a gas input interface 1, or the second sleeve is provided with a gas input interface 1.

9. The gas distributor according to claim 1, characterized in that The distributor body is provided with a discharge port.

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