Multistage buffer test probe and assembly method thereof
By designing a multi-stage buffer test probe, using elastic buffer parts and damping sliding sleeves to provide multi-stage buffering force, the problems of insufficient measurement accuracy and high hardware cost of traditional probes are solved, and high-precision measurement and cost control are achieved.
Patent Information
- Application Number
- CN202510339128.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2025-05-06
AI Technical Summary
When measuring the surface resistance of copper plate and silicon wafers, the test results are insufficient due to the impact of the contact resistance of the probe, and the lack of auxiliary positioning buffer structure, resulting in the inability to accurately refine and classify the buffer force, which requires the robot's control accuracy to be too high, resulting in an increase in hardware cost.
A multi-stage buffer test probe is designed, including a column body, a damping sliding sleeve, first and second elastic buffer members, and a probe body. The contact buffering force is increased by the second elastic buffering member, and the support buffering force is provided by the movable sleeve and the first elastic buffering member, thereby reducing the control accuracy requirements of the robot.
It realizes that the impact of contact resistance on the measurement results is eliminated while ensuring soft contact, reduces the control accuracy requirements of the robot, avoids the increase in hardware costs, and improves the buffering accuracy during the measurement process.
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Figure CN119936449A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of test probes, and in particular to a multi-stage buffer test probe and an assembly method thereof. Background Art
[0002] Test probes are devices used to test and evaluate integrated circuits, chips, and related components. During testing, the probes are brought into contact with the test points to measure and monitor the electrical performance, electrical characteristics, signal transmission, and surface resistance of the components.
[0003] In the actual production and processing process, we found that when measuring the surface resistance of copper-clad laminates and silicon wafers, due to the very small spacing between the probes, the test results will be offset by the contact resistance generated by the sliding contact between the probe barrel and the probe body when using traditional probes for testing, resulting in insufficient test results accuracy; and the probe body inside the traditional probe has an extremely small measuring stroke and no auxiliary positioning and buffering structure, so the buffering force provided cannot be accurately refined and graded. In order to ensure that the contact force between the probe and the workpiece is maintained at an appropriate level, the control accuracy of the robot is required to be very high. However, for enterprises, purchasing equipment with higher control accuracy will increase hardware costs and is not conducive to production cost control. Therefore, it is necessary to propose a new test probe to meet higher requirements for production and processing. Summary of the invention
[0004] The object of the present invention is to provide a multi-stage buffer test probe and an assembly method thereof to solve the problems raised in the background technology.
[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a multi-stage buffer test probe, comprising a longitudinally arranged guide column body, a movable sleeve with a damping sliding sleeve arranged at the lower end of the guide column body, a first elastic buffer member arranged above the movable sleeve, and a probe body longitudinally movable through the upper and lower ends of the guide column body, and a second elastic buffer member arranged above the guide column body; a first positioning portion for positioning the upper end of the first elastic buffer member is provided on the side wall of the guide column body; one end of the second elastic buffer member abuts against the upper end of the probe body in a detachable manner and provides downward pressure thereto, and the other end of the second elastic buffer member is arranged on the upper end of the guide column body through an insulating mounting member; a window for exposing the probe body is provided on the side wall of the movable sleeve; in an initial state, the lower end of the movable sleeve is lower than the lower end of the probe body.
[0006] The multi-stage buffer test probe described in the present invention, wherein the guide column body is made of aluminum alloy, and is provided with an avoidance channel for avoiding the probe body. An insulating plate and an insulating seat are respectively provided on the upper and lower end surfaces of the guide column body, and both the insulating plate and the insulating seat are provided with guide through holes adapted to the probe body.
[0007] The multi-stage buffer test probe of the present invention comprises a positioning groove on the lower end surface of the guide column body, and the insulating seat is detachably connected to the bottom surface of the positioning groove via a connecting rod.
[0008] The multi-stage buffer test probe described in the present invention, wherein the connecting rod is vertically arranged and threadedly connected to the guide column body, a positioning pin is radially provided on the side wall of the guide column body, and the movable sleeve is provided with an avoidance hole for avoiding the outer end of the positioning pin up and down, the inner end of the positioning pin passes through the inner wall of the screw hole adapted to the connecting rod, and the upper end face of the connecting rod is an inclined surface inclined in the direction away from the positioning pin. When assembled in place, the inner end of the positioning pin abuts against the side wall of the connecting rod.
[0009] The multi-stage buffer test probe of the present invention is characterized in that the end of the second elastic buffer away from the probe body is detachably connected to the insulating mounting member, and the insulating mounting member and the insulating plate are detachably connected to the guide column body via a connecting member.
[0010] In the multi-stage buffer test probe of the present invention, the second elastic buffer is in the shape of an elongated strip, and the probe body is provided with a through hole for the second elastic buffer to pass through.
[0011] The multi-stage buffer test probe of the present invention has a diameter of the through hole that is larger than a diameter of the second elastic buffer component. When assembled in place, there is a travel gap between the side walls at the upper and lower ends of the through hole and the second elastic buffer component.
[0012] The multi-stage buffer test probe described in the present invention, wherein the probe body includes a needle shaft, and a syringe coaxially fixed to the outer side of the upper end of the needle shaft; the upper end of the syringe has an extension portion extending upward from the upper end of the needle shaft, the inner cavity of the extension portion forms a connecting cavity for fixing the connecting wire, and the through hole is located on the extension portion.
[0013] In the multi-stage buffer test probe of the present invention, the lower end of the syringe abuts against the upper end surface of the guide column body through a limiter and provides an upward supporting force for the needle shaft.
[0014] In addition, the present invention also provides a method for assembling a multi-stage buffer test probe, the method comprising the following steps:
[0015] Installing the first elastic member at the middle of the guide column body;
[0016] The movable sleeve is coaxially sleeved on the lower side of the guide column body at the lower part of the guide column body;
[0017] Mounting one end of the second elastic buffer on the insulating mounting member and the other end on the probe body;
[0018] Insert the lower end of the probe body into the guide column body, and simultaneously install the insulating mounting piece on the upper end of the guide column body, and insert the probe body into the guide column body until it is in place.
[0019] Compared with the prior art, the present invention has the following beneficial effects: during testing, the signal line can be directly connected to the upper end of the probe body, and the contact buffering force can be increased by the second elastic buffer, thereby directly eliminating the influence of the contact resistance of the traditional probe on the measurement result while ensuring soft contact;
[0020] In addition, through the sliding damping between the movable sleeve and the guide column body and the first elastic buffer, the movable sleeve first abuts against the upper surface of the workpiece to be measured or the top surface of the fixture on which the workpiece is installed during measurement, thereby providing an upward support buffer force for the probe body, and the support buffer force can be captured by the pressure sensing element arranged on the manipulator, so that the manipulator makes control feedback in advance with a sufficiently large stroke space, thereby avoiding the increase in hardware procurement costs caused by requiring the manipulator to meet higher control accuracy under a smaller stroke of the traditional probe;
[0021] Moreover, the insufficient supporting force in the early stage of compression of the first elastic buffer can be compensated by the damping force between the movable sleeve and the guide column body, further improving the perception sensitivity of the manipulator; and in the later stage of measurement, when the probe abuts against the surface of the workpiece, the second elastic buffer can be used to increase the contact buffer for the probe body to ensure soft contact with the workpiece, and by cooperating with the second elastic buffer and the sliding damping force of the movable sleeve, a three-level buffer can be provided for the probe body, which greatly reduces the risk of damage to the measured workpiece due to inaccurate division of the buffer force during the measurement process. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0023] Figure 1 It is a front view of the present invention.
[0024] Figure 2 for Figure 1 AA section view.
[0025] Figure 3 for Figure 1 BB cross-sectional view.
[0026] Figure 4 for Figure 3 A magnified view of the local structure.
[0027] Figure 5 It is a rear view of the present invention.
[0028] Figure 6 It is a flow chart of the assembly method steps of the present invention. DETAILED DESCRIPTION
[0029] The terms "first", "second", "third" and "fourth" etc. in the specification and claims of the present invention and the drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products or devices.
[0030] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present invention. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.
[0031] "Multiple" means two or more. "And / or" describes the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the related objects are in an "or" relationship.
[0032] Moreover, the terms "up, down, left, right, upper end, lower end, longitudinal" and the like indicating directions are all based on the posture and position of the device or equipment described in this solution during normal use.
[0033] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the following will be described clearly and completely in combination with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are partial embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the protection scope of the present invention.
[0034] This embodiment discloses Figures 1 to 6 The multi-stage buffer test probe shown in the figure comprises a longitudinally arranged guide column body 10, a movable sleeve 20 with a damping sliding sleeve arranged at the lower end of the guide column body 10, a first elastic buffer member 30 arranged above the movable sleeve 20, and a probe body 40 longitudinally movable through the upper and lower ends of the guide column body 10, and a second elastic buffer member 50 arranged above the guide column body 10; wherein the first elastic buffer member 30 is specifically a spring, and can also be a structure composed of elastic ribs or two tension springs arranged in reverse up and down, and the probe body 40 is provided with a plurality of them and arranged side by side left and right; a first positioning portion 101 for positioning the upper end of the first elastic buffer member 30 is provided on the side wall of the guide column body 10, and the second elastic buffer member 50 is provided above the guide column body 10. A positioning portion 101 is specifically a raised structure. When installed in place, the first elastic buffer 30 abuts against the lower end of the first positioning portion 101; one end of the second elastic buffer 50 abuts against the upper end of the probe body 40 in a detachable manner and provides downward pressure thereto, and the other end of the second elastic buffer 50 is arranged on the upper end of the guide column body 10 through an insulating mounting member; a window 201 is provided on the side wall of the movable sleeve 20 for exposing the probe body 40, so as to facilitate observation of the contact between the probe body 40 and the workpiece; in the initial state, the lower end of the movable sleeve 20 is lower than the lower end of the probe body 40, so as to provide protection for the probe body 40 in a non-test state
[0035] During testing, the signal line can be directly connected to the upper end of the probe body 40, and the contact buffering force can be increased by the second elastic buffer 50. Under the premise of ensuring soft contact, the influence of the contact resistance of the traditional probe on the measurement result is directly eliminated; in addition, through the sliding damping between the movable sleeve 20 and the guide column body 10 and the first elastic buffer 30, the movable sleeve 20 is first abutted against the upper surface of the workpiece to be measured or the top surface of the fixture for mounting the workpiece during measurement, thereby providing an upward support buffering force for the probe body 40, and the support buffering force can be captured by the pressure sensing element provided on the manipulator, so that the manipulator can make control feedback in advance with a sufficiently large travel space, thereby avoiding the increase in hardware procurement costs caused by requiring the manipulator to meet higher control accuracy under a smaller travel of the traditional probe.
[0036] Moreover, the insufficient supporting force in the early stage of compression of the first elastic buffer 30 can be compensated by the damping force between the movable sleeve 20 and the guide column body 10, further improving the perception sensitivity of the manipulator; and in the later stage of measurement, when the probe abuts against the surface of the workpiece, the second elastic buffer 50 can be used to increase the contact buffer for the probe body 40 to ensure soft contact with the workpiece, and by cooperating with the second elastic buffer 50 and the sliding damping force of the movable sleeve 20, a three-level buffer can be provided for the probe body 40, which greatly reduces the risk of damage to the measured workpiece due to inaccurate division of the buffer force during the measurement process.
[0037] In this embodiment, the guide column body 10 is made of aluminum alloy and is a cylinder. An avoidance channel 102 for avoiding the probe body 40 is provided on the guide column body 10. In order to reduce the weight, a weight-reducing groove 103 is provided at the front end of the side wall of the guide column body, wherein the probe body 40 passes through the weight-reducing groove 103; an insulating plate 60 and an insulating seat 70 are respectively provided on the upper and lower end surfaces of the guide column body 10, and a guide through hole 80 adapted to the probe body 40 is provided on the insulating plate 60 and the insulating seat 70; wherein the insulating plate 60 and the insulating seat 70 are both made of Teflon material to play the role of insulation and reducing friction, thereby ensuring the service life of the probe body 40.
[0038] In addition, in order to reduce the setting of connecting parts, a boss 90 is provided on one side of the upper end surface of the guide column body 10, and the boss 90 is arranged opposite to the probe body 40. The insulating mounting piece is arranged on the boss 90, and a horizontal groove 91 is provided on the side wall of the boss 90. An extension section 61 inserted into the groove 91 is provided on the insulating plate 60. When installed in place, the connecting piece locks the insulating mounting piece downward on the boss 90, and also presses the extension section 61 into the groove 91 to prevent it from moving and causing lateral extrusion to the probe body 40.
[0039] In this embodiment, a positioning groove 104 is provided on the lower end surface of the guide column body 10, and the insulating seat 70 is detachably connected to the bottom surface of the positioning groove 104 through the connecting rod 100; wherein, the connecting rod 100 is vertically arranged and threadedly connected to the guide column body 10, and the connecting rod 100 specifically adopts a bolt structure for easy disassembly and assembly; a positioning pin 110 is radially provided on the side wall of the guide column body 10, and an avoidance hole 120 for avoiding the outer end of the positioning pin 110 up and down is provided on the movable sleeve 20, and the inner end of the positioning pin 110 passes through the inner wall of the screw hole 105 adapted to the connecting rod 100, and the upper end surface of the connecting rod 100 is an inclined surface 11 inclined in the direction away from the positioning pin 110. When assembled in place, the inner end of the positioning pin 110 abuts against On the side wall of the connecting rod 100, due to the small diameter of the locating pin 110 and the need to provide sufficient installation space for the connecting rod 100, the locating pin 110 cannot be bolted. The setting of the inclined surface 11 can well solve the problem of inconvenient disassembly caused by the inability to use bolts for the locating pin 110. When disassembling the locating pin 110, it is only necessary to loosen the connecting rod 100 and push the locating pin 110 inward into the screw hole 105 of the connecting rod 100. At this time, the movable sleeve 20 can be removed. When the movable sleeve 20 is in place, tighten the connecting rod 100 upwards, and the locating pin 110 can be pushed out through the inclined surface 11 and inserted into the avoidance hole 120 again to limit the movable sleeve 20 and prevent the movable sleeve 20 from falling off.
[0040] In this embodiment, the end of the second elastic buffer 50 away from the probe body 40 is detachably connected to the insulating mounting member 130, and the insulating mounting member 130 and the insulating plate 60 are detachably connected to the guide column body 10 through a connecting member 140. The connecting member 140 is specifically a bolt or a screw or a positioning pin 110 for interference fitting. As a preferred embodiment, a bolt structure is generally adopted; wherein, the second elastic buffer 50 is in the shape of an elongated strip, and a through hole 401 is provided on the probe body 40 for the second elastic buffer 50 to pass through, so that it can be easily installed and can be raised and lowered synchronously with the probe body 40, and can also play a guiding and limiting role for the probe body 40. In order to ensure that the elasticity is maintained for a long time, the end of the second elastic buffer 50 away from the probe body 40 has a spiral section to form a torsion spring structure.
[0041] In this embodiment, the diameter of the through hole 401 is larger than the diameter of the second elastic buffer 50. When assembled in place, there is a travel gap between the side walls at the upper and lower ends of the through hole 401 and the second elastic buffer 50 to prevent the two from being assembled too tightly and unable to move relative to each other, which will cause the probe body 40 to be deflected by the second elastic buffer 50 when moving up and down, causing the coaxiality to change and thus greatly reducing the service life.
[0042] In this embodiment, the probe body 40 includes a needle shaft 41 and a syringe 42 coaxially fixed on the outer side of the upper end of the needle shaft 41; the upper end of the syringe 42 has an extension portion 421 extending upward from the upper end of the needle shaft 41, and the inner cavity of the extension portion 421 forms a connecting cavity 422 for fixing the connecting wire, and the through hole 401 is located on the extension portion 421 to facilitate processing and installation.
[0043] In this embodiment, the lower end of the syringe 42 is abutted against the upper end surface of the guide column body 10 through a limiting member and provides an upward supporting force for the needle shaft 41, so as to limit the needle shaft 41, and cooperate with the second elastic buffer 50 to provide reverse pressure and supporting force to the needle shaft 41; specifically, the limiting member is an insulating plate 60.
[0044] In addition, the assembly method of the multi-stage buffer test probe of the present scheme includes the following steps:
[0045] Step S10: installing the first elastic member at the middle of the guide column body 10;
[0046] Step S20: Coaxially sleeve the movable sleeve 20 on the lower side of the guide post body 10 and the lower part of the guide post body 10;
[0047] Step S30: Install one end of the second elastic buffer 50 on the insulating mounting member 130 , and install the other end on the probe body 40 ;
[0048] Step S40 : inserting the lower end of the probe body 40 into the guide post body 10 , and simultaneously installing the insulating mounting member 130 on the upper end of the guide post body 10 , and inserting the probe body 40 into the guide post body 10 until it is in place.
[0049] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the appended claims of the present invention.
Claims
1. A multi-stage buffer test probe, characterized in that: It includes a longitudinally arranged guide column body, a movable sleeve with a damping sliding sleeve arranged at the lower end of the guide column body, a first elastic buffer member arranged above the movable sleeve, and a probe body longitudinally movable through the upper and lower ends of the guide column body, and a second elastic buffer member arranged above the guide column body; a first positioning portion for positioning the upper end of the first elastic buffer member is provided on the side wall of the guide column body; one end of the second elastic buffer member abuts against the upper end of the probe body in a detachable manner and provides downward pressure thereto, and the other end of the second elastic buffer member is arranged on the upper end of the guide column body through an insulating mounting member; a window for exposing the probe body is provided on the side wall of the movable sleeve; in an initial state, the lower end of the movable sleeve is lower than the lower end of the probe body.
2. The multi-stage buffer test probe according to claim 1, characterized in that: The guide column body is made of aluminum alloy, and is provided with an avoidance channel for avoiding the probe body. The upper and lower end surfaces of the guide column body are respectively provided with an insulating plate and an insulating seat, and the insulating plate and the insulating seat are both provided with guide through holes adapted to the probe body.
3. The multi-stage buffer test probe according to claim 2, characterized in that: A positioning groove is arranged on the lower end surface of the guide column body, and the insulating seat is detachably connected to the bottom surface of the positioning groove through a connecting rod.
4. The multi-stage buffer test probe according to claim 3, characterized in that: The connecting rod is vertically arranged and threadedly connected to the guide column body. A positioning pin is radially provided on the side wall of the guide column body. The movable sleeve is provided with an avoidance hole for avoiding the outer end of the positioning pin up and down. The inner end of the positioning pin passes through the inner wall of the screw hole adapted to the connecting rod. The upper end face of the connecting rod is an inclined surface inclined away from the positioning pin. When assembled in place, the inner end of the positioning pin abuts against the side wall of the connecting rod.
5. The multi-stage buffer test probe according to claim 2, characterized in that: One end of the second elastic buffer away from the probe body is detachably connected to the insulating mounting member, and the insulating mounting member and the insulating plate are detachably connected to the guide column body via a connecting member.
6. The multi-stage buffer test probe according to claim 2, characterized in that: The second elastic buffer is in the shape of an elongated strip, and the probe body is provided with a through hole for the second elastic buffer to pass through.
7. The multi-stage buffer test probe according to claim 6, characterized in that: The diameter of the through hole is larger than the diameter of the second elastic buffer. When assembled in place, there is a travel gap between the side walls at the upper and lower ends of the through hole and the second elastic buffer.
8. The multi-stage buffer test probe according to claim 7, characterized in that: The probe body includes a needle shaft and a syringe coaxially fixed on the outer side of the upper end of the needle shaft; the upper end of the syringe has an extension portion extending upward from the upper end of the needle shaft, the inner cavity of the extension portion forms a connecting cavity for fixing the connecting wire, and the through hole is located on the extension portion.
9. The multi-stage buffer test probe according to claim 8, characterized in that: The lower end of the needle cylinder abuts against the upper end surface of the guide column body through a limiting member and provides an upward supporting force for the needle shaft.
10. A method for assembling a multi-stage buffer test probe, according to the multi-stage buffer test probe according to any one of claims 1 to 9, characterized in that: The assembly method comprises the following steps: Installing the first elastic member at the middle of the guide column body; The movable sleeve is coaxially sleeved on the lower side of the guide column body at the lower part of the guide column body; Mounting one end of the second elastic buffer on the insulating mounting member and the other end on the probe body; Insert the lower end of the probe body into the guide column body, and simultaneously install the insulating mounting piece on the upper end of the guide column body, and insert the probe body into the guide column body in place.