Forward transfer robot

Abstract

The invention discloses a forward carrying robot, and belongs to the technical field of semiconductor carrying. The forward carrying robot comprises a moving chassis, a material taking unit and a deviation correcting unit, and the moving chassis can move to an oven opening of the oven; the material taking unit comprises a main frame and a grabbing module, a bearing plate is arranged in the main frame, the grabbing module comprises a grabbing moving seat and a lifting seat with a hook claw, and the grabbing moving seat is arranged on the bearing plate and can be close to a heating cavity of the oven in the first direction; the lifting base is arranged on the grabbing moving base and can move in the second direction, and the hook claw can be connected with a groove in the bottom of the material frame in an inserted mode. The deviation rectifying unit is arranged between the material taking unit and the movable chassis and used for adjusting the spatial position of the material taking unit. The material rack in the oven can be safely and rapidly carried, and the collision risk is avoided.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor handling technology, and in particular to a forward handling robot. Background Art

[0002] With the rapid development of the semiconductor industry, the application of ovens is increasing. Semiconductor wafers are inserted into racks and put into ovens for processing, so the problem of handling racks in ovens has become increasingly prominent.

[0003] At present, most of the racks are transported by manual trolleys, which is not only time-consuming and labor-intensive, but also unsafe. There is a problem with the parking accuracy (position and angle accuracy) of the trolley itself. At present, the gap between the racks in the oven and the two sides of the heating cavity is too small, and there is a risk of collision between the racks and the oven heating cavity during manual transport.

[0004] Therefore, it is urgent to provide a forward transport robot to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a forward transport robot that can safely and quickly transport material racks in an oven and avoid the risk of collision.

[0006] In order to achieve the above objectives, the following technical solutions are provided:

[0007] Forward handling robot, including:

[0008] The mobile chassis can be moved to the oven opening;

[0009] The material taking unit comprises a main frame and a grabbing module, wherein a carrying plate is arranged in the main frame, and the grabbing module comprises a grabbing moving seat and a lifting seat with hook claws, wherein the grabbing moving seat is arranged on the carrying plate and can approach the heating cavity of the oven along a first direction, and the lifting seat is arranged on the grabbing moving seat and can move along a second direction, and the hook claw can be plugged into a groove at the bottom of the material rack;

[0010] A deviation correction unit is arranged between the material taking unit and the mobile chassis, and the deviation correction unit is used to adjust the spatial position of the material taking unit.

[0011] As an optional solution of the forward transport robot, the carrying plate is provided with a first rack extending along a first direction, and the grabbing module further includes:

[0012] A first driving motor is arranged on the material grabbing moving seat and is used to drive the material grabbing moving seat to move along a first direction, and a first driving wheel of the first driving motor is meshed with the first rack for transmission;

[0013] An electric push rod is arranged on the material grabbing moving seat and is used to drive the lifting seat to move along the second direction. The telescopic end of the electric push rod is connected to the lifting seat.

[0014] As an optional solution for the forward transport robot, the carrying plate is provided with a first guide extending along a first direction, the material grabbing movable seat is provided with a second guide, and the second guide is slidably connected to the first guide; and / or

[0015] The material grabbing moving seat is provided with a third guide member extending along the second direction, and the lifting seat is provided with a fourth guide member, and the fourth guide member is slidably connected with the third guide member.

[0016] As an optional solution of the forward transport robot, at least two of the carrying plates are arranged in the main frame at intervals along the second direction, and a second rack extending along the first direction is arranged at the bottom of the lowermost carrying plate, and the deviation correction unit includes:

[0017] A lifting plate capable of moving along a second direction, wherein the lifting plate has a first avoidance hole;

[0018] The second driving motor and the electric cylinder are both arranged at the bottom of the lifting plate;

[0019] The transverse plate is arranged on the lifting plate, the telescopic end of the electric cylinder is connected to the adapter of the transverse plate, the electric cylinder is used to drive the transverse plate to move along the third direction, the transverse plate has a second avoidance hole, and the second driving wheel of the second driving motor passes through the first avoidance hole and the second avoidance hole and engages with the second rack for transmission.

[0020] As an optional solution for the forward transport robot, the lifting plate is provided with a fifth guide member extending along the third direction, the transverse plate is provided with a sixth guide member, and the sixth guide member is slidably connected to the fifth guide member; and / or

[0021] The transverse moving plate is provided with a seventh guide member extending along the first direction, and the bearing plate is provided with an eighth guide member, and the eighth guide member is slidably connected with the seventh guide member.

[0022] As an optional solution for the forward handling robot, the lifting plate is equipped with a plurality of sleeves with internal threads, and the deviation correction unit further includes:

[0023] A rotating seat, the lower end of which is rotatably connected to the movable chassis;

[0024] One end of a plurality of lead screws is rotatably arranged on the rotating seat, and the other end is threadably connected with the sleeve.

[0025] As an optional solution for the forward handling robot, the mobile chassis is fixedly mounted with an outer gear ring, and the deviation correction unit further includes:

[0026] The third drive motor is arranged on the rotating seat, and the third drive wheel of the third drive motor is meshed with the outer gear ring for transmission.

[0027] As an optional solution of the forward handling robot, the material picking unit further includes a linkage locking mechanism, which includes:

[0028] A first follower, comprising a first front swing arm and a second front swing arm, wherein the first follower is rotatably disposed on the bearing plate, and a front end limiting rod is installed on the first front swing arm;

[0029] A second follower, comprising a first rear swing arm, a second rear swing arm and a third rear swing arm, wherein the second follower is rotatably arranged on the carrying plate, a rear end limit rod is installed on the first rear swing arm, and the grabbing module can abut against the third rear swing arm and cause the second follower to rotate;

[0030] An intermediate connecting rod has one end hinged to the second front swing arm and the other end hinged to the second rear swing arm.

[0031] As an optional solution for the forward handling robot, the linkage locking mechanism includes:

[0032] A first fixing block is installed on the main frame, and the fixing block has a guide through hole;

[0033] The second fixing block is mounted on the intermediate connecting rod.

[0034] A guide rod, one end of which is connected to the second fixing block, and the other end of which is inserted into the guide through hole;

[0035] A return spring is sleeved on the guide rod, and the return spring is clamped between the second fixing block and the first fixing block.

[0036] Compared with the prior art, the present invention has the following beneficial effects:

[0037] The forward transport robot provided by the present invention is provided with a correction unit between the mobile chassis and the material picking unit. The mobile chassis enables the forward transport robot to automatically drive to the box opening of the oven. The forward transport robot uses the correction unit to align the grab module of the material picking unit with the heating cavity of the oven. When the grab module grabs or places the material rack, structural interference between the material rack and the heating cavity is avoided, and the material rack can be transported safely and quickly. The grab module is located on the bearing plate in the main frame. The grab moving seat of the grab module can approach the heating cavity of the oven along the second direction. The lifting seat is raised along the second direction, so that the limit block on the hook claw can be inserted into the groove at the bottom of the material rack, which is convenient for the grab module to push the material rack into the heating cavity or pull the material rack out of the heating cavity, thereby improving the processing efficiency of semiconductor wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0039] Figure 1 This is a structural schematic diagram of a forward transport robot moving to an oven in an embodiment of the present invention;

[0040] Figure 2 Schematic diagram of the assembly of the forward handling robot in an embodiment of the present invention;

[0041] Figure 3 It is a structural schematic diagram of a mobile chassis in an embodiment of the present invention;

[0042] Figure 4 It is a schematic diagram of the assembly of the material taking unit, the deviation correcting unit, the linkage locking mechanism, the laser ranging sensor and the camera sensor in the embodiment of the present invention;

[0043] Figure 5 It is a schematic diagram of the assembly of the material taking unit, the linkage locking mechanism, the laser ranging sensor and the camera sensor in the embodiment of the present invention;

[0044] Figure 6 It is a schematic diagram of the assembly of the grab module and the carrying plate in an embodiment of the present invention;

[0045] Figure 7 It is a structural schematic diagram of a grabbing module in an embodiment of the present invention;

[0046] Figure 8 An exploded schematic diagram of a load-bearing plate, a deviation-correcting unit and an outer gear ring in an embodiment of the present invention;

[0047] Fig. 9 Schematic diagram of the structure of the linkage locking mechanism in an embodiment of the present invention (the reset spring is not shown in the figure).

[0048] Reference numerals:

[0049] 1000, forward handling robot; 2000, material rack; 3000, oven; 30001, heating cavity;

[0050] 100, mobile chassis; 101, outer gear ring; 200, material taking unit; 300, deviation correction unit; 400, linkage locking mechanism; 500, laser ranging sensor; 600, camera sensor; 700, shield plate; 701, observation window; 800, laser navigation assembly;

[0051] 201, main frame; 202, bearing plate; 2021, first rack; 2022, first guide; 2023, second rack; 2024, eighth guide; 2025, ball; 203, material grabbing moving seat; 2031, second guide; 2032, third guide; 204, hook; 2041, limit block; 205, lifting seat; 2051, fourth guide; 206, first driving motor; 2061, first driving wheel;

[0052] 301, lifting plate; 3011, first avoidance hole; 3012, fifth guide; 3013, sleeve; 302, second drive motor; 3021, second drive wheel; 303, electric cylinder; 304, transverse plate; 3041, second avoidance hole; 3042, adapter; 3043, sixth guide; 3044, seventh guide; 305, rotating seat; 306, lead screw; 307, third drive motor; 3071, third drive wheel;

[0053] 401, first follower; 4011, first front swing arm; 4012, second front swing arm; 4013, front end limit rod; 402, second follower; 4021, first rear swing arm; 4022, second rear swing arm; 4023, third rear swing arm; 4024, rear end limit rod; 403, first fixed block; 404, second fixed block; 405, guide rod; 406, intermediate connecting rod; 407, stud; 408, rotating block; 409, roller. DETAILED DESCRIPTION

[0054] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0055] In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or are the positions or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0056] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0058] In order to safely and quickly transport the racks in the oven and avoid the risk of collision, this embodiment provides a forward transport robot. Figures 1 to 9 The specific contents of this embodiment are described in detail. It should be noted that the first direction mentioned in this embodiment is Figure 1 The X direction in this embodiment is Figure 1 The Z direction in this embodiment is Figure 1 in the Y direction.

[0059] like Figures 1 to 8 As shown, the forward transport robot 1000 in this embodiment includes a mobile chassis 100, a material picking unit 200 and a deviation correction unit 300. Figure 1As shown, the mobile chassis 100 can move to the box opening of the oven 3000, the oven 3000 is located in front of the forward transfer robot 1000, and the oven 3000 has four heating chambers 30001. According to the transfer requirements, the forward transfer robot 1000 moves and aligns with the corresponding heating chamber 30001. After completing the transfer of the material rack, the box door of the oven 3000 is closed. The material picking unit 200 includes a main frame 201 and a grabbing module. A carrying plate 202 is arranged in the main frame 201. The grabbing module includes a grabbing moving seat 203 and a lifting seat 205 with a hook 204. The grabbing moving seat 203 is arranged on the carrying plate 202 and can approach the heating cavity 30001 of the oven 3000 in a first direction. The lifting seat 205 is arranged on the grabbing moving seat 203 and can move in a second direction. A limit block 2041 is installed on the hook 204, and the hook 204 can be plugged into a groove at the bottom of the material rack 2000. The deviation correction unit 300 is arranged between the material picking unit 200 and the mobile chassis 100. The deviation correction unit 300 is used to adjust the spatial position of the material picking unit 200. The deviation correction unit 300 can make the material picking unit 200 move linearly along the X direction, the Y direction and the Z direction, and rotate around the Z axis. It can be understood that the moving range of the hook 204 of the grab module along the first direction is not less than the depth of the heating cavity 30001 of the oven 3000. Optionally, the mobile chassis 100 can be an AGV cart, which is the full name of Automated Guided Vehicle, that is, an automatic guided vehicle, which is equipped with an automatic guiding device such as electromagnetic or optical, can travel along a specified guiding path, and has safety protection and various transfer functions. The bottom of the mobile chassis 100 is equipped with a double differential steering wheel and a double universal wheel. The double differential steering wheel and the double universal wheel are both arranged diagonally and can move in all directions. The springs are added or removed on the wheels to reduce the shock of the whole vehicle and reduce the impact of ground vibration on the handling rack. The top of the mobile chassis 100 is equipped with a laser navigation component 800. The laser navigation component 800 can measure the distance between the robot or equipment and the surrounding objects by emitting a laser beam and receiving the reflected signal. Using these distance data and combining SLAM (Simultaneous Localization and Mapping) technology, the laser navigation component 800 can build an accurate map model of the environment. Based on the constructed map, the laser navigation component 800 can plan the optimal path from the starting point to the end point. The laser navigation component 800 can continuously scan the environment, obtain real-time point cloud data, and dynamically adjust the path based on this data to deal with obstacles or changes in the environment.

[0060] In short, the forward transport robot 1000 provided in this embodiment is provided with a correction unit 300 between the mobile chassis 100 and the material picking unit 200. The mobile chassis 100 can enable the forward transport robot 1000 to automatically drive to the box opening of the oven 3000. The forward transport robot 1000 uses the correction unit 300 to align the grasping module of the material picking unit 200 with the heating cavity 30001 of the oven 3000. When the grasping module grasps or places the material rack 2000, structural interference between the material rack 2000 and the heating cavity 30001 is avoided, and the material rack 2000 can be transported safely and quickly. The grabbing module is located on the supporting plate 202 in the main frame 201. The grabbing moving seat 203 of the grabbing module can approach the heating chamber 30001 of the oven 3000 along the second direction. By lifting the lifting seat 205 along the second direction, the limit block 2041 on the hook 204 can be inserted into the groove at the bottom of the material rack 2000, which is convenient for the grabbing module to push the material rack 2000 into the heating chamber or pull the material rack 2000 out of the heating chamber, thereby improving the processing efficiency of semiconductor wafers.

[0061] Furthermore, if Figures 5 to 7 As shown, a first rack 2021 extending in a first direction is provided on the carrier plate 202, and the grabbing module also includes a first drive motor 206 and an electric push rod. The first drive motor 206 is provided on the material grabbing moving seat 203 to drive the material grabbing moving seat 203 to move in the first direction. The first drive wheel 2061 of the first drive motor 206 is meshed with the first rack 2021 for transmission. The electric push rod is provided on the material grabbing moving seat 203 to drive the lifting seat 205 to move in the second direction, and the telescopic end of the electric push rod is connected to the lifting seat 205. By controlling the forward and reverse rotation of the first drive motor 206, the grabbing module can be reciprocated in the first direction, and by controlling the telescopic extension of the electric push rod, the limit block 2041 on the hook 204 can be plugged into or separated from the groove at the bottom of the material rack 2000. Figure 6 As shown, a ball 2025 is installed on the upper surface of the supporting plate 202 , and the ball 2025 rolls and rubs against the bottom surface of the material rack 2000 to reduce the friction resistance when the material rack 2000 moves relative to the supporting plate 202 .

[0062] Further, the bearing plate 202 is provided with a first guide 2022 extending in the first direction, the material grabbing moving seat 203 is provided with a second guide 2031, and the second guide 2031 is slidably connected to the first guide 2022; and / or the material grabbing moving seat 203 is provided with a third guide 2032 extending in the second direction, and the lifting seat 205 is provided with a fourth guide 2051, and the fourth guide 2051 is slidably connected to the third guide 2032. By adding the first guide 2022 and the second guide 2031, the material grabbing moving seat 203 can be guided to move only in the first direction relative to the bearing plate 202. By adding the third guide 2032 and the fourth guide 2051, the lifting seat 205 can be guided to move only in the second direction relative to the material grabbing moving seat 203. The matching mode between the guides can be the matching mode between the slide rail and the slider, which not only meets the moving accuracy, but also reduces the moving friction resistance.

[0063] Furthermore, if Figure 5 Combination Figure 8 As shown, at least two bearing plates 202 are arranged in the main frame 201 along the second direction at intervals, and a second rack 2023 extending along the first direction is arranged at the bottom of the bearing plate 202 located at the bottom, and the deviation correction unit 300 includes a lifting plate 301, a second drive motor 302, an electric cylinder 303 and a transverse plate 304. The lifting plate 301 can move along the second direction, and the lifting plate 301 has a first avoidance hole 3011. The second drive motor 302 and the electric cylinder 303 are both arranged at the bottom of the lifting plate 301. The transverse plate 304 is arranged on the lifting plate 301, the telescopic end of the electric cylinder 303 is connected to the adapter 3042 of the transverse plate 304, the electric cylinder 303 is used to drive the transverse plate 304 to move along the third direction, the transverse plate 304 has a second avoidance hole 3041, and the second driving wheel 3021 of the second driving motor 302 passes through the first avoidance hole 3011 and the second avoidance hole 3041 and meshes with the second rack 2023 for transmission. The lifting plate 301 can be displaced along the second direction, and the lowermost supporting plate 202 can be displaced along the first direction by controlling the operation of the second driving motor 302, and the transverse plate 304 can be displaced along the third direction by controlling the operation of the electric cylinder 303. Therefore, the deviation correction unit 300 can drive the material picking unit 200 to displace in the first direction, the second direction and the second direction according to the actual situation to eliminate the position error, thereby improving the working accuracy and safety of the forward handling robot 1000.

[0064] Furthermore, the forward transport robot 1000 further includes a shield plate 700, which covers a portion of the main frame 201 (exposing the front of the main frame 201 to facilitate the material rack 2000 to enter and exit the main frame 201), wherein an observation window 701 is provided on the side of the shield plate 700, and the observation window 701 corresponds to the space above the carrier plate 202, so as to facilitate the observation of the process of the forward transport robot 1000 transporting the material rack 2000. In some application scenarios, when a fault such as a jam occurs inside the material picking unit 200, the observation window 701 can also be used as an inspection port to reduce the difficulty of inspection.

[0065] Further, the lifting plate 301 is provided with a fifth guide 3012 extending along the third direction, the transverse plate 304 is provided with a sixth guide 3043, and the sixth guide 3043 is slidably connected to the fifth guide 3012; and / or the transverse plate 304 is provided with a seventh guide 3044 extending along the first direction, and the bearing plate 202 is provided with an eighth guide 2024, and the eighth guide 2024 is slidably connected to the seventh guide 3044. By adding the fifth guide 3012 and the sixth guide 3043, the transverse plate 304 can be guided to move only along the third direction relative to the lifting plate 301. By adding the seventh guide 3044 and the eighth guide 2024, the bearing plate 202 can be guided to move only along the first direction relative to the transverse plate 304, which not only improves the moving accuracy of the components, but also reduces the moving friction resistance. Optionally, the matching mode between the guides can be the matching mode of the slide rail and the slider.

[0066] Furthermore, the lifting plate 301 is provided with a plurality of sleeves 3013 with internal threads, and the deviation correction unit 300 further includes a fourth driving motor, a rotating seat 305 and a plurality of lead screws 306. The lower end of the rotating seat 305 is rotationally connected to the mobile chassis 100, one end of the lead screw 306 is rotationally arranged on the rotating seat 305, and the other end of the lead screw 306 is threadedly connected to the sleeve 3013. The plurality of lead screws 306 are all transmission-connected to the fourth driving motor, and by controlling the operation of the fourth driving motor, the plurality of lead screws 306 can be rotated at the same time, and under the transmission cooperation between the lead screw 306 and the internal threads of the sleeve 3013, the rotational motion of the lead screw 306 can be converted into the lifting motion of the lifting plate 301 along the second direction.

[0067] Furthermore, the mobile chassis 100 is fixedly mounted with an outer gear ring 101, and the deviation correction unit 300 further includes a third drive motor 307, which is arranged on the rotating seat 305, and the third drive wheel 3071 of the third drive motor 307 is meshed with the outer gear ring 101 for transmission. By controlling the operation of the third drive motor 307, the rotating seat 305 can be rotated under the transmission cooperation between the third drive wheel 3071 and the outer gear ring 101, so as to ensure that the front of the material picking unit 200 faces the oven 3000 when transporting the material rack 2000, thereby eliminating the angle error. A plurality of teeth are arranged at intervals on the outer gear ring 101 in a circumferential direction, and the more teeth there are, the higher the rotation accuracy of the forward transport robot.

[0068] Furthermore, at least two laser distance measuring sensors 500 are provided on the top of the main frame 201, and the laser distance measuring sensors 500 are used to detect the distance between the forward transport robot 1000 and the oven 3000; and / or a camera sensor 600 is provided on the top of the main frame 201. The specific angle deviation value of the mobile chassis 100 is calculated by the distance deviation fed back by the two laser distance measuring sensors 500, and then the deviation is eliminated by rotating the rotating seat 305. After the camera sensor 600 takes a picture of the oven 3000 and measures the displacement deviation, the deviation is corrected by the transverse plate 304.

[0069] The correction unit 300 in this embodiment has lifting and rotating functions, and can be used to accommodate the material rack 2000 of the upper and lower heating chambers 30001 of the oven 3000 and correct the parking angle deviation of the chassis. The transverse plate 304 of the correction unit 300 is used to correct the parking displacement deviation of the AGV in the third direction. The cooperation between the second drive motor 302 of the correction unit 300 and the supporting plate 202 allows the supporting plate 202 to be closer to the oven 3000. The hook 204 on the grabbing and moving seat 203 is used to push and pull the material rack 2000, so that the material rack 2000 can be transferred between the oven 3000 and the forward transport robot 1000.

[0070] Furthermore, if Figure 5 Combination Fig. 9As shown, the material taking unit 200 further includes a linkage locking mechanism 400, which includes a first follower 401, a second follower 402, and an intermediate connecting rod 406 located between the first follower 401 and the second follower 402. The first follower 401 has a first front swing arm 4011 and a second front swing arm 4012, and the first follower 401 is rotatably arranged on the carrier plate 202, and a front end limit rod 4013 is installed on the first front swing arm 4011. The second follower 402 has a first rear swing arm 4021, a second rear swing arm 4022, and a third rear swing arm 4023, and the second follower 402 is rotatably arranged on the carrier plate 202, and a rear end limit rod 4024 is installed on the first rear swing arm 4021, and the grabbing module can abut against the third rear swing arm 4023 and rotate the second follower 402. One end of the middle link 406 is hinged to the second front swing arm 4012, and the other end of the middle link 406 is hinged to the second rear swing arm 4022. When the grab module pulls the material rack 2000 into the main frame 201, the grab module continues to move backward after hitting the third rear swing arm 4023, thereby causing the second follower 402 to drive the first follower 401 to rotate. When the second follower 402 and the first follower 401 rotate simultaneously, the front limit rod 4013 and the rear limit rod 4024 can press against the side of the material rack 2000 to fix the position of the material rack 2000 in the main frame 201, avoid displacement during the movement of the mobile chassis 100, and ensure that the material rack 2000 will not fall out of the main frame 201.

[0071] Furthermore, the linkage locking mechanism 400 includes a first fixed block 403, a second fixed block 404, a guide rod 405 and a reset spring. The first fixed block 403 is mounted on the main frame 201, and the fixed block has a guide through hole. The second fixed block 404 is mounted on the intermediate connecting rod 406. One end of the guide rod 405 is connected to the second fixed block 404, and the other end of the guide rod 405 is inserted into the guide through hole. The reset spring is sleeved on the guide rod 405, and the reset spring is clamped between the second fixed block 404 and the first fixed block 403. When the grab module hits the third rear swing arm 4023, the second follower 402 drives the first follower 401 to rotate forward at the same time, the middle connecting rod 406 moves forward, the distance between the second fixed block 404 and the first fixed block 403 is reduced, and the reset spring is compressed; when the grab module moves forward and separates from the third rear swing arm 4023, the reset spring stretches and resets, the distance between the second fixed block 404 and the first fixed block 403 is increased, the middle connecting rod 406 moves backward, the second follower 402 and the first follower 401 rotate in the opposite direction at the same time, and the front end limit rod 4013 and the rear end limit rod 4024 release the material rack 2000. By adding the first fixed block 403, the second fixed block 404, the guide rod 405 and the reset spring, it is convenient for the linkage locking mechanism 400 to reset and release the material rack 2000.

[0072] The interlocking locking mechanism 400 is used to lock the material rack 2000 (when the material rack 2000 is on the forward transport robot 1000) to prevent the material rack 2000 from sliding in the main frame 201 during the movement of the forward transport robot 1000.

[0073] Furthermore, a rotating block 408 is rotatably provided on the second front swing arm 4012. The rotating block 408 is made of high-strength alloy material, and a standard threaded hole (such as M10×1.5) is processed on the rotating block 408. The rotating block 408 and the swing arm body of the second front swing arm 4012 are connected to each other with low resistance through a bearing. A stud 407 (with opposite threads at both ends and anti-rust coating treatment) is installed at one end of the intermediate connecting rod 406. The first end of the stud 407 is screwed and fixed to the internal thread of the intermediate connecting rod 406, and the second end of the stud 407 is threadedly connected to the threaded hole of the rotating block 408. By screwing the stud 407 with a tool, the screw-in depth of the stud can be precisely adjusted to achieve linear fine-tuning within the spacing range between the first follower 401 and the second follower 402, thereby adapting the spacing between the first follower 401 and the second follower 402, optimizing the adaptability of the linkage locking mechanism 400, and this design breaks through the size limitation of the traditional fixed swing arm. After the adjustment is completed, the thread glue can be used to solidify the connection to ensure the structural stability under high load conditions.

[0074] Furthermore, a roller 409 (the surface of the roller 409 is coated with polyurethane) is installed at the end of the third rear swing arm 4023, which changes the contact mode between the third rear swing arm 4023 and the grasping module from sliding friction (friction coefficient of about 0.25) to rolling friction (friction coefficient ≤ 0.05), effectively reducing the wear rate of the contact surface, reducing the wear on the outer shell of the grasping module, and extending the service life.

[0075] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A forward transport robot, characterized in that: include: A movable chassis (100) capable of being moved to the opening of the oven (3000); A material taking unit (200) comprises a main frame (201) and a grabbing module, wherein a carrying plate (202) is arranged inside the main frame (201), and the grabbing module comprises a material grabbing movable seat (203) and a lifting seat (205) having a hook (204), wherein the material grabbing movable seat (203) is arranged on the carrying plate (202) and can approach a heating cavity (30001) of the oven (3000) along a first direction, and the lifting seat (205) is arranged on the material grabbing movable seat (203) and can move along a second direction, and the hook (204) can be plugged into a groove at the bottom of the material rack (2000); A deviation correction unit (300) is arranged between the material taking unit (200) and the movable chassis (100), and the deviation correction unit (300) is used to adjust the spatial position of the material taking unit (200).

2. The forward transport robot according to claim 1, characterized in that: The carrying plate (202) is provided with a first rack (2021) extending along a first direction, and the grabbing module further comprises: A first driving motor (206) is arranged on the material grabbing moving seat (203) and is used to drive the material grabbing moving seat (203) to move along a first direction, and a first driving wheel (2061) of the first driving motor (206) is meshed with the first rack (2021) for transmission; An electric push rod is arranged on the material grabbing moving seat (203) and is used to drive the lifting seat (205) to move along the second direction, and a telescopic end of the electric push rod is connected to the lifting seat (205).

3. The forward transport robot according to claim 2, characterized in that: The carrying plate (202) is provided with a first guide member (2022) extending along a first direction, the material grabbing movable seat (203) is provided with a second guide member (2031), and the second guide member (2031) is slidably connected to the first guide member (2022); and / or The material grabbing moving seat (203) is provided with a third guide member (2032) extending along the second direction, and the lifting seat (205) is provided with a fourth guide member (2051), and the fourth guide member (2051) is slidably connected to the third guide member (2032).

4. The forward transport robot according to claim 1, characterized in that: At least two of the bearing plates (202) are arranged in the main frame (201) at intervals along the second direction, and a second rack (2023) extending along the first direction is arranged at the bottom of the bearing plate (202) located at the bottom, and the deviation correction unit (300) comprises: A lifting plate (301) capable of moving along a second direction, wherein the lifting plate (301) has a first avoidance hole (3011); A second driving motor (302) and an electric cylinder (303) are both arranged at the bottom of the lifting plate (301); The transverse plate (304) is arranged on the lifting plate (301), the telescopic end of the electric cylinder (303) is connected to the adapter (3042) of the transverse plate (304), the electric cylinder (303) is used to drive the transverse plate (304) to move along a third direction, the transverse plate (304) has a second avoidance hole (3041), and the second driving wheel (3021) of the second driving motor (302) passes through the first avoidance hole (3011) and the second avoidance hole (3041) and meshes with the second rack (2023) for transmission.

5. The forward transport robot according to claim 4, characterized in that: The lifting plate (301) is provided with a fifth guide member (3012) extending along a third direction, and the transverse plate (304) is provided with a sixth guide member (3043), and the sixth guide member (3043) is slidably connected to the fifth guide member (3012); and / or The transverse moving plate (304) is provided with a seventh guide member (3044) extending along the first direction, and the supporting plate (202) is provided with an eighth guide member (2024), and the eighth guide member (2024) is slidably connected to the seventh guide member (3044).

6. The forward transport robot according to claim 4, characterized in that: The lifting plate (301) is provided with a plurality of sleeves (3013) having internal threads, and the deviation correction unit (300) further comprises: A rotating seat (305), the lower end of which is rotatably connected to the mobile chassis (100); A plurality of lead screws (306) have one end rotatably disposed on the rotating seat (305) and the other end threadably connected to the sleeve (3013).

7. The forward transport robot according to claim 6, characterized in that: The mobile chassis (100) is fixedly mounted with an outer gear ring (101), and the deviation correction unit (300) further comprises: The third drive motor (307) is arranged on the rotating seat (305), and the third drive wheel (3071) of the third drive motor (307) is meshed with the outer gear ring (101) for transmission.

8. The forward transport robot according to claim 7, characterized in that: At least two laser distance measuring sensors (500) are arranged on the top of the main frame (201), and the laser distance measuring sensors (500) are used to detect the distance between the forward transport robot and the oven (3000); and / or, A camera sensor (600) is arranged on the top of the main frame (201).

9. The forward transport robot according to any one of claims 1 to 8, characterized in that: The material taking unit (200) further comprises a linkage locking mechanism (400), wherein the linkage locking mechanism (400) comprises: A first follower (401) having a first front swing arm (4011) and a second front swing arm (4012), wherein the first follower (401) is rotatably disposed on the bearing plate (202), and a front end limiting rod (4013) is installed on the first front swing arm (4011); The second follower (402) comprises a first rear swing arm (4021), a second rear swing arm (4022) and a third rear swing arm (4023); the second follower (402) is rotatably arranged on the bearing plate (202); a rear end limit rod (4024) is installed on the first rear swing arm (4021); the grabbing module can abut against the third rear swing arm (4023) and rotate the second follower (402); An intermediate connecting rod (406) has one end hinged to the second front swing arm (4012) and the other end hinged to the second rear swing arm (4022).

10. The forward transport robot according to claim 9, characterized in that: The linkage locking mechanism (400) comprises: A first fixing block (403) is mounted on the main frame (201), and the fixing block has a guide through hole; A second fixing block (404) is mounted on the intermediate connecting rod (406); A guide rod (405), one end of which is connected to the second fixing block (404), and the other end of which is inserted into the guide through hole; A return spring is sleeved on the guide rod (405), and the return spring is clamped between the second fixing block (404) and the first fixing block (403).

Images