Magnetic suspension rotary table

Abstract

The magnetic suspension rotary table comprises a magnetic suspension stator and a magnetic suspension rotor, the magnetic suspension rotor comprises a rotor body, a first ring edge and a second ring edge, and the magnetic suspension stator comprises a permanent magnet assembly, a first suspension control assembly, a second suspension control assembly and a magnetic guide piece. The first suspension control assembly comprises a first stator substrate, a plurality of first stator magnetic poles and first suspension windings arranged on the first stator magnetic poles; the second suspension control assembly comprises a second stator substrate, a plurality of second stator magnetic poles and second suspension windings arranged on the second stator magnetic poles, and the permanent magnet assembly is arranged between the first stator substrate and the second stator substrate. A permanent magnet bias magnetic field generated by the permanent magnet assembly forms a first magnetic field loop through the first stator substrate, the first stator magnetic pole, the first ring edge, the rotor main body, the second ring edge, the second stator magnetic pole and the second stator substrate; an electromagnetic control magnetic field generated by the first suspension control assembly forms a second magnetic field loop through the first stator magnetic pole, the first ring edge, the magnetic guide piece and the first stator substrate.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic suspension, in particular to a magnetic suspension turntable. Background Art

[0002] In semiconductor manufacturing, on the one hand, the cleanliness of the wafer is very important, because the cleanliness of the wafer surface will affect the qualification rate of subsequent semiconductor processes and products. In order to achieve ultra-clean requirements, wafers of silicon or other semiconductor materials must be processed in a controlled ultra-clean atmosphere. For example, in the wafer manufacturing process, one manufacturing step is to anneal the wafer after ion implantation. Doping imposes strain on the crystal structure. If the stress cannot be released quickly, it will cause undesirable changes in the resistivity of the ion doping. At present, rapid thermal processing (RT) is usually used for annealing. On the other hand, the processing uniformity of the wafer is very important. In order to produce uniformity, the wafer is usually rotated around the vertical axis or z-axis of the center of the wafer when processing the wafer. Rotation is also used for other wafer processing, such as chemical vapor deposition, heat treatment, ion implantation doping and other technical doping. In order to meet the stringent requirements of ultra-cleanliness and processing uniformity in semiconductor process manufacturing, semiconductor processing equipment is best to use a magnetic suspension turntable with contactless rotation drive.

[0003] At present, the magnetic suspension turntable includes a magnetic suspension stator and a magnetic suspension rotor. The magnetic suspension rotor includes a rotor body, a first ring edge and a second ring edge extending from the rotor body to the magnetic suspension stator. The magnetic suspension stator includes a first suspension control component, a second suspension control component and a permanent magnet component. The first suspension control component includes a first stator substrate, a first stator pole extending from the first stator substrate toward the first ring edge and a first suspension winding wound on the first stator pole; the second suspension control component includes a second stator substrate, a second stator pole extending from the second stator substrate toward the first ring edge and a second suspension winding wound on the second stator pole; the permanent magnet component is arranged between the first stator substrate of the first suspension control component and the second stator substrate of the second suspension control component to provide a permanent magnet bias magnetic field. In this way, the permanent magnet bias magnetic field generated by the permanent magnet of the permanent magnet component and the electromagnetic control magnetic field generated by the suspension control winding both form a magnetic field loop through the first stator substrate, the first ring edge, the rotor body, the second ring edge and the second stator substrate. The electromagnetic control magnetic field of this structure has a long magnetic circuit, which is prone to magnetic leakage during the magnetic flux return process, resulting in a low magnetic flux utilization rate. The long magnetic circuit leads to a decrease in magnetic field strength, resulting in a weak axial force of suspension control. The permanent magnet bias magnetic field and the electromagnetic control magnetic field are highly coupled, which may cause delays and instability in the control system response. In addition, due to the gravity of the magnetic suspension rotor, when the magnetic suspension rotor is suspended, the first stator magnetic pole and the first suspension winding of the suspension control component are slightly higher than the first ring edge as a whole, and the electromagnetic control magnetic field of the suspension control component is located on the same side of the first ring edge. The magnetic suspension rotor is prone to irregular axial vibration, and an additional axial control winding needs to be set to weaken or eliminate this axial vibration of the magnetic suspension rotor, which makes the control algorithm of the control system complicated and increases the hardware configuration. Summary of the invention

[0004] In order to overcome the defects in the prior art, an embodiment of the present invention provides a magnetic levitation turntable, which is used to solve at least one of the above problems.

[0005] The disclosed embodiment of the present invention discloses a magnetic suspension turntable, including a magnetic suspension stator and a magnetic suspension rotor, wherein the magnetic suspension rotor includes a rotor body, a first ring edge and a second ring edge extending from the rotor body to the magnetic suspension stator, and the magnetic suspension stator includes a permanent magnet component, a first suspension control component, a second suspension control component and a magnetic guide, wherein the first suspension control component includes a first stator substrate, a plurality of first stator poles protruding from the first stator substrate to the first ring edge, and a first suspension winding arranged on the first stator pole; the second suspension control component includes a second stator substrate, a plurality of first stator poles protruding from the second ... first suspension control component includes a first stator substrate, a plurality of first stator poles protruding from the second stator substrate to the first ring edge, and a first suspension winding arranged on the first stator pole; the first suspension control component includes a first stator substrate, a plurality of first stator poles protruding from the second stator substrate to the first ring edge, and a first suspension winding A plurality of second stator poles protruding from two ring edges and a second suspension winding arranged on the second stator poles, the permanent magnet component is axially arranged between the first stator substrate and the second stator substrate, the permanent magnet bias magnetic field generated by the permanent magnet component forms a first magnetic field loop through the first stator substrate, the first stator pole, the first ring edge, the rotor body, the second ring edge, the second stator pole, and the second stator substrate; the electromagnetic control magnetic field generated by the first suspension control component forms a second magnetic field loop through the first stator pole, the first ring edge, the magnetic guide, and the first stator substrate in sequence.

[0006] Furthermore, the magnetic guide member includes a plurality of magnetic teeth, the magnetic teeth and the first stator poles are located in the same radial plane, the radial plane is perpendicular to the axial direction, the magnetic teeth are located between two adjacent first stator poles and are magnetically connected to the first stator substrate.

[0007] Furthermore, the first stator substrate is annular, and the magnetic conductive teeth and the first stator magnetic poles are arranged on the inner side of the first stator substrate and are integrally formed with the first stator substrate.

[0008] Furthermore, the first stator substrate is annular, and the magnetic guide also includes an annular magnetic conductive base, which is axially arranged on the side of the first stator substrate facing the permanent magnet component or the side facing away from the permanent magnet component, and the magnetic conductive base is fixedly connected to the magnetic teeth by a magnetic conductive bend.

[0009] Furthermore, one magnetic conductive tooth or two magnetic conductive teeth are provided between two adjacent first stator magnetic poles.

[0010] Furthermore, the magnetic guide member includes a magnetic base and a plurality of magnetic teeth, the magnetic base is annular, the plurality of magnetic teeth are arranged on the inner side of the magnetic base, the magnetic base is axially arranged on the side of the first stator substrate facing the permanent magnet component or the side facing away from the permanent magnet component, the magnetic teeth and the first stator poles are staggered, and the magnetic teeth are circumferentially located between two adjacent first stator poles.

[0011] Furthermore, the magnetic conductive teeth are integrally formed with the magnetic conductive base.

[0012] Furthermore, one magnetic conductive tooth or two magnetic conductive teeth are provided between two adjacent first stator magnetic poles.

[0013] Furthermore, it also includes a position sensor, which is installed on the magnetic teeth.

[0014] Furthermore, a notch groove is formed on the magnetic conductive tooth, and the position sensor is installed in the notch groove.

[0015] Furthermore, the position sensor is configured as a radial displacement sensor or an axial displacement sensor or an axial-radial displacement sensor.

[0016] Furthermore, the axial radial displacement sensor includes two N-shaped magnetic conductors, an excitation coil and two induction coils, the two magnetic conductors are arranged axially, the excitation coil is sleeved on one end of the two magnetic conductors, one induction coil is sleeved on the other end of one magnetic conductor, and the other induction coil is sleeved on the other end of the other magnetic conductor, and the excitation coil and the two induction coils are spaced apart along the circumferential direction.

[0017] Furthermore, the length of the magnetic conductive teeth along the circumferential direction is smaller than the length of the first stator magnetic pole along the circumferential direction.

[0018] Furthermore, the length of the magnetically conductive teeth along the circumferential direction is less than 1 / 2 of the length of the first stator pole along the circumferential direction, and greater than 1 / 4 of the length of the first stator pole along the circumferential direction.

[0019] Furthermore, a plurality of tooth slots are formed on a side of the second stator magnetic pole facing the second ring edge, a tooth portion is formed between two adjacent tooth slots, and a rotation control winding is provided in the tooth slots.

[0020] Furthermore, a circumferential winding is provided between the first stator substrate and the second stator substrate, and the circumferential winding is arranged around the magnetic suspension rotor.

[0021] Furthermore, it also includes a lifting mechanism for driving the magnetic suspension stator in the axial direction.

[0022] The beneficial effects of the present invention are as follows: Compared with the prior art, the magnetic levitation turntable of the present invention optimizes the magnetic circuit of the control coil in the two-layer suspension control structure, guides the electromagnetic control magnetic field of the first suspension control component through the magnetic guide, and constructs a second magnetic field loop that is different from the first magnetic field loop of the permanent magnet component, thereby reducing the coupling of the permanent magnet bias magnetic field and the electromagnetic control magnetic field, improving the response speed and stability of the control system, and the second magnetic field loop does not pass through the permanent magnet component, thereby avoiding the influence of the electromagnetic control magnetic field on the permanent magnet of the permanent magnet component. In addition, according to the different relative positions of the magnetic guide and the first ring edge of the magnetic levitation rotor along the axial direction, the problem of weak axial force of suspension control or irregular axial vibration of the magnetic levitation rotor can also be solved. For example, when the axial height of the magnetic guide is the same as or approximately the same as the axial height of the first stator magnetic pole and the two are axially opposite or approximately opposite, and the axial height of the magnetic guide is the same as or approximately the same as the axial height of the magnetic suspension rotor, and the magnetic guide is slightly higher than the first ring edge in the axial direction as a whole, the magnetic guide in the second magnetic field loop can make the length of the second magnetic field loop shorter than the length of the first magnetic field loop, thereby reducing magnetic leakage; it can also increase the utilization rate of magnetic flux and improve the axial force of suspension control; when the axial height of the magnetic guide is the same as or approximately the same as the axial height of the first ring edge of the magnetic suspension rotor and the two are axially opposite When the magnetic guide is directly opposite or approximately directly opposite to the first ring edge in the axial direction, the axial height of the first stator pole is the same or approximately the same as the axial height of the first ring edge of the magnetic levitation rotor, and the first stator pole is slightly higher than the first ring edge in the axial direction, the magnetic guide in the second magnetic field loop can make the length of the second magnetic field loop shorter than the length of the first magnetic field loop, thereby reducing magnetic leakage; it can also weaken or eliminate the axial vibration of the magnetic levitation rotor, thereby achieving the purpose of eliminating the need to set up an axial control winding, simplifying related hardware and circuit configuration, simplifying the control algorithm of the control system, and thus reducing production costs.

[0023] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a structural schematic diagram of an embodiment of a magnetic suspension turntable in the prior art; Figure 2 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 1 ; Figure 3 yes Figure 2 Schematic diagram of the AA section structure; Figure 4 yes Figure 3 The structural diagram of the left part is enlarged; Figure 5 yes Figure 2 Schematic diagram of the CC section structure; Figure 6 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 2 ; Figure 7 yes Figure 6 The upper right part is a magnified schematic diagram of the structure; Figure 8 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 3 ; Fig. 9 The structure of the magnetic suspension stator of the present invention is shown in FIG. Figure 1 ; Fig.10 yes Fig. 9 The schematic diagram of the structure after the enlargement of A in the middle; Fig.11 The structure of the magnetic suspension stator of the present invention is shown in FIG. Figure 2 ; Fig.12 yes Fig.11 The schematic diagram of the structure after the enlargement of B in the middle; Fig.13 It is a structural schematic diagram of a first stator substrate in an embodiment of a magnetic suspension stator in the present invention; Fig.14 It is a structural schematic diagram of an embodiment of a magnetic suspension rotor in the present invention; Fig.15 It is a structural schematic diagram of another embodiment of the magnetic suspension stator in the present invention; Fig.16 It is a schematic diagram of the structure of a magnetic guide member in another embodiment of the magnetic suspension stator in the present invention; Fig.17 is a schematic structural diagram of a first stator substrate in another embodiment of the magnetic suspension stator of the present invention; Fig.18 It is a structural schematic diagram of another embodiment of the magnetic suspension stator in the present invention; Fig.19 It is a structural schematic diagram of a magnetic guide member in another embodiment of a magnetic suspension stator in the present invention; Fig. 20 It is a structural schematic diagram of another embodiment of the magnetic suspension turntable of the present invention; Fig.21Schematic diagram of the working relationship between the first stator magnetic pole, the first ring edge and the magnetic guide member in the present invention Figure 1 ; Fig. 22 Schematic diagram of the working relationship between the first stator magnetic pole, the first ring edge and the magnetic guide member in the present invention Figure 2 ; Fig.23 Schematic diagram of the working relationship between the first stator magnetic pole, the first ring edge and the magnetic guide member in the present invention Figure 3 . DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. The terms "including" and "having" and any variations thereof in the specification and claims of the present invention and the above-mentioned drawings are intended to cover non-exclusive inclusions, for example, a system, product or device comprising a series of units is not necessarily limited to those units clearly listed, but may include other units that are not clearly listed or inherent to these products or devices.

[0028] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more, unless otherwise clearly specified.

[0029] The drawings in this disclosure are not drawn strictly according to the actual scale, and the specific size and quantity of each structure can be determined according to actual needs. The drawings described in this disclosure are only schematic diagrams.

[0030] In the prior art, see Figure 1An embodiment of a magnetic levitation turntable, the magnetic levitation turntable includes a magnetic levitation stator and a magnetic levitation rotor, the magnetic levitation rotor includes a rotor body 21, a first rim 22 and a second rim 23 extending from the rotor body 21 to the magnetic levitation stator. The magnetic levitation stator includes a first suspension control component 12, a second suspension control component 13 and a permanent magnet component 11, the first suspension control component 12 includes a first stator substrate 121, a plurality of first stator poles 1211 protruding from the first stator substrate 121 toward the first rim, and a first suspension winding 122 wound on the first stator pole; the second suspension control component includes a second stator substrate 131, a plurality of second stator poles 1311 protruding from the second stator substrate 131 toward the second rim 23, and a second suspension winding 132 wound on the second stator pole; the permanent magnet component 11 is disposed between the first stator substrate 121 of the first suspension control component 12 and the second stator substrate 131 of the second suspension control component 13 to provide a permanent magnet bias magnetic field. In this way, Figure 1 As shown, the permanent magnet bias magnetic field generated by the permanent magnet of the permanent magnet assembly 11 and the electromagnetic control magnetic field generated by the suspension control winding form a magnetic field loop through the first stator substrate 121, the first ring edge 22, the rotor body 21, the second ring edge 23, and the second stator substrate 131. The electromagnetic control magnetic field magnetic circuit of this structure is relatively long, and leakage magnetic flux is easily generated during the magnetic flux reflux process, resulting in a low magnetic flux utilization rate, and the long magnetic circuit leads to a reduction in magnetic field strength, resulting in a weak axial force of suspension control; and the permanent magnet bias magnetic field and the electromagnetic control magnetic field are highly coupled, which may cause delay and instability in the response of the control system. In addition, due to the gravity of the magnetic suspension rotor, when the magnetic suspension rotor is suspended, the first stator magnetic pole and the first suspension winding of the suspension control assembly are slightly higher than the first ring edge as a whole, and the electromagnetic control magnetic field of the suspension control assembly is located on the same side of the first ring edge. The magnetic suspension rotor is prone to axial irregular vibration, and an additional axial control winding needs to be set to weaken or eliminate this axial vibration of the magnetic suspension rotor, resulting in a complex control algorithm of the control system and increased hardware configuration.

[0031] In order to enable those skilled in the art to better understand the present invention, Figure 2-23 The present invention is further described in detail with specific implementation modes.

[0032] Figure 2 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 1 ; Figure 3 yes Figure 2 Schematic diagram of the AA section structure; Figure 4 yes Figure 3 The structural diagram of the left part is enlarged; Figure 5 yes Figure 2 Schematic diagram of the CC section structure; Figure 6 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 2 ; Figure 7 yes Figure 6 The upper right part is a magnified schematic diagram of the structure; Figure 8 The structure of the magnetic suspension turntable of the present invention is shown in FIG. Figure 3 ; Fig. 9 The structure of the magnetic suspension stator of the present invention is shown in FIG. Figure 1 ; Fig.10 yes Fig. 9 The schematic diagram of the structure after the enlargement of A in the middle; Fig.11 The structure of the magnetic suspension stator of the present invention is shown in FIG. Figure 2 ; Fig.12 yes Fig.11 The schematic diagram of the structure after the enlargement of B in the middle; Fig.13 It is a structural schematic diagram of a first stator substrate in an embodiment of a magnetic suspension stator in the present invention; Fig.14 It is a structural schematic diagram of an embodiment of a magnetic suspension rotor in the present invention.

[0033] According to the embodiment of the present disclosure, see Figure 1-Figure 14 A magnetic suspension turntable includes a magnetic suspension stator 1 and a magnetic suspension rotor 2. The magnetic suspension rotor 2 includes a rotor body 21, a first ring edge 22 and a second ring edge 23 extending from the rotor body 21 to the magnetic suspension stator 1. The magnetic suspension stator 1 includes a permanent magnet component 11, a first suspension control component 12, a second suspension control component 13 and a magnetic guide 14. The first suspension control component 12 includes a first stator substrate 121, a plurality of first stator poles 1211 protruding from the first stator substrate 121 to the first ring edge 22, and a first suspension winding 122 arranged on the first stator pole 1211; the second suspension control component 13 includes a second stator substrate 131, a plurality of first stator poles 1211 protruding from the second stator substrate 131 to the second ring edge 23. 23, a plurality of second stator poles 1311 protruding from the rotor 23 and a second suspension winding 132 arranged on the second stator pole 1311, the permanent magnet component 11 is axially arranged between the first stator substrate 121 and the second stator substrate 131, the permanent magnet bias magnetic field generated by the permanent magnet component 11 passes through the first stator substrate 121, the first stator pole 1211, the first rim 22, the rotor body 21, the second rim 23, the second stator pole 1311, and the second stator substrate 131 to form a first magnetic field loop S1; the electromagnetic control magnetic field generated by the first suspension control component 12 passes through the first stator pole 1211, the first rim 22, the magnetic guide 14, and the first stator substrate 121 in sequence to form a second magnetic field loop S2. In this way, the electromagnetic control magnetic field of the first suspension control component is guided by the magnetic guide, and a second magnetic field loop different from the first magnetic field loop of the permanent magnet component is constructed, thereby reducing the coupling between the permanent magnet bias magnetic field and the electromagnetic control magnetic field, improving the response speed and stability of the control system, and the second magnetic field loop does not pass through the permanent magnet component, thereby avoiding the influence of the electromagnetic control magnetic field on the permanent magnet of the permanent magnet component. In particular, see Fig.21 , Fig. 22 and Fig.23 According to the different relative positions of the magnetic guide and the first ring edge of the magnetic suspension rotor in the axial direction, the problem of weak axial force of suspension control or irregular axial vibration of the magnetic suspension rotor can also be solved. Fig.21 , the axial height of the magnetic guide 14 is the same or approximately the same as the axial height of the first stator magnetic pole 1211, and the two are axially opposite or approximately opposite, the axial height of the magnetic guide 14 is the same or approximately the same as the axial height of the first ring edge 22 of the magnetic suspension rotor, and the magnetic guide 14 is slightly higher than the first ring edge 22 in the axial direction as a whole, the magnetic guide in the second magnetic field loop can make the length of the second magnetic field loop shorter than the length of the first magnetic field loop, thereby reducing magnetic leakage; it can also increase the utilization rate of magnetic flux and improve the axial force of suspension control. See Fig. 22 and Fig.23 When the axial height of the magnetic guide 14 is the same or approximately the same as the axial height of the first ring edge 22 of the magnetic levitation rotor and the two are axially opposite or approximately opposite, or the magnetic guide 14 is slightly lower than the first ring edge 22 as a whole in the axial direction, the axial height of the first stator pole 1211 is the same or approximately the same as the axial height of the first ring edge 22, and the first stator pole 1211 is slightly higher than the first ring edge 22 as a whole in the axial direction, the magnetic guide in the second magnetic field loop can make the length of the second magnetic field loop shorter than the length of the first magnetic field loop, thereby reducing magnetic leakage; it can also weaken or eliminate the axial vibration of the magnetic levitation rotor, thereby achieving the purpose of eliminating the need to set up an axial control winding, simplifying related hardware and circuit configuration, simplifying the control algorithm of the control system, and thereby reducing production costs.

[0034] Preferably, the axial height of the magnetic guide is the same or approximately the same as the axial height of the first ring edge of the magnetic suspension rotor and the axial height of the first stator magnetic pole. Here, approximately the same can be understood as the size change caused by the processing error. However, it is not limited to this. In other embodiments, the three can also have a height difference within a certain range. This height difference is required not to cause the failure of the first magnetic field loop and the second magnetic field loop. For example, the axial height of the first stator magnetic pole is less than the axial height of the first ring edge of the magnetic suspension rotor and greater than half of the axial height of the first ring edge of the magnetic suspension rotor. For example, the axial height of the first stator magnetic pole is 2 / 3 or 3 / 4 of the axial height of the first ring edge of the magnetic suspension rotor. Similarly, this size relationship between the two can also be exchanged. For the same reason, the axial height of the magnetic guide can be less than the axial height of the first ring edge of the magnetic suspension rotor and greater than half of the axial height of the first ring edge of the magnetic suspension rotor. For example, the axial height of the magnetic guide is 2 / 3 or 3 / 4 of the axial height of the first ring edge of the magnetic suspension rotor. Similarly, this size relationship between the two can also be exchanged. By the same token, the dimensional relationship between the axial height of the magnetic guide and the axial height of the first stator pole may also be as described above.

[0035] Among them, the fact that the magnetic guide is axially facing or approximately facing the first ring edge of the magnetic suspension rotor can be understood as when the magnetic suspension rotor is stably suspended, the axial center plane of the magnetic guide is flush with the axial center plane of the first ring edge. Similarly, the fact that the magnetic guide is slightly lower than the first ring edge as a whole in the axial direction can be understood as when the magnetic suspension rotor is stably suspended, the axial center plane of the magnetic guide is lower than the axial center plane of the first ring edge. In this way, due to the effect of the gravity of the magnetic suspension rotor, when the magnetic suspension rotor is stably suspended, the axial center plane of the first stator magnetic pole is higher than the axial center plane of the magnetic suspension rotor, and when the basic permanent magnetic bias magnetic field of the first stator magnetic pole and the electromagnetic control magnetic field of the suspension control winding are applied to the first ring edge of the magnetic suspension rotor, an upward pulling force is exerted. When this force is balanced with the gravity of the magnetic suspension rotor, the magnetic suspension rotor is stably suspended in the axial direction. When the axial position of the magnetic suspension rotor needs to be changed, the suspension height of the magnetic suspension rotor can be increased or decreased in a small range by increasing or decreasing the current of the suspension control winding. Since the magnetic guide is axially opposite to the first ring edge of the magnetic suspension rotor or the magnetic guide is slightly lower than the first ring edge in the axial direction as a whole. When the magnetic suspension rotor vibrates axially, the magnetic field passing through the magnetic guide and the first ring edge can play a role in damping the rotor deviation. For example, compared with the electromagnetic control magnetic field of the suspension control component in the prior art located on the same side of the first ring edge, when the magnetic suspension rotor deviates axially upward from the suspension position, the magnetic guide plays a role in dragging the magnetic suspension rotor downward, and when the magnetic suspension rotor deviates axially downward from the suspension position, the magnetic guide plays a role in dragging the magnetic suspension rotor upward, thereby achieving the purpose of weakening or eliminating the irregular axial vibration of the magnetic suspension rotor. In this way, for the entire control system, the axial control winding and related hardware and software configurations can be omitted.

[0036] Among them, the permanent magnet bias magnetic field generated by the permanent magnet component 11 passes through the first stator substrate 121, the first stator pole 1211, the first rim 22, the rotor body 21, the second rim 23, the second stator pole 1311, and the second stator substrate 131 to form a first magnetic field loop S1. It can be understood that most of the permanent magnet bias magnetic field passes through the first magnetic field loop, and theoretically, a small part of the permanent magnet bias magnetic field may also pass through the magnetic guide; similarly, the electromagnetic control magnetic field generated by the first suspension control component 12 passes through the first stator pole 1211, the first rim 22, the magnetic guide 14, and the first stator substrate 121 in sequence to form a second magnetic field loop S2. It can be understood that most of the electromagnetic control poles pass through the second magnetic field loop, and theoretically, a small part of the electromagnetic control magnetic field also passes through the first magnetic field loop.

[0037] in, Figure 4 The schematic diagram shows the general direction of the first magnetic field loop S1. It should be noted that: Figure 4It only shows the approximate positional relationship between the first ring edge of the magnetically suspended rotor and the first stator pole, not the suspension position. Figure 1 Due to the gravity of the magnetically suspended rotor, the first stator pole and the first suspension winding of the suspension control assembly may be slightly higher than the first ring edge as a whole.

[0038] According to the embodiment of the present disclosure, see Figure 6 , Figure 7 , Fig. 9 , Fig.11 and Fig.12 , the magnetic guide 14 includes a plurality of magnetic teeth 141, the magnetic teeth 141 and the first stator pole 1211 are located in the same radial plane, the radial plane is perpendicular to the axial direction, and the magnetic teeth 141 are located between two adjacent first stator poles 1211 and are magnetically connected to the first stator substrate 121. In this way, the magnetic teeth are arranged in the same layer as the first stator pole, and the electromagnetic control magnetic field of the first suspension winding of the first suspension control component is in the same radial plane, and the circumferential distribution is relatively uniform, which is conducive to improving the suspension stability, and when the magnetic suspension rotor is stably suspended, the axial center plane of the first stator pole and the magnetic teeth of the magnetic guide are higher than the axial center plane of the magnetic suspension rotor, which can play a role in improving the axial force of the suspension control. In other embodiments, the magnetic teeth can also be arranged in staggered layers with the first stator pole, that is, the magnetic teeth and the first stator pole are located in different radial planes.

[0039] According to the embodiment of the present disclosure, see Fig.13 The first stator substrate 121 is annular, and the magnetic teeth 141 and the first stator poles 1211 are arranged on the inner side of the first stator substrate and are integrally formed with the first stator substrate. The magnetic teeth are integrally formed with the first stator substrate and the first stator poles, for example, by laminating multiple layers of cut silicon steel sheets, which can reduce the number of parts, simplify the structure and reduce the assembly cost.

[0040] The present invention does not limit the number of the first stator magnetic poles of the first stator substrate. Preferably, according to the embodiment of the present disclosure, the first stator substrate is formed with three or four first stator magnetic poles arranged at equal intervals along the circumference of the magnetic suspension rotor on one side thereof facing the magnetic suspension rotor. Fig.13 The first suspension control assembly includes four first stator magnetic poles 1211. The four first stator magnetic poles 1211 are arranged at equal intervals in the circumferential direction, and a magnetic tooth 141 is provided between two adjacent first stator magnetic poles 1211. The magnetic guide 14 includes a total of four magnetic teeth 141. The present invention does not limit the number of magnetic teeth between two adjacent first stator magnetic poles. Preferably, see Fig.12A magnetic tooth 141 is provided between two adjacent first stator poles 1211. In other embodiments, two magnetic teeth may be provided between two adjacent first stator poles. Providing two magnetic teeth means two independently separated magnetic protrusions, and the electromagnetic control magnetic fields of two adjacent first suspension windings are relatively separated. One magnetic tooth means a single magnetic protrusion, and the electromagnetic control magnetic fields of two adjacent first suspension windings share one magnetic tooth to guide the magnetic field.

[0041] The first suspension control component 12 and the second suspension control component 13 are configured to apply suspension force to the magnetic suspension rotor 2. The first suspension control component 12 includes a first stator substrate 121, a plurality of first stator poles 1211 protruding from the first stator substrate 121 to the first ring edge 22, and a first suspension winding 122 disposed on the first stator poles 1211; the second suspension control component 13 includes a second stator substrate 131, a plurality of second stator poles 1311 protruding from the second stator substrate 131 to the second ring edge 23, and a second suspension winding 132 disposed on the second stator poles 1311. Fig.14The rotor 2 includes a rotor body 21, a first rim 22 and a second rim 23 extending from the rotor body 21 to the magnetic suspension stator 1, and the second rim 23 can be hollowed out at equal intervals to form a plurality of rotor poles 231. In one embodiment, the first suspension winding 122 and the second suspension winding 13 are concentrated windings, and the first suspension control component and the second suspension control component include a +X winding coil and a magnetic pole, a -X winding coil and a magnetic pole, a +Y winding coil and a magnetic pole, and a -Y winding coil and a magnetic pole. By increasing the current of the +X winding coil and / or reducing the current of the -X winding coil, the force applied by the +X winding coil and the magnetic pole to the magnetic suspension rotor 2 along the -X direction is greater than the force applied by the -X winding coil and the magnetic pole to the magnetic suspension rotor 2 along the +X direction, and the magnetic suspension rotor 2 moves along the -X direction of the magnetic suspension stator 1. Conversely, the magnetic suspension rotor 2 moves along the +X direction of the magnetic suspension stator 1, thereby realizing active control of the magnetic suspension rotor in the x degree of freedom. Based on the same principle, the rotor 2 can be moved along the -Y direction of the magnetic suspension stator 1, and vice versa, the magnetic suspension rotor 2 can be moved along the +Y direction of the magnetic suspension stator 1, thereby realizing active control of the magnetic suspension rotor in the y degree of freedom. It should be noted that the +X winding coil and magnetic pole, -X winding coil and magnetic pole, +Y winding coil and magnetic pole, and -Y winding coil and magnetic pole here can be a single winding coil and a single magnetic pole, or a resultant force generated by multiple winding coils and multiple magnetic poles. The magnetic field force generated by all +X winding coils and magnetic poles, -X winding coils and magnetic poles, -X winding coils and magnetic poles, and -Y winding coils and magnetic poles of the first suspension control component and the second suspension control component is used to offset the gravity exerted on the axial direction of the magnetic suspension rotor, thereby maintaining balance in the axial direction, and jointly increasing or reducing the current of the +X winding coil, -X winding coil, -X winding coil, and -Y winding coil can achieve the purpose of adjusting the axial position of the magnetic suspension rotor.

[0042] According to the embodiment of the present disclosure, see Figure 3 and Figure 4 The permanent magnet assembly 11 can be configured as a permanent magnet ring, which is clamped between the first suspension control assembly 12 and the second suspension control assembly 13. The permanent magnet assembly can also be configured to include multiple permanent magnet modules, see Figure 2, multiple permanent magnet modules are evenly arranged in the circumferential direction, and multiple permanent magnet modules are clamped between the first suspension control component 12 and the second suspension control component 13. The permanent magnet component 11 is configured to apply a permanent magnet bias magnetic field to the magnetic suspension rotor 2. In one embodiment, the number of the multiple first stator poles 121 and the number of the multiple permanent magnet modules are both 4, and each permanent magnet module is opposite to a first stator pole 1211 in the circumferential direction. In this way, the number of the first stator poles 121 is the same as the number of the permanent magnet module setting positions, and both are 4, so that the four first stator poles 121 are arranged on two vertical degrees of freedom (x degree of freedom, y degree of freedom) of the magnetic suspension rotor 2. Since the permanent magnet bias magnetic field provided by the four permanent magnet modules is balanced on each first stator pole 121, the force applied to the magnetic suspension rotor 2 by the four first stator poles 121 evenly distributed in the circumferential direction must be balanced. Examples of permanent magnets include, but are not limited to, samarium cobalt, neodymium iron boron, and ferrite. In one embodiment, see Figure 4 The permanent magnet module includes a plurality of permanent magnets 111 and a carrier block 112 for carrying the permanent magnets, and the permanent magnets are accommodated in grooves on the carrier block.

[0043] According to the embodiment of the present disclosure, see Figure 2 and Figure 8 , a plurality of tooth slots 134 are formed on the side of each second stator pole 132 facing the magnetic suspension rotor 2, and a tooth portion 135 is formed between two adjacent tooth slots 134. Preferably, a tooth slot gap 133 is formed between two adjacent second stator poles 132, and the tooth slot gap 133 is configured as a tooth slot 134. In this way, a rotation control winding for rotation control can be arranged in the tooth slot 134 to realize the rotation control of the magnetic suspension rotor 2, and the second suspension winding 132 is arranged on the side of the rotation control winding facing away from the magnetic suspension rotor 2, and the permanent magnetic bias magnetic field generated by the permanent magnet module is sequentially guided to the tooth portion 135 through the second stator pole 132 (the iron core of the second suspension winding), and an air gap is formed between the tooth portion 135 and the rotor pole 231 of the magnetic suspension rotor 2, so as to realize the integrated design of motor rotation control and suspension control, optimize the motor rotation control structure and suspension control structure, and achieve the purpose of compact structure. The rotation control winding can be a centralized winding, and the tooth portion is configured as the iron core of the centralized winding, and the centralized winding is wound on the corresponding tooth portion. In another embodiment, the rotation control winding can also be designed as a distributed winding, see Figure 2 A plurality of tooth slots 134 are arranged on a side of the second suspension winding 132 facing the magnetic suspension rotor 2 . Figure 2 The distributed windings are omitted.

[0044] According to an embodiment of the present disclosure, the magnetic suspension turntable further includes a position sensor, which is mounted on the magnetically conductive teeth. The position sensor is used to detect the radial displacement or axial displacement or axial radial displacement of the magnetic suspension rotor. For example, the position sensor can be configured as a radial displacement sensor, and can also be configured as an axial displacement sensor.

[0045] According to the embodiment of the present disclosure, see Fig. 9 , Fig.10 and Fig.13 Preferably, the position sensor is configured as an axial radial displacement sensor 3. Preferably, a notch groove 1411 is formed on the magnetic tooth 141, and the position sensor is installed in the notch groove 1411. Specifically, the axial radial displacement sensor 3 includes two n-shaped magnetizers 31, an excitation coil 32 and two induction coils 33, the two magnetizers 31 are arranged axially, the excitation coil 32 is sleeved on one end of the two magnetizers 31, one induction coil 33 is sleeved on the other end of one magnetizer 31, and the other induction coil 33 is sleeved on the other end of the other magnetizer 31, and the excitation coil 32 and the two induction coils 33 are arranged at intervals along the circumferential direction. In this way, the two magnetizers 31 are arranged axially along the magnetic suspension rotor 2, each magnetizer 31 is sleeved with an induction coil 33, and the two magnetizers 31 are sleeved with an excitation coil 32. Among them, the excitation coil 32 is configured to detect the radial displacement of the rotor, and the two induction coils 33 are configured to detect the axial displacement of the rotor. In this way, the mutual induction magnetic field between the excitation coil and the induction coil changes when the magnetic suspension rotor undergoes radial or axial displacement. The radial displacement of the rotor is measured by the excitation coil, and the axial displacement of the rotor is measured by the two induction coils, so that the function of measuring the radial and axial displacement of the rotor can be realized. At the same time, the displacement measurement is combined with the stator of the magnetic suspension turntable. With the help of the first ring edge of the magnetic suspension rotor, the axial radial displacement sensor can detect the position information of the magnetic suspension rotor through the cavity wall of the vacuum cavity, thereby realizing the combination of the position detection of the magnetic suspension rotor and the stator structure, with a compact structure and high sensitivity. Since the two induction coils for measuring the axial displacement of the magnetic suspension rotor are located at the same angular position on the circumference of the rotor, the calculation amount of the processor during the axial displacement measurement can be reduced. The embodiment of the present invention does not need to make a through hole on the vacuum cavity and use a fluororubber sealing ring, and does not need to replace the sealing ring, so as to solve the problems of recalibration and installation errors after assembling the sensor, and can better meet the ultra-clean and high-temperature environment requirements of semiconductor processing equipment, and can solve the problem of messy cable connections of multiple position sensors, and can also greatly reduce the number of sensors used in the magnetic suspension turntable.

[0046] According to the embodiment of the present disclosure, see Fig.10 and Fig.12, the excitation magnetic field of the excitation coil 32 directly forms a magnetic field loop through the two magnetizers 31 and the first ring edge 22 of the magnetic suspension rotor 2; the induced magnetic field of the two induction coils 33 also directly forms a magnetic field loop through the magnetizers 31 and the first ring edge 22. The principle of measuring the radial displacement of the rotor by the excitation coil is: due to the height of the excitation coil covering the first ring edge of the rotor in the axial direction, when the rotor moves radially, the magnetic flux density of the excitation coil remains constant, and the magnetomotive force follows the change of magnetic resistance. The change of magnetic resistance depends on the air gap between the first ring edge of the rotor and the magnetizer of the excitation coil, and the change of magnetomotive force caused by the change of air gap is approximately linearly related to the radial displacement of the rotor. Therefore, the radial displacement of the rotor can be detected according to the magnetomotive force (current) output of the excitation coil. The principle of measuring the axial displacement of the rotor through two induction coils is as follows: when the first ring edge of the rotor is located in the middle of the two induction coils, the magnetic flux density of the two induction coils is the same, and the voltage of the differential output of the two induction coils is zero; when the rotor moves axially downward or upward, the magnetic flux density of one induction coil increases, and the magnetic flux density of the other induction coil decreases, and the magnetic flux density of the two induction coils changes and is no longer equal, and the value of the differential output is no longer 0, but is approximately linearly related to the axial displacement of the rotor. Therefore, the axial displacement of the rotor can be detected based on the differential output of the two induction coils.

[0047] In one embodiment, an embodiment of one excitation coil and two induction coils is provided. However, it is not limited thereto. In other embodiments, the axial radial displacement sensor may also include an excitation coil group and two induction coil groups, wherein the excitation coil group includes at least one excitation coil 32, and the induction coil group includes at least two induction coils 33.

[0048] According to the embodiment of the present disclosure, see Fig.10 The shaft radial displacement sensor 3 includes an excitation coil and two induction coil groups. The induction coil group includes two induction coils. The two induction coils can be set to be connected in series or in parallel according to actual needs. For example, the two induction coils are connected in series to enhance the output signal of the induction coil, such as the output voltage or output current, so as to achieve the purpose of improving the sensitivity of the shaft radial displacement sensor to detect axial displacement. In the above embodiments, an excitation coil is set on the magnetic conductor, but it is not limited to this. In other embodiments, two excitation coils can also be set on the magnetic conductor. By connecting different excitation coils in series or in parallel, the purpose of adjusting the expected output magnetomotive force is achieved.

[0049] According to the embodiment of the present disclosure, see Fig.10 and Fig.12 The cross section of the magnetizer 31 is square, the axial heights of the two magnetizers 31 are the same, the two magnetizers 31 are arranged along the axial direction of the rotor, and the two ends of each magnetizer are located in the same horizontal plane, which can simplify the manufacturing process and ensure uniform magnetic field distribution of the axial radial displacement sensor.

[0050] According to the embodiment of the present disclosure, see Figure 5 The axial height of the first ring edge 22 of the rotor is between the lower surface of one of the two magnetizers and the upper surface of the other magnetizer, and the axial movement range of the first ring edge 22 is: the upper surface of the first ring edge does not exceed the upper surface of the upper magnetizer, and the lower surface of the first ring edge does not exceed the lower surface of the lower magnetizer. In this way, it can be ensured that the axial movement of the rotor is within the axial height range of the excitation coil, that is, it will not affect the radial displacement measurement of the excitation coil, and improve the accuracy of sensor detection.

[0051] According to the embodiment of the present disclosure, see Fig.12 , a magnetic shielding sheet 35 is provided between the two magnetizers 31. By providing the magnetic shielding sheet 35 between the two magnetizers, magnetic field coupling between the two magnetizers can be avoided. In one embodiment, the magnetic shielding sheet 35 is provided between the middle parts of the two magnetizers 31, and is fastened together by fasteners to form a sensor assembly. Preferably, an insulating protective layer is formed outside the excitation coil and the induction coil by potting. The sensor assembly as a whole can be installed in the magnetic levitation stator of the magnetic levitation turntable. Preferably, see Fig.12 The sensor assembly is fastened to the magnetic tooth 141 by fasteners, and the two magnetic conductors 31 , the excitation coil 32 and the induction coil 33 of the axial radial displacement sensor are located in the notch groove 1411 on the magnetic tooth 141 .

[0052] According to the embodiment of the present disclosure, see Figure 6 and Fig.11The magnetic suspension turntable includes four axial radial displacement sensors 3, which are correspondingly arranged on four magnetic conductive teeth 141, and the four axial radial displacement sensors 3 are divided into two mutually orthogonal groups, each group including two axial radial displacement sensors 3 arranged radially symmetrically. In this way, the four axial radial displacement sensors 3 constitute two position sensor pairs, each position sensor pair includes two axial radial displacement sensors, and the two position sensor pairs are arranged orthogonally to each other; the position detection of the rotor in two orthogonal directions (x degree of freedom direction and y degree of freedom direction) can be realized, and a pair of differential sensors are formed by using two radially symmetrical axial radial displacement sensors to form a differential signal, which can achieve the purpose of improving the sensitivity of radial displacement detection. At the same time, the four axial radial displacement sensors are evenly distributed in the circumferential direction. When the axial displacement of the rotor is detected by the four axial radial displacement sensors, the average can be calculated to eliminate the problem of inaccurate axial displacement detection due to rotor tilt. In other embodiments, the magnetic suspension turntable may also include three of the axial radial displacement sensors, which are correspondingly arranged on three magnetic conductive teeth 141, and the three axial radial displacement sensors are evenly distributed in the circumferential direction. In this way, by evenly distributing the three-axis radial displacement sensors in the circumferential direction, the average can be calculated when detecting the axial displacement of the rotor to eliminate the problem of inaccurate axial displacement detection due to rotor tilt. And through the components of the three-axis radial displacement sensors in two orthogonal directions (x-degree of freedom direction and y-degree of freedom direction), the function of detecting the radial displacement of the rotor can also be realized.

[0053] The present invention has no limitation on the length of the magnetic teeth along the circumferential direction. Preferably, see Figure 6 and Fig.11 , the length of the magnetic tooth 141 along the circumferential direction is less than the length of the first stator pole 1211 along the circumferential direction. Since the magnetic tooth 141 is used to guide the electromagnetic control magnetic field generated by the first suspension winding of the first suspension control component and is arranged circumferentially together with the first stator pole, if the circumferential length of the magnetic tooth is longer, the length of the first suspension winding will be reduced, thereby weakening the power output of the first suspension control component. If the circumferential length of the magnetic tooth is too short, it may cause magnetic flux concentration, making the magnetic density in certain areas too high, and easily reach magnetic saturation. And if the circumferential length of the magnetic tooth is too short, it may also increase the eddy current path, resulting in higher eddy current losses. By reasonably designing the circumferential length of the magnetic tooth, the magnetic conductivity of the material can be maximized in specific applications, and the efficiency and reliability of the system can be improved. Preferably, the circumferential length of the magnetic tooth is less than 1 / 2 of the circumferential length of the first stator pole, and greater than 1 / 4 of the circumferential length of the first stator pole.

[0054] In the above embodiment, the magnetic teeth 141 of the magnetic guide member 14 are integrally formed with the first stator substrate. However, this is not limited to this. In other embodiments, the magnetic teeth can also be independent components. Fig.15 , Fig.16 and Fig.17 In another embodiment of the magnetic suspension stator, the magnetic guide 14 includes an annular magnetic conductive base 142 and a plurality of magnetic conductive teeth 141, and the magnetic conductive base 142 and the magnetic conductive teeth 141 are fixedly connected by a magnetic conductive bend 143. In this way, the magnetic conductive teeth 141 and the first stator magnetic poles 1211 are still located in the same radial plane. The first stator substrate 121 is annular, and a plurality of first stator magnetic poles 1211 protruding toward the first ring edge 22 are integrally formed on the inner side of the first stator substrate 121. For example, see Fig.17 , schematically shows a situation where four first stator magnetic poles 1211 are arranged in the first stator substrate 121. Fig.15 During assembly, the magnetic teeth 141 are located between two adjacent first stator poles 1211 and are magnetically connected to the first stator substrate 121. The magnetic base 142 can be axially arranged on the side of the first stator substrate 121 facing away from the permanent magnet assembly 11. In other embodiments, the magnetic base 142 can also be axially arranged on the side of the first stator substrate 121 facing the permanent magnet assembly 11. In this case, the magnetic teeth 141 can still be connected through the magnetic bend 143, so that the magnetic teeth 141 and the first stator pole 1211 are located in the same radial plane.

[0055] Similarly, in this embodiment, one magnetic tooth 141 may be provided between two adjacent first stator magnetic poles 1211, and two magnetic teeth may also be provided. Providing two magnetic teeth means two independently separated magnetic protrusions, and the electromagnetic control magnetic fields of two adjacent first suspension windings are relatively separated. One magnetic tooth means a single magnetic protrusion, and the electromagnetic control magnetic fields of two adjacent first suspension windings share one magnetic tooth to guide the magnetic field.

[0056] In the above embodiment, the magnetic teeth 141 and the first stator pole 1211 are located in the same radial plane. However, this is not limiting. In other embodiments, the magnetic teeth 141 and the first stator pole 1211 may also be arranged in staggered layers. Fig.18 and Fig.19In another embodiment of the magnetic suspension stator, the magnetic guide 14 includes a magnetic conductive matrix 142 and a plurality of magnetic conductive teeth 141. The magnetic conductive matrix 142 is annular, and the plurality of magnetic conductive teeth 141 are arranged on the inner side of the magnetic conductive matrix 142. The magnetic conductive matrix 142 is axially arranged on the side of the first stator substrate 121 facing the permanent magnet assembly 11 or the side facing away from the permanent magnet assembly 11. The magnetic conductive teeth 141 and the first stator magnetic poles 1211 are arranged in staggered layers, and the magnetic conductive teeth 141 are located between two adjacent first stator magnetic poles 1211 along the circumferential direction. Preferably, the magnetic conductive matrix 142 is axially arranged on the side of the first stator substrate 121 facing away from the permanent magnet assembly 11, so that when the magnetic suspension rotor is stably suspended, the magnetic conductive teeth of the magnetic guide are axially opposite or approximately opposite to the first ring edge of the magnetic suspension rotor, or the magnetic conductive teeth of the magnetic guide are axially slightly lower than the first ring edge as a whole. When the magnetic suspension rotor vibrates axially, the magnetic field passing through the magnetic teeth of the magnetic guide and the first ring edge can play a role in damping the rotor deviation. For example, compared with the electromagnetic control magnetic field of the suspension control component in the prior art located on the same side of the first ring edge, when the magnetic suspension rotor deviates axially upward from the suspension position, the magnetic guide plays a role in dragging the magnetic suspension rotor downward, and when the magnetic suspension rotor deviates axially downward from the suspension position, the magnetic guide plays a role in dragging the magnetic suspension rotor upward, thereby achieving the purpose of weakening or eliminating the irregular axial vibration of the magnetic suspension rotor. In this way, for the entire control system, the axial control winding and related hardware and software configurations can be omitted.

[0057] Similarly, in this embodiment, one magnetic conductive tooth 141 may be provided between two adjacent first stator poles 1211 , or two magnetic conductive teeth may be provided.

[0058] According to the embodiment of the present disclosure, see Fig.19 The magnetic teeth 141 are integrally formed with the magnetic base 142. Preferably, a notch groove 1411 is formed on the magnetic teeth 141 to facilitate installation of the position sensor.

[0059] According to the embodiment of the present disclosure, see Fig. 20The magnetic suspension turntable further comprises a circumferential winding 4, which is arranged between the first stator substrate 121 and the second stator substrate 131, and the circumferential winding is arranged around the magnetic suspension rotor 2. In this way, when the magnetic suspension turntable stops working, the circumferential winding can provide reverse excitation relative to the permanent magnet assembly to offset or partially offset the magnetic field of the permanent magnet of the permanent magnet assembly, thereby facilitating the removal and placement of the magnetic suspension rotor, and also avoiding the falling collision of the magnetic suspension rotor caused by the excessive magnetic force of the permanent magnet. In addition, the circumferential winding can also play a role in axial suspension control. For example, when the magnetic suspension rotor is stably suspended, the first stator magnetic pole and the magnetic guide member of the magnetic guide member are both higher than the axial center plane of the magnetic suspension rotor in the embodiment, and the circumferential winding can be used to weaken or eliminate the irregular axial vibration of the magnetic suspension rotor. At this time, the magnetic suspension turntable focuses on the application of improving the axial force of suspension control.

[0060] According to the embodiment of the present disclosure, see Fig. 20 The magnetic suspension turntable also includes a lifting mechanism 5 for axially driving the magnetic suspension stator 1. By driving the magnetic suspension stator through the lifting mechanism, the axial height of the magnetic suspension stator can be adjusted, thereby changing the axial height of the magnetic suspension rotor. When the magnetic suspension rotor needs to be adjusted, the function of adjusting the axial height of the magnetic suspension rotor over a large distance can be achieved.

[0061] In the above embodiments, the magnetic suspension rotor 2 is formed of a magnetic material, and examples of the magnetic material include but are not limited to permanent magnetic materials or ferromagnetic materials. Furthermore, for example, the ferromagnetic material is a soft magnetic material whose magnetic permeability is much greater than the magnetic permeability of a vacuum, and examples thereof include but are not limited to iron, cobalt, nickel and its alloys, carbon steel, silicon steel, and electrical pure iron. Examples of permanent magnetic materials include but are not limited to samarium cobalt, neodymium iron boron, and ferrite.

[0062] Since the rotor pole 231 is mainly used to cooperate with the rotation control winding to realize the rotation control of the rotor. Fig.14 , the number of rotor poles 23 is 12, and the number of first stator poles is 4. At this time, the number of rotor poles corresponding to each first stator pole is the same, and the force provided by the permanent magnetic bias magnetic field during the rotation of the rotor is balanced, thereby ensuring the stability of the rotation of the magnetic suspension turntable, and then ensuring the stability of the position of the carrier (wafer) on the turntable, ensuring that the process has high reliability.

[0063] In the above embodiments, for the convenience of explanation, the first stator substrate 121 and the magnetic guide 14 are described as two components to facilitate processing and manufacturing, but it is not limited to this. In other embodiments, the first stator substrate and the magnetic guide 14 can also be an integral structure. In the above embodiments, the stator poles and the stator substrate are described as two components, but it is not limited to this. In other embodiments, the stator poles and the stator substrate can be integrally formed. For example, the stator poles, the stator substrate, and the magnetizer are all formed of magnetic conductive materials. Further, for example, the magnetic conductive material is a ferromagnetic material; the ferromagnetic material is, for example, a soft magnetic material whose magnetic permeability is much greater than the magnetic permeability of a vacuum, and its examples include but are not limited to iron, cobalt, nickel and its alloys, carbon steel, silicon steel, and electrical pure iron.

[0064] According to the disclosed embodiments, the magnetic levitation turntable of the present invention is applied to semiconductor manufacturing, for example, rapid thermal processing and other wafer processing in semiconductor manufacturing, such as chemical vapor deposition, thermal processing, ion implantation doping and other technical doping. The present invention facilitates the integration of the axial radial displacement sensor in the stator. With the help of the first ring edge of the rotor, the axial radial displacement sensor can detect the position information of at least one degree of freedom direction (axial or / and radial) of the rotor through the cavity wall of the semiconductor processing equipment, thereby realizing the organic combination of rotor position detection and stator structure. The embodiments of the present invention do not need to make through holes on the vacuum cavity and use fluororubber sealing rings, nor do they need to replace the sealing rings, which solves the problems of recalibration and installation errors after assembling the sensor, can better meet the ultra-clean and high-temperature environment requirements of semiconductor processing equipment, and can solve the problem of messy cable connections of multiple position sensors.

[0065] In one embodiment, the magnetic levitation turntable of the disclosed embodiment also includes a carrier, and the magnetic levitation rotor 2 is supported and positioned by a plurality of support columns. The magnetic levitation stator 1 can realize various processing of the wafer supported on the carrier by driving the magnetic levitation rotor 2 and the carrier to rotate and suspend.

[0066] Specific embodiments are used in the present invention to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the technical solution and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A magnetic suspension turntable, comprising a magnetic suspension stator (1) and a magnetic suspension rotor (2), wherein the magnetic suspension rotor comprises a rotor body (21), a first ring edge (22) and a second ring edge (23) extending from the rotor body to the magnetic suspension stator, characterized in that: The magnetic suspension stator comprises a permanent magnet component (11), a first suspension control component (12), a second suspension control component (13) and a magnetic guide (14); the first suspension control component comprises a first stator substrate (121), a plurality of first stator magnetic poles (1211) protruding from the first stator substrate to the first ring edge, and a first suspension winding (122) arranged on the first stator magnetic pole; the second suspension control component comprises a second stator substrate (131), a plurality of second stator magnetic poles (1311) protruding from the second stator substrate to the second ring edge, and a first suspension winding (122) arranged on the second stator magnetic pole. A second suspension winding (132) on a stator magnetic pole, the permanent magnet component is axially arranged between the first stator substrate and the second stator substrate, the permanent magnet bias magnetic field generated by the permanent magnet component passes through the first stator substrate, the first stator magnetic pole, the first ring edge, the rotor body, the second ring edge, the second stator magnetic pole, and the second stator substrate to form a first magnetic field loop (S1); the electromagnetic control magnetic field generated by the first suspension control component passes through the first stator magnetic pole, the first ring edge, the magnetic guide, and the first stator substrate in sequence to form a second magnetic field loop (S2).

2. A magnetic levitation turntable according to claim 1, characterized in that: The magnetic guide comprises a plurality of magnetic teeth (141), wherein the magnetic teeth and the first stator magnetic poles are located in the same radial plane, the radial plane is perpendicular to the axial direction, and the magnetic teeth are located between two adjacent first stator magnetic poles and are magnetically connected to the first stator substrate.

3. The magnetic levitation turntable according to claim 2, characterized in that: The first stator substrate is annular in shape, and the magnetic conductive teeth and the first stator magnetic poles are arranged on the inner side of the first stator substrate and are integrally formed with the first stator substrate.

4. The magnetic levitation turntable according to claim 2, characterized in that: The first stator substrate is annular, and the magnetic guide also includes an annular magnetic conductive base (142), which is axially arranged on a side of the first stator substrate facing the permanent magnet component or a side facing away from the permanent magnet component, and the magnetic conductive base is fixedly connected to the magnetic conductive teeth via a magnetic conductive bend (143).

5. The magnetic levitation turntable according to claim 2, characterized in that: One magnetic conductive tooth or two magnetic conductive teeth are provided between two adjacent first stator magnetic poles.

6. The magnetic levitation turntable according to claim 1, characterized in that: The magnetic guide comprises a magnetic conductive base (142) and a plurality of magnetic conductive teeth (141), the magnetic conductive base is annular, the plurality of magnetic conductive teeth are arranged on the inner side of the magnetic conductive base, the magnetic conductive base is axially arranged on a side of the first stator substrate facing the permanent magnet component or a side facing away from the permanent magnet component, the magnetic conductive teeth are staggered with the first stator magnetic poles, and the magnetic conductive teeth are circumferentially located between two adjacent first stator magnetic poles.

7. The magnetic levitation turntable according to claim 6, characterized in that: The magnetic conductive teeth are integrally formed with the magnetic conductive base.

8. The magnetic levitation turntable according to claim 6, characterized in that: One magnetic conductive tooth or two magnetic conductive teeth are provided between two adjacent first stator magnetic poles.

9. A magnetic levitation turntable according to claim 2 or 6, characterized in that: It also includes a position sensor, which is installed on the magnetic teeth.

10. The magnetic levitation turntable according to claim 9, characterized in that: A notch groove (1411) is formed on the magnetic conductive tooth, and the position sensor is installed in the notch groove.

11. The magnetic levitation turntable according to claim 9, characterized in that: The position sensor is configured as a radial displacement sensor or an axial displacement sensor or an axial radial displacement sensor (3).

12. The magnetic levitation turntable according to claim 11, characterized in that: The axial radial displacement sensor comprises two N-shaped magnetic conductors (31), an excitation coil (32) and two induction coils (33), the two magnetic conductors being arranged along the axial direction, the excitation coil being sleeved on one end of the two magnetic conductors, one induction coil being sleeved on the other end of one magnetic conductor, and the other induction coil being sleeved on the other end of the other magnetic conductor, and the excitation coil and the two induction coils being arranged at intervals along the circumferential direction.

13. A magnetic levitation turntable according to claim 2 or 6, characterized in that: The length of the magnetic conductive teeth along the circumferential direction is smaller than the length of the first stator magnetic pole along the circumferential direction.

14. A magnetic levitation turntable according to claim 2 or 6, characterized in that: The length of the magnetic conductive teeth along the circumferential direction is less than 1 / 2 of the length of the first stator pole along the circumferential direction, and greater than 1 / 4 of the length of the first stator pole along the circumferential direction.

15. The magnetic levitation turntable according to claim 1, characterized in that: A plurality of tooth slots (134) are formed on the side of the second stator magnetic pole facing the second ring edge, a tooth portion (135) is formed between two adjacent tooth slots, and a rotation control winding is provided in the tooth slot.

16. The magnetic levitation turntable according to claim 1, characterized in that: A circumferential winding (4) is provided between the first stator substrate and the second stator substrate, and the circumferential winding is arranged around the magnetic suspension rotor.

17. The magnetic levitation turntable according to claim 1, characterized in that: It also includes a lifting mechanism (5) for driving the magnetic suspension stator in the axial direction.

Images