Double-polishing machine repair disc wheel control system and method for polishing cloth repair

By acquiring and evaluating the data of the polishing cloth and repairing wheel, and performing pressure adjustment control of the dual-polishing machine operation, the inaccuracy problem of the dual-polishing machine repairing wheel during pressure control is solved, and the service life of the polishing cloth and the stability of the production process are improved.

CN119952612BActive Publication Date: 2025-06-24QINGDAO HUAXIN JINGDIAN TECH CO LTD +1
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Patent Information

Application Number
CN202510435442.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-04-09
Publication Date
2025-06-24
Estimated Expiration
2045-04-09

AI Technical Summary

Technical Problem

In the polishing process of sapphire wafers, the double-polishing machine repair wheel is inaccurate due to the existence of the polishing cloth during pressure control, which reduces the service life of the polishing cloth and the stability of the production process.

Method used

By obtaining the surface data of the repair wheel polishing cloth, the appearance data of the dual-polishing machine repairing wheel and the historical polishing pressure data, the state evaluation of the repair wheel polishing cloth and the flatness evaluation of the dual-polishing machine repairing wheel are carried out, and the operating pressure adjustment control of the dual-polishing machine is carried out according to the evaluation results.

Benefits of technology

It improves the accuracy of pressure control of the dual-throwing machine repair wheel, extends the service life of the polishing cloth, and enhances the stability of the production process.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

The present application discloses a double-polishing machine repair disk wheel control system and method for polishing cloth repair, which relates to the technical field of data processing. Based on the surface data of the repair disk wheel and the polishing cloth, the state of the repair disk wheel and the polishing cloth is evaluated. Based on the appearance data of the double-polishing machine repair disk wheel, the flatness of the double-polishing machine repair disk wheel is evaluated. Based on the evaluation results of the state of the repair disk wheel and the polishing cloth, the evaluation results of the flatness of the double-polishing machine repair disk wheel, and the historical polishing pressure data, the operation pressure adjustment of the double-polishing machine is evaluated. According to the evaluation results of the operation pressure adjustment of the double-polishing machine, the operation pressure of the double-polishing machine repair disk wheel is adjusted and controlled. By adjusting and controlling the operation pressure of the double-polishing machine repair disk wheel, the accuracy of the control of the double-polishing machine repair disk wheel is improved, thereby achieving a better repair effect on the polishing cloth, prolonging the service life of the polishing cloth, and improving the stability of the production process.
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Description

Technical Field

[0001] This application belongs to the field of data processing, specifically a double-polishing machine repair wheel control system and method for polishing cloth repair. Background Art

[0002] Sapphire is a crystal with high hardness and stable chemical properties. The surface of the wafer after cutting may have scratches, depressions or micro-rough areas. With the continuous improvement of the quality of sapphire wafer-related products, the requirements for its surface quality are becoming increasingly strict. These defects need to be removed by polishing to make the surface of the sapphire wafer reach nanoscale smoothness, ensuring the light transmission efficiency and performance stability in subsequent optical devices. In terms of the polishing process, the main methods are single-sided polishing and double-sided polishing. For the flatness and curvature indexes required for sapphire wafers, the sapphire wafers processed by double-sided polishing equipment usually perform better. This is because during the double-sided polishing process, the wafer can rotate and revolve within a large range, thus ensuring the flatness of the polished surface of the sapphire wafer. At the same time, double-sided polishing of the sapphire wafer also achieves the balance of force on the front and back sides and synchronous polishing, further optimizing the curvature index of the sapphire. The polishing cloth is the core element for surface quality control in the sapphire wafer polishing process. The uniformity of the polishing cloth is very important for maintaining the flatness and curvature of the sapphire wafer surface. In the current sapphire wafer production process, due to the presence of the polishing cloth during pressure control of the double-polishing machine repair wheel, the pressure control is inaccurate, reducing the service life of the polishing cloth and the stability of the sapphire wafer production process. To solve the problems raised in this background art, this application designs a double-polishing machine repair wheel control system and method for polishing cloth repair. Summary of the Invention

[0003] In view of the above technical deficiencies, this application proposes a double-polishing machine repair wheel control system and method for polishing cloth repair.

[0004] To solve the above technical problems, the present invention adopts the following technical solutions: This application provides a control method for a double-polishing machine repair wheel for polishing cloth repair, which includes the following specific steps:

[0005] S1. Obtain the surface data of the repair wheel polishing cloth, the appearance data of the double-polishing machine repair wheel, and the historical polishing pressure data;

[0006] S2. Evaluate the state of the repair wheel polishing cloth based on the surface data of the repair wheel polishing cloth, and judge the qualified state of the repair wheel polishing cloth through the evaluation result of the repair wheel polishing cloth state. If the judgment is qualified, end; if the judgment is unqualified, proceed to S3;

[0007] S3. Evaluate the flatness of the double-polishing machine repair disk wheel based on the surface data of the double-polishing machine repair disk wheel. Determine the qualified state of the flatness of the double-polishing machine repair disk wheel according to the evaluation result of the flatness of the double-polishing machine repair disk wheel. If it is judged to be qualified, end; if it is judged to be unqualified, proceed to S4;

[0008] S4. Evaluate the adjustment of the operating pressure of the double-polishing machine based on the evaluation result of the state of the polishing cloth of the repair disk wheel, the evaluation result of the flatness of the double-polishing machine repair disk wheel, and the historical polishing pressure data. Control the adjustment of the operating pressure of the double-polishing machine repair disk wheel according to the evaluation result of the adjustment of the operating pressure of the double-polishing machine.

[0009] It should be noted that as an optimal technical solution of the control system and method for the double-polishing machine repair disk wheel for polishing cloth repair, the specific steps of S1 are as follows:

[0010] S11. Obtain the surface data of the polishing cloth of the repair disk wheel through a 3D scanner. Among them, the surface data of the polishing cloth of the repair disk wheel includes the data of the number of surface wrinkles of the polishing cloth of the repair disk wheel and the data of the curvature radius of each wrinkle;

[0011] S12. Obtain the surface data of the double-polishing machine repair disk wheel through a laser scanner and a laser thickness gauge. Among them, the surface data of the double-polishing machine repair disk wheel includes the thickness data of the double-polishing machine repair disk wheel, the surface measurement area data of the double-polishing machine repair disk wheel, and the position height data of each measurement point;

[0012] S13. Obtain the historical polishing pressure data through the storage component;

[0013] S14. Store the collected data in the storage component for use in the analysis process.

[0014] It should be noted that as an optimal technical solution of the control system and method for the double-polishing machine repair disk wheel for polishing cloth repair, the specific steps of S2 are as follows:

[0015] S21. Obtain the data of the number of surface wrinkles of the polishing cloth of the repair disk wheel and the data of the curvature radius of each wrinkle;

[0016] S22. Import the data of the number of surface wrinkles of the polishing cloth of the repair disk wheel and the data of the curvature radius of each wrinkle into the calculation formula for the evaluation value of the state of the polishing cloth of the repair disk wheel to calculate the evaluation value of the state of the polishing cloth of the repair disk wheel. Among them, the calculation formula for the evaluation value of the state of the polishing cloth of the repair disk wheel is: , where i is the number of surface wrinkles of the polishing cloth, i is any one of 1 to N, F is the reference wrinkle generation pressure, Ri is the curvature radius at the i-th wrinkle of the polishing cloth, v is the Poisson's ratio of the polishing cloth, E is the elastic modulus of the polishing cloth. It should be noted here that in this formula The state of the polishing cloth of the repair disk wheel is evaluated by analyzing the number of wrinkles on the surface of the polishing cloth, the reference wrinkle generation pressure, the wrinkle curvature radius, the Poisson's ratio, and the elastic modulus. The number of wrinkles reflects the deformation ability and durability of the polishing cloth. The wrinkle curvature radius reveals the degree of local bending of the polishing cloth. The Poisson's ratio is used to deduce the deformation characteristics of the polishing cloth under different stress conditions. By comprehensively analyzing the number of wrinkles on the surface of the polishing cloth, the reference wrinkle generation pressure, the wrinkle curvature radius, the Poisson's ratio, and the elastic modulus, the state of the polishing cloth of the repair disk wheel in actual application can be analyzed more comprehensively. In this formula, the method for obtaining the data of the number of wrinkles on the surface of the polishing cloth of the repair disk wheel and the data of each wrinkle curvature radius is as follows: Scan the surface of the polishing cloth with a 3D scanner to obtain the surface data of the polishing cloth, use the surface data of the polishing cloth for three-dimensional modeling, identify the number of wrinkles on the surface of the polishing cloth, and fit a curved surface through the surface data of the polishing cloth to obtain the wrinkle curvature radius.

[0017] It should be noted that as an optimal technical solution of the control system and method for the repair disk wheel of a double-polishing machine for polishing cloth repair, the judgment of the qualified state of the polishing cloth of the repair disk wheel by the evaluation result of the state of the polishing cloth of the repair disk wheel includes the following steps: Compare the evaluation value of the state of the polishing cloth of the repair disk wheel with the set threshold value of the evaluation value of the state of the polishing cloth of the repair disk wheel. If the evaluation value of the state of the polishing cloth of the repair disk wheel is greater than the threshold value of the evaluation value of the state of the polishing cloth of the repair disk wheel, it is determined that the polishing cloth of the repair disk wheel is qualified. If the evaluation value of the state of the polishing cloth of the repair disk wheel is less than or equal to the threshold value of the evaluation value of the state of the polishing cloth of the repair disk wheel, it is determined that the polishing cloth of the repair disk wheel is unqualified.

[0018] It should be noted that as an optimal technical solution of the control system and method for the repair disk wheel of a double-polishing machine for polishing cloth repair, S3 includes the following specific steps:

[0019] S31. Obtain the thickness data, measurement area data, and the height data of each measurement point position of the repair disk wheel of the double-polishing machine;

[0020] S32. Import the thickness data, measurement area data, and the height data of each measurement point position of the repair disk wheel of the double-polishing machine into the calculation formula for the evaluation value of the flatness of the repair disk wheel of the double-polishing machine to calculate the evaluation value of the flatness of the repair disk wheel of the double-polishing machine. Among them, the calculation formula for the evaluation value of flatness is: , where S is the measurement area data of the repair disk wheel of the double-polishing machine, P h (x) is the height change at each measurement point position of the repair disk wheel of the double-polishing machine, P H is the thickness of the repair disk wheel of the double-polishing machine. Here, it should be noted that in this formula The flatness of the double-polishing machine repair disk wheel surface is represented by the average value of the height changes at each measurement point position on the surface of the double-polishing machine repair disk wheel. At the same time, the influence of the thickness of the double-polishing machine repair disk wheel on the evaluation value of the flatness of the double-polishing machine repair disk wheel is also considered. In this formula, the methods for obtaining the thickness data, measurement area data, and height data of each measurement point position of the double-polishing machine repair disk wheel are as follows: A laser beam is emitted by a laser scanner to irradiate the surface of the double-polishing machine repair disk wheel to obtain a height change map of the surface of the double-polishing machine repair disk wheel. The measurement area data of the surface of the double-polishing machine repair disk wheel and the height data of each measurement point position are obtained from the height change map of the surface of the double-polishing machine repair disk wheel. The thickness data of the double-polishing machine repair disk wheel is obtained by a laser thickness gauge.

[0021] It should be noted that as an optimal technical solution of the control system and method for the double-polishing machine repair disk wheel used for polishing cloth repair, the step of judging the qualified state of the flatness of the double-polishing machine repair disk wheel through the evaluation result of the flatness of the double-polishing machine repair disk wheel includes the following steps: comparing the evaluation value of the flatness of the double-polishing machine repair disk wheel with the set threshold value of the evaluation value of the flatness of the double-polishing machine repair disk wheel. If the evaluation value of the flatness of the double-polishing machine repair disk wheel is greater than the set threshold value of the evaluation value of the flatness of the double-polishing machine repair disk wheel, it is determined that the flatness of the double-polishing machine repair disk wheel is qualified. If the evaluation value of the flatness of the double-polishing machine repair disk wheel is less than or equal to the set threshold value of the evaluation value of the flatness of the double-polishing machine repair disk wheel, it is determined that the flatness of the double-polishing machine repair disk wheel is unqualified.

[0022] It should be noted that as an optimal technical solution of the control system and method for the double-polishing machine repair disk wheel used for polishing cloth repair, S4 specifically includes the following steps:

[0023] S41. Obtain the evaluation value data of the repair disk wheel polishing cloth state, the evaluation value data of the flatness of the double-polishing machine repair disk wheel, and the historical polishing pressure data, including the historical initial polishing pressure data and the historical polishing time data;

[0024] S42. Import the evaluation value data of the repair disk wheel polishing cloth state, the evaluation value data of the flatness of the double-polishing machine repair disk wheel, and the historical polishing pressure data into the calculation formula for the adjustment value of the double-polishing machine operating pressure to calculate the adjustment value of the double-polishing machine operating pressure. Among them, the calculation formula for the adjustment value of the double-polishing machine operating pressure is: , where is the historical initial polishing pressure data, is the reference evaluation value of the repair disk wheel polishing cloth state, is the reference fluctuation value of the repair disk wheel polishing cloth state evaluation, is the reference evaluation value of the flatness of the double-polishing machine repair disk wheel, is the reference fluctuation value of the flatness evaluation of the double-polishing machine repair disk wheel, and a is the proportion weight of the evaluation value of the repair disk wheel polishing cloth state. It should be noted that in this formula Comprehensively analyze the influence of the evaluation value data of the repair disk wheel polishing cloth state and the evaluation value data of the flatness of the double-polishing machine repair disk wheel on the adjustment value of the double-polishing machine repair disk wheel operating pressure for the repair disk wheel polishing cloth state and the flatness of the repair disk wheel.

[0025] The double-polishing machine repair disc wheel control system for polishing cloth repair is implemented based on the above-mentioned double-polishing machine repair disc wheel control method for polishing cloth repair. It specifically includes a double-polishing machine information acquisition module, a polishing cloth state analysis module, a repair disc wheel state analysis module, and an operating pressure adjustment module. Among them, the double-polishing machine information acquisition module is used to acquire the surface data of the repair disc wheel polishing cloth, the appearance data of the double-polishing machine repair disc wheel, and the historical polishing pressure data;

[0026] The polishing cloth state analysis module is used to evaluate the state of the repair disc wheel polishing cloth based on the surface data of the repair disc wheel polishing cloth, and judge the qualified state of the repair disc wheel polishing cloth through the evaluation result of the repair disc wheel polishing cloth state;

[0027] The repair disc wheel state analysis module is used to evaluate the flatness of the double-polishing machine repair disc wheel based on the appearance data of the double-polishing machine repair disc wheel, and judge the qualified state of the flatness of the double-polishing machine repair disc wheel through the evaluation result of the flatness of the double-polishing machine repair disc wheel;

[0028] The operating pressure adjustment module is used to evaluate the adjustment of the operating pressure of the double-polishing machine according to the evaluation result of the repair disc wheel polishing cloth state, the evaluation result of the flatness of the double-polishing machine repair disc wheel, and the historical polishing pressure data, and perform operating pressure adjustment control on the double-polishing machine repair disc wheel according to the evaluation result of the adjustment of the operating pressure of the double-polishing machine.

[0029] An electronic device includes: a processor and a memory. Among them, a computer program that can be called by the processor is stored in the memory;

[0030] The processor executes the above-mentioned double-polishing machine repair disc wheel control method for polishing cloth repair by calling the computer program stored in the memory.

[0031] A computer-readable storage medium stores instructions. When the instructions run on a computer, the computer is made to execute the above-mentioned double-polishing machine repair disc wheel control method for polishing cloth repair.

[0032] Compared with the prior art, the beneficial effects of the present invention are as follows: The present invention obtains the surface data of the polishing cloth of the repair wheel, the appearance data of the repair wheel of the double-polishing machine, and the historical polishing pressure data. Based on the surface data of the polishing cloth of the repair wheel, the state of the polishing cloth of the repair wheel is evaluated. The qualified state of the polishing cloth of the repair wheel is judged through the evaluation result of the state of the polishing cloth of the repair wheel. Based on the appearance data of the repair wheel of the double-polishing machine, the flatness of the repair wheel of the double-polishing machine is evaluated. The qualified state of the flatness of the repair wheel of the double-polishing machine is judged through the evaluation result of the flatness of the repair wheel of the double-polishing machine. Based on the evaluation result of the state of the polishing cloth of the repair wheel, the evaluation result of the flatness of the repair wheel of the double-polishing machine, and the historical polishing pressure data, the adjustment of the operating pressure of the double-polishing machine is evaluated. The operating pressure of the repair wheel of the double-polishing machine is adjusted and controlled according to the evaluation result of the adjustment of the operating pressure of the double-polishing machine. Through the adjustment and control of the operating pressure of the double-polishing machine, the accuracy of the pressure control of the repair wheel of the double-polishing machine is improved, and then a better repair effect on the polishing cloth is achieved, the service life of the polishing cloth is extended, and better stability of the production process is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Other features, objects, and advantages of the present application will become more apparent by reading the detailed description of the non-limiting embodiments with reference to the following drawings.

[0034] Figure 1 It is a schematic diagram of the overall process of the control method for the repair wheel of the double-polishing machine for polishing cloth repair in the present application.

[0035] Figure 2 It is a schematic diagram of the process of step S1 of the control method for the repair wheel of the double-polishing machine for polishing cloth repair in the present application.

[0036] Figure 3 It is a schematic diagram of the overall framework of the control system for the repair wheel of the double-polishing machine for polishing cloth repair in the present application.

[0037] Figure 4 It is a diagram of the implementation scenario of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] To better understand the present application, more detailed descriptions of various aspects of the present application will be made with reference to the drawings. It should be understood that these detailed descriptions are only descriptions of the exemplary embodiments of the present application and do not limit the scope of the present application in any way. Throughout the specification, the same reference numerals refer to the same elements. The expression "and / or" includes any and all combinations of one or more of the associated listed items.

[0039] In the accompanying drawings, for ease of illustration, the sizes, dimensions, and shapes of the elements have been slightly adjusted. The drawings are provided by way of example and are not drawn to an exact scale. As used herein, terms such as "substantially", "approximately", and similar terms are used as terms indicating approximation, rather than terms indicating degree, and are intended to account for the inherent deviations in measured or calculated values that would be recognized by a person of ordinary skill in the art. Additionally, in this application, the order in which the steps of the processes are described does not necessarily represent the order in which these processes occur in actual operation, unless otherwise clearly specified or derivable from the context. It should also be understood that expressions such as "comprising", "including", "having", "containing", and / or "including having" in this specification are open-ended rather than closed-ended expressions, which mean that the stated features, elements, and / or components exist, but do not exclude the existence of one or more other features, elements, components, and / or their combinations. Furthermore, when an expression such as "at least one of..." appears after a list of listed features, it modifies the entire list of features, rather than just an individual element in the list. Additionally, when describing the embodiments of this application, the use of "may" means "one or more embodiments of this application". And the term "exemplary" is intended to refer to an example or illustration. Unless otherwise defined, all terms used herein (including engineering terms and technical terms) have the same meaning as the ordinary understanding of a person of ordinary skill in the art to which this application pertains. It should also be understood that unless clearly stated in this application, words defined in a common dictionary should be interpreted as having a meaning consistent with their meaning in the context of the related art, and should not be interpreted in an idealized or overly formal sense.

[0040] To solve the technical problems presented in the background art, this application provides a preferred embodiment: Please refer to Figure 4 As shown, it demonstrates the implementation scenario of this embodiment. The implementation scenario is as follows: Collect data from the information collection terminal, transmit the data to the data processing terminal, and the data processing terminal performs analysis and calculation to obtain the double-polishing machine operating pressure adjustment value.

[0041] The specific content of this embodiment is as follows:

[0042] As Figure 1 shown, a double-polishing machine repair disk wheel control system and method for polishing cloth repair includes the following specific steps:

[0043] S1. Obtain the surface data of the repair disk wheel polishing cloth, the appearance data of the double-polishing machine repair disk wheel, and the historical polishing pressure data;

[0044] As Figure 2 shown, in this embodiment, the specific steps of S1 are as follows:

[0045] S11. Obtain the surface data of the polishing cloth of the disk repair wheel through a 3D scanner. Among them, the surface data of the polishing cloth of the disk repair wheel includes the data of the number of surface wrinkles of the polishing cloth of the disk repair wheel and the data of the curvature radius of each wrinkle.

[0046] S12. Obtain the surface data of the disk repair wheel of the double-sided polishing machine through a laser scanner and a laser thickness gauge. Among them, the surface data of the disk repair wheel of the double-sided polishing machine includes the thickness data of the disk repair wheel of the double-sided polishing machine, the surface measurement area data of the disk repair wheel of the double-sided polishing machine, and the position height data of each measurement point.

[0047] S13. Obtain the historical polishing pressure data through the storage component.

[0048] S14. Store the collected data in the storage component for use in the analysis process.

[0049] S2. Evaluate the state of the polishing cloth of the disk repair wheel based on the surface data of the polishing cloth of the disk repair wheel. Judge the qualified state of the polishing cloth of the disk repair wheel through the evaluation result of the state of the polishing cloth of the disk repair wheel. If it is judged to be qualified, end. If it is judged to be unqualified, perform S3.

[0050] The specific steps of the above S2 are as follows:

[0051] S21. Obtain the data of the number of surface wrinkles of the polishing cloth of the disk repair wheel and the data of the curvature radius of each wrinkle.

[0052] S22. Import the data of the number of surface wrinkles of the polishing cloth of the disk repair wheel and the data of the curvature radius of each wrinkle into the calculation formula of the evaluation value of the state of the polishing cloth of the disk repair wheel to calculate the evaluation value of the state of the polishing cloth of the disk repair wheel. Among them, the calculation formula of the evaluation value of the state of the polishing cloth of the disk repair wheel is: , where i is the number of surface wrinkles of the polishing cloth, i is any item from 1 to N, F is the reference wrinkle generation pressure, Ri is the curvature radius at the i-th wrinkle of the polishing cloth, v is the Poisson's ratio of the polishing cloth, and E is the elastic modulus of the polishing cloth. Here, it should be noted that in this formula Evaluate the state of the polishing cloth of the disk repair wheel by analyzing the number of surface wrinkles of the polishing cloth, the reference wrinkle generation pressure, the curvature radius of the wrinkle, the Poisson's ratio, and the elastic modulus. The number of wrinkles reflects the deformation ability and durability of the polishing cloth. The curvature radius of the wrinkle reveals the degree of local bending of the polishing cloth. The Poisson's ratio is used to deduce the deformation characteristics of the polishing cloth under different stress conditions. By comprehensively analyzing the number of surface wrinkles of the polishing cloth, the reference wrinkle generation pressure, the curvature radius of the wrinkle, the Poisson's ratio, and the elastic modulus, the state of the polishing cloth of the disk repair wheel in actual application can be analyzed more comprehensively. In this formula, the data of the number of surface wrinkles of the polishing cloth of the disk repair wheel and the data of the curvature radius of each wrinkle are obtained as follows: Scan the surface of the polishing cloth through a 3D scanner to obtain the surface data of the polishing cloth, use the surface data of the polishing cloth for three-dimensional modeling, identify the number of surface wrinkles of the polishing cloth, and fit a curved surface through the surface data of the polishing cloth to obtain the curvature radius of the wrinkle.

[0053] In this embodiment, judging the qualified state of the dressing wheel polishing cloth based on the evaluation result of the dressing wheel polishing cloth state in S2 includes the following steps: comparing the evaluation value of the dressing wheel polishing cloth state with the set threshold value of the dressing wheel polishing cloth state evaluation value. If the evaluation value of the dressing wheel polishing cloth state is greater than the threshold value of the dressing wheel polishing cloth state evaluation value, it is determined that the dressing wheel polishing cloth is qualified. If the evaluation value of the dressing wheel polishing cloth state is less than or equal to the threshold value of the dressing wheel polishing cloth state evaluation value, it is determined that the dressing wheel polishing cloth is unqualified.

[0054] S3. Evaluate the flatness of the double-polishing machine dressing wheel based on the appearance data of the double-polishing machine dressing wheel, and judge the qualified state of the flatness of the double-polishing machine dressing wheel through the evaluation result of the flatness of the double-polishing machine dressing wheel. If it is judged to be qualified, the process ends. If it is judged to be unqualified, go to S4;

[0055] In this embodiment, S3 includes the following specific steps:

[0056] S31. Obtain the thickness data, measurement area data, and height data of each measurement point position of the double-polishing machine dressing wheel;

[0057] S32. Import the thickness data, measurement area data, and height data of each measurement point position of the double-polishing machine dressing wheel into the calculation formula of the flatness evaluation value of the double-polishing machine dressing wheel to calculate the flatness evaluation value of the double-polishing machine dressing wheel. The flatness evaluation value calculation formula is: , where S is the measurement area data of the double-polishing machine dressing wheel, P h (x) is the height change at each measurement point position of the double-polishing machine dressing wheel, P H is the thickness of the double-polishing machine dressing wheel. It should be noted here that in this formula The average value of the height changes at each measurement point position on the surface of the double-polishing machine dressing wheel is used to represent the flatness of the surface of the double-polishing machine dressing wheel. At the same time, the influence of the thickness of the double-polishing machine dressing wheel on the flatness evaluation value of the double-polishing machine dressing wheel is also considered. The acquisition methods of the thickness data, measurement area data, and height data of each measurement point position of the double-polishing machine dressing wheel in this formula are: irradiate the surface of the double-polishing machine dressing wheel with a laser beam emitted by a laser scanner to obtain a height change map of the surface of the double-polishing machine dressing wheel, obtain the measurement area data of the surface of the double-polishing machine dressing wheel and the height data of each measurement point position from the height change map of the surface of the double-polishing machine dressing wheel, and obtain the thickness data of the double-polishing machine dressing wheel through a laser thickness gauge.

[0058] In this embodiment, determining the qualified state of the double-polishing machine's repair wheel flatness based on the evaluation result of the double-polishing machine's repair wheel flatness in S2 includes the following steps: comparing the evaluation value of the double-polishing machine's repair wheel flatness with the set threshold of the evaluation value of the double-polishing machine's repair wheel flatness. If the evaluation value of the double-polishing machine's repair wheel flatness is greater than the set threshold of the evaluation value of the double-polishing machine's repair wheel flatness, it is determined that the double-polishing machine's repair wheel flatness is qualified. If the evaluation value of the double-polishing machine's repair wheel flatness is less than or equal to the set threshold of the evaluation value of the double-polishing machine's repair wheel flatness, it is determined that the double-polishing machine's repair wheel flatness is unqualified.

[0059] S4. Based on the evaluation result of the repair wheel polishing cloth state, the evaluation result of the double-polishing machine's repair wheel flatness, and the historical polishing pressure data, perform an evaluation on the adjustment of the operating pressure of the double-polishing machine, and control the adjustment of the operating pressure of the double-polishing machine's repair wheel according to the evaluation result of the adjustment of the operating pressure of the double-polishing machine.

[0060] In this embodiment, S4 specifically includes the following steps:

[0061] S41. Obtain the evaluation value data of the repair wheel polishing cloth state, the evaluation value data of the double-polishing machine's repair wheel flatness, and the historical polishing pressure data, including the historical initial polishing pressure data and the historical polishing time data;

[0062] S42. Import the evaluation value data of the repair wheel polishing cloth state, the evaluation value data of the double-polishing machine's repair wheel flatness, and the historical polishing pressure data into the calculation formula for the adjustment value of the operating pressure of the double-polishing machine to calculate the adjustment value of the operating pressure of the double-polishing machine. Among them, the calculation formula for the adjustment value of the operating pressure of the double-polishing machine is: , where is the historical initial polishing pressure data, is the reference evaluation value of the repair wheel polishing cloth state, is the reference fluctuation value of the repair wheel polishing cloth state evaluation, is the reference evaluation value of the double-polishing machine's repair wheel flatness, is the reference fluctuation value of the double-polishing machine's repair wheel flatness evaluation, and a is the proportion weight of the evaluation value of the repair wheel polishing cloth state. It should be noted that in this formula Comprehensively analyze the influence of the repair wheel polishing cloth state evaluation value data and the double-polishing machine's repair wheel flatness evaluation value data on the adjustment value of the operating pressure of the double-polishing machine's repair wheel. In this formula, an example is given to illustrate the value of F. For example, when polishing a workpiece, F is 11N, and the pressure setting value before adjustment is 10N, then the pressure setting value after adjustment should be 11N.

[0063] It should be noted here that the set parameters in this embodiment (such as weights, thresholds, Poisson's ratios, and elastic moduli, etc.) need to be set by those skilled in the art according to relevant experiments. The specific experimental method is as follows: Obtain the surface data of the repair wheel polishing cloth, and bring it into each step in this embodiment to evaluate the state of the repair wheel polishing cloth. At the same time, obtain the surface appearance data of the double-polishing machine repair wheel, and bring it into each step in this embodiment to evaluate the flatness of the double-polishing machine repair wheel. Import the evaluation results of the repair wheel polishing cloth state, the evaluation results of the double-polishing machine repair wheel flatness, and the historical polishing pressure data into the fitting software for continuous fitting, and output the values of the double-polishing machine operating pressure adjustment value parameters (such as weights, thresholds, Poisson's ratios, and elastic moduli, etc.) with the highest compliance.

[0064] According to the above implementation content, this embodiment has the following advantages compared with the prior art: This embodiment obtains the surface data of the repair wheel polishing cloth, the surface appearance data of the double-polishing machine repair wheel, and the historical polishing pressure data. Based on the surface data of the repair wheel polishing cloth, it evaluates the state of the repair wheel polishing cloth, and judges the qualified state of the repair wheel polishing cloth through the evaluation results of the repair wheel polishing cloth state. Based on the surface appearance data of the double-polishing machine repair wheel, it evaluates the flatness of the double-polishing machine repair wheel, and judges the qualified state of the double-polishing machine repair wheel flatness through the evaluation results of the double-polishing machine repair wheel flatness. Based on the evaluation results of the repair wheel polishing cloth state, the evaluation results of the double-polishing machine repair wheel flatness, and the historical polishing pressure data, it evaluates the adjustment of the double-polishing machine operating pressure. According to the evaluation results of the double-polishing machine operating pressure adjustment, it controls the adjustment of the operating pressure of the double-polishing machine repair wheel. By controlling the adjustment of the double-polishing machine operating pressure, it improves the accuracy of the pressure control of the double-polishing machine repair wheel, thereby achieving a better repair effect on the polishing cloth, extending the service life of the polishing cloth, and improving the stability of the production process.

[0065] Such as Figure 3As shown, this embodiment also provides a double-polishing machine repair wheel control system for polishing cloth repair, which is implemented based on the above-mentioned double-polishing machine repair wheel control method for polishing cloth repair. Specifically, it includes a double-polishing machine information acquisition module, a polishing cloth state analysis module, a repair wheel state analysis module, and an operating pressure adjustment module. Among them, the double-polishing machine information acquisition module is used to acquire the surface data of the repair wheel polishing cloth, the appearance data of the double-polishing machine repair wheel, and the historical polishing pressure data; the polishing cloth state analysis module is used to evaluate the state of the repair wheel polishing cloth based on the surface data of the repair wheel polishing cloth, and judge the qualified state of the repair wheel polishing cloth through the evaluation result of the repair wheel polishing cloth state; the repair wheel state analysis module is used to evaluate the flatness of the double-polishing machine repair wheel based on the appearance data of the double-polishing machine repair wheel, and judge the qualified state of the flatness of the double-polishing machine repair wheel through the evaluation result of the flatness of the double-polishing machine repair wheel; the operating pressure adjustment module is used to evaluate the adjustment of the operating pressure of the double-polishing machine according to the evaluation result of the repair wheel polishing cloth state, the evaluation result of the flatness of the double-polishing machine repair wheel, and the historical polishing pressure data, and perform operating pressure adjustment control on the double-polishing machine repair wheel according to the evaluation result of the operating pressure adjustment of the double-polishing machine.

[0066] For the specific steps of each unit module in the above-mentioned double-polishing machine repair wheel control system for polishing cloth repair of the present application to implement corresponding functions, reference can be made to the steps in the embodiments of the double-polishing machine repair wheel control method for polishing cloth repair in the above text, which will not be elaborated here.

[0067] This embodiment also provides an electronic device, including: a processor and a memory. Among them, the memory stores a computer program that can be called by the processor;

[0068] The processor executes the above-mentioned double-polishing machine repair wheel control method for polishing cloth repair by calling the computer program stored in the memory.

[0069] The memory can be used to store instructions, programs, codes, code sets, or instruction sets. The memory 310 may include a program storage area and a data storage area. Among them, the program storage area may store instructions for implementing the operating system, instructions for at least one function, and instructions for implementing the double-polishing machine repair wheel control method for polishing cloth repair provided in the above embodiment, etc.; the data storage area may store data involved in the double-polishing machine repair wheel control method for polishing cloth repair provided in the above embodiment, etc.

[0070] The processor may include one or more processing cores. By running or executing instructions, programs, code sets, or instruction sets stored in the memory, the processor invokes the data stored in the memory to perform various functions of this application and process data. The processor may be at least one of an application specific integrated circuit (ASIC), a digital signal processor (DSP), a digital signal processing device (DSPD), a programmable logic device (PLD), a field programmable gate array (FPGA), a central processing unit (CPU), a controller, a microcontroller, and a microprocessor. It can be understood that for different devices, the electronic devices for implementing the above processor functions may also be others, and the embodiments of this application do not make specific limitations.

[0071] It may further include a communication bus, and the communication bus may include a path for transmitting information between the above components. The communication bus may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. The communication bus may be divided into an address bus, a data bus, a control bus, etc.

[0072] This embodiment also proposes a computer-readable storage medium storing instructions, which when run on a computer, cause the computer to execute the above-mentioned double-polishing machine repair disk wheel control method for polishing cloth repair.

[0073] For example, the computer-readable storage medium can be a read-only memory, a random access memory, a read-only optical disc, magnetic tape, a floppy disk, and an optical data storage device, etc.

[0074] The above embodiments can be implemented in whole or in part by software, hardware, firmware, or any combination thereof. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. A computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer programs are loaded or executed on a computer, the processes or functions according to the embodiments of the present application are generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via a wired network or / and a wireless network. The computer-readable storage medium can be any available medium that the computer can access or a data storage device such as a server or data center that contains one or more collections of available media. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a magnetic tape), an optical medium (e.g., a DVD), or a semiconductor medium. The semiconductor medium can be a solid-state drive.

[0075] The term "comprising", "including", or any other variation thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a series of elements includes not only those elements but also other elements not expressly listed, or elements that are inherent to such process, method, article, or apparatus.

[0076] The above description is only a preferred embodiment of the present application and an explanation of the applied technical principles. Those skilled in the art should understand that the scope of the application involved in the present application is not limited to the technical solutions formed by the specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the foregoing application concept. For example, a technical solution formed by mutually replacing the above features with (but not limited to) technical features having similar functions in the present application.

Claims

1. A control method for a double polishing machine repairing wheel for repairing polishing cloth, characterized in that: include: S1, obtaining the surface data of the polishing cloth of the repairing wheel, the appearance data of the repairing wheel of the double polishing machine and the historical polishing pressure data; S2, based on the surface data of the repairing wheel polishing cloth, the repairing wheel polishing cloth status is evaluated, and the qualified status of the repairing wheel polishing cloth is judged by the evaluation result of the repairing wheel polishing cloth status. If it is judged to be qualified, then the process ends; if it is judged to be unqualified, then S3 is performed; the specific steps of S2 are: S21, obtaining data on the number of wrinkles on the surface of the polishing cloth of the repairing wheel and data on the curvature radius of each wrinkle; S22, importing the data of the number of wrinkles on the surface of the repairing wheel polishing cloth and the data of the curvature radius of each wrinkle into the repairing wheel polishing cloth state evaluation value calculation formula to calculate the repairing wheel polishing cloth state evaluation value, wherein the repairing wheel polishing cloth state evaluation value calculation formula is: , where i is the number of wrinkles on the polishing cloth surface, i is any one of 1 to N, F is the pressure generated by the reference wrinkle, Ri is the radius of curvature at the i-th wrinkle of the polishing cloth, v is the Poisson's ratio of the polishing cloth, and E is the elastic modulus of the polishing cloth; S3, evaluating the flatness of the double-polishing machine repair wheel based on the double-polishing machine repair wheel appearance data, judging the qualified state of the double-polishing machine repair wheel flatness through the evaluation result of the double-polishing machine repair wheel flatness, if it is judged to be qualified, then end, if it is judged to be unqualified, then proceed to S4; S4. According to the evaluation results of the polishing cloth state of the repair wheel, the flatness evaluation results of the repair wheel of the double-polishing machine and the historical polishing pressure data, an evaluation is performed on the operating pressure adjustment of the double-polishing machine, and the operating pressure adjustment control of the repair wheel of the double-polishing machine is performed according to the evaluation results of the operating pressure adjustment of the double-polishing machine.

2. The control method for the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 1, characterized in that: The method of judging the qualified state of the repairing wheel polishing cloth by the repairing wheel polishing cloth state evaluation result comprises the following steps: comparing the repairing wheel polishing cloth state evaluation value with the set repairing wheel polishing cloth state evaluation value threshold; if the repairing wheel polishing cloth state evaluation value is greater than the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be qualified; if the repairing wheel polishing cloth state evaluation value is less than or equal to the repairing wheel polishing cloth state evaluation value threshold, then the repairing wheel polishing cloth is judged to be unqualified.

3. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 2, characterized in that: The S3 comprises the following specific steps: S31, obtaining the thickness data of the double polishing machine repair wheel, the measurement area data and the height data of each measurement point; S32, obtaining a flatness evaluation value of the double-polishing machine repair wheel from the double-polishing machine repair wheel thickness data, the measurement area data and the position height data of each measurement point.

4. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 3, characterized in that: The method of judging the qualified state of the double-polishing machine repair wheel flatness through the double-polishing machine repair wheel flatness evaluation result includes the following steps: comparing the double-polishing machine repair wheel flatness evaluation value with the set double-polishing machine repair wheel flatness evaluation value threshold; if the double-polishing machine repair wheel flatness evaluation value is greater than the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be qualified; if the double-polishing machine repair wheel flatness evaluation value is less than or equal to the set double-polishing machine repair wheel flatness evaluation value threshold, then the double-polishing machine repair wheel flatness is judged to be unqualified.

5. The method for controlling the repairing wheel of a double polishing machine for repairing polishing cloth according to claim 4, characterized in that: The S4 specifically comprises the following steps: S41, obtaining the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data including the historical polishing initial pressure data and the historical polishing time data; S42, importing the polishing cloth state evaluation value data of the repairing wheel, the flatness evaluation value data of the repairing wheel of the double polishing machine, and the historical polishing pressure data into the double polishing machine operation pressure adjustment value calculation formula to calculate the double polishing machine operation pressure adjustment value, wherein the double polishing machine operation pressure adjustment value calculation formula is: ,in, is the historical polishing initial pressure data, For reference, the polishing cloth condition evaluation value of the repairing wheel is To evaluate the fluctuation value of the polishing cloth condition of the reference repairing wheel, For reference to the evaluation value of the flatness of the double polishing machine repair wheel, It is the fluctuation value of the flatness assessment of the repair wheel of the double-polishing machine for reference, and a is the weight of the proportion of the assessment value of the polishing cloth state of the repair wheel.

6. A control system for a double-polishing machine repairing wheel for repairing a polishing cloth, which is implemented based on the control method for a double-polishing machine repairing wheel for repairing a polishing cloth according to any one of claims 1 to 5, characterized in that: It specifically includes a double polishing machine information acquisition module, a polishing cloth state analysis module, a repair wheel state analysis module and an operation pressure adjustment module, wherein the double polishing machine information acquisition module is used to obtain the surface data of the repair wheel polishing cloth, the double polishing machine repair wheel appearance data and the historical polishing pressure data; The polishing cloth state analysis module is used to evaluate the state of the repairing wheel polishing cloth based on the surface data of the repairing wheel polishing cloth, and to judge the qualified state of the repairing wheel polishing cloth according to the evaluation result of the state of the repairing wheel polishing cloth; The repair wheel state analysis module is used to evaluate the flatness of the double polishing machine repair wheel based on the double polishing machine repair wheel appearance data, and judge the qualified state of the double polishing machine repair wheel flatness through the double polishing machine repair wheel flatness evaluation result; The operating pressure adjustment module is used to evaluate the operating pressure adjustment of the double-polishing machine according to the polishing cloth status evaluation result of the repair wheel, the flatness evaluation result of the double-polishing machine repair wheel and the historical polishing pressure data, and to adjust and control the operating pressure of the double-polishing machine repair wheel according to the operating pressure adjustment evaluation result of the double-polishing machine.

7. An electronic device comprising: A processor and a memory, wherein the memory stores a computer program that can be called by the processor; It is characterized in that the processor executes the double-polishing machine repair wheel control method for polishing cloth repair as described in any one of claims 1 to 5 by calling the computer program stored in the memory.

8. A computer-readable storage medium, characterized in that: Instructions are stored, and when the instructions are run on a computer, the computer is caused to execute the double-polishing machine repair wheel control method for polishing cloth repair as described in any one of claims 1 to 5.

Citation Information

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