Visual inspection device and wafer inspection system

Abstract

The invention relates to a visual detection device and a wafer detection system.The visual detection device comprises a plurality of light source assemblies which are integrally in an arc shape, and the light source assemblies can be driven by a first moving mechanism to be separated or enclosed to form an annular area, so that a multiple lens can enter or move out of the space between the light source assemblies more conveniently, and the multiple lens can be conveniently moved out of the space between the multiple light source assemblies. The device has the advantages of being easy to control and convenient to operate, the control difficulty can be effectively reduced under the condition that it is guaranteed that the magnification lens can move in place, and then the production cost of the device is reduced. The wafer detection system provided with the visual detection device can effectively guarantee the control precision of switching the magnification lens during detection, prevents the light source from interfering with the movement of the magnification lens, is convenient to operate and easy to control, and effectively meets the detection requirements of different wafers.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical equipment, and in particular to a visual inspection device and a wafer inspection system. Background Art

[0002] In the field of production and processing, in order to better carry out production and processing or inspection work, lenses are often needed to observe the products to be processed. In order to meet relevant processing needs, some processing or inspection equipment is often directly installed with camera modules. In order to meet different observation needs, the equipment usually needs to be equipped with lens modules with multiple magnifications of different powers to work together with the camera module, so that the equipment can be applied to more application scenarios.

[0003] At the same time, in order to avoid the impact of light and shadow problems, a ring light source will be set in the device to provide lighting for better observation.

[0004] This type of processing or detection equipment in the prior art often directly sets a single ring light source above the platform in the equipment for placing the object to be tested (or the object to be processed), and then each time the magnifying lens is replaced, the magnifying lens is controlled to move in the vertical and horizontal directions, so that each magnifying lens is inserted into the through hole in the center of the ring light source and then used in conjunction with the camera module and the ring light source.

[0005] However, this control mode requires that the accuracy of the horizontal and vertical movement control of the scope be guaranteed at the same time. This requires that the motors controlling the movement of the scope in each direction have a very high degree of coordination, which makes the control very difficult and often difficult to achieve, or the cost is very high. Summary of the invention

[0006] In view of the above-mentioned defects in the prior art, the present invention provides a visual inspection device and a wafer inspection system that are easier to control, convenient to operate, and have good accuracy.

[0007] In order to achieve the above-mentioned purpose, the visual inspection device and wafer inspection system of the present invention have the following structures:

[0008] The visual inspection device is mainly characterized in that it comprises:

[0009] A light source module, comprising a light source mechanism and a first moving mechanism, wherein the light source mechanism comprises a plurality of light source components which are in an arc shape as a whole, and the first moving mechanism comprises a plurality of first moving components whose number matches the number of the light source components, and the moving ends of the first moving components are respectively connected to the corresponding light source components;

[0010] The lens module includes a magnifying mechanism and a second moving mechanism, wherein the magnifying mechanism includes a plurality of magnifying components and a magnifying fixing component, each magnifying component is fixed on the magnifying fixing component, and the second moving mechanism includes a second moving component, and a moving end of the second moving component is connected to the magnifying fixing component;

[0011] The plurality of light source assemblies in the light source mechanism can be driven by the corresponding moving ends of the first moving assemblies to jointly enclose a ring-shaped area, and the space formed by the inner side wall of the ring-shaped area can accommodate each of the magnifying lens assemblies;

[0012] The plurality of light source assemblies can also be separated and moved in a direction away from adjacent light source assemblies under the drive of the corresponding moving end of the first moving assembly to form an avoidance channel between the light source assemblies;

[0013] The magnifying lens fixing assembly can be driven by the moving end of the second moving assembly to drive the corresponding magnifying lens assembly to move into or out of the space between the plurality of light source assemblies through the avoidance channel.

[0014] The above-mentioned visual inspection device, wherein the visual inspection device further comprises:

[0015] An image capturing module can be used in conjunction with a zoom lens assembly that enters an annular area surrounded by a plurality of the light source assemblies.

[0016] The above-mentioned visual inspection device, wherein each of the first moving components includes a first linear motor and a light source component connecting frame;

[0017] The fixed end of the first linear motor constitutes the fixed end of the first moving assembly, the movable end of the first linear motor is connected to the light source assembly connecting frame, and the movable end of the first linear motor and the light source assembly connecting frame together constitute the moving end of the first moving assembly;

[0018] The movable end of the linear motor is connected to the light source assembly through the light source assembly connecting frame.

[0019] The above-mentioned visual inspection device, wherein the fixed end of each of the first moving components further includes a first fixed plate;

[0020] The fixed end of the first linear motor is connected to the first fixing plate.

[0021] The above-mentioned visual inspection device, wherein the second moving assembly comprises a second linear motor;

[0022] The movable end of the second linear motor constitutes the movable end of the second movable assembly, and the fixed end of the second linear motor constitutes the fixed end of the second movable assembly.

[0023] The above-mentioned visual inspection device, wherein the fixed end of each of the first movable components comprises a first slide rail, the movable end of each of the first movable components comprises a first slider and a light source component connecting frame, and each of the first movable components further comprises a first driving component;

[0024] The first sliding block is arranged on the track of the first sliding rail;

[0025] The light source assembly connecting frame is respectively connected to the first sliding block and the corresponding light source assembly;

[0026] The fixed end of the first driving component is connected to the first slide rail, and the movable end of the first driving component is connected to the first sliding block. The first sliding block can move along the track of the first slide rail under the drive of the first driving component.

[0027] The above-mentioned visual inspection device, wherein the fixed end of each of the first moving components further includes a first fixed plate;

[0028] The first slide rail is fixed to the first fixing plate, and the fixed end of the first driving component is connected to the first slide rail through the first fixing plate.

[0029] The above-mentioned visual inspection device, wherein the fixed end of each second movable assembly includes a second slide rail, the movable end of each second movable assembly includes a second slider, and each second movable assembly further includes a second driving component;

[0030] The second sliding block is arranged on the track of the second sliding rail, and the second sliding block is also connected to the magnifying lens fixing assembly;

[0031] The fixed end of the second driving component is connected to the second slide rail, and the movable end of the second driving component is connected to the second slider. The second slider can move along the track of the second slide rail under the drive of the second driving component.

[0032] The above-mentioned visual inspection device, wherein the fixed end of each of the second movable components further includes a second fixed plate;

[0033] The second slide rail is fixed on the second fixing plate, and the fixed end of the second driving component is connected to the second slide rail through the second fixing plate.

[0034] In the above-mentioned visual inspection device, the light source mechanism includes two light source components arranged opposite to each other, and the first moving mechanism includes two groups of first moving components arranged opposite to each other.

[0035] The above-mentioned visual inspection device, wherein the magnifying lens mechanism includes a plurality of magnifying lens components arranged side by side on the magnifying lens fixing component, and the second movable component can drive the magnifying lens mechanism to move in a direction perpendicular to the direction in which the first movable component can drive the light source component to move.

[0036] The wafer inspection system is mainly characterized in that the system comprises a rack device and the above-mentioned visual inspection device;

[0037] The frame device comprises a visual inspection device bearing mechanism, and the fixed end of each of the first movable components and the fixed end of the second movable component are connected to the visual inspection device bearing mechanism.

[0038] The above-mentioned wafer inspection system, wherein the system further comprises a stage device;

[0039] The frame device also includes a stage bearing mechanism, and the stage device is connected to the stage bearing mechanism.

[0040] The above-mentioned wafer inspection system, wherein the wafer inspection system also includes a master control device, and the master control device is connected to the first moving component, the second moving component and the stage device respectively.

[0041] Beneficial effects of the visual inspection device and wafer inspection system of the present invention:

[0042] The visual inspection device is provided with an overall arc-shaped light source assembly. Each light source assembly can be separated or merged into an annular area under the drive of the first moving mechanism, thereby meeting the demand for providing an annular light source. At the same time, the control demand can be reduced during the switching of the zoom lens. The zoom lens mechanism only needs to move in the horizontal direction and does not need to move in the vertical direction. Such a structural design can effectively reduce the difficulty of control while ensuring that the zoom lens can be moved into place, thereby reducing the production cost of the device.

[0043] The wafer inspection system equipped with this visual inspection device can effectively ensure the control accuracy of switching the microscope during inspection and avoid interference of the light source on the movement of the microscope. It is easy to operate and control, and can effectively meet the inspection requirements for different wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The concept, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings to fully understand the purpose, characteristics and effects of the present invention.

[0045] Figure 1a It is a schematic diagram of the first viewing angle structure of a visual detection device in one embodiment.

[0046] Figure 1b It is a schematic diagram of the second viewing angle structure of the visual detection device in one embodiment.

[0047] Figure 2a It is a schematic diagram of the first state structure of the light source module in one embodiment.

[0048] Figure 2b It is a schematic diagram of the second state structure of the light source module in one embodiment.

[0049] Figure 3 It is a schematic structural diagram of a first moving component in one embodiment.

[0050] Figure 4a It is a schematic diagram of the first viewing angle structure of a lens module in one embodiment.

[0051] Figure 4b It is a schematic diagram of the second viewing angle structure of the lens module in one embodiment.

[0052] Figure 5 It is a schematic diagram of the structure of a wafer inspection system in one embodiment.

[0053] Reference numerals

[0054] 1 Visual inspection device

[0055] 11 Light source module

[0056] 1111 light source assembly

[0057] 112 First moving mechanism

[0058] 1121 First Mobile Component

[0059] 11211 Fixed end of the first linear motor

[0060] 11212 The movable end of the first linear motor

[0061] 11213 Light source assembly connection frame

[0062] 11214 First fixing plate

[0063] 12 lens module

[0064] 1211 lens assembly

[0065] 1212 lens fixing assembly

[0066] 1222 Second mobile component

[0067] 12221 Fixed end of the second linear motor

[0068] 12222 Movable end of the second linear motor

[0069] 122221Through hole

[0070] 13 Image capture module

[0071] 2 rack units

[0072] 21 Visual inspection device carrying mechanism

[0073] 22 stage bearing mechanism

[0074] 23. Master control device bearing mechanism

[0075] 3. Stage device

[0076] 4. Master control device DETAILED DESCRIPTION

[0077] In order to make the technical means, creative features, objectives and effects of the invention easier to understand, the invention is further described below with reference to specific diagrams. However, the invention is not limited to the following implementation cases.

[0078] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed by the present invention.

[0079] First embodiment:

[0080] like Figures 1a to 4b As shown, this embodiment provides a visual detection device 1, including:

[0081] The light source module 11 includes a light source mechanism and a first moving mechanism 112. The light source mechanism includes two light source components 1111 that are arranged opposite to each other and are in an arc shape as a whole, so as to effectively provide a ring light source. The first moving mechanism 112 includes two first moving components 1121 that are arranged opposite to each other. The moving ends of each first moving component 1121 are respectively connected to the corresponding light source components 1111.

[0082] The lens module 12 includes a magnification mechanism and a second moving mechanism, wherein the magnification mechanism includes four magnification components 1211 with different magnifications arranged side by side and a magnification fixing component 1212, each magnification component 1211 is fixed on the magnification fixing component 1212, and the second moving mechanism includes a second moving component 1222, and the moving end of the second moving component 1222 is connected to the magnification fixing component 1212;

[0083] The second moving component 1222 can drive the zoom mechanism to move in a direction perpendicular to the first moving component 1121 can drive the light source component 1111 to move in a direction perpendicular to each other. Such a structural design can reduce the control difficulty requirement while meeting the requirement of switching zooms.

[0084] The plurality of light source components 1111 in the light source mechanism can be driven by the corresponding moving ends of the first moving components 1121 to jointly enclose a ring-shaped area, and the space formed by the inner side wall of the ring-shaped area can accommodate each of the magnifying lens components 1211;

[0085] The plurality of light source assemblies 1111 may also be separated and moved in a direction away from the adjacent light source assemblies 1111 under the driving of the corresponding moving end of the first moving assembly 1121, so as to form an avoidance channel between the light source assemblies 1111;

[0086] The zoom lens fixing component 1212 can be driven by the moving end of the second moving component 1222 to drive the corresponding zoom lens component 1211 to move into or out of the space between the plurality of light source components 1111 through the avoidance channel.

[0087] In this embodiment, the visual detection device 1 further includes:

[0088] The image capture module 13 can be used in conjunction with the zoom lens assembly 1211 that enters the annular area surrounded by the plurality of light source assemblies 1111. The image capture module 13 can be composed of a camera module in the prior art, and its specific structure is not the innovation of this solution, so the structure is not described in detail in this application.

[0089] In this embodiment, each of the first moving components 1121 includes a first linear motor and a light source component connecting frame 11213;

[0090] The fixed end 11211 of the first linear motor constitutes the fixed end of the first moving assembly 1121, the movable end 11212 of the first linear motor is connected to the light source assembly connecting frame 11213, and the movable end 11212 of the first linear motor and the light source assembly connecting frame 11213 together constitute the moving end of the first moving assembly 1121;

[0091] The movable end of the linear motor is connected to the light source assembly 1111 via the light source assembly connecting frame 11213 .

[0092] In this embodiment, the fixed end of each of the first moving components 1121 further includes a first fixed plate;

[0093] The fixed end 11211 of the first linear motor is connected to the first fixing plate.

[0094] In this embodiment, the second moving assembly 1222 includes a second linear motor;

[0095] The movable end 12222 of the second linear motor constitutes the movable end of the second movable assembly 1222, and the fixed end 12221 of the second linear motor constitutes the fixed end of the second movable assembly 1222. A through hole 122221 is also provided on the fixed end 12221 of the second linear motor, so that the image passing through the lens assembly 1211 can be transmitted to the image capture module 13 through the through hole 122221.

[0096] The first linear motor and the second linear motor can both be formed by linear motors in the prior art, and their principles are not described in detail. The light source assembly connecting frame 11213 serves to connect the light source assembly 1111 and the first moving assembly 1121, and it can be formed in the shape structure shown in the figure, or in other shapes and structures, and is not limited to the illustrated example.

[0097] In other embodiments, the fixed end of each first moving assembly 1121 may also include a first slide rail and a first fixed plate, the moving end of each first moving assembly 1121 includes a first slider and a light source assembly connecting frame 11213, and each first moving assembly 1121 also includes a first driving component;

[0098] The first sliding block is arranged on the track of the first sliding rail;

[0099] The light source assembly connecting frame 11213 is respectively connected to the first sliding block and the corresponding light source assembly;

[0100] The fixed end of the first driving component is connected to the first slide rail, and the movable end of the first driving component is connected to the first slider. The first slider can move along the track of the first slide rail under the drive of the first driving component.

[0101] The first slide rail is fixed to the first fixing plate, and the fixed end of the first driving component is connected to the first slide rail through the first fixing plate.

[0102] The fixed end of each second movable assembly 1222 may further include a second slide rail and a second fixed plate, the movable end of each second movable assembly 1222 includes a second slider, and each second movable assembly 1222 further includes a second driving component;

[0103] The second sliding block is disposed on the track of the second sliding rail, and the second sliding block is also connected to the magnifying lens fixing assembly 1212;

[0104] The fixed end of the second driving component is connected to the second slide rail, and the movable end of the second driving component is connected to the second slider. The second slider can move along the track of the second slide rail under the drive of the second driving component.

[0105] The second slide rail is fixed on the second fixing plate, and the fixed end of the second driving component is connected to the second slide rail through the second fixing plate.

[0106] In this embodiment, the visual inspection device 1 is provided with an overall arc-shaped light source assembly. Each light source assembly can be separated or merged into an annular area under the drive of the first moving mechanism 112, thereby meeting the demand for providing an annular light source. At the same time, the control demand can be reduced during the switching of the zoom lens. The zoom lens mechanism only needs to move in the horizontal direction and does not need to move in the vertical direction. Such a structural design can effectively reduce the difficulty of control while ensuring that the zoom lens can be moved into place, thereby reducing the production cost of the device.

[0107] Second embodiment:

[0108] During wafer inspection, different inspection tasks require different magnification lenses for observation. The traditional lens switching method is often complicated and time-consuming, affecting inspection efficiency. In addition, frequent manual lens switching may also cause lens damage and reduced accuracy.

[0109] At the same time, lighting conditions are crucial when inspecting wafers. Wafers usually have smooth surfaces that are prone to reflections and shadows. If traditional point or surface light sources are used, uneven lighting may occur on the wafer surface, causing some areas to be too bright or too dark, affecting the observation and analysis of wafer features. Moreover, during the inspection process, the reflected light on the wafer surface may interfere with the imaging of the inspection equipment, causing the image to become blurred or reflective highlights to appear.

[0110] Ring light has many advantages in wafer inspection. Ring light can form a uniform lighting environment around the inspection object, so that all parts of the wafer can receive the same intensity of light, whether it is the center area or the edge of the wafer, the details can be clearly presented. Its special structure can effectively reduce the generation of shadows. The light from various angles complements each other, reducing the shadows caused by single-direction light. At the same time, ring light can reduce the intensity of reflection, making the reflected light more dispersed and reducing the impact on detection. In addition, ring light is very effective in highlighting the edges and contours of the wafer. When light from the ring light source is irradiated onto the wafer, the edge of the wafer will form a clear contrast between light and dark, making the edge more clearly visible.

[0111] If the integrated ring light source in the prior art is directly used to provide lighting, this will result in the automatic switching lens equipped with the ring light being a lens group with multiple lenses (i.e., a lens assembly) arranged horizontally on the horizontal X-axis, and the working lens is inserted into the ring light. When the lens needs to be switched, the x-axis is lifted up by the vertical z-axis as a whole, and the x-axis moves horizontally so that another lens is aligned with the ring light, and then the z-axis is lowered so that another lens is inserted into the ring light. The technical structure is cumbersome, and the z-axis cannot restore the vertical height of the lens to the initial value due to the limitation of repeatability accuracy.

[0112] To solve the above problems, Figure 5 As shown, in this embodiment, a wafer inspection system is provided, which includes a rack device 2, a stage device 3, a master control device 4 and a visual inspection device 1;

[0113] The frame device 2 includes a visual inspection device 1 bearing mechanism, a stage bearing mechanism 22 and a master control device bearing mechanism 23;

[0114] Figure 5 In the illustrated embodiment, the general control device supporting mechanism 23 is composed of a frame mechanism located on the ground, and the stage supporting mechanism 22 is located above the frame mechanism. In specific implementation, the stage supporting mechanism 22 and the general control device supporting mechanism 23 are air-floatedly connected via an air-floating connection assembly, and the visual inspection device 1 supporting mechanism is composed of a beam located above the stage supporting mechanism 22.

[0115] The fixed end of each of the first moving components 1121 and the fixed end of the second moving components 1222 are connected to the visual inspection device supporting mechanism 21;

[0116] The stage device 3 is connected to the stage bearing mechanism 22;

[0117] The master control device 4 is arranged on the master control device supporting mechanism 23, and is respectively connected to the first moving component 1121, the second moving component 1222 and the stage device 3. The master control device 4 may include a control box and a control device composed of a programmable logic controller, a single chip microcomputer, a detection system computer or other control devices with control functions in the prior art. The relevant control equipment can respectively control the operation of components such as the light source component 1111, the first moving component 1121, the second moving component 1222, the image capture module 13 and the stage device 3. The specific control logic is not the inventive point of this solution, so it will not be elaborated in this application. Figure 5 Only the control box is drawn.

[0118] The stage device 3 in this embodiment is used to carry the wafer to be tested or processed. The stage device 3 can be composed of a stage in the prior art, so its specific structure is not described in detail in this application.

[0119] In this embodiment, the visual detection device 1 also includes:

[0120] The light source module 11 includes a light source mechanism and a first moving mechanism 112. The light source mechanism includes two light source components 1111 that are arranged opposite to each other and are in an arc shape as a whole, so as to effectively provide a ring light source. The first moving mechanism 112 includes two first moving components 1121 that are arranged opposite to each other. The moving ends of each first moving component 1121 are respectively connected to the corresponding light source components 1111.

[0121] The lens module 12 includes a magnifying lens mechanism and a second moving mechanism. The magnifying lens mechanism includes four magnifying lens components 1211 and a magnifying lens fixing component 1212 arranged side by side. Each magnifying lens component 1211 is fixed on the magnifying lens fixing component 1212 (that is, several magnifying lens components 1211 are arranged in a line on the magnifying lens fixing component 1212). The second moving mechanism includes a second moving component 1222. The moving end of the second moving component 1222 is connected to the magnifying lens fixing component 1212.

[0122] An image capturing module 13, which can be used in conjunction with a zoom lens assembly 1211 that enters an annular area surrounded by a plurality of light source assemblies 1111;

[0123] The second moving component 1222 can drive the zoom mechanism to move in a direction perpendicular to the first moving component 1121 can drive the light source component 1111 to move in a direction perpendicular to each other. Such a structural design can reduce the control difficulty requirement while meeting the requirement of switching zooms.

[0124] The plurality of light source components 1111 in the light source mechanism can be driven by the corresponding moving ends of the first moving components 1121 to jointly enclose a ring-shaped area, and the space formed by the inner side wall of the ring-shaped area can accommodate each of the magnifying lens components 1211;

[0125] The plurality of light source assemblies 1111 may also be separated and moved in a direction away from the adjacent light source assemblies 1111 under the driving of the corresponding moving end of the first moving assembly 1121, so as to form an avoidance channel between the light source assemblies 1111;

[0126] The zoom lens fixing component 1212 can be driven by the moving end of the second moving component 1222 to drive the corresponding zoom lens component 1211 to move into or out of the space between the plurality of light source components through the avoidance channel.

[0127] In this embodiment, each of the first moving components 1121 includes a first linear motor and a light source component connecting frame 11213;

[0128] The fixed end 11211 of the first linear motor constitutes the fixed end of the first moving assembly 1121, the movable end 11212 of the first linear motor is connected to the light source assembly connecting frame 11213, and the movable end 11212 of the first linear motor and the light source assembly connecting frame 11213 together constitute the moving end of the first moving assembly 1121;

[0129] The movable end of the linear motor is connected to the light source assembly through the light source assembly connecting frame.

[0130] In this embodiment, the fixed end of each of the first moving components 1121 further includes a first fixed plate 11214;

[0131] The fixed end 11211 of the first linear motor is connected to the first fixed plate 11214 . In this embodiment, the first moving component 1121 is fixed to the visual inspection device supporting mechanism 21 composed of a crossbeam through the first fixed plate 11214 .

[0132] In this embodiment, the second moving assembly 1222 includes a second linear motor;

[0133] The movable end 12222 of the second linear motor constitutes the movable end of the second movable component 1222 , and the fixed end 12221 of the second linear motor constitutes the fixed end of the second movable component 1222 .

[0134] As shown in the figure, the fixed end of the second movable component 1222 in this embodiment is directly connected to the image capturing module 13. In other embodiments, the fixed end of the second movable component 1222 can also be connected to the rack device 2 in other connection forms.

[0135] In this embodiment, a new lens switching method is adopted, and the ring light is made into two semicircular shapes. When the lens needs to be switched, the two ring lights are turned on, and the x-axis carrying the lens moves horizontally to switch the lens. After the lens is in place, the two semicircular ring lights are closed to cover the lens. The position of the lens (i.e., the lens assembly 1211) in the vertical direction is always kept fixed, so that there is no adverse effect on the stability of the lens, and the defect detection requirements for wafers are effectively met.

[0136] Beneficial effects of the visual inspection device and wafer inspection system of the present invention:

[0137] The visual inspection device is provided with an overall arc-shaped light source assembly. Each light source assembly can be separated or merged into an annular area under the drive of the first moving mechanism, thereby meeting the demand for providing an annular light source. At the same time, the control demand can be reduced during the switching of the zoom lens. The zoom lens mechanism only needs to move in the horizontal direction and does not need to move in the vertical direction. Such a structural design can effectively reduce the difficulty of control while ensuring that the zoom lens can be moved into place, thereby reducing the production cost of the device.

[0138] The wafer inspection system equipped with this visual inspection device can effectively ensure the control accuracy of switching the microscope during inspection and avoid interference of the light source on the movement of the microscope. It is easy to operate and control, and can effectively meet the inspection requirements for different wafers.

[0139] The preferred specific embodiments of the present invention are described in detail above. It should be understood that ordinary technicians in the field can make many modifications and changes based on the concept of the present invention without creative work. Therefore, all technical solutions that can be obtained by technicians in the technical field based on the concept of the present invention through logical analysis, reasoning or limited experiments on the basis of the prior art should be within the scope of protection determined by the claims.

Claims

1. A visual inspection device, characterized in that: The visual inspection device comprises: A light source module, comprising a light source mechanism and a first moving mechanism, wherein the light source mechanism comprises a plurality of light source components which are in an arc shape as a whole, and the first moving mechanism comprises a plurality of first moving components whose number matches the number of the light source components, and the moving ends of the first moving components are respectively connected to the corresponding light source components; The lens module includes a magnifying mechanism and a second moving mechanism, wherein the magnifying mechanism includes a plurality of magnifying components and a magnifying fixing component, each magnifying component is fixed on the magnifying fixing component, and the second moving mechanism includes a second moving component, and a moving end of the second moving component is connected to the magnifying fixing component; The plurality of light source assemblies in the light source mechanism can be driven by the corresponding moving ends of the first moving assemblies to jointly enclose a ring-shaped area, and the space formed by the inner side wall of the ring-shaped area can accommodate each of the magnifying lens assemblies; The plurality of light source assemblies can also be separated and moved in a direction away from adjacent light source assemblies under the drive of the corresponding moving end of the first moving assembly to form an avoidance channel between the light source assemblies; The magnifying lens fixing assembly can be driven by the moving end of the second moving assembly to drive the corresponding magnifying lens assembly to move into or out of the space between the plurality of light source assemblies through the avoidance channel.

2. The visual inspection device according to claim 1, characterized in that: The visual detection device also includes: An image capturing module can be used in conjunction with a zoom lens assembly that enters an annular area surrounded by a plurality of the light source assemblies.

3. The visual inspection device according to claim 1, characterized in that: Each of the first moving components includes a first linear motor and a light source component connecting frame; The fixed end of the first linear motor constitutes the fixed end of the first moving assembly, the movable end of the first linear motor is connected to the light source assembly connecting frame, and the movable end of the first linear motor and the light source assembly connecting frame together constitute the moving end of the first moving assembly; The movable end of the linear motor is connected to the light source assembly through the light source assembly connecting frame.

4. The visual inspection device according to claim 3, characterized in that: The fixed end of each of the first moving components further includes a first fixed plate; The fixed end of the first linear motor is connected to the first fixing plate.

5. The visual inspection device according to claim 3, characterized in that: The second moving assembly includes a second linear motor; The movable end of the second linear motor constitutes the movable end of the second movable assembly, and the fixed end of the second linear motor constitutes the fixed end of the second movable assembly.

6. The visual inspection device according to claim 1, characterized in that: The light source mechanism includes two light source components arranged opposite to each other, and the first moving mechanism includes two groups of first moving components arranged opposite to each other.

7. The visual inspection device according to claim 6, characterized in that: The magnifying lens mechanism includes a plurality of magnifying lens components arranged side by side on the magnifying lens fixing component. The second movable component can drive the magnifying lens mechanism to move in a direction perpendicular to the direction in which the first movable component can drive the light source component to move.

8. A wafer inspection system, characterized in that: The system comprises a rack device and a visual inspection device as claimed in any one of claims 1 to 7; The frame device comprises a visual inspection device bearing mechanism, and the fixed end of each of the first movable components and the fixed end of the second movable component are connected to the visual inspection device bearing mechanism.

9. The wafer inspection system according to claim 1, characterized in that: The system also includes a stage device; The frame device also includes a stage bearing mechanism, and the stage device is connected to the stage bearing mechanism.

10. The wafer inspection system according to claim 9, characterized in that: The wafer inspection system also includes a master control device, which is connected to the first moving component, the second moving component and the stage device respectively.

Images