Micro peristaltic pump capable of synchronously pumping multiple fluids in parallel

Abstract

The invention discloses a parallel multi-fluid synchronous pumping micro peristaltic pump which is characterized in that a flow channel layer is provided with a plurality of fluid driving and conveying structures and flow stabilizing structures, and conveying straight flow channels are connected between an inlet liquid storage cavity and an annular driving flow channel and between an outlet liquid storage cavity and the annular driving flow channel in the fluid driving and conveying structures; the flow stabilizing structure comprises a plurality of communicated flow stabilizing cavities connected to the conveying straight flow channel between the outlet liquid storage cavity and the annular driving flow channel, the lower bottoms of the flow stabilizing cavities are in sealed connection with the base material layer, and the upper tops of the flow stabilizing cavities are in sealed connection with the thin film layer; the driving structure circularly extrudes the annular driving flow channel to generate negative pressure in the annular driving flow channel, working fluid enters from the inlet liquid storage cavity, passes through the conveying straight flow channel, the annular driving flow channel and the flow stabilizing structure, and stably outputs non-pulse working fluid from the outlet liquid storage cavity; the control module provides kinetic energy to the drive structure. According to the invention, multi-flow accurate pumping of the micro peristaltic pump is realized.

Description

Technical Field

[0001] The invention belongs to the field of microfluidics technology, and in particular relates to a micro peristaltic pump for synchronously pumping multiple fluids in parallel. Background Art

[0002] Microfluidics is a technology that uses micro-nanoscale flow channels to study and manipulate microliter and nanoliter fluids. With the development of microsystem technology, the development of different types of microfluidic devices has been promoted. Among them, micropumps, as an important microfluidic driving device in the field of microfluidics, have more applications. A micropump is a device that can deliver working fluids from a reservoir to a target downstream application in a precise volume. It can be used in scenarios such as drug delivery, particle sorting, and in vitro organ construction. The advantages of micropumps include accurate delivery of microliter or nanoliter fluids, good integration, small device size, and low cost. Most micropumps are mainly divided into two categories: mechanical micropumps and non-mechanical micropumps. Mechanical micropumps have reciprocating moving parts when working. According to the different machines that produce the motion state, the actuator types can be divided into piezoelectric, electrostatic, electromagnetic, pneumatic, etc. Non-mechanical micropumps mainly use chemical or physical effects to convert non-mechanical energy into kinetic energy of the fluid. Common non-mechanical micropumps mainly include electroosmotic, surface tension, thermal bubble, gravity, etc.

[0003] Peristalsis is an important transport mechanism in human organs or other physiological environments, and plays an important role in maintaining some daily functions of the human body, such as the transport of physiological fluids in the digestive tract and urethra, and the blood flow in the human circulatory system. A microperistaltic pump is a mechanical micropump that draws on the peristaltic mechanism. There are two common types of microperistaltic pumps: one has multiple pumping chambers, and a plunger drive is applied to these chambers through a specific sequence of operations to drive the working fluid in the desired direction within the microfluidic path. The other type uses a rotating roller or ball actuation structure to cyclically roll the microfluidic path, causing a certain internal and external pressure difference in the flow channel to drive the working fluid in a direction.

[0004] However, existing microperistaltic pumps can only achieve simple fluid pumping and cannot output accurate and pulse-free flow. At the same time, most existing micropumps are designed with a single flow channel structure, that is, each pumping can only produce one flow rate, which cannot meet the application requirements of multiple flow rates at the same time. Summary of the invention

[0005] The purpose of the present invention is to overcome the deficiencies in the prior art and to provide a micro peristaltic pump for synchronously pumping multiple fluids in parallel, so as to solve the problem that the existing micro peristaltic pump cannot achieve stable and accurate pumping of the working fluid and simultaneous operation of multiple flow rates.

[0006] To solve the above technical problems, the present invention is implemented by adopting the following solutions: The present invention provides a micro peristaltic pump for synchronously pumping multiple fluids in parallel, comprising a control module, a driving structure and a microfluidic chip; the microfluidic chip comprises a film layer, a flow channel layer and a substrate layer connected in sequence, the flow channel layer is provided with a plurality of groups of fluid-driven conveying structures and a steady flow structure, the fluid-driven conveying structure comprises an inlet liquid storage chamber, an annular driving flow channel, a direct delivery channel and an outlet liquid storage chamber, the direct delivery channel is connected between the inlet liquid storage chamber and the annular driving flow channel and between the outlet liquid storage chamber and the annular driving flow channel, the steady flow structure comprises a plurality of connected steady flow chambers on the direct delivery channel between the outlet liquid storage chamber and the annular driving flow channel, the lower bottom of the steady flow chamber is sealedly connected to the substrate layer, and the upper top is sealedly connected to the film layer; the driving structure cyclically squeezes the annular driving flow channel so that negative pressure is generated inside the annular driving flow channel, the working fluid enters from the inlet liquid storage chamber, passes through the direct delivery channel, the annular driving flow channel and the steady flow structure, and stably outputs pulse-free working fluid from the outlet liquid storage chamber; the control module is used for providing kinetic energy to the driving structure.

[0007] Optionally, the film layer is a polymer material or an elastic rubber material, which is allowed to accept fluctuations in flow pressure and produce deformation; the flow channel layer is a polymer material or an elastic rubber material, which can undergo a certain deformation under mechanical extrusion; the substrate layer is a hard material, which can accept a certain compression force and mechanical extrusion.

[0008] Optionally, the annular driving channels of several channel layers are nested and arranged in parallel at intervals from small to large according to different annular radii, and the delivery direct current channels of several channel layers are divided into low-flow rate channels and high-flow rate channels according to channel size and pumping flow rate and are respectively arranged in parallel on both sides of the microfluidic chip.

[0009] Optionally, the flow channel cross section of the annular driving flow channel is oblate, semicircular or rectangular.

[0010] Optionally, the film layer has a thickness of 50-200 μm, and the film layer can withstand a flow pressure and deformation displacement of more than 1000 μL / min.

[0011] Optionally, the flow stabilization chamber is an air chamber structure of any shape with one end closed by a substrate layer and the other end encapsulated by a film layer.

[0012] Optionally, the film layer, the flow channel layer and the substrate layer are bonded and connected in sequence from top to bottom, the lower bottom of the flow stabilization chamber is bonded and sealed to the substrate layer, and the upper top is bonded and sealed to the film layer.

[0013] Optionally, the control module includes a power supply, a driver and a stepper motor, the power supply, the driver and the stepper motor are electrically connected in sequence, and the control module is movably mounted on the slide rail through a motor bracket.

[0014] Optionally, the driving structure includes a coupling, a rotating shaft and a driving roller, one end of the rotating shaft is fixedly connected to the output shaft of the stepper motor through the coupling, and the other end is fixedly connected to the driving roller, the driving roller is arranged on the annular driving channel and the annular driving channel is rotated, tightened or loosened by the rotation of the rotating shaft driven by the stepper motor and the movement of the stepper motor on the slide rail; the driving roller is a bolt bearing roller, and the rotating shaft and the bolt bearing roller are fastened by threads.

[0015] Optionally, an inner recessed structure is provided at the annular driving flow channel. Beneficial Effects

[0016] The implementation of the present invention improves the pumping reliability and stability of the peristaltic pump system, has the ability to accurately and stably pump multiple flow rates at the same time, and has important application value in the field of microfluidics.

[0017] The parallel multi-fluid synchronous pumping microperistaltic pump of the present invention is composed of three parts: a control module, a drive structure and a microfluidic chip. The entire system is powered by a power supply, and the driver realizes precise rotation control of the motor. At the same time, the stepper motor is connected to the drive structure through a coupling, driving the drive structure to rotate and squeeze the annular flow channel of the microfluidic chip to realize fluid peristaltic pumping.

[0018] The microfluidic chip designed in the present invention consists of a three-layer structure of a film layer, a flow channel layer and a substrate layer, wherein the flow channel layer is designed with multiple groups of flow channels with different annular radii and cross-sectional sizes, which can provide pumping options with multiple flow rates at the same time.

[0019] The microfluidic chip proposed in the present invention integrates a flow stabilization structure, utilizes multiple flow stabilization chambers as energy storage air cavities, and utilizes an elastic film to produce an expansion or contraction effect with the pressure fluctuation of the pumped fluid to store or release the fluid, thereby achieving the effect of eliminating flow pulses and accurately regulating the flow. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 1 is a schematic structural diagram of a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 2 This is a working schematic diagram of a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 3 It is a schematic structural diagram of a microfluidic chip in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 4 It is a schematic structural diagram of a flow channel layer in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 5It is a schematic AA cross-sectional view of a flow stabilizing structure in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 6 This is a schematic diagram of the principle of a flow stabilizing structure in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 7 Schematic diagram of a driving structure in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Figure 8 This is a schematic diagram of the working principle of a microfluidic chip in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Fig. 9 This is a schematic diagram of the working extrusion of a driving structure in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; Fig.10 This is a schematic diagram of the installation structure of a control module in a micro peristaltic pump for synchronously pumping multiple fluids in parallel provided in Example 1 of the present invention; In the figure: 1, control module; 11, power supply; 12, driver; 13, stepper motor; 2, drive structure; 21, rotating shaft; 22, bolt bearing roller; 3, microfluidic chip; 31, low flow rate steady flow chamber thin film layer; 32, high flow rate steady flow chamber thin film layer; 33, flow channel layer; 331, flow channel one; 332, flow channel two; 333, flow channel three; 334, flow channel four; 335, flow channel five; 3351, flow channel five inlet liquid storage chamber; 3352, flow channel five annular drive flow channel; 3353, flow channel five delivery straight flow channel; 3354, flow channel five outlet liquid storage chamber; 336, flow channel six; 337, flow channel seven; 338, flow channel eight; 339, low flow rate steady flow chamber; 3395, low flow rate flow channel five steady flow chamber; 3310, high flow rate steady flow chamber; 3311, inner concave structure; 34, substrate layer; 4, Z-axis slide rail; 5, slider; 6, mounting plate; 7, motor bracket DETAILED DESCRIPTION

[0021] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention. Example 1

[0024] This embodiment provides a micro peristaltic pump for synchronously pumping multiple fluids in parallel, such as Figure 1 As shown, the simultaneous multi-flow peristaltic pumping system provided by the embodiment of the present invention includes a control module 1, a driving structure 2 and a microfluidic chip 3. The driving roller of the driving structure 2 cyclically squeezes the annular driving channel of the microfluidic chip 3, resulting in negative pressure inside the annular driving channel. The working fluid enters from the inlet liquid storage chamber, passes through the annular driving channel, the delivery straight flow channel and the steady flow structure, and stably outputs the pulse-free working fluid from the outlet liquid storage chamber.

[0025] The control module 1 includes: a power supply 11, a driver 12 and a stepper motor 13. The power supply 11, the driver 12 and the stepper motor 13 are connected in sequence to control the stepper motor 13 to rotate accurately while ensuring that the speed is precisely adjustable. Fig.10 As shown, the control module 1 is fixedly mounted on the slider 5 by the motor bracket 7, and the slider 5 moves up and down on the Z-axis slide rail 4. The movement of the slider 5 on the Z-axis slide rail 4 and the support of the microfluidic chip 3 by the mounting plate 6 are used to realize the tightening or loosening of the fluid driving part of the microfluidic chip 3 by the driving structure 2.

[0026] Figure 2 This is a working schematic diagram of the micro peristaltic pump described in an embodiment of the present invention. The driving structure 2 includes a coupling, a rotating shaft 21 and a bolt bearing roller 22. One end of the rotating shaft 21 is fixedly connected to the output shaft of the stepper motor 13 through a coupling to realize power drive, and the other end is fixedly connected to the bolt bearing roller 22. The bolt bearing roller 22 is arranged on the annular driving channel of the microfluidic chip 3 and is driven to rotate by the stepper motor 13. The movement of the aforementioned slider 5 on the Z-axis slide rail 4 and the support of the microfluidic chip 3 by the mounting plate 6 realize the rotational compression or relaxation of the annular driving channel in the microfluidic chip 3.

[0027] Specifically, Figure 3As shown, the microfluidic chip includes a low-flow rate encapsulation film layer 31, a high-flow rate encapsulation film layer 32, a flow channel layer 33 and a substrate layer 34. Among them, the low-flow rate encapsulation film layer 31 and the high-flow rate encapsulation film layer 32 are formed by spin coating of polymer materials, which are high-molecular polymer materials or elastic rubber materials, have good elastic deformation ability and fluid carrying capacity, and can accept large fluctuations in flow pressure and produce large deformation. The flow channel layer 33 is a high-molecular polymer material or an elastic rubber material, which can undergo certain deformation under mechanical extrusion, and includes a fluid-driven transport structure and a flow stabilizing structure.

[0028] Figure 4 Schematic diagram of the flow channel layer structure provided in an embodiment of the present invention, the fluid driven delivery structure includes flow channel 1 331, flow channel 2 332, flow channel 3 333, flow channel 4 334, flow channel 5 335, flow channel 6 336, flow channel 7 337 and flow channel 8 338. The eight flow channels each include an inlet liquid storage chamber, an annular drive flow channel, a delivery direct flow channel and an outlet liquid storage chamber, and a delivery direct flow channel is connected between the inlet liquid storage chamber and the annular drive flow channel, and between the outlet liquid storage chamber and the annular drive flow channel. Taking the flow channel 5 335 as an example, the flow channel 5 335 includes the flow channel 5 inlet liquid storage chamber 3351, the flow channel 5 annular driving flow channel 3352, the flow channel 5 delivery straight flow channel 3353 and the flow channel 5 outlet liquid storage chamber 3354. The flow channel 5 delivery straight flow channel 3353 is connected between the flow channel 5 inlet liquid storage chamber 3351 and the flow channel 5 annular driving flow channel 3352, and between the flow channel 5 outlet liquid storage chamber 3354 and the flow channel 5 annular driving flow channel 3352. The annular driving flow channels of the eight flow channels are nested and arranged in parallel from small to large intervals according to different annular radii. According to the flow channel size and pumping flow rate of the delivery straight flow channel, the flow channels 1 331 to 5 335 are low flow channels, and the flow channels 6 336 to 8 338 are high flow channels. The low flow channels and the high flow channels are respectively arranged in parallel on both sides of the microfluidic chip 3. Each annular driving flow channel is approximately semicircular, and the flow channel cross section is oblate, and the flow channel cross section of each conveying straight flow channel is rectangular.

[0029] The flow channel layer 33 is provided with a flow stabilization structure including: a low flow rate stabilization chamber 339 and a high flow rate stabilization chamber 3310, which are used to achieve stable pumping of the fluid. The flow stabilization structure is composed of multiple groups of connected circular chambers on the delivery straight flow channel between the outlet liquid storage chamber and the annular drive flow channel, and each group is provided with 6-8 circular chambers. Among them, the low flow rate stabilization chamber 339 has a diameter of 2mm, and the high flow rate stabilization chamber 3310 has a diameter of 3mm.

[0030] Specifically, Figure 5 As shown, here, the flow channel 5 335 is taken as an example to show the cross section of the steady flow structure. The low flow channel 5 steady flow chamber 3395 is connected to the flow channel 5 delivery straight flow channel 3353, and the upper part of the steady flow chamber is covered by the low flow encapsulation film layer 31, and the lower part is bonded to the substrate layer 34.

[0031] Figure 6 This is a schematic diagram of the principle of the flow stabilization structure provided by an embodiment of the present invention. The fluid enters the direct flow channel through the annular driving flow channel and converges in the connected circular flow stabilization chamber. When the fluid pulsates and overflows, the film expands to absorb the pulse energy and store the fluid. When the fluid pulsates and flows under, the film contracts and releases the fluid, compressing the fluid in the flow stabilization chamber into the direct flow channel.

[0032] The driving structure designed in the embodiment of the present invention is as follows Figure 7 As shown, the rotating shaft 21 is connected to the bolt bearing roller 22 by threads. The rotating shaft 21 is customized by 3D printing, and the bolt bearing roller 22 is a common standard part. The driving structure designed by the present invention is a three-phase rotating shaft roller structure, which is connected to the stepping motor 13 through a coupling and has a high response speed and a large driving force.

[0033] The bolt bearing roller 22 designed in the embodiment of the present invention has a width of 11 mm, and the overall annular radius of flow channel 1 331 to flow channel 8 338 is 10 mm, so full coverage of eight flow channel drives can be achieved.

[0034] The low flow rate encapsulation film layer 31 and the high flow rate encapsulation film layer 32 designed in the embodiment of the present invention are highly elastic films that can withstand a flow pressure of more than 1000 μL / min. At the same time, when the fluid converges and the film expands, it can produce a deformation displacement of not less than 5 times the thickness of the film itself.

[0035] The microfluidic chip substrate layer 34 provided in the embodiment of the present invention is made of some hard materials such as optical glass and plastic, which supports a large pressing force and mechanical extrusion and is not easily deformed. The other parts are made of high molecular polymer PDMS.

[0036] Figure 8 The working principle diagram of the microfluidic chip provided in the embodiment of the present invention is as follows: The center of the rotating shaft 21 is aligned with the center of each annular flow channel, and the bolt bearing roller 22 is close to the annular flow channel and ensures that each annular flow channel is within the driving range. The inlet of the microfluidic chip is connected to the sample liquid storage tank through an L-shaped connector and a microfluidic hose, and the outlet of the chip is connected to the downstream microfluidic application. A single, two or more flow paths can be connected each time. The stepper motor drives the driving structure 2 to rotate, and the sample liquid passes through the inlet reservoir, passes through the annular drive flow channel and the delivery direct flow channel in turn, and then converges in the circular steady flow chamber. After passing through the steady flow structure, the sample liquid with a more stable flow is output through the outlet reservoir.

[0037] In addition, if Fig. 9As shown, when the bolt bearing roller 22 does not compress the annular driving channel, the thickness of the pumping module layer of the microfluidic chip 3 is 1.5 mm. After compression, the thickness of the pumping module layer drops to less than 1 mm, and each annular channel can achieve better closure, with better driving effect. Example 2

[0038] This embodiment provides a method for processing a microfluidic chip in a micro peristaltic pump for synchronously pumping multiple fluids in parallel as described in Embodiment 1, so as to better understand the technical solution of the embodiment of the present invention. The microfluidic chip is manufactured using soft lithography technology, and the specific processing method is as follows: When configuring PDMS, stir and mix the PDMS prepolymer and the curing agent at a mass ratio of 10:1, and place them in a vacuum pump for degassing evenly until no bubbles are generated. The configured liquid PDMS is poured into the lower mold of the chip with microfluidic structure characteristics. At the same time, the upper mold of the chip corresponding to the position of the annular drive channel has a circular structure that extends outward by 0.5mm and can completely cover all the annular channels. After the mold is completed, the lower mold and the upper mold are molded together, and placed in an oven at 60℃ for curing for 2-3h. The chip after demolding forms an inner recessed structure 3311 area in the middle to reduce the thickness of the chip drive layer. At the same time, the drive structure 2 can be completely placed in the inner recessed structure 3311, so that the annular drive channel can be better squeezed and closed during operation, and the fluid drive back pressure during pumping is increased to improve the drive effect. After curing, the flow channel layer 33 is demolded to obtain the flow channel layer 33, and the circular steady flow chamber is further perforated with a puncher with a diameter of 2mm and 3mm to obtain a connected chamber. Put a piece of polyimide film attached to a glass wafer into a glue spreader, inject a little PDMS, work at 500 revolutions for 9 seconds and 1800 revolutions for 60 seconds, and obtain a low-flow rate steady-flow chamber film layer 31 and a high-flow rate steady-flow chamber film layer 32 with a thickness of about 50-80 μm. Put the film layer and the flow channel layer 33 into an oxygen plasma cleaning machine for bonding. After bonding, use a 0.5 mm puncher to punch holes in the inlet and outlet liquid storage chambers of the chip. Finally, put it and the substrate layer 34 into the oxygen plasma cleaning machine again for bonding, and finally complete the processing of the microfluidic chip.

[0039] In summary, the present invention utilizes a highly integrated microfluidic chip system, combined with multi-flow drive and delivery, flow stabilization structure to eliminate fluid pulses and other functions to achieve multi-flow precision pumping effect of micro peristaltic pump; the integrated chip can greatly simplify the micropump system, reduce the volume of the device, and have low production cost; ensure good biocompatibility, avoid cross contamination, etc.; for the processing technology of the integrated chip, the above functions can be achieved only through a single-layer microfluidic structure, and the manufacturing is simple and fast; the encapsulation and closure of the microfluidic layer requires the use of a substrate and a film, and the micron-level film is evenly coated with a spin coating process, and a multi-layer high-strength bonding effect is achieved through an oxygen plasma bonding machine.

[0040] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A micro peristaltic pump for synchronously pumping multiple fluids in parallel, characterized in that: It comprises a control module, a driving structure and a microfluidic chip; the microfluidic chip comprises a film layer, a flow channel layer and a substrate layer connected in sequence; the flow channel layer is provided with a plurality of groups of fluid-driven transport structures and flow-stabilizing structures; the fluid-driven transport structure comprises an inlet liquid storage chamber, an annular driving flow channel, a delivery direct flow channel and an outlet liquid storage chamber; the delivery direct flow channel is connected between the inlet liquid storage chamber and the annular driving flow channel and between the outlet liquid storage chamber and the annular driving flow channel; the flow-stabilizing structure comprises a plurality of connected flow-stabilizing chambers on the delivery direct flow channel between the outlet liquid storage chamber and the annular driving flow channel; the lower bottom of the flow-stabilizing chamber is sealedly connected to the substrate layer, and the upper top is sealedly connected to the film layer; The driving structure cyclically squeezes the annular driving flow channel to generate negative pressure inside the annular driving flow channel. The working fluid enters from the inlet liquid storage chamber, passes through the conveying straight channel, the annular driving flow channel and the flow stabilizing structure, and stably outputs pulse-free working fluid from the outlet liquid storage chamber. The control module is used to provide kinetic energy to the driving structure.

2. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The film layer is made of a high molecular polymer material or an elastic rubber material, which is allowed to accept fluctuations in flow pressure and produce deformation; the flow channel layer is made of a high molecular polymer material or an elastic rubber material, which can undergo a certain deformation under mechanical extrusion; the substrate layer is made of a hard material, which can accept a certain pressing force and mechanical extrusion.

3. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The annular driving channels of several channel layers are nested and arranged in parallel from small to large intervals according to different annular radii. The delivery direct current channels of several channel layers are divided into low-flow channel and high-flow channel according to channel size and pumping flow rate and are respectively arranged in parallel on both sides of the microfluidic chip.

4. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The flow channel cross section of the annular driving flow channel is oblate, semicircular or rectangular.

5. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The film layer has a thickness of 50-200 μm, and can withstand a flow pressure and deformation displacement of more than 1000 μL / min.

6. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The flow stabilization chamber is an air chamber structure of any shape with one end closed by a substrate layer and the other end encapsulated by a film layer.

7. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The film layer, the flow channel layer and the substrate layer are bonded and connected in sequence from top to bottom. The bottom of the flow stabilization chamber is bonded and sealed to the substrate layer, and the top is bonded and sealed to the film layer.

8. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: The control module comprises a power supply, a driver and a stepper motor, which are electrically connected in sequence. The control module is movably mounted on the slide rail through a motor bracket.

9. The micro-peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 8, characterized in that: The driving structure includes a coupling, a rotating shaft and a driving roller. One end of the rotating shaft is fixedly connected to the output shaft of the stepper motor through the coupling, and the other end is fixedly connected to the driving roller. The driving roller is arranged on the annular driving channel and the annular driving channel is rotated, tightened or loosened by the rotation of the rotating shaft driven by the stepper motor and the movement of the stepper motor on the slide rail; the driving roller is a bolt bearing roller, and the rotating shaft and the bolt bearing roller are fastened by threads.

10. The micro peristaltic pump for synchronously pumping multiple fluids in parallel according to claim 1, characterized in that: An inner concave structure is arranged at the annular driving flow channel.

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