Ion thinning sample stage and thinning instrument thereof

Abstract

The invention discloses an ion thinning sample table and a thinning instrument thereof. A sample clamping unit is used for clamping and fixing a sample to be thinned; the rotary thinning unit rotates the sample clamped by the sample clamping unit, and the ion beam bombards the upper surface and the lower surface of the sample to be thinned for thinning; and the position adjusting unit adjusts the height and angle of the clamped sample to ensure that the ion beam bombards the center of the sample to be thinned, and the sample is uniformly thinned to obtain a film. According to the invention, the stable rotation of the sample table is realized, and a sample is uniformly and effectively thinned; the effective inclination angle is 7-15 degrees, and a thin area is formed around the central point under the transmission of an ion beam, so that the placement requirement of a sample is reduced, and the sample is clamped more stably.

Description

Technical Field

[0001] The present invention relates to the technical field of material sample preparation, and more specifically, particularly to an ion thinning sample stage and a thinning instrument thereof. Background Art

[0002] The ion thinning instrument is an instrument commonly used in the field of materials science. It is designed for the preparation of transmission samples and has a fast sample preparation speed. It can prepare high-quality TEM (Transmission Electron Microscope) samples with less consumption. Its working principle is: in a high vacuum, two opposing cold cathode ion guns provide a high-energy argon ion flow to bombard both sides of the rotating sample at a certain angle. When the bombardment energy is greater than the binding energy of the surface atoms of the sample material, the surface atoms of the sample are sputtered by the argon ions. After a long period of continuous bombardment and sputtering, the center of the sample is finally perforated. The perforated sample is extremely thin at the edge of the hole and is transparent to the electron beam, thus becoming a thin film sample.

[0003] The tilt angle of existing ion thinning instruments is mainly 5-15 degrees, the thin area finally formed on the sample is small, and when the sample is clamped, the position adjustment of the sample stage, the integrity of the sample, the stability of the sample stage, and the heat dissipation of the sample stage cannot be well guaranteed.

[0004] Therefore, the problems existing in the prior art need to be further improved and developed. Summary of the invention

[0005] (I) Purpose of the invention: In order to solve the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ion thinning sample stage and a thinning instrument thereof, so as to reduce the inclination angle of the ion thinning sample stage and thereby increase the sample thinning area range.

[0006] (II) Technical solution: In order to solve the above technical problems, the present technical solution provides an ion thinning sample stage, comprising a sample clamping unit, a rotating thinning unit and a position adjustment unit; the sample clamping unit clamps and fixes the sample to be thinned; The rotating thinning unit rotates the sample clamped by the sample clamping unit, and bombards the upper and lower surfaces of the sample to be thinned with ion beams to thin the sample; The position adjustment unit adjusts the height and angle of the clamped sample to ensure that the ion beam bombards the center of the sample to be thinned, and uniformly thins the sample to obtain a thin film sample.

[0007] Preferably, the sample clamping unit comprises a sample holder, a spring clamp and a clamp; The sample holder includes two layers, namely, a first sample holder and a second sample holder; a ring-shaped protruding end is arranged at the inner ring of the second sample holder, and the height of the protruding end is equal to the thickness of the first sample holder, and the two form a complete ring; One side of the annular inner diameter of the second sample holder is also provided with an inclined groove and a clamping platform connected to the inclined groove. The clamp is placed on the clamping platform through the inclined groove. A spring clamp is also provided on the upper surface of the clamping platform.

[0008] Preferably, the clips are two identical convex double-eye masks, and the clips are in a circular shape as a whole, including a central hole and a notch; The outer diameter of the clip is equal to the inner diameter of the connection between the inclined groove and the clip platform.

[0009] Preferably, the angle between the center of the clip and the line connecting the outer circumference of the clip is 1-10°; and the diameter of the center hole is greater than 0.5 mm and less than 3 mm.

[0010] Preferably, the rotary thinning unit comprises a rotary wheel, a corner ring and a ball disposed on the corner ring; the rotary wheel is disposed on a side of the second sample holder away from the first sample holder; The corner ring is annular and is located between the first sample holder and the second sample holder. The outer diameter of the corner ring is equal to the outer diameter of the sample holder, and the inner diameter is equal to the outer diameter of the protruding end of the second sample holder. The corner ring is provided with n rows of balls, where n≥2, and the balls are evenly arranged at equal intervals along the circumferential direction on the corner ring.

[0011] Preferably, the balls are symmetrically arranged along the center of the rotating wheel, and the center of the rotating wheel and the center of the line connecting the balls are located on the same vertical line.

[0012] Preferably, the position adjustment unit comprises a support seat and an adjustment device located on the support seat; the support seat comprises a first support seat, a second support seat and a third support seat, the third support seat is a semi-cylinder, and a support plate is provided on the upper surface of the third support seat; The adjusting device comprises an X-axis adjusting device, a Y-axis adjusting device, a Z-axis adjusting device and a locking device.

[0013] Preferably, the support seat is a stepped cylinder, and the diameter of the cylinder decreases gradually from the end connected to the ion gun toward the sample seat; the upper surface of the first support seat is provided with a scale, with the horizontal center axis as 0°, and there are 40° scales on both sides, and they are arranged circumferentially in units of 5°.

[0014] Preferably, when adjusting the position through the adjusting device, first loosen the locking device, first adjust the Y-axis direction through the Y-axis adjusting device, and then adjust the Z-axis direction through the Z-axis adjusting device; after all three-way adjustments are completed, tighten the locking device to lock and fix.

[0015] An ion thinning instrument comprises any one of the ion thinning sample stages described above.

[0016] (III) Beneficial effects: The present invention provides an ion thinning sample stage and its thinning instrument. Firstly, multiple rows of ball bearings and rotating wheels are arranged between the sample seats, so that the sample stage can rotate smoothly, thereby thinning the sample evenly and effectively. Secondly, the position adjustment unit is used to adjust the angle and the height in three directions, so as to ensure that the left and right ion sources are transmitted in parallel at the center point of the sample, and the effective tilt angle is 7 to 15 degrees. A thin area is formed around the center point under the transmission of the ion beam. Finally, the clamping structure of the convex double-eye mask and the size relationship between the center hole and the sample to be thinned reduce the requirements for sample placement and make the sample clamping more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is an overall structural diagram of an ion thinning sample stage of the present invention; Figure 2 is a cross-sectional structural diagram of the sample holder of the present invention; Figure 3 is a cross-sectional structural diagram of the sample holder of the present invention; Figure 4 is a structural diagram of the third support base of the present invention; Figure 5 is a top view of the internal structure of the sample holder of the present invention; Figure 6 It is a right side view of the internal structure of the sample holder of the present invention; Figure 7 It is a structural schematic diagram of the notch of the clip of the present invention.

[0018] Figure numerals: sample holder 1, first sample holder 11, second sample holder 12, inclined groove 121, clamping platform 122, spring clamp 2, clamping ring 21, clamping piece 3, center hole 31, notch 32, rotating wheel 4, support rod 41, corner ring 5, ball 6, support seat 7, first support seat 71, second support seat 72, third support seat 73, support plate 74, adjusting device 8, X-axial adjusting device 81, Y-axial adjusting device 82, Z-axial adjusting device 83, locking device 84. DETAILED DESCRIPTION

[0019] The present invention is further described in detail below in conjunction with preferred embodiments. More details are elaborated in the following description to facilitate a full understanding of the present invention. However, the present invention can obviously be implemented in a variety of other ways different from the description. Those skilled in the art can make similar generalizations and deductions based on actual application situations without violating the connotation of the present invention. Therefore, the protection scope of the present invention should not be limited by the content of this specific embodiment.

[0020] The accompanying drawings are schematic diagrams of embodiments of the present invention. It should be noted that the drawings are only examples and are not drawn to scale, and should not be used to limit the actual protection scope of the present invention.

[0021] An ion thinning sample stage comprises a sample clamping unit, a rotating thinning unit and a position adjustment unit. The sample clamping unit clamps and fixes the sample to be thinned. The rotating thinning unit rotates the sample clamped by the sample clamping unit, and bombards the upper and lower surfaces of the sample to be thinned with an ion beam, thereby achieving sample thinning. The position adjustment unit adjusts the height and angle of the clamped sample to ensure that the ion beam can bombard the center position of the sample to be thinned, thereby uniformly thinning the sample to obtain the required thin film sample.

[0022] A specific embodiment of the present invention, as Figure 1 to Figure 6 As shown, the sample clamping unit includes a sample holder 1, a spring clamp 2 and a clamp 3. The sample holder 1 includes two layers, namely, a first sample holder 11 and a second sample holder 12; a ring-shaped protruding end is provided at the inner ring of the second sample holder 12, and the height of the protruding end is equal to the thickness of the first sample holder 11, that is, when the first sample holder 11 and the second sample holder 12 are fixed, the two form a complete ring. The first sample holder 11 and the second sample holder 12 are fixed by fixing screws.

[0023] The side of the protruding end of the second sample holder 12, that is, the side of the annular inner diameter of the second sample holder 12, also has an inclined groove 121 and a clamping platform 122 connected to the inclined groove 121. Along the annular inner diameter of the second sample holder 12, it gradually tilts toward the inside of the second sample holder 12 from top to bottom to form the inclined groove 121. The tail end of the inclined groove 121, that is, the end with the largest inner diameter of the second sample holder 12, is provided with a clamping platform 122. The clamp 3 is placed on the clamping platform 122 through the inclined groove 121. Due to the tilting effect of the inclined groove 121, the clamp 3 is prevented from falling off from the clamping platform 122.

[0024] More preferably, a spring clamp 2 is further provided on the upper surface of the clamping table 122. The spring clamp 2 is in the shape of a tight hoop, and two circular clamping rings 21 are formed at both ends of the spring clamp 2. The spring clamp 2 is fixed in the protruding end of the second sample table 12. The two circular clamping rings 21 of the spring clamp are located on the upper surface of the clamping table 122. The clamping rings 21 stably fix the two clamps on the clamping table 122, thereby preventing the clamp 3 from moving on the clamp 122, thereby affecting the thinning effect on the sample.

[0025] The clip 3 is two identical convex double eye masks, one of which is used as an example for explanation. The clip 3 is annular as a whole, including a center hole 31 and a notch 32. The outer diameter of the clip 3 is equal to the maximum inner diameter of the second sample holder 12, that is, the inner diameter of the connection between the inclined groove 121 and the clip platform 122 is equal. The clip 3 is a bowl with a certain convex angle, that is, the center of the clip 3 and the outer ring circumference are not in the same horizontal plane, and the center of the clip 3 and the outer circumference of the clip 3 are connected at a certain angle, and the angle is 1~10°. The center hole 31 inside the clip 3 coincides with the center of the clip 3, and the diameter of the center hole 31 is greater than 0.5mm and less than 3mm, preferably 2mm in this embodiment. There is a crescent-shaped notch 32 on the circumference of the clip 3, and the notch 32 facilitates the installation and clamping of the spring clamp 2, thereby clamping and fixing the sample to be thinned.

[0026] The crescent-shaped notch 32 of the clip 3 is as shown in FIG. Figure 7 As shown, a circle is made with a radius R3 of 1 / 2 of the radius of the clip 3 and a center of the clip 3 as the center, and a central angle of 10°. Then, the two ends of the arc are pointed outward, with R3 as the radius and the intersection of the clip 3 corresponding to the arc of 10° as the center, to form a crescent-shaped notch 32 on both sides.

[0027] When the clamping piece 3 is used to clamp and fix the sample to be thinned, the convex sides of the two clamping pieces 3 are in contact, that is, the two clamping pieces 3 are placed in a mirror image, and the sample to be thinned is clamped between the two clamping pieces 3. The sample to be thinned generally has a diameter of 3 mm, so the position accuracy requirement for the placement of the sample to be thinned in this embodiment is very low, as long as the sample to be thinned can completely cover the center hole 31. Then, the notch 32 of the clamping piece 3 is aligned with the clamping ring 21 of the spring clamp 2, and the clamping piece 3 is placed on the clamping table 122 along the inclined groove 121, and then the clamping piece 3 is rotated so that the clamping ring 21 clamps and fixes the clamping piece 3 on the clamping table 122. Through the multi-layer clamping of the inclined groove 121, the spring clamp 2, and the clamping piece 3, the sample to be thinned is stably fixed in the sample holder 1.

[0028] The rotating thinning unit includes a rotating wheel 4, a corner ring 5, and a ball 6 arranged on the corner ring 5. The rotating wheel 4 is arranged on the side of the second sample holder 12 away from the first sample holder 11, and the rotating wheel 4 is fixed on a support rod 41, and the support rod 41 ensures that the rotating wheel 4 is located vertically below the ball 6. The rotating wheel 4 can be connected to an external motor or power supply to provide driving force. In this embodiment, the motor and power supply providing driving force are arranged in the cavity behind the support seat 7. The rotation of the rotating wheel 4 can realize the rotation of the second sample holder 12, thereby driving the sample to be thinned to rotate, and realizing uniform thinning of the sample to be thinned.

[0029] The corner ring 5 is annular and is located between the first sample holder 11 and the second sample holder 12. The outer diameter of the corner ring 5 is equal to the outer diameter of the sample holder 1, and the inner diameter is adapted to the second sample holder 12 and is equal to the outer diameter of the protruding end of the second sample holder 12. The corner ring 5 is provided with n rows of balls 6, where n≥2. The balls 6 are evenly arranged at equal intervals along the circumferential direction on the corner ring 5. Correspondingly, the first sample holder 11 and the second sample holder 12 are respectively provided with circumferential groove tracks on the side facing the corner ring 5, and the groove tracks are equal to the diameter of the balls 6.

[0030] The diameter of the ball 6 is 1 mm.

[0031] After the first sample holder 11, the corner ring 5, and the second sample holder 12 are installed in sequence, the balls 6 are arranged to ensure relative sliding between the first sample holder 11 and the second sample holder 12 when the rotating wheel 4 rotates, thereby realizing the rotation of the sample to be thinned. The corner ring 5 is used to fix the balls 6 to prevent the balls 6 from gathering during the rotation process, thereby affecting the rotation effect and further affecting the thinning of the sample.

[0032] It should be noted that both side edges of the rotating wheel 4 should all be located inside the outermost side of the multiple rows of balls 6, as long as the rotating wheel 4 is not placed outside the balls 6. That is, the width of one side of the multiple rows of balls 6 in the axial direction should be greater than the thickness of the rotating wheel 4, and the rotating wheel 4 is located near the center of the outermost circle of the multiple rows of balls 6, ensuring that in the cross-sectional direction, the rotating wheel 4 is all located below the multiple rows of balls 6. In this embodiment, two rows of balls 6 are provided, and the center of the rotating wheel 4 is located between the two rows of balls 6. Preferably, the two rows of balls 6 are symmetrically arranged along the center of the rotating wheel 4, that is, the center of the rotating wheel 4 and the center of the line connecting the two rows of balls 6 are located on the same vertical line, ensuring the balance and stability of the sample holder 1, and avoiding one side of the sample holder 1 from tilting during the rotation process, thereby affecting the thinning effect on the sample.

[0033] There is no specific restriction on the materials of the rotating wheel 4 and the ball 6. In this embodiment, the rotating wheel 4 is preferably a copper wheel, which has a certain strength. A rubber sleeve is embedded outside the copper wheel, and the rubber sleeve has a certain flexibility to avoid contact between the rotating wheel 6 and the second sample holder 12, resulting in wear and thus affecting the rotation effect. The ball 6 is preferably a steel ball to ensure a certain strength.

[0034] The position adjustment unit includes a support seat 7 and an adjustment device 8 located on the support seat 7. The support seat 7 is a stepped cylinder, and the diameter of the cylinder decreases from the end connected to the ion gun to the direction of the sample seat 1, and they are the first support seat 71, the second support seat 72 and the third support seat 73. The third support seat 73 is a semi-cylinder, and a support plate 74 is provided on the upper surface of the third support seat 73 on the same side as the first sample seat 1, and the support plate 74 is connected to the third support seat 73 through a mortise and tenon structure.

[0035] The upper surface of the first support seat 71 is also provided with a scale, with the horizontal center axis as 0°, and 40° scales on both sides, and arranged circumferentially in units of 5°. When the support plate 74 and the sample holder 1 are in a horizontal state, the 0° marking line of the second support seat 72 will be aligned with the horizontal center axis, and at this time, the first support seat 71 and the second support seat 72 are both in the initial state, that is, 0°. When the second support seat 72 rotates counterclockwise, the second support seat 72 will rotate to a negative angle. When the 0° marking line of the second support seat 72 rotates one grid, it means that the second support seat 72 has rotated 5° relative to the first support seat 71; similarly, when the second support seat 72 rotates clockwise, the second support seat 72 will rotate to a positive angle. When the 0° marking line of the second support seat 72 rotates one grid, it means that the second support seat 72 has rotated 5° relative to the first support seat 71.

[0036] A rubber ring is provided between the first support seat 71 and the second support seat 72, and the rubber ring ensures smooth rotation between the first support seat 71 and the second support seat 72, and also can seal completely. The second support seat 72 provides support for the support plate 74 and the third support seat 73, and can also balance the axial and deflection forces, and can also conduct the temperature of the sample surface bombarded by the ion beam, reduce the temperature rise of the sample caused by the ion beam, and ensure that the sample is always at zero potential.

[0037] More preferably, a ball bearing is arranged on the periphery of the support rod 41 connected to the rotating wheel 4 in the first support seat 71; a needle bearing is arranged on the periphery of the support rod 41 in the second support seat 72, and the ball bearing and the needle bearing form a bearing pair for supporting and balancing the deflection force.

[0038] The support plate 74 is a stepped plate, fixed on the upper surface of the third support seat 73, one end of which is in contact with the second support seat 72, and the other end is semicircular and concave inward, matching the inner diameter of the sample holder 1, and fixing the sample holder 1 by fixing screws.

[0039] The adjusting device 8 includes an X-axis adjusting device 81, a Y-axis adjusting device 82, a Z-axis adjusting device 83 and a locking device 84. The adjusting device 8 can adjust the three-way position of the sample holder to ensure that the ion beam ejected from the ion chamber behind the support seat 7 can bombard the center position of the sample to be thinned on the sample holder 1. When the angle between the ion beam and the sample is 7-15 degrees, the bombardment can be performed to obtain a thin film product, because the effective tilt angle is 7-15 degrees, which is smaller than the existing tilt angle, so it is more convenient to use.

[0040] In this embodiment, the adjustment devices 8 are all top screws and / or fixing screws. The X-axis adjustment devices 81 are two top screws, which are respectively arranged on the side of the third support seat 73 away from the second support seat 72. The X-axis adjustment devices 81 are symmetrically arranged with the support rod 41 connected to the rotating wheel 4 as the axis. By tightening or loosening the X-axis adjustment device 81, the third support seat 73 is moved in the X-axis direction, thereby driving the sample holder 1 to move forward and backward. When the X-axis adjustment device 81 is tightened, the third support seat 73 moves in the direction close to the second support seat 72; and when the X-axis adjustment device 81 is loosened, the third support seat 73 moves in the direction away from the second support seat 72.

[0041] The Y-axis adjustment device 82 is a top screw on the side of the third support seat 73, and the tail end is in contact with the support plate 74. By loosening or tightening the Y-axis adjustment device 82, the support plate 74 can be moved left and right, thereby driving the sample holder 1 to move in the Y-axis direction. When the Y-axis adjustment device 82 is tightened, the support plate 74 moves to the right, that is, moves away from the Y-axis adjustment device; and when the Y-axis adjustment device 82 is loosened, the support plate 74 moves to the left, that is, moves toward the direction close to the Y-axis adjustment device.

[0042] The Z-axis adjustment device 83 is two top screws arranged on the upper surface of the third support seat 73. The Z-axis adjustment device 83 passes through the screw hole of the support plate 74, facing the side direction where the first sample holder 11 is located, and the Z-axis adjustment device 83 is symmetrically arranged with the support rod 41 connected to the rotating wheel 4 as the axis. By tightening or loosening the Z-axis adjustment device 83, the support plate 74 is moved up and down, thereby driving the sample holder 1 to move up and down. When the Z-axis adjustment device 83 is tightened, the support plate 74 moves downward, that is, moves in the direction close to the rotating wheel 4; when the Z-axis adjustment device 83 is loosened, the support plate 74 moves upward, that is, moves away from the rotating wheel 4.

[0043] The locking device 84 is located at the center of the Z-axis adjusting device, and the Y-axis adjusting device 82 and the Z-axis adjusting device 83 are locked or loosened by the locking device 84. When the locking device 84 is tightened, the support plate 74 is locked on the third support seat 73, and the Y-axis adjusting device 82 and the Z-axis adjusting device 83 cannot be adjusted; when the locking device 84 is loosened, the support plate 74 is loosened, and the Y-axis adjusting device 82 and / or the Z-axis adjusting device 83 can be adjusted.

[0044] It should be noted that when the position is adjusted by the adjusting device 8, the locking device 84 is first loosened, the Y-axis direction is adjusted by the Y-axis adjusting device 82, and then the Z-axis direction is adjusted by the Z-axis adjusting device 83. As for the adjustment of the X-axis direction, it can be done first or later, before the Y-axis direction, before the Z-axis direction, or after the Y-axis and Z-axis directions are adjusted. Finally, after all three-axis adjustments are completed, the locking device 84 is tightened to lock and fix.

[0045] An ion thinning instrument comprises an ion thinning sample stage. By placing a sample to be thinned on the ion thinning sample stage for ion beam bombardment, the effective tilt angle between the ion beam and the sample is smaller. When the effective tilt angle is between 7 and 15 degrees, a thin film product with a large thin area can be obtained.

[0046] The present invention provides an ion thinning sample stage and a thinning instrument thereof. First, multiple rows of balls and rotating wheels are arranged between the sample seats, so that the sample stage can rotate smoothly, thereby uniformly and effectively thinning the sample. Secondly, the position adjustment unit is used to adjust the angle and the height in three directions to ensure that the left and right ion sources are transmitted in parallel at the center point of the sample, and the effective tilt angle during operation is ensured to be 7 to 15 degrees, so that a thin area is formed around the center point under ion beam transmission. Finally, the clip structure of the convex double eye mask and the size relationship between the center hole and the sample to be thinned reduce the sample placement requirements, making the sample clamping more stable, with a large contact area and good heat dissipation performance.

[0047] The above content is an explanation of the preferred embodiments of the present invention, which can help those skilled in the art to more fully understand the technical solution of the present invention. However, these embodiments are merely illustrative, and it cannot be determined that the specific implementation methods of the present invention are limited to the description of these embodiments. For ordinary technicians in the technical field to which the present invention belongs, without departing from the concept of the present invention, several simple deductions and transformations can be made, which should be regarded as belonging to the protection scope of the present invention.

Claims

1. An ion thinning sample stage, characterized in that: It includes a sample clamping unit, a rotating thinning unit and a position adjustment unit; the sample clamping unit clamps and fixes the sample to be thinned; The rotating thinning unit rotates the sample clamped by the sample clamping unit, and bombards the upper and lower surfaces of the sample to be thinned with ion beams to thin the sample; The position adjustment unit adjusts the height and angle of the clamped sample to ensure that the ion beam bombards the center of the sample to be thinned, and uniformly thins the sample to obtain a thin film sample.

2. The ion thinning sample stage according to claim 1, characterized in that: The sample clamping unit comprises a sample holder, a spring clamp and a clamping piece; The sample holder includes two layers, namely, a first sample holder and a second sample holder; a ring-shaped protruding end is arranged at the inner ring of the second sample holder, and the height of the protruding end is equal to the thickness of the first sample holder, and the two form a complete ring; One side of the annular inner diameter of the second sample holder is also provided with an inclined groove and a clamping platform connected to the inclined groove. The clamp is placed on the clamping platform through the inclined groove. A spring clamp is also provided on the upper surface of the clamping platform.

3. The ion thinning sample stage according to claim 2, characterized in that: The clips are two identical convex double-eye masks, and the clips are in a circular shape as a whole, including a central hole and a notch; The outer diameter of the clip is equal to the inner diameter of the connection between the inclined groove and the clip platform.

4. The ion thinning sample stage according to claim 3, characterized in that: The angle between the center of the clip and the line connecting the outer circumference of the clip is 1-10°; the diameter of the center hole is greater than 0.5 mm and less than 3 mm.

5. The ion thinning sample stage according to claim 1, characterized in that: The rotary thinning unit comprises a rotary wheel, a corner ring and a ball disposed on the corner ring; the rotary wheel is disposed on a side of the second sample holder away from the first sample holder; The corner ring is annular and is located between the first sample holder and the second sample holder. The outer diameter of the corner ring is equal to the outer diameter of the sample holder, and the inner diameter is equal to the outer diameter of the protruding end of the second sample holder. The corner ring is provided with n rows of balls, where n≥2, and the balls are evenly arranged at equal intervals along the circumferential direction on the corner ring.

6. The ion thinning sample stage according to claim 5, characterized in that: The balls are symmetrically arranged along the center of the rotating wheel, and the center of the rotating wheel and the center of the line connecting the balls are located on the same vertical line.

7. The ion thinning sample stage according to claim 1, characterized in that: The position adjustment unit includes a support seat and an adjustment device located on the support seat; the support seat includes a first support seat, a second support seat and a third support seat, the third support seat is a semi-cylinder, and a support plate is provided on the upper surface of the third support seat; The adjusting device comprises an X-axis adjusting device, a Y-axis adjusting device, a Z-axis adjusting device and a locking device.

8. The ion thinning sample stage according to claim 7, characterized in that: The support seat is a stepped cylinder, and the diameter of the cylinder decreases gradually from the end connected to the ion gun to the sample seat; the upper surface of the first support seat is provided with a scale, with the horizontal center axis as 0°, and there are 40° scales on both sides, and they are arranged circumferentially in units of 5°.

9. The ion thinning sample stage according to claim 8, characterized in that: When adjusting the position through the adjusting device, first loosen the locking device, first adjust the Y-axis direction through the Y-axis adjusting device, and then adjust the Z-axis direction through the Z-axis adjusting device; after all three-way adjustments are completed, tighten the locking device to lock and fix.

10. An ion thinning instrument, characterized in that: An ion thinning sample stage comprising any one of claims 1-9.

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