Light beam power control device

Abstract

The invention relates to the technical field of light beam processing, in particular to a light beam power control device which comprises a continuous adjusting assembly and a fixed-time adjusting assembly which are arranged in the transmission direction of a light beam, the continuous adjusting assembly can move into or move out of a transmission path of the light beam, and the fixed-time adjusting assembly can move into or move out of the transmission path of the light beam; when the continuous adjusting assembly is located in a transmission path of the light beam, the continuous adjusting assembly is used for continuously adjusting the power of the light beam; when the fixed-magnification adjusting assembly is located in the transmission path of the light beam, the fixed-magnification adjusting assembly is used for carrying out fixed-magnification attenuation on the power of the light beam, and at least the adaptability of the light beam power control device to various power adjusting requirements can be improved.

Description

Technical Field

[0001] The invention belongs to the technical field of light beam processing technology, and in particular relates to a light beam power control device. Background Art

[0002] Laser power regulation is essential in the application of laser technology. Stable laser power regulation is crucial in laser technology. Generally, an adjustable attenuator module is used to accurately control the beam power.

[0003] However, the existing adjustable attenuator module has a single function, and the overall structure size of the adjustable attenuator module is large, which is not convenient for integrated installation. There is no clean gas purge on the surface of the optical element in the adjustable attenuator module, and the optical element cannot be replaced separately after being damaged, resulting in high cost and inconvenient maintenance of the adjustable attenuator module. Summary of the invention

[0004] In view of this, the present invention aims to provide a light beam power control device, which is at least conducive to improving the adaptability of the light beam power control device to various power adjustment requirements.

[0005] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0006] The present invention provides a light beam power control device, comprising: a continuous adjustment component and a fixed-power adjustment component arranged along the transmission direction of the light beam, the continuous adjustment component can be moved into or out of the transmission path of the light beam, and the fixed-power adjustment component can be moved into or out of the transmission path of the light beam; when the continuous adjustment component is located in the transmission path of the light beam, it is used to continuously adjust the power of the light beam; when the fixed-power adjustment component is located in the transmission path of the light beam, it is used to attenuate the power of the light beam at a fixed rate.

[0007] The continuous adjustment component includes a first driving unit and a first attenuator connected to each other. The first attenuator can be moved into or out of the transmission path of the light beam. The first driving unit is used to drive the first attenuator to move into or out of the transmission path of the light beam.

[0008] The beam power control device further includes a first purge component, which is used to purge the optical element of the first attenuator.

[0009] The first driving unit includes a first cylinder, and a free end of the first cylinder is connected to the first attenuator.

[0010] Among them, the first driving unit also includes a first protective cover, which is sleeved on the outer ring of the first cylinder. The beam power control device also includes a first purge assembly, and the blowing end of the first purge assembly is arranged on the outer surface of the first protective cover away from the first cylinder.

[0011] Among them, the continuous adjustment component also includes a polarization adjustment unit, which is located in the transmission path of the light beam. The polarization adjustment unit is used to adjust the polarization direction of the light beam. When the first attenuator is located in the transmission path of the light beam, the light beam passes through the polarization adjustment unit and is incident on the first attenuator.

[0012] Among them, the beam power control device also includes a shell, the shell has an installation cavity, the fixed power adjustment component, the first drive unit and the first attenuator are all arranged in the installation cavity, the shell also has an incident window and an exit window arranged relatively, the light beam enters the installation cavity from the incident window and is emitted from the exit window, and the polarization adjustment unit is arranged on the outside of the incident window away from the installation cavity.

[0013] Wherein, the polarization adjustment unit includes a rotatable half-wave plate.

[0014] The polarization adjustment unit also includes a motor, a first gear, a second gear and a wave plate mounting component, wherein the first gear is mounted on the rotating shaft of the motor, the second gear is transmission-connected to the first gear, the wave plate mounting component has a wave plate mounting hole, the half-wave plate is arranged in the wave plate mounting hole, the wave plate mounting component is connected to the second gear, and the through hole of the second gear is opposite to the wave plate mounting hole.

[0015] Among them, the first attenuator includes: a first mounting seat, the first mounting seat has a first mounting window and a second mounting window; a polarized light splitting element, the polarized light splitting element is installed on the outside of the first mounting window using a ring-shaped thin pressing sheet; a first compensation element, the first compensation element is installed on the outside of the second mounting window using a ring-shaped thin pressing sheet.

[0016] Wherein, the continuous adjustment component also includes a first light trap. When the first attenuator is located in the transmission path of the light beam, the light beam passes through the polarization adjustment unit and is incident on the polarization beam splitter element, and the polarization beam splitter element reflects part of the light beam to the first light trap.

[0017] The fixed-power adjustment component includes a second drive unit and a second attenuator connected to each other. The second attenuator can be moved into or out of the transmission path of the light beam. The second drive unit is used to drive the second attenuator to move into or out of the transmission path of the light beam.

[0018] The beam power control device further includes a second purge component, which is used to purge the optical element of the second attenuator.

[0019] The second driving unit includes a second cylinder, and a free end of the second cylinder is connected to the second attenuator.

[0020] The second driving unit further comprises a second protective cover which is sleeved on the outer ring of the second cylinder. The beam power control device further comprises a second purge assembly, and the blowing end of the second purge assembly is arranged on the outer surface of the second protective cover away from the second cylinder.

[0021] Among them, the second attenuator includes: a second mounting seat, the second mounting seat has a third mounting window and a fourth mounting window; a reflecting element, the reflecting element is installed on the outside of the third mounting window using an annular thin pressing sheet; and a second compensating element, the second compensating element is installed on the outside of the fourth mounting window using an annular thin pressing sheet.

[0022] Wherein, the fixed-power adjustment component also includes a second light trap. When the second attenuator is located in the transmission path of the light beam, the light beam incident on the reflective element is partially reflected by the reflective element to the second light trap.

[0023] Compared with the prior art, the invention can achieve the following beneficial effects:

[0024] The light beam power control device is mainly composed of a continuous adjustment component and a fixed-multiple adjustment component. The continuous adjustment component can realize continuous adjustment control of the power of the laser beam, and the fixed-multiple adjustment component can realize fixed-rate attenuation adjustment of the laser beam power. Both the continuous adjustment component and the fixed-multiple adjustment component can be moved into or out of the optical path. Therefore, accurate adjustment control of the light beam power in the range of 0% to 100% can be realized, which is beneficial to improving the adaptability of the light beam power control device to various power adjustment requirements; the optical elements in the continuous adjustment component and the fixed-multiple adjustment component are all installed in a triangular mounting seat, and the mounting seat is designed with grooves at specific angles and positions to facilitate the positioning and installation of the optical elements. Therefore, the optical elements can be easily replaced; the light beam power control device is also provided with a purge component, which is used to purge the optical elements, which is beneficial to reducing the risk of damage to the optical elements; the layout of the various components in the light beam power control device is relatively compact, so that the light beam power control device is easy to be set in the light path. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0026] Figure 1 A schematic diagram of a case where the continuous adjustment component and the fixed magnification adjustment component described in an embodiment of the present invention are both moved out of the optical path;

[0027] Figure 2 A schematic diagram of the continuous adjustment component and the fixed magnification adjustment component described in the embodiment of the present invention when both are moved into the optical path;

[0028] Figure 3 A schematic diagram of a case where the continuous adjustment component according to an embodiment of the present invention is moved out of the optical path and the fixed magnification adjustment component is moved into the optical path;

[0029] Figure 4A schematic diagram of a case where the continuous adjustment component according to an embodiment of the present invention moves into the optical path and the fixed magnification adjustment component moves out of the optical path;

[0030] Figure 5 A schematic diagram of the structure of a beam power control device according to an embodiment of the present invention;

[0031] Figure 6 A partial structural schematic diagram of a continuous adjustment component according to an embodiment of the present invention;

[0032] Figure 7 A partial structural schematic diagram of a fixed magnification adjustment component according to an embodiment of the present invention;

[0033] Figure 8 Another structural schematic diagram of the light beam power control device according to an embodiment of the present invention;

[0034] Fig. 9 A schematic diagram of the structure of the polarization adjustment unit described in the embodiment of the present invention;

[0035] Fig.10 A schematic diagram of the structure of the first attenuator and the first driving unit according to an embodiment of the present invention;

[0036] Fig.11 Another structural schematic diagram of the first attenuator and the first driving unit described in the embodiment of the present invention;

[0037] Fig.12 A schematic diagram of the structure of the exterior of a shell of a beam power control device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the invention more clear, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the invention and do not constitute a limitation of the invention.

[0039] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0040] In the description of the invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, the meaning of "multiple" is two or more.

[0041] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0042] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0043] refer to Figures 1 to 4 The present invention provides a light beam power control device, comprising: a continuous adjustment component 10 and a fixed-power adjustment component 20 arranged along the transmission direction of the light beam 30, the continuous adjustment component 10 can be moved into or out of the transmission path of the light beam 30, and the fixed-power adjustment component 20 can be moved into or out of the transmission path of the light beam 30; when the continuous adjustment component 10 is located in the transmission path of the light beam 30, it is used to continuously adjust the power of the light beam 30; when the fixed-power adjustment component 20 is located in the transmission path of the light beam 30, it is used to attenuate the power of the light beam 30 at a fixed rate.

[0044] Among them, the light beam usually refers to a laser light beam. It can be understood that if the light beam power control device is only provided with a continuously adjustable component that can be moved into or out of the light path, the laser light beam power can only be continuously adjusted within a larger power range, and precise continuous adjustment cannot be achieved within a smaller power range, nor can rapid fixed power adjustment be achieved. If the light beam power control device is only provided with a fixed power adjustable component that can be moved into or out of the light path, the power of the light beam can only be adjusted in a fixed power manner, and continuous adjustment cannot be achieved. In the light beam power control device provided by the embodiment of the present invention, the continuous adjustment component 10 and the fixed-multiple adjustment component 20 can be moved into or out of the light path separately. In this way, not only can the power of the light beam be continuously adjusted within the range of 0% to 100%, but the power of the light beam can also be adjusted in a fixed-multiple manner. In addition, in addition to continuous adjustment within a larger power range, precise continuous adjustment can also be achieved within a smaller power range, and fixed-multiple adjustment can be achieved within a smaller power range. The continuous adjustment component 10 and the fixed-multiple adjustment component 20 can be used in combination in a variety of modes to overcome the problem of the single function of the existing adjustable attenuator module, which is beneficial to improving the adaptability of the light beam power control device to various power adjustment requirements.

[0045] Figures 1 to 4 It is a schematic diagram of the structure of the beam power control device in four usage modes. Specifically, Figure 1 It is a schematic diagram when the continuous adjustment component 10 and the fixed magnification adjustment component 20 are both moved out of the optical path; Figure 2 It is a schematic diagram when the continuous adjustment component 10 and the fixed magnification adjustment component 20 are both moved into the optical path; Figure 3 It is a schematic diagram when the continuous adjustment component 10 moves out of the light path and the fixed magnification adjustment component 20 moves into the light path; Figure 4 It is a schematic diagram when the continuous adjustment component 10 moves into the optical path and the fixed magnification adjustment component 20 moves out of the optical path.

[0046] refer to Figure 5 In some embodiments, the continuous adjustment component 10 includes a first driving unit 110 and a first attenuator 100 connected to each other. The first attenuator 100 can be moved into or out of the transmission path of the light beam. The first driving unit 110 is used to drive the first attenuator 100 to move into or out of the transmission path of the light beam.

[0047] refer to Figure 5 , Figure 6 , Figure 8 and Fig.10In some embodiments, the first attenuator 100 includes: a first mounting seat 103, the first mounting seat 103 having a first mounting window and a second mounting window; a polarized beam splitter element 101, the polarized beam splitter element 101 is mounted on the outside of the first mounting window using an annular thin pressing sheet; a first compensation element 102, the first compensation element 102 is mounted on the outside of the second mounting window using an annular thin pressing sheet. The first driving unit 110 is connected to the first mounting seat 103, and is used to drive the polarized beam splitter element 101 and the first compensation element 102 to move into or out of the optical path. The annular thin pressing sheet is used to cooperate with the first mounting seat 103 to fix the polarized beam splitter element 101 and the first compensation element 102, which facilitates the disassembly of the polarized beam splitter element 101 and the first compensation element 102, and facilitates maintenance and replacement when the polarized beam splitter element 101 or the first compensation element 102 is damaged or has other problems.

[0048] It should be noted that the first mounting seat 103 is a triangular structure designed according to the specific angles and positions of the polarizing beam splitter element 101 and the first compensation element 102. The polarizing beam splitter element 101 and the first compensation element 102 are arranged at the Brewster angle, that is, the position and angle of the polarizing beam splitter element 101 need to satisfy the requirement that the light beam enters the polarizing beam splitter element 101 at the Brewster angle, and the first compensation element 102 is symmetrically arranged with the polarizing beam splitter element 101.

[0049] refer to Figure 5 In some embodiments, the continuous adjustment component 10 further includes a polarization adjustment unit 130, which is located in the transmission path of the light beam. The polarization adjustment unit 130 is used to adjust the polarization direction of the light beam. When the first attenuator 100 is located in the transmission path of the light beam, the light beam passes through the polarization adjustment unit 130 and is incident on the first attenuator 100.

[0050] refer to Figure 6 and Figure 8 In some embodiments, the polarization adjustment unit 130 includes a rotatable half-wave plate 131 .

[0051] It can be understood that the first attenuator 100 is a continuously adjustable attenuator, and the principle of the continuously adjustable attenuator is as follows: the light beam emitted by the laser is vertically incident on the rotatable 1 / 2 wave plate (half-wave plate 131), and the polarization direction of the outgoing light beam emitted from the 1 / 2 wave plate changes, and the outgoing light beam is then incident on the polarization beam splitter element 101 at the Brewster angle. In some examples, the polarization beam splitter element 101 is a polarization beam splitter with a dielectric coating, and the polarization beam splitter can determine the splitting ratio according to the polarization direction of the light beam. After the outgoing light beam passes through the polarization beam splitter element 101, a part of it is reflected and a part of it is transmitted, and the light intensity of the transmitted light is attenuated. The transmitted light is incident on the first compensation element 102 to eliminate the optical path difference caused by the thickness of the polarization beam splitter element 101. In some examples, the first compensation element 102 is a compensation plate. It should be noted that the thickness of the compensation plate is the same as that of the polarizing beam splitter. The compensation plate has an anti-reflection coating, which is insensitive to the incident angle. The light intensity attenuation ratio of the continuously variable attenuator can be controlled by adjusting the rotation angle of the 1 / 2 wave plate.

[0052] In some embodiments, reference Figure 5 The beam power control device further comprises a housing 40, which has a mounting cavity 41. The fixed power adjustment component 20, the first driving unit 110 and the first attenuator 100 are all arranged in the mounting cavity 41. The housing 40 also has an incident window and an exit window arranged oppositely. The light beam enters the mounting cavity 41 from the incident window and exits from the exit window. The polarization adjustment unit 130 is arranged outside the incident window away from the mounting cavity 41. It should be noted that the mounting cavity 41 is a sealed cavity, which provides a relatively sealed environment for the optical elements arranged therein, reduces the contamination of the optical elements by tiny particles, and thus avoids the damage of the optical elements caused by the laser irradiating on the optical elements with contaminants.

[0053] It should be noted that in the drawings provided in the embodiments of the present invention, the continuous adjustment component 10 is close to the incident window, and the fixed-power adjustment component 20 is close to the exit window. It can be understood that in other embodiments, the continuous adjustment component 10 can be set close to the exit window, and the fixed-power adjustment component 20 can be set close to the incident window.

[0054] In some embodiments, reference Figure 5 and Fig.10 The first driving unit 110 includes a first cylinder 111 , and a free end of the first cylinder 111 is connected to the first attenuator 100 . Specifically, the free end of the first cylinder 111 is connected to the first mounting seat 103 .

[0055] In some embodiments, reference Fig.11The first driving unit 110 further includes a first protective cover 112, which is sleeved on the outer ring of the first cylinder 111. The first protective cover 112 is used to protect the magnetic switch, cables and air pipe on the first cylinder 111 from being damaged by the ultraviolet laser.

[0056] In some embodiments, reference Figure 5 The beam power control device further includes a first purge assembly 300, which is used to purge the optical element of the first attenuator 100. The optical element of the first attenuator 100 refers to the polarization beam splitter element 101. The first purge assembly 300 is used to purge the polarization beam splitter element 101 in real time to prevent tiny particles in the air from adhering to the incident surface of the polarization beam splitter element 101, thereby alleviating the risk of damage to the polarization beam splitter element 101 under laser irradiation.

[0057] In some embodiments, the blowing end of the first purge assembly 300 is disposed on the outer surface of the first protective cover 112 away from the first cylinder 111. In this way, it is avoided to set an additional fixing structure to fix the blowing end, which is conducive to realizing a reasonable layout of various components.

[0058] In some embodiments, reference Figure 5 and Figure 6 The continuous adjustment component 10 also includes a first light trap 120. When the first attenuator 100 is located in the transmission path of the light beam, the light beam passes through the polarization adjustment unit 130 and is incident on the polarization splitter element 101. The polarization splitter element 101 reflects part of the light beam to the first light trap 120.

[0059] In some embodiments, reference Fig. 9 The polarization adjustment unit 130 also includes a motor 132, a first gear 136, a second gear 135 and a wave plate mounting member 134, wherein the first gear 136 is mounted on the rotating shaft of the motor 132, the second gear 135 is transmission-connected to the first gear 136, the wave plate mounting member 134 has a wave plate mounting hole, the half-wave plate 131 is arranged in the wave plate mounting hole, the wave plate mounting member 134 is connected to the second gear 135, and the through hole of the second gear 135 is opposite to the wave plate mounting hole, and the wave plate mounting hole is also opposite to the incident window.

[0060] In some embodiments, reference Fig. 9 The polarization adjustment unit 130 also includes a bearing 133. The wave plate mounting member 134 cooperates with the bearing 133, the first gear 136 and the second gear 135. Driven by the motor 132, the half-wave plate 131 can be rotated 360 degrees, and the half-wave plate 131 that can rotate at an angle can cooperate with the first attenuator 100 to realize free adjustment and control of the beam power. It can be understood that the half-wave plate 131 is always in the optical path and does not move in or out.

[0061] In some embodiments, reference Figure 5 The fixed magnification adjustment component 20 includes a second driving unit 210 and a second attenuator 200 connected to each other. The second attenuator 200 can be moved into or out of the transmission path of the light beam. The second driving unit 210 is used to drive the second attenuator 200 to move into or out of the transmission path of the light beam.

[0062] In some embodiments, reference Figure 5 , Figure 7 and Figure 8 The second attenuator 200 includes: a second mounting seat 203, the second mounting seat 203 has a third mounting window and a fourth mounting window; a reflective element 201, the reflective element 201 is mounted on the outside of the third mounting window by using an annular thin pressing sheet; a second compensating element 202, the second compensating element 202 is mounted on the outside of the fourth mounting window by using an annular thin pressing sheet. The second driving unit 210 is connected to the second mounting seat 203, and is used to drive the reflective element 201 and the second compensating element 202 to move into or out of the optical path. The use of an annular thin pressing sheet and the second mounting seat 203 to fix the reflective element 201 and the second compensating element 202 facilitates the disassembly of the reflective element 201 and the second compensating element 202, and facilitates maintenance and replacement when the reflective element 201 or the second compensating element 202 is damaged or has other problems.

[0063] It should be noted that the second mounting seat 203 is a triangular structure designed according to the specific angle and position of the reflective element 201 and the second compensation element 202. The reflective element 201 and the second compensation element 202 are symmetrically arranged. In some examples, the position and angle of the reflective element 201 satisfy the requirement that the light beam enters the reflective element 201 at an angle of 45°.

[0064] In some embodiments, reference Figure 5 and Figure 7 The fixed magnification adjustment component 20 also includes a second light trap 220. When the second attenuator 200 is located in the transmission path of the light beam, the light beam incident on the reflective element 201 is partially reflected by the reflective element 201 to the second light trap 220.

[0065] It can be understood that the second attenuator 200 is a fixed-power attenuator. The principle of the fixed-power attenuator is as follows: in some examples, the light beam is incident on the reflective element 201 at an angle of 45°. The reflective element 201 can be a reflector. Part of the light beam is reflected and part is transmitted. The reflected light enters the second light trap 220 and is absorbed. The intensity of the transmitted light is attenuated. The attenuation ratio is determined by the reflectivity of the reflective element 201. The transmitted light is incident on the second compensation element 202. The second compensation element 202 can be a compensation plate. The thickness of the compensation plate is the same as the thickness of the reflector. The second compensation element 202 is used to eliminate the optical path difference caused by the thickness of the reflective element 201.

[0066] In some embodiments, the second driving unit 210 includes a second cylinder 211, and a free end of the second cylinder 211 is connected to the second attenuator 200. Specifically, the free end of the second cylinder 211 is connected to the second mounting seat 203.

[0067] In some embodiments, the second driving unit 210 further includes a second protective cover 212, which is sleeved on the outer ring of the second cylinder 211. The second protective cover 212 is used to protect the magnetic switch, cables and air pipes on the second cylinder 211 from being damaged by the ultraviolet laser.

[0068] In some embodiments, the beam power control device further includes a second purge assembly 310, which is used to purge the optical element of the second attenuator 200. The optical element of the second attenuator 200 refers to the reflective element 201, and the reflective element 201 is purged in real time by the second purge assembly 310 to prevent tiny particles in the air from adhering to the incident surface of the reflective element 201, thereby alleviating the risk of damage to the reflective element 201 under laser irradiation.

[0069] In some embodiments, the blowing end of the second purge assembly 310 is disposed on the outer surface of the second protective cover 212 away from the second cylinder 211. In this way, it is avoided to set an additional fixing structure to fix the blowing end, which is conducive to realizing the reasonable layout of various components.

[0070] In some embodiments, reference Fig.12 The air inlet end 43 of the first purge assembly 300 and the air inlet end 42 of the second purge assembly 310 are installed on the shell 40. It should be noted that when setting the first purge assembly 300 and the second purge assembly 310, it is necessary to avoid interference between the first purge assembly 300 and the first attenuator 100 moved out of the optical path, and to avoid interference between the second purge assembly 310 and the second attenuator 200 moved out of the optical path. The air inlet end needs to use an air pipe to introduce CDA (CleanDry air) that has undergone special filtration treatment.

[0071] In some embodiments, reference Fig.12 The first light trap 120 and the second light trap 220 are both fixed on the outer wall of the shell 40. The first light trap 120 and the second light trap 220 both have threaded extinction patterns to absorb scattered light of laser stray light. The first light trap 120 and the second light trap 220 are both provided with exhaust pipes, which are connected to negative pressure to suck out tiny particles generated by the contact between the laser and the light trap from the light trap.

[0072] In some embodiments, reference Fig.12The first air pipe cable connection end 44 of the first cylinder 111 and the second air pipe cable connection end 45 of the second cylinder 211 are both disposed on the housing 40 .

[0073] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the disclosure of the present invention can be performed in parallel, sequentially or in different orders, as long as the desired results of the technical solution disclosed in the present invention can be achieved, and this document does not limit this.

[0074] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A beam power control device, characterized in that: include: A continuous adjustment component and a fixed-power adjustment component are arranged along the transmission direction of the light beam, wherein the continuous adjustment component can be moved into or out of the transmission path of the light beam, and the fixed-power adjustment component can be moved into or out of the transmission path of the light beam; When the continuous adjustment component is located in the transmission path of the light beam, it is used to continuously adjust the power of the light beam; When the fixed-power adjustment component is located in the transmission path of the light beam, it is used to attenuate the power of the light beam at a fixed rate.

2. The beam power control device according to claim 1, characterized in that: The continuous adjustment component includes a first driving unit and a first attenuator connected to each other. The first attenuator can be moved into or out of the transmission path of the light beam. The first driving unit is used to drive the first attenuator to move into or out of the transmission path of the light beam.

3. The beam power control device according to claim 2, characterized in that: The beam power control device further includes a first purge component, and the first purge component is used to purge the optical element of the first attenuator.

4. The beam power control device according to claim 2, characterized in that: The first driving unit includes a first cylinder, and a free end of the first cylinder is connected to the first attenuator.

5. The beam power control device according to claim 4, characterized in that: The first driving unit also includes a first protective cover, which is sleeved on the outer ring of the first cylinder. The beam power control device also includes a first purge assembly, and the blowing end of the first purge assembly is arranged on the outer surface of the first protective cover away from the first cylinder.

6. The beam power control device according to claim 2, characterized in that: The continuous adjustment component also includes a polarization adjustment unit, which is located in the transmission path of the light beam. The polarization adjustment unit is used to adjust the polarization direction of the light beam. When the first attenuator is located in the transmission path of the light beam, the light beam passes through the polarization adjustment unit and is incident on the first attenuator.

7. The beam power control device according to claim 6, characterized in that: The beam power control device also includes a shell, which has an installation cavity. The fixed power adjustment component, the first drive unit and the first attenuator are all arranged in the installation cavity. The shell also has an incident window and an exit window arranged relatively to each other. The light beam enters the installation cavity from the incident window and exits from the exit window. The polarization adjustment unit is arranged on the outside of the incident window away from the installation cavity.

8. The beam power control device according to claim 6, characterized in that: The polarization adjustment unit includes a rotatable half-wave plate.

9. The beam power control device according to claim 8, characterized in that: The polarization adjustment unit also includes a motor, a first gear, a second gear and a wave plate mounting component, wherein the first gear is mounted on the rotating shaft of the motor, the second gear is drivingly connected to the first gear, the wave plate mounting component has a wave plate mounting hole, the half-wave plate is arranged in the wave plate mounting hole, the wave plate mounting component is connected to the second gear, and the through hole of the second gear is opposite to the wave plate mounting hole.

10. The beam power control device according to claim 6, characterized in that: The first attenuator comprises: A first mounting seat, wherein the first mounting seat has a first mounting window and a second mounting window; A polarized light splitting element, wherein the polarized light splitting element is installed on the outer side of the first installation window by using an annular thin pressing sheet; A first compensation element is installed on the outer side of the second installation window by using an annular thin pressing sheet.

11. The beam power control device according to claim 10, characterized in that: The continuous adjustment component also includes a first light trap. When the first attenuator is located in the transmission path of the light beam, the light beam passes through the polarization adjustment unit and is incident on the polarization beam splitter element, and the polarization beam splitter element reflects part of the light beam to the first light trap.

12. The beam power control device according to claim 1, characterized in that: The fixed-power adjustment component includes a second driving unit and a second attenuator connected to each other. The second attenuator can be moved into or out of the transmission path of the light beam. The second driving unit is used to drive the second attenuator to move into or out of the transmission path of the light beam.

13. The beam power control device according to claim 12, characterized in that: The beam power control device further includes a second purge component, and the second purge component is used to purge the optical element of the second attenuator.

14. The beam power control device according to claim 12, characterized in that: The second driving unit includes a second cylinder, and a free end of the second cylinder is connected to the second attenuator.

15. The beam power control device according to claim 14, characterized in that: The second driving unit also includes a second protective cover, which is sleeved on the outer ring of the second cylinder. The beam power control device also includes a second purge assembly, and the blowing end of the second purge assembly is arranged on the outer surface of the second protective cover away from the second cylinder.

16. The beam power control device according to claim 12, characterized in that: The second attenuator comprises: a second mounting seat, wherein the second mounting seat has a third mounting window and a fourth mounting window; A reflective element, wherein the reflective element is installed on the outside of the third installation window by using an annular thin pressing sheet; A second compensation element, wherein the second compensation element is installed on the outer side of the fourth installation window by using an annular thin pressing sheet.

17. The beam power control device according to claim 16, characterized in that: The fixed magnification adjustment component also includes a second light trap. When the second attenuator is located in the transmission path of the light beam, the light beam incident on the reflective element is partially reflected by the reflective element to the second light trap.

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