Adsorption assembly and exposure device with same

Abstract

The invention discloses an adsorption assembly and an exposure device with the same, the adsorption assembly comprises an adsorption part, a pressing plate part and a communicating piece, the adsorption part comprises a first adsorption part and a second adsorption part, the first adsorption part and the second adsorption part are arranged at an interval, and the first adsorption part and the second adsorption part can be used for adsorbing a bearing substrate; the pressing plate part is arranged at the edge of the adsorption part and is used for limiting the substrate; the communicating pieces are arranged between every two adjacent adsorption parts, and the communicating holes selectively communicate with the adsorption parts so as to adjust the adsorption range. The communication piece is arranged between the first adsorption part and the second adsorption part, so that the communication piece is suitable for selectively controlling the communication condition of the first adsorption part and the second adsorption part by controlling the opening and closing condition of the communication piece in the adsorption use process of the adsorption assembly; therefore, the adsorption limiting effect of the adsorption assembly on the substrate is adaptively adjusted, and the substrates of different sizes can be well adsorbed, limited and transported through the adsorption assembly.

Description

Technical Field

[0001] The present invention relates to the technical field of adsorption components, and in particular to an adsorption component and an exposure device having the same. Background Art

[0002] In the prior art, during the exposure process of the substrate, it is suitable to use an adsorption component to adsorb and restrict the substrate and then transport it to the subsequent process for exposure processing, so that the automated processing of the exposure device can be realized. In the related art, the exposure device often needs to perform adsorption processing on substrates of various sizes during use, and the current commonly used technical means is to set the adsorption component to the style of large-size substrates, and when adsorbing small-size substrates, it is suitable to block the excess part to ensure that the adsorption effect can fully act on the corresponding small-size substrate. The above means not only require manual operation, but also have low efficiency, and manual operation cannot fully ensure that the adsorption effect of the adsorption component can fully transfer the adsorption effect to the substrate according to the design. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to provide an adsorption component, which is provided with a first adsorption part and a second adsorption part, and a connecting piece is provided between the first adsorption part and the second adsorption part, so that different adsorption ranges can be adjusted by connecting or not connecting the connecting piece, so that the adsorption component can be adaptively adjusted for substrates of different sizes during use, so that the adsorption component can provide a good adsorption effect to meet the use requirements of the adsorption component while having good adaptability.

[0004] Another object of the present invention is to provide an exposure device, in which the adsorption assembly as shown above is provided.

[0005] According to an embodiment of the present invention, the adsorption component includes: an adsorption part, a pressure plate part and a connecting piece, the adsorption part is multiple and includes at least a first adsorption part and a second adsorption part, the first adsorption part and the second adsorption part are arranged at intervals, and the first adsorption part and the second adsorption part can both be used to adsorb a supporting substrate; the pressure plate part is arranged at the edge of the adsorption part, and the pressure plate part is used to limit the substrate; the connecting piece is arranged between two adjacent ones of the multiple adsorption parts, and the connecting hole selectively connects the adsorption part to adjust the adsorption range.

[0006] According to the adsorption component of the embodiment of the present invention, a connecting piece is provided between the first adsorption part and the second adsorption part. During the adsorption use of the adsorption component, it is suitable to control the opening and closing of the connecting piece so that the connecting piece is suitable for selectively controlling the connection between the first adsorption part and the second adsorption part, so that the adsorption part can adjust the adsorption range relatively simply during use, thereby allowing the adsorption component to adaptively adjust the adsorption limiting effect of the substrate, so that substrates of different sizes can be better adsorbed, limited and transported through the adsorption component, thereby improving the performance of the exposure device in subsequent production use.

[0007] In some embodiments, the connecting member includes: a connecting hole and a connecting valve, the connecting hole is located at the junction of the first adsorption part and the second adsorption part, the connecting valve is arranged opposite to the connecting hole, and the connecting valve selectively connects the adjacent first adsorption part and the second adsorption part.

[0008] In some embodiments, the adsorption part includes: an adsorption base and a suction cup body, the suction cup body is supported on the adsorption base, the first adsorption part and the second adsorption part are constructed on the suction cup body, the cross-section of the first adsorption part is square, the cross-section of the second adsorption part is L-shaped, and at least part of the second adsorption part is located on the outside of the first adsorption part, and the connecting piece is provided at the junction of the first adsorption part and the second adsorption part.

[0009] In some embodiments, the adsorption part further includes: a sealing ring, and the suction cup body is further provided with a groove, and the sealing ring is arranged in the groove.

[0010] In some embodiments, the pressure plate portion includes a first pressure plate component and a second pressure plate component; there are two first pressure plate components, one of which is formed on one side of the suction cup body, and the other first pressure plate component is formed at one end of the suction cup body; there are two second pressure plate components, one of which is formed on the other side of the suction cup body, and the other first pressure plate component is formed at the other end of the suction cup body.

[0011] In some embodiments, the first pressure plate member includes: a first cylinder, a first pressure rod and a first buffer pad, the first cylinder is arranged on the suction cup body, the first pressure rod is arranged at the free end of the first cylinder, the first cylinder is used to drive the first pressure rod to move and restrict the substrate, and the first buffer pad is provided on the side of the first pressure rod that is in contact with the substrate.

[0012] In some embodiments, the second pressure plate component includes: a working motor, a synchronization component, a second cylinder, a second pressure rod and a second buffer pad, the synchronization component is connected to the working motor; the second cylinder is arranged on the synchronization component; the second pressure rod is connected to the output end of the second cylinder, the working electrode drives the second pressure rod to move horizontally, and the second cylinder is used to drive the second pressure rod to move vertically; the second buffer pad is provided on the side of the second pressure rod that is in contact with the substrate.

[0013] In some embodiments, it further includes: a lifting member, which is disposed on the adsorption member and is used to drive the substrate to separate from the adsorption member.

[0014] In some embodiments, the lifting member includes: a lifting base plate, a lifting pin nozzle, a lifting cylinder and a guide member, and the lifting base plate moves in a vertical direction; the lifting pin nozzle is arranged on the lifting base plate, and the lifting pin nozzle is arranged opposite to the substrate after passing through the suction cup; the lifting cylinder is fixedly connected to the adsorption base; the guide member is arranged at the edge of the lifting base plate, and the guide member is used to limit the moving direction of the lifting base.

[0015] The exposure device according to the embodiment of the present invention includes the adsorption component as described above.

[0016] According to the exposure device of the embodiment of the present invention, since an adsorption assembly as shown above is provided in the exposure device, a connecting piece is provided between the first adsorption part and the second adsorption part. During the adsorption use of the adsorption assembly, it is suitable to control the opening and closing of the connecting piece so that the connecting piece is suitable for selectively controlling the connection between the first adsorption part and the second adsorption part, so that the adsorption part can adjust the adsorption range relatively simply during use, thereby allowing the adsorption assembly to adaptively adjust the adsorption restriction effect of the substrate, so that substrates of different sizes can be better adsorbed, restricted and transported through the adsorption assembly, thereby allowing the exposure device to improve its performance in subsequent production use.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 is a schematic structural diagram of an exposure device according to an embodiment of the present invention; Figure 2 is a schematic structural diagram of an adsorption portion according to an embodiment of the present invention; Figure 3is a schematic structural diagram of a first pressing plate member according to an embodiment of the present invention; Figure 4 is a schematic structural diagram of a second pressing plate member according to an embodiment of the present invention; Figure 5 is a schematic structural diagram of a jacking member according to an embodiment of the present invention; Reference numerals: Adsorption component 10, Adsorption part 100, first adsorption part 110, second adsorption part 120, adsorption base 130, suction cup body 140, sealing ring 150, groove 151, The pressing plate part 200, the first pressing plate member 210, the first cylinder 211, the first pressing rod 212, the first buffer pad 213, the second pressing plate member 220, the working motor 221, the synchronous member 222, the second cylinder 223, the second pressing rod 224, the second buffer pad 225, Connecting piece 300, connecting hole 310, Lifting member 400 , lifting base plate 410 , ejector nozzle 420 , lifting cylinder 430 , and guide member 440 . DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. Embodiments of the present invention are described in detail below.

[0020] Reference below Figure 1-Figure 5 The adsorption assembly 10 according to the embodiment of the present invention is described, including: an adsorption portion 100 , a pressing plate portion 200 and a connecting piece 300 .

[0021] Specifically, the adsorption part 100 is multiple and includes at least a first adsorption part 110 and a second adsorption part 120, the first adsorption part 110 and the second adsorption part 120 are arranged at intervals, and the first adsorption part 110 and the second adsorption part 120 can both be used to adsorb the supporting substrate; the pressure plate part 200 is arranged at the edge of the adsorption part 100, and the pressure plate part 200 is used to limit the substrate; the connecting part 300 is arranged between two adjacent ones of the multiple adsorption parts 100, and the connecting hole selectively connects the adsorption part 100 to adjust the adsorption range.

[0022] It should be noted that during the use of the adsorption component 10, it is suitable to carry the substrate on the adsorption component 10, and then the adsorption component 10 adsorbs the substrate so that the adsorption component 10 can flatten the substrate during the adsorption process. The flattened substrate is convenient for transportation and exposure, so that the impact of the substrate during transportation is reduced, and the flatly transported substrate can better exert the exposure performance on the substrate during subsequent exposure, so that the subsequent production of the substrate has higher performance.

[0023] Moreover, in actual use, substrates often have production requirements of different sizes. Therefore, the use of the adsorption component 10 also needs to be adjusted accordingly according to substrates of different sizes. The present application provides an adsorption component 10, which includes an adsorption portion 100, a pressure plate portion 200 and a connecting piece 300. The adsorption portion 100 is suitable for providing an adsorption effect to adsorb and fix the substrate. In order to make the restriction of the substrate on the adsorption portion 100 more reliable, a pressure plate portion 200 is provided to press on the edge of the substrate to further limit the reliability of the substrate in the adsorption component 10, so as to reduce the impact on the substrate during transportation. At the same time, during subsequent exposure, the exposure effect can act on the substrate more reliably according to the design, so that the production effect of the substrate is improved.

[0024] Specifically, the adsorption portion 100 is suitable for being constructed with a first adsorption portion 110 and a second adsorption portion 120, and the first adsorption portion 110 and the second adsorption portion 120 are both configured to provide adsorption capabilities to adsorb the substrate, and the first adsorption portion 110 and the second adsorption portion 120 are spaced apart so that during use, the adsorption portion 100 is suitable for selecting the first adsorption portion 110 or the first adsorption portion 110 and the second adsorption portion 120 to adsorb and restrict the substrate as required, so that during use, the adsorption portion 100 can select different adsorption ranges as required to adsorb the substrate, so that during use, the adsorption component 10 can select different adsorption ranges as required to meet the use requirements of substrates of different sizes, so that the applicability of the adsorption portion 100 is improved.

[0025] Furthermore, a connecting piece 300 is constructed between the first adsorption part 110 and the second adsorption part 120. When the first adsorption part 110 is used for adsorption and the second adsorption part 120 is not used for adsorption, the connecting piece 300 between the first adsorption part 110 and the second adsorption part 120 is suitable for closing, so that the adsorption effect is suitable for adsorption and restriction of the substrate through the adsorption range of the first adsorption part 110, so that the substrate can be restricted for subsequent transportation and exposure. Similarly, when the connecting piece 300 is opened, it is suitable for the adsorption range of the first adsorption part 110 to be connected with the adsorption range of the second adsorption part 120. In this way, during the use of the adsorption part 100, it is suitable to adjust different adsorption ranges by controlling whether the connecting piece 300 is connected or not, so that the adsorption component 10 has different adsorption ranges during use to meet the adsorption requirements of substrates of different sizes, thereby improving the use applicability of the adsorption component 10 when restricting the substrate.

[0026] According to the adsorption component 10 of the embodiment of the present invention, by providing a connecting piece 300 between the first adsorption part 110 and the second adsorption part 120, during the adsorption use of the adsorption component 10, it is suitable to control the opening and closing of the connecting piece 300 so that the connecting piece 300 is suitable for selectively controlling the connection between the first adsorption part 110 and the second adsorption part 120, so that the adsorption part 100 can adjust the adsorption range relatively easily during use, thereby allowing the adsorption component 10 to adaptively adjust the adsorption restriction effect of the substrate, so that substrates of different sizes can be better adsorbed, restricted and transported by the adsorption component 10, thereby improving the performance of the exposure device in subsequent production use.

[0027] In some embodiments, the connecting member 300 includes: a connecting hole 310 and a connecting valve, the connecting hole 310 is located at the junction of the first adsorption part 110 and the second adsorption part 120, the connecting valve is arranged opposite to the connecting hole 310, and the connecting valve selectively connects the adjacent first adsorption part 110 and the second adsorption part 120. It should be noted that the connecting member 300 is suitable for connecting the first adsorption part 110 and the second adsorption part 120 so that the adsorption part 100 can be adjusted to different adsorption ranges by controlling the connecting member 300 during use. Specifically, the connecting member 300 is suitable for including a connecting hole 310 and a connecting valve, one end of the connecting hole 310 is connected to the first adsorption part 110, and the other end of the connecting hole 310 is connected to the second adsorption part 120, and a connecting valve is provided in the connecting hole 310, and the opening and closing of the connecting valve is controlled to achieve the connection between the connecting hole 310 and the first adsorption part 110 and the second adsorption part 120 on both sides, so that the use of the adsorption component 10 during use is simpler and more convenient, so as to improve the convenience of use of the adsorption component 10.

[0028] In some embodiments, the adsorption part 100 includes: an adsorption base 130 and a suction cup body 140, the suction cup body 140 is supported on the adsorption base 130, the first adsorption part 110 and the second adsorption part 120 are constructed on the suction cup body 140, the cross section of the first adsorption part 110 is square, the cross section of the second adsorption part 120 is L-shaped, and at least part of the second adsorption part 120 is located outside the first adsorption part 110, and a connecting piece 300 is provided at the junction of the first adsorption part 110 and the second adsorption part 120. In other words, the adsorption part 100 is suitable for including the adsorption base 130 and the adsorption body during the construction process, and the adsorption base 130 provides a supporting function so that the adsorption base 130 can carry the adsorption body. Similarly, the suction cup body 140 is suitable for providing a bearing function for the construction of the first adsorption part 110 and the second adsorption part 120. Moreover, in some specific embodiments, it is suitable to construct the cross-section of the first adsorption part 110 into a square shape, and the cross-section of the second adsorption part 120 into an L-shape. In this way, in the process of setting the interval between the first adsorption part 110 and the second adsorption part 120, it is suitable to construct the second adsorption part 120 on the outside of the first adsorption part 110, so that when the adsorption part 100 adjusts the range during use, the connection between the first adsorption part 110 and the second adsorption part 120 can be used to better realize the adjustment of the adsorption range, so that the performance of the adsorption component 10 is improved.

[0029] In some embodiments, the adsorption part 100 further includes: a sealing ring 150, and a groove 151 is further provided on the suction cup body 140, and the sealing ring 150 is arranged in the groove 151. It is understandable that during the use of the adsorption part 100, a substrate with insufficient flatness may be encountered. At this time, a sealing ring 150 is provided on the adsorption part 100, and the sealing ring 150 is suitable for being attracted to the substrate. Due to the influence of the adsorption effect, the sealing ring 150 can flatten the substrate, so that the subsequent restricted transportation and adsorption exposure of the substrate become reliable, thereby improving the performance of the exposure device. Specifically, an annular groove 151 is suitable for being constructed on the suction cup body 140, and the annular groove 151 is suitable for providing a position for the arrangement of the sealing ring 150, so that the construction and assembly of the sealing ring 150 are simpler and more reliable, and the sealing ring 150 can be better adsorbed with the substrate according to the design during use to flatten the substrate, so that the restricted use performance of the substrate on the adsorption component 10 is higher.

[0030] In some embodiments, the pressure plate portion 200 includes a first pressure plate component 210 and a second pressure plate component 220; there are two first pressure plate components 210, one of which is formed on one side of the suction cup body 140, and the other first pressure plate component 210 is formed at one end of the suction cup body 140; there are two second pressure plate components 220, one of which is formed on the other side of the suction cup body 140, and the other first pressure plate component 210 is formed at the other end of the suction cup body 140.

[0031] That is, the pressing plate part 200 is suitable for including a first pressing plate 210 and a second pressing plate 220, the first pressing plate 210 is suitable for being fixed at one end of the suction cup body 140, and the second pressing plate 220 is suitable for being movably arranged at the other end of the suction cup body 140, so that the first pressing plate 210 can be arranged relative to the second pressing plate 220, so that the first pressing plate 210 and the second pressing plate 220 are suitable for restricting the substrate from both sides of the substrate, so that the restriction effect of the substrate on the adsorption part 100 is more reliable. In addition, since the second pressing plate 220 is suitable for being movably arranged on the suction cup body 140, so that the second pressing plate 220 is suitable for adsorption according to different substrate sizes, so that substrates of different sizes can be better restricted on the adsorption part 100, so that the adsorption assembly 10 can not only better restrict the substrate during use, but also can be flattened by the pressing plate part 200 when the substrate is warped, so that the use performance of the adsorption assembly 10 is improved.

[0032] In some embodiments, the first pressure plate member 210 includes: a first cylinder 211, a first pressure rod 212 and a first buffer pad 213. The first cylinder 211 is arranged on the suction cup body 140, and the first pressure rod 212 is arranged at the free end of the first cylinder 211. The first cylinder 211 is used to drive the first pressure rod 212 to move and limit the substrate. The first buffer pad 213 is provided on the side of the first pressure rod 212 that is in contact with the substrate. It can be understood that, during the application of the first pressure plate 210, it is suitable to include a first cylinder 211, a first pressure rod 212 and a first buffer pad 213. The first cylinder 211 is suitable to provide a driving action to drive the first pressure rod 212 to move, so that the first pressure rod 212 can restrict the substrate on the side facing the substrate, so that the restriction effect of the substrate on the adsorption part 100 is improved. Moreover, in order to avoid excessive force of the pressure rod on the substrate to affect the performance of the substrate, a first buffer pad 213 is also provided to avoid rigid contact between the first pressure rod 212 and the substrate, thereby reducing the structural influence of the adsorption component 10 on the substrate during the adsorption process, so that the transportation and use of the substrate is safer and more reliable.

[0033] In some embodiments, the second pressure plate member 220 includes: a working motor 221, a synchronous member 222, a second cylinder 223, a second pressure rod 224 and a second buffer pad 225, the synchronous member 222 is connected to the working motor 221; the second cylinder 223 is arranged on the synchronous member 222; the second pressure rod 224 is connected to the output end of the second cylinder 223, the working electrode drives the second pressure rod 224 to move horizontally, and the second cylinder 223 is used to drive the second pressure rod 224 to move vertically; a second buffer pad 225 is provided on the side of the second pressure rod 224 that is in contact with the substrate.

[0034] It can be understood that during the use of the second pressure plate component 220, it is suitable to include a working motor 221, a synchronous component 222, a second cylinder 223, a second pressure rod 224 and a second buffer pad 225. The working motor 221 is suitable to be constructed as a stepper motor so that the working motor 221 can provide a driving action for movement to adjust the limit position of the second pressure plate component 220, and the synchronous component 222 is suitable to be connected to the working motor 221 to transmit the driving action of the working motor 221 and adjust the position of the second pressure plate component 220 in the horizontal direction, and the second cylinder 223 is suitable to be constructed on the synchronous component 222. After adjusting to a suitable position, the second cylinder 223 is suitable to work and drive the second pressure rod 224 to move so that the second pressure rod 224 can limit the edge of the substrate. Then, in order to avoid rigid contact between the second pressure rod 224 and the substrate, a second buffer pad 225 is provided on the side of the second pressure plate for limiting the substrate, so that the safety and reliability of the second pressure plate component 220 when limiting the substrate are improved.

[0035] In some embodiments, the adsorption assembly 10 further includes: a lifting member 400, which is disposed on the adsorption member and is used to drive the substrate to detach from the adsorption member. Similarly, the adsorption assembly 10 is also suitable for adsorbing the substrate after limiting the substrate, so that the adsorption effect of the adsorption part 100 can better act on the substrate, and after the substrate is transported or the exposure process is completed, it is suitable for allowing the substrate to be detached from the restriction of the adsorption part 100, so that the lifting member 400 is suitable for driving the adsorption part 100 to release the adsorption restriction, so as to simplify the use process and make the use of the adsorption assembly 10 more convenient.

[0036] In some embodiments, the lifting member 400 includes: a lifting base plate 410, a pin nozzle 420, a lifting cylinder 430 and a guide member 440, the lifting base plate 410 moves in a vertical direction; the pin nozzle 420 is arranged on the lifting base plate 410, and the pin nozzle 420 is arranged opposite to the substrate after passing through the suction cup; the lifting cylinder 430 is fixedly connected to the adsorption base 130; the guide member 440 is arranged at the edge of the lifting base plate 410, and the guide member 440 is used to limit the moving direction of the lifting base plate 410. It can be understood that the lifting member 400 is suitable for including the lifting base plate 410, the pin nozzle 420, the lifting cylinder 430 and the guide member 440, the lifting base plate 410 is suitable for providing a supporting effect, and the pin nozzle 420 is arranged on the lifting base plate 410, so that the pin nozzle 420 can contact and adsorb according to the design during use. At the same time, the lifting cylinder 430 is suitable for providing a driving action to drive the lifting base plate 410 to move, and the guide member 440 is suitable for providing a guiding action for the movement of the lifting base plate 410, so that the lifting base plate 410 can move according to the design, so that the lifting member 400 can release the adsorption restriction effect on the substrate according to the design, so that the use process of the adsorption component 10 is simpler and more reliable.

[0037] According to an embodiment of the present invention, the exposure device includes the adsorption assembly 10 as described above. In this way, since the adsorption assembly 10 as described above is provided in the exposure device, by providing a connecting piece 300 between the first adsorption part 110 and the second adsorption part 120, during the adsorption use of the adsorption assembly 10, it is suitable to control the opening and closing of the connecting piece 300 so that the connecting piece 300 is suitable for selectively controlling the connection between the first adsorption part 110 and the second adsorption part 120, so that the adsorption part 100 can adjust the adsorption range relatively simply during use, so that the adsorption assembly 10 can adaptively adjust the adsorption restriction effect of the substrate, so that substrates of different sizes can be better adsorbed, restricted and transported through the adsorption assembly 10, thereby improving the performance of the exposure device in subsequent production use.

[0038] Other structures and operations of the exposure device according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0039] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0040] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An adsorption component, characterized in that: include: Adsorption parts, the adsorption parts are multiple and include at least a first adsorption part and a second adsorption part, the first adsorption part and the second adsorption part are arranged at intervals, and the first adsorption part and the second adsorption part can be used to adsorb the supporting substrate; A pressing plate portion, the pressing plate portion is disposed at an edge of the adsorption portion and is used to restrict the substrate; A connecting piece is provided between two adjacent ones of the plurality of adsorption parts, and the connecting hole selectively connects the adsorption parts to adjust the adsorption range.

2. The adsorption assembly according to claim 1, characterized in that: The connecting member includes: a connecting hole and a connecting valve, the connecting hole is located at the junction of the first adsorption part and the second adsorption part, the connecting valve is arranged opposite to the connecting hole, and the connecting valve selectively connects the adjacent first adsorption part and the second adsorption part.

3. The adsorption assembly according to claim 1, characterized in that: The adsorption part comprises: Adsorption base; A suction cup body, wherein the suction cup body is supported on the suction base, the first suction part and the second suction part are constructed on the suction cup body, the first suction part has a square cross-section, the second suction part has an L-shaped cross-section, and at least part of the second suction part is located on the outside of the first suction part, and the connecting piece is provided at the junction of the first suction part and the second suction part.

4. The adsorption assembly according to claim 3, characterized in that: The adsorption part further includes: a sealing ring. The suction cup body is further provided with a groove, and the sealing ring is arranged in the groove.

5. The adsorption assembly according to claim 3, characterized in that: The pressing plate portion includes a first pressing plate member and a second pressing plate member; There are two first pressing plates, one of which is formed at one side of the suction cup body, and the other of which is formed at one end of the suction cup body; There are two second pressing plates, one of which is formed at the other side of the suction cup body, and the other of which is formed at the other end of the suction cup body.

6. The adsorption assembly according to claim 5, characterized in that: The first pressure plate component includes: a first cylinder, a first pressure rod and a first buffer pad, the first cylinder is arranged on the suction cup body, the first pressure rod is arranged at the free end of the first cylinder, the first cylinder is used to drive the first pressure rod to move and limit the substrate, and the first buffer pad is provided on the side of the first pressure rod that is in contact with the substrate.

7. The adsorption assembly according to claim 5, characterized in that: The second pressing plate member comprises: Working motor; A synchronous member connected to the working motor; a second cylinder, the second cylinder being disposed on the synchronizer; A second pressure rod, the second pressure rod is connected to the output end of the second cylinder, the working electrode drives the second pressure rod to move horizontally, and the second cylinder is used to drive the second pressure rod to move vertically; A second buffer pad is provided on the side of the second pressure rod that is in contact with the substrate.

8. The adsorption assembly according to claim 3, characterized in that: Also includes: A lifting member is disposed on the adsorption member, and the lifting member is used to drive the substrate to separate from the adsorption member.

9. The adsorption assembly according to claim 8, characterized in that: The lifting member comprises: A lifting bottom plate, wherein the lifting bottom plate moves in a vertical direction; An ejector nozzle, the ejector nozzle is arranged on the lifting bottom plate, and the ejector nozzle passes through the suction cup and is arranged opposite to the substrate; A lifting cylinder, wherein the lifting cylinder is fixedly connected to the adsorption base; A guide member is arranged at the edge of the lifting base plate, and is used to limit the moving direction of the lifting base plate.

10. An exposure device, characterized in that: It comprises the adsorption component as described in any one of claims 1-9.

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