A discharge system for generating dust plasma

Abstract

The present invention discloses a discharge system for generating dust plasma. The system comprises: a particle transporter, a dust plasma discharge device, an external gas component, and a vacuum subsystem. The external gas component is connected to the second dust particle output port of the particle transporter and is used to mix the introduced gas with dust particles to form dust gas. The dust gas input end of the dust plasma discharge device is connected to the second dust particle output port of the particle transporter via a connecting pipe, which is used to discharge the dust gas to form dust plasma. The vacuum subsystem is used to create a vacuum environment within the system. The system of the present invention can effectively ensure the purity of dust particles and the uniformity of their distribution in the ionization chamber, improve the energy of the dust plasma beam, and flexibly control the beam parameters.

Description

Technical Field

[0001] The present invention belongs to the field of plasma technology, and in particular relates to a discharge system for generating dust plasma. Background Art

[0002] The information provided in this section is for the purpose of generally presenting the background of the present disclosure. To the extent described in this section, the work of the presently named inventors and aspects of the description that may not constitute prior art at the time of filing are neither explicitly nor implicitly admitted to be prior art to the present disclosure.

[0003] Dust plasma has a wide range of applications in basic research and industrial production, such as plasma processing, materials processing, and semiconductor manufacturing. Traditional dust plasma discharge devices primarily separate gas and dust and introduce them into a chamber. However, this often leads to uneven particle distribution at the initial position. Moreover, all existing dust plasma devices only use post-ionization to generate atmospheric dust plasma, that is, pre-ionizing the gas to form a plasma, and then mixing dust particles into the pre-ionized gas plasma to ultimately form a dust plasma. Although this system is simple to manufacture and has a single structure, it is only suitable for dust plasma applications in low-density and low-precision situations, such as qualitatively explaining the transmission of electromagnetic waves in dust plasma. It cannot be applied to situations that require stable discharge or high plasma density and temperature requirements, which severely limits the application range of the equipment.

[0004] Theoretically, the free paths of ionized ions and electrons in air are over 100 times shorter than in a vacuum. This results in a high degree of ion recombination and a short recombination time, making it difficult to form a high-density, long-relaxation plasma. Furthermore, atmospheric discharges are characterized by high instability, resulting in extremely poor dust plasma beam stability, making them unsuitable for most practical scientific research and application scenarios.

[0005] Therefore, achieving the effective operation of dust plasma in a vacuum is an urgent solution needed in scientific research and engineering. Summary of the Invention

[0006] The purpose of the present invention is to provide a discharge system for generating dust plasma. The system of the present invention can effectively ensure the purity of particles and the uniformity of distribution in the ionization chamber, improve the energy of the dust plasma beam, flexibly control the parameters of the beam, etc.

[0007] To achieve the above-mentioned objectives, the present invention provides a discharge system for generating dust plasma, the system comprising: a particle transporter, a dust plasma discharge device, an external gas component, and a vacuum subsystem; wherein the external gas component is connected to a second dust particle output port of the particle transporter, and is used to mix the gas introduced with dust particles to form dust gas; the dust gas input end of the dust plasma discharge device and the second dust particle output port of the particle transporter are connected via a connecting pipe, and are used to discharge the dust gas to form dust plasma; the vacuum subsystem is used to form a vacuum environment within the system; the particle transporter comprises: a transport platform, which has a movable cavity, and the plane of the bottom of the movable cavity is inclined at an angle to the direction of gravity; one end of the bottom of the movable cavity is provided with a second dust particle output port, and a mesh screen is provided at the second dust particle output port for screening the output dust The particle size of the particles; a particle storage component, which is arranged in the mobile cavity and can move horizontally along the mobile cavity, and a first dust particle output port is provided at the bottom thereof at a distance from the second dust particle output port. When the dust particles are in the output closed state, the first dust particle output port is in contact with the inclined plane at the bottom of the mobile cavity to close the first dust particle output port; a transparent quartz panel, which is detachably fixed at the opening of the mobile cavity of the transport platform to seal the mobile cavity; a three-way pipe, whose three interfaces are a dust particle input port, a gas input port and a gas output port, and the gas input port and the gas output port correspond to each other, the dust particle input port is connected to the second dust particle output port, and the gas input port is connected to the external gas component; and a vibration table, which is used to control the vibration of the transport platform to transport the dust particles to the second dust particle output port through vibration. The vacuum subsystem includes: a vacuum chamber, which is connected to the dust plasma output end of the dust plasma discharge device and the moving cavity of the particle transporter respectively; and a vacuum pump, which is connected to the vacuum chamber and is used to achieve a vacuum environment in the vacuum chamber.

[0008] Preferably, the dust plasma discharge device includes: a shell; a discharge chamber, which is fixed in the shell and has a dust gas input end and a dust plasma output end, the dust gas input end is connected to the second dust particle output port through a connecting pipe, and the dust plasma output end is connected to the vacuum chamber; a cathode, which is arranged at the input end of the discharge chamber and is used to generate a high voltage to ionize the ionized dust gas; an anode, which is arranged at the output end of the discharge chamber, an insulating layer is provided between the anode and the shell, and the anode and the shell are grounded respectively; and a DC power supply, whose negative and positive poles are electrically connected to the cathode and anode respectively.

[0009] Preferably, the cathode is fixed at a position at one end of the shell corresponding to the input end of the discharge chamber, and the anode is fixed at a position at the other end of the shell corresponding to the output end of the discharge chamber; the side of the shell connected to the cathode is made of a stainless steel plate; or / and, the cathode is made of a tungsten needle; or / and, the anode is composed of a plurality of annular polytetrafluoroethylene disks and annular copper disks alternately combined, and a gas channel is formed between the annular polytetrafluoroethylene disks and the annular copper disks; or / and, the discharge chamber is a quartz discharge chamber; or / and, the shell is made of quartz.

[0010] Preferably, the system further comprises: a cooling subsystem, the cooling subsystem comprising a circulating water path provided on the stainless steel plate of the shell, the anode and the vacuum chamber, all of which are interconnected to form a whole; a plurality of interconnected channels are distributed inside the annular copper disk, which serve as the circulating water path of the anode.

[0011] Preferably, the particle storage component has a funnel-shaped cavity, and the first dust particle output port is arranged at the bottom of the funnel-shaped cavity; or / and, the two side walls of the particle storage component parallel to its moving direction are parallel to and fit together with the inner wall of the moving cavity; or / and, the plane of the bottom of the moving cavity is inclined at an angle of 5~8° to the direction of gravity; or / and, the inclination direction of the bottom of the moving cavity is that the bottom position of the mobile cavity corresponding to the first dust particle output port is lower than the bottom position of the mobile cavity corresponding to the second dust particle output port; or / and, dust particle flow channels with narrowing openings are provided on both sides of the bottom of the mobile cavity along the conveying direction of the dust particles.

[0012] Preferably, a two-way valve is provided on the pipeline of the connecting pipeline, a first interface of the two-way valve is connected to the gas output port of the particle transporter, and a second interface thereof is connected to the dust gas input end of the dust plasma discharge device, and the two-way valve is used to control the transmission of the dust gas of the particle transporter to the dust plasma discharge device; or / and, the three-way pipeline is fixedly arranged at the second dust particle output port; or / and, the pipelines where the gas input port and the gas output port are located are inclined at an angle, and the gas input port is higher than the gas output port; or / and, a baffle is provided at the connection between the dust particle input port and the second dust particle output port, and a gap is left between the baffle and the second dust particle output port for the output of dust particles and preventing gas from flowing into the mobile cavity.

[0013] Preferably, a linear moving platform is provided in the movable cavity, and the linear moving platform is fixedly connected to the particle storage component and is used to control the horizontal movement of the particle storage component in the movable cavity.

[0014] Preferably, an adjusting knob is provided on the outer wall of the transport platform, and an end of the adjusting knob passes through the outer wall of the transport platform and is connected to the linear movable platform for driving the horizontal movement of the linear movable platform.

[0015] Preferably, the vibration table is fixed to the bottom of the transport platform, and a vibrator is provided inside the vibration table for controlling the vibration of the transport platform.

[0016] Preferably, a Langmuir probe is provided on the side wall of the vacuum chamber for plasma density diagnosis; or / and, a quartz glass window is provided on the side wall of the vacuum chamber; or / and, a sample holder is provided in the vacuum chamber, and a displacement platform is provided on the side wall of the vacuum chamber, the displacement platform is connected to the sample holder, and is used to move the sample holder horizontally; or / and, the vacuum pump adopts a vacuum pump group, including a Roots pump and a mechanical pump.

[0017] The discharge system for generating dust plasma of the present invention has the following advantages:

[0018] (1) The present invention is the first to design a system that can achieve stable output of dust particles, improving the temporal and spatial uniformity of the flow of dust particles in the pipeline. The key technology is to use piezoelectric vibration to regulate the movement of dust and the uniformity of the movement of particles in the transport channel. The mesh output port is used to ensure the temporal uniformity of the output of dust particles, ultimately ensuring that the ratio of dust particles to gas in the formed mixture remains relatively constant.

[0019] (2) The present invention uses a mixture of dust and gas for the first time to complete discharge under vacuum conditions. Existing technologies mainly complete gas discharge under atmospheric conditions and then place dust particles near the nozzle of the plasma beam. Its disadvantages are: on the one hand, the density of the plasma is low, which is determined by the free path of the air; on the other hand, it is difficult for the already formed plasma to fully ionize and dissociate with the dust particles in a timely manner. The airflow will also affect the uniformity of the distribution of dust particles, making it difficult to quantitatively evaluate the relationship between the dust plasma parameters and the preset initial conditions. The system of the present invention ensures the spatiotemporal stability of the distribution of dust particles in a vacuum in advance, and designs a connector between the particle transporter and the vacuum chamber so that the two are always in an isobaric state, further ensuring uniform mixing with the ionized gas. Under vacuum conditions, the free path of gas and ions is extended, which means a longer collision time, which is conducive to increasing the density of the dust plasma.

[0020] (3) Traditional studies generally assume that dust particles are in a uniform fully ionized plasma. However, in reality, in most physical environments, such as the plasma sheath of a hypersonic vehicle and a fusion reactor, dust particles and the plasma formation process exist simultaneously. Existing methods are difficult to simulate these physical environments. The device of the present invention uses a mixture of dust and gas to complete discharge under vacuum conditions, which is closer to the objective physical environment.

[0021] (4) The present invention uses transparent glass to design a discharge chamber. The charging and discharging behavior of dust particles in plasma is closely related to factors such as dust size, type, plasma density and temperature. The use of a transparent discharge chamber is conducive to directly collecting the corresponding electromagnetic signals and more intuitively studying the physical and chemical process of dust particles and gas molecules forming plasma in the cavity.

[0022] (5) The system of the present invention can ensure that the particle transporter and plasma discharge chamber are in the vacuum subsystem, realize dust plasma discharge under vacuum conditions, and meet the needs of most dust plasma application scenarios; improve the dust plasma parameters under atmospheric conditions; the free path of the gas in the vacuum environment is long, which is conducive to the full ionization and reaction of dust particles and gases; can realize the emission of dust plasma beams with ultra-long pulse width; realize in-situ dust plasma discharge, that is, neutral gas and dust particles are pre-mixed uniformly and then injected into the discharge chamber at the same time to ensure the sufficiency and uniformity of dust particle and gas ionization; realize the combined discharge of multiple types of gases and dust particles, and can freely obtain multiple types of dust plasma; realize the automatic and uniform transportation of dust particles of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of a three-dimensional particle transporter of the present invention.

[0024] Figure 2 It is a three-dimensional schematic diagram of the partial structure of the particle transporter of the present invention.

[0025] Figure 3 FIG. 1 is a top view of the particle transporter of the present invention.

[0026] Figure 4 This is a cross-section of the structure of the particle transporter of the present invention. Figure 1 .

[0027] Figure 5 This is a cross-section of the structure of the particle transporter of the present invention. Figure 2 .

[0028] Figure 6 Schematic diagram of the structure of the discharge system for generating dust plasma according to the present invention.

[0029] Label: 100, particle transporter; 110, transport platform; 111, second dust particle output port; 113, baffle; 120, transparent quartz panel; 130, particle storage component; 131, first dust particle output port; 140, three-way pipe; 141, dust particle input port; 142, gas input port; 143, gas output port; 150, vibration table; 210, shell; 220, discharge chamber; 221, cathode; 222, anode; 300, external gas component; 400, connecting pipe; 500, two-way valve; 600, vacuum chamber; 610, Langmuir probe; 620, displacement platform; 630, sample holder; 700, vacuum pump. DETAILED DESCRIPTION

[0030] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0031] The features described in this disclosure may be combined in any manner, and as long as there are no conflicts between the combinations of these features, all possible combinations should be considered within the scope of this specification. Each feature disclosed in this specification may be replaced by any alternative feature that provides the same, equivalent, or similar purpose. Therefore, unless otherwise specified, the features disclosed are merely general examples of equivalent or similar features.

[0032] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance; in addition, unless otherwise expressly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a communication between the internal parts of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Example 1

[0034] A discharge system for generating dust plasma, see Figures 1 to 6The system comprises a particle transporter 100, a dust plasma discharge device, an external gas component 300, and a vacuum subsystem. The external gas component 300 is connected to the second dust particle outlet 111 of the particle transporter 100 and is used to mix the incoming gas with dust particles to form dust gas. The dust gas input end of the dust plasma discharge device is connected to the second dust particle outlet 111 of the particle transporter 100 via a connecting pipe 400. The dust plasma discharge device is used to discharge the dust gas to form dust plasma. The vacuum subsystem is used to create a vacuum environment within the system. Currently, plasma generated in atmospheric environments cannot meet the requirements for plasma density, and ions recombine quickly, making it impossible to meet simulation requirements, such as the simulation of plasma formation in the sheath of a hypersonic aircraft. The present invention places the entire system in the same vacuum environment. In this vacuum environment, the free path of electrons in the gas is increased, making it easier for electrons to escape from the electric field, thereby forming a stable plasma.

[0035] Exemplarily, the external gas component 300 contains high-pressure gas, including argon, helium, nitrogen or hydrogen.

[0036] See also Figures 1 to 5 The particle transporter 100 comprises a transport platform 110, a particle storage component 130, a transparent quartz panel 120, a three-way pipe 140, and a vibrating table 150. The transport platform 110 has a movable cavity, the bottom plane of which is inclined at an angle to the direction of gravity. A second dust particle outlet 111 is provided at one end of the bottom of the movable cavity. A mesh screen is provided at this second dust particle outlet 111 for screening the particle size of the discharged dust particles. The particle storage component 130 is disposed within the movable cavity and is movable horizontally along the movable cavity. A first dust particle outlet 131 is provided at its bottom, spaced a distance from the second dust particle outlet 111. When the dust particle outlet is closed, the first dust particle outlet 131 aligns with the inclined plane of the bottom of the movable cavity, thereby closing the first dust particle outlet 131. A transparent quartz panel 120 is removably secured to the opening of the transport platform 110's movable cavity, sealing the cavity. The transparent quartz panel also facilitates observation of dust particles. The three interfaces of the three-way conduit 140 are a dust particle input port 141, a gas input port 142, and a gas output port 143. Gas input port 142 and gas output port 143 correspond to each other. Dust particle input port 141 communicates with the second dust particle output port 111, while gas input port 142 is connected to the external gas connection component 300. A vibration platform 150 is used to control the vibration of the transport platform 110, thereby transporting dust particles to the second dust particle output port 111 through vibration.

[0037] For example, the pore size of the mesh can be 0.5 mm, 1 mm, 2 mm, etc. There is no restriction on the size of the pore size, and meshes with different pore sizes are selected according to the required dust gas and ionization effect.

[0038] Illustratively, the entire material of the particle transporter 100 is stainless steel.

[0039] For example, the transparent quartz panel 120 is fixed to the opening of the moving cavity of the transport platform 110 by a fixing nut. The fixing nut can be a 2.5 mm fixing nut.

[0040] For example, the transparent quartz panel 120 may be of the same size as the top of the transport platform 110 .

[0041] The vacuum subsystem includes a vacuum chamber 600 and a vacuum pump 700. The vacuum chamber 600 is connected to the dust plasma output port of the dust plasma discharge device and the moving cavity of the particle transporter 100. The vacuum pump 700 is connected to the vacuum chamber 600 to maintain a vacuum environment within the vacuum chamber 600.

[0042] For example, the mobile cavity and vacuum chamber 600 are connected via a 1 cm diameter pipe, forming a single vacuum subsystem. Initially, the vacuum gas switch is gradually adjusted to achieve pressure equilibrium within the chamber. The balanced gas flows at a constant speed, allowing for relatively even mixing with dust particles.

[0043] Furthermore, the dust plasma discharge device comprises a housing 210, a discharge chamber 220, a cathode 221, an anode 222, and a DC power supply. The discharge chamber 220 is fixed within the housing 210 and has a dust gas input and a dust plasma output. The dust gas input is connected to the second dust particle output port 111 via a connecting pipe 400, and the dust plasma output is connected to the vacuum chamber 600. The cathode 221 is located at the input of the discharge chamber 220 and is used to generate a high voltage to ionize the dust gas. The anode 222 is located at the output of the discharge chamber 220. An insulating layer is provided between the anode 222 and the housing 210, and the housing 210 and anode 222 are both grounded. The negative pole of the DC power supply is electrically connected to the cathode 221, and the positive pole of the DC power supply is electrically connected to the anode 222.

[0044] For example, the rated parameters of the DC power supply are 10 kW, 100 A. The DC power supply is connected to the cathode 221 (such as a tungsten needle) to generate a high voltage to ionize the ionized dust gas.

[0045] Furthermore, the cathode 221 is fixed to one end of the housing 210 at a position corresponding to the input end of the discharge chamber 220, and the anode 222 is fixed to the other end of the housing 210 at a position corresponding to the output end of the discharge chamber 220. An insulating layer is provided between the anode 222 and the housing 210. The side of the housing 210 connected to the cathode 221 is made of a stainless steel plate.

[0046] Furthermore, the cathode 221 is made of a tungsten needle.

[0047] Furthermore, anode 222 is composed of a plurality of alternating annular polytetrafluoroethylene (PTFE) and copper disks, allowing dust gas to pass through the channel formed between the annular polytetrafluoroethylene and copper disks. Anode 222 serves as an accelerating electrode. The copper surface of anode 222 is susceptible to field-induced electron emission (such as thermal electron emission) at high temperatures, providing ample free electrons for the plasma and promoting gas ionization. PTFE, as an insulating material, can segment the copper electrode to form multiple independent discharge regions (microdischarges or short pulse discharges), preventing arcs from directly penetrating the entire electrode, reducing energy consumption and increasing energy density. Furthermore, the rapid heat dissipation of copper combined with the thermal insulation properties of PTFE reduces thermal stress concentration and prevents beam electrode rupture due to excessive temperature gradients.

[0048] For example, the anode 222 is composed of three annular polytetrafluoroethylene disks with a diameter of 4 cm and a thickness of 2 mm and three annular copper disks of the same size, which are alternately and tightly combined side by side. A channel with a diameter of 8 mm is formed in the middle of the annular polytetrafluoroethylene disk and the annular copper disk, and four interconnected channels are distributed inside the annular copper disk to conduct cooling water.

[0049] Furthermore, the discharge chamber 220 is a quartz discharge chamber.

[0050] Furthermore, the shell 210 is made of quartz.

[0051] Furthermore, the system also includes: a cooling subsystem, which includes a circulating water path set on the stainless steel plate of the shell 210, the anode 222 and the vacuum chamber 600, and all the water paths are interconnected to form a whole; a plurality of interconnected channels are distributed inside the annular copper disk, which serve as the circulating water path of the anode 222.

[0052] For example, a 3mm diameter circulating water channel is engraved in the stainless steel plate of the housing 210, the anode 222 and the side wall of the vacuum chamber 600. A temperature alarm for monitoring water temperature is set in the circulating water channel, and the highest warning water temperature during operation is 30°.

[0053] Furthermore, the particle storage component 130 has a funnel-shaped cavity, dust particles are added into the funnel-shaped cavity, and the first dust particle output port 131 is set at the bottom of the funnel-shaped cavity.

[0054] Exemplarily, the dust particle inlet of the particle storage component 130 is set at the top of the funnel-shaped cavity, and a transparent top cover is provided at the dust particle inlet, which on the one hand seals the dust particles and on the other hand does not affect the observation of the dust particles.

[0055] Exemplarily, the funnel-shaped cavity of the particle storage component 130 has a side wall that forms an angle of 45° with the horizontal direction.

[0056] Furthermore, the two side walls of the particle storage component 130 that are parallel to its moving direction are parallel to and in contact with the inner wall of the moving cavity.

[0057] For example, the funnel-shaped cavity of particle storage component 130 can be formed by two sets of plates, each of which is arranged opposite to the other. One set of plates, parallel to the direction of dust particle transport, aligns with the inner wall of the movable cavity, minimizing the spread of dust particles into a space away from second dust particle outlet 111 during vibration. The other set of plates is tilted to give particle storage component 130 a funnel shape. The bottom plane of this set of plates is arranged parallel to the bottom of the movable cavity. This ensures that when dust particle output is closed, first dust particle outlet 131 is well aligned with the inclined plane of the bottom of the movable cavity.

[0058] Furthermore, the plane of the bottom of the movable cavity is inclined at an angle of 5 to 8 degrees to the direction of gravity, and when the dust particles are in the output-off state, the first dust particle output port 131 is in contact with the inclined plane of the bottom of the movable cavity to prevent particles from flowing out of the first dust particle output port 131 in the initial stage or when not in use.

[0059] Furthermore, the inclination direction of the bottom of the moving cavity is such that the bottom position of the moving cavity corresponding to the first dust particle outlet 131 is lower than the bottom position of the moving cavity corresponding to the second dust particle outlet 111 .

[0060] Furthermore, dust particle flow channels with narrowing openings are provided on both sides of the bottom of the moving cavity along the conveying direction of the dust particles.

[0061] Exemplarily, the moving cavity is provided with two opposite triangular fixing plates on both sides of its inner bottom along the conveying direction of the dust particles to form a particle flow channel with a narrowing opening.

[0062] Furthermore, a two-way valve 500 is provided on the pipeline connecting the pipeline 400. The first interface of the two-way valve 500 is connected to the gas output port 143 of the particle transporter 100, and the second interface thereof is connected to the dust gas input end of the dust plasma discharge device. The two-way valve 500 is used to control the transmission of the dust gas of the particle transporter 100 to the dust plasma discharge device.

[0063] Illustratively, the connecting pipe 400 is a hose, and a two-way valve 500 is provided on the hose.

[0064] Furthermore, the three-way pipe 140 is fixedly arranged at the second dust particle output port 111 .

[0065] Illustratively, the three-way pipe 140 is fixedly disposed below the second dust particle output port 111 , and the dust particles flowing out of the second dust particle output port 111 directly enter the three-way pipe 140 .

[0066] Furthermore, the pipelines where the gas input port 142 and the gas output port 143 are located are inclined at an angle, and the gas input port 142 is higher than the gas output port 143 .

[0067] Furthermore, a baffle 113 is provided at the connection point between the dust particle input port 141 and the second dust particle output port 111 , and a gap is left between the baffle 113 and the second dust particle output port 111 for outputting dust particles and preventing gas from flowing into the moving cavity.

[0068] Furthermore, a linear moving platform is provided in the moving cavity, and the linear moving platform is fixedly connected to the particle storage component 130 and is used to control the horizontal movement of the particle storage component 130 in the moving cavity.

[0069] Exemplarily, the linear motion platform includes a slider and a slideway. The slider is fixedly connected to the particle storage component 130, and the slider moves along the slideway. Before use, the system of the present invention moves the particle storage component 130 to different positions. The dust particle flow rate at different positions is measured at a fixed vibration frequency, and the dust particle flow rate at different vibration frequencies is measured while the moving position is fixed. Before use, the particle storage component 130 is pre-adjusted to the corresponding position based on the desired dust particle flow rate. If the dust particle flow rate needs to be adjusted during use, the vibration frequency can be changed.

[0070] Furthermore, an adjustment knob is provided on the outer wall of the transport platform 110. The end of the adjustment knob passes through the outer wall of the transport platform 110 and is connected to the linear movable platform, which is used to drive the horizontal movement of the linear movable platform. Before use, the system of the present invention can measure the dust particle flow rate at different positions and frequencies as described above. During use, an instrument for detecting the dust particle flow rate can also be provided at the second dust particle outlet 111, such as a laser velocimeter for measuring particle movement speed. During use, the particle storage component 130 can be moved to different positions by adjusting the knob to further measure the dust particle flow rate. This allows for convenient adjustment of the particle storage component 130, facilitating control during use.

[0071] Exemplarily, the adjusting knob is threadedly connected to the outer wall of the side of the transport platform 110, and the end is located in the movable cavity and is rotationally connected to the slider of the linear movable platform, pushing the slider to perform linear motion during the rotation of the adjusting knob.

[0072] Exemplarily, the adjusting knob is threadedly connected to the outer wall of the side of the transport platform 110, the end is in the movable cavity and a gear is provided on the circumference of the end, and a chain is provided on the side wall of the slider along the conveying direction of the dust particles. The chain is engaged with the gear, and the chain is driven to move horizontally during the rotation of the gear.

[0073] Furthermore, the vibration table 150 is fixed to the bottom of the transport platform 110 . A vibrator is provided in the vibration table 150 for controlling the vibration of the transport platform 110 . The vibrator is provided with a switch for adjusting the vibration frequency and vibration amplitude.

[0074] For example, a mounting platform is fixedly provided at the bottom of the transport platform 110, spaced a certain distance from the bottom of the transport platform 110, and the vibration platform 150 is fixed to the mounting platform. Specifically, the vibration platform 150 is fixed to the mounting platform using screws. Furthermore, openings are provided on both sides of the mounting platform to facilitate screw installation.

[0075] Furthermore, a Langmuir probe 610 is provided on the side wall of the vacuum chamber 600 for plasma density diagnosis.

[0076] For example, a Langmuir probe 610 is vertically disposed on the top of the vacuum chamber 600 , and the Langmuir probe 610 can move vertically inward within a range of 5 to 20 cm.

[0077] Furthermore, a quartz glass window is provided on the side wall of the vacuum chamber 600 .

[0078] Furthermore, a sample holder 630 is provided in the vacuum chamber 600 , and a displacement platform 620 is provided on the side wall of the vacuum chamber 600 . The displacement platform 620 is connected to the sample holder 630 and is used to move the sample holder 630 horizontally.

[0079] For example, sample holder 630 is made of tungsten, which can withstand the high temperatures of plasma. Sample holder 630 can be used to place metal samples for plasma interaction experiments, such as stainless steel, tungsten, lithium, and even uranium for nuclear fission. These areas of research all involve plasma beam interactions.

[0080] Furthermore, the vacuum pump 700 uses a vacuum pump group including a roots pump and a mechanical pump, which can achieve 10 -3 Vacuum degree in Pa.

[0081] The discharge system for generating dust plasma of the present invention is used in the following manner:

[0082] First, prepare the water, electricity, and gas systems to ensure stable operation. During the initial stage, adjust the operating mode of the particle transporter 100, specifically setting the required transport parameters based on the size and mass of the dust particles. The principle behind particle transporter 100's adjustment of dust particle motion parameters lies in its key component: the piezoelectric vibrator. Its primary function is to transport tiny objects. The speed and uniformity of transport depend on the relationship between the vibration frequency and intensity and the dust particle parameters. By calculating the amount of dust particles output per unit time under different frequency conditions, the mass flow rate of the transported dust can be determined.

[0083] During the vibration process, dust particles are discharged from the second dust particle outlet 111 of the particle transporter 100 and mix with the gas to form a gas-dust particle mixture. Because the gas pressure of the gas-dust particle mixture is greater than the internal pressure of the vacuum chamber 600, the gas flow passes through the discharge chamber 220 and the anode 222 before being ejected into the discharge chamber of the plasma source and gradually enters an ionized state. Specifically, within the chamber, the dust particles and the gas begin to ionize simultaneously, forming a dust plasma. This is then moved toward the vacuum chamber 600 under the combined action of the gas flow and the accelerating electrode. Under the action of the accelerating electrode, the charged particles further collide with neutral gas or unionized dust particles, forming more charged particles, thereby increasing the electron density of the dust plasma and the density of charged dust particles. Finally, the dust plasma is guided and ejected into the vacuum chamber 600. The discharge chamber 220 is made of transparent glass, and the relevant scientific instruments can directly detect the microscopic processes and macroscopic parameters of dust plasma formation.

[0084] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description is not intended to limit the present invention. After reading the above description, various modifications and substitutions of the present invention will become apparent to those skilled in the art. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A discharge system for generating dust plasma, characterized in that: The system comprises: a particle transporter (100), a dust plasma discharge device, an external gas component (300) and a vacuum subsystem; The external gas component (300) is connected to the second dust particle output port (111) of the particle transporter (100) and is used to mix the introduced gas with the dust particles to form dust gas; the dust gas input end of the dust plasma discharge device is connected to the second dust particle output port (111) of the particle transporter (100) via a connecting pipe (400) and is used to discharge the dust gas to form dust plasma; the vacuum subsystem is used to form a vacuum environment in the system; The particle transporter (100) comprises: The transport platform (110) has a movable cavity, wherein the plane of the bottom of the movable cavity is inclined at an angle to the direction of gravity, and a second dust particle output port (111) is provided at one end of the bottom of the movable cavity. A mesh screen is provided at the second dust particle output port (111) for screening the particle size of the output dust particles; a particle storage component (130) disposed in the movable cavity and movable horizontally along the movable cavity, wherein a first dust particle outlet (131) is provided at its bottom at a distance from the second dust particle outlet (111); when the dust particles are in an output closed state, the first dust particle outlet (131) is aligned with an inclined plane at the bottom of the movable cavity to close the first dust particle outlet (131); a transparent quartz panel (120) detachably fixed to the opening of the moving cavity of the transport platform (110) and used for sealing the moving cavity; a three-way pipe (140), wherein the three interfaces thereof are respectively a dust particle input port (141), a gas input port (142), and a gas output port (143), and the gas input port (142) and the gas output port (143) correspond to each other, the dust particle input port (141) is communicated with the second dust particle output port (111), and the gas input port (142) is connected to the external gas component (300); and a vibration table (150) for controlling the vibration of the transport platform (110) so as to transport the dust particles to the second dust particle output port (111) through vibration; The vacuum subsystem comprises: a vacuum chamber (600) which is in communication with the dust plasma output end of the dust plasma discharge device and the moving cavity of the particle transporter (100); and A vacuum pump (700) is connected to the vacuum chamber (600) and is used to achieve a vacuum environment in the vacuum chamber (600).

2. The discharge system for generating dust plasma according to claim 1, characterized in that: The dust plasma discharge device comprises: Housing (210); a discharge chamber (220) fixed in the housing (210), having a dust gas input end and a dust plasma output end, wherein the dust gas input end is connected to the second dust particle output port (111) via a connecting pipe (400), and the dust plasma output end is connected to the vacuum chamber (600); A cathode (221) is provided at the input end of the discharge chamber (220) and is used to generate a high voltage to ionize the ionized dust gas; an anode (222), which is arranged at the output end of the discharge chamber (220), an insulating layer is provided between the anode (222) and the shell (210), and the anode (222) and the shell (210) are grounded respectively; and A direct current power supply, the negative electrode and the positive electrode of which are electrically connected to the cathode (221) and the anode (222) respectively.

3. The discharge system for generating dust plasma according to claim 2, characterized in that: The cathode (221) is fixed at a position corresponding to the input end of the discharge chamber (220) at one end of the shell (210), and the anode (222) is fixed at a position corresponding to the output end of the discharge chamber (220) at the other end of the shell (210); a side of the shell (210) connected to the cathode (221) is made of a stainless steel plate; Or / and, the cathode (221) adopts a tungsten needle; Or / and, the anode (222) is composed of a plurality of annular polytetrafluoroethylene disks and annular copper disks alternately combined, and the middle of the annular polytetrafluoroethylene disks and the annular copper disks form a gas channel; Or / and, the discharge chamber (220) is a quartz discharge chamber; Or / and, the shell (210) is made of quartz.

4. The discharge system for generating dust plasma according to claim 3, wherein: The system further comprises: a cooling subsystem, the cooling subsystem comprising a circulating water path provided on the stainless steel plate of the housing (210), the anode (222) and the vacuum chamber (600), all of the water paths being interconnected to form a whole; A plurality of mutually connected channels are distributed inside the annular copper disk, and the channels serve as circulating water paths for the anode (222).

5. The discharge system for generating dust plasma according to claim 1, wherein: The particle storage component (130) has a funnel-shaped cavity, and the first dust particle output port (131) is arranged at the bottom of the funnel-shaped cavity; Or / and, two side walls of the particle storage component (130) parallel to its moving direction are parallel to and in contact with the inner wall of the moving cavity; or / and, the plane of the bottom of the movable cavity is inclined at an angle of 5 to 8 degrees to the direction of gravity; or / and, the inclination direction of the bottom of the movable cavity is such that the bottom position of the movable cavity corresponding to the first dust particle outlet (131) is lower than the bottom position of the movable cavity corresponding to the second dust particle outlet (111); Or / and, dust particle flow channels with narrowing openings are provided on both sides of the bottom of the moving cavity along the conveying direction of the dust particles.

6. The discharge system for generating dust plasma according to claim 1, wherein: A two-way valve (500) is provided on the pipeline of the connecting pipe (400), a first interface of the two-way valve (500) is connected to the gas output port (143) of the particle transporter (100), and a second interface thereof is connected to the dust gas input end of the dust plasma discharge device, and the two-way valve (500) is used to control the transmission of the dust gas from the particle transporter (100) to the dust plasma discharge device; Or / and, the three-way pipe (140) is fixedly arranged at the second dust particle output port (111); Or / and, the pipelines where the gas input port (142) and the gas output port (143) are located are inclined at an angle, and the gas input port (142) is higher than the gas output port (143); Or / and, a baffle (113) is provided at the connection point between the dust particle input port (141) and the second dust particle output port (111), and a gap is left between the baffle (113) and the second dust particle output port (111) for outputting dust particles and preventing gas from flowing into the moving cavity.

7. The discharge system for generating dust plasma according to claim 1, wherein: A linear moving platform is provided in the moving cavity, and the linear moving platform is fixedly connected to the particle storage component (130) and is used to control the horizontal movement of the particle storage component (130) in the moving cavity.

8. The discharge system for generating dust plasma according to claim 7, characterized in that: An adjustment knob is provided on the outer wall of the transport platform (110), and the end of the adjustment knob passes through the outer wall of the transport platform (110) and is connected to the linear motion platform, for driving the horizontal movement of the linear motion platform.

9. The discharge system for generating dust plasma according to claim 1, wherein: The vibration table (150) is fixed to the bottom of the transport platform (110), and a vibrator is provided in the vibration table (150) for controlling the vibration of the transport platform (110).

10. The discharge system for generating dust plasma according to claim 1, wherein: A Langmuir probe (610) is provided on the side wall of the vacuum chamber (600) for plasma density diagnosis; Or / and, a quartz glass window is provided on the side wall of the vacuum chamber (600); Or / and, a sample holder (630) is provided in the vacuum chamber (600), a displacement platform (620) is provided on a side wall of the vacuum chamber (600), and the displacement platform (620) is connected to the sample holder (630) and is used to horizontally move the sample holder (630); Or / and, the vacuum pump (700) adopts a vacuum pump group including a Roots pump and a mechanical pump.

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