A mold and manufacturing process for ultra-high vacuum chamber of polymer materials

Abstract

The present invention relates to the technical field of particle accelerator vacuum chamber manufacturing, and in particular to a mold and manufacturing process for a polymer material ultra-high vacuum chamber. The mold comprises: an injection molding component, provided with a core for fixing a vacuum chamber body, and a cavity for injection molding a flange on the vacuum chamber body; a pressure block component, mounted on the top of the injection molding component and provided with an injection pipe connected from the top surface to the cavity; a support component, mounted on the bottom of the injection molding component; wherein the injection molding component comprises: a second heating module with a guide groove set on the top, a first heating module covering the guide groove, and a slider embedded in the guide groove; the core is located at the bottom of the guide groove, and two sliders are symmetrically arranged on both sides of the core, so that the vacuum chamber body can be placed in the cavity and a flange can be directly injection molded at its end, thereby improving the structural strength and vacuum sealing of the vacuum chamber.

Description

Technical Field

[0001] The present invention relates to the technical field of particle accelerator vacuum chamber manufacturing, in particular to a manufacturing mold and manufacturing process of a polymer material ultra-high vacuum chamber. Background Art

[0002] Thanks to the continuous efforts of researchers, particle accelerators are continuously developing towards higher energies, higher currents, and higher bunch powers. To avoid beam losses due to dynamic vacuum effects and space charge effects, the dipole magnets in the particle accelerator's synchronization ring will adopt an ultra-high repetition rate mode, enabling the magnet's magnetic field rise rate to reach 200 T / s.

[0003] Traditional thin-walled metal vacuum chambers experience severe eddy current effects in ultra-high repetition rate (UHR) modes. Furthermore, all-ceramic vacuum chambers have drawbacks such as low yield, difficult processing, and low structural reliability. Therefore, polymer vacuum chambers are commonly used.

[0004] Currently, it can reach 10 -8 There are two main processing technologies for Pa-level ultra-high vacuum polymer vacuum chambers: one is to form the pipe and flange separately by extrusion process, and then weld the flange and pipe into one by hot melt welding process. The vacuum chamber made in this way has disadvantages such as low structural strength at the welding position and unstable sealing performance; the other is to first obtain a thick blank pipe by extrusion process, and then make the final product by machining. The vacuum chamber made in this way has 3 to 5 times the material of the final product, high cost, long processing cycle, and thick blank pipe is prone to form bubbles inside the pipe, which makes the pipe strength problematic.

[0005] Therefore, a mold and a manufacturing process for a polymer material ultra-high vacuum chamber that can reduce the processing cycle and improve the structural strength and sealing performance are needed to solve the problems existing in the existing processing technology. Summary of the Invention

[0006] The present invention aims to solve the technical problems existing in the related art. To this end, the present invention proposes a mold and manufacturing process for manufacturing a polymer ultra-high vacuum chamber, so as to solve the problems of low structural strength, poor sealing performance, potential internal bubbles, and high material costs caused by existing manufacturing processes.

[0007] In a first aspect, the present invention provides a mold for manufacturing a polymer material ultra-high vacuum chamber, the mold comprising:

[0008] An injection molding assembly is provided with a core for fixing the vacuum chamber body and a cavity for injection molding a flange on the vacuum chamber body;

[0009] A pressing block assembly is mounted on the top of the injection molding assembly and is provided with an injection pipe connected from the top surface to the mold cavity;

[0010] A support assembly mounted on the bottom of the injection molding assembly;

[0011] The injection molding assembly includes: a second heating module with a guide groove on the top, a first heating module covering the guide groove, a slider embedded in the guide groove, and a driving assembly connected to the slider;

[0012] The core is located at the bottom of the guide groove, and the two sliders are symmetrically arranged on both sides of the core.

[0013] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the slider is provided with a semicircular notch having a partition, and the partition is provided with a notch with a contour adapted to the core, for accommodating the vacuum chamber body and dividing the cavity into a first cavity and a second cavity;

[0014] The injection pipe is communicated with the first cavity and is used for injection molding the flange on the upper end of the vacuum chamber body.

[0015] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, both the first heating module and the second heating module are provided with heating channels for embedding heating carbon rods.

[0016] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the two driving components are respectively arranged at both ends of the guide groove to drive the slider to move along the guide groove.

[0017] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the support assembly includes: a first support block, a second support block, a third support block, a fourth support block and an adjustment rod;

[0018] The first support block is installed on the bottom surface of the second heating module, and the fourth support block is installed on the bottom surface of the first support block;

[0019] The second support block and the third support block are movably arranged between the fourth support block and the second heating module;

[0020] The second heating module is provided with a through hole extending from its bottom surface to the bottom of the guide groove, and the adjusting rod is movably arranged in the through hole. One end of the adjusting rod is installed on the second support block, and the other end of the adjusting rod extends into the mold cavity for adjusting the position of the vacuum chamber body in the mold cavity.

[0021] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the support assembly further includes:

[0022] a fixing stud, one end of which is connected to the second heating module, and the other end of which is connected to the fourth support block;

[0023] A movable sleeve, sleeved on the fixed stud;

[0024] The second support block and the third support block are sleeved on the fixing stud through the movable sleeve.

[0025] According to a mold for manufacturing a polymer material ultra-high vacuum chamber provided by the present invention, the pressing block assembly further comprises:

[0026] a first pressing block, mounted on the top surface of the first heating module;

[0027] a second pressing block, mounted on the bottom surface of the first heating module;

[0028] Among them, the injection tube passes through the first pressing block and the first heating module; the second pressing block is provided with an inclined surface inclined from the end of the guide groove to the middle of the guide groove, and is abutted against the slider through the inclined surface to ensure that the two sliders are in close contact.

[0029] In a second aspect, the present invention provides a process for manufacturing a polymer material ultra-high vacuum chamber, wherein the polymer material ultra-high vacuum chamber is manufactured using any one of the above-described molds.

[0030] The process steps include: S1, placing the prefabricated vacuum chamber body into the manufacturing mold;

[0031] S2, heating and heat-insulating the mold;

[0032] S3, injecting the molten polymer material into the manufacturing mold at an injection pressure between 100 MPa and 150 MPa, and performing a pressure-maintaining process to form a flange at one end of the vacuum chamber body;

[0033] S4. After the mold is naturally cooled, demoulding the vacuum chamber body with a flange injection-molded on one end, and machining the flange to remove the middle portion of the flange;

[0034] S5. After rotating the vacuum chamber body by 180°, the body is again placed into the production mold, and steps S2 to S4 are repeated to form a flange at the other end of the vacuum chamber body.

[0035] According to a manufacturing process of a polymer material ultra-high vacuum chamber provided by the present invention, the vacuum chamber that has been injection-molded as one is finely processed, and the sealing surface roughness of the flange is set to be less than 0.8 microns.

[0036] According to a manufacturing process of a polymer material ultra-high vacuum chamber provided by the present invention, the vacuum chamber after fine processing is cleaned and dried;

[0037] During cleaning, first use a detergent solution to clean, then use ultrapure water or deionized water for ultrasonic cleaning;

[0038] During the drying process, the drying temperature is maintained between 100°C and 130°C.

[0039] The above one or more technical solutions in the present invention have at least one of the following technical effects:

[0040] 1. By optimizing the mold structure, the vacuum chamber body can be placed in the mold cavity and the flange can be directly injection-molded at its end. This combines the process of extruding the vacuum chamber body with the process of injection-molding the flange on the vacuum chamber body using the mold. This effectively solves the problems of unstable sealing and low weld strength in batch processing during hot melt welding, greatly improving the structural strength and vacuum sealing of the vacuum chamber.

[0041] 2. The vacuum chamber manufactured by the mold and the manufacturing process of the present invention has the advantages of good sealing performance, high structural strength, short processing cycle, good economic benefits, high reliability, and low eddy current effect.

[0042] 3. The vacuum chamber made by the mold and process of the present invention can withstand vacuum baking below 250°C. After high-temperature baking, it can achieve an ultra-high vacuum with a vacuum degree better than 10E-8Pa, which is suitable for the synchronous storage ring in the particle accelerator.

[0043] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted, and the advantages brought about by the technical features of these technical solutions described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings, or can be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0045] Figure 1 It is a schematic diagram of the three-dimensional structure of the manufacturing mold in an embodiment of the present invention.

[0046] Figure 2 This is a quarter cross-sectional view of a mold in an embodiment of the present invention.

[0047] Figure 3 2 is an assembly diagram of the driving assembly and the slider in an embodiment of the present invention.

[0048] Figure 4 Schematic diagram of the three-dimensional structure of the second heating module in an embodiment of the present invention.

[0049] Figure 5 Schematic diagram of the three-dimensional structure of the vacuum chamber body in an embodiment of the present invention.

[0050] Figure 6 Schematic diagram of the cross-sectional structure of the injection molding component in an embodiment of the present invention.

[0051] Figure 7 This is a schematic diagram of the three-dimensional structure of the vacuum chamber body after a flange is injection-molded at one end in an embodiment of the present invention.

[0052] Figure 8 This is a schematic diagram of a vacuum chamber body according to an embodiment of the present invention, after a flange is injection-molded at one end, and then the body is re-installed into a production mold.

[0053] Figure 9 This is a schematic structural diagram of the vacuum chamber body in an embodiment of the present invention after flanges are injection-molded at both ends.

[0054] Figure 10 FIG. 4 is a flow chart of a manufacturing process of a vacuum chamber in an embodiment of the present invention.

[0055] Reference numerals:

[0056] 1. Vacuum chamber body; 2. First pressure block; 3. First heating module; 4. Drive assembly; 5. Second heating module; 6. Heating channel; 7. First support block; 8. Support column; 9. Adjustment rod; 10. Second support block; 11. Fixing stud; 12. Third support block; 13. Fourth support block; 14. Adjustment bolt; 15. Injection tube; 16. Slider; 17. Fifth support block; 18. Movable sleeve; 19. Second pressure block; 20. Core; 21. Flange; 22. Injection molding joint surface. DETAILED DESCRIPTION

[0057] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0058] like Figure 9 As shown, the polymer ultra-high vacuum chamber includes a vacuum chamber body 1 and a flange 21, both of which are made of polymer materials. Preferably, the polymer material is PEEK and its composite material, or VESPEL material, or other polymer engineering plastics.

[0059] In an embodiment of the present invention, a mold for manufacturing an ultra-high vacuum chamber of a polymer material is introduced.

[0060] The mold making process mainly includes injection molding components, pressing block components and support components.

[0061] like Figures 1 to 9 As shown, the injection molding assembly is provided with a core 20 for fixing the vacuum chamber body 1 and a cavity for injection molding a flange 21 on the vacuum chamber body 1. Specifically, the injection molding assembly includes at least a first heating module 3, a second heating module 5, and a slider 16. The top of the second heating module 5 is provided with a guide groove running through both ends. Two sliders 16 are symmetrically arranged in the guide groove of the second heating module 5.

[0062] The pressing block assembly is installed on the top of the injection molding assembly. In addition, the pressing block assembly is provided with an injection pipe 15 connected to the mold cavity from the top surface. The support assembly is installed at the bottom of the injection molding assembly.

[0063] The injection molding assembly includes a second heating module 5 with a guide groove positioned on top, a first heating module 3 covering the guide groove, a slider 16 embedded in the guide groove, and a drive assembly 4 connected to the slider 16. A core 20 is located at the bottom of the guide groove. Two sliders 16 are symmetrically positioned on either side of the core 20.

[0064] Specifically, the mold cavity consists of a stacked first heating module 3 and a second heating module 5, and two sliders 16 symmetrically positioned within the guide groove of the second heating module 5. A core 20 is positioned at the bottom of the guide groove and positioned between the two sliders 16. The sliders 16 are slidably connected to the guide groove of the second heating module 5.

[0065] When the flange 21 is manufactured on the vacuum chamber body 1 , the molten polymer material is fed into the cavity through the injection pipe 15 .

[0066] After the flange 21 is formed, the driving assembly 4 drives the slider 16 to move along the extension direction of the guide groove, and the mold cavity can be opened by separating the two sliders 16. After that, the vacuum chamber body 1 can be removed from the core 20.

[0067] Furthermore, the pressing block assembly further includes a first pressing block 2 and a second pressing block 19. The first pressing block 2 is mounted on the top surface of the first heating module 3. The second pressing block 19 is mounted on the bottom surface of the first heating module 3.

[0068] The injection pipe 15 passes through the first pressing block 2 and the first heating module 3. The second pressing block 19 is provided with an inclined surface inclined from the end of the guide groove to the middle of the guide groove, which is arranged to abut against the slider 16 to ensure that the two sliders 16 are in close contact.

[0069] The first pressing block 2 and the first heating module 3 are fixed together by bolts. The first heating module 3 and the second pressing block 19 are fixed together by bolts.

[0070] The injection pipe 15 passes through the first pressing block 2 and the first heating module 3 and is located between the two.

[0071] Furthermore, the injection pipe 15 is fixed to the first pressing block 2 by means of bolts.

[0072] In this embodiment, by optimizing the mold structure, the vacuum chamber body 1 can be placed in the mold cavity and the flange 21 can be directly injection-molded at its end, thereby combining the processes of extruding the vacuum chamber body 1 using the mold and injection molding the flange 21 on the vacuum chamber body 1, effectively solving the problems of unstable sealing and low strength of the welds in batch processing of the hot melt welding process, and greatly improving the structural strength and vacuum sealing of the vacuum chamber.

[0073] On the basis of the above embodiment, another embodiment of the present invention introduces a mold for manufacturing an ultra-high vacuum chamber made of polymer materials.

[0074] like Figure 6 As shown, the injection molding assembly includes a first heating module 3 , a slider 16 , a second heating module 5 and an injection tube 15 .

[0075] The slider 16 is provided with a semicircular notch having a partition. A notch having a contour adapted to the core 20 is provided on the partition for accommodating the vacuum chamber body 1 and dividing the cavity into a first cavity and a second cavity.

[0076] The first cavity is located near the first heating module 3 . The injection pipe 15 is connected to the first cavity and is used for injection molding the flange 21 on the upper end of the vacuum chamber body 1 .

[0077] The second cavity is arranged close to the second heating module 5 to facilitate the second injection molding.

[0078] like Figure 8 As shown, after the flange 21 is injection-molded on one end of the vacuum chamber body 1 , the vacuum chamber body 1 is turned over, and the end with the flange 21 is embedded in the second cavity, and then the flange 21 is injection-molded on the other end of the vacuum chamber body 1 .

[0079] Furthermore, the first heating module 3 and the second heating module 5 are both provided with heating channels 6 for embedding heating carbon rods. Figure 4 The second heating module 5 has a heating channel 6 and a core 20. The heating channel 6 is used to install the heating carbon rod. The core 20 is used to cover the vacuum chamber body 1 and form the cavity of the injection molding flange 21.

[0080] Furthermore, two driving assemblies 4 are respectively arranged at both ends of the guide groove. The driving assemblies 4 are connected to the slider 16 and are used to drive the slider 16 to move along the guide groove.

[0081] like Figure 3 As shown, the drive assembly 4 has a screw connected to the slider 16. There are two groups of sliders 16 and drive assembly 4 respectively. Its main function is to pull the slider 16 outward away from the core 20 after the injection molding is completed to facilitate demoulding.

[0082] On the basis of the above embodiment, another embodiment of the present invention introduces a mold for manufacturing an ultra-high vacuum chamber made of polymer materials.

[0083] The support assembly includes a first support block 7 , a second support block 10 , a third support block 12 , a fourth support block 13 , a fifth support block 17 and an adjusting rod 9 .

[0084] The first support block 7 is mounted on the bottom surface of the second heating module 5 . The fourth support block 13 is mounted on the bottom surface of the first support block 7 .

[0085] The second support block 10 and the third support block 12 are movably disposed between the fourth support block 13 and the second heating module 5 .

[0086] The second heating module 5 is provided with a through hole extending from its bottom surface to the bottom of the guide groove, and the adjustment rod 9 is movably arranged in the through hole.

[0087] One end of the adjusting rod 9 is mounted on the second supporting block 10 , and the other end of the adjusting rod 9 extends into the mold cavity for adjusting the position of the vacuum chamber body 1 in the mold cavity.

[0088] Furthermore, a plurality of adjusting rods 9 are provided, evenly distributed around the periphery of the core 20. The adjusting rods 9 can be used to adjust the position of the vacuum chamber body 1, thereby adjusting the area of the injection molding interface 22 between the vacuum chamber body 1 and the flange 21 during the injection molding process.

[0089] like Figure 2 As shown, the adjusting rod 9 can change its position along the rod direction by adjusting the bolt 14. The adjusting bolt 14 is fixed to the fourth support block 13 by bolts. The fourth support block 13 and the first support block 7 are fixed to the second heating module 5 by long screws.

[0090] The adjusting rod 9 is fixed on the second support block 10 and the third support block 12. At the same time, the second support block 10 and the third support block 12 and the movable sleeve 18 are sleeved on the fixing stud 11 and the support column 8 through a mechanical structure.

[0091] Furthermore, the second support block 10 and the third support block 12 can be moved up and down synchronously by adjusting the bolt 14, thereby adjusting the position of the adjustment rod 9 along the rod direction.

[0092] Furthermore, the support assembly further includes a fixed stud 11 and a movable sleeve 18 .

[0093] One end of the fixing stud 11 is connected to the second heating module 5. The other end of the fixing stud 11 is connected to the fourth support block 13. The movable sleeve 18 is sleeved on the fixing stud 11.

[0094] The second support block 10 and the third support block 12 are sleeved on the fixing stud 11 through a movable sleeve 18 .

[0095] In another embodiment of the present invention, a process for manufacturing a polymer material ultra-high vacuum chamber is introduced, wherein the manufacturing process uses the mold in any of the above embodiments to manufacture the polymer material ultra-high vacuum chamber.

[0096] The process steps mainly include: before the flanges 21 are injection-molded at both ends of the vacuum chamber body 1, the vacuum chamber body 1 is first manufactured by an extrusion molding process and the vacuum chamber body 1 is heat-treated. Then, the following steps are performed in order:

[0097] S1. Place the heat-treated vacuum chamber body 1 into a manufacturing mold.

[0098] S2. Heating and heat-insulating the mold.

[0099] S3 , injecting the molten polymer material into the manufacturing mold at an injection pressure between 100 MPa and 150 MPa, and performing a pressure-maintaining process to form a flange 21 at one end of the vacuum chamber body 1 .

[0100] S4. After the mold is naturally cooled, the vacuum chamber body 1 with the flange 21 injection-molded at one end is demoulded, and the flange 21 is machined to remove the middle portion of the flange 21.

[0101] S5 , rotating the vacuum chamber body 1 by 180° and placing it into the production mold again, and repeating steps S2 to S4 to form a flange 21 at the other end of the vacuum chamber body 1 .

[0102] Furthermore, the vacuum chamber that has been injection molded as one is finely processed, and the roughness of the sealing surface of the flange 21 is set to be less than 0.8 microns.

[0103] Furthermore, the vacuum chamber after fine processing is cleaned and dried.

[0104] Preferably, during the cleaning process, the cleaning is first performed with a detergent solution, and then ultrasonically cleaned with ultrapure water or deionized water. During the drying process, the drying temperature is maintained between 100°C and 130°C.

[0105] like Figure 10 As shown, the specific steps of using the mold in the above embodiment to make a polymer material ultra-high vacuum chamber include:

[0106] (1) The vacuum chamber body 1 is extruded in an extrusion die through an extrusion molding process.

[0107] (2) The formed vacuum chamber body 1 is placed in an oven for heat treatment. The heat treatment temperature is 250°C to 300°C, and the holding time is more than 72 hours to reduce the residual stress as much as possible.

[0108] (3) If Figure 2 As shown, the vacuum chamber body 1 that has been heat-treated is assembled into a whole with the manufacturing mold.

[0109] (4) The mold is heated and kept warm, and a heated carbon rod is placed in the heating channel 6 to heat the mold.

[0110] For example, 8 heating channels 6 are provided, and 8 heating carbon rods are provided accordingly. In order to ensure sufficient heating and maintain the stability of the vacuum chamber body 1, the heating and heat preservation method is: maintaining the temperature in the range of 150° C. to 180° C. for 5 hours.

[0111] Preferably, the temperature is maintained at 160°C for 5 hours.

[0112] (5) After the mold is kept warm for 5 hours, continue to maintain the temperature and start injecting materials into the mold: inject the molten polymer material into the mold cavity through the injection pipe 15 at an injection pressure between 100 MPa and 150 MPa.

[0113] The injection time is determined by the product size and mold structure. It is generally between 5 and 30 seconds. The holding time should be long enough to ensure the product's dimensional stability and uniform density. For example, it should be between 10 and 60 seconds.

[0114] Preferably, for this production mold, the injection time is 20 seconds, the holding time is 50 seconds, and the holding pressure is 60% to 80% of the injection pressure to compensate for cooling shrinkage.

[0115] (6) After the injection molding of the flange 21 is completed, the heating of the mold is stopped, and the vacuum chamber body 1 and the flange 21 are cooled naturally at the same time. After the cooling is completed, the mold is demoulded and the vacuum chamber body 1 and the flange 21 that have been formed into one body are taken out. Figure 7 shown.

[0116] (7) Machining to remove the middle portion of the flange 21 so as to form a through hole in the middle portion of the flange 21. The through hole is consistent with the inner hole of the vacuum chamber body 1.

[0117] (8) If Figure 8 As shown, the flange 21 and the vacuum chamber body 1 that have been formed into one piece are reassembled into the production mold. After the assembly is completed, the operations of steps (4) and (5) are repeated to injection mold the flange 21 at the other end of the vacuum chamber body 1.

[0118] (9) After the injection molding of the flange 21 at the other end is completed, stop heating the mold and allow the vacuum chamber body 1 and the flange 21 to cool naturally at the same time. After cooling is completed, demold and repeat the operation of step (7) to remove the middle part of the flange 21.

[0119] (10) The vacuum chamber that has been formed into one piece is further fine-machined. The sealing surface and bolt holes of the flange 21 are machined.

[0120] Furthermore, the roughness of the sealing surface of the flange 21 is less than 0.8 microns to better ensure vacuum sealing performance.

[0121] like Figure 9 As shown, during the polymer material injection molding process, the injection molding interface 22 between the vacuum chamber body 1 and the flange 21 must ensure that both the end face of the vacuum chamber body 1 and the outer wall of the vacuum chamber body 1 are in full contact with the injection molding material to ensure sealing and structural strength at the sealing position. In other words, the end of the vacuum chamber body 1 must be embedded in the middle of the flange 21, and the specific embedding depth can be half the thickness of the flange 21.

[0122] (11) Cleaning and drying the vacuum chamber of the polymer material in which the fine processing is integrated. Preferably, the cleaning needs to be first cleaned with a washing solution, and then ultrasonically cleaned with ultrapure water or deionized water. Furthermore, the drying temperature can be selected to be 100°C-130°C, and the drying process temperature can be lower than the glass transition temperature.

[0123] At this point, the processing of the polymer material ultra-high vacuum chamber made of polymer material is completed.

[0124] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0125] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on the specific circumstances.

[0126] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," and "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. A first feature being "below," "below," and "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0127] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic representations of the above terms are not limited to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0128] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A mold for making an ultra-high vacuum chamber of a polymer material, characterized in that: include: An injection molding assembly is provided with a core (20) for fixing a vacuum chamber body (1), and a cavity for injection molding a flange (21) on the vacuum chamber body (1); A pressing block assembly is mounted on the top of the injection molding assembly and is provided with an injection pipe (15) connected from the top surface to the mold cavity; A support assembly mounted on the bottom of the injection molding assembly; The injection molding assembly comprises: a second heating module (5) with a guide groove provided on the top, a first heating module (3) covering the guide groove, a slider (16) embedded in the guide groove, and a driving assembly (4) connected to the slider (16); The core (20) is located at the bottom of the guide groove, and the two sliders (16) are symmetrically arranged on both sides of the core (20); The slider (16) is provided with a semicircular notch having a partition, and a notch with a profile adapted to the core (20) is provided on the partition for accommodating the vacuum chamber body (1) and dividing the cavity into a first cavity and a second cavity; The injection pipe (15) is in communication with the first cavity and is used for injection molding the flange (21) on the upper end of the vacuum chamber body (1).

2. The mold for making a polymer material ultra-high vacuum chamber according to claim 1, characterized in that: The first heating module (3) and the second heating module (5) are both provided with heating channels (6) for embedding heating carbon rods.

3. The mold for making a polymer material ultra-high vacuum chamber according to claim 2, characterized in that: The two driving assemblies (4) are respectively arranged at both ends of the guide groove and are used to drive the slider (16) to move along the guide groove.

4. The mold for manufacturing a polymer material ultra-high vacuum chamber according to any one of claims 1 to 3, characterized in that: The support assembly comprises: a first support block (7), a second support block (10), a third support block (12), a fourth support block (13) and an adjustment rod (9); The first support block (7) is mounted on the bottom surface of the second heating module (5), and the fourth support block (13) is mounted on the bottom surface of the first support block (7); The second support block (10) and the third support block (12) are movably arranged between the fourth support block (13) and the second heating module (5); The second heating module (5) is provided with a through hole extending from its bottom surface to the bottom of the guide groove, and the adjusting rod (9) is movably arranged in the through hole. One end of the adjusting rod (9) is mounted on the second supporting block (10), and the other end of the adjusting rod (9) extends into the mold cavity to adjust the position of the vacuum chamber body (1) in the mold cavity.

5. The mold for making a polymer material ultra-high vacuum chamber according to claim 4, characterized in that: The support assembly further comprises: A fixing stud (11), one end of the fixing stud (11) being connected to the second heating module (5), and the other end of the fixing stud (11) being connected to the fourth support block (13); A movable sleeve (18) is sleeved on the fixed stud (11); The second support block (10) and the third support block (12) are sleeved on the fixing stud (11) via the movable sleeve (18).

6. The mold for making a polymer material ultra-high vacuum chamber according to claim 4, characterized in that: The pressing block assembly further comprises: A first pressing block (2) is mounted on the top surface of the first heating module (3); a second pressing block (19) mounted on the bottom surface of the first heating module (3); The injection tube (15) passes through the first pressing block (2) and the first heating module (3); the second pressing block (19) is provided with an inclined surface inclined from the end of the guide groove to the middle of the guide groove, and is abutted against the slider (16) through the inclined surface to ensure that the two sliders (16) are in close contact.

7. A process for manufacturing a polymer material ultra-high vacuum chamber, characterized in that: A polymer material ultra-high vacuum chamber is manufactured using the mold according to any one of claims 1 to 6. The process steps include: S1, placing the prefabricated vacuum chamber body (1) into the manufacturing mold; S2, heating and heat-insulating the mold; S3, injecting the molten polymer material into the manufacturing mold at an injection pressure between 100 MPa and 150 MPa, and performing a pressure-maintaining treatment to form a flange (21) at one end of the vacuum chamber body (1); S4, after the mold is naturally cooled, demoulding the vacuum chamber body (1) with the flange (21) injection-molded at one end, and machining the flange (21) to remove the middle portion of the flange (21); S5. After rotating the vacuum chamber body (1) by 180°, the body is again placed into the production mold, and steps S2 to S4 are repeated to form a flange (21) at the other end of the vacuum chamber body (1).

8. The process for manufacturing a polymer material ultra-high vacuum chamber according to claim 7, characterized in that: The vacuum chamber that has been injection molded as one is finely processed, and the roughness of the sealing surface of the flange (21) is set to be less than 0.8 microns.

9. The process for manufacturing a polymer material ultra-high vacuum chamber according to claim 8, characterized in that: Clean and dry the vacuum chamber after finishing; During cleaning, first use a detergent solution to clean, then use ultrapure water or deionized water for ultrasonic cleaning; During the drying process, the drying temperature is maintained between 100°C and 130°C.

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