Mass spectrometer vacuum cavity high-pressure introduction device

Abstract

The invention discloses a mass spectrometer vacuum cavity high-pressure introduction device which comprises a fixed plate installed on a mass spectrometer, and the left edge and the right edge of the fixed plate are vertically bent upwards to form a pair of supporting vertical plates. A sliding seat capable of horizontally sliding left and right is arranged between the two supporting vertical plates, a strip-shaped hole consistent with the sliding direction of the sliding seat is formed in the middle of the sliding seat, two groups of high-voltage connectors capable of vertically moving are arranged in the strip-shaped hole at intervals in the length direction, and the upper ends of the two high-voltage connectors penetrate into a vacuum cavity of the mass spectrometer in a sealed mode; the lower end is vertically inserted into a radio frequency unit of the mass spectrometer; two pairs of limiting chutes in one-to-one correspondence with the high-voltage connectors are formed in the hole walls of the two long sides of the strip-shaped hole in pairs, and each high-voltage connector is provided with an accompanying sliding block correspondingly clamped in the corresponding limiting chute. The high-voltage connector has the advantages that the horizontal movement of the sliding seat can be converted into the vertical movement of the high-voltage connector, the disassembly time is effectively saved, the convenience and the working efficiency of maintenance in the vacuum cavity are greatly improved, and the radio frequency unit is prevented from being damaged.

Description

Technical Field

[0001] The invention relates to the technical field of mass spectrometers, and in particular to a high-pressure introduction device for a vacuum chamber of a mass spectrometer. Background Art

[0002] A mass spectrometer is an instrument for separating and detecting different isotopes, that is, a type of instrument that separates and detects the composition of matter based on the mass difference of atoms, molecules or molecular fragments of matter, based on the principle that charged particles can be deflected in an electromagnetic field. Mass spectrometers are divided into isotope mass spectrometers, inorganic mass spectrometers and organic mass spectrometers according to their application range; they are divided into high-resolution, medium-resolution and low-resolution mass spectrometers according to their resolution; and they are divided into static instruments and dynamic instruments according to their working principles.

[0003] The main components of the mass spectrometer all work in a vacuum environment. The sample molecules are ionized in the ion source, then reach the electron multiplier tube through the mass analyzer, and the ions are converted into electronic signals for output. The entire ion path is in a high vacuum environment. The mass analyzer needs to be connected to a high voltage to form a stable electric field to screen the effective ions. This requires a vacuum-sealed high-voltage connection device to transmit the external voltage to the vacuum environment. At the same time, this vacuum-sealed high-voltage connection device also needs to avoid discharge when transmitting high voltage to avoid affecting the stability of the instrument signal.

[0004] The high-voltage connectors of the existing vacuum-sealed high-voltage connection devices on mass spectrometers are mostly made of ceramic metal welding, while the fixing device adopts a pressure block structure. When maintaining the inside of the mass spectrometer cavity, the vacuum high-voltage connector needs to be completely removed to facilitate the removal and maintenance of the ion optical module inside the cavity. The removal process is cumbersome and laborious, and when removing the connection between the connector and the radio frequency unit, the radio frequency unit is easily damaged during the removal process due to the small space and tight connection. Summary of the invention

[0005] The purpose of the present invention is to address the defects of the prior art and provide a high-voltage introduction device for a mass spectrometer vacuum chamber, which is used for high-voltage transmission between an atmospheric environment and a high-vacuum environment, and introduces high voltage electricity into the vacuum chamber of a mass spectrometer while ensuring sealing.

[0006] To achieve the above purpose, the present invention can adopt the following technical solutions: The high-pressure introduction device for the vacuum chamber of a mass spectrometer described in the present invention comprises a fixed plate installed on the mass spectrometer, and the left and right edges of the fixed plate are bent vertically upward to form a pair of supporting upright plates; a sliding seat that can slide left and right is arranged between the two supporting upright plates, and a strip hole consistent with its sliding direction is opened in the middle of the sliding seat, and two groups of vertically moving high-pressure connectors are arranged at intervals along the length direction in the strip hole, and the upper ends of the two high-pressure connectors are sealed and penetrated into the vacuum chamber of the mass spectrometer, and the lower ends thereof are vertically inserted into the radio frequency unit of the mass spectrometer; two pairs of limiting bevel grooves corresponding to the high-pressure connectors are opened in pairs on the hole walls of the two long sides of the strip hole, and each of the high-pressure connectors is provided with a corresponding accompanying slider that is clamped in the limiting bevel groove.

[0007] Furthermore, the high-voltage connector includes an insulating sheath that passes through the strip hole and is vertically inserted on the radio frequency unit, the accompanying slider is fixed on the outer wall of the insulating sheath, and a mounting through hole is opened along the axis of the insulating sheath, and a guide pin sheath that is sealed and inserted into the vacuum chamber is inserted at the upper end of the mounting through hole, and a guide pin mounting hole that is coaxially connected to the mounting through hole is opened on the guide pin sheath along the axis, a conductive guide pin is inserted in the guide pin mounting hole, and the lower end of the conductive guide pin is turned outward to form a limiting flange that is blocked at the lower end of the guide pin sheath, and a conductive rod is sealed and inserted in the mounting through hole below the guide pin sheath, and a connecting rod inserted into the conductive guide pin is extended upward from the upper end of the conductive rod, and a supporting spring is mounted on the outside of the connecting rod.

[0008] Furthermore, the conductive rod is screwed and fixed in the mounting through hole, so that the conductive rod can be easily and firmly installed in the mounting through hole of the insulating sheath.

[0009] Furthermore, a first sealing ring is sleeved on the guide needle sheath located above the insulating sheath, and the first sealing ring is used to ensure the sealing of the guide needle sheath at the point where it penetrates into the vacuum chamber.

[0010] Furthermore, a second sealing ring is sleeved on the conductive rod below the insulating sheath, and the second sealing ring is used to ensure the sealing of the lower end of the conductive rod passing through the insulating sheath.

[0011] Furthermore, the left end of the slide seat horizontally extends outward from the supporting vertical plate, and the end portion thereof is folded downward to form a limit rib that is blocked on the outside of the supporting vertical plate. A U-shaped slot connected to the strip hole is vertically opened on the slide seat directly above the limit rib, and an adjusting bolt is horizontally installed in the U-shaped slot. The axial direction of the adjusting bolt is consistent with the length direction of the strip hole, and the inner end of the adjusting bolt is threaded through the supporting vertical plate, and a floating nut is screwed on it.

[0012] Furthermore, the adjusting bolt is provided with an annular groove adapted to be mounted in the U-shaped slot, and the adjusting bolt can be easily mounted horizontally in the U-shaped slot through the annular groove, and the left and right movement of the adjusting bolt can also be used to drive the slide seat to move left and right together.

[0013] Furthermore, the limiting bevel groove is opened obliquely upward from the bottom wall of the slide seat, and the lower end thereof is an open end, so that the accompanying slider on the high-voltage connector can be easily clamped in the limiting bevel groove during installation.

[0014] Furthermore, horizontal sliding bars are symmetrically arranged on the two long side walls of the slide, and a T-shaped fixed rail adapted to snap onto the horizontal sliding bars is arranged on the outer wall of the vacuum chamber of the mass spectrometer, thereby enabling the translational sliding of the slide to be more stable.

[0015] The advantage of the present invention lies in that by means of the limiting bevel grooves opened in pairs on the hole walls of the two long sides of the strip hole, and the accompanying sliders correspondingly clamped in the limiting bevel grooves, the horizontal movement of the slide seat can be converted into the vertical movement of the high-voltage connector, and the upward movement of the high-voltage connector into the vacuum chamber, or the downward movement from the vacuum chamber, can be easily achieved, thereby realizing the high-voltage connection or disconnection between the vacuum chamber side and the radio frequency unit side of the mass spectrometer, so that the radio frequency unit can be avoided from being disassembled when the vacuum chamber needs maintenance and repair, effectively saving disassembly time, greatly improving the convenience and work efficiency of maintenance and repair in the vacuum chamber, and avoiding damage to the radio frequency unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention.

[0017] Figure 2 yes Figure 1 Schematic diagram of the connection between the middle fixed plate and the slide.

[0018] Figure 3 yes Figure 2 Schematic diagram of the bottom structure of the middle slide.

[0019] Figure 4 yes Figure 1 Magnified cross-sectional view of a medium- and high-voltage connector. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] like Figure 1-4As shown, the high-pressure introduction device for the mass spectrometer vacuum chamber of the present invention includes a fixed plate 1, which is installed on the outer wall of the radio frequency unit 200 on the side of the mass spectrometer close to the vacuum chamber 100, and the left and right edges of the fixed plate 1 are bent vertically upward to form a pair of supporting vertical plates 2 with an integral structure therewith.

[0022] A slide 3 capable of sliding left and right on the top surface of the fixed plate 1 is arranged between the two supporting plates 2. A strip hole 4 is opened in the middle of the slide 3. The length direction of the strip hole 4 is consistent with the sliding direction of the slide 3. Two groups of high-voltage connectors 5 are arranged at intervals along the length direction in the strip hole 4. The two high-voltage connectors 5 are both vertically arranged, and their upper ends are sealed and penetrated into the vacuum chamber 100 of the mass spectrometer, and their lower ends pass through the fixed plate 1 and are vertically inserted into the radio frequency unit 200 of the mass spectrometer, ensuring that the high-voltage connector 5 can move upward or downward in the vertical direction, but is restricted from moving in the horizontal direction.

[0023] The limiting bevel grooves 6 are provided in pairs on the two long side hole walls of the strip hole 4. Two pairs of limiting bevel grooves 6 are provided at intervals along the length direction of the strip hole. The two pairs of limiting bevel grooves 6 should correspond to the two high-voltage connectors 5 one by one, and a pair of accompanying sliders 7 correspondingly clamped in the limiting bevel grooves 6 are provided on the outer wall of each high-voltage connector 5, so that the high-voltage connector 5 and the slide 3 can be easily assembled by sliding and clamping the accompanying sliders 7 and the limiting bevel grooves 6. Of course, in order to facilitate the assembly of the high-voltage connector 5 and the slide 3, the limiting bevel grooves 6 should be opened upwardly from the bottom wall of the slide 3, so that the lower end thereof forms an open end into which the accompanying slider 7 can be easily slid and clamped. At this time, the horizontal movement of the slide 3 is converted into the vertical movement of the high-voltage connector 5 through the cooperation of the limiting bevel grooves 6 and the accompanying slider 7, so that the high-voltage connector 5 can easily move upward to extend into the vacuum chamber 100, or move downward to withdraw from the vacuum chamber 100.

[0024] Further, such as Figure 4 As shown, the high-voltage connector 5 includes an insulating sheath 5.1 that passes through the bar hole 4 and is vertically inserted on the radio frequency unit 200. The insulating sheath 5.1 serves as the basic shell of the entire high-voltage connector 5. The accompanying slider 7 should be fixed on its outer wall, so that when the accompanying slider 7 slides in the limiting slide groove 6, it can drive the insulating sheath 5.1 to move together.

[0025] A mounting through hole 5.2 is provided along the axis of the insulating sheath 5.1, and a guide needle sheath 5.3 capable of sealingly penetrating into the vacuum chamber 100 is fixedly inserted at the upper end of the mounting through hole 5.2. The guide needle sheath 5.3 is also made of insulating material, and a guide needle mounting hole 5.4 coaxial with and connected to the mounting through hole 5.2 is provided along the axis of the insulating sheath 5.1. A conductive guide needle 5.5 is penetrated through the guide needle mounting hole 5.4, and the upper end of the conductive guide needle 5.5 slightly protrudes a certain distance outside the guide needle sheath 5.3 for fitting and docking with the electrical equipment in the vacuum chamber 100, and the lower end of the conductive guide needle 5.5 is turned outward to form a limiting flange 5.6 capable of blocking the lower end of the guide needle sheath 5.3.

[0026] A conductive rod 5.7 is sealed and penetrated in the installation through hole 5.2 below the guide pin sheath 5.3. For easy installation, the conductive rod 5.7 should be screwed into the installation through hole 5.2, so that the conductive rod 5.7 can be easily and firmly installed in the installation through hole 5.2 of the insulating sheath 5.1 during installation. The lower end of the conductive rod 5.7 extends out of the insulating sheath 5.1 to form a connection end connected to the radio frequency module in the radio frequency unit 200, and the upper end extends upward to be provided with a connecting rod 5.8 inserted into the conductive guide pin 5.5. The connecting rod 5.8 is kept in contact with the conductive guide pin 5.5, and a supporting spring 5.9 is set on the outer side. The upper end of the supporting spring 5.9 is supported on the limit flange 5.6 at the lower end of the conductive guide pin 5.5, and the lower end is supported on the conductive rod 5.7, so that the conductive guide pin 5.5 has an upward elastic push force and can be reset in time.

[0027] Of course, no matter the conductive guide needle 5.5 rebounds upward to the upper stroke limit position (i.e. the limit flange 5.6 is blocked at the lower end of the guide needle sheath 5.3), or is pressed downward to the lower stroke limit position (i.e. the upper end of the conductive guide needle 5.5 is completely pressed into the guide needle mounting hole 5.4 or the supporting spring 5.9 is compressed to the minimum), it should be ensured that the connecting rod 5.8 is always inserted into the conductive guide needle 5.5, so that the conductive rod 5.7 is always connected to the conductive guide needle 5.5.

[0028] In addition, in order to ensure the sealing of the guide needle sheath 5.3 when it penetrates into the vacuum chamber 100, a first sealing ring 8 can be mounted on the guide needle sheath 5.3 above the insulating sheath 5.1. When the entire high-voltage connector 5 moves upward until the guide needle sheath 5.3 extends into the vacuum chamber 100, the first sealing ring 8 can just be pressed against the lower edge of the opening of the vacuum chamber 100 to form a good seal. In order to ensure the sealing of the lower end of the conductive rod 5.7 when it penetrates the insulating sheath 5.1, a second sealing ring 9 can be mounted on the conductive rod 5.7 below the insulating sheath 5.1. The second sealing ring 9 is always pressed against the lower end of the mounting through hole 5.2 of the insulating sheath 5.1 to form a good seal.

[0029] Furthermore, in order to easily realize the left and right translation and sliding of the slide seat 3, as shown in FIG. Figure 2 , 3 As shown, a slot 10 is provided on the left support plate 2 facing the slide 3. At this time, the left end of the slide 3 opposite to the slot 10 extends horizontally out of the support plate 2, and its end is folded downward to form a limit retaining edge 11 that can be blocked on the outside of the support plate 2. At this time, a U-shaped slot 12 is vertically opened on the slide seat 3 located just above the limiting retaining edge 11, and the right side of the U-shaped slot 12 is connected to the strip hole 4. An adjusting bolt 13 is horizontally installed in the U-shaped slot 12. The adjusting bolt 13 is composed of a bolt cap and a screw rod. An annular groove 14 is circumferentially opened on the screw rod near the bolt cap. The screw rod diameter at the opening of the annular groove 14 should be ensured to be consistent with the slot width of the U-shaped slot 12, so that it can be just adapted to be installed in the U-shaped slot 12, ensuring that the axial direction of the entire adjusting bolt 13 is consistent with the length direction of the strip hole 4; at the same time, the inner end of the adjusting bolt 13 installed in the U-shaped slot 12 should also be screwed through the supporting vertical plate 2, and a floating nut 15 should be screwed on the screw rod passing through the supporting vertical plate 2, and a stopper is formed by the floating nut 15.

[0030] Furthermore, in order to make the translational sliding of the slide 3 more stable, horizontal slide bars 16 can be symmetrically arranged on the two long side walls of the slide 3, and the length direction of the horizontal slide bars is consistent with the sliding direction of the slide 3. At the same time, a T-shaped fixed rail 17 that can adapt to the snap-on horizontal slide bar 16 and ensure the left and right translational sliding of the horizontal slide bar 16 is arranged on the outer wall of the vacuum chamber 100 of the mass spectrometer, thereby further improving the stability of the translational sliding of the slide 3.

[0031] When the adjusting bolt 13 is screwed in the clockwise direction, since the supporting vertical plate 2 and the fixing plate 1 are fixed, the adjusting bolt 13 will drive the limiting retaining edge 11 to approach the supporting vertical plate 2 (i.e. move to the right) under the blocking action of the U-shaped slot 12, and the slide 3 will slide to the right at this time; in the process of the slide 3 sliding to the right, since the high-voltage connector 5 will not move in the horizontal direction, the high-voltage connector 5 will move vertically downward under the cooperation of the accompanying slider 7 and the limiting bevel 6, so that the high-voltage connector 5 can be withdrawn from the vacuum chamber 100 only by screwing the adjusting bolt 13 in the clockwise direction. On the contrary, when the adjusting bolt 13 is screwed in the counterclockwise direction, the adjusting bolt 13 will drive the limiting retaining edge 11 to move away from the supporting vertical plate 2 (i.e., move to the left) under the blocking action of the U-shaped slot 12, and the slide seat 3 will slide to the left at this time; in the process of the slide seat 3 sliding to the left, since the high-voltage connector 5 will not move in the horizontal direction, under the cooperation of the accompanying slider 7 and the limiting bevel 6, the high-voltage connector 5 will move vertically upward, so that the high-voltage connector 5 can be extended into the vacuum chamber 100 to form a high-voltage connection only by screwing the adjusting bolt 13 in the counterclockwise direction. The high-voltage connector 5 can be easily moved upward to extend into the vacuum chamber 100, or moved downward to withdraw from the vacuum chamber 100, thereby realizing high-voltage connection or disconnection between the vacuum chamber 100 side and the RF unit 200 side of the mass spectrometer, so that the RF unit 200 can be avoided from being disassembled when maintenance and repair are required in the vacuum chamber 100, effectively saving disassembly time, greatly improving the convenience and work efficiency of maintenance and repair in the vacuum chamber 100, and avoiding damage to the RF unit 200.

[0032] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, in the present invention, the descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

Claims

1. A high pressure introduction device for a mass spectrometer vacuum chamber, characterized in that: It comprises a fixed plate installed on the mass spectrometer, the left and right edges of the fixed plate are bent vertically upward to form a pair of supporting upright plates; a sliding seat that can slide left and right is arranged between the two supporting upright plates, a strip hole consistent with its sliding direction is opened in the middle of the sliding seat, two groups of vertically moving high-voltage connectors are arranged at intervals along the length direction in the strip hole, the upper ends of the two high-voltage connectors are sealed and penetrated into the vacuum chamber of the mass spectrometer, and the lower ends thereof are vertically inserted into the radio frequency unit of the mass spectrometer; two pairs of limiting inclined grooves corresponding to the high-voltage connectors are opened in pairs on the two long side hole walls of the strip hole, and each of the high-voltage connectors is provided with an accompanying slider correspondingly clamped in the limiting inclined groove.

2. The mass spectrometer vacuum chamber high pressure introduction device according to claim 1, characterized in that: The high-voltage connector includes an insulating sheath that passes through the strip hole and is vertically inserted on the radio frequency unit, the accompanying slider is fixed on the outer wall of the insulating sheath, a mounting through hole is opened on the insulating sheath along the axis, a guide pin sheath that is sealed and penetrated into the vacuum chamber is inserted at the upper end of the mounting through hole, a guide pin mounting hole that is coaxially connected to the mounting through hole is opened on the guide pin sheath along the axis, a conductive guide pin is penetrated in the guide pin mounting hole, the lower end of the conductive guide pin is turned outward to form a limiting flange that is blocked at the lower end of the guide pin sheath, a conductive rod is sealed and penetrated in the mounting through hole below the guide pin sheath, a connecting rod inserted into the conductive guide pin is extended upward from the upper end of the conductive rod, and a supporting spring is sleeved on the outer side of the connecting rod.

3. The high pressure introduction device for the mass spectrometer vacuum chamber according to claim 2, characterized in that: The conductive rod is screwed and fixed in the installation through hole.

4. The high pressure introduction device for a mass spectrometer vacuum chamber according to claim 2, characterized in that: A first sealing ring is sleeved on the guide needle sheath located above the insulating sheath.

5. The mass spectrometer vacuum chamber high pressure introduction device according to claim 2, characterized in that: A second sealing ring is sleeved on the conductive rod below the insulating sheath.

6. The mass spectrometer vacuum chamber high pressure introduction device according to claim 1, characterized in that: The left end of the slide seat horizontally extends outward from the supporting vertical plate, and the end portion thereof is folded downward to form a limit rib that is blocked on the outside of the supporting vertical plate. A U-shaped slot that is connected to the strip hole is vertically opened on the slide seat directly above the limit rib, and an adjusting bolt is horizontally mounted in the U-shaped slot. The axial direction of the adjusting bolt is consistent with the length direction of the strip hole, and the inner end of the adjusting bolt is threaded through the supporting vertical plate, and a floating nut is screwed on it.

7. The high pressure introduction device for a mass spectrometer vacuum chamber according to claim 6, characterized in that: The adjusting bolt is provided with an annular groove adapted to be clamped in the U-shaped clamping groove.

8. The high pressure introduction device for a mass spectrometer vacuum chamber according to claim 1, characterized in that: The limiting inclined groove is opened obliquely upward from the bottom wall of the sliding seat, and the lower end thereof is an open end.

9. The high pressure introduction device for a mass spectrometer vacuum chamber according to claim 1, characterized in that: Horizontal sliding bars are symmetrically arranged on the two long side walls of the sliding seat, and a T-shaped fixed rail adapted to snap onto the horizontal sliding bars is arranged on the outer wall of the vacuum chamber of the mass spectrometer.

Images