Undulator vacuum chamber and method for manufacturing the same

Abstract

The present invention relates to the technical field of high-energy physics equipment, and discloses a vacuum chamber of a wiggler and a manufacturing method thereof. The vacuum chamber of the wiggler comprises a first half shell and a second half shell. The first half shell is provided with a first beam channel extending along its length direction; the second half shell is provided with a second beam channel extending along its length direction, and the first half shell and the second half shell are independently arranged. The first half shell is provided with a first welding structure, and the second half shell is provided with a second welding structure. The first welding structure is welded to the second welding structure, and the second beam channel and the first beam channel form a beam channel. By setting the vacuum chamber of the wiggler as a split structure connected by welding the first half shell and the second half shell, the first half shell and the second half shell can be processed separately during the manufacturing process to ensure the processing accuracy. Moreover, by setting the first welding structure and the second welding structure for welding, the influence of the welding heat and welding stress during the welding process on the size and geometric tolerance of the vacuum chamber of the wiggler is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of high-energy physics equipment, and particularly to a vacuum chamber of a wiggler and a manufacturing method thereof. Background Art

[0002] A wiggler is a periodic magnetic structure composed of a series of dipole magnets, and it is a key component in synchrotron radiation light sources and free electron lasers of large high-energy physics facilities. After high-energy electrons from an accelerator enter the wiggler, under the action of magnetic force, the electrons are forced to oscillate, thereby generating radiation. The radiation is guided to a laboratory through specific equipment for various scientific experiments.

[0003] High-energy electrons need to operate in an ultra-high vacuum environment with a vacuum degree better than 5E-10 Torr. The structure of the wiggler generally falls into two types: One structure is that the wiggler magnets are installed inside the vacuum chamber, and the electron beam passes between the magnet components. However, the vacuum chamber of such a wiggler is relatively large in size, and the overall design structure of the wiggler is complex; Another structure is that the vacuum chamber is installed between the gaps of the wiggler magnets, so that the electron beam passes through the inside of the vacuum chamber rather than directly through the magnet gaps. The vacuum chamber of this type of wiggler has a relatively simple structure. For the latter type of wiggler structure, the material of its vacuum chamber can be steel, aluminum alloy, copper, etc. Due to the low cost, small density, and good comprehensive performance of aluminum alloy, the application of aluminum alloy is more extensive.

[0004] Aluminum profiles are usually manufactured by a drawing process. However, the drawing process is carried out at high temperature, and large deformation will occur during the cooling process. It is very difficult to ensure the machining accuracy through processes such as straightening and shaping, and it is difficult to meet the accuracy requirements of the vacuum chamber. Moreover, the internal roughness of the aluminum profiles manufactured by the drawing process is generally about Ra63. Due to the long overall length of the vacuum chamber, it is difficult to machine the inside of the vacuum chamber through polishing processes such as abrasive flow. There is a large gap between the inner surface roughness of the finally manufactured vacuum chamber and the required inner surface roughness, and it is difficult to meet the requirements. Summary of the Invention

[0005] The technical problem to be solved by the present invention is that in the related art, the manufacturing and processing process of the vacuum chamber of the wiggler is restricted by its material and length, and it is easy to deform. It is difficult to machine the inside of the vacuum chamber of the wiggler, resulting in low accuracy of the vacuum chamber of the wiggler.

[0006] To solve the above technical problem, the present invention provides a vacuum chamber of a wiggler, which is arranged in the gap between adjacent magnet components on the wiggler, and includes:

[0007] A first half shell, and the first half shell is provided with a first beam channel extending along its length direction;

[0008] The second half shell is provided with a second beam flow groove extending along its length direction, and the first half shell and the second half shell are independently arranged;

[0009] An edge on the side of the first half shell facing the second half shell is provided with a first welding structure, and the first welding structure extends along the circumferential direction of the first half shell;

[0010] An edge on the side of the second half shell facing the first half shell is provided with a second welding structure, and the second welding structure extends along the circumferential direction of the second half shell;

[0011] The first welding structure is welded to the second welding structure to connect the first half shell and the second half shell, so that the second beam flow groove is opposite to the first beam flow groove and a beam flow channel is formed.

[0012] According to an embodiment of the present invention, the side of the first half shell facing the second half shell is rectangular, and the distances between the first welding structures on the two long sides of the first half shell and the beam flow channel are L 11 and L 12 , L 11 ≥20 mm, L 12 ≥20 mm, to ensure a certain distance and reduce the influence of welding deformation on the beam flow channel;

[0013] The side of the second half shell facing the first half shell is rectangular, and the distances between the second welding structures on the two long sides of the second half shell and the beam flow channel are L 21 and L 22 , L 21 ≥20 mm, L 22 ≥20 mm, to ensure a certain distance and reduce the influence of welding deformation on the beam flow channel.

[0014] According to an embodiment of the present invention, the vacuum box of the undulator further includes a connecting flange, and the connecting flange is used to connect with external equipment;

[0015] On the side of the first half shell parallel to the length direction of the beam flow channel, there is a first welding bump, and there is a groove on the first welding bump with an opening facing the second half shell. On the side of the second half shell parallel to the length direction of the beam flow channel, there is a second welding bump, and there is a groove on the second welding bump with an opening facing the first half shell. The first welding bump is welded to the second welding bump,

[0016] When the first half shell and the second half shell are joined together, the grooves on the first welding bump and the grooves on the second welding bump form a connection channel, the connection channel communicates with the beam channel, the connection flange is connected to both the first welding bump and the second welding bump, and the through hole of the connection flange communicates with the connection channel.

[0017] According to an embodiment of the present invention, when the first half shell and the second half shell are joined together, an exhaust cavity is formed between the first half shell and the second half shell, the exhaust cavity extends along the length direction of the beam channel, the connection channel, the exhaust cavity, and the beam channel are sequentially communicated, the cross-section of the exhaust cavity is larger than the cross-section of the beam channel, and the connection flange is connected to an air pump.

[0018] According to an embodiment of the present invention, a first half cavity is provided on one side of the first half shell facing the second half shell, a second half cavity is provided on one side of the second half shell facing the first half shell, and the first half cavity and the second half cavity together form the exhaust cavity.

[0019] According to an embodiment of the present invention, a first transition plane is formed between the first half cavity and the first beam groove in the first half shell, a second transition plane is formed between the second half cavity and the second beam groove in the second half shell, and the first transition plane is opposite to the second transition plane.

[0020] Support blocks are provided on the first transition plane, and / or support blocks are provided on the second transition plane. The support blocks are located between the first transition plane and the second transition plane and are in contact with both the first transition plane and the second transition plane.

[0021] According to an embodiment of the present invention, there are at least two support blocks, and they are spaced apart along the length direction of the beam channel. A communication channel is formed between two adjacent support blocks, and the communication channel communicates with both the beam channel and the exhaust cavity.

[0022] According to an embodiment of the present invention, on the side of the first half cavity away from the first beam groove, the first half shell is provided with a first air release groove. The opening of the first air release groove faces the second half shell, and the first air release groove communicates with the first half cavity.

[0023] And / or, on the side of the second half cavity away from the second beam groove, the second half shell is provided with a second air release groove. The opening of the second air release groove faces the first half shell, and the second air release groove communicates with the second half cavity.

[0024] According to an embodiment of the present invention, the vacuum chamber of the undulator further includes a beam flange, and the beam flange is used for connecting with the vacuum chamber of the adjacent undulator;

[0025] Third welding bumps are respectively arranged at two ends of the first half shell, and the third welding bumps extend around the first beam groove. Fourth welding bumps are respectively arranged at two ends of the second half shell, and the fourth welding bumps extend around the second beam groove. The third welding bumps and the fourth welding bumps are welded and connected. When the first half shell and the second half shell are assembled together, the third welding bumps and the fourth welding bumps form a conveying channel, and the conveying channel is communicated with the beam channel.

[0026] The beam flange is welded and connected with the third welding bumps and the fourth welding bumps, and the through hole of the beam flange is communicated with the conveying channel.

[0027] The present invention also provides a manufacturing method for the vacuum chamber of an undulator, which is used to manufacture the vacuum chamber of the undulator as described above. The vacuum chamber of the undulator further includes a connection flange, and the connection flange is used for connecting with external equipment;

[0028] First welding bumps are arranged on the side surface of the first half shell parallel to the length direction of the beam channel, and grooves with openings facing the second half shell are arranged on the first welding bumps. Second welding bumps are arranged on the side surface of the second half shell parallel to the length direction of the beam channel, and grooves with openings facing the first half shell are arranged on the second welding bumps. The first welding bumps and the second welding bumps are welded and connected.

[0029] When the first half shell and the second half shell are assembled together, the grooves on the first welding bumps and the grooves on the second welding bumps form a connection channel, the connection channel is communicated with the beam channel, the connection flange is connected with both the first welding bumps and the second welding bumps, and the through hole of the connection flange is communicated with the connection channel;

[0030] The manufacturing method of the vacuum chamber of the undulator includes:

[0031] Processing the first half shell and the second half shell respectively;

[0032] Confirming that both the first half shell and the second half shell meet the processing accuracy requirements, assembling the first half shell and the second half shell, and arranging a process support block in the beam channel;

[0033] Detecting the gap width between the first half shell and the second half shell;

[0034] Confirm that the gap width is within the set range, and perform spot welding along the circumferential direction of the first half shell and the second half shell;

[0035] Perform seal welding along the circumferential direction of the first half shell and the second half shell;

[0036] Weld and connect the connecting flange with the first welding bump and the second welding bump;

[0037] Perform vacuum leak detection on the connected first half shell and second half shell;

[0038] Confirm that the connected first half shell and second half shell meet the sealing requirements, and perform collimation measurement on the connected first half shell and second half shell;

[0039] Confirm that both the connected first half shell and second half shell meet the flatness requirement and the parallelism requirement, and remove the process support blocks.

[0040] The vacuum chamber of a undulator according to an embodiment of the present invention is a split structure in which the vacuum chamber of the undulator is formed by welding a first half shell and a second half shell. A first beam channel is provided on the first half shell, a second beam channel is provided on the second half shell, and the first beam channel and the second beam channel together form a beam channel. Therefore, during the manufacturing process, the dimensions, surface roughness, etc. of the first half shell and the second half shell can be processed separately, improving the accuracy of the vacuum chamber of the undulator. Moreover, by providing a first welding structure and a second welding structure for welding, the influence of welding heat and welding stress during the welding process on the dimensions and geometric tolerances of the vacuum chamber of the undulator is reduced, improving the accuracy of the vacuum chamber of the undulator and the cleanliness inside it. Description of the Drawings

[0041] Figure 1 is a perspective view of the vacuum chamber of the undulator provided by the embodiment of the present invention.

[0042] Figure 2 is Figure 1 the partial enlarged view at I in

[0043] Figure 3 is Figure 1 the partial enlarged view at II in

[0044] Figure 4 is a top view of the vacuum chamber of the undulator provided by the embodiment of the present invention.

[0045] Figure 5 is Figure 4 the sectional view of the vacuum chamber of the undulator at A - A in

[0046] Figure 6 is Figure 4Cross-sectional view of the vacuum chamber of the medium undulator at B-B.

[0047] Figure 7 is Figure 4 Cross-sectional view of the vacuum chamber of the medium undulator at C-C.

[0048] Figure 8 is a schematic structural view of the first half-shell provided by an embodiment of the present invention.

[0049] Figure 9 is a schematic structural view of the second half-shell provided by an embodiment of the present invention.

[0050] Figure 10 is a schematic view of the structural dimensions of the vacuum chamber of the undulator provided by an embodiment of the present invention.

[0051] Reference numerals:

[0052] 110, the first half-shell; 111, the first beam channel; 112, the first welding structure; 113, the first welding bump; 114, the third welding bump; 115, the first half-cavity; 116, the first transition plane; 117, the first outgassing groove; 118, the first positioning portion;

[0053] 120, the second half-shell; 121, the second beam channel; 122, the second welding structure; 123, the second welding bump; 124, the fourth welding bump; 125, the second half-cavity; 126, the second transition plane; 127, the second outgassing groove; 128, the second positioning portion;

[0054] 130, the beam channel; 131, the connecting channel; 132, the conveying channel; 133, the exhaust cavity; 134, the support block; 135, the outgassing cavity;

[0055] 140, the connecting flange; 141, the beam flange. Detailed implementation manners

[0056] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present invention. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0057] In the description of the embodiments of the present invention, the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the embodiments of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0058] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "connected" and "coupled" shall be understood in a broad sense. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific situations.

[0059] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0060] As Figure 1 shown, a vacuum chamber of a wiggler according to an embodiment of the present invention is disposed in a gap between adjacent magnet members of the wiggler. The vacuum chamber of the wiggler includes a first half-shell 110 and a second half-shell 120.

[0061] Specifically, as Figure 8 shown in Figure 9 FIG. Figure 8 the first half-shell 110 is provided with a first beam channel 111 extending along its length direction (the direction indicated by arrow a in Figure 9a second beam flow channel 121 extending in the direction indicated by arrow b in the figure. The second half shell 120 is independent of the first half shell 110, and the second half shell 120 and the first half shell 110 can be joined together. When the second half shell 120 and the first half shell 110 are joined together, the second beam flow channel 121 is opposite to the first beam flow channel 111 and forms a beam flow channel 130. At this time, the length direction of the beam flow channel 130 is consistent with the length direction of the first half shell 110 and the length direction of the second half shell 120. By setting the vacuum chamber of the undulator as the first half shell 110 and the second half shell 120 which are independent of each other and can be joined together, and by providing the first beam flow channel 111 on the first half shell 110 and the second beam flow channel 121 on the second half shell 120, and the first beam flow channel 111 and the second beam flow channel 121 jointly form the beam flow channel 130, it is convenient to process the inside and outside of the vacuum chamber of the undulator. During the manufacturing process, the first half shell 110 and the second half shell 120 can be processed separately to make the processing accuracy and surface roughness of the first half shell 110 and the second half shell 120 meet the technical requirements. Then, the first half shell 110 and the second half shell 120 are welded together to form the beam flow channel 130. Thereby, the processing difficulty of the vacuum chamber of the undulator is reduced, and the dimensional accuracy of the finished product of the vacuum chamber of the undulator is improved.

[0062] On the edge of one side of the first half shell 110 facing the second half shell 120, a first welding structure 112 is provided. The first welding structure 112 extends along the circumferential direction of the first half shell 110 and is continuous. On the edge of one side of the second half shell 120 facing the first half shell 110, a second welding structure 122 is provided. The second welding structure 122 extends along the circumferential direction of the second half shell 120 and is continuous. The first welding structure 112 and the second welding structure 122 are welded to connect the first half shell 110 and the second half shell 120. The first welding structure 112 and the second welding structure 122 can be sealed by argon arc welding. The transfer of welding heat to the first beam flow channel 111 and the second beam flow channel 121 is reduced, the influence of high temperature and welding stress during the welding process on the first half shell 110 and the second half shell 120 is reduced, the deformation degree of the first half shell 110 and the second half shell 120 is reduced, and the accuracy of the vacuum chamber of the undulator and its internal cleanliness are improved.

[0063] The vacuum chamber of the undulator according to an embodiment of the present invention is a split structure in which the vacuum chamber of the undulator is formed by welding a first half shell 110 and a second half shell 120. A first beam channel 111 is provided on the first half shell 110, a second beam channel 121 is provided on the second half shell 120, and the first beam channel 111 and the second beam channel 121 together form a beam channel 130. Thus, during the manufacturing process, the dimensions, surface roughness, etc. of the first half shell 110 and the second half shell 120 can be processed separately, improving the precision of the vacuum chamber of the undulator. Moreover, by providing a first welding structure 112 and a second welding structure 122 for welding, the influence of welding heat and welding stress during the welding process on the first half shell 110 and the second half shell 120 is reduced. Consequently, the influence of welding heat and welding stress during the welding process on the dimensions and geometric tolerances of the vacuum chamber of the undulator is decreased, enhancing the precision of the vacuum chamber of the undulator and the cleanliness inside it.

[0064] As Figures 8 to 10 shown, one side of the first half shell 110 facing the second half shell 120 is rectangular. The distances between the first welding structures 112 located on the two long sides of the first half shell 110 and the beam channel 130 are respectively L 11 and L 12 , L 11 ≥20 mm, L 12 ≥20 mm, to ensure a certain distance and reduce the influence of welding deformation on the beam channel 130. One side of the second half shell 120 facing the first half shell 110 is rectangular. The distances between the second welding structures 122 located on the two long sides of the second half shell 120 and the beam channel 130 are respectively L 21 and L 22 , L 21 ≥20 mm, L 22 ≥20 mm, to ensure a certain distance and reduce the influence of welding deformation on the beam channel 130. It can be understood that during the welding process, there is a heat-affected zone, that is, the area where the base metal is heated but not melted. Since this area has undergone a complex thermal cycle process, its microstructure and properties will change significantly, and it is prone to phenomena such as grain coarsening, hardening, softening, etc. At the same time, residual stress may also be generated, which has an adverse effect on the structure. By setting L 11 ≥20 mm, L 12 ≥20 mm, L 21 ≥20 mm, L 22 ≥20 mm, a buffer zone is formed between the first welding structure 112 and the beam channel 130 and between the second welding structure 122 and the beam channel 130, which can further reduce the heat transfer during the welding process to the beam channel 130 and reduce the influence of welding stress on the beam channel 130.

[0065] According to some embodiments of the present invention, the first half shell 110 is provided with a first positioning portion 118, and the second half shell 120 is correspondingly provided with a second positioning portion 128 corresponding to the first positioning portion 118. The first positioning portion 118 and the second positioning portion 128 are used to position the welding process of the first half shell 110 and the second half shell 120, and the first positioning portion 118 and the second positioning portion 128 are detachably connected. For example, as Figure 1 shown in Figure 7 , the first positioning portion 118 is a block structure with a through hole and is provided on the side surface of the first half shell 110, and the second positioning portion 128 is a block structure with a through hole and is provided on the side surface of the second half shell 120. The first positioning portion 118 and the second positioning portion 128 are connected by a positioning pin, and the positioning pin is inserted into the through holes on the first positioning portion 118 and the second positioning portion 128. Alternatively, in some embodiments, one of the first positioning portion 118 and the second positioning portion 128 may be a positioning hole, and the other may be a positioning post, and the positioning post is inserted into the positioning hole for positioning. During the welding process of the first half shell 110 and the second half shell 120, positioning and fixing can be performed through the first positioning portion 118 and the second positioning portion 128, which is convenient for welding.

[0066] As Figure 1 shown in Figure 2 , according to some embodiments of the present invention, the vacuum chamber of the undulator further includes a connecting flange 140, and the connecting flange 140 is used to connect with external equipment. For example, the connecting flange 140 can be used to connect with an air pump or a detection device, etc. The side surface of the first half shell 110 parallel to the length direction of the beam channel 130 is provided with a first welding bump 113, and the side surface of the second half shell 120 parallel to the length direction of the beam channel 130 is provided with a second welding bump 123. As Figure 5 shown in Figure 6 , the "side surface of the first half shell 110 parallel to the length direction of the beam channel 130" is the upper and lower surfaces of the first half shell 110, and the "side surface of the second half shell 120 parallel to the length direction of the beam channel 130" is the upper and lower surfaces of the second half shell 120. The first welding bump 113 and the second welding bump 123 are welded and connected, and the first welding bump 113 is provided with a groove with an opening facing the second half shell 120, and the second welding bump 123 is provided with a groove with an opening facing the first half shell 110. In the case where the first half shell 110 and the second half shell 120 are mutually joined, the grooves on the first welding bump 113 and the grooves on the second welding bump 123 enclose a connecting channel 131 communicating with the beam channel 130. The connecting flange 140 is welded and connected to both the first welding bump 113 and the second welding bump 123, and the through hole on the connecting flange 140 is communicated with the connecting channel 131, thereby reducing the deformation caused by the welding of the connecting flange 140 with the first half shell 110 and the second half shell 120.

[0067] According to some embodiments of the present invention, the vacuum chamber of the undulator further includes a beam flange 141 for connecting with the vacuum chamber of an adjacent undulator. Third welding bumps 114 are respectively provided at both ends of the first half shell 110, and the third welding bumps 114 extend around the first beam slot 111; fourth welding bumps 124 are respectively provided at both ends of the second half shell 120, and the fourth welding bumps 124 extend around the second beam slot 121. The third welding bumps 114 and the fourth welding bumps 124 are welded and connected correspondingly, and a delivery channel 132 communicating with the beam channel 130 is formed between the third welding bumps 114 and the fourth welding bumps 124. As Figure 3 shown, the third welding bumps 114 are located on the end faces at both ends of the first half shell 110, the third welding bumps 114 extend around the first beam slot 111 and are arc-shaped, and the arc-shaped third welding bumps 114 form an arc-shaped groove with an opening facing the second half shell 120; the fourth welding bumps 124 are located on the end faces at both ends of the second half shell 120, the fourth welding bumps 124 extend around the second beam slot 121 and are arc-shaped, and the arc-shaped fourth welding bumps 124 form an arc-shaped groove with an opening facing the first half shell 110. The beam flange 141 is welded and connected to both the third welding bumps 114 and the fourth welding bumps 124, and the through hole on the beam flange 141 communicates with the delivery channel 132.

[0068] As Figure 8 shown in Figure 9 shown, there are two third welding bumps 114, one is located at one end of the first beam slot 111, and the other is located at the other end of the first beam slot 111; there are two fourth welding bumps 124, one is located at one end of the second beam slot 121, and the other is located at the other end of the second beam slot 121. The third welding bumps 114 and the fourth welding bumps 124 are welded correspondingly one by one to form the delivery channel 132. As Figure 1 shown, the beam flange 141 is welded and connected to the third welding bumps 114 and the fourth welding bumps 124, and the internal channel of the beam flange 141 communicates with the beam channel 130 through the delivery channel 132.

[0069] According to some embodiments of the present invention, when the first half shell 110 and the second half shell 120 are assembled together, an exhaust cavity 133 is formed between the first half shell 110 and the second half shell 120. The exhaust cavity 133 extends along the length direction of the beam channel 130, and the connection channel 131, the exhaust cavity 133, and the beam channel 130 are communicated in sequence. The cross-section of the exhaust cavity 133 is larger than the cross-section of the beam channel 130, and the connection flange 140 is used to communicate with an air pump. The cross-sections of the above-mentioned exhaust cavity 133 and the beam channel 130 are both cross-sections in a direction perpendicular to the length direction of the first half shell 110 (the second half shell 120). As Figure 4 shown in Figure 5As shown, the cross-sectional area of the exhaust cavity 133 is larger than that of the beam channel 130. When evacuating the vacuum chamber of the undulator, the gas inside flows into the exhaust cavity 133 and is pumped out. By providing the exhaust cavity 133 and making its cross-section larger than that of the beam channel 130, the gas flow resistance is reduced and the pumping speed loss during the evacuation process is decreased.

[0070] As Figure 8 shown in Figure 9 As shown, on the side of the first half-shell 110 facing the second half-shell 120, there is a first half-cavity 115, and on the side of the second half-shell 120 facing the first half-shell 110, there is a second half-cavity 125. The first half-cavity 115 and the second half-cavity 125 together form the exhaust cavity 133, which is convenient for the machining and forming of the first half-shell 110 and the second half-shell 120. The exhaust cavity 133 can be of a symmetric shape, and the symmetry plane is the plane at the joint of the first half-shell 110 and the second half-shell 120. As Figure 7 shown, the cross-section of the exhaust cavity 133 is of an axisymmetric shape. The exhaust cavity 133 is set to be of a symmetric shape to simplify the machining process. Further, to simplify the machining process, the first half-shell 110 and the second half-shell 120 can be of a symmetric structure, and the symmetry plane is the plane at the joint of the first half-shell 110 and the second half-shell 120.

[0071] According to some embodiments of the present invention, the openings of the first half-cavity 115 and the first beam groove 111 are both located on the side of the first half-shell 110 facing the second half-shell 120 and are spaced apart. The first half-shell 110 forms a first transition plane 116 between the first half-cavity 115 and the first beam groove 111; the openings of the second half-cavity 125 and the second beam groove 121 are both located on the side of the second half-shell 120 facing the first half-shell 110 and are spaced apart. The second half-shell 120 forms a second transition plane 126 between the second half-cavity 125 and the second beam groove 121. After the first half-shell 110 and the second half-shell 120 are joined together, the first transition plane 116 faces the second transition plane. A connecting groove communicating the first beam groove 111 and the first half-cavity 115 can be provided on the first transition plane 116, or a connecting groove communicating the second beam groove 121 and the second half-cavity 125 can be provided on the second transition plane 126 to connect the beam channel 130 and the exhaust cavity 133.

[0072] A support block 134 is provided on the first transition plane 116, or a support block 134 is provided on the second transition plane 126. The support block 134 is located between the first transition plane 116 and the second transition plane 126, and the support block 134 is in contact with both the first transition plane 116 and the second transition plane 126 to improve the structural strength of the vacuum chamber of the undulator. Of course, support blocks 134 can also be provided on both the first transition plane 116 and the second transition plane 126. In some embodiments, there are at least two support blocks 134, which are spaced along the length direction of the beam channel 130. A communication channel is formed between two adjacent support blocks 134. The communication channel is in communication with both the beam channel 130 and the exhaust cavity 133. Thus, the beam channel 130 and the exhaust cavity 133 can be communicated through the communication channel between the support blocks 134, so that a structure specifically for communicating the beam channel 130 and the exhaust cavity 133 does not need to be provided, thereby simplifying the processing procedures of the first half shell 110 and the second half shell 120.

[0073] As Figures 7 to 9 shown, according to some embodiments of the present invention, on the side of the first half cavity 115 away from the first beam groove 111, the first half shell 110 is provided with a first air release groove 117. The opening of the first air release groove 117 faces the second half shell 120, and the first air release groove 117 is in communication with the first half cavity 115. This can reduce the area of the surfaces where the first half shell 110 and the second half shell 120 contact each other, avoid residual gas between the surfaces where the first half shell 110 and the second half shell 120 contact each other after connection, and improve the vacuum degree after the vacuum chamber of the undulator is evacuated. Or, in some embodiments, on the side of the second half cavity 125 away from the second beam groove 121, the second half shell 120 is provided with a second air release groove 127. The opening of the second air release groove 127 faces the first half shell 110, and the second air release groove 127 is in communication with the second half cavity 125. Its function is the same as that of the first air release groove 117. In some embodiments, the first half shell 110 is provided with the first air release groove 117, and the second half shell 120 is provided with the second air release groove 127. After the first half shell 110 and the second half shell 120 are joined together, the first air release groove 117 and the second air release groove 127 are opposite to each other and form an air release cavity 135 in communication with the exhaust cavity 133. As Figure 7 shown, the solid part of the first half shell 110 on the upper side of the first half cavity 115 is attached to the solid part of the second half shell 120 on the upper side of the second half cavity 125. The solid part of the first half shell 110 on the upper side of the first half cavity 115 is provided with a first air release groove 117, and the solid part of the second half shell 120 on the upper side of the second half cavity 125 is provided with a second air release groove 127. The first air release groove 117 and the second air release groove 127 are opposite to each other and form an air release cavity 135 in communication with the exhaust cavity 133.

[0074] A manufacturing method of a vacuum chamber of a wiggler according to an embodiment of the present invention is used to manufacture the vacuum chamber of the wiggler as described above. The manufacturing method of the vacuum chamber of the wiggler includes:

[0075] Process the first half shell 110 and the second half shell 120 respectively;

[0076] Confirm that both the first half shell 110 and the second half shell 120 meet the processing accuracy requirements, fit the first half shell 110 and the second half shell 120, and set a process support block in the beam channel 130;

[0077] Detect the gap width between the first half shell 110 and the second half shell 120;

[0078] Confirm that the gap width is within the set range, and perform spot welding along the circumferential direction of the first half shell 110 and the second half shell 120;

[0079] Perform symmetric seal welding along the circumferential direction of the first half shell 110 and the second half shell 120;

[0080] Weld and connect the connecting flange 140 with the first welding bump 113 and the second welding bump 123;

[0081] Perform vacuum leak detection on the connected first half shell 110 and second half shell 120;

[0082] Confirm that the connected first half shell 110 and second half shell 120 meet the sealing requirements, and perform alignment measurement on the connected first half shell 110 and second half shell 120;

[0083] Confirm that both the connected first half shell 110 and second half shell 120 meet the flatness requirements and parallelism requirements, and remove the process support block.

[0084] For the convenience of understanding, the following provides an embodiment of the manufacturing and assembly process of the vacuum chamber of the wiggler of the present invention:

[0085] The manufacturing and assembly process mainly includes the processing, assembly and welding steps of the first half shell 110 and the second half shell 120. The processing of the first half shell 110 and the second half shell 120 includes: blanking, first rough machining, heat treatment annealing to relieve stress, second rough machining, third rough machining, semi-finishing, and finishing. Through blanking, the alloy sheet is processed to preliminarily form the structure of the first half shell 110 and the second half shell 120. The first rough machining process uses a CNC gantry milling machine to remove most of the processing amount of the embryo, leaving a 10mm margin on one side; the heating temperature of the heat treatment annealing stress relief process is 170℃~190℃, and the temperature is kept for 10h to eliminate the stress generated in the first rough machining process; the second rough machining process uses a CNC gantry milling machine to further remove the processing allowance, and it is clamped in a free state before machining, leaving a 5mm margin on one side; the third rough machining process uses a CNC gantry milling machine to further remove the processing allowance The semi-finishing process is carried out on a CNC gantry milling machine, and it is clamped in a free state before processing, with a 0.5mm margin on one side; in the finishing process, it is clamped in a free state before processing, and the outer shapes of the first half shell 110 and the second half shell 120 are first processed. After the outer shapes are processed in place, the inner surfaces of the first beam slot 111 and the first half cavity 115 or the second beam slot 121 and the second half cavity 125 are finely processed based on the outer shapes to ensure the accuracy and roughness of the beam channel 130 and the exhaust cavity 133.

[0086] The assembly welding process includes: positioning and fixing the first half shell 110 and the second half shell 120, detecting the gap between the first half shell 110 and the second half shell 120, symmetrical spot welding, symmetrical sealing welding, welding flange, vacuum leak detection, alignment measurement, and removing process blocks. In the positioning and fixing process of the first half shell 110 and the second half shell 120, the first positioning part 118 and the second positioning part 128 are used for positioning and fixing, and the process blocks are placed in the beam channel 130 and the exhaust cavity 133 for support; the gap detection process of the first half shell 110 and the second half shell 120 uses a feeler gauge to detect the gap between the first half shell 110 and the second half shell 120, controls the assembly gap, and reduces the influence of uneven gap on the vacuum shape accuracy of the undulator; controls welding deformation through symmetrical spot welding process and symmetrical sealing welding process, and then welds the beam flange 141, the connecting flange 140, etc.; ensures that the overall flatness and parallelism are better than 0.1mm through alignment measurement; finally, removes the process blocks to complete the manufacture and assembly of the vacuum box of the undulator.

[0087] In summary, the embodiment of the present invention provides a vacuum chamber for a wiggler, which has at least the following advantages: The vacuum chamber of the wiggler is set as a split structure in which the first half shell 110 and the second half shell 120 are welded together, facilitating the processing of the interior of the vacuum chamber of the wiggler and improving the accuracy of the vacuum chamber of the wiggler; The first half shell 110 and the second half shell 120 are connected by welding through the first welding structure 112 and the second welding structure 122, reducing the influence of temperature and welding stress on the first half shell 110 and the second half shell 120 during the welding process and improving the accuracy of the vacuum chamber of the wiggler.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the present invention, rather than limiting the present invention. It should be pointed out that for those of ordinary skill in the art of this technology, without departing from the technical principle of the present invention, several improvements and substitutions can still be made, and these improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum chamber of a wiggler, which is arranged in the gap between adjacent magnet components on the wiggler, is characterized in that Comprising: A first half shell, the first half shell is provided with a first beam flow groove extending along its length direction; A second half shell, the second half shell is provided with a second beam flow groove extending along its length direction, and the first half shell and the second half shell are independently arranged; An edge of one side of the first half shell facing the second half shell is provided with a first welding structure, and the first welding structure extends along the circumferential direction of the first half shell; An edge of one side of the second half shell facing the first half shell is provided with a second welding structure, and the second welding structure extends along the circumferential direction of the second half shell; The first welding structure is welded to the second welding structure to connect the first half shell and the second half shell, so that the second beam flow groove is opposite to the first beam flow groove and forms a beam flow channel; A connecting flange, the connecting flange is used for connecting with an external device; On a side surface of the first half shell parallel to the length direction of the beam flow channel, there is a first welding bump, and on the first welding bump there is a groove with an opening facing the second half shell. On a side surface of the second half shell parallel to the length direction of the beam flow channel, there is a second welding bump, and on the second welding bump there is a groove with an opening facing the first half shell. The first welding bump is welded to the second welding bump; When the first half shell and the second half shell are mutually joined, the groove on the first welding bump and the groove on the second welding bump form a connecting channel, the connecting channel is communicated with the beam flow channel, the connecting flange is connected to both the first welding bump and the second welding bump, and the through hole of the connecting flange is communicated with the connecting channel.

2. The vacuum chamber of the undulator according to claim 1, characterized in that, One side of the first half shell facing the second half shell is rectangular, and the distances between the first welding structures on the two long sides of the first half shell and the beam channel are L 11 and L 12 , L 11 ≥20 mm, L 12 ≥20 mm to ensure a certain distance and reduce the influence of welding deformation on the beam channel; The side of the second half shell facing the first half shell is rectangular, and the distances between the second welding structures on the two long sides of the second half shell and the beam channel are L 21 and L 22 , L 21 ≥20 mm, L 22 ≥20 mm, so as to ensure a certain distance and reduce the influence of welding deformation on the beam channel.

3. The vacuum chamber of the undulator according to claim 1, characterized in that, When the first half shell and the second half shell are mutually joined, an exhaust cavity is formed between the first half shell and the second half shell, the exhaust cavity extends along the length direction of the beam flow channel, the connecting channel, the exhaust cavity, and the beam flow channel are sequentially communicated, the cross-section of the exhaust cavity is larger than the cross-section of the beam flow channel, and the connecting flange is communicated with an air pump.

4. The vacuum chamber of the undulator according to claim 3, characterized in that One side of the first half shell facing the second half shell is provided with a first half cavity, and one side of the second half shell facing the first half shell is provided with a second half cavity. The first half cavity and the second half cavity jointly form the exhaust cavity.

5. The vacuum chamber of the undulator according to claim 4, characterized in that, The first half shell forms a first transition plane between the first half cavity and the first beam flow groove, and the second half shell forms a second transition plane between the second half cavity and the second beam flow groove. The first transition plane is opposite to the second transition plane; There is a support block on the first transition plane, and / or there is a support block on the second transition plane. The support block is located between the first transition plane and the second transition plane and is in contact with both the first transition plane and the second transition plane.

6. The vacuum chamber of the undulator according to claim 5, characterized in that, There are at least two support blocks, and they are spaced apart along the length direction of the beam flow channel. A communication channel is formed between two adjacent support blocks, and the communication channel is communicated with both the beam flow channel and the exhaust cavity.

7. The vacuum chamber of the undulator according to claim 4, characterized in that, On one side of the first half cavity away from the first beam flow groove, the first half shell is provided with a first air vent groove, the opening of the first air vent groove faces the second half shell, and the first air vent groove communicates with the first half cavity; And / or, on one side of the second half cavity away from the second beam flow groove, the second half shell is provided with a second air vent groove, the opening of the second air vent groove faces the first half shell, and the second air vent groove communicates with the second half cavity.

8. The vacuum chamber of the undulator according to claim 1, characterized in that, The vacuum chamber of the undulator further includes a beam flange for connecting with the vacuum chamber of the adjacent undulator; Third welding bumps are respectively arranged at two ends of the first half shell, the third welding bumps extend around the first beam flow groove, fourth welding bumps are respectively arranged at two ends of the second half shell, the fourth welding bumps extend around the second beam flow groove, the third welding bumps and the fourth welding bumps are welded and connected, when the first half shell and the second half shell are mutually joined, the third welding bumps and the fourth welding bumps form a conveying channel, and the conveying channel communicates with the beam channel, The beam flange is welded and connected with the third welding bumps and the fourth welding bumps, and the through hole of the beam flange communicates with the conveying channel.

9. A manufacturing method of a vacuum chamber of a wiggler, for manufacturing the vacuum chamber of the wiggler according to any one of claims 1 to 8, characterized in that, The vacuum chamber of the undulator further includes a connection flange for connecting with external equipment; A first welding bump is arranged on the side surface of the first half shell parallel to the length direction of the beam channel, a groove with an opening facing the second half shell is arranged on the first welding bump, a second welding bump is arranged on the side surface of the second half shell parallel to the length direction of the beam channel, a groove with an opening facing the first half shell is arranged on the second welding bump, and the first welding bump and the second welding bump are welded and connected, When the first half shell and the second half shell are mutually joined, the groove on the first welding bump and the groove on the second welding bump form a connection channel, the connection channel communicates with the beam channel, the connection flange is connected with both the first welding bump and the second welding bump, and the through hole of the connection flange communicates with the connection channel; The manufacturing method of the vacuum chamber of the undulator includes: Processing the first half shell and the second half shell respectively; Confirming that both the first half shell and the second half shell meet the processing accuracy requirements, joining the first half shell and the second half shell, and arranging a process support block in the beam channel; Detecting the gap width between the first half shell and the second half shell; Confirming that the gap width is within the set range, and performing spot welding along the circumferential direction of the first half shell and the second half shell; Performing seal welding along the circumferential direction of the first half shell and the second half shell; Welding and connecting the connection flange with the first welding bump and the second welding bump; Performing vacuum leak detection on the joined first half shell and second half shell; Confirming that the joined first half shell and second half shell meet the sealing requirements, and performing collimation measurement on the joined first half shell and second half shell; After confirming that both the first half shell and the second half shell after connection meet the flatness requirement and the parallelism requirement, remove the process support block.

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