Automatic cleaning equipment, method and system for mechanical arm

Abstract

The embodiment of the invention provides automatic cleaning equipment, method and system for a mechanical arm, and the automatic cleaning equipment for the mechanical arm comprises a cleaning chamber which is provided with a side opening, and the height of the side opening is matched with the height of the mechanical arm; the cleaning assembly is arranged above the cleaning cavity and used for storing cleaning liquid and spraying the cleaning liquid to the cleaning cavity; and the drying assembly is arranged on the side wall and / or the top of the cleaning cavity and used for spraying out gas and drying part or all of the mechanical arm stretching into the cleaning cavity. By the adoption of the technical scheme, the problems that the cleaning frequency and the cleaning effect are deviated, the cleaning efficiency is low and the like, and the mechanical arm is manually cleaned can be solved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the technical field of automatic cleaning of robotic arms, and in particular, to an automatic cleaning device, method, and system for robotic arms. Background Art

[0002] The robotic arm of a wafer sorter is responsible for grasping, moving, and placing wafers. However, after being used for a period of time, there may be contaminants on the robotic arm, which can damage the wafers. Therefore, it is necessary to clean and maintain the robotic arm. However, there are deviations in the cleaning frequency and cleaning effect of manually cleaning the robotic arm, there is a risk of damaging the robotic arm, and the low cleaning efficiency affects production and other problems.

[0003] Therefore, how to provide a technical solution to solve the problems existing in manually cleaning the robotic arm has become an urgent technical problem to be solved. Summary of the Invention

[0004] In view of this, the embodiments of the present invention provide an automatic cleaning device for a robotic arm, an automatic cleaning method for a robotic arm, and an automatic cleaning system for a robotic arm, which can effectively solve the problems existing in manually cleaning the robotic arm.

[0005] To solve the above technical problems, the embodiments of the present invention provide an automatic cleaning device for a robotic arm, including: a cleaning chamber having a side opening, and the height of the side opening is adapted to the height of the robotic arm; a cleaning component disposed above the cleaning chamber for storing a cleaning liquid and spraying the cleaning liquid into the cleaning chamber; a drying component disposed on the side wall and / or the top of the cleaning chamber for ejecting a gas to perform a drying process on part or all of the robotic arm extending into the cleaning chamber.

[0006] Optionally, the cleaning component includes: a liquid storage tank located above the cleaning chamber for storing the cleaning liquid; a nozzle communicated with the liquid storage tank, disposed below the liquid storage tank and at the top of the cleaning chamber for spraying the cleaning liquid into the center of the cleaning chamber; an automatic valve disposed between the nozzle and the liquid storage tank for controlling the on / off of the liquid between the nozzle and the liquid storage tank.

[0007] Optionally, the cleaning component further includes: a liquid injection hole disposed on the top surface of the liquid storage tank for injecting the cleaning liquid into the liquid storage tank from the outside.

[0008] Optionally, the drying component includes: a nozzle disposed in an air supply hole on the side wall and / or the top of the cleaning chamber and facing the central area of the cleaning chamber; an air pipe passing through the air supply hole and communicated with the nozzle for supplying a drying gas.

[0009] Optionally, the number of the nozzles is 3.

[0010] Optionally, the drying component further includes an air outlet hole; the air outlet hole is located on a side wall of the cleaning chamber and is coupled to an exhaust pump for exhausting the gas in the cleaning chamber.

[0011] Optionally, the drying component also includes: an air pump; the air pump has a first end and a second end; the first end of the air pump is coupled to the air pipe, and the second end of the air pump is coupled to the air tank, for pumping out the gas in the air tank through the air pipe.

[0012] Optionally, the robotic arm automatic cleaning device also includes: a drainage component; the drainage component is arranged below the cleaning chamber, and the drainage component includes: a collecting bin, connected to the bottom of the cleaning chamber, and having a top opening and side walls, the top opening being adapted to the shape and size of the bottom of the cleaning chamber; wherein the side walls of the collecting bin are funnel-shaped and inclined inward; a leakage hole, arranged at the bottom of the collecting bin; a drainage trough, arranged below the leakage hole and connected to the leakage hole, for discharging the liquid flowing out of the leakage hole.

[0013] Optionally, there are multiple leakage holes, which are evenly distributed at the bottom of the collecting bin.

[0014] Optionally, the drainage trough has a first end and a second end; the first end of the drainage trough is located below the leakage hole; the second end of the drainage trough passes through the side wall of the automatic cleaning equipment and is connected to the outside; wherein the horizontal height of the first end of the drainage trough is higher than the horizontal height of the second end of the drainage trough.

[0015] Correspondingly, the present invention also provides an automatic cleaning method for a robot arm, which is used for an automatic cleaning device for a robot arm, wherein the automatic cleaning device for a robot arm comprises a cleaning chamber, a cleaning component arranged above the cleaning chamber, and a drying component arranged on the side wall and / or top of the cleaning chamber, wherein the cleaning chamber has a side opening, and the height of the side opening is adapted to the height of the robot arm; the method comprises: extending part or all of the robot arm into the cleaning chamber; spraying cleaning liquid through the cleaning component to clean the robot arm extended into the cleaning chamber; and spraying gas through the drying component to dry part or all of the robot arm extended into the cleaning chamber.

[0016] Optionally, the cleaning component includes: a liquid storage tank, an automatic valve, and a nozzle; the step of spraying cleaning liquid through the cleaning component to clean the robotic arm extending into the cleaning chamber includes: opening the automatic valve, and the cleaning liquid flows out from the liquid storage tank through the nozzle to clean the robotic arm; closing the automatic valve after a first preset time period.

[0017] Optionally, the first preset time length for the cleaning liquid to clean the robotic arm is 2 minutes.

[0018] Optionally, the drying component includes: a nozzle, an air pump, and an exhaust pump; the step of spraying gas through the drying component includes one or more of the following: natural air drying for a second preset time; turning on the air pump to spray gas toward the robotic arm through the nozzle; turning off the air pump after a third preset time, wherein the second preset time is 5 to 12 times the third preset time; natural exhaust for a fourth preset time, wherein the second preset time is 2 to 5 times the fourth preset time; turning on the exhaust pump to exhaust the gas in the cleaning chamber; turning off the exhaust pump after a fifth preset time, wherein the fourth preset time is 5 to 10 times the fifth preset time.

[0019] Optionally, a third preset time length for spraying gas toward the robotic arm through the nozzle is 5 minutes.

[0020] Optionally, the fifth preset time length for exhausting the gas in the cleaning chamber is 2 minutes.

[0021] Correspondingly, the present invention also provides a robotic arm automatic cleaning system, comprising: a robotic arm automatic cleaning device as described above; an operation instruction processing module, coupled to the robotic arm, for collecting sorting information of the robotic arm, and determining maintenance instructions based on the sorting information; the operation instruction processing module is also coupled to the robotic arm automatic cleaning device, for controlling the working state of the robotic arm automatic cleaning device.

[0022] Optionally, the sorting information includes the number of wafers sorted by the robot arm; wherein the maintenance instructions determined by the operation instruction processing module include: in response to the number of wafers sorted by the robot arm being greater than or equal to 10,000 wafers, determining a maintenance instruction, wherein the maintenance instruction is used to control the robot arm to extend into the cleaning chamber; and / or, in response to the number of wafers sorted by the robot arm being greater than or equal to 6,000 wafers and the robot arm is currently in a non-working state, determining the maintenance instruction, wherein the maintenance instruction is used to control the robot arm to extend into the cleaning chamber.

[0023] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0024] In an automatic cleaning device for a robotic arm provided by an embodiment of the present invention, the cleaning component can clean the robotic arm extending into the cleaning chamber, and after the cleaning is completed, the drying component sprays gas to dry part or all of the robotic arm extending into the cleaning chamber. During the entire process of maintaining the robotic arm, the robotic arm does not need to be exposed to the external environment, and the cleaning and drying time is fixed. Therefore, there are few deviations in the cleaning frequency and cleaning effect, which reduces the risk of damaging the robotic arm and greatly improves the cleaning efficiency, so it can effectively deal with the problems existing in manual cleaning of the robotic arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the invention of this specification, the drawings required for use in the embodiments of the invention of this specification or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic cross-sectional view of a robotic arm automatic cleaning device according to an embodiment of the present invention is shown;

[0027] Figure 2 A schematic diagram of a process flow of an automatic cleaning method for a robotic arm in an embodiment of the present invention is shown;

[0028] Figure 3 A schematic structural diagram of an automatic cleaning system for a robotic arm according to an embodiment of the present invention is shown;

[0029] Figure 4 A schematic flow chart of a maintenance method based on an automatic cleaning system for a robotic arm in an embodiment of the present invention is shown.

[0030] Description of reference numerals:

[0031] Cleaning chamber 100;

[0032] Liquid storage tank 210, automatic valve 220, spray head 230, liquid injection hole 240;

[0033] Nozzle 310, air outlet 320;

[0034] The collecting chamber 410, the leakage hole 420, the drainage groove 430, the first end 430a of the drainage groove, and the second end 430b of the drainage groove. DETAILED DESCRIPTION

[0035] The technical scheme of the present invention is described in detail below in conjunction with specific embodiments and their accompanying drawings. The embodiments recorded herein are specific embodiments of the present invention, which are used to illustrate the concept of the present invention; these descriptions are explanatory and exemplary and should not be construed as limitations on the embodiments of the present invention and the scope of protection of the present invention. In addition to the embodiments recorded herein, those skilled in the art can also adopt other obvious technical solutions based on the contents disclosed in the claims of this application and its specification, including technical solutions that adopt any obvious replacements and modifications to the embodiments recorded herein.

[0036] It should be noted that the drawings in this embodiment are schematic diagrams, which assist in explaining the concept of the present invention and schematically represent the shapes of the various parts and their mutual relationships. It should be understood that in order to clearly show the structures of the various components of the present invention, the drawings are not drawn according to the same scale, and the same reference numerals are used to represent the same parts in the drawings.

[0037] As described in the background technology, the robotic arm of the wafer sorter is responsible for grabbing, moving and placing wafers. However, after a period of use, there may be contaminants on the robotic arm, which may damage the wafers. Therefore, the robotic arm needs to be cleaned and maintained. However, there are deviations in the cleaning frequency and cleaning effect of manual cleaning of the robotic arm, and there is a risk of damaging the robotic arm. The cleaning efficiency is low, which affects production.

[0038] It should be noted that to manually clean and maintain the robotic arm, the outer shell of the wafer sorter must be opened first; then, an external spray gun device is used to clean the vacuum suction cup that holds the wafer in the robotic arm; finally, it is allowed to dry naturally or with a jet of air. Such manual maintenance is not only labor-intensive, but the cleaning efficiency and effect vary from person to person, and there are even safety risks to the equipment and personnel.

[0039] In order to solve the above technical problems, an embodiment of the present invention provides an automatic cleaning device for a robotic arm, in which a cleaning component can clean the robotic arm extending into a cleaning chamber, and after the cleaning is completed, a drying component sprays gas to dry part or all of the robotic arm extending into the cleaning chamber. During the entire process of maintaining the robotic arm, the robotic arm does not need to be exposed to the external environment, and the cleaning and drying time is fixed. Therefore, there are few deviations in the cleaning frequency and cleaning effect, which reduces the risk of damaging the robotic arm and greatly improves the cleaning efficiency, so it can effectively deal with the problems existing in manual cleaning of the robotic arm.

[0040] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is clearly and completely described below with reference to the accompanying drawings.

[0041] See also Figure 1 , Figure 1A cross-sectional schematic diagram of a robotic arm automatic cleaning device in an embodiment of the present invention is shown.

[0042] In this embodiment, the robot arm automatic cleaning device may include: a cleaning chamber 100, a cleaning component, and a drying component.

[0043] The cleaning chamber 100 has a side opening, and the side opening is oriented toward the robot arm, wherein the height of the side opening matches the height of the robot arm. Matching means that the robot arm can extend from the side opening into the cleaning chamber 100 for cleaning; the height of the side opening and the height of the robot arm are relative to the height of the bottom surface of the machine.

[0044] In some embodiments, the side opening of the cleaning chamber 100 is not facing the machine platform of the robot arm, which can reduce the probability of the cleaning liquid splashing onto other components of the machine platform during the cleaning process.

[0045] The cleaning component is disposed above the cleaning chamber 100 , and cleaning liquid can be injected into the cleaning component. The cleaning component can also store the cleaning liquid and spray the cleaning liquid into the cleaning chamber 100 .

[0046] In some embodiments, the cleaning component includes: a liquid storage tank 210 , a nozzle 230 , and an automatic valve 220 .

[0047] Specifically, the cleaning component is designed to achieve an efficient, precise and automated cleaning process to meet the high cleanliness requirements of the robotic arm during the wafer sorting process.

[0048] The liquid storage tank 210 in the cleaning assembly is located above the cleaning chamber 100 and is used to store the cleaning liquid. The cleaning liquid can be deionized water, hydrogen peroxide, isopropyl alcohol, organic solvent or other special cleaning agents, and the specific selection depends on the cleaning requirements and the compatibility of the cleaning liquid with the material of the robot arm.

[0049] In some embodiments, the capacity of the liquid storage tank 210 is designed according to the cleaning frequency and usage to ensure that multiple cleaning tasks can be completed between two replenishments.

[0050] In some embodiments, the liquid storage tank 210 is sealed to prevent the cleaning liquid from volatilizing or being contaminated.

[0051] In some embodiments, the liquid storage tank 210 has a liquid level monitoring function. The liquid storage tank 210 is equipped with a liquid level sensor to monitor the remaining amount of cleaning liquid in real time, and issue an alarm or automatically replenish when the liquid level is too low.

[0052] In a specific embodiment, when the liquid storage bin 210 is located above the cleaning chamber 100, by configuring a liquid level sensor and placing the liquid level sensor on the side wall of the liquid storage bin 210 at a position flush with the liquid surface of the remaining cleaning liquid for the last cleaning operation, the remaining amount of the cleaning liquid can be further accurately monitored, avoiding interruption of the cleaning process due to exhaustion of the cleaning liquid.

[0053] The spray head 230 in the cleaning assembly is communicated with the liquid storage bin 210, is arranged below the liquid storage bin 210, and is located at the top of the cleaning chamber 100 for spraying the cleaning liquid towards the center of the cleaning chamber 100.

[0054] The spray head 230 can evenly spray the cleaning liquid onto the surface of the robotic arm to ensure that the cleaning liquid can cover all areas to be cleaned.

[0055] In some embodiments, the spray head 230 can spray at multiple angles. The spray head 230 is designed to be adjustable in angle and direction to adapt to the cleaning requirements of different parts of the robotic arm.

[0056] In some embodiments, the spray head 230 has an atomization effect. The spray head 230 adopts atomization technology to spray the cleaning liquid in the form of tiny droplets, improving the cleaning effect and reducing the consumption of the cleaning liquid. The atomized cleaning liquid has small liquid kinetic energy and is not easy to damage the robotic arm.

[0057] In a specific embodiment, there are multiple groups of the spray heads 230. Each group of the spray heads 230 has at least 3, and the axes of the water spray nozzles of each group of spray heads have the same angle with the plane where the installation position is located, and there is an angle difference of at least 10 degrees between the angles of each group of spray heads.

[0058] In some embodiments, the material of the spray head 230 is a corrosion-resistant material. The spray head 230 is made of corrosion-resistant materials such as stainless steel, polytetrafluoroethylene, and ceramics to cope with the different chemical properties of different cleaning liquids.

[0059] In a specific embodiment, the number of the spray heads 230 is 1.

[0060] In some embodiments, the number of the spray heads 230 is multiple.

[0061] The automatic valve 220 in the cleaning assembly is arranged between the spray head 230 and the liquid storage bin 210 for controlling the on-off of the liquid between the spray head 230 and the liquid storage bin 210 to ensure that the cleaning process proceeds according to a preset program.

[0062] In some embodiments, the automatic valve 220 can accurately control the flow rate and spraying time of the cleaning liquid to avoid waste and ensure the cleaning effect.

[0063] In some embodiments, the automatic valve 220 has a fast response characteristic and can be opened or closed immediately after receiving a control signal.

[0064] In some embodiments, the automatic valve 220 is made of highly durable materials that can withstand frequent switching operations and chemical corrosion from cleaning fluids.

[0065] In some embodiments, the number of the automatic valves 220 corresponds to the number of the spray heads 230 .

[0066] In some embodiments, the cleaning assembly further includes a liquid injection hole 240 .

[0067] The injection hole 240 is disposed on the top surface of the liquid storage tank 210 and is used to replenish the cleaning liquid into the liquid storage tank 210 from the outside, thereby ensuring that the cleaning component can continuously provide sufficient cleaning liquid during long-term operation.

[0068] In some embodiments, the injection hole 240 is disposed at an easily accessible position on the side of the liquid storage bin 210 to facilitate the replenishment of the cleaning liquid.

[0069] In some embodiments, the injection hole 240 is equipped with a sealing cover and / or a valve to prevent leakage of the cleaning liquid or external contaminants from entering the liquid storage tank 210 .

[0070] In some embodiments, the injection hole 240 is compatible with a variety of injection methods, including manual injection and automatic injection systems.

[0071] In other words, when the robot arm completes a certain number of wafer sorting tasks, the control system triggers the cleaning program. The automatic valve 220 opens, and then the cleaning liquid is sprayed from the liquid storage tank 210 to the surface of the robot arm through the nozzle 230. The nozzle 230 can adjust the angle and spray mode according to the preset program to ensure that the cleaning liquid covers all key parts of the robot arm to clean, dissolve or flush away the contaminants on the surface of the robot arm. After the cleaning is completed, the automatic valve 220 is closed to stop the flow of the cleaning liquid.

[0072] In the entire application scenario, the cleaning process does not require manual intervention, which improves cleaning efficiency and consistency, and ensures that the surface of the robot arm is thoroughly cleaned by accurately controlling the flow rate and spray pattern of the cleaning liquid. The design of the automatic valve 220 and the atomizing nozzle reduces the amount of the cleaning liquid, reduces operating costs, and ensures that the robot arm can quickly return to a clean state after completing a certain number of wafer sorting tasks, thereby ensuring production efficiency and product quality.

[0073] The drying component is disposed on the side wall and / or the top of the cleaning chamber 100, and is used to spray gas to dry part or all of the robot arm extending into the cleaning chamber 100. The drying component is intended to efficiently remove residual cleaning liquid on the surface of the robot arm, ensuring that the robot arm quickly returns to a dry state after cleaning, thereby avoiding the influence of residual liquid on subsequent operations or equipment performance, and thus allowing the equipment to quickly return to a usable state.

[0074] In the embodiment of the present invention, the drying component includes: a nozzle 310 and an air pipe.

[0075] The nozzle 310 is disposed in the gas supply hole on the side wall and / or the top of the cleaning chamber 100 and faces the central area of ​​the cleaning chamber 100, and is used to spray gas onto the surface of the robot arm in a specific direction and flow rate to accelerate the evaporation and removal of residual liquid.

[0076] In some embodiments, the nozzle 310 may be arranged at multiple angles. The nozzle 310 may be installed on the sidewall and top of the cleaning chamber 100 and directed toward the center area of ​​the cleaning chamber 100 to ensure that the gas can cover all parts of the robot arm.

[0077] In some embodiments, the number of the nozzles 310 is 3. Figure 1 As shown in (part of the nozzle is not shown).

[0078] In some embodiments, the nozzle 310 is an adjustable nozzle. The nozzle 310 can adjust the direction and flow rate of the airflow to adapt to robotic arms of different shapes and sizes.

[0079] In some embodiments, the nozzle 310 is made of corrosion-resistant material. The nozzle 310 is made of corrosion-resistant materials such as stainless steel, polytetrafluoroethylene, and ceramics. Since the cleaning liquid may splash onto the surface of the nozzle 310 during the cleaning and drying process, a corrosion-resistant material is used to withstand the chemical residue of the cleaning liquid.

[0080] In the embodiment of the present invention, the gas pipe passes through the gas supply hole and is connected to the nozzle 310, so as to transport the gas to the nozzle 310, thereby ensuring that the gas can be efficiently and stably delivered to the drying area.

[0081] In some embodiments, the air tube can withstand higher gas pressure to ensure stable airflow.

[0082] In some embodiments, the air pipe material needs to be resistant to the chemical residue of the cleaning solution, and the used materials include stainless steel or fluoroplastic.

[0083] In some embodiments, the air tube is made of flexible material to facilitate installation and position adjustment.

[0084] The drying assembly further includes: an air pump (not shown); the air pump has a first end and a second end;

[0085] The first end of the air pump is coupled to the air pipe, and the second end of the air pump is coupled to a gas storage tank (not shown), so as to pump the gas in the gas storage tank through the air pipe to the nozzle 310 to achieve drying of the robot arm.

[0086] Specifically, the first end of the air pump is coupled to the air pipe for outputting gas to the nozzle 310 in the cleaning chamber. The second end of the air pump is coupled to the gas storage tank for extracting gas from the gas storage tank. The pump body of the air pump is made of corrosion-resistant material (such as stainless steel or aluminum alloy) to withstand long-term operation and chemical components in the gas.

[0087] In some embodiments, the first end and the second end of the air pump are both provided with sealing rings or sealing gaskets to prevent gas leakage.

[0088] In some embodiments, the gas pump is equipped with a flow regulating valve to adjust the gas flow according to drying requirements.

[0089] In some embodiments, the air pump adopts a low noise design to reduce interference with the working environment.

[0090] In some embodiments, the capacity of the gas storage tank is designed according to the requirements of the drying component, so as to ensure that multiple drying tasks can be completed between two inflations.

[0091] In some embodiments, the gas tank is equipped with a safety valve to prevent excessive pressure. The shell of the gas tank is made of high-strength material to ensure safety in use.

[0092] In some embodiments, the gas storage tank can be inflated by an external gas source (such as an air compressor or a gas cylinder).

[0093] In some embodiments, the gas tank is replaceable.

[0094] In some embodiments, the dry gas stored in the gas storage tank is selected from compressed air, nitrogen or other inert gases, providing a stable gas source for the air pump.

[0095] In some embodiments, the drying assembly further includes an air outlet 320 , which is located on a side wall of the cleaning chamber 100 and is coupled to an exhaust pump for exhausting gas in the cleaning chamber 100 .

[0096] Specifically, the air outlet 320 is disposed on the side wall of the cleaning chamber 100, near the bottom of the cleaning chamber 100 or below the robot operation area, so as to efficiently discharge moisture and residual gas to maintain a dry and clean environment in the chamber.

[0097] In some embodiments, the gas outlet 320 is coupled to an exhaust pump through a pipe to form a closed gas exhaust channel. The pipe is made of corrosion-resistant material (such as stainless steel or fluoroplastic) to withstand the chemical residue of the cleaning solution, and the connection is sealed to prevent gas leakage or external contaminants from entering.

[0098] The exhaust pump extracts gas from the cleaning chamber 100 through the gas outlet 320 to ensure the pressure balance in the chamber and prevent moisture accumulation.

[0099] In some embodiments, the diameter of the air outlet 320 is designed according to the power of the exhaust pump and the volume of the cleaning chamber 100 to ensure efficient exhaust.

[0100] In some embodiments, the air outlet hole 320 can be provided as a single hole or multiple holes, evenly distributed at different positions of the side wall to cover the exhaust requirements of the entire chamber.

[0101] The exhaust pump is installed outside the cleaning chamber 100 and connected to the air outlet 320 through a pipeline to provide negative pressure to quickly extract the gas in the cleaning chamber 100. A high-efficiency filter is provided at the air inlet of the exhaust pump to prevent particulate matter or chemical residues from entering the pump body. The filter element of the filter can be replaced regularly to maintain the exhaust efficiency.

[0102] In other words, after the cleaning of the robot arm is completed, the drying component is started, and the air pump begins to deliver dry gas to the cleaning chamber 100 through the air pipe and the nozzle 310. The exhaust pump extracts moisture and residual gas in the cleaning chamber 100 through the air outlet 320 to maintain a dry environment in the chamber. After the drying is completed, the air pump and the exhaust pump stop working, and the robot arm returns to a dry state, providing reliable protection for subsequent operations. The air pump and the exhaust pump can be operated automatically and work in conjunction with other parts of the drying component to achieve the purpose of quickly drying the robot arm.

[0103] In some embodiments, the robotic arm automatic cleaning device may further include a drainage assembly, and the drainage assembly is disposed below the cleaning chamber 100.

[0104] Specifically, the drainage assembly includes: a collection bin 410, a liquid leakage hole 420, and a liquid drainage groove 430;

[0105] The collection bin 410 is connected to the bottom of the cleaning chamber 100 and has a top opening and side walls. The top opening is adapted in shape and size to the bottom of the cleaning chamber 100. The top opening is completely matched with the bottom of the cleaning chamber 100 to form a seamless connection, preventing waste liquid from leaking or splashing out and ensuring that the waste liquid can completely flow into the collection bin 410.

[0106] In some embodiments, the side walls of the collection bin 410 are inclined inward in a funnel shape, which can enable the waste liquid to quickly converge to the bottom and avoid liquid retention.

[0107] The liquid leakage hole 420 is disposed at the bottom of the collection bin 410 and is used for discharging the converged waste liquid. The diameter of the liquid leakage hole 420 is designed according to the waste liquid flow rate to ensure that the waste liquid can be quickly discharged.

[0108] In some embodiments, the cross-sectional shape of the liquid leakage hole 420 is rectangular.

[0109] In some embodiments, there are multiple liquid leakage holes 420, and they are evenly distributed at the bottom of the collection bin 410.

[0110] The liquid drainage groove 430 is disposed below the liquid leakage hole 420 and is communicated with the liquid leakage hole 420 for discharging the liquid flowing out of the liquid leakage hole 420.

[0111] In some embodiments, the liquid drainage groove 430 has a first end and a second end. The first end 430a of the liquid drainage groove is located below the liquid leakage hole 420, and the second end 430b of the liquid drainage groove penetrates through the side wall of the automatic cleaning device and is communicated with the outside.

[0112] Among them, the horizontal height of the first end 430a of the liquid drainage groove is higher than the horizontal height of the second end 430b of the liquid drainage groove. The inclined design of the liquid drainage groove 430 facilitates the natural discharge of the waste liquid.

[0113] In some embodiments, the waste gas generated during the drying process can also be discharged through the liquid leakage hole 420 and the liquid drainage groove 430.

[0114] In some embodiments, the second end 430b of the liquid drainage groove is connected to an external waste liquid treatment system.

[0115] In other words, the collecting bin 410 is connected to the bottom of the cleaning chamber 100, and the funnel-shaped sidewall of the collecting bin 410 quickly gathers the waste liquid to the bottom of the collecting bin 410. The waste liquid flows into the drain groove 430 through the leakage hole 420 at the bottom of the collecting bin 410, and finally is discharged from the cleaning chamber 100, ensuring the cleanliness of the cleaning chamber 100 and the long-term stable operation of the equipment.

[0116] It can be understood that the above describes multiple implementation schemes provided by this embodiment, and the various optional methods introduced in each implementation scheme can be combined and cross-referenced with each other without conflict, thereby extending a variety of possible implementation schemes, which can all be considered as implementation schemes disclosed and open to the public by the present invention.

[0117] This embodiment also provides a robot arm automatic cleaning method corresponding to the above-mentioned robot arm automatic cleaning device, as shown below. Figure 2 It should be noted that the contents of the automatic cleaning method for a robot arm described below can be referenced to the contents of the automatic cleaning device for a robot arm described above.

[0118] In this embodiment, the automatic cleaning method of a robot arm is used for an automatic cleaning device for a robot arm, wherein the automatic cleaning device for a robot arm comprises a cleaning chamber, a cleaning component arranged above the cleaning chamber, and a drying component arranged on the side wall and / or top of the cleaning chamber, wherein the cleaning chamber has a side opening, and the height of the side opening is adapted to the height of the robot arm.

[0119] See also Figure 2 , shows a schematic flow chart of a method for automatic cleaning of a robotic arm in an embodiment of the present invention, and the following steps S21 to S23 can be performed, and each step is described below.

[0120] In step S21, part or all of the robot arm is extended into the cleaning chamber.

[0121] Specifically, the robot arm has a vacuum suction cup for clamping the wafer. When cleaning the robot arm, the vacuum suction cup needs to be fully extended into the cleaning chamber for cleaning. The robot arm that is partially or fully connected to the vacuum suction cup and can be extended into the cleaning chamber can also be cleaned.

[0122] The size of the cleaning chamber is adapted to the robot arm, and the size of the side opening of the cleaning chamber is set based on the robot arm to be cleaned, so that the robot arm can be inserted into the cleaning chamber and the robot arm and the cleaning chamber are not prone to scratching.

[0123] In step S22, the cleaning component sprays cleaning liquid to clean the robot arm extending into the cleaning chamber.

[0124] In this embodiment, the cleaning component includes: a liquid storage tank, a nozzle, and an automatic valve.

[0125] Specifically, the liquid storage tank is responsible for storing a sufficient amount of cleaning liquid to ensure that the cleaning process can be carried out continuously and stably. The design of the liquid storage tank fully considers the sealing and corrosion resistance to prevent the cleaning liquid from leaking or deteriorating. The nozzle connected to the liquid storage tank sprays the cleaning liquid onto the robot arm at an appropriate pressure and angle, and the cleaning liquid evenly covers every corner of the robot arm, thereby achieving the best cleaning effect.

[0126] In addition, an automatic valve is provided between the liquid storage tank and the nozzle for automatically controlling the liquid on and off between the nozzle and the liquid storage tank.

[0127] In some embodiments, the liquid storage tank has a liquid level detection device. If it is detected that the remaining liquid is insufficient for the next cleaning operation, a liquid replenishment prompt will be issued.

[0128] In some embodiments, the liquid storage tank has an automatic liquid replenishment system. If it is detected that the remaining liquid is insufficient for the next cleaning operation, the cleaning liquid will be automatically replenished through the automatic liquid replenishment system.

[0129] The cleaning operation of the robotic arm will be performed only when the liquid in the liquid storage tank is sufficient for the next cleaning operation. Specifically, the automatic valve is opened, and the cleaning liquid flows out from the liquid storage tank through the nozzle to clean the robotic arm; the automatic valve is closed after a first preset time.

[0130] In some embodiments, the first preset time length for the cleaning fluid to clean the robotic arm is 2 minutes.

[0131] In some embodiments, after cleaning the robotic arm, the robotic arm is naturally air-dried for a second preset time period.

[0132] In step S23, gas is sprayed through the drying component to dry part or all of the robot arm extending into the cleaning chamber.

[0133] In this embodiment, the drying component includes: a nozzle, an air pump, and an exhaust pump. The drying process steps are as follows:

[0134] Turning on the air pump to spray gas toward the robotic arm through the nozzle;

[0135] Turning off the air pump after a third preset time, wherein the second preset time is 5 to 12 times the third preset time;

[0136] Turning on the exhaust pump to exhaust the gas in the cleaning chamber;

[0137] After the fifth preset time period, the exhaust pump is turned off.

[0138] In some embodiments, the gas is exhausted by natural exhaust, and the natural exhaust has a fourth preset time length, and the second preset time length is 2 to 5 times the fourth preset time length.

[0139] In some embodiments, the fourth preset duration is 5 to 10 times the fifth preset duration.

[0140] In some embodiments, a third preset time length for spraying gas toward the robotic arm through the nozzle is 5 minutes.

[0141] In some embodiments, the fifth preset time length for exhausting the gas in the cleaning chamber is 2 minutes.

[0142] This embodiment also provides an automatic cleaning system for a robotic arm, which is exemplarily described below with reference to the accompanying drawings.

[0143] See also Figure 3 , Figure 3 A schematic structural diagram of an automatic cleaning system for a robotic arm in an embodiment of the present invention is shown.

[0144] The robotic arm automatic cleaning system may include: the above-mentioned robotic arm automatic cleaning device 51, and may also include an operation instruction processing module 52, which is coupled to the robotic arm and is used to collect sorting information of the robotic arm and determine maintenance instructions based on the sorting information; the operation instruction processing module 52 is also coupled to the robotic arm automatic cleaning device 51, and is used to control the working state of the robotic arm automatic cleaning device 51.

[0145] Specifically, the working state of the robot arm automatic cleaning device 51 may include: working state, non-working state, maintenance state, maintenance completion state, etc.

[0146] It should be pointed out that the above-mentioned automatic cleaning equipment for robotic arms refers to multiple implementation schemes provided by the automatic cleaning equipment for robotic arms described above, and the various optional methods introduced in each implementation scheme can be combined and cross-referenced with each other without conflict, thereby extending a variety of possible implementation schemes, which can all be considered as the automatic cleaning equipment for robotic arms disclosed and disclosed by the present invention.

[0147] It is particularly noted that the operation instruction processing module 52 is only a division of a logical function, and can be fully or partially integrated into a physical entity or physically separated in actual implementation. In addition, the module can be implemented in the form of a processor calling software.

[0148] Reference Figure 4 , Figure 4A schematic flow chart of a maintenance method based on an automatic cleaning system for a robotic arm in an embodiment of the present invention is shown.

[0149] The method may include steps S41 to S48. Each step is described below.

[0150] In step S41, the machine working state is obtained. In response to the machine working state being in working state, step S42 is continued to be executed. In response to the machine working state being in non-working state, step S43 is continued to be executed.

[0151] In step S42, ≥10,000 wafers are sorted.

[0152] Determine whether the number of sorted wafers is ≥ 10,000. In response to the number of sorted wafers being ≥ 10,000, continue to execute step S44; otherwise, return to execute step S41.

[0153] In step S43, ≥6000 wafers are sorted. It is determined whether the number of sorted wafers is ≥6000. If the number of sorted wafers is ≥6000, step S44 is continued; otherwise, step S41 is returned to be executed.

[0154] Specifically, the operation instruction processing module can obtain the working status of the machine and the number of sorted wafers.

[0155] In other words, when the machine is in working state, it is determined whether the number of wafers sorted by the robot arm is greater than or equal to 10,000 pieces. If it is greater than or equal to 10,000 pieces, the machine is set to maintenance state; otherwise, its working state will continue to be obtained.

[0156] When the machine is in a non-working state, it is determined whether the number of wafers sorted by the robot arm is greater than or equal to 6000. If so, the machine is set to a maintenance state; otherwise, its working state will continue to be obtained.

[0157] In step S44, maintenance starts.

[0158] Specifically, a state modification instruction may be issued, where the state modification instruction is used to set the machine to a maintenance state.

[0159] In step S45, part or all of the robot arm is extended into the cleaning chamber.

[0160] A maintenance instruction is issued, wherein the maintenance instruction is used to control the robot arm to partially or completely extend into the cleaning chamber.

[0161] In response to setting the machine to a maintenance state, the operation instruction processing module may issue a maintenance instruction, which is used to control the robot arm to extend into the cleaning chamber.

[0162] It should be noted that after the robotic arm extends into the preset position of the cleaning chamber, the operation instruction processing module will obtain the liquid level information of the liquid storage tank in the robotic arm automatic cleaning equipment. If the liquid level in the liquid storage tank is sufficient for this cleaning, an instruction to open the automatic valve will be sent; otherwise, a liquid replenishment instruction information will be sent.

[0163] In some embodiments, the operation instruction processing module can control the automatic fluid replenishment system to perform fluid replenishment.

[0164] In step S46, the cleaning component sprays cleaning liquid to clean the robot arm extending into the cleaning chamber.

[0165] A cleaning instruction is issued, wherein the cleaning instruction is used to spray the cleaning liquid through the cleaning component to clean the robot arm extending into the cleaning chamber.

[0166] Specifically, the operation instruction processing module sends an instruction to close the automatic valve after a preset cleaning time has passed after sending an instruction to open the automatic valve.

[0167] In step S47, the drying assembly sprays gas to dry part or all of the robot arm extending into the cleaning chamber.

[0168] A drying instruction is issued, wherein the drying instruction is used to spray gas through the drying component to dry part or all of the robot arm extending into the cleaning chamber.

[0169] In some embodiments, the operation instruction processing module can send an instruction to turn on the air pump and / or exhaust pump after sending an instruction to close the automatic valve, and after a preset drying time, send an instruction to turn off the air pump and / or exhaust pump to complete the automatic drying process. Finally, send an instruction to control the robot arm to return to the working position.

[0170] In some embodiments, the operation instruction processing module sends an instruction to turn on the air pump, after a preset drying time, sends an instruction to turn off the air pump, then sends an instruction to turn on the exhaust pump, after a preset exhaust time, sends an instruction to turn off the exhaust pump, and finally sends an instruction to control the robot arm to return to the working position.

[0171] In step S48, the maintenance is ended.

[0172] In some embodiments, the operation instruction processing module sends an end maintenance instruction after a preset air-drying time, and the end maintenance instruction is used to control the robot arm to return to the working position.

[0173] In some embodiments, after the operation instruction processing module controls the robot arm to return to the working position, it will obtain the liquid level information of the liquid storage tank. If the liquid level in the liquid storage tank is not enough to complete the next cleaning work, it will issue a liquid replenishment instruction.

[0174] It should be noted that the automatic cleaning device, method, and system for robotic arms in this article are applicable to the case of multiple robotic arms. After one robotic arm completes cleaning and drying, the next robotic arm can continue to be cleaned and dried. Therefore, the end maintenance in step S48 can be the end maintenance after the cleaning and drying of a single robotic arm is completed.

[0175] It should be understood that the term "and / or" in this article is only a description of the association relationship of the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article indicates that the associated objects before and after are in an "or" relationship.

[0176] The "plurality" appearing in the embodiments of the present application refers to two or more.

[0177] The first, second, etc. descriptions appearing in the embodiments of the present application are only used for illustration and distinction of the description objects. There is no order, nor do they indicate any special limitation on the number of devices in the embodiments of the present application, and cannot constitute any limitation on the embodiments of the present application.

[0178] It should be pointed out that the serial numbers of the steps in this embodiment do not limit the execution order of the steps.

[0179] Although the embodiments of the present invention are disclosed above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A robotic arm automatic cleaning device, characterized in that: include: A cleaning chamber, wherein the cleaning chamber has a side opening, and the height of the side opening is adapted to the height of the robot arm; A cleaning component, disposed above the cleaning chamber, for storing cleaning liquid and spraying the cleaning liquid into the cleaning chamber; The drying component is arranged on the side wall and / or the top of the cleaning chamber, and is used for spraying gas to dry part or all of the robot arm extending into the cleaning chamber.

2. The automatic cleaning device for a robotic arm according to claim 1, characterized in that: The cleaning component comprises: A liquid storage tank, located above the cleaning chamber and used for storing the cleaning liquid; a spray head, connected to the liquid storage bin, disposed below the liquid storage bin and located at the top of the cleaning chamber, and used for spraying the cleaning liquid toward the center of the cleaning chamber; The automatic valve is arranged between the spray head and the liquid storage tank, and is used to control the liquid flow between the spray head and the liquid storage tank.

3. The automatic cleaning device for a robotic arm according to claim 2, characterized in that: The cleaning component also includes: The liquid injection hole is arranged on the top surface of the liquid storage tank and is used to inject the cleaning liquid into the liquid storage tank from the outside.

4. The automatic cleaning device for a robotic arm according to claim 1, characterized in that: The drying component comprises: a nozzle, disposed in an air supply hole on a side wall and / or a top of the cleaning chamber and directed toward a central area of ​​the cleaning chamber; An air pipe is provided through the air supply hole and is connected with the nozzle for supplying dry gas.

5. The automatic cleaning device for a robotic arm according to claim 4, characterized in that: The number of the nozzles is 3.

6. The automatic cleaning device for a robot arm according to claim 4, characterized in that: The drying component also includes an air outlet; The gas outlet is located on the side wall of the cleaning chamber and is coupled to an exhaust pump for exhausting the gas in the cleaning chamber.

7. The automatic cleaning device for a robot arm according to claim 4, characterized in that: The drying component also includes: an air pump; The air pump has a first end and a second end; The first end of the air pump is coupled to the air pipe, and the second end of the air pump is coupled to the air storage tank, so as to pump the gas in the air storage tank out through the air pipe.

8. The automatic cleaning device for a robotic arm according to claim 1, characterized in that: Also includes: Drainage components; The drainage assembly is disposed below the cleaning chamber, and the drainage assembly includes: A collecting bin connected to the bottom of the cleaning chamber and having a top opening and side walls, wherein the top opening is adapted to the shape and size of the bottom of the cleaning chamber; Wherein, the side wall of the collection bin is funnel-shaped and tilted inwards; A liquid leakage hole is arranged at the bottom of the collecting bin; The liquid drain groove is arranged below the liquid leakage hole and communicated with the liquid leakage hole, and is used for draining the liquid flowing out of the liquid leakage hole.

9. The automatic cleaning device for a robot arm according to claim 8, characterized in that: There are multiple leakage holes, which are evenly distributed at the bottom of the collection bin.

10. The automatic cleaning device for a robot arm according to claim 8, characterized in that: The drain has a first end and a second end; The first end of the drainage groove is located below the leakage hole; The second end of the drainage trough passes through the side wall of the automatic cleaning device and is connected to the outside; Wherein, the horizontal height of the first end of the drainage trough is higher than the horizontal height of the second end of the drainage trough.

11. A method for automatic cleaning of a robot arm, characterized in that: An automatic cleaning device for a robot arm, the automatic cleaning device for the robot arm comprising a cleaning chamber, a cleaning component arranged above the cleaning chamber, and a drying component arranged on the side wall and / or the top of the cleaning chamber, wherein the cleaning chamber has a side opening, and the height of the side opening is adapted to the height of the robot arm; The method comprises: Extending part or all of the robotic arm into the cleaning chamber; The cleaning component sprays cleaning liquid to clean the robot arm extending into the cleaning chamber; Gas is sprayed through the drying component to dry part or all of the robot arm extending into the cleaning chamber.

12. The automatic cleaning method of a robot arm according to claim 11, characterized in that: The cleaning assembly includes: a liquid storage tank, an automatic valve, and a nozzle; The step of spraying cleaning liquid through the cleaning component to clean the robot arm extending into the cleaning chamber includes: Open the automatic valve, and the cleaning liquid flows out from the liquid storage tank through the nozzle to clean the robot arm; The automatic valve is closed after a first preset time period.

13. The automatic cleaning method of a robot arm according to claim 12, characterized in that: The first preset time length for the cleaning fluid to clean the robotic arm is 2 minutes.

14. The automatic cleaning method of a robot arm according to claim 11, characterized in that: The drying assembly includes: a nozzle, an air pump, and an exhaust pump; The step of ejecting gas through the drying assembly includes one or more of the following: Air dry for the second preset time; Turning on the air pump to spray gas toward the robotic arm through the nozzle; Turning off the air pump after a third preset time, wherein the second preset time is 5 to 12 times the third preset time; a fourth preset time length for natural exhaust, wherein the second preset time length is 2 to 5 times the fourth preset time length; The exhaust pump is turned on to exhaust the gas in the cleaning chamber; after a fifth preset time period, the exhaust pump is turned off, and the fourth preset time period is 5 to 10 times of the fifth preset time period.

15. The automatic cleaning method of a robot arm according to claim 14, characterized in that: The third preset time length for spraying gas toward the robotic arm through the nozzle is 5 minutes.

16. The automatic cleaning method of a robot arm according to claim 14, characterized in that: The fifth preset time length for exhausting the gas in the cleaning chamber is 2 minutes.

17. A robotic arm automatic cleaning system, characterized in that: include: The automatic cleaning device for a robotic arm as claimed in any one or more of claims 1 to 10; An operation instruction processing module, coupled to the mechanical arm, for collecting sorting information of the mechanical arm and determining a maintenance instruction based on the sorting information; The operation instruction processing module is also coupled to the robot arm automatic cleaning device and is used to control the working state of the robot arm automatic cleaning device.

18. The automatic cleaning system for a robot arm according to claim 17, characterized in that: The sorting information includes the number of wafers sorted by the robot arm; The maintenance instructions determined by the operation instruction processing module include: In response to the number of wafers sorted by the robot arm being greater than or equal to 10,000, determining a maintenance instruction, wherein the maintenance instruction is used to control the robot arm to extend into the cleaning chamber; And / or, in response to the number of wafers sorted by the robot arm being greater than or equal to 6,000 and the robot arm being currently in a non-working state, determining the maintenance instruction, wherein the maintenance instruction is used to control the robot arm to extend into the cleaning chamber.

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