Stability detection method for SiC MOS device

Abstract

The invention discloses a method for detecting the stability of a SiC MOS device, and relates to the technical field of electric device detection equipment, and the method comprises the following steps: S1, placing the SiC MOS device at a designated detection position, and testing the relation between the drain current (Id) of an MOSFET and the drain-source voltage (Vds) and the grid voltage (Vgs) under different temperature and voltage conditions; according to the stability detection method for the SiC MOS device, when a movable block moves, a rotating shaft arranged at the end part of the movable block is synchronously driven to move, and meanwhile, when a swinging block moves along with the movable block, the swinging block moves along the outer surface of an inclined block, so that the rotating shaft is driven to rotate, and a clamping block is driven to rotate, so that during subsequent detection, the stability of the clamping block is ensured. The overall angle can be adjusted according to actual conditions, and contact accuracy is guaranteed.

Description

Technical Field

[0001] The present invention relates to an electrical device detection equipment technology, and in particular to a stability detection method for a SiC MOS device. Background Art

[0002] Silicon-carbon (SiC) MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor) is a power electronic device with broad application prospects in high temperature, high voltage and high frequency applications. In order to ensure the reliability and stability of SiC MOS devices in actual work, it is usually necessary to perform a variety of stability tests on them.

[0003] A Chinese invention patent with publication number CN117741199B discloses a convenient detection system for electronic components. The convenient detection system for electronic components is provided with a flexible detection mechanism. Through the cooperation of a carrier, a support ring, a magnet plate and an insulating plate, non-contact fixation can be achieved on the one hand. While improving the reliability and stability of component fixation, the compatibility and matching of the fixing work for different types of components is effectively improved, and the damage to components caused by contact hard fixation is effectively solved, the convenience and reliability of component detection work are improved, and the detection efficiency of components is improved in disguise. On the other hand, the conductive sheet can be used to conduct auxiliary connection between the detection head and the pins of the component, which effectively improves the convenience and stability of the connection between the detection head and the pins of the component, greatly reduces the difficulty of detection, and is equipped with non-contact fixation, which can facilitate long-term tracking detection of components, greatly improving the convenience and efficiency of detection work.

[0004] When existing equipment is used, during the component inspection process, inappropriate fixing methods and inaccurate and unreliable connections between the inspection contacts and pins cause a sharp decline in inspection convenience, inspection reliability and the authenticity of inspection data, making it impossible to achieve long-term tracking performance inspection. Therefore, a stability inspection method for SiC MOS devices has been developed. Summary of the invention

[0005] The object of the present invention is to provide a stability detection method for a SiC MOS device to solve the above-mentioned deficiencies in the prior art.

[0006] In order to achieve the above object, the present invention provides the following technical solution: a method for detecting the stability of a SiC MOS device, comprising the following steps:

[0007] S1. Place the SiC MOS device at the designated test position and test the relationship between the drain current, drain-source voltage and gate voltage of the MOSFET under different temperature and voltage conditions.

[0008] S2. Detect whether the SiC MOS device has abnormal leakage current in the off state;

[0009] S3. Check the switching characteristics of the SiC MOS device and simultaneously monitor the current changes of the gate control "on" and "off" states;

[0010] Among them, in S1, the device is transported through a substrate, an adjustment component is symmetrically arranged on the upper end of the substrate, and a positioning component is arranged at the end of the adjustment component, the positioning component is adjusted in angle by the adjustment component, and the device is locked in cooperation with the positioning component;

[0011] The adjusting assembly comprises an adjusting plate connected to the base plate, a driving member is arranged at the end of the adjusting plate, a screw is arranged at the output end of the driving member, and a movable block is arranged on the outer surface of the screw, a guide block is arranged at the upper end of the adjusting plate and located on one side of the driving member, and the upper end of the guide block is slidably connected with the lower end of the movable block;

[0012] A rotating shaft is rotatably mounted at the end of the movable block, a clamping block is arranged at the end of the rotating shaft, and one end of the rotating shaft away from the clamping block penetrates and extends to the other end of the movable block, and a swing block is arranged at the end of the rotating shaft, and an inclined block is arranged at one side of the adjusting plate, and the upper end of the inclined block is slidably connected with the outer surface of the swing block;

[0013] A docking plate is provided at the end of the clamping block, a telescopic member is provided at one end of the docking plate, the output end of the telescopic member penetrates and extends to the other end of the docking plate, and a movable cylinder is provided at the output end of the telescopic member, a limiting column is slidably installed on the inner wall of the movable cylinder, a protective plate is provided at one end of the limiting column away from the movable cylinder, a positioning plate is provided on the outer surface of the end of the protective plate, and the protective plate is connected to the docking plate through the positioning column;

[0014] The outer surface of the movable cylinder is evenly provided with multiple groups of movable rods, and the ends of the movable rods are rotatably installed with adjusting rods, the ends of the adjusting rods are rotatably connected to the ends of the docking plates, and the outer surfaces of the adjusting rods are slidably connected to the inner walls of the positioning plates, and the ends of the adjusting rods are provided with clamping blocks.

[0015] As a further optimization solution of the present invention, the positioning assembly includes a base plate connected to the clamping block, a support plate is provided at the end of the base plate, and a power member is provided on one side of the support plate.

[0016] As a further optimization scheme of the present invention, the output end of the power member passes through and extends to the inner cavity of the support plate, a rotating drum is provided at the output end of the power member, and a first guide groove and a second guide groove are sequentially opened on the outer surface of the rotating drum.

[0017] As a further optimization scheme of the present invention, a fixed shaft is rotatably mounted on one end of the support plate away from the rotating drum, a driving block is provided at one end of the fixed shaft, and an outer surface of the end of the driving block is slidably connected to the inner wall of the second guide groove.

[0018] As a further optimization solution of the present invention, a balancing plate is provided at one end of the fixed shaft away from the driving block, and a connecting block is provided at one end of the balancing plate.

[0019] As a further optimization solution of the present invention, a push plate is provided at one end of the connection block away from the balancing plate, and a first extrusion block is provided at the end of the push plate.

[0020] As a further optimization solution of the present invention, a moving block is provided at one end of the balancing plate away from the connecting block, and a limiting groove is provided at one end of the moving block close to the balancing plate.

[0021] As a further optimization solution of the present invention, the inner wall of the limiting groove is slidably connected to the outer surface of the end of the balance plate.

[0022] As a further optimization solution of the present invention, a second extrusion block is provided at the end of the moving block, and the second extrusion block and the first extrusion block are distributed in a stepped manner.

[0023] As a further optimization solution of the present invention, a positioning cylinder is provided on the outer surface of one end of the second extrusion block, a protrusion is provided on the end of the positioning cylinder, and the outer surface of the protrusion is slidably connected to the inner wall of the first guide groove.

[0024] Compared with the prior art, the present invention provides a method for detecting the stability of a SiC MOS device, which has the following beneficial effects: when the movable block moves, the rotating shaft arranged at its end is synchronously driven to move, and when the swing block follows the movable block to move, it moves along the outer surface of the inclined block, thereby driving the rotating shaft to rotate and driving the clamping block to rotate, so that in subsequent detection, the overall angle can be adjusted according to the actual situation to ensure the accuracy of the contact.

[0025] When the fixed shaft rotates, the balance plate arranged at its end is driven to rotate, and the connecting block arranged at one end is driven to move, and the push plate arranged on the connecting block is driven to move synchronously. Since the first extrusion block is arranged on the push plate, the first extrusion block moves synchronously with the push plate, and the outer surface of the SiC MOS device is initially defined. When the rotating cylinder rotates, the first guide groove cooperates with the convex block to drive the positioning cylinder to move left and right, and when the positioning cylinder moves, it drives the second extrusion block to move, and adjust the SiC MOS device left and right, and fix the outer surface of the SiC MOS device, so that the whole remains stable during subsequent inspections. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0027] Figure 1 A schematic diagram of the overall structure provided for an embodiment of the present invention;

[0028] Figure 2 A schematic diagram of the overall structure of the embodiment of the present invention;

[0029] Figure 3 A schematic diagram of the structure of an adjustment component provided in an embodiment of the present invention;

[0030] Figure 4 A cross-sectional view of the internal structure of a butt joint plate provided in an embodiment of the present invention;

[0031] Figure 5 A first schematic diagram of a partial structure of an adjustment component provided by an embodiment of the present invention;

[0032] Figure 6 A second schematic diagram of a partial structure of an adjustment component provided by an embodiment of the present invention;

[0033] Figure 7 A first schematic diagram of a positioning assembly structure provided by an embodiment of the present invention;

[0034] Figure 8 A second schematic diagram of a positioning assembly structure provided by an embodiment of the present invention;

[0035] Fig. 9 A cross-sectional view of the internal structure of a positioning assembly provided by an embodiment of the present invention;

[0036] Fig.10 A schematic diagram of the structure of a clamp block and a positioning assembly provided in an embodiment of the present invention;

[0037] Fig.11 A schematic diagram of the structure of the fixing block and the docking plate provided in an embodiment of the present invention.

[0038] Description of reference numerals:

[0039] 1. Base plate; 2. Adjustment assembly; 3. Positioning assembly; 11. Detection member; 21. Adjustment plate; 211. Guide block; 22. Driving member; 221. Screw rod; 23. Movable block; 24. Rotating shaft; 241. Swinging block; 242. Clamping block; 25. Oblique block; 26. Fixed block; 261. Positioning column; 262. Protective plate; 263. Positioning plate; 264. Limiting column; 27. Docking plate; 271. Telescopic member; 272. Movable cylinder; 28. movable rod; 29. ​​adjusting rod; 291. clamping block; 31. bottom plate; 32. supporting plate; 321. power member; 33. rotating cylinder; 331. first guide groove; 332. second guide groove; 34. fixed shaft; 35. driving block; 36. balancing plate; 361. connecting block; 362. pushing plate; 363. first extrusion block; 37. moving block; 371. limiting groove; 372. second extrusion block; 38. positioning cylinder; 381. protrusion. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0041] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] Example: See Figure 1-Figure 11A method for detecting the stability of a SiC MOS device comprises the following steps: S1, placing the SiC MOS device at a designated detection position, and controlling the relationship between the drain current, drain-source voltage and gate voltage of the MOSFET under different temperature and voltage conditions; S2, detecting whether the SiC MOS device has an abnormal leakage current in the off state; S3, checking the switching characteristics of the SiC MOS device, and synchronously monitoring the current changes of the gate control "on" and "off" states.

[0043] Among them, in S1, the device is transported through the substrate 1, the upper end of the substrate 1 is symmetrically provided with an adjustment component 2, and the end of the adjustment component 2 is provided with a positioning component 3. The positioning component 3 is adjusted in angle by the adjustment component 2, and the device is locked in cooperation with the positioning component 3.

[0044] In this solution, a device with a telescopic function such as an electric telescopic rod is provided at the upper end of the substrate 1, and the adjustment component 2 is driven to move by the electric telescopic rod, wherein a detection component 11 is provided at the end of the substrate 1. When the adjustment component 2 and the positioning component 3 are moved to the lower end of the detection component 11, the SiC MOS device is detected in cooperation with the detection component 11.

[0045] Since the adjusting component 2 is connected to the positioning component 3, when the adjusting component 2 moves, the positioning component 3 is synchronously driven to move. The electric telescopic rod provided on the base plate 1 can drive the adjusting component 2 and the positioning component 3 to move until they reach the specified position.

[0046] Furthermore, the adjustment component 2 includes an adjustment plate 21 connected to the base plate 1, a driving member 22 is provided at the end of the adjustment plate 21, a screw 221 is provided at the output end of the driving member 22, and a movable block 23 is provided on the outer surface of the screw 221, and a guide block 211 is provided at the upper end of the adjustment plate 21 and on one side of the driving member 22, and the upper end of the guide block 211 is slidably connected to the lower end of the movable block 23.

[0047] In this embodiment, the driving member 22 is a device with power output such as a motor, and is connected to an external control device. When the driving member 22 is started, it synchronously drives the screw 221 arranged at its end to rotate. When the screw 221 rotates, it drives the movable block 23 arranged on its outer surface to move. The movable block 23 is moved by the guide block 211, and the movable block 23 is limited by the guide block 211.

[0048] Furthermore, a rotating shaft 24 is rotatably mounted at the end of the movable block 23, a clamping block 242 is provided at the end of the rotating shaft 24, and one end of the rotating shaft 24 away from the clamping block 242 passes through and extends to the other end of the movable block 23, and at the same time, a swing block 241 is provided at the end of the rotating shaft 24, and an inclined block 25 is provided on one side of the adjustment plate 21, and the upper end of the inclined block 25 is slidably connected to the outer surface of the swing block 241.

[0049] Specifically, when the movable block 23 moves, it synchronously drives the rotating shaft 24 set at its end to move. At the same time, when the swing block 241 follows the movable block 23 to move, it moves along the outer surface of the inclined block 25, thereby driving the rotating shaft 24 to rotate and driving the clamping block 242 to rotate, so that in subsequent detection, the overall angle can be adjusted according to the actual situation to ensure the accuracy of the contact.

[0050] A roller is provided at the end of the swing block 241, and the outer surface of the roller is in contact with the upper end of the inclined block 25, so that when the movable block 23 moves, the roller is synchronously driven to move at the upper end of the inclined block 25, so that the roller rotates around the rotating shaft 24, wherein the rotating shaft 24 is connected to the swing block 241, thereby driving the rotating shaft 24 and the clamping block 242 to rotate.

[0051] Furthermore, a docking plate 27 is provided at the end of the clamping block 242, and a telescopic member 271 is provided at one end of the docking plate 27. The output end of the telescopic member 271 passes through and extends to the other end of the docking plate 27. At the same time, a movable cylinder 272 is provided at the output end of the telescopic member 271. A limiting column 264 is slidably installed on the inner wall of the movable cylinder 272. A protective plate 262 is provided at one end of the limiting column 264 away from the movable cylinder 272. A positioning plate 263 is provided on the outer surface of the end of the protective plate 262. The protective plate 262 and the docking plate 27 are connected via the positioning column 261.

[0052] Specifically, the docking plate 27 is docked with the clamping block 242, so that the docking plate 27 is tightly fixed on the clamping block 242. The telescopic member 271 is a device with a telescopic function such as an electric telescopic rod, and is connected to an external control device. At the same time, when the telescopic member 271 is started, the movable cylinder 272 arranged at its output end is synchronously driven to move, and the movable cylinder 272 is limited by the limit column 264.

[0053] The protective plate 262 and the docking plate 27 are fixed together by the positioning column 261 , and a fixing block 26 is provided on the outer surface of the positioning column 261 , so as to protect the outer surface of the positioning column 261 .

[0054] Furthermore, a plurality of groups of movable rods 28 are evenly arranged on the outer surface of the movable cylinder 272, and an adjusting rod 29 is rotatably installed at the end of the movable rod 28, and the end of the adjusting rod 29 is rotatably connected to the end of the docking plate 27. At the same time, the outer surface of the adjusting rod 29 is slidably connected to the inner wall of the positioning plate 263, and a clamping block 291 is arranged at the end of the adjusting rod 29.

[0055] Specifically, when the movable cylinder 272 moves, the movable rod 28 disposed on its outer surface is synchronously driven to move. Since the end of the movable rod 28 is provided with a rotational connection with the middle position of the outer surface of the adjustment rod 29, and when the movable rod 28 moves, the adjustment rod 29 is pushed to rotate around the connection with the docking plate 27, and the adjustment rod 29 is limited by the positioning plate 263, so that the adjustment rod 29 moves along the inner wall of the positioning plate 263, thereby driving the clamping block 291 to move toward the middle or expand outward. The positioning assembly 3 is fixed by the clamping block 291.

[0056] Further, the positioning assembly 3 includes a bottom plate 31 connected to the clamping block 291, a support plate 32 is provided at the end of the bottom plate 31, and a power member 321 is provided on one side of the support plate 32. The output end of the power member 321 penetrates and extends to the inner cavity of the support plate 32, and a rotating cylinder 33 is provided at the output end of the power member 321, and the outer surface of the rotating cylinder 33 is sequentially provided with a first guide groove 331 and a second guide groove 332.

[0057] In this embodiment, the power member 321 is a device with power output such as a motor, and is connected to an external control device. When the power member 321 is started, it synchronously drives the rotating drum 33 arranged at its output end to rotate. Since the outer surface of the rotating drum 33 is provided with a first guide groove 331 and a second guide groove 332, the first guide groove 331 and the second guide groove 332 rotate synchronously with the rotating drum 33.

[0058] Furthermore, a fixed shaft 34 is rotatably mounted on one end of the support plate 32 away from the rotating drum 33 , a driving block 35 is disposed at one end of the fixed shaft 34 , and an outer surface of an end of the driving block 35 is slidably connected to an inner wall of the second guide groove 332 .

[0059] Specifically, when the drum 33 rotates, the driving block 35 is driven to swing in cooperation with the second guide groove 332 . Since the end of the driving block 35 is connected to the fixed shaft 34 , the fixed shaft 34 rotates synchronously with the driving block 35 .

[0060] Furthermore, a balance plate 36 is disposed at one end of the fixed shaft 34 away from the driving block 35, and a connecting block 361 is disposed at one end of the balance plate 36. A push plate 362 is disposed at one end of the connecting block 361 away from the balance plate 36, and a first extrusion block 363 is disposed at the end of the push plate 362.

[0061] Specifically, when the fixed shaft 34 rotates, the balance plate 36 disposed at its end is driven to rotate, and the connecting block 361 disposed at one end thereof is driven to move, and the push plate 362 disposed on the connecting block 361 is synchronously driven to move. Since the first extrusion block 363 is disposed on the push plate 362, the first extrusion block 363 moves synchronously with the push plate 362, thereby preliminarily limiting the outer surface of the SiCMOS device.

[0062] Furthermore, a moving block 37 is provided at one end of the balancing plate 36 away from the connecting block 361, and a limiting groove 371 is provided at one end of the moving block 37 close to the balancing plate 36. The inner wall of the limiting groove 371 is slidably connected to the outer surface of the end of the balancing plate 36. A second extrusion block 372 is provided at the end of the moving block 37, and the second extrusion block 372 and the first extrusion block 363 are distributed in a stepped manner.

[0063] Specifically, when the balance plate 36 rotates, the moving block 37 is driven to move, wherein the outer surface of the end of the balance plate 36 is slidably connected to the inner wall of the limiting groove 371, so that when the moving block 37 moves, no interference is generated. At the same time, when the moving block 37 moves, the second extrusion block 372 set on the moving block 37 is synchronously driven to move, thereby fixing the SiC MOS device defined on the first extrusion block 363.

[0064] A positioning cylinder 38 is disposed on the outer surface of one end of the second extrusion block 372 . A protrusion 381 is disposed on the end of the positioning cylinder 38 . The outer surface of the protrusion 381 is slidably connected to the inner wall of the first guide groove 331 .

[0065] Specifically, when the rotating cylinder 33 rotates, the first guide groove 331 cooperates with the protrusion 381 to drive the positioning cylinder 38 to move left and right, and when the positioning cylinder 38 moves, it drives the second extrusion block 372 to move, and adjusts the SiC MOS device left and right, and fixes the outer surface of the SiC MOS device, so that the whole remains stable during subsequent inspections.

[0066] The control device can select a single-chip microcomputer as the control end. In this embodiment, the single-chip microcomputer is a typical embedded microcontroller (Micro controller unit), which is composed of an arithmetic unit, a controller, a memory, an input and output device, etc., which is equivalent to a microcomputer. Compared with the general-purpose microprocessor used in personal computers, it emphasizes self-supply (no external hardware) and cost saving. Its biggest advantage is that it is small in size and can be placed inside the instrument, but it has a small storage capacity, a simple input and output interface, and low functional consumption.

[0067] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A method for detecting the stability of a SiC MOS device, characterized in that: The following steps are involved: S1. Place the SiC MOS device at the designated test position and test the relationship between the drain current, drain-source voltage and gate voltage of the MOSFET under different temperature and voltage conditions. S2. Detect whether the SiC MOS device has abnormal leakage current in the off state; S3. Check the switching characteristics of the SiC MOS device and simultaneously monitor the current changes of the gate control "on" and "off" states; In S1, the device is transported via a substrate (1), an adjustment component (2) is symmetrically arranged at the upper end of the substrate (1), and a positioning component (3) is arranged at the end of the adjustment component (2), the positioning component (3) is adjusted in angle via the adjustment component (2), and the device is locked in cooperation with the positioning component (3); The adjustment assembly (2) comprises an adjustment plate (21) connected to the base plate (1); a driving member (22) is arranged at the end of the adjustment plate (21); a screw rod (221) is arranged at the output end of the driving member (22); a movable block (23) is arranged on the outer surface of the screw rod (221); a guide block (211) is arranged at the upper end of the adjustment plate (21) and located on one side of the driving member (22); the upper end of the guide block (211) is slidably connected to the lower end of the movable block (23); A rotating shaft (24) is rotatably mounted on the end of the movable block (23); a clamping block (242) is provided at the end of the rotating shaft (24); and one end of the rotating shaft (24) away from the clamping block (242) penetrates and extends to the other end of the movable block (23); a swinging block (241) is provided at the end of the rotating shaft (24); an inclined block (25) is provided on one side of the adjusting plate (21); and an upper end of the inclined block (25) is slidably connected to an outer surface of the swinging block (241); A docking plate (27) is provided at the end of the clamping block (242), a telescopic member (271) is provided at one end of the docking plate (27), an output end of the telescopic member (271) penetrates and extends to the other end of the docking plate (27), and a movable cylinder (272) is provided at the output end of the telescopic member (271), a limiting column (264) is slidably mounted on the inner wall of the movable cylinder (272), a protective plate (262) is provided at one end of the limiting column (264) away from the movable cylinder (272), a positioning plate (263) is provided on the outer surface of the end of the protective plate (262), and the protective plate (262) and the docking plate (27) are connected via the positioning column (261); The outer surface of the movable cylinder (272) is evenly provided with a plurality of movable rods (28), and an adjusting rod (29) is rotatably mounted on the end of the movable rod (28). The end of the adjusting rod (29) is rotatably connected to the end of the docking plate (27). At the same time, the outer surface of the adjusting rod (29) is slidably connected to the inner wall of the positioning plate (263), and a clamping block (291) is provided at the end of the adjusting rod (29).

2. The method for detecting the stability of a SiC MOS device according to claim 1, characterized in that: The positioning assembly (3) comprises a bottom plate (31) connected to the clamping block (291), a support plate (32) is provided at the end of the bottom plate (31), and a power member (321) is provided on one side of the support plate (32).

3. The method for detecting the stability of a SiC MOS device according to claim 2, characterized in that: The output end of the power member (321) passes through and extends to the inner cavity of the support plate (32). A rotating drum (33) is provided at the output end of the power member (321), and a first guide groove (331) and a second guide groove (332) are sequentially formed on the outer surface of the rotating drum (33).

4. The method for detecting the stability of a SiC MOS device according to claim 3, characterized in that: A fixed shaft (34) is rotatably mounted on one end of the support plate (32) away from the rotating drum (33), a driving block (35) is provided at one end of the fixed shaft (34), and an outer surface of an end of the driving block (35) is slidably connected to an inner wall of the second guide groove (332).

5. The method for detecting the stability of a SiC MOS device according to claim 4, characterized in that: A balancing plate (36) is provided at one end of the fixed shaft (34) away from the driving block (35), and a connecting block (361) is provided at one end of the balancing plate (36).

6. The method for detecting the stability of a SiC MOS device according to claim 5, characterized in that: A push plate (362) is provided at one end of the connection block (361) away from the balancing plate (36), and a first extrusion block (363) is provided at the end of the push plate (362).

7. The method for detecting the stability of a SiC MOS device according to claim 6, characterized in that: A moving block (37) is provided at one end of the balancing plate (36) away from the connecting block (361), and a limiting groove (371) is provided at one end of the moving block (37) close to the balancing plate (36).

8. The method for detecting the stability of a SiC MOS device according to claim 7, characterized in that: The inner wall of the limiting groove (371) is slidably connected to the outer surface of the end of the balancing plate (36).

9. The method for detecting the stability of a SiC MOS device according to claim 8, characterized in that: A second extrusion block (372) is provided at the end of the moving block (37), and the second extrusion block (372) and the first extrusion block (363) are distributed in a stepped manner.

10. The method for detecting the stability of a SiC MOS device according to claim 9, characterized in that: A positioning cylinder (38) is provided on the outer surface of one end of the second extrusion block (372), a protrusion (381) is provided on the end of the positioning cylinder (38), and the outer surface of the protrusion (381) is slidably connected to the inner wall of the first guide groove (331).

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