High-pressure water jet target rust layer nondestructive laser cleaning method

Abstract

The invention belongs to the field of laser cleaning, and particularly relates to a high-pressure water jet target rust layer nondestructive laser cleaning method which comprises the following steps: placing a target to be cleaned on a working plane; opening a laser, enabling the laser to emit light at set power, and enabling the laser to be focused on a window lens at the top of the deionized water device through a focusing lens in sequence and to enter a cavity of the deionized water device; water is sprayed to the surface, on the working plane, of the target material to be cleaned through a water spray head of a deionized water device and coincides with the laser beam, so that deionized water jet flow is formed; laser cleaning: laser process parameters of a laser are set, an included angle is formed between the normal of the to-be-cleaned target and a laser beam emitted by the laser, and the laser is set to clean the surface of the to-be-cleaned target for set times; detecting assistants on the surface of the target material after laser cleaning, and cleaning again if residual particulate pollutants exceed a set value; on the contrary, the laser cleaning target material is qualified, and a new to-be-cleaned target material is replaced.

Description

Technical Field

[0001] The present invention belongs to the field of laser cleaning, and specifically relates to a method for non-destructive laser cleaning of rust layers on a target material by means of a high-pressure water jet. Background Art

[0002] Laser cleaning has the advantages of being green and efficient. By using laser cleaning, the processing flow can be simplified. However, during the cleaning process, there are risks of sputtering and dust pollution, and serious thermal defects will occur on the surface of the target material, manifested as a recast layer and a heat-affected zone, which has an adverse impact on the mechanical properties of the target material.

[0003] The current mainstream method is the thin-film stripping acid etching method, that is, chemical reagents (including: standard sulfuric acid / hydrogen peroxide, Piranha stripping solution, concentrated hydrofluoric acid etching solution, strong alkaline etching solution, etc.) are used to remove the thin film on the surface of the wafer to ensure that when the wafer enters the standard recycling production line, there is no metal component at all. However, this method will generate a large amount of corrosive liquid, and the sewage treatment cost is high. Summary of the Invention

[0004] The purpose of the present invention is to provide a method for non-destructive laser cleaning of rust layers on a target material by means of a high-pressure water jet coaxial with a laser to overcome the defects of the above-mentioned laser cleaning method.

[0005] The technical solution adopted by the present invention to achieve the above purpose is: a method for non-destructive laser cleaning of rust layers on a target material by means of a high-pressure water jet, comprising the following steps:

[0006] 1) Place the target material to be cleaned on the working plane of the high-pressure water jet laser cleaning device; turn on the laser, and the laser emits light at a set power. The laser passes through the focusing lens in sequence and is focused on the window lens at the top of the deionized water device, and then enters the cavity of the deionized water device.

[0007] 2) Deionized water supply: The water is sprayed on the surface of the target material to be cleaned on the working plane through the water nozzle of the deionized water device and coincides with the laser beam to form a deionized water jet and limit the total reflection of the laser in the deionized water jet. The deionized water jet impacts the surface of the target material to form a layer of deionized water jet and washes away the particles removed by cleaning.

[0008] 3) Laser cleaning: Set the laser process parameters of the laser. Through the five-axis machine tool, an angle is formed between the normal line of the target material to be cleaned and the laser beam emitted by the laser, and it is set that the laser performs a set number of cleanings on the surface of the target material to be cleaned, and the time interval between two adjacent cleanings is not greater than 10 s.

[0009] 4) Detect the auxiliary substances on the surface of the target material after laser cleaning. If the residual particle pollutants exceed the set value, return to step 2); otherwise, the laser cleaning of the target material is qualified, replace the new target material to be cleaned, and return to step 1).

[0010] The high-pressure water jet laser cleaning device includes: a laser, a focusing lens, and a deionized water device;

[0011] The laser is disposed directly above the deionized water device, and a focusing lens is provided between the laser and the deionized water device for focusing the laser beam into the deionized water device;

[0012] The deionized water device is used to provide deionized water to form a deionized water jet and limit total internal reflection of the laser in the deionized water jet. The deionized water jet impacts and acts on the surface of the target material to form a layer of deionized water jet.

[0013] The deionized water device includes: a deionized water chamber, a window lens, a water inlet hole, and a water nozzle;

[0014] The water nozzle is fixedly disposed on the bottom surface of the deionized water device through a metal bracket, and the jet orifice of the water nozzle is coaxial with the laser beam focused by the focusing lens and entering the deionized water chamber;

[0015] The water inlet hole is communicated with the deionized water chamber, and deionized water is provided to the deionized water chamber through a water supply device;

[0016] The window lens is embedded in the top surface of the deionized water chamber and is coaxially arranged with the focusing lens and the water nozzle respectively.

[0017] The water nozzle is a sapphire nozzle; the window lens is a quartz glass window.

[0018] In step 2), the water pressure of the water nozzle of the deionized water device is: 300 atm to 500 atm, and the water column diameter is 0.5 mm to 0.1 mm to maintain the thickness of the deionized water jet and wash away the particulate contaminants removed by cleaning.

[0019] The formed deionized water jet has process parameters including: conductivity of 0.1 to 0.05 μS / cm, resistivity > 10 MΩ·cm, salt content < 0.1 mg / L, and surface temperature not greater than 25 °C. According to the set deionized water jet parameters, the thermal impact on the target material substrate is weakened.

[0020] In the above, the normal line of the target material to be cleaned forms an angle with the laser beam emitted by the laser through a five-axis machine tool. Specifically:

[0021] The five-axis machine tool carries the target material to be cleaned, and the angle range between the laser beam of the laser and the normal direction of the target material is: 5° to 10°, to prevent laser reflection damage to the laser head lens caused by target material reflection.

[0022] The laser is a Nd:YAG solid laser. The laser outputs eight optical fibers, and each optical fiber is connected to the optical path output end of the laser. A shutter is provided on the optical path output end, and the shutter controls one or more lasers to output to the laser emission end;

[0023] The laser sets laser process parameters, including: the average output power does not exceed 100W, the laser repetition frequency is 100 - 200KHz, the laser scanning width is not less than 100mm, and the water column optical fiber scanning rate is 100 - 300mm / s.

[0024] In step 4), the auxiliary substances on the surface of the target material after laser cleaning are detected. The elemental content of the cleaning area is detected by the X-ray energy dispersive spectrometer on the SEM, and the morphology of the cleaning area is analyzed by the field emission electron scanning microscope; specifically:

[0025] In order to check whether the cleaning of the rust layer on the surface of the target material is achieved, it is necessary to collect the characteristic peaks of the main elements in the rust layer:

[0026] Among them, the duration of the characteristic peak signal corresponding to oxygen element in the rust layer is 2us. Since the main component of the rust layer on the rim surface is Fe 2 O 3 , the characteristic peak of Fe and the characteristic peak of oxygen element are respectively obtained, and according to the oxygen element content in the rust layer is about 4 times that of the substrate;

[0027] Judge whether the main component on the surface of the target material is Fe2O3. If it exists, perform the next cleaning; if it does not exist, observe the surface texture of the target material revealed by the field emission electron scanning microscope. If there is no thermal damage, it indicates that the cleaning is completed.

[0028] Before implementing the non-destructive laser cleaning method for the rust layer of the high-pressure water jet target material, the following steps are implemented:

[0029] (1) Perform laser cleaning on the rust layer on the surface of the target material. Before performing laser activation treatment, the surface impurities of the target material need to be cleaned;

[0030] (2) According to the size of the target material and the processing requirements, control the trial operation trajectory of the machine tool according to the set machine tool trajectory, initialize the XYZ coordinates of the machine tool. After tool setting, perform secondary verification and adjustment on the programmed trajectory coordinates to ensure that the machine tool will not hit the wall;

[0031] (3) Adjust the hydraulic control system to make the water system pressure stable above 300 atmospheres, and after turning on the water cooler, keep the water temperature at the set temperature;

[0032] (3) After turning on the laser, control the laser through the PC and adjust the process parameters of the laser; and adjust the distance between the water nozzle of the deionized water device and the target material to be cleaned;

[0033] (4) Perform origin detection on the five-axis machine tool, laser, and infrared thermometer;

[0034] (5) Purify the deionized water through multiple stages, and ensure that the water pressure in the deionized water chamber is constant and pulsation-free through the hydraulic regulation module. At the same time, the resistivity, rust layer content, pH value, and temperature of the deionized water are monitored and displayed in real time.

[0035] The present invention has the following beneficial effects and advantages:

[0036] 1. The present invention adopts the coaxial water supply cleaning process method, so that the processing area is in the deionized water jet environment during the laser cleaning process, preventing the oxidation reaction on the surface of the target material.

[0037] 2. The present invention combines the advantages of the water jet energy field and the laser energy field, plays the role of a multi-composite energy field, cleans the surface of the target material through the laser thermal ablation effect, and washes away the particulate pollutants by the water jet, preventing secondary pollution. Since the water jet also has the function of forced convective heat transfer, the thermal affected zone generated during the laser cleaning process is reduced.

[0038] 3. The present invention couples multiple water column optical fibers, combines multiple circular spot light beams side by side into a line light beam, reduces the laser cleaning scanning times, and improves the working efficiency.

[0039] 4. The present invention has no damage to the target material substrate and no thermal influence, etc., and the cleaning rate is as high as 95%. Brief Description of the Drawings

[0040] Figure 1 Structural schematic diagram of the high-pressure water jet laser cleaning device of the present invention;

[0041] Figure 2 Process flow chart of the pre-preparation process of laser cleaning of the present invention. Detailed Description of the Invention

[0042] The following further describes the present invention in detail with reference to the drawings and embodiments.

[0043] As Figure 1 shown, it is a structural schematic diagram of the high-pressure water jet laser cleaning device of the present invention. In the high-pressure water jet laser cleaning device of the present invention, it includes: a laser, a focusing lens, and a deionized water device;

[0044] The laser is arranged directly above the deionized water device, and a focusing lens is arranged between the laser and the deionized water device for focusing the laser beam into the deionized water device;

[0045] A deionized water device is used to provide deionized water to form a deionized water jet and limit total internal reflection of the laser in the deionized water jet. The deionized water jet impacts and acts on the surface of the target material to form a layer of deionized water jet.

[0046] Among them, the deionized water device includes: a deionized water chamber, a window lens, a water inlet hole, and a water nozzle;

[0047] The water nozzle is a sapphire nozzle. The water nozzle is fixedly arranged on the bottom surface of the deionized water device through a metal bracket, and the jet orifice of the water nozzle is coaxial with the laser beam focused by the focusing lens and entering the deionized water chamber. The water pressure of the water nozzle of the deionized water device is: 300 atm to 500 atm, and the water column diameter is 0.5 mm to 0.1 mm to maintain the thickness of the deionized water jet and wash away the particulate contaminants removed by cleaning.

[0048] The water inlet hole is communicated with the deionized water chamber and supplies deionized water to the deionized water chamber through a water supply device;

[0049] The window lens is a quartz glass window. The window lens is embedded in the top surface of the deionized water chamber and is coaxially arranged with the focusing lens and the water nozzle respectively.

[0050] The non-destructive laser cleaning method of the present invention based on a high-pressure water jet laser cleaning device includes the following steps:

[0051] 1) Place the target material to be cleaned on the working plane of the high-pressure water jet laser cleaning device; turn on the laser, and the laser emits light at a set power. The laser is sequentially focused by the focusing lens on the window lens at the top of the deionized water device and enters the cavity of the deionized water device;

[0052] 2) Deionized water supply: Spray water on the surface of the target material to be cleaned on the working plane through the water nozzle of the deionized water device and coincide with the laser beam to form a deionized water jet and limit total internal reflection of the laser in the deionized water jet. The deionized water jet impacts the surface of the target material to form a layer of deionized water jet to reduce the thermal influence of the laser on the target material substrate and wash away the particles removed by cleaning to prevent secondary pollution;

[0053] Among them, for the formed deionized water jet, its process parameters include: conductivity of 0.1 to 0.05 uS / cm, resistivity > 10 MΩ·cm, salt content < 0.1 mg / L, and surface temperature not greater than 25 °C. According to the set deionized water jet parameters, the thermal influence on the target material substrate is weakened.

[0054] 3) Laser cleaning: Set the laser process parameters of the laser, and make the normal line of the target material to be cleaned form an angle with the laser beam emitted by the laser through a five-axis machine tool;

[0055] Carry the target to be cleaned by a five-axis machine tool, and make the included angle between the laser beam of the laser and the normal direction of the target range from 5° to 10° to prevent the target from reflecting and causing laser reflection damage to the laser head lens.

[0056] Set the laser to clean the surface of the target to be cleaned for a set number of times, and the time interval between two adjacent cleanings is not more than 10 s;

[0057] Among them, the laser is a Nd:YAG solid laser. The laser outputs eight optical fibers, and each optical fiber is connected to the optical path output end of the laser. A shutter is provided on the optical path output end, and the shutter controls one or more lasers to output to the laser emission end;

[0058] The laser sets laser process parameters, including: the average output power does not exceed 100 W, the laser repetition frequency is 100 - 200 KHz, the laser scanning width is not less than 100 mm, and the water column optical fiber scanning rate is 100 - 300 mm / s.

[0059] 4) Detect the auxiliary substances on the surface of the target after laser cleaning. If the residual particulate pollutants exceed the set value, return to step 2); otherwise, the laser cleaning of the target is qualified, replace the new target to be cleaned, and return to step 1).

[0060] Step 4) is specifically:

[0061] Use the X-ray energy dispersive spectrometer on the SEM to detect the element content in the cleaning area, and analyze the morphology of the cleaning area through a field emission electron scanning microscope;

[0062] In order to check whether the cleaning of the rust layer on the target surface is achieved, it is necessary to collect the characteristic peaks of the main elements in the rust layer:

[0063] Among them, the characteristic peak signal corresponding to the oxygen element in the rust layer lasts for 2 us. Since the main component of the rust layer on the rim surface is Fe 2 O 3 , respectively obtain the characteristic peak of Fe and the characteristic peak of the oxygen element, and according to the oxygen element content in the rust layer is about 4 times that of the substrate;

[0064] Judge whether the main component on the surface of the target is Fe 2 O 3 . If it exists, perform the next cleaning; if it does not exist, observe the texture on the surface of the target through a field emission electron scanning microscope. If there is no thermal damage, it indicates that the cleaning is completed.

[0065] 5) Before laser cleaning, preparatory work needs to be carried out:

[0066] (1) Before laser cleaning, it is necessary to check the three-dimensional structure consistency of the sample to be cleaned, and write and call the corresponding laser cleaning trajectory for cleaning.

[0067] (2) Before cleaning, it is necessary to simulate the cleaning processing trajectory to ensure it meets the expectations.

[0068] (3) Before the laser activation treatment, the specimen needs to be simply cleaned of surface impurities.

[0069] (4) The specimen should be adjusted according to the definition in the process specification to ensure a stable and repeatable process using standard parameters within the process window.

[0070] (5) Before laser cleaning, the origin detection should be carried out on the five-axis machine tool, laser, infrared thermometer, etc. (The detection standard needs to be maintained and controlled with reference to the instructions of the laser manufacturer);

[0071] (6) To ensure the stable progress of the laser cleaning process, deionized water needs to be purified through multiple stages and the water pressure of the coupling module should be ensured to be constant and pulsation-free through the hydraulic regulation module. At the same time, the resistivity, rust layer content, pH value, temperature and other indicators of the deionized water need to be monitored and displayed.

[0072] (7) Call the laser process parameters. The main process parameters include online control of laser power, working distance, spot overlap rate, scanning cycle times, pulse width, water jet diameter and other parameters. It is composed of optical elements, alignment and focusing elements, laser-water coupling components, vision systems and lighting systems.

[0073] Requirements for laser cleaning personnel:

[0074] Implement a system of fixed personnel, top-level management and shift handover. Workers and technicians are familiar with the equipment performance, structure, principle and process flow, work on duty with work permits, use and maintain it carefully. All kinds of safety protection devices are complete and reliable, and are regularly inspected and replaced; The control system operates normally, the grounding is good, and there are no potential accident hazards.

[0075] Since a large amount of smoke and dust will be generated during the cleaning process, it is recommended to configure a high-power laser dust removal system, including a smoke and dust collection device and pipeline, with a flow rate of not less than 1000m 3 / h, and the smoke and dust purification efficiency is greater than 99% @ 0.3μm;

[0076] To ensure personnel safety, the laser cleaning process needs to be completed in an independent operation room. The size of the operation room is not less than 5m×5m×2.5m in length, width and height, can be completely enclosed, has a certain airtightness, and has a transparent monitoring window of 1200mm×2500mm. Operators should wear dust masks and laser protective goggles to prevent inhalation of smoke and dust and laser irritation to the eyes. It is not recommended to visually observe the laser throughout the cleaning process.

[0077] Example:

[0078] 1) Characteristic peak acquisition: To verify whether the rust layer on the rim surface has been cleaned, it is necessary to collect the characteristic peaks of the main elements in the rust layer. The signal duration of the characteristic peak corresponding to the O element in the rust layer is 2 μs. Since the main component of the rust layer on the rim surface is Fe 2 O 3 , among which the characteristic peak of Fe is between 403.832 - 404.828 nm, and the characteristic peak of the O element is 445.4 nm. Although both the rust layer and the substrate contain iron elements, there are obvious differences in the content of Fe elements, and the content of O elements in the rust layer is about 4 times that of the substrate.

[0079] 2) Preparation before cleaning: For laser cleaning of the rust layer on the rim surface, according to the rim size and processing requirements, write the machine tool running trajectory according to the machine tool trajectory control program, initialize the XYZ coordinates of the machine tool. After tool setting, recheck and adjust the programmed trajectory coordinates to ensure that the machine tool will not hit the wall. Adjust the hydraulic control system to make the water system pressure stable above 300 atmospheres. After turning on the water cooler to the right, keep the water temperature at 24 °C. After turning on the laser, control the laser through the computer and adjust the output power of the laser. Drive the laser head by the machine tool to execute the trajectory operation to complete the laser cleaning process. Through the detection of the processing quality of the laser cleaning target material, determine whether it is necessary to perform secondary cleaning on the target material, and sort out, record and feedback the collected data. According to the feedback, adjust the processing process in real time to ensure the smooth progress of the processing.

[0080] 3) Cleaning steps:

[0081] First step: Based on a large number of process experiments, obtain the laser cleaning parameters for the rust layer. Laser power: 5 W / cleaning spacing: 10 mm / scanning speed: 200 mm / s / scanning frequency: 10 kHz, and more than 70% of the paint layer is removed.

[0082] Second step: Change the laser power to 1 W and the repetition frequency to 1 kHz, and continue the second scanning and cleaning. After cleaning, monitor the spectral characteristic peaks at more than 100 points through a spectrometer. It can be determined that the content of the O element decreases significantly, and at the same time, the content of the Fe element increases significantly.

[0083] Third step: Continue the third cleaning with the same parameters as the second step. It is found that the content of the O element is basically non-existent, and the surface texture of the substrate is revealed through field emission electron scanning microscopy, and there is no obvious thermal damage, and the surface cleanliness area has good smoothness.

[0084] The above is only the implementation mode of the present invention and is not used to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, expansion, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A method for non-destructive laser cleaning of the rust layer on a high-pressure water jet target material, characterized in that, it includes the following steps: 1) Place the target material to be cleaned on the working plane of the high-pressure water jet laser cleaning device; turn on the laser, and the laser emits light at a set power. The laser is sequentially focused by a focusing lens on the window lens at the top of the deionized water device and enters the cavity of the deionized water device; 2) Deionized water supply: Spray water on the surface of the target material to be cleaned on the working plane through the water nozzle of the deionized water device, and coincide with the laser beam to form a deionized water jet and limit the total reflection of the laser in the deionized water jet. The deionized water jet impacts the surface of the target material to form a layer of deionized water jet and washes away the particles washed off; 3) Laser cleaning: Set the laser process parameters of the laser, make the normal of the target material to be cleaned form an angle with the laser beam emitted by the laser through a five-axis machine tool, and set the laser to clean the surface of the target material to be cleaned a set number of times, and the time interval between two adjacent cleanings is not more than 10 s; 4) Detect the auxiliary substances on the surface of the target material after laser cleaning. If the residual particle pollutants exceed the set value, return to step 2); otherwise, the laser cleaning of the target material is qualified and a new target material to be cleaned is replaced, and return to step 1).

2. A method for non-destructive laser cleaning of the rust layer on a high-pressure water jet target material according to claim 1, characterized in that, the high-pressure water jet laser cleaning device includes: a laser, a focusing lens, and a deionized water device; the laser is arranged directly above the deionized water device, and a focusing lens is arranged between the laser and the deionized water device to focus the laser beam into the deionized water device; the deionized water device is used to provide deionized water to form a deionized water jet and limit the total reflection of the laser in the deionized water jet. The deionized water jet impacts and acts on the surface of the target material to form a layer of deionized water jet.

3. A method for non-destructive laser cleaning of the rust layer on a high-pressure water jet target material according to claim 2, characterized in that, the deionized water device includes: a deionized water chamber, a window lens, a water inlet hole, and a water nozzle; the water nozzle is fixedly arranged on the bottom surface of the deionized water device through a metal bracket, and the jet orifice of the water nozzle is coaxial with the laser beam focused by the focusing lens and entering the deionized water chamber; the water inlet hole communicates with the deionized water chamber and supplies deionized water to the deionized water chamber through a water supply device; the window lens is embedded in the top surface of the deionized water chamber and is coaxially arranged with the focusing lens and the water nozzle respectively.

4. A method for non-destructive laser cleaning of the rust layer on a high-pressure water jet target material according to claim 3, characterized in that, the water nozzle is a sapphire nozzle; the window lens is a quartz glass window.

5. A method for non-destructive laser cleaning of the rust layer on a high-pressure water jet target material according to claim 1, characterized in that, in step 2), the water pressure of the water nozzle of the deionized water device is: 300 atm to 500 atm, and the water column diameter is 0.5 mm to 0.1 mm to maintain the thickness of the ion water jet and wash away the particle pollutants washed off.

6. A non-destructive laser cleaning method for the rust layer of a high-pressure water jet target material according to claim 1, characterized in that, for the formed deionized water jet, its process parameters include: conductivity of 0.1 - 0.05 uS / cm, resistivity > 10 MΩ·cm, salt content < 0.1 mg / L, surface temperature not greater than 25 °C, and according to the set deionized water jet parameters, the thermal impact on the target material substrate is weakened.

7. A non-destructive laser cleaning method for the rust layer of a high-pressure water jet target material according to claim 1, characterized in that, the normal of the target material to be cleaned forms an angle with the laser beam emitted by the laser through a five-axis machine tool, specifically: The five-axis machine tool carries the target material to be cleaned, and the angle range between the laser beam of the laser and the normal direction of the target material is: 5° - 10°, to prevent the target material from reflecting and causing laser reflection damage to the laser head lens.

8. A non-destructive laser cleaning method for the rust layer of a high-pressure water jet target material according to claim 1 or 2, characterized in that, the laser is a Nd:YAG solid laser, the laser outputs eight optical fibers, each optical fiber is connected to the optical path output end of the laser, and a shutter is provided on the optical path output end, and the shutter controls one or more lasers to output to the laser emission end; The laser sets laser process parameters, including: average output power not exceeding 100 W, laser repetition frequency of 100 - 200 KHz, laser scanning width not less than 100 mm, and water column optical fiber scanning rate of 100 - 300 mm / s.

9. A non-destructive laser cleaning method for the rust layer of a high-pressure water jet target material according to claim 1, characterized in that, In step 4), the auxiliary objects on the surface of the target material after laser cleaning are detected specifically as follows: using the X-ray energy dispersive spectrometer on the SEM to detect the element content in the cleaning area, and analyzing the morphology of the cleaning area through a field emission electron scanning microscope; In order to check whether the rust layer on the surface of the target material is cleaned, it is necessary to collect the characteristic peaks of the main elements in the rust layer: Among them, the duration of the characteristic peak signal corresponding to oxygen element in the rust layer is 2 μs. Since the main component of the rust layer on the rim surface is Fe 2 O 3 , the characteristic peak of Fe and the characteristic peak of oxygen element are obtained respectively, and according to the oxygen element content in the rust layer is about 4 times that of the substrate; Determine whether Fe exists in the main components on the surface of the target 2 O 3 . If it exists, perform the next cleaning; if it does not exist, observe the surface texture of the target revealed by field emission electron scanning microscope. If there is no thermal damage, it indicates that the cleaning is completed.

10. A non-destructive laser cleaning method for the rust layer of a high-pressure water jet target material according to claim 1, characterized in that, Before performing the non-destructive laser cleaning method for the rust layer of the high-pressure water jet target material, the following steps are performed: (1) Laser clean the rust layer on the surface of the target material. Before performing the laser activation treatment, the target material needs to be cleaned of surface impurities; (2) According to the size of the target material and the processing requirements, control the trial operation trajectory of the machine tool according to the set machine tool trajectory, initialize the XYZ coordinates of the machine tool, and after tool setting, perform secondary verification and adjustment on the programmed trajectory coordinates to ensure that the machine tool will not hit the wall; (3) Adjust the hydraulic control system so that the water system pressure is stabilized above 300 atmospheres, and after turning on the water cooler, maintain the water temperature at the set temperature; (3) After turning on the laser, control the laser through a PC and adjust the process parameters of the laser; and adjust the distance between the water spray head of the deionized water device and the target material to be cleaned; (4) Perform origin detection on the five-axis machine tool, laser, and infrared thermometer; (5) The deionized water is purified through multiple stages, and the hydraulic pressure regulation module is used to ensure that the water pressure in the deionized water chamber is constant and pulsation-free. At the same time, the resistivity, rust layer content, pH value, and temperature of the deionized water are monitored and displayed in real time.

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