Method and system for determining operation health condition of vacuum pump

Abstract

The invention relates to a method and system for determining the operation health condition of a vacuum pump, and relates to the technical field of vacuum pumps, and the method comprises the steps: controlling the vacuum pump to work to determine the actual air exhaust rate, and controlling the vacuum pump to change the operation level operation detection duration when the actual air exhaust rate is far less than the designed air exhaust rate; obtaining the tertiary air pressure of the container after the detection time length; performing calculation according to the container secondary air pressure, the container tertiary air pressure, the fixed calculation parameters and the theoretical air extraction rate to determine a secondary air extraction ratio, and performing difference calculation according to the initial air extraction ratio and the secondary air extraction ratio to determine a deviation air extraction ratio; whether the deviation air exhaust proportion is smaller than a preset similar air exhaust proportion or not is judged; if the deviation air exhaust proportion is smaller than the similar air exhaust proportion, an equipment blockage signal is output; if the deviation air exhaust proportion is not smaller than the similar air exhaust proportion, an equipment leakage signal is output. The method and the device have the effect of improving the detection efficiency of vacuum pump anomaly detection.

Description

Technical Field

[0001] The present application relates to the field of vacuum pump technology, and in particular, to a method and system for determining the operating health status of a vacuum pump. Background Art

[0002] A vacuum pump is a device used to extract gas in a closed space to obtain a vacuum environment lower than atmospheric pressure. Its main function is to continuously discharge gas molecules in a container or system, thereby reducing the gas pressure in the container.

[0003] In the related art, the pumping speed is one of the important indicators of a vacuum pump, which reflects the volume of gas extracted by the vacuum pump per unit time, thereby determining the working ability of the vacuum pump. Currently, the method for determining the pumping speed is generally calculated by the change in air pressure before and after pumping. When the determined pumping speed is relatively close to the designed normal speed, it indicates that the overall working effect of the vacuum pump is better.

[0004] In the above-mentioned related art, when the pumping speed deviates significantly from the designed speed, it can be determined that the vacuum pump is abnormal. The reasons affecting the pumping speed include two categories: leakage problems and blockage problems. For different problems, the maintenance methods of the staff are also different. However, the staff cannot accurately know which problem the current decrease in pumping speed belongs to. Therefore, it is necessary to detect each abnormal situation of the vacuum pump one by one, resulting in low detection efficiency and room for improvement. Summary of the Invention

[0005] In order to improve the detection efficiency of vacuum pump abnormality detection, the present application provides a method and system for determining the operating health status of a vacuum pump.

[0006] In a first aspect, the present application provides a method for determining the operating health status of a vacuum pump, adopting the following technical solution:

[0007] A method for determining the operating health status of a vacuum pump includes:

[0008] Obtaining the pumping operation level and the original air pressure of the container;

[0009] Determining the designed pumping speed corresponding to the pumping operation level according to a preset level matching relationship;

[0010] Controlling the vacuum pump to operate at the pumping operation level for a preset detection duration, and obtaining the secondary air pressure of the container after the detection duration;

[0011] Calculating according to the original air pressure of the container, the secondary air pressure of the container, and a preset fixed calculation parameter to determine the actual pumping speed, and calculating the difference between the designed pumping speed and the actual pumping speed to determine the deviation pumping speed;

[0012] Output an influence signal when the deviation extraction rate is greater than the preset reference influence rate, and calculate based on the actual extraction rate and the designed extraction rate to determine the initial extraction ratio;

[0013] After the influence signal is output, determine the changed operation level according to the preset adjustment level and the extraction operation level, and determine the theoretical extraction rate corresponding to the changed operation level according to the level matching relationship;

[0014] Control the vacuum pump to operate for the detection duration at the changed operation level, and obtain the three-time air pressure of the container after the detection duration;

[0015] Calculate based on the second-time air pressure of the container, the three-time air pressure of the container, the fixed calculation parameters, and the theoretical extraction rate to determine the second extraction ratio, and perform a difference calculation based on the initial extraction ratio and the second extraction ratio to determine the deviation extraction ratio;

[0016] Judge whether the deviation extraction ratio is less than the preset similar extraction ratio;

[0017] If the deviation extraction ratio is less than the similar extraction ratio, output a device blockage signal;

[0018] If the deviation extraction ratio is not less than the similar extraction ratio, output a device leakage signal.

[0019] Optionally, after the device leakage signal is output, the method for determining the operating health status of the vacuum pump further includes:

[0020] On the preset time axis, use the time point when the vacuum pump starts operating as the front endpoint to construct a detection interval with a width twice the detection duration, and divide the detection interval into a determination interval and a review interval according to the midpoint of the detection interval;

[0021] In the determination interval, calculate based on the original air pressure of the container, the second-time air pressure of the container, the designed extraction rate, and the detection duration to determine the determination leakage amount, and determine the determination equivalent aperture according to the determination leakage amount;

[0022] In the review interval, calculate based on the second-time air pressure of the container, the three-time air pressure of the container, the theoretical extraction rate, and the detection duration to determine the review leakage amount, and determine the review equivalent aperture according to the review leakage amount;

[0023] Perform a difference calculation based on the determination equivalent aperture and the review equivalent aperture to determine the equivalent deviation aperture;

[0024] Judge whether the equivalent deviation aperture is less than the preset permitted deviation aperture;

[0025] If the equivalent deviation aperture is less than the permitted deviation aperture, output a single leakage signal;

[0026] If the equivalent deviation aperture is not less than the permitted deviation aperture, a leakage blockage signal is output.

[0027] Optionally, the step of calculating to determine the determined leakage amount according to the original air pressure of the container, the secondary air pressure of the container, the designed air extraction rate, and the detection duration in the determination interval includes:

[0028] Define:

[0029] S 0 : Designed air extraction rate;

[0030] P 0 : Original air pressure of the container;

[0031] P 1 : Secondary air pressure of the container;

[0032] t 0 : Detection duration;

[0033] V 0 : Container volume in the fixed calculation parameters;

[0034] R: Gas constant in the fixed calculation parameters;

[0035] T: Thermodynamic temperature in the fixed calculation parameters;

[0036] P atm : Atmospheric pressure;

[0037] Δn 0 : Determined leakage amount;

[0038] Then

[0039] Optionally, the step of determining the determined equivalent aperture according to the determined leakage amount includes:

[0040] Define:

[0041] μ: Preset gas dynamic viscosity;

[0042] L: Preset simulated hole length;

[0043] d 0 : Determined equivalent aperture;

[0044] Then

[0045] Optionally, after the leakage blockage signal is output, the method for determining the operating health status of the vacuum pump further includes:

[0046] Control the vacuum pump to stop operating and obtain the real-time air pressure of the container in real time, and control the preset stop duration that is initially zero to start timing, and define the corresponding stop duration as the reset duration when the real-time air pressure of the container is consistent with the original air pressure of the container;

[0047] Calculate based on the reset duration, the original air pressure of the container, and the three air pressures of the container to determine the actual equivalent aperture, and output a leakage determination signal when the actual equivalent aperture is reached;

[0048] Define:

[0049] t 1 : The reset duration;

[0050] P 2 : The three air pressures of the container;

[0051] d 2 : The actual equivalent aperture;

[0052] Then

[0053] Optionally, after a single leakage signal or a leakage determination signal is output, the method for determining the operating health status of the vacuum pump further includes:

[0054] Construct a historical interval with a width of a preset historical duration on the time axis with the current time point as the rear endpoint;

[0055] Determine similar leakage points based on the current equivalent aperture in the historical interval, and determine the similar leakage types at the similar leakage points;

[0056] Count according to each similar leakage type to determine the number of similar types, and perform a summation calculation based on all the numbers of similar types to determine the overall number of types;

[0057] Calculate based on the number of similar types and the overall number of types to determine the type proportion, and define the similar leakage types with a type proportion greater than the preset general proportion as the reference leakage types for output.

[0058] In a second aspect, the present application provides a system for determining the operating health status of a vacuum pump, adopting the following technical solution:

[0059] A system for determining the operating health status of a vacuum pump, including:

[0060] An acquisition module, used to acquire the pumping operation level and the original air pressure of the container;

[0061] A processing module, connected to the acquisition module and the judgment module, used for storing and processing information;

[0062] A judgment module, connected to the acquisition module and the processing module, used for judging information;

[0063] The processing module determines the designed air extraction rate corresponding to the air extraction operation level according to the preset level matching relationship;

[0064] The processing module controls the vacuum pump to operate at the air extraction operation level for a preset detection duration, and after the detection duration, the acquisition module acquires the secondary air pressure of the container;

[0065] The processing module calculates according to the original air pressure of the container, the secondary air pressure of the container, and the preset fixed calculation parameters to determine the actual air extraction rate, and calculates the difference between the designed air extraction rate and the actual air extraction rate to determine the deviation air extraction rate;

[0066] When the deviation air extraction rate is greater than the preset reference influence rate, the processing module outputs an influence signal, and calculates according to the actual air extraction rate and the designed air extraction rate to determine the initial air extraction ratio;

[0067] After the influence signal is output, the processing module determines the changed operation level according to the preset adjustment level and the air extraction operation level, and determines the theoretical air extraction rate corresponding to the changed operation level according to the level matching relationship;

[0068] The processing module controls the vacuum pump to operate at the changed operation level for the detection duration, and after the detection duration, the acquisition module acquires the tertiary air pressure of the container;

[0069] The processing module calculates according to the secondary air pressure of the container, the tertiary air pressure of the container, the fixed calculation parameters, and the theoretical air extraction rate to determine the secondary air extraction ratio, and calculates the difference between the initial air extraction ratio and the secondary air extraction ratio to determine the deviation air extraction ratio;

[0070] The judgment module judges whether the deviation air extraction ratio is less than the preset similar air extraction ratio;

[0071] If the judgment module judges that the deviation air extraction ratio is less than the similar air extraction ratio, the processing module outputs a device blockage signal;

[0072] If the judgment module judges that the deviation air extraction ratio is not less than the similar air extraction ratio, the processing module outputs a device leakage signal.

[0073] In a third aspect, the present application provides a computer storage medium that can store corresponding programs and has the characteristic of improving the detection efficiency of vacuum pump anomaly detection. The technical solution is as follows:

[0074] A computer-readable storage medium stores a computer program that can be loaded and executed by a processor to perform any one of the above methods for determining the operating health status of a vacuum pump.

[0075] In summary, the present application includes at least one of the following beneficial technical effects:

[0076] 1. During the use of a vacuum pump, if it is detected that there is an abnormal pumping rate, the specific problem causing the abnormal pumping rate can be determined by adjusting the operation level, thereby improving the detection efficiency of the vacuum pump abnormal detection;

[0077] 2. When it is detected that there is a leakage, the data can be analyzed to determine whether there is a blockage problem;

[0078] 3. When analyzing the leakage situation, the opening size of the leakage point can be simulated and determined to determine the specific possible leakage situation, providing a reference for the staff to repair. Description of the Drawings

[0079] Figure 1 is a flowchart of a method for determining the operating health status of a vacuum pump.

[0080] Figure 2 is a module flowchart of a method for determining the operating health status of a vacuum pump. Detailed Embodiments

[0081] In order to make the objectives, technical solutions and advantages of the present application clearer, the following is combined with Figure 1 - Figure 2 and embodiments to further elaborate on the present application. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0082] The following further describes the embodiments of the present application in detail with reference to the drawings in the specification.

[0083] The embodiments of the present application disclose a method for determining the operating health status of a vacuum pump. Referring to Figure 1 , the method flow of the method for determining the operating health status of a vacuum pump includes the following steps:

[0084] Step S100: Obtain the pumping operation level and the original air pressure of the container.

[0085] The pumping operation level is the pumping level of the currently used vacuum pump. The higher this level, the stronger the corresponding horsepower and the higher the pumping rate at this time. The original air pressure of the container is the air pressure of the container that needs to create a vacuum environment before the vacuum pump starts operating. The data can be obtained by installing a pressure detection device inside the container. Generally, the original air pressure of this container is the same as the atmospheric pressure.

[0086] Step S101: Determine the designed pumping rate corresponding to the pumping operation level according to the preset level matching relationship.

[0087] The designed pumping rate is the pumping rate that the vacuum pump can achieve when operating at the pumping operation level. Different pumping operation levels correspond to different designed pumping rates, and the level matching relationship between the two is determined by the staff in advance.

[0088] Step S102: Control the vacuum pump to operate at the pumping operation level for a preset detection duration, and obtain the secondary air pressure of the container after the detection duration.

[0089] The detection duration is a fixed duration set by the staff, and this fixed duration needs to be less than half of the duration required for the vacuum pump to evacuate the inside of the container to a vacuum environment; controlling the operation detection duration of the vacuum pump is convenient for obtaining the operation data of the vacuum pump, thus facilitating subsequent analysis; the secondary air pressure of the container is the air pressure value inside the container after the vacuum pump operates for the detection duration.

[0090] Step S103: Calculate according to the original air pressure of the container, the secondary air pressure of the container, and preset fixed calculation parameters to determine the actual pumping rate, and perform a difference calculation based on the designed pumping rate and the actual pumping rate to determine the deviation pumping rate.

[0091] The fixed calculation parameters include the container volume, gas constant, and thermodynamic temperature, etc. The actual pumping rate is the pumping rate that the vacuum pump can achieve during the detection duration, and the calculation formula is where S 1 is the actual pumping rate, V 0 is the container volume, t 0 is the detection duration, P 0 is the original air pressure of the container, P 1 is the secondary air pressure of the container; the deviation pumping rate is the difference between the designed pumping rate and the actual pumping rate, and this difference is an absolute value.

[0092] Step S104: Output an influence signal when the deviation pumping rate is greater than the preset reference influence rate, and calculate based on the actual pumping rate and the designed pumping rate to determine the initial pumping ratio.

[0093] The reference influence rate is the maximum deviation pumping rate allowed when the staff determines that the recognized pumping rate basically meets the design requirements. When the deviation pumping rate is greater than the reference influence rate, it indicates that there is a significant decrease in the pumping rate, that is, there is a blockage problem or a leakage problem with the vacuum pump at this time. Therefore, an influence signal is output to identify this situation, so that the staff can know this situation in time and facilitate subsequent analysis of abnormal situations; the initial pumping ratio is the ratio of the actual pumping rate to the designed pumping rate, and is determined by dividing the actual pumping rate by the designed pumping rate.

[0094] Step S105: After the influence on the signal output, determine the changed operation level according to the preset adjustment level and the air extraction operation level, and determine the theoretical air extraction rate corresponding to the changed operation level according to the level matching relationship.

[0095] The adjustment level is the level for adjusting the operation level of the vacuum pump set by the staff. For example, adjusting downward by two levels. The changed operation level is the level at which the vacuum pump operates after adjusting the air extraction operation level according to the adjustment level; the theoretical air extraction rate is the air extraction rate that the vacuum pump can reach when operating at the changed operation level.

[0096] Step S106: Control the vacuum pump to operate for a detection duration at the changed operation level, and obtain the air pressure in the container three times after the detection duration.

[0097] The air pressure in the container three times is the air pressure value inside the container after the vacuum pump operates for the detection duration at the changed operation level based on the air pressure in the container twice.

[0098] Step S107: Calculate according to the air pressure in the container twice, the air pressure in the container three times, the fixed calculation parameters, and the theoretical air extraction rate to determine the secondary air extraction ratio, and perform a difference calculation based on the initial air extraction ratio and the secondary air extraction ratio to determine the deviation air extraction ratio.

[0099] The method for determining the secondary air extraction ratio is the same as that for the initial air extraction ratio, which will not be elaborated here; the deviation air extraction ratio is the difference between the initial air extraction ratio and the secondary air extraction ratio, and this difference is an absolute value.

[0100] Step S108: Determine whether the deviation air extraction ratio is less than the preset similar air extraction ratio.

[0101] The similar air extraction ratio is the maximum deviation air extraction ratio allowed when the air extraction rate set by the staff is reduced proportionally. The purpose of the judgment is to know whether the air extraction rate is reduced proportionally with the adjustment of the vacuum pump level. If it is reduced proportionally, it can indicate that the decrease in the air extraction rate of the vacuum pump is only caused by gas blockage. Otherwise, there must be a gas leakage situation.

[0102] Step S1081: If the deviation air extraction ratio is less than the similar air extraction ratio, output an equipment blockage signal.

[0103] When the deviation air extraction ratio is less than the similar air extraction ratio, it means that the air extraction rate is reduced proportionally, that is, at this time, there is only a gas blockage situation in the equipment. At this time, output an equipment blockage signal to identify this situation, which is convenient for the staff to perform maintenance later.

[0104] Step S1082: If the deviation air extraction ratio is not less than the similar air extraction ratio, output an equipment leakage signal.

[0105] When the deviation extraction ratio is not less than the similar extraction ratio, it indicates that the extraction rate does not decrease proportionally, that is, there is a situation where gas leaks into the container at this time. Therefore, the output device leakage signal is used to identify this situation, facilitating subsequent maintenance by the staff.

[0106] After the device leakage signal is output, the method for determining the operating health status of the vacuum pump further includes:

[0107] Step S200: On the preset time axis, with the time point when the vacuum pump starts operating as the front end point, construct a detection interval with a width of twice the detection duration, and divide the detection interval into a determination interval and a review interval according to the midpoint of the detection interval.

[0108] When the device leakage signal is output, it indicates that there is a problem of gas leakage in the vacuum pump. At this time, there may also be a problem of pipeline gas blockage, which needs further analysis; the time axis is an axis formed by combining each time point, and this axis points from the passed time points to the unarrived time points, where the passed time points are on the left side of this time axis, and the left side is defined as the front end of the time axis; constructing the detection interval can facilitate the acquisition and analysis of data during the operation of the vacuum pump; among them, the determination interval is the time interval when the vacuum pump operates at the extraction operation level, and the review interval is the time interval when the vacuum pump operates at the variable operation level.

[0109] Step S201: In the determination interval, calculate according to the original air pressure of the container, the secondary air pressure of the container, the designed extraction rate, and the detection duration to determine the determination leakage amount, and determine the determination equivalent aperture according to the determination leakage amount.

[0110] The determination leakage amount is the gas amount of air leaking into the container in the determination interval, and the calculation formula is where S 0 is the designed extraction rate, R is the gas constant in the fixed calculation parameters, T is the thermodynamic temperature in the fixed calculation parameters, P atm is the atmospheric pressure, Δn 0 is the determination leakage amount; the derivation process of this calculation formula is as follows: ① According to the definition of the extraction rate, the gas volume V 0 extracted by the vacuum pump within the time t 抽 = S 0 t 0 ; ② According to the ideal gas state equation, the amount of gas substance in the container at the initial moment After pumping for t 0 time, the amount of gas substance in the container ③ During the pumping process, there is a leakage, and the gas under the external atmospheric pressure P atm enters the container through the leakage point. At this time, the amount of gas substance of this part where V 漏 is the volume of the gas entering the container through the leakage point as set; ④ According to n 初 +Δn 0 -n 抽 =n 二 it can be solved At this time, n 抽 is the amount of gas substance pumped out by the vacuum pump within the time t 0 ; ⑤ Substitute V 漏 into the calculation formula of Δn 0 to solve

[0111] It is determined that the equivalent aperture is the diameter size of the hole corresponding to when the current leakage point is simulated and pinched to form a hole, that is, the opening size of the leakage point is determined by judging the equivalent aperture, and the calculation formula is where μ is the preset gas dynamic viscosity, L is the preset simulated hole length, and the specific values are set in advance by the staff, and d 0 is the judged equivalent aperture; the derivation process of this calculation formula is as follows: ① Poiseuille's law describes the volume flow rate of laminar flow through a circular pipe ② V 漏 =Qt 0 ; ③ Combining Q and V 漏 can be determined

[0112] Step S202: Calculate in the review interval according to the secondary air pressure of the container, the tertiary air pressure of the container, the theoretical pumping rate, and the detection duration to determine the review leakage amount, and determine the review equivalent aperture according to the review leakage amount.

[0113] The review leakage amount is the amount of gas leaked into the container in the review interval, and the calculation method is the same as that for determining the leakage amount, which will not be elaborated here; the review equivalent aperture is the opening size of the leakage point calculated according to the amount of gas leaked in the review interval, and the calculation method is the same as that for determining the equivalent aperture, which will not be elaborated here.

[0114] Step S203: Calculate the difference between the judged equivalent aperture and the review equivalent aperture to determine the equivalent deviation aperture.

[0115] The equivalent deviation aperture is the difference between the judged equivalent aperture and the review equivalent aperture, and this difference is an absolute value.

[0116] Step S204: Determine whether the equivalent deviation aperture is less than the preset permitted deviation aperture.

[0117] The permitted deviation aperture is the maximum equivalent deviation aperture allowed when the opening sizes of the leakage points determined in two operations set by the staff are relatively consistent. The purpose of the judgment is to find out whether only leakage affects the current pumping rate.

[0118] Step S2041: If the equivalent deviation aperture is less than the permitted deviation aperture, output a single leakage signal.

[0119] When the equivalent deviation aperture is less than the permitted deviation aperture, it indicates that the opening sizes of the leakage points formed by fitting are relatively similar, that is, the pipeline can be pumped normally during the pumping process of the vacuum pump, which means that there is no pipeline blockage in the vacuum pump at this time. Therefore, output a single leakage signal to identify this situation, so as to facilitate the staff to determine the specific abnormal situation of the vacuum pump.

[0120] Step S2042: If the equivalent deviation aperture is not less than the permitted deviation aperture, output a leakage blockage signal.

[0121] When the equivalent deviation aperture is not less than the permitted deviation aperture, it indicates that the opening size formed by simulating the leakage point has changed, that is, there is not only gas leakage but also gas pipeline blockage. At this time, output a leakage blockage signal to identify this situation.

[0122] After the leakage blockage signal is output, the method for determining the operating health status of the vacuum pump further includes:

[0123] Step S300: Control the vacuum pump to stop operating and obtain the real-time air pressure of the container in real time, and control the preset stop duration initially set to zero to start timing, and define the corresponding stop duration as the reset duration when the real-time air pressure of the container is the same as the original air pressure of the container.

[0124] The real-time air pressure of the container is the real-time air pressure value inside the container after the vacuum pump stops operating. Through the stop duration, it can be known the continuous duration of external gas entering the container through leakage after the vacuum pump stops operating. When the real-time air pressure of the container is the same as the original air pressure of the container, it indicates that the inside of the container has returned to the state before the vacuum pump operates. At this time, define the corresponding stop duration as the reset duration to distinguish different stop durations, which is convenient for subsequent analysis.

[0125] Step S301: Calculate according to the reset duration, the original air pressure of the container, and the air pressure of the container three times to determine the actual equivalent aperture, and output a leakage determination signal when the actual equivalent aperture.

[0126] The actual equivalent aperture is the simulated opening size of the leakage point obtained by analyzing the gas leakage situation in the reset duration, and the calculation formula is where t 1 is the reset duration, P 2It is the triple air pressure of the container, d 2 is the actual equivalent aperture; the derivation process of the formula is as follows:

[0127] ① According to Poiseuille's law, the volume flow rate of gas through the small hole where P(t) represents the real-time air pressure of the container at time t;

[0128] ② In the time interval dt, the volume of gas dV entering the container through the leakage hole = Q V dt;

[0129] ③ Determine the amount of substance of the gas entering the container according to the ideal gas state equation

[0130] ④ For the gas in the container, the change of n(t) with time satisfies

[0131] ⑤ Substitute dV into the dn expression and sort it out to determine At this time, at the moment of t = 0, that is, P(t) = P 2 , so integrate the above differential equation to determine After sorting out, it can be determined

[0132] Step S302: After a single leakage signal or a leakage determination signal is output, construct a historical interval with a width of a preset historical duration with the current time point as the back-end point on the time axis.

[0133] When a single leakage signal or a leakage determination signal is output, it indicates that the aperture determined currently is the equivalent aperture of the leakage point in the actual situation. Therefore, the leakage situation of the vacuum pump can be further analyzed; the historical duration is the duration set by the staff to obtain the historical usage data of the vacuum pump, and constructing a historical interval is convenient for obtaining data.

[0134] Step S303: Determine similar leakage points according to the current equivalent aperture in the historical interval, and determine the similar leakage types at the similar leakage points.

[0135] The similar leakage points are the time points when the equivalent aperture in the historical situation is the same as the currently determined equivalent aperture when leakage occurs. The similar leakage types are the actual leakage types obtained by the staff after repairing the leakage points corresponding to the similar leakage points, such as the check valve is damaged, the sealing performance of the seal is not good, etc.

[0136] Step S304: Count according to each similar leakage type to determine the number of similar types, and perform a summation calculation according to all the numbers of similar types to determine the total number of types.

[0137] The number of similar types is the total number of the determined single similar leakage types, and the total number of types is the total number of all the determined similar leakage types, which is obtained by adding up all the numbers of similar types.

[0138] S305: Calculate according to the number of similar types and the total number of types to determine the type proportion, and define the similar leakage types with the type proportion greater than the preset general proportion as the reference leakage types for output.

[0139] The type proportion is the ratio of the number of a single similar leakage type to the number of all similar leakage types, which is determined by dividing the number of similar types by the total number of types; the general proportion is the type proportion that needs to be reached for the similar leakage types set by the staff to determine that the types that appear are relatively common and may be the types of the current leakage, and the reference leakage types are defined to mark some types that may cause the current leakage situation, facilitating the subsequent maintenance reference of the staff.

[0140] Reference Figure 2 , based on the same inventive concept, an embodiment of the present invention provides a system for determining the operating health status of a vacuum pump, including:

[0141] An acquisition module, configured to acquire the pumping operation level and the original air pressure of the container;

[0142] A processing module, connected to the acquisition module and the judgment module, for storing and processing information;

[0143] A judgment module, connected to the acquisition module and the processing module, for judging information;

[0144] The processing module determines the designed pumping rate corresponding to the pumping operation level according to the preset level matching relationship;

[0145] The processing module controls the vacuum pump to operate at the pumping operation level for a preset detection duration, and after the detection duration, the acquisition module acquires the secondary air pressure of the container;

[0146] The processing module calculates according to the original air pressure of the container, the secondary air pressure of the container, and the preset fixed calculation parameters to determine the actual pumping rate, and calculates the difference between the designed pumping rate and the actual pumping rate to determine the deviation pumping rate;

[0147] When the deviation pumping rate is greater than the preset reference influence rate, the processing module outputs an influence signal, and calculates according to the actual pumping rate and the designed pumping rate to determine the initial pumping proportion;

[0148] After the influence signal is output, the processing module determines the changed operation level according to the preset adjustment level and the pumping operation level, and determines the theoretical pumping rate corresponding to the changed operation level according to the level matching relationship;

[0149] The processing module controls the vacuum pump to operate with a variable operation level and operation detection duration, and after the detection duration, the acquisition module acquires the air pressure of the container three times.

[0150] The processing module calculates according to the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters, and the theoretical pumping rate to determine the secondary pumping ratio, and performs a difference calculation based on the initial pumping ratio and the secondary pumping ratio to determine the deviation pumping ratio.

[0151] The judgment module judges whether the deviation pumping ratio is less than a preset similar pumping ratio.

[0152] If the judgment module judges that the deviation pumping ratio is less than the similar pumping ratio, the processing module outputs a device blockage signal.

[0153] If the judgment module judges that the deviation pumping ratio is not less than the similar pumping ratio, the processing module outputs a device leakage signal.

[0154] The leakage situation analysis module is used to analyze the situation of gas leakage during the operation of the vacuum pump.

[0155] The determined leakage amount calculation module is used to accurately calculate the determined leakage amount.

[0156] The determined equivalent aperture calculation module is used to calculate the determined equivalent aperture.

[0157] The actual equivalent aperture calculation module is used to calculate the actual equivalent aperture.

[0158] The leakage type reference module is used to determine the type that causes the current leakage situation for subsequent maintenance reference.

[0159] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the above division of each functional module is used as an example. In actual applications, the above functions can be allocated to different functional modules according to needs, that is, the internal structure of the device is divided into different functional modules to complete all or part of the functions described above. The specific working processes of the systems, devices, and units described above can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated here.

[0160] An embodiment of the present invention provides a computer-readable storage medium storing a computer program that can be loaded and executed by a processor to determine the operating health status of a vacuum pump. Computer storage media include, for example, various media that can store program codes such as USB flash drives, external hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical discs.

Claims

1. A method for determining the operating health of a vacuum pump, characterized in that include: Obtain the vacuum operation level and the original gas pressure of the container; Determine the design exhaust rate corresponding to the exhaust operation level according to the preset level matching relationship; Control the vacuum pump to operate at the vacuum operation level for a preset detection time, and obtain the secondary air pressure of the container after the detection time; The actual pumping rate is determined by calculating according to the original gas pressure of the container, the secondary gas pressure of the container and the preset fixed calculation parameters, and the deviation pumping rate is determined by performing a difference calculation according to the designed pumping rate and the actual pumping rate; When the deviation pumping rate is greater than the preset reference influence rate, an influence signal is output, and the initial pumping ratio is determined by calculation based on the actual pumping rate and the designed pumping rate; After the output of the influencing signal, the change operation level is determined according to the preset adjustment level and the exhaust operation level, and the theoretical exhaust rate corresponding to the change operation level is determined according to the level matching relationship; Control the vacuum pump to change the operation level and test duration, and obtain the container's air pressure three times after the test duration; The secondary air pumping ratio is determined by calculating based on the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters and the theoretical air pumping rate, and the deviation air pumping ratio is determined by performing a difference calculation based on the initial air pumping ratio and the secondary air pumping ratio; Determine whether the deviation extraction ratio is less than the preset similar extraction ratio; If the deviation extraction ratio is less than the similar extraction ratio, the device blocking signal is output; If the deviation extraction ratio is not less than the similar extraction ratio, the device leakage signal is output.

2. The method for determining the operating health of a vacuum pump according to claim 1, characterized in that After the device leakage signal is output, the method for determining the operating health of the vacuum pump also includes: On the preset time axis, a detection interval with a width of twice the detection time is constructed with the time point when the vacuum pump starts to operate as the front end point, and the detection interval is divided into a determination interval and a review interval according to the midpoint of the detection interval; In the determination interval, the leakage amount is determined by calculation according to the original gas pressure of the container, the secondary gas pressure of the container, the designed air extraction rate and the detection time, and the equivalent aperture is determined according to the leakage amount; In the recheck interval, the recheck leakage volume is calculated based on the secondary air pressure of the container, the tertiary air pressure of the container, the theoretical air extraction rate and the detection time, and the recheck equivalent aperture is determined based on the recheck leakage volume; Based on the determination of the equivalent aperture and the verification of the equivalent aperture, a difference calculation is performed to determine the equivalent deviation aperture; Determine whether the equivalent deviation aperture is smaller than the preset allowable deviation aperture; If the equivalent deviation aperture is smaller than the permissible deviation aperture, a single leakage signal is output; If the equivalent deviation aperture is not less than the allowable deviation aperture, a leakage blockage signal is output.

3. The method for determining the operating health of a vacuum pump according to claim 2, characterized in that The steps of calculating and determining the leakage amount in the determination interval according to the original gas pressure of the container, the secondary gas pressure of the container, the designed air extraction rate and the detection time include: definition: S0: Designed pumping rate; P0: original pressure of container; P1: secondary air pressure of the container; t0: detection duration; V0: container volume in fixed calculation parameters; R: gas constant in fixed calculation parameters; T: thermodynamic temperature in fixed calculation parameters; P atm : atmospheric pressure; Δn0: Determine the leakage amount; but 4. The method for determining the operating health of a vacuum pump according to claim 3, characterized in that The steps for determining the equivalent aperture based on the leakage amount include: definition: μ: preset gas dynamic viscosity; L: preset simulated hole length; d0: Determine the equivalent aperture; but 5. The method for determining the operating health of a vacuum pump according to claim 4, characterized in that After the leakage blockage signal is output, the method for determining the operating health of the vacuum pump also includes: Control the vacuum pump to stop working and obtain the real-time air pressure of the container in real time, and control the preset stop time which is initially zero to count, and define the corresponding stop time as the reset time when the real-time air pressure of the container is consistent with the original air pressure of the container; The actual equivalent aperture is determined by calculation based on the reset time, the original air pressure of the container and the three air pressures of the container, and a leakage determination signal is output at the actual equivalent aperture; definition: t1: reset duration; P2: tertiary air pressure of the container; d2: actual equivalent aperture; but 6. The method for determining the operating health of a vacuum pump according to claim 5, characterized in that After the single leakage signal or the leakage confirmation signal is output, the method for determining the operating health of the vacuum pump also includes: On the time axis, a historical interval with a width of a preset historical duration is constructed with the current time point as the end point; Determine similar leakage points in the historical interval based on the current equivalent aperture, and determine similar leakage types at similar leakage points; Counting each similar leakage type to determine the number of similar types, and summing up all the numbers of similar types to determine the overall number of types; The type proportion is determined by calculation based on the number of similar types and the overall number of types, and similar leakage types whose type proportion is greater than the preset general proportion are defined as reference leakage types for output.

7. A system for determining the operating health of a vacuum pump, characterized in that: include: An acquisition module, used to obtain the vacuum operation level and the original gas pressure of the container; A processing module, connected to the acquisition module and the judgment module, for storing and processing information; A judgment module, connected with the acquisition module and the processing module, for judging the information; The processing module determines the design exhaust rate corresponding to the exhaust operation level according to the preset level matching relationship; The processing module controls the vacuum pump to operate at the exhaust operation level for a preset detection time, and the acquisition module acquires the secondary air pressure of the container after the detection time; The processing module calculates according to the original air pressure of the container, the secondary air pressure of the container and the preset fixed calculation parameters to determine the actual pumping rate, and performs a difference calculation according to the designed pumping rate and the actual pumping rate to determine the deviation pumping rate; The processing module outputs an influence signal when the deviation pumping rate is greater than the preset reference influence rate, and calculates the initial pumping ratio according to the actual pumping rate and the designed pumping rate; After the influence signal is output, the processing module determines the change operation level according to the preset adjustment level and the exhaust operation level, and determines the theoretical exhaust rate corresponding to the change operation level according to the level matching relationship; The processing module controls the vacuum pump to change the operation level detection time, and the acquisition module obtains the air pressure of the container three times after the detection time; The processing module calculates the secondary air pressure of the container, the tertiary air pressure of the container, the fixed calculation parameters and the theoretical air extraction rate to determine the secondary air extraction ratio, and performs a difference calculation based on the initial air extraction ratio and the secondary air extraction ratio to determine the deviation air extraction ratio; The judgment module judges whether the deviation extraction ratio is less than the preset similar extraction ratio; If the judgment module determines that the deviation extraction ratio is less than the similar extraction ratio, the processing module outputs a device blocking signal; If the judgment module determines that the deviation extraction ratio is not less than the similar extraction ratio, the processing module outputs a device leakage signal.

8. A computer-readable storage medium, characterized in that: A computer program is stored which can be loaded by a processor and execute the method for determining the operating health of a vacuum pump according to any one of claims 1 to 6.

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