A three-dimensional angle sensor testing device

Abstract

The present invention relates to a three-dimensional angle sensor testing device, belonging to the technical field of three-dimensional angle measurement. It includes a central polarization beam splitter prism, and first and second laser generators that work intermittently and alternately. When the first and second lasers are incident on the central polarization beam splitter prism in parallel, their phases are staggered by 90°. The first laser is transmitted through the central polarization beam splitter prism, passes through the first quarter-wave plate, is reflected by the first mirror and then passes through the first quarter-wave plate again, and is successively incident on the central polarization beam splitter prism and the detector to complete the first calibration of the position. The second laser is reflected by the central polarization beam splitter prism, passes through the second quarter-wave plate, is reflected by the second mirror, passes through the second quarter-wave plate again, and is successively incident on the central polarization beam splitter prism and the detector to complete the second calibration of the position. The present invention can achieve three-dimensional angle measurement of a target object under one detector.

Description

Technical Field

[0001] The present invention relates to the technical field of three-dimensional angle measurement of target objects, and particularly to a three-dimensional angle sensor test device. Background Art

[0002] In the prior art, real-time measurement and feedback of the spatial three-dimensional angle change of a target object are realized. Currently, the following two common methods are available:

[0003] The first solution: As Figure 1 shown, a specific conical mirror 100 is used as a device for transmitting the attitude of the measured part. The laser target emitted by the laser generating device 500 is split into multiple light beams by a beam splitter. The multiple light beams are reflected by a polarization prism 200 to the conical mirror 100, and then reflected by the conical mirror 100 to the first detector 600 and the second detector 700, so as to analyze the three-dimensional angle quantity of the measured device.

[0004] The above solution has the following disadvantages:

[0005] 1. Two detectors need to be used simultaneously;

[0006] 2. Under the same photosensitive area of the detector, the actual measurable angle range corresponding to this method is much smaller;

[0007] 3. When performing an abnormal large-angle movement, the same laser target will crosstalk to different detectors, resulting in abnormal results.

[0008] The second solution: As Figure 2 shown, a right-angle prism 300 is used as a device for transmitting the attitude of the measured part. The cross target generated by the optoelectronic autocollimator 400 emits light through the autocollimation light pipe to the right-angle prism 300. After being reflected by the hypotenuse reflecting surface and the two right-angle reflecting surfaces of the right-angle prism 300, two cross targets will be obtained in the CCD image detector of the optoelectronic autocollimator 400; the displacement change of one target and the image rotation change of the other target can be used to analyze the three-dimensional angle quantity of the measured device.

[0009] The above solution has the following disadvantages:

[0010] 1. Based on the realization of the cross target, it cannot use a detector for detection, and can only use a CCD image detector, resulting in a low working frequency and being limited in the application of dynamic angle feedback scenarios;

[0011] 2. When the target undergoes multi-dimensional changes, the two cross targets will intersect, easily leading to incorrect target recognition.

[0012] It is recorded in the patent document with the authorized announcement number of "CN211452292U" and the name of "A three-dimensional angle measuring device for dynamic targets": After the beam emitted by the laser passes through the beam expander collimator and the beam splitter, one path is transmitted to the optical attenuator, and the other path is transmitted to the moving component; the moving component is a semi-transparent and semi-reflective mirror or film arranged in front of the long-angle mirror. Part of the beam is reflected and returns to the fixed component and enters the first detector, and the other part of the beam enters the interior of the long-angle mirror for transmission. After being reflected by two total reflection surfaces, it is then transmitted to the fixed component and enters the second detector.

[0013] It can be seen that it has similar disadvantages to the first method and also requires the use of two detectors simultaneously to achieve the measurement of dynamic targets. Summary of the Invention

[0014] In order to solve the problems of high cost and cumbersome operation in the prior art when measuring the spatial three-dimensional angle of a target object, a three-dimensional angle sensor test device is provided, which can achieve the three-dimensional angle measurement of a target object with one detector, thereby achieving the purpose of convenient operation and cost reduction.

[0015] A three-dimensional angle sensor test device provided for achieving the purpose of the present invention includes a central polarization beam splitter prism, a first laser generator that emits a first laser to the central polarization beam splitter prism, and a second laser generator that emits a second laser. The first laser generator and the second laser generator work intermittently and alternately, so that the first laser and the second laser are incident on the central polarization beam splitter prism parallel to each other backward. When the two lasers are incident on the central polarization beam splitter prism, the phases are staggered by 90°, so that the first laser is transmitted and emitted backward, and the second laser is reflected and emitted to the left. And the transmission path of the first laser is perpendicular to the reflection path of the second laser; a first quarter-wave plate and a first mirror are vertically arranged along the emission direction on the transmission path of the first laser; a second quarter-wave plate and a second mirror are vertically arranged along the emission direction on the reflection path of the second laser; a detector for receiving the two lasers is arranged on the right side of the central polarization beam splitter prism;

[0016] Among them, the first laser is transmitted and emitted by the central polarization beam splitter prism. After passing through the first quarter-wave plate, the transmitted first laser is incident on the first mirror and is reflected and emitted by the first mirror. After the reflected first laser passes through the first quarter-wave plate again, it is incident on the central polarization beam splitter prism and is reflected and emitted by the central polarization beam splitter prism, and then is incident on the detector to complete the first calibration of the position;

[0017] The second laser beam is reflected and emitted by the central polarization beam splitter prism. After passing through the second quarter-wave plate, the reflected and emitted second laser beam is incident on the second mirror and is reflected and emitted by the second mirror. After passing through the second quarter-wave plate again, the reflected and emitted second laser beam is incident on the central polarization beam splitter prism and is transmitted and emitted by the central polarization beam splitter prism and then is incident on the detector to complete the secondary calibration of the position.

[0018] Adopting the above technical solution, when in use, the first laser generator and the second laser generator work intermittently and alternately. Since the phases of the first laser and the second laser are 90° out of phase when incident on the central polarization beam splitter prism, when they are incident on the central polarization beam splitter prism parallel to each other backward, they will be transmitted and reflected respectively, and finally are incident on the first mirror and the second mirror. By setting the first quarter-wave plate and the second quarter-wave plate, the optical paths of the first laser and the second laser are deflected by 90° respectively. Finally, through the reflection / transmission of the central polarization beam splitter prism, the imaging is carried out on the detector to complete the two-time calibration of the position, and then the three-dimensional angle measurement of the target object is realized under one detector, achieving the purpose of convenient operation and cost reduction.

[0019] As a further improvement of the above solution, it further includes a first polarization beam splitter prism. The first laser and the second laser are incident on the first polarization beam splitter prism at an angle perpendicular to each other, and the first laser / second laser transmitted / reflected by the first polarization beam splitter prism respectively are incident on the central polarization beam splitter prism parallel to each other backward.

[0020] This technical solution provides a different application scenario. In this scenario, the three-dimensional angle measurement of the target object can still be realized through the first laser and the second laser perpendicular to each other.

[0021] As a further improvement of the above solution, it further includes a reflection prism. The first laser is incident on the reflection prism and is reflected and emitted by the reflection prism. The reflected and emitted first laser and the second laser are incident on the first polarization beam splitter prism at an angle perpendicular to each other.

[0022] In this scenario, the three-dimensional angle measurement of the target object can still be realized through the parallel first laser and the second laser, providing another scenario for the three-dimensional angle measurement of the target object and further expanding the adaptability of this technical solution.

[0023] As a further improvement of the above solution, the first laser and the second laser are perpendicularly incident on the central polarization beam splitter prism.

[0024] The first laser and the second laser are perpendicularly incident on the central polarization beam splitter prism. Compared with incidence at other angles, the optical paths of reflection and refraction of the first laser and the second laser are relatively short. Through the above solution, the overall device can be made more compact, and the shortened optical paths of reflection and refraction of the first laser and the second laser can be used to adapt to narrow spaces.

[0025] As a further improvement of the above solution, the centers of the reflection prism, the first polarization beam splitter prism, the central polarization beam splitter prism, the first quarter-wave plate, and the first mirror are located on the same vertical line.

[0026] Through this solution, on the one hand, it provides a basis for the installation and positioning of the reflection prism, the first polarization beam splitter prism, the central polarization beam splitter prism, the first quarter-wave plate, and the first mirror; on the other hand, when the first laser is parallelly incident on the center of the reflection prism and then exits after being reflected by the reflection prism, the first laser after reflection and exit will be perpendicularly incident on the center of the first polarization beam splitter prism. The first laser after passing through the first polarization beam splitter prism will be parallelly incident backward on the center of the central polarization beam splitter prism. The first laser exits through the central polarization beam splitter prism, and the first laser after exiting will be perpendicularly incident on the center of the first quarter-wave plate, and then perpendicularly incident on the center of the first mirror, and exits after being reflected by the first mirror. The first laser after reflection and exit is perpendicularly incident on the center of the first quarter-wave plate again, perpendicularly incident on the center of the central polarization beam splitter prism, and after being reflected and exiting by the central polarization beam splitter prism, it is incident on the detector to complete the first calibration of the position;

[0027] As a further improvement of the above solution, the centers of the second mirror, the second quarter-wave plate, the central polarization beam splitter prism, and the detector are located on the same horizontal line.

[0028] Through this solution, on the one hand, it provides a basis for the installation and positioning of the second mirror, the second quarter-wave plate, the central polarization beam splitter prism, and the detector; on the other hand, when the second laser is parallelly incident on the center of the central polarization beam splitter prism, the second laser exits after being reflected by the central polarization beam splitter prism. The second laser after reflection and exit is perpendicularly incident on the center of the second quarter-wave plate and then perpendicularly incident on the center of the second mirror, and exits after being reflected by the second mirror. The second laser after reflection and exit passes through the center of the second quarter-wave plate again and is incident on the center of the central polarization beam splitter prism, and after exiting through the central polarization beam splitter prism, it is incident on the center of the detector to complete the second calibration of the position.

[0029] The reflection prism, the first polarization beam splitter prism, the central polarization beam splitter prism, the first quarter-wave plate, the first mirror, and the second mirror, the second quarter-wave plate, the central polarization beam splitter prism, and the detector are respectively located on two vertical lines, which can make the first laser and the second laser finally incident on the center of the detector, facilitating the calibration of the position and convenient for observation.

[0030] As a further improvement of the above solution, a cemented lens is provided on the optical path between the central polarization beam splitter prism and the detector.

[0031] The light beam transmitted by the central polarization beam splitter prism is converged to the detector through the cemented lens to form an image of the object.

[0032] As a further improvement of the above solution, the first reflector and the second reflector are arranged on both sides of an L-shaped bracket with an interior angle of 90°.

[0033] Through the arrangement of the L-shaped bracket, it is convenient to vertically install the first reflector and the second reflector.

[0034] As a further improvement of the above solution, an acquisition card is provided at the rear end of the detector, and the acquisition card is used to acquire and store the electrical signal changes generated by the detector.

[0035] As a further improvement of the above solution, the first laser generator and the second laser generator are modulated lasers.

[0036] The beneficial effects of the present invention are as follows:

[0037] Compared with the prior art, a three-dimensional angle sensor testing device provided by the present invention uses two mutually perpendicular first reflectors and second reflectors as attitude transfer devices for the measured part, adopts the method of alternately working intermittently with the first laser and the second laser emitted by the first laser generator and the second laser generator, and realizes the three-dimensional angle measurement of the target object under one detector by virtue of the characteristics of the central polarization beam splitter prism, the first quarter-wave plate, and the second quarter-wave plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a schematic diagram of the principle of the first solution in the background art of the present invention document;

[0039] Figure 2 It is a schematic diagram of the principle of the second solution in the background art of the present invention document;

[0040] Figure 3 It is a schematic diagram of the principle of an embodiment of the present invention document;

[0041] Figure 4 It is a schematic diagram of the principle of an embodiment of the present invention document with a first polarization beam splitter prism added;

[0042] Figure 5 It is a schematic diagram of the principle of an embodiment of the present invention document with a first polarization beam splitter prism and a reflection prism added;

[0043] Figure 6 For Figure 4 It is a schematic diagram of the principle with a cemented lens added;

[0044] Figure 7 For Figure 5 a schematic diagram of the principle of the cemented lens is added;

[0045] Figure 8 For Figure 4 a schematic diagram of the principle of the L-shaped bracket is added;

[0046] Figure 9 For Figure 5 a schematic diagram of the principle of the L-shaped bracket is added;

[0047] Figure 10 For Figure 9 a schematic diagram of the principle of the cemented lens is added;

[0048] Figure 11 This is the block diagram of the modulation system of the present invention document.

[0049] Explanation of reference numerals:

[0050] 1. Central polarization beam splitter prism; 2. Detector; 3. First quarter-wave plate; 4. First mirror; 5. Second quarter-wave plate; 6. Second mirror; 7. Reflecting prism; 8. First polarization beam splitter prism; 9. L-shaped bracket; 10. Cemented lens; 11. First laser generator; 12. Second laser generator; 100. Conical mirror; 200. Polarizing prism; 300. Right-angle prism; 400. Photoelectric autocollimator; 500. Laser generating device; 600. First detector; 700. Second detector. Specific embodiments

[0051] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Those skilled in the art should know that the embodiments described below are part of the disclosed technical solutions of the present application, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0052] Next, the principles and spirits of the present invention will be elaborated in detail with reference to several representative embodiments of the present invention.

[0053] Embodiment 1 of a three-dimensional angle sensor testing device provided by the present invention:

[0054] As Figure 3As shown in the figure, a three-dimensional angle sensor testing device provided by the present invention includes a central polarization beam splitting prism 1, a first laser generator 11 that emits a first laser towards the central polarization beam splitting prism 1, and a second laser generator 12 that emits a second laser. The first laser generator 11 and the second laser generator 12 work intermittently and alternately, so that the first laser and the second laser are incident on the central polarization beam splitting prism 1 parallel to each other backwards. When the two lasers are incident on the central polarization beam splitting prism 1, the phases are staggered by 90°, so that the first laser is transmitted and emitted backwards, and the second laser is reflected and emitted to the left. Moreover, the transmission optical path of the first laser and the reflection optical path of the second laser are perpendicular; a first quarter-wave plate 3 and a first mirror 4 are vertically arranged along the emission direction on the transmission optical path of the first laser; a second quarter-wave plate 5 and a second mirror 6 are vertically arranged along the emission direction on the reflection optical path of the second laser; a detector 2 for receiving the two lasers is arranged on the right side of the central polarization beam splitting prism 1;

[0055] Among them, the first laser is transmitted and emitted by the central polarization beam splitting prism 1. The transmitted first laser is vertically incident on the first quarter-wave plate 3. After being deflected by 45° by the first quarter-wave plate 3, it is vertically incident on the first mirror 4 and is reflected and emitted by the first mirror 4. The reflected first laser is deflected by 45° again by the first quarter-wave plate 3 and then incident on the central polarization beam splitting prism 1. After being reflected and emitted by the central polarization beam splitting prism 1, it is incident on the detector 2 to complete the first calibration of the position;

[0056] The second laser is reflected and emitted by the central polarization beam splitting prism 1. The reflected second laser is vertically incident on the second quarter-wave plate 5 and is deflected by 45° by the second quarter-wave plate 5. Then it is vertically incident on the second mirror 6 and is reflected and emitted by the second mirror 6. The reflected second laser is deflected by 45° again by the second quarter-wave plate 5 and then incident on the central polarization beam splitting prism 1. After being transmitted and emitted by the central polarization beam splitting prism 1, it is incident on the detector 2 to complete the second calibration of the position.

[0057] Embodiment 2 of a three-dimensional angle sensor testing device provided by the present invention:

[0058] As Figure 4As shown, compared with the above-mentioned Embodiment 1, a first polarization beam splitter prism 8 is added in Embodiment 2. The first laser and the second laser are incident on the first polarization beam splitter prism 8 at mutually perpendicular angles, and the first laser / second laser after being transmitted / reflected by the first polarization beam splitter prism 8 are incident on the central polarization beam splitter prism 1 parallel to each other backward. Among them, the first laser is transmitted and emitted by the central polarization beam splitter prism 1. The transmitted first laser is perpendicularly incident on the first quarter-wave plate 3. After being deflected by 45° by the first quarter-wave plate 3, it is perpendicularly incident on the first mirror 4 and is reflected and emitted by the first mirror 4. The reflected first laser is deflected by 45° again by the first quarter-wave plate 3 and then is incident on the central polarization beam splitter prism 1. After being reflected and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the first calibration of the position. The second laser is reflected and emitted by the central polarization beam splitter prism 1. The reflected second laser is perpendicularly incident on the second quarter-wave plate 5 and is deflected by 45° by the second quarter-wave plate 5. Then it is perpendicularly incident on the second mirror 6 and is reflected and emitted by the second mirror 6. The reflected second laser is deflected by 45° again by the second quarter-wave plate 5 and then is incident on the central polarization beam splitter prism 1. After being transmitted and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the second calibration of the position.

[0059] In this way, the first laser and the second laser with mutually perpendicular incident directions can also be used to measure the three-dimensional angle of the target object.

[0060] Embodiment 3 of a three-dimensional angle sensor test device provided by the present invention:

[0061] As Figure 5 shown, compared with the above-mentioned Embodiment 2, a reflection prism 7 is added in Embodiment 3. The first laser is incident on the reflection prism 7 and is reflected and emitted by the reflection prism 7. The reflected first laser and the second laser are incident on the first polarization beam splitter prism 8 at mutually perpendicular angles. Among them, the first laser is transmitted and emitted by the central polarization beam splitter prism 1. The transmitted first laser is perpendicularly incident on the first quarter-wave plate 3. After being deflected by 45° by the first quarter-wave plate 3, it is perpendicularly incident on the first mirror 4 and is reflected and emitted by the first mirror 4. The reflected first laser is deflected by 45° again by the first quarter-wave plate 3 and then is incident on the central polarization beam splitter prism 1. After being reflected and emitted by the central polarization beam splitter prism 1, it is incident on the detector 2 to complete the first calibration of the position.

[0062] The second laser is reflected and emitted by the central polarization beam splitting prism 1. The reflected and emitted second laser is vertically incident on the second quarter-wave plate 5. After being deflected by 45° by the second quarter-wave plate 5, it is vertically incident on the second mirror 6 and is reflected and emitted by the second mirror 6. After the reflected and emitted second laser is deflected by 45° again by the second quarter-wave plate 5, it is incident on the central polarization beam splitting prism 1. After being transmitted and emitted by the central polarization beam splitting prism 1, it is incident on the detector 2 to complete the secondary calibration of the position.

[0063] Embodiment 3 provides a supplement to the application scenario of Embodiment 2. In this scenario, the parallel first laser and second laser can realize the three-dimensional angle measurement of the target object. Only by adding one more procedure, first let the first laser be incident on the reflection prism 7. The first laser after being reflected and emitted by the reflection prism 7 is then incident on the first polarization beam splitting prism 8 at a perpendicular angle to the second laser, and then as described in Embodiment 2, the three-dimensional angle measurement of the target object is realized through a detector 2.

[0064] Embodiment 4 of a three-dimensional angle sensor test device provided by the present invention:

[0065] Compared with the above Embodiments 1-3, the first laser and the second laser are vertically incident on the central polarization beam splitting prism 1. On the optical path where the first laser is transmitted backward, the positions of the first quarter-wave plate 3 and the first mirror 4 are convenient to arrange. It only needs the mirror surfaces of the first quarter-wave plate 3 and the first mirror 4 to be parallel to the lower end face of the central polarization beam splitting prism 1. Similarly, on the optical path where the second laser is reflected and emitted to the left, the positions of the second quarter-wave plate 5 and the second mirror 6 are convenient to arrange. It only needs the mirror surfaces of the second quarter-wave plate 5 and the second mirror 6 to be parallel to the left end face of the central polarization beam splitting prism 1, which provides convenience in specific installation.

[0066] Embodiment 5 of a three-dimensional angle sensor test device provided by the present invention:

[0067] Embodiment 5 is a further improvement based on Embodiment 3. On the basis of this solution, the centers of the reflection prism 7, the first polarization beam splitting prism 8, the central polarization beam splitting prism 1, the first quarter-wave plate 3, and the first mirror 4 are located on the same vertical line.

[0068] Through this solution, on the one hand, it provides a basis for the installation and positioning of the reflection prism 7, the first polarization beam splitter prism 8, the central polarization beam splitter prism 1, the first quarter-wave plate 3, and the first mirror 4; on the other hand, when the first laser is incident parallel to the center of the reflection prism 7, when the first laser after reflection and emission passes through the first polarization beam splitter prism 8, the central polarization beam splitter prism 1, and the first quarter-wave plate 3 in sequence, it is on the same vertical line. When it is reflected and emitted by the first mirror 4, and the reflected and emitted first laser passes through the first quarter-wave plate 3 and the central polarization beam splitter prism 1 again, its optical path is on the same vertical line, the optical path is shorter, and the space required for the overall device is smaller.

[0069] Example 6 of a three-dimensional angle sensor test device provided by the present invention:

[0070] Example 6 is a further improvement based on Example 5. On the basis of this solution, the centers of the second mirror 6, the second quarter-wave plate 5, the central polarization beam splitter prism 1, and the detector 2 are on the same horizontal line. When the second laser reflected and emitted by the central polarization beam splitter prism 1 passes through the second quarter-wave plate 5 and the second mirror 6, its optical path is on the same horizontal line. When the second laser reflected and emitted by the second mirror 6 passes through the second quarter-wave plate 5, the central polarization beam splitter prism 1, and the detector 2 again, its optical path is on the same horizontal line.

[0071] In this way, the optical paths of the first laser and the second laser are relatively short. Through the above solution, the overall device can be made more compact.

[0072] Example 7 of a three-dimensional angle sensor test device provided by the present invention:

[0073] As Figure 6 、 Figure 7 、 Figure 10 shown, compared with the above Examples 1-3, a cemented lens 10 is added in Example 7, and a cemented lens 10 is provided on the optical path between the central polarization beam splitter prism 1 and the detector 2. The beam transmitted by the central polarization beam splitter prism 1 is converged to the detector 2 through the cemented lens 10 to form an image of the object.

[0074] Example 8 of a three-dimensional angle sensor test device provided by the present invention:

[0075] As Figure 8 、 Figure 9 、 Figure 10 shown, compared with the above Examples 1-3, an L-shaped bracket 9 is added in Example 8, and the first mirror 4 and the second mirror 6 are arranged on both sides of the L-shaped bracket 9 with an inner angle of 90°. Through the setting of the L-shaped bracket 9, it is convenient to vertically install the first mirror 4 and the second mirror 6.

[0076] Example 9 of a three-dimensional angle sensor testing device provided by the present invention:

[0077] Compared with the above-mentioned Embodiments 1-3, a data acquisition card is added in Embodiment 9. A data acquisition card is arranged at the rear end of the detector 2, and the data acquisition card is used to collect and store the electrical signal changes generated by the detector 2.

[0078] Example 10 of a three-dimensional angle sensor testing device provided by the present invention:

[0079] Compared with the above-mentioned Embodiments 1-3, the first laser generator 11 and the second laser generator 12 in Embodiment 10 are modulation lasers. As Figure 11 shown, in this embodiment, the first laser generator 11 and the second laser generator 12 respectively generate the first laser and the second laser. The first laser generator 11 and the second laser generator 12 are respectively triggered to work at the rising edge and the falling edge of a 1KHz modulation signal. The detector 2 collects the test signals of the first laser generator 11 and the second laser generator 12 at the rising edge and the falling edge respectively according to the synchronous modulation signal.

Claims

1. A three-dimensional angle sensor testing device, characterized in that: It includes a central polarization beam splitting prism, a first laser generator that emits a first laser to the central polarization beam splitting prism, and a second laser generator that emits a second laser. The first laser generator and the second laser generator work intermittently and alternately, so that the first laser and the second laser are incident on the central polarization beam splitting prism parallel to each other backward. When the two lasers are incident on the central polarization beam splitting prism, the phases are staggered by 90°, so that the first laser is transmitted and emitted backward, and the second laser is reflected and emitted to the left. And the transmission optical path of the first laser is perpendicular to the reflection optical path of the second laser. A first quarter-wave plate and a first mirror are vertically arranged along the emission direction on the transmission optical path of the first laser. A second quarter-wave plate and a second mirror are vertically arranged along the emission direction on the reflection optical path of the second laser. A detector for receiving the two lasers is arranged on the right side of the central polarization beam splitting prism. The two mutually perpendicular first mirror and second mirror serve as the attitude transfer devices of the measured object. Among them, the first laser is transmitted and emitted by the central polarization beam splitting prism. The transmitted first laser is vertically incident on the first quarter-wave plate. After being deflected by 45° by the first quarter-wave plate, it is vertically incident on the first mirror and is reflected and emitted by the first mirror. The reflected first laser is deflected by 45° again by the first quarter-wave plate and then is incident on the central polarization beam splitting prism. After being reflected and emitted by the central polarization beam splitting prism, it is incident on the detector to complete the first calibration of the position. The second laser is reflected and emitted by the central polarization beam splitting prism. The reflected second laser is vertically incident on the second quarter-wave plate and is deflected by 45° by the second quarter-wave plate. Then it is vertically incident on the second mirror and is reflected and emitted by the second mirror. The reflected second laser is deflected by 45° again by the second quarter-wave plate and then is incident on the central polarization beam splitting prism. After being transmitted and emitted by the central polarization beam splitting prism, it is incident on the detector to complete the second calibration of the position.

2. The three-dimensional angle sensor testing device according to claim 1, wherein: It also includes a first polarization beam splitting prism. The first laser and the second laser are incident on the first polarization beam splitting prism at mutually perpendicular angles. The first laser / second laser after being transmitted / reflected by the first polarization beam splitting prism respectively are incident on the central polarization beam splitting prism parallel to each other backward.

3. The three-dimensional angle sensor testing device according to claim 2, characterized in that: It also includes a reflecting prism. The first laser is incident on the reflecting prism and is reflected and emitted by the reflecting prism. The reflected first laser and the second laser are incident on the first polarization beam splitting prism at mutually perpendicular angles.

4. A three-dimensional angle sensor testing device according to any one of claims 1-3, characterized in that: The first laser and the second laser are vertically incident on the central polarization beam splitting prism.

5. A three-dimensional angle sensor testing device according to claim 3, characterized in that: The centers of the reflecting prism, the first polarization beam splitting prism, the central polarization beam splitting prism, the first quarter-wave plate, and the first mirror are on the same vertical line.

6. The three-dimensional angle sensor testing device according to claim 5, wherein: The centers of the second mirror, the second quarter-wave plate, the central polarization beam splitting prism, and the detector are on the same horizontal line.

7. A three-dimensional angle sensor testing device according to any one of claims 1-3, characterized in that: A cemented lens is arranged on the optical path between the central polarization beam splitting prism and the detector.

8. A three-dimensional angle sensor testing device according to any one of claims 1 to 3, characterized in that: The first mirror and the second mirror are arranged on both sides of an L-shaped bracket with an inner angle of 90°.

9. A three-dimensional angle sensor testing device according to any one of claims 1-3, characterized in that: A acquisition card is arranged at the back end of the detector. The acquisition card is used to acquire and store the change of the electrical signal generated by the detector.

10. A three-dimensional angle sensor testing device according to any one of claims 1-3, characterized in that: The first laser generator and the second laser generator are modulated lasers.

Images