Physical quantity sensor and inertial measurement device

Abstract

The invention relates to a physical quantity sensor and an inertial measurement device. Provided is a physical quantity sensor or the like capable of stably functioning a stopper. The physical quantity sensor detects a physical quantity in a Z-axis direction along a Z-axis when three mutually orthogonal axes are an X-axis, a Y-axis, and a Z-axis, and includes: a fixed portion fixed to a substrate; the outer frame body is connected with the fixing part; one end of the supporting beam is connected with the outer frame body, and the supporting beam extends in the X-axis direction along the X axis; a fixed electrode part fixed to the substrate and including a fixed electrode extending in a Y-axis direction along the Y-axis; and a movable body including a movable electrode portion including a movable electrode facing the fixed electrode in the X-axis direction, the movable body being connected to the other end of the support beam and disposed on the inside of the outer frame, the movable electrode portion including a movable electrode facing the fixed electrode in the X-axis direction, the outer frame including a stopper portion, and the movable electrode portion including a movable electrode facing the movable electrode in the X-axis direction. The stopper portion faces the movable body in a plane direction including the X axis and the Y axis.

Description

Technical Field

[0001] The present invention relates to physical quantity sensors, inertial measurement devices, and the like. Background Art

[0002] The following physical quantity sensors are known: A movable body is made to perform a seesaw-like swing, the gap between a movable electrode portion included in the movable body and a fixed electrode portion is changed, and physical quantities such as acceleration are detected based on the change amount of the electrostatic capacitance. Patent Document 1 discloses a method of providing a stopper for restricting the movable range of a movable body on a substrate.

[0003] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2015-017886

[0004] Since the physical quantity sensor is constituted by mounting various materials having different coefficients of thermal expansion, warpage occurs on the substrate. Therefore, when the stopper is provided on the substrate, the positional relationship between the actually mounted stopper and the movable body may be different from the designed positional relationship, and thus improvement in the stability of the stopper function is required. Summary of the Invention

[0005] A physical quantity sensor according to one aspect of the present disclosure detects a physical quantity in a third direction when three mutually orthogonal directions are set as a first direction, a second direction, and a third direction, and includes: a fixing portion fixed to a substrate; an outer frame body connected to the fixing portion; a support beam having one end connected to the outer frame body and extending in the first direction; a movable body connected to the other end of the support beam and disposed inside the outer frame body; and a fixed electrode portion provided on the substrate and disposed in the second direction of the support beam and having a second fixed electrode, the movable body having a movable electrode portion, the movable electrode portion having a movable electrode opposed to the fixed electrode, the outer frame body having a stopper portion, the stopper portion being opposed to the movable body in a plane direction along the first direction and the second direction.

[0006] An inertial measurement device according to another aspect of the present disclosure includes the above-described physical quantity sensor and a control portion that controls based on a detection signal output from the physical quantity sensor. Brief Description of the Drawings

[0007] Figure 1 It is a plan view illustrating an example of a physical quantity sensor.

[0008] Figure 2 It is a plan view illustrating an example of a first detection unit.

[0009] Figure 3 It is a diagram illustrating an example of the relationship between the operation of a first movable electrode and a first fixed electrode.

[0010] Figure 4 It is a top view showing an example of the second detection unit.

[0011] Figure 5 It is a diagram showing an example of the relationship between the operation of the second movable electrode and the second fixed electrode.

[0012] Figure 6 It is a cross-sectional view showing an example of the physical quantity sensor.

[0013] Figure 7 It is a diagram showing an example of the operation mode of the physical quantity sensor.

[0014] Figure 8 It is a top view showing another example of the physical quantity sensor.

[0015] Figure 9 It is a top view showing another example of the physical quantity sensor.

[0016] Figure 10 It is a top view showing another example of the physical quantity sensor.

[0017] Figure 11 It is a top view showing another example of the physical quantity sensor.

[0018] Figure 12 It is a top view showing another example of the physical quantity sensor.

[0019] Figure 13 It is a top view showing another example of the physical quantity sensor.

[0020] Figure 14 It is a top view showing another example of the physical quantity sensor.

[0021] Figure 15 It is a top view showing another example of the physical quantity sensor.

[0022] Figure 16 It is a diagram showing another example of the relationship between the operation of the second movable electrode and the second fixed electrode.

[0023] Figure 17 It is an exploded perspective view showing the schematic configuration of an inertial measurement device including a physical quantity sensor.

[0024] Figure 18 It is a perspective view of the circuit board of the physical quantity sensor. DETAILED DESCRIPTION

[0025] Hereinafter, preferred embodiments of the present disclosure will be described in detail. In addition, the embodiments described below do not unduly limit the content recited in the claims, and not all of the configurations described in the embodiments are essential constituent elements.

[0026] Use Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 The configuration example of the physical quantity sensor 1 of the present embodiment will be described. The physical quantity sensor 1 of the present embodiment includes a substrate 2, an outer frame 10 having a stopper portion ST, a fixing portion 12, a support beam 20, a fixed electrode portion 30, and a movable body MB having a movable electrode portion 40. Figure 1 An example of the physical quantity sensor 1 of the present embodiment is shown in a top view observed in a direction orthogonal to the substrate 2. In addition, in Figure 1 , the mutually orthogonal directions are set as the first direction DR1, the second direction DR2, and the third direction DR3. The first direction DR1, the second direction DR2, and the third direction DR3 respectively correspond to, for example, the +X-axis direction, the +Y-axis direction, and the +Z-axis direction. The physical quantity sensor 1 of the present embodiment is, for example, an inertial sensor as a MEMS (Micro Electro Mechanical Systems) device, and detects a physical quantity in the third direction DR3. In addition, "orthogonal" includes not only the case of intersecting at 90°, but also the case of intersecting at an angle slightly inclined from 90°. In addition, in the present embodiment, the direction opposite to the second direction DR2 is set as the fourth direction DR4. That is, in Figure 1 , the fourth direction DR4 is, for example, the -Y-axis direction. In addition, the direction opposite to the third direction DR3 is set as the fifth direction DR5. For example, although not shown in Figure 1 , the fifth direction DR5 is, for example, the -Z-axis direction. In addition, hereinafter, when it is not necessary to strictly distinguish between the + direction and the - direction, sometimes the "direction along the X-axis" is represented by the "direction along the first direction DR1", the "direction along the Y-axis" is represented by the "direction along the second direction DR2", and the "direction along the Z-axis" is represented by the "direction along the third direction DR3".

[0027] For example, when the XY plane, which is the plane along the first direction DR1 and the second direction DR2, is set as the horizontal plane, since the third direction DR3 becomes the vertical direction, for example, the physical quantity sensor 1 of the present embodiment can be applied as an acceleration sensor for detecting the acceleration in the vertical direction. However, the correspondence relationship between the first direction DR1, the second direction DR2, and the third direction DR3 and the XYZ axes is only an example and is not limited to the above. The following description does not prevent, for example, applying the present embodiment with the first direction DR1 or the second direction DR2 as the Z-axis, and it is not necessary to make any of the first direction DR1, the second direction DR2, and the third direction DR3 along the vertical direction.

[0028] In addition, the following mainly describes the case where the physical quantity detected by the physical quantity sensor 1 is acceleration. However, the physical quantity is not limited to acceleration, and may also be other physical quantities such as velocity, pressure, displacement, posture, angular velocity, or gravity. The physical quantity sensor 1 may also be used as a pressure sensor or a MEMS switch, etc. In addition, in any of the drawings of this embodiment, the sizes of the components, the intervals between the components, etc. are schematic illustrations for ease of explanation, and do not represent the actual sizes, intervals, etc. In addition, in the physical quantity sensor 1 of this embodiment, some constituent elements such as electrodes and wirings are appropriately omitted in the illustration.

[0029] The substrate 2 is, for example, a silicon substrate made of semiconductor silicon or a glass substrate made of a glass material such as borosilicate glass. However, the constituent material of the substrate 2 is not particularly limited, and a quartz substrate or an SOI (Silicon On Insulator) substrate, etc. may also be used.

[0030] The fixing portion 12 is fixed to the substrate 2 and serves as an anchor point in the seesaw-like movement of the movable body MB. In addition, the seesaw-like movement may also be referred to as a swinging movement. Specifically, the fixing portion 12 is connected to the outer frame 10, the outer frame 10 is connected to one end of the support beam 20, and the other end of the support beam 20 is connected to the movable body MB. Thus, the external force applied to the physical quantity sensor 1 induces the seesaw-like movement of the movable body MB via the substrate 2, the fixing portion 12, the outer frame 10, and the support beam 20. In addition, strictly speaking, the outer frame 10 and the fixed electrode portion 30 may also vibrate due to the external force applied to the physical quantity sensor 1, etc., but the structures of the outer frame 10, the fixed electrode portion 30, the support beam 20, etc. are appropriately adjusted so that the degree thereof does not affect the detection of the seesaw-like movement of the movable body MB.

[0031] In addition, in this embodiment, for example, "the fixing portion 12 is fixed to the substrate 2" means that the components of the fixing portion 12 and the substrate 2 that are originally different are fixed using a specified material and a specified method, but it is not limited thereto. For example, with respect to a single integrally formed component, for ease of explanation, it includes the case where the part corresponding to the fixing portion 12 and the part corresponding to the substrate 2 are separately named. Similarly, for example, "the other end of the support beam 20 is connected to the movable body MB" includes the case where the support beam 20 is integrally formed as a part of the movable body MB, but the movable body MB and the support beam 20 are separately described for convenience. The same applies to "fixing", "connecting", "performing fixing", and "performing connecting" in the following description.

[0032] In Figure 1In the top view, the support beam 20 is arranged such that the first direction DR1 is the long side direction, and flexes with respect to the seesaw-like movement of the movable body MB. That is, the support beam 20 twists on the X-axis, thereby generating a restoring force during the seesaw-like movement of the movable body MB. In this way, the support beam 20 has the property of a torsion spring that twists about the first direction DR1 as the rotation axis. Thereby, the movable body MB realizes a swinging movement about the first direction DR1 as the rotation axis. In addition, in Figure 1 the example, it is configured such that the rotational torque of the movable body MB located on the second direction DR2 side relative to the support beam 20 is greater than the rotational torque of the movable body MB located on the fourth direction DR4 side relative to the support beam 20.

[0033] In addition, the physical quantity sensor 1 of the present embodiment may be composed of a single support beam 20 or multiple support beams 20. In Figure 1 as a more specific configuration example, the first support beam 21 and the second support beam 22 as the support beam 20 are shown, but either one can be omitted to form the physical quantity sensor 1.

[0034] The movable body MB includes a movable electrode portion 40. The movable electrode portion 40 has a movable electrode 46 opposed to the fixed electrode 36 of the fixed electrode portion 30. That is, the movable electrode portion 40 serves as a probe electrode that can move integrally with the movable body MB. In addition, the movable electrode portion 40 of the present embodiment also has the meaning of the base portion of the movable electrode 46. Therefore, for example, it can also be said that "the movable electrode 46 extends from the movable electrode portion 40".

[0035] In the physical quantity sensor 1 of the present embodiment, a detection unit composed of a fixed electrode portion 30 having a fixed electrode 36 and a movable electrode portion 40 having a movable electrode 46 detects physical quantities such as acceleration. There can be multiple types of detection units. In the present embodiment, a physical quantity sensor 1 composed of two detection units, namely the first detection unit Z1 and the second detection unit Z2, is illustrated as an example, but the types of detection units are not limited to two. Hereinafter, for the convenience of explanation, the fixed electrode portion 30 included in the first detection unit Z1 is sometimes separately referred to as the first fixed electrode portion 30-1, and the fixed electrode portion 30 included in the second detection unit Z2 is referred to as the second fixed electrode portion 30-2. The same applies to the fixed electrode fixing portion 32, the fixed base portion 34, the fixed electrode 36, the movable electrode portion 40, and the movable electrode 46 described later.

[0036] In addition, in Figure 1 and Figure 2In the example, the first fixed electrode 36-1 of the first fixed electrode portion 30-1 and the first movable electrode 46-1 of the first movable electrode portion 40-1 have a predetermined thickness in the second direction DR2 and the third direction DR3. In addition, the thickness here includes not only the physical thickness measured by SEM (Scanning Electron Microscope) or the like, but also the film thickness estimated based on optical characteristics such as the refractive index of the thin film. Thus, the first fixed electrode 36-1 and the first movable electrode 46-1 face each other with a predetermined area, and a predetermined physical quantity corresponding to the predetermined area can be detected. The predetermined physical quantity is, for example, capacitance or the like. Thus, the first fixed electrode 36-1 and the first movable electrode 46-1, for example, serve as the electrodes on the P side of the probe. Similarly, in Figure 1 and Figure 4 In the example, the second fixed electrode 36-2 and the second movable electrode 46-2 also have a predetermined thickness in the second direction DR2 and the third direction DR3. Therefore, a predetermined physical quantity corresponding to the area facing the second fixed electrode 36-2 and the second movable electrode 46-2 can be detected. Thus, the second fixed electrode 36-2 and the second movable electrode 46-2, for example, serve as the electrodes on the N side of the probe. Moreover, at a predetermined timing, the sum of the predetermined physical quantity corresponding to the facing area of the first fixed electrode 36-1 and the first movable electrode 46-1 and the predetermined physical quantity corresponding to the facing area of the second fixed electrode 36-2 and the second movable electrode 46-2 becomes the predetermined physical quantity detected by the physical quantity sensor 1 at the predetermined timing.

[0037] Examples of the differences between the first detection unit Z1 and the second detection unit Z2 include, for example, that the relationship between the thicknesses of the first fixed electrode 36-1 and the first movable electrode 46-1 in the third direction DR3 in the first detection unit Z1 is different from the relationship between the thicknesses of the second fixed electrode 36-2 and the second movable electrode 46-2 in the third direction DR3 in the second detection unit Z2. In addition, for example, the relationship between the change in the facing area between the first fixed electrode 36-1 and the first movable electrode 46-1 included in the first detection unit Z1 is different from the relationship between the change in the facing area between the second fixed electrode 36-2 and the second movable electrode 46-2 included in the second detection unit Z2. Details will be described later in Figure 3 、 Figure 5 will be described.

[0038] In addition, hereinafter, the thickness of the first fixed electrode 36-1 in the third direction DR3 will be simply referred to as the thickness of the first fixed electrode 36-1. The same applies to the first movable electrode 46-1, the second fixed electrode 36-2, and the second movable electrode 46-2. In addition, in order to visually understand the physical quantity sensor 1 more easily, a horizontal line is marked on the first fixed electrode 36-1 and the first movable electrode 46-1, and a diagonal line is marked on the second fixed electrode 36-2 and the second movable electrode 46-2.

[0039] Figure 2 This is a diagram for more detailed explanation of the first detection unit Z1. As Figure 2 shown, the first fixed electrode portion 30-1 is fixed to the substrate 2 by the first fixed electrode fixing portion 32-1. Moreover, the first fixed electrode portion 30-1 has a first fixed electrode 36-1. The first fixed electrode 36-1 extends in the Y-axis direction. One end of the first fixed base portion 34-1 is connected to the first fixed electrode fixing portion 32-1 and extends from the first fixed electrode fixing portion 32-1 in the first direction DR1. By configuring in this way, the first fixed electrode portion 30-1, which is a comb-shaped fixed electrode group, can be stably configured.

[0040] In addition, in Figure 1 , Figure 2 of the first detection unit Z1, it is illustrated that the first fixed electrode 36-1 extends from the first fixed base portion 34-1 of the first fixed electrode portion 30-1 in the fourth direction DR4, and the first movable electrode 46-1 extends from the movable electrode portion 40 in the second direction DR2. However, the configuration example of the first detection unit Z1 is not limited to this. For example, although not shown, the physical quantity sensor 1 can also be configured such that the first fixed electrode 36-1 extends from the first fixed base portion 34-1 in the second direction DR2, and the first movable electrode 46-1 extends from the movable electrode portion 40 in the fourth direction DR4. The same applies to the second detection unit Z2 described later in Figure 4 . That is, in the physical quantity sensor 1 of the present embodiment, the fixed electrode 36 extends from the fixed base portion 34 in the second direction DR2, and the movable electrode 46 extends from the movable electrode portion 40 in the second direction DR2.

[0041] The first fixed electrode portion 30-1 is a comb-shaped fixed electrode group in which a plurality of first fixed electrodes 36-1 are arranged in a comb shape in a plan view in the third direction DR3, and the first movable electrode portion 40-1 is a comb-shaped movable electrode group in which a plurality of first movable electrodes 46-1 are arranged in a comb shape in a plan view in the third direction DR3. Moreover, in the first detection unit Z1, each of the first fixed electrodes 36-1 of the comb-shaped fixed electrode group of the first fixed electrode portion 30-1 and each of the first movable electrodes 46-1 of the comb-shaped movable electrode group of the first movable electrode portion 40-1 are arranged so as to face each other alternately in the first direction DR1. Thereby, the damping effect of the squeeze film of the first fixed electrode 36-1 and the first movable electrode 46-1 on the first direction DR1 can be imparted to the physical quantity sensor 1. Thereby, the vibration resistance and impact resistance of the physical quantity sensor 1 can be improved. The same effect is also produced in the second detection unit Z2 described later.

[0042] In addition, in the present embodiment, the number of teeth of the comb-shaped fixed electrode 36 included in the detection unit and the number of teeth of the comb-shaped movable electrode 46 are not particularly limited as long as they are within a range not conflicting with the described content. For example, in Figure 2 , the number of teeth of the first fixed electrode 36-1 and the first movable electrode 46-1 is illustrated as three, but the number of teeth of the first fixed electrode 36-1 and the first movable electrode 46-1 is not limited to three. In addition, for the sake of convenience of explanation, it is not limited to accurately illustrating the relationship between the teeth of the first fixed electrode 36-1 and the teeth of the first movable electrode 46-1 in all the drawings, but the physical quantity sensor 1 of the present embodiment is as Figure 2 shown and is configured such that the teeth of the first fixed electrode 36-1 are necessarily adjacent to both sides of the teeth of the first movable electrode 46-1. Similarly, as Figure 4 shown, the physical quantity sensor 1 of the present embodiment is configured such that the teeth of the second fixed electrode 36-2 are necessarily adjacent to both sides of the teeth of the second movable electrode 46-2. In addition, for example, in Figure 11 described later, in addition to the relationship between the teeth of the above-mentioned fixed electrode 36 and the movable electrode 46, as long as the physical quantity sensor 1 is line-symmetrical with respect to E2, the number of teeth of the fixed electrode 36 and the movable electrode 46 is not limited to Figure 11 shown and can be appropriately changed.

[0043] Figure 3 is a diagram illustrating an example of the change in the positional relationship between the first fixed electrode 36-1 and the first movable electrode 46-1 in the third direction DR3 caused by the seesaw-like movement of the movable body MB. In addition, in Figure 3 , the fifth direction DR5 side can also be referred to as the back side. In Figure 5The same applies to others. For example, set the timing in the initial state as the first timing, set the timing in the state where an acceleration in the third direction DR3 is generated in the physical quantity sensor 1 as the second timing, and set the timing in the state where an acceleration in the fifth direction DR5 is generated in the physical quantity sensor 1 as the third timing. The initial state here refers to a stationary state where no acceleration is generated except for the gravitational acceleration. As Figure 3 As shown by A0 and A1 of, in the initial state, the positions of the ends of the first fixed electrode 36-1 and the first movable electrode 46-1 in the fifth direction DR5 are the same. In addition, the thickness of the first movable electrode 46-1 in the third direction DR3 is greater than the thickness of the first fixed electrode 36-1 in the third direction DR3. Therefore, the position of the end of the first movable electrode 46-1 in the third direction DR3 in the initial state is located on the side closer to the third direction DR3 than the position of the end of the first fixed electrode 36-1 in the third direction DR3. In addition, Figure 3 The thicknesses of the first fixed electrode 36-1 and the first movable electrode 46-1 shown in are only relative relationships and do not limit the specific sizes. The same applies to Figure 5 、 Figure 16 described later.

[0044] Moreover, for example, when changing from the first timing to the second timing, according to the aforementioned relationship of the rotational torque, as Figure 3 shown by A2 of, the first movable electrode 46-1 is displaced in the direction opposite to the direction of the acceleration generated by the physical quantity sensor 1, that is, toward the fifth direction DR5 side. Similarly, for example, when changing from the first timing to the third timing, as Figure 3 shown by A3 of, the first movable electrode 46-1 is displaced toward the third direction DR3 side. Comparing Figure 3 B1 and B2 of shows that when an acceleration in the third direction DR3 is applied from the initial state, the opposed area between the first fixed electrode 36-1 and the first movable electrode 46-1 remains unchanged. On the other hand, comparing Figure 3 B1 and B3 of shows that when an acceleration in the fifth direction DR5 is applied from the initial state, the opposed area between the first fixed electrode 36-1 and the first movable electrode 46-1 decreases. That is, when an acceleration toward the fifth direction DR5 is generated, the first detection unit Z1 can detect the physical quantity in the fifth direction DR5 by detecting the change in the physical quantity caused by the decrease in the opposed area between the first fixed electrode 36-1 and the first movable electrode 46-1.

[0045] Figure 4 is a diagram for explaining the second detection unit Z2 in more detail. As Figure 4As shown, the second fixed electrode portion 30-2 is fixed to the substrate 2 by the second fixed electrode fixing portion 32-2. Moreover, the second fixed electrode portion 30-2 has a second fixed electrode 36-2. The second fixed electrode 36-2 extends, for example, in the Y-axis direction. More specifically, for example, the second fixed electrode 36-2 extends from a second fixed base portion 34-2 included in the second fixed electrode portion 30-2 in a fourth direction DR4. One end of the second fixed base portion 34-2 is connected to the second fixed electrode fixing portion 32-2 and extends from the second fixed electrode fixing portion 32-2 in a first direction DR1. In addition, the second fixed electrode portion 30-2 forms a comb-shaped fixed electrode group in which a plurality of second fixed electrodes 36-2 are arranged in a comb shape in a plan view in a third direction DR3, and the second movable electrode portion 40-2 forms a comb-shaped movable electrode group in which a plurality of second movable electrodes 46-2 are arranged in a comb shape in a plan view in the third direction DR3. Moreover, in the second detection unit Z2, each second fixed electrode 36-2 of the comb-shaped fixed electrode group of the second fixed electrode portion 30-2 and each second movable electrode 46-2 of the comb-shaped movable electrode group of the second movable electrode portion 40-2 are arranged so as to face each other alternately.

[0046] Figure 5 FIG. is an example for explaining a change in the positional relationship between the second fixed electrode 36-2 and the second movable electrode 46-2 in the third direction DR3 caused by the seesaw-like movement of the movable body MB. As Figure 5 shown in A10 and A11, in the initial state, the positions of the ends of the second fixed electrode 36-2 and the second movable electrode 46-2 in a fifth direction DR5 coincide. In addition, the thickness of the second fixed electrode 36-2 in the third direction DR3 is greater than the thickness of the second movable electrode 46-2 in the third direction DR3. Therefore, the position of the end of the second fixed electrode 36-2 in the third direction DR3 is located on the side closer to the third direction DR3 than the position of the end of the second movable electrode 46-2 in the third direction DR3.

[0047] Moreover, for example, when changing from the first timing to the second timing, according to the aforementioned relationship of the rotational torque, as Figure 5 shown in A12, the second movable electrode 46-2 is displaced in a direction opposite to the direction of the acceleration generated by the physical quantity sensor 1, that is, in the fifth direction DR5 side. Similarly, for example, when changing from the first timing to the third timing, as Figure 5 shown in A13, the second movable electrode 46-2 is displaced in the third direction DR3 side. Comparing Figure 5 B11 and B12, it can be seen that when an acceleration in the third direction DR3 is applied from the initial state, the facing area between the second fixed electrode 36-2 and the second movable electrode 46-2 decreases. On the other hand, comparing Figure 5From B11 and B13, it can be seen that when an acceleration in the fifth direction DR5 is applied from the initial state, the facing area between the second fixed electrode 36-2 and the second movable electrode 46-2 remains unchanged. That is, when an acceleration in the third direction DR3 is generated, the second detection unit Z2 can detect the physical quantity in the third direction DR3 by detecting the change in the physical quantity caused by the reduction in the facing area between the second fixed electrode 36-2 and the second movable electrode 46-2. Thus, when an acceleration in the Z-axis direction is generated, the relationship that the electrostatic capacitance of one of the first detection unit Z1 and the second detection unit Z2 changes while the electrostatic capacitance of the other does not change holds in both the +Z direction and the -Z direction.

[0048] The outer frame 10 is connected to the aforementioned fixing portion 12 and has a stopper portion ST. In addition, as will be described later, there may be a plurality of stopper portions ST. Figure 1 The first stopper portion ST1, the second stopper portion ST2, the third stopper portion ST3, and the fourth stopper portion ST4 are illustrated in the figure. However, for example, it may be configured that the outer frame 10 has the first stopper portion ST1 and the second stopper portion ST2, and for example, it may also be configured that the outer frame 10 has only the first stopper portion ST1.

[0049] In addition, the outer frame 10 is connected to one end of the connected support beam 20. Specifically, for example, in Figure 1 the outer frame 10 is connected to one end of the first support beam 21 and is also connected to one end of the second support beam 22. For example, when the physical quantity sensor 1 is a MEMS sensor, the outer frame 10, the movable body MB, the support beam 20, and the stopper portion ST are integrally formed by the same manufacturing process. Therefore, as Figure 6 shown, when observing the physical quantity sensor 1 in a cross-section along the first direction DR1 from the Figure 1 right side of Figure 1 only the fixing portion 12 and the fixed electrode fixing portion 32 can be visually recognized between the substrate 2 and the outer frame 10. In other words, in the physical quantity sensor 1 of the present embodiment, the stopper portion ST is arranged at a predetermined interval from the substrate 2, which is different from the existing method.

[0050] In addition, since the outer frame 10 and the support beam 20 are integrally formed, it can also be considered that Figure 1 the support beam 20 extends from the outer frame 10 along the first direction DR1.

[0051] In addition, Figure 6 is a diagram for explaining the relationship between the outer frame 10, the stopper portion ST, and the substrate 2, so the illustration of other components is appropriately omitted. In addition, although from Figure 6Although it cannot be visually recognized, it is also possible that the end on the DR5 side of the outer frame 10, the end on the DR5 side of the fixed electrode portion 30, the end on the DR5 side of the movable electrode portion 40, and the end on the DR5 side of the movable body MB are all coplanar. By configuring in this way, the manufacturing process of the physical quantity sensor 1 can be simplified.

[0052] In addition, the outer frame 10 is configured to surround the movable body MB. Here, surrounding the movable body MB means, for example, surrounding the entire circumference of the movable body MB and forming a closed loop in the Figure 1 top view. By configuring in this way, the degree of freedom in the arrangement of the stopper portion ST can be improved. In addition, the outer frame 10 of the present embodiment is not limited to this, and as long as the stopper portion ST functions stably, the outer frame 10 may also be configured to be partially open in the Figure 1 top view, which will be described in detail later in Figure 10

[0053] For example, as an example in which the outer frame 10 surrounds the movable body MB and the outer frame 10 is connected to the movable body MB via the first support beam 21 and the second support beam 22 that are the support beams 20, the configuration example shown in Figure 1 can be considered. Specifically, the outer frame 10 includes a first portion 10-1 along the first side and a second portion 10-2 along the second side opposite to the first side. One end of the first support beam 21 is connected to the first portion 10-1 of the outer frame 10, and the other end is connected to the movable body MB. In addition, one end of the second support beam 22 is connected to the second portion 10-2 of the outer frame 10, and the other end is connected to the movable body MB. By configuring in this way, the first support beam 21 and the second support beam 22 can be arranged in a manner along the Figure 1 rotation axis shown by E1 in

[0054] . Thereby, the movable body MB can be connected to the outer frame 10, and the movable body MB can perform a seesaw-like operation stably.

[0055] ​The stopper ST restricts the operation modes that are not required in the operation mode of the physical quantity sensor 1. Figure 7 Examples of the operation modes of the physical quantity sensor 1 are conceptually shown. As the operation modes of the physical quantity sensor 1, for example, there can be cited Figure 7 the operation mode shown by M10, the operation mode shown by M20, the operation mode shown by M30, etc. In addition, Figure 7 The fixed electrode portion 30 and the movable electrode portion 40 shown are conceptual illustrations and do not specify a specific structure or the like. The operation mode shown by M10 is an operation mode corresponding to the operation in which the movable electrode portion 40 rotates about an axis with respect to the fixed electrode portion 30 with respect to the rotation axis shown by M11. The axis shown by M11 corresponds to Figure 1 the axis shown by E1. The operation mode shown by M20 is an operation mode corresponding to the operation in which the movable electrode portion 40 rotates about the axis shown by M21 with respect to the plane including the fixed electrode portion 30, and can also be called an in-plane rotation mode. The operation mode shown by M30 is an operation mode corresponding to the operation in which the movable electrode portion 40 moves in the direction shown by M32 with respect to the plane including the fixed electrode portion 30. In addition, the direction shown by M32 is the direction along the Y axis. In addition, when an acceleration composed only of a component in the X-axis direction is applied, the physical quantity sensor 1 of the present embodiment operates in the operation mode shown by M20.

[0056] The operation mode required for the physical quantity sensor 1 of the present embodiment to detect the desired physical quantity is only the operation mode shown by M10, and the operation modes shown by M20 and M30 are not required and need to be restricted. For example, since the physical quantity sensor 1 has a stopper ST, the positional relationship between the movable body MB and the stopper ST is designed such that when the operation modes shown by M20 and M30 occur, the movable body MB abuts against the stopper ST before the fixed electrode 36 abuts against the movable electrode 46.

[0057] In addition, although the position of the stopper ST is not particularly limited, it is ideal to provide a first stopper ST1 at the first corner portion shown by C1, for example. Since the outer frame 10 surrounds the movable body MB, it is convenient to provide the stopper ST at the corner portion of the outer frame 10 from the viewpoint of manufacturing. In addition, when two stoppers ST are provided, in addition to the above-mentioned first stopper ST1, for example, a second stopper ST2 can be further provided at the second corner portion shown by C2. In addition, in Figure 1 the second corner portion is the corner portion at the diagonal position of the first corner portion, but it can also be at other positions. In addition, three or more stoppers ST can also be provided. For example, a third stopper ST3 can be further provided at the third corner portion shown by C3, and a fourth stopper ST4 can be further provided at the fourth corner portion shown by C4. InFigure 1 In the embodiment, the third corner portion is opposite to the first corner portion, and the fourth corner portion is opposite to the second corner portion. By configuring in this way, the stopper ST can function more stably.

[0058] In addition, for example, in the physical quantity sensor 1 of the present embodiment, it is preferred to set the first detection unit Z1 and the second detection unit Z2 at a position away from the rotation axis. Thus, a rotation torque can be efficiently generated. In other words, it is not necessary to set the first detection unit Z1 and the second detection unit Z2 at a position close to the rotation axis to form a specified space. Therefore, the outer shape of the outer frame 10 can be formed into a rectangular shape, for example, but the outer frame 10 can also be formed into a concave polygonal shape so that a specified space can be formed.

[0059] As can be seen from the above, the present embodiment relates to a physical quantity sensor 1 that detects a physical quantity in a third direction DR3 when three mutually orthogonal directions are set as a first direction DR1, a second direction DR2, and a third direction DR3. The physical quantity sensor 1 includes: a fixed portion 12 fixed to a substrate 2; an outer frame 10 connected to the fixed portion 12; a support beam 20 connected to the outer frame 10 at one end and extending in the first direction DR1; a movable body MB connected to the other end of the support beam 20 and arranged on the inner side of the outer frame 10; and a fixed electrode portion 30 provided on the substrate 2, arranged in the second direction DR2 of the support beam 20, and having a fixed electrode 36. The movable body MB has a movable electrode portion 40 having a movable electrode 46 opposed to the fixed electrode 36, and the outer frame 10 has a stopper ST opposed to the movable body MB in the in-plane direction along the first direction DR1 and the second direction DR2.

[0060] Thus, since the physical quantity sensor 1 of the present embodiment includes the substrate 2, the movable body MB, the support beam 20, the fixed electrode portion 30, and the movable electrode portion 40, it can function as a seesaw type physical quantity sensor 1 that detects the physical quantity in the third direction DR3. In addition, since the physical quantity sensor 1 of the present embodiment has the stopper portion ST that is opposite to the movable body MB in the in-plane direction along the first direction DR1 and the second direction DR2, it is possible to limit the displacement of the movable body MB in the first direction DR1 and the second direction DR2 without hindering the movable body MB from tipping over in the third direction DR. In addition, the physical quantity sensor 1 of the present embodiment includes the outer frame 10 fixed to the substrate 2 via the fixing portion 12, one end of the support beam 20 is connected to the outer frame 10, the other end of the support beam 20 is connected to the movable body MB, and the movable body MB is arranged on the inner side of the outer frame 10, so that the physical quantity sensor 1 in which the movable body MB is not directly fixed to the substrate 2 can be constructed.

[0061] A method like the present embodiment in which the outer frame 10 has a stopper ST has not been proposed so far. That is, when applying the existing method, the stopper ST is configured to be provided on the physical quantity sensor 1 of the substrate 2, and warping or the like occurs in the substrate 2 due to external stress, temperature change, etc., but a method considering such a situation has not been proposed. More specifically, the existing method does not consider the possibility that the positional relationship between the stopper ST and the movable body MB changes due to warping, deformation, etc. occurring in the substrate 2. When the positional relationship between the stopper ST and the movable body MB changes, it is possible that the fixed electrode portion and the movable electrode portion come into contact at a timing earlier than the timing when the stopper ST and the movable body MB come into contact through the movement of the movable body MB based on the in-plane rotation mode or the like, so that the stopper ST cannot function. Regarding this point, by applying the method of the present embodiment, the movable body MB is not directly fixed to the substrate 2, but is integrated with the outer frame 10 having the stopper ST. Therefore, even if the substrate 2 warps or the like, the positional relationship between the stopper ST and the movable body MB can be made the same as the designed positional relationship. As a result, the stopper ST can function stably. As a result, a physical quantity sensor 1 with excellent shock resistance and high reliability can be constructed.

[0062] In addition, in the physical quantity sensor 1 of the present embodiment, as the stopper ST, the outer frame 10 may also include a first stopper ST1 provided at the first corner portion of the outer frame 10 and a second stopper ST2 provided at the second corner portion of the outer frame 10. By configuring in this way, the stopper ST can function more stably.

[0063] In this way, in the physical quantity sensor 1 of the present embodiment, as the stopper ST, the outer frame 10 may also include a third stopper ST3 provided at the third corner portion of the outer frame 10 opposite to the first corner portion and a fourth stopper ST4 provided at the fourth corner portion of the outer frame 10 opposite to the second corner portion. By configuring in this way, the stopper ST can function more stably.

[0064] In addition, in the physical quantity sensor 1 of the present embodiment, the outer frame 10 may also surround the entire circumference of the movable body MB. By configuring in this way, the degree of freedom in the arrangement of the stopper ST can be increased.

[0065] In addition, in the physical quantity sensor 1 of the present embodiment, the fixed electrode portion 30 may also include a fixed base portion 34, a fixed electrode 36 extending from the fixed base portion 34, and a fixed electrode fixing portion 32 that fixes the fixed base portion 34 to the substrate 2. By configuring in this way, a comb-shaped fixed electrode group can be stably formed.

[0066] Further, in the physical quantity sensor 1 of the present embodiment, the fixed electrode 36 may also extend from the fixed base portion 34 in the second direction DR2, and the movable electrode 46 may extend from the movable electrode portion 40 in the second direction DR2. By configuring in this way, a detection unit in which a fixed comb electrode group based on the fixed electrode 36 and a movable comb electrode group based on the movable electrode 46 are alternately arranged in the first direction DR1 can be constructed. Thereby, the damping effect of the squeeze film of the fixed electrode 36 and the movable electrode 46 on the first direction DR1 can be imparted to the physical quantity sensor 1. Thereby, the vibration resistance and impact resistance of the physical quantity sensor 1 can be improved.

[0067] Further, in the physical quantity sensor 1 of the present embodiment, the fixed electrode portion 30 may also include a first fixed electrode portion 30-1 having a first fixed electrode 36-1 and a second fixed electrode portion 30-2 having a second fixed electrode 36-2. Further, the movable body MB may also include a first movable electrode portion 40-1 having a first movable electrode 46-1 opposed to the first fixed electrode 36-1 and a second movable electrode portion 40-2 having a second movable electrode 46-2 opposed to the second fixed electrode 36-2. Further, the first fixed electrode portion 30-1 and the first movable electrode portion 40-1 and the second fixed electrode portion 30-2 and the second movable electrode portion 40-2 may be arranged in the first direction DR1. By configuring in this way, a physical quantity sensor 1 having a single-sided seesaw structure composed of a first detection unit Z1 and a second detection unit Z2 can be constructed. The first detection unit Z1 is composed of the first fixed electrode portion 30-1 and the first movable electrode portion 40-1, and the second detection unit Z2 is composed of the second fixed electrode portion 30-2 and the second movable electrode portion 40-2.

[0068] Further, in the physical quantity sensor 1 of the present embodiment, the thickness of the first movable electrode 46-1 in the third direction DR3 may also be greater than the thickness of the first fixed electrode 36-1 in the third direction DR3. Further, the thickness of the second movable electrode 46-2 in the third direction DR3 may also be less than the thickness of the second fixed electrode 36-2 in the third direction DR3. By configuring in this way, the physical quantity applied in the third direction DR3 can be detected by the second detection unit Z2 composed of the second fixed electrode portion 30-2 and the second movable electrode portion 40-2, and the physical quantity applied in the fifth direction opposite to the third direction DR3 can be detected by the first detection unit Z1 composed of the first fixed electrode portion 30-1 and the first movable electrode portion 40-1.

[0069] Thus, in the physical quantity sensor 1 of the present embodiment, the outer frame 10 may also include a first portion 10-1 along the first side and a second portion 10-2 along the second side opposite to the first side. In addition, the support beams 20 may also include a first support beam 21 and a second support beam 22. One end of the first support beam 21 is connected to the first portion 10-1 of the outer frame 10, and the other end is connected to the movable body MB. One end of the second support beam 22 is connected to the second portion 10-2 of the outer frame 10, and the other end is connected to the movable body MB. By configuring in this way, the movable body MB connected to the outer frame 10 can operate more stably.

[0070] Thus, in the physical quantity sensor 1 of the present embodiment, the outer frame 10 may also include a first portion 10-1 along the first side, a second portion 10-2 along the second side opposite to the first side, and a third portion 10-3 intersecting the first portion 10-1 and the second portion 10-2. The fixing portion 12 is provided on the third portion 10-3. By configuring in this way, the outer frame 10 can be stably fixed to the substrate 2.

[0071] The method of the present embodiment is not limited to the above and can be implemented in various modified forms. For example, the physical quantity sensor 1 of the present embodiment may also be formed into Figure 8 the configuration example shown. In addition, the description and illustration of reference numerals and the like of the configurations that have already appeared will be appropriately omitted hereinafter. In Figure 1 the first detection unit Z1, it is configured that the first fixed electrode 36-1 extends from one side of the first fixed base 34-1. In contrast, in Figure 8 the first detection unit Z1, it is configured that the first fixed electrode 36-1 extends from both sides of the first fixed base 34-1. In other words, in Figure 8 , the first detection unit Z1 is configured such that there are two sets of combinations of the first fixed electrode 36-1 and the first movable electrode 46-1 along the Y-axis. Thus, when the area occupied by the first detection unit Z1 in the plan view in the Z direction is the same, compared with the Figure 1 configuration example, Figure 8 the configuration example is configured such that the first fixed electrode 36-1 and the first movable electrode 46-1 are shorter. In addition, the same here includes substantially the same. Also, the second detection unit Z2 is the same as the first detection unit Z1. Compared with the Figure 1 configuration example, Figure 8 the configuration example is configured such that the second fixed electrode 36-2 and the second movable electrode 46-2 are shorter. In addition, the first fixed base 34-1 and the second fixed base 34-2 extend toward the fixing portion 12 so that the first fixed electrode fixing portion 32-1 and the second fixed electrode fixing portion 32-2, which are the fixed electrode fixing portions 32, are arranged close to the fixing portion 12.

[0072] By such asFigure 8 configured as in the configuration example, the aspect ratios of the respective fixed electrodes 36 and movable electrodes 46 can be reduced. Thereby, the rigidity of the fixed electrodes 36 and movable electrodes 46 can be increased. Thereby, the impact resistance of the physical quantity sensor 1 can be further improved. In addition, in the examples shown after Figure 9 and thereafter, it is illustrated as including the above Figure 8 method example, but Figure 8 the method is not essential, and it is sufficient to appropriately determine whether to adopt the Figure 8 method.

[0073] In addition, the detection unit may be configured such that there are three or more sets of combinations of the fixed electrodes 36 and movable electrodes 46 along the Y-axis. Specifically, for example, although not shown in the figure, a plurality of fixed bases 34 may be arranged along the X-axis, the fixed electrodes 36 may extend along the Y-axis from one side or both sides of each fixed base 34, and the movable body MB and the movable electrodes 46 may be configured to face the extended fixed electrodes 36.

[0074] In addition, the physical quantity sensor 1 of the present embodiment may also be formed into the Figure 9 configuration example shown. Figure 9 The difference between the configuration example of Figure 8 and the configuration example of

[0075] is that the fixing portion 12 and the first fixed electrode fixing portion 32-1 and the second fixed electrode fixing portion 32-2 as the fixed electrode fixing portion 32 are concentrated and arranged in a specified area within a specified range from the central position of the substrate 2. In the present embodiment, this specified area is referred to as the fixing portion arrangement area AR. That is, in the physical quantity sensor 1 of the present embodiment, the fixing portion 12 and the first fixed electrode fixing portion 32-1 and the second fixed electrode fixing portion 32-2 as the fixed electrode fixing portion 32 are arranged in the fixing portion arrangement area AR. By configuring in this way, the influence of the warpage of the substrate 2 on the fixing portion 12 and the fixed electrode fixing portion 32 can be reduced.

[0076] In addition, in Figure 1 , Figure 8In the configuration example, the fixing portion 12 is provided in the third portion 10-3. In contrast, in Figure 9 's configuration example, it is different in that the fixing portion 12 is disposed in the fixing portion disposition area AR. As described above, since the outer frame 10 is formed in a "C" shape by the first portion 10-1, the second portion 10-2, and the third portion 10-3, it is considered that the fixing portion disposition area AR is located within the area surrounded by the first portion 10-1, the second portion 10-2, and the third portion 10-3. That is, in the physical quantity sensor of the present embodiment, the outer frame 10 includes a first portion 10-1 along the first side, a second portion 10-2 along the second side opposite to the first side, and a third portion 10-3 that intersects the first portion 10-1 and the second portion 10-2. The fixing portion 12 is disposed in the area surrounded by the first portion 10-1, the second portion 10-2, and the third portion 10-3. By configuring in this way, the maximum distance from the fixing portion 12 to the end of the outer frame 10 can be shortened. The outer frame 10 can be utilized as a cantilever beam with the fixing portion 12 as the fixed end. Therefore, there is a possibility that the portion of the outer frame 10 far from the fixing portion 12 may be deflected. Regarding this point, by applying the method of the present embodiment, the fixing portion 12 can be positioned near the center of the outer frame 10 in a top view from the Z-axis direction. Thereby, deflection of the outer frame 10 can be suppressed, and thus a high-precision physical quantity sensor 1 can be constructed. In addition, the first fixing base 34-1 and the second fixing base 34-2 extend toward the fixing portion 12 so that the first fixing electrode fixing portion 32-1 and the second fixing electrode fixing portion 32-2, which are the fixing electrode fixing portions 32, are disposed close to the fixing portion 12.

[0077] In addition, in Figure 1 , Figure 8 , Figure 9 , a configuration example in which the outer frame 10 is fixed to the substrate 2 using a single fixing portion 12 is shown. However, for example, the fixing portion 12 may have a plurality of them. In addition, in Figure 1 , Figure 8 , Figure 9 , the outer frame 10 is exemplified as forming a closed loop, but it may be partially open. Specifically, for example, the physical quantity sensor 1 of the present embodiment may also be formed in the Figure 10 -shown configuration example. Figure 10 's example is compared with Figure 9 . The outer frame 10 is open, and fixing portions 12-1 and 12-2, which are the fixing portions 12, are provided at both ends of the outer frame 10. In addition, as Figure 10As shown, the fixed portions 12-1 and 12-2 can also be arranged in the fixed portion arrangement region AR. In this way, in the physical quantity sensor 1 of the present embodiment, the outer frame 10 is open in at least a part of the region around the movable body MB. By configuring in this way, a physical quantity sensor 1 can be constructed that not only improves the degree of freedom in design but also enables the stopper ST to function stably. For example, although not shown in the figure, since the wiring from the fixed electrode 36 can pass through the open region and be led out to the outside of the movable body MB, compared with the Figure 9 configuration example shown, Figure 10 the degree of freedom in design of the configuration example shown is improved. In addition, whether the outer frame 10 is configured to surround the entire circumference of the movable body MB as shown in Figure 1 or the outer frame 10 is configured to have a part open as shown in Figure 10 can be appropriately determined.

[0078] In addition, the physical quantity sensor 1 of the present embodiment can also be formed into the Figure 11 configuration example shown. In Figure 11 , the second detection unit Z2 is arranged at the center in the X-axis direction of the substrate 2. In addition, the first detection unit Z1 is divided into a first detection unit A (Z1A) and a first detection unit B (Z1B), and they are respectively arranged on both sides in the X-axis direction of the second detection unit Z2. In addition, the structure composed of the first fixed electrode 36-1A and the first movable electrode 46-1A in the first detection unit A (Z1A) is symmetric with respect to the line shown in E2 as the structure composed of the first fixed electrode 36-1B and the first movable electrode 46-1B in the first detection unit B (Z1B). In addition, the structure composed of the second fixed electrode 36-2 and the second movable electrode 46-2 in the second detection unit Z2 is symmetric with respect to the line shown in E2. That is, the overall structure of the physical quantity sensor 1 is symmetric with respect to the line shown in E2, and the center of gravity of the physical quantity sensor 1 exists at the position on the line shown in E2.

[0079] In Figure 1 , Figure 8 , Figure 9 , Figure 10 the configuration examples shown, the thickness of the first fixed electrode 36-1 and the first movable electrode 46-1 constituting the first detection unit Z1 is different from the thickness of the second fixed electrode 36-2 and the second movable electrode 46-2 constituting the second detection unit Z2. Therefore, the overall weight of the first detection unit Z1 is different from the overall weight of the first detection unit Z1. Therefore, the position of the center of gravity in the X-axis direction of the physical quantity sensor 1 is shifted. Regarding this point, compared with the Figure 1 , Figure 8 , Figure 9 , Figure 10 configuration examples shown, Figure 11The weight balance of the illustrated configuration example is improved, so that the stopper ST can function stably and a physical quantity sensor 1 with higher precision can be constructed.

[0080] In addition, the methods described in Figure 11 and Figure 9 can be combined. Specifically, for example, the physical quantity sensor 1 of the present embodiment can also be formed into the Figure 12 illustrated configuration example. Figure 12 The difference from Figure 11 is that the fixing portion 12, the first fixing electrode fixing portion 32-1A included in the first detection unit A (Z1A), the first fixing electrode fixing portion 32-1B included in the first detection unit B (Z1B), and the second fixing electrode fixing portion 32-2 are arranged in the fixing portion arrangement region AR. By configuring in this way, in addition to the effects described in Figure 11 , the influence of the warpage of the substrate on the fixing portion 12, the first fixing electrode fixing portion 32-1A, the first fixing electrode fixing portion 32-1B, and the second fixing electrode fixing portion 32-2 can be reduced.

[0081] In addition, the physical quantity sensor 1 of the present embodiment can also be formed into the Figure 13 illustrated configuration example. Figure 13 The example of Figure 12 differs from the configuration example of Figure 1 in that a second physical quantity sensor unit 200 is provided in the specified space described in Figure 1 . When the physical quantity sensor 1 is a sensor for detecting a physical quantity in the Z-axis direction, the second physical quantity sensor unit 200 may be a sensor for detecting a physical quantity in the X-axis direction or the Y-axis direction, an integrated structure sensor for detecting physical quantities in two axis directions, etc. Or, the second physical quantity sensor unit 200 may also be a sensor with a different detection object such as a pressure sensor. That is, in the physical quantity sensor 1 of the present embodiment, a second physical quantity sensor unit 200 for detecting a second physical quantity is included between the first support beam 21 and the second support beam 22. By configuring in this way, the area of the substrate 2 can be effectively utilized. Thereby, miniaturization of the unit including the physical quantity sensor 1 can be achieved.

[0082] In addition, for example, when the second physical quantity sensor unit 200 is a sensor that detects a physical quantity in the Y-axis direction, the second physical quantity sensor unit 200, like the physical quantity sensor 1, includes a second sensor movable body MB2. In this case, the second sensor movable body MB2 can also be connected to the outer frame body 10. For example, when the physical quantity sensor 1 is a MEMS sensor, the second sensor movable body MB2 can be connected to the outer frame body 10 by integrally forming the outer frame body 10 and the second sensor movable body MB2. That is, in the physical quantity sensor 1 of the present embodiment, the second physical quantity sensor unit 200 includes a second sensor movable body MB2 connected to the outer frame body 10. By configuring in this way, an outer frame body 10 integrated with the second sensor movable body MB2 can be formed, so the manufacturing process can be simplified.

[0083] In addition, the second physical quantity sensor unit 200 can also be a combination of a comb-shaped fixed electrode group in which comb-shaped second sensor fixed electrodes 236 are arranged and a comb-shaped movable electrode group in which comb-shaped second sensor movable electrodes 246 are arranged, similar to the physical quantity sensor 1. In addition, there can be multiple such combinations. For example, in Figure 13 the second physical quantity sensor unit 200 includes a detection unit composed of a combination of a second sensor fixed electrode 236A and a second sensor movable electrode 246A, and a detection unit composed of a combination of a second sensor fixed electrode 236B and a second sensor movable electrode 246B. In addition, the second sensor fixed electrode 236A extends from a second sensor fixed base 234A, and the second sensor fixed base 234A is fixed to the substrate 2 via a second sensor fixed electrode fixing portion 232A. Similarly, the second sensor fixed electrode 236B extends from a second sensor fixed base 234B, and the second sensor fixed base 234B is fixed to the substrate 2 via a second sensor fixed electrode fixing portion 232B.

[0084] In addition, the second sensor fixed electrode fixing portion 232A and the second sensor fixed electrode fixing portion 232B can also be arranged in the aforementioned fixing portion arrangement area AR. That is, in Figure 13In this case, the fixing portion 12, the first fixed electrode fixing portion 32-1A, the first fixed electrode fixing portion 32-1B, the second fixed electrode fixing portion 32-2, the second sensor fixed electrode fixing portion 232A, and the second sensor fixed electrode fixing portion 232B are centrally arranged in the fixing portion arrangement region AR. In addition, the fixing portion arrangement region AR is located between the movable body MB and the second sensor movable body MB. By configuring in this way, the influence of the warping of the substrate 2 on the fixing portion 12, the first fixed electrode fixing portion 32-1A, the first fixed electrode fixing portion 32-1B, the second fixed electrode fixing portion 32-2, the second sensor fixed electrode fixing portion 232A, and the second sensor fixed electrode fixing portion 232B can be reduced. From the above, in the physical quantity sensor 1 of the present embodiment, the fixed electrode portion 30 includes a fixed base portion 34, a fixed electrode 36 extending from the fixed base portion 34, and a fixed electrode fixing portion 32 for fixing the fixed base portion 34 to the substrate 2. The second physical quantity sensor portion 200 includes a second sensor fixed base portion 234, a second sensor fixed electrode 236 extending from the second sensor fixed base portion 234, and a second sensor fixed electrode fixing portion 232 for fixing the second sensor fixed base portion 234 to the substrate 2. In addition, the fixing portion 12, the fixed electrode fixing portion 32, and the second sensor fixed electrode fixing portion 232 are arranged in the fixing portion arrangement region AR. By configuring in this way, the influence of the warping of the substrate 2 on the fixing portion 12, the fixed electrode fixing portion 32, and the second sensor fixed electrode fixing portion 232 can be reduced. In addition, the method related to the second physical quantity sensor portion 200 shown in Figure 13 can also be appropriately combined with the configuration example shown in Figure 1 , Figures 8 to 11 .

[0085] In addition, the above is an example in which the fixed electrode 36 extends along the Y-axis with respect to the fixed base portion 34, and the movable electrode 46 extends along the Y-axis from the movable electrode portion 40. However, the physical quantity sensor 1 related to the method of the present embodiment is not limited thereto. For example, the physical quantity sensor 1 of the present embodiment can also be formed into the configuration example shown in Figure 14 . In Figure 14 , the first fixed electrode 36-1 included in the first detection unit Z1 extends along the first direction DR1 with respect to the first fixed base portion 34-1, and the first movable electrode 46-1 extends along the first direction DR1 from the first movable electrode portion 40-1. Similarly, in Figure 14In [the structure], the second fixed electrode 36-2 included in the second detection unit Z2 extends along the first direction DR1 with respect to the second fixed base 34-2, and the second movable electrode 46-2 extends along the first direction DR1 from the second movable electrode portion 40-2. Thus, in the physical quantity sensor 1 of the present embodiment, the fixed electrode 36 extends along the first direction DR1 from the fixed base 34, and the movable electrode 46 extends along the first direction DR1 from the movable electrode portion 40. By configuring in this way, the damping effect of the squeeze film of the fixed electrode 36 and the movable electrode 46 on the second direction DR2 can be imparted to the physical quantity sensor 1. Thereby, the vibration resistance and shock resistance of the physical quantity sensor 1 can be improved.

[0086] In addition, the above is an example in which the first detection unit Z1 and the second detection unit Z2 are arranged on the second direction DR2 side with respect to the support beam 20 as the rotation axis, but the physical quantity sensor 1 of the present embodiment is not limited thereto. For example, it may be as Figure 15 shown, the first detection unit Z1 is arranged on the second direction DR2 side with respect to the support beam 20, and the second detection unit Z2 is arranged on the fourth direction DR4 side. In Figure 15 the configuration example, similar to the configuration examples such as Figure 1 , the first support beam 21 and the second support beam 22 function as the rotation axis in the two-side seesaw structure. In addition, Figure 15 in [the structure] when configured to rotate about the line shown as E3, the rotational torque based on the first detection unit Z1 is larger than the rotational torque based on the second detection unit Z2. For example, the rotational torque based on the second detection unit Z2 when rotating about the line shown as E3 can be reduced by reducing the volume of the movable body MB on the side where the second detection unit Z2 is arranged, etc.

[0087] Figure 16 shows Figure 15 the relationship between the operation of the second movable electrode 46-2 and the second fixed electrode 36-2 in the second detection unit Z2 of the configuration example. In addition, Figure 15 the relationship between the operation of the first movable electrode 46-1 and the first fixed electrode 36-1 in the first detection unit Z1 in the configuration example of Figure 3 is the same as the case described in Figure 16 , so the illustration and description are omitted. As shown by A20 and A21 in , in the initial state, the positions of the ends of the second fixed electrode 36-2 and the second movable electrode 46-2 in the fifth direction DR5 are the same. In addition, the thickness of the second fixed electrode 36-2 in the third direction DR3 is smaller than the thickness of the second movable electrode 46-2 in the third direction DR3. Therefore, in the initial state, the position of the end of the second movable electrode 46-2 in the third direction DR3 is located on the side closer to the third direction DR3 than the position of the end of the second fixed electrode 36-2 in the third direction DR3.

[0088] Further, for example, when changing from the first timing to the second timing, according to the relationship of the torque, as shown in Figure 16 A22 of, the second movable electrode 46-2 is displaced toward the third direction DR3 side, which is the same direction as the direction of the acceleration generated by the physical quantity sensor 1. Similarly, for example, when changing from the first timing to the third timing, as shown in Figure 16 A23 of, the second movable electrode 46-2 is displaced toward the fifth direction DR5 side. Comparing Figure 16 B21 and B22 of, it can be seen that when the acceleration in the third direction DR3 is applied from the initial state, the opposed area between the second fixed electrode 36-2 and the second movable electrode 46-2 decreases. On the other hand, comparing Figure 16 B21 and B23 of, it can be seen that when the acceleration in the fifth direction DR5 is applied from the initial state, the opposed area between the second fixed electrode 36-2 and the second movable electrode 46-2 remains unchanged. That is, it can be known that when the acceleration in the third direction DR3 is generated, the second detection unit Z2 can detect the physical quantity in the third direction DR3 by detecting the change in the physical quantity caused by the decrease in the opposed area between the second fixed electrode 36-2 and the second movable electrode 46-2, which is the same as the second detection unit Z2 in the Figure 1 and other configuration examples. Thus, in the Figure 15 configuration example, also when the acceleration in the Z-axis direction is generated, the relationship that the capacitance of one of the first detection unit Z1 and the second detection unit Z2 changes and the capacitance of the other does not change holds in both the +Z direction and the -Z direction.

[0089] Thus, by arranging the first detection unit Z1 on one side and the second detection unit Z2 on the other side with respect to the rotation axis, a physical quantity sensor 1 having an asymmetric structure with respect to the rotation axis can be constructed. Thereby, the sensitivity of the physical quantity sensor 1 can be improved. In addition, compared with the Figure 1 and other configuration examples, since the number of teeth of the comb-shaped fixed electrodes 36 and movable electrodes 46 increases, the damping effect of the squeeze film of the fixed electrodes 36 and the movable electrodes 46 on the X-axis direction is further improved. Thereby, the vibration resistance and impact resistance of the physical quantity sensor 1 can be further improved.

[0090] In addition, the method of the present embodiment can also be realized, for example, by Figure 17 , Figure 18The inertial measurement device 2000 of this embodiment is realized. That is, the inertial measurement device 2000 of this embodiment includes the above-mentioned physical quantity sensor 1 and the control IC 2360 as a control unit that performs control according to the detection signal output from the physical quantity sensor 1. By configuring in this way, since the acceleration sensor unit 2350 including the above-mentioned physical quantity sensor 1 is used, the effect of the above-mentioned physical quantity sensor 1 can be enjoyed, and the inertial measurement device 2000 that can achieve high precision can be provided. The inertial measurement device 2000 (IMU: Inertial Measurement Unit) is a device that detects the inertial motion amount of the posture, behavior, etc. of a moving body such as a car or a robot. The inertial measurement device 2000 is a so-called six-axis motion sensor having an acceleration sensor that detects accelerations ax, ay, az along three axes and an angular velocity sensor that detects angular velocities ωx, ωy, ωz around three axes.

[0091] The inertial measurement device 2000 is a rectangular parallelepiped having a substantially square planar shape. In addition, screw holes 2110 are formed near two vertices located in the diagonal direction of the square as mounting portions. By passing two screws through the two screw holes 2110, the inertial measurement device 2000 can be fixed to the mounting surface of the mounted body such as a bicycle. In addition, by selecting components or changing the design, the inertial measurement device 2000 can be miniaturized to a size that can be mounted on a smartphone or a digital camera, for example.

[0092] The inertial measurement device 2000 is configured to include a housing 2100, a joint component 2200, and a sensor module 2300, and the sensor module 2300 is inserted into the housing 2100 via the joint component 2200. The sensor module 2300 includes an inner housing 2310 and a circuit substrate 2320. The inner housing 2310 is provided with a recess 2311 for preventing contact with the circuit substrate 2320 and an opening 2312 for exposing a connector 2330 described later. The circuit substrate 2320 is bonded to the lower surface of the inner housing 2310 via an adhesive.

[0093] like Figure 18 As shown, a connector 2330, an angular velocity sensor 2340z for detecting the angular velocity around the Z axis, and an acceleration sensor unit 2350 for detecting the acceleration in the respective axial directions of the X axis, the Y axis, and the Z axis are mounted on the upper surface of the circuit substrate 2320. In addition, an angular velocity sensor 2340x for detecting the angular velocity around the X axis and an angular velocity sensor 2340y for detecting the angular velocity around the Y axis are mounted on the side surface of the circuit substrate 2320.

[0094] The acceleration sensor unit 2350 includes at least the physical quantity sensor 1 for measuring the acceleration in the aforementioned Z-axis direction, and can detect the acceleration in a single-axis direction, or detect the acceleration in a two-axis direction or a three-axis direction as needed. In addition, as the angular velocity sensors 2340x, 2340y, and 2340z, there is no particular limitation. For example, a vibrating gyro sensor utilizing the Coriolis force can be used.

[0095] In addition, the control IC 2360 is mounted on the lower surface of the circuit board 2320. The control IC 2360, which is a control unit that controls according to the detection signal output from the physical quantity sensor 1, is, for example, an MCU (Micro Controller Unit), and includes a storage unit including a non-volatile memory, an A / D converter, etc. built therein, and controls each part of the inertial measurement device 2000. In addition, a plurality of electronic components are also mounted on the circuit board 2320.

[0096] In addition, the inertial measurement device 2000 is not limited to Figure 17 , Figure 18 the configuration. For example, it can also be configured such that the angular velocity sensors 2340x, 2340y, and 2340z are not provided in the inertial measurement device 2000, and only the physical quantity sensor 1 is provided as the inertial sensor. In this case, the inertial measurement device 2000 can be realized by, for example, housing the physical quantity sensor 1 and the control IC 2360 that implements the control unit in a package as a housing container.

[0097] As described above, in the present embodiment, when three mutually orthogonal directions are set as the first direction, the second direction, and the third direction, a physical quantity sensor that detects the physical quantity in the third direction is involved. The physical quantity sensor includes: a fixing part fixed to the substrate; an outer frame body connected to the fixing part; a support beam having one end connected to the outer frame body and extending in the first direction; a movable body connected to the other end of the support beam and disposed inside the outer frame body; and a fixed electrode part provided on the substrate and disposed in the second direction of the support beam, having a fixed electrode. The movable body has a movable electrode part, and the movable electrode part has a movable electrode opposed to the fixed electrode. The outer frame body has a stopper part that opposes the movable body in the in-plane direction along the first direction and the second direction.

[0098] With such a configuration, since the movable body is not directly fixed to the substrate but is integrated with the outer frame body having the stopper part, even if warping or the like occurs in the substrate, the positional relationship between the stopper part and the movable body can be kept unchanged. Thereby, the stopper part can stably function. Thereby, a physical quantity sensor with excellent shock resistance and high reliability can be constructed.

[0099] In addition, the outer housing, as a stopper, may also include a first stopper provided at the first corner of the outer housing and a second stopper provided at the second corner of the outer housing.

[0100] With such a configuration, the stopper can function more stably.

[0101] In addition, the outer housing, as a stopper, may also include a third stopper provided at the third corner of the outer housing opposite to the first corner and a fourth stopper provided at the fourth corner of the outer housing opposite to the second corner.

[0102] With such a configuration, the stopper can function more stably.

[0103] In addition, the outer housing may also surround the entire circumference of the movable body.

[0104] With such a configuration, the degree of freedom in arranging the stopper can be increased.

[0105] In addition, the outer housing may also have an opening in at least a part of the area around the movable body.

[0106] With such a configuration, a physical quantity sensor can be constructed that not only increases the degree of freedom in design but also allows the stopper to function stably.

[0107] In addition, the fixed electrode portion may also include a fixed base, a fixed electrode extending from the fixed base, and a fixed electrode fixing portion for fixing the fixed base to the substrate.

[0108] With such a configuration, a comb-shaped fixed electrode group can be stably formed.

[0109] In addition, the fixing portion and the fixed electrode fixing portion may also be arranged in the fixing portion arrangement area.

[0110] With such a configuration, the influence of the warping of the substrate on the fixing portion and the fixed electrode fixing portion can be reduced.

[0111] In addition, the fixed electrode may extend from the fixed base in the first direction, and the movable electrode may extend from the movable electrode portion in the first direction.

[0112] With such a configuration, a damping effect of the squeeze film in the second direction on the fixed electrode and the movable electrode can be imparted to the physical quantity sensor.

[0113] In addition, the fixed electrode portion may also include a first fixed electrode portion having a first fixed electrode and a second fixed electrode portion having a second fixed electrode. In addition, the movable body may also include a first movable electrode portion and a second movable electrode portion. The first movable electrode portion has a first movable electrode opposed to the first fixed electrode, and the second movable electrode portion has a second movable electrode opposed to the second fixed electrode. In addition, the first fixed electrode portion and the first movable electrode portion and the second fixed electrode portion and the second movable electrode portion may be arranged along the second direction.

[0114] By configuring in this way, a physical quantity sensor 1 with a single-sided seesaw structure composed of a first detection unit including the first fixed electrode portion and the first movable electrode portion and a second detection unit Z2 including the second fixed electrode portion and the second movable electrode portion can be constructed.

[0115] In addition, the thickness of the first movable electrode in the third direction may be made smaller than the thickness of the first fixed electrode in the third direction, and the thickness of the second movable electrode in the third direction may be made larger than the thickness of the second fixed electrode in the third direction.

[0116] By configuring in this way, the physical quantity applied in the third direction can be detected by the second detection unit composed of the second fixed electrode portion and the second movable electrode portion, and the physical quantity applied in the fifth direction on the opposite side of the third direction can be detected by the first detection unit composed of the first fixed electrode portion and the first movable electrode portion.

[0117] In addition, the outer frame body may also include a first portion along the first side and a second portion along the second side opposed to the first side. In addition, the support beams may also include a first support beam and a second support beam. One end of the first support beam is connected to the first portion of the outer frame body, and the other end is connected to the movable body. One end of the second support beam is connected to the second portion of the outer frame body, and the other end is connected to the movable body.

[0118] By configuring in this way, the movable body connected to the outer frame body can operate more stably.

[0119] In addition, the physical quantity sensor may also include a second physical quantity sensor portion provided between the first support beam and the second support beam and detecting a second physical quantity.

[0120] By configuring in this way, the area of the substrate can be effectively utilized. As a result, miniaturization of the unit including the physical quantity sensor can be achieved.

[0121] In addition, the second physical quantity sensor portion may also include a second sensor movable body connected to the outer frame body.

[0122] By configuring in this way, an outer frame body integrated with the second sensor movable body can be formed, so the manufacturing process can be simplified.

[0123] In addition, the fixed electrode portion may also include a fixed base portion, a fixed electrode extending from the fixed base portion, and a fixed electrode fixing portion that fixes the fixed base portion to the substrate. In addition, the second physical quantity sensor portion may also include a second sensor fixed base portion, a second sensor fixed electrode extending from the second sensor fixed base portion, and a second sensor fixed electrode fixing portion that fixes the second sensor fixed base portion to the substrate. In addition, the fixing portion, the fixed electrode fixing portion, and the second sensor fixed electrode fixing portion may also be disposed within the fixing portion disposition region.

[0124] By configuring in this way, the influence of the warpage of the substrate on the fixing portion, the fixed electrode fixing portion, and the second sensor fixed electrode fixing portion can be reduced.

[0125] In addition, the outer frame body may also include a first portion along the first side, a second portion along the second side opposite to the first side, and a third portion intersecting the first portion and the second portion, and the fixing portion is provided in the third portion.

[0126] By configuring in this way, the outer frame body can be stably fixed to the substrate.

[0127] In addition, the outer frame body may also include a first portion along the first side, a second portion along the second side opposite to the first side, and a third portion intersecting the first portion and the second portion. In addition, the fixing portion may also be disposed in the region surrounded by the first portion, the second portion, and the third portion.

[0128] By configuring in this way, the maximum distance from the fixing portion to the end of the outer frame body can be shortened. As a result, the generation of flexure of the outer frame body can be suppressed, and thus a high-precision physical quantity sensor can be constructed.

[0129] In addition, the inertial measurement device of the present embodiment includes the above-described physical quantity sensor and a control portion that controls based on a detection signal output from the physical quantity sensor.

[0130] Furthermore, although the present embodiment has been described in detail above, it is easily understood by those skilled in the art that various modifications can be made that substantially do not deviate from the new matters and effects of the present disclosure. Therefore, all such modified examples are included within the scope of the present disclosure. For example, in the specification or the drawings, a term that is at least once described together with a more general or synonymous different term can be replaced with the different term at any position in the specification or the drawings. In addition, all combinations of the present embodiment and the modified examples are included within the scope of the present invention. In addition, the configurations and operations of the physical quantity sensor, the inertial measurement device, etc. are not limited to the content described in the present embodiment, and various modifications can be made.

Claims

1. A physical quantity sensor, characterized in that: When three mutually orthogonal axes are set as the X-axis, the Y-axis, and the Z-axis, a physical quantity in the Z-axis direction along the Z-axis is detected. The physical quantity sensor comprises: A fixing portion, fixed to the substrate; An outer frame connected to the fixing portion; A supporting beam, one end of which is connected to the outer frame and extends in the X-axis direction along the X-axis; a fixed electrode portion fixed to the substrate and including a fixed electrode extending in a Y-axis direction along the Y-axis; and A movable body including a movable electrode portion, the movable body being connected to the other end of the support beam and arranged inside the outer frame body, The movable electrode portion includes a movable electrode opposed to the fixed electrode in the X-axis direction. The outer frame includes a stopper portion that faces the movable body along a plane direction including the X-axis and the Y-axis.

2. The physical quantity sensor according to claim 1, characterized in that: The outer frame comprises: A first corner portion, arranged on the negative side of the X-axis; A second corner portion, arranged on the positive side of the X-axis; a third corner portion disposed on the negative side of the X-axis and disposed at a position closer to the negative side of the Y-axis than the first corner portion; and a fourth corner portion, arranged on the positive side of the X-axis and arranged at a position closer to the positive side of the Y-axis than the second corner portion, The stopper comprises: A first stopper, disposed at the first corner of the outer frame; and The second stopper is arranged at the second corner of the outer frame.

3. The physical quantity sensor according to claim 2, characterized in that: The stopper comprises: A third stopper, disposed at the third corner of the outer frame; and The fourth stopper is arranged at the fourth corner of the outer frame.

4. The physical quantity sensor according to claim 1, characterized in that: The outer frame surrounds the movable body when viewed in plan from the Z-axis direction.

5. The physical quantity sensor according to claim 1, characterized in that: The outer frame does not surround at least a portion of the area around the movable body when viewed in plan from the Z-axis direction.

6. The physical quantity sensor according to claim 1, characterized in that: The fixed electrode portion comprises: A fixed base; and fixing the electrode fixing part, fixing the fixing base to the substrate, The fixed electrode extends from the fixed base.

7. The physical quantity sensor according to claim 6, characterized in that: The fixed portion and the fixed electrode fixing portion are arranged near the center of the substrate when viewed in plan from the Z-axis direction.

8. The physical quantity sensor according to claim 1, characterized in that: The fixed electrode portion comprises: A first fixed electrode unit having a first fixed electrode; and The second fixed electrode unit has a second fixed electrode, The movable body comprises: a first movable electrode portion including a first movable electrode opposed to the first fixed electrode in the X-axis direction; and The second movable electrode section includes a second movable electrode facing the second fixed electrode in the X-axis direction.

9. The physical quantity sensor according to claim 8, characterized in that: The thickness of the first movable electrode along the Z-axis is greater than the thickness of the first fixed electrode in the Z-axis direction. A thickness of the second movable electrode along the Z-axis is smaller than a thickness of the second fixed electrode in the Z-axis direction.

10. The physical quantity sensor according to claim 1, characterized in that: The outer frame comprises: A first portion is disposed on the negative side of the X-axis and extends along the Y-axis direction; and The second portion is arranged on the positive side of the X-axis, extends along the Y-axis direction, and is opposite to the first portion in the X-axis direction. The support beam comprises: a first supporting beam having one end connected to the first portion and the other end connected to the movable body; and A second supporting beam has one end connected to the second portion and the other end connected to the movable body.

11. The physical quantity sensor according to claim 10, characterized in that: The physical quantity sensor includes a physical quantity sensor portion that is disposed between the first support beam and the second support beam when viewed in plan from the Z-axis direction and detects a physical quantity in the planar direction.

12. The physical quantity sensor according to claim 11, characterized in that: The physical quantity sensor unit includes a second movable body, The second movable body is connected to the outer frame body.

13. The physical quantity sensor according to claim 12, characterized in that: The fixed electrode portion comprises: A fixed base; and fixing the electrode fixing part, fixing the fixing base to the substrate, The fixed electrode extends from the fixed base, The physical quantity sensor unit includes: a second fixed base; and a second fixed electrode fixing portion, fixing the second fixed base portion to the substrate, The second fixed electrode extends from the second fixed base, The fixing portion, the fixed electrode fixing portion, and the second fixed electrode fixing portion are arranged near the center of the substrate when viewed in plan from the Z-axis direction.

14. The physical quantity sensor according to claim 1, characterized in that: The outer frame comprises: The first part is arranged on the negative side of the X-axis and extends along the Y-axis direction; a second portion, which is disposed on the positive side of the X-axis, extends along the Y-axis direction, and is opposite to the first portion in the X-axis direction; and The third part extends along the X-axis direction. The fixing portion is arranged on the third portion.

15. The physical quantity sensor according to claim 14, characterized in that: The fixing portion is surrounded by the first portion, the second portion, and the third portion when viewed in plan from the Z-axis direction.

16. An inertial measurement device, characterized in that: include: The physical quantity sensor according to claim 1; as well as The control unit performs control based on the detection signal output from the physical quantity sensor.

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