Silicon Carbide Focus Ring Processing and Cleaning Mechanism

Abstract

The present invention provides a processing and cleaning mechanism for a silicon carbide focusing ring, including a cleaning tank, and further including: a flipping and clamping mechanism, which is installed on the cleaning tank; a carrier table, the top surface of the carrier table is used for placing the silicon carbide focusing ring; a circular through groove is opened in the middle of the cleaning tank, and the carrier table is fitted and installed in the circular through groove, and the flipping and clamping mechanism flips to make the carrier table move downward under the thrust of the silicon carbide focusing ring; a lifting frame, which is installed above the cleaning tank, and the lifting frame is connected with a flushing component; a reverse transmission mechanism is connected between the lifting frame and the carrier table; the reverse transmission mechanism is provided with an elastic reset part; a liquid suction mechanism, the liquid suction mechanism is connected with the peripheral surface of the circular through groove, and an input end of the liquid suction mechanism is connected with a connecting ring, and the connecting ring is connected with the reverse transmission mechanism. The silicon carbide focusing ring can be automatically flipped and adjusted through the flipping and clamping mechanism to reverse its upper and lower surfaces, ensuring that both the upper and lower surfaces can be flushed, and at the same time, the carrier table and the flushing component automatically avoid each other.

Description

Technical Field

[0001] The present invention relates to the field of silicon carbide focusing ring processing, and particularly to a cleaning mechanism for silicon carbide focusing ring processing. Background Art

[0002] The processing and cleaning of silicon carbide focusing rings is a crucial step, which is essential for ensuring the surface cleanliness, flatness, and final performance of the focusing rings.

[0003] During the cleaning process of the silicon carbide focusing ring, it is placed on a carrier table, and a flushing structure is arranged above for flushing. Since the bottom surface is blocked by the carrier table, it is difficult to flush the bottom surface; during cleaning, manual flipping is required to manually swap the upper and lower surfaces, resulting in the need for manual operation during the cleaning process to ensure a comprehensive cleaning effect; at the same time, to ensure the flushing effect during flushing, the flushing structure needs to be close to the silicon carbide focusing ring. During the process of flipping the silicon carbide focusing ring, the flushing structure will cause obstruction, and the flushing structure needs to be additionally controlled to adjust the height, resulting in inconvenient cleaning operations. Summary of the Invention

[0004] The present invention provides a cleaning mechanism for silicon carbide focusing ring processing to solve the technical problem that the upper and lower surfaces of the silicon carbide focusing ring need to be manually swapped.

[0005] The present invention solves the above technical problems through the following technical solutions:

[0006] The present invention provides a cleaning mechanism for silicon carbide focusing ring processing, including a cleaning tank and a support frame fixedly installed at the bottom of the cleaning tank, and further including: a flipping and clamping mechanism installed on the cleaning tank; a carrier table, the top surface of which is used for placing the silicon carbide focusing ring; a circular through groove is formed in the middle of the cleaning tank, the carrier table is fitted and installed in the circular through groove, and the flipping and clamping mechanism flips to make the carrier table move downward under the thrust of the silicon carbide focusing ring; a lifting frame installed above the cleaning tank, and a flushing component close to the silicon carbide focusing ring is connected to the lifting frame; a reverse transmission mechanism is connected between the lifting frame and the carrier table; the reverse transmission mechanism is provided with an elastic reset part; a liquid suction mechanism is connected to the peripheral surface of the circular through groove, and an input end of the liquid suction mechanism is connected with a connecting ring, and the connecting ring is connected with the reverse transmission mechanism.

[0007] In this technical solution, the flipping and clamping mechanism can automatically flip and adjust the silicon carbide focusing ring to swap its upper and lower surfaces, ensuring that both the upper and lower surfaces can be flushed. At the same time, during the flipping and adjusting process, the carrier table and the flushing component automatically avoid each other, and the avoidance adjustment does not require manual operation. After adjustment, the flushing component and the carrier table automatically reset, ensuring that the flushing component is close to the silicon carbide focusing ring.

[0008] Preferably, the reverse transmission mechanism includes a first rack and a second rack. A cylindrical gear is meshed and connected between the first rack and the second rack. A connecting rod is fixedly connected to the bottom end of the second rack, and the connecting rod is connected to the lifting frame.

[0009] In this technical solution, when the reverse transmission mechanism drives the stage to move up and down, the flushing assembly moves in the opposite direction, ensuring that the stage and the flushing assembly avoid and reset together.

[0010] Preferably, the elastic reset portion includes a vertical sleeve and a vertical rod; the top end of the vertical rod is fixedly connected to the bottom surface of the stage, the vertical rod is slidably sleeved with the vertical sleeve, and a flat plate is fixedly connected to the bottom end of the vertical sleeve. The flat plate is fixedly connected to the support frame. A spring is arranged in the vertical sleeve. The top surface of the flat plate and the bottom surface of the vertical rod are elastically connected by the spring. A vertical groove is formed on one side of the vertical sleeve. A connecting column is fixedly connected to the bottom end of the vertical rod. The connecting column penetrates through the vertical groove, and one end of the connecting column is fixedly connected to the first rack; a frame body is fixedly connected to the vertical sleeve, and the cylindrical gear is rotatably connected to the frame body.

[0011] In this technical solution, the elastic reset portion is used to provide an elastic reset function, so that the stage and the flushing assembly automatically reset.

[0012] Preferably, the number of the liquid suction mechanisms is several; each liquid suction mechanism includes a cylinder body. The bottom end of the cylinder body is fixedly connected to the top surface of the flat plate. A piston is fitted in the cylinder body. A movable rod is fixedly connected to the top of the piston, and the top end of the movable rod is fixedly connected to a connecting ring. The connecting ring is fixedly connected to the top end of the second rack. A suction chamber is formed by the inner wall of the cylinder body and the bottom surface of the piston. A first one-way valve and a second one-way valve are installed at the bottom of the cylinder body, and the top ends of the first one-way valve and the second one-way valve are both communicated with the suction chamber. The bottom end of the second one-way valve is connected to a liquid suction pipe. The liquid suction pipe is connected to a liquid suction port, and the liquid suction port is arranged on the circumferential surface of the circular trough. The liquid suction ports of several liquid suction mechanisms form a circular ring structure.

[0013] In this technical solution, the liquid suction mechanism is used to suck the liquid flowing down from the circumferential surface of the circular trough.

[0014] Preferably, the flipping and clamping mechanism includes two arc-shaped seats and a driving part. The driving part is connected to the two arc-shaped seats, and the bottom surface of the arc-shaped seat is flush with the top surface of the stage.

[0015] In this technical solution, the flipping and clamping mechanism is used to flip and adjust the upper and lower surfaces of the silicon carbide focusing ring.

[0016] Preferably, the lifting frame includes an upper mounting seat; movable columns are fixedly connected to the four corners of the bottom of the upper mounting seat. Guide cylinders are sleeved on the movable columns, and the bottom ends of the guide cylinders are fixedly connected to the top of the cleaning tank. The middle part of the upper mounting seat is connected to the flushing assembly, and the upper mounting seat is fixedly connected to the top end of the connecting rod.

[0017] In this technical solution, the lifting frame is used for the installation of the flushing assembly, and the lifting frame can be lifted and lowered.

[0018] Preferably, the flushing assembly includes a vertical pipe, the bottom end of the vertical pipe is fixedly communicated with a plurality of connecting pipes distributed in an annular array, a flushing head is installed at the end of the connecting pipe away from the vertical pipe, and the flushing head faces the silicon carbide focusing ring; a liquid supply mechanism is connected to the top end of the vertical pipe.

[0019] In this technical solution, the flushing assembly is used to provide flushing.

[0020] Preferably, a guide sleeve is installed in the middle of the upper frame seat, the vertical pipe passes through the guide sleeve, a connecting frame is connected to the top end of the vertical pipe, a telescopic rod is connected to the bottom of the connecting frame, and the bottom end of the telescopic rod is connected to the top of the upper frame seat.

[0021] In this technical solution, the telescopic rod is used to adjust the height of the flushing assembly, so that the inner retaining ring moves with respect to the plug body, and the retaining ring is opened and closed.

[0022] Preferably, a hole is opened at the top end of the flushing head, the hole is connected with a straight pipe in a matching manner, the top end of the straight pipe is connected to the upper frame seat, the bottom end of the straight pipe is located inside the flushing head, a plug body is connected to the bottom end of the straight pipe, and a retaining ring is installed inside the flushing head, and the plug body is connected with the inner ring of the retaining ring in a matching manner.

[0023] Preferably, a corrugated hose is sleeved on the straight pipe, the top end of the corrugated hose is fixedly connected to the outer pipe surface of the straight pipe, and the bottom end of the corrugated hose fixedly seals the hole at the top end of the flushing head.

[0024] On the basis of conforming to the common knowledge in the art, the above preferred conditions can be combined arbitrarily to obtain various preferred examples of the present invention.

[0025] The technical effect of the present invention is as follows:

[0026] The above-mentioned processing and cleaning mechanism for silicon carbide focusing rings can automatically adjust the upper and lower surfaces of the silicon carbide focusing rings by setting the flipping and clamping mechanism. While ensuring that both the upper and lower surfaces can be rinsed and cleaned, it avoids manual adjustment operations. Further, a carrier is set to provide a placement for rinsing the silicon carbide focusing rings, and a reverse transmission mechanism, an elastic reset part, and a lifting frame are also set. During the flipping process, the carrier moves downward under the downward thrust, and through the transmission of the reverse transmission mechanism, the lifting frame drives the rinsing component to move upward, realizing the automatic avoidance of the rinsing component and the carrier, preventing interference with the flipping adjustment of the silicon carbide focusing ring. After the flipping adjustment, the carrier and the rinsing component are reset by the elastic reset part, keeping the silicon carbide focusing ring close to the rinsing component in the rinsing state to ensure the rinsing effect. Even further, a liquid suction mechanism is set, which can suck the liquid flowing down the circumferential surface of the round trough, preventing the liquid from flowing out downward from the round trough and dripping onto the outside, causing problems that require subsequent cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic structural diagram of the whole invention.

[0028] Figure 2 It is a schematic structural diagram of the lower part and both sides of the carrier of the invention.

[0029] Figure 3 For the present invention Figure 2 It is an enlarged schematic structural diagram of part A in the invention.

[0030] Figure 4 It is a schematic structural diagram of the reverse transmission mechanism of the invention.

[0031] Figure 5 It is a schematic distribution structural diagram of the liquid suction mechanism of the invention.

[0032] Figure 6 It is a schematic structural diagram of the liquid suction mechanism of the invention.

[0033] Figure 7 It is a schematic structural diagram of the flipping and clamping mechanism of the invention.

[0034] Figure 8 It is a schematic structural diagram of the rinsing component and the lifting frame of the invention.

[0035] Figure 9 It is a schematic structural diagram of the inside of the rinsing head of the invention.

[0036] Figure 10 For the present invention Figure 9 It is an enlarged schematic structural diagram of part B in the invention.

[0037] DESCRIPTION OF THE REFERENCE NUMERALS

[0038] In the figure: 1, support frame; 101, flat plate; 2, cleaning tank; 201, liquid discharge port; 3, flipping and clamping mechanism; 301, first bevel gear; 302, cylinder; 303, second bevel gear; 304, first rotating shaft; 305, third bevel gear; 306, second rotating shaft; 307, fourth bevel gear; 308, double-shaft motor; 309, arc seat; 4, flushing assembly; 401, vertical pipe; 402, connecting pipe; 403, flushing head; 4031, retaining ring; 404, corrugated hose; 5, lifting frame; 501, guide cylinder; 502, movable column; 503, upper mounting seat; 504, guide sleeve; 6, carrier table; 7, liquid suction mechanism; 701, liquid suction port; 702, liquid suction pipe; 703, cylinder body; 704, movable rod; 705, piston; 706, first one-way valve; 707, second one-way valve; 8, liquid supply mechanism; 801, liquid storage tank; 802, conveying hose; 9, liquid return mechanism; 901, spiral hose; 902, liquid return pump; 903, annular pipe; 904, straight pipe; 905, plug body; 906, third one-way valve; 907, communication cavity; 10, connecting ring; 11, connecting rod; 12, reverse transmission mechanism; 1201, vertical sleeve; 1202, vertical rod; 1203, spring; 1204, vertical groove; 1205, connecting column; 1206, first rack; 1207, cylindrical gear; 1208, frame body; 1209, second rack; 13, silicon carbide focusing ring; 14, telescopic rod; 1401, connecting frame. Detailed implementation mode

[0039] The present invention will be further described below by way of embodiments, but the present invention is not limited to the scope of the described embodiments.

[0040] As Figures 1 - 10 shown, the silicon carbide focusing ring processing and cleaning mechanism includes a cleaning tank 2 and a support frame 1 fixedly installed at the bottom of the cleaning tank 2, and further includes:

[0041] A flipping and clamping mechanism 3, the flipping and clamping mechanism 3 is installed on the cleaning tank 2;

[0042] A carrier table 6, the top surface of the carrier table 6 is used for placing the silicon carbide focusing ring 13; a round through groove is opened in the middle of the cleaning tank 2, the carrier table 6 is fitted and installed in the round through groove, and the flipping and clamping mechanism 3 flips to make the carrier table 6 move downward under the thrust of the silicon carbide focusing ring 13;

[0043] A lifting frame 5, the lifting frame 5 is installed above the cleaning tank 2, and the lifting frame 5 is connected with a flushing assembly 4 close to the silicon carbide focusing ring 13;

[0044] A reverse transmission mechanism 12 is connected between the lifting frame 5 and the carrier table 6; the reverse transmission mechanism 12 is provided with an elastic reset part;

[0045] The liquid suction mechanism 7 is connected to the circumferential surface of the round trough, and a connecting ring 10 is connected to the input end of the liquid suction mechanism 7. The connecting ring 10 is connected to the reverse transmission mechanism 12.

[0046] As Figure 7 shown, as a specific technical solution, the flipping and clamping mechanism 3 includes two arc-shaped seats 309 and a driving part. The driving part is connected to the two arc-shaped seats 309, and the bottom surface of the arc-shaped seat 309 is flush with the top surface of the carrier 6.

[0047] The driving part includes a double-shaft motor 308 fixedly installed on the outer wall of the cleaning trough 2. Both output ends of the double-shaft motor 308 are fixedly connected with a second rotating shaft 306. A fourth bevel gear 307 is fixedly connected to the end of the second rotating shaft 306. The fourth bevel gear 307 is meshed and connected with a third bevel gear 305. A first rotating shaft 304 is rotatably installed on both outer walls of the cleaning trough 2. Both ends of the first rotating shaft 304 are respectively connected with the third bevel gear 305 and the second bevel gear 303. The second bevel gear 303 is meshed and connected with a first bevel gear 301. The first bevel gear 301 is rotatably installed on both side walls of the cleaning trough 2. A cylinder 302 is fixedly installed on the first bevel gear 301. The output end of the cylinder 302 is connected to the arc-shaped seat 309.

[0048] The flipping and clamping mechanism 3 is used to flip and swap the upper and lower surfaces of the silicon carbide focusing ring 13, so that both the upper and lower surfaces of the silicon carbide focusing ring 13 can be rinsed by the rinsing assembly 4.

[0049] As Figure 7 shown, at this time, the two arc-shaped seats 309 respectively clamp both sides of the silicon carbide focusing ring 13. When the silicon carbide focusing ring 13 is being rinsed, the cylinder 302 is in a contracted state, the arc-shaped seat 309 does not clamp the silicon carbide focusing ring 13, the arc-shaped seat 309 leaves above the carrier 6 and does not contact the side surface of the silicon carbide focusing ring 13, so as not to cause obstruction and avoid interfering with the rinsing.

[0050] The flipping and clamping mechanism 3 operates specifically as follows. The cylinder 302 extends to clamp the silicon carbide focusing ring 13 with the two arc-shaped seats 309. The double-shaft motor 308 drives the second rotating shaft 306 to rotate. Through the meshing transmission of the third bevel gear 305 and the fourth bevel gear 307, the second rotating shaft 306 rotates. The second rotating shaft 306 drives the second bevel gear 303 to rotate. Through the meshing transmission of the second bevel gear 303 and the first bevel gear 301, the first bevel gear 301 rotates. The cylinder 302 on the first bevel gear 301 rotates together, and then the arc-shaped seat 309 and the clamped silicon carbide focusing ring 13 rotate, specifically by 180 degrees, to realize the swapping of the upper and lower surfaces, facilitating the rinsing assembly 4 to rinse both surfaces of the silicon carbide focusing ring 13.

[0051] AsFigure 1 and 8 As shown, at this time, the silicon carbide focusing ring 13 is in a flushing state. The carrier 6 carries the silicon carbide focusing ring 13, and the flushing head 403 of the flushing assembly 4 approaches the silicon carbide focusing ring 13, facilitating the silicon carbide focusing ring 13 to directly receive better flushing operations and avoiding the influence on the flushing effect due to the long distance between the flushing head 403 and the silicon carbide focusing ring 13.

[0052] As Figure 2 and Figure 3 As shown, as a specific technical solution, the reverse transmission mechanism 12 includes a first rack 1206 and a second rack 1209. A cylindrical gear 1207 is meshed and connected between the first rack 1206 and the second rack 1209. A connecting rod 11 is fixedly connected to the bottom end of the second rack 1209, and the connecting rod 11 is connected to the lifting frame 5.

[0053] The elastic reset part includes a vertical sleeve 1201 and a vertical rod 1202. The top end of the vertical rod 1202 is fixedly connected to the bottom surface of the carrier 6. The vertical rod 1202 is slidably sleeved with the vertical sleeve 1201. A flat plate 101 is fixedly connected to the bottom end of the vertical sleeve 1201, and the flat plate 101 is fixedly connected to the support frame 1. A spring 1203 is arranged in the vertical sleeve 1201. The top surface of the flat plate 101 and the bottom surface of the vertical rod 1202 are elastically connected by the spring 1203. A vertical groove 1204 is formed on one side of the vertical sleeve 1201. A connecting column 1205 is fixedly connected to the bottom end of the vertical rod 1202. The connecting column 1205 penetrates through the vertical groove 1204, and one end of the connecting column 1205 is fixedly connected to the first rack 1206. A frame body 1208 is fixedly connected to the vertical sleeve 1201, and the cylindrical gear 1207 is rotatably connected to the frame body 1208.

[0054] As Figure 8 As shown, the lifting frame 5 includes an upper seat 503. Moving columns 502 are fixedly connected to the four corners of the bottom of the upper seat 503. Guide cylinders 501 are sleeved on the moving columns 502, and the bottom ends of the guide cylinders 501 are fixedly connected to the top of the cleaning tank 2. The middle part of the upper seat 503 is connected to the flushing assembly 4, and the upper seat 503 is fixedly connected to the top end of the connecting rod 11.

[0055] After the top surface of the silicon carbide focusing ring 13 is rinsed, when the bottom surface is rinsed, the clamping mechanism 3 is flipped to flip the silicon carbide focusing ring 13 by 180 degrees, and the arc seat 309 squeezes and pushes the carrier 6 to move downward. When the carrier 6 moves downward, the vertical rod 1202 below it moves downward together, and the vertical rod 1202 and the vertical sleeve 1201 provide vertical guidance, and at the same time, the spring 1203 is compressed. The spring 1203 provides a reset force for the subsequent upward movement of the vertical rod 1202. In the process of the vertical rod 1202 moving up and down, the first rack 1206 is driven to move through the connecting column 1205, and the first rack 1206 and the cylindrical gear 1201 are connected to each other. 07's meshing transmission causes the cylindrical gear 1207 to rotate, and further through the meshing transmission of the cylindrical gear 1207 and the second rack 1209, the second rack 1209 moves in the opposite direction; when the carrier 6 moves downward, the second rack 1209 drives the upper frame 503 to move upward through the connecting rod 11, so that the flushing component 4 on the upper frame 503 moves upward to avoid turning over, and when the carrier 6 moves upward through the elastic force of the spring 1203, the second rack 1209 drives the upper frame 503 to move downward through the connecting rod 11, so that the flushing component 4 is reset, and the flushing remains close to the silicon carbide focusing ring 13.

[0056] Through the above design, when the silicon carbide focusing ring 13 is flipped and adjusted, the carrier 6 and the flushing component 4 automatically avoid to avoid affecting the flipping. After the flipping adjustment, the carrier 6 and the flushing component 4 are reset, the carrier 6 and the silicon carbide focusing ring 13 are fitted together to directly receive, and the flushing head 403 of the flushing component 4 returns to a state close to the flipped silicon carbide focusing ring 13.

[0057] When the upper frame 503 moves up and down, it is guided by the movable column 502 and the guide cylinder 501.

[0058] like Figure 2 and Figure 3 As shown, the carrier 6 is in a high position, that is, when carrying the silicon carbide focusing ring 13, the carrier 6 blocks the cleaning tank 2, wherein the bottom of the carrier 6 extends to form an edge, and the edge fits with the bottom surface of the cleaning tank 2, wherein the spring 1203 is always in a compressed state, that is, as shown in FIG. Figure 2 and Figure 3 In the state shown, the spring 1203 has a compressive elastic force, which provides pressure for the edge of the carrier 6 to press the bottom surface of the cleaning tank 2. A sealing ring can be set at the edge of the carrier 6 to ensure the sealing effect.

[0059] like Figure 3 , Figure 5 as well as Figure 6As shown in the figure, as a specific technical solution, the number of the liquid suction mechanisms 7 is several; each liquid suction mechanism 7 includes a cylinder body 703, the bottom end of the cylinder body 703 is fixedly connected to the top surface of the flat plate 101, a piston 705 is connected in the cylinder body 703 in a matching manner, a movable rod 704 is fixedly connected to the top of the piston 705, and the top end of the movable rod 704 is fixedly connected to the connecting ring 10. The connecting ring 10 is fixedly connected to the top end of the second rack 1209. The inner wall of the cylinder body 703 and the bottom surface of the piston 705 enclose a suction chamber. A first one-way valve 706 and a second one-way valve 707 are installed at the bottom of the cylinder body 703. Both the first one-way valve 706 and the second one-way valve 707 pass through the flat plate 101; the top ends of the first one-way valve 706 and the second one-way valve 707 are both communicated with the suction chamber. The bottom end of the second one-way valve 707 is connected to a liquid suction pipe 702. The liquid suction pipe 702 is connected to a liquid suction port 701, and the liquid suction port 701 is arranged on the circumferential surface of the round trough. The liquid suction ports 701 of several liquid suction mechanisms 7 enclose an annular structure.

[0060] In specific implementation, the liquid suction pipe 702 of the liquid suction mechanism 7 is connected to a pipe, and the pipe is connected to a liquid suction pump.

[0061] A container for receiving waste liquid is arranged at the bottom of the flat plate 101. A liquid discharge port 201 is arranged on the side wall of the cleaning tank 2. The liquid discharge port 201 is communicated with the container below the flat plate 101 through a pipe. When the silicon carbide focusing ring 13 is being rinsed, the round trough is blocked by the carrier 6, so that the waste liquid generated by the cleaning enters the container below the flat plate 101 from the liquid discharge port 201 and the pipe.

[0062] During the up and down movement of the carrier 6, the round trough is opened. Although the cleaning tank 2 has a liquid discharge port 201 for discharging liquid, there may still be some liquid remaining in the cleaning tank 2. In order to prevent the small amount of liquid remaining in the cleaning tank 2 from flowing down through the round trough, the liquid suction mechanism 7 is provided.

[0063] Specifically, when the carrier 6 moves downward, through the transmission of the reverse transmission mechanism 12, the second rack 1209 drives the connecting ring 10 to move. The connecting ring 10 makes the movable rod 704 and the piston 705 of the liquid suction mechanism 7 move upward together, increasing the volume of the suction chamber and generating negative pressure. The liquid suction pipe 702 is sucked through the second one-way valve 707. Cooperating with the suction of the liquid suction pump on the liquid suction pipe 702, negative pressure is generated in the liquid suction pipe 702, and the liquid flowing down on the circumferential surface of the round trough is sucked through the liquid suction port 701. Part of the liquid enters the suction chamber, and the other part of the liquid is directly transported to the container below the flat plate 101 through the liquid suction pump.

[0064] Through the design of the above structures such as the cylinder body 703 and the piston 705, it is used to increase the negative pressure effect of suction.

[0065] When the stage 6 moves upward later, since part of the liquid has been discharged during the downward movement of the stage 6 in the round trough, the remaining less liquid is further reduced, and the liquid flowing down from the circumferential surface of the round trough is reduced.

[0066] During the upward movement of the stage 6, the piston 705 moves downward in the cylinder body 703, causing the volume of the suction chamber to decrease, so that the liquid in the suction chamber is discharged into the container through the first one-way valve 706. The liquid suction pump keeps sucking, and sucks the liquid on the circumferential surface of the round trough through the liquid suction port 701, and directly discharges the sucked liquid into the container.

[0067] As Figure 8 shown, the flushing assembly 4 includes a vertical pipe 401. The bottom end of the vertical pipe 401 is fixedly communicated with a plurality of connecting pipes 402 distributed in an annular array. The end of the connecting pipe 402 away from the vertical pipe 401 is provided with a flushing head 403, and the flushing head 403 faces the silicon carbide focusing ring 13. The top end of the vertical pipe 401 is connected with a liquid supply mechanism 8.

[0068] The liquid supply mechanism 8 includes a liquid storage tank 801. A pump body is arranged in the liquid storage tank 801. The pump body is connected with a delivery hose 802, and the delivery hose 802 is connected with the top end of the vertical pipe 401.

[0069] As Figure 8 shown, a guide sleeve 504 is installed in the middle of the upper frame seat 503. The vertical pipe 401 passes through the guide sleeve 504, and the top end of the vertical pipe 401 is connected with a connecting frame 1401. The bottom of the connecting frame 1401 is connected with a telescopic rod 14, and the bottom end of the telescopic rod 14 is connected with the top of the upper frame seat 503. The telescopic rod 14 is preferably a cylinder 302, a hydraulic cylinder or an electric push rod.

[0070] A hole body is opened at the top end of the flushing head 403. The hole body is connected with a straight pipe 904 in a matching manner. The top end of the straight pipe 904 is connected with the upper frame seat 503. The bottom end of the straight pipe 904 is located in the flushing head 403, and the bottom end of the straight pipe 904 is connected with a plug body 905. A retaining ring 4031 is installed in the flushing head 403, and the plug body 905 is connected with the inner ring of the retaining ring 4031 in a matching manner.

[0071] A corrugated hose 404 is sleeved on the straight pipe 904. The top end of the corrugated hose 404 is fixedly connected to the outer pipe surface of the straight pipe 904, and the bottom end of the corrugated hose 404 fixedly plugs the hole body at the top end of the flushing head 403.

[0072] It further includes a liquid return mechanism 9, and the liquid return mechanism 9 includes a liquid return pump 902 fixedly installed on the liquid storage tank 801. The liquid outlet end of the liquid return pump 902 communicates with the liquid storage tank 801, and the liquid inlet of the liquid return pump 902 is connected to a spiral hose 901. The spiral hose 901 is connected to an annular pipe 903. The annular pipe 903 is installed on the upper frame seat 503. The top of a straight pipe 904 communicates with the annular pipe 903. A third one-way valve 906 is installed on the side of the plug body 905 and is located above the retaining ring 4031. A communication cavity 907 is provided in the plug body 905, and the end of the third one-way valve 906 communicates with the bottom end of the straight pipe 904 through the communication cavity 907.

[0073] Among them, when the flushing assembly 4 is flushing, the telescopic rod 14 is in a fully retracted state, so that the flushing assembly 4 is in the lowest position, and further the retaining ring 4031 and the plug body 905 are in a separated state. The pump body transports the liquid in the liquid storage tank 801 into the delivery hose 802, and then through the vertical pipe 401 and the connecting pipe 402, it enters the flushing head 403, and flushing is carried out through the flushing head 403.

[0074] After flushing is completed, or when the upper and lower sides of the silicon carbide focusing ring 13 are swapped, the telescopic rod 14 extends, causing the entire flushing assembly 4 to move upward, so that the plug body 905 seals the retaining ring 4031 (as shown in Figure 9 and Figure 10 ), preventing the residual liquid in the flushing assembly 4 from flowing down through the bottom of the flushing head 403 due to gravity, resulting in waste.

[0075] After flushing is completed and subsequent flushing is not carried out, the liquid return mechanism 9 is used to suck the liquid in the flushing assembly 4 to prevent long-term residual liquid in the flushing assembly 4 and return the liquid to the liquid storage tank 801.

[0076] Specifically, suction is carried out through the liquid return pump 902, so that the liquid returns to the liquid storage tank 801 through the third one-way valve 906, the communication cavity 907, the straight pipe 904, the annular pipe 903, and the spiral hose 901.

[0077] The present invention is not limited to the above embodiments. No matter what changes are made in its shape or structure, they all fall within the protection scope of the present invention. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A silicon carbide focusing ring processing and cleaning mechanism, comprising a cleaning tank (2) and a support frame (1) fixedly installed at the bottom of the cleaning tank (2), characterized in that, Further comprising: A flipping clamping mechanism (3), which is installed on the cleaning tank (2); A carrier table (6), the top surface of the carrier table (6) is used for placing a silicon carbide focusing ring (13); a circular through groove is provided in the middle of the cleaning tank (2), the carrier table (6) is fitted and installed in the circular through groove, and the flipping clamping mechanism (3) flips to make the carrier table (6) move downward under the thrust of the silicon carbide focusing ring (13); A lifting frame (5), which is installed above the cleaning tank (2), and a flushing assembly (4) close to the silicon carbide focusing ring (13) is connected to the lifting frame (5); A reverse transmission mechanism (12) is connected between the lifting frame (5) and the carrier table (6); the reverse transmission mechanism (12) is provided with an elastic reset part; A liquid suction mechanism (7), the liquid suction mechanism (7) is connected to the peripheral surface of the circular through groove, and the input end of the liquid suction mechanism (7) is connected with a connecting ring (10), and the connecting ring (10) is connected with the reverse transmission mechanism (12); The number of the liquid suction mechanisms (7) is several; the liquid suction mechanism (7) includes a cylinder body (703), the bottom end of the cylinder body (703) is fixedly connected to the top surface of a flat plate (101), a piston (705) is connected in the cylinder body (703) in a matching manner, a movable rod (704) is fixedly connected to the top of the piston (705), and the top end of the movable rod (704) is fixedly connected to the connecting ring (10), the connecting ring (10) is fixedly connected to the top end of a second rack (1209), a suction cavity is formed by the inner wall of the cylinder body (703) and the bottom surface of the piston (705), a first one-way valve (706) and a second one-way valve (707) are installed at the bottom of the cylinder body (703), and the top ends of the first one-way valve (706) and the second one-way valve (707) are both communicated with the suction cavity, the bottom end of the second one-way valve (707) is connected with a liquid suction pipe (702), the liquid suction pipe (702) is connected with a liquid suction port (701), and the liquid suction port (701) is arranged on the peripheral surface of the circular through groove, and the liquid suction ports (701) of several liquid suction mechanisms (7) form an annular structure; the reverse transmission mechanism (12) includes a first rack (1206) and a second rack (1209), a cylindrical gear (1207) is meshed and connected between the first rack (1206) and the second rack (1209), the bottom end of the second rack (1209) is fixedly connected with a connecting rod (11), and the connecting rod (11) is connected with the lifting frame (5).

2. The silicon carbide focusing ring processing and cleaning mechanism according to claim 1, characterized in that: The flipping clamping mechanism (3) includes two arc-shaped seats (309) and a driving part, the driving part is connected with the two arc-shaped seats (309), and the bottom surface of the arc-shaped seat (309) is flush with the top surface of the carrier table (6).

3. The silicon carbide focusing ring processing and cleaning mechanism according to claim 1, wherein: The elastic resetting part includes a vertical sleeve (1201) and a vertical rod (1202); the top end of the vertical rod (1202) is fixedly connected to the bottom surface of the carrier (6), the vertical rod (1202) is slidably sleeved with the vertical sleeve (1201), and a flat plate (101) is fixedly connected to the bottom end of the vertical sleeve (1201), the flat plate (101) is fixedly connected to the support frame (1), a spring (1203) is arranged in the vertical sleeve (1201), the top surface of the flat plate (101) and the bottom surface of the vertical rod (1202) are elastically connected by the spring (1203), a vertical groove (1204) is formed in one side of the vertical sleeve (1201), a connecting column (1205) is fixedly connected to the bottom end of the vertical rod (1202), the connecting column (1205) penetrates through the vertical groove (1204), and one end of the connecting column (1205) is fixedly connected to a first rack (1206); a frame body (1208) is fixedly connected to the vertical sleeve (1201), and the cylindrical gear (1207) is rotatably connected to the frame body (1208).

4. The silicon carbide focusing ring processing and cleaning mechanism according to claim 3, wherein: The lifting frame (5) includes an upper mounting base (503); movable columns (502) are fixedly connected to the four corners of the bottom of the upper mounting base (503), guide cylinders (501) are sleeved on the movable columns (502), and the bottom ends of the guide cylinders (501) are fixedly connected to the top of the cleaning tank (2), the middle of the upper mounting base (503) is connected to the flushing assembly (4), and the upper mounting base (503) is fixedly connected to the top end of the connecting rod (11).

5. The silicon carbide focusing ring processing and cleaning mechanism according to claim 4, wherein: The flushing assembly (4) includes a vertical pipe (401), a plurality of connecting pipes (402) distributed in an annular array are fixedly communicated with the bottom end of the vertical pipe (401), flushing heads (403) are installed at the ends of the connecting pipes (402) far away from the vertical pipe (401), and the flushing heads (403) face the silicon carbide focusing ring (13); a liquid supply mechanism (8) is connected to the top end of the vertical pipe (401).

6. The silicon carbide focusing ring processing and cleaning mechanism according to claim 5, wherein: A guide sleeve (504) is installed in the middle of the upper mounting base (503), the vertical pipe (401) penetrates through the guide sleeve (504), a connecting frame (1401) is connected to the top end of the vertical pipe (401), a telescopic rod (14) is connected to the bottom of the connecting frame (1401), and the bottom end of the telescopic rod (14) is connected to the top of the upper mounting base (503).

7. The silicon carbide focusing ring processing and cleaning mechanism according to claim 6, characterized in that: A hole body is formed at the top end of the flushing head (403), a straight pipe (904) is connected to the hole body in a matching manner, the top end of the straight pipe (904) is connected to the upper mounting base (503), the bottom end of the straight pipe (904) is located in the flushing head (403), a plug body (905) is connected to the bottom end of the straight pipe (904), a retaining ring (4031) is installed in the flushing head (403), and the plug body (905) is connected to the inner ring of the retaining ring (4031) in a matching manner.

8. The silicon carbide focusing ring processing and cleaning mechanism according to claim 7, characterized in that: A corrugated hose (404) is sleeved on the straight pipe (904), the top end of the corrugated hose (404) is fixedly connected to the outer pipe surface of the straight pipe (904), and the bottom end of the corrugated hose (404) fixedly seals the hole body at the top end of the flushing head (403).

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