Scanning measurement device, control method thereof, and storage medium

Abstract

The present application discloses a scanning measurement device and a control method and storage medium thereof, and relates to the technical field of measurement equipment. The scanning measurement device includes: a base frame, a measuring mechanism, and a material transporting mechanism, wherein the base frame includes a conveying platform and a supporting frame, the material transporting mechanism is installed on the conveying platform, and the measuring mechanism is installed on the supporting frame; the measuring mechanism includes an imaging spectrometer, an illumination mechanism, a rotating mechanism, and an objective lens, the incident slit of the imaging spectrometer is located at the image plane position of the objective lens, the illumination mechanism is installed on the side of the objective lens, and the rotating mechanism is connected to the objective lens by transmission; the light beam emitted by the illumination mechanism forms a linear illumination area on the sample to be measured via the objective lens; the imaging spectrometer receives the measurement signal generated by the sample to be measured via the objective lens. The present application introduces a rotating mechanism in the measuring mechanism, so that the coordinated movement of the rotating mechanism and the material transporting mechanism can be realized, thereby scanning and measuring the packaging film in any direction, and improving the efficiency and accuracy of packaging film detection at a lower cost.

Description

Technical Field

[0001] The present application relates to the technical field of measuring equipment, and in particular to a scanning measuring equipment and a control method and a storage medium thereof. Background Art

[0002] In the film-forming process of OLED encapsulation film, thickness control of encapsulation film is a key link to ensure performance indicators. The thickness of encapsulation film is usually between a few microns and tens of microns, and the thickness uniformity of the edges is particularly important because it directly affects the sealing of the encapsulation and the service life of the device. Therefore, accurate measurement of the thickness of the encapsulation film has become an indispensable part of the production process.

[0003] At present, the commonly used film thickness measurement technologies in the industry include step meters, ellipsometry technology, and spectral interferometry technology. These technologies show high accuracy and reliability in specific scenarios, but they still have certain limitations in practical applications. For example, although conventional line scanning film thickness meters or line scanning spectral confocal technology can perform scanning measurements along a specific direction, it is impossible to complete a comprehensive measurement of the contours of the packaging film on all sides with a single scan. In order to cover the entire periphery of the packaging film, it is usually necessary to perform multiple process scans and splicing, or rely on multiple devices to measure from different directions. This multi-process, multi-device measurement method not only significantly increases the cost of equipment acquisition and maintenance, but also introduces additional uncertainty errors due to measurement errors between different devices, resulting in a decrease in the accuracy of the final measurement results.

[0004] Therefore, how to solve the problem that traditional measurement methods are difficult to scan and measure the thickness of packaging films or surface morphology along a specified trajectory efficiently and at low cost is a problem that needs to be solved urgently. Summary of the invention

[0005] The main purpose of the present application is to provide a scanning measurement device and its control method and storage medium, aiming to solve the technical problem that traditional measurement methods are difficult to scan and measure the thickness or surface morphology of packaging films along a specified trajectory efficiently and at low cost.

[0006] To achieve the above-mentioned purpose, the present application proposes a scanning measurement device, which includes: a base frame, a measuring mechanism, and a material transporting mechanism, wherein the base frame includes a conveying platform and a support frame located above the conveying platform, the material transporting mechanism is installed on the conveying platform, and the measuring mechanism is installed on the support frame; the measuring mechanism includes an imaging spectrometer, an illumination mechanism, a rotating mechanism, and an objective lens, the incident slit of the imaging spectrometer is located at the image plane position of the objective lens, the illumination mechanism is installed on the side of the objective lens, and the rotating mechanism is transmission-connected to the objective lens;

[0007] The light beam emitted by the illumination mechanism forms a linear illumination area on the sample to be measured via the objective lens, wherein the sample to be measured is placed on the material transporting mechanism;

[0008] The imaging spectrometer receives the measurement signal generated by the sample to be measured via the objective lens, wherein the measurement signal is the reflected light of the linear illumination area on the sample to be measured.

[0009] In one embodiment, the objective lens is successively composed of a first lens group, a Dove prism, and a second lens group, wherein the first lens group is located on the side adjacent to the material transporting mechanism, and the second lens group is located on the side adjacent to the imaging spectrometer;

[0010] The rotating mechanism is in transmission connection with the Dove prism;

[0011] The light beam emitted by the illumination mechanism successively forms a linear illumination area on the sample to be measured via the Dove prism and the first lens group;

[0012] The imaging spectrometer successively receives the measurement signal generated by the sample to be measured via the first lens group, the Dove prism, and the second lens group.

[0013] In one embodiment, the light beam emitted by the illumination mechanism successively forms a linear illumination area on the sample to be measured via the first inclined plane of the Dove prism and the first lens group, wherein the first inclined plane is adjacent to the first lens group, and the relative position between the illumination mechanism and the Dove prism is fixed.

[0014] In one embodiment, a semi-transmissive and semi-reflective film is coated on the first inclined plane.

[0015] In one embodiment, the objective lens further includes a cube beam splitter, and the cube beam splitter is located between the Dove prism and the second lens group;

[0016] The light beam emitted by the illumination mechanism successively forms a linear illumination area on the sample to be measured via the cube beam splitter, the second inclined plane of the Dove prism, the first inclined plane of the Dove prism, and the first lens group, wherein the first inclined plane is adjacent to the first lens group, and the second inclined plane is adjacent to the second lens group;

[0017] The imaging spectrometer successively receives the measurement signal generated by the sample to be measured via the first lens group, the first inclined plane, the second inclined plane, the cube beam splitter, and the second lens group.

[0018] In one embodiment, both the first inclined plane and the second inclined plane are coated with an anti-reflection film.

[0019] In one embodiment, the Dove prism is located at a position where the light beam in the optical path of the objective lens is parallel.

[0020] In addition, to achieve the above object, the present application also proposes a method for controlling a scanning measurement device, which is applied to the scanning measurement device. The method for controlling the scanning measurement device includes:

[0021] Controlling a rotating mechanism in the scanning measurement device according to a preset motion trajectory, so that the rotating mechanism drives an objective lens in the scanning measurement device to rotate, in order to change the attitude of a linear illumination area formed by an illumination mechanism on a sample to be measured, wherein the light beam emitted by the illumination mechanism forms the linear illumination area on the sample to be measured through the objective lens, and the sample to be measured is placed on a material conveying mechanism in the scanning measurement device;

[0022] Controlling the material conveying mechanism according to the preset motion trajectory, so that the material conveying mechanism drives the sample to be measured to move relative to the measuring mechanism, in order to change the position of the linear illumination area formed by the illumination mechanism on the sample to be measured.

[0023] In one embodiment, the rotating mechanism drives the Dove prism in the objective lens to rotate, wherein the rotation angle of the Dove prism is determined by the motion angle of the relative motion.

[0024] In addition, to achieve the above object, the present application also proposes a storage medium, which is a computer-readable storage medium. A computer program is stored on the storage medium, and when the computer program is executed by a processor, the steps of the method for controlling the scanning measurement device as described above are implemented.

[0025] In addition, to achieve the above object, the present application also provides a computer program product, which includes a computer program. When the computer program is executed by a processor, the steps of the method for controlling the scanning measurement device as described above are implemented.

[0026] One or more technical solutions proposed by the present application have at least the following technical effects:

[0027] The scanning measurement device proposed in the present application includes: a base frame, a measuring mechanism, and a material transporting mechanism, wherein the base frame includes a conveying platform and a support frame located above the conveying platform, the material transporting mechanism is installed on the conveying platform, and the measuring mechanism is installed on the support frame; the measuring mechanism includes an imaging spectrometer, an illumination mechanism, a rotating mechanism, and an objective lens, the entrance slit of the imaging spectrometer is located at the image plane position of the objective lens, the illumination mechanism is installed on the side of the objective lens, and the rotating mechanism is connected to the objective lens in a transmission manner; the light beam emitted by the illumination mechanism forms a linear illumination area on the sample to be measured via the objective lens; the imaging spectrometer receives the measurement signal generated by the sample to be measured via the objective lens. Based on the introduction of a rotating mechanism at the objective lens in the measuring mechanism, the posture of the linear lighting area formed by the lighting mechanism on the sample to be tested can be changed. At the same time, based on the setting of the material transporting mechanism, the sample to be tested can be driven to move, thereby changing the position of the linear lighting area formed by the lighting mechanism on the sample to be tested. The coordinated movement of the rotating mechanism and the material transporting mechanism can be further realized, and the posture and position of the linear lighting area formed by the lighting mechanism on the sample to be tested are effectively changed, avoiding the limitations brought by single angle and area measurement, and effectively avoiding the high cost and error introduction brought by setting up multiple measurement processes, so that the packaging film can be scanned in any direction to measure its thickness or surface morphology, thereby improving the efficiency and accuracy of packaging film detection at a lower cost.

[0028] The scanning and measuring device control method proposed in the present application first obtains a preset motion trajectory; then controls a rotating mechanism in the scanning and measuring device according to the motion trajectory, so that the rotating mechanism drives the objective lens in the scanning and measuring device to rotate, so as to change the angle of a linear illumination area formed by a light beam emitted by an illumination mechanism in the scanning and measuring device on a sample to be measured, wherein the light beam forms the linear illumination area on the sample to be measured via the objective lens, and the sample to be measured is placed on a material transport mechanism in the scanning and measuring device; at the same time, controls the material transport mechanism according to the preset motion trajectory, so that the material transport mechanism drives the sample to be measured and the The measuring mechanism performs relative movement to change the position of the linear illumination area formed by the light beam emitted by the illumination mechanism on the sample to be measured. By introducing a rotating mechanism at the objective lens in the measuring mechanism and making the rotating mechanism cooperate with the material transport mechanism on which the sample to be measured is placed to move, the posture and position of the linear illumination area formed by the illumination mechanism on the sample to be measured are effectively changed, thereby avoiding the limitations brought by single angle and area measurement, and effectively avoiding the high cost and error introduction brought by setting up multiple measurement processes, so that the packaging film can be scanned in any direction to measure its thickness or surface morphology, thereby improving the efficiency and accuracy of packaging film detection at a lower cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings here are incorporated into the specification and form a part of this specification, showing embodiments consistent with this application, and are used together with the specification to explain the principles of this application.

[0030] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the following will briefly introduce the accompanying drawings required for use in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0031] Figure 1 It is a schematic structural diagram of the scanning measurement device of this application;

[0032] Figure 2 It is a schematic diagram of the scanning scene of the scanning measurement device of this application;

[0033] Figure 3 It is a schematic diagram of local details of the objective lens of the scanning measurement device of this application;

[0034] Figure 4 It is another schematic diagram of local details of the objective lens of the scanning measurement device of this application;

[0035] Figure 5 It is a schematic flowchart provided by the first embodiment of the control method of the scanning measurement device of this application;

[0036] Figure 6 It is a schematic flowchart provided by the second embodiment of the control method of the scanning measurement device of this application;

[0037] Figure 7 It is a schematic diagram of the rotation of the scanning direction provided by the second embodiment of the control method of the scanning measurement device of this application.

[0038] Description of the reference numerals in the drawings of the embodiments:

[0039]

[0040] The realization of the purpose, functional features, and advantages of this application will be further described in conjunction with the embodiments with reference to the accompanying drawings. Detailed implementation manners

[0041] It should be understood that the specific embodiments described here are only used to explain the technical solutions of this application and are not used to limit this application.

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0044] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0045] Based on this, the present application embodiment provides a scanning measurement device, referring to Figure 1 , Figure 1 It is a structural schematic diagram of the scanning measurement device of this application.

[0046] like Figure 1 As shown, a scanning measurement device, the scanning measurement device comprises: a base frame 100, a measuring mechanism 200, and a material transporting mechanism 300, wherein the base frame 100 comprises a conveying platform 110 and a support frame 120 located above the conveying platform, the material transporting mechanism 300 is installed on the conveying platform 110, and the measuring mechanism 200 is installed on the support frame 120; the measuring mechanism 200 comprises an imaging spectrometer 220, an illumination mechanism 230, a rotating mechanism 240 and an objective lens 250, the entrance slit of the imaging spectrometer 220 is located at the image plane position of the objective lens 250, the illumination mechanism 230 is installed on the side of the objective lens 250, and the rotating mechanism 240 is transmission-connected to the objective lens 250;

[0047] The light beam emitted by the illumination mechanism 230 forms a linear illumination area on the sample 400 to be measured via the objective lens 250, where the sample 400 to be measured is placed on the material transporting mechanism 300;

[0048] The imaging spectrometer 220 receives the measurement signal generated by the sample 400 to be measured via the objective lens 250, where the measurement signal is the reflected light of the linear illumination area on the sample 400 to be measured.

[0049] In this embodiment, the measurement mechanism 200 can be mounted on the support frame 120 through the mounting plate 210, and the sample 400 to be measured is placed on the placement area 310 of the material transporting mechanism 300.

[0050] It should be noted that the scanning measurement device proposed in this embodiment can scan the encapsulation film, but is not limited to the detection of the encapsulation film.

[0051] It can be understood that if it is assumed that the material transporting mechanism 300 moves along the y-axis direction to drive the sample 400 to be measured to move along the x-axis direction, so that the measurement mechanism 200 can detect different areas of the sample 400 to be measured, a driving device can be provided on the support frame 120 to make the measurement mechanism 200 move along the y-axis direction, or the y-axis movement can be set on the material transporting mechanism 300, that is, keep the measurement mechanism 200 stationary, and realize the scanning measurement through the x / y movement of the material transporting mechanism 300.

[0052] Exemplarily, please refer to Figure 2 , the sample 400 to be measured may include a sample substrate 410 and an encapsulation film 420. In actual production applications, it is particularly necessary to detect the four peripheral contours 423 of the encapsulation film 420. The traditional measurement device can measure a range with a width of Ly. Through the scanning in the x-axis direction, only the measurement 421 in the x-axis direction can be realized, and it is powerless for the measurement in the y-axis direction, that is Figure 2 as shown in 422. A measurement mechanism in the y-axis direction needs to be added to complete the measurement, and the equipment cost is relatively high, or a rotating mechanism is added to rotate the measurement mechanism or the sample to be measured to change the direction to meet the measurement requirements. In fact, the measurement mechanism is heavy and the sample to be measured is large in size, and it is difficult to rotate, and it takes time to reposition after rotation. Therefore, in the present application, by driving the micro-rotating mechanism 240 in the measurement mechanism 200, the optical devices inside the objective lens 250 are adjusted to rotate around the z-axis. Without moving the measurement mechanism 200, the real-time switching of the scanning width from Ly to Lx direction can be realized. In particular, it can also be switched to any other direction in real time, such as Figure 2The normal direction tangent to the contour corresponding to the R corner. At this time, under the drive of the x / y moving mechanism, it scans around the edge of the encapsulation film 420 once. The rotating mechanism 240 adjusts the measurement direction of the scanning line in real time, and the rapid detection of the four peripheral edges of the encapsulation film 420 can be realized after one round of movement.

[0053] Furthermore, with reference to Figure 3 , the objective lens 250 is successively composed of a first lens group 251, a Dove prism 252, and a second lens group 253. Among them, the first lens group 251 is located on the side adjacent to the material conveying mechanism 300, and the second lens group 253 is located on the side adjacent to the imaging spectrometer 220;

[0054] The rotating mechanism 240 is in transmission connection with the Dove prism 252;

[0055] The light beam emitted by the illumination mechanism 230 successively forms a linear illumination area on the sample to be measured 400 via the Dove prism 252 and the first lens group 251;

[0056] The imaging spectrometer 220 receives the measurement signal generated by the sample to be measured 400 successively via the first lens group 251, the Dove prism 252, and the second lens group 253.

[0057] It should be noted that the illumination mechanism 230 provides a broadband illumination light source for scanning measurement and shapes the illumination light source, and finally forms a scanning line, that is, a linear illumination area, on the object plane, namely the encapsulation film 420, improving the energy utilization rate of the illumination light source.

[0058] In a feasible implementation manner, the light beam emitted by the illumination mechanism 230 successively forms a linear illumination area on the sample to be measured 400 via the first inclined plane of the Dove prism 252 and the first lens group 251. Among them, the first inclined plane is adjacent to the first lens group 251, and the relative position between the illumination mechanism 230 and the Dove prism 252 is fixed.

[0059] It should be noted that the included angle between the light beam emitted by the illumination mechanism 230 and the first inclined plane of the Dove prism 252 can be 45°.

[0060] It can be understood that with reference to Figure 3 , the inclined plane on the side of the Dove prism 252 close to the object plane, that is, the first inclined plane, is used to introduce the illumination light source, reducing the need to set a beam splitter in the objective lens 250, which is beneficial to shortening the size of the objective lens 250. In this implementation manner, the illumination mechanism 230 and the Dove prism 252 rotate synchronously under the drive of the rotating mechanism 240 to ensure that the illumination light source forms a line on the object plane for illumination, so as to improve the energy utilization rate of the illumination light source.

[0061] Additionally, the Dove prism 252 can be located at any position within the objective lens 250. However, if it is placed at a position where the light beam converges or diverges in the optical path, additional aberrations will be introduced, and relevant aberrations need to be corrected during the design of the objective lens 250.

[0062] Furthermore, a semi-transmissive and semi-reflective film is coated on the first inclined surface.

[0063] It can be understood that the semi-transmissive and semi-reflective film is an optical thin film that allows a part of the light to pass through while reflecting another part of the light. Coating a semi-transmissive and semi-reflective film on the first inclined surface of the Dove prism 252 serves to reflect a part of the light beam emitted by the illumination mechanism 230 back to the first lens group 251 of the objective lens 250, forming a line illumination on the sample 400 to be measured. At the same time, another part of the light passes through the semi-transmissive and semi-reflective film and continues to propagate along the optical path, ultimately reaching the imaging spectrometer 220 to receive the measurement signal of the sample 400 to be measured. This design enables illumination and measurement to be carried out in the same optical path, improving the integration and measurement efficiency of the system.

[0064] In this embodiment, the use of a beam splitter in the objective lens is avoided, effectively shortening the size of the objective lens, making the structure of the objective lens in the scanning measurement device simpler and the volume more compact.

[0065] In another feasible embodiment, please refer to Figure 4 , the objective lens 250 further includes a cube beam splitter 254, and the cube beam splitter 254 is located between the Dove prism 252 and the second lens group 253;

[0066] The light beam emitted by the illumination mechanism 230 sequentially forms a linear illumination area on the sample 400 to be measured via the cube beam splitter 254, the second inclined surface of the Dove prism 252, the first inclined surface of the Dove prism 252, and the first lens group, where the first inclined surface is adjacent to the first lens group 251 and the second inclined surface is adjacent to the second lens group 253;

[0067] The imaging spectrometer 220 receives the measurement signal generated by the sample 400 to be measured sequentially via the first lens group 251, the first inclined surface, the second inclined surface, the cube beam splitter 254, and the second lens group 253.

[0068] It should be noted that the angle between the electrolyte multilayer film in the cube beam splitter 254 and the second inclined surface of the Dove prism 252 can be a right angle.

[0069] It can be understood that the first lens group 251 collects the measurement signal light generated by the encapsulation film 420 and collimates it into the Dove prism 252, and the second lens group 253 converges the measurement signal light at the entrance slit of the imaging spectrometer 220. The cube beam splitter 254 is used to introduce the illumination light source to form coaxial illumination. The cube beam splitter 254 is placed behind the Dove prism 252, which can ensure that during the rotation of the Dove prism 252, the illumination area of the illumination mechanism 230 on the object surface rotates accordingly, and corresponding illumination is provided synchronously. Among them, if the energy utilization problem is not considered, the position of the illumination mechanism 230 can be arbitrary, but a circular illumination area needs to be formed on the object surface, that is, the encapsulation film 420. In this embodiment, the Dove prism 252 can rotate around the axis under the drive of the rotation mechanism 240, so as to realize multi-angle scanning measurement.

[0070] Additionally, the Dove prism 252 can be located at any position in the objective lens 250. However, if it is at a position where the light beam converges or diverges in the optical path, additional aberrations will be introduced, and relevant aberrations need to be corrected when designing the objective lens 250.

[0071] Furthermore, both the first inclined surface and the second inclined surface are coated with an anti-reflection film.

[0072] It can be understood that the anti-reflection film is an optical thin film, which can improve the light transmittance by reducing the reflection of light between the thin film and the substrate. The anti-reflection film is coated on the two inclined surfaces of the Dove prism 252, and its function is to reduce the reflection loss of light at the inclined surface, improve the light transmittance, thereby improving the intensity and quality of the measurement signal, which helps to improve the measurement accuracy and resolution of the imaging spectrometer 220.

[0073] In this embodiment, based on the beam splitter installed behind the Dove prism 252, the position of the illumination mechanism 230 can be arranged arbitrarily, as long as a circular illumination area is formed on the object surface, that is, the encapsulation film 420. Therefore, the illumination mechanism can be set with high freedom, and there is no need to construct a synchronous rotation structure between the illumination mechanism and the Dove prism, which improves the freedom of installation of the illumination mechanism.

[0074] Furthermore, the Dove prism 252 is located at a position where the light beam in the optical path of the objective lens 250 is parallel.

[0075] It can be understood that, to obtain the best performance, the Dove prism 252 is in a position where the light beam in the optical path is collimated, that is, a position where the light beam in the optical path of the objective lens 250 is parallel, which can avoid introducing additional phase differences, thus avoiding the relevant correction requirements during the objective lens design process.

[0076] The embodiment of the present application also provides a method for controlling a scanning measurement device. Refer to Figure 5 , Figure 5Schematic flowchart of the first embodiment of the control method for the scanning and measuring device of the present application.

[0077] In this embodiment, the control method for the scanning and measuring device includes steps S10 to S20:

[0078] Step S10, controlling the rotating mechanism in the scanning and measuring device according to a preset motion trajectory, so that the rotating mechanism drives the objective lens in the scanning and measuring device to rotate, to change the attitude of the linear illumination area formed by the illumination mechanism on the sample to be measured. Wherein, the light beam emitted by the illumination mechanism forms the linear illumination area on the sample to be measured through the objective lens, and the sample to be measured is placed on the material conveying mechanism in the scanning and measuring device;

[0079] It should be noted that the preset motion trajectory refers to the sample movement path and the objective lens rotation path preset by the device according to the measurement requirements; the linear illumination area refers to a long strip area formed by the irradiation of the light beam on the sample to be measured, and the attitude of the linear illumination area can be the angle between the line direction of the linear illumination area and the movement speed direction of the sample to be measured.

[0080] It can be understood that by rotating the objective lens, the attitude of the linear illumination area can be changed, so as to Figure 2 effectively scan the R angle of the encapsulation film in, avoid the measurement blind area caused by the fixed scanning line angle, and achieve comprehensive measurement of the sample at different scanning line angles.

[0081] Step S20, controlling the material conveying mechanism according to the preset motion trajectory, so that the material conveying mechanism drives the sample to be measured to move relative to the measuring mechanism, to change the position of the linear illumination area formed by the illumination mechanism on the sample to be measured.

[0082] It should be noted that the position of the linear illumination area refers to the specific position of the linear illumination area on the surface of the sample to be measured.

[0083] It can be understood that by moving the material conveying mechanism, the position of the linear illumination area can be changed, so as to cooperate with the measuring mechanism to move, avoid the incomplete measurement caused by the fixed scanning line position, and achieve comprehensive measurement of different positions of the sample.

[0084] This embodiment provides a method for controlling a scanning measurement device. By introducing a rotating mechanism at the objective lens in the measurement mechanism and enabling the rotating mechanism to cooperate with the material conveying mechanism on which the sample to be measured is placed, the attitude and position of the linear illumination area formed by the illumination mechanism on the sample to be measured are effectively changed, avoiding the limitations brought by single-angle and single-region measurement, and also effectively avoiding the high cost and error introduction caused by setting multiple measurement processes. Thus, the thickness or surface topography of the encapsulation film can be scanned and measured in any direction, improving the efficiency and accuracy of the encapsulation film detection at a relatively low cost.

[0085] Based on the first embodiment of the present application, in the second embodiment of the present application, the same or similar content as in the above-mentioned first embodiment can be referred to the above introduction and will not be repeated hereinafter. On this basis, please refer to Figure 6 , the rotating mechanism drives the Dove prism in the objective lens to rotate, wherein the rotation angle of the Dove prism is determined by the movement angle of the relative movement.

[0086] Step S10 may include step A10:

[0087] Step A10, controlling the rotating mechanism in the scanning measurement device according to the movement trajectory, so that the rotating mechanism drives the Dove prism in the objective lens of the scanning measurement device to rotate, to change the attitude of the linear illumination area formed by the illumination mechanism in the scanning measurement device on the sample to be measured, wherein the rotation angle of the Dove prism is determined by the movement angle of the relative movement, the light beam emitted by the illumination mechanism forms the linear illumination area on the sample to be measured through the Dove prism, and the sample to be measured is placed on the material conveying mechanism in the scanning measurement device.

[0088] Exemplarily, please refer to Figure 2 , if the sample 400 to be measured moves in the x direction at the start of the measurement, and the included angle between the movement speed direction and the initial position speed direction is , that is, the movement angle of the relative movement. The scanning line direction of the measurement mechanism 200 is perpendicular to the movement speed direction. At this time, the initial rotation angle of the rotating mechanism 240 inside the measurement mechanism 200 is denoted as , that is, the rotation angle of the Dove prism. At the initial position, denote = 0, = 0, assuming that the movement trajectory rotates clockwise during the movement It decreases, and vice versa. Move along a preset trajectory and obtain the direction of the movement speed of the sample to be measured in real time. The material transporting mechanism 300 and the moving mechanism on the support frame 120 move in the x-direction and y-direction respectively, thereby driving the sample 400 to be measured to move along the preset trajectory relative to the measuring mechanism 200. Assuming the movement trajectory is as shown in 423, it is possible to measure the sample to be measured in a full circle. During the movement, the current movement direction can be obtained based on the movement speeds in the x / y directions. The rotating mechanism 240 adjusts the rotation angle in real time according to the movement speed direction. According to the movement speed direction obtained in real time According to the formula:

[0089]

[0090] Calculate the angle that the rotating mechanism 240 needs to rotate. The rotating mechanism 240 rotates and adjusts around the z-axis in real time following the movement direction. Ensure that the scanning line is perpendicular to the movement direction. Then obtain the scanning measurement data and analyze the measurement results in real time.

[0091] Furthermore, please refer to Figure 7 When the Dove prism rotates around its own optical axis, that is, the z-axis in Figure 7 , the rotation angle of the image is twice the rotation angle of the prism. In this embodiment, the imaging spectrometer 220 remains fixed, that is, the entrance slit of the imaging spectrometer remains fixed along the y-direction. When the Dove prism rotates by an angle , since the slit position remains unchanged, it is equivalent to the object participating in imaging rotating by 2 times around the axis , that is Figure 7 When the Dove prism 252 in rotates by 45°, the first scanning line 255 rotates by 90° along the y-direction, forming the second scanning line 256 along the x-direction. Therefore, by driving the Dove prism 252 to rotate around the axis in real time through the rotating mechanism 240 by an angle, it is possible to perform scanning measurements in any direction.

[0092] In a feasible implementation manner, when analyzing the thickness of the thin film to be measured based on the principle of white light spectral interference, the objective lens 250 is an imaging objective lens, and a double telecentric objective lens is preferably used to improve the measurement accuracy. At this time, when the broadband light source in the illumination mechanism 230 vertically illuminates the thin film to be measured, the optical signal reflected from the upper and lower surfaces of the thin film to be measured is finally received by the imaging spectrometer 220. The detector target surface of the imaging spectrometer has M×N pixels. The scanning width L of the objective lens 250 corresponds to M pixels in the spatial dimension on the detector of the imaging spectrometer 220. The signal light generated at each monitoring point on the scanning width L is mapped by the spectrometer to N pixels in the spectral dimension, forming a spectral interference signal. When the refractive index of the thin film to be measured is known, existing methods such as phase extraction to solve the slope, LombScale periodogram, Fourier transform, etc. can be used to directly or indirectly solve the thickness of the thin film, or it can also be solved by methods such as nonlinear least squares method or complex method, which are all typical algorithms for solving the thickness of the thin film. When scanning and moving in different directions, the Dove prism 252 rotates, and scanning measurement can be realized in different directions, so as to analyze the thickness of the sample to be measured.

[0093] In another feasible implementation manner, when analyzing the thickness of the thin film to be measured based on the principle of coaxial line-scanning spectral confocal, the objective lens 250 is a line-scanning dispersion objective lens. The corresponding relationship between the height of the measured surface and the spectrum is established through the principle of optical dispersion, and the imaging spectrometer 220 is used to decode the spectral information, so as to obtain the position information. That is, the white light source in the illumination mechanism 230 emits a beam of broadband composite light, and the dispersion objective lens 250 generates color bands of different wavelengths along the depth direction of the surface of the object to be measured. Among them, only a monochromatic light of a certain specific wavelength is focused on the surface of the object to be measured and reflected back to the optical system at the same time. After the imaging spectrometer separates the reflected wavelength, the wavelength value of the measured position is obtained, and the distance value of the object to be measured can be converted by wavelength-distance calibration. By detecting the wavelength values reflected from the upper and lower surfaces of the thin film to be measured and converting them into distance values, the thickness or surface topography of the thin film can be analyzed. When the Dove prism 252 rotates, scanning measurement can be realized in different directions.

[0094] It should be noted that the above examples are only for understanding the present application and do not constitute a limitation on the control method of the scanning measurement device of the present application. Based on this technical concept, more forms of simple transformations are within the protection scope of the present application.

[0095] The present application provides a computer-readable storage medium with computer-readable program instructions (i.e., computer programs) stored thereon, and the computer-readable program instructions are used to execute the control method of the scanning measurement device in the above embodiments.

[0096] The computer-readable storage medium provided by the present application can be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems or devices, or any combination of the above. More specific examples of computer-readable storage media can include, but are not limited to: electrical connections with one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM) or flash memory, optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the above. In this embodiment, the computer-readable storage medium can be any tangible medium that contains or stores a program, which can be used by or in conjunction with an instruction execution system or device. The program code contained on the computer-readable storage medium can be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (Radio Frequency), etc., or any suitable combination of the above.

[0097] The above computer-readable storage medium can be included in a scanning measurement device; or can exist separately without being assembled into the scanning measurement device.

[0098] The above computer-readable storage medium carries one or more programs. When the one or more programs are executed by the scanning measurement device, the scanning measurement device is caused to: control a rotating mechanism in the scanning measurement device according to a preset motion trajectory, so that the rotating mechanism drives an objective lens in the scanning measurement device to rotate, to change the attitude of a linear illumination area formed by an illumination mechanism in the scanning measurement device on a sample to be measured, wherein a light beam emitted by the illumination mechanism forms the linear illumination area on the sample to be measured through the objective lens, and the sample to be measured is placed on a material transporting mechanism in the scanning measurement device; control the material transporting mechanism according to the preset motion trajectory, so that the material transporting mechanism drives the sample to be measured to move relative to the measuring mechanism, to change the position of the linear illumination area formed by the illumination mechanism on the sample to be measured.

[0099] Computer program code for performing the operations of this application can be written in one or more programming languages or combinations thereof. The above-mentioned programming languages include object-oriented programming languages such as Java, Smalltalk, C++, and also include conventional procedural programming languages such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, executed as an independent software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer through any kind of network, including a local area network (LAN: Local Area Network) or a wide area network (WAN: Wide Area Network), or it can be connected to an external computer (for example, by connecting through an Internet service provider using the Internet).

[0100] The flowcharts and block diagrams in the accompanying drawings illustrate the possible architectures, functions, and operations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in the flowchart or block diagram may represent a module, a program segment, or a part of code that contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than that marked in the accompanying drawings. For example, two consecutively represented blocks may actually be executed substantially in parallel, and they may sometimes be executed in the reverse order, depending on the functions involved. It should also be noted that each block in the block diagram and / or flowchart, and the combination of blocks in the block diagram and / or flowchart, can be implemented by a dedicated hardware-based system for performing the specified functions or operations, or can be implemented by a combination of dedicated hardware and computer instructions.

[0101] The modules described in the embodiments of this application can be implemented in software or in hardware. Among them, the name of the module does not constitute a limitation on the unit itself in some cases.

[0102] The readable storage medium provided by this application is a computer-readable storage medium. The computer-readable storage medium stores computer-readable program instructions (i.e., computer programs) for performing the above-mentioned scanning measurement device control method, and can solve the technical problem that it is difficult to efficiently and low-costly scan and measure the thickness or surface topography of the encapsulation film along a specified trajectory by traditional measurement methods. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided by this application are the same as those of the scanning measurement device control method provided by the above embodiments, and will not be elaborated here.

[0103] The present application also provides a computer program product, including a computer program which, when executed by a processor, implements the steps of the scanning measurement device control method as described above.

[0104] The computer program product provided by the present application can solve the technical problem that it is difficult to efficiently and low-costly scan and measure the thickness or surface topography of the encapsulation film along a specified trajectory by traditional measurement methods. Compared with the prior art, the beneficial effects of the computer program product provided by the present application are the same as those of the scanning measurement device control method provided by the above embodiments, and will not be elaborated here.

[0105] The above are only partial embodiments of the present application, and thus do not limit the patent scope of the present application. Any equivalent structural transformation made under the technical concept of the present application by using the content of the specification and drawings of the present application, or any direct / indirect application in other related technical fields, is included in the patent protection scope of the present application.

Claims

1. A scanning measurement device, the scanning measurement device comprising: A base frame, a measuring mechanism, and a material transporting mechanism, wherein the base frame includes a conveying platform and a support frame located above the conveying platform, the material transporting mechanism is installed on the conveying platform, and the measuring mechanism is installed on the support frame, characterized in that the measuring mechanism includes an imaging spectrometer, an illumination mechanism, a rotating mechanism, and an objective lens, the entrance slit of the imaging spectrometer is located at the image plane position of the objective lens, the illumination mechanism is installed on the side of the objective lens, and the objective lens is composed of a first lens group, a Dove prism, and a second lens group in sequence, wherein the first lens group is located on a side adjacent to the material transporting mechanism, and the second lens group is located on a side adjacent to the imaging spectrometer; The rotating mechanism is transmission-connected to the Dove prism; The light beam emitted by the illumination mechanism passes through the Dove prism and the first lens group in sequence to form a linear illumination area on the sample to be tested; The imaging spectrometer receives the measurement signal generated by the sample to be tested via the first lens group, the Dove prism and the second lens group in sequence, wherein the measurement signal is the reflected light of the linear illumination area on the sample to be tested.

2. The scanning measurement device according to claim 1, characterized in that, The light beam emitted by the illumination mechanism passes through the first inclined surface of the Dove prism and the first lens group in sequence to form a linear illumination area on the sample to be tested, wherein the first inclined surface is adjacent to the first lens group, and the relative position between the illumination mechanism and the Dove prism is fixed.

3. The scanning measurement device according to claim 2, characterized in that, The first inclined surface is coated with a semi-transparent and semi-reflective film.

4. The scanning measurement device according to claim 1, characterized in that, The objective lens further comprises a cubic beam splitter, wherein the cubic beam splitter is located between the dove prism and the second lens group; The light beam emitted by the illumination mechanism forms a linear illumination area on the sample to be tested through the cubic beam splitter, the second inclined surface of the Dove prism, the first inclined surface of the Dove prism and the first lens group in sequence, wherein the first inclined surface is adjacent to the first lens group, and the second inclined surface is adjacent to the second lens group; The imaging spectrometer receives the measurement signal generated by the sample to be measured via the first lens group, the first inclined surface, the second inclined surface, the cube beam splitter and the second lens group in sequence.

5. The scanning measurement device according to claim 4, characterized in that, The first inclined surface and the second inclined surface are both coated with anti-reflection films.

6. The scanning measurement device according to any one of claims 2 to 5, characterized in that, The Dove prism is located at a position in the optical path of the objective lens where the light beam is parallel.

7. A method for controlling a scanning measurement device, characterized in that, Applied to the scanning measurement device according to any one of claims 1 to 6, the scanning measurement device control method comprises: Controlling the rotating mechanism in the scanning and measuring device according to a preset motion trajectory, so that the rotating mechanism drives the Dove prism in the scanning and measuring device to rotate, so as to change the posture of the linear illumination area formed by the illumination mechanism in the scanning and measuring device on the sample to be measured, wherein the light beam emitted by the illumination mechanism sequentially passes through the Dove prism and the first lens group to form the linear illumination area on the sample to be measured, and the sample to be measured is placed on the material transport mechanism in the scanning and measuring device; Control the material transporting mechanism according to the preset motion trajectory, so that the material transporting mechanism drives the sample to be measured to perform relative motion with the measuring mechanism, so as to change the position of the linear illumination area formed by the illumination mechanism on the sample to be measured.

8. The control method of the scanning measurement device according to claim 7, wherein, The rotation angle of the Dove prism is determined by the motion angle of the relative motion.

9. A storage medium, characterized in that, The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by a processor, the steps of the scanning measurement device control method according to any one of claims 7 to 8 are implemented.

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