Water tank for tail gas treatment, tail gas treatment equipment and control method of tail gas treatment equipment

Abstract

The invention relates to a water tank for tail gas treatment, tail gas treatment equipment and a control method thereof, and belongs to the technical field of tail gas treatment. The water tank comprises a rectifying cavity, a containing cavity and a control system. A baffle is arranged in the rectifying cavity and divides the rectifying cavity into a flow mixing space and an exhaust space, an air inlet is formed in the top of the flow mixing space, and an air outlet is formed in the top of the exhaust space. A mixer is arranged in the flow mixing space, airflow enters the flow mixing space from the air inlet, forms cyclone when passing through the mixer and then enters the exhaust space to be discharged out of the water tank from the air outlet; a temperature sensor, a heat exchanger and a turbidimeter which are in electric signal connection with the control system are arranged in the containing cavity, and the control system receives signals fed back by the temperature sensor and controls the heat exchange efficiency of the heat exchanger according to the signals. When the tail gas treatment equipment with the water tank operates, the heat exchange efficiency and the pollution discharge efficiency can be adjusted through the temperature value and the turbidity value detected in real time, the tail gas purification effect is improved, and the maintenance period is prolonged.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas treatment, and in particular to a water tank for tail gas treatment, tail gas treatment equipment and a control method thereof. Background Art

[0002] In the manufacturing process of the pan-semiconductor industry represented by semiconductors, solar photovoltaics, flat panel displays and LEDs, exhaust gas treatment equipment is required to treat the process exhaust gas in order to meet national standards.

[0003] The dust content of the process exhaust gas is high, and the humidity of the exhaust gas discharged after being treated by the existing exhaust gas treatment equipment is high, which is easy to clog the equipment, which can easily cause equipment downtime, and it is time-consuming and labor-intensive to clean the exhaust gas treatment equipment. Summary of the invention

[0004] In view of the above analysis, an embodiment of the present invention aims to provide a water tank for exhaust gas treatment, an exhaust gas treatment device and a control method thereof, so as to solve the problems that the treated exhaust gas has high dust content, the equipment is easily blocked, the cleaning of the exhaust gas treatment equipment is time-consuming and labor-intensive after blockage, and the exhaust gas is cooled with high energy consumption.

[0005] In one aspect, the present invention provides a water tank for tail gas treatment, the water tank comprising a rectifying chamber, a containing chamber located below the rectifying chamber, and a control system;

[0006] A baffle is provided in the rectifying cavity, and the baffle divides the rectifying cavity into a mixed flow space and an exhaust space. An air inlet is provided at the top of the mixed flow space, and an air outlet is provided at the top of the exhaust space.

[0007] A mixer is provided in the mixed flow space, and the airflow enters the mixed flow space from the air inlet, forms a cyclone when the airflow passes through the mixer, and then enters the exhaust space and is discharged from the water tank from the air outlet;

[0008] The accommodating cavity is provided with a temperature sensor and a heat exchanger which are respectively connected to the control system by electrical signals. The control system receives a signal fed back by the temperature sensor and controls the heat exchange efficiency of the heat exchanger according to the signal.

[0009] Furthermore, the heat exchanger is connected to a cooling water inlet pipe and a cooling outlet pipe, and a circulating pump is arranged on the cooling water inlet pipe or the cooling outlet pipe, and the circulating pump is electrically connected to the control system; the control system receives the signal fed back by the temperature sensor and controls the operating speed of the circulating pump according to the signal, thereby controlling the heat exchange efficiency of the heat exchanger.

[0010] Furthermore, a turbidity meter is also arranged in the accommodating chamber, and the turbidity meter is connected to the control system via an electrical signal.

[0011] Furthermore, the accommodating chamber is provided with a sewage outlet and a water replenishment outlet, the sewage outlet is connected to the sewage discharge pipe, and the water replenishment outlet is connected to the water replenishment pipe.

[0012] Furthermore, the sewage outlet and the water replenishment outlet are respectively arranged on two opposite side walls of the accommodating cavity.

[0013] Furthermore, a sewage pump is provided on the sewage pipe, and the sewage pump is electrically connected to the control system; a water replenishment pump is provided on the water replenishment pipe, and the water replenishment pump is electrically connected to the control system; the control system controls the operation of the sewage pump and the water replenishment pump according to the turbidity value fed back by the turbidity meter.

[0014] Furthermore, one end of the mixer is closed by the side wall of the rectifying cavity, and the other end of the mixer is fixedly connected to the baffle, and an opening is provided on the baffle, and the opening is located in the area of ​​the projection of the mixer on the baffle.

[0015] Furthermore, the mixer is arranged below the air inlet, and includes at least one upper arc plate and a W-shaped plate; the upper arc plate protrudes upward, and one side of the upper arc plate forms a first air path inclined downward, and the other side of the upper arc plate forms a second air path inclined downward; the W-shaped plate is located below the upper arc plate and is spaced apart from the upper arc plate, and the W-shaped plate includes at least two lower arc plates protruding downward arranged in parallel; after the air flows through the first air path or the second air path, a cyclone is formed between the upper arc plate and the W-shaped plate.

[0016] Furthermore, a spray device is provided in the mixed flow space, the spray device is arranged above the mixer, and the water outlet direction of the spray device is toward the mixer.

[0017] Furthermore, a fog-making device is provided at the bottom of at least one of the lower arc plates.

[0018] On the other hand, the present invention provides an exhaust gas treatment device, comprising a water tank for exhaust gas treatment as described above.

[0019] On the other hand, the present invention also provides a method for controlling the exhaust gas treatment device as described above, comprising the following steps:

[0020] S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward;

[0021] S2: The temperature sensor monitors the temperature of the liquid in the water tank in real time and feeds back to the control system;

[0022] S3: The control system compares the measured temperature value with a preset temperature threshold;

[0023] S4: When the measured temperature value is greater than or equal to the preset temperature threshold, the control system controls the heat exchanger to start working; the control system continues to receive temperature signals until the temperature is lower than the preset temperature threshold, and the control system controls the heat exchanger to stop working.

[0024] Furthermore, it also includes:

[0025] In step S4, after the circulation pump is started, the control system controls the heat exchange efficiency of the heat exchanger according to the corresponding relationship between the preset temperature and the heat exchange efficiency of the heat exchanger.

[0026] Further, in step S4, when the temperature value is less than the preset temperature threshold for more than 10 seconds, the control system controls the heat exchanger to stop working.

[0027] On the other hand, the present invention provides a control method for an exhaust gas treatment device including the water tank described above, comprising the following steps:

[0028] S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward;

[0029] S2: The turbidity meter monitors the turbidity value of the liquid in the water tank in real time and feeds the turbidity value back to the control system;

[0030] S3: The control system compares the measured turbidity value with a preset turbidity threshold;

[0031] S4: When the turbidity value is greater than or equal to a preset turbidity threshold, the control system controls to start the water supply pump and the sewage pump synchronously or asynchronously;

[0032] S5: The control system continues to receive the turbidity signal until the turbidity is lower than the turbidity threshold, and the control system controls the water supply pump and the sewage pump to stop working.

[0033] Furthermore, in step S4, after the water supply pump and the sewage pump are started, the control system controls the rotation speed of the water supply pump and the sewage pump according to the corresponding relationship between the preset turbidity and the rotation speed of the water supply pump and the sewage pump.

[0034] Further, in step S4, when the turbidity meter detects that the turbidity value is greater than the preset turbidity threshold and continues to increase, the control system controls the circulation pump to increase the motor speed.

[0035] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0036] (1) Since the water tank of the present invention is provided with a temperature sensor, a built-in heat exchanger and a control system, the heat exchange efficiency can be adjusted according to the real-time temperature conditions to control the cooling intensity of the water tank, thereby improving the reliability of controlling the temperature of the water in the water tank, avoiding excessive outlet temperature, reducing outlet humidity, and reducing the risk of clogging of the exhaust gas treatment equipment. At the same time, the water consumption is reduced, water saving is achieved, and the maintenance period is extended.

[0037] (2) Since the water tank of the present invention is provided with a turbidity meter, a control system, a sewage pump and a water replenishment pump, the sewage discharge and water replenishment intensity of the water tank can be controlled by the real-time turbidity conditions, so that the water quality in the water tank is maintained within a stable range. At the same time, the reliability of the control of the water quality in the water tank is improved, so that the water in the water tank can be recycled and will not clog the pipeline, thereby further realizing water conservation and extending the maintenance period.

[0038] (3) The mixer of the water tank of the present invention adopts the structure of "upper arc plate + W-shaped plate", so that the exhaust gas is diverted by the upper arc plate and converges after forming a vortex in the mixer, which prolongs the flow path of the exhaust gas and increases the time the exhaust gas stays in the mixer. At the same time, the exhaust gas is in full contact with the mixer, and the heat carried by the exhaust gas is fully transferred to the mixer. At the same time, the larger dust particles in the exhaust gas collide with the wall of the mixer under the action of the vortex, and the dust particles are separated from the gas under the action of centrifugal force, reducing the risk of blockage of the exhaust gas treatment equipment and extending the maintenance period of the exhaust gas treatment equipment. In addition, there may be residual substances in the exhaust gas that have not been fully reacted and processed in the reaction chamber, such as SiH 4 For example, SiH 4 You can continue with O 2 Mix, the two react to remove SiH 4 , improve the efficiency of exhaust gas treatment.

[0039] (4) The present invention sets a spray head above the mixer of the water tank, and the spray head provides continuous spray water, and the spray water is fully mixed with the dust in the exhaust gas. The mixer is continuously flushed by the spray water in the water tank, and the dust attached to the mixer is taken away by the spray water, and the heat of the mixer and the exhaust gas is also taken away by the spray water.

[0040] (5) The present invention is provided with an ultrasonic mist maker, which is placed at the bottom of the W-shaped plate. The ultrasonic mist maker breaks the spray water into small-diameter droplets through high-frequency vibration. The small-diameter droplets can combine with the smaller-diameter dust particles in the exhaust gas to remove the small-diameter dust particles.

[0041] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained through the contents particularly pointed out in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The drawings are only for the purpose of illustrating particular embodiments and are not to be considered limiting of the present invention. Like reference symbols denote like components throughout the drawings.

[0043] Figure 1 A three-dimensional perspective view of a water tank structure with a built-in heat exchanger according to the present invention;

[0044] Figure 2 for Figure 1 A front view of a water tank of a specific embodiment (heat exchanger not shown);

[0045] Figure 3 for Figure 2 A sectional view of the water tank along the AA line of the specific embodiment;

[0046] Figure 4 for Figure 2 A top view of a water tank of a specific embodiment;

[0047] Figure 5 for Figure 4 A CC sectional view of a water tank of a specific embodiment;

[0048] Figure 6 A schematic diagram of a cross section of a mixer according to a specific embodiment;

[0049] Figure 7 The figure is a schematic structural diagram of an embodiment of an exhaust gas treatment device.

[0050] Reference numerals:

[0051] 10-water tank; 100-rectifier chamber; 101-mixing space; 102-exhaust space; 103-baffle; 1031-opening; 110-air inlet; 120-mixer; 121-upper arc plate; 122-W-shaped plate; 1221-first lower arc plate; 1222-second lower arc plate; 130-sprinkler; 140-air outlet; 150-ultrasonic mist maker;

[0052] 200-accommodation chamber; 210-drainage outlet; 220-water supply outlet; 230-turbidimeter;

[0053] 300-heat exchanger; 303-cooling water inlet pipe; 304-cooling water outlet pipe; 305-circulation pump;

[0054] 20-air inlet chamber; 30-reaction chamber; 40-spray tower. DETAILED DESCRIPTION

[0055] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0056] It should be noted that in all the drawings, hidden structures are represented by dotted lines.

[0057] Example 1

[0058] A specific embodiment of the present invention, as Figure 1-Figure 6 As shown, a water tank 10 is disclosed, which is suitable for exhaust gas treatment equipment.

[0059] See attached Figure 2-3 The water tank 10 includes a rectifying chamber 100 and a containing chamber 200. The rectifying chamber 100 is above the containing chamber 200, and the containing chamber 200 is used to collect and store water used in the working process of the exhaust gas treatment equipment, for example Figure 7 The spray water in the spray tower 40, the water in the reaction chamber 30, and the water sprayed by the spray head 130 in the rectifying chamber 100 of the water tank 10, etc. are collected in the receiving chamber 200 of the water tank 10, and are cleaned, purified and cooled in the receiving chamber 200, and then recycled in the exhaust gas treatment process. Under normal working conditions, the water in the rectifying chamber 100 falls into the receiving chamber 200, and the water level in the water tank 10 does not reach the rectifying chamber 100.

[0060] See attached Figure 3 and Figure 5 A baffle 103 is disposed in the middle of the rectifying chamber 100 of the water tank 10, dividing the rectifying chamber 100 into a mixed flow space 101 and an exhaust space 102. The baffle 103 may also partially or completely extend into the accommodating chamber 200. The exhaust gas rotates in the mixed flow space 101 and is fully mixed with the water mist, and then enters the spray tower 40 through the exhaust space 102.

[0061] The air inlet 110 is arranged at the top of the mixed flow space 101, and the air inlet 110 is used to transport the exhaust gas to be treated. A mixer 120 is arranged below the air inlet 110, and the distance between the lower end of the air inlet 110 and the top of the mixer 120 should be greater than 100 mm and less than 500 mm. The above arrangement can better ensure the guiding effect of the mixer 120 on the air flow, so that the exhaust gas generates a cyclone in the mixer 120. For example, the distance between the lower end of the air inlet 110 and the top of the mixer 120 can be set to 100 mm, 300 mm or 500 mm, all of which do not depart from the scope of the present invention, and those skilled in the art can set it according to actual needs.

[0062] A spray head 130 is arranged around the air inlet 110 and above the mixer 120, and the water outlet direction of the spray head 130 is toward the mixer 120. A plurality of spray heads 130 may be arranged, evenly distributed along the length direction of the mixer 120, and used to spray water mist toward the upper surface of the mixer 120 to absorb dust in the air flow. It should be understood that the arrangement of the spray head 130 is not limited to the following. Figure 1 as well as Figure 3 The uniform distribution along the width direction of the mixer 120 shown only needs to be arranged in the direction of travel of the exhaust gas flowing from the air inlet 110 and can absorb dust in the exhaust gas. For example, a plurality of spray heads 130 surround the periphery of the air inlet 110 and are located above the mixer 120. The plurality of spray heads 130 can be uniformly distributed or unevenly arranged.

[0063] In this embodiment, the spray device is a spray head 130 , but the spray device of the present invention is not limited to the spray head 130 , as long as it can achieve the spray function, which will not be described in detail below.

[0064] See also Figure 1 , Figure 2 , Figure 3 The baffle 103 is provided with an opening 1031, and the opening 1031 is provided corresponding to the outlet of the mixer 120. The airflow entering from the air inlet 110 passes through the mixer 120 and then enters the exhaust space 102 of the rectifying cavity 100 of the water tank 10 through the opening 1031.

[0065] See also Figure 2 and Figure 4 An air outlet 140 is provided at the upper portion of the exhaust space 102 , and the air flow is discharged out of the water tank 10 through the air outlet 140 .

[0066] Wherein, the mixer 120 includes an upper arc plate 121 and a W-shaped plate 122. The upper arc plate 121 and the W-shaped plate 122 are both in the shape of long strips, one end of which is connected to the baffle 103, and the other end is connected to the side wall of the water tank away from the baffle 103. The cross section of the upper arc plate 121 is a circular arc protruding upward, and one side of the upper arc plate 121 forms a first air path inclined downward, and the other side forms a second air path inclined downward. The airflow entering from the air inlet 110 has a certain pressure and flow rate, rushes to the upper surface of the upper arc plate 121, and is divided into two parts by the top of the upper arc plate 121, sliding down along the first air path and the second air path on the upper surface of the upper arc plate 121, and finally leaves the edges on both sides of the upper arc plate 121 and continues to descend.

[0067] The W-shaped plate 122 is located below the upper arc plate 121 and is spaced apart from the upper arc plate 121. The length directions of the W-shaped plate 122 and the upper arc plate 121 are arranged parallel to each other. The W-shaped plate 122 includes a first lower arc plate 1221 and a second lower arc plate 1222 of the same shape and size arranged in parallel, and the connection between the first lower arc plate 1221 and the second lower arc plate 1222 is aligned with the highest point of the upper arc plate 121 in the vertical direction. In this way, the mixer 120 is bilaterally symmetrical, and the airflow moving to the W-shaped plate 122 through the first gas path and the second gas path can form two symmetrical cyclones, so that the overall purification effect on the exhaust gas is balanced.

[0068] The connection between the first lower arc plate 1221 and the second lower arc plate 1222 and the highest point of the upper arc plate 121 do not need to be strictly aligned in the vertical direction, and can have a certain deviation. The first lower arc plate 1221 and the second lower arc plate 1222 do not need to be completely symmetrical.

[0069] The relationship between the radius R of the upper arc plate 121 and the radius r of the first lower arc plate 1221 satisfies the following condition: 1.2r≤R≤1.8r. Through this setting, it can be ensured that the airflow leaving the upper arc plate 121 runs downward to contact the upper surface of the outer side of the first lower arc plate 1221 or the second lower arc plate 1222, and under the guidance of the arc surface, moves downward and inward, and finally forms a cyclone between the upper arc plate 121 and the W-shaped plate 122.

[0070] The water tank 10 is provided with a sewage outlet 210 and a water supply outlet 220 on the side wall of the accommodating chamber 200. A heat exchanger 300 is provided in the water tank 10 to cool the water in the water tank 10. The heat exchanger 300 can reduce the water temperature in the water tank 10 by 10-20°C. A control system is provided outside the water tank 10, and the control system includes a PLC controller.

[0071] The heat exchanger 300 can be configured as a water-cooled coil or a semiconductor heat exchanger. In this embodiment, the heat exchanger 300 is configured as a water-cooled coil. When a semiconductor heat exchanger is used as the heat exchanger 300 of the present invention, the semiconductor heat exchanger can be wrapped with a waterproof cover and then a radiator can be installed.

[0072] The sewage outlet 210 is arranged at the bottom of the accommodating chamber 200, for example, it can be arranged below the mixed flow space 101, close to the bottom of the accommodating chamber 200. The sewage outlet 210 is connected to a sewage pipe, and a sewage pump (not shown in the figure) is arranged on the sewage pipe. The sewage pump is connected to the PLC controller of the water tank 10 by electrical signals, and the speed of the sewage pump can be controlled by the PLC controller.

[0073] A turbidity meter 230 is also provided in the receiving chamber 200. The turbidity meter 230 is provided below the exhaust space 102. When the exhaust gas treatment device is in operation, the turbidity meter 230 is located in the sewage contained in the water tank 10. The turbidity meter 230 can monitor the turbidity of the water in the receiving chamber 200 in real time. The turbidity meter 230 is electrically connected to the PLC controller of the water tank 10, and the turbidity value in the receiving chamber 200 is fed back to the PLC controller in real time.

[0074] The water replenishment port 220 is arranged on the side wall of the accommodating chamber 200, for example, it can be arranged on the side wall away from the mixed flow space 101 and close to the bottom of the accommodating chamber 200. Preferably, the sewage outlet 210 and the water replenishment port 220 are respectively located on two opposite side walls of the accommodating chamber 200, so that the sewage outlet 210 and the water replenishment port 220 are far apart. The water replenishment port 220 is connected to a water replenishment pipe, and a water replenishment pump (not shown in the figure) is arranged on the water replenishment pipe. The water replenishment pump is electrically connected to the PLC controller of the water tank 10, and the speed of the water replenishment pump can be controlled by the PLC controller.

[0075] A temperature sensor can also be set in the water tank 10, and the temperature sensor is connected to the PLC controller with an electrical signal. When the temperature sensor detects that the water temperature in the water tank 10 is greater than a preset temperature, the temperature sensor transmits a signal to the PLC controller, and the PLC controller can control the heat exchanger 300 to start working.

[0076] The heat exchanger 300 is arranged in the accommodating chamber 200 of the water tank 10, for example, it can be arranged below the exhaust space 102, or below the mixed flow space 101. The present invention does not limit the position of the heat exchanger 300 in the water tank 10. It is only required that when the exhaust gas treatment equipment is in operation, the heat exchanger 300 contacts the water in the water tank 10 to cool the water contained in the water tank 10, so that the exhaust gas temperature is reduced, and thus the exhaust gas humidity will also be reduced. The heat exchanger 300 is also provided with a cooling water inlet pipe 303 and a cooling water outlet pipe 304, and a circulating pump 305 is provided on the cooling water outlet pipe 304. The circulating pump 305 is connected to the PLC controller of the water tank 10 by electrical signals, and the speed of the circulating pump 305 can be controlled by the PLC controller so that the cooling water flow rate reaches 10-40LPM.

[0077] When the water tank 10 of the present invention starts working, the exhaust gas enters the mixed flow space 101 to form a cyclone, and dust particles and other dirt in the exhaust gas are removed by centrifugal force and water adhesion, and then the exhaust gas enters the spray tower 40 from the exhaust space 102. The circulating return water such as spray water carries dirt such as particles into the accommodating chamber 200 of the water tank 10. Since the temperature of the exhaust gas is very high, the temperature of the circulating return water is also relatively high at this time. At this time, the PLC controls the circulation pump 305 to start, so that the water in the accommodating chamber 200 is cooled through the heat exchanger 300.

[0078] The turbidity meter 230 detects the turbidity of the water in the water tank 10 in real time. At this time, as the exhaust gas purification work continues, the turbidity of the water in the water tank 10 will continue to rise, and some dust will adhere to the surface of the heat exchanger 300. At this time, the heat exchange effect of the heat exchanger 300 will gradually deteriorate. When the turbidity meter 230 detects that the turbidity is greater than the preset turbidity value and continues to increase, the PLC controller controls the circulating pump 305 to increase the motor speed to compensate for the heat exchange loss. The preset value described above can be 100NTU, 200NTU or other values, and those skilled in the art can set it according to the actual working conditions.

[0079] At the same time, the PLC controller controls the sewage pump to increase the speed of sewage discharge and controls the water supply pump to increase the speed of water supply. In this process, due to sewage discharge and water supply, the turbidity and temperature will continue to decrease. When the turbidity meter 230 detects that the turbidity continues to decrease, the turbidity meter 230 transmits the turbidity signal to the PLC controller, and the PLC controller controls the sewage pump to slow down to reduce the sewage discharge speed and controls the water supply pump to slow down to reduce the water supply speed. The lower the turbidity value, the smaller the sewage discharge speed of the sewage outlet 210 and the water supply speed of the water supply outlet 220.

[0080] Compared with the prior art, the water tank 10 with the mixer 120 provided in this embodiment adopts the structure of "upper arc plate + W-shaped plate" in the mixer 120, so that the exhaust gas is diverted by the upper arc plate 121, and converges after forming a vortex in the mixer 120, thereby extending the flow path of the exhaust gas and increasing the time the exhaust gas stays in the mixer 120. At the same time, the exhaust gas is in full contact with the mixer 120, and the heat carried by the exhaust gas is fully transferred to the mixer 120. At the same time, the dust particles in the exhaust gas collide with the wall of the mixer 120 under the action of the vortex, and the dust particles are separated from the gas under the action of centrifugal force and are taken away by the spray water. In addition, there may be residual substances in the exhaust gas that have not been fully reacted and processed in the reaction chamber 30, such as SiH 4 For example, SiH 4 You can continue with O 2 Mix, the two react to remove SiH 4 .

[0081] In this embodiment, a spray head 130 is arranged above the mixer 120 of the water tank 10. The spray head 130 provides continuous spray water, which is fully mixed with the dust in the exhaust gas. On the other hand, the spray water also removes the dust on the wall of the mixer 120. The mixer 120 is continuously flushed by the spray water in the water tank 10, and its heat is also removed by the spray water.

[0082] In this embodiment, due to the provision of a turbidity meter 230, a built-in heat exchanger 300 and a PLC controller, the sewage discharge, water replenishment and cooling intensity of the water tank 10 can be controlled by real-time turbidity conditions, thereby improving the reliability of controlling the temperature of the water in the water tank 10, while reducing the water consumption and achieving water conservation.

[0083] In addition, the heat exchanger 300 is directly arranged in the water tank 10. Compared with the heat exchanger 300 directly extracting water from the water tank 10 and cooling it, the heat exchanger 300 does not have the problem of heat exchange pipe blockage, and will not affect the heat exchanger 300, thereby ensuring the stability of the overall operation of the exhaust gas treatment equipment.

[0084] Example 2

[0085] Another specific embodiment of the present invention, as Figure 1-Figure 6 As shown, a water tank 10 is disclosed, which is suitable for exhaust gas treatment equipment.

[0086] Based on the structure of Example 1, further, see Figure 6, the value range of the center angle a of the upper arc plate 121 is: 150°≤a≤200°, and the value range of the center angle b of the first lower arc plate 1221 and the second lower arc plate 1222 is: 150°≤b≤200°. For example, the center angle a of the upper arc plate 121 can be set to 150°, 170°, 190° or 200°. The center angle b of the first lower arc plate 1221 and the second lower arc plate 1222 can be set to: 150°, 170°, 190° or 200°.

[0087] Preferably, the central angle a of the upper arc plate 121 and the central angle b of the first lower arc plate 1221 and the second lower arc plate 1222 are both 180°.

[0088] Among them, if the central angle a of the upper arc plate 121 and the central angle b of the first lower arc plate 1221 and the second lower arc plate 1222 are too large, a relatively small space will be formed for the airflow to form a cyclone. The airflow escaping from the space will be difficult to be driven by the cyclone to re-enter the main airflow, so that the purification effect of the exhaust gas will be reduced.

[0089] Conversely, if the central angle a of the upper arc plate 121 and the central angle b of the first lower arc plate 1221 and the second lower arc plate 1222 are too small, the guiding surface for the airflow is too small and the opening for escape and divergence is too large, making it difficult to form a space capable of producing a complete cyclone. Ultimately, the direction of the airflow cannot be controlled and a cyclone cannot be produced.

[0090] Furthermore, the value range of the height difference ΔH between the lower edge of the upper arc plate 121 and the outer upper edge of the W-shaped plate 122 is: -r / 10≤ΔH≤r / 10.

[0091] Preferably, the height difference ΔH between the lower edge of the upper arc plate 121 and the outer upper edge of the W-shaped plate 122 is 0.

[0092] The upper arc plate 121 and the W-shaped plate 122 can be spaced apart by a certain distance in the vertical direction, or can overlap by a certain distance. As long as they are within a certain range, the generation of cyclones can be guaranteed. In the best case, the lower edge of the upper arc plate 121 and the outer upper edge of the W-shaped plate 122 are on the same horizontal plane. In this case, the pressure loss of the exhaust gas is small, and the effect of the gas cyclone is better.

[0093] Furthermore, the air inlet 110 is arranged away from the baffle 103, and the axis of the air inlet 110 is vertically aligned with the highest point of the upper arc plate 121. Such an arrangement can ensure that the flow path of the exhaust gas is longer, and the air flow of the intake air can be distributed as evenly as possible, so that the gas flow in the first air path and the second air path remains balanced, thereby improving the purification effect.

[0094] Example 3

[0095] On the basis of any of the foregoing embodiments, an ultrasonic mist maker 150 is disposed at the bottom of the first lower arc plate 1221 and the bottom of the second lower arc plate 1222 .

[0096] The atomizing device in this embodiment uses an ultrasonic mist maker 150. In other embodiments, atomizing devices such as a jet atomizer, a mesh atomizer, etc. can also be used.

[0097] Furthermore, a plurality of ultrasonic mist generators 150 are provided, which are evenly distributed along the length direction of the first lower arc plate 1221 and the second lower arc plate 1222 .

[0098] Furthermore, an ultrasonic mist generator 150 may be arranged within 10 mm below the water surface in the accommodating chamber 200 .

[0099] The ultrasonic mist maker 150 breaks the spray water into small-diameter droplets through high-frequency vibration. The small-diameter droplets can combine with the small-diameter dust particles in the exhaust gas to achieve the separation of the small-diameter dust particles.

[0100] Further, one end of the upper arc plate 121 and the W-shaped plate 122 is fixedly connected to the side wall of the mixed flow space 101 of the water tank 10 away from the exhaust space 102, and the other end is fixedly connected to the baffle 103. The above-mentioned fixed connection method can be welding, or can be fixed by bolts, or other connection methods in the prior art.

[0101] The baffle 103 is provided with an opening 1031, and the opening 1031 is located in the area of ​​the projection of the mixer 120 on the baffle 103. Preferably, the outer contour of the opening 1031 is located within the projection of the upper arc plate 121 and the W-shaped plate 122 on the baffle 103, and the outer contour of the opening 1031 can be set to coincide with the projection of the upper arc plate 121 and the W-shaped plate 122 on the baffle 103. In this case, the pressure loss of the exhaust gas flow is small and the airflow is more stable.

[0102] In this embodiment, a fogging device is provided, and the fogging device is arranged at the bottom of the W-shaped plate 122. The fogging device breaks the spray water into small-diameter droplets through high-frequency vibration. The small-diameter droplets can combine with the smaller-diameter dust particles in the exhaust gas. After the two are combined, they are easier to separate from the exhaust gas flow, thereby removing the small-diameter dust particles in the micron level.

[0103] Example 4

[0104] On the other hand, see Appendix Figure 7 As shown, the present invention provides an exhaust gas treatment device including the aforementioned water tank 10, the exhaust gas treatment device includes the aforementioned water tank 10, and also includes an air inlet chamber 20, a reaction chamber 30 and a spray tower 40. The air inlet chamber 20 is connected to the reaction chamber 30, the reaction chamber 30 is connected to the water tank 10 through the air inlet 110, and the air outlet 140 of the water tank 10 is connected to the spray tower 40.

[0105] When the exhaust gas treatment equipment is in operation, the exhaust gas enters the water tank 10 from the air inlet 110 and flows downward, and is divided into two gas paths by the upper arc plate 121. The two gas paths move downward along the upper arc plate 121 and enter the W-shaped plate 122, and after spiral movement along the space formed by the W-shaped plate 122 and the upper arc plate 121, enter the exhaust space 102 on the right side of the water tank 10 through the opening 1031 on the baffle 103, and enter the spray tower 40 from the air outlet 140. At the same time, the water from the spray head 130 sprays the exhaust gas, and the water flows downward to the W-shaped plate 122 and then flows from the opening 1031 of the baffle 103 into the accommodating chamber 200 of the water tank 10. On the other hand, the present invention also relates to a control method for the water tank 10 described above, comprising the following steps:

[0106] S1: The exhaust gas treatment equipment is started, and the exhaust gas enters the water tank 10 from the air inlet 110 and flows downward;

[0107] S2: The turbidity meter 230 monitors the turbidity value of the liquid in the water tank 10 in real time and feeds back to the control system;

[0108] S3: The control system compares the measured turbidity value with a preset turbidity threshold;

[0109] S4: When the turbidity value is greater than or equal to the preset turbidity threshold (for example, it can be set to 500NTU), the control system controls the synchronous or asynchronous start of the water supply pump and the sewage pump; the control system continues to receive turbidity signals until the turbidity value is lower than the preset turbidity threshold, and the control system controls the water supply pump and the sewage pump to stop working.

[0110] Among them, the control system controls the water supply pump to supply clean water to the water tank 10 and controls the sewage pump to discharge the sewage in the water tank 10 according to the linear relationship between the preset turbidity value and the rotation speed of the water supply pump and the sewage pump, so as to discharge the sewage in the water tank 10 in time.

[0111] The water supply pump and the sewage pump are both connected to a frequency converter, and the control system controls the motor speed of the water supply pump and the sewage pump by controlling the frequency of the frequency converter. Specifically, the relationship between the turbidity value and the output frequency of the frequency converter is as follows: Y = 0.1X + 30, where Y is the output frequency of the frequency converter and X is the turbidity value.

[0112] The turbidity meter 230 can monitor the turbidity value in real time. When the signal of the turbidity value is greater than or equal to the preset turbidity threshold value for more than 10 seconds, the control system controls the synchronous or asynchronous start of the water supply pump and the sewage pump according to the received signal. When the turbidity value is less than the turbidity threshold value for more than 10 seconds, the control system controls the water supply pump and the sewage pump to stop working. Such a setting can prevent the system from misjudgment and avoid interference.

[0113] Among them, the synchronous start of the water supply pump and the sewage pump can be used to start the water supply pump and the sewage pump at the same or different motor speeds to supply water and discharge sewage. The asynchronous start of the water supply pump and the sewage pump can be set to start the sewage pump first, discharge the sewage in the water tank 10, close the sewage pump, and then start the water supply pump to replenish water in the water tank 10 so that the turbidity value is less than the preset turbidity threshold. Furthermore, two liquid level gauges at different heights can be set in the water tank 10 to control the drainage of the sewage pump so that when the water level is lower than the lower height liquid level, the sewage is stopped and the water supply pump is turned on until the water level in the water tank 10 is higher than the higher height liquid level, and then the water supply pump is turned off.

[0114] In addition, another embodiment of the control method of the water tank 10 described above in the present invention includes the following steps:

[0115] S1: The exhaust gas treatment equipment is started, and the exhaust gas enters the water tank 10 from the air inlet 110 and flows downward;

[0116] S2: The temperature sensor monitors the temperature of the liquid in the water tank 10 in real time and feeds back to the control system;

[0117] S3: The control system compares the measured temperature value with a preset temperature threshold;

[0118] S4: When the temperature value is greater than or equal to the preset temperature threshold, the control system controls the circulation pump 305 to start working; the control system continues to receive the temperature signal until the temperature is lower than the temperature threshold, and the control system controls the circulation pump 305 to stop working.

[0119] The control system controls the rotation speed of the circulation pump 305 according to the corresponding relationship between the preset temperature value and the rotation speed of the circulation pump 305, and cools down the water in the water tank 10 in time.

[0120] The temperature sensor can monitor the temperature value in real time. When the temperature value is greater than or equal to the preset temperature threshold value for more than 10 seconds, the control system controls the circulation pump 305 to start working according to the received signal; or when the temperature value is less than the temperature threshold value for more than 10 seconds, the control system controls the circulation pump 305 to stop working. Such a setting can prevent system misjudgment and avoid interference.

[0121] The above turbidity control and temperature control logics do not affect each other and are controlled independently. However, in the specific operation process, it will be shown that when the turbidity value is low, the heat exchange efficiency of the built-in heat exchanger 300 is high, and the motor speed of the circulating pump 305 is low to control the temperature below 50-55°C; when the turbidity value is high, the heat exchange efficiency of the heat exchanger 300 will be low, and the motor speed of the circulating pump 305 needs to be high to control the temperature below 50-55°C.

[0122] Therefore, when controlling the speed of the circulation pump 305, in addition to adjusting according to the detected temperature value, it can also be adjusted according to the relationship between the turbidity value and the speed of the circulation pump 305. That is, if the detected turbidity value and temperature value are both too high, it is necessary to further increase the speed of the circulation pump 305 to improve the heat exchange efficiency.

[0123] Through the exhaust gas treatment equipment of the present invention, after the exhaust gas enters the water tank 10, a cyclone is formed in the mixer 120, and is fully mixed with the water mist sprayed by the spray head 130. Through the combined action of centrifugal force, gravity and the adhesion force of the water mist, dust and other impurities in the exhaust gas are separated from the airflow, thereby achieving the purification effect of the exhaust gas.

[0124] At the same time, the water in the water tank 10 is controlled at an appropriate temperature and cleanliness, ensuring that the outlet temperature is below 60°C, avoiding excessive humidity caused by excessive outlet temperature, thereby clogging the cavity at the rear end of the water tank 10 and causing equipment shutdown.

[0125] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A water tank for tail gas treatment, It is characterized in that The water tank comprises a rectifying cavity, a containing cavity located below the rectifying cavity, and a control system; A baffle is provided in the rectifying cavity, and the baffle divides the rectifying cavity into a mixed flow space and an exhaust space. An air inlet is provided at the top of the mixed flow space, and an air outlet is provided at the top of the exhaust space. A mixer is provided in the mixed flow space, and the airflow enters the mixed flow space from the air inlet, forms a cyclone when the airflow passes through the mixer, and then enters the exhaust space and is discharged from the water tank from the air outlet; The accommodating cavity is provided with a temperature sensor and a heat exchanger which are respectively connected to the control system by electrical signals. The control system receives a signal fed back by the temperature sensor and controls the heat exchange efficiency of the heat exchanger according to the signal.

2. The water tank for tail gas treatment according to claim 1, It is characterized in that The heat exchanger is connected to a cooling water inlet pipe and a cooling water outlet pipe, and a circulating pump is arranged on the cooling water inlet pipe or the cooling water outlet pipe, and the circulating pump is electrically connected to the control system; the control system receives the signal fed back by the temperature sensor and controls the operating speed of the circulating pump according to the signal, thereby controlling the heat exchange efficiency of the heat exchanger.

3. The water tank for tail gas treatment according to claim 1, It is characterized in that A turbidity meter is also arranged in the accommodating chamber, and the turbidity meter is connected to the control system by electrical signals.

4. The water tank for tail gas treatment according to claim 3, It is characterized in that The accommodating chamber is provided with a sewage outlet and a water replenishment outlet, the sewage outlet is connected to the sewage outlet pipe, and the water replenishment outlet is connected to the water replenishment pipe.

5. The water tank for tail gas treatment according to claim 4, It is characterized in that The sewage outlet and the water replenishment outlet are respectively arranged on two opposite side walls of the accommodating cavity.

6. A water tank for tail gas treatment according to any one of claims 4-5, It is characterized in that The sewage pipe is provided with a sewage pump, and the sewage pump is electrically connected to the control system; the water replenishment pipe is provided with a water replenishment pump, and the water replenishment pump is electrically connected to the control system; the control system controls the operation of the sewage pump and the water replenishment pump according to the turbidity value fed back by the turbidity meter.

7. The water tank for tail gas treatment according to claim 1, It is characterized in that One end of the mixer is closed by the side wall of the rectifying cavity, and the other end of the mixer is fixedly connected to the baffle. An opening is provided on the baffle, and the opening is located in the area of ​​the projection of the mixer on the baffle.

8. The water tank for tail gas treatment according to claim 1, It is characterized in that The mixer is arranged below the air inlet.

9. The water tank for tail gas treatment according to claim 1, It is characterized in that A spray device is provided in the mixed flow space, the spray device is arranged above the mixer, and the water outlet direction of the spray device is toward the mixer.

10. The water tank for tail gas treatment according to claim 1, It is characterized in that A fog-making device is provided at the bottom of at least one of the lower arc plates.

11. An exhaust gas treatment device, It is characterized in that The invention comprises a water tank for tail gas treatment according to any one of claims 1 to 10.

12. A method for controlling an exhaust gas treatment device according to claim 11, It is characterized in that The steps include: S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward; S2: The temperature sensor monitors the temperature of the liquid in the water tank in real time and feeds back to the control system; S3: The control system compares the measured temperature value with a preset temperature threshold; S4: When the measured temperature value is greater than or equal to the preset temperature threshold, the control system controls the heat exchanger to start working; The control system continues to receive the temperature signal until the temperature is lower than the preset temperature threshold, and then the control system controls the heat exchanger to stop working.

13. The control method according to claim 12, Features Also includes: In step S4, after the circulation pump is started, the control system controls the heat exchange efficiency of the heat exchanger according to the corresponding relationship between the preset temperature and the heat exchange efficiency of the heat exchanger.

14. The control method according to claim 12, Features: In step S4, when the temperature value is less than the preset temperature threshold for more than 10 seconds, the control system controls the heat exchanger to stop working.

15. A method for controlling an exhaust gas treatment device comprising the water tank according to claim 5, It is characterized in that The steps include: S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward; S2: The turbidity meter monitors the turbidity value of the liquid in the water tank in real time and feeds the turbidity value back to the control system; S3: The control system compares the measured turbidity value with a preset turbidity threshold; S4: When the turbidity value is greater than or equal to a preset turbidity threshold, the control system controls to start the water supply pump and the sewage pump synchronously or asynchronously; S5: The control system continues to receive the turbidity signal until the turbidity is lower than the turbidity threshold, and the control system controls the water supply pump and the sewage pump to stop working.

16. The control method according to claim 15, Features: In step S4, after the water supply pump and the sewage pump are started, the control system controls the rotation speed of the water supply pump and the sewage pump according to the corresponding relationship between the preset turbidity and the rotation speed of the water supply pump and the sewage pump.

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