AlN-enhanced AlCuFe quasi-crystal hydrophobic coating and preparation method thereof

Abstract

The invention relates to the technical field of turbine blade coating materials, in particular to an AlN-reinforced AlCuFe quasi-crystal hydrophobic coating and a preparation method thereof. The preparation method specifically comprises the following steps that a magnetron sputtering method is adopted, an Al target, a Cu target and a Fe target serve as metal target materials, argon and nitrogen serve as working gas, the metal target materials are co-sputtered, partial negative pressure is applied to a base material, and an AlN-doped AlCuFe co-deposition coating is formed on the surface of the base material; and then carrying out annealing treatment to obtain the AlN enhanced AlCuFe quasi-crystal hydrophobic coating. And the content of AlN in the AlN reinforced AlCuFe quasi-crystal hydrophobic coating is 5wt%-10wt%. Compared with a pure AlCuFe quasicrystal hydrophobic coating, the AlN enhanced AlCuFe quasicrystal hydrophobic coating disclosed by the invention has higher hardness and wear resistance, and the hydrophobicity of the coating is not obviously reduced.

Description

Technical Field

[0001] The invention relates to the technical field of turbine blade coating materials, and in particular to an AlN-reinforced AlCuFe quasicrystal hydrophobic coating and a preparation method thereof. Background Art

[0002] Turbine blades are widely used in high-temperature and high-pressure power equipment such as aircraft engines, gas turbines, and rocket engines. Since the working environment of turbine blades in these equipment usually has extremely high temperatures, complex fluid dynamics, and the impact of high-speed airflow, the coating materials required for turbine blades must meet strict performance requirements. The coating material not only needs to have high hardness, wear resistance, high temperature resistance, oxidation resistance, and corrosion resistance, but also needs to ensure that the surface energy of the blade remains low to achieve functions such as preventing moisture retention and improving corrosion resistance. Therefore, the research and development of turbine blade coatings has become an important topic in the fields of aerospace and gas turbines.

[0003] At present, the coatings of turbine blades are mostly made of metal alloys, ceramics or metal-ceramic composites, but the hardness and hydrophobicity of existing coatings often cannot meet the high requirements for long-term use of turbine blades. Especially in high temperature and high pressure environments, the wear resistance and hydrophobicity of turbine blade coatings often conflict. In order to improve hardness and wear resistance, the coating surface is usually designed to have a higher surface energy, which reduces the hydrophobicity of the coating, causing water to be retained on the surface, forming corrosion and oxidation films, thereby affecting the performance and life of the turbine blades.

[0004] AlCuFe quasicrystals are a class of materials with long-range ordered structures but no translational symmetry. AlCuFe quasicrystals have unique physical properties, such as high hardness, low friction coefficient, and excellent thermal stability. In past studies, quasicrystals have performed well in terms of wear resistance, corrosion resistance, and high temperature resistance, and have been used in coatings for high-performance components such as turbine blades.

[0005] However, the hardness of the turbine blade coating is directly related to its wear resistance and mechanical properties under high temperature and high pressure conditions. The hardness requirement of the coating depends on the working environment and tasks it is subjected to, especially when the blade surface is affected by factors such as high-speed airflow, particle collision and friction. The hardness of the coating is crucial. High-hardness coatings can significantly improve the durability of turbine blades in harsh environments. Therefore, although the hardness of the quasicrystal coating is relatively high, its hardness still needs to be further improved to enhance its wear resistance and meet the use requirements in extreme environments, which may affect its hydrophobic properties and thus affect the performance and life of the turbine blades. Summary of the invention

[0006] In order to solve the problem that the hardness and hydrophobicity of the existing quasicrystal hydrophobic coating do not meet the use requirements, the purpose of the present invention is to provide an AlN reinforced AlCuFe quasicrystal hydrophobic coating and a preparation method thereof, so as to improve the hardness of the AlCuFe quasicrystal hydrophobic coating while maintaining its excellent hydrophobicity, so as to meet the use requirements of the turbine blade coating for hardness and hydrophobicity.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows.

[0008] A first aspect of the present invention provides a method for preparing an AlN-enhanced AlCuFe quasicrystal hydrophobic coating, comprising the following steps:

[0009] The invention adopts a magnetron sputtering method, uses an Al target, a Cu target and a Fe target as metal target materials, uses argon and nitrogen as working gases, co-sputters the metal target materials, applies a negative bias pressure on a substrate, and forms an AlN-doped AlCuFe co-deposition coating on the surface of the substrate; then, an AlN-enhanced AlCuFe quasicrystal hydrophobic coating is obtained by annealing; the AlN content in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is 5wt% to 10wt%.

[0010] The present invention mainly adjusts the AlN content in the AlCuFe quasicrystal hydrophobic coating to 5wt%-10wt%, cooperates with annealing treatment, and effectively improves the hardness of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating while forming AlCuFe quasicrystals, and does not significantly reduce the hydrophobicity of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating, thereby solving the problem that the hardness and hydrophobicity of the existing quasicrystal hydrophobic coating do not meet the use requirements.

[0011] In the present invention, when preparing the AlCuFe coating by magnetron sputtering technology, nitrogen is introduced to allow a portion of the Al element to be compounded with N to form a high-hardness AlN reinforcement phase, and then an AlCuFe quasicrystal is generated by annealing after deposition. The method of the present invention can accurately control the composition of the AlCuFe quasicrystal coating and the proportion of the high-hardness AlN reinforcement phase, significantly improve the hardness of the quasicrystal coating, improve the friction and wear resistance of the coating, and have no significant effect on the hydrophobicity of the quasicrystal, and the method is simple and easy to commercialize.

[0012] The present invention introduces a nitride reinforcement phase into the coating to improve the hardness and wear resistance of the coating. Compared with a simple AlCuFe quasicrystal hydrophobic coating, the AlN-reinforced AlCuFe quasicrystal hydrophobic coating provided by the present invention has higher hardness and wear resistance.

[0013] Preferably, the flow ratio of nitrogen to argon is 1:4-10.

[0014] The present invention can control the amount of N atoms incorporated by regulating the flow rate of nitrogen during magnetron sputtering, so that the content of AlN in the coating is within the range of 5wt% to 10wt%. Since the formation of quasicrystals is limited by the composition ratio and the subsequent annealing conditions, the composition ratio within this range can both form quasicrystals and ensure the formation of a small amount of AlN, so that high-content quasicrystals can be effectively formed, and the formed AlN can improve the hardness of the coating without significantly affecting its hydrophobicity.

[0015] In the present invention, the content of AlN in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is 5wt% to 10wt%, so as to achieve the effect that a high content of quasicrystals can be formed, and the formed AlN can improve the hardness of the coating without significantly affecting its hydrophobicity. In the present invention, too high a content of AlN will affect the hydrophobicity of the coating, and too low a content of AlN will not significantly improve the hardness of the coating.

[0016] Preferably, the working gas pressure ranges from 0.1Pa to 2Pa.

[0017] Preferably, before applying the negative bias voltage to the substrate, the method further comprises: setting the power of each target during co-sputtering according to the element ratio of Al, Cu and Fe in the AlCuFe quasi-crystalline hydrophobic coating.

[0018] Preferably, the power ratio of the Al target, the Cu target and the Fe target is 11-13:1:1.

[0019] The present invention adjusts the nitrogen flow rate and the ratio of each element in the coating so that the AlN content formed in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is controllable without affecting the formation of the AlCuFe quasicrystal, thereby effectively improving the hardness of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating without significantly reducing the hydrophobicity of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating.

[0020] Preferably, the annealing conditions are:

[0021] Base pressure≤5×10 -3 Pa, the annealing temperature is 710℃~740℃, and the annealing time is 2h~5h.

[0022] In the present invention, the specific operation of the annealing treatment is: adjusting the background pressure ≤ 5×10 -3 After Pa, the temperature is raised to 710°C ~ 740°C and kept at this temperature for 3h ~ 5h for annealing. After the annealing is completed, the furnace is cooled to room temperature to obtain an AlN-reinforced AlCuFe quasicrystal hydrophobic coating.

[0023] In the present invention, the purpose of annealing is mainly to form AlCuFe quasicrystals. Since the melting point of AlN is as high as 3060°C, the annealing for forming AlCuFe quasicrystals has no effect on the formed AlN. Considering that the coating can be transformed into quasicrystals, the annealing conditions are selected at 710°C to 740°C, which is more conducive to the formation of quasicrystals, and the annealing time is 2h to 5h.

[0024] Preferably, the purity of the Al target, the Cu target and the Fe target is ≥99.9%.

[0025] Preferably, before the co-sputtering of the metal target, the method further includes: performing glow plasma cleaning on the substrate; the specific operation of performing glow plasma cleaning on the substrate is as follows:

[0026] Place the metal target and substrate in the magnetron sputtering chamber and adjust the background gas pressure to ≤5×10 -3 After 1.5 ℃ of heating, argon gas is introduced, the gas pressure in the magnetron sputtering chamber is controlled to be 0.1 Pa ~ 2 Pa, the bias power supply is turned on, and the substrate is glow plasma cleaned. The glow plasma cleaning time is 10 min ~ 20 min.

[0027] Preferably, the thickness of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is less than 10 μm, preferably 1 μm to 5 μm. The present invention has no clear requirement for the thickness of the coating, which can be determined according to actual use.

[0028] A second aspect of the present invention provides an AlN-enhanced AlCuFe quasicrystal hydrophobic coating, which is prepared by the preparation method of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating described in the first aspect.

[0029] Beneficial effects of the present invention:

[0030] 1. The present invention mainly adjusts the AlN content in the AlCuFe quasicrystal hydrophobic coating to 5wt% to 10wt%, and cooperates with annealing treatment to effectively improve the hardness of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating while forming AlCuFe quasicrystals, and has no obvious reduction in the hydrophobicity of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating.

[0031] 2. The present invention adjusts the nitrogen flow rate and the ratio of each element in the coating so that the AlN content formed in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is controllable and does not affect the formation of AlCuFe quasicrystals, thereby effectively improving the hardness of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating, thereby significantly improving the friction and wear resistance and service life of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating, and the hydrophobicity of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is not significantly reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 The comparison chart of the hydrophobic angle test results of AlCuFe quasi-crystalline hydrophobic coatings with different AlN contents prepared in Example 1, Example 2 and Comparative Example 1. Among them, (a) is the hydrophobic angle test result chart of the AlCuFe quasi-crystalline hydrophobic coating with an AlN content of 10% prepared in Example 1; (b) is the hydrophobic angle test result chart of the AlCuFe quasi-crystalline hydrophobic coating with an AlN content of 5% prepared in Example 2; (c) is the hydrophobic angle test result chart of the AlCuFe quasi-crystalline hydrophobic coating without AlN prepared in Comparative Example 1. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0034] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0035] In the following embodiments, the AlN content represents the mass percentage of AlN in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating.

[0036] Multi-element metal quasicrystal materials, with their low surface energy and high strength, have gradually become a research hotspot in the field of hydrophobic coatings. Among them, Al-Cu-Fe ternary quasicrystals have significant advantages in multi-element metal quasicrystal systems because their surface energy is comparable to that of polytetrafluoroethylene and the raw material price is relatively cheap.

[0037] However, although the Al-Cu-Fe quasicrystal hydrophobic coating performs well in some aspects, its hardness is still not enough to meet the needs of practical applications in some fields with extremely high requirements for wear resistance and strength. For example, in high-end manufacturing industries such as aerospace, precision instruments and other fields, there are extremely strict requirements on the hardness of the coating. In these fields, the coating not only needs to have excellent hydrophobic properties, but also needs to have sufficient hardness and wear resistance to resist wear and corrosion in extreme environments. Specifically, the coating hardness on certain key components is required to reach more than 8GPa, while the hardness of existing Al-Cu-Fe quasicrystal hydrophobic coatings is generally lower than this standard, so it cannot meet these practical application requirements.

[0038] In order to meet this challenge, researchers need to find new methods to further improve the hardness and wear resistance of Al-Cu-Fe quasicrystal hydrophobic coatings. At the same time, it is also necessary to ensure that while improving the performance, its original excellent hydrophobic properties are not damaged. Therefore, how to further improve the hardness and wear resistance of Al-Cu-Fe quasicrystal hydrophobic coatings while maintaining their excellent hydrophobic properties is still an important challenge facing current research.

[0039] The invention mainly adopts a magnetron sputtering method, uses an Al target, a Cu target and an Fe target as metal target materials, uses argon and nitrogen as working gases, co-sputters the metal target materials, applies a negative bias pressure on a substrate, and forms an Al-Cu-Fe-N quaternary coating containing an AlN hard phase on the surface of the substrate; then, an AlN-enhanced AlCuFe quasicrystal hydrophobic coating is obtained by annealing; and the AlN content in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is adjusted to be 5wt%-10wt%, so as to improve the mechanical properties of the AlCuFe quasicrystal hydrophobic coating.

[0040] The AlN-enhanced AlCuFe quasicrystal hydrophobic coating prepared by the present invention is a hydrophobic hard coating. By adjusting the nitrogen flow rate and the ratio of each element in the coating, the AlN content formed in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is controllable and does not affect the formation of AlCuFe quasicrystals. In the AlN-enhanced AlCuFe quasicrystal hydrophobic coating of the present invention, in addition to the AlCuFe quasicrystal phase, the AlN content is 5wt% to 10wt%.

[0041] The preparation method of the present invention is simple to operate, pollution-free throughout the process, cost-saving, and has a long service life. The present invention can effectively improve the hardness of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating, and has no significant reduction in the hydrophobicity of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating, thereby significantly improving the friction and wear resistance and service life of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating.

[0042] It should be noted that the present invention does not limit the type of substrate, as long as it can meet the requirements of surface cleanliness and suitability for coating. For example, the substrate can be selected from single crystal silicon wafers, polycrystalline silicon wafers, glass and ceramic substrates, and of course can also be selected from metals such as stainless steel, aluminum alloy, copper or their alloys.

[0043] It should also be noted that since the subsequent glow plasma cleaning treatment and the magnetron sputtering process in each step are carried out in the magnetron sputtering equipment, the present invention installs the pretreated substrate on the workpiece turntable in the vacuum chamber of the magnetron sputtering equipment, and places the target materials on the target positions in the magnetron sputtering vacuum chamber, respectively, to facilitate the subsequent glow plasma cleaning treatment and sputtering deposition.

[0044] The technical solution of the present invention is further described below through specific embodiments.

[0045] In the following examples, the methods described are conventional methods unless otherwise specified; the reagents and materials described are commercially available unless otherwise specified.

[0046] In the following examples, the purity of the Al target, Cu target and Fe target is ≥99.9%.

[0047] Example 1

[0048] A method for preparing an AlN-enhanced AlCuFe quasicrystal hydrophobic coating comprises the following steps:

[0049] Step 1, pretreatment of substrate: using a single crystal silicon wafer as substrate, ultrasonically cleaning it to obtain a pretreated silicon wafer.

[0050] Step 2, glow plasma cleaning treatment: fix the pre-treated silicon wafer on the sample plate and then install it on the workpiece turntable in the vacuum chamber of the magnetron sputtering equipment, and place the metal target on the target position in the vacuum chamber of the magnetron sputtering equipment. Evacuate the vacuum chamber of the magnetron sputtering equipment to reduce the pressure to less than 5×10 -3 After 0.5 Pa, argon gas was introduced, the gas pressure in the sputtering chamber was controlled at 0.5 Pa, and the bias power supply was turned on for glow cleaning. The glow cleaning lasted for 20 minutes to obtain a clean silicon wafer.

[0051] Step 3, co-deposition: introduce argon into the vacuum chamber and adjust its flow rate to 20sccm, introduce nitrogen and adjust the nitrogen flow rate to 5sccm, control the working pressure to 0.5Pa, sputter the metal target, the power ratio of Al target, Cu target and Fe target is 13:1:1, and the deposition time is 120min. After the coating is completed, stop the ventilation, maintain the vacuum state, cool down to room temperature with the furnace, and take out the sample to obtain a silicon wafer with AlN-doped AlCuFe co-deposition coating on the surface.

[0052] Step 4: Annealing: Place the sample obtained in step 3 in an annealing furnace and wait until the pressure in the annealing furnace drops to 5×10 - 3 Pa, heated to 740 ° C, kept at this temperature for 5 h, and then cooled to room temperature with the furnace to obtain an AlN-reinforced AlCuFe quasicrystal hydrophobic coating.

[0053] In the AlCuFe quasi-crystalline hydrophobic coating prepared in Example 1, the AlN content is 10%, the thickness of the AlCuFe quasi-crystalline hydrophobic coating is 2 μm, the hardness is 9.36 GPa, and the hydrophobic angle is 125.74°.

[0054] Example 2

[0055] A method for preparing an AlN-enhanced AlCuFe quasicrystal hydrophobic coating comprises the following steps:

[0056] Step 1, pretreatment of substrate: using a single crystal silicon wafer as substrate, ultrasonically cleaning it to obtain a pretreated silicon wafer.

[0057] Step 2, glow plasma cleaning treatment: fix the pre-treated silicon wafer on the sample plate and then install it on the workpiece turntable in the vacuum chamber of the magnetron sputtering equipment, and place the metal target on the target position in the vacuum chamber of the magnetron sputtering equipment. Evacuate the vacuum chamber of the magnetron sputtering equipment to reduce the pressure to less than 5×10 -3 After 0.5 Pa, argon gas was introduced, the gas pressure in the sputtering chamber was controlled at 0.5 Pa, and the bias power supply was turned on for glow cleaning. The glow cleaning lasted for 20 minutes to obtain a clean silicon wafer.

[0058] Step 3, co-deposition: introduce argon into the vacuum chamber and adjust its flow rate to 20sccm, introduce nitrogen and adjust the nitrogen flow rate to 3sccm, control the working pressure to 0.5Pa, sputter the metal target, the power ratio of Al target, Cu target and Fe target is 12:1:1, and the deposition time is 120min. After the coating is completed, stop the ventilation, maintain the vacuum state, cool down to room temperature with the furnace, and take out the sample to obtain a silicon wafer with AlN-doped AlCuFe co-deposition coating on the surface.

[0059] Step 4: Annealing: Place the sample obtained in step 3 in an annealing furnace and wait until the pressure in the annealing furnace drops to 5×10 - 3 Pa, heated to 740 ° C, kept at this temperature for 5 h, and then cooled to room temperature with the furnace to obtain an AlN-reinforced AlCuFe quasicrystal hydrophobic coating.

[0060] In the AlCuFe quasicrystal hydrophobic coating prepared in Example 2, the AlN content is 5%, the thickness of the AlCuFe quasicrystal hydrophobic coating is 2 μm, the hardness is 8.69 GPa, and the hydrophobic angle is 127.11°.

[0061] Comparative Example 1

[0062] A method for preparing an AlN-enhanced AlCuFe quasicrystal hydrophobic coating comprises the following steps:

[0063] Step 1, pretreatment of substrate: using a single crystal silicon wafer as substrate, ultrasonically cleaning it to obtain a pretreated silicon wafer.

[0064] Step 2, glow plasma cleaning treatment: fix the pre-treated silicon wafer on the sample plate and then install it on the workpiece turntable in the vacuum chamber of the magnetron sputtering equipment, and place the metal target on the target position in the vacuum chamber of the magnetron sputtering equipment. Evacuate the vacuum chamber of the magnetron sputtering equipment to reduce the pressure to less than 5×10 -3After 0.5 Pa, argon gas was introduced, the gas pressure in the sputtering chamber was controlled at 0.5 Pa, and the bias power supply was turned on for glow cleaning. The glow cleaning lasted for 20 minutes to obtain a clean silicon wafer.

[0065] Step 3, co-deposition: introduce argon into the vacuum chamber and adjust its flow rate to 20sccm, control the working pressure to 0.5Pa, sputter the metal target, the power ratio of Al target, Cu target and Fe target is 11:1:1, and the deposition time is 120min. After the coating is completed, stop the ventilation, maintain the vacuum state, cool down to room temperature with the furnace, take out the sample, and obtain a silicon wafer with AlCuFe co-deposition coating formed on the surface.

[0066] Step 4: Annealing: Place the sample obtained in step 3 in an annealing furnace and wait until the pressure in the annealing furnace drops to 5×10 - 3 Pa, heated to 740 ° C, kept at this temperature for 5 h, and then cooled to room temperature with the furnace to obtain an AlN-reinforced AlCuFe quasicrystal hydrophobic coating.

[0067] The AlCuFe quasicrystal hydrophobic coating prepared in Comparative Example 1 has a thickness of 2 μm, a hardness of 7.93 GPa, and a hydrophobic angle of 131.55°.

[0068] Table 1 Comparison of conditions of AlCuFe quasicrystal hydrophobic coatings with different AlN contents

[0069] Example Nitrogen flow Power ratio of Al target, Cu target and Fe target AlN content Example 1 5sccm 13:1：1 10％ Example 2 3sccm 12：1：1 5％ Comparative Example 1 0sccm 11：1：1 0％

[0070] Note: AlN content indicates the mass percentage of AlN in the AlCuFe quasi-crystalline hydrophobic coating. 0% AlN content means no AlN.

[0071] Test 1: Hydrophobic angle test.

[0072] The AlCuFe quasicrystal hydrophobic coatings with different AlN contents prepared in Example 1, Example 2 and Comparative Example 1 were tested for hydrophobic angles. The results are as follows: Figure 1 And as shown in Table 2.

[0073] Figure 1 The comparison chart of the hydrophobic angle test results of AlCuFe quasi-crystalline hydrophobic coatings with different AlN contents prepared in Example 1, Example 2 and Comparative Example 1. Among them, (a) is the hydrophobic angle test result chart of the AlCuFe quasi-crystalline hydrophobic coating with an AlN content of 10% prepared in Example 1; (b) is the hydrophobic angle test result chart of the AlCuFe quasi-crystalline hydrophobic coating with an AlN content of 5% prepared in Example 2; (c) is the hydrophobic angle test result chart of the AlCuFe quasi-crystalline hydrophobic coating without AlN prepared in Comparative Example 1.

[0074] Table 2 Hydrophobic angle test results of AlCuFe quasicrystal hydrophobic coatings with different AlN contents

[0075] Example AlN content Hydrophobic Angle Example 1 10％ 125.74° Example 2 5％ 127.11° Comparative Example 1 0％ 131.55°

[0076] Depend on Figure 1 From the hydrophobic angle test results in Table 2, it can be found that the amount of aluminum nitride added does not significantly change the hydrophobicity of the AlCuFe quasicrystal hydrophobic coating.

[0077] Test 2: Nanoindentation test.

[0078] The AlCuFe quasicrystal hydrophobic coatings with different AlN contents prepared in Example 1, Example 2 and Comparative Example 1 were subjected to nanoindentation tests, and the results are shown in Table 3.

[0079] Table 3 Nanoindentation test results of AlCuFe quasicrystal hydrophobic coatings with different AlN contents

[0080] Example AlN content Hardness / GPa Example 1 10％ 9.36 Example 2 5％ 8.69 Comparative Example 1 0％ 7.93

[0081] From the nano-indentation test results in Table 3, it can be found that the amount of aluminum nitride added has a great influence on the hardness of the AlCuFe quasicrystal hydrophobic coating. Among them, with the increase of the amount of aluminum nitride added, the hardness of the AlCuFe quasicrystal hydrophobic coating is significantly improved.

[0082] From the above analysis, it can be seen that the embodiment of the present invention makes the AlN content formed in the AlCuFe quasicrystal hydrophobic coating enhanced by AlN controllable and does not affect the formation of AlCuFe quasicrystal by adjusting the nitrogen flow rate and the ratio of each element in the coating. The embodiment of the present invention does not significantly affect the hydrophobicity of the AlCuFe quasicrystal by regulating the amount of AlN doped; and the hardness of the prepared AlN enhanced AlCuFe quasicrystal hydrophobic coating is significantly improved compared to the hardness of the AlCuFe quasicrystal hydrophobic coating of Comparative Example 1, and the hydrophobicity of the AlN enhanced AlCuFe quasicrystal hydrophobic coating is not significantly reduced, thereby significantly improving the friction and wear resistance and service life of the AlN enhanced AlCuFe quasicrystal hydrophobic coating.

[0083] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for preparing an AlN-enhanced AlCuFe quasicrystal hydrophobic coating, characterized in that: The following steps are involved: The invention adopts a magnetron sputtering method, uses an Al target, a Cu target and a Fe target as metal target materials, uses argon and nitrogen as working gases, co-sputters the metal target materials, applies a negative bias pressure on a substrate, and forms an AlN-doped AlCuFe co-deposition coating on the surface of the substrate; then, an AlN-enhanced AlCuFe quasicrystal hydrophobic coating is obtained by annealing; the AlN content in the AlN-enhanced AlCuFe quasicrystal hydrophobic coating is 5wt% to 10wt%.

2. The method for preparing the AlN-enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1, characterized in that: The flow ratio of nitrogen to argon is 1:4-10.

3. The method for preparing the AlN enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1 or 2, characterized in that: The working gas pressure range is 0.1Pa~2Pa.

4. The method for preparing the AlN-enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1, characterized in that: Before applying the negative bias voltage to the substrate, the method also includes: setting the power of each target during co-sputtering according to the element ratio of Al, Cu and Fe in the AlCuFe quasi-crystalline hydrophobic coating.

5. The method for preparing the AlN-enhanced AlCuFe quasicrystal hydrophobic coating according to claim 4, characterized in that: The power ratio of the Al target, Cu target and Fe target is 11-13:1:

1.

6. The method for preparing the AlN enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1, characterized in that: The conditions for annealing treatment are: Base pressure≤5×10 -3 Pa, the annealing temperature is 710℃~740℃, and the annealing time is 2h~5h.

7. The method for preparing the AlN-enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1, characterized in that: The purity of the Al target, Cu target and Fe target is ≥99.9%.

8. The method for preparing the AlN-enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1, characterized in that: Before the co-sputtering of the metal target, the process also includes: performing glow plasma cleaning on the substrate; the specific operations of performing glow plasma cleaning on the substrate are as follows: Place the metal target and substrate in the magnetron sputtering chamber and adjust the background gas pressure to ≤5×10 -3 After 1.5 ℃ of heating, argon gas is introduced, the gas pressure in the magnetron sputtering chamber is controlled to be 0.1 Pa ~ 2 Pa, the bias power supply is turned on, and the substrate is glow plasma cleaned. The glow plasma cleaning time is 10 min ~ 20 min.

9. An AlN-enhanced AlCuFe quasicrystal hydrophobic coating, characterized in that: The AlN-enhanced AlCuFe quasicrystal hydrophobic coating is prepared by the preparation method of the AlN-enhanced AlCuFe quasicrystal hydrophobic coating according to claim 1.

Images