Light source and optical apparatus

Abstract

The invention provides a light source and optical equipment. The light source comprises a chamber, an ionizable medium, a pre-combustion device, a first laser, a first optical element, a first optical fiber, a second optical element and a second optical fiber. An ionizable medium is contained within the chamber. The pre-combustion device is used for ionizing the ionizable medium and forming a light-emitting area. The first laser is used for emitting laser beams to the light-emitting area to maintain the light-emitting area to emit light. The first optical element is used for coupling light emitted by the cavity to the first optical fiber so that the light can be transmitted in the first optical fiber. The second optical element is used for coupling the light emitted by the cavity to the second optical fiber so that the light can be transmitted in the second optical fiber. The light source provided by the invention has the advantages of higher power, higher radiation brightness and longer service life.

Description

Technical Field

[0001] The present application relates to the technical field of light sources, and in particular to a light source and an optical device. Background Art

[0002] As an important component of optical equipment, the power and radiation brightness of the light source can have a great impact on the performance of the optical equipment. Currently, through the laser sustained plasma (LSP) technology, a light source with higher stability, higher radiation brightness and longer life can be obtained. However, this solution still has the defect that the light source power and radiation brightness are not ideal. Summary of the invention

[0003] The present application provides a light source and an optical device, wherein the light source can improve the power and radiation brightness of the light source.

[0004] In a first aspect, the present application provides a light source, comprising a chamber, an ionizable medium, a pre-combustion device, a first laser, a first optical element, a first optical fiber, a second optical element, and a second optical fiber; the ionizable medium is contained in the chamber; the pre-combustion device is used to ionize the ionizable medium and form a light-emitting area; the first laser is used to emit a laser beam to the light-emitting area to maintain the light-emitting area; the first optical element is used to couple the light emitted from the chamber to the first optical fiber so that the light is transmitted in the first optical fiber; the second optical element is used to couple the light emitted from the chamber to the second optical fiber so that the light is transmitted in the second optical fiber.

[0005] In this solution, by coupling the light emitted by the light-emitting area to the first optical fiber and the second optical fiber, the light source can be output through dual optical fibers, which can effectively improve the coupling efficiency, power, and radiation brightness of the light source, reduce heat generation, and increase service life. In addition, dual-fiber output can also enable the light source to match two light receiving devices at the same time, thereby expanding the application scenarios of the light source.

[0006] In an implementation of the first aspect, the first optical element is used to focus the light emitted from the chamber onto the first optical fiber; and / or the second optical element is used to focus the light emitted from the chamber onto the second optical fiber. This solution enables the first optical element and the second optical element to focus on the first optical fiber and the second optical fiber respectively, thereby ensuring that the first optical fiber and the second optical fiber can fully receive and transmit the light emitted by the light-emitting area, thereby ensuring the reliability of the light source.

[0007] In an implementation of the first aspect, the first optical element has a first focus and a second focus, the first focus is located in the light-emitting area, and the second focus is located at the light-entering end of the first optical fiber; the first optical element is used to receive the light emitted from the chamber at the first focus, and reflect the light to the second focus; and / or, the second optical element has a third focus and a fourth focus, the third focus is located in the light-emitting area, and the fourth focus is located at the light-entering end of the second optical fiber; the second optical element is used to receive the light emitted from the chamber at the third focus, and reflect the light to the fourth focus. This solution ensures that the first optical fiber and the second optical fiber can receive the light emitted from the light-emitting area by designing the relationship between the light-emitting area, the first optical fiber and the second optical fiber and the focus of the first optical element and the second optical element, thereby ensuring that the light source has high coupling efficiency, power and radiation brightness, as well as good reliability and stability.

[0008] In an implementation of the first aspect, the first optical element and the second optical element have the same structure. In this solution, by making the first optical element and the second optical element have the same structure, the structure of the light source is relatively simple and has good mass production performance.

[0009] In an implementation of the first aspect, the first optical element includes an ellipsoidal reflector, and / or the second optical element includes an ellipsoidal reflector. In this solution, by making the first optical element and the second optical element ellipsoidal reflectors, the structure of the light source is relatively simple, the performance is relatively reliable, and the mass production is good.

[0010] In an implementation of the first aspect, the light source includes a fiber combiner and a third optical fiber; the fiber combiner includes a first input end, a second input end, and an output end, the first input end is connected to the first optical fiber, the second input end is connected to the second optical fiber, and the output end is connected to the third optical fiber. In this solution, the light input by the first optical fiber and the second optical fiber is combined and output to the third optical fiber through the fiber combiner, so that under the same conditions, the coupling efficiency, power, and radiation brightness of the light source can be improved, the heat generation can be reduced, and the service life can be increased.

[0011] In an implementation of the first aspect, the light source includes a driving device and a third reflecting element, the driving device is used to drive the third reflecting element to move between the light-emitting area and the second optical element, or to move out from between the light-emitting area and the second optical element; wherein, when the third reflecting element is located between the light-emitting area and the second optical element, the third reflecting element is used to reflect the light emitted from the chamber to the light-emitting area, and prevent the second optical element from receiving the light emitted from the chamber. In this solution, by designing a movable third reflecting element, the light source can be switched between single-fiber output and dual-fiber output.

[0012] In an implementation of the first aspect, the third reflective element can reflect and focus the light emitted from the cavity to the light-emitting area. This solution effectively improves the radiation brightness and power of the light source when a single optical fiber is output by designing the optical properties of the third reflective element.

[0013] In an implementation of the first aspect, the pre-combustion device includes a first electrode and a second electrode, the first electrode and the second electrode are arranged at an interval, and the first electrode and the second electrode are used to energize and excite the ionizable medium to ionize, so as to form a light-emitting area; or, the pre-combustion device includes a second laser, and the second laser is used to emit a laser beam into the chamber to excite the ionizable medium to ionize, so as to form a light-emitting area. The pre-combustion device of this solution has a simple structure, reliable performance, and good mass production.

[0014] In a second aspect, the present application provides an optical device, comprising any of the light sources described above.

[0015] The light source in this solution has good coupling efficiency, power, and radiation brightness, so that the optical device has better performance.

[0016] In an implementation of the second aspect, the optical device includes a first light receiving device and a second light receiving device, the first light receiving device is used to receive light transmitted by the first optical fiber, and the second light receiving device is used to receive light transmitted by the second optical fiber. This solution enables the light source to match two light receiving devices at the same time by connecting the first optical fiber to the first light receiving device and the second optical fiber to the second light receiving device, thereby expanding the application scenarios of the light source.

[0017] In an implementation of the second aspect, the light source includes a fiber combiner and a third optical fiber; the fiber combiner includes a first input end, a second input end, and an output end, the first input end is connected to the first optical fiber, the second input end is connected to the second optical fiber, and the output end is connected to the third optical fiber; the optical device includes a third light receiving device, and the third light receiving device is connected to the third optical fiber. In this solution, the light received by the first optical fiber and the second optical fiber is combined by the fiber combiner and then output to the third optical fiber, so that the third light receiving device can receive light with higher power and radiation brightness, thereby improving the performance of the optical device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of a framework structure of a light source in an embodiment;

[0019] Figure 2 yes Figure 1 A schematic diagram of the structure and working principle of the light emitting device in the light source shown;

[0020] Figure 3 is a schematic diagram of a framework structure of a light source in another embodiment;

[0021] Figure 4 is a schematic diagram of a framework structure of a light source in another embodiment;

[0022] Figure 5 yes Figure 4 A schematic diagram of the frame structure of the light source in another state is shown.

[0023] Description of reference numerals:

[0024] 1- Light-emitting device;

[0025] 11-chamber; 12-pre-combustion device; 13-first laser; 1a-ionizable medium; 1b-light emitting area;

[0026] 100-light source; 12a-first electrode; 12b-second electrode;

[0027] 2- first coupling device;

[0028] 21-first optical element; 22-first optical fiber;

[0029] 21a-first focus; 21b-second focus;

[0030] 3- second coupling device;

[0031] 31-second optical element; 32-second optical fiber;

[0032] 31a-third focus; 31b-fourth focus;

[0033] 4-Fiber combiner;

[0034] 41-first input terminal; 42-second input terminal; 43-output terminal;

[0035] 5- third optical fiber;

[0036] 6- a third reflecting element; DETAILED DESCRIPTION

[0037] For ease of understanding, the relevant technical terms and expressions involved in the embodiments of the present application are explained and described below.

[0038] The terms "first", "second", etc. are used only for the purpose of distinguishing descriptions and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0039] The embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application.

[0040] The following embodiments of the present application provide an optical device, including but not limited to thin film detection equipment, defect detection equipment, spectrometers, monochromators, ambient light detection equipment, hyperspectral imagers, optical element detection equipment, bioanalysis instruments, electronic product manufacturing equipment, etc.

[0041] The optical device may include a light source and a light receiving device. The light source may emit light through laser sustained plasma (LSP) technology. The light receiving device may receive light emitted by the light source, and the light receiving device may process the received light (including but not limited to reflection, focusing, filtering, etc.), or use the light for detection or processing. The light receiving device may include at least one component.

[0042] This will be described in detail below.

[0043] Figure 1 FIG. 1 is a schematic diagram of a frame structure of a light source 100 in an embodiment. Figure 1 As shown, the light source 100 may include a light emitting device 1, a first coupling device 2 and a second coupling device 3. The first coupling device 2 and the second coupling device 3 may be located on opposite sides of the light emitting device 1.

[0044] Figure 2 yes Figure 1 The structure and working principle diagram of the light emitting device 1 in the light source 100 is shown. Figure 2 As shown, the light emitting device 1 may include a chamber 11, a pre-combustion device 12 and a first laser 13. The chamber 11 may contain an ionizable medium 1a, which may be, for example, an inert gas such as helium, neon, argon, krypton, xenon, radon, or other easily ionized medium.

[0045] like Figure 2 As shown, the pre-combustion device 12 may include a first electrode 12a and a second electrode 12b. The first electrode 12a and the second electrode 12b are arranged at intervals on both sides of the chamber 11, and at least a portion of the first electrode 12a and at least a portion of the second electrode 12b may be located in the chamber 11. When the first electrode 12a and the second electrode 12b are energized, the ionizable medium 1a in the chamber 11 may be ionized to form plasma. Plasma has a luminous property, and plasma may form a luminous region 1b occupying a certain volume. That is, the pre-combustion device 12 may ionize the ionizable medium 1a and form a luminous region 1b.

[0046] like Figure 2 As shown, the laser beam emitted by the first laser 13 can be injected into the chamber 11 and illuminate the light-emitting area 1b to maintain the light-emitting area 1b to continuously emit light. Thus, the light emitted by the light-emitting area 1b can be continuously emitted from the chamber 11 and coupled into the optical fiber by the coupling device (described below).

[0047] Illustratively, in this embodiment, the first laser 13 may be a continuous laser, or other lasers that can emit light continuously. Figure 2 It is schematically expressed that the laser beam emitted by the first laser 13 can enter the chamber 11 to maintain the light emitting area 1b in the chamber 11, and the manner in which the laser beam emitted by the first laser 13 enters the chamber 11 is not limited. Schematically, the laser beam emitted by the first laser 13 can also be focused to the light emitting area 1b of the chamber 11 after being deflected and reflected by one or more optical elements (such as lenses, reflectors and other optical elements).

[0048] In the embodiment of the present application, Figure 2 The light emitting device 1 shown is only a schematic representation of its basic form, and does not limit its specific structure, number of components, and positional relationship between components. Those skilled in the art can design the light emitting device 1 according to actual needs.

[0049] like Figure 1 As shown, the first coupling device 2 may include a first optical element 21 and a first optical fiber 22. The first optical element 21 may reflect and focus the light emitted from the chamber 11. Schematically, the first optical element 21 has a first focus 21a and a second focus 21b. The light of the point light source located at the first focus 21a may be emitted to the reflective surface of the first optical element 21, and reflected by the reflective surface and focused to the second focus 21b. Conversely, the light of the point light source located at the second focus 21b may be emitted to the reflective surface of the first optical element 21, and reflected by the reflective surface and focused to the first focus 21a.

[0050] like Figure 1 As shown, the first focus 21a of the first optical element 21 can be located in the light emitting area 1b, and the second focus 21b can be located at the light incident end of the first optical fiber 22. Therefore, when the light from the light emitting area 1b is incident from the first focus 21a to the first optical element 21, the first optical element 21 can reflect and focus the incident light to the second focus 21b, so that the first optical fiber 22 can receive the light. Therefore, the light can be coupled into the first optical fiber 22 by the first optical element 21.

[0051] Schematically, the first optical element 21 may be an ellipsoidal reflector, which has a double focus, relatively reliable performance, and good mass production.

[0052] In the embodiment of the present application, Figure 1 The first coupling device 2 shown is only a schematic representation of its basic form, and does not limit its specific structure. Those skilled in the art can design the first coupling device 2 according to actual needs.

[0053] like Figure 1As shown, the second coupling device 3 may include a second optical element 31 and a second optical fiber 32. The second optical element 31 may reflect and focus the light emitted from the chamber 11. Schematically, the second optical element 31 has a third focus 31a and a fourth focus 31b. The light of the point light source located at the third focus 31a may be directed toward the reflective surface of the second optical element 31, and reflected by the reflective surface and focused to the fourth focus 31b. Conversely, the light of the point light source located at the fourth focus 31b may be directed toward the reflective surface of the second optical element 31, and reflected by the reflective surface and focused to the third focus 31a.

[0054] like Figure 1 As shown, the third focus 31a of the second optical element 31 can be located in the light emitting area 1b, and the fourth focus 31b can be located at the light incident end of the second optical fiber 32. Therefore, when the light from the light emitting area 1b is incident on the second optical element 31 from the fourth focus 31b, the second optical element 31 can reflect and focus the incident light to the fourth focus 31b, so that the second optical fiber 32 can receive the light. Therefore, the light can be coupled into the second optical fiber 32 by the second optical element 31.

[0055] Schematically, the second optical element 31 may be an ellipsoidal reflector, which has a double focus, relatively reliable performance, and good mass production.

[0056] In the embodiment of the present application, Figure 1 The second coupling device 3 shown is only a schematic representation of its basic form, and does not limit its specific structure. Those skilled in the art can design the second coupling device 3 according to actual needs.

[0057] like Figure 1 As shown, the first coupling device 2 and the second coupling device 3 may be located on both sides of the light emitting device 1. The first optical element 21 and the second optical element 31 may be arranged facing each other outside the chamber 11, and the chamber 11 is located between the first optical element 21 and the second optical element 31.

[0058] In one embodiment, the optical parameters of the first optical element 21 and the second optical element 31 may be the same, and the structures of the two may be the same. In this embodiment, the first focus 21a of the first optical element 21 and the third focus 31a of the second optical element 31 may coincide, and the first optical element 21 and the second optical element 31 may be symmetrically distributed on both sides of the chamber 11.

[0059] In other embodiments, the optical parameters of the first optical element 21 and the second optical element 31 may be different, and the structures of the two may be different. For example, the focal lengths, shapes of the reflection surfaces, thicknesses, etc. of the two may be different.

[0060] In the embodiment of the present application, Figure 1The light source 100 shown is only a schematic representation of its basic form, and does not limit its specific structure. Those skilled in the art can design the light source 100 according to actual needs.

[0061] In this embodiment, the light receiving device may include a first light receiving device and a second light receiving device. Figure 1 In the light source 100 shown, the first light receiving device is connected to the first optical fiber 22, and the second light receiving device is connected to the second optical fiber 32. The first light receiving device is used to receive the light transmitted by the first optical fiber 22, and the second light receiving device is used to receive the light transmitted by the second optical fiber 32.

[0062] The working principle of the optical device will be described below.

[0063] like Figure 1 As shown, the first electrode 12a and the second electrode 12b can be energized so that the ionizable medium 1a in the chamber 11 is ionized to form a light-emitting area 1b. The laser beam emitted by the first laser 13 can be irradiated on the light-emitting area 1b of the chamber 11. The light-emitting area 1b can continue to emit light under the irradiation of the first laser 13. The first light emitted by the light-emitting area 1b can be emitted from the chamber 11 and incident on the first optical element 21, and the first optical element 21 can couple the first light into the first optical fiber 22. The second light emitted by the light-emitting area 1b can be emitted from the chamber 11 and incident on the second optical element 31, and the second optical element 31 can couple the second light into the second optical fiber 32. The first optical fiber 22 and the second optical fiber 32 transmit the received light to the first light receiving device and the second light receiving device respectively. The first light receiving device and the second light receiving device process the received light (including but not limited to reflection, focusing, filtering, etc.), or use light for detection or processing.

[0064] In this embodiment, the first optical element 21 and the second optical element 31 can couple the light emitted by the light emitting device 1 in different directions into the first optical fiber 22 and the second optical fiber 32, and the first optical fiber 22 and the second optical fiber 32 can transmit the light to the first light receiving device and the second light receiving device, so that the light emitted by the light emitting device 1 in different directions is received and used by the first light receiving device and the second light receiving device. Such a design can make full use of the light energy emitted by the light emitting device 1, so that the light source 100 has a higher coupling efficiency, so that the light source 100 has a higher power and a greater radiation brightness. Since the light energy loss is reduced (the lost light energy can be converted into heat energy), the heat generation of the light source 100 can be lower, so that the light source 100 has a longer service life. In addition, the dual-port output light of the first optical fiber 22 and the second optical fiber 32 can be used to enable the light source 100 to match two light receiving devices at the same time, thereby expanding the application scenario of the light source 100.

[0065] In other embodiments, the light source may include a greater number of coupling devices, such as three coupling devices, so that the light in the chamber 11 can be coupled and transmitted through multiple paths, thereby further improving the coupling efficiency, power, and radiant brightness of the light source, reducing heat generation, and increasing service life, and further expanding the application scenarios of the light source. This embodiment does not limit the number of optical path coupling devices in the light source, and those skilled in the art can design them as needed.

[0066] In another embodiment, the pre-combustion device of the light-emitting device 1 can replace the first electrode 12a and the second electrode 12b with a second laser. The second laser is used to emit a laser beam into the chamber 11 to excite the ionizable medium 1a to ionize and form a light-emitting area 1b. Schematically, the laser beam emitted by the second laser can be directly irradiated to the chamber 11 to form the light-emitting area 1b, or it can be incident on the light-emitting area 1b of the chamber 11 after being deflected, reflected, and focused by one or more optical elements (such as lenses, reflectors, and other optical elements). Schematically, the second laser can be a pulsed laser. Pulsed lasers have the advantages of high output power and long life.

[0067] In this embodiment, the use of the second laser for pre-combustion can avoid the defect that the electrode is vaporized in the high temperature environment of the chamber 11 due to the use of electrode pre-combustion, which affects the luminous performance of the light source (after vaporization, the molecules will adhere to the light outlet, making the light outlet smaller). In addition, the second laser can also reduce the space outside the chamber 11 occupied by the pre-combustion device 12, so that more available space can be arranged for more coupling devices, further improving the coupling efficiency, power, and radiation brightness of the light source, reducing heat generation, and increasing service life, and further expanding the application scenarios of the light source.

[0068] In another embodiment, reference Figure 1 and Figure 2 As shown, the first optical element 21 and the second optical element 31 can also couple the light emitted from the chamber 11 to the first optical fiber 22 and the second optical fiber 32 by means of collimation and focusing. Collimation and focusing means collimating and focusing the divergent light of the light-emitting area 1b. For example, the first optical element 21 and the second optical element 31 can both be cemented lenses, and the divergent light of the light-emitting area 1b can be converted into collimated light after entering the cemented lens, and the collimated light can be focused on the focal point of the cemented lens after being emitted from the cemented lens, and the focal point is located at the light incident end of the optical fiber. Alternatively, the first optical element 21 and the second optical element 31 both include a collimating lens and a focusing lens, wherein the collimating lens is used to convert the divergent light emitted from the chamber 11 into collimated light, and after the collimated light is incident on the focusing lens, the focusing lens focuses the light to its focal point, and the focal point is located at the light incident end of the optical fiber.

[0069] Alternatively, the first optical element 21 and the second optical element 31 can also couple the light emitted from the chamber 11 to the first optical fiber 22 and the second optical fiber 32 by direct focusing. Collimated focusing is to focus the divergent light of the light-emitting area 1b. Schematically, the first optical element 21 and the second optical element 31 can be a biconvex lens. The biconvex lens can directly focus the divergent light of the light-emitting area 1b, and then couple it to the first optical fiber 22 and the second optical fiber 32 located at the focal position.

[0070] In the embodiment of the present application, the first optical element 21 and the second optical element 31 can achieve light coupling through different methods and different elements. The designs of the first optical element 21 and the second optical element 31 are independent of each other, and the two can be the same or different. The embodiment of the present application does not limit the specific process of achieving coupling between the first optical element 21 and the second optical element 31, and those skilled in the art can design it according to actual needs.

[0071] Figure 3 FIG. 1 is a schematic diagram of a frame structure of a light source 100 in another embodiment. Figure 3 As shown, Figure 1 The light source 100 shown differs in that Figure 3 The light source 100 shown may also include a fiber combiner 4 and a third optical fiber 5. The fiber combiner 4 is used to combine the light input from its input end and then output it. The third optical fiber 5 is used to transmit the light output from the fiber combiner 4 to the next-level device or optical element connected thereto.

[0072] like Figure 3 As shown, the fiber combiner 4 includes a first input end 41, a second input end 42 and an output end 43. Schematically, the first input end 41 and the second input end 42 can be located on the same side of the fiber combiner 4. The output end 43 can be located on a side away from the first input end 41. The first input end 41 is connected to the first optical fiber 22, the second input end 42 is connected to the second optical fiber 32, and the output end 43 is connected to the light input end of the third optical fiber 5.

[0073] In this embodiment, the optical device further includes a third light receiving device. The third light receiving device is connected to the third optical fiber 5. The third light receiving device is used to receive the light transmitted by the third optical fiber 5.

[0074] like Figure 3As shown, the first light emitted by the light-emitting device 1 can be coupled to the light input end of the first optical fiber 22 through the first optical element 21 of the first coupling device 2, and the first optical fiber 22 inputs the light to the first input end 41. The second light emitted by the light-emitting device 1 can be coupled to the light input end of the second optical fiber 32 through the second optical element 31 of the second coupling device 3, and the second optical fiber 32 inputs the light to the second input end 42. The fiber combiner 4 can combine the input light and transmit it to the third optical fiber 5 through the output end 43. The third optical fiber 5 can transmit the combined light to the third light receiving device connected thereto. The third light receiving device can process the received light (including but not limited to reflection, focusing, filtering, etc.), or use the light for detection or processing.

[0075] In this embodiment, the optical fiber combiner 4 and the third optical fiber 5 can be used to combine the two paths of light emitted by the light emitting device 1 for output. Such a design can improve the coupling efficiency, power, and radiation brightness of the light source 100 under the same conditions, reduce heat generation, and increase service life.

[0076] It is understood that when the light source 100 is Figure 3 In the embodiment shown in the figure, the first optical fiber 22 and the second optical fiber 32 are respectively connected to the first input end 41 and the second input end 42 of the optical fiber combiner 4. At this time, the first optical fiber 22 and the second optical fiber 32 cannot be connected to the first light receiving device and the second light receiving device, that is, the above-mentioned connection between the first optical fiber 22 and the first light receiving device and the connection between the second optical fiber 32 and the second light receiving device is not applicable. Figure 3 The scheme shown.

[0077] Figure 4 is a schematic diagram of a frame structure of a light source 100 in another embodiment, Figure 5 yes Figure 4 The schematic diagram of the frame structure of the light source 100 in another state is shown. Figure 4 and Figure 1 ,and Figure 1 The light source 100 shown is different in that Figure 4 The light source 100 shown may further include a driving device (not shown) and a third reflecting element 6. The driving device may be used to drive the third reflecting element 6 to move between the light emitting area 1b and the second optical element 31, or to move the third reflecting element 6 out from between the light emitting area 1b and the second optical element 31. The third reflecting element 6 is used to reflect and focus light.

[0078] like Figure 4As shown, the third reflecting element 6 can be located outside the chamber 11. In other embodiments, the third reflecting element 6 can also be located inside the chamber 11. Schematically, the third reflecting element 6 can be a spherical reflector, and the light-emitting area 1b can be located at the center of curvature of the spherical reflector. The third reflecting element 6 can also be other types of reflectors, as long as it can reflect the light incident on the third reflecting element 6 back to the light-emitting area 1b.

[0079] like Figure 4 As shown, when the third reflective element 6 is located between the light emitting area 1b and the second optical element 31, the third reflective element 6 can reflect the second path of light emitted from the chamber 11 and focus it to the light emitting area 1b. At this time, the second optical element 31 of the second coupling device 3 cannot receive the light emitted from the chamber 11, and the second optical fiber 32 cannot transmit light to the second light receiving device connected thereto. Only the first optical fiber 22 can transmit light to the first light receiving device connected thereto.

[0080] like Figure 5 As shown, when the driving device moves the third reflective element 6 out from between the light-emitting area 1b and the second optical element 31, the third reflective element 6 is located outside the light path between the light-emitting area 1b and the second optical element 31, and the second optical element 31 can receive the second path of light emitted by the light-emitting area 1b, and the second optical element 31 can couple the incident light to the light-incoming end of the second optical fiber 32, and the second optical fiber 32 can transmit light. At this time, the first optical fiber 22 and the second optical fiber 32 can transmit light to the first light receiving device and the second light receiving device connected thereto, respectively.

[0081] In this embodiment, by designing the driving device and the third reflecting element 6, the light source 100 can be switched between single-fiber output and dual-fiber output. When single-fiber output is used, the first coupling device 2 can couple more light into the first optical fiber 22 through reflection by the third reflecting element 6, which can improve the radiation brightness and power of the light received by the first light receiving device. When dual-fiber output is used, two light receiving devices can be matched at the same time while effectively improving the coupling efficiency, power and radiation brightness of the light source 100, thereby expanding the application scenarios of the light source 100.

[0082] In another embodiment, it is also possible to Figure 3 The third reflective element 6 and the driving device are added in the illustrated solution, so that the third reflective element 6 can move to between the light-emitting area 1b and the second optical element 31 or move out from between the light-emitting area 1b and the second optical element 31 to input one light or two light paths to the optical fiber combiner 4. The solution of this embodiment can meet specific product needs.

[0083] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A light source, characterized in that: comprising a chamber, an ionizable medium, a pre-combustion device, a first laser, a first optical element, a first optical fiber, a second optical element, and a second optical fiber; The ionizable medium is contained in the chamber; the pre-combustion device is used to ionize the ionizable medium and form a light-emitting area; The first laser is used to emit a laser beam to the light-emitting area to maintain the light-emitting area; The first optical element is used to couple the light emitted from the chamber to the first optical fiber so that the light is transmitted in the first optical fiber; the second optical element is used to couple the light emitted from the chamber to the second optical fiber so that the light is transmitted in the second optical fiber.

2. The light source according to claim 1, characterized in that The first optical element is used to focus the light emitted from the chamber onto the first optical fiber; and / or the second optical element is used to focus the light emitted from the chamber onto the second optical fiber.

3. The light source according to claim 2, characterized in that The first optical element has a first focus and a second focus, the first focus is located in the light emitting area, and the second focus is located at the light incident end of the first optical fiber; The first optical element is used to receive the light emitted from the chamber at the first focus and reflect the light to the second focus; And / or, the second optical element has a third focus and a fourth focus, the third focus is located in the light emitting area, and the fourth focus is located at the light incident end of the second optical fiber; The second optical element is used to receive the light emitted from the chamber at the third focus and reflect the light to the fourth focus.

4. The light source according to any one of claims 1 to 3, characterized in that: The first optical element and the second optical element have the same structure.

5. The light source according to any one of claims 1 to 4, characterized in that: The first optical element includes an ellipsoidal reflector, and / or the second optical element includes an ellipsoidal reflector.

6. The light source according to any one of claims 1 to 5, characterized in that: The light source includes a fiber combiner and a third optical fiber; the fiber combiner includes a first input end, a second input end and an output end, the first input end is connected to the first optical fiber, the second input end is connected to the second optical fiber, and the output end is connected to the third optical fiber.

7. The light source according to any one of claims 1 to 6, characterized in that: The light source includes a driving device and a third reflecting element, wherein the driving device is used to drive the third reflecting element to move to between the light-emitting area and the second optical element, or to move out from between the light-emitting area and the second optical element; wherein, when the third reflecting element is located between the light-emitting area and the second optical element, the third reflecting element is used to reflect the light emitted from the chamber to the light-emitting area, and prevent the second optical element from receiving the light emitted from the chamber.

8. The light source according to claim 7, characterized in that The third reflective element can reflect and focus the light emitted from the cavity onto the light emitting area.

9. The light source according to any one of claims 1 to 8, characterized in that: The pre-combustion device comprises a first electrode and a second electrode, the first electrode and the second electrode are arranged at an interval, and the first electrode and the second electrode are used to energize the ionizable medium to ionize, so as to form the light-emitting area; Alternatively, the pre-combustion device comprises a second laser, and the second laser is used to emit a laser beam into the chamber to excite the ionizable medium to ionize, so as to form the light emitting area.

10. An optical device, characterized in that: The light source comprises the light source described in any one of claims 1 to 9.

11. The optical device according to claim 10, characterized in that The optical device includes a first light receiving device and a second light receiving device, the first light receiving device is used to receive light transmitted by the first optical fiber, and the second light receiving device is used to receive light transmitted by the second optical fiber.

12. The optical device according to claim 10, characterized in that The light source includes a fiber combiner and a third optical fiber; the fiber combiner includes a first input end, a second input end and an output end, the first input end is connected to the first optical fiber, the second input end is connected to the second optical fiber, and the output end is connected to the third optical fiber; The optical device comprises a third light receiving device, and the third light receiving device is connected to the third optical fiber.

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