Cover opening mechanism for a process chamber and semiconductor processing apparatus

Abstract

The application belongs to the technical field of semiconductor process equipment, and particularly relates to a cover opening mechanism for a process chamber and a semiconductor process equipment. The cover opening mechanism comprises a supporting seat, a rotating shaft and a positioning piece. The positioning piece is movable relative to the rotating shaft. The rotating shaft is used for being connected with an upper cover of the process chamber. The supporting seat is used for being connected with a chamber body of the process chamber. The rotating shaft is rotatably connected with the supporting seat. The rotating shaft is used for rotating between a first rotating position and a second rotating position. In the case that the rotating shaft is in the first rotating position or the second rotating position, the positioning piece is movable relative to the rotating shaft to be positioned with the rotating shaft or to be disengaged from the positioning with the rotating shaft. The application can solve the problems of high maintenance difficulty and long maintenance time of the current semiconductor process equipment.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor process equipment, and particularly relates to a cover opening mechanism for a process chamber and a semiconductor process equipment. BACKGROUND

[0002] A capacitively coupled plasma etching machine can ionize process gas through upper and lower electrodes to generate plasma to bombard the surface of a wafer to complete etching. The upper electrode of the capacitively coupled plasma etching machine and parts in the process chamber need to be opened for maintenance after a period of process.

[0003] In related technologies, the upper electrode lifting device is used to lift the upper cover so that the upper cover is located above the chamber body to enable the maintenance personnel to stand on the maintenance side to maintain the parts on the upper cover. Generally, the diameter of the upper cover is greater than the arm length of the maintenance personnel, so it is difficult for the maintenance personnel standing on the maintenance side to maintain the parts on the upper cover away from the maintenance side. Therefore, the maintenance personnel need to move to the side opposite to the maintenance side to maintain the upper cover, which increases the maintenance difficulty and maintenance time of the semiconductor process equipment. SUMMARY

[0004] The purpose of the embodiments of the application is to provide a cover opening mechanism for a process chamber and a semiconductor process equipment, which can solve the problems of high maintenance difficulty and long maintenance time of the current semiconductor process equipment.

[0005] To solve the above technical problems, the application is implemented as follows:

[0006] In a first aspect, the embodiments of the application provide a cover opening mechanism for a process chamber, which comprises a support seat, a rotating shaft and a positioning member, the positioning member is movable relative to the rotating shaft,

[0007] The rotating shaft is used to be connected with an upper cover of the process chamber, the support seat is used to be connected with a chamber body of the process chamber, the rotating shaft is movably connected with the support seat, and the rotating shaft is used to rotate between a first rotating position and a second rotating position,

[0008] When the rotating shaft is in the first rotating position or the second rotating position, the positioning member is movable relative to the rotating shaft to be positioned with the rotating shaft or to be disengaged from the positioning with the rotating shaft.

[0009] In a second aspect, the embodiments of the application provide a semiconductor process equipment, which comprises a process chamber and the above cover opening mechanism, the process chamber comprises a chamber body and an upper cover, the rotating shaft is connected with the upper cover, and the support seat is connected with the chamber body.

[0010] In the embodiment of the present application, the rotating shaft is rotatably connected to the support seat and can rotate from the first rotating position to the second rotating position. When the cover opening mechanism is applied to the process chamber, the second rotating position is configured such that the upper cover is misaligned with the top opening of the chamber body when the rotating shaft is in the second rotating position. At this time, the upper cover is located on the maintenance side of the chamber body of the process chamber. Therefore, the maintenance personnel do not need to move to the side opposite to the maintenance side to maintain the upper cover, thereby reducing the maintenance difficulty and maintenance time of the semiconductor process equipment.

[0011] In addition, the cover opening mechanism further comprises a positioning member movable relative to the rotating shaft. When the rotating shaft is in the first rotating position, the positioning member is movable relative to the rotating shaft to be positioned with the rotating shaft. In this way, not only can the rotating shaft be ensured to be in the preset first rotating position, but also the upper cover connected to the rotating shaft can be prevented from rotating during the process to interfere with the process. When the upper cover needs to be maintained, the positioning member is movable relative to the rotating shaft to be disengaged from the positioning with the rotating shaft, so as to rotate the rotating shaft to the second rotating position. When the rotating shaft is in the second rotating position, the positioning member is movable relative to the rotating shaft to be positioned with the rotating shaft. In this way, not only can the rotating shaft be ensured to be in the preset second rotating position, but also the upper cover connected to the rotating shaft can be prevented from rotating during the maintenance to prevent safety accidents and increase the maintenance difficulty. After the maintenance is completed, the positioning member is movable relative to the rotating shaft to be disengaged from the positioning with the rotating shaft, so as to rotate the rotating shaft to the first rotating position. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 A structural schematic diagram of the semiconductor process equipment disclosed in the embodiment of the present application;

[0013] Figure 2 A sectional view of part of the structure of the semiconductor process equipment disclosed in the embodiment of the present application;

[0014] Figure 3 A bottom view of part of the structure of the semiconductor process equipment disclosed in the embodiment of the present application;

[0015] Figure 4 A front view of part of the structure of the semiconductor process equipment disclosed in the embodiment of the present application;

[0016] Figure 5 A fluid pipeline schematic diagram of the semiconductor process equipment disclosed in the embodiment of the present application;

[0017] Figure 6 A fluid flow direction schematic diagram of the semiconductor process equipment disclosed in the embodiment of the present application when pressing the reversing part;

[0018] Figure 7A fluid flow direction schematic diagram of the semiconductor process equipment disclosed in the embodiments of the present application when releasing the reversing part;

[0019] Figure 8 A part fluid pipeline schematic diagram of the semiconductor process equipment disclosed in the embodiments of the present application;

[0020] Figure 9 A fluid pipeline schematic diagram of the lifting pipeline system disclosed in the embodiments of the present application;

[0021] Figure 10 A fluid flow direction schematic diagram of the lifting pipeline system disclosed in the embodiments of the present application when the first manual switching valve is located at the fifth valve position;

[0022] Figure 11 A fluid flow direction schematic diagram of the lifting pipeline system disclosed in the embodiments of the present application when the first manual switching valve is located at the sixth valve position.

[0023] Legend of reference signs:

[0024] 100 - first manual switching valve, 110 - first manual valve, 111 - first medium port, 112 - second medium port, 113 - third medium port, 120 - second manual valve, 121 - fourth medium port, 122 - fifth medium port, 200 - first fluid pipeline, 210 - first control valve, 211 - first pilot port, 212 - first communication port, 213 - second communication port, 300 - second fluid pipeline, 400 - first driving device, 410 - first flow-through port, 420 - second flow-through port, 500 - second manual switching valve, 600 - guide member, 700 - flange, 810 - chamber body, 811 - first limiting protrusion, 812 - second limiting protrusion, 813 - support seat, 814 - rotating hole, 815 - first hole section, 816 - second hole section, 821 - upper cover, 822 - rotating shaft, 823 - cantilever beam, 824 - lifting pipeline system, 825 - first medium inlet, 826 - stopper, 827 - fixing block, 828 - first buffer block, 829 - second buffer block, 830 - positioning member, 840 - positioning matching member, 841 - first matching part, 842 - second matching part, 842a - first sub-matching part, 842b - second sub-matching part, 850 - interlocking device, 851 - first fluid port, 852 - second fluid port, 853 - reversing part, 854 - third fluid port, 860 - third control valve, 861 - second pilot port, 862 - fifth communication port, 863 - sixth communication port, 870 - second driving device, 871 - third flow-through port, 872 - fourth flow-through port, 880 - locking reversing valve, 881 - fourth fluid port, 882 - fifth fluid port, 883 - sixth fluid port, 890 - one-way throttling valve, 910 - radial rolling bearing, 920 - axial rolling bearing. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of the present application.

[0026] The terms "first", "second", and the like in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be exchanged under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally a category and do not limit the number of objects, for example, the first object can be one or more. In addition, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / ", generally indicates that the front and rear associated objects are in an "or" relationship.

[0027] The opening mechanism for a process chamber and the semiconductor process equipment provided by the embodiments of the present application will be described in detail below in conjunction with the drawings, specific embodiments and application scenarios.

[0028] As shown in Figures 1 to 11 The opening mechanism for a process chamber disclosed in the embodiments of the present application includes a support seat 813, a rotating shaft 822 and a positioning member 830, and the positioning member 830 is movable relative to the rotating shaft 822. Optionally, the manner in which the positioning member 830 is movable relative to the rotating shaft 822 can include various manners, for example, the positioning member 830 can be movable or rotatable relative to the chamber body 810.

[0029] The rotating shaft 822 is connected with the upper cover 821 of the process chamber, the support base 813 is connected with the chamber body 810 of the process chamber, the rotating shaft 822 is rotatably connected with the support base 813, and the rotating shaft 822 is used for rotating between a first rotating position and a second rotating position. When the rotating shaft 822 is in the first rotating position or the second rotating position, the positioning piece 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the rotating shaft 822. Specifically, the positioning piece 830 can be in positioning cooperation or out of positioning cooperation with the rotating shaft 822 only when the rotating shaft 822 is in the first rotating position, can be in positioning cooperation or out of positioning cooperation with the rotating shaft 822 only when the rotating shaft 822 is in the second rotating position, or the positioning piece 830 can be in positioning cooperation or out of positioning cooperation with the rotating shaft 822 when the rotating shaft 822 is in the first rotating position and the second rotating position. It should be noted that when the positioning piece 830 is in positioning cooperation with the rotating shaft 822, the rotating shaft 822 cannot rotate relative to the support base 813; when the positioning piece 830 is out of positioning cooperation with the rotating shaft 822, the rotating shaft 822 can rotate relative to the support base 813, that is, the positioning cooperation and the out of positioning cooperation in the embodiment refer to positioning and out of positioning in the rotating direction of the rotating shaft 822.

[0030] In the embodiment, the rotating shaft 822 is rotatably connected with the support base 813 and can rotate from the first rotating position to the second rotating position. When the cover opening mechanism is applied to the process chamber, the second rotating position can be configured as: when the rotating shaft 822 is in the second rotating position, the upper cover 821 is misaligned with the top opening, and at this time, the upper cover 821 is located on the maintenance side of the chamber body 810 of the process chamber. Therefore, the maintenance personnel do not need to move to the side opposite to the maintenance side to maintain the upper cover 821, so that the maintenance difficulty and the maintenance time of the semiconductor process equipment can be reduced.

[0031] In addition, the cover opening mechanism further comprises a positioning member 830 which is movable relative to the rotating shaft 822. When the rotating shaft 822 is located at the first rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation with the rotating shaft 822. In this way, not only can the rotating shaft 822 be ensured to be located at the preset first rotating position, but also the upper cover 821 connected with the rotating shaft 822 can be prevented from rotating during the process of the technology to interfere with the process of the technology. When the upper cover 821 needs to be maintained, the positioning member 830 is movable relative to the rotating shaft 822 to be out of the positioning cooperation with the rotating shaft 822, so that the rotating shaft 822 is rotated to the second rotating position. When the rotating shaft 822 is located at the second rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation with the rotating shaft 822. In this way, not only can the rotating shaft 822 be ensured to be located at the preset second rotating position, but also the upper cover 821 connected with the rotating shaft 822 can be prevented from rotating during the process of the maintenance to prevent safety accidents and increase the difficulty of the maintenance. After the maintenance is completed, the positioning member 830 is movable relative to the rotating shaft 822 to be out of the positioning cooperation with the rotating shaft 822, so that the rotating shaft 822 is rotated to the first rotating position.

[0032] In an alternative embodiment, the support base 813 is provided with a rotating hole 814, and the rotating shaft 822 is rotatably arranged in the rotating hole 814. When the rotating shaft 822 is located at the first rotating position, the upper cover 821 is opposite to the top opening of the chamber body 810. When the rotating shaft 822 is located at the second rotating position, the upper cover 821 is misaligned with the top opening. In this embodiment, the upper cover 821 can be opposite to the top opening of the chamber body 810, that is, in the axial direction of the top opening, the orthographic projection of the upper cover 821 covers the orthographic projection of the top opening, and at this time, the orthographic projection of the top opening is completely located within the orthographic projection of the upper cover 821. At this time, the upper cover 821 can be covered on the chamber body 810 to seal the top opening, or the upper cover 821 is located directly above the top opening with a spacing therebetween, that is, the upper cover 821 does not seal the top opening. Alternatively, the rotating axis of the rotating shaft 822 can be located at one side of the chamber body 810, and at this time, the rotating axis can not intersect with the chamber body 810. Of course, the rotating axis can also intersect with the chamber body 810. The upper cover 821 can be misaligned with the top opening, that is, in the axial direction of the top opening, the orthographic projection of the top opening is located outside the orthographic projection of the upper cover 821, and at this time, the upper cover 821 can be located at the maintenance side of the chamber body 810.

[0033] In some embodiments, the outer circumferential surface of the rotating shaft 822 is provided with a first matching part 841 and / or a second matching part 842. When the rotating shaft 822 is in the first rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the first matching part 841. When the rotating shaft 822 is in the second rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the second matching part 842. However, the first matching part 841 and / or the second matching part 842 is arranged on the outer circumferential surface of the rotating shaft 822, which makes the first matching part 841 and / or the second matching part 842 close to the axis of the rotating shaft 822. Therefore, when the rotating shaft 822 rotates by the same angle, the displacement of the first matching part 841 and / or the second matching part 842 is smaller, that is, the first matching part 841 and the second matching part 842 need to be arranged closer to each other, which may cause the positioning member 830 to be in positioning cooperation with the first matching part 841 and the second matching part 842. For example, when the positioning member 830 needs to be in positioning cooperation with the first matching part 841, it is in positioning cooperation with the second matching part 842. Or, when the positioning member 830 needs to be in positioning cooperation with the second matching part 842, it is in positioning cooperation with the first matching part 841.

[0034] In an alternative embodiment, the cover opening mechanism further comprises a positioning cooperation member 840 arranged outside the rotating shaft 822. The positioning cooperation member 840 is provided with a first matching part 841. When the rotating shaft 822 is in the first rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the first matching part 841. The positioning cooperation member 840 is further provided with a second matching part 842. When the rotating shaft 822 is in the second rotating position, the positioning member 830 is movable relative to the rotating shaft 822 to be in positioning cooperation or out of positioning cooperation with the second matching part 842. In this embodiment, the first matching part 841 and / or the second matching part 842 is arranged on the positioning cooperation member 840, which is arranged outside the rotating shaft 822. Therefore, the distance between the first matching part 841 and / or the second matching part 842 and the axis of the rotating shaft 822 is appropriate, so that when the rotating shaft 822 rotates by the same angle, the displacement of the first matching part 841 and / or the second matching part 842 is appropriate, thereby improving the cooperation precision between the positioning member 830 and the first matching part 841 and / or the second matching part 842. In addition, arranging the first matching part 841 and the second matching part 842 on the positioning cooperation member 840 can also make the distance between the first matching part 841 and the second matching part 842 appropriate, thereby solving the problem of cooperation confusion between the positioning member 830 and the first matching part 841 and the second matching part 842.

[0035] Optionally, the positioning member 830 can have a positioning protrusion (or a positioning recess), and the first and second engaging portions 841 and 842 can each be a positioning recess (or a positioning protrusion). In the case that the positioning member 830 is rotatable relative to the rotating shaft 822, the positioning recess has a passage for the positioning protrusion to enter, so as to make the positioning protrusion enter or exit the positioning recess. The positioning engaging member 840 can be a ring-shaped component, which can be sleeved outside the rotating shaft 822 or can be integrally formed with the rotating shaft 822. Of course, the positioning engaging member 840 can also be a sector-shaped component, and the present application does not limit the shape of the positioning engaging member 840.

[0036] In an alternative embodiment, the second rotating position includes a first sub-position and a second sub-position, the second engaging portion 842 includes a first sub-engaging portion 842a corresponding to the first sub-position and a second sub-engaging portion 842b corresponding to the second sub-position, the rotating shaft 822 is rotatable from the first rotating position to the first sub-position in a first rotating direction, and is rotatable from the first rotating position to the second sub-position in a second rotating direction, the first rotating direction being opposite to the second rotating direction. The first and second sub-engaging portions 842a and 842b can be arranged along the circumference of the positioning engaging member 840.

[0037] In the case that the rotating shaft 822 is in the first sub-position, the positioning member 830 is movable relative to the rotating shaft 822 to engage or disengage with the first sub-engaging portion 842a; in the case that the rotating shaft 822 is in the second sub-position, the positioning member 830 is movable relative to the rotating shaft 822 to engage or disengage with the second sub-engaging portion 842b. In this embodiment, the second engaging portion 842 includes the first and second sub-engaging portions 842a and 842b, and in the cases that the rotating shaft 822 is in the first and second sub-positions respectively, the positioning member 830 engages or disengages with the first and second sub-engaging portions 842a and 842b respectively. That is, the positioning engaging member 840 of this embodiment is compatible with the positioning member 830 for two rotating angles, and the two rotating angles can correspond to two maintenance positions of the upper cover. In this way, the rotating shaft 822 can be rotated to different maintenance positions for different maintenance requirements, so as to adapt the semiconductor process equipment to multiple maintenance requirements.

[0038] In an alternative embodiment, the cover opening mechanism further comprises a lifting device and a cantilever beam 823, the first end of the lifting device is connected with the upper cover 821, the second end of the lifting device is connected with the first end of the cantilever beam 823, the second end of the cantilever beam 823 is fixedly connected with the rotating shaft 822, and the lifting device can drive the upper cover 821 to lift to make the upper cover 821 approach or move away from the top opening of the chamber body 810. Optionally, the axis of the rotating shaft 822 and the axis of the cantilever beam 823 have an included angle, which can be an acute angle, a right angle or an obtuse angle. In this embodiment, the cover opening mechanism comprises a lifting device, the lifting device can drive the upper cover 821 to rise or fall to make the upper cover 821 move in the direction away from or close to the top opening; and the lifting device is connected with the rotating shaft 822 through the cantilever beam 823, so that the rotating shaft 822 is arranged away from the center of the upper cover 821 to increase the area of the upper cover 821 on the maintenance side when the upper cover 821 is in the second rotating position, so that more components on the upper cover 821 are located on the maintenance side.

[0039] The specific operation process is as follows: when the upper cover 821 needs to be maintained, the lifting device is controlled to lift the upper cover 821, in this process, the upper cover 821 can open the top opening, and then the positioning member 830 and the positioning and cooperating member 840 are disengaged, and the upper cover 821 is pushed to make the upper cover 821 rotate from the first rotating position to the second rotating position.

[0040] In an alternative embodiment, the lifting device comprises a first driving device 400 and an interlocking device 850, the interlocking device 850 is provided with a reversing part 853 for switching the interlocking device 850 between the first state and the second state; in the case that the rotating shaft 822 is located in the first rotating position, the cantilever beam 823 presses the reversing part 853, the interlocking device 850 is in the first state to make the first driving device 400 drive the upper cover 821 to lift; in the case that the rotating shaft 822 is located in the second rotating position, the cantilever beam 823 releases the reversing part 853, the interlocking device 850 is in the second state to limit the first driving device 400 to drive the upper cover 821 to lift.

[0041] When the rotating shaft 822 is located at the first rotating position, i.e. the upper cover 821 is opposite to the top opening of the chamber body 810 and is not at the maintenance side, the cantilever beam 823 presses the reversing part 853 to make the interlocking device 850 at the first state, and then the first driving device 400 drives the upper cover 821 to lift; when the rotating shaft 822 is located at the second rotating position, i.e. the upper cover 821 is staggered with the top opening and is at the maintenance side, the cantilever beam 823 releases the reversing part 853 to make the interlocking device 850 at the second state, and then the first driving device 400 is limited to drive the upper cover 821 to lift. It can be seen that the first driving device 400 of the embodiment can only drive the upper cover 821 to lift when the upper cover 821 is not at the maintenance side, which can avoid safety accidents caused by misoperation of lifting the upper cover 821 when the maintenance personnel maintains the upper cover 821. Of course, the lifting device can only include the first driving device 400, and does not include the interlocking device 850.

[0042] In an alternative embodiment, the first driving device 400 is a telescopic cylinder, the interlocking device 850 is an interlocking reversing valve, and the lifting device further includes a lifting pipeline system 824. Alternatively, in other embodiments, the first driving device 400 can be a driving source such as a motor or a hydraulic motor, and a lifting mechanism connected with the driving source, at this time the interlocking device 850 is a steering switching part of the motor or the hydraulic motor, and the lifting mechanism can be a screw nut mechanism, a connecting rod mechanism, etc.

[0043] The lifting pipeline system 824 is connected with the first driving device 400, and the lifting pipeline system 824 has a first medium inlet 825 for introducing fluid medium to drive the first driving device 400 to extend or retract. Specifically, after the fluid medium is introduced into the first medium inlet 825, the lifting pipeline system 824 can switch the internal pipeline to make the fluid medium enter the rod cavity or the rodless cavity of the first driving device 400, so that the extension or retraction of the first driving device 400 can be realized, and then the upper cover 821 is driven to approach or move away from the top opening. The fluid medium can be compressed air or hydraulic oil, and the first driving device 400 can be a hydraulic cylinder or an air cylinder.

[0044] The interlocking device 850 has a first fluid port 851 and a second fluid port 852, the first fluid port 851 can be connected with a fluid source, and the second fluid port 852 is connected with the first medium inlet 825. Alternatively, the interlocking device 850 can be a manual reversing valve, an electromagnetic reversing valve, a machine-controlled reversing valve, etc., such as a roller plunger type machine-controlled valve, at this time the reversing part 853 is a roller plunger; of course, in addition to the roller plunger, the reversing part 853 can also be a button, etc.

[0045] When the interlocking device 850 is in the first state, the interlocking device 850 is in the first valve position to connect the first fluid port 851 with the second fluid port 852; when the interlocking device 850 is in the second state, the interlocking device 850 is in the second valve position to disconnect the first fluid port 851 from the second fluid port 852. In the embodiment, when the interlocking device 850 is in the first state, the interlocking device 850 is in the first valve position, the first fluid port 851, the second fluid port 852 and the first medium inlet 825 are sequentially connected, at this time, the external fluid source can pass the fluid medium to the first medium inlet 825 through the first fluid port 851 to drive the first drive device 400 to extend and retract, and further drive the upper cover to ascend and descend; when the interlocking device 850 is in the second state, the interlocking device 850 is in the second valve position, the first fluid port 851 is disconnected from the second fluid port 852, that is, the fluid source cannot pass the fluid medium to the first medium inlet 825 through the first fluid port 851, so that the first drive device 400 cannot be driven to extend and retract, and further the upper cover 821 cannot be driven to ascend and descend.

[0046] In an alternative embodiment, the first drive device 400 has a first flow port 410 and a second flow port 420; the first flow port 410 is connected with a first control valve 210, the first control valve 210 has a first pilot port 211, and a first communication port 212 and a second communication port 213 which are connected in an on-off manner, when the first pilot port 211 is connected with the first pilot fluid of the first preset pressure, the first communication port 212 and the second communication port 213 are connected.

[0047] The first communication port 212 and the second flow port 420 are respectively connected in an on-off manner with the first medium inlet 825, and the first flow port 410 is connected with the second communication port 213; when the first medium inlet 825 is connected with the first flow port 410 and disconnected from the second flow port 420, the first drive device 400 can drive the upper cover 821 to descend; when the first medium inlet 825 is connected with the second flow port 420 and disconnected from the first flow port 410, the first drive device 400 can drive the upper cover 821 to ascend.

[0048] Specifically, the first control valve 210 is a pilot valve, and only when the first pilot fluid with the first preset pressure is introduced into the first pilot port 211, the first communication port 212 is communicated with the second communication port 213, and at this time, the medium in the first medium inlet 825 can pass through the first control valve 210 to enter the first driving device 400, or the medium in the first driving device 400 can pass through the first control valve 210 to flow out. Therefore, when the upper cover 821 does not need to be lowered, the first pilot fluid can not be introduced into the first control valve 210, so that even if the fluid medium is introduced into the first medium inlet 825, the fluid medium cannot pass through the first control valve 210 to enter the first driving device 400, so that it can be ensured that the upper cover 821 cannot be lowered, so that safety accidents can be prevented.

[0049] The interlocking device 850 also has a third fluid port 854, which is communicated with the second flow port 420; when the interlocking device 850 is in the first valve position, the first fluid port 851 is disconnected from the third fluid port 854; when the interlocking device 850 is in the second valve position, the first fluid port 851 is communicated with the third fluid port 854, and the first communication port 212 is disconnected from the second communication port 213.

[0050] In this embodiment, when the rotating shaft 822 is in the second rotating position, that is, the cantilever beam 823 releases the reversing part 853, and the upper cover 821 is in the maintenance side, the first fluid port 851 is communicated with the third fluid port 854, and the third fluid port 854 is communicated with the second flow port 420 of the first driving device 400. That is, the external fluid source can enter the second flow port 420 through the first fluid port 851 and the third fluid port 854 in turn, at this time, the first pilot fluid can not be introduced into the first control valve 210, so that the fluid medium in the first driving device 400 cannot be discharged through the first flow port 410, so that the piston rod of the first driving device 400 cannot be moved upward, and remains stationary; at the same time, since the external fluid source always sends the fluid medium to the second flow port 420 of the first driving device 400, this can balance the pulling force exerted by the upper cover 821 on the piston rod of the first driving device 400, so that the first driving device 400 remains in the lifting position, avoiding the upper cover 821 from being lowered due to the gravity of the piston rod of the first driving device 400, thereby reducing the risk of safety accidents. Of course, the interlocking device 850 can also have other fluid ports to discharge the fluid medium flowing out of the lifting pipeline system 824 through the interlocking device 850.

[0051] In an alternative embodiment, the second fluid port 852 is connected with a third control valve 860, the third control valve 860 has a second pilot port 861, and a fifth communication port 862 and a sixth communication port 863 which are connected in an on-off manner, the fifth communication port 862 is connected with the second fluid port 852, and the sixth communication port 863 is connected with the first medium inlet 825; in the case that the second pilot port 861 is connected with the second preset pressure second pilot fluid, the fifth communication port 862 is connected with the sixth communication port 863. In this embodiment, the third control valve 860 is a pilot valve, only in the case that the second pilot port 861 is connected with the second preset pressure second pilot fluid, the fifth communication port 862 is connected with the sixth communication port 863, at this time, the fluid medium of the external fluid source can enter the first medium inlet 825 through the third control valve 860, so as to realize the lifting of the first driving device 400. It can be seen that, in this embodiment, the third control valve 860 is arranged, so as to further ensure that the first driving device 400 can be stretched and retracted only when it needs to be stretched and retracted.

[0052] In an alternative embodiment, the cover opening mechanism further comprises a second driving device 870, the second driving device 870 is a telescopic cylinder, one end of the second driving device 870 is connected with the chamber body 810, the other end of the second driving device 870 is connected with the positioning member 830, the second driving device 870 can drive the positioning member 830 to move, and the second driving device 870 has a third flow port 871 and a fourth flow port 872. Alternatively, the second driving device 870 can be a hydraulic cylinder or a pneumatic cylinder. Of course, the second driving device 870 of this embodiment can be omitted, and the positioning member 830 can be driven to move manually or electrically. Further, the chamber body 810 is provided with a guide member 600, the guide member 600 is provided with a guide hole, and at least part of the piston rod of the second driving device 870 is guided and matched with the guide hole, so as to improve the stability of the telescopic cylinder of the second driving device 870.

[0053] The cover opening mechanism further comprises a locking reversing valve 880, the locking reversing valve 880 has a fourth fluid port 881, a fifth fluid port 882 and a sixth fluid port 883, the fifth fluid port 882 and the sixth fluid port 883 are connected with the fourth fluid port 881 in an on-off manner, the fifth fluid port 882 is connected with the third flow port 871, and the sixth fluid port 883 is connected with the fourth flow port 872.

[0054] The locking directional valve 880 has a third valve position and a fourth valve position. When the locking directional valve 880 is located at the third valve position, the fourth fluid port 881 is in communication with the fifth fluid port 882 and is disconnected from the sixth fluid port 883, and the second driving device 870 drives the positioning member 830 to be positioned with the rotating shaft 822. When the locking directional valve 880 is located at the fourth valve position, the fourth fluid port 881 is in communication with the sixth fluid port 883 and is disconnected from the fifth fluid port 882, and the second driving device 870 drives the positioning member 830 to be disengaged from the rotating shaft 822. The second pilot port 861 is in communication with the communication pipeline between the fifth fluid port 882 and the third fluid port 871.

[0055] In the embodiment, when the fourth fluid port 881 is in communication with one of the fifth fluid port 882 and the sixth fluid port 883, the fourth fluid port 881 is disconnected from the other one of the fifth fluid port 882 and the sixth fluid port 883. When the fourth fluid port 881 is in communication with the fifth fluid port 882, the second driving device 870 can drive the positioning member 830 to be positioned with the rotating shaft 822. When the fourth fluid port 881 is in communication with the sixth fluid port 883, the second driving device 870 can drive the positioning member 830 to be disengaged from the rotating shaft 822. The fluid pressure in the communication pipeline of the embodiment can be configured as follows: when the fourth fluid port 881 is in communication with the fifth fluid port 882, the fluid pressure in the communication pipeline is the second preset pressure, and when the fourth fluid port 881 is in communication with the fifth fluid port 882, the fluid pressure in the communication pipeline is less than the second preset pressure. That is, when the second driving device 870 drives the positioning member 830 to be positioned with the rotating shaft 822, the third control valve 860 can be opened, and the fluid medium of the fluid source can enter the first medium inlet 825 of the lifting pipeline system 824 to lift the upper cover 821. When the second driving device 870 drives the positioning member 830 to be disengaged from the rotating shaft 822, the third control valve 860 cannot be opened, and thus the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, so that the upper cover 821 cannot be lifted. Therefore, when the rotating shaft 822 starts to rotate, even if the cantilever beam 823 is still pressing the reversing part 853 of the interlocking device 850, because the second driving device 870 drives the positioning member 830 to be disengaged from the rotating shaft 822 at this time, the third control valve 860 cannot be opened, and the fluid medium of the fluid source cannot enter the first medium inlet 825 of the lifting pipeline system 824, so that a safety accident caused by mistakenly lifting the upper cover 821 when the rotating shaft 822 starts to rotate is avoided. Of course, the locking directional valve 880 can also have other fluid ports to discharge the fluid medium flowing out of the second driving device 870.

[0056] In an alternative embodiment, the fourth flow port 872 is connected with a one-way throttle valve 890, which throttles in the direction that the fourth flow port 872 extends to the sixth fluid port 883. In this embodiment, the one-way throttle valve 890 throttles in the direction that the fourth flow port 872 extends to the sixth fluid port 883, that is, when the second driving device 870 drives the positioning member 830 to positionally cooperate with the rotating shaft 822, the one-way throttle valve 890 is conducted and throttled, so that the speed of the cooperation between the positioning member 830 and the rotating shaft 822 can be adjusted.

[0057] As Figures 9 to 11 In an alternative embodiment, the lifting pipeline system 824 includes a first manual switching valve 100, a first fluid pipeline 200, a second fluid pipeline 300, and a first driving device 400 for connecting the upper cover 821; the first driving device 400 has a first flow port 410 and a second flow port 420, the two ends of the first fluid pipeline 200 are respectively connected with the first manual switching valve 100 and the first flow port 410, and the two ends of the second fluid pipeline 300 are respectively connected with the first manual switching valve 100 and the second flow port 420; the first manual switching valve 100 has a fifth valve position and a sixth valve position, when the first manual switching valve 100 is located at the fifth valve position, the first flow port 410 is a fluid inlet and the second flow port 420 is a fluid outlet, and the first driving device 400 can drive the upper cover 821 to descend; when the first manual switching valve 100 is located at the sixth valve position, the first flow port 410 is a fluid outlet and the second flow port 420 is a fluid inlet, and the first driving device 400 can drive the upper cover 821 to ascend. The cover opening mechanism of the embodiment of the application uses the first manual switching valve 100 to switch the working state of the telescopic cylinder, so that even if the machine table is not powered during the assembly process, the cover opening mechanism can still be used to lift or lower the upper cover 821.

[0058] Further, the cover opening mechanism further includes a second manual switching valve 500, which is located upstream of the first manual switching valve 100, and the first manual switching valve 100 and the second manual switching valve 500 are connected in a switchable manner. In this embodiment, the upper cover 821 can be driven to ascend or descend only by simultaneously operating the first manual switching valve 100 and the second manual switching valve 500 with both hands, so that the safety risk caused by the accidental touch of the operator can be reduced. In addition, when the operator operates the first manual switching valve 100 and the second manual switching valve 500 with both hands, the attention of the operator can be improved, and the hand clamping during the lifting and lowering of the upper cover 821 can be prevented, so that the work safety can be ensured.

[0059] Further, the first manual switch valve 100 comprises a first manual valve 110 and a second manual valve 120, the first manual valve 110 has a first medium port 111, a second medium port 112 and a third medium port 113, the second manual valve 120 has a fourth medium port 121 and a fifth medium port 122 which are connected in an openable and closable mode, the third medium port 113 is connected with the fourth medium port 121, the first end of the first fluid pipeline 200 can be connected with the fifth medium port 122, the first end of the second fluid pipeline 300 can be connected with the second medium port 112; the first medium port 111 is connected with the second manual switch valve 500 in an openable and closable mode, the first medium port 111 can be connected with the second medium port 112 and the third medium port 113 in an openable and closable mode respectively, and when the first medium port 111 is connected with one of the second medium port 112 and the third medium port 113, the first medium port 111 is disconnected with the other one; when the first manual switch valve 100 is located at the fifth valve position, the first medium port 111 is connected with the third medium port 113, and the fourth medium port 121 is connected with the fifth medium port 122; when the first manual switch valve 100 is located at the sixth valve position, the first medium port 111 is connected with the second medium port 112. In the embodiment of the application, the operation part of the first manual switch valve 100, the first manual valve 110 and the second manual valve 120 is only one, so that the operation direction of the operation part of the first manual switch valve 100, the first manual valve 110 and the second manual valve 120 is unified, so that the operation direction of the first manual switch valve 100, the first manual valve 110 and the second manual valve 120 is consistent, so as to facilitate the operator to operate.

[0060] In an alternative embodiment, the rotating shaft 822 is provided with a stop piece 826, and the support seat 813 is provided with a first limiting protrusion 811, and when the rotating shaft 822 is located at the first rotating position, the stop piece 826 is limited and matched with the first limiting protrusion 811 in the direction of rotating from the second rotating position to the first rotating position. If the stop piece 826 is not provided, the rotating shaft 822 can be stopped by relying on human force, but the force applied by the maintenance personnel each time is not the same, so that the position stopped by the rotating shaft 822 each time is also not the same, which can cause that the positioning piece 830 cannot be positioned and matched with the rotating shaft 822, and can also cause that the upper cover 821 collides with other machines, thereby causing damage to the parts. In the embodiment, the stop piece 826 and the first limiting protrusion 811 are provided, and during the process that the rotating shaft 822 rotates from the second rotating position to the first rotating position, the first limiting protrusion 811 can limit the stop piece 826, so that the rotating shaft 822 is accurately stopped at the first rotating position, thereby solving the problems that the positioning piece 830 cannot be positioned and matched with the rotating shaft 822 and the upper cover 821 collides with other machines.

[0061] And / or, in an alternative embodiment, the support base 813 is provided with a second limiting protrusion 812, and the stopper 826 is in limiting cooperation with the second limiting protrusion 812 in the direction of rotation from the first rotation position to the second rotation position when the rotating shaft 822 is in the second rotation position. The embodiment provided with the stopper 826 and the second limiting protrusion 812 can limit the stopper 826 during the rotation of the rotating shaft 822 from the first rotation position to the second rotation position, so as to accurately stop the rotating shaft 822 at the second rotation position, thereby solving the problems that the limiting member 830 cannot be in positioning cooperation with the rotating shaft 822 and the upper cover 821 collides with other machines.

[0062] Alternatively, the stopper 826 can be made of rigid material, so that the stopper 826 and the first limiting protrusion 811 and the second limiting protrusion 812 are in rigid contact when the stopper 826 is in contact with the first limiting protrusion 811 and the second limiting protrusion 812, which can generate greater vibration and can cause damage to the stopper 826, the first limiting protrusion 811 and the second limiting protrusion 812. In an alternative embodiment, the stopper 826 comprises a fixed block 827 connected with the rotating shaft 822, and the stopper 826 further comprises a first buffer block 828 provided on the fixed block 827, and the first buffer block 828 is in limiting cooperation with the first limiting protrusion 811 when the rotating shaft 822 is in the first rotation position. In the embodiment, the fixed block 827 is provided with the first buffer block 828, and the first buffer block 828 can be in limiting contact with the first limiting protrusion 811, and the first buffer block 828 has the function of buffering and shock absorption, so that when the first buffer block 828 is in contact with the first limiting protrusion 811, greater vibration will not be generated between them, and the risk of damage to the stopper 826 and the first limiting protrusion 811 can be reduced. Alternatively, the first buffer block 828 can be made of elastic material such as rubber. Further, the first buffer block 828 is detachably connected with the fixed block 827 through clamping, threaded connection or the like, so as to facilitate replacement of the first buffer block 828.

[0063] And / or, in an alternative embodiment, the stopper 826 further comprises a second buffer block 829 arranged on the fixing block 827, and the second buffer block 829 is in limiting cooperation with the second limiting protrusion 812 when the rotating shaft 822 is located at the second rotating position. In this embodiment, the second buffer block 829 is arranged on the fixing block 827, and the second buffer block 829 can be in limiting contact with the second limiting protrusion 812, and the second buffer block 829 has a buffering and damping effect, so that when the second buffer block 829 is in contact with the second limiting protrusion 812, there will be no large vibration between the two, and the risk of damage to the stopper 826 and the second limiting protrusion 812 can be reduced. Alternatively, the second buffer block 829 can be made of elastic materials such as rubber. Further, the second buffer block 829 is detachably connected with the fixing block 827 by clamping, threaded connection or the like, so as to facilitate replacement of the second buffer block 829.

[0064] In an alternative embodiment, the support seat 813 is provided with a rotating hole 814, and at least a portion of the rotating shaft 822 is in rotating cooperation with the rotating hole 814. The rotating shaft 822 is externally provided with at least two radial rolling bearings 910, and the outer rings of the at least two radial rolling bearings 910 are in cooperation with the inner circumferential surface of the rotating hole 814. Alternatively, the radial rolling bearings 910 are rolling bearings capable of bearing radial force, which can be pure radial rolling bearings capable of bearing only radial force, such as needle bearings, etc.; or can be rolling bearings capable of bearing both radial force and axial force, such as deep groove ball bearings, etc.

[0065] In this embodiment, the outer ring of the radial rolling bearing 910 can be in interference fit with the inner circumferential surface of the rotating hole 814, and the inner ring of the radial rolling bearing 910 can rotate with the rotating shaft 822. When the upper cover 821 is located at the maintenance side, or when the upper cover 821 is located directly above the top opening, the upper cover 821 is suspended at one end of the rotating shaft 822 and will exert a radial force on the rotating shaft 822, and the radial rolling bearing 910 can bear the radial force to avoid the falling of the upper cover 821. In addition, the radial rolling bearing 910 of this embodiment is a rolling bearing, which has smaller tolerance fit, smaller deformation under force, and smaller friction generated during rotation compared with a sliding bearing, so that the radial rolling bearing 910 of this embodiment can also improve the stability of the rotating shaft 822 during rotation.

[0066] In an alternative embodiment, the cover opening mechanism further comprises a cantilever beam 823, a first end of the cantilever beam 823 is connected with the upper cover 821, a second end of the cantilever beam 823 is fixedly connected with the rotating shaft 822, an end of the cantilever beam 823 extending towards the rotating shaft 822 is provided with a flange 700, a portion of the rotating shaft 822 is located in the flange 700, an outer portion of the flange 700 is sleeved with an axial rolling bearing 920, the axial rolling bearing 920 is arranged on the support base 813, and two ends of the axial rolling bearing 920 along an axial direction thereof are in contact with the support base 813 and the cantilever beam 823 respectively. In this embodiment, the axial rolling bearing 920 is sleeved with the outer portion of the flange 700 of the cantilever beam 823, and since the cantilever beam 823 is connected with the rotating shaft 822, the axial force applied on the axial rolling bearing 920 by the upper cover 821 can be borne by the rotating shaft 822 and the cantilever beam 823 together, so that the force borne by the rotating shaft 822 can be reduced, and the rotating shaft 822 can be prevented from being damaged.

[0067] In an alternative embodiment, the rotating hole 814 is a stepped hole, the stepped hole comprises a first hole section 815 and a second hole section 816, the diameter of the first hole section 815 is larger than the diameter of the second hole section 816, and the first hole section 815 is closer to the cantilever beam 823 than the second hole section 816. Optionally, the axis of the first hole section 815 is collinear with the axis of the second hole section 816; the cantilever beam 823 and the rotating shaft 822 can be connected by welding or a threaded connection.

[0068] The axial rolling bearing 920 is arranged on a stepped surface connecting the first hole section 815 and the second hole section 816, and an outer ring of the axial rolling bearing 920 is matched with an inner peripheral surface of the first hole section 815. Optionally, the axial rolling bearing 920 is a rolling bearing capable of bearing axial force, which can be a pure axial rolling bearing capable of bearing only axial force, such as a thrust ball bearing, or a rolling bearing capable of bearing both radial force and axial force, such as a deep groove ball bearing.

[0069] In this embodiment, the axial rolling bearing 920 is arranged on the stepped surface, that is, the axial rolling bearing 920 is limited and matched with the stepped surface in the vertically downward direction, and the stepped surface is located in the rotating hole 814, so that at least part of the axial rolling bearing 920 is located in the rotating hole 814, and the space outside the rotating hole 814 occupied by the axial rolling bearing 920 can be reduced.

[0070] The embodiments of the present application also disclose a semiconductor process equipment, which comprises a process chamber and the cover opening mechanism according to any one of the above embodiments, the process chamber comprises a chamber body 810 and an upper cover 821, a rotating shaft 822 is connected with the upper cover 821, and a support base 813 is connected with the chamber body 810. Optionally, the upper cover 821 comprises an upper electrode assembly.

[0071] The above embodiments of the present application mainly describe the differences between various embodiments, and the different optimization features between various embodiments can be combined to form a better embodiment as long as they are not contradictory. In view of concise writing, details are not described herein. The embodiments of the present application are described above in combination with the drawings, but the present application is not limited to the above specific embodiments. The above specific embodiments are only illustrative, but not restrictive. Those skilled in the art can make many forms under the inspiration of the present application without departing from the scope of the present application and the protection scope of the claims.

Claims

1. An uncover mechanism for a process chamber, comprising: The cover opening mechanism comprises a support base (813), a rotating shaft (822) and a positioning member (830), the positioning member (830) is movable relative to the rotating shaft (822), the rotating shaft (822) is used to be connected with an upper cover (821) of the process chamber, the support base (813) is used to be connected with a chamber body (810) of the process chamber, the rotating shaft (822) is rotatably connected with the support base (813), and the rotating shaft (822) is used to rotate between a first rotating position and a second rotating position, when the rotating shaft (822) is in the first rotating position or the second rotating position, the positioning member (830) is movable relative to the rotating shaft (822) to be in positioning cooperation or out of positioning cooperation with the rotating shaft (822).

2. The decap mechanism of claim 1, wherein, The support base (813) is provided with a rotating hole (814), and the rotating shaft (822) is rotatably arranged in the rotating hole (814), when the rotating shaft (822) is in the first rotating position, the upper cover (821) is opposite to a top opening of the chamber body (810); when the rotating shaft (822) is in the second rotating position, the upper cover (821) is misaligned with the top opening.

3. The decap mechanism of claim 1, wherein, The cover opening mechanism further comprises a positioning cooperation member (840) arranged outside the rotating shaft (822); the positioning cooperation member (840) is provided with a first cooperation part (841), when the rotating shaft (822) is in the first rotating position, the positioning member (830) is movable relative to the rotating shaft (822) to be in positioning cooperation or out of positioning cooperation with the first cooperation part (841); and / or, the positioning cooperation member (840) is provided with a second cooperation part (842), when the rotating shaft (822) is in the second rotating position, the positioning member (830) is movable relative to the rotating shaft (822) to be in positioning cooperation or out of positioning cooperation with the second cooperation part (842).

4. The decap mechanism of claim 3, wherein, The second rotating position comprises a first sub-position and a second sub-position, the second cooperation part (842) comprises a first sub-cooperation part (842a) corresponding to the first sub-position and a second sub-cooperation part (842b) corresponding to the second sub-position, the rotating shaft (822) can rotate from the first rotating position to the first sub-position in a first rotating direction, and the rotating shaft (822) can also rotate from the first rotating position to the second sub-position in a second rotating direction, the first rotating direction being opposite to the second rotating direction; The positioning member (830) is movable relative to the rotating shaft (822) to be in positioning cooperation with the first sub-cooperating part (842a) or to be out of positioning cooperation when the rotating shaft (822) is in the first sub-position; and the positioning member (830) is movable relative to the rotating shaft (822) to be in positioning cooperation with the second sub-cooperating part (842b) or to be out of positioning cooperation when the rotating shaft (822) is in the second sub-position.

5. The decap mechanism of claim 1, wherein, The cover opening mechanism further comprises a lifting device and a cantilever beam (823), the first end of the lifting device is connected with the upper cover (821), the second end of the lifting device is connected with the first end of the cantilever beam (823), the second end of the cantilever beam (823) is fixedly connected with the rotating shaft (822), and the lifting device can drive the upper cover (821) to lift.

6. The decap mechanism of claim 5, wherein, The lifting device comprises a first driving device (400) and an interlocking device (850); The interlocking device (850) is provided with a reversing part (853) for switching the interlocking device (850) between a first state and a second state; When the rotating shaft (822) is in the first rotating position, the cantilever beam (823) presses the reversing part (853), the interlocking device (850) is in the first state, and the first driving device (400) drives the upper cover (821) to lift; When the rotating shaft (822) is in the second rotating position, the cantilever beam (823) releases the reversing part (853), the interlocking device (850) is in the second state, and the first driving device (400) is limited to drive the upper cover (821) to lift.

7. The decap mechanism of claim 6, wherein, The first driving device (400) is a telescopic cylinder, and the interlocking device (850) is an interlocking reversing valve, The lifting device further comprises a lifting pipeline system (824), the lifting pipeline system (824) is connected with the first driving device (400), the lifting pipeline system (824) has a first medium inlet (825), the first medium inlet (825) is used for introducing fluid medium to drive the first driving device (400) to extend or retract, the interlocking device (850) has a first fluid port (851) and a second fluid port (852), the first fluid port (851) can be connected with a fluid source, and the second fluid port (852) is connected with the first medium inlet (825), When the interlocking device (850) is in the first state, the interlocking device (850) is in a first valve position, so that the first fluid port (851) is connected with the second fluid port (852); When the interlocking device (850) is in the second state, the interlocking device (850) is in a second valve position, so that the first fluid port (851) is disconnected from the second fluid port (852).

8. The decap mechanism of claim 7, wherein, The first driving device (400) has a first flow port (410) and a second flow port (420). The first flow port (410) is connected with a first control valve (210), the first control valve (210) has a first pilot port (211), and a first communication port (212) and a second communication port (213) are connected in an openable and closable manner; in the case that the first pilot port (211) is connected with a first pilot fluid of a first preset pressure, the first communication port (212) is connected with the second communication port (213). The first communication port (212) and the second flow port (420) are respectively connected in an openable and closable manner with the first medium inlet (825), and the first flow port (410) is connected with the second communication port (213); in the case that the first medium inlet (825) is connected with the first flow port (410) and disconnected with the second flow port (420), the first driving device (400) can drive the upper cover (821) to descend; in the case that the first medium inlet (825) is connected with the second flow port (420) and disconnected with the first flow port (410), the first driving device (400) can drive the upper cover (821) to ascend. The interlocking device (850) further has a third fluid port (854), the third fluid port (854) is connected with the second flow port (420); in the case that the interlocking device (850) is located at the first valve position, the first fluid port (851) is disconnected with the third fluid port (854); in the case that the interlocking device (850) is located at the second valve position, the first fluid port (851) is connected with the third fluid port (854), and the first communication port (212) is disconnected with the second communication port (213).

9. The decap mechanism of claim 7, wherein, The second fluid port (852) is connected with a third control valve (860), the third control valve (860) has a second pilot port (861), and a fifth communication port (862) and a sixth communication port (863) are connected in an openable and closable manner; the fifth communication port (862) is connected with the second fluid port (852), and the sixth communication port (863) is connected with the first medium inlet (825); In the case that the second pilot port (861) is connected with a second pilot fluid of a second preset pressure, the fifth communication port (862) is connected with the sixth communication port (863).

10. The decap mechanism of claim 9, wherein, The cover opening mechanism further comprises a second driving device (870), the second driving device (870) is a telescopic cylinder, one end of the second driving device (870) is used for being connected with the chamber body (810), the other end of the second driving device (870) is connected with the positioning piece (830), the second driving device (870) can drive the positioning piece (830) to move, and the second driving device (870) has a third flow port (871) and a fourth flow port (872). The uncapping mechanism further comprises a locking reversing valve (880) having a fourth fluid port (881), a fifth fluid port (882) and a sixth fluid port (883), the fifth fluid port (882) and the sixth fluid port (883) being in turn connected to the fourth fluid port (881) in an on-off manner, the fifth fluid port (882) being connected to the third flow port (871), and the sixth fluid port (883) being connected to the fourth flow port (872); The locking reversing valve (880) has a third valve position and a fourth valve position, when the locking reversing valve (880) is in the third valve position, the fourth fluid port (881) is connected to the fifth fluid port (882) and disconnected from the sixth fluid port (883), and the second driving device (870) drives the positioning member (830) to move to be positioned with the rotating shaft (822); when the locking reversing valve (880) is in the fourth valve position, the fourth fluid port (881) is connected to the sixth fluid port (883) and disconnected from the fifth fluid port (882), and the second driving device (870) drives the positioning member (830) to move to be disengaged from the rotating shaft (822); The second pilot port (861) is connected to a communication pipeline between the fifth fluid port (882) and the third flow port (871).

11. The decap mechanism of claim 10, wherein, The fourth flow port (872) is connected to a one-way throttling valve (890), and the one-way throttling valve (890) throttles in the direction in which the fourth flow port (872) extends to the sixth fluid port (883).

12. The decap mechanism of claim 1, wherein, The support seat (813) is provided with a rotating hole (814), and the rotating shaft (822) is externally provided with at least two radial rolling bearings (910), and the outer rings of the at least two radial rolling bearings (910) are matched with the inner circumferential surface of the rotating hole (814).

13. The decap mechanism of claim 12, wherein, The uncapping mechanism further comprises a cantilever beam (823), a first end of the cantilever beam (823) being used to be connected to the upper cover (821), and a second end of the cantilever beam (823) being fixedly connected to the rotating shaft (822), The cantilever beam (823) is provided with a flange (700) at one end thereof which faces the rotating shaft (822), a part of the rotating shaft (822) being located in the flange (700), the flange (700) being externally provided with an axial rolling bearing (920), the axial rolling bearing (920) being arranged in the support seat (813), and the axial rolling bearing (920) being in contact with the support seat (813) and the cantilever beam (823) at two ends thereof along the axial direction thereof.

14. The decap mechanism of claim 13, wherein, The rotating hole (814) is a stepped hole, the stepped hole comprises a first hole section (815) and a second hole section (816), the diameter of the first hole section (815) is larger than the diameter of the second hole section (816), and the first hole section (815) is closer to the cantilever beam (823) than the second hole section (816); The axial rolling bearing (920) is arranged on the stepped surface connecting the first hole section (815) and the second hole section (816), and the outer ring of the axial rolling bearing (920) is matched with the inner peripheral surface of the first hole section (815).

15. The decap mechanism of claim 1, wherein, The rotating shaft (822) is provided with a stop piece (826), The support seat (813) is provided with a first limiting protrusion (811), in the case that the rotating shaft (822) is located at the first rotating position, the stop piece (826) is limited and matched with the first limiting protrusion (811) in the direction of rotating from the second rotating position to the first rotating position; and / or, The support seat (813) is provided with a second limiting protrusion (812), in the case that the rotating shaft (822) is located at the second rotating position, the stop piece (826) is limited and matched with the second limiting protrusion (812) in the direction of rotating from the first rotating position to the second rotating position.

16. The decap mechanism of claim 15, wherein, The stop piece (826) comprises a fixed block (827), the fixed block (827) is connected with the rotating shaft (822), The stop piece (826) further comprises a first buffer block (828) arranged on the fixed block (827), in the case that the rotating shaft (822) is located at the first rotating position, the first buffer block (828) is limited and matched with the first limiting protrusion (811); and / or, The stop piece (826) further comprises a second buffer block (829) arranged on the fixed block (827), in the case that the rotating shaft (822) is located at the second rotating position, the second buffer block (829) is limited and matched with the second limiting protrusion (812).

17. A semiconductor process equipment, comprising a process chamber and the uncovering mechanism according to any one of claims 1 to 16, the process chamber comprises a chamber body (810) and an upper cover (821), the rotating shaft (822) is connected with the upper cover (821), and the support seat (813) is connected with the chamber body (810).

Images