Impedance matcher, matching method, radio frequency power supply system, and plasma source system

Abstract

The present invention discloses an impedance matcher, a matching method, a radio frequency power supply system, and a plasma source system. The impedance matcher includes: an impedance matching module, a control module, a tunable capacitor module, and a switch module; the tunable capacitor module includes a plurality of tunable capacitor units connected in series; the tunable capacitor unit is connected in parallel with its corresponding switch unit; the control module is configured to, when the load is at the current impedance, control at least one switch unit to disconnect and at least one switch unit to conduct, and adjust the capacitance value of the tunable capacitor unit corresponding to at least one conducting switch unit according to the next impedance of the load, so that the total capacitance value formed by the tunable capacitor units with the adjusted capacitance values matches the next impedance of the load. The present invention can achieve impedance matching between the radio frequency power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and in particular, to an impedance matcher, a matching method, a radio frequency power supply system, and a plasma source system. Background Art

[0002] Currently, with the development of radio frequency power supply technology, the requirement for impedance matching between a radio frequency power supply module and a load is also getting higher and higher.

[0003] An impedance matcher is usually installed between a radio frequency power supply module and a load. Currently, the common method is to adjust the capacitance value of the adjustable capacitor in the impedance matcher to perform impedance matching between the radio frequency power supply module and the load.

[0004] However, the current impedance matcher has a slow adjustment speed of the capacitance value after the impedance of the load changes, resulting in a long impedance matching time between the radio frequency power supply module and the load. Summary of the Invention

[0005] The present invention provides an impedance matcher, a matching method, a radio frequency power supply system, and a plasma source system, which can achieve impedance matching between a radio frequency power supply module and a load while the impedance of the load changes, and can quickly achieve impedance matching.

[0006] According to an aspect of the present invention, there is provided an impedance matcher, which includes: an impedance matching module, a control module, an adjustable capacitor module, and a switch module;

[0007] A first end of the impedance matching module is electrically connected to an output end of a radio frequency power supply module, and a second end of the impedance matching module is electrically connected to an input end of a load;

[0008] A first end of the adjustable capacitor module is electrically connected to the first end of the impedance matching module, and a second end of the adjustable capacitor module is grounded;

[0009] The adjustable capacitor module includes a plurality of adjustable capacitor units connected in series;

[0010] The switch module includes switch units equal in number to the adjustable capacitor units;

[0011] The adjustable capacitor units and the switch units are in one-to-one correspondence, and each adjustable capacitor unit is connected in parallel with its corresponding switch unit;

[0012] The control module is used to control at least one of the switch units to disconnect and at least one of the switch units to conduct when the load is at the current impedance, and adjust the capacitance value of the adjustable capacitance unit corresponding to at least one conducting switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitance units with the adjusted capacitance value matches the next impedance. The control module is further used to control the switch unit corresponding to the next impedance to disconnect and control the switch units other than the switch unit corresponding to the next impedance among all the switch units to conduct when the impedance of the load changes from the current impedance to the next impedance, where the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitance unit that the control module adjusts to conduct when the load is at the current impedance.

[0013] Optionally, the adjustable capacitance module includes two adjustable capacitance units connected in series;

[0014] The control module is used to control the switch unit corresponding to one of the adjustable capacitance units to disconnect and the switch unit corresponding to the other adjustable capacitance unit to conduct when the load is at the current impedance, and adjust the capacitance value of the adjustable capacitance unit corresponding to the conducting switch unit according to the next impedance of the load, so that the capacitance value of the adjusted adjustable capacitance unit matches the next impedance. The control module is further used to control the currently disconnected switch unit to conduct and control the currently conducting switch unit to disconnect when the impedance of the load changes from the current impedance to the next impedance.

[0015] Optionally, the multiple series-connected adjustable capacitance units include adjustable capacitance units equal in number to the number of impedances of the load;

[0016] Each impedance of the load corresponds to one of the adjustable capacitance units;

[0017] The control module is used to adjust the capacitance values of the adjustable capacitance units corresponding to the respective impedances of the load before the respective impedances of the load are formed, so that the capacitance values of the adjusted adjustable capacitance units match the impedances of the load corresponding to them.

[0018] Optionally, the impedance matcher provided in this embodiment further includes a detection module; the detection module includes an amplitude detection unit and a phase detection unit;

[0019] The amplitude detection unit is used to detect the voltage amplitude and current amplitude output by the radio frequency power supply module;

[0020] The phase detection unit is used to detect the voltage phase and current phase output by the radio frequency power supply module;

[0021] The control module is used to adjust the output frequency of the RF power supply module according to the voltage amplitude, the current amplitude, the voltage phase, and the current phase.

[0022] Optionally, the impedance matcher provided in this embodiment further includes a directional coupling module;

[0023] The directional coupling module is used to detect the reflected power between the RF power supply module and the load;

[0024] The control module is used to adjust the output frequency of the RF power supply module according to the reflected power.

[0025] Optionally, the impedance matcher provided in this embodiment further includes an alarm module;

[0026] The directional coupling module is further used to detect the forward power between the RF power supply module and the load;

[0027] The control module is further used to control the alarm module to send an alarm signal when the forward power is less than the set power.

[0028] Optionally, the impedance matching module includes at least one fixed inductor and at least one fixed capacitor;

[0029] The fixed inductor and the fixed capacitor are connected in series;

[0030] The adjustable capacitor unit includes at least one adjustable capacitor.

[0031] According to another aspect of the present invention, an impedance matching method is provided, and the impedance matching method is applied to the impedance matcher provided in any embodiment of the present invention;

[0032] The impedance matching method includes:

[0033] When the load is at the current impedance, the control module controls at least one of the switch units to disconnect and at least one of the switch units to conduct, and adjusts the capacitance value of the adjustable capacitor unit corresponding to at least one conducting switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted matches the next impedance;

[0034] When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switch unit corresponding to the next impedance to disconnect, and controls the switch units other than the switch unit corresponding to the next impedance among all the switch units to conduct, where the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit that the control module adjusts to conduct when the load is at the current impedance.

[0035] According to another aspect of the present invention, there is provided a radio frequency power supply system, which includes a radio frequency power supply module and an impedance matcher provided in any embodiment of the present invention.

[0036] According to another aspect of the present invention, there is provided a plasma source system, which includes a reaction chamber and a radio frequency power supply system provided in any embodiment of the present invention.

[0037] An embodiment of the present invention provides an impedance matcher, which is connected between a radio frequency power supply module and a load. When the load is at the current impedance, a control module in the impedance matcher adjusts the capacitance value of an adjustable capacitance unit corresponding to a partially-conducted switching unit according to the next impedance of the load to obtain a total capacitance value. And when the impedance of the load changes from the current impedance to the next impedance, the sum of the capacitance values of the working adjustable capacitance units in the impedance matcher is controlled to be the total capacitance value, where the total capacitance value matches the next impedance, so as to ensure that the impedance matcher matches the impedance of the radio frequency power supply module with the impedance of the load while the impedance of the load changes. When the load is a reaction chamber, the type of gas, the flow rate of the gas, the pressure of the gas, and the power of the pulse output by the radio frequency power supply module in the reaction chamber will all cause changes in the impedance of the load. The control module in the embodiment of the present invention can obtain in advance the value of the impedance in the load and the moment of impedance change. It can be seen that the impedance matcher provided in the embodiment of the present invention can be applied to a radio frequency power supply module that outputs multi-stage pulses, and can also ensure that the impedance of the load matches the impedance of the radio frequency power supply module in time when the type of gas, the flow rate of the gas, and the pressure of the gas in the reaction chamber change. The impedance matcher provided in the embodiment of the present invention can adjust the total capacitance value corresponding to the load with impedance change before the impedance of the load changes, so as to achieve matching by controlling the disconnection of the switching unit while the impedance of the load changes, without repeatedly adjusting the capacitance value according to the changed impedance after the impedance of the load changes. It can be seen that the impedance matcher provided in the embodiment of the present invention can basically achieve impedance matching between the radio frequency power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.

[0038] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. Description of the Drawings

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0040] Figure 1 is a schematic structural diagram of an impedance matcher related to the technology of the present invention;

[0041] Figure 2 is a schematic structural diagram when an impedance matcher provided by an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load;

[0042] Figure 3 is a schematic structural diagram when another impedance matcher provided by an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load;

[0043] Figure 4 is a schematic structural diagram when another impedance matcher provided by an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load;

[0044] Figure 5 is a schematic structural diagram when another impedance matcher provided by an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load;

[0045] Figure 6 is a schematic structural diagram when another impedance matcher provided by an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load;

[0046] Figure 7 is a schematic flowchart of an impedance matching method provided by an embodiment of the present invention. Detailed implementation manners

[0047] To enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0048] It should be noted that the terms "first", "second", etc. in the description, claims and the above-mentioned drawings of the present invention are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present invention described here can be implemented in an order other than those illustrated or described here. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device comprising a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0049] Figure 1 is a schematic structural diagram of an impedance matcher related to the technology of the present invention. Refer to Figure 1 , this impedance matcher is connected between a radio frequency power supply module and a load. This impedance matcher includes a control module, a first adjustable capacitor CL1 and a second adjustable capacitor CT1. When the impedance of the load changes, the control module adjusts the capacitance values of the first adjustable capacitor CL1 and the second adjustable capacitor CT1 according to the changed impedance to ensure impedance matching between the radio frequency power supply module and the load. However, the adjustment speed of the capacitance value is too slow, there is a relatively high matching delay, and impedance matching cannot be quickly achieved.

[0050] To solve the above problem of impedance matching delay, an embodiment of the present invention provides an impedance matcher, which can achieve impedance matching between a radio frequency power supply module and a load while the impedance of the load changes.

[0051] Figure 2 is a schematic structural diagram when an impedance matcher provided by an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load. Refer to Figure 2, the impedance matcher 100 provided in this embodiment includes: an impedance matching module 110, a control module 120, a tunable capacitor module 130, and a switch module 140; a first end of the impedance matching module 110 is electrically connected to an output end of a radio frequency power supply module 200, and a second end of the impedance matching module 110 is electrically connected to an input end of a load 300; a first end of the tunable capacitor module 130 is electrically connected to the first end of the impedance matching module 110, and a second end of the tunable capacitor module 130 is grounded; the tunable capacitor module 130 includes a plurality of tunable capacitor units 131 connected in series; the switch module 140 includes switch units 141 equal in number to the tunable capacitor units 131; the tunable capacitor units 131 and the switch units 141 are in one-to-one correspondence, and the tunable capacitor unit 131 is connected in parallel with its corresponding switch unit 141; the control module 120 is configured to, when the load 300 is at a current impedance, control at least one switch unit 141 to be turned off and at least one switch unit 141 to be turned on, and adjust a capacitance value of a tunable capacitor unit 131 corresponding to at least one turned-on switch unit 141 according to a next impedance of the load 300, so that a total capacitance value formed by the tunable capacitor units 131 with adjusted capacitance values matches the next impedance, and is further configured to, when the impedance of the load 300 changes from the current impedance to the next impedance, control the switch unit 141 corresponding to the next impedance to be turned off, and control the switch units 141 other than the switch unit 141 corresponding to the next impedance among all the switch units 141 to be turned on, where the switch unit 141 corresponding to the next impedance is the switch unit 141 corresponding to the tunable capacitor unit 131 adjusted and turned on by the control module 120 when the load 300 is at the current impedance.

[0052] Specifically, the number of the tunable capacitor units 131 in the impedance matcher 100 provided in this embodiment may be 2, 3, 4, 5, etc. The number of the switch units 141 is equal to the number of the tunable capacitor units 131. One tunable capacitor unit 131 may include one tunable capacitor, or may include a plurality of tunable capacitors connected in series or in parallel.

[0053] The switching unit 141 provided in this embodiment has two operating states, one of which is conduction and the other is disconnection. During the process of the radio frequency power supply module 200 outputting radio frequency energy to the load 300, since the current flows through the adjustable capacitance unit 131 corresponding to the disconnected switching unit 141, therefore, the capacitance value of the adjustable capacitance unit 131 corresponding to the disconnected switching unit 141 will affect the impedance matching between the load 300 and the radio frequency power supply module 200. Since the current does not flow through the adjustable capacitance unit 131 corresponding to the conducting switching unit 141, therefore, the capacitance value of the adjustable capacitance unit 131 corresponding to the conducting switching unit 141 does not affect the impedance matching between the load 300 and the radio frequency power supply module 200. The impedance matching module 110 and the adjustable capacitance unit 131 corresponding to the disconnected switching unit 141 in this embodiment work together to enable impedance matching between the radio frequency power supply module 200 and the load 300. The impedance matching module 110 may include a fixed inductor, or may include a fixed inductor and a fixed capacitor connected in series, or may also include a fixed inductor and an adjustable capacitor connected in series, etc.

[0054] The control module 120 is electrically connected to the control terminal of each adjustable capacitance unit 131, and the control module 120 can adjust the capacitance value of each adjustable capacitance unit 131. The control module 120 is electrically connected to the control terminal of each switching unit 141, and the control module 120 can control each switching unit 141 to conduct or disconnect.

[0055] When the load 300 is at the current impedance, the control module 120 can control one switching unit 141 to disconnect, and at the same time control the remaining switching units 141 in the switching module 140 to conduct, or can control two or more switching units 141 to disconnect, and at the same time control the remaining switching units 141 except the disconnected ones to conduct. The switching unit 141 can be a switching triode.

[0056] The total capacitance value is the total capacitance value formed after the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 when the load 300 is at the current impedance. Exemplarily, if the load 300 is at the current impedance and the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 corresponding to one turned-on switch unit 141, the capacitance value of this adjusted adjustable capacitance unit 131 is the total capacitance value. If the load 300 is at the current impedance and the control module 120 adjusts the capacitance values of the adjustable capacitance units 131 corresponding to two turned-on switch units 141, the capacitance value after the series connection of these two adjusted adjustable capacitance units 131 is the total capacitance value. The matching of the total capacitance value with the next impedance of the load 300 means that when the impedance of the load 300 is the next impedance, the total capacitance value and the matching value corresponding to the impedance matching module 110 can make the impedance of the radio frequency power supply module 200 match the impedance of the load 300. Different impedances correspond to different total capacitance values. The control module 120 is also used to store the total capacitance values corresponding to different impedances. The control module 120 is used to determine the total capacitance value corresponding to the next impedance of the load 300 when obtaining the next impedance of the load 300, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the turned-on switch unit 141 to adjust to the total capacitance value.

[0057] The current impedance of the load 300 is the impedance of the load 300 at the current stage, and the next impedance of the load 300 refers to the impedance of the load 300 at the next stage. The current impedance is not equal to the next impedance. The next impedance of the load 300 is adjacent to the current impedance of the load 300 and is generated after the current impedance. Different powers of the pulses output by the radio frequency power supply module 200 will result in different impedances of the load 300. When the load 300 is a reaction chamber that can generate plasma, the impedance of the reaction chamber (that is, the impedance of the load 300) is related to the type of gas input into the reaction chamber, the gas pressure (which can also be understood as the pressure of the reaction chamber), and the gas flow rate. When at least one of the type of gas, the gas pressure, and the gas flow rate in the reaction chamber changes, the impedance of the reaction chamber will change. The time when the power of the pulses output by the radio frequency power supply module 200 changes can be set in advance, and the time when the type of gas, the gas pressure, and the gas flow rate input into the load 300 change can all be set in advance. Therefore, the time when the impedance of the load 300 can change and the impedance after the change can be set in advance. The control module 120 can also store the impedances of the load 300 at different time periods.

[0058] The control module 120 can also determine the impedance of the load 300 and the moment when the impedance changes by obtaining the power of the pulse output by the radio frequency power supply module 200 and the moment when the pulse power changes, the air pressure of the gas input into the load 300 and the moment when the air pressure changes, the flow rate of the gas input into the load 300 and the moment when the flow rate changes, and the type of the gas input into the load 300 and the moment when the type changes.

[0059] The total capacitance value corresponding to the power of each pulse, each air pressure of the gas, each flow rate of the gas, and each type of the gas can be obtained in advance. When the load 300 is at the current impedance, the control module 120 can determine the next impedance of the load 300 and the total capacitance value corresponding to the next impedance by obtaining the power of the pulse output by the radio frequency power supply module 200 in the next stage, the type, flow rate, and air pressure of the gas input into the load 300 in the next stage, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to at least one turned-on switch unit 141 to obtain the total capacitance value corresponding to the next impedance. Thus, when the impedance of the load 300 changes from the current impedance to the next impedance, the switch unit 141 corresponding to the adjustable capacitance unit 131 whose capacitance value is adjusted can be turned off, so that the capacitance value of the working adjustable capacitance unit 131 in the impedance matcher 100 is the total capacitance value. That is, when the impedance of the load 300 changes to the next impedance, the impedance matcher 100 provided in this embodiment can immediately output the total capacitance value and the matching value corresponding to the impedance matching module 110. It only takes the time for the switch unit 141 to turn off to achieve the impedance matching between the load 300 and the radio frequency power supply module 200 after the impedance of the load 300 changes, and its matching speed can reach the microsecond level.

[0060] The impedance matcher 100 provided in this embodiment can be applicable to both the radio frequency power supply module 200 that outputs single-stage pulses and the radio frequency power supply module 200 that outputs multi-stage pulses. Exemplarily, when the power of the pulse output by the radio frequency power supply module 200 changes, the impedance of the load 300 will change. The control module 120 in this embodiment can obtain the power of the next pulse output by the radio frequency power supply module 200 when the radio frequency power supply module 200 outputs the current pulse, so as to obtain the next impedance of the load 300, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the partially turned-on switch unit 141 according to the next impedance to obtain the total capacitance value, and turn off the switch unit 141 corresponding to the adjustable capacitance unit 131 whose capacitance value is adjusted when the output pulse of the radio frequency power supply module 200 switches from the current pulse to the next pulse.

[0061] This embodiment provides an impedance matcher, which is connected between a radio frequency power supply module and a load. When the load is at the current impedance, the control module in the impedance matcher adjusts the capacitance value of the adjustable capacitance unit corresponding to the partially-conducted switch unit according to the next impedance of the load to obtain the total capacitance value. And when the impedance of the load changes from the current impedance to the next impedance, it controls the sum of the capacitance values of the working adjustable capacitance units in the impedance matcher to be the total capacitance value, where the total capacitance value matches the next impedance, so as to ensure that the impedance matcher realizes the impedance matching between the radio frequency power supply module and the load while the impedance of the load changes. When the load is a reaction chamber, the type of gas, the flow rate of the gas, the pressure of the gas, and the power of the pulse output by the radio frequency power supply module in the reaction chamber will all cause changes in the impedance of the load. The control module in this embodiment can obtain in advance the value of the impedance in the load and the moment of impedance change. It can be seen that the impedance matcher provided in this embodiment can be applied to a radio frequency power supply module that outputs multi-stage pulses, and can also ensure the impedance matching between the load and the radio frequency power supply module in a timely manner when the type of gas, the flow rate of the gas, and the pressure of the gas in the reaction chamber change. The impedance matcher provided in this embodiment can adjust the total capacitance value corresponding to the load where the impedance changes before the impedance of the load changes, so as to achieve matching by controlling the disconnection of the switch unit while the impedance of the load changes, without having to adjust the capacitance value multiple times according to the changed impedance after the impedance of the load changes. It can be seen that the impedance matcher provided in this embodiment can basically achieve the impedance matching between the radio frequency power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.

[0062] Optionally, Figure 3 is a schematic structural diagram when another impedance matcher provided according to an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load. Refer to Figure 3 , the adjustable capacitance module 130 includes two adjustable capacitance units 131 connected in series; the control module 120 is configured to, when the load 300 is at the current impedance, control the switch unit 141 corresponding to one adjustable capacitance unit 131 to be disconnected, and at the same time control the switch unit 141 corresponding to the other adjustable capacitance unit 131 to be conducted, and adjust the capacitance value of the adjustable capacitance unit 131 corresponding to the conducted switch unit 141 according to the next impedance of the load 300, so that the capacitance value of the adjusted adjustable capacitance unit 131 matches the next impedance of the load 300, and is further configured to, when the impedance of the load 300 changes from the current impedance to the next impedance, control the currently disconnected switch unit 141 to be conducted and control the currently conducted switch unit 141 to be disconnected.

[0063] Specifically, the capacitance value of the adjusted adjustable capacitor unit 131 matching the next impedance of the load 300 means that when the impedance of the load 300 is the next impedance, the capacitance value of the adjusted adjustable capacitor unit 131 and the corresponding matching value of the impedance matching module 110 can make the impedance of the radio frequency power supply module 200 match the impedance of the load 300.

[0064] In this embodiment, the two switch units 141 are not turned on simultaneously or turned off simultaneously. The control module 120 is configured to control one switch unit 141 to be turned on and simultaneously control the other switch unit 141 to be turned off when the load 300 is at the current impedance, and adjust the capacitance value of the adjustable capacitor unit 131 corresponding to the turned-on switch unit 141 to the capacitance value corresponding to the next impedance of the load 300 according to the next impedance of the load 300, so as to ensure that when the impedance of the load 300 changes from the current impedance to the next impedance, the impedance of the radio frequency power supply module 200 can be immediately matched with the impedance of the load 300. Exemplarily, the two switch units 141 are denoted as the first switch unit and the second switch unit, and the impedance change sequence of the load 300 successively includes 100Ω, 200Ω, 300Ω, 400Ω. During the process when the impedance of the load 300 is 100Ω, the control module 120 controls the first switch unit to be turned off and the second switch unit to be turned on, and simultaneously adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the second switch unit according to 200Ω. When the impedance of the load 300 switches from 100Ω to 200Ω, the control module 120 controls the first switch unit to be turned on and simultaneously controls the second switch unit to be turned off. During the process when the impedance of the load 300 is 200Ω, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the first switch unit according to 300Ω. When the impedance of the load 300 switches from 200Ω to 300Ω, the control module 120 controls the second switch unit to be turned on and simultaneously controls the first switch unit to be turned off. During the process when the impedance of the load 300 is 300Ω, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the second switch unit according to 400Ω. When the impedance of the load 300 switches from 300Ω to 400Ω, the control module 120 controls the first switch unit to be turned on and simultaneously controls the second switch unit to be turned off.

[0065] In the impedance matcher 100 provided in this embodiment, two adjustable capacitor units 131 and two switch units 141 are provided. By controlling the two switch units 141 to be alternately turned on, it is possible to ensure the impedance matching between the radio frequency power supply module 200 and the load 300 when the impedance of the load 300 changes, and also reduce the number of components in the impedance matcher 100 and lower the cost of the impedance matcher 100.

[0066] Optionally, continue to refer to Figure 2 or Figure 3, a plurality of serially connected adjustable capacitor units 131 includes adjustable capacitor units 131 equal in number to the impedances of the load 300; each impedance of the load 300 corresponds to one adjustable capacitor unit 131; the control module 120 is configured to adjust the capacitance values of the adjustable capacitor units 131 corresponding to the respective impedances of the load 300 before the respective impedances of the load 300 are formed, so that the capacitance values of the adjusted adjustable capacitor units 131 match the impedances of the corresponding load 300.

[0067] Exemplarily, the radio frequency power supply module 200 can output multi-stage pulses, and the power of each stage of pulse is different, and the same power is the same pulse. Each pulse output by the radio frequency power supply module 200 corresponds to one adjustable capacitor unit 131. Before each pulse is output, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 corresponding to the pulse, and at the same time of pulse switching, disconnects the switching unit 141 corresponding to the adjustable capacitor unit 131 corresponding to the switched pulse, and simultaneously turns on all the switching units 141 not corresponding to the pulse.

[0068] In the impedance matcher 100 provided in this embodiment, the number of adjustable capacitor units 131 is the same as the number of impedances of the load 300. When the impedance of the load 300 changes, the switching unit 141 corresponding to the impedance of the load 300 is directly disconnected. By adjusting the capacitance values of the adjustable capacitor units 131 corresponding to the respective impedances of the load 300, the impedance matching between the radio frequency power supply module 200 and the load 300 can be immediately achieved after the impedance of the load 300 changes.

[0069] Optionally, Figure 4 is a schematic structural diagram when another impedance matcher provided according to an embodiment of the present invention is electrically connected to a radio frequency power supply module and a load. Refer to Figure 4 , the impedance matcher 100 provided in this embodiment further includes a detection module 150; the detection module 150 includes an amplitude detection unit 151 and a phase detection unit 152; the amplitude detection unit 151 is configured to detect the voltage amplitude and current amplitude output by the radio frequency power supply module 200; the phase detection unit 152 is configured to detect the voltage phase and current phase output by the radio frequency power supply module 200; the control module 120 is configured to adjust the output frequency of the radio frequency power supply module 200 according to the voltage amplitude, current amplitude, voltage phase and current phase.

[0070] Specifically, both the amplitude detection unit 151 and the phase detection unit 152 are electrically connected to the control module 120. The amplitude detection unit 151 is configured to send the detected voltage amplitude and current amplitude to the control module 120, and the phase detection unit 152 is configured to send the detected voltage phase and current phase to the control module 120. The control module 120 can monitor the current impedance matching condition between the RF power supply module 200 and the load 300 based on the voltage amplitude, current amplitude, voltage phase, and current phase, and send a first frequency adjustment signal to the RF power supply module 200 when the impedance matching between the RF power supply module 200 and the load 300 does not meet the set requirements. After receiving the first frequency adjustment signal, the RF power supply module 200 adjusts the output frequency of the RF power supply module 200, so that the adjusted output frequency of the RF power supply module 200 can ensure the impedance matching between the RF power supply module 200 and the load 300 under the current conditions, thereby improving the impedance matching accuracy between the RF power supply module 200 and the load 300.

[0071] Optionally, Figure 5 is a schematic structural diagram when another impedance matcher is electrically connected to the RF power supply module and the load according to an embodiment of the present invention. Refer to Figure 5 , the impedance matcher 100 provided in this embodiment further includes a directional coupling module 160; the directional coupling module 160 is configured to detect the reflected power between the RF power supply module 200 and the load 300; the control module 120 is configured to adjust the output frequency of the RF power supply module 200 according to the reflected power.

[0072] Specifically, the directional coupling module 160 can be a directional coupler, and the directional coupling module 160 is connected between the RF power supply module 200 and the load 300. The directional coupling module 160 is also electrically connected to the control module 120, and the directional coupling module 160 can send the reflected power into the control module 120. The control module 120 can determine the current impedance matching condition between the RF power supply module 200 and the load 300 according to the reflected power, and send a second frequency adjustment signal to the RF power supply module 200 when the impedance matching between the RF power supply module 200 and the load 300 does not meet the set requirements. After receiving the second frequency adjustment signal, the RF power supply module 200 adjusts the output frequency of the RF power supply module 200, so that the adjusted output frequency of the RF power supply module 200 can ensure the impedance matching between the RF power supply module 200 and the load 300, thereby further improving the impedance matching accuracy between the RF power supply module and the load.

[0073] Optionally, continue to refer to Figure 5 , the impedance matcher 100 provided in this embodiment further includes an alarm module 170; the directional coupling module 160 is also configured to detect the forward power between the RF power supply module 200 and the load 300; the control module 120 is also configured to control the alarm module 170 to send an alarm signal when the forward power is less than the set power.

[0074] Specifically, the forward power can reflect the actual output power situation of the RF power supply module 200. When the control module 120 detects that the forward power is less than the set power, it indicates that the actual power output by the RF power supply module 200 does not meet the requirements of the load 300. At this time, the control module 120 can control the alarm module 170 to send an alarm signal to prompt the staff to check the situation in time.

[0075] Optionally, Figure 6 is a schematic structural diagram when another impedance matcher is electrically connected to the RF power supply module and the load according to an embodiment of the present invention. Refer to Figure 6 , the impedance matching module 110 includes at least one fixed inductor LT and at least one fixed capacitor CT; the fixed inductor LT and the fixed capacitor CT are connected in series; the adjustable capacitor unit 131 includes at least one adjustable capacitor CL.

[0076] Specifically, the impedance matching module 110 includes a fixed inductor LT and a fixed capacitor CT connected in series. It can be seen that the impedance matching module 110 provided in this embodiment corresponds to a fixed matching value. In order to ensure the impedance matching between the RF power supply module 200 and the load 300, it is only necessary to adjust the capacitance value of the adjustable capacitor CL corresponding to the disconnected switch unit 141, avoiding increasing the adjustment complexity by adjusting multiple adjustable capacitors CL.

[0077] Figure 7 is a schematic flowchart of an impedance matching method according to an embodiment of the present invention. The impedance matching method provided in this embodiment is applied to the impedance matcher provided in any embodiment of the present invention.

[0078] Refer to Figure 7 , the impedance matching method provided in this embodiment includes the following steps:

[0079] S110. When the load is at the current impedance, the control module controls at least one switch unit to disconnect and at least one switch unit to conduct, and adjusts the capacitance value of the adjustable capacitor unit corresponding to at least one conducting switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit with the adjusted capacitance value matches the next impedance.

[0080] S120. When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switch unit corresponding to the next impedance to disconnect, and controls the switch units other than the switch unit corresponding to the next impedance among all the switch units to conduct, where the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit that the control module adjusts to conduct when the load is at the current impedance.

[0081] The impedance matching method provided by the embodiments of the present invention has the same technical effects as the impedance matcher provided by any embodiment of the present invention. For details not described in the impedance matching method provided by the embodiments of the present invention, please refer to the content of the impedance matcher provided by any embodiment of the present invention.

[0082] The RF power supply system provided by this embodiment includes an RF power supply module and the impedance matcher provided by any embodiment of the present invention. Therefore, the beneficial effects of the impedance matcher described in any of the embodiments of the present invention are included in this RF power supply system and will not be elaborated herein.

[0083] This embodiment also provides a plasma source system, which includes a reaction chamber and the RF power supply system provided by any embodiment of the present invention. Therefore, the beneficial effects of the impedance matcher described in any of the embodiments of the present invention are included in this RF power supply system and will not be elaborated herein.

[0084] It should be understood that various forms of the processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in the present invention can be executed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved, and no limitations are imposed herein.

[0085] The above specific embodiments do not constitute a limitation to the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. An impedance matcher, characterized in that, Comprising: An impedance matching module, a control module, a tunable capacitor module, and a switch module; A first end of the impedance matching module is electrically connected to an output end of a radio frequency power supply module, and a second end of the impedance matching module is electrically connected to an input end of a load; A first end of the tunable capacitor module is electrically connected to the first end of the impedance matching module, and a second end of the tunable capacitor module is grounded; The tunable capacitor module includes a plurality of tunable capacitor units connected in series; The switch module includes switch units equal in number to the tunable capacitor units; The tunable capacitor units and the switch units are in one-to-one correspondence, and the tunable capacitor units are connected in parallel with their corresponding switch units; The control module is configured to, when the load is at a current impedance, control at least one of the switch units to be turned off while controlling at least one of the switch units to be turned on, and adjust a capacitance value of a tunable capacitor unit corresponding to at least one turned-on switch unit according to a next impedance of the load, so that a total capacitance value formed by the tunable capacitor units after the capacitance values are adjusted matches the next impedance, and is further configured to, when the impedance of the load changes from the current impedance to the next impedance, control the switch unit corresponding to the next impedance to be turned off, and control switch units other than the switch unit corresponding to the next impedance among all the switch units to be turned on, where the switch unit corresponding to the next impedance is the switch unit corresponding to the tunable capacitor unit that is adjusted and turned on by the control module when the load is at the current impedance.

2. The impedance matcher according to claim 1, wherein The tunable capacitor module includes two tunable capacitor units connected in series; The control module is configured to, when the load is at the current impedance, control the switch unit corresponding to one of the tunable capacitor units to be turned off, and at the same time control the switch unit corresponding to the other tunable capacitor unit to be turned on, and adjust the capacitance value of the tunable capacitor unit corresponding to the turned-on switch unit according to the next impedance of the load, so that the capacitance value of the adjusted tunable capacitor unit matches the next impedance, and is further configured to, when the impedance of the load changes from the current impedance to the next impedance, control the currently turned-off switch unit to be turned on and control the currently turned-on switch unit to be turned off.

3. The impedance matcher according to claim 1, wherein The plurality of tunable capacitor units connected in series includes tunable capacitor units equal in number to the number of impedances of the load; Each impedance of the load corresponds to one tunable capacitor unit; The control module is configured to adjust the capacitance values of the tunable capacitor units corresponding to the respective impedances of the load before the respective impedances of the load are formed, so that the capacitance values of the adjusted tunable capacitor units match the impedances of the load corresponding to them.

4. The impedance matcher according to claim 1, characterized in that It further includes a detection module; the detection module includes an amplitude detection unit and a phase detection unit; The amplitude detection unit is configured to detect a voltage amplitude and a current amplitude output by the radio frequency power supply module; The phase detection unit is configured to detect a voltage phase and a current phase output by the radio frequency power supply module; The control module is configured to adjust an output frequency of the radio frequency power supply module according to the voltage amplitude, the current amplitude, the voltage phase, and the current phase.

5. The impedance matcher according to claim 1, wherein It further includes a directional coupling module; The directional coupling module is used to detect the reflected power between the RF power supply module and the load; The control module is used to adjust the output frequency of the RF power supply module according to the reflected power.

6. The impedance matcher according to claim 5, characterized in that It further includes an alarm module; The directional coupling module is further used to detect the forward power between the RF power supply module and the load; The control module is further used to control the alarm module to emit an alarm signal when the forward power is less than the set power.

7. The impedance matcher according to any one of claims 1-6, characterized in that The impedance matching module includes at least one fixed inductor and at least one fixed capacitor; The fixed inductor and the fixed capacitor are connected in series; The adjustable capacitor unit includes at least one adjustable capacitor.

8. An impedance matching method, characterized in that, The impedance matching method is applied to the impedance matcher according to any one of claims 1-7; The impedance matching method includes: When the load is at the current impedance, the control module controls at least one of the switch units to be turned off and at least one of the switch units to be turned on, and adjusts the capacitance value of the adjustable capacitor unit corresponding to at least one turned-on switch unit according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor unit after the capacitance value is adjusted matches the next impedance; When the impedance of the load changes from the current impedance to the next impedance, the control module controls the switch unit corresponding to the next impedance to be turned off, and controls the switch units other than the switch unit corresponding to the next impedance among all the switch units to be turned on, where the switch unit corresponding to the next impedance is the switch unit corresponding to the adjustable capacitor unit that the control module adjusts to be turned on when the load is at the current impedance.

9. A radio frequency power supply system, characterized in that, It includes an RF power supply module and the impedance matcher according to any one of claims 1-7.

10. A plasma source system, characterized in that, It includes a reaction chamber and the RF power supply system according to claim 9.

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