Tail gas treatment device and method for AP (Access Point) disinfection machine

Abstract

The invention discloses a tail gas treatment device and method for an AP (Access Point) disinfection machine, and the device comprises a tower body which is internally provided with a first cavity; the isolation plate is connected with the tower body, and a plurality of through holes allowing gas to pass through are formed in the isolation plate; a first reaction chamber, a second reaction chamber, a third reaction chamber and a fourth reaction chamber which are sequentially communicated end to end are arranged in the first cavity; the gas inlet is communicated with the first reaction chamber; the gas outlet is communicated with the fourth reaction chamber; partial areas of the first reaction chamber, the second reaction chamber, the third reaction chamber and the fourth reaction chamber are filled with the filler layer; the spraying system at least comprises a plurality of spraying nozzles and is positioned above the gas reaction chamber; and the safety protection unit is used for detecting the gas concentration of a plurality of components in the tower body and generating an early warning strategy based on the gas concentration. The technical scheme provided by the invention has the characteristics of high efficiency, safety and low carbon, provides an economical and sustainable solution for tail gas treatment, and has a good application prospect.

Description

Technical Field

[0001] The present invention relates to the technical field of gas treatment, and particularly relates to an exhaust gas treatment device and method for an AP pest control machine. Background Art

[0002] In semiconductor manufacturing processes such as chemical vapor deposition (CVD), exhaust gases containing toxic and harmful components such as ammonia (NH 3 ), silane (SiH 4 ), and fluorides are generated. In traditional treatment processes, the electric heating combustion method is often used to purify the exhaust gas at high temperature. The principle is to heat the exhaust gas to above 800 - 1000 °C through a resistance wire or an electric heating tube, so that harmful substances are oxidized or cracked into harmless products (such as N 2 , CO 2 , H 2 O, etc.).

[0003] However, due to the process requirement that the exhaust gas needs to continuously pass through the high-temperature reaction zone, the heater needs to be in a full-load operation state for a long time, resulting in the resistance element being continuously subjected to high-temperature oxidation and thermal stress shock, accelerating aging and fracture. The average service life of the equipment is only 1 - 2 years, and the maintenance and replacement costs are high.

[0004] The electric heating method has low thermal efficiency (usually less than 40%), and it is necessary to maintain a constant high temperature to cope with the exhaust gas flow fluctuation, resulting in waste of electric energy. In addition, the existing system lacks an intelligent temperature control strategy and cannot adjust the heating power according to the real-time concentration and flow rate of the exhaust gas. It still operates at full power under low-load conditions, further exacerbating energy consumption and equipment loss. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present invention provides an exhaust gas treatment device and method for an AP pest control machine, aiming to at least solve the related technical problems mentioned in the related art.

[0006] To achieve the above object, the present invention is realized through the following technical solutions.

[0007] The present application provides an exhaust gas treatment device for an AP pest control machine, which includes:

[0008] A tower body, in which a first cavity is provided;

[0009] An isolation plate, located in the first cavity and fixedly connected to the tower body, and a plurality of through holes allowing gas to pass through are provided on the isolation plate;

[0010] Three vertical partitions are fixedly connected inside the first cavity, and the partitions divide the first cavity into four gas reaction chambers, including a first reaction chamber, a second reaction chamber, a third reaction chamber, and a fourth reaction chamber. The first reaction chamber, the second reaction chamber, the third reaction chamber, and the fourth reaction chamber are connected in series and in sequence at the ends.

[0011] An air inlet, which is communicated with the first reaction chamber;

[0012] An air outlet, which is communicated with the fourth reaction chamber;

[0013] A packing layer, which is located above the partition board and fills partial areas of the first reaction chamber, the second reaction chamber, the third reaction chamber, and the fourth reaction chamber;

[0014] A spraying system, which at least includes a plurality of spray nozzles and is located above the gas reaction chamber;

[0015] A safety protection unit, which is used to detect the gas concentrations of multiple components in the tower body and generate a warning strategy based on the gas concentrations.

[0016] Further defined, a second cavity is further arranged inside the tower body, and the second cavity is isolated from the first cavity;

[0017] Among them, the spraying system further includes a circulation pump, which is located inside the second cavity. The circulation pump includes a water inlet pipe and a water outlet pipe. The water inlet pipe is communicated with the bottom of the first cavity, and the water outlet pipe is communicated with the spray nozzles.

[0018] Further defined, three of the spray nozzles are evenly distributed in a single gas reaction chamber, and the spray nozzles adopt spiral nozzles.

[0019] Further defined, a fan is further included, which is connected to the air outlet of the tower body.

[0020] Further defined, a liquid level sensor and a PH probe are arranged inside the first cavity.

[0021] Further defined, the safety protection unit includes a nitrogen purging system and a hydrogen detection module. The hydrogen detection module is used to detect the hydrogen concentration in the tower body, and the nitrogen purging system is used to dilute the H 2 concentration to below the safety threshold.

[0022] Further defined, the nitrogen purging system includes a purging pipe, a nozzle, and a gas supply module; among them, the purging pipe is located at the top of the tower body and is connected to the nozzle and the gas supply module.

[0023] Further defined, a circulating liquid heating rod is provided in the first cavity, which is used to maintain the temperature of the circulating liquid in the first cavity.

[0024] Further defined, the material of the packing layer is Pall rings.

[0025] The present invention also provides an AP harmful gas tail gas treatment method, which is applied to the AP harmful gas tail gas treatment device described in any one of the above, and the method includes the following steps:

[0026] Step S1, introducing the tail gas from the air inlet into the first reaction chamber, and successively passing through the first to fourth reaction chambers separated by the partition plate, and forming a circuitous gas flow path by using the Pall ring structure of the packing layer;

[0027] Step S2, reversely spraying the treatment liquid to the packing layer of each reaction chamber through the spray nozzles, and the treatment liquid and the tail gas undergo a neutralization / oxidation reaction in a countercurrent state;

[0028] Step S3, the circulation pump extracts the circulating liquid at the bottom of the first cavity through the water inlet pipe, and transports it to the spray nozzles through the water outlet pipe for recycling;

[0029] Wherein, the circulating liquid parameters are monitored in real time through the liquid level sensor and the PH probe, and when the threshold value is exceeded, the neutralizing agent supplement or drainage operation is triggered;

[0030] Step S4, the hydrogen concentration in the tower body is monitored in real time. When the hydrogen concentration exceeds the safety threshold, the nitrogen purging system fills nitrogen into the tower body through the purging port to dilute the hydrogen concentration to the safe range;

[0031] Step S5, discharging the treated gas through the air outlet, and enhancing the gas flow efficiency through the fan.

[0032] The present invention has at least the following beneficial effects:

[0033] By changing the electric heating combustion scheme to a water washing scheme, the treatment cost can be effectively reduced; combined with the dynamic spraying control, the nitrogen purging safety system and the intelligent monitoring module, multiple significant benefits can be achieved. At the same time, through the safety protection unit, when the hydrogen concentration exceeds the limit, the nitrogen purging system can respond within 5 seconds and dilute the concentration from 50% LEL to <10% LEL within 30 seconds, and interlock to close the SiH 4 inlet valve, which can greatly reduce the explosion risk. This solution also has the characteristics of high efficiency, safety and low carbon, provides a solution with both economic and sustainable for tail gas treatment, and has good application prospects. Description of the Drawings

[0034] Figure 1 It is a schematic structural diagram of an embodiment of the AP harmful gas tail gas treatment device provided by the present invention;

[0035] Figure 2 Schematic structural diagram of a nitrogen purging system of an exhaust gas treatment device of an AP pest control machine provided by the present invention;

[0036] Figure 3 Schematic flow diagram of an embodiment of an exhaust gas treatment method of an AP pest control machine provided by the present invention.

[0037] Description of reference numerals:

[0038] 100, tower body; 101, first cavity; 102, second cavity;

[0039] 110, isolation plate; 120, partition plate;

[0040] 200, gas reaction chamber; 210, first reaction chamber; 220, second reaction chamber; 230, third reaction chamber; 240, fourth reaction chamber;

[0041] 300, air inlet; 310, air outlet; 311, fan;

[0042] 400, packing layer;

[0043] 500, spray nozzle; 510, circulation pump;

[0044] 600, nitrogen purging system; 610, gas supply module; 620, nozzle; 630, purging pipe. Detailed implementation manners

[0045] Next, the technical solutions in the embodiments of the present application will be clearly described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art belong to the scope of protection of the present application.

[0046] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, rather than to describe a specific order or sequence. It should be understood that such used data may be interchanged under appropriate circumstances so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally of the same category, and the number of objects is not limited. For example, the first object may be one or multiple. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / ", generally represents an "or" relationship between the associated objects before and after.

[0047] Next, a nitrogen purging system of an exhaust gas treatment device of an AP pest control machine provided by the embodiments of the present application will be described in detail in conjunction with the accompanying drawings and specific embodiments and their application scenarios.

[0048] Please refer to Figure 1 and Figure 2 Figure 1 and Figure 2 , the present invention discloses an exhaust gas treatment device for an AP pest control machine, which includes a tower body 100, a partition board 110, an air inlet 300, an air outlet 310, a packing layer 400, a spraying system, and a safety protection unit. It can be understood that the air inlet 300 and the air outlet 310 are respectively connected to the tower body 100, so that after the gas enters the tower body 100 and is treated by the internal gas of the tower body 100, it is discharged from the air outlet 310.

[0049] Specifically, a first cavity 101 and a second cavity 102 are allowed to be opened in the tower body 100.

[0050] Among them, the partition board 110 is located in the first cavity 101 and is fixedly connected to the tower body 100. A number of through holes allowing gas to pass through are opened on the partition board 110. Three vertical partition boards 120 are fixedly connected in the first cavity 101. The partition boards 120 divide the first cavity 101 into four gas reaction chambers 200, including a first reaction chamber 210, a second reaction chamber 220, a third reaction chamber 230, and a fourth reaction chamber 240. The first reaction chamber 210, the second reaction chamber 220, the third reaction chamber 230, and the fourth reaction chamber 240 are sequentially connected end to end. Therefore, the first reaction chamber 210, the second reaction chamber 220, the third reaction chamber 230, and the fourth reaction chamber 240 are sequentially connected end to end through the gas channels at the top or bottom of the partition board 120, forming an "S"-shaped air flow path.

[0051] It can be understood that the gas enters the first cavity 101 from the air inlet 300, passes through the first reaction chamber 210, the second reaction chamber 220, the third reaction chamber 230, and the fourth reaction chamber 240 in sequence, and is discharged through the air outlet 310.

[0052] In some embodiments, the air inlet 300 is located at the top of the tower body 100, and a gas distributor is allowed to be provided at the inlet. The gas distributor is internally provided with a perforated plate, so that the gas evenly enters the first reaction chamber 210.

[0053] The air outlet 310 is located at the top of the tower body 100, and a fan 311 and a demister are connected to the air outlet 310. The fan 311 can improve the gas flow rate, and the demister can be made of PP wire mesh to remove aerosol droplets.

[0054] Further, the packing layer 400 is filled above the partition board 110, covering the upper regions of the four reaction chambers. The packing type is PP Pall rings. In one embodiment, the bulk density of the packing layer 400 is 120 kg / m 3 and the specific surface area is 220 m 2 / m3 .

[0055] The spray system includes four groups of independent spray units, which are respectively located directly above the four reaction chambers. Each group of spray units contains 3 spiral nozzles 620, made of silicon carbide, with a flow rate of 4m 3 / h, an atomization angle of 90°, and a spray coverage diameter of Φ800mm. The spray branch pipes are made of UPVC and are fixed to the tower body 100 through brackets.

[0056] During the gas treatment process, the tail gas enters the first reaction chamber 210 from the air inlet 300, diffuses through the gas distributor and then passes downward through the through holes into the packing layer 400. The gas sequentially passes through the packing layer and the partition plate 120, and flows in the order of the first reaction chamber 210, the second reaction chamber 220, the third reaction chamber 230, and the fourth reaction chamber 240.

[0057] It should be noted that electric control valves can be allowed to be equipped on different spray nozzles 500, and the spray flow rate can be adjusted according to the gas concentration at the outlet of the reaction chamber, with an adjustment range of 1-6m 3 / h. For example, it is allowed to monitor the gas concentration in real time through a laser sensor, but this is not limited to this, and it can be allowed to be determined according to actual needs.

[0058] In one embodiment, when the NH 3 concentration at the inlet of the first reaction chamber 210 > 200ppm, the spray flow rate in the first reaction chamber 210 is automatically increased to 6m 3 / h, and the flow rates of the second reaction chamber 220 and the third reaction chamber 230 are increased by 20% in linkage.

[0059] After the purification is completed in the fourth reaction chamber 240, the gas is discharged through the demister and the fan 311 through the air outlet 310.

[0060] Furthermore, in some embodiments, a second cavity 102 is also provided inside the tower body 100, and the second cavity 102 is isolated from the first cavity 101. Among them, the spray system further includes a circulation pump 510, which is located inside the second cavity 102. The circulation pump 510 includes a water inlet pipe and a water outlet pipe. The water inlet pipe is connected to the bottom of the first cavity 101, and the water outlet pipe is connected to the spray nozzle 500.

[0061] Therefore, the recycled use of the spray liquid can be realized through the circulation pump 510.

[0062] It should be noted that a liquid level sensor and a PH probe are provided inside the first cavity 101. The content of the spray liquid is obtained through the liquid level sensor for timely replenishment. And the PH value of the spray liquid is obtained through the PH probe to facilitate timely adjustment of the PH value of the spray liquid to improve the gas treatment effect.

[0063] Further, a circulating liquid heating rod is also allowed to be arranged in the first cavity 101, which is used to maintain the temperature of the circulating liquid in the first cavity 101.

[0064] In some embodiments, a safety protection unit is also provided, which is used to detect the gas concentrations of multiple components in the tower body 100 and generate a warning strategy based on the gas concentrations.

[0065] Specifically, the safety protection unit includes a nitrogen purging system 600 and a hydrogen detection module. The hydrogen detection module is used to detect the hydrogen concentration in the tower body 100, and the nitrogen purging system 600 is used to dilute the H 2 concentration to below the safety threshold.

[0066] Further, one catalytic combustion type hydrogen sensor with a range of 0 - 100% LEL and an accuracy of ±2% LEL can be allowed to be installed at the top of each of the four gas reaction chambers 200. The sensor probe extends 50 mm into the tower body 100 to avoid droplet interference, and the protection level is IP67. At the same time, the sensor outputs a 4 - 20 mA signal, which is connected to the PLC through an isolation transmitter, and the sampling frequency is 1 Hz. The PLC built-in algorithm filters instantaneous interference (such as the impact of spray droplets), and the concentration determination for triggering an alarm needs to last for more than 5 seconds beyond the threshold.

[0067] For the nitrogen purging system 600, it can be allowed to include an annular purging pipe 630, nozzles 620, and a gas supply module 610. For example, the annular purging pipe 630 is arranged around the top of the tower, made of 316L stainless steel, with a pipe diameter of DN40. Eight sector nozzles 620 are evenly distributed along the annular pipe to ensure that nitrogen covers the cross-section of the tower body 100. The gas supply module 610 can be allowed to use a nitrogen source, which is centralized gas supply from the factory and is connected to the purging pipe 630 through a two-stage pressure reducing valve. A spare nitrogen cylinder group is also configured to be connected in parallel with the main gas supply pipe through a solenoid valve and automatically switched during gas cut-off.

[0068] During the actual safety protection process, a hierarchical warning strategy can be allowed to be adopted.

[0069] Specifically, different warning strategies are corresponding to the hydrogen concentration.

[0070] For example, when the hydrogen concentration is 10% - 25%, a primary warning is executed. It can be allowed to include audible and visual alarms in the central control room, recording the concentration curve, and manual inspection for confirmation. When the hydrogen concentration is 25% - 50%, a medium-level response is executed, the nitrogen purging is started, and the flow rate is controlled to a preset 10 L / min. When the hydrogen concentration is >50%, an emergency shutdown is executed, which can be allowed to include triggering full-flow nitrogen purging, controlling the flow rate to a preset 30 L / min, switching the tail gas to the emergency combustion module at the same time, and relieving the pressure of the tower body 100.

[0071] Further, during the actual concentration monitoring process, for any reaction chamber H 2 When the concentration > 25% LEL, the PLC reads the maximum value and locks the alarm point. Meanwhile, the nitrogen nozzle 620 above the corresponding reaction chamber is opened, and the pressure reducing valve is adjusted to raise the nitrogen pressure to the preset 0.2 MPa and the flow rate to 10 L / min.

[0072] It should be noted that the concentration of H also needs to be continuously monitored 2 If it does not drop to < 10% LEL within 30 seconds, the standby bottle group is started and the flow rate is increased to 30 L / min. The spray system of the problem reaction chamber is synchronously closed to prevent further generation of hydrogen.

[0073] It can be understood that based on the above safety protection unit, the safety of the device during use can be effectively improved, and the risk of hydrogen explosion can be greatly reduced.

[0074] Please refer to Figure 3 , the present invention also provides an AP harmful gas tail gas treatment method, which is applied to the AP harmful gas tail gas treatment device of any one of the above embodiments, and the method includes the following steps.

[0075] Step S1, introducing the tail gas from the air inlet 300 into the first reaction chamber 210, and sequentially passing through the first to fourth reaction chambers 240 separated by the partition plate 120, and forming a tortuous gas flow path by using the Pall ring structure of the packing layer 400.

[0076] Step S2, reversely spraying the treatment liquid to the packing layer 400 of each reaction chamber through the spray nozzle 500, and the treatment liquid and the tail gas undergo a neutralization / oxidation reaction in a countercurrent state.

[0077] Step S3, the circulating pump 510 pumps out the circulating liquid at the bottom of the first cavity 101 through the water inlet pipe, and transports it to the spray nozzle 500 through the water outlet pipe for recycling; wherein, the parameters of the circulating liquid are real-time monitored by the liquid level sensor and the PH probe, and when the threshold value is exceeded, the neutralizing agent supplement or drainage operation is triggered.

[0078] Step S4, real-time monitoring the hydrogen concentration in the tower body 100, when the hydrogen concentration exceeds the safety threshold, the nitrogen purging system 600 fills nitrogen into the tower body 100 through the purging port to dilute the hydrogen concentration to the safe range.

[0079] Step S5, discharging the treated gas through the air outlet 310, and enhancing the gas flow efficiency through the fan 311.

[0080] In summary, the present invention discloses an exhaust gas treatment device and method for an AP pest control machine. By changing the electric heating combustion scheme to a water washing scheme, the treatment cost can be effectively reduced; combined with dynamic spray control, nitrogen purge safety system and intelligent monitoring module, multiple significant benefits can be achieved. At the same time, through the safety protection unit, when the hydrogen concentration exceeds the limit, the nitrogen purge system 600 can respond within 5 seconds and dilute the concentration from 50% LEL to <10% LEL within 30 seconds, and interlock to close the SiH 4 inlet valve, which can greatly reduce the explosion risk. This solution also has the characteristics of high efficiency, safety and low carbon, provides a solution with both economic and sustainable for exhaust gas treatment, and has good application prospects.

[0081] It should be noted that in this article, the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in the reverse order according to the functions involved. For example, the described methods may be performed in an order different from that described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0082] The embodiments of the present application have been described above in conjunction with the accompanying drawings. However, the present application is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present application, those of ordinary skill in the art can also make many forms without departing from the purpose of the present application and the scope protected by the claims, and all belong to the protection scope of the present application.

Claims

1. An AP pest control machine tail gas treatment device, characterized in that: include: A tower body (100) having a first cavity (101) formed therein; An isolation plate (110) is located in the first cavity (101) and is fixedly connected to the tower body (100); the isolation plate (110) is provided with a plurality of through holes that allow gas to pass through; Three vertical partitions (120) are fixedly connected in the first cavity (101), and the partitions (120) divide the first cavity (101) into four gas reaction chambers (200), including a first reaction chamber (210), a second reaction chamber (220), a third reaction chamber (230) and a fourth reaction chamber (240); the first reaction chamber (210), the second reaction chamber (220), the third reaction chamber (230) and the fourth reaction chamber (240) are connected in sequence; an air inlet (300) communicating with the first reaction chamber (210); A gas outlet (310) communicated with the fourth reaction chamber (240); a filler layer (400), located above the isolation plate (110) and filling a portion of the first reaction chamber (210), the second reaction chamber (220), the third reaction chamber (230), and the fourth reaction chamber (240); A spray system, comprising at least a plurality of spray nozzles (500), located above the gas reaction chamber (200); A safety protection unit is used to detect the gas concentrations of multiple components in the tower body (100) and generate an early warning strategy based on the gas concentrations.

2. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: A second cavity (102) is also provided in the tower body (100), and the second cavity (102) is isolated from the first cavity (101) by a box; The spray system further comprises a circulation pump (510), which is located in the second cavity (102); the circulation pump (510) comprises a water inlet pipe and a water outlet pipe, the water inlet pipe is connected to the bottom of the first cavity (101), and the water outlet pipe is connected to the spray nozzle (500).

3. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: Three spray nozzles (500) are evenly distributed in a single gas reaction chamber (200), and the spray nozzle (500) is a spiral nozzle (620).

4. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: It also includes a fan (311) connected to the air outlet (310) of the tower body (100).

5. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: A liquid level sensor and a pH probe are arranged in the first cavity (101).

6. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: The safety protection unit comprises a nitrogen purge system (600) and a hydrogen detection module, wherein the hydrogen detection module is used to detect the hydrogen concentration in the tower body (100), and the nitrogen purge system (600) is used to dilute the H2 concentration to below a safety threshold.

7. The AP pest removal machine tail gas treatment device according to claim 6, characterized in that: The nitrogen purge system (600) comprises a purge pipe (630), a nozzle (620) and a gas supply module (610); The purge pipe (630) is located at the top of the tower body (100) and is connected to the nozzle (620) and the gas supply module (610).

8. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: A circulating liquid heating rod is arranged in the first cavity (101) and is used to maintain the temperature of the circulating liquid in the first cavity (101).

9. The AP pest removal machine tail gas treatment device according to claim 1, characterized in that: The material of the packing layer (400) is ball ring.

10. A method for treating tail gas from an AP machine, characterized in that: Applicable to the AP pest removal machine tail gas treatment device according to any one of claims 1 to 9, the method comprises the following steps: Step S1, introducing the tail gas from the air inlet (300) into the first reaction chamber (210), sequentially passing through the first to fourth reaction chambers (240) separated by the partition (120), and forming a circuitous airflow path by using the ball ring structure of the packing layer (400); Step S2, spraying the treatment liquid in reverse to the packing layer (400) of each reaction chamber through the spray nozzle (500), and the treatment liquid and the tail gas undergo a neutralization / oxidation reaction in a countercurrent state; Step S3, the circulating pump (510) extracts the circulating liquid at the bottom of the first cavity (101) through the water inlet pipe, and transports it to the spray nozzle (500) through the water outlet pipe for recycling; wherein the circulating liquid parameters are monitored in real time by the liquid level sensor and the pH probe, and when the threshold value is exceeded, the neutralizer replenishment or drainage operation is triggered; Step S4, real-time monitoring of the hydrogen concentration in the tower body (100), when the hydrogen concentration exceeds a safety threshold, the nitrogen purge system (600) injects nitrogen into the tower body (100) through the purge port to dilute the hydrogen concentration to a safe range; Step S5, the treated gas is discharged through the gas outlet (310), and the gas flow efficiency is enhanced by the fan (311).

Images