Spraying equipment for target material cooling back plate

Abstract

The invention discloses spraying equipment for a target material cooling back plate. The spraying equipment comprises a mounting bracket, a conveying assembly convenient for conveying the target material cooling back plate is arranged in the mounting bracket, a mounting bottom plate is fixedly arranged at the top of the mounting bracket, and a lifting assembly is arranged at the top of the mounting bottom plate. The conveying assembly is matched with the limiting roller to convey the target material cooling back plate, the spraying assembly is used for spraying the two sides of the target material cooling back plate at the same time, and after spraying, the hot air drying assembly is used for drying coatings on the two sides of the target material cooling back plate at the same time, so that the two sides of the target material cooling back plate can be sprayed at the same time; the spraying thickness and uniformity of the two sides of the target material cooling back plate are the same, the situation that after one side of the target material cooling back plate is sprayed and dried, the other side of the target material cooling back plate can be sprayed, and a sprayed coating is dried is avoided, so that the spraying speed of the target material cooling back plate is increased.

Description

Technical Field

[0001] The present invention relates to the technical field of spraying for target cooling backplates, and particularly to a spraying device for target cooling backplates. Background Art

[0002] A target cooling backplate refers to a metal or alloy plate that is closely combined with a target, located behind the target, and used to provide support, heat dissipation, and other auxiliary functions for the target in processes such as sputtering coating. During sputtering, the target is subjected to various external forces such as ion bombardment, and is prone to deformation, cracking, or even fragmentation. The cooling backplate can provide stable support for the target, ensuring that the target maintains its original shape and structural integrity under these external forces.

[0003] During the production of target cooling backplates, spraying needs to be carried out on the target cooling backplates. For the connection between ceramics and other targets and metal backplates, by spraying a metal transition layer on the backplate, such as when connecting a ceramic ITO target and a copper backplate, first spraying a metal coating such as indium on the backplate can improve the wettability between the ceramic and the metal, enabling the two to be firmly combined better through methods such as brazing, and preventing the target from detaching from the backplate due to factors such as thermal stress during sputtering. In specific cases, insulation needs to be achieved between the backplate and the target or other parts of the device to prevent problems such as current leakage or interference.

[0004] Moreover, the environment where the target cooling backplate is located is special, and both sides need to have specific properties, such as special corrosion resistance, wear resistance, etc., or when certain special functions need to be achieved through design, double-sided spraying may also be carried out. However, the existing devices usually adopt a single-sided spraying structure. When double-sided spraying of the target cooling backplate is required, after spraying one side of the target cooling backplate, the other side of the target cooling backplate needs to be sprayed. Moreover, in order to prevent the sprayed coating from being scraped off, the single side of the target cooling backplate that has been sprayed needs to be dried, and then the other side of the target cooling backplate is sprayed, resulting in an increase in the time consumed for spraying the target cooling backplate. Based on the above problems, the present application proposes a spraying device for target cooling backplates. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present invention provides a spraying device for target cooling backplates to solve the problems raised in the above background art.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] A spraying device for a target cooling backplane, comprising a mounting bracket. Inside the mounting bracket, there is a conveying assembly for facilitating the conveyance of the target cooling backplane. At the top of the mounting bracket, there is a fixed mounting base plate. On the top of the mounting base plate, there is a lifting assembly. On the top of the mounting base plate, a moving frame is arranged through an adjusting assembly. Inside the moving frame, a limiting roller is rotatably arranged. Above the mounting base plate, there is an adjustable guiding assembly for facilitating the guiding of the target cooling backplane. On the top of the mounting base plate, there is a spraying assembly for facilitating the spraying of the target cooling backplane. On the top of the mounting base plate, there is a hot air drying assembly for facilitating the drying of the sprayed target cooling backplane.

[0008] Preferably, the conveying assembly includes a plurality of conveying rollers rotatably arranged inside the mounting bracket. At the front end of the conveying roller, there is a first driving wheel fixedly arranged. Inside the first driving wheel, there is a meshing driving belt. Inside the driving belt, there is a meshing second driving wheel. The second driving wheel is fixedly installed on the next conveying roller. At the rear side of the mounting bracket, there is a driving motor fixedly arranged. The output end of the driving motor is connected to the left conveying roller.

[0009] Preferably, the lifting assembly includes a mounting frame fixedly installed on the top of the mounting base plate. At the top of the mounting frame, there is a fixed mounting plate. On the top of the mounting plate, there is a servo motor fixedly arranged. The output end of the servo motor is fixedly provided with a main screw rod. The main screw rod rotates inside the rear mounting frame. On the surface of the main screw rod, there is a driving sprocket fixedly arranged. On the surface of the driving sprocket, there is a meshing driving chain. Inside the driving chain, there is a meshing driven sprocket. Inside the driven sprocket, there is a secondary screw rod fixedly arranged. The secondary screw rod rotates inside the front mounting frame. On the surfaces of the secondary screw rod and the main screw rod, there are threaded moving plates. The moving plates are fixedly installed on the surface of the moving frame. At the bottom of the moving plate, there is a guiding column fixedly arranged. On the surface of the guiding column, there is a sliding connecting sleeve. The connecting sleeve is fixedly installed on the top of the mounting base plate.

[0010] Preferably, the adjustable guiding assembly includes a connecting plate and a moving frame. The connecting plate and the mounting plate are both fixedly installed on the top of the mounting frame. Inside the connecting plate, there is a positive and negative motor fixedly arranged. The output end of the positive and negative motor is fixedly provided with a rotating screw rod. On the surface of the rotating screw rod, there is a threaded sleeve arranged. On the right side of the threaded sleeve, there is a U-shaped plate fixedly arranged. Inside the U-shaped plate, there is a lapped ball. On the surface of the ball, there is a lapped limiting plate. The limiting plate is fixedly installed on one side of the U-shaped plate close to the middle of the mounting bracket. On the side of the U-shaped plate away from the threaded sleeve, there is a guiding sleeve fixedly arranged. Inside the guiding sleeve, there is a sliding guiding rod. The guiding rod is fixedly installed inside the mounting plate.

[0011] Preferably, the spraying assembly includes an L-shaped plate fixedly installed on the top of the installation base plate. A conveying pipe is fixedly arranged inside the L-shaped plate. An installation pipe is fixedly arranged on one side of the conveying pipe. A spray head is threadedly installed inside the installation pipe. A shunt pipe is fixedly arranged on the top of the conveying pipe.

[0012] Preferably, the hot air drying assembly includes a U-shaped frame fixedly installed on the top of the installation base plate. A heating box is fixedly arranged on the top of the U-shaped frame. A fan and a heating rod are fixedly arranged inside the heating box. A filter screen is fixedly arranged on the top of the heating box. Hot air pipes are fixedly arranged on both the front and rear sides of the heating box. An air outlet pipe is fixedly arranged on one side of the hot air pipe.

[0013] Preferably, the number of the ball bearings is several, and the several ball bearings are symmetrically distributed. The ball bearings are made of metal material.

[0014] Preferably, the heating box is in a rectangular structure, and both the heating box and the hot air pipe are made of heat-insulating material.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0016] 1. For the spraying equipment for the target cooling back plate, the conveying assembly cooperates with the limiting rollers to convey the target cooling back plate, and the spraying assembly sprays both sides of the target cooling back plate simultaneously. After spraying, the hot air drying assembly dries the coatings on both sides of the target cooling back plate simultaneously, so as to facilitate spraying both sides of the target cooling back plate at the same time, making the spraying thickness and uniformity on both sides of the target cooling back plate the same, avoiding spraying and drying one side of the target cooling back plate before spraying and drying the other side of the target cooling back plate, and improving the spraying speed of the target cooling back plate.

[0017] 2. For the spraying equipment for the target cooling back plate, the lifting assembly can drive the moving frame to move, so that the moving frame drives the limiting rollers to move, thus facilitating changing the distance between the limiting rollers and the conveying rollers, and facilitating the conveying assembly to cooperate with the limiting rollers to convey target cooling back plates of different specifications, avoiding the need for different conveying equipment for different target cooling back plates, and making the spraying equipment for the target cooling back plate more convenient to use.

[0018] 3. For the spraying equipment for the target cooling back plate, the adjustable guiding assembly can change the distance between the ball bearings, so that the adjustable guiding assembly can guide target cooling back plates of different thicknesses, avoiding the inclination of target cooling back plates of different thicknesses between the conveying rollers and the limiting rollers, resulting in uneven spraying of the target cooling back plate or spraying dead angles, and enabling better spraying effect of the target cooling back plate. Description of the Drawings

[0019] Figure 1 Isometric drawing of the structure of the present invention;

[0020] Figure 2 Schematic diagram of the structure of the conveying component of the present invention;

[0021] Figure 3 Schematic diagram of the structure of the lifting component of the present invention;

[0022] Figure 4 Schematic diagram of the structure of the adjustable guiding component of the present invention;

[0023] Figure 5 Schematic diagram of the structure of the spraying component of the present invention;

[0024] Figure 6 Schematic diagram of the structure of the hot air drying component of the present invention.

[0025] In the figure: 1, mounting bracket; 2, conveying roller; 3, first driving wheel; 4, transmission belt; 5, second driving wheel; 6, driving motor; 7, mounting base plate; 8, mounting frame; 9, fixing plate; 10, servo motor; 11, main screw; 12, driving sprocket; 13, transmission chain; 14, driven sprocket; 15, auxiliary screw; 16, moving plate; 17, guiding column; 18, connecting sleeve; 19, moving frame; 20, limiting roller; 21, connecting plate; 22, forward and reverse motor; 23, screw sleeve; 24, U-shaped plate; 25, ball; 26, limiting plate; 27, guiding sleeve; 28, guiding rod; 29, mounting plate; 30, L-shaped plate; 31, conveying pipe; 32, mounting pipe; 33, nozzle; 34, shunt pipe; 35, U-shaped frame; 36, heating box; 37, fan; 38, heating rod; 39, filter screen; 40, hot air pipe; 41, air outlet pipe; 42, rotating screw. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] Refer to Figure 1-6, A spraying device for the cooling backplane of a target, comprising a mounting bracket 1. Inside the mounting bracket 1, there is a conveying assembly for facilitating the conveyance of the cooling backplane of the target. At the top of the mounting bracket 1, a mounting base plate 7 is fixedly provided. At the top of the mounting base plate 7, there is a lifting assembly. At the top of the mounting base plate 7, a moving frame 19 is provided through an adjusting assembly. Inside the moving frame 19, a limiting roller 20 is rotatably provided. Above the mounting base plate 7, there is an adjustable guiding assembly for facilitating the guiding of the cooling backplane of the target. At the top of the mounting base plate 7, there is a spraying assembly for facilitating the spraying of the cooling backplane of the target. The spraying assembly includes an L-shaped plate 30 fixedly installed at the top of the mounting base plate 7. Inside the L-shaped plate 30, a conveying pipe 31 is fixedly provided. On one side of the conveying pipe 31, a mounting pipe 32 is fixedly provided. Inside the mounting pipe 32, a spray head 33 is threadedly installed. At the top of the conveying pipe 31, a shunt pipe 34 is fixedly provided. The spraying material is conveyed into the shunt pipe 34 through an external conveying device, enters the spray head 33 through the conveying pipe 31, and is sprayed onto the cooling backplane of the target, thereby facilitating the simultaneous spraying of both sides of the cooling backplane of the target, avoiding the need to spray one side of the cooling backplane of the target first and then spray the other side, reducing the spraying time of the cooling backplane of the target, and avoiding scratches on the sprayed surface when spraying the other side. At the top of the mounting base plate 7, there is a hot air drying assembly for facilitating the drying of the sprayed cooling backplane of the target. The hot air drying assembly includes a U-shaped frame 35 fixedly installed at the top of the mounting base plate 7. At the top of the U-shaped frame 35, a heating box 36 is fixedly provided. The heating box 36 has a rectangular structure. Both the heating box 36 and the hot air pipe 40 are made of heat-insulating materials. Inside the heating box 36, a fan 37 and a heating rod 38 are fixedly provided. At the top of the heating box 36, a filter screen 39 is fixedly provided. On both the front and rear sides of the heating box 36, hot air pipes 40 are fixedly provided. On one side of the hot air pipe 40, an air outlet pipe 41 is fixedly provided. The fan 37 sucks external air into the heating box 36, heats it through the heating rod 38, and the heated air enters the air outlet pipe 41 through the hot air pipe 40 and is sprayed onto the cooling backplane of the target, thereby facilitating the simultaneous drying of both sides of the sprayed cooling backplane of the target and reducing the drying time required for the cooling backplane of the target.

[0028] Preferably, the conveying assembly includes a plurality of conveying rollers 2 rotatably provided inside the mounting bracket 1. At the front end of the conveying roller 2, a first driving wheel 3 is fixedly provided. Inside the first driving wheel 3, a transmission belt 4 is meshed. Inside the transmission belt 4, a second driving wheel 5 is meshed. The second driving wheel 5 is fixedly installed on the next conveying roller 2. At the rear side of the mounting bracket 1, a driving motor 6 is fixedly provided. The output end of the driving motor 6 is connected to the left conveying roller 2.

[0029] Specifically, the lifting component includes a mounting frame 8 fixedly installed on the top of the mounting base plate 7. A fixing plate 9 is fixedly arranged on the top of the mounting frame 8. A servo motor 10 is fixedly arranged on the top of the fixing plate 9. The output end of the servo motor 10 is fixedly provided with a main screw rod 11. The main screw rod 11 rotates inside the rear mounting frame 8. An active sprocket 12 is fixedly arranged on the surface of the main screw rod 11. A transmission chain 13 is meshed on the surface of the active sprocket 12. A driven sprocket 14 is meshed inside the transmission chain 13. A secondary screw rod 15 is fixedly arranged inside the driven sprocket 14. The secondary screw rod 15 rotates inside the front mounting frame 8. Moving plates 16 are threadedly arranged on the surfaces of both the secondary screw rod 15 and the main screw rod 11. The moving plates 16 are fixedly installed on the surface of the moving frame 19. A guiding column 17 is fixedly arranged at the bottom of the moving plate 16. A connecting sleeve 18 is slidably arranged on the surface of the guiding column 17. The connecting sleeve 18 is fixedly installed on the top of the mounting base plate 7. By driving the output end of the servo motor 10 to drive the main screw rod 11 to rotate, the main screw rod 11 drives the active sprocket 12 to rotate. The active sprocket 12 drives the driven sprocket 14 to rotate through the transmission chain 13, and drives the secondary screw rod 15 to rotate through the driven sprocket 14, so that the secondary screw rod 15 and the main screw rod 11 rotate at the same speed, and the secondary screw rod 15 and the main screw rod 11 simultaneously drive the moving plate 16 to move, and drive the guiding column 17 to slide inside the connecting sleeve 18 through the moving plate 16, so that the moving plate 16 drives the moving frame 19 to move, so that the moving frame 19 drives the limiting roller 20 to move, so that the distance between the limiting roller 20 and the mounting pipe 32 can be adjusted according to the specifications of the target cooling back plate, so as to convey target cooling back plates of different specifications.

[0030] Specifically, the adjustable guide assembly includes a connecting plate 21 and a movable frame 19, the connecting plate 21 and the mounting plate 29 are both fixedly mounted on the top of the mounting frame 8, a forward and reverse motor 22 is fixedly arranged inside the connecting plate 21, a rotating screw 42 is fixedly arranged at the output end of the forward and reverse motor 22, a screw sleeve 23 is threadedly arranged on the surface of the rotating screw 42, a U-shaped plate 24 is fixedly arranged on the right side of the screw sleeve 23, a ball 25 is overlapped inside the U-shaped plate 24, the number of the ball 25 is several, and the several ball 25 are symmetrically distributed, the ball 25 is made of metal material, a limit plate 26 is overlapped on the surface of the ball 25, the limit plate 26 is fixedly mounted on one side of the U-shaped plate 24 close to the middle of the mounting bracket 1, and a U-shaped plate 24 is fixedly arranged on the side away from the screw sleeve 23 A guide sleeve 27 is slidably arranged inside the guide sleeve 27, and the guide sleeve 27 is fixedly mounted inside the mounting plate 29. The output end is driven by the forward and reverse motor 22 to drive the rotating screw 42 to rotate, so that the screw sleeve 23 drives the U-shaped plate 24 to move, and drives the balls 25 and the limit plate 26 to move through the U-shaped plate 24. At the same time, the U-shaped plate 24 drives the guide sleeve 27 to slide on the surface of the guide rod 28, thereby changing the distance between the balls 25, so that the distance between the balls 25 can guide the target cooling back plates of different thicknesses, thereby avoiding the target cooling back plates of different thicknesses from tilting between the conveying roller 2 and the limit roller 20, so that the target cooling back plate can remain in a vertical state, thereby facilitating the subsequent spraying of the target cooling back plate.

[0031] When in use: place the target material cooling back plate to be sprayed between the conveying roller 2 and the limiting roller 20, so that the target material cooling back plate contacts the conveying roller 2 and the limiting roller 20, and the target material cooling back plate located between the limiting roller 20 and the conveying roller 2 contacts the ball 25, and the output end is driven by the driving motor 6 to drive the conveying roller 2 to rotate, and the conveying roller 2 drives the transmission wheel 1 3 to rotate, and the transmission wheel 1 3 drives the transmission wheel 2 5 to rotate through the transmission belt 4, and the transmission wheel 2 5 drives the next conveying roller 2 to rotate, so that the conveying roller 2 conveys the target material cooling back plate, and when the target material cooling back plate is conveyed to between the nozzles 33, the sprayed material is conveyed to the diversion pipe 3 through the external conveying equipment. 4, and the coating is diverted through the diverter pipe 34. The diverted coating enters the front and rear two conveying pipes 31, and enters the nozzle 33 through the conveying pipe 31, and is sprayed onto the target cooling back plate through the nozzle 33, and both sides of the target cooling back plate are sprayed at the same time. The target cooling back plate after spraying enters between the air outlet pipes 41, and the external air is drawn into the heating box 36 through the fan 37, and the air is filtered through the filter 39. The filtered air is heated by the heating rod 38. The heated air enters the hot air pipe 40 and is sprayed onto the target cooling back plate through the air outlet pipe 41, and both sides of the target cooling back plate after spraying are dried at the same time.

[0032] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0033] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A spraying device for a target material cooling backing plate, comprising a mounting bracket (1), characterized in that: A conveying assembly is arranged inside the mounting bracket (1) for facilitating conveying the target material cooling back plate, a mounting base plate (7) is fixedly arranged on the top of the mounting bracket (1), a lifting assembly is arranged on the top of the mounting base plate (7), a moving frame (19) is arranged on the top of the mounting base plate (7) through an adjusting assembly, a limiting roller (20) is rotatably arranged inside the moving frame (19), an adjustable guiding assembly is arranged above the mounting base plate (7) for facilitating guiding the target material cooling back plate, a spraying assembly is arranged on the top of the mounting base plate (7) for facilitating spraying the target material cooling back plate, and a hot air drying assembly is arranged on the top of the mounting base plate (7) for facilitating drying the sprayed target material cooling back plate.

2. The spraying equipment for target material cooling back plate according to claim 1, characterized in that: The conveying assembly comprises a plurality of conveying rollers (2) rotatably arranged inside a mounting bracket (1), a transmission wheel (3) being fixedly arranged at the front end of the conveying roller (2), a transmission belt (4) being meshedly arranged inside the transmission wheel (3), a transmission wheel (5) being meshedly arranged inside the transmission belt (4), and the transmission wheel (5) being fixedly mounted on the next conveying roller (2), and a driving motor (6) being fixedly arranged on the rear side of the mounting bracket (1), and an output end of the driving motor (6) being connected to the conveying roller (2) on the left side.

3. The spraying equipment for target material cooling back plate according to claim 1, characterized in that: The lifting assembly comprises a mounting frame (8) fixedly mounted on the top of a mounting base plate (7), a fixing plate (9) fixedly arranged on the top of the mounting frame (8), a servo motor (10) fixedly arranged on the top of the fixing plate (9), a main screw (11) fixedly arranged on the output end of the servo motor (10), the main screw (11) rotating inside the mounting frame (8) at the rear side, a driving sprocket (12) fixedly arranged on the surface of the main screw (11), a transmission chain (13) meshingly arranged on the surface of the driving sprocket (12), and a gear (13) meshingly arranged inside the transmission chain (13) A driven sprocket (14), wherein a secondary screw (15) is fixedly arranged inside the driven sprocket (14), wherein the secondary screw (15) is rotatably arranged inside the mounting frame (8) at the front side, wherein the surfaces of the secondary screw (15) and the main screw (11) are both threadedly arranged with a movable plate (16), wherein the movable plate (16) is fixedly mounted on the surface of the movable frame (19), wherein a guide column (17) is fixedly arranged at the bottom of the movable plate (16), wherein a connecting sleeve (18) is slidably arranged on the surface of the guide column (17), wherein the connecting sleeve (18) is fixedly mounted on the top of the mounting base plate (7).

4. The spraying equipment for target material cooling back plate according to claim 3, characterized in that: The adjustable guide assembly comprises a connecting plate (21) and a movable frame (19), wherein the connecting plate (21) and the mounting plate (29) are both fixedly mounted on the top of the mounting frame (8), a forward and reverse motor (22) is fixedly arranged inside the connecting plate (21), a rotating screw rod (42) is fixedly arranged at the output end of the forward and reverse motor (22), a screw sleeve (23) is threadedly arranged on the surface of the rotating screw rod (42), a U-shaped plate (24) is fixedly arranged on the right side of the screw sleeve (23), and the A ball bearing (25) is overlapped inside the guide U-shaped plate (24), a limit plate (26) is overlapped on the surface of the ball bearing (25), the limit plate (26) is fixedly mounted on a side of the U-shaped plate (24) close to the middle of the mounting bracket (1), a guide sleeve (27) is fixedly mounted on a side of the U-shaped plate (24) away from the screw sleeve (23), a guide sleeve (27) is slidably mounted inside the guide sleeve (27), and the guide sleeve (27) is fixedly mounted inside the mounting plate (29).

5. The spraying equipment for target material cooling back plate according to claim 1, characterized in that: The spraying assembly comprises an L-shaped plate (30) fixedly mounted on the top of a mounting base plate (7), a delivery pipe (31) being fixedly arranged inside the L-shaped plate (30), a mounting pipe (32) being fixedly arranged on one side of the delivery pipe (31), a spray head (33) being threadedly mounted inside the mounting pipe (32), and a diversion pipe (34) being fixedly arranged on the top of the delivery pipe (31).

6. The spraying equipment for target material cooling back plate according to claim 1, characterized in that: The hot air drying assembly comprises a U-shaped frame (35) fixedly mounted on the top of the mounting base plate (7); a heating box (36) is fixedly arranged on the top of the U-shaped frame (35); a fan (37) and a heating rod (38) are fixedly arranged inside the heating box (36); a filter screen (39) is fixedly arranged on the top of the heating box (36); hot air pipes (40) are fixedly arranged on both the front and rear sides of the heating box (36); and an air outlet pipe (41) is fixedly arranged on one side of the hot air pipe (40).

7. The spraying equipment for target material cooling back plate according to claim 4, characterized in that: The number of the balls (25) is several, and the balls (25) are symmetrically distributed. The balls (25) are made of metal.

8. The spraying equipment for target material cooling back plate according to claim 6, characterized in that: The heating box (36) has a rectangular structure, and the heating box (36) and the hot air pipe (40) are both made of heat-insulating material.

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