Dismounting tool

Abstract

The invention provides a dismounting tool, relates to the technical field of auxiliary tools of semiconductor equipment, and can improve the convenience of dismounting a quartz plate in heat treatment equipment. The disassembling tool comprises a supporting cross beam which is located above a cavity base body of the heat treatment equipment; the two bottom lining plates are arranged side by side and are respectively connected with the top of a chamber base body of the heat treatment equipment; when the disassembling tool is in a first working state, the supporting cross beam stretches across the two bottom lining plates, and the two ends of the supporting cross beam are matched with the bottom lining plates through jacking screws correspondingly. When the dismounting tool is in the first working state, the adsorption piece is connected with the supporting cross beam, and a suction cup in the adsorption piece is used for adsorbing an upper quartz plate installed on the upper portion of the cavity base body; under the first acting force, the jacking screw can drive the supporting cross beam to move away from the cavity base body, so that the supporting cross beam drives the upper quartz plate to move away from the cavity base body through the suction cup.

Description

Technical Field

[0001] The present disclosure relates to the technical field of auxiliary tooling for semiconductor equipment, and particularly relates to a disassembly tooling for disassembling a quartz plate in a heat treatment equipment. Background Art

[0002] In the related art, in order to implement a low-pressure process and ensure the strength of the quartz plate in the semiconductor heat treatment equipment, usually only by the quartz plate bearing an atmospheric pressure to compress the sealing ring to achieve sealing.

[0003] Due to the quartz plate having to be compatible with two extreme factors of strength and heat radiation resistance, even when the temperature and environment are within the service range of the sealing ring, due to the long-term action of high temperature and high pressure, the overall adhesion force between the sealing ring and the quartz plate is too large, and combined with reasons such as the weight of the quartz plate, it is difficult to open the quartz plate. Summary of the Invention

[0004] The present disclosure provides a disassembly tooling that can improve the convenience of disassembling the quartz plate in the heat treatment equipment.

[0005] The present disclosure provides a disassembly tooling, including: a support cross beam located above the chamber base of the heat treatment equipment; two bottom liners arranged side by side, and the two bottom liners are respectively connected to the top of the chamber base of the heat treatment equipment; when the disassembly tooling is in the first working state, the support cross beam straddles the two bottom liners, and two ends of the support cross beam are respectively cooperated with the bottom liners through jacking screws; a suction attachment, when the disassembly tooling is in the first working state, the suction attachment is connected to the support cross beam, and a suction cup in the suction attachment is used for sucking and attaching an upper quartz plate installed on the upper part of the chamber base; wherein, under a first acting force, the jacking screw can drive the support cross beam to move away from the chamber base, so that the support cross beam drives the upper quartz plate to move away from the chamber base through the suction cup.

[0006] In some embodiments, the support cross beam is provided with a first threaded hole, and the jacking screw is cooperated with the first threaded hole; the lower part of the jacking screw abuts against the bottom liner, so that the jacking screw can drive the support cross beam to move away from the chamber base under a first acting force.

[0007] In some embodiments, the lower part of the jacking screw is rotatably connected to the bottom liner through a bearing, so that the jacking screw can drive the support cross beam to move away from the chamber base under a first acting force.

[0008] In some embodiments, a first convex portion is provided at the bottom of the bottom liner, the first convex portion extends downward, and the first convex portion is used for cooperating with a first positioning hole at the top of the chamber base.

[0009] In some embodiments, first guiding holes are respectively provided at two ends of the support cross beam, a second guiding hole is provided on the bottom lining plate, the second guiding hole is correspondingly arranged with the first guiding hole, and the axial directions of the first guiding hole and the second guiding hole are both parallel to the vertical direction; a guiding nail is inserted into the first guiding hole, and the guiding nail is in sliding fit with the second guiding hole to guide the support cross beam to drive the upper quartz plate to move in the vertical direction.

[0010] In some embodiments, at least two of the first guiding holes are provided at the end of the support cross beam, and two of the first guiding holes are respectively located on opposite sides of the jacking screw.

[0011] In some embodiments, the bottom lining plate has a middle part located between two ends, and the jacking screw cooperates with the middle part of the bottom lining plate.

[0012] In some embodiments, the second guiding hole is located in the middle part of the bottom lining plate.

[0013] In some embodiments, the adsorbing member has two suckers and a connecting frame connecting the two suckers; the connecting frame is arranged on the support cross beam.

[0014] In some embodiments, the connecting frame has a second protruding portion which extends downward; a second positioning hole is provided on the support cross beam, and the second protruding portion cooperates with the second positioning hole.

[0015] In some embodiments, in the second working state, the support cross beam is fixedly connected to the chamber base body; a second threaded hole is provided on the support cross beam, and the axial direction of the second threaded hole is parallel to the vertical direction; the disassembly tooling further includes a screwing screw and a pressing rod, the screwing screw cooperates with the second threaded hole, the lower part of the screw is rotatably connected to the pressing rod, and the lower end of the pressing rod abuts against the lower quartz plate in the heat treatment equipment; wherein, under the second acting force, the screwing screw can move downward relative to the support cross beam, so that the screwing screw can drive the lower quartz plate to move away from the chamber base body through the pressing rod.

[0016] According to the disassembly tooling of the present disclosure, under the first acting force, the jacking screw can drive the support cross beam to move away from the chamber base body, so that the support cross beam drives the upper quartz plate to move away from the chamber base body through the sucker, thereby realizing the disassembly of the upper quartz plate; the above disassembly tooling is easy to assemble and operate simply, improves the convenience of opening the upper quartz plate, provides convenience for maintaining the heat treatment equipment, and is conducive to shortening the maintenance time.

[0017] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it used to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. Brief Description of the Drawings

[0018] The drawings are used to better understand the solution and do not constitute a limitation to the present disclosure. Among them:

[0019] Figure 1 is a schematic diagram of the application scenario of the disassembly tooling in the embodiments of the present disclosure;

[0020] Figure 2 is a partial cross-sectional schematic diagram of the disassembly tooling and the heat treatment equipment in the embodiments of the present disclosure;

[0021] Figure 3 is another schematic diagram of the application scenario of the disassembly tooling in the embodiments of the present disclosure.

[0022] Description of the reference numerals: 100 - support cross beam; 101 - first threaded hole; 102 - first guide hole; 201 - jacking screw; 202 - guide pin; 300 - bottom lining plate; 301 - first convex part; 302 - second guide hole; 400 - adsorbent; 410 - suction cup; 420 - connecting frame; 501 - screwing screw; 502 - pressure rod; 503 - second fixing screw; 610 - chamber base body; 611 - first positioning hole; 620 - upper quartz plate; 630 - lower quartz plate. Detailed Description of the Embodiments

[0023] The following makes an illustration of the exemplary embodiments of the present disclosure in conjunction with the drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered merely exemplary. Therefore, those of ordinary skill in the art should recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, the description of well-known functions and structures is omitted below.

[0024] In the related art, since the quartz plate needs to be compatible with two extreme factors of strength and heat radiation resistance, even when the temperature and environment are within the service range of the sealing ring, due to the long-term action of high temperature and high pressure, the overall adhesion force between the sealing ring and the quartz plate is too large. Coupled with reasons such as the weight of the quartz plate, it is difficult to open the quartz plate. And if the quartz plate is opened by soaking the peripheral sealing ring with alcohol, it will result in a longer maintenance time.

[0025] To overcome the above problems, this embodiment provides a disassembly tooling. By setting a bottom lining plate, a support crossbeam and a suction attachment, when the disassembly tooling is in the first working state, two side-by-side bottom lining plates are respectively connected to the top of the chamber base of the heat treatment equipment. The support crossbeam spans across the two bottom lining plates, and the two ends of the support crossbeam are respectively cooperated with the bottom lining plates through jacking screws. The suction cup of the suction attachment is connected to the support crossbeam, and the suction cup is used to adsorb the upper quartz plate installed on the upper part of the chamber base. In this way, under the first acting force, the jacking screws can drive the support crossbeam to move away from the chamber base, so that the support crossbeam drives the upper quartz plate to move away from the chamber base through the suction cup, thereby disassembling the upper quartz plate. The above disassembly tooling is easy to assemble and operate simply, improves the convenience of opening the upper quartz plate, provides convenience for maintaining the heat treatment equipment, and is conducive to shortening the maintenance time.

[0026] The following takes the structure, function and implementation process of the disassembly tooling of this embodiment as examples with reference to the drawings.

[0027] Please refer to Figure 1 and Figure 3 The disassembly tooling provided in this embodiment can be used to disassemble the quartz plate in the heat treatment equipment. For easy understanding, the structure of the heat treatment equipment will be briefly described first. The heat treatment equipment includes a chamber base 610, the chamber base 610 is generally columnar, and the axial direction of the chamber base 610 is parallel to the vertical direction. The heat treatment equipment also includes an upper quartz plate 620 and a lower quartz plate 630. The upper quartz plate 620 is cooperated with the upper part of the chamber base 610, and the lower quartz plate 630 is cooperated with the lower part of the chamber base 610 to form a space for heat treating semiconductor workpieces.

[0028] It can be understood that when the plate body in the heat treatment equipment is made of other materials, the disassembly tooling of this embodiment can also be used to disassemble the corresponding plate body only. For other columnar or conical hollow parts such as other cavities or boxes, when an upper plate body is installed on the upper part of the hollow part or a lower half body is installed on the lower part of the hollow part, the disassembly tooling of this embodiment can also be used to disassemble the upper plate body or the lower plate body.

[0029] Please refer to Figure 1 and Figure 2 The disassembly tooling includes: a support crossbeam 100 located above the chamber base 610 of the heat treatment equipment, two side-by-side bottom lining plates 300 and a suction attachment 400.

[0030] Among them, in the first working state of disassembling the upper quartz plate 620, the two bottom liners 300 are respectively fixedly connected to the top of the chamber base 610 of the heat treatment equipment. The support crossbeam 100 spans across the two bottom liners 300, and the two ends of the support crossbeam 100 are respectively cooperated with the bottom liners 300 through the jacking screws 201.

[0031] The adsorbing member 400 is connected to the support crossbeam 100. The adsorbing member 400 has a suction cup 410, and the suction cup 410 is used to adsorb and install the upper quartz plate 620 on the upper part of the chamber base. Among them, under the first acting force, the jacking screw 201 can drive the support crossbeam 100 to move away from the chamber base 610, so that the support crossbeam 100 drives the upper quartz plate 620 to move away from the chamber base 610 through the suction cup 410.

[0032] The two bottom liners 300 are arranged side by side in the transverse direction. The two bottom liners 300 are respectively arranged close to the two longitudinal edges of the chamber base 610, so as to facilitate the fixed connection between the bottom liner 300 and the wall of the chamber base 610.

[0033] The bottom liner 300 is generally in a long strip structure, and the length direction of the bottom liner 300 can be longitudinal. Exemplarily, the chamber base 610 can be in a prism shape, such as a quadrangular prism shape, then the bottom liner 300 can be in a straight shape. Or, the chamber base 610 can be in a cylindrical shape, then the bottom liner 300 can be in an arc shape or a straight shape, as long as the bottom liner 300 can be fixed relative to the chamber base 610.

[0034] For the convenience of description, the following takes the bottom liner 300 in a straight shape as an example for illustration.

[0035] The size of the bottom liner 300 can be set according to actual needs. For example, the length of the bottom liner 300 in the longitudinal direction can be less than or equal to the size of the longitudinal edge of the chamber base 610. The distance between the two bottom liners 300 needs to be greater than the size of the upper quartz plate 620 in this direction to ensure that the upper quartz plate 620 can move upward smoothly.

[0036] The bottom liner 300 has two opposite ends and a middle part connected between the two ends in the longitudinal direction.

[0037] The support crossbeam 100 is in a long strip shape. The support crossbeam 100 can be perpendicular to the bottom liner 300. The length direction of the support crossbeam 100 is parallel to the transverse direction. The support crossbeam 100 spans above the two bottom liners 300, and the support crossbeam 100 can be connected to the middle parts of the two bottom liners 300, so that the support crossbeam 100 corresponds to the middle part of the upper quartz plate 620, which is beneficial to ensuring uniform force on the upper quartz plate 620.

[0038] Optionally, the support crossbeam 100 is provided with at least one weight-reducing hole. The at least one weight-reducing hole may be an oblong hole, and the length direction of the weight-reducing hole may be parallel to the transverse direction.

[0039] In other examples, the support crossbeam 100 may also be disposed at the end close to the bottom lining 300. For example, there are two support crossbeams 100, and the two support crossbeams 100 are respectively disposed at the two ends close to the bottom lining 300.

[0040] The support crossbeam 100 is movably connected to the bottom lining 300 through a jacking screw 201. Under a first acting force, the jacking screw 201 can perform a rotational motion. Since the bottom lining 300 is fixed and immovable to the chamber base 610, the jacking screw 201 drives the support crossbeam 100 to move relative to the bottom lining 300 through the rotational motion.

[0041] The support crossbeam 100 is further connected to the adsorbing member 400. The suction cup 410 in the adsorbing member 400 can adsorb the upper quartz plate 620 in the processing equipment. In this way, when the jacking screw 201 drives the support crossbeam 100 to move upward away from the chamber base 610, the support crossbeam 100 can transmit the force to the upper quartz plate 620 through the adsorbing member 400, so that the upper quartz plate 620 moves away from the chamber base 610, and thus the upper quartz plate 620 can be disassembled.

[0042] For the disassembly tooling provided in this embodiment, when the disassembly tooling is in the first working state, the two juxtaposed bottom linings 300 are respectively fixedly connected to the top of the chamber base 610 of the heat treatment equipment. The support crossbeam 100 straddles the two bottom linings 300, and the two ends of the support crossbeam 100 are respectively matched with the bottom linings 300 through the jacking screws 201. In this way, under the first acting force, the jacking screw 201 can drive the support crossbeam 100 to move away from the chamber base 610, so that the support crossbeam 100 drives the upper quartz plate 620 to move away from the chamber base 610 through the suction cup 410, thereby disassembling the upper quartz plate 620. The above disassembly tooling is easy to assemble and simple to operate, improves the convenience of opening the upper quartz plate 620, provides convenience for maintaining the heat treatment equipment, and is conducive to shortening the maintenance time.

[0043] Please refer to Figure 2 , in some embodiments, a first protrusion 301 is provided at the bottom of the bottom lining 300, and the first protrusion 301 extends downward; the chamber base 610 is provided with a first positioning hole 611. The axial direction of the first positioning hole 611 is parallel to the vertical direction, and the orifice of the first positioning hole 611 is located on the upper end surface of the chamber body. The first protrusion 301 can be inserted into the first positioning hole 611, so as to limit the relative movement between the bottom lining 300 and the chamber base 610 in the longitudinal or transverse direction.

[0044] Optionally, in order to simplify the structure, the first protrusion 301 may have one, and the first protrusion 301 is disposed near the middle of the bottom lining 300.

[0045] Optionally, the bottom lining 300 may be provided with a plurality of first protrusions 301, and the plurality of first protrusions 301 are spaced apart. For example, two of the first protrusions 301 are distributed at intervals in the longitudinal direction, which can effectively prevent the bottom lining 300 from moving relative to the chamber base 610.

[0046] In other examples, the bottom lining 300 may also be fixedly connected to the chamber body through at least one first fixing screw, which can not only improve the fixing reliability of the bottom lining 300 and the chamber base 610, but also facilitate the disassembly and assembly of the bottom lining 300.

[0047] Please refer to Figure 2 , in some embodiments, the support cross beam 100 is provided with a first threaded hole 101, and the jacking screw 201 cooperates with the first threaded hole 101; the lower part of the jacking screw 201 abuts against the bottom lining 300; under the first acting force, the jacking screw 201 rotates relative to the bottom lining 300, the jacking screw 201 does not displace in the vertical direction, and the threaded fit between the jacking screw 201 and the support cross beam 100 can make the support cross beam 100 move away from the chamber base 610 in the upward direction. Among them, the rotation direction of the first threaded hole 101 and the rotation direction of the jacking screw 201 can be set according to actual needs as long as the above functions can be achieved.

[0048] In this embodiment, through the above settings, the support cross beam 100 can be jacked up, and then the upper quartz plate 620 can be opened, which is convenient for disassembling the upper quartz plate 620, simplifies the structure of the disassembly tooling, and is convenient for operation.

[0049] In some embodiments, the lower part of the jacking screw 201 is rotatably connected to the bottom lining 300 through a bearing, so that the jacking screw 201 can drive the support cross beam 100 to move away from the chamber base 610 under the first acting force. In this way, during the rotation of the jacking screw 201, the wear on the bottom lining 300 can be reduced.

[0050] In other embodiments, other lifting mechanisms may also be provided between the bottom lining 300 and the support cross beam 100, such as a micro-jack or a linear actuator, etc., as long as the support cross beam 100 can be jacked up.

[0051] In some embodiments, first guiding holes 102 are respectively provided at two ends of the supporting cross beam 100. The axial direction of the first guiding holes 102 is parallel to the vertical direction. The bottom lining plate 300 is provided with second guiding holes 302, and the second guiding holes 302 are arranged corresponding to the first guiding holes 102. The second guiding holes 302 are located in the middle of the bottom lining plate 300. A guiding pin 202 is inserted into the first guiding holes 102, and the guiding pin 202 is in sliding fit with the second guiding holes 302 to guide the supporting cross beam 100 to drive the upper quartz plate 620 to move in the vertical direction.

[0052] Optionally, at least two first guiding holes 102 are provided at the end of the supporting cross beam 100, and two of the first guiding holes 102 are respectively located on opposite sides of the jacking screw 201. For example, at least two first guiding holes 102 located at the end of the supporting cross beam 100 are symmetrically distributed along the transverse central plane of the supporting cross beam 100. The number and distribution of the second guiding holes 302 correspond to those of the first guiding holes 102. Among them, the transverse central plane is parallel to the transverse direction.

[0053] In other examples, one first guiding hole 102 may be respectively provided at two ends of the supporting cross beam 100.

[0054] Optionally, the first guiding hole 102 may be a stepped hole. The first guiding hole 102 has a first hole section located above and a second hole section located below, and the diameter of the first hole section is larger than that of the second hole section. Among them, the first hole section is used to accommodate the head of the guiding pin 202. The second hole section is used to cooperate with the upper part of the rod of the guiding pin 202.

[0055] The second guiding hole 302 may be a through hole or a blind hole, which can be specifically set according to actual needs. It can be understood that when the upper quartz plate 620 is driven by the jacking screw 201 to move upward to the limit position, the lower part of the guiding pin 202 can still maintain the state of being in fit with the second guiding hole 302.

[0056] In this embodiment, through the above settings, it can be ensured that the supporting cross beam 100 moves in the vertical direction, so as to ensure that the upper quartz plate 620 can be smoothly and reliably disassembled by using the disassembly tooling, and the requirement for the vertical dimension of the supporting cross beam 100 is reduced, which is beneficial to reducing the weight of the supporting cross beam 100, and thus beneficial to providing operation convenience.

[0057] In other embodiments, the first guiding hole 102 may also be slidably connected to the guiding pin 202, and the guiding pin 202 may be fixedly connected to the bottom lining plate 300.

[0058] In some embodiments, the adsorbing member 400 has two of the suction cups 410 and a connecting frame 420 that connects the two suction cups 410; the connecting frame 420 is mounted on the support cross beam 100.

[0059] Among them, the suction cup 410 can adopt a vacuum structure as long as it can adsorb the upper quartz plate 620. The suction cup 410 can be generally disk-shaped.

[0060] Optionally, the two suction cups 410 can be symmetrically distributed with respect to the lateral center plane of the upper quartz plate 620. Specifically, the lateral center plane of the support cross beam 100 can coincide with the lateral center planes of the chamber base 610 and the upper quartz plate 620, and the middle part of the connecting frame 420 can correspond to the lateral center plane of the support cross beam 100. Through the above settings, it is beneficial to ensure that the upper quartz plate 620 is uniformly stressed.

[0061] It can be understood that: there can be multiple adsorbing members 400, and two of the adsorbing members 400 can be symmetrically distributed with respect to the longitudinal center plane of the upper quartz plate 620. For example, there are two adsorbing members 400, and the two adsorbing members 400 are symmetrically distributed with respect to the longitudinal center plane of the upper quartz plate 620. Another example is that there are three adsorbing members 400, one of the adsorbing members 400 corresponds to the lateral center plane of the upper quartz plate 620, and the other two adsorbing members 400 are symmetrically distributed with respect to the longitudinal center plane of the upper quartz plate 620.

[0062] Optionally, the connecting frame 420 has a second protruding portion that extends downward; the support cross beam 100 is provided with a second positioning hole, and the second protruding portion cooperates with the second positioning hole to ensure that the suction cup 410 of the adsorbing member 400 can adsorb on a preset area of the upper quartz plate 620.

[0063] Among them, the specific position of the second positioning hole can be set according to actual needs. For example, the support cross beam 100 can be provided with one second positioning hole that passes through the longitudinal center plane of the support cross beam 100. Another example is that the support cross beam 100 can be provided with two second positioning holes that are symmetrically distributed with respect to the longitudinal center plane of the upper quartz plate 620. Still another example is that the support cross beam 100 can be provided with three second positioning holes, one of the positioning holes passes through the longitudinal center plane of the support cross beam 100, and the other two second positioning holes are symmetrically distributed with respect to the longitudinal center plane of the upper quartz plate 620.

[0064] In other examples, the adsorbing member 400 can also have one suction cup 410, and an installation post is connected to the upper end of the suction cup 410, and the installation post can be fixedly connected to the support cross beam 100. For example, the second positioning hole provided on the support cross beam 100 is a threaded hole, and the installation post is provided with an external thread, so that the installation post is threadedly connected to the second positioning hole.

[0065] Please refer to Figure 3 , in some embodiments, in the second working state where the quartz plate 630 is disassembled, the support crossbeam 100 is fixedly connected to the chamber base 610; the support crossbeam 100 is provided with a second threaded hole, and the axial direction of the second threaded hole is parallel to the vertical direction; the disassembly tooling further includes a screwing screw 501 and a pressing rod 502, the screwing screw 501 is matched with the second threaded hole, the lower part of the screw is rotatably connected to the pressing rod 502, and the lower end of the pressing rod 502 abuts against the lower quartz plate 630 in the heat treatment equipment; wherein, under the second acting force, the screwing screw 501 can move downward relative to the support crossbeam 100, so that the screwing screw 501 can drive the lower quartz plate 630 away from the chamber base 610 through the pressing rod 502.

[0066] Both ends of the support crossbeam 100 can be fixedly connected to the chamber base 610 through second fixing screws 503. For example, the chamber base 610 is provided with a third threaded hole, and the second fixing screw 503 passes through the support crossbeam 100 and is matched with the third threaded hole. Among them, in order to simplify the structure of the support crossbeam 100, the first threaded hole 101 or the first guiding hole 102 at the end of the support crossbeam 100 can be used for the second fixing screw 503 to pass through; alternatively, a through hole for the second fixing screw 503 to pass through can also be opened in the support crossbeam 100.

[0067] Among them, the third threaded hole can be arranged close to the longitudinal edge of the chamber base 610, and the third threaded hole is close to the transverse edge of the chamber base 610, so that the support crossbeam 100 is arranged close to the transverse edge of the chamber base 610. Among them, the distance between the support crossbeam 100 and the transverse edge of the chamber base 610 can be set according to actual needs, so that the screwing bolt will not interfere with the inner wall of the chamber base 610.

[0068] The second threaded hole can have one, and this second threaded hole can be arranged close to the longitudinal central plane of the chamber base 610. Or, the second threaded hole can have multiple ones, and two of the second threaded holes can be symmetrically distributed with respect to the longitudinal central plane of the chamber base 610; for example, the second threaded hole can have two, and the two second threaded holes are symmetrically distributed with respect to the longitudinal central plane of the chamber base 610.

[0069] The screwing screw 501 is matched with the second threaded hole, and the lower part of the screwing screw 501 extends downward out of the second threaded hole. The lower part of the screwing screw 501 is connected to the pressing rod 502, and the screwing screw 501 can be rotatably connected to the pressing rod 502, so that the screwing screw 501 can drive the pressing rod 502 to push down against the lower quartz plate 630, and the pressing rod 502 will not rotate with the screwing screw 501, thereby avoiding abrasion of the lower quartz plate 630 caused by the rotational movement of the screwing screw 501.

[0070] Optionally, an elastic buffer structure such as a rubber pad or a rubber sleeve may be provided at the lower part of the pressure rod 502 to further avoid scratching or abrasion of the lower quartz plate 630.

[0071] In this embodiment, the support cross beam 100 may be first installed at a position close to one of the transverse edges of the chamber base 610; then, under the second acting force, the screwing screw 501 can move downward relative to the support cross beam 100, and the screwing screw 501 can drive the lower quartz plate 630 away from the chamber base 610 through the pressure rod 502. Then, the support cross beam 100 is installed at a position close to the other transverse edge of the chamber base 610, and then, under the second acting force, the screwing screw 501 can move downward relative to the support cross beam 100, and the screwing screw 501 can drive the lower quartz plate 630 away from the chamber base 610, so that the lower quartz plate 630 can be disassembled.

[0072] In other examples, the third threaded hole may also be arranged close to the transverse central plane of the chamber base 610, so that the support cross beam 100 can be installed at a position close to the transverse central plane of the chamber base 610, so that the acting force applied by the screwing screw 501 can be transmitted to the position of the lower quartz plate 630 close to the transverse central plane through the pressure rod 502.

[0073] In other embodiments, in the second tooling state, the support cross beam 100 may also be fixedly connected to the chamber base 610 through the bottom lining plate 300, and the specific implementation is similar to the foregoing examples.

[0074] The steps of disassembling the upper quartz plate 620 in the heat treatment equipment by using the disassembling tooling provided in this embodiment include:

[0075] Step a1: Connect the two bottom lining plates 300 to the top of the chamber base 610 respectively; wherein, the two bottom lining plates 300 may be respectively close to two opposite longitudinal edges of the chamber base 610; the two bottom lining plates 300 are respectively matched with the first positioning holes 611 at the top of the chamber base 610 through the first protrusions 301 to limit the relative movement between the bottom lining plate 300 and the chamber base 610;

[0076] Step a2: Horizontally arrange the support crossbeam 100 across two bottom liners 300. Specifically, insert the guiding pins 202 into the first guiding holes 102 of the support crossbeam 100 and the second guiding holes 302 of the bottom liners to ensure the vertical movement of the support crossbeam 100 relative to the bottom liners. Mate the jacking screws 201 with the first threaded holes 101 of the support crossbeam 100, and make the lower parts of the jacking screws 201 abut against the bottom liners 300, so that the jacking screws 201 can drive the support crossbeam 100 to move away from the chamber base 610 under the first acting force.

[0077] Step a3: Install the adsorbing member 400 so that the suction cups 410 of the adsorbing member 400 adsorb the upper quartz plate 620 in the heat treatment equipment. The connecting frame 420 of the adsorbing member 400 can be placed on the support crossbeam 100, and the two suction cups 410 connected by the connecting frame 420 are respectively used to adsorb and install the upper quartz plate 620 on the upper part of the chamber base.

[0078] Step a4: Apply the first acting force to the jacking screws 201 at both ends of the support crossbeam 100, so that the jacking screws 201 can drive the upper quartz plate 620 to move upward through the adsorbing member 400, thereby realizing the disassembly of the upper quartz plate 620.

[0079] The steps for disassembling the lower quartz plate 630 in the heat treatment equipment by using the disassembly tooling provided in this embodiment are as follows:

[0080] Step b1: Fix the support crossbeam 100 to the chamber base 610, and arrange the support crossbeam 100 near one of the transverse edges close to the chamber base 610. The chamber base 610 is provided with a plurality of third threaded holes, which are arranged near the longitudinal edge of the chamber base 610 and near the transverse edge of the chamber base 610.

[0081] Step b2: Install the screwing screws 501 into the second threaded holes of the support crossbeam 100, and install the pressing rods 502 at the lower parts of the screwing screws 501, so that the lower parts of the pressing plates abut against the lower quartz plate 630.

[0082] Step b3: Apply the second acting force to the screwing screws 501. The screwing screws 501 can move downward relative to the support crossbeam 100, and the screwing screws 501 can drive one side of the lower quartz plate 630 to move away from the chamber base 610 through the pressing rods 502.

[0083] Step b4: fixedly connect the support cross beam 100 to the chamber base body 610, and arrange the support cross beam 100 near the other transverse edge of the chamber base body 610, and repeat steps b2 to b3, so that the screwing of the screw 501 can drive the other side of the lower quartz plate 630 away from the chamber base body 610 through the pressure rod 502, realizing the disassembly of the lower quartz plate 630.

[0084] The disassembly tooling of this embodiment is easy to assemble and simple to operate, and can quickly open the upper quartz plate 620 and the lower quartz plate 630, providing convenience for the maintenance of the heat treatment equipment; among them, the opening force that can be provided by the screw in this embodiment is large and stable, which can further improve the operation convenience.

[0085] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0086] In the description of the present disclosure, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "top", "bottom", "inner", "outer", "axial", "longitudinal", "transverse", "vertical", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present disclosure.

[0087] In addition, the terms "first", "second", etc. used in the embodiments of the present disclosure are only for descriptive purposes, and cannot be understood as indicating or implying relative importance, or implicitly indicating the number of technical features indicated in this embodiment. Thus, the features defined with terms such as "first" and "second" in the embodiments of the present disclosure can clearly or implicitly indicate that at least one such feature is included in this embodiment. In the description of the present disclosure, the meaning of the word "plurality" is at least two or more, such as two, three, four, etc., unless otherwise specifically defined in the embodiment.

[0088] In this disclosure, unless otherwise clearly specified or limited in the embodiments, the terms "installed", "connected", "coupled", "fixed", etc. appearing in the embodiments shall be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integral one. It can be understood that it can also be a mechanical connection, an electrical connection, etc. Of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the communication inside two elements, or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this disclosure can be understood according to specific implementation situations.

[0089] In this disclosure, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0090] Although the embodiments of the present disclosure have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present disclosure. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present disclosure.

Claims

1. A disassembly tool, comprising: a support beam located above a chamber base of the heat treatment equipment; Two bottom lining plates are arranged side by side, and the two bottom lining plates are respectively connected to the top of the chamber base of the heat treatment equipment; when the disassembly tool is in the first working state, the support beam spans across the two bottom lining plates, and the two ends of the support beam are respectively matched with the bottom lining plates through jacking screws; The adsorption component is connected to the supporting beam when the disassembly tool is in the first working state, and the suction cup in the adsorption component is used to adsorb the upper quartz plate installed on the upper part of the chamber base; wherein, under the first force, the lifting screw can drive the supporting beam to move away from the chamber base, so that the supporting beam drives the upper quartz plate away from the chamber base through the suction cup.

2. The disassembly tool according to claim 1, wherein: The supporting crossbeam is provided with a first threaded hole, and the lifting screw cooperates with the first threaded hole; the lower part of the lifting screw abuts against the bottom lining plate, so that the lifting screw can drive the supporting crossbeam to move away from the chamber base under the first force.

3. The disassembly tool according to claim 1, wherein: The lower part of the jacking screw is rotatably connected to the bottom lining plate through a bearing, so that the jacking screw can drive the supporting beam to move away from the chamber base under the first force.

4. The disassembly tool according to claim 1, wherein: A first protrusion is disposed at the bottom of the bottom lining plate. The first protrusion is extended downward and is used to cooperate with a first positioning hole at the top of the chamber base.

5. The disassembly tool according to claim 1, wherein: The two ends of the supporting crossbeam are respectively provided with first guide holes, and the bottom lining plate is provided with second guide holes, the second guide holes are arranged corresponding to the first guide holes, and the axial directions of the first guide holes and the second guide holes are parallel to the vertical direction; A guide pin is inserted through the first guide hole, and the guide pin is slidably matched with the second guide hole to guide the supporting beam to drive the upper quartz plate to move vertically.

6. The disassembly tool according to claim 5, wherein: At least two first guide holes are provided at the end of the supporting crossbeam, wherein the two first guide holes are respectively located at two opposite sides of the jacking screw.

7. The disassembly tool according to claim 1, wherein: The bottom lining plate has a middle portion located between the two end portions, and the jacking screw is engaged with the middle portion of the bottom lining plate.

8. The disassembly tool according to claim 1, wherein: The adsorption component comprises two suction cups and a connecting frame connecting the two suction cups; the connecting frame is erected on the supporting crossbeam.

9. The disassembly tool according to claim 8, wherein: The connecting frame has a second protrusion, and the second protrusion is extended downward; the supporting crossbeam is provided with a second positioning hole, and the second protrusion cooperates with the second positioning hole.

10. The disassembly tool according to claim 1, wherein: In the second working state, the support beam is fixedly connected to the chamber base; the support beam is provided with a second threaded hole, and the axial direction of the second threaded hole is parallel to the vertical direction; The disassembly tool also includes a screw and a pressure rod, wherein the screw cooperates with the second threaded hole, the lower part of the screw is rotatably connected to the pressure rod, and the lower end of the pressure rod is against the lower quartz plate in the heat treatment equipment; wherein, under the second force, the screw can move downward relative to the supporting beam, so that the screw can drive the lower quartz plate away from the chamber base through the pressure rod.

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