Force applying device and workpiece machining device

Abstract

The invention provides a force applying device and a workpiece processing device, which can effectively press a cutting blade even for a workpiece with a complex processing shape. A workpiece machining device (5) for machining a workpiece (W) using a cutting blade (69) is provided with: a cutting blade angle changing mechanism (9) capable of changing the angle of the cutting blade (69) with respect to the direction of travel in accordance with the shape of the workpiece (W); and a first cutting blade angle urging cylinder (75a) and a second cutting blade angle urging cylinder (75b) that urge the cutting blade angle changing mechanism (9) against the direction in which the angle of the cutting blade (69) is changed.

Description

[0001] This invention is a divisional application of the invention application with the application number 202080106562.8, the invention title "Workpiece processing device and ultrasonic processing device equipped with the same", and the application date of November 17, 2020. Technical Field

[0002] The present invention relates to a workpiece processing device for processing workpieces and an ultrasonic processing device equipped with the workpiece processing device. Background Art

[0003] Conventionally, a workpiece processing device for processing workpieces and an ultrasonic processing device have been known.

[0004] For example, Patent Document 1 and Patent Document 2 describe an ultrasonic processing device that uses a cutting tool 10 to process a workpiece. The ultrasonic processing device swings the cutting tool 10 according to the shape of the workpiece, and presses the cutting tool 10 against the surface of the workpiece to be processed by applying a force against the swinging mechanism from the swinging angle direction of the cutting tool 10 through a spiral spring mechanism 84 (refer to Figure 13 and Figure 14 etc. of Comparative Document 1, Figure 13 and Figure 14 etc. of Cited Document 2).

[0005] Prior Art Documents

[0006] Patent Documents

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2008-273212

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 2008-030251 Summary of the Invention

[0009] Problems to be Solved by the Invention

[0010] However, since the cutting tools described in Cited Document 1 and Cited Document 2 only swing by a swinging mechanism, although there is no problem in pressing in the swinging direction with respect to the workpiece to be processed, it is very likely that a workpiece to be processed with a complex shape cannot be dealt with.

[0011] That is, since the cutting tools described in Cited Document 1 and Cited Document 2 only swing by a swinging mechanism, when the shape of the workpiece to be processed is complex, there is a problem that the cutting tool cannot be pressed along the surface of the workpiece to be processed.

[0012] The present invention is completed in order to address the above problems of the prior art, and its object is to provide a workpiece processing apparatus that can effectively press a cutting tool even for a workpiece (hereinafter referred to as a "workpiece") with a complex processing shape, and an ultrasonic processing apparatus that includes the workpiece processing apparatus and can more precisely process a workpiece with a complex processing shape.

[0013] Solutions for Solving the Problems

[0014] To solve the above problems, a first aspect of the present invention is a workpiece processing apparatus that processes a workpiece using a cutting tool, and the workpiece processing apparatus is characterized by including: a cutting tool angle changing mechanism that can change the angle of the cutting tool relative to the traveling direction according to the shape of the workpiece; and a cutting tool angle biasing mechanism that biases the cutting tool angle changing mechanism against the direction of change of the angle of the cutting tool.

[0015] In addition, a second aspect of the present invention is characterized in that, in the workpiece processing apparatus of the first aspect, the cutting tool angle biasing mechanism biases the cutting tool angle changing mechanism with a substantially constant acting force regardless of the angle of the cutting tool.

[0016] In addition, a third aspect of the present invention is characterized in that, in the workpiece processing apparatus of the first aspect or the second aspect, it includes: a cutting tool position changing mechanism that can change the position of the cutting tool relative to a specific direction of the workpiece according to the shape of the workpiece; and a cutting tool position biasing mechanism that biases the cutting tool position changing mechanism against the direction of change of the position of the cutting tool.

[0017] In addition, a fourth aspect of the present invention is characterized in that, in the workpiece processing apparatus of the first aspect or the second aspect, it includes a cutting tool angle locking mechanism that fixes the angle.

[0018] In addition, a fifth aspect of the present invention is characterized in that, in the workpiece processing apparatus of the third aspect, it includes a cutting tool angle locking mechanism that fixes the angle.

[0019] In addition, a sixth aspect of the present invention is characterized in that, in the workpiece processing apparatus of the third aspect or the fifth aspect, it includes a cutting tool position locking mechanism that fixes the position relative to the specific direction of the workpiece.

[0020] In addition, a seventh aspect of the present invention is an ultrasonic processing apparatus characterized by including the workpiece processing apparatus of any one of the first aspect to the sixth aspect, and causing the cutting tool to perform ultrasonic vibration in a direction intersecting the direction of change of the angle to process the workpiece.

[0021] Further, the ultrasonic machining apparatus according to the eighth aspect of the present invention is characterized by including the workpiece machining apparatus according to the third, fifth, or sixth aspect, and causing the cutting tool to perform ultrasonic vibration in a direction intersecting the specific direction with respect to the workpiece to machine the workpiece.

[0022] Advantageous Effects of the Invention

[0023] The workpiece machining apparatus according to the first aspect of the present invention relates to an apparatus for machining a workpiece using a cutting tool. In particular, since it includes: a cutting tool angle changing mechanism that can change the angle of the cutting tool with respect to the traveling direction according to the shape of the workpiece; and a cutting tool angle biasing mechanism that biases the cutting tool angle changing mechanism against the direction of change of the angle of the cutting tool, it is possible to effectively press the cutting tool to machine even a workpiece having a complex machining shape.

[0024] Further, in the workpiece machining apparatus according to the second aspect of the present invention, in the workpiece machining apparatus according to the first aspect, the cutting tool angle biasing mechanism biases the cutting tool angle changing mechanism with a substantially constant acting force regardless of the angle of the cutting tool. Therefore, in addition to the effects of the workpiece machining apparatus according to the first aspect, it is possible to more effectively press the cutting tool during machining even for a workpiece having a complex machining shape.

[0025] Further, the workpiece machining apparatus according to the third aspect of the present invention, in the workpiece machining apparatus according to the first or second aspect, includes: a cutting tool position changing mechanism that can change the position of the cutting tool with respect to a specific direction of the workpiece according to the shape of the workpiece; and a cutting tool position biasing mechanism that biases the cutting tool position changing mechanism against the direction of change of the position of the cutting tool. Therefore, in addition to the effects of the workpiece machining apparatus according to the first or second aspect, it is also possible to more effectively press the cutting tool against a workpiece having a complex machining shape for machining.

[0026] Further, the workpiece machining apparatus according to the fourth aspect of the present invention, in the workpiece machining apparatus according to the first or second aspect, since it includes a cutting tool angle locking mechanism with a fixed angle, in addition to the effects of the workpiece machining apparatus according to the first or second aspect, it is also possible to select a mechanism for effectively pressing the cutting tool according to the shape of the workpiece to machine the workpiece.

[0027] Further, the workpiece machining apparatus according to the fifth aspect of the present invention, in the workpiece machining apparatus according to the third aspect, since it includes a cutting tool angle locking mechanism with a fixed angle, in addition to the effects of the workpiece machining apparatus according to the third aspect, it is also possible to select a mechanism for effectively pressing the cutting tool according to the shape of the workpiece to machine the workpiece.

[0028] In addition, in the workpiece processing apparatus according to the sixth aspect of the present invention, in the workpiece processing apparatus according to the third or fifth aspect, since there is a cutting tool position locking mechanism that fixes the position in a specific direction with respect to the workpiece, in addition to the effects of the workpiece processing apparatus according to the third or fifth aspect, it is also possible to further select a mechanism that effectively presses the cutting tool according to the shape of the workpiece to process the workpiece.

[0029] In addition, in the ultrasonic machining apparatus according to the seventh aspect of the present invention, since it includes the workpiece processing apparatus according to any one of the first to sixth aspects, and the cutting tool performs ultrasonic vibration in a direction intersecting the direction of angle change to machine the workpiece, it is possible to machine the workpiece more precisely.

[0030] Moreover, in the ultrasonic machining apparatus according to the eighth aspect of the present invention, since it includes the workpiece processing apparatus according to the third, fifth, or sixth aspect, and the cutting tool performs ultrasonic vibration in a direction intersecting a specific direction with respect to the workpiece to machine the workpiece, it is possible to machine the workpiece more precisely. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is an overall side view of the ultrasonic machining apparatus according to an embodiment of the present invention.

[0032] Figure 2 is an overall perspective view of the workpiece processing apparatus included in the ultrasonic machining apparatus of the present embodiment.

[0033] Figure 3 is Figure 2 a sectional view taken along line A-A of

[0034] Figure 4 is Figure 2 a sectional view taken along line B-B of, showing a state (angle 0 degrees) where the cutting tool angle applying cylinder is turned on and no load is applied to the cutting tool.

[0035] Figure 5 is Figure 2 a sectional view taken along line C-C of, showing a state (position 0 mm) where the cutting tool position applying cylinder is turned on and no load is applied to the cutting tool.

[0036] Figure 6 is a block diagram of the ultrasonic machining apparatus of the present embodiment.

[0037] Figure 7 is a block diagram of the main controller of the ultrasonic machining apparatus of the present embodiment.

[0038] Figure 8 is a flowchart of the main program in the ultrasonic machining apparatus of the present embodiment.

[0039] Figure 9 This is a flowchart of the ultrasonic machining program in the ultrasonic machining apparatus of the present embodiment.

[0040] Figure 10 This is a diagram showing the state where the cylinder for applying force to the cutting tool angle is turned on, a load is applied to the cutting tool, and the cutting tool has rotated by the maximum angle in the counterclockwise direction (angle +θ1 degrees) in the B-B cross-sectional view of Figure 2 .

[0041] Figure 11 This is a diagram showing the state where the cylinder for applying force to the cutting tool angle is turned on, a load is applied to the cutting tool, and the cutting tool has rotated by the maximum angle in the clockwise direction (angle -θ1 degrees) in the B-B cross-sectional view of Figure 2 .

[0042] Figure 12 This is a diagram showing the state where the cylinder for locking the cutting tool angle is turned on and the angle of the cutting tool is fixed (angle 0 degrees) in the B-B cross-sectional view of Figure 2 .

[0043] Figure 13 This is a diagram of the cutting tool installed as viewed from below, and is an explanatory diagram for explaining the relationship between the cutting tool and the rotation direction of the cutting tool.

[0044] Figure 14 This is a diagram showing the state where the cylinder for applying force to the cutting tool position is turned on, a load is applied to the cutting tool, and the cutting tool has moved by the maximum displacement in the +X direction (angle +X1 mm) in the C-C cross-sectional view of Figure 2 .

[0045] Figure 15 This is a diagram showing the state where the cylinder for applying force to the cutting tool position is turned on, a load is applied to the cutting tool, and the cutting tool has moved by the maximum displacement in the -X direction (angle -X1 mm) in the C-C cross-sectional view of Figure 2 .

[0046] Figure 16 This is a diagram showing the state where the cylinder for locking the cutting tool position is turned on and the position of the cutting tool is fixed (displacement 0 mm) in the C-C cross-sectional view of Figure 2 . Specific Embodiments

[0047] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0048] (Embodiment)

[0049] First, embodiments of the present invention will be described.

[0050] Figure 1It is an overall side view of an ultrasonic machining apparatus according to an embodiment of the present invention.

[0051] As Figure 1 shown, the ultrasonic machining apparatus 1 of the present embodiment includes a workbench 10, an articulated robot 3 fixed to the workbench 10, a workpiece machining device 5 rotatably connected to the front end of the articulated robot 3, a workpiece setting table 16 provided on the workbench 10, an oscillator 2 disposed on the workbench 10, a main controller 4 and a robot controller 6, and an air compressor 14 disposed outside the workbench 10 (see Figure 6 ).

[0052] Moreover, the ultrasonic machining apparatus 1 of the present embodiment uses an oscillator 71 to ultrasonically vibrate a cutting tool 69 having a tapered front end with both sides of the cross section ground and connected to the front end of the workpiece machining device 5 in the vertical direction in the drawing, thereby machining a workpiece W provided on the workpiece setting table 16.

[0053] In addition, an operation panel 8 is provided on the workpiece setting table 16, and an operator of the ultrasonic machining apparatus 1 can operate the ultrasonic machining apparatus 1 by operating the operation panel 8.

[0054] The articulated robot 3 is a normal 5-axis articulated robot that operates according to instructions from the robot controller 6, and can freely change the position and angle of the workpiece machining device 5 and face the workpiece W.

[0055] The articulated robot 3 has five axes, namely: a first rotation axis 44 for rotating the second base 34 relative to the first base 32; a second rotation axis 46 for rotating the lower arm portion (lower arm) 36 forward and backward relative to the second base 34; a third rotation axis 48 for rotating the middle arm portion (middle arm) 38 up and down relative to the lower arm portion 36; a fourth rotation axis 50 for rotating the upper arm portion (upper arm) 40 up and down relative to the middle arm portion 38; and a fifth rotation axis 52 for coaxially rotating the rotating portion 42 relative to the upper arm portion 40.

[0056] The articulated robot 3 is electrically connected to the robot controller 6 through a cable (not shown), and the robot controller 6 is electrically connected to the main controller 4 (see Figure 6 ).

[0057] Figure 2 It is an overall perspective view of the workpiece machining device 5 included in the ultrasonic machining apparatus 1 of the present embodiment, Figure 3 is Figure 2 a sectional view taken along line A-A of Figure 4 is Figure 2The B-B cross-sectional view shows the state where the cylinder for applying force to the cutting tool angle is connected and no load is applied to the cutting tool (angle 0 degrees). Figure 5 is Figure 2 The C-C cross-sectional view shows the state where the cylinder for applying force to the cutting tool position is connected and no load is applied to the cutting tool (angle 0 degrees).

[0058] The workpiece processing device 5 uses the vibrator 71 electrically connected to the oscillator 2 via the cable 73 to cause the cutting tool 69 connected to its front end to perform ultrasonic vibration, thereby processing the workpiece W provided on the workpiece setting table 16.

[0059] As Figures 2 to 5 shown, the workpiece processing device 5 includes a cutting tool angle changing mechanism 9 at the lower part, a first cutting tool angle applying cylinder 75a, a second cutting tool angle applying cylinder 75b, and a cutting tool angle locking cylinder 77, a cutting tool position changing mechanism 7 at the upper part, a first cutting tool position applying cylinder 79a, a second cutting tool position applying cylinder 79b, and a cutting tool position locking cylinder 81.

[0060] As Figure 3 and Figure 4 shown, the cutting tool angle changing mechanism 9 includes: a base shaft 11 fixed to the workpiece processing device 5; a rotating body 13 rotatably connected to the base shaft 11 and connected to the vibrator 71 and the cutting tool 69; a first protrusion 83 provided on the rotating body 13 and capable of abutting against a third protrusion 87 described later; a second protrusion 85 provided on the rotating body 13 on the side opposite to the first protrusion 83 and capable of abutting against a fourth protrusion 89 described later; a recess 91 provided on the rotating body 13 and engaged with a locking pin 39 described later; and a gap portion 15 formed to allow the rotating body 13 to rotate.

[0061] The first cutting tool angle applying cylinder 75a is a device that applies force to the rotating body 13 to resist the rotational force of the rotating body 13 looking down and rotating counterclockwise, and includes a first housing 17 having a gap portion 21 inside, a piston 19 slidably disposed in the gap portion 21 of the first housing 17, and a third protrusion 87 connected to the front end of the piston 19. The gap portion 21 of the first housing 17 and the air compressor 14 (refer to Figure 6 ) are communicated through a connecting pipe 23.

[0062] In addition, the cylinder 75b for applying force to the second cutting blade angle is a device that applies force to the rotating body 13 to resist the rotational force of the rotating body 13 that rotates clockwise when viewed from above, and includes a second housing 25 having a void portion 29 therein, a piston 27 slidably disposed within the void portion 29 of the second housing 25, and a fourth protrusion 89 connected to the front end of the piston 27. The void portion 29 of the second housing 25 communicates with an air compressor 14 (refer to Figure 6 ) through a connecting pipe 31.

[0063] In addition, the cylinder 75a for applying force to the first cutting blade angle, the cylinder 75b for applying force to the second cutting blade angle, the connecting pipe 23, the connecting pipe 31, and the air compressor 14 constitute the "cutting blade angle force application mechanism" of the present invention.

[0064] Furthermore, the cylinder 77 for locking the cutting blade angle stops the rotation of the rotating body 13, and includes a third housing 33 having a void portion 37 therein (refer to Figure 12 ), a piston 35 slidably disposed within the void portion 37 of the third housing 33, and a locking pin 39 connected to the front end of the piston 35. The void portion 37 of the third housing 33 communicates with the air compressor 14 (refer to Figure 6 ) through a connecting pipe 41 and a connecting pipe 43.

[0065] In addition, the cylinder 77 for locking the cutting blade angle, the connecting pipe 41, the connecting pipe 43, and the air compressor 14 constitute the "cutting blade angle locking mechanism" of the present invention.

[0066] As shown in Figure 3 and Figure 5 , the cutting blade position changing mechanism 7 includes: a base 92 fixed to the workpiece processing device 5; a moving body 90 movably connected to the base 92; a seventh protrusion 97 provided on the moving body 90 and capable of abutting against a fifth protrusion 95 described later; an eighth protrusion 98 provided on the moving body 90 and capable of abutting against a sixth protrusion 99 described later; and a recess 93 provided on the moving body 90 for fitting a locking pin 67 described later.

[0067] The cylinder 79a for applying force to the first cutting blade position includes a fourth housing 45 having a void portion 49 therein, a piston 47 slidably disposed within the void portion 49 of the fourth housing 45, and a fifth protrusion 95 connected to the front end of the piston 47. The void portion 49 of the fourth housing 45 communicates with the air compressor 14 (refer to Figure 6 ) through a connecting pipe 51.

[0068] In addition, the cylinder 79b for applying force to the second cutter position includes: a fifth housing 53 having a void portion 57 inside; a piston 55 slidably disposed within the void portion 57 of the fifth housing 53; and a sixth protrusion 99 connected to the front end of the piston 55. The void portion 57 of the fifth housing 53 communicates with an air compressor 14 (refer to Figure 6 ) through a connecting pipe 59.

[0069] In addition, the cylinder 79a for applying force to the first cutter position, the cylinder 79b for applying force to the second cutter position, the connecting pipe 51, the connecting pipe 59, and the air compressor 14 constitute the "cutter position force application mechanism" of the present invention.

[0070] Furthermore, the cylinder 81 for locking the cutter position includes: a sixth housing 61 having a void portion 65 inside (refer to Figure 16 ); a piston 63 slidably disposed within the void portion 65 of the sixth housing 61 (refer to Figure 16 ); and a locking pin 67 connected to the front end of the piston 63. The void portion 65 of the sixth housing 61 (refer to Figure 16 ) and the air compressor 14 (refer to Figure 6 ) communicate through a connecting pipe 94 and a connecting pipe 96.

[0071] In addition, the cylinder 81 for locking the cutter position, the connecting pipe 94, the connecting pipe 96, and the air compressor 14 constitute the "cutter position locking mechanism" of the present invention.

[0072] Next, a block diagram of the ultrasonic machining apparatus 1 of the present embodiment will be described.

[0073] Figure 6 is a block diagram of the ultrasonic machining apparatus of the present embodiment, Figure 7 is a block diagram of the main controller of the ultrasonic machining apparatus of the present embodiment.

[0074] In Figure 6 , the ultrasonic machining apparatus 1 includes: a main controller 4 electrically connected to a power supply 12; an air compressor 14 electrically connected to the main controller 4 for driving the cylinder 75a for applying force to the first cutter angle, the cylinder 75b for applying force to the second cutter angle, the cylinder 77 for locking the cutter angle, the cylinder 79a for applying force to the first cutter position, the cylinder 79b for applying force to the second cutter position, and the cylinder 81 for locking the cutter position; a robot controller 6 electrically connected to the main controller 4 for controlling the multi-joint robot 3; an oscillator 2 for driving the vibrator 71; and an operation panel 8 for receiving input from an operator of the apparatus.

[0075] In addition, in the present embodiment, the first cutter angle biasing cylinder 75a and the second cutter angle biasing cylinder 75b are sometimes collectively referred to as the "cutter angle biasing cylinder 75", and the first cutter position biasing cylinder 79a and the second cutter position biasing cylinder 79b are sometimes collectively referred to as the "cutter position biasing cylinder 79".

[0076] In addition, in Figure 7 , the main controller 4 includes a CPU (Central Processing Unit) 22, a RAM (Random Access Memory) 24 connected to the CPU 22 in an input / output capable manner, and a ROM (Read Only Memory) 26 connected to the CPU 22 in an input / output capable manner.

[0077] The RAM 24 includes: a machining data table 24a that stores machining data for machining the workpiece W; and a machining mode data table 24b that stores setting items corresponding to the machining modes described later when the ultrasonic machining device 1 machines the workpiece W.

[0078] In addition, the ROM 26 includes a main program 26a that controls the overall operation of the ultrasonic machining device 1 of the present embodiment, and an ultrasonic machining program 26b that performs ultrasonic machining of the ultrasonic machining device 1 according to the machining modes described later.

[0079] Next, the operation of the ultrasonic machining device 1 having the above structure will be described.

[0080] Figure 8 is a flowchart of the main program in the ultrasonic machining device of the present embodiment, Figure 9 is a flowchart of the ultrasonic machining program in the ultrasonic machining device of the present embodiment.

[0081] As described above, the ultrasonic machining device 1 of the present embodiment uses the oscillator 71 to cause the cutter 69 connected to the front end of the workpiece machining device 5 to perform ultrasonic vibration, thereby machining the workpiece W provided on the workpiece setting table 16.

[0082] In addition, the ultrasonic machining device 1 of the present embodiment has four machining modes as the machining modes for machining the workpiece W.

[0083] Specifically, the ultrasonic processing device 1 of the present embodiment includes: a first processing mode in which the cutting tool 69 is forced while the cutting tool angle applying cylinder 75 and the cutting tool position applying cylinder 79 are turned on, and the workpiece W is processed; a second processing mode in which the cutting tool 69 is forced while the cutting tool angle locking cylinder 77 and the cutting tool position applying cylinder 79 are turned on, and the workpiece W is processed; a third processing mode in which the cutting tool 69 is forced while the cutting tool angle applying cylinder 75 and the cutting tool position locking cylinder 81 are turned on, and the workpiece W is processed; and a fourth processing mode in which the cutting tool 69 is not forced while the cutting tool angle locking cylinder 77 and the cutting tool position locking cylinder 81 are turned on, and the workpiece W is processed.

[0084] In Figure 8 when the operator of the device turns on the power switch, inputs the number of workpieces W to be processed and the processing mode through the operation buttons on the operation panel 8, and presses the start button, the ultrasonic processing device 1 moves the arm of the multi-joint robot 3 to the initial position (S1), sets the number of workpieces W to be processed (S3), extracts the setting items from the processing mode data table 24b based on the input processing mode (S5), and executes the ultrasonic processing program described later (S7).

[0085] (First processing mode)

[0086] First, it will be described as follows: The first processing mode in which the cutting tool 69 is forced while the cutting tool angle applying cylinder 75 and the cutting tool position applying cylinder 79 are turned on is set for processing the workpiece W. In addition, the first processing mode is the best processing mode when processing a workpiece W with a complex processing shape.

[0087] In Figure 9 in the ultrasonic processing program, first, after obtaining the processing data from the processing data table 24a (S21), it is determined whether the processing mode is the cutting tool angle applying mode (S23).

[0088] Since the first processing mode uses the cutting tool angle applying mode (S23: Yes), the first cutting tool angle applying cylinder 75a and the second cutting tool angle applying cylinder 75b are turned on (S25), and it is determined whether the processing mode is the cutting tool position applying mode (S29).

[0089] Since the first processing mode uses the cutting tool position applying mode (S29: Yes), the first cutting tool position applying cylinder 79a and the second cutting tool position applying cylinder 79b are turned on (S31).

[0090] In addition, the above Figure 4It indicates the state (angle 0 degrees) where the first cutter angle applying cylinder 75a and the second cutter angle applying cylinder 75b are turned on and no load is applied to the cutter.

[0091] Refer to Figure 4 For a specific description, if the first cutter angle applying cylinder 75a is turned on, air is injected from the air compressor 14 via the connecting pipe 23 into the gap portion 21 of the first housing 17 of the first cutter angle applying cylinder 75a. Then, the piston 19 descends downward in the figure, and the third protrusion 87 connected to the front end of the piston 19 abuts against the first protrusion 83 provided on the rotating body 13.

[0092] In addition, if the second cutter angle applying cylinder 75b is turned on, air is injected from the air compressor 14 via the connecting pipe 31 into the gap portion 29 of the second housing 25 of the second cutter angle applying cylinder 75b. Then, the piston 27 ascends upward in the figure, and the fourth protrusion 89 connected to the front end of the piston 27 abuts against the second protrusion 85 provided on the rotating body 13.

[0093] In this way, when the first cutter angle applying cylinder 75a and the second cutter angle applying cylinder 75b are turned on, the rotating body 13 can rotate in the clockwise and counterclockwise directions in the figure relative to the base shaft 11. However, the rotating body 13 is applied with force by the third protrusion 87 connected to the front end of the piston 19 and the fourth protrusion 89 connected to the front end of the piston 27. Thus, if there is no load applied to the cutter 69, the cutter 69 becomes a state of being stable at the position of angle 0 degrees (refer to Figure 13 ).

[0094] Returning to the ultrasonic processing program, after the setting of the processing mode is completed, next, it is determined whether the workpiece W is set on the workpiece setting table 16 (S35). If the workpiece W is not set on the workpiece setting table 16 (S35: No), wait until the workpiece W is set on the workpiece setting table 16. If the workpiece W is set on the workpiece setting table 16 (S35: Yes), the oscillator 2 is driven to make the vibrator 71 connected to the cutter 69 perform ultrasonic vibration.

[0095] Next, each arm of the multi-joint robot 3 is moved so that the cutter 69 is located at the machining start position relative to the workpiece W (S39), and the cutter 69 is moved to perform ultrasonic machining on the workpiece W (S41).

[0096] Here, in the first processing mode where the cutter 69 is applied with force while the cutter angle applying cylinder 75 and the cutter position applying cylinder 79 are turned on to machine the workpiece W, the operations inside the workpiece machining device 5 are described.

[0097] Figure 10 It shows the state where, in the B-B cross-sectional view of Figure 2 , the cylinder for applying force to the cutting blade angle is turned on, a load is applied to the cutting blade, and the cutting blade has rotated counterclockwise by the maximum angle (angle +θ1 degrees). Figure 11 It shows the state where, in the B-B cross-sectional view of Figure 2 , the cylinder for applying force to the cutting blade angle is turned on, a load is applied to the cutting blade, and the cutting blade has rotated clockwise by the maximum angle (angle -θ1 degrees). Figure 13 It is a view of the installed cutting blade observed from below and is an explanatory view showing the relationship between the cutting blade and the cutting blade rotation direction.

[0098] As described above, Figure 4 it shows the state where no load is applied to the cutting blade 69. However, in the first processing mode, during the machining of the workpiece W by the workpiece machining device 5, when the cutting blade 69 receives a rotational load from the workpiece W, the cutting blade 69 is configured to be able to rotate within a range of ± several degrees (maximum ±5°).

[0099] However, when the rotating body 13 is turned on through the first cutting blade angle applying cylinder 75a and the second cutting blade angle applying cylinder 75b, the third protrusion 87 connected to the front end of the piston 19 abuts against the first protrusion 83 provided on the rotating body 13, and the fourth protrusion 89 connected to the front end of the piston 27 abuts against the second protrusion 85 provided on the rotating body 13. Thus, it is always in a state of being biased toward the position of angle 0 degrees (refer to Figure 13 ), and it can be said that it is correct that it can rotate in this state.

[0100] For example, as Figure 10 shown, in the state where the first cutting blade angle applying cylinder 75a and the second cutting blade angle applying cylinder 75b are turned on, a rotational load is applied to the cutting blade 69, and the first protrusion 83 provided on the rotating body 13 continuously presses the third protrusion 87 connected to the front end of the piston 19. When the cutting blade 69 rotates counterclockwise by the maximum angle (angle +θ1 degrees) in the drawing, the first protrusion 83 provided on the rotating body 13 abuts against the third protrusion 87 connected to the front end of the piston 19, but the second protrusion 85 provided on the rotating body 13 does not abut against the fourth protrusion 89 connected to the front end of the piston 27.

[0101] When the first protrusion 83 provided on the rotating body 13 continuously presses the third protrusion 87 connected to the front end of the piston 19, the first protrusion 83 abutting against the third protrusion 87 is biased with a force f1 from the third protrusion 87 in the -θ direction. In addition, this force f1 does not change according to the angle of the rotating body 13 and is constant as long as the first protrusion 83 abuts against the third protrusion 87.

[0102] On the other hand, for example, as Figure 11 shown, in a state where the cylinder 75a for applying a force to the first cutter angle and the cylinder 75b for applying a force to the second cutter angle are turned on, a rotational load is applied to the cutter 69, and the second protrusion 85 provided on the rotating body 13 continuously presses the fourth protrusion 89 connected to the front end of the piston 27. When the cutter 69 rotates by the maximum angle (angle -θ1 degrees) in the clockwise direction in the drawing, the second protrusion 85 provided on the rotating body 13 abuts against the fourth protrusion 89 connected to the front end of the piston 27, but the first protrusion 83 provided on the rotating body 13 does not abut against the third protrusion 87 connected to the front end of the piston 19.

[0103] When the second protrusion 85 provided on the rotating body 13 continuously presses the fourth protrusion 89 connected to the front end of the piston 27, the second protrusion 85 abutting against the fourth protrusion 89 is applied with a force f1 in the +θ direction from the fourth protrusion 89. In addition, this force f1 does not change according to the angle of the rotating body 13 and is constant as long as the second protrusion 85 abuts against the fourth protrusion 89.

[0104] Figure 14 It is a diagram showing a state (angle +X1 mm) in which the cylinder for applying a force to the cutter position is turned on, a load is applied to the cutter, and the cutter moves by the maximum displacement in the +X direction in the C-C cross-sectional view of Figure 2 . Figure 15 It is a diagram showing a state (angle -X1 mm) in which the cylinder for applying a force to the cutter position is turned on, a load is applied to the cutter, and the cutter moves by the maximum displacement in the -X direction in the C-C cross-sectional view of Figure 2 .

[0105] As described above, Figure 5 shows a state (position 0 mm) in which the first cylinder 79a for applying a force to the cutter position and the second cylinder 79b for applying a force to the cutter position are turned on and no load is applied to the cutter. However, in the first processing mode, when the cutter 69 receives a load from the workpiece W during the machining of the workpiece W by the workpiece machining device 5, the cutter 69 can move within a range of ± several mm (maximum ±5 mm).

[0106] However, when the first cylinder 79a for applying a force to the cutter position and the second cylinder 79b for applying a force to the cutter position are turned on, the seventh protrusion 97 provided on the moving body 90 abuts against the fifth protrusion 95 connected to the front end of the piston 47, and the eighth protrusion 98 provided on the moving body 90 abuts against the sixth protrusion 99 connected to the front end of the piston 55. As a result, the moving body 90 is in a state of being always biased toward the position 0 mm (refer to Figure 14 ), and it can be said that it can move correctly in this state.

[0107] For example, as Figure 14 shown, in a state where the cylinder 79a for applying force at the first cutter position and the cylinder 79b for applying force at the second cutter position are turned on, a load is applied to the cutter 69, and the eighth protrusion 98 provided on the moving body 90 continuously presses the sixth protrusion 99 connected to the front end of the piston 55. When the cutter 69 moves to the maximum displacement in the +X direction (angle +X 1 mm), the eighth protrusion 98 provided on the moving body 90 abuts against the sixth protrusion 99 connected to the front end of the piston 55, but the seventh protrusion 97 provided on the moving body 90 does not abut against the fifth protrusion 95 connected to the front end of the piston 47.

[0108] When the eighth protrusion 98 provided on the moving body 90 continuously presses the sixth protrusion 99 connected to the front end of the piston 55, the eighth protrusion 98 abutting against the sixth protrusion 99 is applied with a force f2 in the -X direction from the sixth protrusion 99. In addition, this force f2 does not change according to the position of the moving body 90 and is constant as long as the eighth protrusion 98 abuts against the sixth protrusion 99.

[0109] On the other hand, for example, as Figure 15 shown, in a state where the cylinder 79a for applying force at the first cutter position and the cylinder 79b for applying force at the second cutter position are turned on, a load is applied to the cutter 69, and the seventh protrusion 97 provided on the moving body 90 continuously presses the fifth protrusion 95 connected to the front end of the piston 47. When the cutter 69 moves to the maximum displacement in the -X direction (angle -X 1 mm), the seventh protrusion 97 provided on the moving body 90 abuts against the fifth protrusion 95 connected to the front end of the piston 47, but the eighth protrusion 98 provided on the moving body 90 does not abut against the sixth protrusion 99 connected to the front end of the piston 55.

[0110] When the seventh protrusion 97 provided on the moving body 90 continuously presses the fifth protrusion 95 connected to the front end of the piston 47, the seventh protrusion 97 abutting against the fifth protrusion 95 is applied with a force f2 in the +X direction from the fifth protrusion 95. In addition, this force f2 does not change according to the position of the moving body 90 and is constant as long as the seventh protrusion 97 abuts against the fifth protrusion 95.

[0111] Return to the ultrasonic machining program, and determine whether the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), continue the movement (machining) of the cutter 69 (S41). If the machining of the workpiece W is completed (S43: Yes), return to the main program (S45).

[0112] (Second machining mode)

[0113] Next, a second processing mode in which the cutting tool 69 is urged while the cylinder 77 for locking the cutting tool angle and the cylinder 79 for urging the cutting tool position are turned on, and the workpiece W is processed will be described. In addition, the second processing mode is used when processing is performed at a speed higher than the first mode.

[0114] In Figure 9 in the ultrasonic processing program, first, after obtaining the processing data from the processing data table 24a (S21), it is determined whether the processing mode is the cutting tool angle urging mode (S23).

[0115] Since the second processing mode does not use the cutting tool angle urging mode (S23: No), the first cutting tool angle locking cylinder 77 is turned on (S27), and it is determined whether the processing mode is the cutting tool position urging mode (S29).

[0116] Since the second processing mode uses the cutting tool position urging mode (S29: Yes), the first cutting tool position urging cylinder 79a and the second cutting tool position urging cylinder 79b are turned on (S31).

[0117] Figure 12 is a view showing a state (angle 0 degrees) in which the cutting tool angle locking cylinder is turned on and the angle of the cutting tool is fixed in the B-B cross-sectional view of Figure 2 .

[0118] Referring to Figure 12 for specific description, when the cutting tool angle locking cylinder 77 is turned on, air is injected from the air compressor 14 into the gap portion 37 of the third housing 33 of the cutting tool angle locking cylinder 77 via the connecting pipe 41 and the connecting pipe 43, and the piston 35 moves to the left in the drawing, and the locking pin 39 connected to the front end of the piston 35 engages with the concave portion 91 provided on the rotating body 13.

[0119] In this way, when the cutting tool angle locking cylinder 77 is turned on, the rotating body 13 is fixed by the locking pin 39, and the cutting tool 69 is fixed at the position of 0 degrees (refer to Figure 13 ).

[0120] Returning to the ultrasonic processing program, after the setting of the processing mode is completed, next, it is determined whether the workpiece W is set on the workpiece setting table 16 (S35). If the workpiece W is not set on the workpiece setting table 16, wait until the workpiece W is set on the workpiece setting table 16 (S35: No). If the workpiece W is set on the workpiece setting table 16 (S35: Yes), the oscillator 2 is driven to cause the oscillator 71 connected to the cutting tool 69 to perform ultrasonic vibration (S37).

[0121] Next, move each arm of the multi-joint robot 3 so that the cutting tool 69 is located at the machining start position (S39) relative to the workpiece W, and move the cutting tool 69 to perform ultrasonic machining on the workpiece W (S41).

[0122] In addition, regarding the operation inside the workpiece machining device 5 when machining the workpiece W by applying a force to the cutting tool 69 with the cutting tool position applying force cylinder 79 turned on, refer to Figure 5 , Figure 14 and Figure 15 , as described above.

[0123] Therefore, in the second machining mode, the machining device 5 fixes the angle of the cutting tool 69 at 0 degrees, and applies a constant force f2 to the workpiece W with the cutting tool 69 facing the position at 0 mm, thereby machining the workpiece W.

[0124] Then, it is judged whether the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), the movement (machining) of the cutting tool 69 is continued (S41). If the machining of the workpiece W is completed (S43: Yes), the program returns to the main program (S45).

[0125] (Third machining mode)

[0126] Next, a description will be given of the third machining mode in which a force is applied to the cutting tool 69 with the cutting tool angle applying force cylinders 75 and the cutting tool position locking cylinder 81 turned on to machine the workpiece W. In addition, the third machining mode is also an appropriate machining mode when machining a workpiece W with a complex machining shape, but it is used when machining at a higher speed than the first machining mode.

[0127] In Figure 9 , in the ultrasonic machining program, first, after obtaining machining data from the machining data table 24a (S21), it is judged whether the machining mode is the cutting tool angle applying force mode (S23).

[0128] Since the third machining mode uses the cutting tool angle applying force mode (S23: Yes), the first cutting tool angle applying force cylinder 75a and the second cutting tool angle applying force cylinder 75b are turned on (S25), and it is judged whether the machining mode is the cutting tool position applying force mode (S29).

[0129] Since the third machining mode does not use the cutting tool position applying force mode (S29: No), the cutting tool position locking cylinder 81 is turned on (S33).

[0130] Figure 16 represents in Figure 2In the C-C cross-sectional view, a diagram showing the state where the position of the cutting tool is fixed (displacement 0 mm) with the cylinder for locking the position of the cutting tool turned on.

[0131] Refer to Figure 16 For a specific description, if the cylinder 81 for locking the position of the cutting tool is turned on, air is injected from the air compressor 14 through the connecting pipe 94 and the connecting pipe 96 into the gap portion 65 of the sixth housing 61 of the cylinder 81 for locking the position of the cutting tool. Then, the piston 63 moves to the left in the figure, and the locking pin 67 connected to the front end of the piston 63 engages with the concave portion 93 provided on the moving body 90.

[0132] In this way, when the cylinder 81 for locking the position of the cutting tool is turned on, the moving body 90 is fixed by the locking pin 67, and the cutting tool 69 is fixed at the position of 0 mm (refer to Figure 16 etc.).

[0133] Return to the ultrasonic machining program. After the setting of the machining mode is completed, next, it is judged whether the workpiece W is set on the workpiece setting table 16 (S35). If the workpiece W is not set on the workpiece setting table 16, wait until the workpiece W is set on the workpiece setting table 16 (S35: No). If the workpiece W is set on the workpiece setting table 16 (S35: Yes), the oscillator 2 is driven to make the vibrator 71 connected to the cutting tool 69 perform ultrasonic vibration (S37).

[0134] Next, the respective arms of the articulated robot 3 are moved so that the cutting tool 69 is located at the machining start position relative to the workpiece W (S39), and the cutting tool 69 is moved to perform ultrasonic machining on the workpiece W (S41).

[0135] In addition, refer to Figure 4 、 Figure 10 、 Figure 11 and Figure 13 to describe the operation inside the workpiece machining device 5 when the workpiece W is machined with the first cutting tool angle biasing cylinder 75a and the second cutting tool angle biasing cylinder 75b turned on.

[0136] Therefore, in the third machining mode, the machining device 5 fixes the position of the cutting tool 69 at the position of 0 mm, and applies a constant force f1 to the workpiece W with the cutting tool 69 facing an angle of 0 degrees, thereby machining the workpiece W.

[0137] Then, it is judged whether the machining of the workpiece W is completed (S43). If the machining of the workpiece W is not completed (S43: No), the movement (machining) of the cutting tool 69 is continued (S41). If the machining of the workpiece W is completed (S43: Yes), return to the main program (S45).

[0138] (Fourth Processing Mode)

[0139] Finally, a fourth processing mode in which the workpiece W is processed without applying force to the cutting tool 69 while the cylinder 77 for locking the cutting tool angle and the cylinder 81 for locking the cutting tool position are turned on will be described. In addition, the fourth processing mode is used when processing is performed at the highest speed.

[0140] In Figure 9 In the ultrasonic machining program, first, after obtaining machining data from the machining data table 24a (S21), it is determined whether the machining mode is the cutting tool angle force application mode (S23).

[0141] Since the fourth processing mode does not use the cutting tool angle force application mode (S23: No), the cylinder 77 for locking the cutting tool angle is turned on (S27), and it is determined whether the machining mode is the cutting tool position force application mode (S29).

[0142] In addition, since the fourth processing mode does not use the cutting tool position force application mode (S29: No), the cylinder 81 for locking the cutting tool position is turned on (S33).

[0143] Then, after the machining mode is set, next, it is determined whether the workpiece W is set on the workpiece setting table 16 (S35). If the workpiece W is not set on the workpiece setting table 16, it waits until the workpiece W is set on the workpiece setting table 16 (S35: No). If the workpiece W is set on the workpiece setting table 16 (S35: Yes), the oscillator 2 is driven to cause the vibrator 71 connected to the cutting tool 69 to perform ultrasonic vibration (S37).

[0144] Next, each arm of the multi-joint robot 3 is moved so that the cutting tool 69 is located at the machining start position relative to the workpiece W (S39), and the cutting tool 69 is moved to perform ultrasonic machining on the workpiece W (S41).

[0145] In addition, regarding the internal operation of the workpiece machining device 5 when the workpiece W is processed without applying force to the cutting tool 69 while the cylinder 77 for locking the cutting tool angle is turned on, refer to Figure 4 and Figure 12 as described above.

[0146] In addition, regarding the internal operation of the workpiece machining device 5 when the workpiece W is processed without applying force to the cutting tool 69 while the cylinder 81 for locking the cutting tool position is turned on, also refer to Figure 5 and Figure 16 as described above.

[0147] Therefore, in the fourth processing mode, the processing device 5 fixes the angle of the cutting tool 69 at 0 degrees and the position of the cutting tool 69 at 0 mm, and processes the workpiece W.

[0148] Then, it is determined whether the processing of the workpiece W is completed (S43). If the processing of the workpiece W is not completed (S43: No), the movement (processing) of the cutting tool 69 is continued (S41). If the processing of the workpiece W is completed (S43: Yes), the main program is returned (S45).

[0149] Return Figure 8 to the main program. In order to stop the ultrasonic vibration of the oscillator 71 connected to the cutting tool 69, the oscillator 2 is turned off (S9), and all the cylinders of the first cutting tool angle applying cylinder 75a, the second cutting tool angle applying cylinder 75b, the cutting tool angle locking cylinder 77, the first cutting tool position applying cylinder 79a, the second cutting tool position applying cylinder 79b, and the cutting tool position locking cylinder 81 are turned off (S11).

[0150] Then, after moving the arm of the multi-joint robot 3 to the initial position (S13), it is determined whether the processed workpiece W is removed from the workpiece setting table 16 (S15). If it is determined that the workpiece W has not been removed (S15: No), wait for the workpiece W to be removed. If it is determined that the workpiece W has been removed (S15: Yes), it is further determined whether the number of processed workpieces W has reached the number of processes input by the operation panel 8 (S17).

[0151] Here, if it is determined that the number of processed workpieces W has not reached the number of processes input by the operation panel 8 (S17: No), the ultrasonic processing program is executed again. If it is determined that the number of processed workpieces W has reached the number of processes input by the operation panel 8 (S17: Yes), the process is ended (S19).

[0152] In addition, the workpiece processing device 5 according to the present embodiment relates to a device for processing the workpiece W using the cutting tool 69. In particular, since it includes: a cutting tool angle changing mechanism 9 that can change the angle of the cutting tool 69 relative to the traveling direction according to the shape of the workpiece W; and a first cutting tool angle applying cylinder 75a and a second cutting tool angle applying cylinder 75b that apply force to the cutting tool angle changing mechanism 9 against the changing direction of the angle of the cutting tool 69, it is possible to effectively press the cutting tool 69 and process the workpiece W with a complex processing shape.

[0153] Further, in the workpiece processing apparatus 5 according to the present embodiment, the first cutter angle biasing cylinder 75a and the second cutter angle biasing cylinder 75b bias the cutter angle changing mechanism 9 with a substantially constant force f1 regardless of the angle of the cutter 69. Therefore, even for a workpiece W having a complex processing shape, the cutter 69 can be further effectively pressed for processing.

[0154] Further, in the workpiece processing apparatus 5 according to the present embodiment, since it includes: a cutter position changing mechanism 7 that can change the position of the cutter 69 in a specific direction with respect to the workpiece W according to the shape of the workpiece W; and a first cutter position biasing cylinder 79a and a second cutter position biasing cylinder 79b that bias the cutter position changing mechanism 7 against the direction of change in the position of the cutter 69, even for a workpiece W having a complex processing shape, the cutter 69 can be further effectively pressed for processing.

[0155] Further, in the workpiece processing apparatus 5 according to the present embodiment, since it includes a cutter angle locking cylinder 77 that fixes the rotation angle of the fixed rotating body 13, it is possible to select a mechanism for effectively pressing the cutter 69 according to the shape of the workpiece W to process the workpiece W.

[0156] Further, in the workpiece processing apparatus 5 according to the present embodiment, since it includes a cutter position locking cylinder 81 that fixes the position in a specific direction with respect to the workpiece W, it is possible to further select a mechanism for effectively pressing the cutter 69 according to the shape of the workpiece W to process the workpiece W.

[0157] Moreover, in the ultrasonic processing apparatus 1 according to the present embodiment, the cutter 69 is ultrasonically vibrated in a direction intersecting the direction of angle change to process the workpiece W, so that the workpiece can be processed more precisely.

[0158] The ultrasonic processing apparatus and the workpiece processing apparatus in the embodiments of the present invention have been described above. However, the present invention is not limited to the above embodiments and can be implemented with various modifications without departing from the gist thereof.

[0159] For example, in the above embodiment, the vibrator 71 used is described as causing the cutter 69 to vibrate in the up-down direction in the drawing. However, it is not limited thereto, and it may be a direction intersecting the rotation direction of the rotating body 13 or a direction intersecting the moving direction of the moving body 90.

[0160] In addition, in the above embodiment, the cutter 69 used is described as a cutter ground on both sides. However, even a cutter ground on one side can be used as long as the processing direction is considered.

[0161] Symbol Description

[0162] 1 - Ultrasonic machining device; 2 - Oscillator; 3 - Multi-joint robot; 5 - Workpiece machining device; 6 - Robot controller; 7 - Cutting tool position changing mechanism; 9 - Cutting tool angle changing mechanism; 14 - Air compressor; 69 - Cutting tool; 71 - Vibrator; 75 - Cylinder for applying force to cutting tool angle; 77 - Cylinder for locking cutting tool angle; 79 - Cylinder for applying force to cutting tool position; 81 - Cylinder for locking cutting tool position; W - Workpiece.

Claims

1. A force applying device, characterized in that, it includes: a rotating body; a first piston that can slide in a first gap portion in a first predetermined direction and a first opposite direction opposite to the first predetermined direction by a first predetermined air pressure, and can apply a force to the rotating body in the first predetermined direction; and a second piston that can slide in a second gap portion in the first predetermined direction and the first opposite direction by the first predetermined air pressure, and can apply a force to the rotating body in the first opposite direction, the force applying device includes: a first mode, when the rotating body does not rotate, the first piston is made to abut against and apply a force to the rotating body in the first predetermined direction by the first predetermined air pressure, and the second piston is made to abut against and apply a force to the rotating body in the first opposite direction by the first predetermined air pressure; and a second mode, when the rotating body rotates, according to its rotation direction, only one of the first piston and the second piston slides in the first gap portion and abuts against and applies a force to the rotating body in the first predetermined direction by the first predetermined air pressure, or slides in the second gap portion and abuts against and applies a force to the rotating body in the first opposite direction by the first predetermined air pressure.

2. The force applying device according to claim 1, characterized in that, it includes an angle locking mechanism that fixes the angle of the rotating body in the first mode.

3. The force applying device according to claim 1 or 2, characterized in that, it includes: a moving body that can move in a second predetermined direction different from the first predetermined direction and a second opposite direction opposite to the second predetermined direction; a third piston that can slide in a third gap portion in the second predetermined direction and the second opposite direction by a second predetermined air pressure, and can apply a force to the moving body in the second predetermined direction; and a fourth piston that can slide in a fourth gap portion in the second predetermined direction and the second opposite direction by the second predetermined air pressure, and can apply a force to the moving body in the second opposite direction, the force applying device includes: a third mode, when the moving body does not move, the third piston is made to abut against and apply a force to the moving body in the second predetermined direction by the second predetermined air pressure, and the fourth piston is made to abut against and apply a force to the moving body in the second opposite direction by the second predetermined air pressure; and a fourth mode, when the moving body moves, according to its moving direction, only one of the third piston and the fourth piston slides in the third gap portion and abuts against and applies a force to the moving body in the second predetermined direction by the second predetermined air pressure, or slides in the fourth gap portion and abuts against and applies a force to the moving body in the second opposite direction by the second predetermined air pressure.

4. The force applying device according to claim 3, characterized in that, A position locking mechanism is provided, which fixes the position of the moving body when the third piston and the fourth piston abut against the moving body to apply a force.

5. A workpiece processing device that processes a workpiece using a cutting tool. The workpiece processing device is characterized by comprising: A cutting tool angle changing mechanism that can change the angle of the cutting tool relative to the traveling direction according to the shape of the workpiece; and A cutting tool angle biasing mechanism that biases the cutting tool angle changing mechanism against the direction of change of the angle of the cutting tool. The cutting tool angle biasing mechanism includes the first piston and the second piston of the biasing device according to claim 1 or 2.

6. The workpiece processing device according to claim 5, characterized in that the cutting tool angle biasing mechanism biases the cutting tool angle changing mechanism with a substantially constant acting force regardless of the angle of the cutting tool.

7. The workpiece processing device according to claim 5 or 6, characterized in that it comprises: A cutting tool position changing mechanism that can change the position of the cutting tool relative to a specific direction of the workpiece according to the shape of the workpiece; and A cutting tool position biasing mechanism that biases the cutting tool position changing mechanism against the direction of change of the position of the cutting tool. The cutting tool position biasing mechanism includes the third piston and the fourth piston of the biasing device according to claim 3 or 4.

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