Transport media for inspection of low particle generation

Abstract

The present disclosure relates to a system for inspecting a component, such as a semiconductor component or a unit under test (UUT). The system may include a transport media transport system that can be adjusted to accept transport media of different sizes to achieve a universal design, capable of manipulating various transport media that would otherwise require manual operation or multiple inspection systems. The system may include an inspection system to inspect the UUT and a positioning system to move the transport media from the dispenser to the inspection system. The system may include a transport media alignment system for orienting and aligning transport media and UUT to an inspection system. The system described herein may enable faster and more accurate UUT placement, thereby improving the inspection process and the quality of the final product.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to apparatuses and methods for inspecting a unit under test (UUT), such as a semiconductor component. More specifically, the embodiments described herein relate to orienting and aligning a transport medium and a UUT for metrology system inspection. Background Art

[0002] Various systems, such as metrology systems, may be used to inspect different types of units under test (UUTs) on a transport medium. The types of UUTs may include semiconductor components, such as a whole wafer before dicing placed on a wafer carrier and / or a diced wafer placed on a matrix tray. Conventional UUT inspection systems have limited or no ability to orient or align the UUTs before inspection. Misaligned UUTs may result in inaccurate inspection results. For example, the measurements made by a metrology system may not be in the same reference frame as the reference standards they are compared to. To compensate, it may be necessary to manufacture the transport medium (such as a matrix transport tray or a wafer carrier) with more stringent tolerances to achieve the correct angular orientation during the inspection process. The transport medium with more stringent tolerances may result in higher manufacturing costs and difficulties. For some types of transport media, such as matrix trays, the problem of aligning the reference frame is more complex because the matrix tray contains multiple UUTs to be inspected, and each UUT on the matrix tray may have a different reference frame from other UUTs. Conventional inspection systems may not be able to align the reference frame for each UUT on the tray.

[0003] Conventional UUT inspection systems may not be able to consider transport media with different shapes, geometries, and sizes. Therefore, different systems may be required to inspect each transport medium, such as 150 mm wafers, 200 mm wafers, and matrix trays. Using different inspection systems may increase the cost of inspecting UUTs and require more maintenance than a single inspection system.

[0004] Therefore, there is a need for a system and method to orient and align a transport medium and a UUT for inspection to solve the above problems. Summary of the Invention

[0005] The present disclosure relates to systems for inspecting components, such as semiconductor components or units under test (UUTs). The system may include a transport media transport system that can be adjusted to accept transport media of different sizes, thereby forming a universal design that can operate various transport media that previously required manual operation or multiple inspection systems. The system may include an inspection system for inspecting the UUT, and a positioning system is required to move the transport media from the dispenser to the inspection system. The system may include a transport media alignment system for orienting and aligning the transport media and the UUT to the inspection system. The systems described herein may enable faster and more precise placement of the UUT, thereby improving the inspection process and the quality of the final product. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] In order that the manner in which the above-recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, some of which embodiments are illustrated in the accompanying drawings. It is to be noted, however, that the drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of the scope of the disclosure, as the disclosure may admit to other equally effective embodiments.

[0007] Figure 1A and 1B A three-dimensional view of a system for inspecting a unit under test (UUT) is shown in accordance with certain embodiments.

[0008] Figure 2A A three-dimensional view of an adjustment system is shown in accordance with certain embodiments.

[0009] Figure 2B A sectional view of the adjustment system in Figure 2A is shown in accordance with certain embodiments.

[0010] Figure 2C A sectional view of the adjustment system in Figure 2A is shown in accordance with certain embodiments.

[0011] Figure 2D A three-dimensional view of the adjustment system in Figure 2A using different UUT types is shown in accordance with certain embodiments.

[0012] Figure 3A A three-dimensional view of a UUT alignment system is shown in accordance with certain embodiments.

[0013] Figure 3B A three-dimensional view of the positioning plate of the adjustment system is shown in accordance with certain embodiments.

[0014] Figure 3C A three-dimensional view of the mounting plate of the adjustment system is shown in accordance with certain embodiments.

[0015] Figure 3D and 3EA top view of a UUT alignment system is shown in accordance with certain embodiments.

[0016] Figure 3F and 3G Front and left side views of a UUT alignment system are shown in accordance with certain embodiments, respectively.

[0017] Figure 3H and 3I Front and left side views of a UUT alignment system are shown in accordance with certain embodiments, respectively.

[0018] Figure 3J and 3K Front and right side views of a UUT alignment system are shown in accordance with certain embodiments, respectively.

[0019] Figure 4 A three - dimensional view of an adjustment system is shown in accordance with certain embodiments.

[0020] Figure 5A 、 5B and 5C show a flowchart of a method for inspecting a UUT in accordance with certain embodiments.

[0021] Figure 6A With 6B A top view of an adjustment system grasping a UUT is shown in accordance with certain embodiments.

[0022] Figure 6C 、 6D 、6E, 6F, 6G, and 6H show different views of a UUT inspected by a system for inspecting a UUT in accordance with certain embodiments.

[0023] Figure 7A A three - sided view of a vacuum enclosure on an adjustment system is shown in accordance with certain embodiments.

[0024] Figure 7B Shown in accordance with certain embodiments is Figure 7A A sectional top view of the vacuum enclosure of the adjustment system in

[0025] Figure 7C Shown in accordance with certain embodiments is Figure 7A A sectional top view of the vacuum enclosure of the adjustment system in

[0026] Figure 8 A schematic diagram is shown in accordance with the systems and methods described herein, depicting an exemplary system controller that can be used.

[0027] For ease of understanding, the same component symbols are used throughout the figures, where possible, to designate common identical elements. It is contemplated that elements and features of one embodiment may be advantageously incorporated into other embodiments without further recitation. Detailed Description

[0028] In the following description, numerous specific details are set forth to provide a more thorough understanding of the present disclosure. However, it will be apparent to one skilled in the art that certain embodiments of the present disclosure may be practiced without one or more of the specific details. In other instances, well-known features have not been described to avoid obscuring one or more embodiments of the present disclosure.

[0029] Aspects of the present disclosure provide systems and methods for orienting and aligning a transport medium and a unit under test (UUT) for inspection.

[0030] The system embodiments described herein for inspecting a UUT address the issues discussed above. The system may include a media transport system that is adaptable to accept different sized transport media, enabling a universal design that can operate various transport media that in the past required manual operation or multiple inspection systems. The system may include an inspection system to inspect the UUT on the transport medium, and a positioning system that is required to move the transport medium from a dispenser to the inspection system. Additionally, the system may include a transport medium alignment system to orient and align the UUTs to the inspection system. The systems described herein may achieve faster and more precise UUT placement, thereby improving the inspection process and the quality of the final product.

[0031] System example for inspecting a unit under test (UUT)

[0032] Figure 1A and 1B A three - dimensional view of a system 100 for inspecting a UUT is depicted in accordance with certain embodiments. Specifically, Figure 1A it is shown that a system 100 for inspecting a UUT (referred to as system 100 or UUT inspection system) receives a transport medium from a dispenser. In Figure 1A and 1B the depicted embodiment, the dispenser is a matrix tray dispenser 102. The matrix tray dispenser 102 supplies a matrix tray 104 to the system 100. The dispenser may also be a substrate tray dispenser 108 that supplies a substrate tray 110 containing a substrate 112 to the system 100, as depicted in FIG. 2E. The matrix tray 104 and the substrate tray 110 are examples of different transport medium types. A coordinate system is shown to facilitate discussion of the position and orientation of the components of the system 100 for inspecting a UUT (referred to as system 100), but is not meant to define a specific origin.

[0033] As Figure 1AAs shown, system 100 includes an adjustment system 101A, a positioning system 101B, an inspection system 140, and a system controller 199. The adjustment system 101A includes a transport media transport system 103 and a UUT alignment system 105. The transport media transport system 103 forms an opening 133 in the central portion of the adjustment system 101A. A transport media, such as a matrix tray 104, is placed on the adjustment system 101A. The adjustment system 101A moves and rotates the matrix tray 104 so as to align the matrix tray 104 with a coordinate system (or any desired coordinate system, such as the coordinate system of the inspection system 140) for inspection by the inspection system 140. The transport media transport system 103 is further discussed in Figure 2A -2E. The UUT alignment system 105 is further discussed in Figures 3A - 3K .

[0034] The positioning system 101B moves the adjustment system 101A in a plane, such as the plane formed by the x-axis and y-axis of a coordinate system. The positioning system 101B includes positioning actuators 114 (e.g., a first positioning actuator 114A and a second positioning actuator 114B), positioning tracks 115 (e.g., a first pair of positioning tracks 115A and a second pair of positioning tracks 115B), and a positioning structure 116.

[0035] The positioning structure 116 includes a fixed plate 118 and a movable plate 119 connected to a positioning leg 113. The positioning leg 113 can be connected to the ground, a platform, or other equipment. The first pair of positioning tracks 115A is connected to the fixed plate 118. The second pair of positioning tracks 115B is connected to the movable plate 119 and is substantially perpendicular (or orthogonal) to the first pair of positioning tracks 115A in the x-y plane, e.g., within 90 degrees + / - 5 degrees, such as within 90 degrees + / - 2 degrees, such as within 90 degrees + / - 1 degree, such as within 90 degrees + / - 0.5 degree, such as within 90 degrees + / - 0.25 degree. The tracks 115A and 115B can be connected to the plates 118 and 119 by fasteners, welding, adhesives, etc. The fasteners can include any one of bolts and nuts, screws, anchor bolts, rivets, etc.

[0036] The first positioning actuator 114A moves the movable plate 119 along the first pair of positioning tracks 115A. The second positioning actuator 114B moves the adjustment system 101A along the second pair of positioning tracks 115B. In Figure 1AIn the illustrated embodiment, the first positioning actuator 114A is connected to the movable plate 119, while the second positioning actuator 114B is connected to the adjustment system 101A. The positioning actuators 114A and 114B are used to move the adjustment system 101A along the x-axis and y-axis, which facilitates the system 100 to receive the transport media from different dispensers (e.g., dispensers 102 and 108). For example, the second positioning actuator 114B can move the adjustment system 101A along the y-axis to receive the substrate tray 110. The positioning actuators 114A and 114B move the adjustment system 101A relative to the fixed plate 118. The fixed plate 118 and the movable plate 119 each form an opening 117 in the central portion.

[0037] The inspection system 140 includes an inspection device 142, a distance sensor 144, and an imaging system 146. The distance sensor 144 and the imaging system 146 are located above the inspection device 142, as viewed from the side Figure 6E as shown. In other words, there is a distance between the distance sensor 144 and the imaging system 146 and the inspection device along the z-axis. The distance sensor 144 and the imaging system 146 are used as inputs to the system controller 199 to control the positioning and alignment of the transport media (e.g., the matrix tray 104) in the system 100, as Figures 5A to 6H discussed in FIGS. 7 and 8.

[0038] The system controller 199 is used to control the system 100. The system controller 199 moves the adjustment system 101A by controlling the positioning actuators 114A and 114B. In certain embodiments, the first and second positioning actuators 114A and 114B move the transport media and the UUT to and from the inspection system 140. The system controller 199 can also be used to control the inspection system 140, or use the inspection system 140 as an input to control the positioning actuators 114A and 114B. The system controller 199 is further discussed in Figure 8 this regard.

[0039] Figure 1B Shows the adjustment system 101A in a position to inspect the matrix tray 104. The positioning actuators 114A and 114B have moved the adjustment system 101A along the x-axis and y-axis such that the opening 133 at least partially overlaps the opening 117 when viewed from above. The partial alignment of the openings 133 and 117 allows the inspection system 140 to obtain a line of sight to the UUT (e.g., on the matrix tray 104). For example, a portion of the matrix tray 104 with the UUT to be inspected is positioned on the inspection device 142, while the distance sensor 144 and the imaging system 146 are located above the matrix tray 104. In certain embodiments, when viewed from above, the opening 133 is completely located over the opening 117 of the inspection matrix tray 104.

[0040] The positioning system 101B can position and adjust the system 101A before inspection. In some embodiments, the positioning system 101B moves the adjustment system 101A to the generally required area, while the transport media transport system 103 moves the media to the required position. The positioning accuracy of the adjustment system 101A for the pallet 104 may be higher than that of the positioning system 101B. In some embodiments, the positioning system 101B can be used to move the matrix pallet 104 to the required position. In these embodiments, the adjustment system 101A can be used for fine-tuning.

[0041] In some embodiments, the positioning actuator 114 may also include a third actuator (not shown) for moving the system 100 along the z-axis. In some embodiments, at least one positioning actuator 114 can rotate the system 100 about the x, y, and z axes, rather than moving the system 100 along the axes or also moving the system 100 along the axes. In some embodiments, a single positioning actuator 114 is used. In some embodiments, only the second positioning actuator 114B is used to move the adjustment system 101A along the y-axis, as Figure 6F described.

[0042] In Figure 1A and 1B the illustrated embodiments, the matrix pallet 104 contains the eyepieces 106. In these embodiments, the system 100 can use the inspection system 140 to inspect each eyepiece 106 of the matrix pallet 104, as Figures 5A - 6H described.

[0043] In some embodiments, the matrix pallet 104 is used for processing, transporting, and storing integrated circuits (ICs), modules, and other components. In some embodiments, the matrix pallet 104 complies with the Joint Electron Device Engineering Council (JEDEC) standards and can be referred to as a JEDEC pallet.

[0044] In some embodiments, the positioning actuators 114A and 114B may be connected to other parts of the system 100 (such as the fixed plate 118). The fixed plate 118 remains stationary relative to the movable plate 119. In some embodiments, the fixed plate 118 uses the positioning actuators 114A and 114B to move the adjustment system 101A without the movable plate 119. In some embodiments, the operation of the positioning system 101B is similar to the motion system of a gantry system or a computer numerical control (CNC) router to move the adjustment system 101A.

[0045] Although the dispensers 102 and 108 are discussed, other transport media and dispensers for UUTs that can be inspected by the system 100 are also contemplated. In some embodiments, a person or a robot can place the transport media and UUTs into the system.

[0046] Examples of adjustment systems

[0047] Figure 2A Illustrations in accordance with certain embodiments show a three - dimensional view of the adjustment system 101A. Specifically, Figure 2A a matrix tray 104 placed on the adjustment system 101A is shown.

[0048] The adjustment system 101A includes a first support rail 220, a second support rail 222, a first motion system 226, a second motion system 228, a mounting rail 230, a mounting plate 232, a positioning plate 234, and a base plate 236.

[0049] The first motion system 226 includes a rail actuator 240 that moves the first support rail 220 toward and away from the second support rail 222 (e.g., in the y - axis direction), enabling the adjustment system 101A to be adjusted to accept different - sized transport media and UUTs. For example, the first motion system 226 adjusts the position of the first support rail 220 to form and adjust a gap 221, the size of which is suitable for the matrix tray 104 (e.g., slightly larger than the width of the matrix tray 104).

[0050] The rail actuator 240 is connected to the mounting rail 230, which in turn is connected to the mounting plate 232. The second support rail 222 is also fixed to one end of the mounting plate 232 opposite the mounting rail 230. Each rail actuator 240 in the rail actuator 240 is connected to a shaft 242. Each shaft 242 includes a threaded portion for engaging one of a plurality of threaded holes 244 formed in the first support guide 220 or for engaging a threaded insert (not shown) disposed in the first support guide 220. Each rail actuator 240 rotates its corresponding shaft 242 about the axis, and the threaded portion of the shaft 242 engages the respective threaded hole 244 to pull the first support guide 220 toward or push it away from the mounting rail 230. Each shaft 242 passes through one of a plurality of through - holes in the second support rail 222 and is fixed using a snap ring (e.g., Figure 3B snap ring 345 in), a clip, a lock nut, or other fastener. Thus, each shaft 242 is fixed against translation and is constrained to rotate in place. The rotational motion of each shaft 242 is translated into a linear motion of the first support guide 220. The linear motion of the first support guide 220 causes the axial distance (e.g., the distance along the y - axis) of the gap 221 to increase or decrease, such that the distance between the first support guide 220 and the second support rail 222 is adjusted to accommodate changes in the transport media (e.g., from a JEDEC tray to a substrate carrier).

[0051] The first motion system 226 further includes a guide rail 239 connected to the first support rail 220 to guide the movement of the first support rail 220. The guide rail 239 is slidably connected to the rail 238, enabling the first motion system 226 to move the first support rail 220 along the rail 238. The guide rail 239 includes corresponding features that cooperate with the rail 238. For example, the guide rail 239 may include protrusions to engage and slide along a channel in the rail 238. In certain embodiments, the guide rail 239 can be a C-channel, a U-channel, or a strut channel, while the rail 238 can be a square tube or a square beam. In such embodiments, the inner surface of the channel engages the outer surface of the tube or beam.

[0052] The guide rail 239 can be connected to the first support rail 220 by fasteners (e.g., lock screws, etc.). In certain embodiments, the guide rail 239 is integrally formed with the first support rail 220. For example, the guide rail 239 can be machined from, welded to, adhered to, or otherwise connected to the first support rail 220 and operate as an integral component.

[0053] In certain embodiments, the rail 238, the guide rail 239, or both may comprise a non-stick or low-friction material, such as ultra-high molecular weight polyethylene, high-density polyethylene, ceramics, polytetrafluoroethylene, non-stick silicone, or enamel, to enable the first support rail 220 to move relative to the rail 238. In certain embodiments, the non-stick or low-friction material is applied in the form of a coating. In certain embodiments, the guide rail 239 can be a recirculating ball bearing linear guide rail. In certain embodiments, the non-stick or low-friction material is applied in the form of a tape. In certain embodiments, the rail 238 or the guide rail 239 may wear over time and may need to be replaced.

[0054] The first motion system 226 can be used to clamp the matrix tray 104 by the support rails 220 and 222, as Figure 6B discussed. For example, the matrix tray 104 can be clamped between the inner sides of the support rails 220 and 222 facing each other. In the illustrated embodiment, the second support rail 222 forms a gap 224 to provide space for the end effector of a robot (not shown). The robot can be used to place a UUT on the matrix tray 104, for example, through an equipment front-end module (EFEM) that is used to transport the UUT to the system 100. The gap 224 can provide additional space (e.g., along the z-axis) for other devices, such as inspection optical components or lighting sources, to pass above the second support rail 222. For example, when the positioning system 101B moves to adjust the system 101A (as Figure 1A and 1B discussed) to inspect the matrix tray 104, the gap 224 can provide space for the distance sensor 144 or the imaging system 146.

[0055] The second motion system 228 is connected to the support rails 220 and 222 and is configured to displace the matrix tray 104 in the axial direction (e.g., along the x-axis) after the second motion system 228 receives the matrix tray 104 from the matrix tray dispenser 102. In Figure 2A the illustrated embodiment, the second motion system 228 includes conveyor systems 227A, 227B, which are further discussed in Figure 2B and 2C . Each conveyor system 227A, 227B includes a belt actuator 246 and belts 248A, 248B. The matrix tray 104 can be placed on the belts 248A, 248B. For example, the belts 248A, 248B can support the outer portion or edge of the matrix tray 104. The belt actuator 246 moves the belts 248A, 248B and the matrix tray 104 towards or away from the matrix tray dispenser 102 (e.g., along the x-axis). All belt movements in the system 101A, including the movement of the belts 248A, 248B, should be simultaneous in order to displace the matrix tray 104 uniformly. This simultaneous movement can be achieved by synchronizing all belt motors or by connecting a single drive shaft to the coaxial belt actuators 246. The second motion system 228 can move or pull the matrix tray 104 between the support rails 220 and 222 and adjust the position of the matrix tray 104 (e.g., along the x-axis). The second motion system 228 can be used to present the matrix tray 104 to the inspection system 140 for inspection.

[0056] The mounting plate 232 is rotatably connected to the positioning plate 234, and the positioning plate 234 is rotatably connected to the base plate 236, as discussed in Figures 3A - 3I . The mounting plate 232 forms an opening 133A, the positioning plate 234 forms an opening 133B, and the base plate 236 forms an opening 133C. The openings 133A, 133B, and 133C together form the opening 133 of the adjustment system 101A ( Figure 1A ).

[0057] The mounting rail 230, the second support rail 222, and the rail 238 are connected to the mounting plate 232 by fasteners (e.g., any one of screws and nuts, bolts, anchors, rivets, or combinations thereof), welding, adhesives, or combinations thereof. The rail actuator 240 may be connected to the mounting rail 230 in a similar manner.

[0058] In some embodiments, the rail actuator 240 may be connected to the second support rail 222. In such an embodiment, the first motion system 226 may not include the mounting rail 230.

[0059] Although the first motion system 226 is shown with two track actuators 240, some embodiments may use only one track actuator 240. For example, the track actuator 240 may use a first shaft 242 (e.g., Figure 2A One of the shafts 242 in the first support rail 220 is used to move the first support rail 220. The second shaft 242 (e.g., Figure 2A The other shaft 242 in the first support rail 220 has no threaded portion and is not connected to the rail actuator 240 , so as to guide the movement of the first support rail 220 .

[0060] Figure 2B According to some embodiments, Figure 2A A cross-sectional view of the adjustment system 101A taken along line 2B-2B. Figure 2B As shown, the second support rail 222 includes two conveyor systems, a first conveyor system 227A and a second conveyor system 227B, which are connected to the second support rail 222. The outer portion or edge of the matrix tray 104 is placed on the conveyor systems 227A and 227B. The first and second conveyor systems 227A and 227B are located on each side of the gap 224 (e.g., the left and right sides shown on the page) and are mirror versions of each other.

[0061] The first conveyor system 227A includes a motor-driven pulley 247A or a motor-driven wheel connected to a belt actuator 246. The belt actuator 246 rotates the motor-driven pulley 247A around an axis. The first conveyor system 227A also includes a belt 248A that forms a loop and moves around the motor-driven pulley 247A and a free-spinning pulley 247B or a wheel (e.g., an idler pulley). The pulley 247B provides tension and guides the belt 248A around the belt guard 219A of the second support track 222. The belt guard 219A is configured to contain dust that may be generated by the belt 248A. In some embodiments, the belt 248A is a flat belt that is located in a channel or groove of the motor-driven pulley 247A and moves by tension and friction between the belt 248A and the motor-driven pulley 247A. The pulley 247B may be located on the lower side and on the left and right sides of the belt guard 219A (as shown on the page). Bearings may be used to assist in the rotation of the motor driven pulley 247A or the pulley 247B. In some embodiments, the belt 248A is a flat belt and the motor driven pulley 247A and the free spinning pulley 247B are crowned pulleys. Making the motor driven pulley 247A and the free spinning pulley 247B crowned pulleys controls the positioning of the belt along the pulley axis. This arrangement keeps the edge of the belt away from the stationary components of the adjustment system 101A and reduces the generation of dust or particles by the belt.

[0062] In some embodiments, the inner surface of the belt guard 219A or the second support rail 222 (e.g., the surface facing the first support rail 220) may include a non-stick or low-friction material, as discussed in Figure 2A in connection with the track 238, which allows the belt 248A to move relative to the belt guard 219A and the second support rail 222.

[0063] The conveyor system 227B is configured similarly and includes a motor-driven pulley 247A, a belt 248B, a pulley 247B, and a belt guard 219B.

[0064] Figure 2C A cross-sectional view taken along line 2C-2C of the adjustment system 101A is shown according to certain embodiments. Specifically, Figure 2C the third conveyor system 227C of the second motion system 228 is shown.

[0065] The first support rail 220 includes the conveyor system 227C, and the outer portion or edge of the matrix tray 104 is located above the conveyor system 227C. The outer portion is located on one side of the matrix tray opposite to the outer portions of the conveyor systems 227A and 227B. The conveyor system 227C is functionally similar to Figure 2B the conveyor systems 227A and 227B discussed in Figure 2A For example, the conveyor system 227C includes a motor-driven pulley 247A, a belt 248C, a pulley 247B, and a belt guard 219C. The first support rail 220 forms a cutout 225 on the side closest to the mounting plate 232. The cutout 225 provides additional space for the device, such as an optical inspection component or a light source, similar to

[0066] the gap 224 of the second support rail 222 discussed in

[0067] Figure 2D A three-dimensional view of the adjustment system 101A is shown according to certain embodiments, where different types of transport media and UUTs are used. Specifically, Figure 2D the substrate tray 110 located on the adjustment system 101A is shown.

[0068] The substrate 112 is placed on the substrate tray 110. The substrate tray dispenser 108 ( Figure 1A ) can supply the substrate tray 110 to the system 100 ( Figure 1A). The second motion system 228 is used to receive the substrate tray 110 from the substrate tray dispenser 108. The substrate tray 110 can be placed on belts 248A, 248B, 248C. For example, the belts 248A, 248B, 248C can support the outer portion or edge of the substrate tray 110. The belt actuator 246 moves the belts 248A, 248B, 248C and the substrate tray 110 towards the matrix tray dispenser 108 (e.g., along the x-axis). The adjustment system 101A moves the substrate tray 110 so that the inspection system 140 ( Figure 1A and 1B ) can inspect the substrate 112, similar to the matrix tray 104.

[0069] Examples of the unit under test (UUT) alignment system

[0070] Figure 3A According to some embodiments, a three-dimensional view of the UUT alignment system 105 is shown. For simplicity of illustration, some parts of the adjustment system 101A ( Figure 2A ) such as the rails 238 and the support rails 220 and 222 are not shown.

[0071] The UUT alignment system 105 rotates the transport media transport system 103 about the x, y, and z axes. The UUT alignment system 105 includes a first rotation system 350 and a second rotation system 354. The first rotation system 350 rotates the mounting plate 232 about the zp axis of the positioning plate 234, and the positioning plate 234 further includes the xp and yp axes. The second rotation system 354 includes a pivot joint (e.g., a universal ball 360) and rotates the mounting plate 232 about the base plate 236 through the pivot joint. The pivot joint allows the mounting plate 232 to move about at least two axes (e.g., the x- and y-axes). In the illustrated embodiment, the second rotation system 354 rotates the mounting plate 232 and the positioning plate 234 about the xb axis and the yb axis of the universal ball 360. The universal ball 360 is connected to the base plate 236, and the positioning plate 234 is supported on the universal ball 360. The mounting plate 232 and the positioning plate 234 rotate relative to the base plate 236. In the illustrated embodiment, the universal ball 360 can be connected to the corner of the base plate 236 by placing it in a circular cutout hole (not shown) in the base plate 236.

[0072] The first rotation system 350 includes a first bracket 352A, a second bracket 352B, a rotation actuator 352C, a shaft 352D, a compliant mechanism 352E, and a third bracket 352F. The first bracket 352A is connected to the mounting plate 232, while the second bracket 352B and the third bracket 352F are connected to the positioning plate 234. The rotation actuator 352C is connected to the positioning plate 234 through the third bracket 352F. Alternatively, the rotation actuator 352C can also be directly connected to the positioning plate 234 using fasteners, welding, adhesives, or a combination thereof. The rotation actuator 352C can be a linear actuator, such as a mechanical or motor, hydraulic, pneumatic, or piezoelectric linear actuator, and is configured to rotate the mounting plate 232 relative to the positioning plate 234 about the z-axis. The rotation actuator 352C pushes the third bracket 352F along the shaft 352D to engage the first bracket 352A. The third bracket 352F pushes the first bracket 352A towards the second bracket 352B and compresses the compliant mechanism 352E. Since the positioning plate 234 is fixed relative to the mounting plate 232, pushing the first bracket 352A (which is connected to the mounting plate 232) will cause the mounting plate 232 to rotate about the z-axis relative to the positioning plate 234. The compliant mechanism 352E connects the first bracket 352A and the second bracket 352B. When the rotation actuator 352C moves the first bracket 352A towards the second bracket 352B, the compliant mechanism 352E is compressed. When the rotation actuator 352C retracts the shaft 352D, the compliant mechanism 352E expands and pushes the first bracket 352A away from the second bracket 352B, and may return the mounting plate 232 to its starting position. The first rotation system 350 is further discussed in Figure 3D and Figure 3E . The rotational movement of the mounting plate 232 about the z-axis enables a transport medium, such as the matrix tray 104, to rotate about the z-axis to better position the UUT for inspection.

[0073] The first rotation system 350 further includes at least one arcuate guide 362 to guide the rotation of the mounting plate 232. As Figure 3A shown, three arcuate guides 362 are used. The arcuate guides 362 include corresponding components on the mounting plate 232 and the positioning plate 234. The arcuate guides 362 of the first rotation system 350 are further discussed in Figures 3B - 3D .

[0074] The second rotation system 354 includes a first actuator 356A having a first shaft 357A; a second actuator 356B having a second shaft 357B; and a plurality of compliant mechanisms 358 (such as extension springs), a plurality of compliant mechanism supports 359, and a universal ball 360. The actuators 356A and 356B are connected to the side of the positioning plate 234 opposite to the universal ball 360 and are located at opposite corners. The actuators 356A and 356B can be connected to the positioning plate 234 by brackets, fasteners, welding, adhesives, or a combination thereof. The actuators 356A and 356B and the shafts 357A and 357B are used to rotate the positioning plate 234 around the universal ball 360.

[0075] Each of the plurality of compliant mechanisms 358 is associated with the actuator 356A or 356B. The compliant mechanism supports 359 are coupled to the second side of the positioning plate 234, adjacent to the actuators 356A and 356B. One end of each of the plurality of compliant mechanisms 358 is coupled to a compliant mechanism support 359, and the other end of each of the plurality of compliant mechanisms 358 is coupled to the base plate 236. Thus, the compliant mechanism supports 359 cooperate with the base plate 236 to apply a tensile force to each of the plurality of compliant mechanisms 358, enabling the positioning plate 234 to move closer to the base plate 236. Then, the actuators 356A and 356B can be used to push the positioning plate 234 along the shafts 357A and 357B. By applying a thrust force to the positioning plate 234, the actuators 356A and 356B cause the positioning plate 234 and the UUT (such as the matrix tray 104) thereon to rotate around the universal ball 360, thereby rotating in the x-axis and y-axis directions. In addition, the compliant mechanisms 358 provide a compressive force that enables the positioning plate 234 to rotate back to a predetermined position. This rotational movement of the positioning plate 234 and the UUT will be further discussed in Figures 3F - 3K which follows.

[0076] The second rotation system 354 may further include a rotation lock 370 to maintain the position or orientation of the positioning plate 234 relative to the base plate 236. The rotation lock 370 includes a rotation lock shaft 371A and a rotation lock actuator 371B. The rotation lock shaft 371A is coupled to the base plate 236 through a rotatable support such as a universal support, which allows the rotation lock shaft 371A to rotate relative to the base plate 236. For example, one end of the rotation lock shaft 371A may include a socket that is coupled to a ball joint of the base plate 236. In the illustrated embodiment, the rotation lock shaft 371A is coupled to a mounting protrusion 337 of the base plate 236 that extends from one side of the mounting plate 232.

[0077] The rotary lock actuator 371B is coupled to the positioning plate 234. The rotary lock actuator 371B interacts with the rotary lock shaft 371A to lock or fix the orientation or position of the UUT alignment system 105. In the illustrated embodiment, three rotary lock actuators 371B are shown so that these actuators 371B can lock the rotary lock shaft 371A in different orientations. The rotary lock actuator 371B is coupled to the plate protrusion 335A of the positioning plate 234, which protrudes from the underside of the mounting plate 232 and is located above the mounting protrusion 337. The positioning plate 234 also has a first edge 335B and a second edge 335C, as discussed in Figure 3H and 3I as follows.

[0078] In Figure 3A the illustrated embodiment, the first bracket 352A, the second bracket 352B, the rotary actuator 352C, the shaft 352D, and the compliant mechanism 352E are placed on the same side of the positioning plate 234, between the actuators 356A and 356B. In some embodiments, the first bracket 352A, the second bracket 352B, the rotary actuator 352C, the shaft 352D, and the compliant mechanism 352E may be placed on different sides of the positioning plate 234, or may not be located between the actuators 356A and 356B.

[0079] In some embodiments, the first bracket 352A may be connected to the positioning plate 234, while the second bracket 352B may be connected to the mounting plate 232. In some embodiments, the rotary actuator 352C may be connected to the mounting plate 232, and the first bracket 352A may be connected to the positioning plate 234. In some embodiments, the rotary actuator 352C may be directly connected to the first bracket 352A and directly control the rotation of the mounting plate 232, such that the compliant mechanism 352E is not used. In these embodiments, the shaft 352D may be directly connected to the first bracket 352A, and the rotary actuator 352C may extend and retract the shaft 352D to rotate the mounting plate 232.

[0080] In some embodiments, any of the plates 232, 234, and 236 may be referred to as an adjustment plate. In some embodiments, any of the actuators 352C, 356A, and 356B may be referred to as an adjustment actuator.

[0081] In some embodiments, a pivot joint may be any joint that allows rotation about at least two axes. In some embodiments, the pivot joint may be similar to the pivot support associated with the rotary lock shaft 371A.

[0082] In some embodiments, the zp axis may be referred to as the central axis. In these embodiments, the positioning plate may be located on the central axis, and the mounting plate may rotate about the central axis.

[0083] In the illustrated embodiment, the ends (e.g., ball ends) of the first and second shafts 357A and 357B include spheres or ball-like objects that contact the base plate 236. The ball ends allow the shafts 357A and 357B to contact the base plate 236 at different angles. The base plate may include regions or contact plates for the ball ends of the shafts 357A and 357B to contact. The contact plates may wear and need to be replaced. The ball ends and the contact plates may each include non-stick or low-friction materials, as described in the discussion related to the track 238, so that the ball ends can move relative to the contact plates.

[0084] Figure 3B Three views of the positioning plate 234 are shown according to certain embodiments. The positioning plate 234 includes an arched guide 362 and forms a groove 361. Each arched guide 362 includes a guide pad 363A connected to a guide spacer 363B. The guide spacer 363B is connected to the positioning plate 234. When the mounting plate 232 rotates relative to the positioning plate 234, the guide pad 363A engages with the guide channel 364 of the mounting plate 232, as described in the discussion related to Figure 3D and 3E . The guide pad 363A may include non-stick or low-friction materials, as described in the discussion related to the belt guard device 219A in Figure 2B , so that the guide channel 364 can move relative to the guide pad 363A. In certain embodiments, the guide pad 363A may wear over time and need to be replaced. In certain embodiments, the guide spacer 363B is not used and the guide pad 363A is directly connected to the positioning plate 234.

[0085] The shape of the groove 361 corresponds to the shape of the universal ball 360 ( Figure 3A ). For example, the groove 361 of the positioning plate 234 contacts at least a part of the universal ball 360 and is adapted to receive the universal ball 360 therein. The groove 361 can move on the surface of the universal ball 360 and allows the positioning plate 234 and the transport media and UUT disposed thereon to rotate about the xb axis and / or yb axis of the universal ball 360, as Figures 3F - 3K described. In certain embodiments, the groove 361 may surround most of the universal ball 360 so that the universal ball 360 is fixed within the groove 361 and will not fall out even if the base plate 236 is absent. In certain embodiments, the groove 361 or the universal ball 360 may include non-stick or low-friction materials. In certain embodiments, the universal ball 360 may be connected to the positioning plate 234. In these embodiments, the base plate 236 may form the groove 361.

[0086] As Figure 3B shown, the plate protrusion 335A forms a rotation locking opening 367. The rotation lock shaft 371A passes through the rotation locking opening 367.

[0087] Figure 3C Three views of mounting plate 232 are shown in accordance with certain embodiments. The mounting plate 232 includes a bearing channel 364. The bearing channel 364 is sized to accept a guide pad 363A ( Figure 3B ). For example, when the mounting plate 232 rotates, the guide pad 363A slides along the inner surface of the bearing channel 364. The bearing channel 364 is curved to guide the guide pad 363A to move within the bearing channel 364 and further restrict the rotation of the mounting plate 232 about the zp axis ( Figure 3A ). In the illustrated embodiment, the bearing channel 364 has three arched channels, each having a center point collinear with the zp axis. The rotation of the mounting plate 232 and the transport medium disposed thereon with the UUT is further discussed in Figure 3D and 3E .

[0088] In certain embodiments, the number of bearing channels 364 that may be used may be more or less. In certain embodiments, the guide channel 364 is a single channel of a circular channel formed adjacent to at least two edges of the mounting plate 232. In certain embodiments, the guide channel 364 may be a single channel connecting the three bearing channels 364 shown in Figure 3C . In certain embodiments, the center point of the bearing channel 364 may not be collinear with the zp axis. In certain embodiments, the bearing channel 364 is generally curved about the zp axis. In certain embodiments, the bearing channel 364 may be formed by a positioning plate 234 ( Figure 3B ), and an arched guide 362 ( Figure 3B ) may be connected to the mounting plate 232.

[0089] Figure 3D and 3E A top view of the UUT alignment system 105 is shown in accordance with certain embodiments. In particular, Figure 3D and 3E show the first rotation system 350 rotating the mounting plate 232, as described above. In particular, Figure 3D shows the mounting plate 232 in a home position (e.g., a first position or a position aligned with the positioning plate 234).

[0090] When the mounting plate 232 is in the home position, the shaft 352D contacts the first bracket 352A. The rotation actuator 352C moves the shaft 352D towards or away from the first bracket 352A to move the mounting plate 232 to a different position. When the shaft 352D moves towards the first bracket 352A, the shaft 352D pushes the first bracket 352A and the mounting plate 232. The bearing channel 364 moves on the guide pad 363A and converts the linear motion of the shaft 352D into the rotational motion of the mounting plate 232, as shown in Figure 3E .

[0091] Figure 3E Shows the mounting plate 232 rotated by the first rotation system 350. When the shaft 352D moves the first bracket 352A towards the second bracket 352B, the compliant mechanism 352E is compressed therebetween. When the shaft 352D moves away from the first bracket 352A, the compliant mechanism 352E moves the first bracket 352A together with the shaft 352D and towards the rotary actuator 352C. Thus, the rotary actuator 352C is used to rotate the mounting plate 232.

[0092] The compliant mechanism 352E includes an elastic body that stores mechanical energy, such as a compression spring. For example, when the compliant mechanism 352E is compressed between the first bracket 352A and the second bracket 352B, it stores mechanical energy. When the shaft 352D is withdrawn, the compliant mechanism 352E applies the stored mechanical energy (e.g., force) to and moves the first bracket 352A, thereby causing the mounting plate 232 to move relative to the positioning plate 234. Thus, the compliant mechanism 352E is "biased" to move the first bracket 352A in a direction away from the second bracket 352B and to rotate the mounting plate 232 about the z-axis relative to the positioning plate 234. The rotation of the mounting plate 232 causes the transport media, such as the matrix tray 104, on the adjustment system 101A located on the surface of the mounting plate 232 described above to also rotate about the z-axis.

[0093] In some embodiments, the rotary actuator 352C moves the positioning plate 234 in a direction opposite to the biasing direction of the compliant mechanism 352E. In some embodiments, the rotary actuator 352C is directly connected to the first bracket 352A, such as through a support pivot, such as a gimbal mount, that allows the first bracket 352A to rotate relative to the shaft 352D. In these embodiments, the second bracket 352B and the compliant mechanism 352E may not be required. In some embodiments, the compliant mechanism 352E can be extended to "bias" the first bracket 352A to move in a direction towards the second bracket 352B.

[0094] Figure 3F and Figure 3G Front and left side views of the UUT alignment system 105 are depicted according to certain embodiments. In particular, Figure 3F and Figure 3G Show the adjustment system 101A in its starting position. In the illustrated embodiment, the actuators 356A and 356B simultaneously retract the shafts 357A and 357B, rotating the first edge 335B of the positioning plate 234 downward or "tilting" it about the x-axis to the base plate 236, as Figure 3H and Figure 3IAs shown. The compliant mechanism 358 is connected to the plates 234 and 236 near each actuator 356A and 356B. When the shafts 357A and 357B are retracted, the compliant mechanism 358 is biased to pull the positioning plate 234 in the direction towards the base plate 236, as discussed with Figure 3H and Figure 3I The actuators 356A and 356B can move the positioning plate 234 in a direction opposite to the biasing direction of the compliant mechanism 358.

[0095] Alternatively, the actuator 356B can retract the shaft 357B while the actuator 356A remains stationary on the shaft 357A. This actuation causes the positioning plate 234 and the UUT placed thereon to rotate or "tilt" about the y-axis. This can optimize the positioning of the UUT during inspection, thereby improving inspection accuracy.

[0096] Figure 3H and Figure 3I Front and left side views of the UUT alignment system 105 are depicted according to certain embodiments. In particular, Figure 3H and Figure 3I show the adjustment system 101A rotated about the xb-axis to the first maximum adjustment position. The shafts 357A and 357B are fully retracted, and the length of the first edge 335B is closest to the base plate 236. When the actuators 356A and 356B retract the shafts 357A and 357B, the grooves 361 of the positioning plate 234 slide over the universal balls 360, thereby rotating the positioning plate 234 and the transport medium on which the UUT is placed.

[0097] In certain embodiments, only one compliant mechanism 358 is used to pull the positioning plate 234 in the biasing direction towards the base plate 236. In certain embodiments, the compliant mechanism 358 is not used, and the weight of the adjustment system 101A ( Figure 1A ) will move the positioning plate 234 to the base plate 236. In certain embodiments, the actuators 356A and 356B can be directly coupled to the base plate 236 and directly control the rotation of the positioning plate 234 about the xb and yb axes with respect to the universal balls 360, so that the compliant mechanism 358 is not required. In these embodiments, the shafts 357A and 357B can be directly coupled to the base plate 236, and the actuators 356A and 356B can extend and retract the shafts 357A and 357B to rotate the mounting plate 232.

[0098] Figure 3J and 3K Front and right side views of the UUT alignment system 105 are shown according to certain embodiments. In particular, Figure 3J and 3KShows the rotation of the adjustment system 101A about the yb axis in the second maximum adjustment position. The second axis 357B is fully retracted, while the first axis 357A is extended (or fully extended). The length of the second edge 335C is closest to the base plate 236. When the actuator 356B retracts the second axis 357B, the groove 361 of the positioning plate 234 slides over the universal ball 360.

[0099] Although Figures 3H to 3K Rotation about a single axis has been discussed, the UUT alignment system 105 can rotate the adjustment system 101A about both the xb and yb axes by retracting the second axis 357B while extending the first axis 357A. The axes 357A and 357B can also be extended and retracted to different positions to rotate the adjustment system 101A about both the xb and yb axes and orient the positioning plate 234 to different positions.

[0100] Additional embodiments of the adjustment system

[0101] Figure 4 A three - dimensional view of the adjustment system 401 is depicted according to certain embodiments. The function of the adjustment system 401 is similar to that of the adjustment system 101A, except for the parts described. For example, the adjustment system 401 can be used with the positioning system 101B ( Figure 1A )

[0102] The adjustment system 401 includes a transport media transport system 403 and a media UUT alignment system 405. The transport media transport system 403 includes a first support rail 420, a second support rail 422 (e.g., sub - rails 422A and 422B), a first motion system 426, a second motion system 428, a mounting rail 230, a mounting plate 232, and a positioning plate 234. The UUT alignment system 405 is similar to the UUT alignment system 105 associated with and Figures 3A - 3K unless otherwise noted.

[0103] The first motion system 426 uses the support rails 420 and 422 to grip a transport media, such as a matrix tray 104. The support rails 420 and 422 contain guide rails 239 to guide the support rails 420 and 422 along the track 238. Thus, the support rails 420 and 422 are movably coupled to the track 238. The track actuator 240 uses a shaft 442 coupled to each track actuator 240 to move the support rails 420 and 422. The track actuator 240 is also coupled to the mounting rail 230 coupled to the mounting plate 232. Each shaft 442 includes a first threaded portion 443A to engage a first threaded hole 444A or a threaded insert (not shown) formed in the first support rail 420. The threaded hole 444A may be similar to that associated with Figure 2AAssociated threaded holes 244. Each shaft 442 further includes a second threaded portion 443B for engaging a second threaded hole 444B formed in the second support rail 422 or a threaded insert (not shown).

[0104] The thread configurations of the threaded portions 443A and 443B and the threaded holes 444A and 444B are such that when the track actuator 240 rotates the shaft 442 clockwise (e.g., in a first direction), the support rails 420 and 422 move apart from each other. When the track actuator 240 rotates the shaft 442 counterclockwise (e.g., in a second direction), the support rails 420 and 422 move closer to each other. This configuration of the first and second support rails 420 and 422 can be adjusted to a desired width, such as the width of a transport medium, such as a matrix tray 104 or a substrate tray 110. This capability allows various types of UUTs to be inspected using only one system, thereby reducing costs and equipment complexity. In some embodiments, the threads of the threaded portion 443A and the threaded hole 444A may be right-handed threads, while the threads of the threaded portion 443B and the threaded hole 444B may be left-handed threads, or vice versa.

[0105] The second support rail 422 includes a first sub-rail 422A and a second sub-rail 422B, and a gap 424 is formed between the sub-rails 422A and 422B. The configuration of the gap 424 is similar to that of the gap 224 and may provide clearance for the end effector of a robot (not shown). The robot can be used to position a UUT on the matrix tray 104, for example, through an equipment front-end module (EFEM). The gap 424 may provide additional clearance for other equipment (e.g., along the z-axis), such as inspection optics or lighting sources, in order to clear the second support rail 422. In some embodiments, the second support rail 422 is a single support rail or a unified body, similar to the second support rail 222 discussed in Figure 2A connection with.

[0106] The second motion system 428 is connected to the support rails 420 and 422. In Figure 4In the illustrated embodiment, the second motion system 428 includes a conveying system 427 (e.g., a first conveying system 427A, a second conveying system 427B, and a third conveying system 427C). These conveying systems 427 are positioned parallel to each other and operate in such a way that the movement of the belt on the conveying system occurs along the same axis (e.g., the x-axis). These conveying systems 427 are also similar to the conveying system 227, except for the differences mentioned. The first conveying system 427A is connected to and extends along the length of the first support rail 420. The second and third conveying systems 427B and 427C are connected to the second support guide rail 422. The second conveying system 427B is connected to and runs along the length of the sub-rail 422A. The third conveying system 427C is connected to and runs along the length of the sub-rail 422B. The second motion system 428 is similar to the second motion system 228 and is configured to provide linear motion of a transport medium, such as the matrix tray 104, along the axis of the second motion system 428 (e.g., the x-axis).

[0107] Example method for inspecting the UUT

[0108] Figures 5A - 5C Flowcharts showing methods 500, 520, and 540 for inspecting media in certain embodiments are shown. Figures 6A - 6H Different perspectives of the system 100 in the operations of methods 500, 520, and 540 are shown according to certain embodiments. In particular, Figures 6A - 6H Outlines the method 500 at different stages (as Figure 5A shown), 520 (as Figure 5B shown), and 540 (as shown in Figure C) schematic diagrams of the system 100, using the matrix tray 104 as the medium. Thus, for the sake of clarity, Figures 5A - 5C and Figures 6A - 6H are described together herein.

[0109] As Figure 6A shown, and in Figures 5A - 5C the operations 502, 522, and 542 of methods 500, 520, and 540, the transport medium (e.g., the matrix tray 104 with the UUT on it) is placed on the system 100 ( Figure 1A ), for example, on the second motion system 228 of the system 100. In particular, the matrix tray 104 is placed on the belts 248A and 248C of the conveying systems 227A and 227B. The matrix tray 104 can be loaded onto the second motion system 228 before method 500, for example, in the case related to Figure 1A by a dispenser (e.g., dispenser 102 or dispenser 108) or by the EFEM for loading.

[0110] In Figure 5A the operation 504, as Figure 6AAs shown, a transport medium (e.g., matrix tray 104) is moved to a first position along the lengths of first and second support tracks 220 and 222 using at least one conveying system 227A, 227B, and 227C. In Figure 6A the depicted embodiment, a second motion system 228 moves the matrix tray 104 near an inspection system 140 ( Figure 1A ) until the matrix tray 104 contacts an obstruction 680 (e.g., a first obstruction 680A), such as an extendable member 681A of the first obstruction 680A. The obstruction 680 extends to prevent the matrix tray 104 from moving further along a desired point (e.g., at the obstruction 680) on the conveying systems 227A and 227B. In some embodiments, the obstruction 680 may be referred to as a gate or a fence. The first obstruction 680A may be connected to the first support track 220 and includes an extendable member 681A that is connected to an obstruction actuator 681B. The obstruction actuator 681B extends and retracts the extendable member 681A in a manner orthogonal to the movement path of the matrix tray 104 on the conveying systems 227A and 227B. For example, when retracted, the extendable member 681A may be retracted into an obstruction recess 623 of the second support track 222 to allow the matrix tray 104 to pass through the second motion system 228. When extended, the extendable member 681A may be placed above the belt 248A or in the area between the belts 248A of the conveying systems 227B and 227C to restrict the movement of the matrix tray 104 on the second motion system 228. The motor-driven pulley 247A rotates to move the belt 248A, thereby moving the matrix tray 104.

[0111] Several methods can be used to determine whether the matrix tray 104 contacts the first obstruction 680A. In some embodiments, the angular position of the motor-driven pulley 247A can be monitored, e.g., by a system controller 199 ( Figure 1A)(Monitor. When the angular position of the motor-driven pulley 247A reaches a predetermined value, the first barrier 680A may be actuated, and the predetermined value depends on the length of the belt, the length of the matrix tray 104, and the circumference of the pulley. In some embodiments, sensors may be used, such as inputs to the system controller 199. In some embodiments, the sensor may be a contact sensor that senses electrical contact or magnetic fields on the circuit board to determine whether the matrix tray 104 contacts the first barrier 680A. In some embodiments, the extensible member 681A may use a bend sensor or a strain gauge to detect whether the extensible member 681A is deformed, such as by changing the resistance of the bend sensor or the strain gauge. In some embodiments, proximity sensors may be used, such as inductive, capacitive, ultrasonic, infrared, or magnetic proximity sensors, etc. In some embodiments, the second motion system 228 may move the matrix tray 104 to a predetermined position at a predetermined distance, and the first barrier 680A may act as a stop to prevent overshooting the predetermined position. For example, the system controller 199 may control the movement of the belt 248A by controlling the rotation of the motor-driven pulley 247A, such as through an encoder. Alternatively, the measurement of contacting the barrier 680 may be performed by the columns of the UUTs on the matrix tray 104 instead of measuring the matrix tray 104 itself. Since the belt indexing motion error is cumulative, barriers (e.g., barrier 680) may be used between each column, every other column, or any desired number of UUT columns on the matrix tray 104.)

[0112] The matrix tray 104 contains several eyepieces 106 (e.g., UUTs). In Figure 6A the depicted embodiment, the matrix tray 104 contains eight eyepieces (e.g., first to eighth eyepieces 106A-H). Each eyepiece 106 is associated with a coordinate system. For example, the first eyepiece 106A has a coordinate system xe1, ye1, and ze1, the second eyepiece 106B has a coordinate system xe2, ye2, and ze2, and so on. Due to factors such as manufacturing tolerances, the coordinate system of each eyepiece 106 may be slightly different from the orientation of other eyepieces 106. For example, the xe1, ye1, and ze1 axes of the first eyepiece 106A may each be oriented not parallel to the corresponding xe2, ye2, and ze2 axes of the second eyepiece 106B. The eyepieces 106A-H and their respective coordinate systems will be further discussed in subsequent figures.)

[0113] In some embodiments, the barrier actuator 681B may be a linear actuator, such as a mechanical or electromechanical, hydraulic, pneumatic, or piezoelectric linear actuator, or a combination thereof. In these embodiments, the linear actuator may linearly move the extensible member 681A into or out of the path of the matrix tray 104, such as moving in directions away from and towards the linear actuator.)

[0114] Alternatively, the barrier actuator 681B can be a rotary actuator, such as a servo or servo motor, stepper motor, rack and pinion actuator, vane actuator, screw actuator, planetary actuator, linear cylinder, Swiss shaft actuator, sprocket actuator, or direct drive motor, and so on. In these embodiments, the rotary actuator can rotate the extendable member 681A into or out of the path of the matrix tray 104.

[0115] The extendable member 681A can be any suitable structure. In embodiments where the barrier actuator 681B is a linear actuator, the extendable member 681A can be a rod or shaft that can enter or exit the path of the matrix tray 104. In embodiments where the barrier actuator 681B is a rotary actuator, the extendable member 681A can be an L-shaped bracket and the bottom of the "L" can be rotated into or out of the path of the matrix tray 104.

[0116] In certain embodiments, Figures 5A - 5C operations 502, 522, and 542 of methods 500, 520, and 540 in Figure 2A include using the track actuator 240 ( Figure 2A to adjust the distance between the first and second support tracks 220 and 222 (e.g.,

[0117] the gap 221 in Figure 6B ). In these embodiments, the distance can be adjusted to receive the transport medium on the conveyor system 227. Figure 2A In the embodiment shown in Figure 2A the first motion system 226 moves the first support track 220 towards the second support track 222 to clamp the matrix tray 104. In certain embodiments of method 500, the first motion system 226 can clamp the matrix disk on the inner sides of the first and second support tracks 220 and 222 by using the track actuator 240 (

[0118] to reduce the distance between the first and second support tracks 220 and 222 (e.g., Figure 2A the gap 221 in

[0119] The extensible member 681A of the first barrier 680A can be retracted before or after the matrix tray 104 is grasped. The extensible member 681A can also remain extended after the matrix tray 104 is grasped.

[0120] In method 520, when the transport medium (e.g., matrix tray 104) and the associated UUT are moved to the position for inspection by the conveyor systems 227A and 227B, the barrier 681 is used to stop the transport medium, preferably at the first row of UUTs of the matrix tray 104. In operation 524, the actuators 114A and 114B adjust the alignment camera (e.g., imaging system 146) to a position to obtain a reference image of the first column of initial UUTs of the matrix tray 104. The alignment camera and the reference point 683 then determine the amount of rotation needed about the z-axis to keep the matrix tray 104 aligned during inspection. Then, the rotation actuator 352C rotates the positioning plate 234, thereby also rotating the matrix tray 104. In operation 528, the distance sensor is used to determine the distances between the matrix tray 104 and three different points on the UUT of the inspection system 140. By finding the orientation of the XY plane of the matrix tray 104, this information determines the amount of rotation needed about the x-axis and y-axis. The first and second actuators 357A and 357B then correct the angular rotation about the x-axis and y-axis through pivot joints (e.g., universal balls 360). Once the matrix tray 104 is realigned, the UUT is inspected by the inspection system 140. After the UUT is inspected, the first and second actuators 114A and 114B adjust the matrix tray 140 so that the next UUT in the initial column of the initial UUTs is aligned with the inspection system 140. Subsequent UUTs undergo the same realignment procedure as the initial UUT. Once all UUTs in the initial column have been inspected, the conveyor systems 227A and 227B adjust the matrix tray 140 so that the next column of UUTs can be inspected by the inspection system 140 in a manner similar to the initial UUT column.

[0121] In some embodiments, as Figure 5B shown in operation 524 of Figure 1A and 1B the related discussion, the positioning system 101B uses the first positioning actuator 114A to move the movable plate 119 relative to the fixed plate 118. The positioning system 101B also uses the second positioning actuator 114B to move the base plate 236 relative to the fixed plate 118. In these embodiments, the positioning system 101B can move the adjustment system 101A connected to the movable plate 119.

[0122] In Figure 6C and 6D the depicted embodiments, and in Figures 5A - 5CIn operations 504, 524, 526, 528, and 544, the inspection system 140 is used in conjunction with the UUT alignment system 105 to position, orient, and align the matrix tray 104 before inspection by the inspection device 142. In particular, the distance sensor 144 is used to measure the distance to the surface of the matrix tray 104, the matrix tray 104 is reoriented, the imaging system 146 is used to measure the alignment of the matrix tray 104, and the matrix tray 104 is realigned.

[0123] The UUT alignment system 105 aligns the matrix tray 104 according to each eyepiece 106 (e.g., Figure 6A the first through eighth eyepieces 106A - H in Figure 6C and 6D It is shown that the first eyepiece 106A is being inspected by the inspection system 140, although the operations and processes described also apply to the second through eighth eyepieces 106B - H. The extendable member 681A of the first barrier 680A is extended, while the second barrier 680B shows that the extendable member 681A has been retracted. The second barrier 680B can be connected to the second support rail 222 and is discussed in Figure 6H in

[0124] The reorientation of the matrix tray 104 is performed as follows. The distance sensor 144 measures the distances to at least three points on the first eyepiece 106A (e.g., the first distance point 682A, the second distance point 682B, and the third distance point 682C) to define the x - y plane. The positioning system 101B moves the adjustment system 101A to a position such that the distance sensor 144 is directly above the matrix tray 104 and approximately perpendicular to the points to be measured on the first eyepiece 106A. For example, the distance sensor 144 is located at the first distance point 682A as shown in Figure 6C and 6D After the distance sensor 144 measures the distance to the first distance point 682A, the positioning system 101B moves the movable plate 119 and the fixed plate 118 using the first and second positioning actuators 114A and 114B, as described in operations 524 and 526 of Figure 5B and as shown in Figure 1A and 1B The positioning system 101B can also move the adjustment system 101A so that the distance sensor 144 is above the second distance point 682B and measures the distance to the second distance point 682B. This process is repeated for the third distance point 682C. In some embodiments, the distance sensor 144 may move relative to the first eyepiece 106A.

[0125] The system controller 199 determines the orientation of the first eyepiece 106A based on the measured distances (e.g., with respect to the first eyepiece coordinate system xe1, ye1, and ze1 discussed in Figure 6A inFigure 5B and 5C the operations 528 and 544 shown in, e.g., Figures 6C - 6E as shown, the positioning plate 234 is moved using actuators (e.g., the first actuator 356A and / or the second actuator 356B) to adjust the orientation of the transport medium (e.g., the matrix tray 104). If the orientation of the eyepiece coordinate system is not aligned with the orientation of the reference coordinate system, it may be necessary to move the positioning plate 234. The UUT alignment system 105 rotates the matrix tray 104 so that the z-axis (e.g., ze1) of the first eyepiece 106A is aligned with the z-axis of the reference coordinate system, e.g., within ±5 degrees, e.g., within ±2 degrees, e.g., within ±1 degree, e.g., within ±0.5 degree, e.g., within ±0.25 degree, e.g., within ±0.08333 degrees (5 arc minutes). In some embodiments, Figure 5C the method 540 in includes rotating the matrix tray 104 about the first and second axes of the reference coordinate system, e.g., about the x-axis and the y-axis, to align the z-axis of the first eyepiece 106A. The reference coordinate system is stationary (e.g., fixed) relative to the moving parts of the matrix tray 104 and the UUT alignment system 105.

[0126] In the depicted embodiment, the reference coordinate system is the coordinate system of the gimbal ball 360 (e.g., the xb and yb axes). If the distances of any three of the distance points 682A-C are different from the distances of the other distance points 682A-C, the UUT alignment system 105 rotates the matrix tray 104 about the xb and yb axes of the gimbal ball 360 to align the matrix tray 104 such that the plane formed by at least a portion of the matrix tray 104 (e.g., the first eyepiece 106A) is substantially parallel to the plane formed by the x and y axes of the reference coordinate system (e.g., the coordinate system of the inspection system 140). In some embodiments, the distance to each of the distance points 682A-C after adjustment (or without adjustment for the matrix tray 104) may be within 5 arc minutes. In some embodiments, the distance of each of the distance points 682A-C is compared to a reference distance, and then the matrix tray 104 is rotated until each distance is within 5 arc minutes.

[0127] The x-axis and y-axis of the coordinate system are aligned as follows. The first and second actuators 356A and 356B move the first and second axes 357A and 357B, respectively, as Figures 3F - 3KAs discussed. For example, if the distance to the first distance point 682A is greater than the distances to the second and third distance points 682B and 682C, the second actuator 356B may extend the second shaft 357B or retract the first shaft 357A to align the first distance point 682A with the second and third distance points 682B and 682C. If the distance to the second distance point 682B is greater than the distances to the first and third distance points 682A and 682C, and the distance to the first distance point 682A is less than the distance to the second distance point 682B and greater than the distance to the third distance point 682C, the first and second actuators 356A and 356B may extend the first and second shafts 357A and 357B such that the first shaft 357A extends a greater distance than the second shaft 357B.

[0128] Once the x-axis and y-axis are aligned, the rotation lock 370 maintains the orientation of the matrix tray 104. For example, the rotation lock actuator 371B causes the rotation lock shaft 371A to lock or fix the orientation or position of the matrix tray 104. The rotation lock 370 ensures that the matrix tray 104, particularly the first eyepiece 106A, remains in the plane formed by at least a portion of the matrix tray 104, for example, if the matrix tray 104 moves or rotates.

[0129] The system controller 199 further determines the alignment of the first eyepiece 106A based on the characteristics of the first eyepiece 106A. If the eyepiece coordinate system is not aligned with the reference coordinate system, the UUT alignment system 105 rotates the matrix tray 104 to align the x and y axes (e.g., xe1 and ye1) of the first eyepiece 106A with the x and y axes (e.g., xb and yb) of the reference coordinate system such that each axis is within + / - 5 degrees, such that each axis is within + / - 2 degrees, such that each axis is within + / - 1 degree, such that each axis is within + / - 0.5 degree, such that each axis is within + / - 0.25 degree, for example, + / - 0.08333 degrees (5 arc minutes).

[0130] In the illustrated embodiment, the x and y axes of the coordinate system are aligned as follows. The characteristics of the first eyepiece 106A based on which the alignment is made are fiducial points (e.g., the first fiducial point 683A and the second fiducial point 683B) or fiducial marks. The fiducial points 683A to 683B are reference points for measurement. The imaging system 146 determines the alignment of the matrix tray 104 based on the fiducial points 683A and 683B. For example, the imaging system 146 compares the actual positions of the fiducial points 683A to 683B with the expected positions stored in the memory of the system controller 199 (e.g., Figure 8 in the memory 850). The imaging system 146 determines the "offset" or angle by which the matrix tray 104 must move or rotate to align the matrix tray 104. The rotation actuator 352C moves the shaft 352D to rotate the mounting plate 232, as associated withFigure 3D and 3E As discussed in connection with 3E . The fiducial points can be aligned to within + / - 5 arc minutes of the positional tolerance or vector tolerance (e.g., the rotation of the vector connecting the fiducial points is aligned about the z-axis). Figure 5B Certain embodiments of method 520 in Figure 5B include using a rotary actuator 352C to rotate the mounting plate 232 relative to the positioning plate 234. In some embodiments, the system controller 199 uses the imaging system 146 as an input to determine the alignment of the matrix tray 104, as discussed in connection with Figure 8 the relevant discussion.

[0131] In some embodiments, the positioning system 101B moves the adjustment system 101A to align the fiducial points 683A to 683B. In some embodiments, the imaging system 146 can be a camera or a video camera. In some embodiments, the imaging system 146 can be a fiducial camera. In some embodiments, the imaging system 146 can use any one of visible light, infrared light, or ultraviolet light to capture the positions of the fiducial points 683A to 683B.

[0132] In Figure 6C and 6D the depicted embodiment, the second fiducial point 683B is located near the second distance point 682B, such as co-located or overlapping. In certain embodiments, the reference markers 683 and the distance points 682 may be spatially separated, such as not co-located or overlapping.

[0133] In certain embodiments, the positioning system 101B moves the adjustment system 101A such that the imaging system 146 is directly above and approximately perpendicular to the first binocular 106A. In certain embodiments, the adjustment system 101A remains in the previously operated position, such as the position after aligning the z-axis of the first binocular 106A with the z-axis of the reference coordinate system. In certain embodiments, the imaging system 146 may move relative to the first binocular 106A.

[0134] The matrix tray 104 is inspected by the inspection device 142. In the depicted embodiment, the matrix tray 104 is inspected after being oriented and aligned by the UUT alignment system 105. The inspection device 142 inspects the surface of the first binocular 106A, such as the surface within the line of sight of the inspection device 142. Figure 5C Certain embodiments of method 540 in Figure 5C further include inspecting the surface of the first binocular 106A. In certain embodiments, the inspection device 142 measures the profile of the surface. In certain embodiments, the inspection device 142 measures the features of the surface, such as measuring transparency or reflectivity, such as analyzing elemental composition (e.g., performing energy dispersive spectroscopy (EDS)), such as inspecting for cracks, such as creating a two-dimensional or three-dimensional map of the surface, to name just a few examples.

[0135] In some embodiments, inspection device 142 can be a metrology system. In some embodiments, inspection device 142 can be interconnected with a metrology system. In some embodiments, inspection device 142 can be at least one of several examples including, but not limited to, a transparency meter, a reflectance meter, an illuminance meter, a scanning electron microscope (SEM), a transmission electron microscope (TEM), a two-dimensional or three-dimensional optical profiler, a laser interferometer, or a laser scanner.

[0136] In some embodiments, positioning system 101B moves adjustment system 101A such that inspection device 142 is positioned directly below or approximately perpendicular (or orthogonal) to first eyepiece 106A. In some embodiments, inspection device 142 may be movable relative to first eyepiece 106A.

[0137] In some embodiments, distance sensor 144 can be a displacement sensor. In some embodiments, distance sensor 144 can be a non-contact sensor, such as, for example, an optical displacement sensor, a linear proximity sensor, a laser displacement sensor, or an ultrasonic displacement sensor, to name just a few. In some embodiments, distance sensor 144 can be a confocal sensor.

[0138] Inspection device 142 inspects eyepieces 106 on matrix tray 104 using a reference coordinate system. In the depicted embodiment, the reference coordinate system used to orient and align matrix tray 104 is the coordinate system of gimbal 360. In these embodiments, if the coordinate systems of gimbal 360 and inspection device 142 are not aligned, inspection system 140 can transform the coordinate system of gimbal 360 into the coordinate system of inspection device 142, for example, via system controller 199 ( Figure 1A ). In some embodiments, the reference coordinate system can be the coordinate system of inspection device 142. In these embodiments, the matrix disk (e.g., first eyepiece 106A) can be aligned to the coordinate system of inspection device 142. In some embodiments, the reference coordinate system can be the coordinate system of distance sensor 144 or imaging system 146.

[0139] In the depicted embodiment, UUT alignment system 105 aligns matrix tray 104 prior to inspecting each eyepiece 106, which facilitates manufacturing matrix tray 104 with greater dimensional tolerances than current matrix disks. For example, the flatness or parallel tolerance of matrix tray 104 can be wider than JEDEC standards. Additionally, transport media transport system 103 can accommodate matrix trays 104 of various sizes.

[0140] In some embodiments, the media alignment system 105 does not align the matrix tray 104 before inspecting each eyepiece 106. For example, the dimensional tolerances of the matrix tray 104 may be such that the matrix tray 104 only needs to be aligned to one eyepiece 106, every other eyepiece 106, or only to some of the eyepieces 106. In some embodiments, the distance points 682A-C can be fiducial markers 683 or fiducials.

[0141] Figure 6E In accordance with some embodiments is shown Figure 6C a cross-sectional view of. In particular, Figure 6E shows the positioning of the matrix tray 104 and the first eyepiece 106A, while the distance sensor 144 measures the distance to the first eyepiece 106A. Some parts of the system 100, such as the UUT alignment system 105, the track 238, and the guide rail 239, are not shown to simplify the illustration.

[0142] The matrix tray 104 is shown positioned on the conveyor system 227B and contacting the first barrier 680A. The first eyepiece 106A is shown below the distance sensor 144, while the distance sensor 144 is shown measuring the distance (d) to the first eyepiece 106A. Figure 5B Certain embodiments of the method 520 in Figure 6D further include using the distance sensor 144 to measure a first distance to the first distance point 682A ( Figure 6D ), and a second distance to a second distance point 682B ( Figure 3A ). The actuators 356A and 356B (

[0143] The first eyepiece 106A is shown above the inspection device 142. The inspection device 142 maintains a direct line of sight through the openings 133A-C and the opening 117 ( Figure 1A ) when inspecting the first eyepiece 106A.

[0144] In some embodiments, components of the inspection system 140 (e.g., the inspection device 142, the distance sensor 144, or the imaging system 146) may move left and right (as shown on the page) relative to the first eyepiece 106A. In some embodiments, components of the inspection system 140 may move into and out of the page relative to the first eyepiece 106A. In some embodiments, components of the inspection system 140 may move up and down (as shown on the page) relative to the first eyepiece 106A. The components of the inspection system 140 can be moved by actuators, such as similar to Figure 3A the rotational or linear actuators discussed in

[0145] Figure 6F shows the second eyepiece 106B of the matrix tray 104 being inspected. In particular,Figure 6F shows that the operations related to Figures 6C - 6E are performed on the second eyepiece 106B adjacent to the first eyepiece 106A.

[0146] The inspection system 140 and the UUT alignment system 105 are used to orient and align the matrix tray 104 before inspection by the inspection device 142. The positioning system 101B positions the second eyepiece 106B to be measured by the inspection system 140, for example, by moving the adjustment system 101A along the y-axis ( Figure 1A ) using the second positioning actuator 114B. The second eyepiece 106B is placed below the distance sensor 144, which measures the distances to the distance points 682D - F on the second eyepiece 106B. The measured distances are used to determine the orientation of the second eyepiece 106B (e.g., the second eyepiece coordinate system xe2, ye2, and ze2 in Figure 6A ). The UUT alignment system 105 can orient the matrix tray 104 based on the measured distances, for example, by aligning the z-axis (e.g., ze2) of the second eyepiece 106B with the z-axis of the reference coordinate system. The UUT alignment system 105 aligns the second eyepiece 106B using the first and second actuators 356A and 356B, which is similar to the alignment of the first eyepiece 106A discussed in Figure 6C and 6D .

[0147] The second eyepiece 106B further includes a first fiducial point 683C and a second fiducial point 683D. The imaging system 146 determines the alignment of the matrix tray 104 based on the fiducial points 683C and 683D. The UUT alignment system 105 uses the rotary actuator 352C to align the x-axis and y-axis of the coordinate system, similar to the alignment of the first eyepiece 106A discussed in Figure 6C and 6D . Once the second eyepiece 106B is oriented and aligned, the inspection device 142 inspects the surface of the second eyepiece 106B.

[0148] Figure 6G Shows the fourth eyepiece 106D of the matrix tray 104 being inspected. In particular, Figure 6G shows that the operations related to Figures 6C - 6E are being performed on the fourth eyepiece 106D, which is located next to the second eyepiece 106B and is in a diagonal position to the first eyepiece 106A.

[0149] In the illustrated embodiment, the fourth eyepiece 106D is inspected after the second eyepiece 104B and before the third eyepiece 106C. The second motion system 228 is used to position the matrix tray 104 to inspect the fourth eyepiece 106D. After the second eyepiece 104B is inspected, the extendable member 681A of the first barrier 680A is retracted, the support rails 220 and 222 release the matrix tray 104, and then the second motion system 228 moves the matrix tray 104 to position the fourth eyepiece 104D below the distance sensor 144. For example, the second motion system 228 moves the matrix tray 104 along the x-axis ( Figure 1A ), and stops when the fourth eyepiece 104D is properly positioned. The second motion system 228 can position the matrix tray 104 without using the positioning system 101B.

[0150] The system controller 199 may use open-loop control to move the matrix tray 104. In some embodiments, the belt actuator 246 moves the belt 248 for a predetermined time, thereby moving the matrix tray 104 a predetermined distance. In some embodiments, the belt actuator 246 includes an encoder for determining the position of the matrix tray 104. In some embodiments, the barrier 680 is used to ensure that the fourth eyepiece 106D is positioned below the distance sensor 144, which is similar to the first barrier 680A mentioned in the discussion regarding Figure 6A . In some embodiments, the positioning system 101B is used to move the matrix tray 104 so as to position the fourth eyepiece 106D below the distance sensor 144.

[0151] When the fourth eyepiece 106D approaches or is below the distance sensor 144, the support rails 220 and 222 grasp the matrix tray 104 to secure the matrix tray 104 to the adjustment system 101A. The distance sensor 144 measures the distance points 682J-L (the distance points 682G-I are related to the third eyepiece 106C, and the eyepiece may be inspected after the fourth eyepiece 106D is inspected), and the UUT alignment system 105 can orient the matrix tray 104 according to the measured distance, for example, by aligning the z-axis of the fourth eyepiece 106D with the z-axis of the reference coordinate system. The imaging system 146 determines the alignment of the matrix tray 104 based on the first reference point 683G and the second reference point 683H of the fourth eyepiece 106D (the reference points 683E and 683F are related to the third eyepiece 106C), the UUT alignment system 105 aligns the matrix tray 104, and the inspection device 142 inspects the surface of the fourth eyepiece 106D.

[0152] The third eyepiece 106C can be inspected before the fifth eyepiece 106E is inspected, using the same Figures 6C - 6ERelated operations. The positioning system 101B positions the second eyepiece 106B. The UUT alignment system 105 orients the matrix tray 104 using the distance points 682G-I. The UUT alignment system 105 aligns the matrix tray 104 using the reference points 683E and 683F. The inspection device 142 inspects the surface of the fourth eyepiece 106D.

[0153] Figure 6H The fifth eyepiece 106E of the matrix tray 104 being inspected is displayed. In particular, Figure 6H Displays the operations performed on the fifth eyepiece 106E related to Figures 6C - 6E Related operations.

[0154] The extendable member 681A of the second barrier 680B is extended to provide a stop point for the matrix tray 104. The second motion system 228 moves the matrix tray 104 after inspecting the third eyepiece 106C and positions the fifth eyepiece 106E below the distance sensor 144. When the matrix tray contacts the second barrier 680B, the second motion system 228 stops moving the matrix tray 104. The second barrier 680B is positioned on the second support rail 222 such that when the matrix tray 104 contacts the second barrier 680B, the fifth eyepiece 106E (or the sixth eyepiece 106F in some embodiments) is positioned below the distance sensor 144. The first motion system 226 grasps the matrix tray 104 between the support rails 220 and 222.

[0155] The adjustment system 101A orients and aligns the matrix tray 104 before the inspection device 142 performs an inspection. The distance sensor 144 measures the distance to the distance points 682M-O, and the UUT alignment system 105 orients the matrix tray 104 as needed. The imaging system 146 uses the first and second reference points 683I and 683K to determine the alignment of the matrix tray 104, and the UUT alignment system 105 aligns the matrix tray 104 as needed. The inspection device 142 inspects the surface of the fifth eyepiece 106E.

[0156] The sixth, seventh, and eighth eyepieces 106F-H can be inspected after inspecting the fifth eyepiece 106E. The positioning system 101B, the second motion system 228, and the adjustment system 101A can be used to move, position, orient, and align the matrix tray 104 for each eyepiece 106F-H for the discussion related to Figures 6A - 6H Related. The inspection device 142 inspects the surface of each eyepiece 106F-H. After the inspection is completed, for example, after each eyepiece 106A-H is inspected, the matrix tray 104 can be returned to the matrix tray dispenser 102.

[0157] Although FIGS. 5-6H discuss the matrix tray 104 as a transport medium, other types of transport media can be used to replace the matrix tray 104. In certain embodiments, the system 100 can be used to Figure 1A and 2D align and inspect the substrates 112 in the substrate tray 110 discussed in

[0158] Examples of solid particle removal systems

[0159] Figure 7A shows a three - dimensional view of the solid particle removal system 786 for the system 100 ( Figure 1A ). In particular, Figure 7A shows a plurality of vacuum enclosures 788 (e.g., the inclined vacuum enclosure 788A and the straight vacuum enclosure 788B) according to certain embodiments on the alignment system 101A.

[0160] The solid particle removal system 786 includes a first support rail 720, a second support rail 722, an inclined vacuum enclosure 788A, and a straight vacuum enclosure 788B. The inclined vacuum enclosure 788A is connected to the first support rail 720, and the straight vacuum enclosure 788B is connected to the second support rail 722.

[0161] The support rails 720 and 722 are similar to Figure 2A the support rails 220 and 222 discussed in Figure 7B and 7Cthe internal volumes 791A and 791B). Each vacuum channel 789 has a certain length and a cross-sectional diameter. The length of the vacuum channel 789 should be much greater than its cross-sectional diameter, for example, 5 times or more than 10 times. Such a configuration of the vacuum channel 789 presents a fluid (e.g., air) flow restriction, which is the main resistance to the air flowing into the air chamber supplying the vacuum channel 789. This creates equal flow resistance between the vacuum channels, thus providing a laminar flow between the channels and forming a laminar flow field on the belt. The inclined vacuum housing 788A includes a vacuum outlet 790A at its top. The straight vacuum housing 788B has a vacuum outlet 790B on its side (e.g., on the side opposite to the side connected to the second support rail 722). The position of the vacuum outlet 790A allows the first motion system 226 to move the first support rail 720 closer to the mounting rail 230 than if the vacuum outlet 790A were located on a certain side of the vacuum housing 788A (e.g., similar to the vacuum outlet 790B). The internal volumes 791A and 791B of the vacuum housings 788A and 788B are fluidly connected to a vacuum source 792, for example, a vacuum pump connected through the vacuum outlets 790A and 790B. The vacuum source 792 can generate a negative pressure to pump air through the vacuum channels 789 and the vacuum housings 788A and 788B.

[0162] In one embodiment, the belt 248 of the conveying system 227 is stretched between the pulleys 247 to form a "straight belt line". The straight belt line can be used with a flat belt (e.g., 248A) and a crowned pulley (e.g., pulley 247B). Such a configuration controls the positioning of the belt along the pulley axis by the pulling force of the crowned pulley 247B on the belt 248A, so that the belt edges do not contact any adjacent components, thus generating very little or no debris or particles and reducing or eliminating the need for a belt guard (e.g., the belt protection cover 219).

[0163] In other embodiments, if there are pulleys on the belt line that contact the belt line on the slack side, solid particulate matter may be generated, referred to as a "reverse belt line". For example, when in use, the conveying system 227 may generate solid particulate matter. These solid particulate matters can be debris, dust, or chips from the belt 248, the support rails 720 and 722, or the matrix tray 104. In the depicted embodiment, the belt 248 may contact the support rails 720 and 722 (e.g., the belt guard 219), and solid particulate matter may be generated due to the wear of the belt and / or the support rails 720 and 722. If not removed, these solid particulate matters may have an adverse effect on the performance of the measurement systems 144 and 146 or the inspection device 142. The vacuum source 792 can be used to create a negative pressure to extract the solid particulate matter through the vacuum channels 789 and the vacuum housings 788A and 788B. Therefore, the vacuum channels 789 are sized to allow the passage of solid particulate matter, and the vacuum housings 788A and 788B discharge the solid particulate matter from the inner side of the first support rail 720 or the second support rail 722 through the plurality of vacuum channels 789. Figure 5B Some embodiments of the method 520 in include using the vacuum housings 788A and 788B to remove solid particulate matter from the system 100.

[0164] In the illustrated embodiment, the vacuum channels 789 located above the belt guard 219 are at the same level as the belt 248. For example, the vacuum channels 789 are located between the belts 248A and 248B and the second support rail 722. The vacuum channels 789 are also located between the hidden belt 248C and the first support rail 720. The vacuum channels 789 located below the belt guard 219B are located above the belt 248 (e.g., between the belts 248A - C and the belt guards 219A - C).

[0165] In certain embodiments, the vacuum channels 789 may be formed only above or below the belt guard 219. In certain embodiments, only one of the support rails 720 or 722 may form the vacuum channels 789. In certain embodiments, multiple or fewer vacuum channels 789 may be used. In certain embodiments, a single vacuum housing 788A may be used, which spans the length of the first support rail 720.

[0166] Figure 7B A cross-sectional top view of the angled vacuum housing 788A in the adjustment system is shown according to certain embodiments. In particular, Figure 7BThe display angle vacuum housing 788A is fluidly connected to the first support rail 720 through a vacuum channel 789 (one of which is labeled) located above the belt guard 219C. The angle vacuum housing 788A forms an internal volume 791A that fluidly connects the vacuum channel 789 to a vacuum outlet 790A. The vacuum outlet 790A is located at the top of the vacuum housing 788A and is fluidly connected to a vacuum source 792.

[0167] In the illustrated embodiment, the angle vacuum housing 788A is connected to the first support rail 720 using screws 791. In some embodiments, the angle vacuum housing 788A may use other fasteners such as screws and nuts, anchors, rivets, or be connected to the first support rail 720 by welding or adhesives. In some embodiments, a seal or gasket may be placed between the vacuum housing 788A and the first support rail 720.

[0168] Figure 7C A cross-sectional top view of a straight vacuum housing 788B of an adjustment system according to some embodiments is shown, the housing being from Figure 7A . In particular, Figure 7C a straight vacuum housing 788A is shown fluidly coupled to a second support rail 722 through a vacuum channel 789 (one of which is marked) located above the conveyor belt guard 219B.

[0169] The straight vacuum housing 788B forms an internal volume 791B that fluidly couples the vacuum channel 789 to a vacuum outlet 790B. The vacuum outlet 790B is located on one side of the vacuum housing 788B and is fluidly coupled to the vacuum source 792. The straight vacuum housing 788B can be coupled to the second support rail 722 in a manner similar to that of Figure 7B the angle vacuum housing 788A and the second support rail 722 discussed above.

[0170] System controller example

[0171] Figure 8 A schematic diagram of a system controller 199 (also referred to as controller 199) is shown, which can be used in accordance with the systems and methods described herein.

[0172] The system controller 199 includes a processor 860 (e.g., a central processing unit (CPU)) that communicates data with a memory 850, an input device 870, and an output device 880. Although described separately, it should be understood that the functional blocks associated with the system controller 199 need not be separate structural components. For example, the processor 860 and the memory 850 may be embodied as a single chip. The processor 860 can be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any suitable combination to perform the functions described herein. The processor can also be implemented as a combination of computing devices, such as a combination of a DSP and a microprocessor, multiple microprocessors, the combination of one or more microprocessors and a DSP core, or any other such configuration.

[0173] The processor 860 can be connected via one or more buses to read information from or write information to the memory 850. The processor 860 can also include a storage, such as a processor cache. The memory 850 can include a processor cache, including multiple levels of caches, where different levels have different capacities and access speeds. The memory 850 can also include random access memory (RAM), other volatile storage devices, or non-volatile storage devices. The storage can include a hard disk, a flash memory, etc. The memory 850 can also contain a computer program product implemented on the memory 850, including code for controlling different motion systems of the media inspection system 100 related to Figure 1A such as the motion control application 852. The motion control application 852 can control a first motion system 226, such as the track actuator 240, to receive and grasp the media, as discussed in relation to Figure 2A 、 4 and 6A - 6B. The motion control application 852 can control a second motion system 228, such as the belt actuator 246, to move the media, as discussed in relation to Figures 2A - 2D and 6G. The motion control application 852 can control a first rotation system 350, such as the rotation actuator 352C, to align the media, as discussed in relation to Figure 3A 、 3D -3E and 5 - 6H. The motion control application 852 can control a second rotation system 354, such as the first and second actuators 356A and 356B, to orient the media, as discussed in relation to Figure 3A 、 3F -3G and 5 - 6H. The motion control application 852 can control the positioning system 101B, such as the positioning actuators 114A and 114B, to adjust the position of the system 101A, as discussed in relation to Figure 1A and 1BAs discussed in connection with. The motion control application 852 can control the rotary lock 370, such as the rotary lock actuator 371B, as discussed in connection with Figure 3A and 6C -6D.

[0174] The program code can also include a vacuum system control application 854 for controlling the solid particle removal system 786, such as the vacuum source 792, to remove solid particles in the system 100, which is discussed in Figures 7A - 7C . The control applications 852 and 854 may be program code executable by the processor 860. In various cases, the memory is referred to as a computer-readable storage medium or a non-transitory computer-readable medium. A computer-readable storage medium is a non-transitory device capable of storing information and is distinguished from a computer-readable transmission medium, such as an electronic transient signal, that can be transferred from one location to another. The non-transitory computer-readable medium includes computer-executable instructions that, when executed by a processing system, cause the processing system to perform a method, as described in FIG. 6, including grasping an object using an EFEM. In certain embodiments, the method performed by the processing system includes positioning the end effector of the EFEM next to the object by an actuation system. In certain embodiments, the method performed by the processing system positions the end effector based on measurements or readings from the input device 870. The computer-readable medium described herein generally refers to a computer-readable storage medium or a computer-readable transmission medium.

[0175] The processor 860 can also be connected to an input device 870 and an output device 880 to receive inputs from and provide outputs to the system controller 199, respectively. The input device 870 can include, but is not limited to, the inspection device 142, the distance sensor 144, and the imaging system 146, as Figures 1A - 1B discussed in 5-6H. The input device can also include a position sensor, such as a radial or peripheral position sensor or a rotary or linear encoder, to detect position information of the media relative to the inspection system 140 (such as the inspection device 142, the distance sensor 144, or the imaging system 146), as Figures 1A - 6H discussed in. The position sensor can be a rotary encoder for detecting the position of the media in the adjustment system 101A, such as the position on the first and second support rails 220 and 222. The position sensor can be used to detect the position of the adjustment system 101A along the guide rails (such as the positioning rails 115A and 115B), as Figure 1A and 1B discussed in. The position sensor can also be used to detect the position of the first motion system 226 (such as the position of the first support rail 220 relative to the mounting rail 230), as Figures 2A - 2DAs discussed. The position sensor can be an encoder (such as an optical, magnetic, capacitive, or inductive encoder), resolver, potentiometer, angle sensor, accelerometer, gyroscope, inertial measurement unit, global positioning system, or motion detector, etc., to determine the position of the components or media of system 100. The input device can also include various inputs to determine whether the matrix tray 104 contacts the first obstacle 680A, such as Figure 6A as discussed.

[0176] Suitable output devices 880 include but are not limited to the motion system 882 and the solid particle removal system 786 discussed in relation to Figures 7A - 7C The motion system 882 may include components of the first motion system 226 (e.g., the track actuator 240), the second motion system 228 (e.g., the belt actuator 246), the first rotation system 350 (e.g., the rotation actuator 352C), the second rotation system 354 (e.g., the first and second actuators 356A and 356B), the positioning system 101B (e.g., the positioning actuators 114A and 114B), and the Figures 1A - 6H rotation lock 370 (e.g., the rotation lock actuator 371B) discussed in relation to

[0177] Embodiments of the present disclosure further relate to any one or more of the following embodiments 1-40:

[0178] 1. A transport media alignment system configured to position media, comprising: a base plate; a positioning plate coupled to the base plate by a pivot joint, wherein the positioning plate is configured to be detachably coupled to the transport media and rotate relative to the base plate through the pivot joint; and a first actuator coupled to the base plate or the positioning plate, wherein the first actuator is configured to rotate the positioning plate through the pivot joint.

[0179] 2. The transport media alignment system according to embodiment 1, wherein: the first actuator is coupled to the positioning plate; and the first actuator is configured to contact the base plate to rotate the positioning plate through the pivot joint.

[0180] 3. The transport media alignment system according to embodiment 1, wherein the first actuator is configured to move a shaft to contact the base plate, thereby rotating the positioning plate through the pivot joint.

[0181] 4. The transport media alignment system according to embodiment 1, further comprising a compliant mechanism coupled to the base plate and the positioning plate, wherein: the compliant mechanism is configured to bias the positioning plate towards the base plate through the pivot joint; and the first actuator is configured to move the positioning plate in a direction opposite to the biasing direction of the compliant mechanism.

[0182] 5. The transport media alignment system according to Embodiment 1 further includes a bracket connected to the positioning plate, wherein: the compliant mechanism is connected to the positioning plate through the bracket; the positioning plate includes a first surface and a second surface opposite to the first surface; the base plate is located on the first surface of the positioning plate; and the bracket is configured to position the first end of the compliant mechanism at a certain distance from the second surface of the positioning plate.

[0183] 6. The transport media alignment system according to Embodiment 1 further includes a mounting plate connected to the positioning plate, wherein the positioning plate is connected to the media through the mounting plate.

[0184] 7. The transport media alignment system according to Embodiment 1, wherein: the pivot joint includes a universal ball contacting the positioning plate, such that the positioning plate is configured to move around the surface of the universal ball to rotate through the pivot joint; and the base plate forms a groove to receive the universal ball.

[0185] 8. The transport media alignment system according to Embodiment 2 further includes a second actuator connected to the positioning plate, wherein the second actuator is configured to rotate the positioning plate through the pivot joint.

[0186] 9. In the transport media alignment system according to Embodiment 8, the first actuator is located at the first corner of the positioning plate, and the second actuator is located at the second corner of the positioning plate, and the first corner and the second corner are located on the side of the positioning plate opposite to the pivot joint.

[0187] 10. The transport media alignment system according to Embodiment 9 further includes a first compliant mechanism and a second compliant mechanism, which are connected to the base plate and the positioning plate, wherein: the first compliant mechanism and the second compliant mechanism are configured to bias the positioning plate towards the base plate through the pivot joint; and the first actuator and the second actuator are configured to move the positioning plate in a direction opposite to that of the first compliant mechanism and the second compliant mechanism.

[0188] 11. The transport media alignment system according to Embodiment 1 further includes a rotation lock for fixing the orientation of the positioning plate relative to the base plate.

[0189] 12. In the transport media alignment system according to Embodiment 11, the rotation lock includes: a rotation lock shaft coupled to the base plate; and a rotation lock actuator coupled to the positioning plate, configured to engage the rotation lock shaft to fix the orientation of the positioning plate relative to the base plate.

[0190] 13. A transport media alignment system for positioning a transport media includes: a positioning plate located on a central axis; a mounting plate connected to the positioning plate, the mounting plate being configured to be detachably connected to the transport media and rotate around the central axis; and a motion system configured to rotate the mounting plate relative to the positioning plate.

[0191] 14. The transport media alignment system according to embodiment 13 further includes a rotary guiding device located between the mounting plate and the positioning plate.

[0192] 15. The transport media alignment system according to embodiment 13, wherein the motion system includes a rotary actuator configured to rotate the mounting plate.

[0193] 16. The transport media alignment system according to embodiment 15, wherein: the rotary actuator is connected to the positioning plate; the motion system further includes a first bracket connected to the mounting plate; and the rotary actuator is configured to rotate the mounting plate through the first bracket.

[0194] 17. The transport media alignment system according to embodiment 16, wherein: the motion system further includes a second bracket coupled to the positioning plate and further coupled to the first bracket; a compliant mechanism is disposed between the first bracket and the second bracket; the compliant mechanism is configured to bias the mounting plate in a biasing direction; and the rotary actuator is configured to rotate the mounting plate in a direction opposite to the biasing direction of the compliant mechanism.

[0195] 18. A method of positioning a transport media, comprising: positioning the transport media on a transport media alignment system, wherein the transport media alignment system includes: a base plate; a positioning plate coupled to the base plate by a pivot joint, wherein the positioning plate is configured to be detachably coupled to the transport media and rotate relative to the base plate through the pivot joint; and a first actuator coupled to the base plate and the positioning plate, wherein the first actuator is configured to rotate the positioning plate through the pivot joint; and using the first actuator to move the positioning plate to adjust the orientation of the transport media.

[0196] 19. The method of embodiment 18, wherein: the transport media alignment system further includes a second actuator coupled to the base plate and the positioning plate; and using the first actuator to move the positioning plate to adjust the orientation of the transport media includes: using the first actuator to rotate the media about a first axis of the pivot joint; and using the first actuator and the second actuator to rotate the transport media about a second axis of the pivot joint.

[0197] 20. The method of embodiment 18, wherein: the transport media alignment system further includes: a mounting plate coupled to the positioning plate; and a rotary actuator configured to rotate the mounting plate relative to the positioning plate; and positioning the transport media on the inspection media system includes using the rotary actuator to rotate the mounting plate relative to the positioning plate.

[0198] 21. An inspection system, comprising: a fixed plate; a movable plate movably connected to the fixed plate; an adjustment system movably connected to the movable plate, the adjustment system comprising: an adjustment plate connected to the movable plate, wherein the adjustment plate is detachably connected to a transport medium holding one or more units under test (UUTs) and can rotate through a pivot joint; and an adjustment actuator connected to the adjustment plate, wherein the adjustment actuator is configured to rotate the adjustment plate through the pivot joint; a first positioning actuator configured to rotate the movable plate relative to the fixed plate; and a second positioning actuator configured to rotate the adjustment plate relative to the movable plate; and an inspection system configured to inspect the surfaces of one or more UUTs.

[0199] 22. The inspection system according to embodiment 21, wherein both the first positioning actuator and the second positioning actuator are configured to move the transport medium to and from the inspection system.

[0200] 23. The inspection system according to embodiment 21, wherein the inspection system includes a metrology system.

[0201] 24. The inspection system according to embodiment 21, wherein: the inspection system includes a distance sensor configured to measure the distance to the transport medium; and the adjustment actuator is configured to move the adjustment plate according to the distance measured by the distance sensor.

[0202] 25. The inspection system according to embodiment 24, wherein the distance sensor includes a confocal sensor.

[0203] 26. The inspection system according to embodiment 21, wherein: the inspection system includes an imaging system configured to determine the alignment of the transport medium; and the adjustment actuator is configured to move the adjustment plate according to the alignment determined by the imaging system.

[0204] 27. The inspection system according to embodiment 26, wherein the imaging system is configured to determine the alignment of the transport medium based on at least one reference point of one or more UUTs.

[0205] 28. The inspection system according to embodiment 26, wherein the imaging system includes a reference camera.

[0206] 29. The inspection system according to embodiment 21, wherein: the fixed plate includes a first positioning track; the movable plate includes a second positioning track; the first positioning actuator is configured to move the movable plate along the first positioning track; and the second positioning actuator is configured to move the adjustment plate along the second positioning track.

[0207] 30. An inspection system includes: an inspection system configured to inspect the surfaces of one or more units under test (UUTs) carried by a transport medium; an adjustment system configured to rotate the transport medium about first x, y, and z axes for inspection by the inspection system; and a positioning system configured to move the adjustment system in a plane formed by second x and y axes.

[0208] 31. The inspection system according to embodiment 30, wherein: the adjustment system includes: a first plate and a second plate coupled by a pivot joint; and an adjustment actuator configured to rotate the first plate through the pivot joint; and the pivot joint is configured to rotate the transport medium about first x, y, and z axes.

[0209] 32. The inspection system according to embodiment 30, wherein: the adjustment system includes: a first plate and a second plate coupled by a rotary channel; and a rotary actuator configured to rotate the first plate through the rotary channel; and the rotary channel is configured to align the x and y axes of the transport medium about third x, y, and z axes.

[0210] 33. The inspection system according to embodiment 30, wherein: the adjustment system includes a first plate configured to fix the transport medium; the positioning system includes: a second plate; and a positioning actuator configured to move the first plate relative to the second plate; and the positioning actuator is configured to move the first plate about a plane formed by second x and y axes.

[0211] 34. The inspection system according to embodiment 30, wherein: the inspection system includes a distance sensor set to measure the distance to the transport medium; and the adjustment system is set to move the transport medium based on the distance measured by the distance sensor.

[0212] 35. The inspection system according to embodiment 30, wherein: the inspection system includes an imaging system set to determine the alignment of the transport medium; and the adjustment system is set to move the transport medium based on the alignment determined by the imaging system.

[0213] 36. An inspection method, the method includes: positioning a transport medium on a system for inspecting one or more units under test (UUTs) carried by the transport medium, wherein the inspection system includes: a fixed plate; a movable plate movably connected to the fixed plate; an adjustment system movably connected to the movable plate, the adjustment system includes: a first plate coupled to the movable plate, wherein the first plate is set to fix the transport medium and rotate through a pivot joint; and an adjustment actuator coupled to the first plate; and a first positioning actuator and a second positioning actuator; moving the movable plate between the fixed plate and the movable plate using the first positioning actuator; moving the first plate between the movable plate and the first plate using the second positioning actuator; and moving the first plate using the adjustment actuator through the pivot joint.

[0214] 37. According to the method of embodiment 36, wherein: the inspection system further includes an inspection system; and the method further includes using the inspection system to inspect the surface of one or more UUTs.

[0215] 38. According to the method of embodiment 37, further including: using the inspection system to measure a first distance to a first distance point and a second distance to a second distance point; and moving the first plate using an adjustment actuator through a pivot joint based on the first distance measurement and the second distance measurement.

[0216] 39. According to the method of embodiment 37, wherein: the adjustment system further includes a second plate movably connected to the first plate and a rotation actuator; the first plate is configured to hold a medium through the second plate; the method further includes: using the inspection system to determine the alignment of the transport medium; and using the rotation actuator to rotate the second plate relative to the first plate.

[0217] 40. According to the method of embodiment 36, wherein: the inspection system further includes a vacuum housing connected to a vacuum source; the method further includes using the vacuum housing to remove solid particulate matter from the inspection system.

[0218] The above embodiments of the present disclosure have been described according to specific embodiments. However, those skilled in the art will understand that various modifications and changes can be made without departing from the broader spirit and scope of the invention as defined by the appended claims. Therefore, the foregoing description and drawings should be regarded as illustrative rather than restrictive.

Claims

1. A transport medium transport system configured to move a transport medium, comprising: a mounting plate; a first support rail and a second support rail, each connected to the mounting plate, wherein: the first support rail and the second support rail each have an inner side and an outer side, and the inner side of the first support rail faces the inner side of the second support rail; a first conveying system connected to the first support rail or the second support rail, wherein: the first conveying system is configured to support the transport medium between the inner sides of the first support rail and the second support rail, and the first conveying system is configured to move the transport medium along a length of a part of the first support rail or the second support rail; and an actuator configured to move the first support rail.

2. The transport medium transport system according to claim 1, further comprising a first barrier connected to the first support rail or the second support rail, and the first barrier is configured to extend to prevent the first conveying system from moving the transport medium past the first barrier.

3. The transport medium transport system according to claim 2, further comprising a second barrier connected to the first support rail or the second support rail, the second barrier being configured to extend at a position different from the first barrier to prevent the first conveying system from moving the transport medium beyond the second barrier.

4. The transport medium transport system according to claim 1, further comprising a vacuum housing connected to the first support rail or the second support rail, wherein the vacuum housing is configured to: be connected to a vacuum source; and remove solid particulate matter generated by the transport medium transport system.

5. The transport medium transport system according to claim 4, wherein: the vacuum housing is connected to the outer side of the first support rail or the second support rail; the first support rail or the second support rail forms a plurality of vacuum channels; and the vacuum housing is configured to use the vacuum source to extract solid particulate matter from the inner side of the first support rail or the inner side of the second support rail through the plurality of vacuum channels.

6. The transport medium transport system according to claim 1, wherein: the rail actuator is configured to move the first support rail in a first direction; the first conveying system is configured to move the transport medium in a second direction; and the first direction and the second direction are substantially orthogonal.

7. The transport medium transport system according to claim 1, wherein: the first conveying system is coupled to the first support rail; and the first conveying system includes a belt, a motor pulley configured to move the belt, and an idler pulley configured to apply tension to the belt.

8. The transport medium transport system according to claim 7, wherein: The belt is a flat belt, the motor pulley is a crowned pulley, the idler pulley is a crowned pulley, and the belt is stretched around the motor pulley and the idler pulley so that the belt moves only in a linear direction between the motor pulley and the idler pulley.

9. The transport media transport system according to claim 1, wherein: the first transport system is connected to the first support rail, and the first transport system is configured to move the transport media along the length of the portion of the first support rail; and the transport media transport system further includes a second transport system connected to the second support rail, and the second transport system is configured to move the transport media along the length of the portion of the second support rail.

10. A transport media transport system configured to move a transport media, comprising: a mounting plate; a first motion system coupled to the mounting plate, the first motion system configured to receive different types of media from a dispenser and grip the transport media for inspection; and a second motion system coupled to the first motion system, the second motion system configured to position the transport media for inspection by an inspection system.

11. The transport media transport system according to claim 10, wherein: the first motion system includes a first support rail, a second support rail, and a rail actuator connected to a shaft; the first support rail is substantially parallel to the second support rail, wherein the inner surface of the first support rail faces the inner surface of the second support rail; the shaft is substantially orthogonal to the first support rail; and the rail actuator is configured to move the shaft such that the shaft can push the first support rail towards or away from the second support rail.

12. The transport media transport system according to claim 11, wherein the second motion system includes a conveying system, and the conveying system further includes a plurality of sub-conveying systems, wherein at least one of the plurality of sub-conveying systems is connected to each of the first support rail and the second support rail, and each of the plurality of sub-conveying systems comprises: a movably belt coupled to a belt actuator, wherein: the belt actuator is connected to the respective first support rail or second support rail and is configured to move the belt, the belt is configured to support the transport media, and the belt is configured to move the transport media.

13. The transport media transport system according to claim 12, wherein the belt is a flat belt, and the belt actuator device includes a crowned pulley, and the belt is movably connected to a second crowned pulley.

14. The transport media transport system according to claim 11, wherein the first motion system further includes a rail coupled to the mounting plate, and the rail is substantially orthogonal to the first support rail; and the first support rail is configured to move along the rail.

15. The transport media transport system according to claim 11, wherein the first motion system is configured to move the first support rail and the second support rail closer to or away from each other.

16. The transport media transport system according to claim 11, wherein the second support rail is fixed to the mounting plate, and the first support rail moves relative to the second support rail.

17. A method for moving a transport media, comprising: positioning the transport media on a transport media transport system, wherein the transport media transport system comprises: a mounting plate; a first support rail and a second support rail, each connected to the mounting plate, wherein: the first support rail and the second support rail each have an inner side and an outer side, and the inner side of the first support rail faces the inner side of the second support rail; a conveying system connected to the first support rail or the second support rail, wherein the transport media is positioned on the conveying system and between the inner sides of the first support rail and the second support rail; and an actuator configured to move at least one of the first support rail or the second support rail; and moving the transport media along a length of a portion of the first support rail or the second support rail to a first position using the conveying system.

18. The method according to claim 17, wherein placing the transport media on the transport media transport system includes using the rail actuator to adjust the distance between the first support rail and the second support rail, and the adjusted distance is used to receive the transport media on the conveying system.

19. The method according to claim 17, further comprising using the rail actuator to grip the transport media and place the transport media between the inner side of the first support rail and the inner side of the second support rail to reduce the distance between the first support rail and the second support rail.

20. The method according to claim 17, wherein: the transport media transport system further comprises a retractable barrier connected to the first support rail or the second support rail; and the method further comprises extending a portion of the retractable barrier such that the portion of the retractable barrier contacts the transport media to prevent the conveying system from moving the transport media beyond the barrier.

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