Excimer laser gas supply system detection method, gas supply system, photoetching machine light source and computer program product

Abstract

The invention provides an excimer laser gas supply system detection method, a gas supply system, a photoetching machine light source and a computer program product, and relates to the field of photoetching machines. The detection method comprises the following steps: acquiring a detection signal output by a fluorine detector, and detecting whether the tail exhaust assembly is in a running state or not; waiting for a preset time under the condition of determining that the exhaust assembly is in the running state; and determining whether the fluorine detector outputs the detection signal again or not. Whether the tail exhaust assembly is in the running state or not is detected, under the condition that it is determined that the tail exhaust assembly is in the running state, the preset time is waited so that the next detection process can be started, the situation that the interval time between the two detection processes is too short is avoided, and the detection precision is improved; under the condition that the fluorine detector does not output the detection signal again, the maintenance prompt information is output, it is ensured that no fluorine exists in the sealing cavity, the safety of the gas supply system is improved, and harm to the health of operators is avoided.

Description

Technical Field

[0001] The present invention relates to the field of lithography machines, and particularly to a method for detecting a gas supply system of an excimer laser, a gas supply system, a light source of a lithography machine, and a computer program product. Background Art

[0002] As the core light source of a lithography machine, the performance stability and safety of an excimer laser directly affect the accuracy and yield of semiconductor manufacturing processes. There are some problems in the safety of existing excimer laser gas supply systems, and gas leakage is a potential safety hazard. Since a variety of high-purity gases, such as fluorine gas, are required when an excimer laser operates, if these gases leak during use, it may cause harm to operators. Existing excimer lasers can only simply perform gas detection and output maintenance prompt information when the tail exhaust component is in a shutdown state, which cannot ensure the safety of operators. Summary of the Invention

[0003] The present invention provides a method for detecting a gas supply system of an excimer laser to solve the problems of poor safety and inability to ensure the safety of operators in the prior art.

[0004] The present invention provides a method for detecting a gas supply system of an excimer laser, including: Obtaining a detection signal output by a fluorine gas detector and detecting whether the tail exhaust component is in an operating state; Waiting for a predetermined time when it is determined that the tail exhaust component is in an operating state; Determining whether the fluorine gas detector outputs a detection signal again; Outputting a maintenance prompt information when it is determined that the fluorine gas detector does not output a detection signal again.

[0005] According to the method for detecting a gas supply system of an excimer laser provided by the present invention, the tail exhaust component includes a tail exhaust pipe and a differential pressure gauge arranged on the tail exhaust pipe, and the tail exhaust pipe is communicated with a sealed cavity; the step of detecting whether the tail exhaust component is in an operating state includes: Obtaining a differential pressure value output by the differential pressure gauge; Determining that the tail exhaust component is in an operating state when the differential pressure value is greater than or equal to a preset value; Determining that the tail exhaust component is in a closed state when the differential pressure value is less than the preset value.

[0006] According to the method for detecting a gas supply system of an excimer laser provided by the present invention, after the step of detecting whether the tail exhaust component is in an operating state, the detection method further includes: Outputting a maintenance alarm information when it is determined that the tail exhaust component is in a closed state.

[0007] According to a method for detecting a gas supply system of an excimer laser provided by the present invention, after the step of determining whether the fluorine gas detector outputs a detection signal again, the detection method further includes: In the case of determining that the fluorine gas detector outputs a detection signal, the step of obtaining the detection signal output by the fluorine gas detector is performed again.

[0008] According to a method for detecting a gas supply system of an excimer laser provided by the present invention, while performing the step of detecting whether the tail exhaust assembly is in an operating state, the detection method further includes: Detecting whether the process gas valve is in an open state; In the case of determining that the process gas valve is in a closed state, the step of waiting for a predetermined time is performed.

[0009] According to a method for detecting a gas supply system of an excimer laser provided by the present invention, after the step of detecting whether the process gas valve is in an open state, the detection method further includes: In the case of determining that the process gas valve is in an open state, a valve closing instruction is output, and the step of waiting for a predetermined time is performed.

[0010] According to a method for detecting a gas supply system of an excimer laser provided by the present invention, while performing the step of detecting whether the tail exhaust assembly is in an operating state, the detection method further includes: Detecting whether the discharge chamber is in a working state; In the case of determining that the discharge chamber is in a working state, a discharge chamber shutdown instruction is output, and the step of waiting for a predetermined time is performed.

[0011] The present invention also provides an excimer laser gas supply system, and the gas supply system is based on the method for detecting an excimer laser gas supply system described in any one of the above, and includes: A sealed chamber; A tail exhaust assembly, the tail exhaust assembly is communicated with the sealed chamber, and the tail exhaust assembly is used for discharging the gas in the sealed chamber; A fluorine gas detection module, the fluorine gas detection module includes a fluorine gas detector, the fluorine gas detector is arranged in the sealed chamber, and the fluorine gas detector is used for detecting whether there is fluorine gas inside the sealed chamber, and outputting a detection signal when detecting that there is fluorine gas inside the sealed chamber; A control module, which is electrically connected to the fluorine gas detection module and the tail exhaust assembly respectively; the control module is used to obtain the detection signal output by the fluorine gas detector and detect whether the tail exhaust assembly is in an operating state; it is also used to wait for a predetermined time when it is determined that the tail exhaust assembly is in an operating state; it is further used to determine whether the fluorine gas detector outputs a detection signal again, and output a maintenance prompt message when it is determined that the fluorine gas detector does not output a detection signal again.

[0012] The present invention also provides a light source for a lithography machine, including the excimer laser gas supply system as described above.

[0013] The present invention also provides a computer program product, including a computer program, which when executed by a processor implements the detection method of any one of the above excimer laser gas supply systems.

[0014] The detection method of the excimer laser gas supply system provided by the present invention, by detecting whether the tail exhaust assembly is in an operating state, and waiting for a predetermined time when it is determined that the tail exhaust assembly is in an operating state, so as to enter the next detection process, avoiding too short an interval time between two detection processes, and improving the detection accuracy; by outputting a maintenance prompt message when it is determined that the fluorine gas detector does not output a detection signal again, ensuring that there is no fluorine gas in the sealed cavity, improving the safety of the gas supply system, and avoiding harm to the health of operators. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0016] Figure 1 is a schematic cross-sectional structure diagram of the excimer laser gas supply system provided by the present invention.

[0017] Figure 2 is Figure 1 a partial enlarged structure diagram at A in

[0018] Figure 3 is a schematic side view structure diagram of the excimer laser gas supply system provided by the present invention.

[0019] Figure 4 is a flowchart of the detection method of the excimer laser gas supply system provided by the present invention.

[0020] Figure 5It is a flowchart of a method for detecting a gas supply system of an excimer laser provided by a specific embodiment of the present invention.

[0021] Figure 6 It is a schematic structural diagram of an electronic device provided by the present invention.

[0022] Reference numerals: 100, sealing cavity; 200, fluorine gas detector; 300, tail exhaust pipe; 400, air inlet nozzle; 500, process gas valve; 600, power gas module; 810, processor; 820, communication interface; 830, memory; 840, communication bus. Detailed implementation manners

[0023] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0024] In the description of the embodiments of the present invention, it should be noted that the orientation or positional relationships indicated by the terms "center", "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the embodiments of the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific situations.

[0026] In the embodiments of the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the horizontal height of the first feature is less than that of the second feature.

[0027] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0028] The following is combined with Figures 1-5 to describe the detection method of the excimer laser gas supply system and the excimer laser gas supply system of the present invention.

[0029] For the convenience of better understanding, before introducing the detection method of the excimer laser gas supply system, the specific structure of the excimer laser gas supply system is introduced first. Figure 1 The schematic cross-sectional structure diagram of the excimer laser gas supply system provided by the present invention is exemplified. Figure 2 is exemplified Figure 1 the partial enlarged structure diagram at A in Figure 3 The schematic side view structure diagram of the excimer laser gas supply system provided by the present invention is exemplified. As Figures 1 to 3 shown, the excimer laser gas supply system includes a sealed cavity 100, a tail exhaust assembly, a fluorine gas detection module, and a control module. The tail exhaust assembly is communicated with the sealed cavity 100, and the tail exhaust assembly is used to discharge the gas in the sealed cavity 100; the fluorine gas detection module includes a fluorine gas detector 200, and the fluorine gas detector 200 is arranged in the sealed cavity 100. The fluorine gas detector 200 is used to detect whether there is fluorine gas inside the sealed cavity 100, and outputs a detection signal when fluorine gas is detected inside the sealed cavity 100.

[0030] The control module is electrically connected to the fluorine gas detection module and the tail exhaust assembly respectively; the control module is used to obtain the detection signal output by the fluorine gas detector 200, and detect whether the tail exhaust assembly is in an operating state; it is also used to wait for a predetermined time when it is determined that the tail exhaust assembly is in an operating state; it is also used to determine whether the fluorine gas detector 200 outputs a detection signal again, and output a maintenance prompt message when it is determined that the fluorine gas detector 200 does not output a detection signal again.

[0031] In an embodiment of the present invention, the sealing cavity 100 is in the shape of a cuboid. Of course, the shape of the sealing cavity 100 is not limited thereto, and it can also be other shapes. The inside of the sealing cavity 100 is hollow to provide an installation space for the fluorine gas detector 200, the process gas module group, and the motive gas module group 600.

[0032] Preferably, the sealing cavity 100 is built with 40x40 aluminum profiles. The length inside the sealing cavity 100 is 1000 mm, the width is 900 mm, and the height is 700 mm. The surrounding is wrapped with 5 mm thick acrylic transparent plates to facilitate visual observation of the state of the entire system.

[0033] In an embodiment of the present invention, the process gas module group includes a plurality of air inlets 400 and a plurality of process gas valves 500. The plurality of air inlets 400 and the plurality of process gas valves 500 are in one-to-one correspondence and communication. The process gas valve 500 is electrically connected to the control module, and the process gas valve 500 is used to control the opening and closing of the air inlet 400.

[0034] In an embodiment of the present invention, the sealing cavity 100 includes a bottom plate and side plates. The fluorine gas detector 200 is installed in the area of the side plate close to the bottom plate. The distance between the bottom of the fluorine gas detector 200 and the bottom plate is preferably 100 mm to ensure that the fluorine gas detector 200 can quickly and accurately detect the leaked fluorine gas. The process gas module group is one of the main sources of fluorine gas. The fluorine gas detector 200 is arranged at a position 50 mm - 200 mm away from the process gas module group to ensure that the fluorine gas detector 200 can cover the process gas module group and its surrounding areas, and can detect fluorine gas leakage in time to provide comprehensive monitoring. Preferably, the distance between the fluorine gas detector 200 and the process gas module group is 100 mm, which meets the installation convenience of the space of the excimer laser gas supply system. At the same time, it avoids the accumulation of fluorine gas to a dangerous concentration and improves the safety of the system.

[0035] In an embodiment of the present invention, the excimer laser gas supply system further includes a discharge cavity. The discharge cavity is communicated with the sealing cavity 100. The control module is electrically connected to the discharge cavity. The control module is also used to detect whether the discharge cavity is in an operating state. When it is determined that the discharge cavity is in an operating state, output a discharge cavity shutdown instruction and execute the step of waiting for a predetermined time.

[0036] In an embodiment of the present invention, the excimer laser gas supply system further includes an alarm module, which is electrically connected to the control module. The control module is further configured to output a maintenance alarm message when it is determined that the tail exhaust assembly is in a closed state. The alarm module is configured to give an alarm according to the alarm message, and the alarm module can be an indicator light, a buzzer, a display, or other alarm devices. Figure 4 The flowchart of the excimer laser gas supply system detection method provided by the present invention is exemplified. As Figure 4 shown, the excimer laser gas supply system detection method includes: Step S100, obtaining the detection signal output by the fluorine gas detector 200 and detecting whether the tail exhaust assembly is in an operating state; Step S200, waiting for a predetermined time when it is determined that the tail exhaust assembly is in an operating state; Step S300, determining whether the fluorine gas detector 200 outputs a detection signal again; Step S400, outputting a maintenance prompt message when it is determined that the fluorine gas detector 200 does not output a detection signal again.

[0037] The excimer laser gas supply system detection method provided by the present invention detects whether the tail exhaust assembly is in an operating state. When it is determined that the tail exhaust assembly is in an operating state, it waits for a predetermined time to enter the next detection process, avoiding too short an interval between two detection processes and improving the detection accuracy. By outputting a maintenance prompt message when it is determined that the fluorine gas detector 200 does not output a detection signal again, it ensures that there is no fluorine gas in the sealing chamber 100, improves the safety of the gas supply system, and avoids harm to the health of operators.

[0038] It should be noted here that in this embodiment, the predetermined time is 10 s. Of course, the length of the predetermined time is not limited thereto, and it can also be 5 s, 15 s, or other time lengths, which are specifically determined according to the tail exhaust capacity of the gas supply system.

[0039] In an embodiment of the present invention, the tail exhaust assembly is an important part of the excimer laser gas supply system. Its main function is to discharge the gas (including possibly leaked fluorine gas) in the sealing chamber 100 to the special gas treatment system to ensure the stable gas pressure in the sealing chamber 100 and prevent the accumulation of harmful gases. The tail exhaust assembly includes a tail exhaust pipe 300 and a differential pressure gauge provided on the tail exhaust pipe 300. The tail exhaust pipe 300 is communicated with the sealing chamber 100 and is used to discharge the gas in the sealing chamber 100. The differential pressure gauge is installed on the tail exhaust pipe 300 and is electrically connected to the control module. The differential pressure gauge is used to monitor the air pressure change in the tail exhaust pipe 300, and the output differential pressure value of the differential pressure gauge can reflect whether the tail exhaust assembly is operating normally.

[0040] The steps to detect whether the tail exhaust assembly is in an operating state include: Obtain the pressure difference value output by the differential pressure gauge; The differential pressure gauge monitors the air pressure change inside the tail exhaust pipe 300 in real time and outputs the pressure difference value to the controller (PLC module). The pressure difference value reflects the gas flow state inside the tail exhaust pipe 300.

[0041] When the pressure difference value is greater than or equal to the preset value, determine that the tail exhaust assembly is in an operating state; When the pressure difference value reaches or exceeds the preset value, it indicates that the gas flow inside the tail exhaust pipe 300 is normal, the tail exhaust assembly is in an operating state, and the gas inside the sealing cavity 100 is being discharged by the tail exhaust pipe 300.

[0042] When the pressure difference value is less than the preset value, determine that the tail exhaust assembly is in a closed state; When the pressure difference value is lower than the preset value, it indicates that the gas flow inside the tail exhaust assembly is abnormal, and the tail exhaust assembly may be in a closed state or malfunction.

[0043] By monitoring the operating state of the tail exhaust assembly in real time, it is possible to ensure the stable gas pressure inside the sealing cavity 100, avoid equipment failures caused by abnormal pressure, and can also promptly detect the abnormal state of the tail exhaust assembly, avoid the accumulation of harmful gases (such as fluorine gas), ensure the safety of operators, improve the overall reliability of the system, and reduce the downtime caused by tail exhaust assembly failures.

[0044] In an embodiment of the present invention, after the steps to detect whether the tail exhaust assembly is in an operating state, the detection method further includes: When it is determined that the tail exhaust assembly is in a closed state, output a maintenance alarm message.

[0045] When the fluorine gas detector 200 detects fluorine gas leakage, the system will first check whether the tail exhaust assembly is in an operating state. If the tail exhaust assembly is operating normally, the system will continue to monitor the fluorine gas concentration; if the tail exhaust assembly is closed or malfunctioning, the controller will output a maintenance alarm message. When it is determined that the tail exhaust assembly is in a closed state, it indicates that the tail exhaust assembly cannot work properly, which may be due to pipeline blockage, valve closure, or other mechanical failures, and the gas inside the sealing cavity 100 cannot be normally discharged by the tail exhaust pipe 300, posing a threat to the health of operators. Therefore, the control module outputs a maintenance alarm message to the factory facilities, and the factory facilities system receives the maintenance alarm message from the control module in real time to ensure that maintenance personnel can respond promptly.

[0046] It should be noted here that the maintenance alarm message can be a visual alarm, can also be an audible alarm, can also be a fault code, and the alarm message will contain specific fault codes to help operators quickly locate the problem; of course, it can also be a text message.

[0047] In one embodiment of the present invention, Figure 5 illustrates a flowchart of a method for detecting a gas supply system of an excimer laser provided by a specific embodiment of the present invention, as Figure 5 shown. After the step of determining whether the fluorine gas detector 200 outputs a detection signal again, the detection method further includes: In the case where it is determined that the fluorine gas detector 200 outputs a detection signal, the step of obtaining the detection signal output by the fluorine gas detector 200 is performed again.

[0048] When it is determined that the fluorine gas detector 200 is still continuously outputting a detection signal, it indicates that there may still be fluorine gas in the sealing cavity 100. For safety reasons, the step of obtaining the detection signal output by the fluorine gas detector 200 needs to be performed again, so that the system performs steps S100 to S400 again to ensure that the tail exhaust assembly is in an operating state and the fluorine gas in the sealing cavity 100 is completely discharged by the tail exhaust pipe 300. Through this cyclic detection mechanism, the system can quickly respond to fluorine gas leakage or tail exhaust assembly failure, avoiding the harm to the health of operators caused by the accumulation of fluorine gas; through real-time monitoring and adjustment, ensuring the normal operation of the tail exhaust assembly and preventing the equipment from being damaged due to gas accumulation; through multiple cyclic detections and real-time monitoring, ensuring the stability and safety of the system.

[0049] In one embodiment of the present invention, as Figure 5 shown, while performing the step of detecting whether the tail exhaust assembly is in an operating state, the detection method further includes: Sending an alarm flashing instruction to the platform alarm light; By sending an alarm flashing instruction to the platform alarm light, it can remind the operator that there may be fluorine gas in the sealing cavity 100, and remind the operator to pay attention to the current system state, such as the working state of the tail exhaust assembly, the working state of the process gas valve 500, and the working state of the discharge cavity. The flashing of the alarm light is synchronized with the real-time monitoring result of the fluorine gas detector 200, ensuring that the operator can obtain the latest system state information, helping the operator quickly identify potential safety hazards, such as fluorine gas leakage or tail exhaust assembly failure, ensuring that the tail exhaust assembly, the process gas valve 500, and the discharge cavity are in a normal working state, and reducing the system downtime and maintenance cost.

[0050] In one embodiment of the present invention, as Figure 5 shown, while performing the step of detecting whether the tail exhaust assembly is in an operating state, the detection method further includes: Detecting whether the process gas valve 500 is in an open state; In the case where it is determined that the process gas valve 500 is in a closed state, the step of waiting for a predetermined time is performed.

[0051] When the fluorine gas detector 200 outputs a detection signal, it indicates that there is fluorine gas in the sealed cavity 100. At this time, in addition to performing steps S100 to S400 to ensure that the tail exhaust assembly is in an operating state and the gas in the sealed cavity 100 is discharged through the tail exhaust pipe 300. While confirming the operating state of the tail exhaust assembly, the system also needs to detect whether the process gas valve 500 is in an open state to ensure that the process gas valve 500 is in a closed state and prevent further leakage of fluorine gas. When the fluorine gas detector 200 outputs a detection signal, by ensuring that the tail exhaust assembly is in an operating state and the process gas valve 500 is in a closed state, the system can effectively discharge the fluorine gas in the sealed cavity 100 and prevent further leakage of fluorine gas. Through the coordinated work of the tail exhaust assembly and the process gas valve 500, not only the safety of the system is improved, but also the monitoring ability of the operator to the system state is enhanced, ensuring the stable operation of the equipment and the health and safety of the operator.

[0052] In an embodiment of the present invention, as Figure 5 shown, after the step of detecting whether the process gas valve 500 is in an open state, the detection method further includes: In the case where it is determined that the process gas valve 500 is in an open state, output a valve closing instruction and perform the step of waiting for a predetermined time.

[0053] When the fluorine gas detector 200 outputs a detection signal, it indicates that there is fluorine gas in the sealed cavity 100. If the process gas valve 500 is still in an open state, fluorine gas will continue to be input from the process gas module into the sealed cavity 100, further increasing the leakage risk and posing a threat to the health of the operator. Therefore, in the case where it is determined that the process gas valve 500 is in an open state, the control module outputs a valve closing instruction to make the process gas valve 500 in a closed state, cutting off the input source of fluorine gas and preparing for subsequent equipment maintenance. By detecting and controlling the working state of the process gas valve 500, it is possible to quickly respond to fluorine gas leakage and avoid the harm of fluorine gas accumulation to the health of the operator; through real-time monitoring and adjustment, ensure the normal operation of the tail exhaust assembly and the process gas valve 500 is in a closed state, preventing the equipment from being damaged due to gas accumulation. After the process gas valve 500 is closed, the step of waiting for a predetermined time is performed, that is, the system will wait for a predetermined time. The setting of this waiting time has the following purposes: Ensure that the process gas valve 500 is completely closed: The waiting time allows the system to confirm that the valve has been completely closed, preventing further leakage of fluorine gas caused by untimely valve closing.

[0054] System stability: The waiting time allows the system to have enough time to stabilize, ensuring the accuracy of subsequent steps.

[0055] Safety buffer: Provide a safety buffer period to ensure that the system is in a safe state before performing the next operation.

[0056] In one embodiment of the present invention, as Figure 5 shown, while performing the step of detecting whether the tail exhaust assembly is in an operating state, the detection method further includes: Detecting whether the discharge chamber is in a working state; While detecting the operating state of the tail exhaust assembly, the control module also checks whether the discharge chamber is in a working state. To detect whether the discharge chamber is in a working state, the operating parameters of the discharge chamber (such as current, voltage, etc.) can be detected to determine whether the discharge chamber is working. The operating parameters here do not only include the operating parameters of the discharge chamber, but also include the operating parameters of the fan or other components in the discharge chamber.

[0057] When it is determined that the discharge chamber is in a working state, a discharge chamber shutdown instruction is output, and the step of waiting for a predetermined time is executed.

[0058] The discharge chamber being in a working state indicates that the equipment is running and may be processing process gas. When the control module determines that the discharge chamber is in a working state, it outputs a discharge chamber shutdown instruction to stop the discharge chamber from working. While detecting whether the tail exhaust assembly is in an operating state, the control module can effectively prevent further leakage of fluorine gas by detecting the working state of the discharge chamber and timely outputting a shutdown instruction. After shutdown, the control module executes the step of waiting for a predetermined time to ensure the stability and safety of the system and provide necessary preparations for subsequent equipment maintenance. This mechanism not only improves the safety of the system but also enhances the operator's monitoring ability of the system state, ensuring the stable operation of the equipment and the health and safety of the operator. The control module outputs a discharge chamber shutdown instruction and executes the step of waiting for a predetermined time, which allows the system to confirm that the discharge chamber has completely stopped running and prevents further leakage of fluorine gas caused by untimely shutdown; in addition, waiting for a predetermined time allows the system enough time to stabilize, ensuring the accuracy of subsequent steps.

[0059] In one embodiment of the present invention, as Figure 5 shown, after performing the step of detecting whether the discharge chamber is in a working state, the detection method further includes: When it is determined that the discharge chamber is in a shutdown state, the step of waiting for a predetermined time is executed.

[0060] The discharge chamber is in a shutdown state, which is determined by monitoring the operating parameters of the discharge chamber (such as current, voltage, etc.). The fact that the discharge chamber is in a shutdown state indicates that the conditions for maintenance work are met. However, for safety reasons, it is necessary to perform the step of waiting for a predetermined time, so that the system executes steps S100 to S400 again to ensure that the tail exhaust assembly is in an operating state, the discharge chamber is in a shutdown state, and the process gas valve 500 is in a closed state, thereby further improving the safety of the system. After detecting whether the discharge chamber is in a working state, the system can effectively ensure the stability and safety of the system by confirming whether the discharge chamber is in a shutdown state and performing the step of waiting for a predetermined time. This mechanism not only improves the safety of the system, but also enhances the operator's monitoring ability of the system state, ensuring the stable operation of the equipment and the health and safety of the operator.

[0061] In summary, the method for detecting the gas supply system of an excimer laser provided by the present invention, by detecting whether the tail exhaust assembly is in an operating state, and waiting for a predetermined time when it is determined that the tail exhaust assembly is in an operating state to enter the next detection step, avoids the interval time between two detection processes being too short and improves the detection accuracy; by outputting a maintenance prompt message when it is determined that the fluorine gas detector 200 does not output a detection signal again, it ensures that there is no fluorine gas in the sealing chamber 100, improves the safety of the gas supply system, and avoids harm to the health of the operator.

[0062] The present invention also provides a light source for a lithography machine, and the light source for the lithography machine includes the gas supply system of the excimer laser as described above.

[0063] Figure 6 Illustrates a schematic diagram of the physical structure of an electronic device, such as Figure 6 As shown, the present invention also provides an electronic device, which may include: a processor 810, a communication interface 820, a memory 830, and a communication bus 840. Among them, the processor 810, the communication interface 820, and the memory 830 communicate with each other through the communication bus 840. The processor 810 can call the logical instructions in the memory 830 to execute the method for detecting the gas supply system of the excimer laser, and the method includes: Step S100, obtaining the detection signal output by the fluorine gas detector and detecting whether the tail exhaust assembly is in an operating state; Step S200, waiting for a predetermined time when it is determined that the tail exhaust assembly is in an operating state; Step S300, determining whether the fluorine gas detector outputs a detection signal again; Step S400, outputting a maintenance prompt message when it is determined that the fluorine gas detector does not output a detection signal again.

[0064] In addition, when the logical instructions in the above-mentioned memory 830 are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or a part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memories (ROM, Read-Only Memory), random access memories (RAM, Random Access Memory), magnetic disks, or optical discs that can store program codes.

[0065] On the other hand, the present invention also provides a computer program product. The computer program product includes a computer program that can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the methods provided above to perform the detection method for an excimer laser gas supply system. The method includes: Step S100, obtaining the detection signal output by the fluorine gas detector and detecting whether the tail exhaust assembly is in an operating state; Step S200, waiting for a predetermined time when it is determined that the tail exhaust assembly is in an operating state; Step S300, determining whether the fluorine gas detector outputs a detection signal again; Step S400, outputting a maintenance prompt message when it is determined that the fluorine gas detector does not output a detection signal again.

[0066] On yet another aspect, the present invention also provides a non-transitory computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, it realizes the method for performing the detection method for an excimer laser gas supply system provided by the above-mentioned various methods. The method includes: Step S100, obtaining the detection signal output by the fluorine gas detector and detecting whether the tail exhaust assembly is in an operating state; Step S200, waiting for a predetermined time when it is determined that the tail exhaust assembly is in an operating state; Step S300, determining whether the fluorine gas detector outputs a detection signal again; Step S400, outputting a maintenance prompt message when it is determined that the fluorine gas detector does not output a detection signal again.

[0067] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art can understand and implement it without creative efforts.

[0068] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus a necessary general hardware platform, and of course, it can also be implemented by hardware. Based on such an understanding, the essence of the above technical solution, or the part that contributes to the prior art, can be embodied in the form of a software product. The computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments or equivalently replace some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for detecting an excimer laser gas supply system, characterized in that: include: Obtaining a detection signal output by a fluorine gas detector (200), and detecting whether the tail exhaust component is in an operating state; When it is determined that the tail exhaust assembly is in an operating state, waiting for a predetermined time; Determining whether the fluorine gas detector (200) outputs a detection signal again; When it is determined that the fluorine gas detector (200) does not output a detection signal again, a maintenance prompt message is output.

2. The method for detecting the gas supply system of an excimer laser according to claim 1, characterized in that: The tail exhaust assembly comprises a tail exhaust pipe (300) and a differential pressure gauge arranged on the tail exhaust pipe (300), and the tail exhaust pipe (300) is in communication with the sealed cavity (100); the step of detecting whether the tail exhaust assembly is in an operating state comprises: Obtaining a differential pressure value output by the differential pressure gauge; When the pressure difference value is greater than or equal to a preset value, determining that the tail exhaust assembly is in an operating state; When the pressure difference value is less than a preset value, it is determined that the tail exhaust component is in a closed state.

3. The method for detecting the gas supply system of an excimer laser according to claim 2, characterized in that: After the step of detecting whether the tail exhaust assembly is in operation, the detection method further comprises: When it is determined that the tail exhaust component is in a closed state, a maintenance alarm message is output.

4. The method for detecting the gas supply system of an excimer laser according to claim 1, characterized in that: After the step of determining whether the fluorine gas detector (200) outputs a detection signal again, the detection method further comprises: When it is determined that the fluorine gas detector (200) outputs a detection signal, the step of obtaining the detection signal output by the fluorine gas detector (200) is performed again.

5. The method for detecting the gas supply system of an excimer laser according to any one of claims 1 to 4, characterized in that: While executing the step of detecting whether the tail exhaust assembly is in a running state, the detection method further includes: Detecting whether the process gas valve (500) is in an open state; When it is determined that the process gas valve (500) is in a closed state, the step of waiting for a predetermined time is performed.

6. The method for detecting the gas supply system of an excimer laser according to claim 5, characterized in that: After the step of detecting whether the process gas valve (500) is in an open state, the detection method further comprises: When it is determined that the process gas valve (500) is in an open state, a valve closing instruction is output, and the step of waiting for a predetermined time is performed.

7. The method for detecting the gas supply system of an excimer laser according to claim 5, characterized in that: While executing the step of detecting whether the tail exhaust assembly is in a running state, the detection method further includes: Detect whether the discharge chamber is in working state; When it is determined that the discharge chamber is in the working state, a discharge chamber shutdown instruction is output, and the step of waiting for a predetermined time is performed.

8. An excimer laser gas supply system, the gas supply system being based on the excimer laser gas supply system detection method according to any one of claims 1 to 7, characterized in that: include: Sealing chamber (100); a tail exhaust assembly, the tail exhaust assembly being in communication with the sealed cavity (100), and the tail exhaust assembly being used to exhaust the gas in the sealed cavity (100); A fluorine gas detection module, the fluorine gas detection module comprising a fluorine gas detector (200), the fluorine gas detector (200) being arranged in the sealed cavity (100), the fluorine gas detector (200) being used to detect whether there is fluorine gas inside the sealed cavity (100), and outputting a detection signal when it is detected that there is fluorine gas inside the sealed cavity (100); A control module, the control module being electrically connected to the fluorine gas detection module and the tail exhaust component respectively; the control module being used to obtain a detection signal output by the fluorine gas detector (200) and to detect whether the tail exhaust component is in an operating state; and being used to wait for a predetermined time when it is determined that the tail exhaust component is in an operating state; and being used to determine whether the fluorine gas detector (200) outputs a detection signal again, and outputting maintenance prompt information when it is determined that the fluorine gas detector (200) does not output a detection signal again.

9. A light source for a photolithography machine, characterized in that: Comprising the excimer laser gas supply system as claimed in claim 8.

10. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the method for detecting an excimer laser gas supply system according to any one of claims 1 to 7 is implemented.

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