Cleaning method for integrated target material

Abstract

The invention relates to a cleaning method of an integrated target material, which comprises the following steps of: (1) soaking cleaning cloth by using a cleaning agent to obtain pre-soaked cleaning cloth; (2) sequentially carrying out first cleaning treatment, second cleaning treatment and third cleaning treatment on an integrated target material by adopting the pre-impregnated cleaning cloth obtained in the step (1) to obtain a cleaned target material; and (3) drying the clean target material obtained in the step (2) to complete cleaning of the integrated target material. According to the cleaning method, the cleaning effect is good, the cleaning coverage rate and the cleaning efficiency are high, the technological requirements of batch production can be met, and the product quality and the production efficiency are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of target materials, and particularly relates to a cleaning method for an integrated target material. Background Art

[0002] With the wide application of display technology, the G4.5 integrated target material plays an important role in the manufacture of display panels. The G4.5 integrated target material is a key material for the sputtering process, and its surface cleanliness directly affects the quality and performance of the display panel.

[0003] Currently, the existing cleaning method for the G4.5 integrated target material mainly uses manual cleaning to remove foreign matters, residues, and non-target materials on the surface of the target material. Usually, a clean cloth soaked in isopropyl alcohol (IPA) solution is used for wiping. However, due to the instability of manual operation, it is difficult to accurately control the ratio of the clean cloth to the IPA solution, which may lead to residues or cleaning blind spots on the surface of the target material, affecting the cleaning effect. Moreover, the traditional manual wiping method is mostly one-way wiping, and the coverage rate is less than 85%. This wiping method is difficult to effectively remove foreign matters in the complex groove structure on the surface of the G4.5 integrated target material, resulting in ineffective cleaning of some areas and affecting the overall cleanliness of the target material. In addition, when manually cleaning the G4.5 integrated target material, the cleaning time for each target material is about 240 minutes, and the cleaning efficiency is low, reducing the manufacturing rate of the product.

[0004] For example, CN113976529A discloses a cleaning method for a copper target material. The cleaning method includes the following steps: degreasing, rust removal, alcohol washing, and drying the copper target material to be cleaned in sequence to obtain a clean copper target material. Among them, the target material needs to be placed in isopropyl alcohol for degreasing, soaked at 20 - 30 °C for 10 - 30 minutes to obtain the degreased target material. However, this method is likely to cause residual isopropyl alcohol solution on the surface of the target material. Even after drying, traces of the cleaning agent still remain on the surface of the target material, resulting in product defects.

[0005] Therefore, providing a cleaning method for an integrated target material with good cleaning effect, high cleaning coverage rate, and high cleaning efficiency is a technical problem that needs to be solved in the current field. Summary of the Invention

[0006] Aiming at the above problems, the purpose of the present invention is to provide a cleaning method for an integrated target material. Compared with the existing technology, the cleaning method provided by the present invention has good cleaning effect, high cleaning coverage rate, and high cleaning efficiency, can meet the process requirements of mass production, and improve the product quality and production efficiency.

[0007] To achieve the purpose of this invention, the present invention adopts the following technical solutions:

[0008] The present invention provides a cleaning method for an integrated target material, and the cleaning method includes the following steps:

[0009] (1) Soak the clean cloth with a cleaning agent to obtain a pre-soaked clean cloth;

[0010] (2) Use the pre-soaked clean cloth obtained in step (1) to perform a first cleaning treatment, a second cleaning treatment, and a third cleaning treatment on the one-piece target in sequence to obtain a clean target;

[0011] (3) Dry the clean target obtained in step (2) to complete the cleaning of the one-piece target.

[0012] In the cleaning method provided by the present invention, by pre-soaking the clean cloth with a cleaning agent and controlling the ratio of the cleaning agent to the clean cloth, the amount of the cleaning agent carried by the clean cloth is controlled, the residue of the cleaning agent on the surface of the target is reduced, and no trace of the cleaning agent residue remains on the surface of the target after the drying treatment; by performing the first cleaning treatment, the second cleaning treatment, and the third cleaning treatment in sequence, foreign matters, residues, and non-target materials on the surface of the target can be gradually removed, and compared with the traditional single-step cleaning method, the cleaning time can be saved while achieving a good cleaning effect.

[0013] Preferably, the temperature of the soaking treatment in step (1) is 10 - 20 °C, for example, it can be 10 °C, 12 °C, 14 °C, 15 °C, 16 °C, 18 °C, or 20 °C, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0014] Preferably, the time of the soaking treatment is 5 - 10 min, for example, it can be 5 min, 6 min, 7 min, 8 min, 9 min, or 10 min, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0015] Preferably, the specification of the clean cloth in step (1) is (20 - 25) cm × (20 - 25) cm, for example, it can be 20 cm × 20 cm, 21 cm × 21 cm, 22 cm × 22 cm, 23 cm × 23 cm, 24 cm × 24 cm, or 25 cm × 25 cm, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0016] Preferably, the cleaning agent in step (1) includes isopropyl alcohol.

[0017] Preferably, the number of clean cloths corresponding to every 5 liters of the cleaning agent in the soaking treatment is 370 - 380, for example, it can be 370, 372, 374, 375, 376, 378, or 380, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0018] In the present invention, by preferably controlling the number of cleaning cloths soaked in every 5 liters of the cleaning agent, the content of the cleaning agent in the cleaning cloth can be accurately controlled, further avoiding the problem of cleaning agent residue caused by uneven mixing in manual operation and ensuring a good cleaning effect.

[0019] Preferably, the first cleaning treatment in step (2) includes: using a pre-soaked cleaning cloth to perform a first cleaning treatment on the surface of the integrated target along a linear reciprocating path to obtain a first target.

[0020] Preferably, the time of the first cleaning is 20 - 40 min, for example, it can be 20 min, 22 min, 24 min, 26 min, 28 min, 30 min, 32 min, 34 min, 36 min, 38 min or 40 min, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0021] Preferably, the rate of the first cleaning is 0.2 - 0.8 m / s, for example, it can be 0.2 m / s, 0.3 m / s, 0.4 m / s, 0.5 m / s, 0.6 m / s, 0.7 m / s or 0.8 m / s, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0022] In the present invention, the main purpose of performing the first cleaning treatment is to remove larger residues on the surface of the target. Further, by preferably controlling the time and rate of the first cleaning treatment within a specific range, it can be ensured that the larger residues are effectively removed without causing unnecessary damage to the surface of the target.

[0023] Preferably, the second cleaning treatment in step (2) includes: starting from the center of the target, using a pre-soaked cleaning cloth to perform a second cleaning treatment on the first target along a spiral outward expanding path to obtain a second target.

[0024] Preferably, the time of the second cleaning treatment is 20 - 40 min, for example, it can be 20 min, 22 min, 24 min, 26 min, 28 min, 30 min, 32 min, 34 min, 36 min, 38 min or 40 min, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0025] Preferably, the rate of the second cleaning treatment is 10 - 15° / s, for example, it can be 10° / s, 11° / s, 12° / s, 13° / s, 14° / s or 15° / s, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0026] In the present invention, the main purpose of the second cleaning process is to remove the fine residues on the surface of the target and the contaminants in the irregular edge areas, making the movement of the pre-impregnated cleaning cloth on the surface of the target more uniform, and avoiding the problems of insufficient local cleaning or over-cleaning that may be caused by the traditional one-way wiping path. Further, by preferably controlling the time and rate of the second cleaning process within a specific range, the cleaning effect can be further improved and the residue of the cleaning agent can be reduced.

[0027] Preferably, the third cleaning process in step (2) includes: using the pre-impregnated cleaning cloth to perform a third cleaning process on the surface of the second target in a random Brownian motion path to obtain a clean target.

[0028] Preferably, the time of the third cleaning process is 20 - 40 min, for example, it can be 20 min, 22 min, 24 min, 26 min, 28 min, 30 min, 32 min, 34 min, 36 min, 38 min or 40 min, but not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0029] Preferably, the rate of the third cleaning process is 0.5 - 0.9 m / s, for example, it can be 0.5 m / s, 0.55 m / s, 0.6 m / s, 0.65 m / s, 0.7 m / s, 0.75 m / s, 0.8 m / s, 0.85 m / s or 0.9 m / s, but not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0030] In the present invention, the main purpose of the third cleaning process is to further eliminate the residues on the surface of the target, ensure more uniform contact between the cleaning agent and the surface of the target, and avoid the problems of insufficient local cleaning or over-cleaning caused by the traditional fixed path. Further, by preferably controlling the time and rate of the third cleaning process within a specific range, the cleaning effect on the target can be further improved and the cleaning time can be shortened.

[0031] Preferably, the temperature of the drying process in step (3) is 60 - 80 °C, for example, it can be 60 °C, 62 °C, 64 °C, 66 °C, 68 °C, 70 °C, 72 °C, 74 °C, 76 °C, 78 °C or 80 °C, but not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0032] Preferably, the time of the drying process in step (3) is 10 - 20 min, for example, it can be 10 min, 12 min, 14 min, 16 min, 18 min or 20 min, but not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0033] As a preferred technical solution of the present invention, the cleaning method includes the following steps:

[0034] (1) Soak the clean cloth with a cleaning agent at a temperature of 10 - 20 °C for 5 - 10 minutes. The size of the clean cloth is (20 - 25) cm × (20 - 25) cm. The cleaning agent includes isopropyl alcohol. For every 5 liters of the cleaning agent, the number of clean cloths for soaking treatment is 370 - 380, obtaining a pre-soaked clean cloth.

[0035] (2) Use the pre-soaked clean cloth obtained in step (1) to perform a first cleaning treatment on the one-piece target, that is, use the pre-soaked clean cloth to perform a first cleaning treatment on the surface of the one-piece target along a linear reciprocating path. The time of the first cleaning is 20 - 40 minutes, and the rate of the first cleaning is 0.2 - 0.8 m / s, obtaining a first target; then perform a second cleaning, that is, starting from the center of the target, use the pre-soaked clean cloth to perform a second cleaning treatment on the target along a spiral outward expanding path. The time of the second cleaning treatment is 20 - 40 minutes, and the rate of the second cleaning treatment is 10 - 15 ° / s, obtaining a second target; then perform a third cleaning treatment, that is, use the pre-soaked clean cloth to perform a third cleaning treatment on the surface of the second target along a random Brownian motion path. The time of the third cleaning treatment is 20 - 40 minutes, and the rate of the third cleaning treatment is 0.5 - 0.9 m / s, obtaining a clean target.

[0036] (3) Dry the clean target obtained in step (2) at a temperature of 60 - 80 °C for 10 - 20 minutes to complete the cleaning of the one-piece target.

[0037] Compared with the prior art, the present invention has the following beneficial effects:

[0038] (1) The cleaning method provided by the present invention can gradually remove foreign matters, residues, and non-target materials on the surface of the target through the sequentially performed first cleaning treatment, second cleaning treatment, and third cleaning treatment, and can achieve a good cleaning effect.

[0039] (2) The cleaning method provided by the present invention controls the carrying amount of the cleaning agent on the clean cloth by pre-soaking the clean cloth and controlling the ratio of the cleaning agent to the clean cloth, reducing the residue of the cleaning agent on the surface of the target, and leaving no trace of the cleaning agent residue on the surface of the target after drying treatment.

[0040] (3) Under relatively optimal conditions, the cleaning method provided by the present invention can make the first-pass rate of the target reach more than 98%, the qualified rate reach more than 94%, and the cleaning time of a single target be controlled within 120 minutes. Specific Embodiments

[0041] The technical solution of the present invention will be further described below through specific embodiments. Those skilled in the art should understand that the embodiments are only for helping to understand the present invention and should not be regarded as specific limitations on the present invention.

[0042] Example 1

[0043] This embodiment provides a cleaning method for an integrated target, and the cleaning method includes the following steps:

[0044] (1) Soak the clean cloth in a cleaning agent at a temperature of 15 °C for 8 minutes. The specification of the clean cloth is 24 cm × 24 cm. The cleaning agent includes isopropanol. The number of clean cloths corresponding to every 5 liters of the cleaning agent in the soaking treatment is 375, and a pre-soaked clean cloth is obtained;

[0045] (2) Use the pre-soaked clean cloth obtained in step (1) to perform a first cleaning treatment on the integrated target, that is, use the pre-soaked clean cloth to perform a first cleaning treatment on the surface of the integrated target in a linear reciprocating path. The time of the first cleaning is 30 minutes, and the rate of the first cleaning is 0.5 m / s, and a first target is obtained; then perform a second cleaning, that is, starting from the center of the target, use the pre-soaked clean cloth to perform a second cleaning treatment on the target in a spiral outward expanding path. The time of the second cleaning treatment is 30 minutes, and the rate of the second cleaning treatment is 12 ° / s, and a second target is obtained; then perform a third cleaning treatment, that is, use the pre-soaked clean cloth to perform a third cleaning treatment on the surface of the second target in a random Brownian motion path. The time of the third cleaning treatment is 30 minutes, and the rate of the third cleaning treatment is 0.7 m / s, and a clean target is obtained;

[0046] (3) Dry the clean target obtained in step (2) at a temperature of 70 °C for 15 minutes to complete the cleaning of the integrated target.

[0047] Example 2

[0048] This embodiment provides a cleaning method for an integrated target, and the cleaning method includes the following steps:

[0049] (1) Soak the clean cloth in a cleaning agent at a temperature of 10 °C for 10 minutes. The specification of the clean cloth is 24 cm × 24 cm. The cleaning agent includes isopropanol. The number of clean cloths corresponding to every 5 liters of the cleaning agent in the soaking treatment is 370, and a pre-soaked clean cloth is obtained;

[0050] (2) Use the pre-impregnated cleaning cloth obtained in step (1) to perform a first cleaning treatment on the one-piece target, that is, use the pre-impregnated cleaning cloth to perform a first cleaning treatment on the surface of the one-piece target along a linear reciprocating path. The time of the first cleaning is 40 min, and the rate of the first cleaning is 0.2 m / s, obtaining a first target; then perform a second cleaning, that is, starting from the center of the target, use the pre-impregnated cleaning cloth to perform a second cleaning treatment on the target along a spiral outward expanding path. The time of the second cleaning treatment is 40 min, and the rate of the second cleaning treatment is 10° / s, obtaining a second target; then perform a third cleaning treatment, that is, use the pre-impregnated cleaning cloth to perform a third cleaning treatment on the surface of the second target along a random Brownian motion path. The time of the third cleaning treatment is 40 min, and the rate of the third cleaning treatment is 0.9 m / s, obtaining a clean target;

[0051] (3) Dry the clean target obtained in step (2) at a temperature of 60 °C for 20 min to complete the cleaning of the one-piece target.

[0052] Example 3

[0053] This example provides a cleaning method for a one-piece target. The cleaning method includes the following steps:

[0054] (1) Soak the cleaning cloth in a cleaning agent at a temperature of 20 °C for 5 min. The specification of the cleaning cloth is 24 cm × 24 cm. The cleaning agent includes isopropyl alcohol. The number of cleaning cloths corresponding to every 5 liters of the cleaning agent in the soaking treatment is 380, obtaining a pre-impregnated cleaning cloth;

[0055] (2) Use the pre-impregnated cleaning cloth obtained in step (1) to perform a first cleaning treatment on the one-piece target, that is, use the pre-impregnated cleaning cloth to perform a first cleaning treatment on the surface of the one-piece target along a linear reciprocating path. The time of the first cleaning is 20 min, and the rate of the first cleaning is 0.8 m / s, obtaining a first target; then perform a second cleaning, that is, starting from the center of the target, use the pre-impregnated cleaning cloth to perform a second cleaning treatment on the target along a spiral outward expanding path. The time of the second cleaning treatment is 20 min, and the rate of the second cleaning treatment is 15° / s, obtaining a second target; then perform a third cleaning treatment, that is, use the pre-impregnated cleaning cloth to perform a third cleaning treatment on the surface of the second target along a random Brownian motion path. The time of the third cleaning treatment is 20 min, and the rate of the third cleaning treatment is 0.5 m / s, obtaining a clean target;

[0056] (3) Dry the clean target obtained in step (2) at a temperature of 80 °C for 10 min to complete the cleaning of the one-piece target.

[0057] Example 4

[0058] This embodiment provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the number of clean cloths in the soaking treatment corresponding to every 5 liters of the cleaning agent is 350 pieces.

[0059] Embodiment 5

[0060] This embodiment provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the rate of the first cleaning is 1 m / s.

[0061] Embodiment 6

[0062] This embodiment provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the rate of the first cleaning is 0.1 m / s.

[0063] Embodiment 7

[0064] This embodiment provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the rate of the second cleaning treatment is 30° / s.

[0065] Embodiment 8

[0066] This embodiment provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the rate of the second cleaning treatment is 5° / s.

[0067] Comparative Example 1

[0068] This comparative example provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the first cleaning treatment is not performed, and the integrated target is directly subjected to the second cleaning treatment.

[0069] Comparative Example 2

[0070] This comparative example provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the second cleaning treatment is not performed, and the first target is directly subjected to the third cleaning treatment.

[0071] Comparative Example 3

[0072] This comparative example provides a cleaning method for an integrated target, and the only difference compared with that of Embodiment 1 is that the third cleaning treatment is not performed, and the second target is used as a clean target for drying treatment.

[0073] The targets obtained in the above embodiments and comparative examples are subjected to full inspection to obtain the yield rate and the first-pass rate. The results are shown in Table 1.

[0074] Table 1

[0075]

[0076]

[0077] The following points can be seen from the data in Table 1:

[0078] (1) From the data of Examples 1-3, it can be seen that under relatively optimal conditions, the cleaning method provided by the present invention can make the first-pass rate of the target reach more than 98%, and the qualified product rate reach more than 94%.

[0079] (2) From the data of Example 1 and Example 4, it can be seen that the present invention controls the carrying amount of the cleaning agent by the cleaning cloth by preferably controlling the ratio of the cleaning agent to the cleaning cloth, reduces the residue of the cleaning agent on the surface of the target, and thus can improve the first-pass rate and the qualified product rate of the product.

[0080] (3) From the data of Example 1 and Examples 5-8, it can be seen that the present invention can further remove foreign matters, residues and non-target materials on the surface of the target by preferably controlling the rates of the first cleaning and the second cleaning, further improving the cleaning effect, and thus can improve the first-pass rate and the qualified product rate of the product.

[0081] (4) From the data of Example 1 and Comparative Examples 1-3, it can be seen that the cleaning method provided by the present invention can gradually remove foreign matters, residues and non-target materials on the surface of the target through the first cleaning treatment, the second cleaning treatment and the third cleaning treatment carried out in sequence, can achieve a good cleaning effect, and thus can achieve a high first-pass rate and a qualified product rate.

[0082] The applicant declares that the above description is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by any person skilled in the art within the technical scope disclosed by the present invention fall within the protection scope and the disclosure scope of the present invention.

Claims

1. A method for cleaning an integrated target material, characterized in that: The cleaning method comprises the following steps: (1) soaking the clean cloth with a cleaning agent to obtain a pre-impregnated clean cloth; (2) using the pre-impregnated clean cloth obtained in step (1) to sequentially perform a first cleaning process, a second cleaning process, and a third cleaning process on the integrated target material to obtain a clean target material; (3) Drying the clean target material obtained in step (2) to complete the cleaning of the integrated target material.

2. The cleaning method according to claim 1, characterized in that: The soaking temperature in step (1) is 10-20°C; Preferably, the soaking treatment time is 5-10 minutes.

3. The cleaning method according to claim 1 or 2, characterized in that: The specification of the clean cloth in step (1) is (20-25) cm×(20-25) cm.

4. The cleaning method according to any one of claims 1 to 3, characterized in that: The cleaning agent in step (1) comprises isopropyl alcohol; Preferably, the number of clean cloths corresponding to the soaking process is 370-380 per 5 liters of the cleaning agent.

5. The cleaning method according to any one of claims 1 to 4, characterized in that: Step (2) The first cleaning process includes: using a pre-impregnated clean cloth to perform a first cleaning process on the surface of the integrated target material in a linear reciprocating path to obtain a first target material; Preferably, the first cleaning time is 20-40 minutes; Preferably, the first cleaning rate is 0.2-0.8 m / s.

6. The cleaning method according to any one of claims 1 to 5, characterized in that: Step (2) the second cleaning process comprises: starting from the center of the target material, using a pre-impregnated clean cloth to perform a second cleaning process on the first target material in a spirally expanding path to obtain a second target material; Preferably, the second cleaning treatment takes 20-40 minutes; Preferably, the rate of the second cleaning process is 10-15° / s.

7. The cleaning method according to any one of claims 1 to 6, characterized in that: The third cleaning process in step (2) includes: using a pre-impregnated clean cloth to perform a third cleaning process on the surface of the second target material in a random Brownian motion path to obtain a clean target material; Preferably, the third cleaning treatment takes 20-40 minutes; Preferably, the rate of the third cleaning process is 0.5-0.9 m / s.

8. The cleaning method according to any one of claims 1 to 7, characterized in that: The temperature of the drying treatment in step (3) is 60-80°C.

9. The cleaning method according to any one of claims 1 to 8, characterized in that: The drying time in step (3) is 10-20 minutes.

10. The cleaning method according to any one of claims 1 to 9, characterized in that: The cleaning method comprises the following steps: (1) soaking a clean cloth in a cleaning agent at a temperature of 10-20° C. for 5-10 minutes, wherein the specification of the clean cloth is (20-25) cm×(20-25) cm, and the cleaning agent includes isopropyl alcohol. The number of clean cloths in the soaking treatment is 370-380 per 5 liters of the cleaning agent, thereby obtaining a pre-impregnated clean cloth; (2) using the pre-impregnated clean cloth obtained in step (1) to perform a first cleaning treatment on the one-piece target material, that is, using the pre-impregnated clean cloth to perform a first cleaning treatment on the surface of the one-piece target material in a linear reciprocating path, the first cleaning time is 20-40 minutes, and the first cleaning rate is 0.2-0.8 m / s, to obtain a first target material; then performing a second cleaning, that is, starting from the center of the target material, using the pre-impregnated clean cloth to perform a second cleaning treatment on the target material in a spirally expanding path, the second cleaning time is 20-40 minutes, and the second cleaning rate is 10-15° / s, to obtain a second target material; then performing a third cleaning treatment, that is, using the pre-impregnated clean cloth to perform a third cleaning treatment on the surface of the second target material in a random Brownian motion path, the third cleaning time is 20-40 minutes, and the third cleaning rate is 0.5-0.9 m / s, to obtain a clean target material; (3) Drying the clean target obtained in step (2) at a temperature of 60-80° C. for 10-20 min to complete the cleaning of the integrated target.

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