Photoresist storage device

Abstract

The invention relates to a photoresist storage device, which comprises a photoresist bottle used for storing photoresist; the fixed bracket is connected with the photoresist bottle in a sliding manner in the vertical direction; the base is fixedly connected with the fixed support, the base is provided with a piezoresistive element used for supporting the photoresist bottle, and the piezoresistive element can change the resistance according to the change of pressure applied to the photoresist bottle; and the display module is in circuit connection with the piezoresistive element and is used for displaying an electrical signal of the piezoresistive element, and the quality of the photoresist can be obtained according to the electrical signal. The photoresist content can be monitored in real time, the inner bag support and the inner bag are arranged in the bottle bottom, the photoresist at the bottle bottom can be fully extruded out, and waste of the photoresist during bottle replacement is remarkably reduced.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor integrated circuit process manufacturing, and particularly relates to a photoresist storage device. Background Art

[0002] Since photoresist products often need to be stored in low-temperature refrigeration and have strict requirements for storage conditions such as temperature. Therefore, it is necessary to heat the photoresist to room temperature before use. In addition, when developing new processes, it is necessary to accurately control the amount of photoresist used in the experimental process, and operators need to frequently enter the clean room to observe the amount of photoresist used, thus increasing the workload.

[0003] At present, the monitoring means for the remaining content of the photoresist bottle is not perfect. The common method is to install an Omron sensor at the position of the glue outlet pipeline, and a signal is sent to remind to change the glue when there is no photoresist being discharged. However, if an alarm is issued when the machine is applying glue, changing the glue at this time will affect the process efficiency and increase the process cost. Therefore, it is necessary to monitor the remaining amount of photoresist in real time to ensure the normal progress of each process.

[0004] In addition, since the photoresist is extruded by the air pressure difference, it is difficult to completely extrude the photoresist at the bottom of the current photoresist bottle, resulting in waste.

[0005] Therefore, it is necessary to invent a photoresist bottle that can monitor the remaining amount of photoresist in real time and completely extrude the photoresist. Summary of the Invention

[0006] In order to achieve the above object, the present invention provides a photoresist storage device, which has the functions of real-time monitoring of the photoresist content and reducing photoresist waste.

[0007] Specifically, the photoresist storage device includes:

[0008] A photoresist bottle for storing photoresist;

[0009] A fixed bracket, which is slidably connected to the photoresist bottle in the vertical direction;

[0010] A base, which is fixedly connected to the fixed bracket, and the base is provided with a piezoresistive element for supporting the photoresist bottle, and the piezoresistive element can change its resistance according to the change of the pressure exerted by the photoresist bottle;

[0011] A display module, which is circuit-connected to the piezoresistive element, is used for displaying the electrical signal of the piezoresistive element, and can obtain the mass of the photoresist according to the electrical signal.

[0012] Further, the photoresist bottle includes a bottle body and a bottle cap. The photoresist is stored inside the bottle body. An adhesive outlet pipe extending from the bottom of the bottle to the outside of the bottle cap is provided inside the bottle body. An air inlet pipe is provided on the bottle cap. By increasing the air pressure into the bottle body through the air inlet pipe, the photoresist is discharged from the adhesive outlet pipe.

[0013] Further, a slide rail is provided in the vertical direction of the fixed bracket. A pulley is slidably connected to the slide rail. The pulley is fixedly connected to the photoresist bottle through a fastener.

[0014] Further, the fastener is a clamp, and the clamp is arranged around the photoresist bottle.

[0015] Further, the clamp includes a clamping band and a buckle, and the length of the clamping band is adjustable.

[0016] Further, a connecting member is provided between the piezoresistive element and the photoresist bottle. The connecting member is used to evenly transfer the pressure exerted by the photoresist bottle to the piezoresistive element.

[0017] Further, the piezoresistive element includes an elastic outer shell with a hollow interior and liquid metal encapsulated inside the elastic outer shell. The elastic outer shell undergoes elastic deformation under the pressure exerted by the photoresist bottle, thereby changing the shape of the liquid metal.

[0018] Further, the elastic outer shell is made of a polymer.

[0019] Further, the liquid metal includes gallium and alloys of gallium.

[0020] Further, the piezoresistive element further includes an electrode led out from the inside of the elastic outer shell, and the electrode is circuit-connected to the display module.

[0021] Further, the display module further includes a plurality of indicator lights, and each indicator light is controlled by the electrical signal and performs an action of lighting or extinguishing according to the electrical signal.

[0022] Further, when the photoresist remaining amount is higher than the threshold, the first indicator light is lit.

[0023] Further, when the photoresist remaining amount is less than the threshold, the second indicator light is lit.

[0024] Further, the electrical signal includes the resistance, voltage, and current of the piezoresistive element.

[0025] Further, the resistance and the photoresist remaining amount satisfy a mathematical relationship:

[0026]

[0027] Wherein, R0 is the initial resistance of the piezoresistive element when the photoresist bottle is filled with photoresist, ΔR is the resistance change value during the use of the photoresist bottle, and X is the remaining mass of the photoresist.

[0028] Further, the photoresist storage device further includes a processing module, the processing module is circuit-connected to the display module, the processing module can calculate the remaining amount of photoresist according to the electrical signal, and send the remaining amount of photoresist to the display module for display;

[0029] And obtain the mathematical relationship between the electrical signal and the remaining amount of photoresist, and send the curve graph of the photoresist mass and the mathematical relationship to the display module for display.

[0030] Further, the display module further includes a first display screen for displaying the remaining amount of photoresist, and a second display screen for displaying the curve graph.

[0031] Further, the photoresist bottle further includes an inner bladder for accommodating the photoresist and an inner bladder bracket for supporting the inner bladder;

[0032] The inner bladder is arranged inside the bottle body, and the inner bladder bracket is arranged at the bottom inside the bottle body.

[0033] Further, the upper surface of the inner bladder bracket is provided with a groove extending towards the bottom of the bottle, the inner bladder is provided with a bladder head matching the shape of the groove, the bladder head is embedded in the groove, and one end of the glue outlet pipe is embedded in the bladder head.

[0034] Further, the inner bladder is made of a high molecular polymer.

[0035] Further, the bottle cap includes:

[0036] An upper fixator, a bottle cap outer cover and a lower fixator connected in sequence, and a linkage is arranged inside the bottle cap outer cover;

[0037] The linkage is rotatably connected to the bottle cap outer cover;

[0038] The bottle cap outer cover is detachably connected to the bottle body.

[0039] Further, the circumferential direction of the linkage is provided with an annular step, and the inner side wall of the bottle cap outer cover is provided with an annular groove, and the annular step is clamped in the annular groove and rotatably connected to the annular groove.

[0040] The present invention has the following beneficial effects:

[0041] The present invention can sense the remaining amount of photoresist in real time through piezoresistive elements, and designs a new inner bladder structure that can fully extrude the photoresist at the bottom of the bottle, significantly reducing the waste of photoresist when changing the bottle. In addition, the photoresist bottle is fixed by a clamp, which can adapt to different sizes of photoresist bottles to meet the use of various sizes of glue bottles. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 is a schematic structural diagram of the photoresist storage device of the present invention;

[0043] Figure 2 and Figure 3 is a schematic structural diagram of the piezoresistive element in the embodiment of the present invention;

[0044] Figure 4 is a monitoring curve graph of the photoresist content in the embodiment of the present invention;

[0045] Figure 5 is a plan view of the bottle body and the bottle cap of the photoresist bottle of the present invention;

[0046] Figure 6 is a schematic structural diagram of the bottle cap of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0047] The following further describes in detail a photoresist storage device proposed by the present invention in conjunction with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the accompanying drawings are in a very simplified form and all use non-precise scales, only for the purpose of facilitating and clearly assisting in explaining the embodiments of the present invention. In order to make the purpose, features and advantages of the present invention more obvious and understandable, please refer to the accompanying drawings. It should be noted that the structures, scales, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in the art to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention. Therefore, they do not have any technical essence. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed by the present invention.

[0048] In order to monitor the content of photoresist in real time, the present invention proposes a photoresist storage device, as Figure 1As shown in the figure, the photoresist storage device includes: a photoresist bottle 1, a fixed bracket 2, a base 3, a piezoresistive element 4, and a display module 5; the photoresist bottle 1 is used to store photoresist and is slidably connected to the fixed bracket 2 in the vertical direction. The fixed bracket 2 is used to fix the photoresist bottle 1 to keep the photoresist bottle 1 stable. The bottom of the fixed bracket 2 is fixedly connected to the base 3. A piezoresistive element 4 for supporting the photoresist bottle 1 is arranged on the upper surface of the base 3. The piezoresistive element 4 can change its resistance according to the change of the pressure exerted by the photoresist bottle 1. The display module 5 is electrically connected to the piezoresistive element 4 and is used to display the electrical signal of the piezoresistive element 4. The quality of the photoresist can be obtained according to the electrical signal. The electrical signal includes the resistance, voltage, and current of the piezoresistive element 4. The display module 5 is arranged on the base 3. A power supply 7 for supplying power to the display module 5 and a sliding cover 9 are also arranged on the base 3. The sliding cover 9 is slidably connected to the upper surface of the base 3. When the piezoresistive element 4 is not in use, the sliding cover 9 can be pushed above the piezoresistive element 4 to protect the piezoresistive element 4 from external force damage.

[0049] Specifically, a slide rail 21 is arranged in the vertical direction of the fixed bracket 2. A pulley 22 is slidably connected to the slide rail 21. The pulley 22 is fixedly connected to the photoresist bottle 1 through a fastener 23. As the photoresist is consumed, the pressure exerted on the piezoresistive element 4 by the photoresist bottle 1 gradually decreases, and its resistance also changes with the decrease of the pressure.

[0050] As Figure 2 、 3 As shown in the figure, the piezoresistive element 4 is mainly composed of an elastic outer shell 41 with a hollow interior and a liquid metal 42 encapsulated inside the elastic outer shell 41. When the elastic outer shell 41 is subjected to pressure, it will undergo elastic deformation, thereby changing the shape of the liquid metal 42 and further changing the resistance. When the photoresist bottle 1 is filled with photoresist, the pressure exerted on the piezoresistive element 4 is the greatest, and the resistance is also the greatest at this time. As the photoresist content decreases, the pressure exerted on the piezoresistive element 4 becomes smaller, and the elastic outer shell 41 rebounds. The cross-sectional area of the elastic outer shell 41 becomes larger. Since the resistance is inversely proportional to the cross-sectional area size, the resistance of the piezoresistive element 4 decreases as the photoresist content decreases. During the rebound process of the elastic outer shell 41, the photoresist bottle 1 also moves vertically upward along the slide rail 21 following the pulley 2.

[0051] Among them, the elastic outer shell 41 is made of a polymer. The elastic outer shell 41 can be made of a highly elastic SEBS thermoplastic elastomer. Using the melt process, heating the SEBS pellets at a temperature of 220°C for 30 minutes will cause the SEBS pellets to undergo plastic deformation, and then putting them into the corresponding mold to prepare the hollow-structured elastic outer shell 41.

[0052] The liquid metal 42 includes gallium and its alloys. In this example, a gallium-indium-tin alloy with a melting point of 5 °C is selected and injected into the elastic outer shell 41 of the hollow structure to form the piezoresistive element 4.

[0053] Furthermore, the piezoresistive element 4 further includes an electrode 43 led out from the inside of the elastic outer shell 41, and the electrode 43 is circuit-connected to the display module 5. Optionally, the electrode 43 can be a copper wire, a silver wire, an aluminum wire, a gold wire, etc. The electrode 43 is led out from the inside of the elastic outer shell 41. The diameter of the electrode 43 is about 1 mm, and the length of the led-out part is about 50 mm. It is encapsulated with epoxy resin, and finally a piezoresistive element 4 with a length of about 30 mm, a width of about 10 mm, and an inner diameter of about 0.7 mm is prepared. Auxiliary structures 44 can be provided on both sides of the piezoresistive element 4. The auxiliary structures 44 can be grid-shaped. After the piezoresistive element 4 is placed on the base 3, the auxiliary structures 44 are used to keep the position of the piezoresistive element 4 stable. The present invention does not specifically limit the materials of the elastic outer shell 41, the liquid metal 42, and the electrode 43. The above examples are only for illustrative purposes.

[0054] Furthermore, the fastener 23 is a clamp that surrounds the photoresist bottle 1. The clamp includes a clamping band 231 and a buckle 232. The position of the buckle 232 and the length of the clamping band 231 are adjustable, so it can be applied to photoresist bottles 1 of various sizes.

[0055] Furthermore, as Figure 3 shown, a connector 6 is provided between the piezoresistive element 4 and the photoresist bottle 1. The connector 6 is used to evenly transfer the pressure applied by the photoresist bottle 1 to the piezoresistive element 4. The connector 6 is made of a rigid material, and a groove-shaped structure 61 matching the contour of the piezoresistive element 4 is provided on its lower surface to increase the stability of its contact with the piezoresistive element 41.

[0056] Furthermore, the display module 5 further includes a plurality of indicator lights 51. Each indicator light 51 is controlled by the electrical signal and performs a lighting or extinguishing action according to the electrical signal. Specifically, each indicator light 51 is connected to a driver 8, and the driver 8 drives each indicator light to light or extinguish according to the electrical signal. In this example, two indicator lights of different colors are provided, namely a yellow first indicator light and a red second indicator light. When the photoresist remaining amount is higher than the threshold, the first indicator light lights up; when the photoresist remaining amount is less than the threshold, the second indicator light lights up. That is, the yellow light indicates that the photoresist remaining amount is sufficient, and the glue amount is higher than 10%, and the red light indicates that the photoresist remaining amount is insufficient.

[0057] Further, the photoresist storage device further includes a processing module, which is circuit-connected to the display module 5. The processing module is configured to receive the electrical signal of the piezoresistive element 4, calculate the remaining amount of photoresist based on the electrical signal, and send the remaining amount of photoresist to the display module 5 for display; and obtain the mathematical relationship between the electrical signal and the remaining amount of photoresist, and send the curve graph corresponding to the mathematical relationship to the display module 5 for display.

[0058] Further, in this example, the resistance of the piezoresistive element 4 is used as the electrical signal indicating the remaining amount of photoresist, and the resistance and the remaining amount of photoresist satisfy a mathematical relationship, as Figure 4 shown. The abscissa is the remaining amount of photoresist (unit: kg), and the ordinate is the ratio of the existing resistance to the initial resistance, that is, the resistance change rate. The total mass of the photoresist bottle used in this example is 2.5 kg, and the total mass of the stored photoresist is 0.5 kg. It can be seen from the figure that when the photoresist is not used, the resistance change rate is the highest, close to 30. As the photoresist is used, the resistance change rate decreases as the mass of the photoresist bottle decreases. By real-time collecting the resistance of the piezoresistive element 4 and the remaining amount of photoresist, a set of highly correlated data is obtained, and the formula obtained by fitting this set of data is as follows:

[0059]

[0060] wherein, R0 is the initial resistance of the piezoresistive element 4 when the photoresist bottle 1 is full of photoresist, ΔR is the resistance change value during the use of the photoresist bottle 1, X is the remaining mass of the photoresist, and the fitting variance R 2 is 0.9961, indicating that this mathematical model can well represent the relationship between the resistance and the remaining mass of the photoresist. The processing module real-time obtains the resistance of the piezoresistive element 4 and calculates the remaining amount of photoresist according to the above mathematical relationship. This example only schematically gives a mathematical relationship. In other preferred examples, the mathematical relationship is not limited to the above formula.

[0061] Further, the display module 5 further includes a first display screen 52 for displaying the remaining amount of photoresist, and a second display screen 53 for displaying the curve graph. The processing module sends the calculated remaining amount of photoresist to the first display screen for display, and sends the curve graph of the mathematical relationship to the second display screen for display.

[0062] In addition, the present invention also solves the problem that it is difficult to extrude the photoresist at the bottom of the bottle, and improves the utilization rate of the photoresist. The photoresist bottle 1 of the present invention includes a bottle body 11 and a bottle cap 12. The photoresist is stored in the bottle body 11. An adhesive outlet tube 13 extending from the bottom of the bottle to the outside of the bottle cap 12 is provided in the bottle body 11. An air inlet tube 14 is provided on the bottle cap 12. The air pressure is increased into the bottle body 11 through the air inlet tube 14 to discharge the photoresist from the adhesive outlet tube 13. In order to ensure that the air pressure can extrude all the photoresist at the bottom of the bottle, the adhesive outlet tube 13 should be as close to the bottom of the bottle as possible. However, being too close will result in too small a space between the adhesive outlet tube and the bottom of the bottle, causing low adhesive discharge efficiency or even the problem of no adhesive discharge.

[0063] In order to extrude all the photoresist at the bottom of the bottle and ensure the adhesive discharge efficiency, as Figure 5 shown, the photoresist bottle 1 further includes an inner bladder 16 for accommodating the photoresist 100 and an inner bladder bracket 15 for supporting the inner bladder 16; the inner bladder 16 is arranged inside the bottle body 11, and the inner bladder bracket 15 is arranged at the bottom inside the bottle body 11. The inner bladder 16 is made of a polymer, preferably a polyethylene film. A groove 151 extending towards the bottom of the bottle is provided on the upper surface of the inner bladder bracket 15. The groove 151 is a conical structure, and the top diameter of the groove 151 is 0.25 mm to 0.45 mm. A bladder head 161 matching the shape of the groove 151 is provided on the inner bladder 16. The bladder head 161 is embedded in the groove 151, and one end of the adhesive outlet tube 13 is embedded in the bladder head 161, so as to ensure that all the photoresist at the bottom of the bottle is extruded.

[0064] The upper surface of the inner bladder bracket 15 matches the contour shape of the bottom of the inner bladder 16 to provide better forming effect, so as to ensure that the position of the inner bladder 16 does not shift. The bladder head 161 is embedded in the groove 151, which further ensures that the position of the inner bladder 16 does not shift during the use of the photoresist.

[0065] The present invention also optimizes the structure of the bottle cap 12, as Figure 6As shown, the bottle cap 12 includes: an upper fixator 121, an outer bottle cap cover 124, and a lower fixator 122 that are connected in sequence. An interlocking member 123 is disposed inside the outer bottle cap cover 124; the interlocking member 123 is rotatably connected to the outer bottle cap cover 124; the outer bottle cap cover 124 is detachably connected to the bottle body 11. Specifically, the upper fixator 121 and the lower fixator 122 are used to axially constrain the interlocking member 123 to prevent the interlocking member 123 from axially falling off. An annular step 127 is circumferentially provided on the interlocking member 123, and an annular groove 128 is provided on the inner side wall of the outer bottle cap cover 124. The annular step 127 is clamped in the annular groove 128 and is rotatably connected to the annular groove 128. Internal threads are provided inside the outer bottle cap cover 124, and external threads are provided on the bottle body 11. The outer bottle cap cover 124 is threadedly connected to the bottle body. When the bottle cap 12 is rotated, relative rotation occurs between the outer bottle cap cover 124 and the interlocking member 123, that is, the interlocking member 123 remains stationary through the rotational connection between the annular step 127 and the annular groove 128, while the outer bottle cap cover 124 is threadedly connected to the bottle body 11 through the internal threads.

[0066] As Figure 5 shown, holes through which the glue outlet tube 13 and the air inlet tube 14 pass are provided on the interlocking member 123. The glue outlet tube 13 and the air inlet tube 14 are fixedly connected to the interlocking member 123 through the holes. When the bottle cap 12 is rotated, the outer bottle cap cover 124 rotates, while the glue outlet tube 13 and the air inlet tube 14 fixed to the interlocking member 123 do not rotate following the outer bottle cap cover 124. The glue outlet tube 13 located outside the bottle cap 11 is connected to other pipes through a flange 131, and the air inlet tube 13 located outside the bottle cap 11 is connected to an air inlet joint 142 through an air inlet flange 141, and the air inlet joint 142 is connected to a gas supply device.

[0067] In summary, the present invention can monitor the photoresist content in real time, facilitating process personnel to perform process operations according to the photoresist content; an inner bladder support and an inner bladder are provided inside the bottle bottom. There is a groove in the middle of the inner bladder support, and a bladder head is provided at the lower end of the inner bladder, avoiding the instability of photoresist extrusion caused by the offset of the inner bladder during the use of the photoresist, and the glue outlet tube is provided inside the bladder head, avoiding the problem that the photoresist at the bottom of the bottle cannot be extruded.

[0068] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising said element.

[0069] In the description of the present invention, unless otherwise clearly specified and defined, the terms "mounted", "connected", "coupled", "fixed" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0070] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be recognized that the above description should not be construed as a limitation of the present invention. After those skilled in the art have read the above content, various modifications and alternatives to the present invention will be obvious. Therefore, the protection scope of the present invention shall be defined by the appended claims.

Claims

1. A photoresist storage device, characterized in that, Comprising: A photoresist bottle (1) for storing photoresist; A fixed bracket (2) slidably connected to the photoresist bottle (1) in the vertical direction; A base (3) fixedly connected to the fixed bracket (2), the base (3) being provided with a piezoresistive element (4) for supporting the photoresist bottle (1), and the piezoresistive element (4) can change its resistance according to the change of the pressure exerted by the photoresist bottle (1); A display module (5) electrically connected to the piezoresistive element (4) for displaying the electrical signal of the piezoresistive element (4), and the quality of the photoresist can be obtained according to the electrical signal.

2. The photoresist storage device according to claim 1, wherein The photoresist bottle (1) includes a bottle body (11) and a bottle cap (12). The photoresist is stored in the bottle body (11). An adhesive outlet tube (13) extending from the bottom of the bottle to the outside of the bottle cap (12) is provided in the bottle body (11). An air inlet tube (14) is provided on the bottle cap (12). By increasing the air pressure into the bottle body (11) through the air inlet tube (14), the photoresist is discharged from the adhesive outlet tube (13).

3. The photoresist storage device according to claim 1, wherein A slide rail (21) is provided in the vertical direction of the fixed bracket (2), and a pulley (22) is slidably connected to the slide rail (21). The pulley (22) is fixedly connected to the photoresist bottle (1) through a fastener (23).

4. The photoresist storage device according to claim 3, wherein The fastener (23) is a clamp, and the clamp is arranged around the photoresist bottle (1).

5. The photoresist storage device according to claim 4, wherein The clamp includes a clamping band (231) and a buckle (232), and the length of the clamping band (231) is adjustable.

6. The photoresist storage device according to claim 1, wherein A connecting member (6) is provided between the piezoresistive element (4) and the photoresist bottle (1), and the connecting member (6) is used to uniformly transfer the pressure exerted by the photoresist bottle (1) to the piezoresistive element (4).

7. The photoresist storage device according to claim 1, wherein The piezoresistive element (4) includes an elastic outer shell (41) with a hollow interior and a liquid metal (42) encapsulated inside the elastic outer shell (41). The elastic outer shell (41) undergoes elastic deformation under the pressure exerted by the photoresist bottle (1), thereby changing the shape of the liquid metal (42).

8. The photoresist storage device according to claim 7, wherein, The elastic outer shell (41) is made of a polymer.

9. The photoresist storage device according to claim 7, wherein The liquid metal (42) includes gallium and alloys of gallium.

10. The photoresist storage device according to claim 7, wherein The piezoresistive element (4) further includes an electrode (43) led out from the inside of the elastic outer shell (41), and the electrode (43) is electrically connected to the display module (5).

11. The photoresist storage device according to claim 1, wherein The display module (5) further includes a plurality of indicator lights (51), and each indicator light (51) is controlled by the electrical signal and performs a lighting or extinguishing action according to the electrical signal.

12. The photoresist storage device according to claim 11, wherein When the photoresist remaining amount is higher than the threshold, the first indicator light is lit.

13. The photoresist storage device according to claim 11, wherein When the photoresist remaining amount is less than the threshold, the second indicator light is lit.

14. The photoresist storage device according to claim 11, wherein The electrical signal includes the resistance, voltage and current of the piezoresistive element.

15. The photoresist storage device according to claim 14, characterized in that, The resistance and the photoresist remaining amount satisfy a mathematical relationship: Wherein, R0 is the initial resistance of the piezoresistive element (4) when the photoresist bottle (1) is filled with photoresist, ΔR is the resistance during the use of the photoresist bottle (1), and X is the photoresist remaining amount.

16. The photoresist storage device according to claim 15, characterized in that, It further includes a processing module, which is circuit-connected to the display module (5). The processing module can calculate the photoresist margin based on the electrical signal and send the photoresist margin to the display module (5) for display; and obtain the mathematical relationship between the electrical signal and the photoresist margin, and send the curve graph of the photoresist quality and the mathematical relationship to the display module (5) for display.

17. The photoresist storage device according to claim 16, wherein The display module (5) further includes a first display screen (52) for displaying the photoresist margin and a second display screen (53) for displaying the curve graph.

18. The photoresist storage device according to claim 2, characterized in that, The photoresist bottle (1) further includes an inner bladder (16) for containing the photoresist and an inner bladder bracket (15) for supporting the inner bladder (16); the inner bladder (16) is arranged inside the bottle body (11), and the inner bladder bracket (15) is arranged at the bottom inside the bottle body (11).

19. The photoresist storage device according to claim 18, wherein, The upper surface of the inner bladder bracket (15) is provided with a groove (151) extending towards the bottom of the bottle. The inner bladder (16) is provided with a bladder head (161) matching the shape of the groove (151). The bladder head (161) is embedded in the groove (151), and one end of the glue outlet pipe (13) is embedded in the bladder head (161).

20. The photoresist storage device according to claim 18, characterized in that, The inner bladder (16) is made of a high molecular polymer.

21. The photoresist storage device according to claim 2, wherein, The bottle cap (12) includes: an upper fixer (121), a bottle cap outer cover (124) and a lower fixer (122) connected in sequence. A linkage member (123) is arranged inside the bottle cap outer cover (124); the linkage member (123) is rotationally connected to the bottle cap outer cover (124); the bottle cap outer cover (124) is detachably connected to the bottle body (11).

22. The photoresist storage device according to claim 21, wherein The circumferential direction of the linkage member (123) is provided with an annular step (127), and the inner side wall of the bottle cap outer cover (124) is provided with an annular groove (128). The annular step (127) is clamped in the annular groove (128) and is rotationally connected to the annular groove (128).

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