Surface improvement method for aluminum heater

Abstract

The invention relates to a surface improvement method of an aluminum heater, which comprises the following steps: (1) pre-treating an aluminum heater blank to obtain a finished aluminum heater product; and (2) nickel plating treatment and aluminum nitride plating treatment are sequentially conducted on the surface of the finished aluminum heater obtained in the step (1), and the improved aluminum heater is obtained. Nickel is plated on the surface of the aluminum heater firstly and then the aluminum nitride film is plated on the surface of the aluminum heater, so that the corrosion resistance of the heater body can be improved, the uniformity of heat conduction can be ensured, and meanwhile, the cost of the aluminum heater is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer heating equipment, and particularly relates to a method for improving the surface of an aluminum heater. Background Art

[0002] At present, the rapid growth of the communication and automotive electronics markets has led to a cyclical upward trend in the semiconductor industry. Among them, the market and demand for wafer heaters, as semiconductor equipment, are also increasing day by day. Whether the surface of the wafer heater can have excellent heat conduction performance and high-temperature corrosion resistance is one of the factors determining the use effect of the heater.

[0003] Aluminum heaters are a commonly used type of wafer heater. Aluminum materials have good heat conduction performance and low prices, but they cannot resist corrosion under high-temperature heating conditions. If the problem of high-temperature corrosion resistance can be solved, it will drive the rapid development of the heater industry, and aluminum heaters will also become the first choice in the industry.

[0004] CN212588530U discloses a surface-coated anti-corrosion PTC heater, including an aluminum tube, a first heat dissipation strip, and a second heat dissipation strip. The first heat dissipation strip and the second heat dissipation strip are respectively fixed on the upper and lower surfaces of the aluminum tube, and a heating element is fixed inside the aluminum tube. Anti-oxidation films are plated on the surfaces of the aluminum tube, the first heat dissipation strip, and the second heat dissipation strip. The thickness of the anti-oxidation film < 40 microns. The plating solution used for plating the anti-oxidation film is one of Seideke 650, Oudemai PreCoat A32 or A1. The first heat dissipation strip and the second heat dissipation strip are respectively fixed on the upper and lower surfaces of the aluminum tube through silica gel. The heating element is fixed inside the aluminum tube after being pressed by the aluminum tube. This utility model plates anti-oxidation films on the surfaces of easily corroded parts such as the aluminum tube and aluminum heat dissipation strips of the electric heater to play an anti-corrosion role, but there is still room for improvement in maintaining the heat conduction uniformity of the heater.

[0005] CN104060224A discloses a vacuum coating method for metal parts. The metal parts are placed in a vacuum chamber, and a metal thin film is deposited on the surface of the metal parts by using a vacuum coating method. The metal parts are made of aluminum material, and the metal target material is aluminum material; the coating process parameters are as follows: the vacuum degree is 3×10 -3 Pa to 5×10 -3 Pa, the preheating temperature of the metal parts is 70 - 150°C, the negative voltage applied to the metal target material is 200 - 1000V, the deposition time is 50 - 120 minutes, and the thickness of the metal thin film is 50 - 80μm. The metal thin film treated by this invention is uniform, and the wear resistance and corrosion resistance of the surface coating of the aluminum parts are enhanced, but there is a risk of peeling and falling off of the film during later use.

[0006] Therefore, in view of the deficiencies of the prior art, it is necessary to provide a surface improvement method for an aluminum heater with excellent high-temperature corrosion resistance, thermal uniformity and low cost. Summary of the Invention

[0007] The purpose of the present invention is to provide a surface improvement method for an aluminum heater, which ensures the heating uniformity of the aluminum heater while improving the high-temperature corrosion resistance.

[0008] To achieve the purpose of this invention, the following technical solutions are adopted:

[0009] The present invention provides a surface improvement method for an aluminum heater, and the surface improvement method includes the following steps:

[0010] (1) The aluminum heater blank is pretreated to obtain a finished aluminum heater;

[0011] (2) The surface of the finished aluminum heater obtained in step (1) is sequentially subjected to nickel plating treatment and aluminum nitride plating treatment to obtain an improved aluminum heater.

[0012] The surface improvement method for an aluminum heater provided by the present invention, by first plating nickel on the surface of the aluminum heater and then plating a layer of aluminum nitride film, can not only improve the corrosion resistance of the device body, but also the expansion coefficient of the intermediate nickel layer is between that of ceramics and aluminum, which can relieve the peeling of the ceramic material during heating, thereby ensuring the uniformity of heat conduction and reducing the cost of the aluminum heater.

[0013] Preferably, the pretreatment in step (1) includes machining to the finished product size using a lathe.

[0014] Preferably, the machining is carried out using a diamond tool head.

[0015] Preferably, the nickel plating treatment in step (2) is carried out by PVD coating.

[0016] Preferably, the beam current of the nickel plating treatment in step (2) is 10 - 30 A, for example, it can be 10 A, 15 A, 20 A, 25 A or 30 A, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0017] Preferably, the time of the nickel plating treatment in step (2) is 2 - 6 h, for example, it can be 2 h, 3 h, 4 h, 5 h or 6 h, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0018] The present invention can ensure the uniformity and quality of the nickel plating layer by controlling the beam current and time of the nickel plating treatment.

[0019] Preferably, after the nickel plating treatment in step (2) and before the aluminum nitride plating treatment, a step of coating quality detection is also included.

[0020] Preferably, the coating quality inspection includes the inspection of coating uniformity and coating adhesion effect.

[0021] Preferably, the method of aluminum nitride plating in step (2) is vacuum evaporation coating.

[0022] Preferably, the beam current of the aluminum nitride plating treatment in step (2) is 15 - 40 A, for example, it can be 15 A, 20 A, 25 A, 30 A or 40 A, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0023] Preferably, the time of the aluminum nitride plating treatment in step (2) is 3 - 8 h, for example, it can be 3 h, 5 h, 6 h, 7 h or 8 h, but is not limited to the listed values, and other unlisted values within the numerical range are equally applicable.

[0024] By controlling the beam current and time of the aluminum nitride plating treatment, the present invention can ensure the uniformity and quality of the aluminum nitride coating layer. Exceeding the parameter limit range will have an adverse impact on the coating quality.

[0025] As a preferred technical solution of the surface improvement method of the present invention, the surface improvement method includes the following steps:

[0026] (1) Use the diamond tool head of a lathe to process the aluminum heater blank to the finished size to obtain a finished aluminum heater;

[0027] (2) Perform PVD nickel plating treatment, coating quality inspection, and vacuum evaporation aluminum nitride plating treatment on the surface of the finished aluminum heater obtained in step (1) in sequence to obtain an improved aluminum heater;

[0028] The beam current of the PVD nickel plating treatment is 10 - 30 A, and the time is 2 - 6 h; the coating quality inspection includes the inspection of coating uniformity and coating adhesion effect; the beam current of the vacuum evaporation aluminum nitride plating treatment is 15 - 40 A, and the time is 3 - 8 h.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] The surface improvement method of the aluminum heater provided by the present invention first deposits nickel on the surface of the aluminum heater and then deposits a layer of aluminum nitride film, which can not only improve the corrosion resistance of the device body, but also the expansion coefficient of the intermediate layer nickel is between that of ceramic and aluminum, which can relieve the peeling of the ceramic material during heating, thereby ensuring the uniformity of heat conduction and reducing the cost of the aluminum heater. Specific embodiments

[0031] The technical solution of the present invention will be further described below through specific embodiments. Those skilled in the art should understand that the embodiments are only for helping to understand the present invention and should not be regarded as specific limitations on the present invention.

[0032] Embodiment 1

[0033] This embodiment provides a surface improvement method for an aluminum heater. The surface improvement method includes the following steps:

[0034] (1) Using a diamond tool bit of a lathe to process the aluminum heater blank to the finished size to obtain a finished aluminum heater;

[0035] (2) Sequentially performing PVD nickel plating treatment, coating quality detection, and vacuum evaporation aluminum nitride plating treatment on the surface of the finished aluminum heater obtained in step (1) to obtain an improved aluminum heater;

[0036] The beam current of the PVD nickel plating treatment is 20 A and the time is 4 h; the coating quality detection includes the detection of coating uniformity and coating adhesion effect; the beam current of the vacuum evaporation aluminum nitride plating treatment is 25 A and the time is 6 h.

[0037] Embodiment 2

[0038] This embodiment provides a surface improvement method for an aluminum heater. The surface improvement method includes the following steps:

[0039] (1) Using a diamond tool bit of a lathe to process the aluminum heater blank to the finished size to obtain a finished aluminum heater;

[0040] (2) Sequentially performing PVD nickel plating treatment, coating quality detection, and vacuum evaporation aluminum nitride plating treatment on the surface of the finished aluminum heater obtained in step (1) to obtain an improved aluminum heater;

[0041] The beam current of the PVD nickel plating treatment is 10 A and the time is 6 h; the coating quality detection includes the detection of coating uniformity and coating adhesion effect; the beam current of the vacuum evaporation aluminum nitride plating treatment is 15 A and the time is 8 h.

[0042] Embodiment 3

[0043] This embodiment provides a surface improvement method for an aluminum heater. The surface improvement method includes the following steps:

[0044] (1) Using a diamond tool bit of a lathe to process the aluminum heater blank to the finished size to obtain a finished aluminum heater;

[0045] (2) Sequentially performing PVD nickel plating treatment, coating quality detection, and vacuum evaporation aluminum nitride plating treatment on the surface of the finished aluminum heater obtained in step (1) to obtain an improved aluminum heater;

[0046] The beam current for the PVD nickel plating treatment is 30 A and the time is 2 h; the coating quality inspection includes the inspection of coating uniformity and coating adhesion effect; the beam current for the vacuum evaporation aluminum nitride plating treatment is 40 A and the time is 3 h.

[0047] Example 4

[0048] This example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that except for adjusting the beam current of the PVD nickel plating treatment in step (2) to 5 A, the rest are the same as in Example 1.

[0049] Example 5

[0050] This example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that except for adjusting the beam current of the PVD nickel plating treatment in step (2) to 35 A, the rest are the same as in Example 1.

[0051] Example 6

[0052] This example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that except for adjusting the time of the PVD nickel plating treatment in step (2) to 1 h, the rest are the same as in Example 1.

[0053] Example 7

[0054] This example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that except for adjusting the time of the PVD nickel plating treatment in step (2) to 8 h, the rest are the same as in Example 1.

[0055] Example 8

[0056] This example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that except for adjusting the beam current of the vacuum evaporation aluminum nitride plating treatment in step (2) to 10 A, the rest are the same as in Example 1.

[0057] Example 9

[0058] This example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that except for adjusting the beam current of the vacuum evaporation aluminum nitride plating treatment in step (2) to 45 A, the rest are the same as in Example 1.

[0059] Comparative Example 1

[0060] This comparative example provides a method for surface improvement of an aluminum heater. The difference from Example 1 is that there is no nickel plating treatment in step (2), and the rest are the same as in Example 1.

[0061] The improved aluminum heater is obtained by using the surface improvement method of the aluminum heaters provided in Examples 1-9 and Comparative Example 1. The corrosion resistance is detected according to GB / T 10125-2021, and the obtained results are divided into "good corrosion resistance", "general corrosion resistance" and "poor corrosion resistance"; the temperature measurement points at different positions on the surface of the aluminum heater are selected, and the heating uniformity is detected by a thermometer. The obtained results are divided into "good uniformity", "general uniformity" and "poor uniformity", and the results are shown in Table 1.

[0062] Table 1

[0063] Corrosion resistance Heating uniformity Example 1 Good corrosion resistance Relatively good uniformity Example 2 Good corrosion resistance Relatively good uniformity Example 3 Good corrosion resistance Relatively good uniformity Example 4 Average corrosion resistance Average uniformity Example 5 Average corrosion resistance Average uniformity Example 6 Average corrosion resistance Average uniformity Example 7 Good corrosion resistance Average uniformity Example 8 Average corrosion resistance Average uniformity Example 9 Average corrosion resistance Average uniformity Comparative Example 1 Poor corrosion resistance Relatively poor uniformity

[0064] It can be seen from Table 1 that the surface improvement method of the aluminum heater provided by the present invention ensures the heating uniformity of the aluminum heater while improving the high-temperature corrosion resistance;

[0065] It can be known from the comparison between Example 1 and Examples 4, 5, 8, and 9 that when the beam current of the PVD nickel plating treatment and the beam current of the vacuum evaporation aluminum nitride plating treatment exceed the limited range, the high-temperature corrosion resistance of the aluminum heater will be reduced, and at the same time, the heating uniformity will be reduced; it can be known from the comparison between Example 1 and Examples 6 and 7 that if the time of the PVD nickel plating treatment is too short and the thickness of the nickel plating layer is small, it is not conducive to alleviating the peeling of the ceramic material during heating. If the time is too long and the thickness of the nickel plating layer is large, it is impossible to ensure good heat conduction uniformity;

[0066] It can be known from the comparison between Example 1 and Comparative Example 1 that directly performing aluminum nitride plating treatment without nickel plating treatment will cause the peeling of aluminum nitride during heating.

[0067] In summary, the surface improvement method of the aluminum heater provided by the present invention first deposits nickel on the surface of the aluminum heater and then deposits a layer of aluminum nitride film, which can not only improve the corrosion resistance of the device body, but also the expansion coefficient of the intermediate nickel layer is between that of the ceramic and aluminum, which can alleviate the peeling of the ceramic material during heating, thereby ensuring the uniformity of heat conduction, and also reducing the cost of the aluminum heater.

[0068] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention fall within the protection scope and the disclosure scope of the present invention.

Claims

1. A method for improving the surface of an aluminum heater, characterized in that: The surface improvement method comprises the following steps: (1) The aluminum heater blank is pre-treated to obtain an aluminum heater finished product; (2) The surface of the finished aluminum heater obtained in step (1) is subjected to nickel plating and aluminum nitride plating in sequence to obtain an improved aluminum heater.

2. The surface improvement method according to claim 1, characterized in that: The pre-treatment in step (1) includes machining to the finished product size using a lathe.

3. The surface improvement method according to claim 2, characterized in that: The processing is performed using a diamond cutter head.

4. The surface improvement method according to any one of claims 1 to 3, characterized in that: The nickel plating method in step (2) is PVD coating.

5. The surface improvement method according to claim 4, characterized in that: The beam current of the nickel plating treatment in step (2) is 10-30A; Preferably, the nickel plating treatment time in step (2) is 2-6 hours.

6. The surface improvement method according to any one of claims 1 to 5, characterized in that: The step (2) also includes a step of coating quality detection after the nickel plating treatment and before the aluminum nitride plating treatment.

7. The surface improvement method according to claim 6, characterized in that: The coating quality detection includes the detection of coating uniformity and coating fitting effect.

8. The surface improvement method according to any one of claims 1 to 7, characterized in that: The aluminum nitride coating process in step (2) is vacuum evaporation coating.

9. The surface improvement method according to claim 8, characterized in that: The beam current of the aluminum nitride plating process in step (2) is 15-40A; Preferably, the aluminum nitride plating treatment time in step (2) is 3-8 hours.

10. The surface improvement method according to any one of claims 1 to 9, characterized in that: The surface improvement method comprises the following steps: (1) using a diamond tool head of a lathe to process the aluminum heater blank to a finished product size to obtain an aluminum heater finished product; (2) subjecting the surface of the finished aluminum heater obtained in step (1) to PVD nickel plating, coating quality inspection, and vacuum evaporation aluminum nitride plating to obtain an improved aluminum heater; The beam current of the PVD nickel plating process is 10-30A, and the time is 2-6h; the coating quality inspection includes the inspection of coating uniformity and coating fitting effect; the beam current of the vacuum evaporation aluminum nitride plating process is 15-40A, and the time is 3-8h.