Gas distribution port insert and device including the same

Abstract

A gas distribution port insert, and an apparatus for use therewith, capable of inhibiting or at least reducing interaction and / or back diffusion of process gas into a gas distribution body associated with a semiconductor processing tool containing the gas distribution port insert.

Description

Incorporation by reference

[0001] The PCT application form is submitted simultaneously with this specification as part of this application. Each application identified in the simultaneously submitted PCT application form for which this application claims the benefit or priority thereof is incorporated herein by reference in its entirety and for all purposes. Background of the Invention

[0002] Semiconductor processing tools can be used to perform various semiconductor processing operations, including deposition and etching operations. Some of these operations can be performed relative to the front or back side of a wafer. For example, deposition or etching operations can be performed relative to the back side of a wafer in such a way that one or more process gases flow from the gas distribution ports of a showerhead base towards the back side of the wafer, and one or more purge gases (e.g., inert gases) flow from the gas distribution ports of the showerhead towards the front side of the wafer. In this way, the process gases can flow under the wafer in the wafer processing region to perform deposition or etching operations, and the purge gases can flow above the wafer to prevent or at least reduce the likelihood of the process gases affecting the front side of the wafer and / or the structures thereon (or therein). During processing, a plasma can be generated by applying radio frequency (RF) power to the showerhead base, which can act as a first electrode and support the wafer during processing. The faceplate or another component of the showerhead can act as a second electrode (e.g., grounded) such that the plasma exists between the back side of the wafer and the gas distribution surface of the showerhead base. In some implementations, the roles of the anode and cathode can be reversed such that RF power is applied to the showerhead or its components. In other cases, RF power can be applied to both the showerhead base and the showerhead (or its components) such that both act as electrodes, and, for example, the walls of the semiconductor processing chamber act as the ground. However, it is noted that the process gases may still sometimes flow above the wafer and interact with the showerhead and / or diffuse back into the gas distribution ports of the showerhead.

[0003] The background description provided herein is for the purpose of presenting the background of the present disclosure in general. The work of the currently named inventors within the scope described in this background art section and aspects of the specification that were not determined to be prior art at the time of filing the application are neither expressly nor impliedly admitted to be prior art with respect to the present disclosure. Summary of the Invention

[0004] Details of one or more implementations of the subject matter described in this specification are set forth in the accompanying drawings and the following description. Other features, aspects, and advantages will become apparent from the description, the drawings, and the claims. The following non-limiting implementations are considered part of the present disclosure; other implementations will be apparent from the overall content of the present disclosure and the accompanying drawings.

[0005] Some embodiments provide various gas distribution port inserts (or "inserts") that are capable of preventing or at least reducing the interaction of process gases with a gas distribution body (such as a showerhead, showerhead base, etc.) and / or back-diffusion into a gas distribution port (or "port") of the gas distribution body that includes at least one of the inserts associated with semiconductor processing operations relative to a first surface of a wafer. Accordingly, one or more embodiments seek to provide inserts that are configured to achieve at least one of the following: 1) increase the clearance between the outer surface of the insert and the inner surface of the associated port for possible wear therebetween that may occur due to thermally induced movement of the insert relative to the port, thereby reducing the likelihood of particle generation and / or shedding that may otherwise occur due to such wear; 2) inject gas into the gap between the outer surface of the insert and the inner surface of the associated port, thereby preventing process gas from flowing into the gap and potentially depositing material in the gap that may subsequently separate and form particles; and 3) at least partially induce a directional gas flow that is configured to radially outwardly push gas from an axis (such as a central axis) of the gas distribution body, thereby preventing process gas from flowing into the gap between the gas distribution body and a second surface of the wafer facing the gas distribution body and / or reaching at least one of the port, insert, and second surface of the wafer or features formed thereon or therein.

[0006] Some embodiments provide an apparatus that includes one or more inserts that are capable of preventing or at least reducing the interaction of process gases with the apparatus (or the gas distribution body of the apparatus) and / or back-diffusion into a gas distribution port (or the gas distribution body of the apparatus) that includes at least one of the inserts.

[0007] Additional aspects will be set forth in the detailed description below, and some will be apparent from the present disclosure or may be learned by practicing the disclosed embodiments and / or the claimed subject matter.

[0008] According to some embodiments, a gas distribution port plug ("plug") includes: a head portion, a body portion, a bore, and a plurality of gas outlet holes. The head portion includes a gas inlet surface, an intermediate surface opposite the gas inlet surface in a first direction, and at least one first lateral surface connecting the gas inlet surface to the intermediate surface. The body portion extends from the head portion and includes: a proximal end adjacent to the intermediate surface; a distal end spaced apart from the proximal end in the first direction; and at least one second lateral surface connecting the distal end to the proximal end. The distal end terminates at a first distal surface. The bore extends along a reference axis from the gas inlet surface through the head portion and partially through the body portion. The bore terminates at a second distal surface inside the body portion. The plurality of gas outlet holes are fluidly connected to the bore inside the body portion and are circumferentially arranged around the reference axis. The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

[0009] In some embodiments, the proximal ends of the gas outlet holes may be formed in the second distal surface.

[0010] In some embodiments, the distal ends of the gas outlet holes may be formed in the first distal surface.

[0011] In some embodiments, the body portion may further include at least one third lateral surface connecting the first distal surface to the at least one second lateral surface. The at least one third lateral surface may be inclined relative to the first distal surface; and the distal ends of the gas outlet holes may be formed in the at least one third lateral surface.

[0012] In some embodiments, the inclination angle of the at least one third lateral surface may be greater than 0° and less than 80°.

[0013] In some embodiments, the inclination angle of the at least one third lateral surface may be about 45°.

[0014] In some embodiments, the gas outlet holes may extend longitudinally in the first direction.

[0015] In some embodiments, the respective axes of the longitudinal extensions of the gas outlet holes may extend outward from the reference axis and may form a corresponding inclination angle with the reference axis.

[0016] In some embodiments, the respective axes of the longitudinal extensions of the gas outlet holes may extend substantially perpendicular to the at least one third lateral surface.

[0017] In some embodiments, the plug may further include additional gas outlet holes in the first distal surface. The gas outlet holes may be circumferentially disposed around the additional gas outlet holes.

[0018] In some embodiments, the additional gas outlet holes may longitudinally extend in the first direction.

[0019] In some embodiments, the reference axis may be substantially coincident with the central axis of the longitudinal extension of the additional gas outlet holes.

[0020] In some embodiments, the axis of the longitudinal extension of the additional gas outlet holes may extend outwardly from the reference axis and may form an inclined angle with the reference axis.

[0021] In some embodiments, the corresponding length of the gas outlet holes may be between about 0.04 mm and about 0.6 mm.

[0022] In some embodiments, the corresponding length of the gas outlet holes may be between about 0.2 mm and about 0.3 mm.

[0023] In some embodiments, each of the gas outlet holes in the gas outlet holes may have a longitudinally extending central axis and a maximum dimension in a plane perpendicular to the central axis. The corresponding maximum dimensions of the gas outlet holes may be substantially equal. The diameter of the reference circle may extend through the corresponding central axis of the gas outlet holes and may be greater than twice the maximum dimension and less than three times the maximum dimension.

[0024] In some embodiments, the diameter of the reference circle may be greater than about 0.08 mm and less than about 0.12 mm.

[0025] In some embodiments, each of the gas outlet holes in the gas outlet holes may have a longitudinally extending central axis. The diameter of the reference circle may extend through the corresponding central axis of the gas outlet holes and may be greater than about 0.1 mm and less than about 0.3 mm.

[0026] In some embodiments, the total number of the gas outlet holes may be "n", where "n" may be an integer greater than or equal to 2, and the angular pitch between adjacent gas outlet holes among the gas outlet holes is about 360° / n.

[0027] In some embodiments, "n" may be 6.

[0028] According to some embodiments, a gas distribution port plug ("plug") includes: a head portion, a body portion, a reamer hole, and a plurality of gas outlet holes. The head portion includes a gas inlet surface, an intermediate surface on a side opposite the gas inlet surface in a first direction, and at least one first lateral surface connecting the gas inlet surface to the intermediate surface. The body portion extends from the head portion and includes: a proximal end adjacent to the intermediate surface; a distal end spaced apart from the proximal end in the first direction; and at least one second lateral surface connecting the distal end to the proximal end. The distal end terminates at a first distal surface. The reamer hole extends along a reference axis from the gas inlet surface through the head portion and partially through the body portion. The reamer hole terminates at a second distal surface inside the body portion. The plurality of gas outlet holes are fluidly connected to the reamer hole within the at least one second lateral surface and inside the body portion. The gas outlet holes are circumferentially arranged around the reference axis. The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

[0029] In some embodiments, the plurality of gas outlet holes may include a set of first gas outlet holes and a set of second gas outlet holes offset from the first gas outlet holes in the first direction such that the first gas outlet holes are disposed closer to the proximal end of the body portion compared to the second gas outlet holes.

[0030] In some embodiments, the respective longitudinally extending axes of the gas outlet holes may extend outwardly from the reference axis.

[0031] In some embodiments, the respective longitudinally extending axes of the gas outlet holes may extend radially outwardly from the reference axis.

[0032] In some embodiments, the respective longitudinally extending axes may form a corresponding tilt angle with a first reference plane perpendicular to the reference axis.

[0033] In some embodiments, the second distal surface may be tangent to some of the gas outlet holes.

[0034] In some embodiments, the intermediate surface may extend in a second reference plane, some of the gas outlet holes tangent to the second distal surface may form the set of second gas outlet holes, and the first gas outlet holes may be spaced apart from the second reference plane in the first direction.

[0035] In some embodiments, the intermediate surface may extend in a second reference plane, and the second reference plane may be tangent to some of the gas outlet holes.

[0036] In some embodiments, some of the gas outlet holes tangent to the second distal surface may form the set of second gas outlet holes, and some of the gas outlet holes tangent to the second reference plane may form the set of first gas outlet holes.

[0037] In some embodiments, the respective first openings of the set of first gas outlet holes may have corresponding first central axes tangent to the at least one second lateral surface, the respective second openings of the set of second gas outlet holes may have corresponding second central axes tangent to the at least one second lateral surface, and the first central axes may be circumferentially offset from the second central axes in a manner such that the first central axes do not coincide (are incongruent) with the second central axes.

[0038] In some embodiments, the total number of the gas outlet holes may be "n", where "n" may be an integer greater than or equal to four, and the angular pitch between a respective first central axis among the first central axes and a corresponding adjacent second central axis among the second central axes may be approximately 360° / n.

[0039] In some embodiments, "n" may be 12.

[0040] In some embodiments, "n" may be 14.

[0041] In some embodiments, the respective openings of the set of first gas outlet holes may have corresponding first central axes tangent to the at least one second lateral surface, the respective openings of the set of second gas outlet holes may have corresponding second central axes tangent to the at least one second lateral surface, and the first central axes may be substantially aligned with corresponding ones of the second central axes.

[0042] In some embodiments, the total number of the first gas outlet holes may be "k", where "k" may be an integer greater than or equal to 2, and the angular pitch between adjacent first central axes of the first central axes may be approximately 360° / k.

[0043] In some embodiments, "k" may be 6.

[0044] In some embodiments, "k" may be 7.

[0045] In some embodiments, the total number of the second gas outlet holes may be equal to the total number of the first gas outlet holes.

[0046] In some embodiments, the second distal surface may be a generally conical surface having a vertex that projects toward the first gas inlet surface in a direction opposite to the first direction.

[0047] In some embodiments, the central axis of the reaming may extend through the apex of the second distal surface.

[0048] In some embodiments, one or more of the gas outlet holes may have a circular cross-section in a plane perpendicular to the axis along which they extend longitudinally.

[0049] In some embodiments, the reaming and the gas outlet holes may be configured such that, in response to gas flow through the insert, the pressure drop between the inlet of the reaming and the respective outlets of the gas outlet holes may be less than or equal to 850×10 -4 torr, and the Knudsen number of the gas flow may be greater than 0.01 and less than 0.1.

[0050] In some embodiments, the pressure drop between the inlet of the reaming and the respective outlets of the gas outlet holes may be less than or equal to 500×10 -4 torr.

[0051] According to some embodiments, a gas distribution port insert ("insert") comprises: a head portion, a body portion, a reaming, and gas outlet holes. The head portion comprises a gas inlet surface, an intermediate surface opposite the gas inlet surface in a first direction, and at least one first lateral surface connecting the gas inlet surface to the intermediate surface. The body portion extends from the head portion and comprises: a proximal end adjacent to the intermediate surface; a distal end spaced from the proximal end in the first direction; and at least one second lateral surface connecting the distal end to the proximal end. The distal end terminates at a first distal surface. The reaming extends along a reference axis from the gas inlet surface through the head portion and partially through the body portion. The reaming terminates at a second distal surface inside the body portion. The gas outlet holes comprise: a proximal opening fluidly connected to the reaming inside the body portion; and a distal opening formed in the at least one second lateral surface. The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

[0052] In some embodiments, the insert may further comprise a recess portion within the gas inlet surface. The recess portion may extend longitudinally in a third direction from the at least one first lateral surface to the first reaming. The third direction may be transverse to the first direction. The depth of the recess portion in the first direction may be less than the height of the head portion in the first direction.

[0053] In some embodiments, the width of the recess portion in the second direction may be between about 0.02 mm and about 0.06 mm, and the height of the recess portion in the first direction may be between about 0.005 mm and about 0.02 mm.

[0054] In some embodiments, the distal opening may be formed in and span between the first distal surface and the at least one second lateral surface.

[0055] In some embodiments, the longitudinally extending central axis of the gas outlet hole may extend in a fourth direction transverse to the first direction.

[0056] In some embodiments, a first reference plane may be perpendicular to the first direction, and the angle between the first reference plane and the fourth direction may be from about 10° to about 30°.

[0057] In some embodiments, the third direction and the fourth direction may be substantially the same.

[0058] In some embodiments, the height of the gas outlet hole may be between about 0.02 mm and about 0.05 mm.

[0059] In some embodiments, the height of the gas outlet hole may extend in a fifth direction perpendicular to the fourth direction.

[0060] In some embodiments, the width of the gas outlet hole in the second direction may be between about 0.1 mm and 0.2 mm.

[0061] In some embodiments, the fourth direction may be substantially perpendicular to the first direction.

[0062] In some embodiments, the gas outlet hole may include: a first sidewall extending in a sixth direction inclined with respect to the central axis of the gas outlet hole; and a second sidewall extending in a seventh direction inclined with respect to the central axis of the gas outlet hole. The seventh direction may be different from the sixth direction.

[0063] In some embodiments, a first angle between the central axis of the gas outlet hole and the sixth direction may be from about 45° to about 75°, and a second angle between the central axis of the gas outlet hole and the seventh direction may be from about -45° to about -75°.

[0064] In some embodiments, the magnitudes of the first angle and the second angle may be substantially equal.

[0065] In some embodiments, the plug may further include an additional reaming hole that partially extends through the body portion and fluidly connects the reaming hole to the gas outlet hole.

[0066] In some embodiments, the additional reaming hole may extend along the reference axis.

[0067] In some embodiments, the central axis of the additional reaming may be offset from the central axis of the reaming.

[0068] In some embodiments, the central axis of the additional reaming may be offset from the central axis of the reaming in the third direction.

[0069] In some embodiments, the offset may be between 0.01 mm and 0.03 mm.

[0070] In some embodiments, the width of the additional reaming in the second direction may be less than or equal to the minimum width of the gas outlet hole in the second direction.

[0071] In some embodiments, the height of the gas outlet hole in the first direction may be less than the height of the additional reaming in the first direction.

[0072] In some embodiments, the reaming and the gas outlet hole may be configured such that, in response to gas flow through the insert, the pressure drop between the inlet of the reaming and the outlet of the gas outlet hole may be less than or equal to 850×10 -4 Torr, and the Knudsen number of the gas flow may be greater than 0.01 and less than 0.1.

[0073] In some embodiments, the pressure drop between the inlet of the reaming and the outlet of the gas outlet hole may be less than or equal to 500×10 -4 Torr.

[0074] According to some embodiments, a gas distribution port insert (“insert”) includes: a gas inlet, a body portion, a flange portion, a reaming, and a plurality of gas outlet holes. The gas inlet is configured to receive an air flow. The body portion includes: a proximal end; a distal end that is spaced apart from the proximal end in a first direction; and a first section that includes a first thread and is disposed between the proximal end and the distal end. The flange portion extends from the distal end of the body portion. The flange portion includes: a mating surface that is adjacent to the distal end; and a first distal surface that is spaced apart from the mating surface in the first direction. The reaming extends from the proximal end toward the distal end along a reference axis. The reaming is fluidly connected to the gas inlet and terminates at a second distal surface inside the body portion. The plurality of gas outlet holes are in the first distal surface. The gas outlet holes are fluidly connected to the reaming inside the body portion and are circumferentially arranged around the reference axis.

[0075] In some embodiments, the head portion may include: a first surface; a second surface spaced from the first surface in a first direction; and an opening extending from the first surface through the second surface in the first direction. The opening may include a second thread configured to mate with the first thread. The head portion may be detachably coupled to the body portion by at least partially causing a portion of the first segment to be received in the opening and engaging the threads between the first and second threads. The extent of the thread engagement may be configured to change the distance between the second surface and the mating surface in the first direction.

[0076] In some embodiments, the gas inlet may be defined by the inlet of the reaming at the proximal end of the body portion.

[0077] In some embodiments, the gas inlet may be defined by the inlet of the opening in the first surface of the head portion.

[0078] In some embodiments, the respective axes of the longitudinally extending gas outlet holes may form corresponding inclined angles with the reference axis.

[0079] In some embodiments, each of the corresponding inclined angles may be about 45°.

[0080] In some embodiments, the total number of the gas outlet holes may be "n", where "n" may be an integer greater than or equal to 2, and the angular pitch between the respective axes of the longitudinally extending axes may be approximately 360° / n.

[0081] In some embodiments, "n" may be 7.

[0082] In some embodiments, the body portion may further include a main segment. The first segment of the body portion may project from the main segment in a direction opposite to the axial direction. The width of the head portion in a second direction transverse to the first direction may be greater than the width of the main segment of the body portion in the second direction.

[0083] In some embodiments, the body portion may further include a main segment. The first segment of the body portion may project from the main segment in a direction opposite to the axial direction. The width of the flange portion in a second direction transverse to the first direction may be greater than the width of the main segment of the body portion in the second direction.

[0084] In some embodiments, the difference between the width of the flange portion and the width of the main segment of the body portion may be greater than 0 mm and less than or equal to about 2 mm.

[0085] In some embodiments, the width of the main segment in the second direction may be greater than the width of the first segment in the second direction, and the width of the flange portion in the second direction may be greater than the width of the head portion in the second direction.

[0086] In some embodiments, the head portion may further include at least one lateral surface that connects the second surface to the first surface. The first surface may include at least one recessed portion. The at least one recessed portion may longitudinally extend from the at least one lateral surface in a third direction to the opening. The third direction may be transverse to the first direction. The depth of the at least one recessed portion in the first direction may be less than the height of the head portion in the first direction.

[0087] In some embodiments, the flange portion may form a generally cylindrical prism.

[0088] In some embodiments, the reference axis may form the central axis of the plug.

[0089] In some embodiments, the reference axis may extend in the first direction.

[0090] In some embodiments, the corresponding length of the gas outlet hole may be less than the length of the reamed hole.

[0091] In some embodiments, the depth of the reamed hole along the reference axis may be between about 0.3 mm and about 0.6 mm.

[0092] In some embodiments, the width of the reamed hole in the second direction may be between about 0.1 mm and about 0.2 mm.

[0093] In some embodiments, the width of the head portion in the second direction may be between about 0.1 mm and about 0.4 mm, and the width of the body portion in the second direction may be between about 0.1 mm and about 0.2 mm.

[0094] In some embodiments, the length of the head portion in the first direction may be between about 0.05 mm and about 0.1 mm, and the length of the body portion in the first direction may be between about 0.4 mm and about 0.6 mm.

[0095] In some embodiments, the length of the plug may be between about 0.5 mm and about 0.7 mm.

[0096] In some embodiments, the head portion may form a generally cylindrical prism.

[0097] In some embodiments, the body portion may form a generally cylindrical prism.

[0098] In some embodiments, the body portion may form a generally conical prism that decreases in size with increasing distance from the head portion.

[0099] In some embodiments, the enlarged cavity can form a generally cylindrical prism in the head portion.

[0100] In some embodiments, the enlarged cavity can form a generally conical prism in the head portion.

[0101] In some embodiments, the enlarged cavity can form a generally cylindrical prism in the body portion.

[0102] In some embodiments, the enlarged cavity may form a generally conical prism in the body portion.

[0103] In some embodiments, the insert may comprise a metal oxide.

[0104] In some embodiments, the insert may be formed from aluminum oxide.

[0105] According to some embodiments, a device includes a gas distribution body. The gas distribution body includes one or more plenums formed between a first surface and a second surface on the opposite side of the first surface. The second surface includes a plurality of gas distribution ports, which are fluidically connected to at least one of the one or more plenums. One or more of the gas distribution ports includes a gas distribution port plug ("plug") according to any of the foregoing embodiments, at least partially supported therein.

[0106] In some embodiments, each of the one or more gas distribution ports may include: a first port component configured to at least partially support the head portion of the plug-in therein; and a second port component fluidly connected to the first port component. The second port component may be configured to allow the body portion of the plug-in to at least partially extend therethrough.

[0107] In some embodiments, the first port member can be configured to form a clearance fit with the head portion of the insert.

[0108] In some embodiments, the maximum dimension of the first port member in the second direction may be between about 1% and 5% of the width of the head portion of the insert.

[0109] In some embodiments, the second port component may have at least one inner sidewall adjacent to the at least one second lateral surface of the main body portion, and a first gap between the at least one inner sidewall and the at least one second lateral surface may be greater than 0 and less than or equal to about 1 mm.

[0110] In some embodiments, the first gap may be substantially constant along the length of the second port member.

[0111] In some embodiments, the first gap may be greater than 0 and less than or equal to about 0.5 mm.

[0112] In some embodiments, the first gap may increase as the distance from the first port member increases.

[0113] In some embodiments, the first gap may be greater than 0 and less than or equal to about 0.8 mm.

[0114] In some embodiments, the gas distribution port of the one or more gas distribution ports may include: a first port member including a second thread that mates with the first thread; and a second port member fluidly connected to the first port member. The second port member may include at least a portion of the body portion supported therein.

[0115] In some embodiments, the gas distribution port of the one or more gas distribution ports may include: a first port member including the head portion of the plug supported at least in part therein; and a second port member fluidly connected to the first port member. The second port member may include at least a portion of the body portion of the plug supported at least in part therein.

[0116] In some embodiments, the mating surface of the flange portion may abut the second surface of the gas distribution body.

[0117] In some embodiments, the second surface of the head portion may abut a support surface in the gas distribution port, and the support surface may define a transition region between the first port member and the second port member.

[0118] In some embodiments, the apparatus may further include a processing chamber and a susceptor. The susceptor may be configured to support a wafer in the processing chamber relative to the gas distribution body such that the distance between the second surface and the surface of the wafer facing the second surface in the first direction is about 1 mm.

[0119] In some embodiments, the first distal surface may extend beyond the second surface of the gas distribution body such that the distance between the first distal surface and the surface of the wafer in the first direction is between about 0.10 mm and about 0.5 mm.

[0120] In some embodiments, the gas distribution body may form part of a showerhead, and the susceptor may be a showerhead susceptor.

[0121] In some embodiments, the gas distribution body may further include one or more thermal control elements thermally coupled thereto, and the one or more thermal control elements may include a heating element, a cooling conduit, or both a heating element and a cooling conduit.

[0122] In some embodiments, one or more portions of the thermal control elements may be disposed in a reference plane extending between the first surface and the second surface such that the reference plane is disposed between the gas inlet or gas inlet surface and the first distal surface in the first direction.

[0123] In some embodiments, the apparatus may further include a processing chamber, components, and a directional flow structure. The processing chamber may include a cleaning gas inlet. The component may include a third surface facing the second surface of the gas distribution body within the interior of the processing chamber. The directional flow structure may be supported within the interior of the processing chamber and may be configured to direct a portion of the cleaning gas flow from the cleaning gas inlet to a region between the second surface and the third surface.

[0124] In some embodiments, the gas distribution body may form part of a showerhead, and the component may form part of a showerhead base.

[0125] In some embodiments, the apparatus may further include a remote plasma cleaning (“RPC”) source fluidly connected to the cleaning gas inlet. One or more cleaning gases may include dissociation species from a plasma generated by the RPC source.

[0126] In some embodiments, the semiconductor processing chamber may be a multi-station processing chamber.

[0127] According to one embodiment, a method includes: at least partially causing one or more cleaning gases to flow between a first surface of a gas distribution body and a second surface of a component facing the gas distribution body within an interior region of a semiconductor processing chamber, the first surface including a plurality of gas distribution ports configured to at least partially support corresponding gas distribution port inserts therein. The method further includes at least partially causing one or more sweep gases to flow from the gas distribution port inserts while the one or more cleaning gases flow between the first surface and the second surface. At least partially causing the one or more cleaning gases to flow in a first general direction. The second surface faces the first surface in a second direction transverse to the first general direction. The gas distribution port inserts include corresponding gas outlet holes having respective axes extending longitudinally and inclined with respect to the second direction.

[0128] In some embodiments, the second direction may be perpendicular to the first general direction.

[0129] In some embodiments, the gas distribution port plug may be configured according to any one of the foregoing embodiments at least partially supported therein.

[0130] In some embodiments, the respective longitudinally extending axes may extend along the first overall direction.

[0131] In some embodiments, the gas distribution body may form part of the showerhead, and the third surface may form part of the showerhead base.

[0132] In some embodiments, the one or more cleaning gases may include dissociation substances from a plasma generated outside the semiconductor processing chamber.

[0133] In some embodiments, the semiconductor processing chamber may be a multi-station processing chamber.

[0134] The foregoing summary description and the following detailed description are illustrative and explanatory and are intended to provide further explanation of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0135] Various embodiments disclosed herein are shown by way of example and not limitation in the figures of the accompanying drawings, wherein like reference numerals refer to like elements.

[0136] Figure 1 A substrate processing system is schematically depicted in accordance with some embodiments, which can be used not only to process wafers, but also to inhibit (or reduce) the interaction of process gases with the gas distributor and / or the back-diffusion of gases into the gas distribution ports of the gas distributor.

[0137] Figure 2 Schematically depicted in accordance with some embodiments Figure 1 a partial cross-sectional view of a gas distributor and a wafer of the substrate processing system.

[0138] Figure 3-5 Schematically depicted in accordance with some embodiments that can be incorporated as Figure 2 various views of a gas distribution port plug that is part of a showerhead.

[0139] Figure 6 Schematically shown in accordance with some embodiments including Figure 3-5 a gas distribution port plug of Figure 2 a partial cross-sectional view of a showerhead.

[0140] Figure 7-9 Schematically depicted in accordance with some embodiments that can be incorporated as Figure 2 various views of a gas distribution port plug that is part of a showerhead.

[0141] Fig.10Schematically shown in accordance with some embodiments is a partial cross-sectional view of a nozzle head including Figure 7-9 a gas distribution port plug of Figure 2 .

[0142] Figure 11-13 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as part of a nozzle head of Figure 2 .

[0143] Fig.14 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a nozzle head including Figure 11-13 a gas distribution port plug of Figure 2 .

[0144] Figure 15-18 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as part of a nozzle head of Figure 2 .

[0145] Fig.19 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a nozzle head including Figure 15-18 a gas distribution port plug of Figure 2 .

[0146] Figure 20-23 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as part of a nozzle head of Figure 2 .

[0147] Fig.24 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a nozzle head including Figure 20-23 a gas distribution port plug of Figure 2 .

[0148] Figure 25-28 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as part of a nozzle head of Figure 2 .

[0149] Fig.29 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a nozzle head including Figure 25-28 a gas distribution port plug of Figure 2 .

[0150] Figure 30-33 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as part of a nozzle head of Figure 2 .

[0151] Fig.35Schematically shown in accordance with some embodiments is a partial cross-sectional view of a showerhead including Figure 30-33 a gas distribution port plug of Figure 2 the showerhead.

[0152] Figure 36-40 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as Figure 2 a part of the showerhead.

[0153] Fig.41 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a showerhead including Figure 36-40 a gas distribution port plug of Figure 2 the showerhead.

[0154] Figure 42-45 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as Figure 2 a part of the showerhead.

[0155] Fig.46 and Fig.47 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a showerhead containing Figure 42-45 a gas distribution port plug of Figure 2 the showerhead.

[0156] Figure 48-53 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug that can be incorporated as Figure 2 a part of the showerhead.

[0157] Fig.54 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a showerhead including Figure 48-53 a gas distribution port plug.

[0158] Fig.55 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a showerhead including Figure 48-53 a modified version of a gas distribution port plug of Figure 2 the showerhead.

[0159] Fig.56 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a modified version of a showerhead including Fig.55 a modified version of a gas distribution port plug of Figure 2 the showerhead.

[0160] Fig.57 Schematically shown is a multi-station processing tool in accordance with some embodiments.

[0161] Fig.58 Schematically shown in accordance with some embodiments is Fig.57Cross-sectional view of a multi-station processing tool that utilizes Figure 2 a gas distributor of Figure 7 and a gas distribution port plug-in of

[0162] Fig.59 to implement a remote plasma cleaning (RPC) process. Fig.58 According to some embodiments, schematically depicted is the Figure 7 simulated average velocity distribution of the purge gas output from the

[0163] Fig.60 gas distribution port plug-in associated with the Fig.61 RPC process of Fig.58 According to some embodiments, schematically shown is a plan view of the support base after the Fig.60 RPC process of

[0164] Fig.62 and a back view of a semiconductor wafer after processing using the Fig.57 support base of Figure 2 a gas distributor of Fig.15 and a gas distribution port plug-in of

[0165] Fig.63 According to some embodiments, schematically depicted is the Fig.62 simulated average velocity distribution of the purge gas output from the Fig.15 gas distribution port plug-in associated with the

[0166] Fig.64 RPC process of Fig.65 According to some embodiments, schematically shown is a plan view of the support base after the Fig.62 RPC process of Fig.64 and a back view of a semiconductor wafer after processing using the Specific implementation solutions

[0167] In the following description, numerous specific details are set forth to provide a thorough understanding of various embodiments. The disclosed embodiments may be practiced without some or all of these specific details. In other instances, well-known process operations are not described in detail so as not to unnecessarily obscure the disclosed embodiments. Although the disclosed embodiments will be described in conjunction with specific embodiments, it should be understood that it is not intended to limit the disclosed embodiments.

[0168] In the present application, the terms "semiconductor wafer", "wafer", "substrate", "wafer substrate", and "partially fabricated integrated circuit" are used interchangeably. Those of ordinary skill in the art will understand that the term "partially fabricated integrated circuit" can refer to a silicon wafer during any of the many stages of integrated circuit fabrication. Wafers or substrates used in the semiconductor device industry typically have a diameter of 200 mm or 300 mm or 450 mm. In addition to semiconductor wafers, other workpieces that can utilize the disclosed embodiments include a variety of articles such as printed circuit boards, magnetic recording media, magnetic recording sensors, mirrors, optical elements, micro-mechanical devices, and the like. Background(Context)

[0169] As described above, semiconductor processing tools can be used to perform various semiconductor processing operations, including deposition and etching operations relative to the front or back side of a wafer. For example, deposition or etching operations can be performed relative to the back side of a wafer in the following manner: flowing one or more process gases from the gas distribution ports of a showerhead base towards the back side of the wafer, and flowing one or more purge gases (e.g., an inert gas) from the gas distribution ports of the showerhead towards the front side of the wafer. As used herein, an inert gas includes a gas that does not substantially react with the process chemicals of the associated semiconductor processing operation, such as a noble gas, and in some cases, a gas such as nitrogen. In this manner, the process gas can flow under the back side of the wafer in the wafer processing region to perform a deposition or etching operation, and the purge gas can flow above the front side of the wafer to prevent or at least reduce the likelihood that the process gas affects the front side of the wafer and / or structures thereon (or therein). However, it has been found that the process gas may sometimes still flow above the front side of the wafer and may interact with the showerhead and / or back-diffuse into the gas distribution ports of the showerhead. This may also be true for cleaning gases and / or remote plasma cleaning (RPC) gases that can flow within the processing chamber to, for example, remove deposited materials from exposed surfaces of components within the processing chamber, such as exposed surfaces of the chamber walls, support bases, showerhead bases, and / or the like. The interaction of the undesired gas with the showerhead and / or the back-diffusion into the gas distribution ports of the showerhead may reduce the service life of the showerhead and / or its components, reduce the time between maintenance cycles (e.g., cleaning, repair, etc.), increase equipment downtime, have a negative impact on product yield, and / or the like. In some cases, the interaction of the undesired gas (e.g., process gas, cleaning gas, RPC gas, etc.) with the showerhead may etch the showerhead, resulting in corrosion and / or particle growth thereon or therein, and / or increase the likelihood of material shedding, which may lead to defects that cause contaminants to deposit on the front side of the wafer and / or on structures formed thereon (or therein). Accordingly, there is a need for a way to efficiently and effectively prevent or at least reduce the likelihood of interaction of the process gas with the gas distribution body and / or back-diffusion into the gas distribution ports of the gas distribution body.

[0170] According to one or more embodiments, the interaction of the process gas with the gas distribution body and / or the likelihood of back-diffusing into the gas distribution ports of the gas distribution body can be reduced by utilizing one or more gas distribution port inserts (or “inserts”) having one or more features for coupling with the gas distribution body as described herein to customize the flow of one or more purge gases above the first surface (e.g., front side) of the wafer associated with a semiconductor processing operation relative to the second surface (e.g., back side) of the wafer. Thus, one or more embodiments may seek to provide inserts configured to achieve at least one of the following: 1) increase the clearance between the outer surface of the insert and the inner surface of the associated port to reduce possible wear therebetween that may occur due to thermally induced movement of the insert relative to the port, thereby reducing the likelihood of particle generation and / or shedding that may otherwise occur due to such wear; 2) inject gas into the gap between the outer surface of the insert and the inner surface of the associated port to prevent process gas from flowing into the gap and potentially depositing material in the gap that may subsequently separate and form particles; 3) at least partially induce a directed gas flow configured to push gas outward (radially outward) from the axis (e.g., central axis) of the gas distribution body, thereby preventing process gas from flowing into the gap between the gas distribution body and the second surface of the wafer facing the gas distribution body and / or reaching at least one of the port, the insert, and the second surface of the wafer or features formed thereon or therein; 4) prevent gas from flowing out of the associated port that at least partially supports the insert therein; 5) accommodate different port sizes (e.g., lengths) to allow, for example, the mating surface of the flange portion of the insert to abut the corresponding surface of the gas distribution body and thereby cap (or enclose) the gap between the outer surface of the insert and the inner surface of the associated port to prevent or at least mitigate the likelihood of process gas flowing into the gap and potentially depositing material in the gap that may subsequently separate and form particles.

[0171] Although various embodiments will be described with respect to utilizing one or more plugs in combination with a gas distribution body to condition the flow of one or more purge gases over a first surface of a wafer, it is also contemplated that in some embodiments, the gas distribution body or another gas distribution body may include one or more plugs having one or more of the features described herein to condition the flow of one or more process gases (and / or one or more other gases) over the first surface and / or second surface of a wafer. In some implementations, the gas distribution body may be configured or otherwise modified to accommodate one or more different densities and / or spatial distributions of plugs to achieve a desired flow of one or more gases (e.g., purge gases, process gases, and / or the like). For example, in one implementation, the gas distribution body may include: a plurality of first gas distribution ports that include one or more plugs at least partially supported therein and are configured to condition the flow of one or more first gases (e.g., one or more purge gases) in a first scenario; and a plurality of second gas distribution ports that include one or more plugs at least partially supported therein and are configured to prevent one or more first gases from flowing out of the second gas distribution ports. In another implementation, one or more plugs at least partially supported in at least one of the first or second gas distribution ports may be altered to affect the density and / or spatial distribution of the plugs and, thereby, affect the point of gas or no gas flow from the gas distribution body. To this end, the altered / modified configuration of the gas distribution body may be used to condition the flow of one or more second gases (e.g., one or more process gases) in a second scenario. Semiconductor processing system

[0172] Figure 1 A substrate processing system is schematically depicted in accordance with some embodiments, which can be used not only to process wafers, but also to inhibit (or reduce) the interaction of process gases with the gas distributor and / or the back-diffusion of gases into the gas distribution ports of the gas distributor. Figure 2 Schematically depicted in accordance with some embodiments Figure 1 partial cross-sectional view of the gas distributor and wafer of the substrate processing system of.

[0173] System 100 includes a processing chamber (or chamber) 101, which in some cases can be divided into an upper and a lower part. The central column is configured to support the susceptor 103 when the surface of the wafer 105 is being processed, e.g., when forming a film on the surface of the wafer 105 or on a structure formed on the surface of the wafer 105, etching features in the surface of the wafer 105 or in a structure formed on the surface of the wafer 105, etc. In some embodiments, the surface can be associated with the backside 201 of the wafer 105 facing the susceptor 103. However, it is contemplated that the surface can be associated with the front side 203 of the wafer 105 facing away from the susceptor 103. In some embodiments, the surface can be associated with or include both the backside 201 and the front side 203 of the wafer 105. Thus, the susceptor 103 can be or include a gas distribution body configured to deliver one or more gases to the backside 201 of the wafer 105 during semiconductor processing operations. In some implementations, the one or more gases provided through the susceptor 103 can be or include one or more process (e.g., reactive) gases and / or one or more inert gases. Thus, the susceptor 103 can be referred to as a showerhead susceptor. Another gas distribution body (e.g., gas distribution body 107) can be disposed above the showerhead susceptor 103 and can be configured to deliver one or more gases to the front side 203 of the wafer 105 via one or more openings (e.g., opening 205) in the gas distribution body 107. In certain cases, the one or more gases provided through the gas distribution body 107 can be or include one or more process (e.g., reactive) gases, one or more inert gases, and / or one or more dilution gases. As previously mentioned, the purge gas can be an inert gas, but it is also contemplated that at least one dilution gas can be used. In certain cases, one or more purge gases can flow from the opening 205 in the gas distribution body 107 while one or more process gases flow from the showerhead susceptor 103. In this manner, the gas distribution body 107 can be referred to as a showerhead. As will become more apparent below, the opening 205 can be fluidly connected to a corresponding gas distribution port 207 in the showerhead 107, which can be configured to at least partially support a corresponding gas distribution port insert (e.g., gas distribution port insert (or insert) 209) therein. Generally, the insert (e.g., insert 209) can be configured to not only control the flow of one or more gases (e.g., one or more purge gases) from the showerhead 107, but also to be associated with the gas distribution port 207 to inhibit (or reduce) the interaction of the process gas with the showerhead 107 and / or back-diffusion into the opening 205. Example inserts will be described in more detail in conjunction with Figure 3-10 more detailed example inserts.

[0174] According to various embodiments, the showerhead 107 can be or include an electrode. As such, the showerhead 107 can be electrically coupled to the power supply 109 via a matching network 111. The power supply 109 can be controlled by a control module 113 (e.g., a controller). In some embodiments, instead of (or in addition to) the showerhead 107, power can be provided to the showerhead base 103. The control module 113 can be configured to operate the system 100 by executing one or more sequences of one or more instructions that define at least one process recipe. Depending on whether the front side 203 or the back side 201 of the wafer 105 is to be processed, the control module 113 can set various operating inputs for defining the process recipe, such as power level, timing parameters, process gas, purge gas, mechanical movement of the wafer 105, height of the wafer 105 from the showerhead base 103, distance of the front side 230 of the wafer 105 from the second surface 241 of the showerhead 107 (e.g., distance 211), and / or the like.

[0175] According to some embodiments, the central column may include a lift pin mechanism communicatively coupled to the lift pins. The lift pin mechanism and thus the lift pins may be controlled by a lift pin control signal from, for example, the control module 113. The lift pins may be used to lift the wafer 105 from the showerhead base 103 to allow the end effector to pick up the wafer 105 and to lower the wafer 105 after placement by the end effector. In some embodiments, the lift pins may be part of the central column. To this end, the chamber 101 may include a chamber transfer port 115 through which the end effector may introduce the wafer 105 into the chamber 101 or remove the wafer 105 from the chamber 101. In certain cases, a relative displacement between the showerhead base 103 and the showerhead 107 (or between the wafer 105 and the showerhead 107) may be used to provide a controlled separation between the wafer 105 and the surface of the showerhead 107 facing the wafer 105. The chamber 101 may also include openings 101a and 101b through which corresponding portions of the showerhead base 103 and the showerhead 107 may extend, such as corresponding stem portions of the showerhead base 103 and the showerhead 107. For example, a stem 108 of the showerhead 107 may be provided and may be configured to (or include one or more configured components to) supply one or more gases to the showerhead 107, control the temperature of the showerhead 107, supply power to one or more electrodes of or associated with the showerhead 107, and so on. As another example, a stem 110 of the showerhead base 103 may be provided and may be configured to (or include one or more configured components to) supply more than one gas to the showerhead base 103, control the temperature of the showerhead base 103, supply power to one or more electrodes of or associated with the showerhead base 103, and so on. In some examples, a plasma suppression structure including, for example, one or more spaced-apart plates (not shown) may be disposed around and / or above the showerhead 107 and / or around and / or below the showerhead base 103 to suppress unwanted plasma generated within the chamber 101. However, it is contemplated that one or more of the stems 108 and 110 may be omitted. For example, the showerhead 107 may be formed as or coupled to, for example, the upper wall and / or side wall of the chamber 101.

[0176] System 100 may also include gas sources 117 and 119, such as a supply of gaseous chemicals from a facility and / or a purge (e.g., inert) gas. Depending on the process being performed relative to the surface of wafer 105, control module 113 may control the delivery of one or more gases from gas sources 117 and 119 to showerhead 107 and / or showerhead base 103. In some embodiments, gas manifold 121 may be fluidly inserted between gas source 117 and showerhead 107, and gas manifold 123 may be fluidly inserted between gas source 119 and showerhead base 103. Appropriate valve control and mass flow control mechanisms may be employed and controlled via control module 113 to ensure that the appropriate gases are delivered during, for example, deposition, etching, cleaning, and / or plasma processing phases of the process. In this manner, the respective gas flows into showerhead 107 and showerhead base 103 may be output as gas flows 125 and 127, respectively, and thus distributed via one or more gas distribution structures of showerhead 107 and showerhead base 103 in corresponding regions 129 and 131 between wafer 105 and the respective surfaces of showerhead 107 and showerhead base 103 facing wafer 105. Although depicted as rectangular regions, regions 129 and 131 may more resemble nebulous regions in which, for example, plasma may be generated and / or one or more process gases, purge gases, or both process and purge gases may flow.

[0177] During substrate processing, spacer (or other substrate support structure) 133 may be used to maintain a predetermined spacing between wafer 105 and the gas distribution surface of showerhead base 103 to facilitate (e.g., optimize or otherwise improve) deposition or etching relative to the backside 201 of wafer 105 while reducing (or even preventing) deposition or etching relative to the front side 203 of wafer 105. Spacer 133 may be disposed on the surface of showerhead base 103 facing the backside 201 of wafer 105 (e.g., disposed directly thereon), as Figure 1Schematically depicted. In some embodiments, the spacer 133 may be connected to the showerhead base 103 but not directly supported on the surface of the showerhead base 103 facing the backside 201 of the wafer 105. When the spacer 133 disposed on and / or connected to the showerhead base 103 is used, the spacer 133 may be configured to allow the wafer 105 to remain parallel (or substantially parallel) relative to the showerhead base 103. For example, when the showerhead base 103 is manipulated (e.g., translated up and / or down) inside the chamber 101, the showerhead base 103 and the wafer 105 supported by the spacer 133 may be configured to be manipulated together (e.g., translated, rotated, etc.). Maintaining such parallelism (or substantial parallelism) contributes more to the process uniformity of the entire wafer 105 compared to when the wafer 105 is supported by a substrate support structure such as the showerhead 107 and / or one or more walls (e.g., sidewalls) of the chamber 101 that are not necessarily manipulated as a unit with the showerhead base 103, because maintaining parallelism (or substantial parallelism) between the backside 201 of the wafer 105 and the facing surface (e.g., top surface) of the showerhead base 103 when processing the backside 201 of the wafer 105 has the ability to improve the process uniformity of the entire wafer 105. In some embodiments, although the target of deposition or etching is the backside 201 of the wafer 105, one or more purge gases may flow through the front side 203 of the wafer 105 via the showerhead 107 to prevent (or at least reduce the likelihood) of process gases entering the region 129 and / or to push reaction gases away from the region 129 and thus away from the front side 203 of the wafer 105 and the showerhead 107. Separately and / or additionally, to protect, minimize, or reduce the exposure of the front side 203 of the wafer 105 to plasma during the processing of the backside 201 of the wafer 105, the distance 211 between the front side 203 of the wafer 105 and the second surface 241 of the showerhead 107 may be set to be less than the plasma sheath distance associated with this process. In this way, the reaction gases output from the showerhead base 103 may be directed to the region 131 and thus towards the backside 201 of the wafer 105. According to various embodiments, the gas distribution structure of the showerhead 107 may include one or more inserts (e.g., insert 209) that are at least partially supported in their corresponding gas distribution ports 207, which may at least partially cause the gas flow 125 to enter and pass through the region 129 from the showerhead 107, for example, to prevent or at least reduce the interaction of the gas flow 127 with the showerhead 107 and / or the likelihood of back-diffusion into the gas distribution ports 207 of the showerhead 107.In some cases, the gas distribution structure of the showerhead 107, including one or more inserts (e.g., insert 209) that are at least partially supported in their respective gas distribution ports 207, can prevent or at least reduce the likelihood that the gas flow 127 even enters region 129, interacts with the front side 203 of the wafer 105, interacts with the showerhead 107, and / or backflows into the openings 205 of the showerhead 107 associated with the gas distribution ports 207. In certain cases, one or more different types of inserts can be used in combination with each other in various regions of the gas distribution surface of the entire showerhead 107 to further adjust the flow of the gas flow 125 and / or prevent or at least reduce the likelihood that the gas flow 127 interacts with the showerhead 107 and / or diffuses back into the gas distribution ports 207 of the showerhead 107.

[0178] In various implementations, process gas and / or purge gas can leave the chamber 101 via an exhaust port (or outlet) 135 that is fluidly coupled to, for example, a vacuum pump 137, which can be a primary or secondary mechanical dry pump and / or a turbomolecular pump. In some embodiments, more than one exhaust port (or outlet) can be provided in the system 100. For example, one or more exhaust ports can be provided on or in one or more sidewalls of the chamber 101. In some cases, the sidewalls can be arranged in the upper and / or lower portions of the chamber 101. In this way, the process gas and / or purge gas can be pumped out of the chamber 101 to maintain an appropriate low-pressure environment therein. To this end, a closed-loop flow-limiting device, such as a throttle valve or a swing valve, can be controlled by the control module 113 to further ensure an appropriate low-pressure environment in the chamber 101.

[0179] The system 100 can also include a carrier ring 139 surrounding an outer region of the showerhead base 103. When the front side 203 of the wafer 105 is being processed, e.g., depositing material thereon, removing material therefrom, and / or the like, the carrier ring 139 can be configured to sit above a stepped-down carrier ring support region of the wafer support region in the center (or central portion) of the showerhead base 103. The carrier ring 139 can include: an outer edge side of a disk-shaped structure, e.g., an outer radius; and a wafer edge side of the disk-shaped structure, e.g., an inner radius, which is closest to where the wafer 105 is supported. The wafer edge side of the carrier ring 139 can include a plurality of contact support structures that are configured to lift the wafer 105 when the carrier ring 139 is held by the spacer 133. In this way, a spider fork (e.g., Fig.57The spider fork 5701) can be used to lift and hold the carrier ring 139 at a predetermined height during, for example, backside deposition or etching processes, and to rotate the wafer 105 about an axis (e.g., axis 141) that is perpendicular (or substantially perpendicular) to the surface of, for example, the showerhead 107 and / or the showerhead base 103. Thus, the carrier ring 139 can also be lifted (or otherwise manipulated) together with the wafer 105 to, for example, rotate to another station, such as another station in a multi-station system, such as Fig.57 another station in the multi-station processing tool 5700 in

[0180] According to some embodiments, system 100 may also include a liner (or shield) that lines one or more inner surfaces of chamber 101. The liner may be formed of a metal or metal alloy, such as aluminum or an aluminum alloy, but the embodiments are not limited thereto. The liner may be configured to be removed during maintenance of chamber 101 to prevent (or at least reduce) the accumulation of material (such as metal material) on the walls of chamber 101. To this end, the liner may also be configured to reduce heat transfer to the walls of chamber 101 to help stabilize the internal temperature of chamber 101. Thus, the liner can serve as a sacrificial layer configured to prevent (or reduce) damage to chamber 101. In this way, the liner can be cleaned, maintained, and replaced, thereby extending the service life of chamber 101.

[0181] In various implementations, system 100 may include a thermal system 143 or communicate with a thermal system 143, which may be configured to actively control the temperature of the showerhead 107 and / or the showerhead base 103. For example, thermal system 143 may be configured to control one or more aspects associated with one or more thermal control elements (such as heating elements, cooling conduits, and / or the like) of the showerhead 107 and / or the showerhead base 103. It should be noted that control module 113 may control the operation of thermal system 143, but the embodiments are not limited thereto. Gas distributor

[0182] Figure 2 Schematically depicted according to some embodiments is a gas distributor associated with a wafer of a Figure 1 substrate processing system. Although gas distributor 200 will be described as corresponding to showerhead 107, the embodiments are not limited thereto. For example, gas distributor 200 may correspond to showerhead base 103. Hereinafter, gas distributor 200 will be referred to as showerhead 107.

[0183] Refer to Figure 1 and Figure 2, the showerhead 107 can be configured to be associated with one or more semiconductor processing operations of the system 100 (e.g., backside deposition, etching, etc.) to cause one or more purge gases (e.g., inert gases, dilution gases, etc.) to flow from a plurality of openings 205 in the gas distribution body (or bodies) 213 to the front side 203 of the wafer 105. In some implementations, the body 213 can include a panel assembly 215 coupled to a backplate 217, which in turn can be coupled to a gas distribution rod 219. In some embodiments, the gas distribution rod 219 can include an inner rod portion that mates with the panel assembly 215 and a sleeve portion 223 that mates with the backplate 217. The panel assembly 215 can include a panel formed of one or more ceramic materials (e.g., aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, titanium aluminum nitride, titanium carbide, and / or the like), and includes at least one embedded ground / power plane (or electrode), and at least one resistive heating element. In some cases, the showerhead 107 can additionally or alternatively include one or more cooling conduits. The electrode can receive power (e.g., radio frequency (RF) power) from an input portion, and the resistive heating element can receive power from a thermal system 143 via another input portion. The resistive heating element can also be coupled to a reference power level (e.g., ground, floating ground, or another relatively low potential) via an output portion. In some embodiments, the input portion and the output portion can be housed in the inner rod portion, which can be configured to protect other components of the showerhead 107 from stray RF energy that could otherwise prematurely induce plasma within one or more plenum portions of the showerhead 107.

[0184] According to various embodiments, one or more input gases can flow into the gas distribution body 213 via a gas input passage 235, which can be defined between the inner rod portion and the sleeve portion 223. The gas input passage 235 can be fluidly connected to a plurality of gas distribution ports 207 via one or more plenum portions 237 defined between a first surface 239 and a second surface 241 of the gas distribution body 213. The first surface 239 can be defined by the backplate 217, and the second surface 241 can be defined by the panel assembly 215. It should also be noted that the second surface 241 can be opposite the first surface 239 in the axial direction, but the embodiments are not limited thereto. Thus, the gas distribution ports 207 can be formed in the panel of the panel assembly 215 and can be fluidly coupled to (or define) openings 205 in the second surface 241. In some cases, the backplate 217 and the gas distribution rod 219 can be made of aluminum, stainless steel, and / or the like, but any other conductive material can be used. However, it is worth noting that aluminum is relatively easy to machine, relatively inexpensive, and forms a passivating aluminum fluoride (AlF3) layer when exposed to fluorine without suffering material erosion.

[0185] The gas distribution ports 207 can be arranged in any one of a variety of different configurations in the gas distribution body 213, the different configurations including a grid array, a polar array, a hexagonal array, a spiral, an offset spiral, and the like. This arrangement can result in a varying hole density pattern across the surface 241 of the showerhead 107. In some cases, the gas distribution ports 207 can be configured to at least partially support therein a plurality of gas distribution port inserts (e.g., gas distribution port insert 209) to achieve a desired gas flow from the showerhead 107, such as gas flow 243, which can correspond to Figure 1 the gas flow 125 in

[0186] According to various embodiments, the gas distribution port 207 can include a first port portion 245 and a second port portion 247 extending axially from the first port portion 245, and the second port portion 247 can extend in a direction opposite to the z-axis direction. As will become more apparent below, the combination of the first port portion 245 and the second port portion 247 can be configured to dock with a gas distribution port insert (e.g., gas distribution port insert 209). Both the first port portion 245 and the second port portion 247 can be formed as holes having a generally cylindrical configuration, but the embodiments are not limited thereto. For example, either or both of the first port portion 245 and the second port portion 247 can be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, and the like, or a frustum-shaped hole having at least one such configuration. For convenience, the first port portion 245 and the second port portion 247 will be described as having a generally cylindrical configuration, but it should be understood that a surface (e.g., an inner surface) of the shape mentioned can refer to one or more surfaces of another shape or configuration of either the first port portion 245 or the second port portion 247.

[0187] As Figure 2As shown, a gas inlet opening 249 may be formed at a proximal end of the first port portion 245, and a second port portion 247 may extend from a distal end of the first port portion 245. As used herein, the terms "proximal" and "distal" refer to directions toward and away from a particular reference point (e.g., a gas flow source), respectively. In this sense, an element referred to as "proximal" may conversely be referred to as "distal", depending on the particular reference point selected without departing from the teachings of the present disclosure. It should be noted that the gas inlet opening 249 may be fluidly connected to one or more of the inflation portions 237 of the nozzle head 107. The inner surface 251 of the first port portion 245 may extend axially between the proximal and distal ends of the first port portion 245. Thus, the first port portion 245 may have a length 253 in the axial direction and a maximum dimension (e.g., diameter) 255 in a second direction, such as transverse to the axial direction. In some cases, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the x-axis direction. Additionally, a reference axis 257 may form the central axis of the first port portion 245.

[0188] Similar to the first port portion 245, the second port portion 247 may have a proximal end fluidly connected to the first port portion 245 and a distal end defining a gas outlet opening 205. The inner surface 259 of the second port portion 247 may extend between the proximal and distal ends of the second port portion 247. Thus, the second port portion 247 may have a length 261 in the axial direction and a maximum dimension (e.g., diameter) 263 in the second direction. Depending on the geometric configuration of the first port portion 245 and the second port portion 247, the maximum dimensions 255 and 263 may be the width of the gas distribution port 207. That is, the maximum dimension 255 may be greater than the maximum dimension 263 such that a docking surface 265 may be defined between the first port portion 245 and the second port portion 247. Additionally, the second port portion 247 may be concentrically aligned with the first port portion 245 such that the reference axis 257 also forms the central axis of the second port portion 247. It should be noted that the docking surface 265 may provide a support surface on which a gas distribution port plug (e.g., the gas distribution port plug 209) docks when inserted into the gas distribution port 207. Various gas distribution port plugs will be described in connection with Figure 3-41 describe various gas distribution port plugs.

[0189] Although the nozzle head 107 has been described in connection with a chandelier-type implementation, it is also contemplated that in an implementation where the nozzle head 107 is mounted flush, for example, with the upper inner surface of the chamber 101, the gas distribution rod 219 may be omitted or shortened. Gas Distribution Port Plug - 1

[0190] Figure 3-5 According to some embodiments, schematically depicted may be incorporated as Figure 2 Various views of a gas distribution port insert (or inserts) of a portion of a nozzle. For example, Figure 3 shows a perspective view of the insert 300, Figure 4 shows a bottom view of the insert 300, and Figure 5 shows a cross-sectional view of the insert 300 taken along the section line 5-5.

[0191] Referring to Figure 3-5 , the insert 300 may include a head portion 301 and a body portion 303 extending axially from the head portion 301, and the body portion 303 may extend in a direction opposite to the z-axis direction. Both the head portion 301 and the body portion 303 may form a generally circular cylinder, but the embodiments are not limited thereto. For example, either or both of the head portion 301 and the body portion 303 may be formed to have any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 301 and the body portion 303 are combined Figure 3-5 and described as having a generally cylindrical configuration, but it should be understood that the surfaces of the shape mentioned may refer to one or more surfaces of another shape.

[0192] According to various embodiments, the head portion 301 may have a length 501 in the axial direction and a maximum dimension (e.g., diameter) 503 in a second direction, for example, transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 303 may have a length 505 in the axial direction and a maximum dimension (e.g., diameter) 507 in the second direction. Depending on the geometric configuration of the head portion 301 and the body portion 303, the maximum dimensions 503 and 507 may be the width of the insert 300. In some embodiments, the maximum dimension 503 may be between about 0.19 mm and about 0.33 mm, and the maximum dimension 507 may be between about 0.13 mm and 0.25 mm. In either case, the maximum dimension 503 may be greater than the maximum dimension 507, for example, about 15% to about 25% greater than the maximum dimension 507, but the embodiments are not limited thereto. The length 501 may be between about 0.05 mm and about 0.15 mm, and the length 505 may be between about 0.4 mm and about 0.6 mm. In some cases, the length 505 may be greater than the length 501, for example, about 450% to about 550% greater than the length 501, but the embodiments are not limited thereto. Thus, the total length of the insert 300 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0193] The head portion 301 may include a gas inlet surface 305, an intermediate surface 307 that is opposite or spaced from the gas inlet surface 305 in the axial direction, and a lateral surface 309 that connects the intermediate surface 307 to the gas inlet surface 305. In this way, the head portion 301 may extend along a reference axis 311, which may be not only the central axis of the plug 300 but also the central axis of the head portion 301. The body portion 303 may include a proximal end 313, a distal end 315 that is opposite or spaced from the proximal end 313 in the axial direction, and a lateral surface 317 that connects the distal end 315 to the proximal end 313. Thus, the proximal end 313 may extend from the intermediate surface 307 and may thus be adjacent to the intermediate surface 307. The distal end 315 may terminate at a distal surface 319. In this way, the body portion 303 may also extend along the reference axis 311, which may also be the central axis of the body portion 303.

[0194] According to various implementations, the plug 300 may include a reamer hole 509 that extends from the gas inlet surface 305 toward the distal surface 319 along the reference axis 311, and the reference axis 311 may be the central axis of the reamer hole 509. Thus, the reamer hole 509 may form a central reamer hole of the plug 300, but the implementation is not limited thereto. The reamer hole 509 may be formed as a hole having a generally circular cylindrical structure, but the implementation is not limited thereto. For example, the reamer hole 509 may be formed as a hole having any suitable geometric structure, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum structure of at least one of such structures. For convenience, the reamer hole 509 will be described as having a generally cylindrical structure, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or structure of the reamer hole 509.

[0195] As Figure 5As shown, the counterbore 509 may terminate at a distal surface 511 that is offset from the distal surface 319 in a first direction (e.g., the z-axis direction), such that the counterbore 509 extends through the head portion 301 and partially through the body portion 303. In this way, the counterbore 509 may have a depth 513 in, for example, the axial direction and a maximum dimension (e.g., diameter) 515 in, for example, a second direction. For example, the depth 513 may be between about 0.3 mm and about 0.6 mm, and the maximum dimension 515 may be between about 0.1 mm and about 0.2 mm (and at least less than each of the dimensions 503 and 507). It should be noted that, depending on the geometry of the counterbore 509, the maximum dimension 515 may be the width of the counterbore 509. The body portion 303 may also include a plurality of gas outlet holes 321 that are fluidly connected to the counterbore 509 within the interior of the insert 300. Although a total of seven gas outlet holes 321 are depicted, the insert 300 may include any suitable number of gas outlet holes 321. In some cases, the gas outlet holes 321 may extend between the distal surfaces 511 and 319 such that one or more gases input into the counterbore 509 at the gas inlet surface 305 can flow through the counterbore 509 and the gas outlet holes 321 and thus exit from the distal surface 319.

[0196] The gas outlet holes 321 may include a first gas outlet hole 321a and a second gas outlet hole 321b. Similar to the counterbore 509, the gas outlet holes 321 may be formed as holes having a generally circular cylindrical configuration, but the embodiments are not limited thereto. For example, one or more of the gas outlet holes 321 may be formed as holes having any suitable geometry, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the gas outlet holes 321 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration. In either case, each of the gas outlet holes 321 may have a longitudinally extending central axis (hereinafter, "central axis") and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0197] For example, the corresponding first gas outlet hole 321a may have a corresponding central axis, such as central axis 401, and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 403. The second gas outlet hole 321b may have a central axis 405 and a maximum dimension 407. In some implementations, the central axes 401 and 405 may extend in the axial direction, and the maximum dimensions 403 and 407 may extend in a second direction, for example. Additionally, in some embodiments, the maximum dimensions 403 and 407 may be equal (or substantially equal). In some implementations, the maximum dimensions 403 and 407 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. The length (or depth) 517 of the gas outlet hole 321 may be less than the depth 513 of the reamed hole 509. For example, the length 517 may be between about 0.08 mm to about 0.2 mm.

[0198] In some cases, the first gas outlet hole 321a may be circumferentially arranged not only around the reference axis 311 but also around the second gas outlet hole 321b. In this way, the central axis 405 of the second gas outlet hole 321b may coincide (or substantially coincide) with the reference axis 311. In such a configuration, the gas outlet holes 321 may be arranged in three columns and three rows, such that with respect to a third direction (e.g., the x-axis direction), adjacent first gas outlet holes 321a in the same middle row may be spaced apart by a distance 409, and adjacent first gas outlet holes 321a in different rows may be spaced apart by a distance 411. Additionally, with respect to the third direction and the central axis 405, the outermost first gas outlet hole 321a in the middle row and on the first side of the central axis 405 may be spaced apart from the outermost first gas outlet hole 321a in a different row and on the second side of the central axis 405 by a distance 413. Further, with respect to the third direction and the middle row, a first gas outlet hole among the first gas outlet holes 321a may be spaced apart from the second gas outlet hole 321b by a distance 415. With respect to the second direction, adjacent first gas outlet holes 321a in the same column may be spaced by a distance 417, and adjacent first gas outlet holes 321a in different columns may be spaced apart by a distance 419. Similarly, with respect to the second direction, the second gas outlet hole 321b may be spaced apart from adjacent first gas outlet holes 321a by a distance 419. Thus, the corresponding central axes (e.g., central axis 401) of the first gas outlet holes 321a may be arranged on a reference circle 421. The diameter of the reference circle 421 may be greater than twice the maximum dimension 403 and less than three times the maximum dimension 403.

[0199] According to various embodiments, the insert 300 can be formed of any suitable material and in any suitable manner. For example, the insert 300 can be formed of (or include) one or more ceramic materials such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 300 can be formed of a first material and coated with a second material. For example, the insert 300 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 300 can be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0200] Figure 6 Schematically shown according to some embodiments including Figure 3-5 of the gas distribution port insert Figure 2 partial cross-sectional view of the showerhead.

[0201] Reference Figure 2 and 3-6, the plug 300 can be at least partially supported within the gas distribution port 207 such that the intermediate surface 307 of the plug 300 abuts the docking surface 265 of the gas distribution port 207. To this end, the plug 300 can be configured to form a clearance fit with the gas distribution port 207. As used herein, the term "clearance fit" means that there is a gap or clearance between two mating components, allowing at least one of the two components to slide and / or rotate relative to the other when assembled, for example, in the case where the first component is received in a hole defined in the second component, allowing the first component (or a portion thereof) to slide and / or rotate within the hole defined in the second component when the first and second components are assembled. For the plug 300 and the gas distribution port 207, the formation of the clearance fit can include sizing the gas distribution port 207 to be larger than the plug 300, allowing the plug 300 (or a portion thereof) to slide and / or rotate within the gas distribution port 207 when the plug 300 is at least partially supported within the gas distribution port 207. In some cases, this can include the maximum dimension 503 of the head portion 301 of the plug 300 being approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 309 of the plug 300 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 601. To this end, the maximum dimension 507 of the body portion 303 of the plug 300 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surface 317 of the plug 300 is spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 603. In some implementations, the distances 601 and 603 can be equal or substantially equal, but the implementation is not limited thereto. Additionally, it should be noted that the head portion 301 can be used as a centering mechanism when the plug 300 is inserted into the gas distribution port 207 to allow the central axis of the plug 300 (e.g., reference axis 311) to coincide (or be substantially coincident) with the central axis 257 of the gas distribution port 207.

[0202] The formation of the above clearance fit can increase the distance between the lateral surfaces 309 and 317 of the insert 300 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This can reduce the likelihood of wear between the insert 300 and the gas distribution port 207, which otherwise may occur due to thermally induced movement of the insert 300 relative to the gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed through the system 100. Although the movement of the insert 300 has been described as being caused in association with thermal effects, it is also contemplated that the movement of the insert 300 can be additionally or alternatively caused by other factors (such as pressure differences, movement of the showerhead 107, etc.). In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shedding from the gap between the insert 300 and the gas distribution port 207, which otherwise would at least in part cause defects that deposit contaminants onto the front side 203 of the wafer 105 and / or onto the structures formed thereon / therein. To this end, the centering effect of the head portion 301 relative to the body portion 303 can also be used to return the insert 300 to a concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the insert 300. This can help maintain a defined gas flow profile from the showerhead 107. Gas Distribution Port Insert - 2

[0203] Figure 7-9 Schematically depicted in accordance with some embodiments can be various views of a gas distribution port insert (or inserts) that can be incorporated as part of a Figure 2 showerhead. For example, Figure 7 a perspective view of the insert 700 is depicted, Figure 8 a bottom view of the insert 700 is depicted, and Fig. 9 a cross-sectional view of the insert 700 taken along section line 9 - 9 is depicted.

[0204] Referring to Figure 7-10 , the insert 700 can be similar to the insert 300 and thus can include a head portion 701 and a body portion 703 extending axially from the head portion 701. The axial direction can extend along a direction opposite to the z-axis direction. Both the head portion 701 and the body portion 703 can form generally circular cylinders, but the embodiments are not limited thereto. For example, either or both of the head portion 701 and the body portion 703 can be formed to have any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 701 and the body portion 703 are combined Figure 7-9Described as having a generally cylindrical configuration, it should be understood that the surfaces of this shape mentioned can refer to one or more surfaces of another shape.

[0205] According to various embodiments, the head portion 701 may have a length 901 in the axial direction and a maximum dimension (e.g., diameter) 903 in a second direction, such as transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 703 may have a length 905 in the axial direction and a maximum dimension (e.g., diameter) 907 in the second direction. Depending on the geometric configuration of the head portion 701 and the body portion 703, the maximum dimensions 903 and 907 may be the width of the plug 700. In some embodiments, the maximum dimension 903 may be between about 0.1 mm and about 0.4 mm, and the maximum dimension 907 may be between about 0.1 mm and 0.2 mm. Additionally, the maximum dimension 903 may be greater than the maximum dimension 907, for example, about 15% to about 25% larger than the maximum dimension 907, but the embodiments are not limited thereto. The length 901 may be between about 0.05 mm and about 0.1 mm, and the length 905 may be between about 0.4 mm and about 0.6 mm. The length 905 may be greater than the length 901, for example, about 450% to about 550% larger than the length 901, but the embodiments are not limited thereto. In this way, the total length of the plug 700 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0206] The head portion 701 may include a gas inlet surface 705, an intermediate surface 707 opposite or spaced apart from the gas inlet surface 705 in the axial direction, and a lateral surface 709 connecting the intermediate surface 707 to the gas inlet surface 705. In this way, the head portion 701 may extend along a reference axis 711, which may be not only the central axis of the plug 700 but also the central axis of the head portion 701. The body portion 703 may include a proximal end 713, a distal end 715 opposite or spaced apart from the proximal end 713 in the axial direction, and a lateral surface 717 connecting the distal end 715 to the proximal end 713. Thus, the proximal end 713 may extend from the intermediate surface 707 and may thus be adjacent to the intermediate surface 707. The distal end 715 may terminate at a distal surface 719. In this way, the body portion 703 may also extend along the reference axis 711, which may also be the central axis of the body portion 703.

[0207] According to various implementations, the insert 700 may include a bore 909 that extends along a reference axis 711 from a gas inlet surface 705 toward a distal surface 719, and the reference axis 711 may be the central axis of the bore 909. Thus, the bore 909 may form a central bore of the insert 700, but the implementation is not limited thereto. The bore 909 may be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the bore 909 may be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the bore 909 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of such a shape mentioned may refer to one or more surfaces of another shape or configuration of the bore 909.

[0208] As Fig. 9 shown, the bore 909 may terminate at a distal surface 911 that is offset from the distal surface 719 in a first direction (e.g., the z-axis direction), such that the bore 909 extends through the head portion 701 and partially through the body portion 703. In this way, the bore 909 may have a depth 913 in, for example, the axial direction and a maximum dimension (e.g., diameter) 915 in, for example, a second direction. For example, the depth 913 may be between about 0.1 mm and about 0.6 mm, and the maximum dimension 915 may be between about 0.1 mm and about 0.2 mm. In this way, compared with the bore 509 within the insert 300, the bore 909 may have a smaller depth within the insert 700. It should be noted that depending on the geometric configuration of the bore 909, the maximum dimension 915 may be the width of the bore 909. The body portion 703 may also include a plurality of gas outlet holes 721 that are fluidly connected to the bore 909 inside the insert 700. Although a total of seven gas outlet holes 721 are depicted, the insert 700 may include any suitable number of gas outlet holes 321. In some cases, the gas outlet holes 721 may extend between the distal surfaces 911 and 719 such that one or more gases input into the bore 909 at the gas inlet surface 705 can flow through the bore 909 and the gas outlet holes 721 and thus be output from the distal surface 719.

[0209] The gas outlet hole 721 may include a first gas outlet hole 721a and a second gas outlet hole 721b. Similar to the reamed hole 909, the gas outlet hole 721 may be formed as a hole having a generally circular cylindrical configuration, but the embodiments are not limited thereto. For example, one or more gas outlet holes 721 may be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum configuration hole having at least one of such configurations. For convenience, the gas outlet hole 721 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration. In either case, each gas outlet hole 721 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0210] For example, the corresponding first gas outlet hole 721a may have a corresponding central axis, such as central axis 801, and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 803. The second gas outlet hole 721b may have a central axis 805 and a maximum dimension 807. In some implementations, the central axes 801 and 805 may extend in the axial direction, and the maximum dimensions 803 and 807 may extend in a second direction, for example. Additionally, in some embodiments, the maximum dimensions 803 and 807 may be equal (or substantially equal). In some implementations, the maximum dimensions 803 and 807 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. The length (or depth) 917 of the gas outlet hole 721 may be less than the depth 913 of the counterbore 909. For example, the length 917 may be between about 0.2 mm and about 0.3 mm. In this way, compared to the gas outlet hole 321 within the insert 300, the gas outlet hole 721 may have a longer length within the insert 700. This reduction in the depth of the counterbore 909 and the increase in the length of the gas outlet hole 721 may at least partially result in a larger pressure drop between the gas inlet surface 705 and the distal surface 719 associated with the airflow through the insert 700 under conditions of a slip flow regime (e.g., a Knudsen number greater than 0.01 and less than 0.1). With this reduction in the downstream pressure, the mass flow rate (or average velocity) of the gas passing through the insert 700 may be greater than that of the gas passing through the insert 300, and more gas may be output from the insert 700 via the second gas outlet hole 721b compared to the corresponding first gas outlet hole 721a, but the embodiments are not limited thereto. This is reasonable because in the slip flow regime, it is expected that the airflow slows down as the distance from the inner wall 919 decreases, which may at least partially result in more gas flowing through the second gas outlet hole 721b compared to the corresponding first gas outlet hole 721a. For example, assuming the gas flow is within the slip flow regime, the pressure drop across the insert 700 may be less than or equal to about 850×10 -4 Torr, such as less than or equal to about 800×10 -4 Torr, for example, about 798×10 -4 Torr. As used herein, the term "average velocity" may mean the time average of the velocity of a fluid (e.g., a sweep gas) at one or more points along its flow path, and may be determined over any time interval offset from a fixed time. For example, one or more average velocities of the sweep gas flow may be the time-averaged velocities determined at various points on the insert after achieving steady-state (or substantially steady-state) flow conditions.

[0211] In some cases, the first gas outlet holes 721a can be arranged not only circumferentially around the reference axis 711, but also circumferentially around the second gas outlet holes 721b. In this way, the central axis 805 of the second gas outlet holes 721b can coincide (or be substantially coincident) with the reference axis 711. In such a configuration, the first gas outlet holes 721a can be arranged around the reference axis 711 with an angular pitch 809. Assuming that the insert 700 has "n" first gas outlet holes 721a (where "n" is an integer greater than or equal to 2), the angular pitch 809 can be equal to (or be substantially equal to) 360° divided by "n". For example, the insert 700 is shown as including six first gas outlet holes 721a such that the angular pitch 809 can be about 60°, but the embodiments are not limited thereto. In this way, the respective central axes (e.g., central axis 801) of the first gas outlet holes 721a can be arranged on the reference circle 811. The diameter 813 of the reference circle 811 can be greater than twice the maximum dimension 803 and less than three times the maximum dimension 803. For example, in some embodiments, the diameter 813 of the reference circle 811 can be greater than or equal to about 0.1 mm and less than or equal to about 0.3 mm.

[0212] According to various embodiments, the insert 700 can be formed of any suitable material and in any suitable manner. For example, the insert 700 can be formed of (or include) one or more ceramic materials such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 700 can be formed of a first material and coated with a second material. For example, the insert 700 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 700 can be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0213] Fig.10 Schematically shown in accordance with some embodiments including Figure 7-9 of the gas distribution port insert Figure 2 partial cross-sectional view of the nozzle head.

[0214] Reference Figure 2 and Figure 7-9, the plug 700 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 707 of the plug 700 abuts against the docking surface 265 of the gas distribution port 207. To this end, the plug 700 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 903 of the head portion 701 of the plug 700 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 709 of the plug 700 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 1001. To this end, the maximum dimension 907 of the body portion 703 of the plug 700 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surface 717 of the plug 700 is spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 1003. In certain cases, the distances 1001 and 1003 can be equal or substantially equal, but the embodiments are not limited thereto. Additionally, it should be noted that when the plug 700 is inserted into the gas distribution port 207, the head portion 701 can be used as a centering mechanism to allow the central axis (e.g., reference axis 711) of the plug 700 to coincide (or substantially coincide) with the central axis 257 of the gas distribution port 207.

[0215] Similar to the plug 300, the formation of the above clearance fit can increase the distances between the lateral surfaces 709 and 717 of the plug 700 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This can reduce the likelihood of wear between the plug 700 and the gas distribution port 207, which otherwise might occur due to thermally induced movement of the plug 700 relative to the gas distribution port 207, which might be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. Although the movement of the plug 700 has been described as being caused in relation to thermal effects, it is also contemplated that the movement of the plug 700 can additionally or alternatively be caused by other factors (e.g., pressure differences, movement of the showerhead 107, etc.). In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shedding from the gap between the plug 700 and the gas distribution port 207, which otherwise would at least in part cause defects that deposit contaminants onto the front side 203 of the wafer 105 and / or onto the structures formed thereon / therein. To this end, the centering efficacy of the head portion 701 relative to the body portion 703 can also be used to return the plug 700 to a concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the plug 700. This can help maintain a defined gas flow profile from the showerhead 107. Gas Distribution Port Plug - 3

[0216] Figure 11-13 According to some embodiments, a schematic diagram of a device that can be incorporated as Figure 2 Various views of a gas distribution port insert (or inserts) of a portion of a showerhead. For example, Fig.11 depicting a perspective view of the plug-in 1100, Fig.12 depicts a bottom view of insert 1100, and Fig.13 A cross-sectional view of insert 1100 is depicted, taken along section line 13 - 13 .

[0217] refer to Figure 11-13 , the plug-in 1100 may be similar to the plug-ins 300 and 700, and therefore may include a head portion 1101 and a main body portion 1103 extending from the head portion 1101 in an axial direction. The axial direction may extend in a direction opposite to the z-axis direction. The head portion 1101 may be formed as a generally circular cylinder and the main body portion 1103 may be formed as a generally conical truncated cone, but the embodiment is not limited thereto. For example, either or both of the head portion 1101 and the main body portion 1103 may be formed to have any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, and the like, or a truncated cone of at least one of such configurations. However, for convenience, the head portion 1101 and the main body portion 1103 will be combined Figure 11-13 Described as having a generally cylindrical configuration and a generally conical frustum configuration, respectively, but it will be understood that reference to surfaces of such shapes may refer to one or more surfaces of another shape.

[0218] The head portion 1101 may include a gas inlet surface 1105, an intermediate surface 1107 opposite to or spaced apart from the gas inlet surface 1105 in the axial direction, and a lateral surface 1109 connecting the intermediate surface 1107 to the gas inlet surface 1105. In this way, the head portion 1101 may extend along a reference axis 1111, which may be not only the central axis of the insert 1100 but also the central axis of the head portion 1101. The body portion 1103 may include a proximal end 1113, a distal end 1115 opposite to or spaced apart from the proximal end 1113 in the axial direction, and a lateral surface 1117 connecting the distal end 1115 to the proximal end 1113. In this way, the proximal end 1113 may extend from the intermediate surface 1107 and thus may be adjacent to the intermediate surface 1107. The distal end 1115 may terminate at a distal end surface 1119. In this way, the main body portion 1103 can also extend along the reference axis 1111, and the reference axis 1111 can also be the central axis of the main body portion 1103.

[0219] According to various embodiments, the head portion 1101 may have a length 1301 in the axial direction and a maximum dimension (e.g., diameter) 1303 in a second direction, such as transverse to the axial direction. The second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 1103 may have a length 1305 in the axial direction and a variable width (e.g., diameter) in the second direction, for example. In some embodiments, the width of the body portion 1103 may vary linearly along the axial direction such that the lateral surface 1117 forms an inclined angle (or angle) 1307 with the axial direction and, in some instances, forms an inclined angle (or angle) 1307 with the lateral surface 1109. The angle 1307 may be greater than 0° and less than about 10°, such as greater than or equal to about 2.00° and less than or equal to about 5.00°, such as greater than or equal to about 2.75° and less than or equal to about 3.25°. As shown, the width of the body portion 1103 may have a dimension 1309a at the proximal end 1113 and a dimension 1309b at the distal end 1115. Depending on the geometry of the head portion 1101 and / or the body portion 1103, the dimensions 1303, 1309a, and / or 1309b may be the width of the plug 1100. In some embodiments, the dimension 1303 may be between about 0.1 mm and about 0.4 mm, the dimension 1309a may be between about 0.1 mm and about 0.2 mm, and the dimension 1309b may be between about 0.1 mm and about 0.2 mm. For this reason, the maximum dimension 1303 may be greater than each of the dimensions 1309a and 1309b. For example, the maximum dimension 1303 may be about 15% to about 25% greater than at least the dimension 1309a (which is greater than the dimension 1309b), but the embodiments are not limited thereto. The length 1301 may be between about 0.05 mm and about 0.1 mm, and the length 1305 may be between about 0.4 mm and about 0.6 mm. Note that the length 1305 may be greater than the length 1301, such as about 450% to about 550% greater than the length 1301, but the embodiments are not limited thereto. In this way, the total length of the plug 1100 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0220] According to various implementations, the insert 1100 may include a reamer 1311 extending along a reference axis 1111 from a gas inlet surface 1105 toward a distal surface 1119, and the reference axis 1111 may be a central axis of the reamer 1311. Thus, the reamer 1311 may form a central reamer of the insert 1100, but the implementation is not limited thereto. The reamer 1311 may be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the reamer 1311 may be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the reamer 1311 will be described as having a generally cylindrical configuration, but it should be understood that a surface (e.g., an inner surface) of such a shape mentioned may refer to one or more surfaces of another shape or configuration of the reamer 1311.

[0221] As Fig.13 shown, the reamer 1311 may terminate at a distal surface 1313 offset from the distal surface 1119 in a first direction (e.g., the z-axis direction), such that the reamer 1311 extends through the head portion 1101 and partially through the body portion 1103. In this way, the reamer 1311 may have a depth 1315 in, for example, the axial direction and a maximum dimension (e.g., diameter) 1317 in, for example, a second direction. For example, the depth 1315 may be between about 0.4 mm and about 0.7 mm, and the maximum dimension 1317 may be between about 0.1 mm and about 0.2 mm (and at least less than each of the dimensions 1309a and 1309b). In this way, the reamer 1311 may have a greater depth within the insert 1100 compared to each of the reamers 509 within the insert 300 and the reamer 909 within the insert 700. It should be noted that depending on the geometric configuration of the reamer 1311, the maximum dimension 1317 may be the width of the reamer 1311. The body portion 1103 may also include a plurality of gas outlet holes 1121 fluidly connected to the reamer 1311 within the insert 1100. Although a total of seven gas outlet holes 1121 are depicted, the insert 1100 may include any suitable number of gas outlet holes 1121. In some cases, the gas outlet holes 1121 may extend between the distal surfaces 1313 and 1119 to allow one or more gases input to the reamer 1311 at the gas inlet surface 1105 to flow through the reamer 1311 and the gas outlet holes 1121 and thus be output from the distal surface 1119.

[0222] The gas outlet hole 1121 may include a first gas outlet hole 1121a and a second gas outlet hole 1121b. Similar to the reamed hole 1311, the gas outlet hole 1121 may be formed as a hole having a generally circular cylindrical configuration, but the embodiments are not limited thereto. For example, one or more gas outlet holes 1121 may be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the gas outlet hole 1121 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration. In either case, each gas outlet hole 1121 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0223] For example, the corresponding first gas outlet hole 1121a may have a corresponding central axis, such as central axis 1201, and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 1203. The second gas outlet hole 1121b may have a central axis 1205 and a maximum dimension 1207. In some implementations, the central axes 1201 and 1205 may extend in the axial direction, and the maximum dimensions 1203 and 1207 may extend in, for example, a second direction. Additionally, in some embodiments, the maximum dimensions 1203 and 1207 may be equal (or substantially equal). In some implementations, the maximum dimensions 1203 and 1207 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. The length (or depth) 1319 of the gas outlet hole 1121 may be less than the depth 1315 of the reamed hole 1311. For example, the length 1319 may be between about 0.02 mm and about 0.07 mm. In this way, compared with the gas outlet hole 321 within the plug 300 and the gas outlet hole 721 within the plug 700, the gas outlet hole 1121 may have a shorter length within the plug 1100. The increase in the depth of the above-mentioned reamed hole 1311 and the decrease in the length of the gas outlet hole 1121 may at least partially result in a smaller pressure drop between the gas inlet surface 1105 and the distal surface 1119 associated with the airflow through the plug 1100 under the conditions of the slipstream state. With this increase in the downstream pressure, the flow rate (or average velocity) of the gas passing through the plug 1100 may be less than the gas passing through the plugs 300 and 700. For example, assuming that the gas flow is within the slipstream state, the pressure drop through the plug 1100 may be less than or equal to about 500×10 -4 Pa, for example less than or equal to about 425×10-4 Torr, e.g., about 405×10 -4 Torr. Further, as will become more apparent below, assuming that the gas outlet holes 1121 are arranged more closely around the reference axis 1111, a more uniform gas distribution can be output from the insert 1100 via the gas outlet holes 1121, but the embodiments are not limited thereto. This makes sense because in the slipstream regime, the airflow is expected to be more constant in the central portion of the reamer 1311 but slows down as the distance from the inner wall 1321 decreases, which may at least partially result in a more uniform airflow distribution flowing through the gas outlet holes 1121 compared to the gas outlet holes 721 in the insert 700.

[0224] In some cases, the first gas outlet holes 1121a can be arranged not only circumferentially around the reference axis 1111 but also circumferentially around the second gas outlet holes 1121b. In this way, the central axis 1205 of the second gas outlet holes 1121b can coincide (or be substantially coincident) with the reference axis 1111. In such a configuration, the first gas outlet holes 1121a can be arranged around the reference axis 1111 with an angular pitch 1209. Assuming that the insert 1100 has "n" first gas outlet holes 1121a (where "n" is an integer greater than or equal to 2), the angular pitch 1209 can be equal to (or be substantially equal to) 360° divided by "n". For example, the insert 1100 is shown as including six first gas outlet holes 1121a such that the angular pitch 1209 can be about 60°, but the embodiments are not limited thereto. In this way, the respective central axes (e.g., the central axis 1201) of the first gas outlet holes 721a can be arranged on the reference circle 1211. However, it should be noted that the diameter 1213 of the reference circle 1211 can be smaller than the diameter 813 of the reference circle 811 of the insert 700. This can be equivalent to the gas outlet holes 1121 being arranged more closely around the reference axis 1111 in the insert 1100 compared to the gas outlet holes 721 around the reference axis 711 in the insert 700. As previously mentioned, this can at least partially result in a more uniformly distributed gas flowing through the gas outlet holes 1121 compared to the gas outlet holes 721 of the insert 700. In some embodiments, the diameter 1213 can be greater than or equal to about 0.08 mm and less than or equal to about 0.2 mm.

[0225] According to various embodiments, the insert 1100 can be formed of any suitable material and in any suitable manner. For example, the insert 1100 can be formed of (or include) one or more ceramic materials such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 1100 can be formed of a first material and coated with a second material. For example, the insert 1100 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 1100 can be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0226] Fig.14 A partial cross-sectional view of a printhead including Figure 11-13 a gas distribution port insert Figure 2 is schematically shown according to some embodiments.

[0227] Reference Figure 2 and Figure 11-13, the plug 1100 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 1107 of the plug 1100 abuts against the docking surface 265 of the gas distribution port 207. To this end, the plug 1100 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 1303 of the head portion 1101 of the plug 1100 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 1109 of the plug 1100 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 1401. The dimension 1309a of the body portion 1103 of the plug 1100 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, and the dimension 1309b can be approximately 8% to approximately 15% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207. In this way, the lateral surface 1117 of the plug 1100 can be spaced apart from the inner surface 259 of the gas distribution port 207 by a first distance, such as the distance 1401, relative to the proximal end 1113 of the body portion 1103, and can be spaced apart from the inner surface 259 of the gas distribution port 207 by a second distance 1403 relative to the proximal end 1115 of the body portion 1103. In certain cases, the distance 1403 can be less than or equal to the sheath thickness associated with the process performed by the bonding system 100. For example, the distance 1403 can be greater than or equal to approximately 0.7 mm and less than or equal to approximately 1.1 mm, such as greater than or equal to approximately 0.9 mm and less than or equal to approximately 1 mm, such as approximately 0.997 mm. It should also be noted that when the plug 1100 is inserted into the gas distribution port 207, the head portion 1101 can be used as a centering mechanism to allow the central axis (e.g., the reference axis 1111) of the plug 1100 to coincide (or substantially coincide) with the central axis 257 of the gas distribution port 207.

[0228] Similar to plugs 300 and 700, the formation of the above-described clearance fit associated with plug 1100 can increase the distance between the lateral surface 1109 and the inner surface 251 of the gas distribution port 207, and further increase the distance between the lateral surface 1117 of plug 1100 and the inner surface 259 of the gas distribution port 207. Again, this can reduce the likelihood of wear between plug 1100 and gas distribution port 207, which otherwise may occur due to thermally induced movement of plug 1100 relative to gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed through system 100. Although the movement of plug 1100 has been described as being caused in association with thermal effects, it is also contemplated that the movement of plug 1100 can be additionally or alternatively caused by other factors such as pressure differences, movement of the showerhead 107, etc. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shedding from the gap between plug 1100 and gas distribution port 207, which otherwise would at least partially cause defects that result in contaminants depositing on the front side 203 of the wafer 105 and / or on the structures formed thereon / therein. To this end, the centering effect of the head portion 1101 relative to the body portion 1103 can also be used to return plug 1100 to concentric (or substantially concentric) alignment with gas distribution port 207 after movement of plug 1100. This can help maintain a defined gas flow profile from the showerhead 107. Gas Distribution Port Plug - 4

[0229] Figure 15-18 Various views of a gas distribution port plug (or plugs) that can be incorporated as part of a showerhead are schematically depicted in accordance with some embodiments. For example, Figure 2 a perspective view of plug 1500 is depicted, Fig.15 a bottom view of plug 1500 is depicted, Fig.12 a cross-sectional view of plug 1500 taken along section line 17 - 17 is depicted, and Fig.17 a cross-sectional view of plug 1500 taken along section line 18 - 18 is depicted. Fig.18

[0230] Figure 15-18 Reference Figure 15-18, the plug 1500 can be similar to the plugs 300 and 700 and, thus, can include a head portion 1501 and a body portion 1503 extending axially from the head portion 1501. The axial direction can extend along a direction opposite to the z-axis direction. However, the body portion 1503 can include a first body portion 1503a extending axially from the head portion 1501 and a second body portion 1503b extending axially from the first body portion 1503a. The head portion 1501 and the first body portion 1503a can each be formed as a generally circular cylinder, and the second body portion 1503b can be formed as a generally frustum of a cone, but the embodiments are not limited thereto. For example, one or more of the head portion 1501, the first body portion 1503a, and the second body portion 1503b can be formed to have any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 1501 and the first body portion 1503a will be described as having a generally cylindrical configuration, and the second body portion 1503b will be described as having a generally frustum of a cone configuration, but it should be understood that the surfaces of the shapes mentioned can refer to one or more surfaces of another shape.

[0231] The head portion 1501 may include a gas inlet surface 1505, an intermediate surface 1507 that is opposite to or spaced apart from the gas inlet surface 1505 in the axial direction, and a lateral surface 1509 that connects the intermediate surface 1507 to the gas inlet surface 1505. In this way, the head portion 1501 may extend along a reference axis 1511, which may be not only the central axis of the insert 1500 but also the central axis of the head portion 1501. The first body portion 1503a may include a proximal end 1513, a distal end 1515 that is opposite to or spaced apart from the proximal end 1513 in the axial direction, and a lateral surface 1517 that connects the distal end 1515 to the proximal end 1513. Thus, the proximal end 1513 may extend from the intermediate surface 1507 and may thus be adjacent to the intermediate surface 1507. The distal end 1515 may terminate at the proximal end 1519 of the second body portion 1503b, which also includes a distal end 1521 that is opposite to or spaced apart from the proximal end 1519 in the axial direction and a lateral surface 1523 that connects the distal end 1521 to the proximal end 1519. It should be noted that the proximal end 1519 of the second body portion 1503b may correspond to the distal end 1515 of the first body portion 1503a. In addition, the distal end 1521 of the second body portion 1503b may terminate at a distal surface 1525. In this way, the first body portion 1503a and the second body portion 1503b may also extend along the reference axis 1511, which may also be the central axis of the first body portion 1503a and the second body portion 1503b.

[0232] According to various embodiments, the head portion 1501 may have a length 1701 in the axial direction and a maximum dimension (e.g., diameter) 1703 in a second direction, such as transverse to the axial direction. The second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 1503 may have a length 1705 in the axial direction and a maximum dimension (e.g., diameter) 1707 in the second direction. In this way, the first body portion 1503a may have a length 1705a in the axial direction and a maximum dimension (e.g., diameter) 1707 in the second direction. The second body portion 1503b may have a length 1705b in the axial direction and a variable width (e.g., diameter) along, for example, the second direction. In some embodiments, the width of the second body portion 1503b may vary linearly along the axial direction such that the lateral surface 1523 forms an inclined angle (or angle) 1802 with the axial direction and, in some cases, an inclined angle (or angle) 1802 with the lateral surface 1517. The angle 1802 may be greater than 0° and less than about 80°, such as greater than or equal to about 20° and less than or equal to about 50°, such as about 45°. In this way, the second body portion 1503b may have not only a maximum dimension (e.g., diameter) corresponding to the maximum dimension 1707 associated with the proximal end 1519 but also a minimum dimension (e.g., diameter) 1709 associated with the distal end 1521.

[0233] Depending on the geometry of the head portion 1501, the first body portion 1503a, and the second body portion 1503b, the dimensions 1703, 1707, and / or 1709 may be the width of the plug 1500. In some embodiments, the dimension 1703 may be between about 0.1 mm and about 0.4 mm, the dimension 1707 may be between about 0.1 mm and about 0.2 mm, and the dimension 1709 may be between about 0.1 mm and about 0.2 mm. For this purpose, the maximum dimension 1703 may be greater than each of the dimensions 1707 and 1709. For example, the maximum dimension 1703 may be at least about 15% to about 25% greater than the dimension 1707 (which is greater than the dimension 1709), but the embodiments are not limited thereto. The length 1701 may be between about 0.05 mm and about 0.1 mm, and the length 1705 may be between about 0.4 mm and about 0.6 mm. For this purpose, the length 1705a may be between about 0.3 mm and about 0.6 mm, and the length 1705b may be between about 0.03 mm and about 0.06 mm. It should be noted that the length 1705 may be greater than the length 1701, such as about 450% to about 550% greater than the length 1701, but the embodiments are not limited thereto. In this way, the total length of the plug 1500 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0234] In various implementations, the insert 1500 can include a reamer 1711 that extends along a reference axis 1511 from a gas inlet surface 1505 toward a distal surface 1525. The reference axis 1511 can be the central axis of the reamer 1711. Thus, the reamer 1711 can form a central reamer of the insert 1500, but the implementation is not limited thereto. The reamer 1711 can be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the reamer 1711 can be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration with at least one of such configurations. For convenience, the reamer 1711 will be described as having a generally cylindrical configuration, but it should be understood that a surface of such a shape (e.g., an inner surface) mentioned can refer to one or more surfaces of another shape or configuration of the reamer 1711.

[0235] As Fig.17 and Fig.18As shown, the counterbore 1711 can terminate at the distal surface 1713, which can be offset from the distal surface 1119 in a first direction (e.g., the z-axis direction) such that the counterbore 1711 extends through the head portion 1501 and partially through the body portion 1503. In some implementations, the counterbore 1711 extends through (or substantially through) the first body portion 1503a and terminates at a transition region between the first body portion 1503a and the second body portion 1503b. Thus, the counterbore 1711 may not extend into the second body portion 1503b, but the implementation is not limited thereto. Thus, the counterbore 1711 can have a depth 1715 in, for example, the axial direction and a maximum dimension (e.g., diameter) 1717 in, for example, a second direction. For example, the depth 1715 can be between about 0.4 mm and about 0.7 mm, and the maximum dimension 1717 can be between about 0.1 mm and about 0.2 mm (and at least less than each of the dimensions 1707 and 1709). It should be noted that the maximum dimension 1717 of the counterbore 1711 in the insert 1500 can be greater than the maximum dimension 1317 of the counterbore 1311 in the insert 1100. However, the counterbore 1711 in the insert 1500 can have a greater depth compared to each of the counterbore 509 in the insert 300 and the counterbore 909 in the insert 700. It should also be noted that depending on the geometry of the counterbore 1711, the maximum dimension 1717 can be the width of the counterbore 1711. The second body portion 1503b can also include a plurality of gas outlet holes 1527 that are fluidly connected to the counterbore 1711 within the insert 1500. Although a total of seven gas outlet holes 1527 are depicted, the insert 1500 can include any suitable number of gas outlet holes 1527. In some cases, the gas outlet holes 1527 can extend between the distal surface 1713 and the lateral surface 1523 such that one or more gases input into the counterbore 1711 at the gas inlet surface 1505 can flow through the counterbore 1711 and the gas outlet holes 1527 and thereby exit from the distal surface 1523.

[0236] Similar to the reaming hole 1711, the gas outlet hole 1527 may be formed as a hole having a generally circular cylindrical configuration, but the embodiments are not limited thereto. For example, one or more gas outlet holes 1527 may be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the gas outlet hole 1527 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration. In either case, each gas outlet hole 1527 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0237] For example, the corresponding gas outlet hole 1527 may have a corresponding central axis, such as the central axis 1801, and a corresponding maximum dimension (e.g., diameter), such as the maximum dimension 1803. The central axis of the gas outlet hole 1527 (e.g., the central axis 1801) may extend outwardly from the reference axis 1511 and thus form a corresponding inclination angle (or angle), such as the angle 1805, with the reference axis 1511. In some cases, the central axis (e.g., the central axis 1801) may form a corresponding angle (e.g., the angle 1807) with the lateral surface 1523. For example, the central axis (e.g., the central axis 1801) may extend perpendicular to (or substantially perpendicular to) the lateral surface 1523 or extend therefrom. This angle of the gas outlet hole 1527 with respect to the reference axis 1511 and the inner surface 259 of the gas distribution port 207 may help inject the purge gas into the gap between the lateral surface 1523 of the insert 1500 and the lower portion of the inner surface 259 of the gas distribution port 207 near the opening 205 before the purge gas flows through the flow-through region 129. This flow of the purge gas may also prevent the process gas from flowing into the gap, the insert 1500, and / or the showerhead 107, which may otherwise deteriorate the insert 1500 and / or the showerhead 107. In this way, the gas flow from the gas outlet hole 1527 may also prevent or at least reduce the possibility of material deposition between the insert 1500 and the inner surface 259 of the gas distribution port 207, and / or reduce the possibility of material shedding and / or particle formation, which may cause defects that result in contaminants being deposited on the front side 203 of the wafer 105 or on / into the structures formed thereon.

[0238] With respect to the lateral surface 1523, the central axis of the gas outlet hole 1527 (e.g., central axis 1801) may be spaced apart from the transition region 1809 by a corresponding distance (e.g., distance 1811) in the extending direction of the lateral surface 1523, respectively. Note that the transition region 1809 may be a region (e.g., a plane) of the main body portion 1503, in which the first main body portion 1503a transitions to the second main body portion 1503b. It should be further noted that the corresponding maximum dimension of the gas outlet hole 1527 (e.g., maximum dimension 1803) may extend in a direction perpendicular to the extending direction of the corresponding central axis of the corresponding gas outlet hole of the gas outlet hole 1527 (e.g., central axis 1801). With this configuration, the gas outlet holes 1527 may be arranged around the reference axis 1511 with an angular pitch 1601. Assuming that the insert 1500 has "n" gas outlet holes 1527 (where "n" is an integer greater than or equal to 2), the angular pitch 1601 may be equal to (or substantially equal to) 360° divided by "n". For example, the insert 1500 is shown as including seven gas outlet holes 1527, such that the angular pitch 1601 may be approximately 51.4°, but the embodiments are not limited thereto.

[0239] In some implementations, the corresponding maximum size (e.g., maximum size 1803) of the corresponding gas outlet hole 1527 can be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. The distance 1811 can be equal to (or substantially equal to) the corresponding maximum size (e.g., maximum size 1803) of the corresponding gas outlet hole 1527. The corresponding length (or depth) of the gas outlet hole 1527 can be less than the depth 1715 of the counterbore 1711. In this way, the gas outlet holes 1527 in the insert 1500 can each have a shorter length compared to the gas outlet holes 321 in the insert 300 and the gas outlet holes 721 in the insert 700. The increase in the depth of the counterbore 1711, the increase in the maximum size 1717 of the counterbore 1711, and the decrease in the length of the gas outlet hole 1527 can at least partially result in a smaller pressure drop between the gas inlet surface 1505 and the lateral surface 1523 associated with the airflow through the insert 1500 under the conditions of the slipstream state. With this increase in the downstream pressure, the throughput (or average velocity) of the gas passing through the insert 1500 can be less than that through the inserts 300, 700, and 1100. This is also meaningful from the perspective of the positioning of the inlet opening of the gas outlet hole 1527 relative to the inner wall 1813 of the counterbore 1711. In other words, in the slipstream state, it is expected that the airflow decreases as the distance from the inner wall 1813 decreases, which may at least partially result in a slower gas flow from the gas outlet hole 1527 compared to the gas outlet holes 321, 721, and 1121 in the corresponding inserts 300, 700, and 1100. For example, assuming the gas flow is in the slipstream state, the pressure drop through the insert 1500 can be less than or equal to about 500×10 -4 Torr, such as less than or equal to about 375×10 -4 Torr, for example about 340×10 -4 Torr.

[0240] According to various embodiments, the insert 1500 can be formed of any suitable material and in any suitable manner. For example, the insert 1500 can be formed of (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 1500 can be formed of a first material and coated with a second material. For example, the insert 1500 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 1500 can be integrally manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0241] Fig.19 Schematically shown in accordance with some embodiments is a partial cross-sectional view of a showerhead including Figure 15-18 a gas distribution port plug Figure 2 .

[0242] Referring to Figure 2 and Figure 15-19 , the plug 1500 can be at least partially supported in the gas distribution port 207 such that an intermediate surface 1507 of the plug 1500 abuts against a docking surface 265 of the gas distribution port 207. To this end, the plug 1100 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, a maximum dimension 1703 of a head portion 1501 of the plug 1500 can be approximately 1% to approximately 10% smaller than a maximum dimension 255 of a first port portion 245 of the gas distribution port 207, such that a lateral surface 1509 of the plug 1500 is spaced apart from an inner surface 251 of the gas distribution port 207 by a distance 1901. Additionally, a dimension 1707 of a first body portion 1503a of the plug 1500 can be approximately 1% to approximately 10% smaller than a maximum dimension 263 of a second port portion 247 of the gas distribution port 207, and a minimum dimension 1709 of a second body portion 1503b can be approximately 8% to approximately 15% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207. In this way, a lateral surface 1517 of the plug 1500 can be spaced apart from an inner surface 259 of the gas distribution port 207 by a first distance, such as a distance 1903, and a lateral surface 1523 can be variably spaced apart from the inner surface 259 of the gas distribution port 207. For example, the lateral surface 1523 can be spaced apart from the inner surface 259 of the gas distribution port 207 by the first distance, such as the distance 1903, in relation to a proximal end 1519, and can be spaced apart from the inner surface 259 of the gas distribution port 207 by a second distance, such as a distance 1905, in relation to a distal end 1521. In some embodiments, the distance 1905 can be less than or equal to a sheath thickness associated with a process performed by the bonding system 100. For example, the distance 1905 can be greater than or equal to approximately 0.4 mm and less than or equal to approximately 1.1 mm, such as greater than or equal to approximately 0.7 mm and less than or equal to approximately 1 mm. It should also be noted that when the plug 1500 is inserted into the gas distribution port 207, the head portion 1501 can serve as a centering mechanism to allow a central axis (e.g., reference axis 1511) of the plug 1500 to coincide (or be substantially coincident) with a central axis 257 of the gas distribution port 207.

[0243] Similar to plugs 300, 700, and 1100, the formation of these clearance fits associated with plug 1500 can increase the distance between the lateral surfaces 1509 and 1517 of plug 1500 and the corresponding inner surfaces 251 and 259 of gas distribution port 207. As previously described, this may reduce the likelihood of wear between plug 1500 and gas distribution port 207, which otherwise may occur due to thermally induced movement of plug 1500 relative to gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed by system 100. Although the movement of plug 1500 has been described as being caused in association with thermal effects, it is also contemplated that the movement of plug 1500 may additionally or alternatively be caused by other factors such as pressure differences, movement of showerhead 107, etc. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the gap between plug 1500 and gas distribution port 207, which otherwise may at least in part cause defects that result in contaminants being deposited on the front side 203 of wafer 105 and / or on the structures formed thereon / therein. To this end, the centering effect of head portion 1501 relative to body portion 1503 can also be used to return plug 1500 to concentric (or substantially concentric) alignment with gas distribution port 207 after movement of plug 1500. This can help maintain a defined gas flow profile from showerhead 107. Gas Distribution Port Plug - 5

[0244] Figure 20-23 Various views of a gas distribution port plug (or plugs) that can be incorporated as part of a Figure 2 showerhead are schematically depicted in accordance with some embodiments. For example, Fig. 20 a perspective view of plug 2000 is depicted, Fig.21 a side view of plug 2000 is depicted, Fig. 22 a bottom view of plug 2000 is depicted, and Fig.23 a cross - sectional view of plug 2000 taken along section line 23 - 23 is depicted.

[0245] Reference Figure 20-23, the plug 2000 may include a head portion 2001 and a body portion 2003 extending axially from the head portion 2001. The axial direction may extend along a direction opposite to the z-axis direction. Both the head portion 2001 and the body portion 2003 may be formed as generally circular cylinders, but the embodiments are not limited thereto. For example, either or both of the head portion 2001 and the body portion 2003 may be formed with any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 2001 and the body portion 2003 will be Figure 20-23 described as having a generally cylindrical configuration, but it should be understood that the surfaces of the shape mentioned may refer to one or more surfaces of another shape.

[0246] According to various embodiments, the head portion 2001 may have a length 2301 in the axial direction and a maximum dimension (e.g., diameter) 2303 in a second direction, such as transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 2003 may have a length 2305 in the axial direction and a maximum dimension (e.g., diameter) 2307 in the second direction. Depending on the geometric configuration of the head portion 2001 and the body portion 2003, the maximum dimensions 2303 and 2307 may be the width of the plug 2000. In some embodiments, the maximum dimension 2303 may be between about 0.1 mm and about 0.4 mm, and the maximum dimension 2307 may be between about 0.1 mm and about 0.3 mm. Additionally, the maximum dimension 2303 may be greater than the maximum dimension 2307, for example, about 15% to about 25% greater than the maximum dimension 2307, but the embodiments are not limited thereto. The length 2301 may be between about 0.05 mm and about 0.1 mm, and the length 2305 may be between about 0.4 mm and about 0.6 mm. The length 2305 may be greater than the length 2301, for example, about 450% to about 550% greater than the length 1101, but the embodiments are not limited thereto. In this way, the total length 2309 of the plug 2000 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0247] The head portion 2001 may include a gas inlet surface 2005, an intermediate surface 2007 that is opposite or spaced from the gas inlet surface 2005 in the axial direction, and a lateral surface 2009 that connects the intermediate surface 2007 to the gas inlet surface 2005. In this way, the head portion 2001 may extend along a reference axis 2011, which may be not only the central axis of the plug 2000 but also the central axis of the head portion 2001. The body portion 2003 may include a proximal end 2013, a distal end 2015 that is opposite or spaced from the proximal end 2013 in the axial direction, and a lateral surface 2017 that connects the distal end 2015 to the proximal end 2013. Thus, the proximal end 2013 may extend from the intermediate surface 2007 and may thus be adjacent to the intermediate surface 2007. The distal end 2015 may terminate at a distal surface 2019. In this way, the body portion 2003 may also extend along the reference axis 2011, which may also be the central axis of the body portion 2003.

[0248] According to various implementations, the plug 2000 may include a reamer 2311 that extends from the gas inlet surface 2005 toward the distal surface 2019 along the reference axis 2011, and the reference axis 1111 may be the central axis of the reamer 2311. Thus, the reamer 2311 may form a central reamer of the plug 2000, but the implementation is not limited thereto. The reamer 2311 may be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the reamer 2311 may be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the reamer 2311 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of such a shape mentioned may refer to one or more surfaces of another shape or configuration of the reamer 2311.

[0249] As Fig.23As shown, the counterbore 2311 can terminate at a distal surface 2313 that is offset from the distal surface 2019 in a first direction (e.g., the z-axis direction), such that the counterbore 2311 extends through the head portion 2001 and partially through the body portion 2003. In this way, the counterbore 2311 can have a depth 2315 in, for example, the axial direction and a maximum dimension (e.g., diameter) 2317 in, for example, a second direction. For example, the depth 2315 can be between about 0.5 mm and about 0.6 mm, and the maximum dimension 2317 can be between about 0.1 mm and about 0.1 mm. In this way, the counterbore 2311 can have a greater depth within the insert 2000 compared to the counterbores 509, 909, 1311, and 1711 within the inserts 300, 700, 1100, and 1700, respectively. Additionally, the maximum dimension 2317 of the counterbore 2311 can be smaller compared to the respective maximum dimensions 515, 915, 1317, and 1717 of the counterbores 509, 909, 1311, and 1711 within the corresponding inserts 300, 700, 1100, and 1700. It should be noted that depending on the geometry of the counterbore 2311, the maximum dimension 2317 can be the width of the counterbore 2311. The body portion 2003 can also include a plurality of gas outlet holes 2021 that are fluidly connected to the counterbore 2311 within the interior of the insert 2000. Although a total of fourteen gas outlet holes 2021 are depicted, the insert 2000 can include any suitable number of gas outlet holes 2021. In some cases, the gas outlet holes 2021 can extend between the inner surface 2319 and the lateral surface 2017 of the counterbore 2311 such that one or more gases input into the counterbore 2311 at the gas inlet surface 2005 can flow through the counterbore 2311 and the gas outlet holes 2021 and thereby exit from the distal surface 2017.

[0250] The gas outlet hole 2021 may include a first gas outlet hole 2021a and a second gas outlet hole 2021b that is offset from the first gas outlet hole 2021a in the axial direction. The first gas outlet hole 2021a may be closer to the proximal end 2013 of the main body portion 2003 than the second gas outlet hole 2021b. Similar to the reaming hole 2311, the gas outlet hole 2021 may be formed as a hole having a generally circular cylindrical configuration, but the embodiments are not limited thereto. For example, one or more gas outlet holes 2021 may be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the gas outlet hole 2021 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration. In either case, each gas outlet hole 2021 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0251] For example, the first gas outlet hole 2021a may have a corresponding central axis (e.g., central axis 2101), and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 2103. The second gas outlet hole 2021b may have a corresponding central axis (e.g., central axis 2201) and a corresponding maximum dimension (e.g., maximum dimension 2105). In some cases, the central axes 2101 and 2201 may extend outwardly from the reference axis 2011, such as radially outwardly from the reference axis 2011. However, it is contemplated that the central axes 2101 and 2201 may extend outwardly from the reference axis 2011 in such a way that the central axes 2101 and 2201 form corresponding tilt angles relative to the reference axis 2011 or the first reference plane 2107, which may be perpendicular (or substantially perpendicular) to the reference axis 2011. It should be noted that the central axis (e.g., central axis 2101) of the first gas outlet hole 2021a may be spaced apart (or substantially spaced apart) from the distal surface 2313 by a distance 2321, and the central axis (e.g., central axis 2201) of the second gas outlet hole 2021b may be spaced apart (or substantially spaced apart) from the distal surface 2313 by a distance 2323. It should be noted that the distances 2321 and 2323 may extend in the axial direction, but the embodiments are not limited thereto. It should also be noted that the corresponding maximum dimensions (e.g., maximum dimensions 2103 and 2105) of the first and second gas outlet holes 2021a and 2021b may extend in, for example, a second direction. In some embodiments, the maximum dimensions 2103 and 2105 may be equal (or substantially equal). In some implementations, the maximum dimensions 2103 and 2105 may be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. And, in various embodiments, the corresponding surface of the second gas outlet hole 2021b may be tangent to a reference plane 2313p, which may include the distal surface 2313.

[0252] The corresponding length of the gas outlet hole 2021 (e.g., length 2325) can be less than the depth 2315 of the reamed hole 2311, respectively. For example, the length (e.g., length 2325) can be between about 0.06 mm and about 0.08 mm. In this way, the gas outlet hole 2021 in the insert 2000 can have a longer length compared to the gas outlet hole 1121 in the insert 1100. The increase in the depth of the reamed hole 2311, the decrease in the maximum dimension 2317 of the reamed hole 2311, and the increase in the length of the gas outlet hole 2021 may at least partially result in a larger pressure drop between the gas inlet surface 2005 and the lateral surface 2017 associated with the gas flow through the insert 2000 under the conditions of the slipstream state. This reduction in the downstream pressure can also be attributed to the combination between the insert 2000 and the gas distribution port 207 of the gas distributor 200. For example, when the insert 2000 is at least partially supported in the gas distribution port 207, the gap between the lateral surface 2017 of the main body portion 2003 and the inner surface 259 of the gas distribution port 207 (e.g., at the Fig.24 distance 2407) can extend the effective length of the gas outlet hole 2021 and effectively form a single gas outlet port 2403 surrounding the gas outlet hole 2021 of the insert 2000 (see, for example Fig.24 ). The effective outlet area of the gas outlet port 2403 can be greater than the corresponding outlet area of the gas outlet hole 2021, and in this way, the conductance can be increased. For example, assuming that the gas flow is in the slipstream flow regime, the pressure drop through the insert 2000 can be less than or equal to about 150×10 -3 Torr, such as less than or equal to about 100×10 -3 Torr, for example, about 81×10 -3 Torr. In some embodiments, increasing the conductance reduces the flow resistance, which enables a greater throughput associated with the gas outlet port 2403 to be achieved.

[0253] In various embodiments, acceleration of the gas flow in the region corresponding to the gas outlet port 2403 can prevent or at least reduce the likelihood of back-diffusion into the gas distribution port 207 and thus into the showerhead 107. For example, the gas flow from the gas outlet holes 2021 can help inject purge gas into the gap between the lateral surface 2017 of the cartridge 2000 and the lower portion of the inner surface 259 of the gas distribution port 207 near the opening 205 before flowing through the region 129. It should be noted that the gas outlet holes 2021 can be configured to eject the purge gas higher above the gas distribution port 207 compared to the gas outlet holes 1527 of the cartridge 1500. This flow of purge gas can also prevent process gas from flowing into the gap, the cartridge 2000, and / or one or more of the showerhead 107, which could otherwise degrade the cartridge 2000 and / or the showerhead 107. Additionally, considering that the gas outlet holes 2021 can be configured to eject the purge gas higher above the gas distribution port 207 compared to the gas outlet holes 1527 of the cartridge 1500, the cartridge 2000 can form a greater barrier to process gas compared to the cartridge 1500. Further, the gas flow from the gas outlet holes 2021 can also prevent or at least reduce the likelihood of material deposition between the cartridge 2000 and the inner surface 259 of the gas distribution port 207, and / or reduce the likelihood of material shedding and / or particle formation, which could lead to defects that cause contaminants to deposit on the front side 203 of the wafer 105 or on the structures formed thereon / therein. It is also contemplated that the acceleration of the gas flow in the region corresponding to the gas outlet port 2403 can be utilized during a cleaning cycle (or process) to remove coatings, residues, debris, etc. above the inner surface 259 and / or the lateral surface 2017 of the gas distribution port 207.

[0254] According to various embodiments, the first gas outlet hole 2021a and the second gas outlet hole 2021b may be circumferentially arranged around the reference axis 2011. In such a configuration, the first gas outlet hole 2021a and the second gas outlet hole 2021b may be arranged around the reference axis 2011 with a corresponding angular pitch (e.g., angular pitch 2203). In some cases, the angular pitch associated with the first gas outlet hole 2021a may be equal to (or substantially equal to) the angular pitch associated with the second gas outlet hole 2021b (e.g., angular pitch 2203), but the embodiments are not limited thereto. Assuming that the insert 2000 has "k" second gas outlet holes 2021b (where "k" is an integer greater than or equal to 2), the angular pitch 2203 may be equal to (or substantially equal to) 360° divided by "k". For example, the insert 2000 is shown as including seven second gas outlet holes 2021b, such that the angular pitch 2203 may be approximately 51.4°, but the embodiments are not limited thereto. The same may hold for the angular pitch associated with the first gas outlet hole 2021a. Additionally, it should be noted that the first gas outlet hole 2021a may be circumferentially offset from the second gas outlet hole 2021b such that a centerline (e.g., centerline 2109) extending along the axial direction of the first gas outlet hole 2021a may not be congruent with a centerline (e.g., centerline 2111) extending along the axial direction of the second gas outlet hole 2021b. In some cases, the circumferential offset between the first gas outlet hole 2021a and the second gas outlet hole 2021b may be half of the amount of the angular pitch 2203, but the embodiments are not limited thereto.

[0255] According to various embodiments, the insert 2000 may be formed of any suitable material and in any suitable manner. For example, the insert 2000 may be formed of (or include) one or more ceramic materials such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 2000 may be formed of a first material and coated with a second material. For example, the insert 2000 may be made of aluminum as the first material and may be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 2000 may be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0256] Fig.24 A partial cross-sectional view of a nozzle including Figure 20-23 a gas distribution port insert Figure 2 is schematically shown according to some embodiments.

[0257] Reference Figure 2 and Figure 20-23, the plug 2000 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 2007 of the plug 2000 abuts against the docking surface 265 of the gas distribution port 207. This contiguity between surfaces 265 and 2007 can prevent or at least reduce the likelihood of back-diffusion into the gas distribution port 207 and thus into the gas distributor 200. To this end, the plug 2000 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 2303 of the head portion 2001 of the plug 2000 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 2009 of the plug 2000 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 2405. To this end, the maximum dimension 2307 of the body portion 2003 of the plug 2000 can be approximately 4% to approximately 15% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surface 2017 of the plug 2000 is spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 2407. In certain cases, the distance 2407 can be greater than the distance 2405, but the embodiments are not limited thereto. Additionally, the distance 2407 can be less than or equal to approximately three-quarters of the sheath thickness associated with the process performed by the integration system 100. In some implementations, the distance 2407 can be greater than or equal to approximately 0.3 mm and less than or equal to approximately 0.7 mm, such as greater than or equal to approximately 0.4 mm and less than or equal to approximately 0.6 mm, such as approximately 0.5 mm. Similar to the head portions 301, 701, 1101, and 1501 of the corresponding plugs 300, 700, 1100, and 1500, when the plug 2000 is inserted into the gas distribution port 207, for example, the head portion 2001 of the plug 2000 can serve as a centering mechanism to allow the central axis (e.g., reference axis 2011) of the plug 2000 to coincide (or be substantially coincident) with the central axis 257 of the gas distribution port 207.

[0258] Similar to the inserts 300, 700, 1100, and 1500, the formation of the clearance fit described above can increase the distance between the lateral surfaces 2009 and 2017 of the insert 2000 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the insert 2000 and the gas distribution port 207, which otherwise may occur due to thermally induced movement of the insert 2000 relative to the gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. Although the movement of the insert 2000 has been described as being caused in relation to thermal effects, it is also contemplated that the movement of the insert 2000 can be additionally or alternatively caused by other factors, such as pressure differences, movement of the showerhead 107, and the like. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the gap between the insert 2000 and the gas distribution port 207, which otherwise may at least in part cause defects that result in contaminants being deposited on the front side 203 of the wafer 105 and / or on the structures formed thereon / therein. To this end, the centering effect of the head portion 2001 relative to the body portion 2003 can also be used to return the insert 2000 to being concentric (or substantially concentric) with the gas distribution port 207 after movement of the insert 2000. This can help maintain a defined gas flow profile from the showerhead 107. The additional distance between the lateral surface 2017 of the insert 2000 and the inner surface 259 of the gas distribution port 207, relative to the distance between, for example, the lateral surface 317 of the insert 300 and the inner surface 259 of the gas distribution port 207, can also allow for a sufficient purge gas flow from the gas outlet holes 2021. Gas Distribution Port Insert - 6

[0259] Figure 25-28 Various views of a gas distribution port insert (or inserts) that can be incorporated as part of a showerhead are schematically depicted in accordance with some embodiments. For example, Figure 2 a perspective view of the insert 2500 is depicted, Fig.25 a side view of the insert 2500 is depicted, Fig.26 a bottom view of the insert 2500 is depicted, and Fig. 27 a cross - sectional view of the insert 2500 taken along section line 28 - 28 is depicted. Fig.28

[0260] Figure 25-28 Reference Figure 25-28, the plug 2500 may be similar to the plugs 1100 and 2000, and thus may include a head portion 2501 and a body portion 2503 extending axially from the head portion 2501. The axial direction may extend along a direction opposite to the z-axis direction. The head portion 2501 may be formed as a generally circular cylinder, and the body portion 2503 may be formed as a generally frustum of a cone, but the embodiments are not limited thereto. For example, one or both of the head portion 2501 and the body portion 2503 may be formed to have any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. However, for convenience, the head portion 2501 and the body portion 2503 will be Figure 25-28 described as having a generally cylindrical configuration and a generally frustum of a cone configuration, respectively, but it should be understood that the surfaces of the shapes mentioned may refer to one or more surfaces of another shape.

[0261] The head portion 2501 may include a gas inlet surface 2505, an intermediate surface 2507 opposite or spaced from the gas inlet surface 2505 in the axial direction, and a lateral surface 2509 connecting the intermediate surface 2507 to the gas inlet surface 2505. In this way, the head portion 2501 may extend along a reference axis 2511, which may be not only the central axis of the plug 2500 but also the central axis of the head portion 2501. The body portion 2503 may include a proximal end 2513, a distal end 2515 opposite or spaced from the proximal end 2513 in the axial direction, and a lateral surface 2517 connecting the distal end 2515 to the proximal end 2513. Thus, the proximal end 2513 may extend from the intermediate surface 2507 and may thus be adjacent to the intermediate surface 2507. The distal end 2515 may terminate at a distal surface 2519. In this way, the body portion 2503 may also extend along the reference axis 2511, which may also be the central axis of the body portion 2503.

[0262] According to various embodiments, the head portion 2501 may have a length 2601 in the axial direction and a maximum dimension (e.g., diameter) 2603 in a second direction, such as transverse to the axial direction. The second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 2503 may have a length 2605 in the axial direction and a varying width (e.g., diameter) in the second direction, for example. In some embodiments, the width of the body portion 2503 may vary linearly along the axial direction such that the lateral surface 2517 forms an inclination angle (or angle) 2607 with the axial direction and, in some cases, forms an inclination angle (or angle) 2607 with the lateral surface 2509. The angle 2607 may be greater than 0° and less than about 10°, such as greater than or equal to about 2.00° and less than or equal to about 5.00°, for example greater than or equal to about 2.75° and less than or equal to about 3.25°. As shown, the width of the body portion 2503 may have a dimension 2609a at the proximal end 2513 and a dimension 2609b at the distal end 2515. Depending on the geometry of the head portion 2501 and / or the body portion 2503, the dimensions 2603, 2609a, and / or 2609b may be the width of the insert 2500. In some embodiments, the dimension 2603 may be between about 0.1 mm and about 0.4 mm, the dimension 2609a may be between about 0.1 mm and 0.2 mm, and the dimension 2609b may be between about 0.1 mm and about 0.2 mm. For this purpose, the maximum dimension 2603 may be greater than each of the dimensions 2609a and 2609b. For example, the maximum dimension 2603 may be about 15% to about 25% greater than at least the dimension 2609a (which is greater than the dimension 2609b), but the embodiments are not limited thereto. The length 2601 may be between about 0.05 mm and about 0.1 mm, and the length 2605 may be between about 0.4 mm and about 0.6 mm. Note that the length 2605 may be greater than the length 2601, such as about 450% to about 550% greater than the length 2601, but the embodiments are not limited thereto. In this way, the total length of the insert 2500 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0263] According to various implementations, the insert 2500 may include a reamer 2801 extending from a gas inlet surface 2505 toward a distal surface 2519 along a reference axis 2511, which may be a central axis of the reamer 2801. Thus, the reamer 2801 may form a central reamer of the insert 2500, but the implementation is not limited thereto. The reamer 1311 may be formed as a hole having a generally frustoconical configuration, but the implementation is not limited thereto. For example, the reamer 2801 may be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustoconical configuration of at least one of such configurations. For convenience, the reamer 2801 will be described as having a generally frustoconical configuration, but it should be understood that surfaces of such a shape (e.g., inner surfaces) mentioned may refer to one or more surfaces of another shape or configuration of the reamer 2801.

[0264] As Fig.28As shown, the counterbore 2801 can terminate at a distal surface 2803 that is offset from the distal surface 2519 in a first direction (e.g., the z-axis direction), such that the counterbore 2801 extends through the head portion 2501 and partially through the body portion 2503. However, it is noted that, unlike the distal surface 1313 in the insert 1100, the distal surface 2803 can be formed as a generally conical protrusion having a vertex 2805 that extends in the first direction toward the gas inlet surface 2505. In some embodiments, the reference axis 2511 can extend through the vertex 2805 such that the vertex 2805 is concentrically aligned with the counterbore 2801. Also, the counterbore 2801 can have a maximum depth 2807 in, for example, the axial direction and a maximum dimension (e.g., diameter) 2809 at the gas inlet surface 2505 in, for example, a second direction. The inner wall 2811 of the counterbore 2801 can converge toward the reference axis 2511 such that the inner wall 2811 forms an angle 2813 with the reference axis 2511. In some cases, the angle 2813 can be greater than about 0° and less than or equal to about 10°. It should be noted that the depth 2807 of the counterbore 2801 can be less than the depth 1315 of the counterbore 1311 in the insert 1100. The maximum dimension 2809 can be greater than the maximum dimension 1317 of the counterbore 1311 in the insert 1100. In some cases, the maximum dimension 2809 can be between about 0.1 mm and about 0.2 mm (and at least less than each of the dimensions 2609a and 2609b). In this way, the counterbore 2801 can have a relatively smaller and larger depth within the insert 2500 compared to each of the counterbores 509, 909, 1311, and 1711 in the inserts 300, 700, 1100, and 1500, respectively. It should also be noted that, depending on the geometry of the counterbore 2801, the maximum dimension 2809 can be the width of the counterbore 2801. The body portion 2503 can also include a plurality of gas outlet holes 2521 that are fluidly connected to the counterbore 2801 within the interior of the insert 2500. Although a total of twelve gas outlet holes 2521 are depicted, the insert 2500 can include any suitable number of gas outlet holes 2521. In some cases, the gas outlet holes 2521 can extend between the inner wall 2811 and the lateral surface 2517 such that one or more gases input into the counterbore 2801 at the gas inlet surface 2505 can flow through the counterbore 2801 and the gas outlet holes 2521 and thereby exit from the lateral surface 2517.

[0265] The gas outlet hole 2521 may include a first gas outlet hole 2521a and a second gas outlet hole 2521b that is offset from the first gas outlet hole 2521a in the axial direction. The first gas outlet hole 2521a may be closer to the proximal end 2513 of the main body portion 2503 than the second gas outlet hole 2521b. The gas outlet hole 2021 may be formed as a hole having a generally circular cylindrical configuration, but the embodiments are not limited thereto. For example, one or more gas outlet holes 2521 may be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the gas outlet hole 2521 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration. In either case, each gas outlet hole 2521 may have a central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to the central axis.

[0266] For example, the first gas outlet hole 2521a may have a corresponding central axis (e.g., central axis 2815), and a corresponding maximum dimension (e.g., diameter), such as maximum dimension 2817. The second gas outlet hole 2521b may have a corresponding central axis (e.g., central axis 2819) and a corresponding maximum dimension (e.g., maximum dimension 2821). In some cases, the maximum dimensions 2817 and 2821 may be equal (or substantially equal). Additionally, the central axes 2815 and 2819 may extend outwardly from the reference axis 2511, and thereby form corresponding inclination angles (or angles), such as angles 2823 and 2825, with the reference axis 2511. However, for convenience, the angles 2823 and 2825 are described relative to a reference plane 2827 that extends parallel to the reference axis 2511. The angles 2823 and 2825 may be equal (or substantially equal), but the embodiments are not limited thereto. Moreover, the central axes 2815 and 2819 may intersect the side surface 2517 at points 2829 and 2831, respectively, and the points 2829 and 2831 may be spaced apart from the reference plane 2833 by distances 2835 and 2837, respectively, in the axial direction.

[0267] Similar to plug-ins 1500 and 2000, the angle of the gas outlet hole 2521 relative to the reference axis 2011 and the inner surface 259 of the gas distribution port 207 can help inject purge gas into the gap between the lateral surface 2517 of the plug-in 2500 and the lower part of the inner surface 259 of the gas distribution port 207 near the opening 205 before the purge gas flows through the flow-through area 129. However, it is worth noting that the gas outlet hole 2521 can be configured to inject the purge gas higher up into the gas distribution port 207 compared to the gas outlet hole 1527 of the plug-in 1500 and the gas outlet hole 2021 of the plug-in 2000. This flow of the purge gas can also prevent process gas from flowing into the gap, the plug-in 2500, and / or one or more of the showerheads 107, which might otherwise degrade the plug-in 2500 and / or the showerhead 107. Additionally, considering that the gas outlet hole 2521 can be configured to inject the purge gas higher up into the gas distribution port 207 compared to the gas outlet hole 1527 of the plug-in 1500 and the gas outlet hole 2021 of the plug-in 2000, the plug-in 2500 can form an even greater barrier to the process gas compared to the plug-ins 1500 and 2000. Moreover, the airflow from the gas outlet hole 2527 can also prevent or at least reduce the likelihood of material deposition between the plug-in 2500 and the inner surface 259 of the gas distribution port 207, and / or reduce the likelihood of material shedding and / or particle formation, which might cause defects that deposit contaminants onto the front side 203 of the wafer 105 or onto the structures formed thereon / therein.

[0268] In some embodiments, the intermediate surface 2507 can extend in the reference plane 2833, and the maximum dimension (e.g., the maximum dimension 2817) of the first gas outlet hole 2521a can be dimensioned such that the corresponding opening 2839 of the first gas outlet hole 2521a is formed to be tangent to the reference plane 2833. Thus, the first gas outlet hole 2521a can include a corresponding portion that extends within the head portion 2501 of the plug-in 2500. According to some implementations, the tilt angle (or angles) 2841 of the distal surface 2803 can be equal to (or substantially equal to) the angle 2825 and the maximum dimension (e.g., the maximum dimension 2821) of the second gas outlet hole 2521b can be designed such that the corresponding portion of the distal surface 2803 forms the corresponding portion of the inner surface 2843 of the second gas outlet hole 2521b. In other words, the corresponding inner surface 2843 of the second gas outlet hole 2521b can be tangent to the distal surface 2803. With this configuration, the corresponding openings (e.g., the opening 2839) of the gas outlet hole 2521 can have a generally elliptical shape in the lateral surface 2517 and the inner sidewall 2811, but the gas outlet hole 2521 can have a corresponding generally circular cross-section in a plane perpendicular to its corresponding longitudinal extension axis.

[0269] According to various implementations, the maximum dimensions 2817 and 2821 can be between about 0.01 mm and about 0.1 mm, such as between about 0.02 mm and about 0.07 mm, for example between about 0.03 mm and about 0.05 mm. The corresponding length (or depth) of the gas outlet holes 2521 can be less than the depth 2807 of the countersink 2801. In this way, the gas outlet holes 2521 in the insert 2500 can have a shorter length respectively compared to the gas outlet holes 321 in the insert 300 and the gas outlet holes 721 in the insert 700, but can have a longer length respectively compared to the gas outlet holes 1527 in the insert 1500 and the gas outlet holes 2021 in the insert 2000 within the insert 2500. The shortening of the maximum depth 2807 of the countersink 2801 and the relative sizing of the corresponding lengths of the gas outlet holes 2521 can at least partially result in a pressure drop between the gas inlet surface 2505 and the lateral surface 2517 related to the airflow through the insert 2500 under slip flow conditions that is numerically similar to the pressure drop presented with respect to the insert 2000. This reduction in the downstream pressure can also be attributed to the protruding conical shape of the distal surface 2803 in the countersink 2801 and the combination between the insert 2500 and the gas distribution port 207 of the gas distributor 200. For example, in the slip flow state, it is expected that the average velocity of the airflow in the central portion of the countersink 2803 will be relatively constant and greater than the average velocity of the airflow near the inner wall 2811 of the countersink 2801. Thus, the protruding conical shape of the distal surface 2803 in the countersink 2801 can distribute and force more of this faster moving gas to exit the second gas outlet hole 2521b before it has more opportunity to lose momentum. Additionally, when the insert 2500 is at least partially supported in the gas distribution port 207, the spacing between the lateral surface 2517 of the body portion 2503 and the inner surface 259 of the gas distribution port 207 (such as Fig.29 the distance 2901 therein) can extend the effective length of the gas outlet holes 2521 and effectively form a single gas outlet port 2903 surrounding the distal surface 2519 of the insert 2500 (see for example Fig.29 ). The effective outlet area of the gas outlet port 2903 can be greater than the corresponding outlet area of the gas outlet holes 2521, and in this way, the conductance can be increased. In various embodiments, increasing the conductance reduces the flow resistance, which allows for a greater throughput associated with the gas outlet port 2903 to be achieved. For example, assuming the airflow is in the slip flow state, the pressure drop across the insert 2500 can be less than or equal to about 150×10 -3 Torr, such as less than or equal to about 100×10 -3 Torr, for example about 80×10 -3Note that the acceleration of the gas flow in the region corresponding to the gas outlet port 2903 can prevent or at least reduce the possibility of back-diffusion into the gas distribution port 207 and thus into the gas distributor 200. This acceleration of the gas flow in the region corresponding to the gas outlet port 2903 can be utilized during the cleaning cycle (or process) to remove coatings, residues, debris, etc. from the inner surface 259 and / or the lateral surface 2517 of the gas distribution port 207. Further, considering the tapered configuration of the body portion 2503 of the insert 2500 and the relatively closer positioning of the gas outlet hole 2521 with respect to the intermediate surface 2507 of the insert 2500 as compared to the gas outlet hole 2021 with respect to the intermediate surface 2007 of the gas distributor 200, more portions of the inner surface 259 of the gas distributor 200 and the lateral surface 2517 of the insert 2500 can be exposed to this faster moving gas and thus the aforementioned preventive and cleaning features can be further promoted.

[0270] With particular reference Fig.26 and Fig. 27 , the first gas outlet hole 2521a and the second gas outlet hole 2521b can be circumferentially arranged about the reference axis 2511. In such a configuration, the first gas outlet hole 2521a and the second gas outlet hole 2521b can be arranged at a corresponding angular pitch about the reference axis 2511, such as the angular pitch 2701. In some cases, the angular pitch associated with the first gas outlet hole 2521a can be equal to (or substantially equal to) the angular pitch associated with the second gas outlet hole 2521b, but the embodiments are not limited thereto. Assuming that the insert 2500 includes "k" first gas outlet holes 2521b (where "k" is an integer greater than or equal to 2), the angular pitch between adjacent first gas outlet holes 2521b can be equal to (or substantially equal to) 360° divided by "k". For example, the insert 2500 is shown as including six first gas outlet holes 2521b such that the angular pitch between adjacent first gas outlet holes 2521a can be about 60°, but the embodiments are not limited thereto. The same applies to the angular pitch between adjacent second gas outlet holes 2021b. In some implementations, the respective central axes 2815 of the first gas outlet holes 2521a can be circumferentially aligned with the corresponding central axes 2819 of the second gas outlet holes 2521b such that a centerline (e.g., centerline 2611) that extends tangentially to the lateral surface 2517 of the first gas outlet hole 2521a can be congruent with a centerline (e.g., centerline 2613) that extends tangentially to the lateral surface 2517 of the second gas outlet hole 2521b, but the embodiments are not limited thereto.

[0271] According to various embodiments, the insert 2500 can be formed of any suitable material and in any suitable manner. For example, the insert 2500 can be formed of (or include) one or more ceramic materials such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 2500 can be formed of a first material and coated with a second material. For example, the insert 2500 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 2500 can be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0272] Fig.29 A schematic illustration of a printhead including Figure 25-28 a gas distribution port insert Figure 2 is shown in partial cross-section.

[0273] Reference Figure 2 and Figure 25-28, the plug 2500 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 2507 of the plug 2500 abuts against the docking surface 265 of the gas distribution port 207. To this end, the plug 2500 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 2603 of the head portion 2501 of the plug 2500 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 2509 of the plug 2500 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 2905. The dimension 2609a of the body portion 2503 of the plug 2500 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, and the dimension 2609b can be approximately 8% to approximately 15% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207. In this way, the lateral surface 2517 of the plug 2500 can be spaced apart from the inner surface 259 of the gas distribution port 207 by a first distance, such as the distance 2905, with respect to the proximal end 2513 of the body portion 2503, and can be spaced apart from the inner surface 259 of the gas distribution port 207 by a second distance, such as the distance 2901, with respect to the distal end 2515 of the body portion 2503. In certain cases, the distance 2901 can be less than or equal to the sheath thickness associated with the process performed by the bonding system 100. For example, the distance 2901 can be greater than or equal to approximately 0.6 mm and less than or equal to approximately 0.9 mm, such as greater than or equal to approximately 0.7 mm and less than or equal to approximately 0.8 mm, such as approximately 0.76 mm. It should also be noted that when the plug 2500 is inserted into the gas distribution port 207, the head portion 2501 can serve as a centering mechanism to allow the central axis of the plug 2500 (e.g., the reference axis 2511) to coincide (or be substantially coincident) with the central axis 257 of the gas distribution port 207 when incorporated as part of the gas distributor 200.

[0274] Similar to the plugs 300, 700, 1100, 1500, and 2000, the formation of the clearance fit described above can increase the distance between the lateral surfaces 2509 and 2517 of the plug 2500 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the plug 2500 and the gas distribution port 207, which otherwise may occur due to thermally induced movement of the plug 2500 relative to the gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed through the system 100. Although the movement of the plug 2500 has been described as being caused in association with thermal effects, it is also contemplated that the movement of the plug 2500 can be additionally or alternatively caused by other factors, such as pressure differences, movement of the showerhead 107, and the like. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the clearance between the plug 2500 and the gas distribution port 207, which otherwise may at least in part cause defects that result in contaminants being deposited on the front side 203 of the wafer 105 and / or on the structures formed thereon / therein. Also, the centering effect of the head portion 2501 relative to the body portion 2503 can also be used to return the plug 2500 to being concentric (or substantially concentric) with the gas distribution port 207 after movement of the plug 2500. This can help maintain a defined gas flow profile from the showerhead 107. The additional distance between the lateral surface 2517 of the plug 2500 and the inner surface 259 of the gas distribution port 207 relative to the distance between, for example, the lateral surface 317 of the plug 300 and the inner surface 259 of the gas distribution port 207 can also allow sufficient purge gas flow from the gas outlet hole 2521. Gas Distribution Port Plug - 7

[0275] Figure 30-33 Various views of a gas distribution port plug (or plugs) that can be incorporated as part of a showerhead are schematically depicted in accordance with some embodiments. For example, Figure 2 a perspective view of the plug 3000 is depicted, Fig.30 a side view of the plug 2000 is depicted, Fig.31 a bottom view of the plug 3000 is depicted, Fig.32 a bottom view of the plug 3000 is depicted, and Fig.33 a cross - sectional view of the plug 3000 taken along the section line 34 - 34 is depicted. Fig.34

[0276] Figure 30-33 Reference Figure 30-33, the plug 3000 may include a head portion 3001 and a body portion 3003 extending axially from the head portion 3001, and the axial direction may extend along a direction opposite to the z-axis direction. Both the head portion 3001 and the body portion 3003 may be formed as generally circular cylinders, but the embodiments are not limited thereto. For example, either or both of the head portion 3001 and the body portion 3003 may be formed with any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 3001 and the body portion 3003 will be Figure 30-33 described as having a generally cylindrical configuration, but it should be understood that the surfaces of the shape mentioned may refer to one or more surfaces of another shape.

[0277] According to various embodiments, the head portion 3001 may have a length 3101 in the axial direction and a maximum dimension (e.g., diameter) 3103 in a second direction, such as transverse to the axial direction. For example, the second direction may be perpendicular to (or substantially perpendicular to) the axial direction and may thus extend along the x-axis direction. The body portion 3003 may have a length 3105 in the axial direction and a maximum dimension (e.g., diameter) 3107 in the second direction. Depending on the geometric configuration of the head portion 3001 and the body portion 3003, the maximum dimensions 3103 and 3107 may be the width of the plug 3100. In some embodiments, the maximum dimension 3103 may be between about 0.1 mm and about 0.4 mm, and the maximum dimension 3107 may be between about 0.1 mm and about 0.2 mm. In any case, the maximum dimension 3103 may be greater than the maximum dimension 3107, for example, about 15% to about 25% larger than the maximum dimension 3107, but the embodiments are not limited thereto. It should also be noted that the length 3101 may be between about 0.05 mm and about 0.1 mm, and the length 3105 may be between about 0.4 mm and about 0.6 mm. In some cases, the length 3105 may be greater than the length 3101, for example, about 450% to about 550% larger than the length 3101, but the embodiments are not limited thereto. Thus, the total length 3401 of the plug 3000 may be between about 0.5 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0278] The head portion 3001 may include a gas inlet surface 3005, an intermediate surface 3007 that is opposite or spaced apart from the gas inlet surface 3005 in the axial direction, and a lateral surface 3009 that connects the intermediate surface 3007 to the gas inlet surface 3005. In this way, the head portion 3001 may extend along a reference axis 3011, which may be not only the central axis of the plug 3000 but also the central axis of the head portion 3001. The body portion 3003 may include a proximal end 3013, a distal end 3015 that is opposite or spaced apart from the proximal end 3013 in the axial direction, and a lateral surface 3017 that connects the distal end 3015 to the proximal end 3013. Thus, the proximal end 3013 may extend from the intermediate surface 3007 and may thus be adjacent to the intermediate surface 3007. The distal end 3015 may terminate at a distal surface 3019. In this way, the body portion 3003 may also extend along the reference axis 3011, which may also be the central axis of the body portion 3003.

[0279] According to various embodiments, the plug 3000 may include a reamer 3403 that extends from the gas inlet surface 3005 toward the distal surface 3019 along the reference axis 3011, and the reference axis 1111 may be the central axis of the reamer 3403. Thus, the reamer 3403 may form a central reamer of the plug 3000, but the embodiments are not limited thereto. The reamer 3403 may be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the reamer 3403 may be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the reamer 3403 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of such a shape mentioned may refer to one or more surfaces of another shape or configuration of the reamer 3403.

[0280] As Fig.34As shown, the counterbore 3403 can terminate at a distal surface 3405 that is offset from the distal surface 3019 in a first direction (e.g., the z-axis direction), such that the counterbore 3403 extends through the head portion 3001 and partially through the body portion 3003. In this way, the counterbore 3403 can have a depth 3407 in, for example, the axial direction and a maximum dimension (e.g., diameter) 3409 in, for example, a second direction. For example, the depth 3407 can be between about 0.4 mm and about 0.7 mm, and the maximum dimension 3409 can be between about 0.1 mm and about 0.2 mm (and at least less than each of the dimensions 3103 and 3107). It should be noted that depending on the geometry of the counterbore 3403, the maximum dimension 3409 can be the width of the counterbore 3403.

[0281] According to various embodiments, the head portion 3001 can include a recessed portion 3021 in the gas inlet surface 3005. The recessed portion 3021 can have a depth 3109 in the axial direction and can extend longitudinally in a third direction that is transverse to the axial direction. For example, the third direction can extend along the y-axis direction. In this way, the recessed portion 3021 can extend from the lateral surface 3009 to the counterbore 3403 and can thus be fluidly connected to the counterbore 3403 within the head portion 3001. The width 3201 of the recessed portion 3021 can extend in, for example, the second direction. In various implementations, the width 3201 can be between about 0.02 mm and about 0.06 mm, and the depth 3109 can be between about 0.005 mm and about 0.02 mm. The body portion 3003 can include a gas outlet hole 3023 that has a proximal opening 3411 fluidly connected to the counterbore 3403 inside the insert 3000 and a distal opening 3413 formed at least in the distal surface 3019. Thus, the gas outlet hole 3023 can extend at least between the distal surfaces 3405 and 3019 such that one or more gases input into the counterbore 3403 at the gas inlet surface 3005 can flow through the counterbore 3403 and the gas outlet hole 3023 and can thus be output at least from the distal surface 3019. In some instances, the gas outlet hole 3023 can also be formed in a portion of the lateral surface 3017 such that at least some of the one or more input gases can be output from the lateral surface 3017. In this way, the distal opening 3413 of the gas outlet hole 3023 can span between the distal surface 3019 and the lateral surface 3017.

[0282] The gas outlet hole 3023 can be formed as a hole having a generally straight prism configuration, but the embodiments are not limited thereto. For example, the gas outlet hole 3023 can be formed as a hole having any suitable geometric configuration, such as a generally cylindrical hole, a conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration with at least one of such configurations. For convenience, the gas outlet hole 3023 will be described as having a generally straight prism configuration, but it should be understood that references to surfaces of such a shape (e.g., inner surfaces) can refer to one or more surfaces of another shape or configuration. In either case, the gas outlet hole 3023 can have a longitudinal extension central axis (hereinafter referred to as "central axis") 3415 extending in a fourth direction transverse to the axial direction, a maximum width 3301 in the second direction, and a height 3417 in a fifth direction perpendicular to the fourth direction. In some implementations, the rear portions 3303 and 3305 of the opposing sidewalls of the gas outlet hole 3023 can be formed arcuately such that the width of the gas outlet hole 3023 increases in size as the distance from the rear surface 3307 to the points 3303t and 3305t increases, at which points the width of the gas outlet hole can be the maximum width 3301, but the embodiments are not limited thereto. The points 3303t and 3305t can be formed in front of the reference axis 3011 in the y-axis direction, while the rear surface 3307 can be formed behind the reference axis 3011 in a direction opposite to the y-axis direction. The central axis 3415 can form an angle 3418 with a reference plane 3419, which can extend perpendicular to the axial direction and can include the distal surface 3019. In certain cases, the angle 3418 can be greater than or equal to about 10° and less than or equal to about 30°, such as greater than or equal to about 15° and less than or equal to about 25°, for example about 20°. Additionally, the maximum width 3301 can be between about 0.1 mm and about 0.2 mm, and the height 3417 can be between about 0.2 mm and about 0.5 mm. This configuration of the insert 3000 can at least partially result in a pressure drop of less than 500×10 -4 Torr between the gas inlet surface 3005 and the distal opening 3413 associated with the airflow through the insert 3000 under the conditions of the slipstream state, e.g., about 495×10 -4 Torr.

[0283] In addition, the configuration of the insert 3000 can be configured to at least partially cause a substantially directed gas flow along a fourth direction from the gas outlet hole 3023. Thus, when one or more of the inserts 3000 are incorporated as part of, for example, the showerhead 107, this directed gas flow from the gas outlet hole 3023 can be used to radially push the purge gas outward from the axis of the showerhead 107 (e.g., the central axis 141) in the region 129. This may prevent process gas from flowing from the region 131 into the gap between the showerhead 107 and the front face 203 of the wafer 105 and / or reaching at least one of the gas distribution ports 207 of the showerhead 107, the insert 3000 incorporated as part of the showerhead 107, and the front face 203 of the wafer 105 or features formed thereon or therein. By preventing this purge gas flow from entering the region 129, the showerhead 107 including one or more inserts 3000 can prevent or at least reduce the likelihood of interaction of the process gas with the showerhead 107 and / or back-diffusion into the gas distribution ports 207 of the showerhead 107.

[0284] According to various embodiments, the insert 3000 can be formed of any suitable material and in any suitable manner. For example, the insert 3000 can be formed of (or include) one or more ceramic materials such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 3000 can be formed of a first material and coated with a second material. For example, the insert 3000 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 3000 can be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0285] Fig.35 Schematically shown in accordance with some embodiments includes Figure 30-33 of the gas distribution port insert Figure 2 partial cross-sectional view of the showerhead.

[0286] Reference Figure 2 and Figure 30-34, the plug 3000 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 3007 of the plug 3000 abuts against the docking surface 265 of the gas distribution port 207. To this end, the plug 3000 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 3103 of the head portion 3001 of the plug 3000 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 3009 of the plug 3000 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 3501. To this end, the maximum dimension 3107 of the body portion 3003 of the plug 3000 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surface 3017 of the plug 3000 can be spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 3503. In certain cases, the distances 3501 and 3503 can be equal or substantially equal, but the embodiments are not limited thereto. It should also be noted that when the plug 3000 is inserted into the gas distribution port 207, the head portion 3001 can be used as a centering mechanism to align the central axis (e.g., reference axis 3011) of the plug 3000 with the central axis 257 of the gas distribution port 207 (or substantially coincide).

[0287] Similar to the plugs 300, 700, 1100, 1500, 2000, and 2500, the formation of the above clearance fit can increase the distance between the lateral surfaces 3009 and 3017 of the plug 3000 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the plug 3000 and the gas distribution port 207, which otherwise may occur due to thermally induced movement of the plug 3000 relative to the gas distribution port 207, which may be at least partially caused by temperature changes and / or fluctuations associated with semiconductor processing operations performed by the system 100. Although the movement of the plug 3000 has been described as being caused in relation to thermal effects, it is also contemplated that the movement of the plug 3000 can be additionally or alternatively caused by other factors, such as pressure differences, movement of the showerhead 107, and the like. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the gap between the plug 3000 and the gas distribution port 207, which otherwise may at least partially cause defects resulting in contaminants being deposited on the front surface 203 of the wafer 105 and / or on the structures formed thereon / therein. Also, the centering effect of the head portion 3001 relative to the body portion 3003 can also be used to return the plug 3000 to a concentric (or substantially concentric) alignment with the gas distribution port 207 after the movement of the plug 3000. This can help maintain a defined gas flow profile from the showerhead 107. Gas distribution port plug - 8

[0288] Figure 36-40 Schematically depicted in accordance with some embodiments are various views of a gas distribution port plug (or plugs) that can be incorporated as part of a Figure 2 showerhead. For example, Fig.36 a perspective view of plug 3600 is depicted, Fig.37 a side view of plug 3600 is depicted, Fig.38 a top view of plug 3600 is depicted, Fig.39 a cross - sectional view of plug 3600 taken along section line 39 - 39 is depicted, and Fig.40 a cross - sectional view of plug 3600 taken along section line 40 - 40 is depicted.

[0289] Referring to Figure 36-40 , plug 3600 can be similar to plug 3000 and thus can include a head portion 3601 and a body portion 3603 that extends axially from the head portion 3601, and this axial direction can extend along a direction opposite to the z - axis direction. Both the head portion 3601 and the body portion 3603 can be formed as generally circular cylinders, but the embodiments are not limited thereto. For example, either or both of the head portion 3601 and the body portion 3603 can be formed with any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 3601 and the body portion 3603 will be Figure 36-40 described as having a generally cylindrical configuration, but it should be understood that the surfaces of the shape mentioned can refer to one or more surfaces of another shape.

[0290] According to various embodiments, the head portion 3601 may have a length 3701 in the axial direction and a maximum dimension (e.g., diameter) 3703 in a second direction, such as transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend along the y-axis direction. The body portion 3603 may have a length 3705 in the axial direction and a maximum dimension (e.g., diameter) 3707 in the second direction. Depending on the geometry of the head portion 3601 and the body portion 3603, the maximum dimensions 3703 and 3707 may be the width of the insert 3700. In some embodiments, the maximum dimension 3703 may be between about 0.1 mm and about 0.4 mm, and the maximum dimension 3707 may be between about 0.1 mm and about 0.2 mm. In any case, the maximum dimension 3703 may be greater than the maximum dimension 3707, for example, about 15% to about 25% greater than the maximum dimension 3707, but the embodiments are not limited thereto. It should also be noted that the length 3701 may be between about 0.05 mm and about 0.1 mm, and the length 3705 may be between about 0.4 mm and about 0.7 mm. In some cases, the length 3705 may be greater than the length 3701, for example, about 500% to about 600% greater than the length 3701, but the embodiments are not limited thereto. Thus, the total length of the insert 3600 in the axial direction may be between about 0.6 mm and about 0.7 mm, but the embodiments are not limited thereto.

[0291] The head portion 3601 may include a gas inlet surface 3605, an intermediate surface 3607 that is opposite or spaced apart from the gas inlet surface 3605 in the axial direction, and a lateral surface 3609 that connects the intermediate surface 3607 to the gas inlet surface 3605. In this way, the head portion 3601 may extend along a reference axis 3611, which may be not only the central axis of the insert 3600 but also the central axis of the head portion 3601. The body portion 3603 may include a proximal end 3613, a distal end 3615 that is opposite or spaced apart from the proximal end 3613 in the axial direction, and a lateral surface 3617 that connects the distal end 3615 to the proximal end 3613. Thus, the proximal end 3613 may extend from the intermediate surface 3607 and may thus be adjacent to the intermediate surface 3607. The distal end 3615 may terminate at a distal surface 3619. In this way, the body portion 3603 may also extend along the reference axis 3611, which may also be the central axis of the body portion 3603.

[0292] According to various embodiments, the insert 3600 may include a reamer 4001 extending from a gas inlet surface 3605 toward a distal surface 3619 along a reference axis 3611, which may be the central axis of the reamer 4001. Thus, the reamer 4001 may form a central reamer of the insert 3600, but the embodiments are not limited thereto. The body portion 3603 of the insert 3600 may include additional reamers, such as a reamer 4003, which is fluidly connected to the reamer 4001. The reamer 4003 may extend in the axial direction from a distal opening 4005 of the reamer 4001 along a reference axis 3801 toward the distal surface 3619. The reference axis 3801 may be parallel to the reference axis 3611, but offset from the reference axis 3611 in a third direction transverse to the axial direction and, thus, may extend in a direction opposite to the x-axis direction. The reamer 4001 may be formed as a hole having a generally circular cylindrical configuration, but the implementations are not limited thereto. Similar to the reamer 4001, the reamer 4003 may be formed as an elongated hole having a cross-section with a generally stadium (or oval) shape in a plane perpendicular to the reference axis 3611, but the implementations are not limited thereto. For example, either or both of the reamers 4001 and 4003 may be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration with at least one of such configurations. For convenience, the reamer 4001 will be described as having a generally cylindrical configuration, and the reamer 4003 will be described as having a generally elongated configuration with a cross-section having a generally stadium shape in a plane perpendicular to the reference axis 3611, but it should be understood that the surfaces (e.g., inner surfaces) of such shapes mentioned may refer to one or more surfaces of another shape or configuration of the reamer 4001 or the reamer 4003.

[0293] As Fig.40As shown, the reaming 4001 can terminate at a distal surface 4007 that is offset from the distal surface 3619 in a first direction (e.g., the z-axis direction), such that the reaming 4001 extends through the head portion 3601 and partially through the body portion 3603. In this way, the reaming 4001 can have a depth 4009 in, for example, the axial direction and a maximum dimension (e.g., diameter) 4011 in a second direction. Similar to the reaming 4001, the reaming 4003 can terminate at a distal surface 4013 that is offset from the distal surface 3619 in the first direction, such that the reaming 4003 extends further into the body portion 3603 from the distal opening 4005 of the reaming 4001. In this way, the reaming 4003 can have a depth 4015 in, for example, the axial direction and a maximum width 3803 in the second direction. For this purpose, the central axes of the semi-circular sides 3803s1 and 3803s2 of the reaming 4003 can be spaced apart from the reference axis 3805 by a distance 3807 in the second direction and can also be spaced apart from the reference axis 3611 by a distance 3809 in a third direction. Thus, the rectangular portion of the stadium shape can have a width equal to twice the distance 3807, and the semi-circular sides 4003s1 and 4003s2 can have a radius 3811. In various implementations, the depth 4009 can be between about 0.4 mm and about 0.7 mm, and the maximum dimension 4011 can be between about 0.1 mm and about 0.2 mm (and at least less than each of the dimensions 3703 and 3707). The depth 4015 can be between about 0.3 mm and about 0.5 mm, the maximum width 3803 can be between about 0.2 mm and about 0.1 mm, and the radius 3811 can be between about 0.02 mm and about 0.05 mm. The distance 3807 can be between about 0.02 mm and about 0.05 mm (and, in some cases, less than the radius 3811), and the distance 3809 can be between about 0.01 mm and about 0.02 mm. It should be noted that, depending on the geometry of the hole 4001, the maximum dimension 4011 can be the width of the reaming 4001. Additionally, the depth 4009 of the reaming 4001 can be greater than the depth 3407 of the reaming 3403 of the insert 3000. It should also be noted that the cross-sectional area of the reaming 4003 in the plane perpendicular to the reference axis 3611 can be less than the cross-sectional area of the reaming 4001, such that when viewed in the axial direction, the reaming 4003 is surrounded by the reaming 4001. In this way, the reaming 4003 can be configured to restrict the airflow through the insert 3600, which can at least partially result in an acceleration of the airflow from the reaming 4001 through the reaming 4003.

[0294] According to various embodiments, the head portion 3601 may include a recessed portion 3621 in the gas inlet surface 3605. The recessed portion 3621 may have a depth 3709 in the axial direction and may extend longitudinally in a third direction transverse to the axial direction. For example, the third direction may extend along a direction opposite to the x-axis. In this way, the recessed portion 3621 may extend from the lateral surface 3609 to the reamer 4001 and may thus be fluidly connected to the reamer 4001 within the head portion 3601. The width 3813 of the recessed portion 3621 may extend in, for example, the second direction. In various implementations, the width 3813 may be between about 0.02 mm and about 0.06 mm, and the depth 3709 may be between about 0.005 mm and about 0.02 mm. The body portion 3603 may include a gas outlet hole 3623 having a proximal opening 4017 fluidly connected to the reamer 4001 inside the insert 3600 and a distal opening 4019 in the lateral surface 3617. In this way, the reamer 4003 may be fluidly interposed between the reamer 4001 and the gas outlet hole 3623. Thus, the combination of the reamer 4001, the reamer 4003, and the gas outlet hole 3623 may allow one or more gases to be input at the gas inlet surface 3605 into the reamer 4001 to flow through the reamer 4001, the reamer 4003, and the gas outlet hole 3623 and thus be output from the lateral surface 3617 via the distal opening 4019.

[0295] The gas outlet hole 3623 may be formed as a hole extending along the central axis 4021 and expanding in a cross-sectional area (in a plane perpendicular to the central axis 4021) from the proximal opening 4017 to the distal opening 4019. In some embodiments, the central axis 4021 may extend in a fourth direction transverse to the axial direction and, in some cases, may be equal to (or substantially equal to) the third direction. The third direction and the fourth direction may be perpendicular or substantially perpendicular to the axial direction, but the embodiments are not limited thereto. Additionally, the height 4023 of the gas outlet hole 3623 may extend in a fifth direction perpendicular to the central axis 4021. In some cases, the fifth direction may extend in the axial direction.

[0296] According to some embodiments, the gas outlet hole 3623 may have a first generally stadium-shaped cross-sectional area at the proximal opening 4017, where the central axes of the semi-circular sides 3623sl and 3623s2 are spaced apart by a distance 3711 and have respective radii 3713, and may have a second generally stadium-shaped cross-sectional opening at the distal opening 4019, where the semi-circular sides 3623s3 and 3623s4 have respective radii 3715. The distance 3711 may be between about 0.05 mm and about 0.1 mm, and the radii 3713 and 3715 may be between about 0.01 mm and about 0.03 mm, but the embodiments are not limited thereto. To this end, the side walls 3901 and 3903 of the gas outlet hole 3623 may extend from the proximal opening 4017 to the distal opening 4019 such that the side wall 3901 extends in a sixth direction inclined to the central axis 4021, and the side wall 3903 extends in a seventh direction inclined to the central axis 4021. The sixth direction may form an angle 3905 with the central axis 4021, and the seventh direction may form an angle 3907 with the central axis 4021. The magnitudes of the angles 3905 and 3907 may be between about 45° and about 75°, and may be equal or substantially equal. Additionally, it should be noted that the width 3803 of the reamer 4003 in the second direction may be less than or equal to the minimum width of the gas outlet hole 3623 in the second direction, and the height 4015 of the reamer 4003 in the first direction may be greater than the height 4023 of the gas outlet hole 3623 in the first direction. In some cases, the height 4023 of the gas outlet hole 3623 may be between about 0.02 mm and about 0.05 mm.

[0297] According to various embodiments, the increased depth of the reamer 4001 compared to the depth 3407 of the reamer 3403 of the insert 3000, the constricting nature of the reamer 4003, and the increased cross-sectional area of the gas outlet hole 3623 compared to the cross-sectional area of the gas outlet hole 3023 of the insert 3000 may at least partially result in a greater pressure drop through the insert 3600 compared to through the insert 3000. For example, assuming gas flow within a slipstream flow regime, the pressure drop through the insert 3600 may be less than or equal to about 850×10 -4 torr, such as about 817×10 -4 torr, while the pressure drop through the insert 3000 may be less than or equal to about 500×10 -4 torr.

[0298] In addition, the configuration of the insert 3600 can be configured to at least partially cause a substantially directed gas flow along a fourth direction from the gas outlet holes 3623. Thus, when one or more of the inserts 3600 are incorporated as part of, for example, the showerhead 107, this directed gas flow from the gas outlet holes 3623 can be used to radially push the purge gas outward from the axis of the showerhead 107 (e.g., the central axis 141) in the region 129. This may prevent process gas from the region 131 from flowing into the gap between the showerhead 107 and the front face 203 of the wafer 105 and / or reaching at least one of the gas distribution ports 207 of the showerhead 107, the insert 3600 incorporated as part of the showerhead 107, and the front face 203 of the wafer 105 or features formed thereon or therein. The showerhead 107 including one or more inserts 3600 can prevent or at least reduce the likelihood of interaction of the process gas with the showerhead 107 and / or back-diffusion into the gas distribution ports 207 of the showerhead 107 by preventing this purge gas from flowing into the region 129.

[0299] Although the gas outlet holes 3623 have been described in connection with a particular geometry, the embodiments are not limited thereto. For example, the gas outlet holes 3623 can be formed as holes having any suitable geometry, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a truncated cone structure hole having at least one of such structures.

[0300] According to various embodiments, the insert 3600 can be formed of any suitable material and in any suitable manner. For example, the insert 3600 can be formed of (or include) one or more ceramic materials, such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, etc. In some cases, the insert 3600 can be formed of a first material and coated with a second material. For example, the insert 3600 can be made of aluminum as the first material and can be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. In various implementations, the insert 3600 can be manufactured additively, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0301] Fig.41 Schematically shown according to some embodiments including Figure 36-40 of the gas distribution port insert Figure 2 partial cross-sectional view of the showerhead.

[0302] Reference Figure 2 and Figure 36-40, the insert 3600 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 3607 of the insert 3600 abuts against the docking surface 265 adjacent to the gas distribution port 207. To this end, the insert 3600 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 3703 of the head portion 3601 of the insert 3600 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 3609 of the insert 3600 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance 4101. To this end, the maximum dimension 3707 of the body portion 3603 of the insert 3600 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surface 3617 of the insert 3600 can be spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 4103. In certain cases, the distances 4101 and 4103 can be equal or substantially equal, but the embodiments are not limited thereto.

[0303] In addition, the total length of the insert 3600 can be configured such that the distal surface 3619 of the insert 3600 extends beyond the second surface 241 of the showerhead 107 into the gap region 4105 between the showerhead 107 and the wafer 105. Although the gap region 4105 can have a height 211 in the axial direction, the protruding nature of the distal surface 3619 can reduce the distance between the distal surface 3619 and the facing surface of the wafer 105 to a height 4107. In certain cases, the height 4107 can be between approximately 0.2 mm and approximately 0.2 mm. This can further prevent process gas from the region 131 from flowing into the gap region 4105 between the showerhead 107 and the front side 203. Moreover, when the insert 3600 is inserted into the gas distribution port 207, the head portion 3601 can be used as a centering mechanism to allow the central axis (e.g., reference axis 3611) of the insert 3600 to coincide (or substantially coincide) with the central axis 257 of the gas distribution port 207.

[0304] Similar to the plugs 300, 700, 1100, 1500, 2000, 2500, and 3000, the formation of the clearance fit described above can increase the distance between the lateral surfaces 3609 and 3617 of the plug 3600 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This can reduce the likelihood of wear between the plug 3600 and the gas distribution port 207, which otherwise may occur due to thermally induced movement of the plug 3600 relative to the gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed through the system 100. Although the movement of the plug 3600 has been described as being caused in relation to thermal effects, it is also contemplated that the movement of the plug 3600 can be additionally or alternatively caused by other factors such as pressure differences, movement of the showerhead 107, etc. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the gap between the plug 3600 and the gas distribution port 207, which otherwise may at least partially cause defects resulting in contaminants being deposited on the front side 203 of the wafer 105 and / or on the structures formed thereon / therein. Also, the centering effect of the head portion 3601 relative to the body portion 3603 can also be used to return the plug 3600 to being concentric (or substantially concentric) with the gas distribution port 207 after movement of the plug 3600. This can help maintain a defined gas flow profile from the showerhead 107. Gas Distribution Port Plug - 9

[0305] Figure 42-45 Schematically depicted in accordance with some embodiments can be various views of a gas distribution port plug that can be incorporated as part of a Figure 2 showerhead. For example, Fig.42 an exploded perspective view of the plug 4200 is depicted, Fig.43 a side view of the plug 4200 is depicted, Fig.44 a top view of the plug 4200 is depicted, and Fig.45 a cross - sectional view of the plug 4200 taken along the section line 45 - 45 is depicted.

[0306] Reference Figure 42-45, the plug 4200 may be similar to the plugs 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600, and thus may include a head portion 4301 and a body portion 4303 that extends axially from (or is connected to) the head portion 4301. This axial direction may extend along a direction opposite to the z-axis direction. The plug 4200 may be formed as an assembly of parts or components that are configured to not only reduce the likelihood of unwanted gas interactions with the gas distribution body (e.g., the gas distribution body 107) and / or back-diffusion into the gas distribution ports (e.g., the gas distribution port 207) of the gas distribution body that at least partially supports the plug 4200 therein, but may also be configured to reduce and / or prevent the airflow from or through the gas distribution ports of the gas distribution body. In some embodiments, different from the plugs 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600, the plug 4200 may not have a gas outlet hole, such that it is constructed to reduce and / or prevent the airflow from or through the gas distribution port 207 in which the plug 4200 is at least partially supported. Additionally, the plug 4200 may include a flange portion 4305 that is connected to (or extends from) the body portion 4303 in the axial direction. As will become more apparent hereinafter, the flange portion 4305 may be configured to cap or otherwise enclose the gas distribution port in which it may be at least partially supported. The head portion 4301, the body portion 4303, and the flange portion 4305 may be formed as a generally circular cylinder, but the embodiments are not limited thereto. For example, each or at least one of the head portion 4301, the body portion 4303, and the flange portion 4305 may be formed to have any suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 4301, the body portion 4303, and the flange portion 4305 will be Figure 42-45 described as having a generally cylindrical configuration, but it should be understood that the surfaces of the shape mentioned may refer to one or more surfaces of another shape.

[0307] According to some embodiments, the components forming the insert 4200 can include a first part (or body) 4201 that is coupled to (e.g., removably coupled to) a second part (or body) 4203. The first part 4201 can include a protrusion 4205 that extends axially (or is connected to) from a head portion 4301 and has a first reamed hole 4207 formed therein. The second part 4203 can include a body 4209 that extends in a direction opposite to the axial direction from a flange portion 4305 at or near the distal end 4211 of the body 4209 (which can also be referred to herein as the distal end 4211 of the body portion 4303), and includes a coupling protrusion 4213 that extends (or is connected to) the body 4209 axially. In some instances, at least a portion of the inner surface 4217 of the first reamed hole 4207 and a corresponding portion of the outer surface 4219 of the coupling protrusion 4213 can each have threads to enable the second part 4203 to be removably coupled to the first part 4201 via thread engagement, such as shown in at least Figures 45-47 as shown, but the embodiments are not limited thereto. For example, other engagement methods and / or mechanisms can be implemented. Depending on the extent to which the coupling protrusion 4213 is received axially within the first reamed hole 4207, a first gap 4701 can be formed between the distal end 4501 of the first part 4201 and the intermediate surface 4503 of the second part 4203, and a second gap 4703 along the axial direction can be formed between the proximal end 4505 of the second part 4203 and the intermediate surface 4507 of the first part 4203. As will become more apparent below, the extent to which the coupling protrusion 4213 is received axially within the first reamed hole 4207 can be variably set to allow the mating surface 4307 of the flange portion 4305 to abut against the second surface 241 of the gas distribution body 213 when the insert 4200 is at least partially supported within the gas distribution port of the gas distribution body 213. In this way, the total length of the insert 4200 can be the length 261 of the second port portion 247 of the gas distribution port of the gas distribution body 213. It is also contemplated that in some implementations, the respective lengths of some or all of the various parts, bodies, protrusions, segments, connection points, reamed holes, and / or the like of the insert 4200 can vary such that when the first part 4201 is engaged with the second part 4203 and at least partially supported within the corresponding gas distribution port (e.g., gas distribution port 207), only the first gap (e.g., first gap 4701) can be formed, only the second gap (e.g., second gap 4703) can be formed, both the first gap and the second gap can be formed, or no gap along the axial direction can be formed between the first part 4201 and the second part 4203 (e.g., Fig.45 and 46as shown). Additionally, it is contemplated that at least one of the first component 4201 and the second component 4203 may alternatively be configured. For example, the first component 4201 may include a head portion 4301 having a first reaming 4207 formed therein, and the second component 4203 may include a body 4209 extending (or connected to a flange portion 4305) from a flange portion 4305 at or near a distal end 4211 of a body portion 4303 in a direction opposite to the axial direction, and include a coupling protrusion 4213 extending (or connected to the body 4209) from the body 4209 in the axial direction and configured to dock with the first reaming 4207. In this sense, the plug 4200 may be configured to be similar to the plug 4800, which will be described later in connection with at least Figure 48-56 be described.

[0308] The head portion 4301 may have a length 4309 in the axial direction and a maximum dimension (e.g., diameter) 4311 in a second direction, such as transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend in the y-axis direction or in a plane parallel (or substantially parallel) to the xy plane. The body portion 4303 may have a length 4313 in the axial direction and a maximum dimension (e.g., diameter) 4315 in the second direction. As previously described, depending on the extent to which the coupling protrusion 4213 is received in the first reaming 4207, the length 4313 may increase (or otherwise lengthen) by an amount equal to the length 4509 that is not received in the first reaming 4207. The length 4509 corresponds to the length of the coupling protrusion 4213 in the axial direction. The flange portion 4305 may have a length 4317 in the axial direction and a maximum dimension (e.g., diameter) 4319 in the second direction. In some embodiments, the maximum dimension 4311 may be between about 5.9 mm and about 7.3 mm, the maximum dimension 4315 may be between about 4.9 mm and 6.5 mm, and the maximum dimension 4319 may be between about 7.5 mm and about 9.5 mm. Additionally, the maximum dimension 4311 may be greater than the maximum dimension 4315, such as being about 15% to about 25% greater than the maximum dimension 4315, but the embodiments are not limited thereto. The maximum dimension 4319 may be greater than each of the maximum dimensions 4311 and 4315. In certain cases, the maximum dimension 4319 may be about 40% to about 60% greater than the maximum dimension 4315, but the embodiments are not limited thereto. The length 4309 may be between about 1.5 mm and about 3.5 mm and the length 4317 may be between about 0.2 mm and about 0.6 mm. In certain cases, the length 4313 may vary between about 11 mm and about 18 mm, depending on the extent to which the coupling protrusion 4213 is received in the first reaming 4207. The length 4313 may be greater than the length 4309, such as being about 500% to about 750% greater than the length 4309, but the embodiments are not limited thereto. In this way, the total length of the plug 4200 may be between about 12 mm and about 22 mm, but the embodiments are not limited thereto.

[0309] The head portion 4301 may include a first surface 4221, an intermediate surface 4223 that is opposite or spaced apart from the first surface 4221 in the axial direction, and a lateral surface 4225 between the intermediate surface 4223 and the first surface 4221. In this way, the head portion 4301 may extend along a reference axis 4227, which may be not only the central axis of the plug 4200 but also the central axis of the head portion 4301. The protrusion 4205 may be connected to or extend axially from the intermediate surface 4223 (or the proximal end 4215 of the body portion 4303) and terminate at the distal end (or surface) 4501 of the first component 4201. The lateral surface 4229 of the protrusion 4205 may connect the distal end 4501 and the intermediate surface 4223. In this way, the head portion 4301 and the protrusion 4205 may together form the first component 4201. The body portion 4303 may include a proximal end 4215, a distal end 4211 that is opposite or spaced apart from the proximal end 4215 in the axial direction, a lateral surface 4229 between the proximal end 4215 and the distal end 4501 of the first component 4201, and a lateral surface 4231 between the intermediate surface 4503 and the distal end 4211 of the body portion 4303. Thus, the proximal end 4215 may extend from the intermediate surface 4223 and may thus be adjacent to the intermediate surface 4223. The distal end 4211 of the body portion 4303 may extend from the mating surface 4307 of the flange portion 4305 and may thus be adjacent to the mating surface 4307 of the flange portion 4305. Therefore, the body portion 4303 may also extend along the reference axis 4227, which may also be the central axis of the body portion 4303. The flange portion 4305 may include a mating surface 4307, a distal surface 4233 that is opposite or spaced apart from the mating surface 4307 in the axial direction, and a lateral surface 4235 between the distal surface 4233 and the mating surface 4307. Like the head portion 4301 and the body portion 4303, the flange portion 4305 may extend along the reference axis 4227, which may be the central axis of the flange portion 4305.

[0310] According to some implementations, the first component 4201 may include a second reaming 4511 that extends from a first surface 4221 of the first component 4201 to an intermediate surface 4507 along a reference axis 4227, and the reference axis 4227 may be the central axis of the second reaming 4511. Accordingly, the second reaming 4511 may form the central reaming of the plug 4200, but the implementation is not limited thereto. The second reaming 4511 may be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the second reaming 4511 may be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration of at least one of such configurations. For convenience, the second reaming 4511 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned may refer to one or more surfaces of another shape or configuration of the second reaming 4511. In some cases, the second reaming 4511 may be fluidly connected to the first reaming 4207, which may extend from the intermediate surface 4507 to the distal end 4501 along the reference axis 4227. Similar to the second reaming 4511, the first reaming 4207 may be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. In some cases, the maximum dimension (e.g., diameter) 4513 of the second reaming 4511 in a second direction may be less than the maximum dimension (e.g., diameter) 4515 of the second reaming 4511 in the second direction. In some implementations, one or more reamings (e.g., the first reaming 4507 and the second reaming 4511) of the first component 4201 may be stepped or tapered such that one or more reamings may have more than one diameter or a varying diameter.

[0311] In some cases, the head portion 4301 may include one or more recessed portions 4237 in the first component 4201. For convenience, it will be assumed that the head portion 4301 includes a plurality of recessed portions 4237, such as two recessed portions 4237, for example, as Fig.44 and Fig.45 shown. The recessed portion 4237 may have a depth 4321 in the axial direction and may longitudinally extend in a third direction transverse to the axial direction. For example, the third direction may be in the x-axis direction or extend along the x-axis direction. In some implementations, the recessed portion 4237 may radially extend from the second reaming 4511 along the reference axis 4401 to a lateral surface 4225 of the head portion 4301, and may thus be fluidly connected to the second reaming 4511 within the head portion 4301. Although Fig.44Depicts recessed portions 4237 aligned with each other along reference axis 4401, but the embodiments are not limited thereto. For example, one or more recessed portions 4237 (or at least one other recessed portion) may be aligned with a reference axis 4403 that extends, for example, transverse to reference axis 4401. The width 4405 of the recessed portion 4237 may extend in a second direction, for example. In various implementations, the depth 4321 and width 4405 of the recessed portion 4237 may be shaped and / or sized to accommodate one or more blades of a tool, for example, that can be used to couple (e.g., threadably connect) the first component 4201 to the second component 4203 as part of an operation of installing the insert 4200 in a gas distribution port (e.g., gas distribution port 207).

[0312] According to various embodiments, the insert 4200 (and, thus, the first component 4201 and the second component 4203 of the insert 4200) may be formed of any suitable material and in any suitable manner. For example, the insert 4200 may be formed of one or more ceramic materials (or include one or more ceramic materials), such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 4200 may be formed of a first material and coated with a second material. For example, the insert 4200 may be made of aluminum as the first material and may be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. It is also contemplated that the first component 4201 of the insert 4200 may be formed of the same material as the second component 4203 or may be formed of at least one material different from the second component 4203. In various instances, the insert 4200 may be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0313] Fig.46 and Fig.47 Schematically shows, according to some embodiments, a partial cross-sectional view of a showerhead that includes Figure 42-45 a gas distribution port insert of Figure 2 Note that Fig.47 shows an example where the length 261_1 of the gas distribution port 207 is greater than the length 261 as shown Fig.46 therein.

[0314] Reference Figure 2 and Figure 42-47, the plug 4200 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 4223 of the first component 4201 abuts against the docking surface 265 of the gas distribution port 207. To this end, the first component 4201 and the second component 4203 of the plug 4200 can be configured to form a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 4311 of the head portion 4301 of the plug 4200 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 4225 of the head portion 4301 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance (or clearance) 4601. To this end, the maximum dimension 4315 of the body portion 4303 of the plug 4200 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surfaces 4229 and 4231 of the first component 4201 and the second component 4203 of the plug 4200 are spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 4603. In certain embodiments, the distance 4603 may not be constant and may vary along, for example, the reference axis 257. For example, the outer diameter of the lateral surface 4229 of the first component 4201 may be different from the outer diameter of the lateral surface 4231 of the second component 4203, the outer diameter of the lateral surface 4229 or the lateral surface 4231 may not be constant and thus may vary along the reference axis 257, and / or the maximum dimension (e.g., inner diameter) of the second port portion 247 may not be constant and thus may vary along the reference axis 257. The distance 4603 can be defined to accommodate one or more characteristics of the various components described herein and / or one or more materials for their manufacturability, such as taking into account the coefficient of thermal expansion and mismatch, mechanical machinability, manufacturing tolerances, and so on. In some cases, the distances 4601 and 4603 may be equal or substantially equal, but the embodiments are not limited thereto. According to some implementations, the relative spacing between the plug 4200 and the gas distribution port 207 can prevent or at least reduce the likelihood of damage to the plug 4200 and / or the gas distribution body 213 that might otherwise occur due to a mismatch in the coefficient of thermal expansion (CTE) between the plug 4200 and the gas distribution body 213.

[0315] According to various embodiments, the total length of the plug 4200 can be adaptively configured for the gas distribution port 207 as follows: when the plug 4200 is at least partially supported in the gas distribution port 207, the mating surface 4307 of the flange portion 4305 abuts against the second surface 241 of the gas distribution body 213 and the intermediate surface 4223 abuts against the docking surface 265 of the gas distribution port 207. For example, as Fig.46 and Fig.47As shown, the second port portion 247 of the gas distribution port 207 may have a length 261 in one implementation and a length 261_1 in another implementation. Note that the second length 261_1 may be greater than the length 261 by a distance 4701 in the axial direction. Thus, during installation, the second component 4203 of the plug 4200 may be inserted into the opening 205 of the gas distribution port 207 until the mating surface 4307 abuts against the second surface 241. The first component 4201 may be threadedly coupled to the coupling protrusion 4213 until the intermediate surface 4223 abuts against the docking surface 265 or 265_1. Depending on the length of the second port portion 247, the degree to which the coupling protrusion 4213 is received in the first reaming 4207 in the axial direction when the first component 4201 is detachably coupled to the second component 4203 may vary, for example, from Fig.46 and 47 as illustrated by the comparison. Thus, in some cases, the proximal end 4505 of the second component 4203 may abut against the intermediate surface 4507 of the first component 4203, and / or the intermediate surface 4503 of the second component 4203 may abut against the distal end 4501 of the first component 4201, as depicted in Fig.46 . In other cases, a first gap 4701 may be formed between the distal end 4501 of the first component 4201 and the intermediate surface 4503 of the second component 4203, and / or a second gap 4703 may be formed between the proximal end 4505 of the second component 4203 and the intermediate surface 4507 of the first component 4203, as shown in Fig.47 . However, in either case, at least the mating surface 4307 of the flange portion 4305 may be manufactured to abut against the second surface 241 of the gas distribution body 213. However, it is contemplated that in some embodiments, a gap may be formed between the mating surface 4307 of the flange portion 4305 and the second surface 241 of the gas distribution body 213. In such a case, the amount of the gap may be small enough to prevent gas (e.g., process gas) from flowing back into one or more portions of the gas distribution port 207.

[0316] In some implementations, the distal surface 4233 of the plug 4200 can extend axially beyond the second surface 241 of the showerhead 107 into the gap region 4705 between the showerhead 107 and the wafer 105 by a distance 4707. The distance 4707 can be determined to accommodate the thickness of the wafer 105 (including any structures or films formed or deposited thereon) and the warping or curvature of the wafer 105 caused at least in part by, for example, tensile and / or compressive stresses of a film formed on the wafer 105. For example, the distance 4707 can be between about 0.2 mm and about 0.8 mm, such as about 0.5 mm. Thus, while the gap region 4705 can have a height 211 in the axial direction, the protruding nature of the distal surface 4233 can reduce the distance between the distal surface 4233 and the facing surface of the wafer 105 to a height 4709. In some cases, the height 4709 can be between about 0.2 mm and about 0.8 mm. This can further prevent process gases from the region 131 from flowing into the gap region 4709 between the showerhead 107 and the front side 203 of the wafer 105, and plasma formation or distribution therein. Moreover, when the plug 4200 is at least partially installed in the gas distribution port 207, the head portion 4301 can serve as a centering mechanism to allow the central axis of the plug 4200 (e.g., the reference axis 4227) to coincide (or be substantially coincident) with the central axis 257 of the gas distribution port 207. For example, the first component 4201 (and thus the head portion 4301) can be at least partially supported in at least the first port portion 245 of the gas distribution port 207 before the second component 4203 is at least partially supported in the second port portion 247 of the gas distribution port 207. In some instances, the head portion 4301 can be sized to be larger than the body portion 4303 such that the distance 4601 between the lateral surface 4225 of the head portion 4301 and the inner surface 251 of the gas distribution port 207 is less than the distance 4603 between the lateral surfaces 4229 and 4231 of the first and second components 4201 and 4203 of the plug 4200 and the inner surface 259 of the gas distribution port 207. Thus, when the second component 4203 is inserted into the second port portion 247 and coupled to the first component 4201, at least because the first component 4201 (and thus the head portion 4301) may already be centered within the first port portion 245, the second component 4203 (and thus the body portion 4303) can be more easily centered within the second port portion 247. Additionally, the distance 4601 between the lateral surface 4225 of the head portion 4301 and the inner surface 251 of the gas distribution port 207 can be relatively small such that the likelihood of the body portion 4303 becoming non-centered relative to the second port portion 247 can be reduced. This is also the case for, for example, thermally induced movement (or other displacements) of the plug 4200 relative to the gas distribution port 207.For example, since the distance 4601 can be relatively smaller than the distance 4603, the possibility that the main body portion 4303 becomes non-centered with respect to the second port portion 247 can be reduced because the movement of the main body portion 4303 may be restricted by the possible amount of movement of the head portion 4301.

[0317] Similar to the plugs 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600, the presence of the clearance fit described above can increase the distance between the lateral surfaces 4225, 4229, and 4231 of the plug 3600 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This can reduce the likelihood of wear between the plug 4200 and the gas distribution port 207, which otherwise could occur due to thermally induced movement or expansion of the plug 4200 relative to the gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed through the system 100. Although the movement of the plug 4200 has been described as being caused in relation to thermal effects, it is also anticipated that the movement of the plug 4200 can be additionally or alternatively caused by other factors, such as pressure differences, movement of the showerhead 107, and the like. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the gap 4605 between the plug 4200 and the gas distribution port 207, which otherwise could at least in part result in defects causing contaminants to deposit on the front side 203 of the wafer 105 and / or on the structures formed thereon / therein. Also, the centering effect of the head portion 4301 relative to the body portion 4303 can also be used to return the plug 4200 to a concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the plug 4200. However, assuming that the plug 4200 can be configured to prevent air flow from exiting and flowing through the gas distribution port 207, air flow may not be provided in the region corresponding to the gap 4605, as described in connection with at least the plugs 1500, 2000, and 2500, which can otherwise prevent or at least reduce the likelihood of back-diffusion into the gas distribution port 207 and thus into the showerhead 107. Accordingly, the flange portion 4305 can project laterally outward (e.g., radially outward) from the lateral surface 4231 of the body portion 4303 and beyond the inner surface 259 of the gas distribution port 207 by a distance 4607 to effectively cap or otherwise enclose the flow path to / from the region corresponding to the gap 4605. In some cases, the distance 4607 can be greater than 0 mm and less than or equal to about 2 mm, but the embodiments are not limited thereto. For example, the size of the distance 4607 can be set with a valve sufficient to prevent gas from flowing into the gap 4605, which can depend on one or more process conditions, such as pressure, temperature, flow rate, and the like. Accordingly, the flange portion 4305 can be configured to prevent or at least reduce the likelihood of back-diffusion into the gas distribution port 207 and thereby into the showerhead 107. To this end, the enclosure of the aforementioned flow path relative to the gap 4605 can also prevent or at least reduce the likelihood of particles shedding from the gap 4605 when particle generation occurs in the region corresponding to the gap 4605. Gas Distribution Port Plug - 10

[0318] Figure 48-53 Various views of a gas distribution port insert that can be incorporated as part of a spray head are schematically depicted according to some embodiments. For example, Figure 2 a perspective view of the insert 4800 is depicted, Fig.48 an exploded perspective view of the insert 4800 is depicted, Fig.49 a side view of the insert 4800 is depicted, Fig.50 a top view and a bottom view of the insert 4800 are depicted respectively, and Fig.51 and 52 a cross-sectional view of the insert 4800 taken along section line 53-53 is depicted. Fig.53

[0319] Figure 48-53 Referring to Figure 48-53 , the insert 4800 can be similar to the inserts 300, 700, 1100, 1500, 2000, 2500, 3000, and 3600, and thus can include a head portion 4801 and a body portion 4803 that extends axially (or is connected to the head portion 4801) from the head portion 4801. This axial direction can extend along a direction opposite to the z-axis direction. However, the insert 4800 can be formed as an assembly of multiple parts or components. For example, the head portion 4801 can be formed as a first part or component that is coupled (e.g., removably coupled) to the body portion 4803, and the body portion 4803 can be formed as a second part or component. In addition, the insert 4800 can include a flange portion 4805, which can be configured to be similar to the flange portion 4305 of the insert 4200. For example, the flange portion 4805 can extend (or be connected to the body portion 4803) axially from the body portion 4803, and as will become more apparent hereinafter, can be configured to cap or otherwise enclose a gas distribution port in which the insert 4800 can be at least partially supported. In various implementations, the head portion 4801, the body portion 4803, and the flange portion 4805 can be formed as a generally circular cylinder, but the embodiments are not limited thereto. For example, at least one of the head portion 4801, the body portion 4803, and the flange portion 4805 can be formed to have any other suitable geometric configuration, such as a generally conical body, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum of at least one of such configurations. For convenience, the head portion 4801, the body portion 4803, and the flange portion 4805 will be described as having a generally cylindrical configuration in connection with Figure 48-53 but it should be understood that the surfaces of the shape mentioned can refer to one or more surfaces of another shape or configuration.

[0320] As described above, the components forming the plug 4800 can include a head portion 4801 coupled (e.g., removably coupled) to the body portion 4803. In some cases, the head portion 4801 can include an opening 4901 that can be configured to receive and engage at least a portion of a first segment (or coupling protrusion) 4903 of the body portion 4803. For example, the inner surface 4905 of the opening 4901 and the lateral surface 4907 of the coupling protrusion 4903 can each have threads to allow the head portion 4801 to be removably coupled to the body portion 4803 by thread engagement, e.g., at least in Fig.48 , 50 and Fig.53 as shown, but the embodiments are not limited thereto. For example, any other engagement method and / or mechanism can be implemented. For example, the body portion 4803 can have an opening configured to receive a coupling protrusion extending from the head portion 4801. It is also contemplated that any other type of connection between the head portion 4801 and the body portion 4803 can be utilized, such as a bayonet-type engagement. However, as shown, the thread engagement between the head portion 4801 and the body portion 4803 can allow the plug 4800 to adapt to gas distribution ports having different heights in the axial direction. For example, depending on the extent to which the coupling protrusion 4903 is received in the opening 4901, different lengths of gaps 5001 in the axial direction can be formed between the intermediate surface 4909 of the head portion 4801 and the intermediate surface 4911 of the body portion 4803. As will be more apparent below, the extent to which the coupling protrusion 4903 is received in the opening 4901 can be variably set to allow the mating surface 4913 of the flange portion 4805 to abut the second surface 241 of the gas distribution body 213 when the plug 4800 is at least partially supported on the gas distribution port of the gas distribution body 213. In this way, the total length of the plug 4800 can be adapted to the length 261 of the second port portion 247 of the gas distribution port. It is also contemplated that in some implementations, the respective lengths of some or all of the various components, bodies, protrusions, segments, and / or the like of the plug 4800 can vary such that when the head portion 4801 and the body portion 4803 are engaged and at least partially supported in the corresponding gas distribution port (e.g., gas distribution port 207), a gap (e.g., gap 5001) may or may not be formed. In certain cases, at least one other gap can be formed between the head portion 4801 and the body portion 4803 in addition to or independent of the gap 5001.

[0321] According to some embodiments, the head portion 4801 may include a first surface 4811, an intermediate (or second) surface 4909 that is opposite or spaced from the first surface 4811 in the axial direction, and at least one lateral surface 4813 between the intermediate surface 4909 and the first surface 4811. In this way, the head portion 4801 may extend along a reference axis 4815, which may be not only the central axis of the plug 4800 but also the central axis of the head portion 4801. The opening 4901 in the head portion 4801 may extend axially from the first surface 4811 through the intermediate surface 4909 and may be concentric (substantially concentric) with the reference axis 4815 in some instances. The main segment 5007 of the body portion 4803 may include a proximal end 4817, a distal end 4819 that is opposite or spaced from the proximal end 4817 in the axial direction, and at least one lateral surface 4821 between the proximal end 4817 and the distal end 4819. In this way, the proximal end 4817 may be arranged adjacent to the intermediate surface 4909 of the head portion 4801. The coupling protrusion 4903 of the body portion 4803 may extend (or be connected to) from the intermediate surface 4911 of the main segment 5007 in a direction opposite to the axial direction and may thus have a proximal end (or surface) 4915, a distal end 4917 that is opposite or spaced from the proximal end 4915 in the axial direction, and at least one lateral surface 4907 between the distal end 4917 and the proximal end 4915. In this way, the distal end 4917 of the coupling protrusion 4903 may be arranged adjacent to the proximal end 4817 of the main segment 5007. The distal end 4819 of the main segment 5007 may extend from the mating surface 4913 of the flange portion 4805 and may thus be adjacent to the mating surface 4913 of the flange portion 4805. Accordingly, the body portion 4803 may also extend along the reference axis 4815, which may also be the central axis of the body portion 4803. The flange portion 4805 may include a mating surface 4913, a distal surface 4823 that is opposite or spaced from the mating surface 4913 in the axial direction, and at least one lateral surface 4825 between the distal surface 4823 and the mating surface 4913. Like the head portion 4801 and the body portion 4803, the flange portion 4805 may extend along the reference axis 4815, which may be the central axis of the flange portion 4805.

[0322] The head portion 4801 may have a length 5003 in the axial direction and a maximum dimension (e.g., diameter) 4905 in a second direction, such as transverse to the axial direction. For example, the second direction may be perpendicular (or substantially perpendicular) to the axial direction and may thus extend in the y-axis direction or in a plane parallel (or substantially parallel) to the xy plane. The main segment 5007 of the body portion 4903 may have a length 5009 in the axial direction and a maximum dimension (e.g., diameter) 5011 in the second direction. The coupling protrusion 4903 of the body portion 4803 may have a length 5301 in the axial direction and a maximum dimension (e.g., diameter) 5303 in the second direction. The flange portion 4805 of the body portion 4803 may have a length 5013 in the axial direction and a maximum dimension (e.g., diameter) 5015 in the second direction. Thus, depending on the extent to which the coupling protrusion 4903 is received in the opening 4901 in the axial direction, the length of the body portion 4803 behind the intermediate surface 4909 of the head portion 4801 may be increased (or otherwise lengthened) by an amount (e.g., amount 5017) of the coupling protrusion 4903 that is not received in the opening 4901 up to the length 5301. In some embodiments, the maximum dimension 5005 may be between about 5.9 mm and about 7.3 mm, the maximum dimension 5011 may be between about 4.9 mm and 6.5 mm, and the maximum dimension 5015 may be between about 5.1 mm and about 9.5 mm. In this way, the maximum dimension 5005 may be greater than the maximum dimension 5011, e.g., about 15% to about 25% greater than the maximum dimension 5011, but the embodiments are not limited thereto. The maximum dimension 5019 may be greater than each of the maximum dimensions 5005 and 5011. In some cases, the maximum dimension 5015 may be about 4% to about 60% greater than the maximum dimension 5011, but the embodiments are not limited thereto. The length 5003 may be between about 1.5 mm and about 3.5 mm, and the length 5013 may be between about 0.2 mm and about 0.6 mm. In some cases, the length of the body portion 4803 behind the intermediate surface 4909 may vary between about 11 mm and about 18 mm, depending on the extent to which the coupling protrusion 4903 is received in the opening 4901. In this way, the length of the body portion 4803 behind the intermediate surface 4909 may be greater than the length 5003, e.g., about 500% to about 750% greater than the length 5003, but the embodiments are not limited thereto. Thus, the total length of the plug 4800 may be between about 12 mm and about 22 mm, but the embodiments are not limited thereto.

[0323] In various implementations, the body portion 4803 of the plug 4800 can include a reamer 4919 extending along a reference axis 4815 between a proximal end 4915 of the coupling protrusion 4903 and a distal end 4819 of the main segment 5007, and the reference axis 4815 can be the central axis of the reamer 4919. Thus, the reamer 4919 can form a central reamer of the plug 4800, but the implementation is not limited thereto. The reamer 4919 can be formed as a hole having a generally circular cylindrical configuration, but the implementation is not limited thereto. For example, the reamer 4919 can have a uniform cross-section along the axial direction, or can have one or more varying cross-sections along the axial direction (e.g., different shapes and / or different dimensions, such as diameter). Additionally, the reamer 4919 can be formed as a hole having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a hole having a frustum configuration with at least one of such configurations. For convenience, the reamer 4919 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces of such a shape mentioned can refer to one or more surfaces of another shape or configuration of the reamer 4919.

[0324] As Fig.53As shown, the reaming 4919 can terminate at the distal surface 5305, which can be offset from the distal surface 4823 of the flange portion 4805 in a first direction (e.g., the z-axis direction), such that the reaming 4919 extends through the coupling protrusion 4903 and partially through the main segment 5007 of the body portion 4803. In some implementations, the reaming 4919 extends partially through the body portion 4803 and terminates in a transition region before the flange portion 4805. Thus, the reaming 4919 may not extend into the flange portion 4905, but the embodiments are not limited thereto. Thus, the reaming 4919 may have a depth 5307 in, for example, the axial direction, and a maximum dimension (e.g., diameter) 5309 in, for example, a second direction. For example, the depth 5307 may be between about 2.2 mm and about 2.7 mm, and the maximum dimension 5309 may be between about 12 mm and about 16 mm (and at least less than each of the dimensions 5005, 5011, and 5303). Depending on the geometry of the reaming 4919, the maximum dimension 5309 may be the width of the reaming 4919. The body portion 4803 may also include a plurality of gas outlet holes 4827, which are fluidly connected to the reaming 4919 within the plug 4800. Although a total of seven gas outlet holes 4827 are depicted, the plug 4800 may include any suitable number of gas outlet holes 4827. In some cases, the gas outlet holes 4827 may connect the distal surface 4823 and the distal surface 5305 to allow one or more gases to be input at the gas inlet into the reaming 4919 to flow through the reaming 4919 and the gas outlet holes 4827, and thus output from the distal surface 4823. Depending on the extent to which the coupling protrusion 4903 is received in the opening 4901 in the axial direction, one or both of the first surface 4811 and the proximal end 4915 may form the gas inlet or gas inlet surface of the plug 4800. Herein, a "gas inlet" or "gas inlet surface" may be considered as at least one first opening into the plug 4800 or at least one surface of the plug 4800 including the at least one first opening, which is the place where gas is first introduced from the inflation portion (e.g., inflation portion 237) of the gas distribution body (e.g., gas distribution body 200) when the gas flows through the inflation portion 237 and is to be received in, for example, the reaming 4919 of the plug 4800. For example, the coupling protrusion 4903 may be received in the opening 4901 such that the first surface 4811 and the proximal end 4915 are coplanar with each other, and thus both the first surface 4811 and the proximal end 4915 may form the gas inlet / gas inlet surface of the plug 4800. In some cases, the coupling protrusion 4903 may be received in the opening 4901 such that the proximal end 4915 is recessed below the first surface 4811, and thus, the first surface 4811 may form the gas inlet / gas inlet surface of the plug 4800.As another example, the coupling projection 4903 can be received in the opening 4901 such that the proximal end 4915 projects beyond the first surface 4811, and thus, the proximal end 4915 can form the gas inlet / gas inlet surface of the insert 4800.

[0325] Similar to the countersink 4919, the gas outlet holes 4827 can be formed as holes having a generally cylindrical configuration, but the embodiments are not limited thereto. For example, one or more of the gas outlet holes 4827 can be formed as holes having any suitable geometric configuration, such as a generally conical hole, a generally triangular prism, a generally quadrilateral prism, a generally pentagonal prism, a generally hexagonal prism, etc., or a frustum configuration of a hole having at least one of such configurations. For convenience, the gas outlet holes 4827 will be described as having a generally cylindrical configuration, but it should be understood that the surfaces (e.g., inner surfaces) of the shape mentioned can refer to one or more surfaces of another shape or configuration. In either case, each of the gas outlet holes 4827 can have a corresponding central axis and a maximum dimension (e.g., diameter) in a plane perpendicular to its corresponding central axis.

[0326] For example, the respective gas outlet holes 4827 can have corresponding central axes, such as central axis 5311, and corresponding maximum dimensions (e.g., diameter), such as maximum dimension 5313. The central axis of the gas outlet hole 4827 (e.g., central axis 5311) can extend outwardly from the reference axis 4815 and thus form a corresponding inclination angle (or angles), such as angle 5315, with the reference axis 4815. In some embodiments, the angle 5315 can be between about 15° and about 75°, such as between about 30° and about 60°, for example between about 40° and about 50°, for example about 45°. This angle of the gas outlet hole 4827 relative to the reference axis 4815 can not only help to disperse the output of the purge gas from the insert 4800, but also prevent process gas from flowing back into the insert 4800 and / or the showerhead 107, which otherwise may deteriorate the insert 4800 and / or the showerhead 107. For this purpose, the gas flow from the gas outlet holes 4827 can also prevent or at least reduce the possibility of material deposition between the insert 4800 and the inner surface 259 of the gas distribution port 207, and / or reduce the possibility of material shedding and / or particle formation, which may cause defects resulting in contaminants depositing on the front side 203 of the wafer 105 or on the structures formed thereon / therein. Additionally, as will be described below with at least Fig.62 and 63It will become more apparent that the angle of the gas outlet holes 4827 can help to minimize or at least reduce the magnitude of the component (e.g., the vertical or perpendicular component) of the average velocity of the gas flow relative to the chamber components (such as the base, the showerhead base, and / or the like) facing the gas distribution body including one or more of the inserts 4800, to help prevent or at least reduce the occurrence of, for example, undesirable defects. Similarly, a more detailed discussion of these effects will be provided later. In some cases, the angle of the gas outlet holes 4827 relative to the reference axis 4815 can seek a compromise between the performance of the insert 4800 during one or more wafer processing stages and the performance of the insert 4800 during one or more cleaning operations. As will become more apparent below, the configuration of the flange portion 4805 can also contribute to one or more of these effects. Additionally, it should be noted that the gas outlet holes 4827 can be arranged around the reference axis 4815 at an angular pitch 5201. Assuming that the insert 4800 has "n" gas outlet holes 4827 (where "n" is an integer greater than or equal to 2), the angular pitch 5201 can be equal to (or substantially equal to) 360° divided by "n". For example, the insert 4800 is shown as including seven gas outlet holes 1527, such that the angular pitch 5201 can be approximately 51.4°, but the embodiments are not limited thereto.

[0327] In some implementations, the corresponding maximum size (e.g., the maximum size 5313) of the corresponding gas outlet holes 4827 can be between about 0.8 mm and about 1.2 mm, such as between about 0.9 mm and about 1.1 mm, for example about 1 mm. The corresponding length (or depth) of the gas outlet holes 4827 can be less than the depth 5307 of the countersink 4919. Relative to the sizing of the inserts 300, 700, and 4800, the gas outlet holes 4827 can have shorter lengths within the insert 4800 compared to the gas outlet holes 321 within the insert 300 and the gas outlet holes 721 within the insert 700, respectively. The increase in the depth of the countersink 4919, the increase in the maximum size 5307 of the countersink 4919, and the decrease in the length of the gas outlet holes 4827 can at least partially result in a smaller pressure drop between the gas inlet surface (e.g., the proximal end 4915) and the distal surface 4823 of the insert 4800 associated with the gas flow through the insert 4800 under the conditions of the slipstream state. With this increase in the downstream pressure, the throughput (or average velocity) of the gas passing through the insert 4800 can be less than that passing through the inserts 300, 700, and 1100. In some cases, assuming that the gas flow is in the slipstream state, the pressure drop through the insert 4800 can be less than or equal to about 500×10 -4 Torr, such as less than or equal to about 375×10 -4 Torr, for example about 340×10 -4 Torr.

[0328] In some cases, the head portion 4801 may include one or more recessed portions 4829 in the first surface 4811. For convenience, it will be assumed that the head portion 4801 includes a plurality of recessed portions 4829, such as two recessed portions 4829, for example, as shown in Fig.49 shown. The recessed portion 4829 may have a depth 5019 in the axial direction and may extend longitudinally in a third direction transverse to the axial direction. For example, the third direction may be in the x-axis direction or extend along the x-axis direction. In some instances, the recessed portion 4829 may extend radially from the opening 4901 along the reference axis 5101 to the lateral surface 4813 of the head portion 4801 and may thereby be in fluid communication with the opening 4901 within the head portion 4801. Although Fig.51 depicts recessed portions 4827 aligned with each other along the reference axis 5101, the embodiments are not limited thereto. For example, one or more recessed portions 4827 (or at least one other recessed portion) may be aligned with a reference axis 5103 that extends, for example, transverse to the reference axis 5101. The width 5105 of the recessed portion 4827 may extend in a second direction, for example. In various implementations, the depth 5019 and width 5105 of the recessed portion 4827 may be shaped and / or sized to accommodate one or more blades of a tool, which may be used to couple (e.g., threadably connect) the head portion 4801 to the body portion 4803 as part of the operation of installing the insert 4800 in a gas distribution port (e.g., gas distribution port 207).

[0329] According to various embodiments, the insert 4800 (and, thus, the head of the insert 4800 as well as the body portions 4801 and 4803) may be formed of any suitable material and in any suitable manner. For example, the insert 4800 may be formed of one or more ceramic materials (or include one or more ceramic materials), such as aluminum oxide, aluminum nitride, ruthenium oxide, titanium nitride, aluminum titanium nitride, titanium carbide, and the like. In some cases, the insert 4800 may be formed of a first material and coated with a second material. For example, the insert 4800 may be made of aluminum as the first material and may be coated with aluminum fluoride (AlF3) as the second material, but the embodiments are not limited thereto. It is also contemplated that the head portion 4801 may be formed of the same material as the body portion 4803 or of at least one material different from the body portion 4803. In various instances, the components of the insert 4800, such as the head and body portions 4801 and 4803, may be additively manufactured, stamped, injection molded, compression molded, cast, machined, and / or the like.

[0330] Fig.54 Schematically shown in accordance with some embodiments including Figure 48-53 of the gas distribution port plug Figure 2 Partial cross-sectional view of the nozzle head Fig.55 Schematically shows, according to some embodiments, including Figure 48-53 a modified version of the gas distribution port plug Figure 2 Partial cross-sectional view of the nozzle head

[0331] Refer to Figure 2 and Figure 48-55 , the plug 4800 can be at least partially supported in the gas distribution port 207 such that the intermediate surface 4909 of the head portion 4801 abuts against the docking surface 265 of the gas distribution port 207 and the mating surface 4913 of the flange portion 4805 abuts against the second surface 241 of the gas distributor 107. To this end, the head portion 4801 and the body portion 4803 (except for the flange portion 4805) of the plug 4800 can be configured such that there is a clearance fit with the gas distribution port 207. For example, in some cases, the maximum dimension 5005 of the head portion 4801 of the plug 4800 can be approximately 1% to approximately 10% smaller than the maximum dimension 255 of the first port portion 245 of the gas distribution port 207, such that the lateral surface 4813 of the head portion 4801 is spaced apart from the inner surface 251 of the gas distribution port 207 by a distance (or gap) 5401. To this end, the maximum dimension 5011 of the main segment 5007 of the body portion 4803 of the plug 4800 can be approximately 1% to approximately 10% smaller than the maximum dimension 263 of the second port portion 247 of the gas distribution port 207, such that the lateral surface 4821 of the main segment 5007 is spaced apart from the inner surface 259 of the gas distribution port 207 by a distance 5403. In some embodiments, the distance 5403 may not be constant and may vary along, for example, the reference axis 257. For example, the outer diameter of the lateral surface 4821 may not be constant and may thus vary along the reference axis 257, and / or the maximum dimension (e.g., inner diameter) of the second port portion 247 may not be constant and may thus vary along the reference axis 257. The distance 5403 can be defined to accommodate one or more properties of one or more materials used for the various components described herein and / or for their manufacturability, such as taking into account the coefficient of thermal expansion and mismatch, mechanical machinability, manufacturing tolerances, etc. In some cases, the distances 5401 and 5403 can be equal or substantially equal, but the embodiments are not limited thereto. According to some implementations, the relative spacing between the plug 4800 and the gas distribution port 207 can prevent or at least reduce the likelihood of damage to the plug 4800 and / or the gas distribution body 213 that might otherwise occur due to a mismatch in the coefficient of thermal expansion (CTE) between the plug 4800 and the gas distribution body 213.

[0332] According to various embodiments and similar to the plug 4200, the overall length of the plug 4800 can be adaptively configured for the gas distribution port 207 in the following manner: when the plug 4800 is at least partially supported in the gas distribution port 207, the mating surface 4913 of the flange portion 4805 abuts against the second surface 241 of the gas distribution body 213 and the intermediate surface 4909 of the head portion 4801 abuts against the docking surface 265 of the gas distribution port 207. Thus, during installation, the body portion 4803 of the plug 4800 can be inserted into the opening 205 of the gas distribution port 207 until the mating surface 4913 abuts against the second surface 241. The head portion 4801 can be threadedly coupled to the coupling protrusion 4903 of the body portion 4803 until the intermediate surface 4909 abuts against the docking surface 265. Depending on the length of the second port portion 247, the extent to which the coupling protrusion 4903 is received in the opening 4901 in the axial direction when the head portion 4801 is removably coupled to the body portion 4803 can vary. This can also affect whether the proximal end 4915 of the body portion 4803 is fabricated to protrude beyond the first surface 4811 of the head portion 4801, be recessed from the first surface 4811, or be coplanar therewith. However, in any case, at least the mating surface 4913 of the flange portion 4805 can be fabricated to abut against the second surface 241 of the gas distribution body 213. However, it is conceivable that in some embodiments, a gap can be formed between the mating surface 4913 of the flange portion 4805 and the second surface 241 of the gas distribution body 213. In such a case, the amount of the gap can be small enough to prevent gas (e.g., process gas) from flowing back into one or more portions of the gas distribution port 207.

[0333] In some implementations, the distal surface 4823 of the plug 4800 may extend axially beyond the second surface 241 of the showerhead 107 and into the gap region 5501 between the showerhead 107 and the wafer 105 by a distance 5503. The distance 5503 may be between about 0.2 mm and about 0.8 mm, such as about 0.5 mm. Thus, although the gap region 5501 may have a height 211 in the axial direction, the protruding nature of the distal surface 4823 may reduce the distance between the distal surface 4823 and the facing surface of the wafer 105 to a height 5505. In some cases, the height 5505 may be between about 0.2 mm and about 0.8 mm. This may further prevent process gas from region 131 from flowing into the gap region 5501 between the showerhead 107 and the front side 203 of the wafer 105. Moreover, when the plug 4800 is at least partially installed in the gas distribution port 207, the head portion 4801 may be used as a centering mechanism to allow the central axis of the plug 4800 (e.g., the reference axis 4815) to coincide (or be substantially coincident) with the central axis 257 of the gas distribution port 207. For example, the head portion 4801 of the plug 4800 may be at least partially supported in the first port portion 245 of the gas distribution port 207 before the body portion 4803 is at least partially supported in the second port portion 247 of the gas distribution port 207. In some instances, the head portion 4801 may be sized to be larger than the body portion 4803 such that the distance 5401 between the lateral surface 4813 of the head portion 4801 and the inner surface 251 of the gas distribution port 207 is less than the distance 5403 between the lateral surface 4821 of the body portion 4803 of the plug 4800 and the inner surface 259 of the gas distribution port 207. In this way, when the body portion 4803 is inserted into the second port portion 247 and coupled to the head portion 4801, the body portion 4803 may be more easily centered within the second port portion 247 at least because the head portion 4801 may already be centered within the first port portion 245. To this end, the distance 5401 between the lateral surface 4813 of the head portion 4801 and the inner surface 251 of the gas distribution port 207 may be relatively small such that the likelihood that the body portion 4803 becomes non-centered with respect to the second port portion 247 may be reduced. This is also the case for, e.g., thermally induced movement (or other displacement) of the plug 4800 with respect to the gas distribution port 207. For example, because the distance 5401 may be relatively less than the distance 5403, the likelihood that the body portion 4803 becomes non-centered with the second port portion 247 may be reduced since the movement of the body portion 4803 may be limited by the amount of movement that the head portion 4801 may have.

[0334] Similar to the cartridges 300, 700, 1100, 1500, 2000, 2500, 3000, 3600, and 4200, the presence of the clearance fit described above can increase the distance between the lateral surfaces 4813 and 4821 of the cartridge 4800 and the corresponding inner surfaces 251 and 259 of the gas distribution port 207. This may reduce the likelihood of wear between the cartridge 4800 and the gas distribution port 207, which otherwise may occur due to thermally induced movement or expansion of the cartridge 4800 relative to the gas distribution port 207, which may be caused at least in part by temperature changes and / or fluctuations associated with semiconductor processing operations performed through the system 100. Although the movement of the cartridge 4800 has been described as being caused in relation to thermal effects, it is also contemplated that the movement of the cartridge 4800 may additionally or alternatively be caused by other factors such as pressure differences, movement of the showerhead 107, etc. In any case, reducing the likelihood of such wear can simultaneously reduce the likelihood of particles being generated and / or shed from the gap 5405 between the cartridge 4800 and the gas distribution port 207, which otherwise may at least partially cause defects resulting in contaminants being deposited on the front side 203 of the wafer 105 and / or on the structures formed thereon / therein. Also, the centering effect of the head portion 4801 relative to the body portion 4803 can also be used to return the cartridge 4800 to a concentric (or substantially concentric) alignment with the gas distribution port 207 after movement of the cartridge 4800. However, assuming that the gas outlet hole 4827 can be formed in the distal surface 4823 disposed after the opening 205 of the gas distribution port 207, the purge gas may not flow from the region corresponding to the gap 5405, as described for at least the cartridges 1500, 2000, and 2500, which can additionally prevent or at least reduce the likelihood of back-diffusion into the gas distribution port 207 and thus into the showerhead 107. That is, the capping nature of the flange portion 4805 can also seal the gas distribution port in which the cartridge 4800 can be at least partially supported to further prevent or inhibit the purge gas from flowing into the region corresponding to the gap 5405. Accordingly, the flange portion 4805 can project laterally outward (e.g., radially outward) from the lateral surface 4821 of the main segment 5007 of the body portion 4803 and beyond the inner surface 259 of the gas distribution port 207 by a distance 5407 to effectively cap or otherwise close the flow path to / from the region corresponding to the gap 5405. In some cases, the distance 5407 can be greater than 0 mm and less than or equal to about 2 mm, but the embodiments are not limited thereto. For example, the size of the distance 5407 can be set with a valve sufficient to prevent gas from flowing into the gap 5405, depending specifically on one or more process conditions such as pressure, temperature, flow rate, etc. For example, as Fig.55 shown, the protrusion distance 5407_1 of the flange portion 4805_1 can be greater than as Fig.54 The protruding distance 5407 of the flange portion 4805 shown. In either case, the flange portion 4805 can be configured to prevent or at least reduce the likelihood of back-diffusion into the gas distribution port 207 and thus into the showerhead 107. To this end, the closure of the aforementioned flow path relative to the gap 5405 can also prevent or at least reduce the likelihood of particles detaching from the gap 5405 when particle generation occurs in the region corresponding to the gap 5405.

[0335] According to some embodiments, the first port portion of the gas distribution port of the gas distribution body can be modified to engage (e.g., detachably engage) with the body portion of the plug and the head portion of the plug can be omitted. Examples of such a configuration will be described in more detail in connection with Fig.56 and the plug 4800.

[0336] Fig.56 Schematically shown according to some embodiments including Fig.55 of a modified version of the gas distribution port plug Figure 2 partial cross-sectional view of a modified version of the showerhead.

[0337] Referring to Fig.56 , the head 4801 of the plug 4800 can be omitted, and the first port portion 245_1 of the gas distribution body 215_1 can be configured to engage (e.g., detachably engage) with the coupling protrusion 4903 of the body portion 4803. For example, the inner surface 251_1 of the first port portion 245_1 can carry threads to engage with threads formed on or in the lateral surface 4907 of the coupling protrusion 4903. In this way, the body portion 4803 can be screwed into the first port portion 245_1 until the mating surface 4813 of the flange portion 4805_1 abuts against the second surface 241 of the gas distribution body 215_1. The remainder of the showerhead 200 and the plug 4800 can be described in connection with Figure 2 and 48 -55. Multi-station processing tool

[0338] Fig.57 Schematically shows a multi-station processing tool according to some embodiments.

[0339] In some embodiments, the multi-station processing tool 5700 may include an in-load lock 5703 and an out-load lock 5705, one or both of which may include a plasma source and / or an ultraviolet (UV) source. A robot 5707 at atmospheric pressure is configured to move a cassette loaded with wafers through a pod 5709 through an atmospheric port 5711 to the in-load lock 5703. The wafer 101 is placed on a pedestal 5713 in the in-load lock 5703 by the robot 5707, the atmospheric port 5711 is closed, and then the in-load lock 5703 is pumped down. In the case where the in-load lock 5703 includes a remote plasma source, the wafer 101 may be exposed to remote plasma processing in the in-load lock 5703 before being introduced into the processing chamber (chamber) 5715. Further, the wafer 101 may also be heated in the in-load lock 5703, for example, to remove moisture and / or adsorbed gases. Then, a chamber transfer port 5717 leading to the chamber 5715 is opened, and another robot 5719 places the wafer 105 on a pedestal at the first station in the reactor (shown in the reactor) for processing. Although the embodiments shown Fig.57 include load locks, it should be understood that in some embodiments, the wafer 105 may be directly introduced into the processing station.

[0340] As Fig.57As shown, the processing chamber 5715 includes four processing stations, numbered from 1 to 4. Each station has a temperature-controlled pedestal (such as the temperature-controlled pedestal 5721 of station 1) and a gas line inlet. It should be understood that in some cases, each processing station may have the same, different, or multiple uses. Each station can be controlled independently of the other stations in the processing chamber. For example, all four stations can be used to deposit a film on a wafer loaded on the pedestal. All four stations can be used to deposit a film on the back side of the wafer; less than four stations can be used to deposit a film on the back side of the wafer, and some stations can be used to deposit a film on the front side of the wafer or remain idle. Even when more than two stations are used for the same purpose, different process parameters (such as temperature, gas flow rate, distance between the showerhead, wafer, and pedestal, etc.) can be applied to each station. Additionally, for example, in some embodiments, the processing station can be switched between chemical vapor deposition (CVD) and PECVD process modes. In another example, a deposition operation (such as a PECVD operation) can be performed at one station, and exposure to UV radiation for UV curing can be performed at another station. In some cases, deposition and UV curing can be performed at the same station. Further, although the illustrated chamber 5715 includes four stations, the embodiments are not limited thereto. For example, the chamber 5715 can have any suitable number of stations, such as five or more stations, or three or fewer stations. Additionally, the multi-station processing tool 5700 and the chamber 5715 are configured such that interference between multiple stations within the chamber 5715 and / or the effect of a process performed at one station on other stations is monitored and controlled, such that the desired process conditions for each station can be provided during operation.

[0341] As previously mentioned, the multi-station processing tool 5700 can include a wafer handling system (such as the robot 5719 including the star fork 5701) for transferring and / or positioning wafers within the processing chamber 5715. In some embodiments, the wafer handling system can transfer wafers between individual processing stations and / or between the processing station and the load lock. However, it is contemplated that any suitable wafer handling system can be employed, such as, for example, wafer carousels, other wafer handling robots, etc. Further, the multi-station processing tool 5700 can include (or otherwise be coupled to) a system controller 5723 for controlling the process conditions and the hardware state of the multi-station processing tool...

Claims

1. A gas distribution port plug-in ("plug-in"), comprising: A head portion, comprising: A gas inlet surface; An intermediate surface, which is opposite to the gas inlet surface in the first direction; And At least one first lateral surface that connects the gas inlet surface to the intermediate surface; A body portion that extends from the head portion, the body portion comprising: A proximal end adjacent to the intermediate surface; A distal end spaced from the proximal end in the first direction, the distal end terminating at a first distal surface; and At least one second lateral surface that connects the distal end to the proximal end; A reamed hole that extends along a reference axis from the gas inlet surface through the head portion and partially through the body portion, the reamed hole terminating at a second distal surface inside the body portion; And A plurality of gas outlet holes fluidly connected to the reamed hole inside the body portion and circumferentially arranged around the reference axis, wherein: The proximal ends of the gas outlet holes are formed in the second distal surface; And The width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

2. The plug-in according to claim 1, wherein: The distal ends of the gas outlet holes are formed in the first distal surface; and The gas outlet holes extend longitudinally in the first direction.

3. The plug-in according to claim 1, wherein: The body portion further comprises at least one third lateral surface that connects the first distal surface to the at least one second lateral surface, the at least one third lateral surface being inclined with respect to the first distal surface; The distal ends of the gas outlet holes are formed in the at least one third lateral surface; and The respective axes of the longitudinally extending gas outlet holes extend outward from the reference axis and form a corresponding inclination angle with the reference axis.

4. The plug-in according to claim 3, wherein the respective axes of the longitudinally extending gas outlet holes extend substantially perpendicular to the at least one third lateral surface.

5. A gas distribution port plug-in ("plug-in"), comprising: A head portion, comprising: A gas inlet surface; An intermediate surface, which is on the opposite side of the gas inlet surface in a first direction; And At least one first lateral surface that connects the gas inlet surface to the intermediate surface; A body portion that extends from the head portion, the body portion comprising: A proximal end adjacent to the intermediate surface; A distal end spaced from the proximal end in the first direction, the distal end terminating at a first distal surface; and At least one second lateral surface that connects the distal end to the proximal end; A reamed hole that extends along a reference axis from the gas inlet surface through the head portion and partially through the body portion, the reamed hole terminating at a second distal surface inside the body portion; And A plurality of gas outlet holes in the at least one second lateral surface and fluidly connected to the reamed hole inside the body portion, the first gas outlet hole being circumferentially arranged around the reference axis, Wherein the width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

6. The insert according to claim 5, wherein the plurality of gas outlet holes includes a set of first gas outlet holes and a set of second gas outlet holes offset from the first gas outlet holes in the first direction such that the first gas outlet holes are configured to be closer to the proximal end of the body portion than the second gas outlet holes.

7. The insert according to claim 6, wherein: the respective longitudinally extending axes of the gas outlet holes extend radially outward from the reference axis; the intermediate surface extends in a second reference plane; some of the gas outlet holes are tangent to the second distal surface and form the set of second gas outlet holes; and some of the gas outlet holes are spaced apart from the second reference plane in the first direction and form the set of first gas outlet holes.

8. The insert according to claim 6, wherein: the respective longitudinally extending axes form corresponding inclined angles with a first reference plane perpendicular to the reference axis; the intermediate surface extends in a second reference plane; some of the gas outlet holes are tangent to the second reference plane and form the set of first gas outlet holes; and some of the gas outlet holes are tangent to the second distal surface and form the set of second gas outlet holes.

9. The insert according to any one of claims 6 - 8, wherein: the respective first openings of the set of first gas outlet holes have corresponding first central axes tangent to the at least one second lateral surface; the respective second openings of the set of second gas outlet holes have corresponding second central axes tangent to the at least one second lateral surface; and the first central axis is circumferentially offset from the second central axis such that the first central axis does not coincide with the second central axis; or wherein: the respective openings of the set of first gas outlet holes have corresponding first central axes tangent to the at least one second lateral surface; the respective openings of the set of second gas outlet holes have corresponding second central axes tangent to the at least one second lateral surface; and the corresponding ones of the first central axis and the second central axis are substantially aligned.

10. The insert according to any one of claims 5, 6, 8, wherein the second distal surface is a generally conical surface having a vertex that projects towards the first gas inlet surface in a direction opposite to the first direction.

11. A gas distribution port insert ("insert") comprising: a head portion comprising: a gas inlet surface; An intermediate surface, which is on the opposite side of the gas inlet surface in a first direction; and at least one first lateral surface connecting the gas inlet surface to the intermediate surface; a body portion extending from the head portion, the body portion comprising: a proximal end adjacent to the intermediate surface; a distal end spaced apart from the proximal end in the first direction, the distal end terminating at a first distal surface; and at least one second lateral surface connecting the distal end to the proximal end; A reamer hole that extends along a reference axis from the gas inlet surface through the head portion and partially through the body portion, the reamer hole terminating at a second distal surface inside the body portion; and A gas outlet hole that includes: A proximal opening that is fluidly connected to the reamer hole inside the body portion; And A distal opening that is formed in the at least one second lateral surface, Wherein the width of the head portion in a second direction transverse to the first direction is greater than the width of the body portion in the second direction.

12. The insert according to claim 11, wherein the distal opening is formed in the first distal surface and the at least one second lateral surface and spans between the first distal surface and the at least one second lateral surface.

13. The insert according to claim 12, wherein: The longitudinally extending central axis of the gas outlet hole extends in a fourth direction transverse to the first direction; A first reference plane is perpendicular to the first direction; and The angle between the first reference plane and the fourth direction is about 10° to about 30°.

14. The insert according to claim 11, wherein: The longitudinally extending central axis of the gas outlet hole extends in a fourth direction perpendicular to the first direction; The gas outlet hole includes: A first side wall that extends in a sixth direction inclined with respect to the central axis of the gas outlet hole; and A second side wall that extends in a seventh direction inclined with respect to the central axis of the gas outlet hole, the seventh direction being different from the sixth direction.

15. The insert according to claim 14, further comprising: An additional reamer hole that extends partially through the body portion along the reference axis and fluidly connects the reamer hole and the gas outlet hole, Wherein: The central axis of the additional reamer hole is offset from the central axis of the reamer hole in the third direction; and The width of the additional reamer hole in the second direction is less than or equal to the minimum width of the gas outlet hole in the second direction.

16. A gas distribution port insert ("insert") that includes: A gas inlet configured to receive an air flow; A body portion that includes: A proximal end; A distal end that is spaced apart from the proximal end in a first direction; and A first section that includes a first thread, the first section being disposed between the proximal end and the distal end; and A flange portion that extends from the distal end of the body portion, the flange portion including: A mating surface adjacent to said distal end; And A first distal surface that is spaced apart from the mating surface in the first direction; A reamer hole that extends along a reference axis from the proximal end toward the distal end, the reamer hole being fluidly connected to the gas inlet and terminating at a second distal surface inside the body portion; And A plurality of gas outlet holes in the first distal surface, the gas outlet holes being fluidly connected to the reamer hole inside the body portion and circumferentially arranged around the reference axis.

17. The insert according to claim 16, further comprising: A head portion that includes: A first surface; A second surface spaced from the first surface in the first direction; and An opening extending in the first direction from the first surface through the second surface, the opening including a second thread configured to mate with the first thread, Wherein: The head portion is detachably coupled to the body portion by at least partially causing a threaded engagement between the first thread and the second thread with a portion of the first segment received in the opening; and The extent of the threaded engagement is configured to vary the distance in the first direction between the second surface and the mating surface.

18. The insert according to claim 16 or claim 17, wherein: The body portion further includes a main segment; The first segment of the body portion projects from the main segment in a direction opposite to the axial direction; and The flange portion has a greater width in a second direction transverse to the first direction than the main segment of the body portion in the second direction.

19. The insert according to claim 18, wherein: The main segment has a greater width in the second direction than the first segment in the second direction; and The flange portion has a greater width in the second direction than the head portion in the second direction.

20. An apparatus comprising: A gas distribution body including one or more plenum portions formed between a first surface and a second surface on an opposite side of the first surface, the second surface including a plurality of gas distribution ports fluidly connected to at least one of the one or more plenum portions, Among them, One or more of the gas distribution ports include a gas distribution port insert ("insert") according to any one of claims 1, 5, 11, and 17, at least partially supported therein, Wherein each of the one or more gas distribution ports includes: A first port member configured to at least partially support the head portion of the insert therein; And A second port member fluidly connected to the first port member, the second port member configured to allow at least partial extension of the body portion of the insert therethrough.

21. The apparatus according to claim 20, further comprising: A processing chamber; and A susceptor configured to support a wafer in the processing chamber relative to the gas distribution body such that the distance in the first direction between the second surface and the surface of the wafer facing the second surface is about 1 mm, Wherein: The gas distribution body forms part of a showerhead; and The susceptor is a showerhead susceptor.

Images