Unlocking jacking assembly in ion implanter

Abstract

The invention discloses an unlocking jacking assembly in an ion implanter, which comprises a bottom plate, a driving motor arranged on the bottom plate and in transmission connection with a ball screw, a sliding block on the ball screw is connected with a movable plate, two sides of the movable plate are respectively and fixedly provided with a guide transmission rod, one end of an unlocking plate is sleeved on the guide transmission rod, and the other end of the unlocking plate is sleeved on the ball screw. One end of the unlocking plate is elastically connected with the movable plate through a spring, and the other end of the unlocking plate extends to a wafer processing station; the guide transmission rods are located on the two sides of the unlocking plate respectively, the ends of the guide transmission rods are connected with one end of the first connecting rod, the other end of the first connecting rod inclines downwards and is movably connected with one end of the second connecting rod through the first rotating piece, and the other end of the second connecting rod is provided with the second rotating piece. The inner side ends of the first rotating member and the second rotating member are respectively provided with a jacking block, and the jacking blocks can be pushed by the guide transmission rod to rotate and jack up the wafer. By arranging the driving motor, the target disc assembly can be unlocked and lifted at the same time.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing equipment, and particularly to an unlocking and lifting assembly and method in an ion implanter. Background Art

[0002] A wafer is the core material in semiconductor manufacturing. It is a circular thin slice made of high-purity single-crystalline silicon or other semiconductor materials, and is mainly used for manufacturing semiconductor products such as integrated circuits, sensors, and optoelectronic devices. An ion implanter is used to implant ions into the surface of a wafer to change its electrical properties, and this process is usually carried out in a vacuum environment. The wafer is placed on a target disk, and the target disk is responsible for fixing the wafer and ensuring its precise position during the implantation process.

[0003] In order to prevent the wafer from shifting during the high-speed rotation with the target disk, the existing target disks usually have an electrostatic adsorption structure or a mechanical limit structure. For the target disk with a mechanical limit structure, after the wafer processing is completed, due to the limited space between the target disk and the base, it is impossible to set up an unlocking mechanism and a lifting mechanism at the same time. Therefore, the existing target disks with mechanical limit structures often rely on manual material taking.

[0004] Therefore, it is necessary to improve such a structure to overcome the above defects. Summary of the Invention

[0005] The purpose of the present invention is to provide an unlocking and lifting assembly in an ion implanter to solve the problems existing in the prior art.

[0006] The above technical purpose of the present invention is achieved through the following technical solutions: An unlocking and lifting assembly in an ion implanter includes a bottom plate. The output end of a driving motor arranged below the bottom plate is in transmission connection with a ball screw arranged above the bottom plate. A slider arranged on the ball screw is connected with a movable plate that moves synchronously. On both sides of the movable plate, a guiding transmission rod is respectively fixedly arranged. One end of an unlocking plate is sleeved on the guiding transmission rod and is elastically connected with the movable plate through a spring. The other end of the unlocking plate extends to the wafer processing station of a rotating target disk.

[0007] Further, the guiding transmission rods are respectively located on both sides of the unlocking plate. The end of the guiding transmission rod is connected with one end of a first connecting rod. The other end of the first connecting rod inclines downward and is movably connected with one end of a second connecting rod through a first rotating member. A second rotating member is arranged at the other end of the second connecting rod. A jacking block is respectively arranged at the inner ends of the first rotating member and the second rotating member. The jacking block can rotate and jack up the wafer under the push of the guiding transmission rod. Two jacking blocks on the opposite sides are connected through a synchronous rotating shaft, and a torsion spring for resetting the jacking block is arranged on the synchronous rotating shaft.

[0008] Further, a movable base is provided at the bottom of the unlocking plate. Through holes are respectively provided on both sides of the movable base and are sleeved on the guide shafts. Both ends of the guide shafts are respectively installed through a positioning seat, and the positioning seat is fixedly arranged on the top surface of the movable substrate. A sliding block is provided on the bottom surface of the movable substrate, and the sliding block is matched with a slide rail arranged parallel to the side of the ball screw.

[0009] Further, the working method of the unlocking and lifting assembly in the ion implanter is as follows: S1. Unlock After the wafer on the rotating turntable is processed, it enters the unlocking and lifting stage. The driving motor is started to drive the ball screw, so that the slider and the movable plate arranged on the ball screw move forward, and then drive the unlocking plate connected to the movable plate to move, thereby completing the unlocking action; S2. Lift After unlocking the wafer, the unlocking plate will continue to move until the movable base connected to the bottom of the unlocking plate reaches the position of the positioning seat. Due to the blockage of the positioning seat, the unlocking plate cannot continue to move forward; Then, the movable plate will continue to move forward under the action of the ball screw and the slider to compress the spring. Since the unlocking plate is blocked, the guiding transmission rod fixedly connected to the movable plate will move forward along the shaft hole at the end of the unlocking plate; The first connecting rod and the second connecting rod arranged at the end of the guiding transmission rod will rotate under the transmission of the guiding transmission rod, thereby driving the lifting block arranged at the inner ends of the first rotating member and the second rotating member to rotate, thus completing the lifting action.

[0010] In summary, the present invention has the following beneficial effects: The structure is simple and the design is ingenious. By setting a driving motor, the unlocking plate can be driven to complete linear movement and the lifting movement of the lifting block arranged on the side of the unlocking plate, thereby greatly reducing the installation space of the unlocking and lifting assembly, and at the same time realizing the unlocking and lifting actions of the turntable assembly. Brief Description of the Drawings

[0011] Figure 1 is a schematic diagram of the unlocking and lifting assembly of the present invention.

[0012] Figure 2 is a top view of the unlocking and lifting assembly of the present invention. Detailed Embodiments

[0013] In order to make the technical means, creative features, achieved purposes and functions of the present invention easy to understand, the present invention will be further described below in conjunction with the drawings and specific embodiments.

[0014] Such as Figures 1 to 2As shown in the figure, an unlocking and lifting assembly in an ion implanter proposed by the present invention includes a bottom plate 1. The output end of a driving motor 2 arranged below the bottom plate 1 is in transmission connection with a ball screw 3 arranged above the bottom plate 1. A slider 4 arranged on the ball screw 3 is connected with a movable plate 5 that moves synchronously. On both sides of the movable plate 5, a guiding transmission rod 6 is fixedly arranged respectively. One end of an unlocking plate 7 is sleeved on the guiding transmission rod 6 and is elastically connected with the movable plate 5 through a spring 8. The other end of the unlocking plate 7 extends to the wafer processing station of the rotating target disk.

[0015] The guiding transmission rods 6 are respectively located on both sides of the unlocking plate 7. The end of the guiding transmission rod 6 is connected with one end of a first connecting rod 61. The other end of the first connecting rod 61 inclines downward and is movably connected with one end of a second connecting rod 63 through a first rotating part 62. A second rotating part 64 is arranged at the other end of the second connecting rod 63. A jacking block 65 is respectively arranged at the inner ends of the first rotating part 62 and the second rotating part 64. The jacking block 65 can be rotated by the pushing of the guiding transmission rod 6 to jack up the wafer. Two jacking blocks 65 on the opposite sides are connected through a synchronous rotating shaft 66. A torsion spring 67 for resetting the jacking block 65 is arranged on the synchronous rotating shaft 66.

[0016] A movable base 71 is arranged at the bottom of the unlocking plate 7. Through holes are respectively arranged on both sides of the movable base 71 and are sleeved on guiding shafts 72 through the through holes. Both ends of the guiding shafts 72 are respectively installed through a positioning seat 73. The positioning seat 73 is fixedly arranged on the top surface of a movable substrate 74. A sliding block 75 is arranged on the bottom surface of the movable substrate 74. The sliding block 75 is matched with a slide rail 76 arranged parallel to the side of the ball screw 3.

[0017] The working method of the unlocking and lifting assembly in the ion implanter is as follows: S1. Unlock After the wafer processing on the rotating target disk is completed, it enters the unlocking and lifting stage. The driving motor 2 is started to drive the ball screw 3, so that the slider 4 and the movable plate 5 arranged on the ball screw 3 move forward, and then drive the unlocking plate 7 connected with the movable plate 5 to move, thus completing the unlocking action. S2. Lift After unlocking the wafer, the unlocking plate 7 will continue to move until the movable base 71 connected to the bottom of the unlocking plate 7 reaches the position of the positioning seat 73. Due to the blockage of the positioning seat 73, the unlocking plate 7 cannot continue to move forward. Then, the movable plate 5 will continue to move forward under the action of the ball screw 3 and the slider 4 to compress the spring 8. Since the unlocking plate 7 is blocked, the guiding transmission rod 6 fixedly connected with the movable plate 5 will move forward along the shaft hole at the end of the unlocking plate 7. The first connecting rod 61 and the second connecting rod 63 provided at the end of the guiding transmission rod 6 will rotate under the transmission of the guiding transmission rod 6, thereby driving the lifting block 65 provided at the inner ends of the first rotating member 62 and the second rotating member 64 to rotate, thus completing the lifting action.

[0018] In this text, the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "vertical", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the sake of clearly expressing the technical solution and facilitating description, and therefore cannot be construed as a limitation on the present invention.

[0019] In this text, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, in addition to the listed elements, but may also include other elements not expressly listed.

[0020] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments, and the above embodiments and the descriptions in the specification only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An unlocking and lifting assembly in an ion implanter, characterized in that, It includes a base plate (1). The output end of a driving motor (2) arranged below the base plate (1) is in transmission connection with a ball screw (3) arranged above the base plate (1). A slider (4) arranged on the ball screw (3) is connected with a movable plate (5) that moves synchronously. A guiding transmission rod (6) is fixedly arranged on each side of the movable plate (5). One end of an unlocking plate (7) is sleeved on the guiding transmission rod (6) and is elastically connected with the movable plate (5) through a spring (8). The other end of the unlocking plate (7) extends to the wafer processing station of the rotating target disc.

2. The unlocking and lifting assembly in the ion implanter according to claim 1, wherein, The guiding transmission rods (6) are respectively located on both sides of the unlocking plate (7). The end of the guiding transmission rod (6) is connected with one end of a first connecting rod (61). The other end of the first connecting rod (61) inclines downward and is movably connected with one end of a second connecting rod (63) through a first rotating part (62). A second rotating part (64) is arranged at the other end of the second connecting rod (63). A jacking block (65) is arranged at the inner side ends of the first rotating part (62) and the second rotating part (64) respectively. The jacking block (65) can rotate and jack up the wafer under the push of the guiding transmission rod (6). Two jacking blocks (65) on the opposite sides are connected through a synchronous rotating shaft (66). A torsion spring (67) for resetting the jacking block (65) is arranged on the synchronous rotating shaft (66).

3. The unlocking and lifting assembly in the ion implanter according to claim 1, characterized in that, An activity base (71) is arranged at the bottom of the unlocking plate (7). Through holes are respectively arranged on both sides of the activity base (71), and the activity base (71) is sleeved on a guiding shaft (72) through the through holes. Both ends of the guiding shaft (72) are installed through a positioning seat (73) respectively. The positioning seat (73) is fixedly arranged on the top surface of an activity substrate (74). A sliding block (75) is arranged on the bottom surface of the activity substrate (74). The sliding block (75) is matched with a slide rail (76) arranged parallel to the side of the ball screw (3).

4. The unlocking and lifting assembly in the ion implanter according to any one of claims 1-3, characterized in that, The working method of the unlocking and jacking assembly in the ion implanter is as follows: S1. Unlock After the wafer processing on the rotating target disc is completed, it enters the unlocking and jacking stage. The driving motor (2) is started to drive the ball screw (3), so that the slider (4) and the movable plate (5) arranged on the ball screw (3) move forward, and then drive the unlocking plate (7) connected with the movable plate (5) to move, thus completing the unlocking action. S2. Jack up After unlocking the wafer, the unlocking plate (7) will continue to move until the activity base (71) connected to the bottom of the unlocking plate (7) reaches the position of the positioning seat (73). Due to the blockage of the positioning seat (73), the unlocking plate (7) cannot continue to move forward. Then, the movable plate (5) will continue to move forward under the action of the ball screw (3) and the slider (4) to compress the spring (8). Since the unlocking plate (7) is blocked, the guiding transmission rod (6) fixedly connected with the movable plate (5) will move forward along the shaft hole at the end of the unlocking plate (7). The first connecting rod (61) and the second connecting rod (63) provided at the end of the guiding transmission rod (6) will rotate under the transmission of the guiding transmission rod (6), thereby driving the lifting block (65) provided at the inner ends of the first rotating member (62) and the second rotating member (64) to rotate, thus completing the lifting action.

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