Stacker apparatus and substrate processing apparatus

Abstract

The present invention discloses a stacker apparatus and a substrate processing apparatus, and specifically, the stacker apparatus provided on a front surface of a substrate processing apparatus in which a loading port is horizontally placed includes: a loading unit located in front of the loading port and including a rack configured to store a substrate accommodating container; and a main frame including a container transfer apparatus configured to transfer the substrate accommodating container between the rack and the loading port, where the container transfer apparatus is located above the loading port.

Description

[0001] Cross - reference to related applications

[0002] This application claims the priority and benefit of Korean Patent Application No. 10 - 2023 - 0196060, filed with the Korean Intellectual Property Office on December 29, 2023, the entire content of which is incorporated herein by reference. Technical Field

[0003] The present invention relates to a stocker device and a substrate processing apparatus including the stocker device. Background Art

[0004] Generally, in order to manufacture semiconductor devices, various types of processes such as deposition, photography, and etching are performed, and the equipment for performing each of these processes is arranged in a semiconductor production line. In the semiconductor production line, various logistics and transfers are performed by using an Overhead Hoist Transport (OHT).

[0005] OHT (transfer trolley) runs in large numbers on a slide rail (track), and there is an OHT control system for controlling and managing all OHTs to control and manage a large number of OHTs.

[0006] However, as the increase in logistics movement at locations with a large volume of goods (such as in a semiconductor production line), additional operations of the transfer trolley are required. However, due to the limited space of the transfer trolley and the high cost of additional operations, the insufficient transport capacity due to logistics movement. Therefore, if the amount of goods transported by the transfer trolley per unit time is large, there is a problem that the substrate processing operation in the semiconductor processing apparatus is not smooth due to the low processing speed of each vehicle and the stagnation of the transfer trolley. Summary of the Invention

[0007] The present invention aims to provide a stocker device including a plurality of container loading units having a small share for improving throughput and a substrate processing apparatus including the stocker device.

[0008] The present invention also aims to provide a stocker device that is easy to maintain and a substrate processing apparatus including the stocker device.

[0009] The present invention also aims to provide a stocker device capable of optimizing the container transfer operation between the container loading unit and the loading port and a substrate processing apparatus including the stocker device.

[0010] The problems to be solved by the present invention are not limited to the above problems, and those skilled in the art will clearly understand the problems not mentioned from the following description.

[0011] Exemplary embodiments of the present invention provide a stacker device disposed in front of a substrate processing apparatus in which a loading port is horizontally placed. The stacker device includes: a loading unit located in front of the loading port and including a rack configured to store substrate accommodation containers; and a main frame including a container transfer device configured to transfer the substrate accommodation containers between the rack and the loading port, wherein the container transfer device may be located above the loading port.

[0012] According to an exemplary embodiment of the present invention, the loading unit may include: a loading / unloading loading unit including a loading / unloading rack where the substrate accommodation containers are loaded and unloaded by a top plate transfer cart; and a main loading unit including a storage rack configured to store the substrate accommodation containers transferred between the loading / unloading loading unit and the loading port.

[0013] According to an exemplary embodiment of the present invention, the loading unit may be configured to slide or open / close and move to the front of the main frame to ensure space for maintenance.

[0014] According to an exemplary embodiment of the present invention, the loading / unloading loading unit may be located above the main loading unit.

[0015] According to an exemplary embodiment of the present invention, the loading / unloading loading unit is fixedly mounted on the main frame, and the main loading unit may be configured to slide or open / close and move to the front of the main frame to ensure space for maintenance.

[0016] According to an exemplary embodiment of the present invention, the main loading unit is configured such that the racks are arranged in multiple levels in the vertical direction, and the first-level rack located at the lowermost level of the racks and the second-level rack located directly above the first-level rack may have a greater layer height than the other racks.

[0017] According to an exemplary embodiment of the present invention, the rack located at the topmost part of the loading unit may be configured to allow transfer of the substrate accommodation containers between the rack and the top plate transfer cart.

[0018] According to an exemplary embodiment of the present invention, the container transfer device may include: a transfer manipulator including an arm configured to grip the substrate accommodation container; a horizontal drive unit configured to move the transfer manipulator in the horizontal direction; and a vertical drive unit configured to move the transfer manipulator in the vertical direction.

[0019] According to an exemplary embodiment of the present invention, the horizontal drive unit may be located above the loading port.

[0020] According to an exemplary embodiment of the present invention, the transfer robot can be configured to load and unload a substrate transfer container on an in / out rack or a storage rack when the arm is in an extended state, and load and unload the substrate transfer container on a load port when the arm is in a folded state.

[0021] An exemplary embodiment of the present invention provides a substrate processing apparatus, which includes: a main body including an indexing unit in which load ports for placing substrate accommodation containers are arranged on the front surface; and a stacker device located in front of the indexing unit and configured to load and unload the substrate accommodation containers, wherein the stacker device may include: a loading unit located in front of the load port and configured to store the substrate accommodation containers; and a main frame including a container transfer device configured to transfer the substrate accommodation containers between the loading unit and the load port in a space above the load port.

[0022] According to an exemplary embodiment of the present invention, the loading unit can be configured to slide to the front of the main frame to ensure a space for maintenance.

[0023] According to an exemplary embodiment of the present invention, the loading unit may include: an in / out loading unit including an in / out rack where the substrate accommodation containers are loaded and unloaded by a top plate transfer vehicle; and a main loading unit including a storage rack for storing the substrate accommodation containers transferred between the in / out loading unit and the load port.

[0024] According to an exemplary embodiment of the present invention, the in / out loading unit may be located above the main loading unit, and the indexing unit further includes an additional loading unit that can be accessed through the container transfer device and is configured to store the substrate accommodation containers, and the additional loading unit is located above the indexing robot of the indexing unit.

[0025] According to an exemplary embodiment of the present invention, the in / out loading unit is fixedly mounted on the main frame, and the main loading unit is configured to slide to the front of the main frame to ensure a space for maintenance.

[0026] According to an exemplary embodiment of the present invention, the main loading unit can be configured such that the racks are arranged in multiple levels in the vertical direction, and the first-level rack located at the lowermost level in the racks and the second-level rack that may be directly above the first-level rack have a greater layer height than other racks.

[0027] According to an exemplary embodiment of the present invention, a container transfer device includes: a transfer robot including an arm configured to hold a substrate accommodation container; a horizontal drive unit configured to move the transfer robot in a horizontal direction; and a vertical drive unit configured to move the transfer robot in a vertical direction, and the horizontal drive unit may be located above the loading port, and the transfer robot is configured to load and unload the substrate transfer container on the loading port with the arm in a folded state.

[0028] An exemplary embodiment of the present invention provides a substrate processing apparatus, which includes: a main body including a processing unit and an indexing unit, the processing unit being equipped with a processing device that performs a predetermined process on a substrate, the indexing unit being located in front of the processing unit and a loading port on which a substrate accommodation container is placed being horizontally arranged on the front surface; and a stacker device located in front of the indexing unit and configured to load and unload the substrate accommodation container, wherein the stacker device includes: a loading unit including an in / out rack and a storage rack, the in / out rack being located in front of the loading port and loading and unloading the substrate accommodation container through a top plate transfer vehicle at the in / out rack, the storage rack being located below the in / out rack and configured to store the substrate accommodation container transferred between the in / out rack and the loading port; and a main frame including a container transfer device configured to transfer the substrate accommodation container in a space above the loading port between the loading unit and the loading port, and the loading unit further includes a moving frame that is slidably configured to move to the front of the main frame, and the storage rack can be arranged in multiple levels in the vertical direction on the moving frame.

[0029] According to an exemplary embodiment of the present invention, the in / out rack is fixedly mounted on the main frame, and the storage rack in the first stage at the lowest stage of the storage rack and the storage rack directly above the storage rack in the first stage may have a greater layer height than other storage racks, and the indexing unit further includes an additional loading unit that can enter through the container transfer device and is configured to store the substrate accommodation container, and the additional loading unit is located above the indexing robot of the indexing unit.

[0030] According to an exemplary embodiment of the present invention, the container transfer device includes: a transfer manipulator including an arm configured to hold a substrate accommodation container; a horizontal drive unit located above the loading port and configured to move the transfer manipulator in a horizontal direction; a vertical drive unit configured to move the transfer manipulator in a vertical direction, and the transfer manipulator is configured to perform loading and unloading of the substrate transfer container on the loading / unloading rack or the storage rack when the arm is in an extended state, and perform loading and unloading of the substrate transfer container on the loading port when the arm is in a folded state.

[0031] According to an exemplary embodiment of the present invention, a small footprint can be provided by disposing the container transfer device above the loading port.

[0032] According to an exemplary embodiment of the present invention, maintenance is easy by moving the loading unit from the main frame.

[0033] According to an exemplary embodiment of the present invention, the container transfer operation between the loading unit and the loading port can be optimized.

[0034] The effects of the present invention are not limited to the above effects, and those skilled in the art can clearly understand the effects not mentioned from this specification and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a diagram showing an example of a substrate processing system to which a stacker device is applied.

[0036] Figure 2 is Figure 1 a side sectional view of the stacker device shown in

[0037] Figure 3 is Figure 2 a front view of the stacker device shown in

[0038] Figure 4 is Figure 1 a top plan view of the stacker device shown in

[0039] Figure 5 is Figure 4 a view taken along line A-A shown in

[0040] Figure 6 and Figure 7 is a diagram showing a state where the moving frame slides forward from the main frame.

[0041] Figure 8 is a diagram showing the container transfer device.

[0042] Figures 9 to 12It is a diagram showing the transfer operation of containers in a stacker device.

[0043] Figure 13 It is a diagram showing a modified example of a substrate processing system.

[0044] Figure 14 It is a diagram showing a modified example of a container transfer device. Detailed Description

[0045] Hereinafter, exemplary embodiments of the present invention will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the present invention are shown. However, the present invention may be implemented differently and is not limited to the following exemplary embodiments. In the following description of the present invention, detailed descriptions of known functions and configurations incorporated herein are omitted to avoid obscuring the subject matter of the present invention. Additionally, throughout the drawings, the same reference numerals are used for components having similar functions and operations.

[0046] Unless explicitly stated to the contrary, the word "include" and its variants will be understood to mean including the recited element but not excluding any other element. It should be understood that the terms "including" and "having" are intended to specify the presence or combination of the features, quantities, operations, elements, and components described in this specification, and do not exclude the possibility of the pre - existence or addition of one or more other features, quantities, operations, elements, and components or their combinations.

[0047] The singular expressions used herein include plural expressions unless they have a clearly opposite meaning in the context. Accordingly, for a clearer description, the shapes and dimensions of elements in the drawings may be exaggerated.

[0048] Terms such as first and second are used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another. For example, without departing from the scope of the present invention, the first element may be named the second element, and similarly, the second element may be named the first element.

[0049] It should be understood that when an element is referred to as being "coupled to" or "connected to" another element, that element can be directly coupled or connected to the other element, but there can also be other intervening elements. Conversely, when an element is "directly coupled to" or "directly connected to" another element, it should be understood that there are no intervening elements. Other expressions describing the relationship between elements, such as "between" and "immediately between", or "adjacent to" and "directly adjacent to", should be interpreted similarly.

[0050] The terms used herein (including technical and scientific terms) have the same meaning as those commonly understood by one of ordinary skill in the art, unless the terms are otherwise defined. Terms defined in a general dictionary will be interpreted to have a meaning that matches their meaning in the relevant technical context, and they should not be interpreted as having an ideal or overly formal meaning unless explicitly defined in this application.

[0051] The foregoing detailed description illustrates the present invention. Further, the above shows and describes exemplary embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, within the scope of the inventive concept disclosed in this specification, the scope equivalent to the scope of the present invention, and / or within the scope of the technology or knowledge in the art, the foregoing can be modified or corrected. The foregoing exemplary embodiments describe the best state for implementing the technical spirit of the present invention, and various changes required for specific application fields and uses of the present invention are possible. Therefore, the above detailed description of the present invention is not intended to limit the present invention to the disclosed exemplary embodiments. Further, the appended claims should also be interpreted to include other exemplary embodiments.

[0052] Figure 1 is a diagram showing an example of a substrate processing system to which a stacker device is applied, Figure 2 is Figure 1 a side sectional view of the stacker device shown in Figure 3 is Figure 2 a front view of the stacker device shown in Figure 4 is Figure 1 a top plan view of the stacker device shown in

[0053] Referring to Figures 1 to 5 , the substrate processing system 10 manufactures various devices, such as semiconductor devices and liquid crystal devices. The substrate processing system 10 forms structures such as semiconductor devices, wires, and insulating films on a substrate (such as a silicon wafer) to manufacture semiconductor devices. The substrate processing system 10 may include a processing apparatus main body 500 and a stacker device 100.

[0054] The processing apparatus main body 500 performs processing in the processes of a manufacturing apparatus. The processing apparatus main body 500 can be, for example, a film forming apparatus, a coater / developer, an exposure apparatus, or an etching apparatus.

[0055] A container F containing articles related to processing is loaded into the processing apparatus main body 500 through a loading port 520 of an indexing unit 510 and unloaded from the processing apparatus main body 500. Articles related to processing can include, for example, a substrate to be processed or articles for processing (e.g., a reticle). The processing apparatus main body 500 receives the container F at the loading port 520, takes out the substrate accommodated in the container F, and performs a predetermined process on the substrate. Further, the processing apparatus accommodates the processed substrate in the container F again and transfers the container F to the loading port 520. Herein, the container F can be a substrate storage container, such as a Front Opening Unified Pod (FOUP) in which a plurality of substrates are accommodated. An indexing robot 512 (see Figure 4 ) is provided in the indexing unit 510.

[0056] The top plate transfer cart 20 is, for example, an OHT carrier and can move along a track 30 installed in a top plate (not shown) of a facility. The top plate transfer cart 20 transfers the container F from the outside of the substrate processing system 10 by gripping and moving the container F. For example, the top plate transfer cart 20 transfers the container F in which articles related to the processing of the processing apparatus main body 500 are accommodated. Further, the top plate transfer cart 20 receives the container F in which articles processed by the processing apparatus main body 500 are accommodated, and transfers the container F to another processing apparatus or the like. The top plate transfer cart 20 transfers the container F to the loading / unloading rack of the stacker apparatus 100.

[0057] The stacker apparatus 100 can be erected in front of the processing apparatus main body 500 in parallel. The stacker apparatus 100 can be additionally installed in the processing apparatus main body already installed in a semiconductor production line. The stacker apparatus 100 can be provided in a transfer path between the top plate transfer cart 20 and the processing apparatus main body 500.

[0058] The stacker apparatus 100 can include a loading unit 110 on which the container F is loaded, and a main frame 150 including a container transfer device 200 that transfers the container F between the loading unit 110 and the loading port 520.

[0059] The loading unit 110 is located in front of the loading port 520. The loading unit 110 can include a loading / unloading loading unit 120 and a moving loading unit 130.

[0060] The loading / unloading unit 120 includes a loading / unloading rack 122 through which the container F is conveyed by the top plate transfer vehicle 20. When observed in a plan view, the loading / unloading rack 122 can be arranged to overlap with the drive track on which the top plate transfer vehicle 20 moves.

[0061] The mobile loading unit 130 may include a mobile frame 132, a plurality of racks 134 provided on the mobile frame 132, and a door 136 provided on the front surface of the mobile frame 132. The racks 134 can be arranged in multiple levels in the height direction inside the mobile frame 132 and can be arranged in multiple numbers in the horizontal direction. For example, four containers F can be stored horizontally in the first-level rack, and five containers can be stored horizontally in the second-level rack and the third-level rack. The floor height difference between the first-level rack and the second-level rack and the floor height difference between the second-level rack and the third-level rack can be different. For example, the floor height difference between the first-level rack and the second-level rack can be set at a higher floor height than other floor heights. This is to prevent interference with the containers placed on the loading port 520 when the container transfer device 200 loads or unloads the container F onto or from the first-level rack. Sensors (not shown) for detecting the installation of the container F can be provided on the racks 134. The sensors can be contact-type sensors (such as push-button sensors), and the sensors detect that the container F is loaded onto the racks 134 by pressing the bottom surface of the container F.

[0062] The door 136 can be set so that the operator can manually load or unload the container F stored in the racks 134. The door 136 can be made of a transparent material to check its interior.

[0063] The mobile loading unit 130 stores the container F conveyed between the loading / unloading unit 120 and the loading port 520. As Figure 6 and Figure 7 shown, the mobile frame 132 can be set to slide or open / close and move forward from the main frame 150. Although not shown, the mobile frame 132 can move along wheels or tracks. When the mobile frame 132 moves forward from the main frame 150, an empty space is formed between the mobile frame 132 and the main frame 150, and the operator can easily perform maintenance on the stacker device 100 through this empty space.

[0064] The mobile loading unit 130 can be provided with a separate storage space 138 below the first-level rack. A chemical liquid storage unit (not shown), chemical liquid supply equipment (pumps, filters, etc.), and the like can be provided in the storage space 138.

[0065] Meanwhile, the loading / unloading unit 120 is connected to the main frame 150. Therefore, even when the moving loading unit 130 is moved during the movement of the moving frame 132, the position of the loading / unloading unit 120 is not changed. Therefore, after the maintenance work of the stacker device 100 is completed, when the moving loading unit 130 is docked to the main frame 150 again, the position of the loading / unloading rack 122 may not be realigned.

[0066] When the top plate transfer cart 20 transfers the container F to the loading / unloading rack 122 of the loading / unloading unit 120, the stacker device 100 receives the container F and temporarily stores the container F until the container F is transferred to the loading port 520 of the processing device main body 500. Therefore, the next container F can be accommodated in the loading / unloading unit 120. In addition, the stacker device 100 temporarily stores the container F unloaded from the processing device main body 500 and delivers the container F to the loading / unloading unit 120 when the loading / unloading unit 120 is empty. Therefore, in the loading / unloading unit 120, the top plate transfer cart 20 is in a state where it can receive the container F. In this way, the stacker device 100 temporarily stores the container F, thereby reducing the waiting time of the top plate transfer cart 20, thereby improving the transfer efficiency. In addition, the stacker device 100 temporarily stores the container F received from the top plate transfer cart 20 and then transfers the container F to the loading port 520 when the loading port 520 of the processing device main body 500 is empty. Therefore, the processing device main body 500 can quickly receive the next container F after the processing is completed. In addition, when the processing device main body 500 unloads the container F from the loading port 520, the stacker device 100 receives and temporarily stores the container F. Therefore, the processing device main body 500 can transfer the next container F to the loading port 520. In this way, by temporarily storing the container F in the stacker device 100, the waiting time of the processing device main body 500 can be reduced, and the processing efficiency can be improved.

[0067] The container transfer device 200 can transfer the container F in the space surrounded by the main frame 150. Specifically, the container transfer device 200 can transfer the container F in the space above the loading port 520. The stacker device 100 can minimize the floor area occupied by the stacker device 100 by arranging the container transfer device 200 in the space above the loading port 520. In addition, the stacker device 100 can minimize the operation of loading or unloading the container in the loading port 520 by placing the container transfer device 200 in the space above the loading port 520.

[0068] The container transfer device 200 can transfer the container F between the loading / unloading unit 120, the moving loading unit 130, and the loading port 520. For example, the container transfer device 200 can transfer the container F loaded from the top plate transfer vehicle 20 to the loading / unloading rack 122 or the rack 134 of the moving loading unit 130. The container transfer device 200 can unload the container F stored in the rack 134 of the moving loading unit 130 and transfer the container F to the empty loading port 520. The container transfer device 200 can transfer the container F loaded from the top plate transfer vehicle 20 to the loading / unloading unit 120 or the loading port 520. In addition, the container transfer device 200 can transfer the container F containing the processed substrate from the loading port 520 to the rack 134 of the moving loading unit 130 or the loading / unloading rack 122.

[0069] Figure 8 is a diagram showing the container transfer device.

[0070] Referring to Figure 2 、 Figure 4 、 Figure 5 and Figure 8 , the container transfer device 200 can include a transfer manipulator 210, a horizontal drive unit 220, and a vertical drive unit 230.

[0071] The transfer manipulator 210 can include an arm 212 and a gripper 214. The arm 212 is a robotic arm having one or more joints, and the gripper 214 can be provided at the front end of the arm. The arm 212 can move the gripper 214 in the X direction and the Y direction, for example, by extending and contracting the joints. The gripper 214 is inserted under the flange portion of the container F and grips the container F. The arm 212 can move the container F in the X direction and the Y direction by extending and contracting the joints while gripping the container F with the gripper 214.

[0072] The horizontal drive unit 220 can include a horizontal guide 222 and a horizontal slider 224. The vertical drive unit 230 can include a vertical guide 232 and a vertical slider 234. The transfer manipulator 210 can move in the X direction and the Z direction by the horizontal drive unit 220 and the vertical drive unit 230.

[0073] The vertical guide 232 is installed on the opposite surfaces of the main frame 150 and extends in the Z direction (vertical direction). The vertical slider 234 is capable of moving along the vertical guide 232 in the Z direction. Both ends of the horizontal guide 222 are installed on the vertical slider 234 and extend in the X direction (horizontal direction - the direction in which the loading ports are arranged in a line). When the vertical slider 234 moves, the horizontal guide 222 moves in the Z direction together with the vertical slider 234. The horizontal slider 224 is capable of moving along the horizontal guide 222 in the X direction. When viewed from above, the horizontal guide 222 is located across the loading port 520.

[0074] The transfer manipulator 210 is installed on the horizontal slider 224. When the horizontal slider 224 moves, the transfer manipulator 210 moves in the x direction together with the horizontal slider 224. In addition, when the vertical slider 234 moves, the transfer manipulator 210 moves in the Z direction together with the horizontal slider 224.

[0075] Figures 9 to 12 FIG. is a diagram showing the transfer operation of the container F in the stacker device 100.

[0076] Hereinafter, the operation of transferring the container F loaded on the racks 122 and 134 of the loading unit 110 to the empty loading port 520 will be described.

[0077] As Figure 9 shown, before starting the container transfer operation, the container F is stored in the rack 134. In the container transfer device 200, the transfer manipulator 210 moves in the X direction and the Z direction so that the arm 212 is slightly above the position facing the rack 134.

[0078] As Figure 10 the arrow in shows, the arm 212 of the transfer manipulator 210 extends so that the gripper 214 moves upward from the container F stored in the rack 134. In this state, the flange portion of the container F is gripped by the gripper 214 by slightly lowering the transfer manipulator 210.

[0079] Next, as Figure 11 the arrow in shows, when the arm 212 contracts, the gripper 214 gripping the container F moves below the horizontal slider 224 (in the main frame). Next, the transfer manipulator 210 moves horizontally onto the empty loading port 520, and thus, the container F is located above the loading port 520.

[0080] Next, as Figure 12As shown by the arrow in , the container F is loaded onto the loading port 520 by moving the transfer robot 210 downward. Then, the gripping state of the gripper 214 on the container flange portion is released. In this way, the transfer operation of the container F from the rack 134 to the loading port 520 is completed.

[0081] As described above, in the container transfer device 200, since the transfer robot 210 is located above the loading port 520, an extension operation of the arm portion 212 is required to receive the container F loaded onto the loading unit 110, but no extension operation of the arm portion 212 is required to load the container F onto the loading port 520 or unload the container F from the loading port 520. Therefore, during the transfer of the container between the racks 122 and 134 and the loading port 520, the extension and folding operations of the arm portion 212 can be minimized, thereby shortening the container transfer time.

[0082] Figure 13 FIG. is a diagram showing a modified example of the substrate processing system.

[0083] As Figure 13 shown, the substrate processing system includes a processing apparatus main body 500 and a stacker device 100, which are provided with configurations and functions substantially similar to those of the above-described exemplary embodiments. Therefore, hereinafter, a modified example of the differences from this exemplary embodiment will be mainly described.

[0084] In this modified example, an additional loading unit 530 can be provided in the indexing unit 510 of the processing apparatus main body 500. The additional loading unit 530 is located above the indexing robot 512 of the indexing unit 510. The additional loading unit 530 has a plurality of racks 532. One surface of the additional loading unit 530 in contact with the main frame 150 can be open, so that the container transfer device of the stacker device can load the container onto the racks 532. The additional loading unit 530 can be separated from the internal space of the indexing unit.

[0085] As described above, the present invention can expand the storage capacity of the container by adding the loading unit 530 capable of loading the container to the indexing unit 510.

[0086] Figure 14 FIG. is a diagram showing a modified example of the container transfer device.

[0087] Referring to Figure 14 , the container transfer device 200a can include a transfer robot 210, a horizontal drive unit 220, and a vertical drive unit 230, and they are provided with configurations and functions substantially similar to those of the container transfer device shown in Figure 8 . Therefore, hereinafter, a modified example of the differences from this exemplary embodiment will be mainly described.

[0088] In a modified exemplary embodiment, the horizontal drive unit 220 of the container transfer device 200a may include a horizontal guide 222. The horizontal guide 222 may be provided with a vertical guide 232 of the vertical drive unit 230 so as to be movable in the horizontal direction. When viewed from above, the horizontal guide 222 may be located across the loading port 520. Both ends of the vertical guide 232 may be fixed to the main frame 150. Although not shown, the horizontal guide 222 is provided with a horizontal slider capable of moving along the horizontal guide 222, and the vertical guide 232 may move in the horizontal direction while being supported by the horizontal slider.

[0089] The vertical drive unit 230 may include a vertical guide 232 and a vertical slider 234. The vertical guide 232 is arranged to be movable along the horizontal guide 222. The vertical slider 234 is arranged to be movable in the vertical direction along the vertical guide 232.

[0090] The transfer manipulator 210 may be moved in the X direction and the Z direction by the horizontal drive unit 220 and the vertical drive unit 230. The transfer manipulator 210 may include an arm 212 and a gripper 214. The transfer manipulator 210 may be mounted on the vertical slider 234. The transfer manipulator 210 may move in the z direction together with the vertical slider 234. In addition, when the vertical guide 232 moves in the horizontal direction, the transfer manipulator 210 may move in the horizontal direction together with the vertical guide.

[0091] The foregoing exemplary embodiments are used to help understand the present invention and do not limit the scope of the present invention, and it should be understood that various modified exemplary embodiments derived from the foregoing exemplary embodiments are also included within the scope of the present invention. The technical protection scope of the present invention should be determined by the technical spirit of the claims, and it should be understood that the technical protection scope of the present invention is not limited to the literal description of the claims themselves, but rather to substantially equivalent technical values.

Claims

1. A stacker device, the stacker device being provided on a front face of a substrate processing apparatus in which a load port is horizontally placed, the stacker device comprising: a loading unit located in front of the load port and including a rack configured to store substrate receiving containers; as well as a main frame including a container transfer device configured to transfer the substrate holding container between the rack and the load port, Wherein, the container conveying device is located above the loading port.

2. The stacker device according to claim 1, wherein: The loading unit comprises: an in / out loading unit including an in / out rack at which the substrate accommodating container is loaded and unloaded by a top plate transfer vehicle; and A main loading unit includes a storage rack configured to store the substrate accommodating container transferred between the carry-in / carry-out loading unit and the load port.

3. The stacker device according to claim 2, wherein: The loading unit is configured to slide or open / close and move to the front of the main frame to ensure a space for maintenance.

4. The stacker device according to claim 2, wherein: The carry-in / carry-out loading unit is located above the main loading unit.

5. The stacker apparatus according to claim 4, wherein: The carry-in / carry-out loading unit is fixedly mounted on the main frame, and The main loading unit is configured to slide or open / close and move to the front of the main frame to ensure a space for maintenance.

6. The stacker apparatus according to claim 2, wherein: The main loading unit is configured such that the racks are arranged in multiple stages in the vertical direction, and A first-stage rack located at the lowest stage among the racks and a second-stage rack located directly above the first-stage rack have a greater floor height than other racks.

7. The stacker apparatus according to claim 1, wherein: A rack located at the topmost portion of the loading unit is configured to allow the substrate receiving container to be transferred between the rack and a top plate transfer vehicle.

8. The stacker apparatus according to claim 2, wherein: The container conveying device comprises: A transfer robot, the transfer robot comprising an arm, the arm being configured to clamp the substrate containing container; a horizontal driving unit configured to move the transfer robot in a horizontal direction; and A vertical drive unit is configured to move the transfer robot in a vertical direction.

9. The stacker apparatus according to claim 8, wherein: The horizontal driving unit is located above the loading port.

10. The stacker apparatus according to claim 8, wherein: The transfer robot is configured to perform loading and unloading of the substrate transfer container on the carry-in / carry-out rack or the storage rack with the arm in an extended state, and Loading and unloading of the substrate transfer container on the load port are performed with the arm in a folded state.

11. A substrate processing device, comprising: a main body including an index unit in which a loading port on which a substrate receiving container is placed is horizontally arranged on a front face; as well as a stacker device located in front of the index unit and configured to load and unload the substrate receiving container, Wherein, the stacker equipment comprises: a loading unit located in front of the loading port and configured to store the substrate receiving container; and A main frame includes a container transfer device configured to transfer the substrate receiving container between the loading unit and the loading port in a space above the loading port.

12. The substrate processing device according to claim 11, wherein: The loading unit is configured to slide to the front of the main frame to ensure a space for maintenance.

13. The substrate processing device according to claim 12, wherein: The loading unit comprises: an in / out loading unit including an in / out rack at which the substrate accommodating container is loaded and unloaded by a top plate transfer vehicle; and A main loading unit includes a storage rack that stores the substrate accommodating container transferred between the carry-in / carry-out loading unit and the load port.

14. The substrate processing device according to claim 13, wherein: The in / out loading unit is located above the main loading unit, The index unit further includes an additional loading unit that is accessible by the container transfer device and configured to store the substrate receiving container, and The additional loading unit is located above the indexing robot of the indexing unit.

15. The substrate processing device according to claim 13, wherein: The carry-in / carry-out loading unit is fixedly mounted on the main frame, and The main loading unit is configured to slide to the front of the main frame to ensure a space for maintenance.

16. The substrate processing device according to claim 13, wherein: The main loading unit is configured such that the racks are arranged in multiple stages in the vertical direction, and A first-stage rack located at the lowest stage among the racks and a second-stage rack located directly above the first-stage rack have a greater floor height than other racks.

17. The substrate processing device according to claim 12, wherein: The container conveying device comprises: A transfer robot, the transfer robot comprising an arm, the arm being configured to clamp the substrate containing container; a horizontal driving unit configured to move the transfer robot in a horizontal direction; and a vertical drive unit configured to move the transfer robot in a vertical direction, and The horizontal drive unit is located above the loading port, and The transfer robot is configured to perform loading and unloading of the substrate transfer container on the load port with the arm in a folded state.

18. A substrate processing device, comprising: A main body, the main body comprising a processing unit and an index unit, the processing unit is equipped with a processing device for performing a predetermined processing on a substrate, the index unit is located in front of the processing unit, and a loading port in the index unit is horizontally arranged on the front, and a substrate receiving container is placed on the loading port; as well as a stacker device located in front of the index unit and configured to load and unload the substrate receiving container, Wherein, the stacker equipment comprises: a loading unit including a carry-in / carry-out rack located in front of the load port and at which the substrate accommodating container is loaded and unloaded by a top plate transfer vehicle, and a storage rack located below the carry-in / carry-out rack and configured to store the substrate accommodating container transferred between the carry-in / carry-out rack and the load port; and a main frame including a container transfer device configured to transfer the substrate receiving container between the loading unit and the loading port in a space above the loading port, and The loading unit further includes a moving frame configured to be slidably moved to the front of the main frame, and the storage racks are arranged in a plurality of stages in a vertical direction on the moving frame.

19. The substrate processing device according to claim 18, wherein: The carry-in / carry-out rack is fixedly mounted to the main frame, and The storage racks in the first level located at the lowest level among the storage racks and the storage racks located directly above the storage racks in the first level have a greater layer height than other storage racks, and The index unit further includes an additional loading unit that is accessible by the container transfer device and configured to store the substrate receiving container, and The additional loading unit is located above the indexing robot of the indexing unit.

20. The substrate processing device according to claim 18, wherein: The container conveying device comprises: A transfer robot, the transfer robot comprising an arm, the arm being configured to clamp the substrate containing container; a horizontal driving unit located above the load port and configured to move the transfer robot in a horizontal direction; and a vertical drive unit configured to move the transfer robot along the vertical direction, and The transfer robot is configured to perform loading and unloading of the substrate transfer container on the carry-in / carry-out rack or the storage rack with the arm in an extended state, and Loading and unloading of the substrate transfer container on the load port are performed with the arm in a folded state.

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