Radio frequency phase control system and method applied to ion multistage acceleration control

Abstract

The invention provides a radio frequency phase control system and method applied to ion multi-stage acceleration control, which are applied to the technical field of general control or regulation systems, and the system comprises a reference signal module and a plurality of electrode acceleration modules which are connected end to end to form a multi-stage ion acceleration channel, each electrode acceleration module comprises a phase control unit, a power amplification unit and an electrode load unit. A reference signal and a phase offset are received, a reference phase of the reference signal is adjusted based on the phase offset to obtain a reference phase, and the phase of an electrode of an electrode load unit is controlled based on the reference phase, so that the phase difference between the phase of the electrode and the reference phase is kept within a preset phase fluctuation range. Thus, the phases of the electrodes in the ion acceleration channels can be controlled, the phase difference of the electrodes is controlled within the preset phase fluctuation range, and then the negative influence on the ion implantation quality due to the fact that ion acceleration is not expected due to phase mismatching is reduced.

Description

Technical Field

[0001] This application relates to the technical field of general control or regulation systems, and in particular, to a radio frequency phase control system and method applied to ion multi-stage acceleration control. Background Art

[0002] An ion implanter is a device used to implant ions into materials and is widely used in fields such as semiconductor manufacturing. In the process of an ion implanter implanting ions into materials, an ion acceleration method is adopted to inject the accelerated ion beam onto the material surface, where the ions interact with the atoms or molecules in the material, causing physical and chemical changes in the material to form a structural layer with specific properties.

[0003] The ion acceleration method can accelerate ions from ultra-low energy to ultra-high energy, such as from 0.1 keV to several MeV. Here, keV is kilo-electron volt, MeV is mega-electron volt, and 1 MeV = 1000 keV. The ion acceleration method includes multi-stage acceleration, specifically accelerating ions step by step through multi-stage electric fields, which can avoid the breakdown risk brought by single-stage high voltage. Common schemes in existing multi-stage ion acceleration implementation means include: an implementation scheme based on a radio frequency linear accelerator, an implementation scheme using a tandem accelerator, and an implementation scheme using plasma immersion multi-stage acceleration.

[0004] Among them, for the implementation scheme using radio frequency linear acceleration, phase mismatch easily occurs, so that only ions in a suitable phase can be effectively accelerated, while some ions cannot be fully accelerated or even decelerated due to phase matching, resulting in the ion beam not reaching the expected energy after being accelerated through the multi-stage ion channel, affecting the quality of ion implantation. Summary of the Invention

[0005] In view of this, embodiments of this application provide a radio frequency phase control system and method applied to ion multi-stage acceleration control to control the phase during ion acceleration and reduce the negative impact on the ion beam acceleration effect caused by poor phase matching.

[0006] In a first aspect, embodiments of this application provide a radio frequency phase control system applied to ion multi-stage acceleration control, characterized in that the radio frequency phase control system includes: a reference signal module and several electrode acceleration modules. Among them, each of the electrode acceleration modules is connected end to end to form a multi-stage ion acceleration channel, and each of the electrode acceleration modules includes: a phase control unit, a power amplification unit, and an electrode load unit, where: The phase control unit is used to: Receive the reference signal and the phase offset sent by the reference signal module; Adjust the reference phase of the reference signal based on the phase offset to obtain a reference phase; Use the reference phase as a control standard to control the phase of the electrode of the electrode load unit, so that the phase difference between the phase of the electrode of the electrode load unit and the reference phase remains within a preset phase fluctuation range; Output a phase control signal; The power amplification unit is used to amplify the power of the phase control signal to obtain a target drive signal; The electrode acceleration module is used to generate an acceleration voltage according to the phase of the electrode whose phase difference remains within the preset phase fluctuation range under the drive of the target drive signal, and provide energy for accelerating ions input into the ion acceleration channel corresponding to the electrode acceleration module.

[0007] Combined with the first aspect, in a second possible embodiment, the phase control unit at least includes: a voltage-controlled phase shifter, a phase discriminator, and a signal processing subunit, where: The voltage-controlled phase shifter is used to receive the reference signal and the phase offset, and adjust the reference phase of the reference signal based on the phase offset to obtain a reference phase; The phase discriminator is used to lock the reference phase and the phase of the electrode of the electrode load unit, compare the reference phase and the phase of the electrode of the electrode load unit, and output a comparison voltage signal; The signal processing subunit is used to filter, frequency-adjust, and frequency-divide the comparison voltage signal, and then output the phase control signal.

[0008] Combined with the second possible embodiment of the first aspect, in a third possible embodiment, the signal processing subunit includes: a loop filter, a voltage-controlled oscillator, and a frequency divider; where: The loop filter is used to filter the ripple contained in the comparison voltage signal to obtain a target DC voltage signal; The voltage-controlled oscillator is used to determine the frequency of the target high-frequency voltage signal according to the voltage value of the target DC voltage signal; The frequency divider is used to frequency-divide the target high-frequency voltage signal based on the frequency of the target high-frequency voltage signal to obtain the phase control signal having the same frequency as the reference signal.

[0009] In combination with the first aspect, in the fourth possible embodiment, the electrode acceleration module further includes: a signal attenuation unit, an input end of the signal attenuation unit is connected to an output end of the electrode load unit, an output end of the signal attenuation unit is connected to an input end of the phase control unit, and the signal attenuation unit is configured to: Reduce the signal strength of the phase signal of the electrode of the electrode load unit, so that the signal strength of the phase signal of the electrode is kept at the same order of magnitude as the signal strength of the reference signal; Output the target phase signal of the electrode of the electrode load unit after reduction to the phase control unit, so that the phase control unit controls the phase of the electrode of the electrode load unit based on the reference phase.

[0010] In combination with the first aspect, in the fifth possible embodiment, the radio frequency phase control system is applied to a radio frequency phase control hardware circuit, wherein the radio frequency phase control hardware circuit includes: a processing chip and an EtherCAT slave chip, and the processing chip and the EtherCAT slave chip are connected through an industrial Ethernet protocol. The processing chip is configured to: Determine the phase offset according to the ion acceleration result of the last-stage ion acceleration channel; Send the phase offset to the phase control unit based on a preset digital interface, so that the phase control unit adjusts the reference phase of the reference signal based on the phase offset to obtain a reference phase; The EtherCAT slave chip is configured to: Obtain a power control signal from a host computer and store the power control signal in a specified storage location; The processing chip is further configured to: Obtain the power control signal from the specified storage location and send the power control signal to the power amplification unit, so that the power amplification unit amplifies the power of the phase control signal according to the power control signal.

[0011] In combination with the first aspect, in the sixth possible embodiment, the preset phase fluctuation range is: the phase difference fluctuates by ±0.1°, the phase value of the reference phase and the phase value of the electrode are any values in the range of 0 to 360°, and the signal frequency of the reference signal is positively correlated with the energy of the target ions accelerated by the multi-stage ion acceleration channel.

[0012] In combination with the sixth possible embodiment of the first aspect, in the seventh possible embodiment, the signal frequency of the reference signal is 13.56 MHz.

[0013] In a second aspect, the present application provides a radio frequency phase control method applied to ion multi-stage acceleration control. The method is applied to the radio frequency phase control system described in the first aspect, and the method includes: Receiving a reference signal and a phase offset sent by a reference signal module; Adjusting the reference phase of the reference signal based on the phase offset to obtain a reference phase; Using the reference phase as a control standard to control the phase of the electrodes of the electrode load unit, so that the phase difference between the phase of the electrodes of the electrode load unit and the reference phase remains within a preset phase fluctuation range, and outputting a phase control signal; Amplifying the power of the phase control signal to obtain a target drive signal, so that the electrode load unit generates an acceleration voltage according to the phase of the electrode whose phase difference remains within the preset phase fluctuation range under the drive of the target drive signal, and provides energy for accelerating ions input into the ion acceleration channel corresponding to the electrode acceleration module.

[0014] Combined with the second aspect, in a second possible embodiment, the phase control unit at least includes: a voltage-controlled phase shifter, a phase discriminator, and a signal processing subunit. The method further includes: Using the voltage-controlled phase shifter to receive the reference signal and the phase offset, and adjusting the reference phase of the reference signal based on the phase offset to obtain a reference phase; Using the phase discriminator to lock the reference phase and the phase of the electrodes of the electrode load unit, comparing the reference phase and the phase of the electrodes of the electrode load unit, and outputting a comparison voltage signal; Using the signal processing subunit to filter, frequency-adjust, and divide the comparison voltage signal, and then output the phase control signal.

[0015] Combined with the second possible embodiment of the second aspect, in a third possible embodiment, the signal processing subunit includes: a loop filter, a voltage-controlled oscillator, and a frequency divider. The method further includes: Using the loop filter to filter the ripple contained in the comparison voltage signal to obtain a target DC voltage signal; Determining the frequency of the target high-frequency voltage signal by the voltage-controlled oscillator according to the voltage value of the target DC voltage signal; Using the frequency divider to divide the target high-frequency voltage signal based on the frequency of the target high-frequency voltage signal to obtain the phase control signal having the same frequency as the reference signal.

[0016] In combination with the second aspect, in a fourth possible embodiment, the electrode acceleration module further includes: a signal attenuation unit, an input end of the signal attenuation unit is connected to an output end of the electrode load unit, an output end of the signal attenuation unit is connected to an input end of the phase control unit, and the method further includes: Reducing, by the signal attenuation unit, a signal strength of a phase signal of an electrode of the electrode load unit, so that the signal strength of the phase signal of the electrode is kept at the same order of magnitude as a signal strength of the reference signal; and outputting a target phase signal of the electrode of the electrode load unit after reduction to the phase control unit, so that the phase control unit controls a phase of the electrode of the electrode load unit based on the reference phase.

[0017] In combination with the second aspect, in a fifth possible embodiment, the method is implemented by a radio frequency phase control hardware circuit, where the radio frequency phase control hardware circuit includes: a processing chip and an EtherCAT slave chip, and the processing chip and the EtherCAT slave chip are connected through an industrial Ethernet protocol, and the method further includes: Determining the phase offset according to an ion acceleration result of a last-stage ion acceleration channel; Sending the phase offset to the phase control unit based on a preset digital interface, so that the phase control unit adjusts a reference phase of the reference signal based on the phase offset to obtain a reference phase; Obtaining a power control signal from a host computer and storing the power control signal in a specified storage location; Obtaining the power control signal from the specified storage location and sending the power control signal to a power amplification unit, so that the power amplification unit amplifies a power of the phase control signal according to the power control signal.

[0018] In combination with the second aspect, in a sixth possible embodiment, the preset phase fluctuation range is: a phase difference fluctuation of ±0.1°, a phase value of the reference phase and a phase value of the electrode are any values in 0 to 360°, and a signal frequency of the reference signal is positively correlated with an energy of a target ion accelerated by the multi-stage ion acceleration channel.

[0019] In combination with the sixth possible embodiment of the second aspect, in a seventh possible embodiment, the signal frequency of the reference signal is 13.56 MHz.

[0020] In a third aspect, an embodiment of the present application provides an electronic device, where the electronic device includes: A processor; and A memory storing a program, Wherein, the program includes instructions that, when executed by the processor, cause the processor to execute the radio frequency phase control method for ion multi-stage acceleration control described in the second aspect.

[0021] In a fourth aspect, an embodiment of the present application provides a non-transitory computer-readable storage medium storing computer instructions, characterized in that the computer instructions are used to cause a computer to execute the radio frequency phase control method for ion multi-stage acceleration control described in the first aspect.

[0022] Advantages of the present application: The present application provides a radio frequency phase control system and method for ion multi-stage acceleration control. The radio frequency phase control system includes: a reference signal module and a plurality of electrode acceleration modules. Among them, the electrode acceleration modules are connected end to end to form a multi-stage ion acceleration channel. Each electrode acceleration module includes: a phase control unit, a power amplification unit, and an electrode load unit. The phase control unit receives the reference signal and the phase offset sent by the reference signal module, and then adjusts the reference phase of the reference signal based on the phase offset to obtain a reference phase. Taking the reference phase as the control standard, the phase of the electrode of the electrode load unit is controlled so that the phase difference between the phase of the electrode of the electrode load unit and the reference phase remains within a preset phase fluctuation range, and a phase control signal is output.

[0023] Then, the power of the phase control signal is amplified by the power amplification unit to obtain a target drive signal, so that the electrode acceleration module can generate an acceleration voltage according to the phase of the electrode whose phase difference remains within the preset phase fluctuation range under the drive of the target drive signal, and provide energy for the acceleration of ions input into the corresponding acceleration channel of the electrode acceleration module.

[0024] By selecting the embodiment of the present application, the phase of the electrodes in each ion acceleration channel in the multi-stage ion acceleration can be controlled, so that the phase difference of the electrodes is controlled within the preset phase fluctuation range, thereby reducing the negative impact on the ion implantation quality caused by the phase mismatch and unexpected ion acceleration. Description of the drawings

[0025] In the following description of the exemplary embodiments in conjunction with the drawings, more details, features, and advantages of the present application are disclosed. In the drawings: Figure 1 Shows a schematic diagram of a system architecture of a radio frequency phase control system for ion multi-stage acceleration control provided by an embodiment of the present application; Figure 2 Shows a schematic diagram of a circuit logic of a phase control unit provided by an embodiment of the present application; Figure 3Shows another circuit logic schematic diagram of the phase control unit provided by the embodiments of the present application; Figure 4 Shows another system architecture schematic diagram of the radio frequency phase control system applied to ion multi-stage acceleration control provided by the embodiments of the present application; Figure 5 Shows a flowchart of a radio frequency phase control method applied to ion multi-stage acceleration control provided by the embodiments of the present application; Figure 6 Shows a structural block diagram of an exemplary electronic device that can be used to implement the embodiments of the present application. Detailed implementation manners

[0026] The embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although some embodiments of the present application are shown in the drawings, it should be understood that the present application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. On the contrary, these embodiments are provided to more thoroughly and completely understand the present application. It should be understood that the drawings and embodiments of the present application are only for exemplary purposes and are not used to limit the protection scope of the present application.

[0027] It should be understood that the steps recorded in the method embodiments of the present application can be executed in different orders and / or in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this regard.

[0028] The term "including" and its variants used herein are open-ended, that is, "including but not limited to". The term "based on" is "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts such as "first" and "second" mentioned in the present application are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependent relationships.

[0029] It should be noted that the modifications of "one" and "multiple" mentioned in the present application are illustrative rather than restrictive. Those skilled in the art should understand that unless clearly specified otherwise in the context, it should be understood as "one or more".

[0030] Regarding the poor ion acceleration effect caused by ion phase mismatch, it can be understood as follows: Suppose there are N ion acceleration channels in a multi-stage ion channel. If the phases of each ion acceleration channel are the same, then ions with phase mismatch will not be accelerated from the first stage to the Nth stage, and only ions with phase matching will be accelerated. As a result, the total amount of ions in the finally accelerated ion beam is small, leading to the energy of the entire ion beam falling short of expectations and further affecting the quality of the ion-implanted products.

[0031] In view of this, the present application provides a radio frequency phase control system and method applied to multi-stage ion acceleration control. Among them, the radio frequency phase control system can be as Figure 1 shown, including: a reference signal module, and a plurality of electrode acceleration modules (specifically, electrode acceleration module 1, electrode acceleration module 2, electrode acceleration module 3... electrode acceleration module n). Among them, the electrode acceleration modules are connected end to end to form a multi-stage ion acceleration channel. Low-energy ions enter the multi-stage ion acceleration channel from the first electrode acceleration module 1, and then are output from the last-stage electrode acceleration module n to obtain high-energy ions.

[0032] Each of the electrode acceleration modules includes: a phase control unit, a power amplification unit, and an electrode load unit. As Figure 1 shown, electrode acceleration module 1 includes phase control unit 1, power amplification unit 1, and electrode load unit 1. Electrode acceleration module 2 includes phase control unit 2, power amplification unit 2, and electrode load unit 2. Electrode acceleration module 3 includes phase control unit 3, power amplification unit 3, and electrode load unit 3... Electrode acceleration module n includes phase control unit n, power amplification unit n, and electrode load unit n. Among them: The phase control unit in each electrode acceleration module is respectively used for: receiving the reference signal and the phase offset sent by the reference signal module; adjusting the reference phase of the reference signal based on the phase offset to obtain a reference phase; using the reference phase as a control standard to control the phase of the electrode of the electrode load unit, so that the phase difference between the phase of the electrode of the electrode load unit and the reference phase remains within a preset phase fluctuation range; outputting a phase control signal; The power amplification unit is used for amplifying the power of the phase control signal to obtain a target drive signal; The electrode acceleration module is used for generating an acceleration voltage according to the phase of the electrode whose phase difference remains within the preset phase fluctuation range under the drive of the target drive signal, and providing energy for accelerating the ions input into the corresponding ion acceleration channel of the electrode acceleration module.

[0033] Selecting the embodiment of the present application, a phase control unit and a power amplification unit are added on the basis of the circuit of the traditional multi-stage ion acceleration channel. Through the mutual cooperation of the phase control unit, the power amplification unit and the electrode load unit, with the reference signal as the unified phase reference for all electrode load units, and then using different phase offsets for offset to obtain the reference phase, and using this reference phase to control the phase of the electrodes of the electrode load unit. It is possible to realize the phase control of the electrodes in each ion acceleration channel in the multi-stage ion acceleration, so that the phase difference of the electrodes is controlled within the preset phase fluctuation range, thereby reducing the negative impact on the ion implantation quality caused by the phase mismatch and the unexpected ion acceleration.

[0034] The following will combine specific examples to detail the radio frequency phase control system and method provided by the present application: In the embodiment of the present application, the radio frequency phase control system is an industrial software control system, which can be deployed in any electronic device with radio frequency phase control capabilities. Similarly, the radio frequency phase control method can be applied to any electronic device with radio frequency phase control capabilities. The electronic device includes but is not limited to: personal mobile terminals, ordinary computers, industrial computers, industrial control computers or servers, etc.

[0035] Among them, as an implementation manner, the radio frequency phase control system can be implemented through the corresponding radio frequency phase control hardware circuit. Among them, the radio frequency phase control hardware circuit can be implemented based on the existing industrial control hardware circuit, or can be implemented through the radio frequency phase control hardware circuit mentioned later in the present application. This will not be elaborated here for the time being.

[0036] In the embodiment of the present application, the reference signal module is used to provide a reference signal, and this reference signal is the control standard for the electrode phases of all electrode acceleration modules. It can be understood that in the embodiment of the present application, the same reference phase is adopted as the basis for adjusting the electrode phases. Different phase offsets are used on different electrodes to adjust the phases of the electrodes, so that there is a certain phase difference in the phases of the electrodes of each electrode load unit in the multi-stage ion acceleration channel, thereby ensuring that enough ions can be accelerated due to phase matching, and finally obtaining an ion beam with an ion energy meeting the expectations.

[0037] In the embodiments of the present application, the reference signal module is the reference signal source of the entire radio frequency phase control system, capable of generating a stable signal with specific frequency and phase characteristics, and providing a unified common reference benchmark for each electrode acceleration module. Among them, as an implementation manner, the reference signal module can use a high-precision crystal oscillator or atomic clock as the signal source to generate a stable reference signal with a specific frequency. Among them, in the actual circuit design process, through reasonable circuit design and shielding measures, the influence of external interference on the reference signal can be reduced, ensuring the frequency stability and phase accuracy of the reference signal.

[0038] In some possible embodiments, the phase range of the reference signal generated by the reference signal module is: any value within 0 to 360°. The signal frequency of this reference signal depends on the ion energy ultimately expected to be obtained by the entire multi-stage ion acceleration channel. Specifically, the signal frequency of the reference signal is positively correlated with the energy of the target ions accelerated by the multi-stage ion acceleration channel, that is, the higher the energy of the target ions required to be accelerated by the multi-stage ion acceleration channel, the higher the signal frequency of this reference signal. As a preferred implementation manner, the signal frequency of this reference signal can be 13.56 MHz. After actual engineering verification, when the signal frequency of the reference signal is 13.56 MHz, the application effect of the circuit of the phase control unit provided by the embodiments of the present application is better. The stable frequency of 13.56 MHz can ensure that when ions pass through each acceleration electrode, they maintain a stable interaction relationship with the radio frequency electric field, so that the ions can be accelerated by the electric field force at the appropriate moment in each acceleration stage, obtaining a continuous and stable acceleration effect, and ensuring that the energy finally obtained by the ions reaches the expected energy value, such as 1.5 MeV.

[0039] As described above, since the reference signal provides a unified common reference benchmark for each electrode acceleration module, in the embodiments of the present application, the phase value range of the phase of the electrode of each electrode load unit is the same as that of the reference phase, both being 0 to 360°. During the process of controlling the phase of the electrode, the phase difference between the two will always be stable within a preset phase fluctuation range. As a preferred implementation manner, this preset phase fluctuation range is: the phase difference fluctuates ±0.1°, that is, -0.1° < phase difference fluctuation < +0.1°.

[0040] In the embodiments of the present application, the phase offset refers to the offset that the phases of the electrodes on each electrode load unit should maintain. Among them, the phase offset can be sent by the reference signal module or obtained by the phase control unit from an external host computer or processing chip. Since each electrode load unit in the embodiments of the present application uses the same reference phase as the reference, the phase offset is also the phase difference between each electrode load unit. That is, if the phase offsets obtained by different phase control units are different, the phase differences between the electrodes of the electrode load units controlled by each phase control unit will also be different. However, in the embodiments of the present application, the phase differences between the phases of the electrodes corresponding to each phase control unit should also satisfy the preset phase fluctuation range.

[0041] Exemplarily, taking Figure 1 the system shown as an example, the phase difference between the electrodes of electrode load unit 1 and electrode load unit 2 should satisfy the preset phase fluctuation range, and the phase difference between the electrodes of electrode load unit 2 and electrode load 3 should also satisfy the preset phase fluctuation range, and so on. The phase differences between the electrodes of adjacent two electrode load units should satisfy the preset phase fluctuation range.

[0042] Similarly, as Figure 1 shown, each electrode acceleration module includes a phase control unit, a power amplification unit, and an electrode load unit. Among them, the phase control unit is the core control component in the entire electrode acceleration module and also the core component for the implementation of the solution of the present application. The phase control unit is mainly responsible for receiving the reference signal and the phase offset, adjusting the phase of the reference signal, and taking the adjusted phase as the standard to accurately control the electrode phase of the electrode load unit to ensure that the phase difference between the electrode phase and the reference phase is within the preset range, and at the same time outputting a phase control signal for subsequent processing. Among them, the type of the phase control unit can be various, such as: a phase detector and a phase controller implemented based on the phase-locked loop technology, a phase controller implemented based on the digital signal processing algorithm DSP, and a phase controller implemented based on a high-precision numerically controlled phase shifter. In the embodiments of the present application, the phase control unit is specifically constructed using the phase-locked loop technology, so that the phase difference between the phase of the electrode and the reference phase can be detected in real time and accurately, and the resolution can reach an extremely small angular range, thereby providing accurate feedback information for phase adjustment. Specifically, in some possible embodiments, the phase control unit constructed based on the phase-locked loop technology can be as Figure 2 shown, and at least includes: a voltage-controlled phase shifter, a phase discriminator, and a signal processing subunit. Among them: The voltage-controlled phase shifter is used to receive the reference signal and the phase offset, and adjust the reference phase of the reference signal based on the phase offset to obtain a reference phase; The phase detector is used to lock the reference phase and the phase of the electrode of the electrode load unit, compare the reference phase with the phase of the electrode of the electrode load unit, and output a comparison voltage signal; The signal processing sub-unit is used to filter, frequency-adjust, and frequency-divide the comparison voltage signal, and then output the phase control signal.

[0043] Among them, the voltage-controlled phase shifter is a circuit device that adjusts the phase of the input signal by changing the control voltage. The voltage-controlled phase shifter is connected to the reference signal module and the upper computer or processing chip outside the radio frequency phase control system, obtains the reference signal from the reference signal module, and obtains the phase offset from the upper computer or processing chip. Then, based on the phase offset, the reference phase of the reference signal is adjusted to obtain the reference phase. Specifically, the reference phase can be offset according to the phase offset, and the offset phase value is the phase value of the reference phase. Exemplarily, assuming that the current reference phase is 3° and the offset is +1°, then the phase value of the reference phase is 4°. Among them, as Figure 3 shown, the relative offset signal VP can be obtained from an external upper computer or processing chip. The VP can be a voltage signal. At this time, the actual phase offset is the phase value of the voltage signal VP. The reference signal Fr and the phase offset signal VP are input into the voltage-controlled phase shifter, the phase of the reference signal Fr is offset, and the reference voltage signal Fs is output. The reference phase is the phase of the reference voltage signal Fs.

[0044] The phase detector can be understood as a phase-locked loop, which is used to lock the current phase value of the signal input to the phase detector. Specifically, as Figure 2 shown, the phase F1 of the electrode of the electrode load unit is input into the phase detector, and the reference voltage signal Fs is input into the phase detector. Then, once the phase of the reference voltage signal Fs is the same as the phase of the electrode F1, the phase detector locks and no longer outputs the corresponding output value. If the phase of the reference voltage signal Fs is different from the phase of the electrode F1, the phase difference between the reference voltage signal Fs and the phase of the electrode F1 will be detected, and the comparison voltage between the reference voltage signal Fs and the electrode voltage of the electrode can be calculated and output. The phase difference between Fs and F1 is reflected by the phase of the comparison voltage, and then the phase of the voltage signal of the electrode is adjusted according to the comparison voltage until the phase of the reference voltage signal is the same as the phase of the electrode and the phase detector locks. In this way, the effect of controlling and adjusting the phase of the electrode can be achieved.

[0045] Since the output comparison voltage contains noise and is at a different frequency from the reference signal, in the embodiments of the present application, by outputting the output comparison voltage to the signal sub-processing unit, the signal sub-processing unit filters, frequency-adjusts, and divides the input comparison voltage, and then outputs the phase control signal. In this way, the output phase control signal does not contain noise and has the same frequency as the reference signal, which helps to more accurately control and adjust the phase of the electrode voltage of the electrode load.

[0046] Among them, as a possible implementation manner, it can be as Figure 3 shown. The signal processing sub-unit includes: a loop filter, a voltage-controlled oscillator, and a frequency divider; where: The loop filter is used to filter the ripple contained in the comparison voltage signal to obtain a target DC voltage signal; The voltage-controlled oscillator is used to determine the frequency of the target high-frequency voltage signal according to the voltage value of the target DC voltage signal; The frequency divider is used to divide the target high-frequency voltage signal based on the frequency of the target high-frequency voltage signal to obtain the phase control signal with the same frequency as the reference signal.

[0047] Since the phase discriminator locks and compares the phases of Fs and G1, the voltage value of the output comparison voltage signal can represent the phase difference between Fs and G1. However, the comparison voltage signal output by the phase discriminator contains the ripple of the comparison frequency. In the present application, a loop filter is used to filter the ripple in the comparison signal to reduce the interference of the ripple on the signal, thereby obtaining a DC signal with less ripple. This DC signal with less ripple is the target DC voltage signal, and the voltage value of the target DC voltage signal can still represent the phase difference between Fs and G1. The larger the voltage value of the target DC voltage signal, the greater the phase difference between Fs and G1, and the two are in a positive correlation. Among them, the loop filter can preferably be a low-pass filter, such as an RC (Resistance-Capacitance) low-pass filter or an active filter.

[0048] Among them, a voltage-controlled oscillator refers to an oscillating circuit in which the output frequency has a corresponding relationship with the input control voltage. According to the proportional relationship between the frequency of the reference signal and the voltage value of the input DC signal, the frequency of the output signal of the voltage-controlled oscillator is directly proportional to the voltage value of the input signal. Based on this, a target high-frequency voltage signal can be output through this proportional relationship. Among them, the frequency of the target high-frequency voltage signal is directly proportional to the voltage value of the target DC voltage signal. Also, since the voltage value of the target current voltage signal is positively correlated with the phase difference between Fs and G1, based on this, the higher the frequency of the corresponding target high-frequency voltage signal, the greater the phase difference between Fs and G1.

[0049] Then, the frequency of the target high-frequency voltage signal is output to a frequency divider. The frequency divider performs frequency conversion on the frequency fh of the target high-frequency voltage signal. Exemplarily, the frequency of the target high-frequency voltage signal is halved by a frequency divider with a division ratio of two, obtaining 1 / 2fh. At this time, 1 / 2fh is used to control the phase of the electrode load unit, which can reduce the phase difference between Fs and G1. Similarly, by continuously repeating the above process, the frequency fh of the target high-frequency voltage signal can be converted to the same frequency as the reference signal, and then a phase control signal with the same frequency as the reference signal is obtained.

[0050] In the embodiment of the present application, since the power of the phase control signal and the power of the electrode load unit are not in the same order of magnitude, in order to enable the phase control signal to control the electrode load unit, the power of the phase control signal is amplified by a power amplification unit. Specifically, it can be as Figure 3 shown. Specifically, the power amplification unit can collect information such as the comparison voltage output by the phase discriminator and the working state of the power amplification unit in real time through an analog-to-digital converter, obtain the corresponding power amplification multiple through data IO, and amplify the phase control signal based on this power amplification multiple to obtain the amplified phase control signal, that is, the target drive signal. Among them, the power amplification multiple is obtained by taking the ratio of the power of the comparison voltage and the power of the electrode load unit.

[0051] Among them, a suitable radio frequency power amplifier can be selected for the power amplification unit. According to the characteristics of the phase control signal output by the phase control unit and the driving requirements of the electrode load unit, a power amplifier with sufficient power amplification multiple and bandwidth is selected. By obtaining the voltage signal sent by the processing chip as Figure 4 shown, the amplification multiple of the power amplifier is precisely controlled, and at the same time, the working state of the power amplifier is monitored and feedback-controlled in real time by using an analog-to-digital converter and data IO to ensure that the power amplification unit works stably and efficiently and outputs a target drive signal with sufficient power.

[0052] In the embodiments of the present application, the main function of the electrode loading unit is: driven by the target drive signal output by the power amplification unit, to generate an acceleration voltage according to the precisely controlled electrode phase, providing the required energy for ion acceleration, and being the actual component for the interaction between ions and the acceleration electric field.

[0053] In some possible embodiments, the electrode acceleration module provided by the present application further includes: a signal attenuation unit, the input end of the signal attenuation unit is connected to the output end of the electrode loading unit, the output end of the signal attenuation unit is connected to the input end of the phase control unit, and the signal attenuation unit is used for: Reducing the signal strength of the phase signal of the electrode of the electrode loading unit, so that the signal strength of the phase signal of the electrode is kept at the same order of magnitude as the signal strength of the reference signal; Outputting the target phase signal of the electrode of the electrode loading unit after reduction to the phase control unit, so that the phase control unit controls the phase of the electrode of the electrode loading unit based on the reference phase.

[0054] Among them, in some actual application scenarios, the entire phase control unit, especially the phase discriminator, operates at a low-level working voltage, while the electrode loading unit operates at a high-level working voltage. If the voltage signal of the electrode of the electrode loading unit is directly output to the phase discriminator, the phase discriminator will be broken down by high voltage and cannot work properly. Based on this, in order to ensure the safety of the phase discriminator and also protect the safety of the phase control unit, in the embodiments of the present application, a signal attenuator is added in the middle of the line where the electrode loading unit feeds back the phase of the electrode to the phase control unit. Through this signal attenuator, the signal strength of the voltage signal of the electrode is attenuated to be at the same order of magnitude as the signal strength of the phase control unit. Exemplarily, if the voltage signal of the electrode is 150 KV and the working voltage of the phase control unit is 220 V, then by adding a signal attenuator between the two, the 150 KV voltage is reduced to 220 V. Among them, the working principle of the signal attenuator is the same as that of the traditional signal attenuator, and only the attenuation coefficient is determined according to the actual voltage signal of the electrode and the working voltage of the phase control unit.

[0055] Specifically, it can be as Figure 3As shown, the output end of the signal attenuator is connected to the input end of the phase discriminator of the phase control unit. By attenuating the output voltage F1 of the electrode load unit to G1, and then comparing the phase of G1 with the reference voltage signal Fs. If the phase of the reference voltage signal Fs is the same as the phase G1 of the electrode, the phase discriminator locks and no longer outputs the corresponding output value. If the phase of the reference voltage signal Fs is different from the phase G1 of the electrode, the phase difference between the reference voltage signal Fs and the phase G1 of the electrode will be detected, and then the comparison voltage between the reference voltage signal Fs and the electrode voltage of the electrode can be calculated. Then, the phase control of the electrode is performed again until the phases of Fs and G1 are the same.

[0056] In some possible embodiments, the radio frequency phase control system provided by the present application can be applied to a radio frequency phase control hardware circuit as shown in Figure 4 wherein the radio frequency phase control hardware circuit includes a processing chip and an EtherCAT slave chip. The processing chip and the EtherCAT slave chip are connected through an industrial Ethernet protocol. The processing chip is configured to: Determine the phase offset according to the ion acceleration result of the last-stage ion acceleration channel; Send the phase offset to the phase control unit based on a preset digital interface, so that the phase control unit adjusts the reference phase of the reference signal based on the phase offset to obtain a reference phase; The EtherCAT slave chip is configured to: Obtain a power control signal from the host computer and store the power control signal in a specified storage location; The processing chip is further configured to: Obtain the power control signal from the specified storage location and send the power control signal to the power amplification unit, so that the power amplification unit amplifies the power of the phase control signal according to the power control signal.

[0057] In the embodiment of the present application, the processing chip can be a single-chip microcomputer. As a preferred implementation, the processing chip can be a single-chip microcomputer STM32. The EtherCAT slave chip, as a slave controller, is responsible for cooperating with the processing chip (the processing chip can be regarded as a master chip) to complete data acquisition, data storage and other tasks. Among them, the slave chip has an EtherCAT interface, which can be connected to the master chip or slave chip in other EtherCAT chips, can receive, analyze and process the EtherCAT data stream, and store the processing results in a specified storage location. As a preferred implementation, the specified storage location can be an EEPROM (a storage space that comes with the EtherCAT protocol) storage space, which can store the configuration information between each module, as well as the various data sent by the optical fiber transceiver 1 and the optical fiber transceiver 2 through the physical layer 1 and the physical layer 2.

[0058] The processing chip reads and writes the internal storage area EEPROM in the slave chip through the FSMC (Flexible Static Memory Controller) to complete the entire data communication. The slave chip sends and receives data through the Ethernet physical layer and has a full-duplex working mode, so that the entire electrode phase can be efficiently controlled.

[0059] In the embodiment of the present application, the process of applying voltage to accelerate ions by the electrode load unit can be understood as follows: taking the ions as negative ions as an example, when the ions flow in from the left side of the electrode load unit, a positive voltage is applied to attract the ions for the first acceleration, and then after the ions flow into the electrode load unit, the electrode load unit applies a negative voltage to accelerate and push the ions out for the second acceleration. Each electrode load unit executes this structure to attract and push out the ions, accelerating step by step, and can achieve the effect of repeated acceleration and multi-stage acceleration. The specific voltage values ​​of the positive voltage and the negative voltage applied depend on the reference signal and the phase offset.

[0060] Among them, the phase offset required during phase control can be determined according to the result of the final ion acceleration. For the entire system, it is unknown to what extent the phase of the specific electrode of each electrode load unit needs to be controlled to obtain the expected ion acceleration result. The specific working state of each electrode load unit is equivalent to a black box. In the embodiments of the present application, by measuring the ion energy obtained after the final acceleration, if the ion energy is lower than the expectation, the phase of each electrode load unit needs to be adjusted. After each phase adjustment is completed, the ion energy is measured again. If the ion energy is still lower than the expected ion energy threshold, the phase of each electrode load unit is adjusted again, and so on, until the measured ion energy is greater than or equal to the preset ion energy threshold. Among them, the preset ion energy threshold can be set according to the actual process production and processing, and the present application does not make strict limitations.

[0061] Exemplarily, the reference signal uses a signal with a frequency of 13.56 MHz as the reference signal in the entire linear acceleration system. The phase of the reference signal is adjusted within the range of 0 to 360° by the phase control unit and then output. After that, the adjusted signal is output to the electrode load unit through the RF power amplifier. Under the loading of the 13.56 MHz frequency signal, the electrode load unit generates an accelerating high voltage ranging from 0 to 150 KV that varies sinusoidally with time under resonant conditions. Taking positive ions as an example, the phase control unit controls the output of the phase according to the position of the electrode, so that when the ion approaches the electrode, a negative voltage is applied to the electrode, and when the ion moves away from the electrode, a positive voltage is applied to the electrode, so that the ion obtains a continuous acceleration effect and finally obtains the required energy.

[0062] Based on the RF phase control system provided in the first aspect, in the second aspect, the present application provides an RF phase control method applied to ion multi-stage acceleration control, which can be as Figure 5 shown. The method includes the following steps: S51. Receive the reference signal and the phase offset sent by the reference signal module; S52. Adjust the reference phase of the reference signal based on the phase offset to obtain a reference phase; S53. Take the reference phase as the control standard to control the phase of the electrode of the electrode load unit, so that the phase difference between the phase of the electrode of the electrode load unit and the reference phase remains within the preset phase fluctuation range, and output a phase control signal; S54. Amplify the power of the phase control signal to obtain a target drive signal, so that the electrode load unit generates an accelerating voltage according to the phase of the electrode whose phase difference remains within the preset phase fluctuation range under the drive of the target drive signal, and provides energy for the ions accelerated in the ion acceleration channel corresponding to the electrode acceleration module.

[0063] In combination with the second aspect, in a second possible embodiment, the phase control unit at least includes: a voltage-controlled phase shifter, a phase discriminator, and a signal processing subunit. The method further includes: Using the voltage-controlled phase shifter to receive the reference signal and the phase offset, and adjusting the reference phase of the reference signal based on the phase offset to obtain a reference phase; Using the phase discriminator to lock the reference phase with the phase of the electrode of the electrode load unit, comparing the reference phase with the phase of the electrode of the electrode load unit, and outputting a comparison voltage signal; Using the signal processing subunit to filter, frequency-adjust, and divide-frequency process the comparison voltage signal, and then output the phase control signal.

[0064] In combination with the second possible embodiment of the second aspect, in a third possible embodiment, the signal processing subunit includes: a loop filter, a voltage-controlled oscillator, and a frequency divider. The method further includes: Using the loop filter to filter the ripple contained in the comparison voltage signal to obtain a target DC voltage signal; Determining the frequency of the target high-frequency voltage signal by the voltage-controlled oscillator according to the voltage value of the target DC voltage signal; Using the frequency divider to perform frequency division processing on the target high-frequency voltage signal based on the frequency of the target high-frequency voltage signal to obtain the phase control signal having the same frequency as the reference signal.

[0065] In combination with the second aspect, in a fourth possible embodiment, the electrode acceleration module further includes: a signal attenuation unit. The input end of the signal attenuation unit is connected to the output end of the electrode load unit, and the output end of the signal attenuation unit is connected to the input end of the phase control unit. The method further includes: Reducing the signal strength of the phase signal of the electrode of the electrode load unit through the signal attenuation unit, so that the signal strength of the phase signal of the electrode is kept at the same order of magnitude as the signal strength of the reference signal; and outputting the target phase signal of the electrode of the reduced electrode load unit to the phase control unit, so that the phase control unit controls the phase of the electrode of the electrode load unit based on the reference phase.

[0066] In combination with the second aspect, in a fifth possible embodiment, the method is implemented by a radio frequency phase control hardware circuit, where the radio frequency phase control hardware circuit includes: a processing chip and an EtherCAT slave chip, and the processing chip and the EtherCAT slave chip are connected through an industrial Ethernet protocol. The method further includes: Determine the phase offset according to the ion acceleration result of the last-stage ion acceleration channel; Send the phase offset to the phase control unit based on a preset digital interface, so that the phase control unit adjusts the reference phase of the reference signal based on the phase offset to obtain a reference phase; Obtain a power control signal from a host computer and store the power control signal in a specified storage location; Obtain the power control signal from the specified storage location and send the power control signal to a power amplification unit, so that the power amplification unit amplifies the power of the phase control signal according to the power control signal.

[0067] In combination with the second aspect, in a sixth possible embodiment, the preset phase fluctuation range is: the phase difference fluctuates by ±0.1°, the phase value of the reference phase and the phase value of the electrode are any values in the range of 0 to 360°, and the signal frequency of the reference signal is positively correlated with the energy of the target ions accelerated by the multi-stage ion acceleration channel.

[0068] In combination with the sixth possible embodiment of the second aspect, in a seventh possible embodiment, the signal frequency of the reference signal is 13.56 MHz.

[0069] In a third aspect, an exemplary embodiment of the present application further provides an electronic device, including: at least one processor; and a memory communicatively connected to the at least one processor. The memory stores a computer program that can be executed by the at least one processor, and when the computer program is executed by the at least one processor, it is used to cause the electronic device to execute the method according to the embodiments of the present application.

[0070] An exemplary embodiment of the present application further provides a non-transitory computer-readable storage medium storing a computer program, where the computer program is used to cause a computer to execute the method according to the embodiments of the present application when executed by a processor of the computer.

[0071] An exemplary embodiment of the present application further provides a computer program product, including a computer program, where the computer program is used to cause a computer to execute the method according to the embodiments of the present application when executed by a processor of the computer.

[0072] Reference Figure 6, a block diagram of an electronic device 600 that can be a server or a client of the present application will now be described. It is an example of a hardware device that can be applied to various aspects of the present application. The electronic device is intended to represent various forms of digital electronic computer devices, such as, laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as, personal digital processors, cellular phones, smart phones, wearable devices, and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present application described and / or claimed herein.

[0073] As Figure 6 shown, the electronic device 600 includes a computing unit 601, which can perform various appropriate actions and processes according to a computer program stored in the ROM 602 or a computer program loaded from the storage unit 608 into the RAM 603. In the RAM 603, various programs and data required for the operation of the electronic device 600 can also be stored. The computing unit 601, the ROM 602, and the RAM 603 are connected to each other via a bus 604. The I / O interface 605 is also connected to the bus 604.

[0074] Multiple components in the electronic device 600 are connected to the I / O interface 605, including: an input unit 606, an output unit 607, a storage unit 608, and a communication unit 609. The input unit 606 can be any type of device that can input information into the electronic device 600. The input unit 606 can receive input digital or character information, and generate key signal inputs related to the user settings and / or function controls of the electronic device. The output unit 607 can be any type of device that can present information, and can include but is not limited to a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. The storage unit 608 can include but is not limited to a magnetic disk, an optical disk. The communication unit 609 allows the electronic device 600 to exchange information / data with other devices via a computer network such as the Internet and / or various telecommunication networks, and can include but is not limited to a modem, a network card, an infrared communication device, a wireless communication transceiver, and / or a chipset, such as a BluetoothTM device, a WiFi device, a WiMax device, a cellular communication device, and / or the like.

[0075] The computing unit 601 can be various general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the computing unit 601 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various computing units running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The computing unit 601 executes the various methods and processes described above. For example, in some embodiments, the foregoing radio frequency phase control method applied to ion multi-stage acceleration control can be implemented as a computer software program, which is tangibly contained in a machine-readable medium, such as the storage unit 608. In some embodiments, part or all of the computer program can be loaded and / or installed onto the electronic device 600 via the ROM 602 and / or the communication unit 609. In some embodiments, the computing unit 601 can be configured to execute the foregoing radio frequency phase control method applied to ion multi-stage acceleration control in any other suitable manner (e.g., by means of firmware).

[0076] The program code for implementing the method of the present application can be written in any combination of one or more programming languages. These program codes can be provided to a processor or controller of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when the program codes are executed by the processor or controller, the functions / operations specified in the flowchart and / or block diagram are implemented. The program code can be executed entirely on the machine, partially on the machine, as an independent software package partially on the machine and partially on a remote machine, or entirely on a remote machine or server.

[0077] In the context of the present application, a machine-readable medium can be a tangible medium that can contain or store a program for use by or in connection with an instruction execution system, apparatus, or device. A machine-readable medium can be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium can include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing. More specific examples of a machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0078] As used in this application, the terms "machine-readable medium" and "computer-readable medium" refer to any computer program product, apparatus, and / or device (e.g., a magnetic disk, an optical disk, a memory, a programmable logic device (PLD)) used to provide machine instructions and / or data to a programmable processor, including a machine-readable medium that receives machine instructions as a machine-readable signal. The term "machine-readable signal" refers to any signal used to provide machine instructions and / or data to a programmable processor.

[0079] In order to provide an interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball) by which the user can provide input to the computer. Other kinds of devices can also be used to provide an interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0080] The systems and techniques described herein can be implemented in a computing system that includes backend components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes frontend components (e.g., a user computer having a graphical user interface or a web browser through which the user can interact with an implementation of the systems and techniques described herein), or a computing system that includes any combination of such backend components, middleware components, or frontend components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), and the Internet.

[0081] A computer system can include a client and a server. The client and the server are generally remote from each other and typically interact through a communication network. The relationship between the client and the server is generated by computer programs running on the respective computers and having a client-server relationship with each other.

Claims

1. A radio frequency phase control system for multi-stage ion acceleration control, characterized in that: The radio frequency phase control system includes: a reference signal module, a plurality of electrode acceleration modules, wherein the electrode acceleration modules are connected end to end to form a multi-stage ion acceleration channel, and each electrode acceleration module includes: a phase control unit, a power amplification unit, and an electrode load unit, wherein: The phase control unit is used for: Receiving a reference signal and a phase offset sent by the reference signal module; Adjusting the reference phase of the reference signal based on the phase offset to obtain a reference phase; Taking the reference phase as a control standard, controlling the phase of the electrode of the electrode load unit so that the phase difference between the phase of the electrode of the electrode load unit and the reference phase is maintained within a preset phase fluctuation range; Output phase control signal; The power amplification unit is used to amplify the power of the phase control signal to obtain a target drive signal; The electrode acceleration module is used to generate an acceleration voltage according to the phase of the electrode maintained within the preset phase fluctuation range under the drive of the target driving signal, so as to provide energy for the acceleration of ions input into the ion acceleration channel corresponding to the electrode acceleration module.

2. The radio frequency phase control system according to claim 1, characterized in that: The phase control unit at least includes: a voltage-controlled phase shifter, a phase detector, and a signal processing subunit, wherein: The voltage-controlled phase shifter is used to receive the reference signal and the phase offset, and adjust the reference phase of the reference signal based on the phase offset to obtain a reference phase; The phase detector is used to lock the reference phase with the phase of the electrode of the electrode load unit, compare the reference phase with the phase of the electrode of the electrode load unit, and output a comparison voltage signal; The signal processing subunit is used to filter, adjust the frequency, and perform frequency division processing on the comparison voltage signal, and then output the phase control signal.

3. The radio frequency phase control system according to claim 2, characterized in that: The signal processing subunit includes: a loop filter, a voltage-controlled oscillator, and a frequency divider; wherein: The loop filter is used to filter the ripple contained in the comparison voltage signal to obtain a target DC voltage signal; The voltage-controlled oscillator is used to determine the frequency of the target high-frequency voltage signal according to the voltage value of the target DC voltage signal; The frequency divider is used to perform frequency division processing on the target high-frequency voltage signal based on the frequency of the target high-frequency voltage signal to obtain the phase control signal with the same frequency as the reference signal.

4. The radio frequency phase control system according to claim 1, characterized in that: The electrode acceleration module further includes: a signal attenuation unit, the input end of the signal attenuation unit is connected to the output end of the electrode load unit, the output end of the signal attenuation unit is connected to the input end of the phase control unit, and the signal attenuation unit is used to: Reducing the signal strength of the phase signal of the electrode of the electrode load unit so that the signal strength of the phase signal of the electrode is maintained at the same order of magnitude as the signal strength of the reference signal; The reduced target phase signal of the electrode of the electrode load unit is output to the phase control unit, so that the phase control unit controls the phase of the electrode of the electrode load unit based on the reference phase.

5. The radio frequency phase control system according to claim 1, characterized in that: The radio frequency phase control system is applied to a radio frequency phase control hardware circuit, wherein the radio frequency phase control hardware circuit comprises: a processing chip and an EtherCAT slave chip, wherein the processing chip and the EtherCAT slave chip are connected via an industrial Ethernet protocol, and the processing chip is used for: Determining the phase offset according to the ion acceleration result of the last stage ion acceleration channel; Sending the phase offset to the phase control unit based on a preset digital interface, so that the phase control unit adjusts the reference phase of the reference signal based on the phase offset to obtain a reference phase; The EtherCAT slave chip is used for: Acquire a power control signal from a host computer, and store the power control signal in a designated storage location; The processing chip is also used for: The power control signal is acquired from the designated storage location, and the power control signal is sent to the power amplification unit, so that the power amplification unit amplifies the power of the phase control signal according to the power control signal.

6. The radio frequency phase control system according to claim 1, characterized in that: The preset phase fluctuation range is: phase difference fluctuation ±0.1°, the phase value of the reference phase and the phase value of the electrode are any value between 0 and 360°, and the signal frequency of the reference signal is positively correlated with the energy of the target ions accelerated by the multi-stage ion acceleration channel.

7. The radio frequency phase control system according to claim 6, characterized in that: The signal frequency of the reference signal is 13.56 MHz.

8. A radio frequency phase control method for multi-stage ion acceleration control, characterized in that: The method is applied to the radio frequency phase control system according to any one of claims 1 to 7, and the method comprises: receiving a reference signal sent by a reference signal module and a phase offset; Adjusting the reference phase of the reference signal based on the phase offset to obtain a reference phase; Taking the reference phase as a control standard, controlling the phase of the electrode of the electrode load unit so that the phase difference between the phase of the electrode of the electrode load unit and the reference phase is maintained within a preset phase fluctuation range, and outputting a phase control signal; The power of the phase control signal is amplified to obtain a target drive signal, so that the electrode load unit, driven by the target drive signal, generates an acceleration voltage according to the phase of the electrode maintained within the preset phase fluctuation range according to the phase difference, thereby providing energy for the acceleration of ions input into the ion acceleration channel corresponding to the electrode acceleration module.

9. An electronic device, characterized in that: The electronic device comprises: A processor and a memory for storing programs; The program includes instructions, which, when executed by the processor, cause the processor to perform the method according to claim 8.

10. A non-transitory computer-readable storage medium storing computer instructions, characterized in that: The computer instructions are used to make a computer execute the method according to claim 8.

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