Ultrasonic-driven dust conveying device and conveying method thereof

Through ultrasonic-driven dust transport device, the standing wave acoustic field and composite coating technology is used to solve the problem of low dust transport efficiency in the extraterrestrial environment, and achieve efficient and low-energy-consuming dust transport effect, which is suitable for dust transport tasks of extraterrestrial celestial bodies.

CN120246684APending Publication Date: 2025-07-04HARBIN INST OF TECH
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Patent Information

Application Number
CN202510626169.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-15
Publication Date
2025-07-04

AI Technical Summary

Technical Problem

In the prior art, dust transport technology has problems such as low mechanical conveying efficiency, insufficient pneumatic conveying adaptability and limited electrostatic dust drive technology. It is difficult to effectively control dust particles below micron level in extraterrestrial environments with low gravity, high vacuum and extreme temperatures.

Method used

The dust transport device driven by ultrasonic is adopted to form a standing wave sound field using ultrasonic generator, vibration transducer, vibration absorbing transducer, vibration plate and reflection plate. The stable suspension and directional transportation of dust are achieved through the non-contact standing wave ultrasonic support mechanism, and combined with the titanium nitride-electrostatic dissipation composite coating to reduce adhesion.

Benefits of technology

It realizes efficient and low-energy dust transportation in low gravity environments, reduces dust adhesion, improves transportation efficiency, and is suitable for dust transportation tasks of extraterrestrial celestial bodies.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a dust conveying device driven by ultrasound and a conveying method of the dust conveying device, and belongs to the technical field of conveying of dust particles on extraterrestrial celestial bodies containing the atmosphere. The ultrasonic-driven dust conveying device comprises an ultrasonic generator, a digital oscilloscope, a vibration excitation transducer, a vibration absorption transducer, a vibration flat plate and a reflection flat plate, the ultrasonic generator is electrically connected with the digital oscilloscope and the vibration excitation transducer, the vibration excitation transducer is connected with one end of the vibration flat plate through an amplitude-change pole, and the vibration absorption transducer is electrically connected with the reflection flat plate. The vibration absorption transducer is connected with the other end of the vibration flat plate, the reflection flat plate and the vibration flat plate are arranged in parallel, and a cavity is formed between the reflection flat plate and the vibration flat plate. According to the dust conveying device driven by the ultrasonic waves, the ultrasonic waves can drive the dust.
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Description

Technical Field

[0001] The present invention belongs to the technical field of dust particle transportation on extraterrestrial celestial bodies containing the atmosphere, and particularly relates to an ultrasonic-driven dust transportation device and a transportation method thereof. Background Art

[0002] The dust transportation technology of extraterrestrial celestial bodies is one of the core challenges in deep space exploration and in-situ resource utilization. Such dust has unique physical and chemical properties, such as high adhesiveness, irregular shape, significant electrostatic effect, etc., and exhibits transportation behaviors quite different from those on the Earth in extraterrestrial extreme environments such as microgravity, high vacuum, and extreme temperature. Extraterrestrial celestial body dust is not only the direct object of scientific research, but also the key raw material for in-situ resource utilization (ISRU), and can be used to produce oxygen, water, building materials, etc.

[0003] The existing dust transportation technologies have the following bottlenecks:

[0004] Low mechanical transportation efficiency: Belt transportation or screw propulsion relies on gravity and friction. The dust escape rate surges under low gravity, and the rigid structure is easily worn by dust.

[0005] Insufficient adaptability of pneumatic transportation: It is difficult for gas media to effectively carry dust in a rarefied atmosphere environment, and the energy consumption of high-pressure air pumps exceeds the supply capacity of deep space detectors.

[0006] Restrictions on electrostatic dust driving technology: Existing electrostatic dust removal and transportation devices require continuous high-voltage power supply and cannot handle particles smaller than micrometers.

[0007] High-frequency ultrasonic waves (20 kHz - 1 MHz) can induce a local acoustic flow field, and achieve the aggregation and directional transportation of dust through acoustic radiation force and acoustic pressure gradient, which is suitable for medium-free manipulation in a low-gravity environment. With the advantages of non-contact energy transfer, low power consumption, high-precision manipulation, etc., the ultrasonic driving technology has become an innovative direction for extraterrestrial dust transportation. Summary of the Invention

[0008] In view of this, in order to solve the problems of low mechanical transportation efficiency, insufficient adaptability of pneumatic transportation, and restrictions on electrostatic dust driving technology existing in the existing dust transportation technologies, the present invention proposes an ultrasonic-driven dust transportation device and a transportation method thereof.

[0009] To achieve the above object, the present invention adopts the following technical solutions:

[0010] A dust transportation device driven by ultrasonic waves, comprising: an ultrasonic generator, a digital oscilloscope, an excitation transducer, a vibration absorption transducer, a vibration plate and a reflection plate. The ultrasonic generator is electrically connected to the digital oscilloscope, the ultrasonic generator is electrically connected to the excitation transducer, the excitation transducer is connected to one end of the vibration plate through a horn, the vibration absorption transducer is connected to the other end of the vibration plate, the reflection plate is arranged parallel to the vibration plate, and a cavity is formed between the reflection plate and the vibration plate.

[0011] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the cross-section of the vibration plate is T-shaped.

[0012] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the distance between the vibration plate and the reflection plate is an integer multiple of half the wavelength of the standing wave.

[0013] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the vibration plate is made of 6061 aluminum plate.

[0014] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the surface of the vibration plate is coated with a titanium nitride-electrostatic dissipation composite coating.

[0015] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the reflection plate is made of a transparent acrylic plate.

[0016] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the horn is connected to the vibration plate through bolts.

[0017] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the length of the vibration plate is greater than the length of the reflection plate.

[0018] As a preferred embodiment of the above-mentioned dust transportation device driven by ultrasonic waves, the dust transportation device driven by ultrasonic waves further includes a high-speed camera, and the high-speed camera can capture the cavity between the vibration plate and the reflection plate.

[0019] The present invention also provides a dust transportation method driven by ultrasonic waves, using the above-mentioned dust transportation device driven by ultrasonic waves, including:

[0020] Start the ultrasonic generator, output a high-frequency alternating harmonic voltage as the excitation signal of the excitation transducer, and this excitation signal is displayed on the digital oscilloscope;

[0021] The excitation transducer converts the electrical signal into sound energy, generates ultrasonic waves on the vibrating plate, and the ultrasonic waves radiate into the air through the vibration of the vibrating plate. The ultrasonic waves in the vertical direction are reflected after reaching the reflection plate, and are superposed with the original incident wave, thus forming a standing wave sound field in the cavity. According to the non-contact standing wave ultrasonic support mechanism, the dust can be stably suspended near the position of the standing wave node;

[0022] When the excitation transducer is loaded with a harmonic excitation signal, due to the inverse piezoelectric effect, the excitation transducer generates longitudinal harmonic vibration, further amplifies the mechanical amplitude through the horn and transmits it to the vibrating plate, generating a traveling wave in the elastic vibrating plate. The position where the bending vibration occurs on the vibrating plate moves along its length direction, so the originally formed standing wave sound field also moves along the length direction of the vibrating plate, forming a standing wave node line parallel to the vibrating plate in the cavity;

[0023] The dust originally successfully captured at the standing wave node moves along the standing wave node line, thus realizing the ultrasonic drive of the dust.

[0024] Compared with the prior art, the beneficial effects of a dust transportation device and its transportation method driven by ultrasonic waves provided by the present invention are:

[0025] The present invention provides a dust transportation device and its transportation method driven by ultrasonic waves. In the dust transportation device driven by ultrasonic waves, the main function of the ultrasonic wave generator is to output a high-frequency alternating harmonic voltage as the excitation signal of the excitation transducer. The main function of the excitation transducer is to convert the electrical signal output by the ultrasonic wave generator into sound energy and generate ultrasonic waves on the vibrating end face. The reflection plate is arranged parallel to the vibrating plate, and the cavity formed between the two serves as an ultrasonic wave conduit. The absorption transducer absorbs the energy of the ultrasonic wave due to the direct piezoelectric effect to prevent the reflection of the traveling wave.

[0026] Start the ultrasonic generator to output a high-frequency alternating harmonic voltage as the excitation signal for the exciting transducer, and this excitation signal is displayed on a digital oscilloscope. The exciting transducer, as the core component, converts the electrical signal output by the ultrasonic power supply into acoustic energy, generating ultrasonic waves on the vibrating end face. The ultrasonic waves radiate into the air through the vibration of the vibrating plate. The ultrasonic waves in the vertical direction are reflected after reaching the reflecting plate, and when they are superposed with the original incident wave, a standing wave sound field will be formed in the ultrasonic catheter. According to the non-contact standing wave ultrasonic support mechanism, the dust can be stably suspended near the position of the standing wave node. When the exciting transducer is loaded with a harmonic excitation signal, due to the inverse piezoelectric effect, the exciting transducer generates longitudinal harmonic vibrations, and further amplifies the mechanical amplitude through its horn and transmits it to the vibrating plate, generating a traveling wave in the elastic vibrating plate. The position where the bending vibration occurs on the vibrating plate moves along the length direction, so the originally formed standing wave sound field also moves along the length direction of the vibrating plate, forming a standing wave node line parallel to the vibrating plate in the ultrasonic catheter. The dust originally captured at the standing wave node moves along the standing wave node line, thus realizing the ultrasonic drive of the dust.

[0027] This dust transport device driven by ultrasound is applicable to the transport of dust particles on extraterrestrial celestial bodies with an atmosphere, and can assist in the construction of extraterrestrial base stations to complete the task of long-distance dust transport.

[0028] The ultrasonic drive of dust is realized: the three-dimensional spatial directional migration of dust particles is achieved by using a high-frequency ultrasonic standing wave field and traveling wave field.

[0029] Energy efficiency ratio innovation: The existing electric field transport requires extremely high voltages and consumes a large amount of energy, while the exciting transducer and absorbing transducer used here can effectively reduce power consumption.

[0030] Reduction of dust adhesion: The surface of the vibrating plate is coated with a titanium nitride-electrostatic dissipation composite coating, which effectively reduces the adhesion force of the dust, so that the particles that cannot be suspended will not adsorb on the surface of the vibrating plate. Brief Description of the Drawings

[0031] The drawings forming a part of the present invention are used to provide a further understanding of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0032] Figure 1 is a schematic structural diagram of the dust transport device driven by ultrasound provided by a specific embodiment of the present invention from the first perspective;

[0033] Figure 2 is a schematic structural diagram of the dust transport device driven by ultrasound provided by a specific embodiment of the present invention from the second perspective;

[0034] Figure 3It is a cross-sectional view of the vibrating plate of the dust transportation device driven by ultrasonic waves provided by a specific embodiment of the present invention;

[0035] Figure 4 It is a top view of the vibrating plate of the dust transportation device driven by ultrasonic waves provided by a specific embodiment of the present invention.

[0036] In the figure:

[0037] 1. Digital oscilloscope; 2. Ultrasonic generator; 3. Excitation transducer; 4. Amplitude transformer; 5. Bolt; 6. Vibrating plate; 7. Reflection plate; 8. Vibration absorption transducer. Specific embodiments

[0038] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other. The described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0039] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0040] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but are in contact through other features between them. Moreover, the first feature being "above", "above", and "on the top" of the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature is at a higher horizontal height than the second feature. The first feature being "below", "below", and "under the bottom" of the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature is at a lower horizontal height than the second feature.

[0041] In the description of this embodiment, the orientation or positional relationship terms such as "above", "below", "right", etc. are based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0042] See Figures 1-4 To describe this embodiment, the present invention provides an ultrasonic-driven dust transport device and its transport method. The ultrasonic-driven dust transport device includes: an ultrasonic generator 2, a digital oscilloscope 1, an excitation transducer 3, a vibration absorption transducer 8, a vibration plate 6, and a reflection plate 7. The ultrasonic generator 2 is electrically connected to the digital oscilloscope 1, the ultrasonic generator 2 is electrically connected to the excitation transducer 3, the excitation transducer 3 is connected to one end of the vibration plate 6 through a horn 4, the vibration absorption transducer 8 is connected to the other end of the vibration plate 6, the reflection plate 7 is arranged parallel to the vibration plate 6, and a cavity is formed between the reflection plate 7 and the vibration plate 6.

[0043] In this ultrasonic-driven dust transport device, the main function of the ultrasonic generator 2 is to output a high-frequency alternating harmonic voltage as the excitation signal for the excitation transducer 3. The main function of the excitation transducer 3 is to convert the electrical signal output by the ultrasonic generator 2 into sound energy and generate ultrasonic waves at the vibration end face. The reflection plate 7 is arranged parallel to the vibration plate 6, and the cavity formed between the two acts as an ultrasonic waveguide. The vibration absorption transducer 8 will absorb the energy of the ultrasonic waves due to the direct piezoelectric effect to prevent the reflection of traveling waves.

[0044] Start the ultrasonic generator 2 to output a high-frequency alternating harmonic voltage as the excitation signal for the excitation transducer 3, and this excitation signal is displayed on the digital oscilloscope 1. The excitation transducer 3, as the core component, converts the electrical signal output by the ultrasonic power supply into sound energy and generates ultrasonic waves at the vibration end face. The ultrasonic waves are radiated into the air through the vibration of the vibration plate 6. The ultrasonic waves in the vertical direction are reflected after reaching the reflection plate 7 and are superimposed on the original incident wave, then a standing wave sound field will be formed in the ultrasonic waveguide. According to the non-contact standing wave ultrasonic support mechanism, the dust can be stably suspended near the position of the standing wave node. When the excitation transducer 3 is loaded with a harmonic excitation signal, due to the inverse piezoelectric effect, the excitation transducer 3 generates longitudinal harmonic vibrations, and further amplifies the mechanical amplitude through its horn 4 and transmits it to the vibration plate 6, generating a traveling wave in the elastic vibration plate 6. The position where the bending vibration occurs on the vibration plate 6 moves along the length direction, then the originally formed standing wave sound field also moves along the length direction of the vibration plate 6, forming a standing wave node line parallel to the vibration plate 6 in the ultrasonic waveguide. The dust originally successfully captured at the standing wave node moves along the standing wave node line, thus realizing the driving of the dust by ultrasonic waves.

[0045] This ultrasonic-driven dust transport device realizes the driving of dust by ultrasonic waves: the three-dimensional spatial directional migration of dust particles is realized by using a high-frequency ultrasonic standing wave field and traveling wave field. Energy efficiency ratio innovation: The existing electric field transport requires extremely high voltages and consumes a large amount of energy, while the excitation transducer 3 and the vibration absorption transducer 8 used here can effectively reduce power consumption.

[0046] The dust transport device driven by ultrasonic waves is applicable to the transport of dust particles on extraterrestrial celestial bodies with an atmosphere, and can assist in the construction of extraterrestrial base stations to complete the task of long-distance dust transport.

[0047] Optionally, the cross-section of the vibration plate 6 is T-shaped. It can be understood that the cross-section of the vibration plate 6 along its width direction is T-shaped, thick in the middle and thin on the two opposite sides along the width direction. According to the knowledge of near-field ultrasonic transportation, the vibration plate 6 with a T-shaped cross-section has a more stable sound pressure distribution in the squeezed air film and stronger driving stability compared to the vibration plate 6 with a rectangular cross-section. Since the thickness of the edge of the vibration plate 6 is relatively smaller than the middle thickness, the edge stiffness is lower, and the amplitude is larger under the same excitation conditions. The acoustic radiation force received at the two side edges is relatively larger than that in the middle region, which can achieve a self-correcting effect. The two-plate ultrasonic drive here is evolved by combining the principles of near-field ultrasonic transportation and non-contact ultrasonic support, so the vibration plate 6 with a T-shaped cross-section is also adopted.

[0048] Optionally, the distance between the vibration plate 6 and the reflection plate 7 is an integer multiple of half the wavelength of the standing wave. To achieve a standing wave field in the vertical direction, the parallel installation distance between the vibration plate 6 and the reflection plate 7 should be an integer multiple of half the wavelength of the standing wave.

[0049] Optionally, the vibration plate 6 is made of 6061 aluminum plate. Metals all have a certain elasticity, and an aluminum plate is used in this embodiment.

[0050] Optionally, the surface of the vibration plate 6 is coated with a titanium nitride - electrostatic dissipation composite coating. To improve the transport efficiency and reduce the dust particles adhering to the vibration plate 6, a titanium nitride - electrostatic dissipation composite coating is coated on the surface of the vibration plate 6, which can effectively reduce the adhesion force of the dust and improve the transport efficiency.

[0051] Optionally, the reflection plate 7 is made of a transparent acrylic plate. In this embodiment, a highly transparent acrylic plate with a length, width, and thickness of 270 mm, 50 mm, and 3 mm respectively is selected as the reflection plate 7. The distance between the left end of the reflection plate 7 and the vibration plate 6 is adjusted to be approximately 10.15 mm, and the distance between the right end and the vibration plate 6 is approximately 12.70 mm.

[0052] Optionally, the horn 4 is connected to the vibration plate 6 through the bolt 5.

[0053] As Figure 3 shown, optionally, the length of the vibration plate 6 is greater than the length of the reflection plate 7. According to existing research, the upper width b of the vibration plate 6 is taken as 40 mm, the lower width b1 is 30 mm, the total thickness d is 2 mm, and the upper part thickness d1 is 1.7 mm.

[0054] To fasten the vibrating plate 6 to the horn 4 of the vibration exciter 3 by bolts 5, through holes with a diameter of 10 mm need to be drilled at the fixing points.

[0055] To achieve mechanical impedance matching, according to the relevant formula, the distance L1 between the two through holes is calculated to be approximately 270.59 mm, and the distance L2 from the through hole to the left and right end faces is approximately 26.305 mm.

[0056] Optionally, the dust transport device driven by ultrasonic waves further includes a high-speed camera, which can capture the cavity between the vibrating plate 6 and the reflecting plate 7.

[0057] The present invention also provides a dust transport method driven by ultrasonic waves, using the above-mentioned dust transport device driven by ultrasonic waves, including:

[0058] Start the ultrasonic generator 2 to output a high-frequency alternating harmonic voltage as the excitation signal of the vibration exciter 3, and this excitation signal is displayed on the digital oscilloscope 1;

[0059] The vibration exciter 3 converts the electrical signal into sound energy, generates ultrasonic waves on the vibrating plate 6, and the ultrasonic waves radiate into the air through the vibration of the vibrating plate 6. The ultrasonic waves in the vertical direction are reflected after reaching the reflecting plate 7 and superpose with the original incident wave, then a standing wave sound field will be formed in the cavity. According to the non-contact standing wave ultrasonic support mechanism, the dust can be stably suspended near the position of the standing wave node;

[0060] When the vibration exciter 3 is loaded with a harmonic excitation signal, due to the inverse piezoelectric effect, the vibration exciter 3 generates longitudinal harmonic vibration, further amplifies the mechanical amplitude through the horn 4 and transmits it to the vibrating plate 6, generates a traveling wave in the elastic vibrating plate 6, and the position where the bending vibration occurs on the vibrating plate 6 moves along its length direction, then the originally formed standing wave sound field also moves along the length direction of the vibrating plate 6, and a standing wave node line parallel to the vibrating plate 6 is formed in the cavity;

[0061] The dust originally successfully captured at the standing wave node moves along the standing wave node line, thus realizing the driving of the dust by ultrasonic waves.

[0062] Obviously, the embodiments of the present invention disclosed above are only used to help illustrate the present invention. The embodiments do not describe all the details in detail, nor limit the invention to the specific embodiments described. According to the content of this specification, many modifications and changes can be made. This specification selects and specifically describes these embodiments to better explain the principle and practical application of the present invention, so that those skilled in the art in the relevant technical field can well understand and utilize the present invention. It is not necessary and impossible to enumerate all the embodiments here.

Claims

1. An ultrasonic-driven dust transport device, characterized in that, Including: An ultrasonic generator (2), a digital oscilloscope (1), an exciting transducer (3), a vibration damping transducer (8), a vibrating plate (6) and a reflecting plate (7). The ultrasonic generator (2) is electrically connected to the digital oscilloscope (1), and the ultrasonic generator (2) is electrically connected to the exciting transducer (3). The exciting transducer (3) is connected to one end of the vibrating plate (6) through a horn (4). The vibration damping transducer (8) is connected to the other end of the vibrating plate (6). The reflecting plate (7) is arranged parallel to the vibrating plate (6), and a cavity is formed between the reflecting plate (7) and the vibrating plate (6).

2. The dust transportation device driven by ultrasound according to claim 1, characterized in that: The cross-section of the vibrating plate (6) is T-shaped.

3. The dust transportation device driven by ultrasound according to claim 1, characterized in that: The distance between the vibrating plate (6) and the reflecting plate (7) is an integer multiple of the half wavelength of the standing wave.

4. The dust transportation device driven by ultrasound according to claim 1, wherein: The vibrating plate (6) is made of 6061 aluminum plate.

5. The dust transportation device driven by ultrasonic waves according to claim 1, characterized in that: The surface of the vibrating plate (6) is coated with a titanium nitride-electrostatic dissipation composite coating.

6. The dust transportation device driven by ultrasonic waves according to claim 1, wherein: The reflecting plate (7) is made of a transparent acrylic plate.

7. The dust transportation device driven by ultrasound according to claim 1, characterized in that: The horn (4) is connected to the vibrating plate (6) through a bolt (5).

8. The dust transportation device driven by ultrasonic according to claim 1, wherein: The length of the vibrating plate (6) is greater than the length of the reflecting plate (7).

9. The dust transportation device driven by ultrasonic waves according to claim 1, characterized in that: It further includes a high-speed camera which can capture the cavity between the vibrating plate (6) and the reflecting plate (7).

10. A method for transporting dust driven by ultrasound, characterized in that: Using the dust transportation device driven by ultrasound according to any one of claims 1-9, including: Start the ultrasonic generator (2) to output a high-frequency alternating harmonic voltage as the excitation signal of the exciting transducer (3), and this excitation signal is displayed on the digital oscilloscope (1); The exciting transducer (3) converts the electrical signal into sound energy to generate ultrasonic waves. The ultrasonic waves are radiated into the air through the vibration of the vibrating plate (6). The ultrasonic waves in the vertical direction are reflected after reaching the reflecting plate (7) and are superposed with the original incident wave, then a standing wave sound field will be formed in the cavity. According to the non-contact standing wave ultrasonic support mechanism, the dust can be stably suspended near the standing wave node position; When the exciting transducer (3) is loaded with a harmonic excitation signal, due to the inverse piezoelectric effect, the exciting transducer (3) generates a longitudinal harmonic vibration. The mechanical amplitude is further amplified by the horn (4) and transmitted to the vibrating plate (6), and a traveling wave is generated in the elastic vibrating plate (6). The position where the bending vibration occurs on the vibrating plate (6) moves along its length direction, then the originally formed standing wave sound field also moves along the length direction of the vibrating plate (6), and a standing wave node line parallel to the vibrating plate (6) is formed in the cavity; The dust originally successfully captured at the standing wave node moves along the standing wave node line, thus realizing the driving of the dust by ultrasound.