Uniform film feeding mechanism of film plating machine capable of automatically uniformizing film on line

Abstract

The invention belongs to the technical field of OLED (Organic Light Emitting Diode) display panels, and discloses a uniform film feeding mechanism of an automatic online uniform film coating machine, which comprises a rack, a conveyor belt is arranged in the rack, aluminum targets are arranged above the conveyor belt in the rack, film thickness testers are arranged on two sides of the aluminum targets in the rack, and the film thickness testers are connected with the conveyor belt. A control panel is fixedly installed at the top end of the rack, and a speed adjusting structure is installed at the bottom end of the conveying belt. And the speed adjusting structure comprises a movable frame movably connected to the interior of the conveying belt, a mounting block is fixedly mounted in the movable frame, and a rotating speed sensor is mounted in the mounting block. Therefore, the aluminum oxide film on the surface of the material is more uniform, the display effect of the product is better, the service life of the device is prolonged, the production cost is reduced, and the yield is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of OLED display panels, and particularly relates to a uniform film feeding mechanism of a coating machine for automatically and online forming a uniform film layer. Background Art

[0002] OLED (organic light-emitting diode) technology is a new display technology, which has attracted much attention due to its characteristics such as high contrast ratio, low power consumption, fast response speed, and flexible display. Magnetron sputtering coating technology is an advanced surface treatment technology. It improves the sputtering efficiency and quality through magnetic control assistance. The magnetron sputtering technology uses electrons to move under the action of an electric field, making them collide with argon atoms to generate Ar positive ions and new electrons. The new electrons fly towards the substrate, and the Ar ions are accelerated towards the cathode target under the action of the electric field and bombard the surface of the target material with high energy, causing the target material to sputter. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film. The characteristics of the magnetron sputtering technology include: various materials that can be made into target materials can be used as thin film materials, including various metals, semiconductors, ferromagnetic materials, as well as insulating oxides, ceramics, and other substances; it is suitable for depositing materials with high melting points and low vapor pressures; by adding oxygen, nitrogen, or other reactive gases to the discharge gas, a compound thin film of the target material and gas molecules can be deposited; by controlling the air pressure and sputtering power in the vacuum chamber, a stable deposition rate can basically be obtained. However, when using the magnetron sputtering coating technology for coating at present, there is a phenomenon of uneven film layer, which will lead to a series of problems such as poor display effect, shortened device life, increased production cost, and decreased yield. Summary of the Invention

[0003] Aiming at the phenomenon of uneven film layer when using the magnetron sputtering coating technology in the prior art, which will lead to a series of problems such as poor display effect, shortened device life, increased production cost, decreased yield, and hindered technological development, the present invention proposes the following technical solutions:

[0004] A uniform film feeding mechanism of a coating machine for automatically and online forming a uniform film layer, including a frame. A conveyor belt is installed inside the frame. Aluminum targets are installed above the conveyor belt inside the frame. Film thickness testers are installed on both sides of the aluminum targets inside the frame. A control panel is fixedly installed at the top of the frame. A speed regulation structure is installed at the bottom of the conveyor belt;

[0005] The speed control structure includes a movable frame movably connected inside the conveyor belt. An installation block is fixedly installed inside the movable frame, and a rotational speed sensor is installed inside the installation block. A same rotating roller is installed between the two rotational speed sensors. A limiting ring is vertically movably connected inside the movable frame, and a same pressing roller is rotatably connected between the two limiting rings. Friction plates are vertically slidably connected to both ends of the pressing roller, and the two friction plates at each end are located on one side of the corresponding limiting ring.

[0006] As an optimization of the above technical solution, spring rods are symmetrically embedded and installed at the bottom end of the movable frame. A support bar is embedded and installed at the bottom end of the spring rod. Fixed columns are symmetrically embedded and installed on both sides of the top end of the support bar, and the fixed columns are fixedly installed at the bottom end of the conveyor belt.

[0007] As an optimization of the above technical solution, an electric telescopic rod is fixedly installed at the position between the fixed column and the spring rod at the top end of the support bar. A fixed connection is made between the top end of the electric telescopic rod and the bottom end of the limiting ring.

[0008] As an optimization of the above technical solution, an installation part is fixedly installed at the top end of the friction plate. A bolt penetrates through the installation part, and the bolt is threadedly connected inside the movable frame. A nut is threadedly connected to the outside of the bolt at the position below the installation part.

[0009] As an optimization of the above technical solution, a positioning cover is fixedly installed at the top end of the bolt. A connecting rod is fixedly installed at the top end of the positioning cover. A synchronous belt is sleeved between the outer sides of the top ends of the two connecting rods. A lifting plate is sleeved on the outside of the connecting rod. A telescopic column is fixedly installed at the top end of the lifting plate, and a fixed connection is made between the top end of the telescopic column and the bottom end of the installation block.

[0010] As an optimization of the above technical solution, a bidirectional threaded rod is rotatably connected inside the positioning cover. Clamping plates are symmetrically threadedly connected to the outside of the bidirectional threaded rod, and the clamping plates are slidably connected inside the positioning cover.

[0011] As an optimization of the above technical solution, the conveyor belt is composed of a frame, a motor, and a conveyor belt. The movable frame is movably connected inside the frame, and the fixed column is fixedly installed at the bottom end of the frame.

[0012] As an optimization of the above technical solution, the connecting rod is in a convex shape, internal serrated grooves are formed on the outside of the connecting rod, and the synchronous belt is an internal serrated belt.

[0013] As an optimization of the above technical solution, the movable end of the electric telescopic rod penetrates through the movable frame, and balls are arranged inside the limiting ring.

[0014] The beneficial effects of the present invention are:

[0015] (1) This design uses an automated program to control and change the speed of material movement in real time according to different film thicknesses in each area, making the aluminum oxide film on the material surface more uniform. Ultimately, it improves the display effect of the product, extends the device life, reduces production costs, and increases the yield rate.

[0016] (2) By changing the extrusion pressure of the conveyor belt and the rotation speed of the extrusion object, the moving speed of the conveyor belt is changed, enabling flexible control of the moving speed of the conveyor belt to meet the conveying requirements under different working conditions.

[0017] (3) By means of measurement, it is observed whether the running speed of the conveyor belt changes, reducing the difficulty of observing the running speed of the conveyor belt.

[0018] (4) It makes the conveyor belt fit more tightly with the output shaft of the conveyor, and the conveyor belt is more straightened, enabling the conveyor belt to move smoothly and changing the difficulty of the conveyor belt moving smoothly.

[0019] (5) Without cumbersome disassembly and reinstallation, the height of the friction plate can be quickly adjusted, improving the efficiency of the production line. Precise gap adjustment can ensure sufficient contact area between the friction plate and the extrusion roller, thereby improving production efficiency and product quality. Description of the Drawings

[0020] Figure 1 Shows a schematic structural diagram of the uniform film feeding mechanism of a coating machine with an automatically online uniform film layer in Embodiment 1;

[0021] Figure 2 Shows a cross-sectional view of the frame in Embodiment 1;

[0022] Figure 3 Shows a bottom view of the conveyor belt in Embodiment 1;

[0023] Figure 4 Shows a cross-sectional view of the conveyor belt in Embodiment 1;

[0024] Figure 5 Shows a schematic structural diagram of the speed regulation structure in Embodiment 1;

[0025] Figure 6 Shows a schematic structural diagram of the installation of the friction plate in Embodiment 1;

[0026] Figure 7 Shows a schematic structural diagram of the installation of the positioning cover in Embodiment 1;

[0027] Figure 8 Shows a schematic structural diagram of the installation of the bidirectional threaded rod in Embodiment 1;

[0028] Figure 9The figure shows a schematic diagram of the installation structure of the aluminum target in Embodiment 1.

[0029] In the figure: 1, frame; 2, conveyor belt; 3, aluminum target; 4, film thickness tester; 5, control panel; 6, speed regulation structure; 61, movable frame; 62, mounting block; 63, rotational speed sensor; 64, rotating roller; 65, limiting ring; 66, pressing roller; 67, friction plate; 68, mounting member; 69, bolt; 610, nut; 611, positioning cover; 612, connecting rod; 613, synchronous belt; 614, lifting plate; 615, telescopic column; 616, spring rod; 617, support bar; 618, fixed column; 619, bidirectional threaded rod; 620, clamping plate; 621, electric telescopic rod. Detailed implementation manners

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0031] Embodiment 1: The present invention provides a uniform film feeding mechanism for a coating machine with an automatically online uniform film layer, as Figures 1 to 9 shown, which includes a frame 1. A conveyor belt 2 is installed inside the frame 1. Aluminum targets 3 are installed above the conveyor belt 2 inside the frame 1. Film thickness testers 4 are installed on both sides of the aluminum targets 3 inside the frame 1. A control panel 5 is fixedly installed at the top of the frame 1. A speed regulation structure 6 is installed at the bottom of the conveyor belt 2;

[0032] The speed regulation structure 6 includes a movable frame 61 movably connected to the inside of the conveyor belt 2. A mounting block 62 is fixedly installed inside the movable frame 61. A rotational speed sensor 63 is installed inside the mounting block 62. The same rotating roller 64 is installed between the two rotational speed sensors 63. The inside of the movable frame 61 is vertically movably connected with a limiting ring 65. The same pressing roller 66 is rotatably connected between the two limiting rings 65. Friction plates 67 are slidably connected to both ends of the pressing roller 66 up and down. The two friction plates 67 at each end are located on one side of the corresponding limiting ring 65.

[0033] As Figure 5 and Figure 6 shown, spring rods 616 are symmetrically embedded at the bottom of the movable frame 61. Support bars 617 are embedded at the bottom of the spring rods 616. Fixed columns 618 are symmetrically embedded on both sides of the top of the support bars 617. The fixed columns 618 are fixedly installed at the bottom of the conveyor belt 2;

[0034] The support bar 617 is fixed by the fixed column 618, and the movable frame 61 is fixed by the spring rod 616 at the top of the support bar 617, which changes the fixing difficulty of the movable frame 61 and does not prevent the lifting of the movable frame 61.

[0035] As Figure 5and Figure 6 As shown in Figure 6 , at the position where the top end of the support bar 617 is located between the fixed column 618 and the spring rod 616, an electric telescopic rod 621 is fixedly installed. The top end of the electric telescopic rod 621 is fixedly connected to the bottom end of the limit ring 65;

[0036] Under the action of the electric telescopic rod 621, the limit ring 65 can be driven to displace, changing the displacement difficulty of the limit ring 65, so as to facilitate driving the squeezing roller 66 to move. After the squeezing roller 66 moves, it clamps the conveyor belt of the conveyor belt 2, changing the moving speed of the conveyor belt.

[0037] As Figure 6 and Figure 7 As shown in Figure 7 , a mounting member 68 is fixedly installed at the top end of the friction plate 67. A bolt 69 is connected through the inside of the mounting member 68. The bolt 69 is threadedly connected inside the movable frame 61. A nut 610 is threadedly connected to the outside of the bolt 69 at the position of the bottom end of the mounting member 68;

[0038] Pass the mounting member 68 through the outside of the bolt 69, and then install the nut 610 along the outside of the bolt 69, so that the mounting members 68 are squeezed and fixed between the bolt 69 and the nut 610, changing the fixing difficulty of the mounting member 68.

[0039] As Figure 6 and Figure 7 As shown in Figure 7 , a positioning cover 611 is fixedly installed at the top end of the bolt 69. A connecting rod 612 is fixedly installed at the top end of the positioning cover 611. A synchronous belt 613 is sleeved between the outer sides of the top ends of the two connecting rods 612. A lifting plate 614 is sleeved on the outside of the connecting rod 612. A telescopic column 615 is fixedly installed at the top end of the lifting plate 614. The top end of the telescopic column 615 is fixedly connected to the bottom end of the mounting block 62;

[0040] The telescopic column 615 enables the lifting plate 614 to lift, changing the lifting difficulty of the lifting plate 614. When the lifting plate 614 lifts, it drives the positioning cover 611 to lift through the connecting rod 612. When the positioning cover 611 lifts, it drives the bolt 69 to lift, changing the lifting difficulty of the bolt 69.

[0041] As Figure 7 and Figure 8 As shown in Figure 8 , a bidirectional threaded rod 619 is rotatably connected inside the positioning cover 611. Clamping plates 620 are symmetrically threadedly connected to the outside of the bidirectional threaded rod 619. The clamping plates 620 are slidably connected inside the positioning cover 611;

[0042] By rotating the bidirectional threaded rod 619, when the bidirectional threaded rod 619 rotates, it drives the two clamping plates 620 to move relatively or away from each other. Since the clamping plates 620 clamp the bolt 69 when moving synchronously, the clamping difficulty of the bolt 69 is changed, which further facilitates the connection between the bolt 69 and the positioning cover 611.

[0043] As Figures 1 to 4 shown, the conveyor belt 2 is composed of a frame, a motor, and a conveyor belt. The movable frame 61 is movably connected inside the frame, and the fixed column 618 is fixedly installed at the bottom end of the frame;

[0044] It can facilitate the fixation of the fixed column 618 and enable the movable frame 61 to lift inside the conveyor belt 2, changing the lifting difficulty of the movable frame 61.

[0045] As Figure 7 and Figure 8 shown, the connecting rod 612 is convex in shape, and internal serrated grooves are provided on the outer side of the connecting rod 612. The synchronous belt 613 is an internal serrated belt;

[0046] Through the cooperation between the internal serrated belt and the internal serrated grooves, when the synchronous belt 613 runs, it can synchronously drive the two connecting rods 612 to rotate, changing the rotation difficulty of the connecting rods 612.

[0047] As Figure 6 and Figure 7 shown, the movable end of the electric telescopic rod 621 penetrates the movable frame 61, and balls are arranged inside the limiting ring 65;

[0048] The electric telescopic rod 621 can drive the movable frame 61 to move, changing the moving difficulty of the movable frame 61. And under the action of the balls inside the limiting ring 65, it can facilitate the rotation of the pressing roller 66, changing the rotation difficulty of the pressing roller 66.

[0049] Workflow: During the actual use of this device, the user performs ion source cleaning on the material, cleans impurities such as dust, oil stains, and welding slag on the surface of the product, then places the material on the surface of the conveyor belt 2, and then adjusts the argon gas distribution in the coating machine cabin, powers on the target and passes argon gas, turns on the booster pump, clicks the rotation button of the aluminum target 3, turns on the intermediate frequency power supply, waits for the voltage to stabilize to the oxygen-free voltage and the target arcing is below 10, then passes oxygen, sets parameters through the control panel 5 to control the upper, middle, and lower oxygen flow rates, and starts coating when the voltage curve is stable. During the coating process, the film thickness tester 4 will automatically detect the film thickness on the Mask every 0.5 seconds, and the automatic control program will control the speed regulation structure 6 in real time according to the film thickness of each area, so that the speed regulation structure 6 changes the moving speed of the conveyor belt 2;

[0050] When the speed regulation structure 6 is in operation, the electric telescopic rod 621 is controlled to operate through an automatic control program at this time. When the electric telescopic rod 621 operates, it drives the limit ring 65 to rise. When the limit ring 65 rises, it drives the extrusion roller 66 to rise. When the extrusion roller 66 rises, it fits with the friction plate 67 and squeezes the conveyor belt inside the conveyor belt 2, so that the conveyor belt fits with the rotating roller 64. By changing the extrusion force of the conveyor belt and the rotating speed of the extruded object, the moving speed of the conveyor belt is changed, and the moving speed of the conveyor belt can be flexibly controlled to meet the conveying requirements under different working conditions;

[0051] And in this process, since the conveyor belt drives the rotating roller 64 to rotate when it operates, the rotating roller 64 drives the speed sensor 63 to rotate when it rotates. The moving speed of the conveyor belt is measured by the speed sensor 63. By means of measurement, it is observed whether the running speed of the conveyor belt changes, reducing the difficulty of observing the running speed of the conveyor belt;

[0052] Next, reverse the operation of the electric telescopic rod 621. The electric telescopic rod 621 drives the limit ring 65 to descend. When the limit ring 65 descends, it fits with the inner wall of the movable frame 61 and then continues to descend. At this time, it drives the movable frame 61 to descend. When the movable frame 61 descends, it drives the spring rod 616 to be compressed. And in this process, it can drive the mounting block 62 to descend. When the mounting block 62 descends, it drives the rotating roller 64 to descend through the speed sensor 63. After the rotating roller 64 descends, the conveyor belt of the conveyor belt 2 is pressed, so that the conveyor belt fits more closely with the output shaft of the conveyor belt 2, and the conveyor belt is more straightened, enabling the conveyor belt to move smoothly and changing the difficulty of the conveyor belt moving smoothly;

[0053] Finally, when the friction plate 67 wears and needs to be adjusted in position, at this time, pull the synchronous belt 613. When the synchronous belt 613 operates, it drives the connecting rod 612 to rotate synchronously. When the connecting rod 612 rotates synchronously, it drives the positioning cover 611 to rotate. When the positioning cover 611 rotates, it drives the bolt 69 to rotate. When the bolt 69 rotates, it moves along the inside of the movable frame 61. When the bolt 69 rotates, it drives the mounting part 68 to descend through the cooperation with the nut 610. When the mounting part 68 descends, it drives the friction plate 67 to descend, thereby changing the height between the friction plate 67 and the ground, further facilitating the adjustment of the distance between the friction plate 67 and the extrusion roller 66. There is no need for cumbersome disassembly and reinstallation, and the height of the friction plate 67 can be quickly adjusted, improving the efficiency of the production line. Precise gap adjustment can ensure that there is enough contact area between the friction plate 67 and the extrusion roller 66, thereby improving production efficiency and product quality.

[0054] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it.

Claims

1. An even film feeding mechanism of a coating machine for automatically forming an even film layer online, characterized in that, It includes a frame (1), inside which a conveyor belt (2) is installed. Aluminum targets (3) are installed above the conveyor belt (2) inside the frame (1). Thickness gauges (4) are installed on both sides of the aluminum targets (3) inside the frame (1). A control panel (5) is fixedly installed at the top of the frame (1). A speed regulation structure (6) is installed at the bottom of the conveyor belt (2); the speed regulation structure (6) includes a movable frame (61) movably connected inside the conveyor belt (2). An installation block (62) is fixedly installed inside the movable frame (61). A rotational speed sensor (63) is installed inside the installation block (62). The same rotating roller (64) is installed between the two rotational speed sensors (63). A limiting ring (65) is vertically movably connected inside the movable frame (61). The same pressing roller (66) is rotatably connected between the two limiting rings (65). Friction plates (67) are vertically slidably connected to both ends of the pressing roller (66). The two friction plates (67) at each end are located on one side of the corresponding limiting ring (65).

2. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 1, characterized in that, Spring rods (616) are symmetrically embedded at the bottom of the movable frame (61). A support bar (617) is embedded at the bottom of the spring rods (616). Fixed columns (618) are symmetrically embedded on both sides of the top of the support bar (617). The fixed columns (618) are fixedly installed at the bottom of the conveyor belt (2).

3. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 2, characterized in that, An electric telescopic rod (621) is fixedly installed at the position between the fixed column (618) and the spring rod (616) at the top of the support bar (617). The top of the electric telescopic rod (621) is fixedly connected to the bottom of the limiting ring (65).

4. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 1, characterized in that, An installation piece (68) is fixedly installed at the top of the friction plate (67). A bolt (69) penetrates through the installation piece (68). The bolt (69) is threadedly connected inside the movable frame (61). A nut (610) is threadedly connected to the outside of the bolt (69) at the position below the installation piece (68).

5. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 4, characterized in that, A positioning cover (611) is fixedly installed at the top of the bolt (69). A connecting rod (612) is fixedly installed at the top of the positioning cover (611). A synchronous belt (613) is sleeved between the outer sides of the tops of the two connecting rods (612). A lifting plate (614) is sleeved on the outside of the connecting rod (612). A telescopic column (615) is fixedly installed at the top of the lifting plate (614). The top of the telescopic column (615) is fixedly connected to the bottom of the installation block (62).

6. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 2, characterized in that, A bidirectional threaded rod (619) is rotatably connected inside the positioning cover (611). Clamping plates (620) are symmetrically threadedly connected to the outside of the bidirectional threaded rod (619). The clamping plates (620) are slidably connected inside the positioning cover (611).

7. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 2, wherein, The conveyor belt (2) is composed of a frame, a motor and a conveyor belt. The movable frame (61) is movably connected inside the frame. The fixed column (618) is fixedly installed at the bottom of the frame.

8. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 5, characterized in that, The connecting rod (612) is convex in shape, and an internal serrated groove is provided on the outer side of the connecting rod (612). The synchronous belt (613) is an internal serrated belt.

9. The uniform film feeding mechanism of the coating machine for automatically forming an online uniform film layer according to claim 3, characterized in that, The movable end of the electric telescopic rod (621) penetrates through the movable frame (61), and balls are arranged inside the limiting ring (65).

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