Radio frequency power supply ignition method, device, equipment and medium

Abstract

The invention relates to the technical field of radio-frequency power supplies, and discloses a radio-frequency power supply ignition method, which comprises the following steps: acquiring a radio-frequency module of a radio-frequency circuit, and inducing the radio-frequency power intensity of the radio-frequency module through a directional coupler to obtain an analog intensity signal; the analog intensity signal is converted into a digital signal through an analog-to-digital converter, a digital intensity signal is obtained, and the digital intensity signal is converted into radio frequency power through an MCU processor; based on a PID control algorithm, calculating a power control quantity required by the radio frequency module by using the radio frequency power, and converting the power control quantity into a power control analog signal; controlling the radio frequency module to output set power by using the power control analog signal to obtain control radio frequency power; a high-speed switch is used for controlling radio frequency power to ignite in a pulse mode, and after ignition succeeds, a normal output mode is entered. The invention further provides a radio frequency power source ignition device, equipment and a storage medium. The ignition efficiency of the radio frequency power supply can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency power supplies, and particularly to a radio frequency power supply ignition method, device, equipment and medium. Background Art

[0002] In plasma etching and coating processes, a radio frequency power supply is usually used to apply a high-frequency voltage across two electrodes of a plasma chamber and introduce a gas, so that glow discharge is generated in the plasma chamber to form plasma, the gas is ionized and reacts on the surface of an object, thereby performing an etching or coating process.

[0003] However, in some environments, it is very difficult to generate glow (ignite) in the plasma chamber. At this time, if the conventional frequency modulation matching ignition method is still used, the plasma chamber cannot be ignited, and thus glow discharge cannot be generated.

[0004] The above defects are worthy of improvement. Summary of the Invention

[0005] The present invention provides a radio frequency power supply ignition method, device, equipment and medium, and its main purpose is to improve the ignition efficiency of the radio frequency power supply.

[0006] To achieve the above object, a radio frequency power supply ignition method provided by the present invention includes:

[0007] Obtain a radio frequency module in a radio frequency circuit, connect an output end of the radio frequency module to a preset directional coupler, and sense the radio frequency power intensity of the radio frequency module through the directional coupler to obtain an analog intensity signal, where the radio frequency circuit includes a radio frequency module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor and a high-speed switch;

[0008] Convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and convert the digital intensity signal into radio frequency power by using the MCU processor, where a PID control algorithm is included in the MCU processor;

[0009] Based on the PID control algorithm, calculate a power control amount required by the radio frequency module by using the radio frequency power, and convert the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal;

[0010] Control the radio frequency module to output a set power by using the power control analog signal to obtain a controlled radio frequency power;

[0011] Control the controlled radio frequency power to be ignited in the form of pulses by using a preset high-speed switch, and after successful ignition, control the radio frequency module to enter a normal output mode.

[0012] Optionally, using a preset high-speed switch to control the control RF power to ignite in the form of pulses, and after successful ignition, entering the normal output mode, including:

[0013] When the high-speed switch is closed, output the control RF power at power P1;

[0014] When the high-speed switch is open, lower the control RF power to power P2 for output, repeat the above steps a preset number of times for ignition, and after successful ignition, control the RF module to enter the normal output mode and output the control RF power at power P1, where the power P1 is greater than a preset first reference power, the power P2 is less than a preset second reference power, and the preset second reference power is less than the preset first reference power.

[0015] Optionally, after using a preset high-speed switch to control the control RF power to ignite in the form of pulses, the method further includes:

[0016] If the ignition fails, automatically adjust the parameters of the control RF power and then attempt ignition.

[0017] Optionally, the automatically adjusting the parameters of the control RF power and then attempting ignition includes:

[0018] Obtain the power P1 and power P2 in the control RF power, and automatically increase the power P1 in the control RF power or increase the duty cycle in the control RF power to obtain an adjusted control RF power, and use the adjusted control RF power for ignition;

[0019] If the ignition fails, increase the pulse frequency of the adjusted control RF power to obtain an enhanced control RF power, and use the enhanced control RF power for ignition.

[0020] Optionally, the outputting the control RF power at power P1 includes:

[0021] Send an instruction to the MCU processor corresponding to the RF circuit through a preset human-machine interface or communication interface, and set the power value P1 and pulse parameters to obtain the power P1, where the pulse parameters include duty cycle, frequency, and number of attempts;

[0022] Through the MCU processor, turn off the continuous output mode of the RF module in the RF circuit and activate the high-speed switch in the RF circuit to enter the pulse ignition mode;

[0023] Based on the power P1, combined with the current output power of the RF module, use the preset PID control algorithm to calculate the required digital control signal, obtain the adjusted digital signal, and convert the adjusted digital signal into an analog voltage signal through a digital-to-analog converter, and input it to the power control terminal of the RF module. Through the power control terminal, control the RF power to be output at the power P1.

[0024] Optionally, the using a preset high-speed switch to control the RF power to be ignited in the form of pulses includes:

[0025] Based on the preset pulse parameters, turn off the high-speed switch, and after the preset pulse parameters are satisfied, send a disconnection instruction to the high-speed switch, and repeat the above operations to form pulse ignition.

[0026] Optionally, the automatically increasing the power P1 in the controlled RF power includes:

[0027] Increase the controlled RF power from the power P1 to 1.5 times the power P1 or 2 times the power P1.

[0028] To solve the above problems, the present invention also provides a RF power supply ignition device, and the device includes:

[0029] A signal simulation module, configured to obtain the RF module in the RF circuit, connect the output end of the RF module to a preset directional coupler, and sense the RF power intensity of the RF module through the directional coupler to obtain an analog intensity signal, where the RF circuit includes an RF module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch;

[0030] A power conversion module, configured to convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and use the MCU processor to convert the digital intensity signal into RF power, where the MCU processor includes a PID control algorithm;

[0031] A power generation module, configured to calculate the required power control amount of the RF module based on the PID control algorithm using the RF power, and convert the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal;

[0032] An RF ignition module, configured to control the RF module to output a set power using the power control analog signal to obtain a controlled RF power;

[0033] Use a preset high-speed switch to control the controlled RF power to be ignited in the form of pulses, and after successful ignition, control the RF module to enter the normal output mode.

[0034] To solve the above problems, the present invention also provides an electronic device, which includes:

[0035] At least one MCU processor; and,

[0036] A memory communicatively connected to the at least one MCU processor; wherein,

[0037] The memory stores a computer program executable by the at least one MCU processor, and when the computer program is executed by the at least one MCU processor, the at least one MCU processor is enabled to execute the radio frequency power ignition method as described above.

[0038] To solve the above problems, the present invention also provides a computer-readable storage medium, which includes a storage data area and a storage program area. The storage data area stores created data, and the storage program area stores a computer program; wherein, when the computer program is executed by an MCU processor, the radio frequency power ignition method as described above is implemented.

[0039] In an embodiment of the present invention, a radio frequency module of a radio frequency circuit is obtained, and the radio frequency power intensity of the radio frequency module is sensed through a directional coupler to obtain an analog intensity signal; the analog intensity signal is converted into a digital signal through an analog-to-digital converter to obtain a digital intensity signal, and the digital intensity signal is converted into radio frequency power by using an MCU processor; based on a PID control algorithm, the power control amount required by the radio frequency module is calculated by using the radio frequency power and converted into a power control analog signal; the power control analog signal is used to control the radio frequency module to output a set power to obtain controlled radio frequency power; a high-speed switch is used to ignite the controlled radio frequency power in the form of pulses, and after successful ignition, it enters the normal output mode. Therefore, for the radio frequency power ignition method, device, electronic device and computer-readable storage medium proposed by the present invention, the present invention can improve the ignition ability of the radio frequency power. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a schematic flowchart of a radio frequency power ignition method provided by an embodiment of the present invention;

[0041] Figure 2 It is a schematic module diagram of a radio frequency power ignition device provided by an embodiment of the present invention;

[0042] Figure 3 It is a schematic internal structure diagram of an electronic device for implementing the radio frequency power ignition method provided by an embodiment of the present invention.

[0043] The realization, functional features and advantages of the objectives of the present invention will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0044] It should be understood that the specific embodiments described herein are merely used to explain the present invention and are not intended to limit the present invention.

[0045] An embodiment of the present application provides a radio frequency power supply ignition method. The execution subject of the radio frequency power supply ignition method includes, but is not limited to, at least one of electronic devices such as a server, a terminal, etc. that can be configured to execute the method provided in the embodiment of the present application. Among them, the server can be an independent server or a cloud server that provides basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communications, middleware services, domain name services, security services, Content Delivery Network (CDN), and big data and artificial intelligence platforms. In other words, the radio frequency power supply ignition method can be executed by software or hardware installed on a remote device or a server device, and the software can be a blockchain platform. The server includes, but is not limited to: a single server, a server cluster, a cloud server, or a cloud server cluster, etc.

[0046] Refer to Figure 1 As shown, it is a schematic flowchart of a radio frequency power supply ignition method provided by an embodiment of the present invention. In this embodiment, the radio frequency power supply ignition method includes the following steps S1 - S6:

[0047] S1. Obtain the radio frequency module in the radio frequency circuit, connect the output end of the radio frequency module to a preset directional coupler, and sense the radio frequency power intensity of the radio frequency module through the directional coupler to obtain an analog intensity signal. Among them, the radio frequency circuit includes a radio frequency module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch.

[0048] It can be understood that the connection and working mode of the radio frequency circuit realize the precise monitoring, control, and adjustment of the output power of the radio frequency module. By working together with components such as the directional coupler, analog-to-digital converter, digital-to-analog converter, MCU processor, and high-speed switch, the radio frequency power intensity can be sensed in real time, converted into a digital signal for processing and calculation, and then through the conversion and output of the power control amount, the precise control of the output power of the radio frequency module can be achieved, ensuring the stable output of the radio frequency power, and the radio frequency power is controlled in the form of pulses through the high-speed switch for ignition, improving the success rate and efficiency of ignition, and ultimately achieving the effect of optimizing the performance of the radio frequency system and improving the stability and reliability of the system.

[0049] In the embodiments of the present invention, the radio frequency module refers to a device capable of generating radio frequency power signals. It is the power source of the entire radio frequency circuit, providing power support for subsequent signal processing and transmission. In this circuit, the role of the radio frequency module is to generate radio frequency power signals, and its output terminal is connected to a directional coupler. The directional coupler senses the radio frequency power intensity of the radio frequency module to obtain an analog intensity signal, providing a basis for subsequent analog-to-digital conversion and power control.

[0050] In the embodiments of the present invention, a directional coupler is a passive device widely used in radio frequency and microwave systems. It can couple the radio frequency power output by the radio frequency module to another transmission line in a certain proportion to achieve directional transmission and power monitoring of signals. A directional coupler usually has four ports: an input port, an output port, a coupling port, and an isolation port. When a signal is input from the input port, most of the signal will pass directly through the output port, and at the same time, a small part of the signal will be coupled to the coupling port for output, while the isolation port is usually connected to a matching load to achieve high isolation. The main technical indicators of a directional coupler include coupling degree, isolation degree, insertion loss, and bandwidth, etc. In a radio frequency circuit, a directional coupler is used to monitor the output power of the radio frequency module, providing a basis for subsequent power control and adjustment to ensure the stable and reliable operation of the radio frequency system.

[0051] S2. Convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and use the MCU processor to convert the digital intensity signal into radio frequency power. Among them, the PID control algorithm is included in the MCU processor.

[0052] In the embodiments of the present invention, an analog-to-digital converter (ADC) is an electronic device that converts an analog signal into a digital signal. It receives the analog intensity signal from the directional coupler and converts it into a digital signal, that is, a digital intensity signal, for the processor to calculate and control the radio frequency power. The analog-to-digital converter plays a key bridging role in the radio frequency circuit, converting the analog signal into a digital signal, thereby realizing precise monitoring and digital processing of the output power of the radio frequency power device, ensuring that the radio frequency system can operate stably and output the required power. The performance indicators of the analog-to-digital converter, such as resolution, accuracy, sampling rate, etc., directly affect the accuracy of power monitoring and the stability of the system.

[0053] In the embodiments of the present invention, in the radio frequency circuit, the MCU processor is the core control component, responsible for receiving and processing the digital intensity signal from the analog-to-digital converter. The MCU processor uses the internal PID control algorithm to analyze and calculate the signal to determine the power control amount required by the radio frequency module. The efficient operation and precise control of the MCU processor ensure the stable output and fast response of the radio frequency power, and it is the key component for the entire radio frequency system to achieve automatic and intelligent control.

[0054] Furthermore, the analog intensity signal is converted into a digital signal by an analog-to-digital converter to obtain a digital intensity signal, and the MCU processor including the PID control algorithm is used to convert the digital intensity signal into radio frequency power. This process realizes the precise digital control of the radio frequency power. The PID control algorithm can adjust the control quantity in real time according to the digital intensity signal to ensure the stability and accuracy of the radio frequency power output, effectively reduce errors and fluctuations, improve the response speed and adaptability of the system, and enable the radio frequency device to quickly and accurately adjust the power output under different working conditions to meet specific application requirements.

[0055] S3. Based on the PID control algorithm, the power control quantity required by the radio frequency module is calculated using the radio frequency power, and the power control quantity is converted into an analog signal through the digital-to-analog converter to obtain a power control analog signal.

[0056] It can be understood that based on the PID control algorithm, the power control quantity required by the radio frequency module is calculated using the radio frequency power, and the power control quantity is converted into an analog signal through the digital-to-analog converter. This process can realize the precise and stable control of the output power of the radio frequency module. The PID control algorithm will dynamically adjust the power control quantity according to the deviation between the actual radio frequency power and the target power to ensure that the output power of the radio frequency module quickly and accurately reaches the set value, effectively reduce power fluctuations and errors, improve the overall performance and stability of the radio frequency system, and enable it to maintain good output characteristics under different working conditions.

[0057] In the embodiment of the present invention, the digital-to-analog converter (DAC) is an electronic device that converts a digital signal into an analog signal. It receives the digital power control quantity from the processor and converts it into an analog signal, that is, a power control analog signal, for controlling the radio frequency module to output the set power. The digital-to-analog converter plays a key bridging role in the radio frequency circuit, converting the digital signal into an analog signal, thereby realizing the precise control of the output power of the radio frequency module and ensuring that the radio frequency system can stably output the required power. The performance indicators of the digital-to-analog converter, such as resolution, accuracy, linearity, etc., directly affect the accuracy of power control and the stability of the system.

[0058] In the embodiment of the present invention, the PID control algorithm is a feedback control algorithm widely used in control systems. It processes the error signal through three links: proportional (P), integral (I), and derivative (D) to achieve precise control of the system output. The proportional link adjusts the control quantity proportionally according to the size of the error, the integral link eliminates the steady-state error, and the derivative link predicts the change trend of the error and adjusts in advance. The three work together to make the system quickly respond and stably reach the set value, and is widely used in control fields such as temperature, pressure, and speed to ensure that the system output is consistent with the target value.

[0059] S4. Use the power control analog signal to control the radio frequency module to output a set power, and obtain the controlled radio frequency power.

[0060] It can be understood that using the power control analog signal to control the radio frequency module to output a set power can achieve precise and stable control of the output power of the radio frequency module, ensuring that the radio frequency module transmits signals according to the preset power level. This method enables the radio frequency system to quickly and accurately adjust the output power according to actual needs, effectively reducing power fluctuations and errors, improving the stability and reliability of the system, and meeting the strict requirements for radio frequency power in different application scenarios.

[0061] S5. Use a preset high-speed switch to control the controlled radio frequency power to be ignited in the form of pulses, and after successful ignition, control the radio frequency module to enter the normal output mode.

[0062] It can be understood that using a preset high-speed switch to ignite the controlled radio frequency power in the form of pulses and enter the normal output mode after successful ignition significantly improves the ignition efficiency and power control accuracy of the radio frequency system. The high-speed switch enables the radio frequency power to be instantaneously released in the form of pulses, ensuring quick and reliable ignition while reducing energy loss during the ignition process. After successful ignition, it quickly switches to the normal output mode, ensuring the stability and efficiency of the system in different working stages, enabling the radio frequency device to maintain good performance and reliability in various application scenarios.

[0063] In the embodiment of the present invention, the use of a preset high-speed switch to control the controlled radio frequency power to be ignited in the form of pulses and, after successful ignition, control the radio frequency module to enter the normal output mode includes:

[0064] When the high-speed switch is closed, output the controlled radio frequency power at power P1;

[0065] When the high-speed switch is opened, decrease the controlled radio frequency power to power P2 for output, repeat the above steps a preset number of times for ignition, and after successful ignition, control the radio frequency module to enter the normal output mode and output the controlled radio frequency power at power P1, where the power P1 is greater than a preset first reference power, the power P2 is less than a preset second reference power, and the preset second reference power is less than the preset first reference power.

[0066] In the embodiment of the present invention, the outputting the controlled radio frequency power at power P1 includes:

[0067] Send instructions to the MCU processor corresponding to the RF circuit through a preset human-machine interface or communication interface, and set the power value P1 and pulse parameters to obtain the power P1, where the pulse parameters include duty cycle, frequency, and number of attempts;

[0068] Through the MCU processor, turn off the continuous output mode of the RF module in the RF circuit, and activate the high-speed switch in the RF circuit to enter the pulse ignition mode;

[0069] Based on the power P1, combined with the current output power of the RF module, use a preset PID control algorithm to calculate the required digital control signal, obtain the adjusted digital signal, and convert the adjusted digital signal into an analog voltage signal through a digital-to-analog converter, and input it to the power control terminal of the RF module. Through the power control terminal, control the RF power to be output at the power P1.

[0070] Further, after using the preset high-speed switch to control the RF power to be ignited in the form of pulses, the method further includes:

[0071] If the ignition fails, automatically adjust the parameters of the controlled RF power and then perform an ignition attempt.

[0072] Further, the automatically adjusting the parameters of the controlled RF power and then performing an ignition attempt includes:

[0073] Obtain the power P1 and power P2 in the controlled RF power, and automatically increase the power P1 in the controlled RF power or increase the duty cycle in the controlled RF power to obtain the adjusted controlled RF power, and use the adjusted controlled RF power for ignition;

[0074] If the ignition fails, increase the pulse frequency of the adjusted controlled RF power to obtain the enhanced controlled RF power, and use the enhanced controlled RF power for ignition.

[0075] In the embodiment of the present invention, the using the preset high-speed switch to control the RF power to be ignited in the form of pulses includes:

[0076] Based on the preset pulse parameters, turn off the high-speed switch, and after the preset pulse parameters are satisfied, send a disconnection instruction to the high-speed switch, and repeat the above operations to form pulse ignition.

[0077] In the embodiment of the present invention, the automatically increasing the power P1 in the controlled RF power includes:

[0078] Increase the controlled RF power from the power P1 to 1.5 times the power P1 or 2 times the power P1.

[0079] In an embodiment of the present invention, a radio frequency module of a radio frequency circuit is obtained, and the radio frequency power intensity of the radio frequency module is sensed through a directional coupler to obtain an analog intensity signal; the analog intensity signal is converted into a digital signal through an analog-to-digital converter to obtain a digital intensity signal, and the MCU processor is used to convert the digital intensity signal into radio frequency power; based on the PID control algorithm, the power control amount required by the radio frequency module is calculated using the radio frequency power and converted into a power control analog signal; the power control analog signal is used to control the radio frequency module to output a set power to obtain a controlled radio frequency power; a high-speed switch is used to ignite the controlled radio frequency power in the form of a pulse, and after successful ignition, enter the normal output mode. Therefore, the radio frequency power supply ignition method, device, electronic device and computer-readable storage medium proposed by the present invention can improve the ignition ability of the radio frequency power supply.

[0080] As Figure 2 shown, it is a module schematic diagram of the radio frequency power supply ignition device of the present invention.

[0081] The radio frequency power supply ignition device 100 of the present invention can be installed in an electronic device. According to the functions achieved, the radio frequency power supply ignition device may include a signal simulation module 101, a power conversion module 102, a power generation module 103, and a radio frequency ignition module 104. The modules of the present invention may also be referred to as units, which refer to a series of computer program segments that can be executed by the MCU processor of an electronic device and can complete fixed functions, and are stored in the memory of the electronic device.

[0082] In this embodiment, the functions of each module / unit are as follows:

[0083] The signal simulation module 101 is configured to obtain a radio frequency module in a radio frequency circuit, connect the output end of the radio frequency module to a preset directional coupler, and sense the radio frequency power intensity of the radio frequency module through the directional coupler to obtain an analog intensity signal, where the radio frequency circuit includes a radio frequency module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch;

[0084] The power conversion module 102 is configured to convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and use the MCU processor to convert the digital intensity signal into radio frequency power, where the PID control algorithm is included in the MCU processor;

[0085] The power generation module 103 is configured to calculate the power control amount required by the radio frequency module based on the PID control algorithm using the radio frequency power, and convert the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal;

[0086] The radio frequency ignition module 104 is used to control the radio frequency module to output a set power by using the power control analog signal, so as to obtain a controlled radio frequency power.

[0087] The preset high-speed switch is used to control the controlled radio frequency power to perform ignition in the form of pulses, and after the ignition is successful, the radio frequency module is controlled to enter the normal output mode.

[0088] Specifically, each module in the radio frequency power supply ignition device 100 in the embodiment of the present invention adopts the same technical means as those in the above-mentioned Figure 1 radio frequency power supply ignition method and can produce the same technical effects, which will not be elaborated here.

[0089] As Figure 3 shown, it is a schematic structural diagram of an electronic device for implementing the radio frequency power supply ignition method of the present invention.

[0090] The electronic device may include an MCU processor 10, a memory 11, a communication bus 12, and a communication interface 13, and may also include a computer program stored in the memory 11 and executable on the MCU processor 10, such as a radio frequency power supply ignition program.

[0091] Among them, in some embodiments, the MCU processor 10 may be composed of integrated circuits. For example, it may be composed of a single packaged integrated circuit, or may be composed of multiple integrated circuits with the same or different functions, including the combination of one or more central MCU processors (Central Processing Unit, CPU), micro MCU processors, digital processing chips, graphics MCU processors, and various control chips. The MCU processor 10 is the control core (Control Unit) of the electronic device, connecting various components of the entire electronic device through various interfaces and circuits, and by running or executing programs or modules stored in the memory 11 (such as executing the radio frequency power supply ignition program, etc.), and calling data stored in the memory 11, to execute various functions of the electronic device and process data.

[0092] The memory 11 at least includes one type of readable storage medium, and the readable storage medium includes flash memory, mobile hard disk, multimedia card, card-type memory (such as SD or DX memory, etc.), magnetic memory, magnetic disk, optical disc, etc. The memory 11 can be an internal storage unit of the electronic device in some embodiments, such as the mobile hard disk of the electronic device. The memory 11 can also be an external storage device of the electronic device in other embodiments, such as a plug-in mobile hard disk, Smart Media Card (SMC), Secure Digital (SD) card, Flash Card, etc. equipped on the electronic device. Further, the memory 11 can also include both an internal storage unit and an external storage device of the electronic device. The memory 11 can be used not only to store application software installed on the electronic device and various types of data, such as the code of the radio frequency power ignition program, etc., but also to temporarily store data that has been output or will be output.

[0093] The communication bus 12 can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. This bus can be divided into an address bus, a data bus, a control bus, etc. The bus is configured to enable connection communication between the memory 11 and at least one MCU processor 10, etc.

[0094] The communication interface 13 is used for communication between the above-mentioned electronic device and other devices, including a network interface and a user interface. Optionally, the network interface can include a wired interface and / or a wireless interface (such as a WI-FI interface, a Bluetooth interface, etc.), and is generally used to establish a communication connection between this electronic device and other electronic devices. The user interface can be a display, an input unit (such as a keyboard), and optionally, the user interface can also be a standard wired interface, a wireless interface. Optionally, in some embodiments, the display can be an LED display, a liquid crystal display, a touch liquid crystal display, and an OLED (Organic Light-Emitting Diode) toucher, etc. Among them, the display can also be appropriately referred to as a display screen or a display unit, and is used to display information processed in the electronic device and to display a visual user interface.

[0095] Figure 3 Only the electronic device with components is shown, and those skilled in the art can understand that Figure 3The structures shown do not constitute a limitation on the electronic device, and it may include fewer or more components than those shown, or combine certain components, or have different component arrangements.

[0096] For example, although not shown, the electronic device may further include a power source (such as a battery) for powering each component. Preferably, the power source can be logically connected to the at least one MCU processor 10 through a power management device, so as to implement functions such as charging management, discharging management, and power consumption management through the power management device. The power source may also include any components such as one or more DC or AC power sources, a recharge device, a power failure detection circuit, a power converter or inverter, a power status indicator, etc. The electronic device may also include various sensors, a Bluetooth module, a Wi-Fi module, etc., which will not be elaborated here.

[0097] It should be understood that the embodiments are only for illustrative purposes and are not limited by this structure in the scope of the patent application.

[0098] The radio frequency power ignition program stored in the memory 11 in the electronic device is a combination of multiple computer programs. When running in the MCU processor 10, it can achieve:

[0099] Obtain the radio frequency module in the radio frequency circuit, connect the output end of the radio frequency module to a preset directional coupler, and sense the radio frequency power intensity of the radio frequency module through the directional coupler to obtain an analog intensity signal. Wherein, the radio frequency circuit includes a radio frequency module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch;

[0100] Convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and use the MCU processor to convert the digital intensity signal into radio frequency power. Wherein, the PID control algorithm is included in the MCU processor;

[0101] Based on the PID control algorithm, calculate the power control amount required by the radio frequency module using the radio frequency power, and convert the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal;

[0102] Control the radio frequency module to output a set power using the power control analog signal to obtain a controlled radio frequency power;

[0103] Use a preset high-speed switch to control the controlled radio frequency power to ignite in the form of pulses, and after successful ignition, control the radio frequency module to enter the normal output mode.

[0104] Specifically, for the specific implementation method of the above computer program by the MCU processor 10, reference can be made to Figure 1Descriptions of relevant steps in corresponding embodiments are not elaborated herein.

[0105] Furthermore, if the modules / units integrated in the electronic device are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium. The computer-readable storage medium can be volatile or non-volatile. For example, the computer-readable medium can include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard disk, magnetic disk, optical disc, computer memory, read-only memory (ROM, Read-Only Memory).

[0106] The present invention also provides a computer-readable storage medium storing a computer program, which when executed by the MCU processor of an electronic device, can achieve:

[0107] Obtain the radio frequency module in the radio frequency circuit, connect the output end of the radio frequency module to a preset directional coupler, and sense the radio frequency power intensity of the radio frequency module through the directional coupler to obtain an analog intensity signal, where the radio frequency circuit includes a radio frequency module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch;

[0108] Convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and use the MCU processor to convert the digital intensity signal into radio frequency power, where the MCU processor includes a PID control algorithm;

[0109] Based on the PID control algorithm, calculate the power control amount required by the radio frequency module using the radio frequency power, and convert the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal;

[0110] Control the radio frequency module to output a set power using the power control analog signal to obtain controlled radio frequency power;

[0111] Use a preset high-speed switch to control the controlled radio frequency power to ignite in the form of pulses, and after successful ignition, control the radio frequency module to enter the normal output mode.

[0112] In several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the modules is only a logical function division, and there can be other division methods in actual implementation.

[0113] The module described as a separation component may or may not be physically separated. The component shown as a module may or may not be a physical unit, that is, it may be located in one place or distributed to multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0114] In addition, in each embodiment of the present invention, the functional modules can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit. The above integrated unit can be implemented in the form of hardware, or in the form of a combination of hardware and software functional modules.

[0115] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-mentioned exemplary embodiments, and without departing from the spirit or basic characteristics of the present invention, the present invention can be implemented in other specific forms.

[0116] Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any associated drawing marks in the claims should not be regarded as limiting the claimed rights.

[0117] The blockchain referred to in the present invention is a new application mode of computer technologies such as distributed data storage, peer-to-peer transmission, consensus mechanism, and encryption algorithm. Blockchain, in essence, is a decentralized database, a series of data blocks generated by using cryptographic methods. Each data block contains information about a batch of network transactions, which is used to verify the validity of the information (anti-counterfeiting) and generate the next block. The blockchain can include a blockchain underlying platform, a platform product service layer, an application service layer, etc.

[0118] The embodiments of this application can acquire and process relevant data based on artificial intelligence technology. Among them, Artificial Intelligence (AI) is to use a digital computer or a machine controlled by a digital computer to simulate, extend and expand human intelligence, sense the environment, acquire knowledge and use knowledge to obtain the best results of theory, method, technology and application system.

[0119] In addition, obviously, the word "including" does not exclude other units or steps, and the singular does not exclude the plural. The multiple units or devices stated in the system claims can also be implemented by one unit or device through software or hardware. Words such as second are used to represent names and do not represent any specific order.

[0120] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention.

Claims

1. A radio frequency power supply ignition method, characterized in that, The method includes: Obtain a radio frequency module in the radio frequency circuit, connect the output end of the radio frequency module to a preset directional coupler, and sense the radio frequency power intensity of the radio frequency module through the directional coupler to obtain an analog intensity signal. Wherein, the radio frequency circuit includes a radio frequency module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch; Convert the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and use the MCU processor to convert the digital intensity signal into radio frequency power. Wherein, the PID control algorithm is included in the MCU processor; Based on the PID control algorithm, calculate the power control amount required by the radio frequency module using the radio frequency power, and convert the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal; Use the power control analog signal to control the radio frequency module to output a set power to obtain a controlled radio frequency power; Use a preset high-speed switch to control the controlled radio frequency power to be ignited in the form of a pulse, and after successful ignition, control the radio frequency module to enter the normal output mode.

2. The radio frequency power supply ignition method according to claim 1, characterized in that, The step of using a preset high-speed switch to control the controlled radio frequency power to be ignited in the form of a pulse and, after successful ignition, controlling the radio frequency module to enter the normal output mode includes: When the high-speed switch is closed, output the controlled radio frequency power at power P1; When the high-speed switch is opened, reduce the controlled radio frequency power to power P2 for output, repeat the above steps a preset number of times for ignition, and after successful ignition, control the radio frequency module to enter the normal output mode and output the controlled radio frequency power at power P1. Wherein, the power P1 is greater than a preset first reference power, the power P2 is less than a preset second reference power, and the preset second reference power is less than the preset first reference power.

3. The radio frequency power supply ignition method according to claim 1, characterized in that, After using a preset high-speed switch to control the controlled radio frequency power to be ignited in the form of a pulse, the method further includes: If the ignition fails, automatically adjust the parameters of the controlled radio frequency power and then attempt ignition.

4. The radio frequency power supply ignition method according to claim 3, characterized in that, The step of automatically adjusting the parameters of the controlled radio frequency power and then attempting ignition includes: Obtain the power P1 and power P2 in the controlled radio frequency power, and automatically increase the power P1 in the controlled radio frequency power or increase the duty cycle in the controlled radio frequency power to obtain an adjusted controlled radio frequency power, and use the adjusted controlled radio frequency power for ignition; If the ignition fails, increase the pulse frequency of the adjusted controlled radio frequency power to obtain an enhanced controlled radio frequency power, and use the enhanced controlled radio frequency power for ignition.

5. The radio frequency power supply ignition method according to claim 2, characterized in that, The step of outputting the controlled radio frequency power at power P1 includes: Send an instruction to the MCU processor corresponding to the radio frequency circuit through a preset human-machine interface or communication interface, and set the power value P1 and pulse parameters to obtain the power P1. Wherein, the pulse parameters include duty cycle, frequency, and number of attempts; Turn off the continuous output mode of the RF module in the RF circuit through the MCU processor, and activate the high-speed switch in the RF circuit to enter the pulse ignition mode; Based on the power P1, combined with the current output power of the RF module, use the preset PID control algorithm to calculate the required digital control signal, obtain the adjusted digital signal, and convert the adjusted digital signal into an analog voltage signal through a digital-to-analog converter, and input it to the power control terminal of the RF module. The control RF power is output at the power P1 through the power control terminal.

6. The radio frequency power supply ignition method according to claim 2, wherein, The use of the preset high-speed switch to control the control RF power to ignite in the form of pulses includes: Based on the preset pulse parameters, turn off the high-speed switch, and after the preset pulse parameters are satisfied, send a disconnection instruction to the high-speed switch, and repeat the above operations to form pulse ignition.

7. The radio frequency power supply ignition method according to any one of claims 1 to 6, characterized in that The automatic increase of the power P1 in the control RF power includes: Increase the control RF power from the power P1 to 1.5 times the power P1 or 2 times the power P1.

8. A radio frequency power supply ignition device, characterized in that The device includes: A signal simulation module for obtaining the RF module in the RF circuit, connecting the output end of the RF module to a preset directional coupler, and sensing the RF power intensity of the RF module through the directional coupler to obtain an analog intensity signal, where the RF circuit includes an RF module, a directional coupler, an analog-to-digital converter, a digital-to-analog converter, an MCU processor, and a high-speed switch; A power conversion module for converting the analog intensity signal into a digital signal through the analog-to-digital converter to obtain a digital intensity signal, and converting the digital intensity signal into RF power by using the MCU processor, where the MCU processor includes a PID control algorithm; A power generation module for calculating the power control amount required by the RF module based on the PID control algorithm by using the RF power, and converting the power control amount into an analog signal through the digital-to-analog converter to obtain a power control analog signal; An RF ignition module for controlling the RF module to output a set power by using the power control analog signal to obtain a control RF power; Use the preset high-speed switch to control the control RF power to ignite in the form of pulses, and after successful ignition, control the RF module to enter the normal output mode.

9. An electronic device, characterized in that, The electronic device includes: At least one MCU processor; and, A memory communicatively connected to the at least one MCU processor; wherein, The memory stores a computer program executable by the at least one MCU processor, and the computer program is executed by the at least one MCU processor so that the at least one MCU processor can execute the RF power supply ignition method according to any one of claims 1 to 7.

10. A computer-readable storage medium, comprising a data storage area and a program storage area, the data storage area storing created data, and the program storage area storing a computer program; wherein, When the computer program is executed by the MCU processor, it implements the RF power supply ignition method according to any one of claims 1 to 7.

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