A gallium boat, a source loading system, and a source loading method.

Abstract

A gallium boat, a source filling system, and a source filling method are disclosed, belonging to the field of semiconductor manufacturing. The technical solution is as follows: A gallium boat includes a boat body, with a filling port fixedly provided on the upper part of the boat body. A sealing cap is detachably installed on the filling port. A conical channel is provided inside the filling port. The sealing cap includes a cap body for covering and shielding the filling port. A conical plug is fixedly provided on the cap body and inserted into the conical channel. The outer wall of the plug and the side wall of the conical channel are both frosted. Through the cooperation of the cap body, the plug, and the filling port, multi-stage sealing is achieved, extending the path of communication between the filling port and the outside, improving the sealing effect. The outer wall of the plug and the inner wall of the filling port are fitted together by the frosted structure, resulting in a good sealing effect and solving the problem of high processing difficulty.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a gallium boat, a source filling system, and a source filling method. Background Technology

[0002] Hydride vapor phase epitaxy (HVPE) equipment is currently a key piece of equipment used for growing third-generation semiconductor materials (such as gallium nitride, gallium oxide, and aluminum nitride crystals). The sources used in HVPE include liquid gallium sources and powdered / sheet gallium sources, with high-purity liquid gallium sources being the most commonly used. During operation, the liquid gallium source is placed in a gallium boat, which is typically made of quartz. The operating environment is a high temperature of 600–900 degrees Celsius, and the atmosphere includes HCl, Cl₂, and N₂.

[0003] The process of adding high-purity liquid gallium sources must ensure no leakage and minimize contact with the external environment, thereby reducing gallium volatilization and ensuring the purity of the raw materials. Currently available horizontal gallium boats for HVPE are mostly manufactured as a single unit to ensure seamless connection from the inlet to the outlet, preventing premature reactions between different components.

[0004] However, the gallium boat used in horizontal HVPE is relatively long. When adding gallium source into the gallium boat through the side air inlet, the gallium boat needs to be tilted or placed vertically, which is inconvenient to operate and makes the addition difficult. If the addition port is directly opened on the top of the gallium boat, the installation and processing requirements between the addition port and the air inlet flange and other structures are high because the gallium boat is made of quartz, which makes it difficult to seal the addition port. In addition, when adding liquid gallium source into the gallium boat, the liquid gallium source is very easy to come into contact with air, making it difficult to guarantee its purity. Summary of the Invention

[0005] To address the technical problems in the existing horizontal HVPE gallium boats mentioned above, which are long and have difficult sealing and manufacturing processes when the filling port is directly opened on the upper part of the gallium boat, this invention provides a gallium boat.

[0006] The technical solution of this invention is as follows:

[0007] This invention provides a gallium boat, including a boat body, with a filling port fixedly provided on the upper part of the boat body. A sealing cap is detachably installed on the filling port. A conical channel is provided inside the filling port. The sealing cap includes a cap body for covering and covering the filling port. A conical plug is fixedly provided on the cap body and inserted into the conical channel. The outer wall of the plug and the side wall of the conical channel are both frosted. The filling port is covered and sealed by the cap body to achieve primary sealing, and the conical channel is blocked by the plug to achieve secondary sealing. This extends the path of communication between the filling port and the outside, improving the sealing effect. The outer wall of the plug and the inner wall of the filling port are fitted together by the frosted structure to achieve a seal, effectively ensuring the sealing effect of the filling port. Furthermore, the frosting process on the inner wall of the filling port and the outer wall of the plug makes the processing operation simpler and more convenient, reducing the difficulty and cost of quartz processing.

[0008] Preferably, both the plug and the tapered channel are tapered structures with an upper diameter larger than a lower diameter, which allows the plug to form a tighter fit when inserted into the tapered channel, further improving the sealing effect. It also facilitates the insertion and removal of the plug, enhancing the ease of use.

[0009] Preferably, a filling tube is fixedly installed inside the boat body. The upper end of the filling tube is fixedly connected to the filling port, and there is a gap between the lower end of the filling port and the bottom of the boat body. The filling tube not only provides a stable channel for the injection of liquid gallium source, but also, in conjunction with the filling port and sealing cap, achieves three-level sealing, which not only facilitates processing and use, but also effectively improves the sealing effect.

[0010] Preferably, the gap between the lower end of the filling port and the bottom of the boat body is greater than 2mm. With this gap, the liquid gallium liquid will submerge the lower end of the filling tube to achieve liquid self-sealing and prevent gas in the boat body from flowing back from the filling port.

[0011] Preferably, a number of baffles are fixedly arranged at intervals inside the boat. The arrangement of the baffles optimizes the flow path of the reactant gas inside the boat, making the gas distribution more uniform, prolonging the contact time between the gas and the liquid gallium source, and improving the reaction efficiency. An air inlet is fixedly provided at one end of the boat and an air outlet is fixedly provided at the other end of the boat, ensuring the smooth entry and exit of the reactant gas and maintaining the continuous progress of the reaction.

[0012] A source filling system includes a water bath unit, a gallium bottle, and a gallium boat. The water bath unit is located above the boat. The gallium bottle contains a solid gallium source and is detachably installed inside the water bath unit. The gallium bottle is connected to the filling port on the boat via a connecting pipe. The water bath unit can precisely control the temperature to ensure that the solid gallium source can be stably melted into a liquid gallium source. The connecting pipe enables the stable delivery of the liquid gallium source to the gallium boat, improving the operability of source filling.

[0013] Preferably, a transfer bottle is installed inside the water bath unit. The top of the transfer bottle is detachably connected to the mouth of the gallium bottle, and the bottom of the transfer bottle is detachably connected to the connecting tube. The transfer bottle is connected to the filling port through the connecting tube. The transfer bottle plays a transition and buffer role, which can effectively prevent the liquid gallium source from being contaminated during the transfer process.

[0014] Preferably, the overall height of the transport bottle is lower than the depth of the water bath unit, which ensures that the transport bottle can be completely surrounded by hot water, preventing the liquid gallium source from cooling and solidifying. A connecting pipe is fixed on the transport bottle, which can be used to connect to an inert gas source, playing a protective role during the transport of the liquid gallium source and preventing the liquid gallium source from contacting air and being oxidized.

[0015] Preferably, the water bath unit is equipped with scale lines, which makes it easy for operators to control the amount of hot water in the water bath unit, thereby controlling the heating effect on the solid gallium source and ensuring the stability and consistency of the liquid gallium source melting process.

[0016] A source injection method, comprising:

[0017] The transfer bottle is installed inside the water bath unit. The transfer bottle is connected to the filling port through a connecting pipe, which connects the connecting pipe to the inert gas source. The gallium bottle containing the solid gallium source is installed on top of the transfer bottle. This ensures that the entire system is in an environment protected by inert gas before the solid gallium source is heated and melted, effectively preventing the gallium source from being oxidized and ensuring the quality of the liquid gallium source.

[0018] Hot water is added to the water bath unit until the water level is flush with the graduation line. The solid gallium source in the gallium bottle is heated and melted into liquid gallium source. The liquid gallium source flows into the boat body through the transfer bottle, connecting pipe and filling port in sequence, ensuring the stability and consistency of the heating environment. This is conducive to the uniform and stable melting of solid gallium source into liquid gallium source, and smooth flow into gallium boat through the predetermined path, ensuring the smooth progress of the source filling process and avoiding contamination of liquid gallium source.

[0019] After the liquid gallium source in the transfer bottle has been transferred, the connecting tube is separated from the filling port, and the sealing cap is fastened to the filling port to seal it. This effectively prevents external impurities from entering the gallium boat, maintains the purity of the liquid gallium source, and provides good raw material conditions for subsequent reactions in the gallium boat.

[0020] As can be seen from the above technical solutions, the advantages of the present invention are:

[0021] 1. The filling port is covered and sealed by the cap to achieve primary sealing, and the conical channel is blocked by the plug to achieve secondary sealing. This extends the path between the filling port and the outside, improving the sealing effect. The outer wall of the plug and the inner wall of the filling port are fitted with a frosted structure to achieve a seal, effectively ensuring the sealing effect of the filling port. Furthermore, the frosting process on the inner wall of the filling port and the outer wall of the plug makes the processing operation simpler and more convenient, reducing the difficulty and cost of quartz processing.

[0022] 2. Install the transfer bottle inside the water bath unit. Connect the transfer bottle to the filling port through the connecting pipe, so that the connecting pipe is connected to the inert gas source. Install the gallium bottle containing the solid gallium source on top of the transfer bottle. This ensures that the entire system is in an environment protected by inert gas before heating and melting the solid gallium source, effectively preventing the gallium source from being oxidized and ensuring the quality of the liquid gallium source injected into the gallium boat. Attached Figure Description

[0023] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a partially enlarged structural diagram of the gallium boat filling port according to one or more embodiments of the present invention;

[0025] Figure 2 This is a cross-sectional structural schematic diagram of the sealing cap according to one or more embodiments of the present invention;

[0026] Figure 3 This is a schematic diagram of the overall structure of the source filling system according to one or more embodiments of the present invention;

[0027] Figure 4 This is a top view schematic diagram of the source filling system according to one or more embodiments of the present invention;

[0028] The components represented by the various reference numerals in the diagram are:

[0029] 1. Hull; 2. Filling port; 3. Sealing cap; 4. Filling pipe; 5. Conical channel; 6. Frosted wall; 7. Cap; 8. Plug; 9. Baffle plate; 10. Air inlet; 11. Air outlet; 12. Liquid gallium source; 13. Water bath unit; 14. Gallium bottle; 15. Transfer bottle; 16. Hot water; 17. First connection part; 18. Second connection part; 19. Third connection part; 20. Bottle mouth; 21. Connecting pipe; 22. Connecting pipe; 23. Ambient gas; 24. Scale line. Detailed Implementation

[0030] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings of the specific embodiments. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this patent, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this patent.

[0031] Example 1

[0032] In a typical embodiment of the present invention, such as Figure 1 As shown, a gallium boat is proposed. The gallium boat is made of quartz material and includes: boat body 1, filling port 2 and sealing cap 3. The filling port 2 is fixedly set on the upper part of the boat body 1 and communicates with the interior of the boat body 1. The sealing cap 3 is detachably installed on the filling port 2 so as to cover and seal the filling port 2.

[0033] like Figure 1 As shown, the filling port 2 is vertically fixed on the upper part of the boat body 1 by welding. The filling port 2 is a conical column structure. Specifically, the overall shape of the filling port 2 is columnar. The interior of the filling port 2 is provided with a conical channel 5 with an upper diameter larger than the lower diameter, so as to communicate with the interior of the boat body 1 through the conical channel 5. The inner wall of the filling port 2 is a frosted wall 6.

[0034] like Figure 2 As shown, the sealing cap 3 includes a cap body 7 and a plug part 8. The cap body 7 is used to fasten onto the filling port 2 and cover the filling port 2. The plug part 8 is fixedly installed at the center of the bottom of the cap body 7 by welding. The plug part 8 is used to insert into the conical channel 5 inside the filling port 2 to block the conical channel 5, thereby achieving secondary sealing, extending the path of the filling port 2 to the outside, and improving the sealing effect.

[0035] In this embodiment, the plug 8 is a conical structure with an upper diameter larger than a lower diameter. The shape of the plug 8 is adapted to the conical shape of the conical channel 5, and the outer wall of the plug 8 is a frosted structure, that is, the outer wall of the plug 8 is also a frosted wall 6. The outer wall of the plug 8 and the interior of the filling port 2 are fitted together by the frosted structure to achieve a seal, effectively ensuring the sealing effect of the filling port 2. Furthermore, the frosting process on the inner wall of the filling port 2 and the outer wall of the plug 8 makes the processing operation simpler and more convenient, reducing the difficulty and cost of quartz processing.

[0036] The cap 7 forms a flanged structure on the periphery of the plug 8 to cover the outside of the filling port 2, thereby covering and sealing the filling port 2. With the arrangement of the plug 8, the sealing path of the filling port 2 is a zigzag shape, specifically the conical path between the conical outer wall of the plug 8 and the conical channel 5, and the straight path between the cap 7 and the filling port 2, which effectively improves the sealing effect.

[0037] like Figure 1 As shown, the gallium boat also includes a filling tube 4, which is also made of quartz. The filling tube 4 is vertically fixed inside the boat body 1 by welding. The upper end of the filling tube 4 is fixedly connected to the bottom of the filling port 2. The filling port 2 communicates with the interior of the boat body 1 through the filling tube 4. There is a gap D between the lower end of the filling port 2 and the bottom of the boat body 1. The gap D between the lower end of the filling port 2 and the bottom of the boat body 1 is greater than 2mm to facilitate the injection of gallium liquid into the boat body 1. The gallium liquid in the boat body 1 will submerge the lower end of the filling tube 4 to achieve liquid self-sealing and prevent gas in the boat body 1 from flowing back from the filling port 2. The setting of the filling tube 4, together with the use of the filling port 2 and the sealing cap 3, achieves a three-level seal, which not only facilitates processing and use, but also effectively improves the sealing effect.

[0038] The interior of the boat body 1 is fixedly provided with several baffles 9 at intervals along its length. The baffles 9 are used to optimize the gas flow path, increase the contact area and time between the gas and the substrate and the reaction area, so that the reaction gas is more evenly distributed in the reaction space. At the same time, the gas flow path is lengthened, the degree of gas turbulence is increased, thereby improving the mixing effect and mass transfer rate between the reaction gases, and improving the uniformity and consistency of the reaction.

[0039] like Figure 4 As shown, an air inlet 10 is fixedly provided at one end of the boat body 1, and an air outlet 11 is fixedly provided at the other end of the boat body 1. The air inlet 10 is used for the reaction gas to enter the boat body 1, and the air outlet 11 is used to discharge the exhaust gas after the reaction.

[0040] In this embodiment, the filling port 2 is covered and sealed by the cover 7 to achieve primary sealing, and the conical channel 5 is blocked by the plug 8 to achieve secondary sealing. This extends the path of the filling port 2 to the outside and improves the sealing effect. The outer wall of the plug 8 and the inner wall of the filling port 2 are fitted with a frosted structure to achieve sealing, effectively ensuring the sealing effect of the filling port 2. Furthermore, the frosting process on the inner wall of the filling port 2 and the outer wall of the plug 8 makes the processing operation simpler and more convenient, reducing the difficulty and cost of quartz processing. At the same time, the lower end of the filling tube 4 is submerged by gallium liquid to achieve liquid self-sealing and prevent gas in the boat 1 from flowing back from the filling port 2. The setting of the filling tube 4, together with the filling port 2 and the sealing cover 3, achieves tertiary sealing, further improving the sealing effect.

[0041] After the sealing cap 3 is fastened onto the filling port 2, the partial pressure of the ambient gas 23 (such as N2) outside the gallium boat can be controlled to make the partial pressure of the ambient gas 23 greater than that inside the boat body 1, so as to effectively reduce the escape of process gases (GaCl3 and Ga vapor) inside the boat body 1.

[0042] Example 2

[0043] In another typical embodiment of the present invention, such as Figure 3 As shown, a source filling system is proposed, which adopts the gallium boat mentioned in Embodiment 1. The source filling system specifically includes: a gallium boat, a water bath unit 13, and a gallium bottle 14. The gallium boat includes a boat body 1 and a filling port 2 fixedly installed on the upper part of the boat body 1. The water bath unit 13 is located above the boat body 1. The water bath unit 13 is used to heat the solid gallium source so that the solid gallium source melts into a liquid gallium source 12. The gallium bottle 14 is used to hold the solid gallium source. The gallium bottle 14 is detachably installed in the water bath unit 13. The solid gallium source contained in the bottle is heated by the water bath unit 13 so that the solid gallium source melts into a liquid gallium source 12. The liquid gallium source 12 is used to replenish the gallium boat. The gallium bottle 14 is connected to the filling port 2 on the boat body 1 by a connecting pipe 22. The liquid gallium source 12 is transported into the boat body 1 through the connecting pipe 22.

[0044] Understandably, the water bath unit 13 can be supported and fixed by a bracket or similar means, so that the water bath unit 13 is positioned above the gallium boat.

[0045] The water bath unit 13 is a water bath pot structure. The water bath unit 13 contains hot water 16, which is used to heat the solid gallium source in the gallium bottle 14. Gallium has a low melting point of 29.78°C, so it is convenient to use hot water to heat the solid gallium source and melt it. Placing the solid gallium source in the gallium bottle 14 facilitates the placement and heating of the solid gallium source.

[0046] To ensure airtightness and prevent the evaporation and contamination of the liquid gallium source 12, a transfer bottle 15 is detachably installed inside the water bath unit 13. The top of the transfer bottle 15 is detachably connected to the gallium bottle 14, and the bottom of the transfer bottle 15 is detachably connected to the water bath unit 13 and the connecting pipe 22. The hot water 16 in the water bath unit 13 can directly heat the solid gallium source in the gallium bottle 14 to melt it into liquid gallium source 12. The liquid gallium source 12 flows from the gallium bottle 14 into the transfer bottle 15, and then is transported to the boat hull 1 through the transfer bottle 15 and the connecting pipe 22. The transfer bottle 15 is made of PTFE / PFA / PP material.

[0047] like Figure 3As shown, a first connecting part 17 is fixedly provided at the bottom center position inside the water bath unit 13. The first connecting part 17 has an internal thread, and a through hole is opened at the bottom center position of the water bath unit 13 for the connecting tube 22 to pass through. A second connecting part 18 is fixedly provided at the bottom of the transfer bottle 15. The second connecting part 18 communicates with the interior of the transfer bottle 15. The outer wall of the second connecting part 18 has an external thread, and the inner wall of the second connecting part 18 has an internal thread. The second connecting part 18 is connected to the internal thread of the first connecting part 17 through the external thread, thereby realizing the detachable connection between the transfer bottle 15 and the water bath unit 13 to fix the position of the transfer bottle 15. The internal thread of the second connecting part 18 is used for threaded connection with the connecting tube 22, thereby ensuring the connection between the connecting tube 22 and the transfer bottle 15 is firm and airtight.

[0048] The overall height of the transfer bottle 15 is lower than the depth of the water bath unit 13. Specifically, a third connecting part 19 is fixedly provided on the top of the transfer bottle 15. The third connecting part 19 is lower than the top of the water bath unit 13. The third connecting part 19 communicates with the interior of the transfer bottle 15 and has internal threads. The third connecting part 19 is detachably connected to the gallium bottle 14 through a threaded connection, thereby ensuring that the solid gallium source in the gallium bottle 14 is isolated from the outside air during the heating process, so that the molten liquid gallium source 12 can enter the transfer bottle 15 for transfer, preventing the evaporation and contamination of the liquid gallium source 12.

[0049] The gallium bottle 14 is fixedly provided with a bottle mouth 20. The outer wall of the bottle mouth 20 is provided with an external thread, so it can be detachably connected to the third connecting part 19 by means of thread connection, so as to complete the fixed position and sealed connection between the gallium bottle 14 and the transfer bottle 15.

[0050] To ensure that the liquid gallium source 12 in the transfer bottle 15 can effectively flow into the boat 1 through the connecting pipe 22, a connecting pipe 21 is also fixedly installed on the transfer bottle 15. The connecting pipe 21 is vertically fixed at the top of the transfer bottle 15 and is connected to the inside of the transfer bottle 15. During the heating process, the transfer bottle 15 is connected to an inert gas source (such as an N2 gas source) through the connecting pipe 21 to balance the gas pressure, ensuring that the liquid gallium source 12 can effectively flow into the boat 1 through the connecting pipe 22. It can also divert any residual liquid gallium source 12 in the transfer bottle 15 into the boat 1, avoiding the residue of the liquid gallium source 12 and reducing resource waste.

[0051] The water bath unit 13 is made of stainless steel and has a scale line 24. Since the third connecting part 19 is frequently used and prone to loosening, in this embodiment, the height of the scale line 24 is set to be lower than the top of the third connecting part 19 and higher than the top of the transfer bottle 15. That is, the scale line 24 on the water bath unit 13 is located between the top of the third connecting part 19 and the top of the transfer bottle 15. Thus, after adding hot water 16, the water level of the hot water 16 is located above the top of the transfer bottle 15 and not higher than the top of the third connecting part 19. This allows the hot water 16 to heat the solid gallium source in the gallium bottle 14 while effectively preventing the hot water 16 from entering between the bottle opening 20 and the third connecting part 19 of the gallium bottle 14, thereby preventing the hot water 16 from entering the transfer bottle 15 and contaminating the liquid gallium source 12.

[0052] In other embodiments, in order to improve the sealing performance of the connection between the transfer bottle 15 and the water bath unit 13, the bottom of the transfer bottle 15 can be directly fixedly connected to the water bath unit 13. That is, the first connecting part 17 and the second connecting part 18 are welded and fixed to improve the sealing performance of the connection between them. It is understood that the specific connection method between the transfer bottle 15 and the water bath unit 13 can be determined according to the actual design requirements. There are no restrictions here. The transfer bottle 15 and the water bath unit 13 can be fixedly connected or detachably connected, as long as the transfer bottle 15 can be fixedly installed in the water bath unit 13 and the seal can be guaranteed.

[0053] The transfer bottle 15 not only protects the liquid gallium source 12 from evaporation and contamination, but also stabilizes the state of the liquid gallium source 12, allowing it to remain in a liquid state and flow into the connecting tube 22, thus preventing the liquid gallium source 12 from cooling and solidifying into a solid state.

[0054] Example 3

[0055] In another typical embodiment of the present invention, a source injection method is proposed, which adopts the source injection system mentioned in Example 2, and the specific process includes:

[0056] First, the transfer bottle 15 is fixedly installed in the water bath unit 13. In this embodiment, the transfer bottle 15 and the water bath unit 13 are detachably connected. The bottom of the transfer bottle 15 is threadedly connected to the first connecting part 17 in the water bath unit 13 through the second connecting part 18. The transfer bottle 15 is vertically arranged in the water bath unit 13.

[0057] One end of the connecting tube 22 is connected to the second connecting part 18 at the bottom of the transfer bottle 15 by means of a threaded connection, and the other end of the connecting tube 22 is inserted into the filling port 2; then the connecting tube 21 is connected to the inert gas source, and the gallium bottle 14 containing the solid gallium source is threaded to the third connecting part 19 at the top of the transfer bottle 15.

[0058] After the source filling system is assembled, hot water 16 is added into the water bath unit 13 so that the liquid level of the hot water 16 is flush with the scale line 24 on the water bath unit 13. In this embodiment, the temperature of the hot water 16 is not lower than 30°C.

[0059] After the hot water 16 is added, it is left to stand. The solid gallium source in the gallium bottle 14 is heated and melted into liquid gallium source 12. The liquid gallium source 12 flows into the transfer bottle 15 and is transported to the boat 1 through the connecting pipe 22.

[0060] During the transport of liquid gallium source 12, the transfer bottle 15 is connected to an inert gas source via a connecting pipe 21 to stabilize the gas pressure, and the inert gas is used to assist the liquid gallium source 12 in flowing into the connecting pipe 22 to avoid the residue of liquid gallium source 12.

[0061] After the liquid gallium source 12 in the transfer bottle 15 has been transferred, the connecting tube 22 is separated from the filling port 2, and the sealing cap 3 is fastened to the filling port 2 to seal the filling port 2 and prevent the liquid gallium source 12 from evaporating or becoming contaminated.

[0062] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A source dispensing system, characterized in that, include: The water bath unit (13), gallium bottle (14), and gallium boat are provided. The gallium boat includes a boat body (1), and a filling port (2) is fixedly provided on the upper part of the boat body (1). A sealing cap (3) is detachably installed on the filling port (2). A conical channel (5) is provided inside the filling port (2). The sealing cap (3) includes a cap body (7), which is used to cover the filling port (2). A conical plug (8) is fixedly provided on the cap body (7). The plug (8) is inserted into the conical channel (5). The outer wall of the plug (8) and the side wall of the conical channel (5) are both frosted structures. Both the plug (8) and the conical channel (5) are conical structures with an upper diameter greater than a lower diameter. The water bath unit (13) is located in Above the boat body (1), a gallium bottle (14) is equipped with a solid gallium source. The gallium bottle (14) is detachably installed in the water bath unit (13). The gallium bottle (14) is connected to the filling port (2) on the boat body (1) via a connecting pipe (22). A transfer bottle (15) is installed in the water bath unit (13). The top of the transfer bottle (15) is detachably connected to the bottle mouth (20) of the gallium bottle (14). The bottom of the transfer bottle (15) is detachably connected to the connecting pipe (22). The transfer bottle (15) is connected to the filling port (2) via the connecting pipe (22). The overall height of the transfer bottle (15) is lower than the depth of the water bath unit (13). A connecting pipe (21) is fixedly installed on the transfer bottle (15).

2. The source dispensing system according to claim 1, characterized in that, A filling pipe (4) is fixedly installed inside the boat body (1). The upper end of the filling pipe (4) is fixedly connected to the filling port (2), and there is a gap between the lower end of the filling port (2) and the bottom of the boat body (1).

3. The source dispensing system according to claim 2, characterized in that, The gap between the lower end of the filling port (2) and the bottom of the boat body (1) is greater than 2mm.

4. The source dispensing system according to claim 1, characterized in that, Several baffles (9) are fixedly provided at intervals inside the boat body (1), an air inlet (10) is fixedly provided at one end of the boat body (1), and an air outlet (11) is fixedly provided at the other end of the boat body (1).

5. The source dispensing system according to claim 1, characterized in that, The water bath unit (13) is equipped with scale lines (24).

6. A source injection method, characterized in that, The source filling system as described in claim 1 is employed, comprising: The transfer bottle (15) is installed inside the water bath unit (13). The transfer bottle (15) is connected to the filling port (2) through the connecting pipe (22), so that the connecting pipe (21) is connected to the inert gas source, and the gallium bottle (14) containing the solid gallium source is installed on top of the transfer bottle (15). Hot water (16) is added into the water bath unit (13) so that the liquid level of the hot water (16) is flush with the scale line (24). The solid gallium source in the gallium bottle (14) is heated and melted into liquid gallium source (12). The liquid gallium source (12) flows into the boat body (1) through the transfer bottle (15), the connecting pipe (22), and the filling port (2) in sequence. After the liquid gallium source (12) in the transfer bottle (15) has been transferred, the connecting tube (22) is separated from the filling port (2), and the sealing cap (3) is fastened to the filling port (2).

Images