Grinding fluid online concentration meter and automatic titration and cleaning method and device

Abstract

The invention provides a grinding fluid online concentration meter and an automatic titration and cleaning method and device, and is applied to the technical field of grinding fluid titration. By automatically controlling injection of required samples and reagents, the purpose of automatically and accurately injecting the reagents into the sample box is achieved, the concentration measurement accuracy of titration is guaranteed, automatic cleaning can be achieved before titration and after titration until next measurement is carried out, and the titration efficiency is improved. According to the present invention, it is possible to construct a method capable of continuous measurement without errors even during a continuous measurement period, eliminate errors in chemical mixing caused by manual operation and risk factors that may occur when a person touches the chemical, and to continuously measure the concentrations of several types of chemicals at the same time within a fixed period of time. And a great contribution can be made for increasing the yield.

Description

Technical Field

[0001] This application relates to the technical field of abrasive liquid titration, and specifically relates to an on-line concentration meter for abrasive liquid, as well as an automatic titration and cleaning method and device. Background Art

[0002] Currently, the titration method is a commonly used method for measuring concentration by manually injecting samples or reagents and then applying the titration effect. In the case of manual injection, the deviation of concentration measurement depends on the capacity and inclination of the measuring instrument. Additionally, even in the form of automatic injection, there are many problems, such as time delay, incomplete cleaning, etc. Moreover, after the measurement is completed, the entire pipeline or the parts in contact with chemicals need to be manually cleaned, which further affects the measurement results.

[0003] Based on this, a new titration technical solution is needed. Summary of the Invention

[0004] In view of this, the embodiments of this specification provide an on-line concentration meter for abrasive liquid, as well as an automatic titration and cleaning method and device, which realize automatic titration and cleaning, and ensure the titration accuracy and control flexibility of concentration measurement.

[0005] The embodiments of this specification provide the following technical solutions:

[0006] The embodiments of this specification provide an automatic titration and cleaning device for abrasive liquid concentration, including: a container, a first three-way valve, a second three-way valve, a third three-way valve, a three-way connector, a six-way valve, a first injection pump, a second injection pump, a sampling loop, and a drain valve;

[0007] The inlet of the first three-way valve is connected to the pure water pipeline, the first outlet of the first three-way valve is connected to the first port of the three-way connector, and the second outlet of the first three-way valve is connected to the fourth port of the six-way valve;

[0008] The inlet of the second three-way valve is connected to the abrasive liquid sample pipeline, the first outlet of the second three-way valve is connected to the second port of the three-way connector, and the second outlet of the second three-way valve is connected to the inlet of the third three-way valve;

[0009] The first outlet of the third three-way valve is connected to the first port of the six-way valve, and the second outlet of the third three-way valve is connected to the second inlet of the first injection pump;

[0010] The third port of the three-way connector is connected to the nozzle interface of the container;

[0011] The first inlet of the first injection pump is connected to the titrant pipeline, and the first outlet of the first injection pump is connected to the first titrant inlet of the container;

[0012] Each port of the six-way valve is also set as follows: the second port is connected to the drain valve, the third port and the fifth port are respectively connected to the two ports of the sampling loop, and the fifth port is connected to the abrasive liquid inlet of the container.

[0013] The first drain port of the container is connected to the drain valve.

[0014] The inlet of the second injection pump is connected to the chemical cleaning liquid pipeline, and the outlet of the second injection pump is connected to the chemical cleaning port of the container.

[0015] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above technical solutions adopted in the embodiments of the present specification at least include:

[0016] The present invention can completely automatically inject the required sample volume, achieve automatic and accurate injection of reagents and conduct titration before carrying out concentration measurement. Among them, through a fixed working method, the concentration can be measured more accurately than manual operation. And after the measurement, through automatic cleaning of the reagents until the next measurement, a method can be constructed that can continuously measure without error even during continuous measurement.

[0017] In addition, in the case where the present invention needs to continuously analyze the concentrations of various chemicals, through the fully automatic titration concentration measurement system, the errors caused by manual operation in chemical mixing and the risk factors that may occur due to personnel's contact with chemicals are eliminated. And by being able to continuously measure the concentrations of several types of chemicals simultaneously within a fixed time, it can make a great contribution to increasing the output. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 It is a schematic structural diagram of an automatic titration and cleaning device for abrasive liquid concentration in the present application;

[0020] Figure 2 It is a schematic pipeline diagram of an automatic titration and cleaning device for abrasive liquid concentration in the present application;

[0021] Figure 3 It is a schematic structural diagram of cleaning before titration in the present application;

[0022] Figure 4 It is a schematic structural diagram of sample sampling and capture in the present application;

[0023] Figure 5It is a schematic structural diagram of sample transfer and injection into a container in this application;

[0024] Figure 6 It is a schematic structural diagram of titrant injection into a container by an injection pump in this application;

[0025] Figure 7 It is a schematic structural diagram of cleaning solution injection into a container by an injection pump in this application. Detailed implementation manners

[0026] The embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0027] The following uses specific specific examples to illustrate the implementation manners of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. This application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without making creative efforts belong to the scope of protection of this application.

[0028] It should be noted that the following describes various aspects of the embodiments within the scope of the appended claims. It should be obvious that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is illustrative only. Based on this application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects described herein can be used to implement the device and / or practice the method. In addition, this device can be implemented and this method can be practiced using other structures and / or functionality in addition to one or more of the aspects described herein.

[0029] It should also be noted that the diagrams provided in the following embodiments only illustrate the basic concept of this application in a schematic manner. Only the components related to this application are shown in the diagrams, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in its actual implementation can be an arbitrary change, and the component layout type may also be more complex.

[0030] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the examples can be practiced without these specific details.

[0031] In the titration method test of the polishing liquid concentration, the injection method of the sample or reagent is a significant factor affecting the deviation of concentration measurement. For example, the manual injection method brings obvious errors. For example, when using a stepping motor to control the automatic injection of an injection pump, there are also many problems, such as time delay and incomplete cleaning. In addition, the cleaning method after measurement also affects the concentration measurement result. For example, the entire pipeline or the part in contact with chemicals needs to be manually cleaned, which affects the measurement accuracy and effect.

[0032] Based on this, the present application proposes an automated high-precision concentration test scheme that is modular, small-sized, and capable of online titration and cleaning:

[0033] On the one hand, before titration, for components such as valves, pipelines, and containers used in the titration test, ultrapure water (DIW) can be used for automated fluidics cleaning and vessel cleaning. Then, after the automated cleaning is completed, the titration test can be carried out based on the clean pipeline, which can reduce the cleaning difficulty of the pipeline and also reduce the influence of the pipeline on the titration test result;

[0034] On the other hand, during the titration test, valves, high-precision injection pumps, sampling loops, etc. are used to automatically and highly precisely inject samples and reagents into the container. Since the samples and reagents can be quantitatively injected with high precision, high-precision concentration titration measurement can be achieved, reducing the influence of the injection method on the titration result.

[0035] On the third hand, after titration, the pipeline and container are automatically cleaned, and it can quickly enter the idle state ready for titration, facilitating multiple and continuous online titration tests of the concentration and meeting the usage requirements of online and continuous multiple titration tests.

[0036] On the fourth hand, through components such as three-way valves and six-way valves, the pipeline is significantly simplified, which is very beneficial to modular and miniaturized design and also beneficial to improving the product reliability.

[0037] It should be noted that on-line titration refers to the operation of the slurry supply equipment related to the CMP process at the semiconductor production site, which can measure whether the concentration of hydrogen peroxide (H2O2) in the slurry meets the target parameter range during the mixing and supply of hydrogen peroxide (H2O2). At this time, the slurry enters through the inlet part of the concentration meter in a pressured state, fills the loop volume required for measurement, and performs drain (referred to as sample capture).

[0038] In addition, the titration measurement algorithm or process (Sequence) is used to start the measurement at the time point when the concentration measurement is required while maintaining the mixing operation of the Slurry and H2O2 mixture in the supply equipment. For example, when the equipment issues a start signal, or the measurement interval (interval period) of the concentration meter itself, etc. Regarding the measurement algorithm or process, it can be the algorithm or process used in the existing solution, or redefined according to the test requirements, and no specific limitation is made here.

[0039] The following will schematically illustrate each embodiment of the present application with reference to the accompanying drawings.

[0040] Reference Figure 1 and Figure 2 schematically shows that an automatic titration and cleaning device for slurry concentration may include: a container (such as Figure 1 the VESSEL shown), a first three-way valve (such as Figure 1 the three-way valve composed of AV01 and AV02 shown), a second three-way valve (such as Figure 1 the AV03 shown), a third three-way valve (such as Figure 1 the AV04 shown), a three-way connector (see Figure 1 shown), a six-way valve (such as Figure 1 the 6PORT VAVLE shown), a first syringe pump (such as Figure 1 the SYRINGEPUMP1 shown), a second syringe pump (such as Figure 1 the SYRINGE PUMP2 shown), a sampling loop (such as Figure 1 the SAMPLELOOP shown) and a drain valve (such as Figure 1 the DRAIN BOX shown).

[0041] Among them, the pipeline connection relationship can be schematically shown as follows:

[0042] (1) The inlet of the first three-way valve is connected to the pure water pipeline (such as Figure 1 the DIW-related pipeline shown), the first outlet of the first three-way valve is connected to the first port of the three-way connector, and the second outlet of the first three-way valve is connected to the fourth port of the six-way valve;

[0043] (2) The inlet of the second three-way valve is connected to the abrasive liquid sample pipeline, the first outlet of the second three-way valve is connected to the second port of the three-way connector, and the second outlet of the second three-way valve is connected to the inlet of the third three-way valve;

[0044] (3) The first outlet of the third three-way valve is connected to the first port of the six-way valve, and the second outlet of the third three-way valve is connected to the second inlet of the first syringe pump;

[0045] (4) The third port of the three-way connector is connected to the nozzle interface of the container;

[0046] (5) The first inlet of the first syringe pump is connected to the titrant pipeline, and the first outlet of the first syringe pump is connected to the first titrant inlet of the container;

[0047] (6) Each port of the six-way valve is also set as follows: the second port is connected to the drain valve, the third port and the fifth port are respectively connected to both ends of the sampling loop, and the fifth port is connected to the abrasive liquid inlet of the container;

[0048] (7) The first drain port of the container is connected to the drain valve;

[0049] (8) The inlet of the second syringe pump is connected to the chemical cleaning liquid pipeline, and the outlet of the second syringe pump is connected to the chemical cleaning port of the container.

[0050] It should be noted that since components such as three-way valves, six-way valves, and syringe pumps can all be controlled, the injection process and injection volume of samples and reagents can be automatically and highly accurately controlled, and the cleaning process has also achieved automated control. Moreover, these control processes can form a fixed working mode, and the entire titration and cleaning have achieved automation, which is significantly more convenient to operate than manual operation and can ensure higher precision in titration.

[0051] Based on the above pipeline connection relationship, completing the cleaning work before titration, then performing titration, and then completing the cleaning again after titration is beneficial to improving the titration accuracy.

[0052] The cleaning process before titration (i.e., the pre-preparation stage, Pre-Process) can be shown as follows: Refer to Figure 3 the illustration and perform related work such as internal fluid cleaning (fluidics cleaning) and vessel cleaning (vessel cleaning) before measurement using DIW.

[0053] The pipeline cleaning path is: DIW → AV01 → 6way④ → 6way③ → SAMPLE LOOP → 6way⑥ → 6way⑤ → VESSEL. Specifically, ultrapure water passes through the first three-way valve, the fourth and third ports of the six-way valve, the sampling loop, the sixth and fifth ports of the six-way valve, and the container in sequence, and the pure water completes fluid cleaning along the way.

[0054] The vessel cleaning path is: DIW → AV02 → SPRAY, and vessel cleaning is completed inside the vessel through the spray nozzle and the mixer. Specifically, ultrapure water passes through the first three-way valve, the three-way connector, and the nozzle interface of the container to clean the container and the nozzle inside the container in sequence; the liquid after cleaning the container is discharged to the drain valve through the drain port of the container.

[0055] After the cleaning is completed, high-precision titration tests can be carried out using clean pipelines, vessels, etc.

[0056] Reference Figure 4 As shown in the schematic, in the automatic titration test process, the abrasive sample passes through the second three-way valve, the third three-way valve, the first and sixth ports of the six-way valve, the sampling loop, the third and second ports of the six-way valve, and the drain valve in sequence, and is sampled and captured by the sampling loop when passing through the sampling loop.

[0057] Reference Figure 5 As shown in the schematic, after the sampling capture, a transfer process is carried out. Among them, ultrapure water passes through the first three-way valve, the fourth and third ports of the six-way valve, the sampling loop, the sixth and fifth ports of the six-way valve, and the container in sequence, and the pure water injects the abrasive sample captured by the sampling loop into the container.

[0058] Therefore, the path for the sample to be measured to complete sample capture and the Sample transfer process through the pipeline (capture 6way valveloop) composed of the six-way valve and the sampling loop is: Sample → AV03 → AV04 → 6way① → 6way⑥ → 6way③ → 6way③ → 6way② → DRAIN BOX.

[0059] In practice, a high-precision injector is formed by combining the six-way valve with the sampling loop. Among them, when the six-way valve is in the loading (Load) position, the sample is loaded into the sampling loop (which can also be called the quantitative loop) from the sampling hole, and the excess sample will be discharged from the vent hole of the six-way valve (such as Figure 1 the 6way② port shown in the schematic); when the six-way valve is in the injection (Inject) position, the DIW pumped is used to flush the sampling loop, and then the sample is pushed into the container.

[0060] After the sample injection is completed, the titration stage is entered. To titrate the sample injected into the vessel, Ceric (a reagent of tetravalent cerium) can be injected into the vessel as the titration reagent to carry out the titration operation. Refer to Figure 6 As shown, the reagent enters the container through the first injection pump.

[0061] It should be noted that regarding the titration reaction process between the sample and the reagent in the container, reference can be made to the prior art, and no further elaboration will be made here.

[0062] In addition, during the titration, the existing titration monitoring algorithm can be utilized to end the injection of the reagent by detecting whether the titration endpoint (mV) is reached, that is, to determine whether the endpoint is reached through voltage monitoring, and when the corresponding endpoint is reached, the injection of the reagent can be stopped in a timely manner.

[0063] After the titration is completed, the post-titration cleaning stage (Post-Process) is entered. That is, after the titration measurement is completed, the internal fluidics and vessel cleaning and other cleaning operations are repeated using DIW, and the cleaning solution NaOH is injected through SYRINGE PUMP2 to perform chemical cleaning through the pipeline.

[0064] Refer to Figure 7 As shown, NaOH enters the container through the second injection pump to perform chemical cleaning of the pipeline using NaOH.

[0065] Generally, before the titration cleaning, a detection process can be performed, such as checking the status of each valve and completing the initialization settings of the injection pump, etc. And, after the cleaning is completed after the titration, that is, after the chemical cleaning is completed, vessel diw fill and syringe initializing are carried out to make the device in an idle state and wait for the next set measurement signal.

[0066] In some examples, to titrate hydrogen peroxide in the grinding fluid, the principle of acid-base neutralization reaction is adopted, so the titration solution Ceric reagent and the chemical cleaning solution NaOH inside the concentration meter are used.

[0067] It should be noted that the Ceric solution and the NaOH solution can be determined in advance according to the titration requirements, and no specific limitations will be made here.

[0068] In some examples, the first three-way valve, the second three-way valve, and the third three-way valve are all end-cap three-way valves; and / or, the second three-way valve and the third three-way valve are both three-way valves with reverse-mounted stop valves.

[0069] In some examples, the bottom drain port of the container is connected to a drain valve (such as Figure 1 the valve composed of AV05 and AV06 shown schematically) to better control the draining of the container.

[0070] In some examples, the container is also provided with an overflow drain port, and at this time, the overflow drain port can be connected to the drain valve to prevent the container from overflowing with the solution.

[0071] In some examples, the injection pump can preferably be a high-precision injection pump. For example, the first injection pump is preferably a micro-injection pump, where the minimum injection volume control accuracy of the micro-injection pump is greater than or equal to 0.01 ml, the service life can reach 800,000 repetitions, the minimum injection volume is 0.01 ml, and the repeated precision is dev. 0.84%, etc.

[0072] In some examples, the second outlet of the first injection pump is connected to one port of the third three-way valve (AV4), and the injection pump can be used to pressurize the pipeline, and the solution is injected into the pipeline by pressurization.

[0073] In some examples, on the basis that the second outlet of the first injection pump is connected to one port of the third three-way valve (AV4), the titration reagent can be replaced with a sample, and the chemical cleaning solution can be replaced with the titration reagent. At this time, the sample will complete sampling capture through the first injection pump, the third three-way valve, the six-way valve, the sampling loop, etc., and then the sample is injected into the container by using a sample transfer process similar to the previous example, and the titration reagent titrates the sample in the container through the second injection pump.

[0074] It should be noted that the cleaning processes before and after the titration are similar to the previous examples, and the specific content can refer to the description in the previous examples.

[0075] Therefore, in addition to titrating external abrasive liquid samples, the device can also pre-set relevant samples and reagents inside the device to carry out flexible titration tests.

[0076] In some examples, the drain valve is preferably a piston-type drain valve, that is, it uses a piston structure and has a large caliber, and can drain water quickly.

[0077] In some examples, the components in the above various examples are placed vertically, which can facilitate the vertical flow of liquid in the components. For example, the drain valve is placed vertically to facilitate the vertical drainage of liquid, speed up the drainage, and improve the efficiency.

[0078] In some examples, the nozzle of the container is preferably a spray nozzle, and can also preferably be a rotary nozzle. By improving the spraying angle, rotation, etc., the cleaning efficiency and cleanliness can be improved, which is beneficial to improving the accuracy of the titration test results.

[0079] In some examples, the mixer of the container is preferably a mixer with adjustable stirring speed. For example, a BLDC motor is used to achieve adjustable speed, which is convenient for stirring the solution and improving the efficiency.

[0080] In some examples, the stick is made of PTFE. Since PTFE is insoluble in any solvent, it can reduce the influence of the equipment on the titration test results.

[0081] Based on the same inventive concept, this application also provides an automatic titration and cleaning method for the concentration of the grinding fluid, and can further be based on the automatic titration and cleaning device for the concentration of the grinding fluid given in each of the foregoing examples, and automatically complete the titration and cleaning processes with high precision and high efficiency, meeting the requirements of multiple and continuous online titrations.

[0082] An automatic titration and cleaning method for the concentration of the grinding fluid provided by this application may include the following processes:

[0083] Step S202: Use ultrapure water to perform internal cleaning on the pipelines and containers in the device before the titration test, and discharge the cleaning solution through the drain valve;

[0084] Step S204: Inject a grinding fluid sample, and the sampling loop completes the sampling and capture of the sample;

[0085] Step S206: Inject ultrapure water to inject the sample captured by the sampling loop into the container;

[0086] Step S208: Use the first injection pump to inject a titration reagent into the container so that the titration reagent reacts with the sample in the container;

[0087] Step S210: After the titration test, use ultrapure water to perform internal cleaning on the pipelines and containers in the device before the titration test, and use the second injection pump to inject a chemical cleaning solution to carry out chemical cleaning, and discharge the cleaning solution through the drain valve.

[0088] Regarding the content such as pre-titration cleaning, titration process, and post-titration cleaning, etc., it can be understood in combination with each of the foregoing examples and will not be elaborated here.

[0089] In some examples, before the titration cleaning, first check the status of each valve and complete the initialization settings of the injection pump.

[0090] In some examples, after chemical cleaning, ultrapure water is injected into the container, and the initialization settings of the injection pump are completed, so that the device is in the idle state to wait for the next round of titration tests.

[0091] In some examples, a non-contact optical liquid level sensor and / or an electronic liquid level sensor are used for monitoring. The liquid medicine is non-contact, which is convenient for detection and has better durability.

[0092] In some examples, a non-contact optical leakage sensor and / or an electronic leakage sensor are used for liquid leakage monitoring, which is convenient for liquid leakage detection.

[0093] In addition, when liquid leakage is detected, an alarm can be given in time to reduce the impact caused by liquid leakage.

[0094] Based on the same inventive concept, on the basis of the automatic titration and cleaning device for abrasive liquid concentration given in each of the foregoing examples, the present application provides an on-line abrasive liquid concentration meter, which can perform on-line titration on the abrasive liquid and can automatically complete the titration and cleaning processes with high precision and high efficiency, meeting the requirements of multiple and continuous on-line titrations.

[0095] An abrasive liquid concentration meter provided by the present application includes:

[0096] The automatic titration and cleaning device for abrasive liquid concentration as described in any one of the present application, which is used for automatic titration and cleaning;

[0097] A titration reagent kit, which is used to store titration reagents;

[0098] A cleaning liquid box, which is used to store chemical cleaning liquid.

[0099] In some examples, the abrasive liquid concentration meter further includes: a liquid level sensor, which is used to sense the liquid level of the container; wherein, the liquid level sensor includes a non-contact optical liquid level sensor and / or an electronic liquid level sensor; and / or, the abrasive liquid concentration meter further includes: a liquid leakage sensor, which is used to detect liquid leakage around the container; wherein, the liquid leakage sensor includes a non-contact optical leakage sensor and / or an electronic leakage sensor.

[0100] In some examples, the electronic liquid level sensor includes a capacitance level sensor; and / or, the optical liquid level sensor includes an optical fiber level sensor; and / or, the optical leakage sensor is a sensor made of PFA material; and / or, the electronic leakage sensor is a sensor made of PE material.

[0101] In this specification, the same or similar parts between each embodiment can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can refer to the partial description of the foregoing embodiments.

[0102] As described above, it is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An automatic titration and cleaning device for the concentration of grinding fluid, characterized in that, Comprising: A container, a first three-way valve, a second three-way valve, a third three-way valve, a three-way connector, a six-way valve, a first syringe pump, a second syringe pump, a sampling loop, and a drain valve; The inlet of the first three-way valve is connected to a pure water pipeline, the first outlet of the first three-way valve is connected to the first port of the three-way connector, and the second outlet of the first three-way valve is connected to the fourth port of the six-way valve; The inlet of the second three-way valve is connected to a grinding fluid sample pipeline, the first outlet of the second three-way valve is connected to the second port of the three-way connector, and the second outlet of the second three-way valve is connected to the inlet of the third three-way valve; The first outlet of the third three-way valve is connected to the first port of the six-way valve, and the second outlet of the third three-way valve is connected to the second inlet of the first syringe pump; The third port of the three-way connector is connected to the nozzle interface of the container; The first inlet of the first syringe pump is connected to a titrant pipeline, and the first outlet of the first syringe pump is connected to the first titrant inlet of the container; Each port of the six-way valve is further arranged as follows: the second port is connected to the drain valve, the third port and the fifth port are respectively connected to the two ends of the sampling loop, and the fifth port is connected to the grinding fluid inlet of the container; The first drain port of the container is connected to the drain valve; The inlet of the second syringe pump is connected to a chemical cleaning solution pipeline, and the outlet of the second syringe pump is connected to the chemical cleaning port of the container.

2. The automatic titration and cleaning device for the grinding fluid concentration according to claim 1, wherein The titrant includes a Ceric solution, and the chemical cleaning solution includes NaOH.

3. The automatic titration and cleaning device for polishing liquid concentration according to claim 1, characterized in that, The first three-way valve, the second three-way valve, and the third three-way valve are all end-cap type three-way valves; And / or, the second three-way valve and the third three-way valve are both three-way valves with reverse-mounted stop valves; And / or, the device further includes: a fourth valve, wherein the bottom drain port of the container is connected to the drain valve through the fourth valve; And / or, the overflow drain port of the container is connected to the drain valve; And / or, the first syringe pump is a micro syringe pump, wherein the control accuracy of the minimum injection volume of the micro syringe pump is greater than or equal to 0.01 ml; And / or, the second outlet of the first syringe pump is connected to one port of the third three-way valve.

4. The automatic titration and cleaning device for the grinding fluid concentration according to claim 1, characterized in that, The drain valve is a piston-type discharge valve, and the drain valve is placed vertically for vertical drainage; And / or, the nozzle of the container is a rotary nozzle; And / or, the stirrer of the container is a stirrer with adjustable stirring speed, and the material of the stirring rod is PTFE.

5. An automatic titration and cleaning method for the concentration of a grinding fluid, characterized in that, Applied to the automatic titration and cleaning device for grinding fluid concentration as described in any one of claims 1-4, the method includes: Using ultrapure water to perform internal cleaning of the pipelines and the container in the device before titration testing, and discharging the cleaning solution through the drain valve; Injecting a grinding fluid sample, and the sampling loop completes the sampling and capture of the sample; Injecting ultrapure water to inject the sample captured by the sampling loop into the container; Using the first syringe pump to inject a titrant into the container to enable the titrant to react with the sample in the container; After the titration test, using ultrapure water to perform internal cleaning of the pipelines and the container in the device before titration testing, and using the second syringe pump to inject a chemical cleaning solution to carry out chemical cleaning, and discharging the cleaning solution through the drain valve.

6. The automatic titration and cleaning method of the abrasive liquid concentration according to claim 5, characterized in that, The automatic titration and cleaning method for grinding fluid concentration further includes: Before titration cleaning, first check the status of each valve and complete the initialization settings of the syringe pump; And / or, after chemical cleaning, ultra-pure water is injected into the container, and the initialization settings of the injection pump are completed, so that the device is in the idle state to wait for the next round of titration tests.

7. The automatic titration and cleaning method for the lapping fluid concentration according to claim 5, characterized in that The automatic titration and cleaning method for the abrasive slurry concentration further includes: Monitoring is performed using a non-contact optical liquid level sensor and / or an electronic liquid level sensor; And / or, leakage monitoring is performed using a non-contact optical leakage sensor and / or an electronic leakage sensor.

8. A grinding fluid concentration meter, characterized in that, It includes: An automatic titration and cleaning device for abrasive slurry concentration as described in any one of claims 1-4, for automatic titration and cleaning; A titration kit for storing titration reagents; A cleaning solution cartridge for storing chemical cleaning solutions.

9. The abrasive suspension concentration meter according to claim 8, wherein, The abrasive slurry concentration meter further includes: a liquid level sensor for sensing the liquid level of the container; wherein, the liquid level sensor includes a non-contact optical liquid level sensor and / or an electronic liquid level sensor; And / or, the abrasive slurry concentration meter further includes: a liquid leakage sensor for detecting liquid leakage around the container; wherein, the liquid leakage sensor includes a non-contact optical leakage sensor and / or an electronic leakage sensor.

10. The abrasive liquid concentration meter according to claim 9, characterized in that, The electronic liquid level sensor includes a capacitance level sensor; and / or, the optical liquid level sensor includes an optical fiber level sensor; and / or, the optical leakage sensor is a sensor made of PFA material; and / or, the electronic leakage sensor is a sensor made of PE material.

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