Photovoltaic silicon wafer cleaning equipment

Abstract

The invention discloses photovoltaic silicon wafer cleaning equipment which comprises a cleaning and separating mechanism which at least comprises a cleaning tank, a negative pressure separating unit arranged in the cleaning tank, and a cleaning and conveying unit used for receiving and conveying photovoltaic silicon wafers separated by the negative pressure separating unit; the receiving and transferring mechanism can grab the empty flower basket to the tail end of the cleaning and conveying unit to receive the photovoltaic silicon wafer and move the full-load flower basket out of the tail end of the cleaning and conveying unit; the feeding mechanism is provided with a first feeding unit and a second feeding unit which are located on the two sides of the bearing and transferring mechanism respectively, and the first feeding unit and the second feeding unit can turn over the empty flower baskets from the horizontal state to the vertical state; the discharging mechanism can turn over the flower baskets in the vertical state conveyed by the receiving and transferring mechanism to be in the horizontal state and grab, carry and discharge the flower baskets; the problems that traditional photovoltaic silicon wafer cleaning and separating equipment is low in photovoltaic silicon wafer cleaning and separating efficiency, and the surfaces of photovoltaic silicon wafers are prone to being damaged by friction can be solved.

Description

Technical Field

[0001] The present invention relates to the field of photovoltaic silicon wafers, and particularly to a cleaning device for photovoltaic silicon wafers. Background Art

[0002] Under the background of the rapid development of the photovoltaic industry, the cleaning process of photovoltaic silicon wafers, as a key link in the manufacturing of solar cells, directly affects the quality and finished product efficiency of subsequent processes such as texturing and diffusion. Traditional photovoltaic silicon wafer cleaning devices mostly rely on manual or robotic manipulators for loading and unloading photovoltaic silicon wafers. There are problems such as low efficiency in loading and unloading photovoltaic silicon wafers, easy frictional damage to the surface of photovoltaic silicon wafers, and difficulty in separating and collecting stacked photovoltaic silicon wafers into single pieces during the cleaning of photovoltaic silicon wafers, which affects the cleaning effect of photovoltaic silicon wafers. Summary of the Invention

[0003] To overcome the above disadvantages, the purpose of the present invention is to provide a cleaning device for photovoltaic silicon wafers.

[0004] To achieve the above object, the technical solutions adopted by the present invention include: a cleaning and separating mechanism, at least including a cleaning tank, a negative pressure separating unit disposed in the cleaning tank, and a cleaning and conveying unit for receiving and conveying the photovoltaic silicon wafers separated by the negative pressure separating unit; a receiving and transferring mechanism configured at the end of the cleaning and conveying unit, capable of grasping an empty flower basket to the end of the cleaning and conveying unit to receive photovoltaic silicon wafers, and moving the full flower basket out of the end of the cleaning and conveying unit; a loading mechanism having a first loading unit and a second loading unit respectively located on both sides of the receiving and transferring mechanism, both the first loading unit and the second loading unit being capable of flipping an empty flower basket from a horizontal state to a vertical state; an unloading mechanism disposed on the side of the receiving and transferring mechanism, the unloading mechanism being capable of flipping the vertical flower basket conveyed by the receiving and transferring mechanism to a horizontal state and grasping and transporting it for unloading.

[0005] In the preferred technical solution of the above photovoltaic silicon wafer cleaning device, the negative pressure separating unit includes a storage rack disposed in the cleaning tank, a negative pressure generating device, and a separating device. Among them, the storage rack has a storage cavity for accommodating stacked photovoltaic silicon wafers, and a discharge port communicating with the storage cavity is provided on the side of the storage rack. The negative pressure generating device is at least partially disposed above the storage cavity inside the storage rack and can extract the liquid above the photovoltaic silicon wafers in the storage cavity to form a negative pressure adsorption area. The separating device at least includes a first spray head assembly disposed at the discharge port of the storage rack, and the first spray head assembly can output fluid in a directional manner towards the storage cavity through the discharge port to generate a separation effect between adjacent photovoltaic silicon wafers.

[0006] In the preferred technical solution of the above-mentioned photovoltaic silicon wafer cleaning equipment, the cleaning and conveying unit includes a conveyor belt assembly arranged in the cleaning tank, and the two ends of the conveyor belt assembly are respectively connected to the discharge port of the storage rack and the receiving and transferring mechanism. The conveyor belt assembly can clean the photovoltaic silicon wafers separated by the negative pressure separation unit and convey them toward the receiving and transferring mechanism.

[0007] In the preferred technical solution of the above-mentioned photovoltaic silicon wafer cleaning equipment, the side of the negative pressure generating device is configured with an auxiliary guide wheel driven by the conveyor belt assembly, and the auxiliary guide wheel at least partially extends out of the lower surface of the negative pressure generating device.

[0008] In the preferred technical solution of the above-mentioned photovoltaic silicon wafer cleaning equipment, the receiving and transferring mechanism includes at least a gantry, a lifting unit vertically arranged on the gantry and controlling the vertical movement of the flower basket, and a grabbing unit laterally arranged on the top of the gantry and used to grab and circulate empty flower baskets or fully loaded flower baskets.

[0009] In the preferred technical solution of the above photovoltaic silicon wafer cleaning equipment, the lifting unit includes a first linear module vertically arranged on the gantry and a first clamping claw cylinder driven by the first linear module; The grabbing unit comprises a second linear module laterally arranged above the gantry, a first telescopic cylinder driven by the second linear module, and a first clamping structure controlled to rise and fall by the first telescopic cylinder.

[0010] In the preferred technical solution of the above-mentioned photovoltaic silicon wafer cleaning equipment, the first loading unit includes a first base frame, a first material rack rotatably arranged on the first base frame, a first driving device for driving the first material rack to flip 90° on the first base frame, and a pushing structure arranged on the side of the first base frame and used to push the empty flower basket laterally on the first base frame.

[0011] In the preferred technical solution of the above-mentioned photovoltaic silicon wafer cleaning equipment, the second loading unit includes a second base frame, a second material rack rotatably arranged on the second base frame, a second driving device for driving the second material rack to flip 90° on the second base frame, and a second clamping structure arranged on both sides of the second material rack.

[0012] In the preferred technical solution of the above-mentioned photovoltaic silicon wafer cleaning equipment, the unloading mechanism includes a reversing unit and a unloading unit. The reversing unit is used to receive the fully loaded flower basket in a vertical state grasped by the receiving and transferring unit, and can flip the flower basket from a vertical state by 90° to a horizontal state. The unloading unit is used to grasp the fully loaded flower basket in a horizontal state on the reversing unit.

[0013] In the preferred technical solution of the above photovoltaic silicon wafer cleaning device, the reversing unit includes a third base frame, a third material rack rotatably arranged on the third base frame, a third driving device for driving the third material rack to flip 90° on the third base frame, and a third clamping structure arranged on both sides of the third material rack; The unloading unit includes a conveying structure and a fourth clamping structure controlled to move by the conveying structure, wherein the fourth clamping structure includes a frame driven by the conveying structure, a second telescopic cylinder arranged on both sides of the frame, and a limit plate driven by the second telescopic cylinder to approach or move away from the side of the frame, and the bottom of the limit plate has a limit structure for clamping the flower basket support leg. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is the front view of the present invention; Figure 2 A top view of the present invention; Figure 3 It is a connection diagram of the cleaning and separation mechanism, the receiving and transferring mechanism, the loading structure and the unloading structure; Figure 4 It is the front view of the cleaning and separation mechanism, the receiving and transferring mechanism, the loading structure and the unloading structure; Figure 5 Main view for cleaning separation mechanism Figure 1 ; Figure 6 Main view for cleaning separation mechanism Figure 2 ; Figure 7 It is a connection diagram between the material storage rack and the negative pressure generating device; Figure 8 is a schematic diagram of a negative pressure generating device; Figure 9 is a schematic diagram of a lifting unit; Figure 10 is a schematic diagram of a grabbing unit; Figure 11 It is a front view of the first loading unit; Figure 12 It is a left view of the first loading unit; Figure 13 It is the front view of the second loading unit; Figure 14 It is the front view of the reversing unit; Figure 15 It is the main view of the blanking unit; Figure 16 It is the front view of the blanking unit; In the figure: Cleaning and separation mechanism 1, cleaning tank 11, negative pressure separation unit 12, storage rack 121, negative pressure generating device 122, separation device 123, cleaning and conveying unit 13, conveyor belt assembly 131, second nozzle assembly 132, auxiliary guide wheel 14; The transfer mechanism 2, the gantry 21, the lifting unit 22, the first linear module 221, the first clamping cylinder 222, the grabbing unit 23, the second linear module 231, the first telescopic cylinder 232, and the first clamping structure 233 are received; The feeding mechanism 3, the first feeding unit 31, the first base frame 311, the first material rack 312, the first driving device 313, the pushing structure 314, the second feeding unit 32, the second base frame 321, the second material rack 322, the second driving device 323, and the second clamping structure 324; The unloading mechanism 4, the reversing unit 41, the third base frame 411, the third material frame 412, the third driving device 413, the third clamping structure 414, the unloading unit 42, the frame 421, the second telescopic cylinder 422, the limiting plate 423, and the limiting structure 424. DETAILED DESCRIPTION

[0015] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0016] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0017] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0018] like Figures 1 to 16As shown in the figure, the photovoltaic silicon wafer cleaning equipment of the present invention includes: a cleaning and separating mechanism 1, which at least includes a cleaning tank 11 and a negative pressure separating unit 12 arranged in the cleaning tank 11, and a cleaning and conveying unit 13 for receiving and conveying the photovoltaic silicon wafers separated by the negative pressure separating unit 12; a receiving and transferring mechanism 2, which is configured at the end of the cleaning and conveying unit 13, and can grab an empty flower basket to the end of the cleaning and conveying unit 13 to receive the photovoltaic silicon wafers, and move the full flower basket out of the end of the cleaning and conveying unit 13; a feeding mechanism 3, which has a first feeding unit 31 and a second feeding unit 32 respectively located on both sides of the receiving and transferring mechanism 2, and both the first feeding unit 31 and the second feeding unit 32 can turn the empty flower basket from a horizontal state to a vertical state; a discharging mechanism 4, which is arranged on the side of the receiving and transferring mechanism 2, and the discharging mechanism 4 can turn the vertical flower basket conveyed by the receiving and transferring mechanism 2 to a horizontal state and grab and carry it for discharging.

[0019] See Figures 1 to 4 , the cleaning and separating mechanism 1 at least includes a cleaning tank 11 and a negative pressure separating unit 12 and a cleaning and conveying unit 13 located therein. The cleaning tank 11 is filled with flowing water for cleaning photovoltaic silicon wafers; the receiving and transferring mechanism 2 is configured at the end of the cleaning and conveying unit 13. The receiving and transferring mechanism 2 can grab and carry an empty flower basket to the end of the cleaning and conveying unit 13 to receive the cleaned photovoltaic silicon wafers conveyed by the cleaning and conveying unit 13, or move the photovoltaic silicon wafers filled with photovoltaic silicon wafers at the end of the cleaning and conveying unit 13 away for discharging; the feeding mechanism 3 includes a first feeding unit 31 and a second feeding unit 32. The first feeding unit 31 and the second feeding unit 32 are respectively located on both sides of the receiving and transferring mechanism 2, and both can convey flower baskets to the receiving and transferring mechanism 2. In addition, the first feeding unit 31 and the second feeding unit 32 can turn the horizontally conveyed empty flower basket 90° to a vertical state to facilitate the receiving and transferring mechanism 2 to grab and carry the empty flower basket; the discharging mechanism 4 is arranged on the side of the receiving and transferring mechanism 2, can receive the vertically full flower basket conveyed by the receiving and transferring mechanism 2, and can turn the full flower basket to a horizontal state to facilitate grabbing and discharging.

[0020] Specifically, when cleaning and discharging photovoltaic silicon wafers, first use the receiving and transferring mechanism 2 to move the empty flower basket at the first feeding unit 31 or the second feeding unit 32 to the end of the cleaning and conveying unit 13, and then control the negative pressure separating unit 12 to separate the stacked photovoltaic silicon wafers. The cleaning and conveying unit 13 can convey and clean the photovoltaic silicon wafers separated by the negative pressure separating unit 12. The cleaned photovoltaic silicon wafers are conveyed by the cleaning and conveying unit 13 into the flower basket clamped by the receiving and transferring mechanism 2. When the flower basket is filled with photovoltaic silicon wafers, use the receiving and transferring mechanism 2 to move the full flower basket to the discharging mechanism 4, and use the discharging mechanism 4 to discharge the full flower basket, realizing the automatic cleaning and discharging of photovoltaic silicon wafers, with the characteristics of high automation and high cleaning efficiency of photovoltaic silicon wafers.

[0021] In one or more embodiments, the negative pressure separation unit 12 includes a storage rack 121, a negative pressure generating device 122 and a separation device 123 arranged in the cleaning tank 11, wherein the storage rack 121 has a storage cavity for accommodating stacked photovoltaic silicon wafers, and a discharge port connected to the storage cavity is opened on the side of the storage rack 121. The negative pressure generating device 122 is at least partially arranged above the inside of the storage cavity, and can extract liquid from the storage cavity above the photovoltaic silicon wafer to form a negative pressure adsorption area. The separation device 123 includes at least a first nozzle assembly arranged at the discharge port of the storage rack 121, and the first nozzle assembly can output fluid in a directional manner toward the storage cavity through the discharge port to produce a separation effect between adjacent photovoltaic silicon wafers.

[0022] See also Figures 1 to 8 The negative pressure generating device 122 has a cavity inside, a plurality of through holes are provided at the bottom of the negative pressure generating device 122, and a negative pressure port is provided at the top, the negative pressure port is connected to an external circulation pump, and the water flow inside the cleaning tank 11 is sucked into the cavity through the through holes by the circulation pump, and then discharged through the negative pressure port, so that a negative pressure adsorption area is formed inside the storage cavity of the storage rack 121, thereby adsorbing the top photovoltaic silicon wafer stacked in the storage cavity; the first nozzle assembly is composed of a plurality of nozzles connected to the pump body, and the first nozzle assembly can spray water flow in a directional manner toward the storage cavity. Under the impact of the water flow, the adjacent photovoltaic silicon wafers They will be separated from each other, and with the help of the negative pressure adsorption area to adsorb the top photovoltaic silicon wafer in the storage chamber, and the cleaning and conveying unit 13 to receive and convey the photovoltaic silicon wafer, the photovoltaic silicon wafers stacked in the storage chamber can be separated and conveyed in turn, and in the process of the cleaning and conveying unit 13 conveying the photovoltaic silicon wafers, with the help of the water flow in the cleaning tank 11, the photovoltaic silicon wafers can be cleaned, which ensures that the application can automatically separate the photovoltaic silicon wafers while realizing the cleaning of the photovoltaic silicon wafers, and the whole process is automated, thereby improving the cleaning and conveying efficiency of the photovoltaic silicon wafers.

[0023] In one or more embodiments, the cleaning and conveying unit 13 includes a conveyor belt assembly 131 arranged in the cleaning tank 11, and the two ends of the conveyor belt assembly 131 are respectively connected to the discharge port of the storage rack 121 and the receiving and transferring mechanism 2, and the conveyor belt assembly 131 can clean the photovoltaic silicon wafers separated by the negative pressure separation unit 12 and convey them toward the receiving and transferring mechanism 2; the side of the negative pressure generating device 122 is configured with an auxiliary guide wheel 14 driven by the conveyor belt assembly 131, and the auxiliary guide wheel 14 at least partially extends out of the lower surface of the negative pressure generating device 122.

[0024] See also Figures 5 to 8The conveyor belt assembly 131 at least includes a frame, a conveyor belt, a pulley and a motor module arranged on the frame; one end of the conveyor belt extends to the discharge port of the storage rack 121, and the other end extends to the receiving and transferring mechanism 2. The auxiliary guide wheel 14 arranged on the side of the negative pressure generating device 122 is connected to the pulley through a belt. When the pulley rotates, the auxiliary guide wheel 14 rotates synchronously with the pulley, so that the photovoltaic silicon wafer attracted by the negative pressure of the negative pressure generating device 122 can be transported by the auxiliary guide wheel 14 and enter the top of the conveyor belt assembly 131, and be transported by the conveyor belt assembly 131 to the empty flower basket controlled by the receiving and transferring mechanism 2.

[0025] See also Figure 5 , Figure 6 The cleaning and conveying unit 13 also includes a second nozzle assembly 132 configured on the frame. The second nozzle assembly 132 is composed of a plurality of high-pressure nozzles and a high-pressure water pump. The second nozzle assembly 132 can spray high-pressure water toward the photovoltaic silicon wafers conveyed by the conveyor belt to rinse the photovoltaic silicon wafers, thereby further improving the cleaning effect of the present application on the photovoltaic silicon wafers.

[0026] In one or more embodiments, the receiving and transferring mechanism 2 at least includes a gantry 21, a lifting unit 22 vertically arranged on the gantry 21 and controlling the vertical movement of the flower basket, and a grabbing unit 23 horizontally arranged on the top of the gantry 21 and used to grab and circulate empty flower baskets or fully loaded flower baskets; the lifting unit 22 includes a first linear module 221 vertically arranged on the gantry 21 and a first clamping cylinder 222 driven by the first linear module 221; the grabbing unit 23 includes a second linear module 231 horizontally arranged above the gantry 21, a first telescopic cylinder 232 driven by the second linear module 231, and a first clamping structure 233 controlled to rise and fall by the first telescopic cylinder 232.

[0027] See also Figure 10 The first clamping structure 233 at least includes a first base plate installed on the extended shaft end of the first telescopic cylinder 232, a first clamping cylinder arranged on the first base plate, and a limit plate 423 controlled by the first clamping cylinder.

[0028] See also Figure 2 , Figure 3 , Figure 9 , Figure 10, when loading and unloading the photovoltaic wafers that have been cleaned by the cleaning and separating mechanism 1, first, the second linear module 231 is used to control the first telescopic cylinder 232 and the first clamping structure 233 to move to the first loading unit 31 or the second loading unit 32. Then, the first telescopic cylinder 232 is used to control the first clamping structure 233 to move downward. Next, two groups of first clamping cylinders are used to control the limiting plates 423 to move closer to each other to clamp the empty flower basket. After that, the second linear module 231 is used to control the first clamping structure 233 and the empty flower basket to move to the lifting unit 22. The first jaw cylinder 222 is used to clamp and fix the empty flower basket, and the first linear module 221 is used to control the empty flower basket to move up or down to receive the photovoltaic wafers conveyed by the conveyor belt assembly 131. When the flower basket is full, the first clamping structure 233 is used again to clamp the full flower basket, and the first jaw cylinder 222 releases the clamping of the full flower basket. The second linear module 231 transports the full flower basket to the blanking mechanism 4 for flipping and blanking. It has the characteristics of high automation, simple operation, and high efficiency of flower basket loading and unloading, and has practicality.

[0029] In one or more embodiments, the first loading unit 31 includes a first base frame 311, a first material rack 312 rotatably arranged on the first base frame 311, a first driving device 313 for driving the first material rack 312 to flip 90° on the first base frame 311, and a pushing structure 314 arranged on the side of the first base frame 311 and used for laterally pushing the empty flower basket on the first base frame 311; the second loading unit 32 includes a second base frame 321, a second material rack 322 rotatably arranged on the second base frame 321, a second driving device 323 for driving the second material rack 322 to flip 90° on the second base frame 321, and second clamping structures 324 arranged on both sides of the second material rack 322.

[0030] See Figure 3 , Figure 4 , Figures 11 to 13, the first driving device 313 can be a servo motor or a cylinder rotatably mounted on the first base 311, and the protruding shaft end of the cylinder is rotatably mounted on the first rack 312; the pushing structure 314 can be a push plate controlled by a cylinder or a push plate controlled by a linear module. The pushing structure 314 can push the empty flower basket on the first base 311 to the other side of the first base 311, so that the first base 311 can carry two empty flower baskets at the same time, thereby improving the feeding efficiency of the first feeding unit 31 for the empty flower basket. Specifically, when the first feeding unit 31 feeds the empty flower basket, the external conveyor line conveys the empty flower basket in a horizontal state to the first rack 312 in a horizontal state, and the pushing structure 314 pushes the empty flower basket towards the other side of the first rack 312. The conveyor line continues to convey the empty flower basket to the first rack 312, so that there are two groups of empty flower baskets on the first rack 312. Thereafter, the first driving device 313 controls the first rack 312 to rotate by 90°, so that the first rack 312 is turned from a horizontal state to a vertical state, and then the empty flower basket is in a vertical state, which is convenient for the grasping unit 23 to grasp the empty flower basket. And by setting the first rack 312 to flip two empty flower baskets at a time, the feeding efficiency of the present application for the empty flower basket can be improved.

[0031] See Figure 13 , the second driving device 323 can be a servo motor or a cylinder rotatably mounted on the second base 321, and the protruding shaft end of the cylinder is rotatably mounted on the second rack 322; the second clamping structure 324 can be a jaw cylinder. When the second feeding unit 32 feeds the empty flower basket, first use the second clamping structure 324 to clamp the side of the empty flower basket on the second rack 322, and then use the second driving device 323 to control the second rack 322 to rotate by 90°, so that the second rack 322 is turned from a horizontal state to a vertical state for the grasping unit 23 to grasp the empty flower basket.

[0032] In one or more embodiments, the unloading mechanism 4 includes a reversing unit 41 and an unloading unit 42. The reversing unit 41 is used to receive the vertically loaded flower basket grasped by the transfer unit and can flip the flower basket from the vertical state to the horizontal state by 90 degrees. The unloading unit 42 is used to grasp the horizontally loaded flower basket on the reversing unit 41. The reversing unit 41 includes a third base frame 411, a third material frame 412 rotatably arranged on the third base frame 411, and a third material frame 412 for driving the third material frame 412 to rotate on the third base frame 411. A third driving device 413 that can be flipped at 0°, and a third clamping structure 414 that is arranged on both sides of the third material rack 412; the unloading unit 42 includes a conveying structure and a fourth clamping structure that is controlled to move by the conveying structure, wherein the fourth clamping structure includes a frame 421 driven by the conveying structure, a second telescopic cylinder 422 that is arranged on both sides of the frame 421, and a limit plate 423 that is driven by the second telescopic cylinder 422 to approach or move away from the side of the frame 421, and the bottom of the limit plate 423 has a limit structure 424 that clamps the flower basket support foot.

[0033] See also Figure 14 The third driving device 413 can be a servo motor or a cylinder rotatably mounted on the third base frame 411, and the extended shaft end of the cylinder is rotatably mounted on the third material rack 412; the third clamping structure 414 can be a clamping cylinder arranged on both sides of the third material rack 412; the handling structure can be a three-axis linear module or a manipulator, and there is no specific limitation.

[0034] See also Figures 2 to 4 , Figures 14 to 16 After the flower basket clamped by the lifting unit 22 is fully loaded, the grabbing unit 23 clamps and transports it to the third base frame 411, and then uses the third driving device 413 to control the third material frame 412 to flip to a vertical state and uses the third clamping structure 414 to clamp and fix the flower basket on the third material frame 412, and then uses the third driving device 413 to control the third material frame 412 to reverse 90 degrees, so that the vertical state The flower basket is flipped to a horizontal state. After that, the conveying structure controls the fourth clamping structure to move to just above the flower basket in the horizontal state, and makes the limiting plate 423 located at the sides of the two ends of the flower basket, and then uses the second telescopic cylinder 422 to control the limiting plate 423 to move toward the two ends of the flower basket, so that the limiting structure 424 of the limiting plate 423 can limit the support legs of the flower basket, and uses the conveying structure to transport the fully loaded flower basket clamped by the fourth clamping structure to a predetermined unloading position. It has the characteristics of simple structure, high degree of automation, and practicality.

[0035] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A photovoltaic silicon wafer cleaning device, characterized in that, Including: A cleaning and separating mechanism, at least including a cleaning tank, a negative pressure separating unit disposed in the cleaning tank, and a cleaning and conveying unit for receiving and conveying the photovoltaic wafers separated by the negative pressure separating unit; A receiving and transferring mechanism, configured at the end of the cleaning and conveying unit, capable of grasping an empty flower basket to the end of the cleaning and conveying unit to receive photovoltaic wafers, and moving the full flower basket out of the end of the cleaning and conveying unit; A loading mechanism, having a first loading unit and a second loading unit respectively located on both sides of the receiving and transferring mechanism, and both the first loading unit and the second loading unit can flip an empty flower basket from a horizontal state to a vertical state; An unloading mechanism, disposed at the side of the receiving and transferring mechanism, and the unloading mechanism can flip the flower basket in the vertical state conveyed by the receiving and transferring mechanism to a horizontal state and grasp and carry out unloading.

2. The photovoltaic silicon wafer cleaning equipment according to claim 1, wherein: The negative pressure separating unit includes a storage rack disposed in the cleaning tank, a negative pressure generating device, and a separating device. Among them, the storage rack has a storage cavity for accommodating stacked photovoltaic wafers, and a discharge port communicating with the storage cavity is opened on the side of the storage rack. The negative pressure generating device is at least partially disposed above the storage cavity inside, and can extract the liquid above the photovoltaic wafers in the storage cavity to form a negative pressure adsorption area. The separating device at least includes a first nozzle assembly disposed at the discharge port of the storage rack, and the first nozzle assembly can output fluid towards the inside of the storage cavity through the discharge port to generate a separation effect between adjacent photovoltaic wafers.

3. The photovoltaic silicon wafer cleaning equipment according to claim 2, characterized in that: The cleaning and conveying unit includes a conveyor belt assembly disposed in the cleaning tank. The two ends of the conveyor belt assembly are respectively connected to the discharge port of the storage rack and the receiving and transferring mechanism, and the conveyor belt assembly can clean the photovoltaic wafers separated by the negative pressure separating unit and convey them towards the receiving and transferring mechanism.

4. The photovoltaic silicon wafer cleaning device according to claim 3, wherein: An auxiliary guiding wheel driven by the conveyor belt assembly is disposed on the side of the negative pressure generating device, and at least part of the auxiliary guiding wheel extends out of the lower surface of the negative pressure generating device.

5. The photovoltaic silicon wafer cleaning device according to claim 1, wherein: The receiving and transferring mechanism at least includes a gantry, a lifting unit vertically disposed on the gantry and controlling the vertical movement of the flower basket, and a grasping unit horizontally configured on the top of the gantry and used for grasping and transferring an empty flower basket or a full flower basket.

6. The photovoltaic wafer cleaning equipment according to claim 5, wherein: The lifting unit includes a first linear module vertically disposed on the gantry and a first clamping cylinder driven by the first linear module; The grasping unit includes a second linear module horizontally disposed above the gantry, a first telescopic cylinder driven by the second linear module, and a first clamping structure controlled by the first telescopic cylinder to lift and lower.

7. The photovoltaic silicon wafer cleaning equipment according to claim 1, characterized in that: The first loading unit includes a first base frame, a first material rack rotatably disposed on the first base frame, a first driving device for driving the first material rack to flip 90° on the first base frame, and a pushing structure disposed on the side of the first base frame and used for laterally pushing an empty flower basket on the first base frame.

8. The photovoltaic silicon wafer cleaning device according to claim 1, wherein: The second loading unit includes a second base frame, a second material rack rotatably arranged on the second base frame, a second driving device for driving the second material rack to flip 90 degrees on the second base frame, and a second clamping structure arranged on both sides of the second material rack.

9. The photovoltaic silicon wafer cleaning equipment according to claim 1, characterized in that: The unloading mechanism includes a reversing unit and an unloading unit. The reversing unit is used to receive the fully loaded flower basket in a vertical state grasped by the receiving and transferring unit, and can flip the flower basket from a vertical state to a horizontal state by 90 degrees. The unloading unit is used to grasp the fully loaded flower basket in a horizontal state on the reversing unit.

10. The photovoltaic silicon wafer cleaning device according to claim 9, characterized in that: The reversing unit includes a third base frame, a third material rack rotatably arranged on the third base frame, a third driving device for driving the third material rack to flip 90 degrees on the third base frame, and a third clamping structure arranged on both sides of the third material rack; The unloading unit includes a conveying structure and a fourth clamping structure controlled to move by the conveying structure, wherein the fourth clamping structure includes a frame driven by the conveying structure, a second telescopic cylinder arranged on both sides of the frame, and a limit plate driven by the second telescopic cylinder to approach or move away from the side of the frame, and the bottom of the limit plate has a limit structure for clamping the flower basket support leg.

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